TWI803337B - Method for measuring critical dimension - Google Patents

Abstract

The present application discloses a method for measuring critical dimension. The method for measuring critical dimension includes: providing a substrate; forming a resist layer over the substrate, wherein the resist layer comprises a solvent, a nonactivated polymer resin, a photoacid generator, and a photosensitizer generator; exposing the resist layer to a radiation source in a first wavelength; exposing the resist layer to a radiation source in a second wavelength different from the first wavelength; heating the resist layer; continuously monitoring a volatile byproduct evolved from the resist layer from a first time point after forming the resist layer over the substrate to a second time point after heating the resist layer, to obtain a concentration curve of the volatile byproduct; and deducting the critical dimension according to an integration of the concentration curve between the first time point and the second time point; wherein the photosensitizer generator is sensitive to the second wavelength and the photoacid generator is not sensitive to the second wavelength.

Description

How to measure critical dimensions

This application claims priority to US Patent Application Nos. 17/584,585 and 17/584,889 (ie, the earliest priority date is "January 26, 2022"), the contents of which are incorporated herein by reference in their entirety.

The disclosure relates to a method for measuring a critical dimension. In particular, it concerns a method of non-destructive measurement of critical dimensions.

Semiconductor components are used in various electronic applications, such as personal computers, mobile phones, digital cameras, or other electronic devices. The size of semiconductor devices is gradually reduced to meet the increasing demand for computing power. However, during the process of shrinking dimensions, different problems are added, and such problems continue to increase in number and complexity. Therefore, challenges remain in achieving improved quality, yield, performance and reliability, and reduced complexity.

The above "prior art" description only provides background technology, and does not acknowledge that the above "prior art" description discloses the subject of this disclosure, and does not constitute the prior art of this disclosure, and any description of the above "prior art" is It should not be part of this case.

An embodiment of the present disclosure provides a method for measuring a critical dimension, including providing a substrate; forming a photoresist layer on the substrate; monitoring a volatility generated from the photoresist layer by-products to obtain a first amount of the volatile by-products; exposing the photoresist layer to a radiation source; monitoring the volatile by-products generated from the photoresist layer to obtain a first amount of the volatile by-products two quantities; and obtaining the critical dimension based on the difference between the first quantity of the volatile byproduct and the second quantity of the volatile byproduct.

Another embodiment of the present disclosure provides a critical dimension measurement method, including providing a substrate; forming a photoresist layer on the substrate; exposing the photoresist layer to a radiation source; heating the photoresist layer; continuously monitoring a volatile by-product generated from the photoresist layer on the substrate to a second time point after heating the photoresist layer to obtain an a concentration curve; and subtracting the critical dimension based on the integration of the concentration curve between the first time point and the second time point.

Another embodiment of the present disclosure provides a critical dimension measurement method, including providing a substrate; forming a photoresist layer on the substrate, wherein the photoresist layer includes a solvent, an unactivated polymer resin, a photoacid generator and sensitizer generator; exposing the photoresist layer to a radiation source at a first wavelength; exposing the photoresist layer to a radiation source at a second wavelength, the second wavelength being different from the first wavelength ; heating the photoresist layer; continuously monitoring a volatile by-product generated from the photoresist layer from a first time point after forming the photoresist layer on the substrate to a time point after heating the photoresist layer obtaining a concentration profile of the volatile by-product at a second time point; and subtracting the critical dimension according to the integration of the concentration curve between the first time point and the second time point. The photosensitizer generator is sensitive to the second wavelength, while the photoacid generator is not sensitive to the second wavelength.

Due to the design of the CD measurement method of the present disclosure, the actual pattern CD can be measured without any damage by monitoring the volatile by-products generated from the photoresist layer. Furthermore, no dummy marks for metrology are required. Savable Save those areas that were previously occupied by virtual markers for metering. Therefore, more physical space can be provided for multiple functional circuits, so that the cost can be reduced.

