TWI807443B - Electroless nickel plating bath - Google Patents

Electroless nickel plating bath Download PDF

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TWI807443B
TWI807443B TW110137502A TW110137502A TWI807443B TW I807443 B TWI807443 B TW I807443B TW 110137502 A TW110137502 A TW 110137502A TW 110137502 A TW110137502 A TW 110137502A TW I807443 B TWI807443 B TW I807443B
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electroless nickel
nickel plating
plating bath
nitro
film
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TW202208682A (en
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橋本大督
田邉克久
丸尾洋一
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日商上村工業股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/32Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
    • C23C18/34Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/187Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating means therefor, e.g. baths, apparatus

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemically Coating (AREA)

Abstract

本發明之課題為,提供製造可抑制鎳遺漏及圖型外析出,且具有優良耐蝕性及外觀之無電解鍍鎳被膜的無電解鍍鎳浴。 解決方法為,本發明之無電解鍍鎳浴的特徵為含有還原劑,與含有1個以上硝基之含硝基芳香族化合物。The object of the present invention is to provide an electroless nickel plating bath for producing an electroless nickel plating film that can suppress nickel dropout and out-of-pattern precipitation, and has excellent corrosion resistance and appearance. The solution is that the electroless nickel plating bath of the present invention is characterized by containing a reducing agent and a nitro-containing aromatic compound containing more than one nitro group.

Description

無電解鍍鎳浴Electroless nickel plating bath

本發明係有關製造無電解鍍鎳被膜用之無電解鍍鎳浴。詳細為,有關製造形成於印刷配線板等之電子構件所使用的可撓性基板等之電路基板上的無電解鍍鎳被膜用之無電解鍍鎳浴。The present invention relates to an electroless nickel plating bath for producing an electroless nickel plating film. In detail, it relates to an electroless nickel plating bath for producing an electroless nickel plating film formed on a circuit board such as a flexible substrate used in electronic components such as a printed wiring board.

先前接續可撓性基板等之電路基板與電子構件時係以,設置於電路基板之銅圖型等之圖型上,實施屏障金屬用之無電解鍍鎳後,進行提升接續信賴性用之鍍金的ENIG(Electroless Nickel Immersion Gold),或於圖型上實施屏障金屬用之無電解鍍鎳後,於鍍鎳上形成無電解鈀膜,再於其上方進行以提升接續信賴性為目的之鍍金的ENEPIG(Electroless Nickel Electroless Palladium Immersion Gold:ENEPIG)等方法進行。When connecting circuit boards and electronic components such as flexible boards in the past, it was set on the copper pattern of the circuit board, and then electroless nickel plating for barrier metal was performed, followed by gold plating ENIG (Electroless Nickel Immersion Gold) for improving connection reliability, or ENIG (Electroless Nickel Immersion Gold) plating for improving connection reliability, or electroless nickel plating for barrier metal was performed on the pattern, electroless palladium film was formed on the nickel plating, and then gold plating was performed on top of it for the purpose of improving connection reliability. EPIG (Electroless Nickel Electroless Palladium Immersion Gold: ENEPIG) and other methods.

近年來智慧型手機等之電子機器要求所搭載之半導體構件更一步小型化。為了便半導體構件小型化,需使電路圖型微細化及電路圖型高積體化。但推展電路圖型微細化及電路圖型高積體化而於圖型上實施無電解鍍鎳時,不僅圖型上,也會使鎳析出於圖型與圖型之間的空間內(以下稱為圖型外析出),恐使電流動而短路。又,降低無電解鍍鎳浴之反應性,雖可抑制圖型外析出,但恐無法於圖型上層合無電解鍍鎳被膜(以下稱為鎳遺漏)。In recent years, electronic devices such as smartphones require further miniaturization of semiconductor components mounted on them. In order to facilitate the miniaturization of semiconductor components, it is necessary to miniaturize the circuit pattern and increase the density of the circuit pattern. However, when promoting the miniaturization of circuit patterns and the high integration of circuit patterns and implementing electroless nickel plating on the pattern, not only on the pattern, but also nickel will be deposited in the space between the pattern and the pattern (hereinafter referred to as precipitation outside the pattern), which may cause the current to flow and short circuit. In addition, reducing the reactivity of the electroless nickel plating bath can suppress the precipitation outside the pattern, but it may not be possible to laminate the electroless nickel plating film (hereinafter referred to as nickel omission) on the pattern.

有關可抑制鎳遺漏及圖型外析出發生之無電解鍍鎳浴(無電解鍍鎳液),本申請人於專利文獻1中曾提案,添加具有S-S硫鍵結之化合物的無電解鍍鎳液。又,有關可抑制鎳遺漏及圖型外析出發生之無電解鍍鎳液,已知如專利文獻2所示,添加含有金屬成分用之銅、鐵、鈷等之錯化合物的無電解鍍鎳液,及如專利文獻3所示,添加由銀、銅、鋅等所選出之金屬的鹽所形成之可溶性鹽的無電解鍍鎳液。Regarding an electroless nickel plating bath (electroless nickel plating solution) that can suppress nickel omission and out-of-pattern precipitation, the applicant proposed in Patent Document 1 an electroless nickel plating solution that added a compound having an S-S sulfur bond. Also, regarding an electroless nickel plating solution capable of suppressing nickel omission and out-of-pattern precipitation, as shown in Patent Document 2, an electroless nickel plating solution containing aluminum compounds such as copper, iron, and cobalt for metal components is added, and as shown in Patent Document 3, an electroless nickel plating solution is added with a soluble salt of a metal selected from silver, copper, zinc, etc.

