TWI830073B - Optical lens device and optical measuring method - Google Patents

Optical lens device and optical measuring method Download PDF

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Publication number
TWI830073B
TWI830073B TW110138667A TW110138667A TWI830073B TW I830073 B TWI830073 B TW I830073B TW 110138667 A TW110138667 A TW 110138667A TW 110138667 A TW110138667 A TW 110138667A TW I830073 B TWI830073 B TW I830073B
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sleeve
measured
light beam
group
lens
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TW110138667A
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TW202318095A (en
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黃國瑋
高宏達
康博誠
翁思淵
王友延
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致茂電子股份有限公司
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Priority to TW110138667A priority Critical patent/TWI830073B/en
Priority to US17/959,443 priority patent/US20230124939A1/en
Priority to JP2022166607A priority patent/JP2023061385A/en
Publication of TW202318095A publication Critical patent/TW202318095A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0252—Constructional arrangements for compensating for fluctuations caused by, e.g. temperature, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a photometer; Purge systems, cleaning devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0214—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0411—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M99/00—Subject matter not provided for in other groups of this subclass
    • G01M99/002—Thermal testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/022—Mountings, adjusting means, or light-tight connections, for optical elements for lenses lens and mount having complementary engagement means, e.g. screw/thread
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Microscoopes, Condenser (AREA)
  • Lenses (AREA)

Abstract

An optical lens device, which is adapted to receive a light beam emitted from an object under test, comprises a lens unit and a sleeve set. The lens unit includes a shell with a receiving side for receiving the light beam. The sleeve set is disposed to surround the receiving side of the shell, and defines an inner space for allowing the light beam to pass therethrough, such that the light beam into the receiving side of the shell is not affected by airflow disturbances. As a result of the sleeve set, airflow is prevented from entering the inner space in the sleeve set, and the temperature of the inner space in the sleeve set is maintained consistently. Since the light beam is not subjected to affection of the disturbances caused by the airflow, it is not deflected to thereby improve accuracy and repeatability when it is measured.

Description

光學鏡頭裝置及光學量測方法 Optical lens device and optical measurement method

本發明是有關於一種光學測量設備，特別是指一種光學鏡頭裝置及光學量測方法。 The present invention relates to an optical measurement equipment, and in particular to an optical lens device and an optical measurement method.

參閱圖1，一種現有的光學測量設備1，適用於量測一待測元件11所發出之一光束的光學特性，並包含一用於供該待測元件11設置的平台12、一用於供該待測元件11電連接的探針卡13，及一適用於接收該待測元件11之光束的物鏡14。如此，使用者可以透過調整該平台12以提供該待測元件11不同的環境溫度，並透過該探針卡13供該待測元件11電連接而發光，而能透過物鏡14接受該光束供一攝像件(圖未示)拍攝一照片，藉此，使用者可以透過分析該影像而了解該待測元件11的光束特性。 Referring to Figure 1, an existing optical measurement device 1 is suitable for measuring the optical characteristics of a light beam emitted by a component under test 11, and includes a platform 12 for setting the component under test 11, and a platform for setting the component under test 11. The probe card 13 is electrically connected to the device under test 11 , and an objective lens 14 is adapted to receive the light beam of the device under test 11 . In this way, the user can adjust the platform 12 to provide different ambient temperatures for the device under test 11, and provide the device under test 11 with electrical connection through the probe card 13 to emit light, and receive the light beam through the objective lens 14 for a The camera element (not shown) takes a photo, whereby the user can understand the beam characteristics of the device under test 11 by analyzing the image.

惟，在測量時，於某些測試方法(溫度迴圈測試、熱衝擊測試、高低溫儲存測試)下，該平台12會與該物鏡14產生溫差， 此時，由於該物鏡14與該待測元件11間為自由空間(free space)，前述溫差會因為熱對流現象而在該自由空間內產生氣流，使待測元件11所發出的光束，會因為氣流之氣體密度而產生的折射率變化，而不斷改變光路，造成該攝像件所拍攝之照片出現畸變或模糊的現象，亦稱為氣動光學現象(aero-optical effect)，進而導致量測時，量測重複性低且精準度低之缺點。 However, during measurement, under certain test methods (temperature loop test, thermal shock test, high and low temperature storage test), a temperature difference will occur between the platform 12 and the objective lens 14. At this time, since there is a free space between the objective lens 14 and the component under test 11, the temperature difference will generate airflow in the free space due to thermal convection, so that the light beam emitted by the component under test 11 will The change in refractive index caused by the gas density of the air flow continuously changes the optical path, causing distortion or blurring in the photos taken by the camera, also known as aero-optical effect, which in turn causes the measurement error. The disadvantages of low measurement repeatability and low accuracy.