The technical features and advantages of the present disclosure have been broadly summarized above, so that the following detailed description of the present disclosure can be better understood. Other technical features and advantages constituting the subject matter of the claims of the present disclosure will be described below. Those skilled in the art of the present disclosure should understand that the concepts and specific embodiments disclosed below can be easily used to modify or design other structures or processes to achieve the same purpose as the present disclosure. Those with ordinary knowledge in the technical field to which the disclosure belongs should also understand that such equivalent constructions cannot depart from the spirit and scope of the disclosure defined by the appended claims.

1A: Semiconductor components

1B: Semiconductor components

10: Measurement method

101: Base

103: lower layer

201: photoresist layer

300: Exposure process

310: The first exposure process

320: Second exposure process

501: mask

PAP: Photoacid Concentration Profile

PSP: photosensitizer concentration distribution

S11: step

S13: step

S15: step

S17: step

S19: step

S21: step

S23: step

Tg: glass transition temperature

Z: Direction

Aspects of the present disclosure are best understood from the following detailed description when read with the accompanying figures. It should be understood that, in accordance with the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or decreased for clarity of discussion.

FIG. 1 is a schematic flowchart illustrating a method for measuring the critical dimension of a semiconductor device according to an embodiment of the present disclosure.

2 to 5 are schematic cross-sectional views illustrating a partial process of measuring the critical dimension of a semiconductor device according to an embodiment of the present disclosure.

FIG. 6 is a schematic diagram of a concentration distribution illustrating the photoacid concentration distribution illustrated in FIG. 5 according to an embodiment of the present disclosure.

FIG. 7 is a schematic cross-sectional view illustrating a partial process of measuring the critical dimension of a semiconductor device according to an embodiment of the present disclosure.

FIG. 8 is a schematic diagram of a concentration distribution illustrating the photoacid concentration distribution illustrated in FIG. 7 of an embodiment of the present disclosure.

9 is a schematic diagram illustrating concentration curves of volatile by-products generated from a photoresist layer measured by a gas analyzer according to an embodiment of the present disclosure.

FIG. 10 is a schematic cross-sectional view illustrating a partial process of measuring the critical dimension of a semiconductor device according to an embodiment of the present disclosure.

FIG. 11 is a schematic cross-sectional view illustrating a partial process of measuring the critical dimension of a semiconductor device according to another embodiment of the present disclosure.

FIG. 12 is a schematic diagram of concentration distribution, illustrating an exemplary photoacid concentration distribution and an exemplary photosensitizer concentration distribution in FIG. 11 according to another embodiment of the present disclosure.

FIG. 13 is a schematic cross-sectional view illustrating a partial process of measuring the critical dimension of a semiconductor device according to another embodiment of the present disclosure.

FIG. 14 is a schematic diagram of concentration distribution, illustrating an exemplary photoacid concentration distribution and an exemplary photosensitive agent concentration distribution in FIG. 13 according to another embodiment of the present disclosure.

15 and 16 are schematic cross-sectional views illustrating a partial process of measuring the critical dimension of a semiconductor device according to another embodiment of the present disclosure.

Specific examples of components and configurations are described below to simplify embodiments of the present disclosure. Certainly, these embodiments are only for illustration, and are not intended to limit the scope of the present disclosure. For example, where a first component is formed on a second component, it may include embodiments where the first and second components are in direct contact, or may include an additional component formed between the first and second components, An embodiment such that the first and second parts do not come into direct contact. In addition, embodiments of the present disclosure may repeat reference numerals and/or letters in many instances. These repetitions are for the purpose of simplicity and clarity and, unless otherwise indicated in the context, do not in themselves imply a specific relationship between the various embodiments and/or configurations discussed.