但使用專利文獻1之無電解鍍鎳液時,電路基板之耐蝕性尚不足。另外使用專利文獻2或專利文獻3之無電解鍍鎳液時,加入無電解鍍鎳液中之銅等鎳以外之金屬成分會析出於無電解鍍鎳被模中,恐變色等改變被膜特性。 先前技術文獻 專利文獻However, when the electroless nickel plating solution of Patent Document 1 is used, the corrosion resistance of the circuit board is still insufficient. In addition, when using the electroless nickel plating solution of Patent Document 2 or Patent Document 3, metal components other than nickel such as copper added to the electroless nickel plating solution will be precipitated in the electroless nickel plating coating, which may change the film properties such as discoloration. prior art literature patent documents

[專利文獻1] 特開平8-269726號公報 [專利文獻2] 特開2005-82883號公報 [專利文獻3] 特許第5622678號公報[Patent Document 1] JP-A-8-269726 [Patent Document 2] JP-A-2005-82883 [Patent Document 3] Patent No. 5622678

發明所欲解決之課題The problem to be solved by the invention

本發明係提供製造可抑制鎳遺漏及圖型外析出,且具有優良耐蝕性及外觀之無電解鍍鎳被模的無電解鍍鎳浴。 解決課題之方法The present invention provides an electroless nickel plating bath for manufacturing an electroless nickel plating quilt that can suppress nickel omission and out-of-pattern precipitation, and has excellent corrosion resistance and appearance. solution to the problem

本發明之無電解鍍鎳浴的特徵為含有還原劑,與含有1個以上硝基之含硝基芳香族化合物。The electroless nickel plating bath of the present invention is characterized by containing a reducing agent and a nitro-containing aromatic compound containing one or more nitro groups.

上述含硝基芳香族化合物為,由可具有硝基以外之取代基的苯、可具有硝基以外之取代基的萘,及該等之鹼金屬鹽所成群中的選出之至少一種,上述取代基較佳為,由羧基、羥基、鹵原子、磺酸基、酯基、烷氧基,及胺基所成群中所選出之至少一種。The above-mentioned nitro-containing aromatic compound is at least one selected from the group consisting of benzene which may have substituents other than nitro, naphthalene which may have substituents other than nitro, and alkali metal salts thereof. The substituent is preferably at least one selected from the group consisting of carboxyl, hydroxyl, halogen, sulfonic acid, ester, alkoxy, and amine.

又,本發明也包含無電解鍍鎳方法,上述方法之特徵為將被鍍物浸漬於無電解鍍鎳浴中,而於上述被鍍物之表面形成無電解鍍鎳被膜。 發明之效果Furthermore, the present invention also includes an electroless nickel plating method, which is characterized in that the object to be plated is immersed in an electroless nickel plating bath, and an electroless nickel plating film is formed on the surface of the object to be plated. The effect of the invention

藉由使用本發明之無電解鍍鎳浴,可得能抑制鎳遺漏及圖型外析出,具有優良耐蝕性及外觀之無電解鍍鎳被膜。By using the electroless nickel plating bath of the present invention, it is possible to obtain an electroless nickel plating film that can suppress nickel omission and out-of-pattern precipitation, and has excellent corrosion resistance and appearance.

本發明之無電解鍍鎳浴為,於被鍍物之表面形成無電解鍍鎳被膜(以下單稱為被膜)所使用之物,例如將被鍍物浸漬於無電解鍍鎳浴中,可於上述被鍍物之表面上形成被膜。The electroless nickel plating bath of the present invention is used to form an electroless nickel plating film (hereinafter simply referred to as film) on the surface of the object to be plated. For example, the object to be plated is immersed in the electroless nickel plating bath to form a film on the surface of the above-mentioned object to be plated.

本發明者們發現,藉由無電解鍍鎳浴中含有還原劑與含硝基芳香族化合物,可得不僅能抑制鎳遺漏及圖型外析出(以下稱為優良圖型性),且具有優良耐蝕性及外觀之被膜,而完成本發明。The inventors of the present invention found that by including a reducing agent and a nitro-containing aromatic compound in an electroless nickel plating bath, a film that not only suppresses nickel drop-out and out-of-pattern precipitation (hereinafter referred to as good patternability) but also has excellent corrosion resistance and appearance can be obtained, and completed the present invention.

藉由使用上述含硝基芳香族化合物而發揮上述作用之機構的詳細內容雖不明,但推測如下所述。無電解鍍鎳浴中,藉由無電解鍍鎳浴所含有之還原劑的氧化反應,可由還原劑放出電子。無電解鍍鎳浴中不含含硝基芳香族化合物時,因由還原劑放出電子會使鎳離子還原而過度析出鎳,故恐使高積體化之電路圖型發生圖型外析出。但無電解鍍鎳浴中含有含硝基芳香族化合物時,由還原劑放出之電子比起鎳離子之還原反應會優先使用於硝基之還原反應,因此不會過度析出鎳,可抑制圖型外析出。又,本發明之無電解鍍鎳浴係指含有該等之混合物的總稱,也可使無電解鍍鎳液定位。The details of the mechanism by which the above-mentioned action is exerted by using the above-mentioned nitro-containing aromatic compound are not known, but are presumed as follows. In the electroless nickel plating bath, electrons can be released from the reducing agent by the oxidation reaction of the reducing agent contained in the electroless nickel plating bath. When the electroless nickel plating bath does not contain nitro-aromatic compounds, the release of electrons from the reducing agent will reduce the nickel ions and excessively precipitate nickel, which may cause out-of-pattern precipitation in highly integrated circuit patterns. However, when the electroless nickel plating bath contains nitro-containing aromatic compounds, the electrons released by the reducing agent will be used in the reduction reaction of nitro groups prior to the reduction reaction of nickel ions, so nickel will not be excessively precipitated, and precipitation outside the pattern can be suppressed. In addition, the electroless nickel plating bath of the present invention is a general term for a mixture containing these, and the electroless nickel plating bath can also be positioned.