因此，本發明之其中一目的，即在提供一種提升量測重複性與提高精準度的光學鏡頭裝置。 Therefore, one of the objectives of the present invention is to provide an optical lens device that improves measurement repeatability and accuracy.

於是，本發明光學鏡頭裝置在一些實施態樣中，適用於接收一待測物所發出之待測光束，並包含一鏡頭，及一套筒組。 Therefore, in some embodiments, the optical lens device of the present invention is suitable for receiving the light beam to be measured emitted by an object to be measured, and includes a lens and a sleeve set.

該鏡頭包括一外殼。該外殼具有一適用於接收該待測光束的入光側。 The lens includes a housing. The housing has a light incident side adapted to receive the light beam to be measured.

該套筒組環繞設置於該外殼的入光側並界定出適用於供該待測光束通過的一收光空間，以使該待測光束不受氣流擾動影響。 The sleeve group is arranged around the light incident side of the housing and defines a light collection space suitable for the light beam to be measured to pass through, so that the light beam to be measured is not affected by air flow disturbance.

在一些實施態樣中，該套筒組包括一環繞於該外殼的第一套筒，及一連接於該第一套筒的第二套筒，該第二套筒可相對於該第一套筒移動，藉以調整該套筒組的長度。 In some implementations, the sleeve set includes a first sleeve surrounding the housing, and a second sleeve connected to the first sleeve. The second sleeve can be relative to the first sleeve. The barrel moves to adjust the length of the sleeve group.

在一些實施態樣中，該套筒組的長度介於5mm~50mm。 In some implementations, the length of the sleeve set is between 5 mm and 50 mm.

在一些實施態樣中，該第一套筒具有一形成在鄰近於該第二套筒之一側的外凸緣，該第二套筒具有一形成在鄰近於該第一套筒之一側且用於靠抵於該外凸緣的內凸緣。 In some embodiments, the first sleeve has an outer flange formed on one side adjacent to the second sleeve, and the second sleeve has an outer flange formed on one side adjacent to the first sleeve. and for leaning against the inner flange of the outer flange.

在一些實施態樣中，該套筒組可拆卸地安裝於該鏡頭的外殼。 In some implementations, the sleeve set is detachably mounted on the housing of the lens.

在一些實施態樣中，還包含一固定組，該固定組用於圍繞並迫緊該套筒組，使該套筒組可拆卸地固定於該鏡頭。 In some embodiments, a fixing group is further included, the fixing group is used to surround and press the sleeve group so that the sleeve group can be detachably fixed to the lens.

在一些實施態樣中，該固定組包括二共同圍繞於該第一套筒的緊固件，及二連接該等緊固件的鎖固件，該等鎖固件與該等緊固件相配合使該第一套筒迫緊並固定於該鏡頭。 In some embodiments, the fixing group includes two fasteners surrounding the first sleeve and two locking parts connecting the fasteners. The locking parts cooperate with the fasteners to secure the first sleeve. The sleeve is tightened and secured to the lens.

在一些實施態樣中，該第一套筒還具有一形成在一外表面且該固定組嵌設的環槽。 In some embodiments, the first sleeve further has an annular groove formed on an outer surface and in which the fixing group is embedded.

在一些實施態樣中，該第一套筒還具有至少一缺槽，該固定組圍繞該至少一缺槽，以調整該第一套筒在被該固定組環繞之部分的內徑。 In some embodiments, the first sleeve further has at least one notch, and the fixing group surrounds the at least one notch to adjust the inner diameter of the first sleeve in the portion surrounded by the fixing group.

因此，本發明之另一目的，即在提供一種提升量測重複性與提高精準度的光學量測方法。 Therefore, another object of the present invention is to provide an optical measurement method that improves measurement repeatability and accuracy.

於是，本發明光學鏡頭裝置在一些實施態樣中，適用於 接收一待測物所發出之待測光束，並包含以下步驟。 Therefore, in some embodiments, the optical lens device of the present invention is suitable for Receive a beam to be measured emitted by an object to be measured and include the following steps.