Additionally, for ease of description, spaces such as "beneath", "below", "lower", "above", "upper" may be used herein Relative relationship terms are used to describe the relationship of one element or feature to another (other) element or feature shown in the figures. The spatially relative terms are intended to encompass different orientations of the elements in use or operation in addition to the orientation depicted in the figures. The device may be at other orientations (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

It should be understood that when forming a component on, connected to, and/or coupled to another component, it may include implementations where these components are formed in direct contact. Examples, and may also include embodiments in which additional components are formed between these components such that the components do not come into direct contact.

It will be understood that although the terms first, second, third etc. may be used herein to describe various elements, components, regions, layers or sections, these elements, components, regions, layers or sections are not constrained by these terms. limits. Rather, these terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the presently advanced concepts.

Unless the context indicates otherwise, when referring to orientation, layout, location, shapes, sizes, amounts, or other measures, Then terms such as "same", "equal", "planar", or "coplanar" as used herein are not necessarily means an exact identical orientation, layout, position, shape, size, quantity, or other measurement, but which means within acceptable variances within, include nearly identical orientation, layout, location, shape, size, quantity, or other measurements, where acceptable variations may occur, for example, due to manufacturing processes. The term "substantially" may be used herein to express this meaning. For example, as substantially the same, substantially equal, or substantially planar, as being exactly the same, equal, or planar, or Yes, they may be the same, equal, or flat within acceptable variances that may occur, for example, due to manufacturing processes.

In this disclosure, a semiconductor device generally refers to a device that can operate by utilizing semiconductor characteristics, and an electro-optic device, a light-emitting display device, a Both a semiconductor circuit and an electronic device are included in the category of semiconductor devices.

It should be understood that in the description of the present disclosure, above (or above (up)) corresponds to the direction of the Z-direction arrow, and below (or below (down)) corresponds to the relative direction of the Z-direction arrow .

It should be understood that the terms "forming", "formed" and "form" may denote and include any creating, building, patterning, planting A method of implanting or depositing an element, a dopant, or a material. Examples of formation methods may include atomic layer deposition, chemical vapor deposition, physical vapor deposition, sputtering, spin coating, diffusion (diffusing), deposition (depositing), growing, implantation, photolithography, dry etching and wet etching, but not limited thereto.

It should be understood that, in the description of the present disclosure, functions or steps mentioned herein may occur out of the order shown in the accompanying drawings. For example, two figures shown in succession may, in fact, be executed substantially concurrently, or may sometimes be executed in the reverse order, depending upon the functions or steps involved.

FIG. 1 is a schematic flowchart illustrating a method 10 for measuring the critical dimension of a semiconductor device 1A according to an embodiment of the present disclosure. 2 to 5 are schematic cross-sectional views illustrating a part of the process of measuring the critical dimension of the semiconductor device 1A according to an embodiment of the present disclosure. FIG. 6 is a schematic diagram of a concentration distribution illustrating the photoacid concentration distribution illustrated in FIG. 5 according to an embodiment of the present disclosure.

Referring to FIG. 1 and FIG. 2 , in step S11 , a substrate 101 may be provided, and the lower layer 103 may be formed on the substrate 101 .

Referring to FIG. 2 , in some embodiments, the substrate 101 may be a monolithic semiconductor substrate completely composed of at least one semiconductor material; the bulk semiconductor substrate does not include any dielectrics, isolation layers or conductive features. . For example, the bulk semiconductor substrate may comprise an elemental semiconductor such as silicon or germanium, a compound semiconductor such as silicon germanium, silicon carbide, gallium arsenide, gallium phosphide, phosphide, or a combination thereof. Indium, indium arsenide, indium antimonide, or other III-V compound semiconductors or II-VI compound semiconductors.