本發明之無電解鍍鎳浴中,含硝基芳香族化合物及還原劑以外之化合物的種類無特別限定,本發明也可使用無電解鍍鎳浴一般所使用之物。In the electroless nickel plating bath of the present invention, the types of compounds other than the nitro-containing aromatic compound and the reducing agent are not particularly limited, and the present invention can also use those commonly used in electroless nickel plating baths.

<含硝基芳香族化合物> 上述含硝基芳香族化合物可含有1個以上之硝基。即,芳香族化合物所含有之硝基可為1個或複數。上述含硝基芳香族化合物較佳為含有1~3個硝基,就處理性之觀點又以1~2個硝基為佳,更佳為1個硝基。<Nitro-containing aromatic compounds> The above-mentioned nitro-containing aromatic compound may contain one or more nitro groups. That is, the nitro group contained in an aromatic compound may be one or plural. The above-mentioned nitro-containing aromatic compound preferably contains 1 to 3 nitro groups, more preferably 1 to 2 nitro groups, more preferably 1 nitro group from the viewpoint of handleability.

又,上述含硝基芳香族化合物為,由可具有硝基以外之取代基的苯、可具有硝基以外之取代基的萘,及該等之鹼金屬鹽所成群中所選出之至少一種,上述取代基較佳為,由羧基、羥基、鹵原子、磺酸基、酯基、烷氧基,及胺基所成群中所選出之至少一種。In addition, the nitro-containing aromatic compound is at least one selected from the group consisting of benzene which may have substituents other than nitro, naphthalene which may have substituents other than nitro, and alkali metal salts thereof. The substituent is preferably at least one selected from the group consisting of carboxyl, hydroxyl, halogen, sulfonic acid, ester, alkoxy, and amine.

上述取代基更佳為,由羧基、羥基、鹵原子、磺酸基,及胺基所成群中所選出之至少一種。The aforementioned substituent is more preferably at least one selected from the group consisting of carboxyl group, hydroxyl group, halogen atom, sulfonic acid group, and amino group.

上述含硝基芳香族化合物為鹼金屬鹽時,上述含硝基芳香族化合物較佳為,由鈉鹽及鉀鹽所成群中所選出之至少一種。When the above-mentioned nitro-containing aromatic compound is an alkali metal salt, the above-mentioned nitro-containing aromatic compound is preferably at least one selected from the group consisting of sodium salt and potassium salt.

上述鹵基較佳為,由氯基、溴基,及碘基所成群中所選出之至少一種。The aforementioned halogen group is preferably at least one selected from the group consisting of chloro, bromo, and iodo.

無電解鍍鎳浴中含硝基芳香族化合物所佔有之含量(濃度)較佳為0.001mmol/L以上、20mol/L以下,又以0.1mol/L以上、10mol/L以下為佳,更佳為0.5mol/L以上、5mol/L以下。上述含量之下限低於0.001mmol/L時,恐無法提升圖型性。又,上述含量之上限超過20mol/L時,恐發生鎳遺漏。使用複數含硝基芳香族化合物時,含硝基芳香族化合物之含量係指全部含硝基芳香族化合物之合計含量。The content (concentration) of nitro-containing aromatic compounds in the electroless nickel plating bath is preferably more than 0.001mmol/L and less than 20mol/L, preferably more than 0.1mol/L and less than 10mol/L, more preferably more than 0.5mol/L and less than 5mol/L. When the lower limit of the above-mentioned content is lower than 0.001 mmol/L, it may not be possible to improve patternability. Moreover, when the upper limit of the said content exceeds 20 mol/L, nickel skipping may occur. When using multiple nitro-containing aromatic compounds, the content of nitro-containing aromatic compounds refers to the total content of all nitro-containing aromatic compounds.

<還原劑> 還原劑之種類無特別限定,可使用已知之無電解鍍鎳浴中一般所使用之各種還原劑。該類還原劑如,次磷酸鹽、硼化合物等。上述次磷酸鹽如,次磷酸鈉(次磷酸鹼)、次磷酸鉀等。又,上述硼化合物如,氫化硼鈉、氫化硼鉀等之氫化硼化合物;二甲基胺甲硼烷(DMAB)、三甲基胺甲硼烷、三乙基胺甲硼烷等之胺甲硼烷化合物等。<Reducing agent> The type of reducing agent is not particularly limited, and various reducing agents generally used in known electroless nickel plating baths can be used. Such reducing agents include hypophosphite, boron compounds, and the like. Examples of the above-mentioned hypophosphite include sodium hypophosphite (base hypophosphite), potassium hypophosphite, and the like. Further, the boron compound mentioned above includes boron hydride compounds such as sodium borohydride and potassium borohydride; amine borane compounds such as dimethylamine borane (DMAB), trimethylamine borane, and triethylamine borane, and the like.