(A)預備一用於發出待測光束的待測物、一鏡頭，及一環繞設置於該鏡頭之外殼的套筒組，該套筒組界定出一收光空間。 (A) Prepare an object to be measured for emitting a light beam to be measured, a lens, and a sleeve set surrounding the housing of the lens. The sleeve set defines a light collection space.

(B)該鏡頭接收自該收光空間通過的待測光束，該收光空間使該待測光束不受氣流擾動影響。 (B) The lens receives the light beam to be measured passing through the light collecting space, and the light collecting space prevents the light beam to be measured from being affected by air flow disturbance.

本發明至少具有以下功效：透過該套筒組使該待測光束不受氣流擾動影響，以防止氣流進入該收光空間，並使該收光空間內的溫度維持一致，藉此使該待測光束不會因氣流產生的擾動而偏折，藉此，達到提升量測精準度及重複性的功效。 The present invention at least has the following effects: through the sleeve group, the light beam to be measured is not affected by air flow disturbance, so as to prevent air flow from entering the light collecting space, and maintain the temperature in the light collecting space consistent, thereby making the light beam to be measured The beam will not be deflected by disturbances caused by airflow, thereby improving measurement accuracy and repeatability.

1:光學測量設備 1: Optical measurement equipment

11:待測元件 11: Component under test

12:平台 12:Platform

13:探針卡 13: Probe card

14:物鏡 14:Objective lens

2:鏡頭 2: Lens

21:外殼 21: Shell

211:入光側 211: light incident side

212:出光側 212: Light side

3:套筒組 3:Socket set

31:第一套筒 31:First sleeve

311:第一筒壁 311:First cylinder wall

312:外表面 312:Outer surface

313:第一端面 313: First end face

314:第二端面 314:Second end face

315:外凸緣 315:Outer flange

316:環槽 316: Ring groove

317:缺槽 317: missing slot

32:第二套筒 32:Second sleeve

321:第二筒壁 321:Second cylinder wall

322:第三端面 322:Third end face

323:第四端面 323:Fourth end face

324:內凸緣 324:Inner flange

30:收光空間 30: Lighting space

4:固定組 4: Fixed group

41:緊固件 41: Fasteners

42:鎖固件 42:Lock firmware

5:測量平台 5:Measurement platform

6:待測物 6:Object to be tested

7:電性探測單元 7: Electrical detection unit

本發明之其他的特徵及功效，將於參照圖式的實施方式中清楚地呈現，其中：圖1是現有的光學測量設備之一剖視示意圖；圖2是本發明光學鏡頭的一實施例的一立體組合圖；圖3是該實施例的一立體分解圖；圖4是沿圖2之線IV-IV所截取的不完整的剖視示意圖，說明該實施例應用於一種光學測量設備；圖5是類似於圖4的不完整的剖視示意圖，且該實施例的該第二套筒抵靠於一測量平台； 圖6是類似於圖5的不完整的剖視示意圖，說明該實施例應用於另一種光學測量設備；及圖7是沿圖5之線VII-VII所截取的剖視圖。 Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: Figure 1 is a schematic cross-sectional view of an existing optical measurement device; Figure 2 is an embodiment of an optical lens of the present invention. A three-dimensional assembled view; Figure 3 is a three-dimensional exploded view of this embodiment; Figure 4 is an incomplete cross-sectional schematic view taken along line IV-IV of Figure 2, illustrating that this embodiment is applied to an optical measurement device; Figure 5 is an incomplete cross-sectional schematic view similar to Figure 4, and the second sleeve of this embodiment is against a measurement platform; FIG. 6 is an incomplete cross-sectional schematic view similar to FIG. 5 , illustrating application of this embodiment to another optical measurement device; and FIG. 7 is a cross-sectional view taken along line VII-VII of FIG. 5 .

參閱圖2、圖3與圖4，本發明光學鏡頭裝置之一實施例適用於接收一設置於一測量平台5之待測物6所發出之待測光束，並包含一鏡頭2、一套筒組3，及一固定組4。 Referring to Figures 2, 3 and 4, one embodiment of the optical lens device of the present invention is suitable for receiving a light beam to be measured emitted by an object to be measured 6 disposed on a measurement platform 5, and includes a lens 2 and a sleeve. Group 3, and a fixed group 4.

該鏡頭2包括一外殼21。該外殼21具有一適用於接收該待測光束的入光側211，及一相反於該入光側211的出光側212。 The lens 2 includes a housing 21 . The housing 21 has a light incident side 211 adapted to receive the light beam to be measured, and a light exit side 212 opposite to the light incident side 211 .