In some embodiments, the substrate 101 may include a semiconductor-on-insulator structure, which consists of a handle substrate, an insulator layer, and an uppermost semiconductor material layer from bottom to top. The handle substrate and the uppermost layer of semiconductor material may comprise the same material as the aforementioned bulk semiconductor substrate. The insulator layer can be a crystalline or amorphous dielectric material, such as an oxide and/or nitride. For example, the insulator layer may be a dielectric oxide, such as an oxide Silicon. As another example, the insulator layer may be a dielectric nitride such as silicon nitride or boron nitride. As another example, the insulator layer may be a stack of a dielectric oxide and a dielectric nitride, such as a stack of silicon oxide and silicon nitride or boron nitride in any order. The insulator layer may have a thickness between about 10 nm to about 200 nm.

In some embodiments, the terms "substrate" and "wafer" used interchangeably mean that a process is performed on a surface or a portion of a surface. Those skilled in the art will also understand that, unless the context clearly states otherwise, reference to the substrate may also refer to only a part of the substrate. Additionally, reference to depositing on the substrate can refer to both a bare substrate and a substrate on which one or more films or features are deposited or formed.

In some embodiments, a plurality of device elements (not shown for clarity) may be formed on the bulk semiconductor substrate or the uppermost semiconductor material layer. Portions of the plurality of device elements may be formed in the bulk semiconductor substrate or in the uppermost layer of semiconductor material. The plurality of device elements may be transistors, such as complementary metal-oxide-semiconductor transistors, metal-oxide-semiconductor field-effect transistors, finfield-effect transistors, the like, or combinations thereof.

Referring to FIG. 2 , the lower layer 103 may be formed on the substrate 101 . The lower layer 103 may be a patterned blanket layer. For example, the lower layer 103 can be a dielectric layer, a barrier layer, an adhesive layer or an etch stop layer. For example, the dielectric layer may include silicon oxide, borophosphosilicate glass, undoped silicate glass, fluorinated silicate glass, low-k dielectric material, the like, or combinations thereof. A low dielectric constant dielectric material may have a dielectric constant less than 3.0 or even less than 2.5. In some embodiments, the low-k dielectric material may have a dielectric constant less than 2.0. These conductive features can be electrically coupled to components of such devices.

In some embodiments, the lower layer 103 may include a plurality of conductive features (not shown for clarity). The conductive features may include multiple interconnect layers and multiple conductive vias. The conductive features can be electrically coupled to the device elements. In some embodiments, the conductive features may include, for example, tungsten, cobalt, zirconium, tantalum, titanium, aluminum, ruthenium, copper, metal carbides (e.g., tantalum carbide, titanium carbide, magnesium carbide), metal nitrogen compounds (such as titanium nitride), transition metal aluminides, or combinations thereof.

In some embodiments, the device elements and the conductive features can be configured together as a plurality of functional units in the first substrate 101 . In the description of the present disclosure, a functional unit generally refers to a functionally related circuit, which has been divided into different distinct units for functional purposes. In some embodiments, these functional units are usually highly complex circuits, such as processor cores, memory controllers or accelerator units. In some other embodiments, the complexity and functionality of a functional unit may be more or less complex.

Please refer to FIG. 1 and FIG. 3 , in step S13 , a photoresist layer 201 may be formed on the lower layer 103 .

Please refer to FIG. 3, for example, the photoresist layer 201 can be an upper coating barrier layer, an upper coating anti-reflection layer, a lower anti-reflection layer, an imaging layer (photoresist), or a layer used to stop etching. A sacrificial and barrier layer (hard mask). In some embodiments, the photoresist layer 201 may include a solvent, a nonactivated polymer resin and a photoacid generator (PGA). In some embodiments, the photoresist layer 201 may further include a crosslinking agent, dye or other additives.

In some embodiments, the fabrication technique of the photoresist layer 201 may include a spin coating Cloth process. In particular, during the spin-coating, a photoresist mixture in a solvent carrier may be dispensed onto the surface of the lower layer 103 while the intermediate semiconductor device is spun rapidly as described in FIG. 2 . The intermediate semiconductor element is rotated until the solvent carrier is substantially removed, and the photoresist mixture can be dried to a film of uniform thickness over the entire surface of the lower layer 103 . The photoresist mixture may include a photoacid polymer resin and a photoacid generator. In some embodiments, the photoresist mixture may further include crosslinking agents, dyes and/or other additives. In some embodiments, the solvent carrier may include, for example, propylene glycol monomethyl ether acetate, water, or a volatile amine-containing compound.