上述還原劑之較佳濃度會依所使用之還原劑種類而異,例如還原劑係使用次磷酸鈉時,較佳為0.1~0.5mol/L。藉由控制該類濃度,可防止因鍍液中之鎳離子還原減緩而拉長成模時間之不合宜情形,及鍍浴分解等。次磷酸鈉之濃度更佳為0.15~0.35mol/L。藉此可更有效防止上述問題。The preferred concentration of the above-mentioned reducing agent will vary depending on the type of reducing agent used. For example, when sodium hypophosphite is used as the reducing agent, it is preferably 0.1-0.5 mol/L. By controlling such concentration, it is possible to prevent unfavorable situations such as prolonging the molding time due to the slow reduction of nickel ions in the plating solution, and the decomposition of the plating bath. The concentration of sodium hypophosphite is more preferably 0.15-0.35 mol/L. Thereby, the above-mentioned problems can be more effectively prevented.

又,上述還原劑係使用硼化合物之DMAB時,DMAB之濃度較佳為0.01~0.2mol/L。藉此可防止拉長成模時間之不合情形,及防止鍍浴分解等。DMAB之濃度更佳為0.05~0.09mol/L。藉此可更有效防止上述問題。Also, when the reducing agent is DMAB which is a boron compound, the concentration of DMAB is preferably 0.01-0.2 mol/L. In this way, it can prevent the unsuitable situation of prolonging the molding time, and prevent the plating bath from disintegrating, etc. The concentration of DMAB is more preferably 0.05-0.09 mol/L. Thereby, the above-mentioned problems can be more effectively prevented.

無電解鍍鎳浴為含有含硝基芳香族化合物與還原劑以外之要件下無特定限定,但以可有效發揮所希望之特性般適當調整為佳,又,無電解鍍鎳浴除了含硝基芳香族化合物與還原劑,可含有水溶性鎳鹽、錯合劑、安定劑、含硫化合物,較佳為含有水溶性鎳鹽及錯合劑。下面將具體說明水浴性鎳鹽、錯合劑、安定劑、含硫化合物。The electroless nickel plating bath is not specifically limited to the elements other than nitroaromatic compounds and reducing agents, but it is better to properly adjust the desired characteristics. In addition, the electroless nickel plating bath may contain water-soluble nickel salts, complexing agents, stabilizers, and sulfur-containing compounds in addition to nitroaromatic compounds and reducing agents. It is preferable to contain water-soluble nickel salts and complexing agents. The water-bath nickel salt, complexing agent, stabilizer, and sulfur-containing compound will be specifically described below.

<水溶性鎳鹽> 水溶性鎳鹽可為能溶於鍍液,得到一定濃度之水溶液之物,無特別限定。該類水溶性鎳鹽如,硫酸鎳、氯化鎳、次磷酸鎳等之無機水溶性鎳鹽;乙酸鎳、蘋果酸鎳等之有機水溶性鎳鹽等。該等之水溶性鎳鹽可單獨使用或二種以上混合使用。<Water-soluble nickel salt> The water-soluble nickel salt can be dissolved in the plating solution to obtain an aqueous solution with a certain concentration, and is not particularly limited. Such water-soluble nickel salts include inorganic water-soluble nickel salts such as nickel sulfate, nickel chloride, and nickel hypophosphite; organic water-soluble nickel salts such as nickel acetate and nickel malate, and the like. These water-soluble nickel salts can be used alone or in combination of two or more.

水溶性鎳鹽之濃度較佳如0.05~0.17mol/L。藉由控制為上述範圍,可有效防止因被膜之析出速度非常遲緩而拉長成膜時間之不合宜情形、因提高鍍液之黏度而降低液體流動性故相對於鍍鎳之均勻析出性具有不良影響之不合宜情形、使所形成之被膜生成凹洞等之不合宜情形等。The concentration of the water-soluble nickel salt is preferably 0.05-0.17 mol/L. By controlling it to the above range, it is possible to effectively prevent the unfavorable situation that the deposition rate of the film is very slow and the film formation time is prolonged, the unfavorable situation that the viscosity of the plating solution is increased and the fluidity of the liquid is reduced, which has a negative impact on the uniform precipitation of nickel plating, and the unfavorable situation that the formed coating is formed. Cavities, etc.

<錯合劑> 錯合劑可有效防止水溶性鎳鹽等之鎳化合物沉澱,及使鎳之析出反應具有適當速度。本發明可使用已知之無電解鍍鎳液一般所使用之各種錯合劑。該類錯合劑之具體例如,乙醇酸、乳酸、葡萄糖酸、丙酸等之單羧酸;蘋果酸、琥珀酸、酒石酸、丙二酸、草酸、己二酸等之二羧酸;甘胺酸、谷胺酸、天冬胺酸、丙胺酸等之胺基羧酸;伸乙基二胺四乙酸、Versenol(N-羥基乙基伸乙基二胺-N,N’,N’-三乙酸)、Quadrol(N,N,N’,N’-四羥基乙基伸乙基二胺)等之伸乙基二胺衍生物;1-羥基乙烷-1,1-二膦酸、伸乙基二胺四伸甲基膦酸等之膦酸;及該等之可溶性鹽等。該等錯合劑可單獨使用或二種以上混合使用。<Complexing agent> The complexing agent can effectively prevent the precipitation of nickel compounds such as water-soluble nickel salts, and make the precipitation reaction of nickel have an appropriate speed. Various complexing agents commonly used in known electroless nickel plating baths can be used in the present invention. Specific examples of such complexing agents include monocarboxylic acids such as glycolic acid, lactic acid, gluconic acid, and propionic acid; dicarboxylic acids such as malic acid, succinic acid, tartaric acid, malonic acid, oxalic acid, and adipic acid; aminocarboxylic acids such as glycine, glutamic acid, aspartic acid, and alanine acid; , N’,N’-tetrahydroxyethylethylenediamine) and other ethylenediamine derivatives; 1-hydroxyethane-1,1-diphosphonic acid, ethylenediaminetetrakiscene phosphonic acid and other phosphonic acids; and their soluble salts, etc. These complexing agents can be used alone or in combination of two or more.