該套筒組3環繞設置於該外殼21的入光側211並界定出適用於供該待測光束通過的一收光空間30，以使該待測光束不受氣流擾動影響。由於該收光空間30並非自由空間，可以減少因環境溫差(例如：該鏡頭2與該測量平台5的溫度差)所產生的氣流擾動現象，此外，由於該待測光束是通過該收光空間30內進入該入光側211，意即，即使該收光空間30外有氣流擾動，前述的氣流擾動也會因為該套筒組3的阻擋而無法進入該收光空間30。因此，該待測光束可以減少因氣流擾動所產生的光路變化，使每次該鏡頭2接收該待測光束的光路維持一致，藉此達到提升量測精準度及重複性的功效。 The sleeve set 3 is arranged around the light incident side 211 of the housing 21 and defines a light collection space 30 suitable for the light beam to be measured to pass through, so that the light beam to be measured is not affected by air flow disturbance. Since the light-collecting space 30 is not a free space, airflow disturbance caused by environmental temperature differences (for example, the temperature difference between the lens 2 and the measurement platform 5 ) can be reduced. In addition, since the light beam to be measured passes through the light-collecting space 30 to enter the light incident side 211 , which means that even if there is air flow disturbance outside the light receiving space 30 , the aforementioned air flow disturbance will not be able to enter the light receiving space 30 due to the obstruction of the sleeve group 3 . Therefore, the light beam to be measured can reduce changes in the optical path caused by air flow disturbance, so that the optical path of the light beam to be measured is maintained consistent each time the lens 2 receives it, thereby achieving the effect of improving measurement accuracy and repeatability.

具體來說，該套筒組3包括一可拆卸地固定於該外殼21的第一套筒31，及一連接於該第一套筒31的第二套筒32。 Specifically, the sleeve set 3 includes a first sleeve 31 detachably fixed on the housing 21 and a second sleeve 32 connected to the first sleeve 31 .

該第一套筒31具有一第一筒壁311、一外表面312、一鄰近於該鏡頭2的第一端面313、一相反於該第一端面313的第二端面314、一自該外表面312靠近該第二端面314處徑向往外凸伸的外凸緣315、一自該外表面312靠近該第一端面313處徑向內凹的環槽316，及四個形成於該第一筒壁311並自該第一端面313朝該第二端面314延伸且連通於該環槽316的缺槽317。 The first sleeve 31 has a first barrel wall 311, an outer surface 312, a first end surface 313 adjacent to the lens 2, a second end surface 314 opposite to the first end surface 313, and a first end surface 314 from the outer surface. 312 has an outer flange 315 protruding radially outward near the second end surface 314, an annular groove 316 radially inwardly concave from the outer surface 312 near the first end surface 313, and four formed on the first cylinder. The wall 311 extends from the first end surface 313 toward the second end surface 314 and is connected to the missing groove 317 of the annular groove 316 .

該第二套筒32可移動地套設於該第一套筒31外，並具有一第二筒壁321、一第三端面322、一相反於該第三端面322的第四端面323，及一自該第二筒壁321的內表面靠近該第三端面322處徑向凸伸的內凸緣324。該第二筒壁321的內徑大於該第一套筒31的外凸緣315的外徑，且該內凸緣324的內徑小於該外凸緣315的外徑並與該第一筒壁311的外徑相配合。藉由該內凸緣324的內徑小於該外凸緣315的外徑，可使該內凸緣324抵靠於該外凸緣315，以防止該第二套筒32脫離該第一套筒31。藉由該內凸緣324的內徑與該第一筒壁311的外徑相配合，使該內凸緣324可在該外凸緣315與該環槽316之間沿該第一筒壁311移動，以調整該套筒組3的長度。在本實施例中，該套筒組3的長度定義為該第一端面313與該第四端面323之間的距離，且該套筒組3的長度較佳介於5mm~50mm之 間。 The second sleeve 32 is movably mounted outside the first sleeve 31 and has a second sleeve wall 321, a third end surface 322, a fourth end surface 323 opposite to the third end surface 322, and An inner flange 324 protrudes radially from the inner surface of the second cylinder wall 321 close to the third end surface 322 . The inner diameter of the second cylinder wall 321 is larger than the outer diameter of the outer flange 315 of the first sleeve 31 , and the inner diameter of the inner flange 324 is smaller than the outer diameter of the outer flange 315 and is in contact with the first cylinder wall. The outer diameter of 311 matches. Because the inner diameter of the inner flange 324 is smaller than the outer diameter of the outer flange 315 , the inner flange 324 can be pressed against the outer flange 315 to prevent the second sleeve 32 from being separated from the first sleeve. 31. By matching the inner diameter of the inner flange 324 with the outer diameter of the first cylinder wall 311, the inner flange 324 can move along the first cylinder wall 311 between the outer flange 315 and the annular groove 316. Move to adjust the length of the sleeve set 3. In this embodiment, the length of the sleeve set 3 is defined as the distance between the first end face 313 and the fourth end face 323, and the length of the sleeve set 3 is preferably between 5 mm and 50 mm. between.