Unactivated polymer resins and photoacid generators can be configured together to form a chemically amplified photoresist system. Typically, a photoacid generator can be exposed to a radiation source and converted to a photoacid. The photoacid then stimulates an activation reaction involving the unactivated polymer resin.

In the case of a positive chemically amplified photoresist system, the photoacid catalyzes the deprotection of protecting groups on the unactivated polymer resin, increasing the polarity of the resin and thus increasing its solubility in an aqueous base. ). Thus, an activation reaction of a positive chemically amplified photoresist converts the non-polar, insoluble polymeric resin into a polar, soluble polymeric resin.

In an example of a negative chemically amplified photoresist system, the photoacid reacts with a crosslinker to stimulate crosslinks between adjacent polymer chains. Thus, activation of a negative chemically amplified photoresist system converts a single-chain, soluble polymer resin into a cross-linked, insoluble polymer resin.

It should be understood that volatile by-products can be generated (or released) in positive chemically amplified photoresist systems as well as in negative chemically amplified photoresist systems. In some embodiments, volatile by-products may include, for example, propylene glycol monomethyl ether acetate, water, carbon dioxide, alcohols, volatile Phosphoric amine-containing compounds, hydrocarbons, aldehydes, vinyl ethers and/or sulfides.

Please refer to FIG. 1 and FIG. 4 , in step S15 , a soft baking process may be performed.

Referring to FIG. 4, during the soft-bake process, the intermediate semiconductor device as described in FIG. removed from the photoresist layer 201 . The curved arrows show that the remaining solvent carrier was removed. For example, additional residual solvent carriers may include propylene glycol monomethyl ether acetate, water, or volatile amine-containing compounds.

Please refer to FIG. 1 and FIG. 4 , in step S17 , a volatile by-product generated from the photoresist layer 201 can be monitored.

Referring to FIG. 4, after the soft bake process, for example, the concentration of volatile by-products of the chemically amplified photoresist system can be monitored by a gas analyzer. This point in time for monitoring volatile by-products can be represented as the first monitoring of volatile by-products (as shown in Figure 9).

In some embodiments, the gas analyzer may be, for example, a residual gas analyzer (RGA), which is similar to devices used in vacuum technology for the detection of gas species and their concentrations. The detector of the residual gas analyzer may be any type of mass spectrometer, such as a quadrupole mass spectrometer. Typically, residual gas analyzers can analyze the incoming gas released (or produced) from the photoresist layer 201 (eg, volatile by-products) by ionizing a portion of the gas molecules in each sample volume, separating the plasma by mass. These gases are in the atmosphere inside the process chamber. The residual gas analyzer may rely on a mass sampling technique that monitors only one or more user-selected high peaks that are characteristic of the gases released from the photoresist layer 201 . The magnitude of the ion current measured by the residual gas analyzer can be used to determine the corresponding concentrations (or fractions) of these gases released from the photoresist layer 201. pressure).

In this example, carbon dioxide is monitored. It should be understood that carbon dioxide is a by-product of the chemically amplified photoresist system after exposure to the radiation source. In other words, theoretically, no signal of carbon dioxide could be detected during this first monitoring period of the volatile by-product. The signal obtained during this first monitoring period of volatile by-products can be used as a baseline.

Please refer to FIG. 1 , FIG. 5 and FIG. 6 , in step S19 , an exposure process 300 may be performed using a mask 501 .