錯合劑之濃度會依所使用之錯合劑種類而異,無特別限定,大致上以0.001~2mol/L之範圍為佳。藉由將錯合劑之濃度控制於該範圍時,可防止因氫氧化鎳之沉澱、氧化還原反應過快而使鍍浴分解等。另外可防止減緩被膜之析出速度的問題、因提高鍍液之黏度而降低均勻析出性等問題。更佳之錯合劑的濃度為0.002~1mol/L。藉此可更有效防止氫氧化鎳沉澱、鍍浴分解等。The concentration of the complexing agent will vary depending on the type of complexing agent used, and is not particularly limited, generally in the range of 0.001-2 mol/L. By controlling the concentration of the complexing agent within this range, it is possible to prevent the deposition of nickel hydroxide and the decomposition of the plating bath due to excessive redox reactions. In addition, it can prevent the problem of slowing down the deposition rate of the film, and the problem of reducing the uniformity of deposition due to the increase of the viscosity of the plating solution. A more preferable concentration of the complexing agent is 0.002-1 mol/L. This can more effectively prevent nickel hydroxide precipitation, plating bath decomposition, and the like.

<安定劑> 必要時本發明之無電解鍍鎳浴可另含有已知之安定劑。本發明之無電解鍍鎳浴中既使未添加安定劑也可抑制圖型外析出,但添加安定劑時也可抑制鎳遺漏及圖型外析出。上述安定劑可使用專利文獻1或專利文獻2所記載已知之安定劑,例如乙酸鉛等之P6化合物、乙酸鉍等之Bi化合物等之無機化合物;丁炔二醇等之有機化合物安定劑。該等安定劑可單獨使用或二種以上混合使用。<Stabilizer> The electroless nickel plating bath of the present invention may further contain a known stabilizer if necessary. In the electroless nickel plating bath of the present invention, out-of-pattern precipitation can be suppressed even if no stabilizer is added, but nickel omission and out-of-pattern precipitation can also be suppressed when a stabilizer is added. The above-mentioned stabilizer can use the known stabilizers described in Patent Document 1 or Patent Document 2, such as inorganic compounds such as P6 compounds such as lead acetate, Bi compounds such as bismuth acetate, etc.; organic compound stabilizers such as butynediol. These stabilizers can be used alone or in combination of two or more.

<含硫化合物> 必要時本發明之無電解鍍鎳浴可另含有已知之含硫化合物。上述含硫化合物如,硫二甘醇酸、硫乙醇酸、硫基硫酸鹼、亞硫酸鹼等。該等含硫化合物可單獨使用或二種以上混合使用。<Sulfur-containing compounds> The electroless nickel plating bath of the present invention may further contain known sulfur-containing compounds if necessary. The above-mentioned sulfur-containing compounds include thiodiglycolic acid, thioglycolic acid, thiosulfate base, sulfite base and the like. These sulfur-containing compounds may be used alone or in combination of two or more.

<被膜中磷之濃度> 藉由被膜中磷之濃度可區分為低磷(被膜中磷之濃度:1.5~3.0%)、中磷(被膜中磷之濃度:6.0~7.5%)、中高磷(被膜中磷之濃度:8.0~9.5%)、高磷(被膜中磷之濃度:10.5~12.0%)四種。因此形成高磷之被膜用的鍍浴中不會含硫,但形成低磷、中磷、中高磷之被膜用的鍍浴中會含有大量硫。無關本發明之無電解鍍鎳浴中有無含硫化合物,均可抑制鎳遺漏及圖型外析出。即,無關被膜中磷之濃度,均可抑制鎳遺漏及圖型外析出。<Phosphorus concentration in coating> According to the concentration of phosphorus in the coating, it can be divided into four types: low phosphorus (concentration of phosphorus in the coating: 1.5-3.0%), medium phosphorus (concentration of phosphorus in the coating: 6.0-7.5%), medium-high phosphorus (concentration of phosphorus in the coating: 8.0-9.5%), and high phosphorus (concentration of phosphorus in the coating: 10.5-12.0%). Therefore, the plating bath for forming a high-phosphorus film will not contain sulfur, but the plating bath for forming a low-phosphorus, medium-phosphorus, and medium-high-phosphorus film will contain a large amount of sulfur. Regardless of the presence or absence of sulfur-containing compounds in the electroless nickel plating bath of the present invention, nickel omission and out-of-pattern precipitation can be suppressed. That is, regardless of the concentration of phosphorus in the film, nickel drop-out and out-of-pattern precipitation can be suppressed.

<無電解鍍鎳浴之pH> 本發明之無電解鍍鎳浴之pH較佳為4.0~9.0程度,更佳為4.0~6.5。pH為上述範圍時,可有效率藉由還原劑而發生還原反應,而防止還原劑分解等,又可防止電鍍析出性降低、鍍液分解等。又,pH為上述範圍時可防止因還原劑之還原電位過高而降低鍍浴之安定性。調整上述pH之pH調整劑可使用氨水、氫氧化鈉等之鹼;硫酸、鹽酸、硝酸、磷酸等之酸等。<pH of electroless nickel plating bath> The pH of the electroless nickel plating bath of the present invention is preferably around 4.0 to 9.0, more preferably 4.0 to 6.5. When the pH is in the above-mentioned range, the reduction reaction can be efficiently caused by the reducing agent, and the decomposition of the reducing agent can be prevented, and the reduction of electroplating precipitation and the decomposition of the plating solution can be prevented. In addition, when the pH is within the above range, it is possible to prevent the stability of the plating bath from being lowered due to an excessively high reduction potential of the reducing agent. As a pH adjuster for adjusting the above pH, alkalis such as ammonia water and sodium hydroxide, acids such as sulfuric acid, hydrochloric acid, nitric acid, and phosphoric acid, and the like can be used.