如圖4所示，當該第二套筒32的內凸緣324靠抵於該第一套筒31的外凸緣315時，該第二套筒32的第四端面323最遠離該第一套筒31的第一端面313，此時，該套筒組3的長度最長。 As shown in FIG. 4 , when the inner flange 324 of the second sleeve 32 abuts the outer flange 315 of the first sleeve 31 , the fourth end surface 323 of the second sleeve 32 is farthest away from the first sleeve 31 . The first end surface 313 of the sleeve 31, at this time, has the longest length of the sleeve group 3.

如圖5所示，該第二套筒32的第四端面323可靠抵於該測量平台5，使該內凸緣324離開該第一套筒31的外凸緣315並往靠近該第一端面313方向移動，而縮短該套筒組3的長度。故該套筒組3的長度能依據使用需求而調整。 As shown in FIG. 5 , the fourth end surface 323 of the second sleeve 32 can be pressed against the measurement platform 5 , so that the inner flange 324 moves away from the outer flange 315 of the first sleeve 31 and approaches the first end surface. 313 direction, thereby shortening the length of the sleeve group 3. Therefore, the length of the sleeve set 3 can be adjusted according to usage requirements.

具體而言，在本實施例所應用的一種光學測量設備中，該測量平台5具備點測、承載該待測物6、使該待測物6導電與加熱(或冷卻)該待測物6的功能。在進行光學量測時，使用者可以控制該鏡頭2上下移動，以找到最佳成像位置(例如：該待測光束的光腰位置(beam waist))。當該鏡頭2需要較靠近該待測物6時，可使該第二套筒32的第四端面323靠抵於該測量平台5，並縮短該套筒組3的長度。當該鏡頭2需要較遠離該待測物6時，往上移動該鏡頭2可以連動該第一套筒31，且該第二套筒32受重力作用可以不移動，直到該外凸緣315抵於該內凸緣324才能帶動該第二套筒32，如此即可增加該套筒組3的長度。換言之，藉由該第二套筒32可相對於該第一套筒31移動，使該套筒組3的長度可以被調整，能提供調整該鏡頭2與該待測物6之距離的彈性，以利於找到最佳成像位置，並確保 該待測光束能保持在該收光空間30內。為使該待測光束能保持在該收光空間30內，以避免氣流擾動的影響，在使用時，該第二套筒32的第四端面323與該測量平台5的距離以不大於30mm較佳。 Specifically, in an optical measurement device used in this embodiment, the measurement platform 5 is equipped with the functions of spot measurement, carrying the object 6 , making the object 6 conduct electricity, and heating (or cooling) the object 6 function. When performing optical measurement, the user can control the lens 2 to move up and down to find the best imaging position (for example, the beam waist position of the light beam to be measured). When the lens 2 needs to be closer to the object 6 , the fourth end surface 323 of the second sleeve 32 can be made to abut the measurement platform 5 and the length of the sleeve group 3 can be shortened. When the lens 2 needs to be farther away from the object 6, moving the lens 2 upward can link the first sleeve 31, and the second sleeve 32 does not move due to gravity until the outer flange 315 contacts Only the inner flange 324 can drive the second sleeve 32 , thus increasing the length of the sleeve set 3 . In other words, because the second sleeve 32 can move relative to the first sleeve 31, the length of the sleeve group 3 can be adjusted, providing flexibility to adjust the distance between the lens 2 and the object 6. to find the best imaging position and ensure The light beam to be measured can be maintained in the light collecting space 30 . In order to keep the light beam to be measured in the light collection space 30 and avoid the influence of air flow disturbance, when in use, the distance between the fourth end surface 323 of the second sleeve 32 and the measurement platform 5 is no more than 30 mm. good.