Referring to FIG. 5 , the mask 501 can be aligned with the intermediate semiconductor device described in FIG. 4 . The mask 501 may include a pattern that is transferred onto the photoresist layer 201 . After the alignment of the mask 201 and the intermediate semiconductor device, an exposure process 300 may be performed using a radiation source. For example, the radiation source can be ultraviolet radiation, deep ultraviolet radiation (typically 193nm and 248nm), or extreme ultraviolet radiation (typically 13.5nm). Exposure process 300 may require the use of complex development equipment (such as ArF immersion lithography) and precise masking techniques in order to ensure that radiation is applied precisely to only those portions of photoresist layer 201 that are intended to be exposed. .

5 and 6, during the exposure process 300, photoacid can be generated from the photoacid generator in the exposed portion of the photoresist layer 201 to form a photoacid concentration distribution PAP, which is shown enlarged in FIG. picture. An exemplary reaction to generate photoacid is shown in Equation (1).

After exposure to ultraviolet (UV) radiation, the photoacid generator (Cerium cation (sulfonium cation) can decompose and provide a proton (photoacid) that can stimulate the activation reaction involving the unactivated polymer resin. Details of the activation reaction will be described later. In some embodiments, various gases (eg, volatile by-products) may be generated from the photoresist layer 201 during the exposure process 300 . For example, the gases generated from the photoresist layer 201 during the exposure process 300 may include propylene glycol monomethyl ether acetate, water, carbon dioxide, alcohols, hydrocarbons, and/or sulfides.

FIG. 7 is a schematic cross-sectional view illustrating a part of the process of measuring the critical dimension of a semiconductor device 1A according to an embodiment of the present disclosure. FIG. 8 is a schematic diagram of a concentration distribution illustrating the photoacid concentration distribution illustrated in FIG. 7 of an embodiment of the present disclosure. FIG. 9 is a schematic diagram illustrating concentration curves of volatile by-products generated from photoresist layer 201 measured by a gas analyzer according to an embodiment of the present disclosure.

Please refer to FIG. 1 and FIG. 7 to FIG. 9, in step S21, a post-exposure baking process can be performed, the volatile by-products generated from the photoresist layer 201 can be monitored, and the threshold can be determined according to the monitoring results. size.

Referring to FIGS. 7 and 8 , after the exposure process 300 , a post-exposure bake (PEB) process may be performed immediately. During the post-exposure bake process, the intermediate semiconductor device depicted in FIG. 5 can be subjected to a temperature on the order of the wave-off transition temperature Tg of the unactivated polymer resin. Thermal energy applied to the photoresist layer 201 during the post-exposure bake process may cause the photoacid to diffuse into the photoresist layer 201 to form the photoacid concentration profile PAP as shown in the enlarged view of FIG. 8 . Diffusion of the photoacid can fully activate the unactivated resin in the regions exposed to the radiation source, and also suppress any standing wave effects at the edges of the exposed regions of the photoresist layer 201 . Exemplary photoacid activation reactions are shown in Equation (2) to Equation (4).

In equation (2), the photoacid causes the conversion of the unactivated (insoluble) polymer resin into a soluble product containing polar hydroxyl groups. Unstable leaving groups may decompose spontaneously and produce by-products such as carbon dioxide, isobutene, and protons as shown in Equation (3) and Equation (4). The protons generated by the decomposition of the leaving group can further catalyze the conversion of the unactivated polymer resin. In some other embodiments, other by-products may also be produced during the post-exposure bake process, such as propylene glycol monomethyl ether acetate, water, carbon dioxide, alcohols, volatile amine-containing compounds, hydrocarbons, aldehydes, and/or Or vinyl ether (vinyl ether).