<其他> 必要時本發明之無電解鍍鎳浴可另含有無電解鍍鎳液所添加之已知的各種添加劑。添加劑如,反應促進劑、光澤劑、表面活性劑、機能賦予劑等。該等之種類無特別限制,可採用一般所使用之物。<Other> The electroless nickel plating bath of the present invention may further contain various known additives added to the electroless nickel plating bath if necessary. Additives such as reaction accelerators, gloss agents, surfactants, function-imparting agents, etc. The types of these are not particularly limited, and generally used ones can be used.

無電解鍍鎳浴中含有鎳以外之金屬成分時,鎳以外之金屬成分恐析出於被膜中,而會因鎳以外之金屬成分改變被膜特性故不宜。無電解鍍鎳浴中鎳以外之金屬成分的濃度較佳為未達1mg/L,更佳為未達0.1mg/L。When the electroless nickel plating bath contains metal components other than nickel, the metal components other than nickel may be precipitated in the coating, and the metal components other than nickel will change the properties of the coating, so it is not suitable. The concentration of metal components other than nickel in the electroless nickel plating bath is preferably less than 1 mg/L, more preferably less than 0.1 mg/L.

使用本發明之無電解鍍鎳浴進行無電解電鍍時之電鍍條件及電鍍裝置無特別限定,可依常法適當選擇。具體上可為,使被鍍物浸漬於上述組成之無電解鍍鎳液等而接觸。此時之電鍍溫度會依鍍浴之組成等而異,但較佳為50~95℃。該溫度下可防止因電鍍析出反應減緩而發生被膜未析出及外觀不良。又,電鍍處理時間可因應所形成之被膜的膜厚等而適當設定,大致上一般為15~60分鐘程度。The electroplating conditions and the electroplating apparatus when electroless plating is performed using the electroless nickel plating bath of the present invention are not particularly limited, and can be appropriately selected according to conventional methods. Specifically, the object to be plated may be brought into contact by immersing it in an electroless nickel plating solution or the like having the above-mentioned composition. The plating temperature at this time varies depending on the composition of the plating bath, but is preferably 50 to 95°C. At this temperature, it is possible to prevent non-deposition of the film and poor appearance due to the slowdown of the plating deposition reaction. In addition, the plating treatment time can be appropriately set in accordance with the film thickness of the film to be formed, etc., but it is generally about 15 to 60 minutes.

又,本發明所使用之被鍍物的種類無特別限定,例如鐵、鈷、鎳、鈀等之金屬或該等之合金般相對於無電解鍍鎳之還原析出具有觸媒性之物;銅等之無觸媒性之金屬、玻璃、陶瓷等。使用前者具有觸媒性之金屬等時,依常法進行前處理後可直接形成被膜。又,使用後者無觸媒性之金屬等時,依常法附著鈀核等之金屬觸媒核後,可進行無電解鍍鎳處理。Also, the type of the object to be plated used in the present invention is not particularly limited, for example, metals such as iron, cobalt, nickel, palladium or their alloys generally have catalytic properties with respect to the reduction and precipitation of electroless nickel plating; non-catalytic metals such as copper, glass, ceramics, etc. When using the former metal with catalytic properties, the film can be formed directly after pretreatment according to the usual method. Also, when using the latter non-catalytic metal, electroless nickel plating can be performed after attaching a metal catalyst core such as a palladium core according to the usual method.

由此所得之被膜的膜厚大致為3~7μm程度,較佳為4~5μm。得該類膜厚時,因既使為了確保耐蝕性等而使被膜膜厚如上述般加厚,也不會發生裂痕等之觀點故非常有用。The film thickness of the film thus obtained is about 3 to 7 μm, preferably 4 to 5 μm. When such a film thickness is obtained, it is very useful from the viewpoint that cracks and the like do not occur even if the film thickness of the film is increased as described above in order to ensure corrosion resistance and the like.

又,形成無電解鍍鎳被膜之被鍍物適用於製造印刷基板。 實施例Moreover, the object to be plated on which the electroless nickel plating film is formed is suitable for the production of printed circuit boards. Example

下面將舉實施例更具體說明本發明,但本發明非限制於下述實施例,可得前、後述之要旨的範圍內可變更實施,該等均包含於本發明之技術範圍內。The following examples will be used to describe the present invention in more detail, but the present invention is not limited to the following examples, and can be implemented within the scope of the gist of the foregoing and the following, which are all included in the technical scope of the present invention.

(無電解鍍鎳被膜之形成方法) 首先準備聚醯亞胺基板上層合厚18μm之壓延銅箔後形成圖型的上村工業股份公司製上村試驗圖型基板。所準備之上述圖型基板為,具有交互形成線與空間之線與空間圖型,且線L為20μm、空間S為20μm之基板(以下稱為基板A),與線L為40μm、空間S為20μm之基板(以下稱為基板B)。又,線係表示圖型寬(線寬),空間係表示接鄰圖型相互間之間隔(縫隙寬)。(Method for forming electroless nickel plating film) First, a Uemura test pattern substrate manufactured by Uemura Kogyo Co., Ltd. was prepared by laminating a rolled copper foil with a thickness of 18 μm on a polyimide substrate and forming a pattern. The above-mentioned patterned substrates prepared were a substrate with a line and space pattern in which lines and spaces are alternately formed, and a line L of 20 μm and a space S of 20 μm (hereinafter referred to as substrate A), and a substrate with a line L of 40 μm and a space S of 20 μm (hereinafter referred to as substrate B). Also, the line system represents the pattern width (line width), and the space system represents the interval between adjacent patterns (gap width).