參閱圖6，值得說明的是，本實施例也可以應用於另一種光學測量設備，該光學測量設備除了該測量平台5外，還包含一電性探測單元7，其中，該測量平台5具備點測功能，至於承載該待測物6、使該待測物6導電與加熱(或冷卻)該待測物6的功能則是透過該電性探測單元7(例如：探針卡)提供。同樣地，在進行光學量測時，若要使該鏡頭2較靠近該待測物6時，可以藉由該第二套筒32的第四端面323靠抵於該電性探測單元7，使該第二套筒32往上移動而縮短該套筒組3的長度。 Referring to Figure 6, it is worth noting that this embodiment can also be applied to another optical measurement equipment. In addition to the measurement platform 5, the optical measurement equipment also includes an electrical detection unit 7, wherein the measurement platform 5 has a point The testing function, as for the functions of carrying the object under test 6, making the object under test 6 conduct electricity, and heating (or cooling) the object under test 6, is provided through the electrical detection unit 7 (for example, a probe card). Similarly, when performing optical measurement, if you want to bring the lens 2 closer to the object 6 , you can use the fourth end surface 323 of the second sleeve 32 to abut against the electrical detection unit 7 . The second sleeve 32 moves upward to shorten the length of the sleeve group 3 .

參閱圖3、圖4與圖7，該固定組4用於圍繞並迫緊該套筒組3，使該套筒組3可拆卸地固定於該鏡頭2。 Referring to FIG. 3 , FIG. 4 and FIG. 7 , the fixing group 4 is used to surround and press the sleeve group 3 so that the sleeve group 3 can be detachably fixed to the lens 2 .

該固定組4包括二共同圍繞於該第一套筒31的C形緊固件41，及二將該等緊固件41鎖接的鎖固件42。該等緊固件41嵌合於該第一套筒31的環槽316，且圍繞該等缺槽317。藉由該等缺槽317使該第一筒壁311具有縮小內徑的彈性。該等鎖固件42與該等緊固件41相配合使該第一筒壁311迫緊於該鏡頭2的外殼21，使該第一套筒31固定於該鏡頭2。如此，由於該第一套筒31設有該等缺槽317，使該等緊固件41嵌合於該第一套筒31的環槽316時，該 等緊固件41可以與該等鎖固件42相配合，而能輕易調整該第一套筒31在環槽316處的內徑，使該第一套筒31能穩定地連接於該鏡頭2之外殼21。 The fixing group 4 includes two C-shaped fasteners 41 that surround the first sleeve 31 together, and two locking parts 42 that lock the fasteners 41 together. The fasteners 41 are engaged in the annular grooves 316 of the first sleeve 31 and surround the missing grooves 317 . The first cylinder wall 311 has the elasticity to reduce the inner diameter through the notches 317 . The locking members 42 cooperate with the fasteners 41 to press the first barrel wall 311 against the housing 21 of the lens 2 so that the first sleeve 31 is fixed to the lens 2 . In this way, since the first sleeve 31 is provided with the missing grooves 317, when the fasteners 41 are fitted into the annular grooves 316 of the first sleeve 31, the The fasteners 41 can cooperate with the locking parts 42 to easily adjust the inner diameter of the first sleeve 31 at the annular groove 316 so that the first sleeve 31 can be stably connected to the housing of the lens 2 twenty one.

透過設置該固定組4，使用者可以根據不同的待測物6的待測光束特性或是不同的測試環境，而容易更換不同長度、不同伸縮範圍或不同內徑的該套筒組3。 By arranging the fixed set 4, the user can easily replace the sleeve set 3 with different lengths, different telescopic ranges or different inner diameters according to the beam characteristics to be measured of different objects 6 or different testing environments.

值得注意的是，在本實施例中，該等缺槽317的數量為四，且等角度地設置在該第一套筒31，在其他變化態樣中，該等缺槽317的數量也可以是非四的整數。 It is worth noting that in this embodiment, the number of the notches 317 is four, and they are arranged at equal angles on the first sleeve 31 . In other variations, the number of the notches 317 can also be four. Is an integer other than four.

本發明光學量測方法的一實施例，包含以下步驟101~步驟102。 An embodiment of the optical measurement method of the present invention includes the following steps 101 to 102.

步驟101：預備一用於發出待測光束的待測物6、一鏡頭2，及一環繞設置於該鏡頭2之外殼21的套筒組3。該套筒組3界定出一收光空間30。 Step 101: Prepare an object 6 for emitting a light beam to be measured, a lens 2, and a sleeve set 3 surrounding the housing 21 of the lens 2. The sleeve set 3 defines a light collecting space 30 .

在本實施例中，是透過前述的固定組4將該套筒組3環繞設置於該鏡頭組2。 In this embodiment, the sleeve group 3 is arranged around the lens group 2 through the aforementioned fixing group 4 .

步驟102：該鏡頭2接收自該收光空間30通過的該待測物6所發出之待測光束，該收光空間30使該待測光束不受氣流擾動影響。 Step 102: The lens 2 receives the light beam to be measured emitted by the object to be measured 6 passing through the light collection space 30. The light collection space 30 prevents the light beam to be measured from being affected by air flow disturbance.

更進一步的，該光學量測方法還包含步驟103：加熱或 冷卻該待測物6。 Furthermore, the optical measurement method also includes step 103: heating or Cool the object 6.

具體來說，是透過前述的該測量平台5或該電性探測單元7與該待測物6進行熱交換，以加熱或冷卻該待測物6，藉此對待測物6進行不同的測試，例如：熱迴圈測試、熱衝擊測試、高溫儲存測試、低溫儲存測試等測試方式，使用者可根據不同的測試方式，使該測量平台5或該電性探測單元7對該待測物6加熱或冷卻。 Specifically, the aforementioned measurement platform 5 or the electrical detection unit 7 conducts heat exchange with the object under test 6 to heat or cool the object under test 6, thereby performing different tests on the object under test 6. For example: thermal loop test, thermal shock test, high temperature storage test, low temperature storage test and other test methods. The user can make the measurement platform 5 or the electrical detection unit 7 heat the object 6 according to different test methods. or cool.

如此，透過設置該套筒組3使該待測光束不受氣流擾動影響，使得在加熱或冷卻該待測物6的過程中，該待測光束不會因氣流產生的擾動而偏折。 In this way, by arranging the sleeve group 3, the light beam to be measured is not affected by the disturbance of the air flow, so that during the process of heating or cooling the object to be measured 6, the light beam to be measured will not be deflected by the disturbance caused by the air flow.

綜上所述，本發明光學鏡頭裝置與該光學量測方法，由於透過設置該套筒組3使該待測光束不受氣流擾動影響，以防止氣流進入該收光空間30，並使該收光空間30內的溫度維持一致，藉此使該待測光束不會因氣流產生的擾動而偏折，故確實能達成本發明之提升量測精準度及重複性的目的。 To sum up, the optical lens device and the optical measurement method of the present invention prevent the light beam to be measured from being affected by air flow disturbance by arranging the sleeve group 3, thereby preventing the air flow from entering the light collecting space 30 and making the light collecting space 30. The temperature in the light space 30 remains consistent, so that the light beam to be measured will not be deflected by the disturbance caused by the air flow. Therefore, the purpose of improving measurement accuracy and repeatability of the present invention can indeed be achieved.

惟以上所述者，僅為本發明之實施例而已，當不能以此限定本發明實施之範圍，凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾，皆仍屬本發明專利涵蓋之範圍內。 However, the above are only examples of the present invention, and should not be used to limit the scope of the present invention. All simple equivalent changes and modifications made based on the patent scope of the present invention and the content of the patent specification are still within the scope of the present invention. Within the scope covered by the patent of this invention.

2:鏡頭 2: Lens

21:外殼 21: Shell

211:入光側 211: light incident side

212:出光側 212: Light side

3:套筒組 3:Socket set

31:第一套筒 31:First sleeve

311:第一筒壁 311:First cylinder wall

312:外表面 312:Outer surface

313:第一端面 313: First end face

314:第二端面 314:Second end face

315:外凸緣 315:Outer flange

316:環槽 316: Ring groove

32:第二套筒 32:Second sleeve

321:第二筒壁 321:Second cylinder wall

322:第三端面 322:Third end face

323:第四端面 323:Fourth end face

324:內凸緣 324:Inner flange

30:收光空間 30: Lighting space

4:固定組 4: Fixed group

41:緊固件 41: Fasteners

42:鎖固件 42:Lock firmware

5:測量平台 5:Measurement platform

6:待測物 6:Object to be tested

Claims (9)