以上述基板A或上述基板B作為被鍍物,相對於上述被鍍物依序進行表1之處理。詳細為,首先藉由上村工業股份公司製ACL-007進行清潔(脫脂)處理。其次以100g/L之過硫酸鈉溶液(SPS)進行軟蝕刻處理。接著以10%硫酸(H2 SO4 )溶液去除蝕刻殘渣(酸洗),再以3%硫酸(H2 SO4 )溶液進行預浸處理。其後以上村工業股份公司製MNK-4賦予Pd觸媒(活化處理),將活化處理後上述被鍍物浸漬於後述無電解鍍鎳浴中,形成厚5μm之無電解鍍鎳被膜。最後使用上村工業股份公司製Goblite(登記商標)TIG-10進行無電解鍍金,形成厚0.05μm之無電解鍍金被膜。清潔、軟蝕刻、酸洗、預浸、活化、無電解鍍鎳,及無電解鍍金之各處理的溫度及時間如表1所示。Using the above-mentioned substrate A or the above-mentioned substrate B as the object to be plated, the processes in Table 1 were performed sequentially with respect to the above-mentioned object to be plated. In detail, first, cleaning (degreasing) was performed with ACL-007 manufactured by Uemura Industrial Co., Ltd. Next, perform soft etching with 100g/L sodium persulfate solution (SPS). Then remove the etching residue (pickling) with 10% sulfuric acid (H 2 SO 4 ) solution, and then pre-dip with 3% sulfuric acid (H 2 SO 4 ) solution. Thereafter, Pd catalyst (activation treatment) was applied to MNK-4 produced by Kamimura Industrial Co., Ltd., and the above-mentioned to-be-plated object after the activation treatment was immersed in the electroless nickel plating bath described later to form an electroless nickel plating film with a thickness of 5 μm. Finally, electroless gold plating was performed using Goblite (registered trademark) TIG-10 manufactured by Uemura Industrial Co., Ltd. to form an electroless gold plating film with a thickness of 0.05 μm. The temperature and time of cleaning, soft etching, pickling, pre-dipping, activation, electroless nickel plating, and electroless gold plating are shown in Table 1.

(無電解鍍鎳浴) 準備含有作為水溶性鎳鹽之硫酸鎳、作為還原劑之次磷酸鈉,及作為錯合劑之丙二酸、乳酸及己酸之混合液,將表2或表3所記載之添加物加入該混合液,作為無電解鍍鎳浴用。具體上添加物係指,實施例1~39為表2所記載之含硝基芳香族化合物,比較例1~8為表3所記載之苯環的單取代物,比較例9、10為表3所記載之含硫化合物,比較例11~13為表3所記載之金屬成分。又,實施例1~39所使用之含硝基芳香族化合物中,含硝基芳香族化合物(下述(Ι))之R1 、R2 、R3 、R4 及R5 未如表2中特別註明下,係為氫原子。(Electroless nickel plating bath) Prepare a mixed solution containing nickel sulfate as a water-soluble nickel salt, sodium hypophosphite as a reducing agent, and malonic acid, lactic acid, and caproic acid as a complexing agent, and add the additives listed in Table 2 or Table 3 to the mixed solution to be used as an electroless nickel plating bath. Specifically, the additives refer to the nitro-containing aromatic compounds listed in Table 2 in Examples 1-39, the monosubstituted benzene rings listed in Table 3 in Comparative Examples 1-8, the sulfur-containing compounds listed in Table 3 in Comparative Examples 9 and 10, and the metal components listed in Table 3 in Comparative Examples 11-13. In addition, among the nitro-containing aromatic compounds used in Examples 1-39, R 1 , R 2 , R 3 , R 4 and R 5 of the nitro-containing aromatic compound (following (I)) are hydrogen atoms unless otherwise specified in Table 2.

無電解鍍鎳浴中各成分之濃度為,硫酸鎳:20g/L(0.129 mol/L)、添加物:0.5 mol/L、次磷酸鈉:30g/L(0.283 mol/L)、丙二酸:10g/L(0.096 mol/L)、乳酸:10g/L(0.111 mol/L)、己二酸:10g/L(0.068 mol/L)。各鍍浴之pH為4.6。The concentration of each component in the electroless nickel plating bath is, nickel sulfate: 20g/L (0.129 mol/L), additive: 0.5 mol/L, sodium hypophosphite: 30g/L (0.283 mol/L), malonic acid: 10g/L (0.096 mol/L), lactic acid: 10g/L (0.111 mol/L), adipic acid: 10g/L (0.068 mol/L). The pH of each plating bath was 4.6.

使用上述無電解鍍鎳浴進行下述物性及特性評估。The following physical properties and characteristic evaluations were performed using the electroless nickel plating bath.

(被膜中之磷濃度) 於3cm×3cm之貼銅層合板上形成5μm以上之膜厚的被膜。使用螢光X線分析裝置Rigaku公司製之ZSX Primus IV測定該被膜中之磷濃度。(Phosphorus concentration in the film) Form a film with a film thickness of 5 μm or more on a 3cm×3cm copper-clad laminate. The phosphorus concentration in the film was measured using a fluorescent X-ray analyzer ZSX Primus IV manufactured by Rigaku Corporation.

(圖型性) 藉由上述被膜之形成方法,各自於上述基板A及上述基板B上形成被膜,再依下述基準以目視觀察。又,圖1(a)及(b)為基板A之表面形成被膜後之相片。 good:空間內無鎳析出(圖1(a)) poor:空間內有鎳析出(圖1(b))(graphical) According to the above-mentioned film forming method, a film was formed on each of the above-mentioned substrate A and the above-mentioned substrate B, and then visually observed according to the following criteria. 1( a ) and ( b ) are photographs of the surface of the substrate A after the coating is formed. good: no nickel precipitation in the space (Fig. 1(a)) Poor: Nickel precipitates in the space (Figure 1(b))

(耐蝕性(硝酸浸漬試驗)) 將BGA(Ball Grid Array)基板浸漬於上述各無電解鍍鎳浴中,於BGA基板之表面形成膜厚5μm之被膜。將該被膜浸漬於25℃之60%硝酸被水稀釋為2倍之溶液中30秒後,以目視確認被膜有無變色。被膜變色為黑色時評估為「有變色」,未觀察到被膜變色時評估為「未變色」(耐蝕性優良)。(Corrosion resistance (nitric acid immersion test)) The BGA (Ball Grid Array) substrate was immersed in each of the above-mentioned electroless nickel plating baths, and a film with a film thickness of 5 μm was formed on the surface of the BGA substrate. After immersing the film in a solution of 60% nitric acid diluted twice with water at 25°C for 30 seconds, check visually for discoloration of the film. When the coating was discolored to black, it was evaluated as "discolored", and when no discoloration of the coating was observed, it was evaluated as "no discoloration" (excellent corrosion resistance).

(被膜分析) 將SUS 304浸漬於無電解鍍鎳浴中,於SUS 304之表面形成膜厚30μm之被膜。將該被膜浸漬於50℃之硝酸中1小時使其完全溶解後,使用堀場製作所公司製Ultima 2之ICP發光分析裝置測定溶解後含有被膜之硝酸中,被膜中有無含有金屬及種類。(capsule analysis) SUS 304 was immersed in an electroless nickel plating bath to form a film with a thickness of 30 μm on the surface of SUS 304. After immersing the film in nitric acid at 50°C for 1 hour to completely dissolve it, the presence or absence of metals and species in the film was measured in the dissolved nitric acid containing the film using the Horiba Ultima 2 ICP emission analyzer.

該等結果併記於表2及表3中。使用本發明之無電解鍍鎳浴的實施例1~39為,可得能抑制鎳遺漏及圖型外析出,且具有優良耐蝕性及外觀之高磷無電解鍍鎳被膜。又,添加物為未含硝基之芳香族化合物的比較例1~8為圖型性較差。添加物為含硫化合物之比較例9、10為耐蝕性比較差。添加物為金屬之比較例11~13為無電解鍍鎳被膜中含有鎳以外之來自添加物的金屬。These results are recorded in Table 2 and Table 3. In Examples 1 to 39 using the electroless nickel plating bath of the present invention, it is possible to obtain a high-phosphorus electroless nickel plating film that can suppress nickel omission and out-of-pattern precipitation, and has excellent corrosion resistance and appearance. In addition, Comparative Examples 1 to 8 in which the additive was an aromatic compound not containing a nitro group had poor patternability. Comparative Examples 9 and 10 in which the additive is a sulfur-containing compound have relatively poor corrosion resistance. In Comparative Examples 11 to 13 in which the additive is a metal, metals derived from additives other than nickel are contained in the electroless nickel plating film.

無。none.

圖1為圖型基板上形成無電解鍍鎳被膜之狀態下的相片。Fig. 1 is a photograph of a state in which an electroless nickel plating film is formed on a pattern substrate.

Claims (2)

一種無電解鍍鎳浴,其特徵為含有還原劑,與含有1個以上硝基之含硝基芳香族化合物、與水溶性鎳鹽,上述含硝基芳香族化合物的含量(濃度)為0.001mmol/L以上、20mol/L以下,上述還原劑包含0.1~0.5mol/L的次磷酸鈉,上述水溶性鎳鹽的濃度為0.05~0.17mol/L,上述含硝基芳香族化合物為,由可具有硝基以外之取代基的苯、可具有硝基以外之取代基的萘,及該等之鹼金屬鹽所成群中所選出之至少一種,上述取代基為,由鹵原子、磺酸基、酯基、烷氧基,及胺基所成群中所選出之至少一種。 An electroless nickel plating bath is characterized in that it contains a reducing agent, a nitro-containing aromatic compound containing more than one nitro group, and a water-soluble nickel salt. The content (concentration) of the above-mentioned nitro-containing aromatic compound is more than 0.001mmol/L and less than 20mol/L. Benzene with substituents other than nitro, naphthalene which may have substituents other than nitro, and at least one selected from the group consisting of alkali metal salts of these, said substituent being at least one selected from the group consisting of halogen atoms, sulfonic acid groups, ester groups, alkoxy groups, and amine groups. 一種無電解鍍鎳方法,其特徵為將被鍍物浸漬於如請求項1之無電解鍍鎳浴中,而於上述被鍍物之表面上形成無電解鍍鎳被膜。An electroless nickel plating method, characterized in that the object to be plated is immersed in the electroless nickel plating bath as claimed in claim 1, and an electroless nickel plating film is formed on the surface of the above-mentioned object to be plated.
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