一種光學鏡頭裝置，適用於接收一待測物所發出之待測光束，並包含：一鏡頭，包括一外殼，該外殼具有一適用於接收該待測光束的入光側；及一套筒組，環繞設置於該外殼的入光側並界定出適用於供該待測光束通過的一收光空間，以使該待測光束不受氣流擾動影響，且該套筒組包括一環繞於該外殼的第一套筒，及一連接於該第一套筒的第二套筒，該第二套筒可相對於該第一套筒移動，藉以調整該套筒組的長度。 An optical lens device is suitable for receiving a light beam to be measured emitted by an object to be measured, and includes: a lens including a housing having a light incident side suitable for receiving the light beam to be measured; and a sleeve set , is arranged around the light incident side of the housing and defines a light collection space suitable for the light beam to be measured to pass through, so that the light beam to be measured is not affected by air flow disturbance, and the sleeve group includes a sleeve surrounding the housing A first sleeve, and a second sleeve connected to the first sleeve, the second sleeve can move relative to the first sleeve, thereby adjusting the length of the sleeve set. 如請求項1所述的光學鏡頭裝置，其中，該套筒組的長度介於5mm~50mm。 The optical lens device as claimed in claim 1, wherein the length of the sleeve group is between 5 mm and 50 mm. 如請求項1所述的光學鏡頭裝置，其中，該第一套筒具有一形成在鄰近於該第二套筒之一側的外凸緣，該第二套筒具有一形成在鄰近於該第一套筒之一側且用於靠抵於該外凸緣的內凸緣。 The optical lens device of claim 1, wherein the first sleeve has an outer flange formed adjacent to one side of the second sleeve, and the second sleeve has an outer flange formed adjacent to the first sleeve. One side of the sleeve and an inner flange for abutting against the outer flange. 如請求項1所述的光學鏡頭裝置，其中，該套筒組可拆卸地安裝於該鏡頭的外殼。 The optical lens device as claimed in claim 1, wherein the sleeve set is detachably mounted on the housing of the lens. 如請求項4所述的光學鏡頭裝置，還包含一固定組，該固定組用於圍繞並迫緊該套筒組，使該套筒組可拆卸地固定於該鏡頭。 The optical lens device according to claim 4, further comprising a fixing group for surrounding and pressing the sleeve group so that the sleeve group is detachably fixed to the lens. 如請求項5所述的光學鏡頭裝置，其中，該固定組包括二共同圍繞於該第一套筒的緊固件，及二連接該等緊固件 的鎖固件，該等鎖固件與該等緊固件相配合使該第一套筒迫緊並固定於該鏡頭。 The optical lens device according to claim 5, wherein the fixing group includes two fasteners surrounding the first sleeve, and two fasteners connecting the first sleeve The locking parts cooperate with the fasteners to tighten and fix the first sleeve to the lens. 如請求項5所述的光學鏡頭裝置，其中，該第一套筒還具有一形成在一外表面且該固定組嵌設的環槽。 The optical lens device according to claim 5, wherein the first sleeve further has an annular groove formed on an outer surface and in which the fixing group is embedded. 如請求項5所述的光學鏡頭裝置，其中，該第一套筒還具有至少一缺槽，該固定組圍繞該至少一缺槽，以調整該第一套筒被該固定組環繞之部分的內徑。 The optical lens device as claimed in claim 5, wherein the first sleeve further has at least one notch, and the fixing group surrounds the at least one notch to adjust the portion of the first sleeve surrounded by the fixing group. inner diameter. 一種光學量測方法，包含以下步驟：(A)預備一用於發出待測光束的待測物、一鏡頭，及一環繞設置於該鏡頭之外殼的套筒組，該套筒組界定出一收光空間，並包括一環繞於該外殼的第一套筒，及一連接於該第一套筒的第二套筒，該第二套筒可相對於該第一套筒移動，藉以調整該套筒組的長度；及(B)該鏡頭接收自該收光空間通過的待測光束，該收光空間使該待測光束不受氣流擾動影響。 An optical measurement method includes the following steps: (A) Prepare an object to be measured for emitting a light beam to be measured, a lens, and a sleeve set surrounding the housing of the lens. The sleeve set defines a The light collecting space includes a first sleeve surrounding the housing and a second sleeve connected to the first sleeve. The second sleeve can move relative to the first sleeve to adjust the The length of the sleeve group; and (B) the lens receives the light beam to be measured passing through the light collection space, and the light collection space prevents the light beam to be measured from being affected by air flow disturbance.
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