Referring to FIG. 9, the concentration of reaction by-products (such as carbon dioxide in the exemplary reaction) can be monitored as a function of time to determine the end point of the post-exposure bake process. For example, when the activation reaction reaches a process endpoint, the level of by-products may drop, enabling the end of the post-exposure bake process to be detected. In other words, the process duration of the post-exposure bake process is based on chemical changes that occur instead of a fixed process time. As another example, the end point of the post-exposure bake process can be determined by the rate of change of the concentration (such as the slope of the concentration curve or is the first derivative of the concentration curve), the second order rate of change (such as the second derivative of the concentration curve), or a combination thereof. The time point for monitoring volatile by-products when the end of the post-exposure bake process is reached may be represented as a second monitoring of volatile by-products.

In some embodiments, the difference between the measured concentrations of the volatile by-products at the first monitoring location and the second monitoring location can be used to subtract the patterned photoresist layer 201 after the development process described later. critical size.

In some embodiments, after the post-exposure bake process, a cooling process may be performed to cool the intermediate semiconductor device as described in FIG. 7 . After cooling down the process, volatile by-products can be monitored. The point in time at which volatile by-products are monitored after the cooling process can be represented as a third monitoring of volatile by-products.

In some embodiments, volatile byproducts can be continuously monitored from the first monitoring of volatile byproducts to the third monitoring of volatile byproducts. After the development process, the integration of the concentration profile from the first monitor of volatile by-products to the third monitor of volatile by-products can be used to subtract the CD of the patterned photoresist layer 201 .

In some embodiments, depending on the chemically amplified photoresist system used, the activation of the polymer resin can occur primarily during the exposure process 300 or the post-exposure bake process. Many chemically amplified resists are high activation energy systems such as T-Boc protected by polymer resins as described in the exemplary activation reactions. This means that even after photoacid (H ⁺ ) generation by the photoacid generator during the exposure process 300, additional thermal energy is required to initiate activation. Thermal energy is provided by a post-exposure bake process. In this case, the monitoring of the volatile by-products may be performed before the exposure process 300 (eg, the first monitoring of the volatile by-products) and after the post-exposure bake process (eg, the second or third monitoring of the volatile by-products). monitor.

In some embodiments, other chemically amplified photoresist systems, such as those utilizing acetal protection, are low activation energy systems. This means that once the photoacid (H ⁺ ) is generated by the photoacid generator during the exposure process 300, significant activation of the polymer resin occurs even without additional thermal energy. In this case, monitoring of volatile by-products may be performed before the exposure process 300 as well as after the exposure process 300 .

It should be understood that the concentration profile of FIG. 9 is provided for illustrative purposes and does not necessarily represent an actual concentration profile. An actual concentration profile will vary depending on the particular pattern formed in the photoresist layer 201, the particular type of photoresist used, the thickness of the photoresist layer 201, and the like.

FIG. 10 is a schematic cross-sectional view illustrating a partial process of measuring the critical dimension of a semiconductor device 1A according to an embodiment of the present disclosure.

Referring to FIG. 1 and FIG. 10 , in step S23 , a developing process may be performed.

Please refer to FIG. 10 , during the developing process, an aqueous base (aqueous alkali solution) can be added to the exposed and baked photoresist layer 201 to dissolve part of the resin. Depending on whether the chemically amplified photoresist system is positive or negative working, the activated or unactivated polymer resin can be dissolved in the aqueous matrix and removed.

After the aforementioned processing, the carefully created photoresist pattern on the photoresist layer 201 can be used to selectively mask the etching of the underlying layer (eg, the lower layer 103 ) to form a plurality of semiconductor structures with very precise shapes and sizes.

Typically, critical dimension (CD) measurement is achieved by a scanning electron microscope (SEM) using multiple electron beams. However, the electron beams will damage the photoresist, so that CD-SEM measurements can only be performed on dummy marks, which are specially designed in a common way and located on multiple On the scribe lines. In other words, CD-SEM cannot measure an actual CD with actual graphics. In addition, argon fluoride immersion (ArFi) lithography using a chemically amplified photoresist system is more susceptible to these electron beams. During the initial measurement, the CD may shrink significantly to produce a large CD measurement bias. Therefore, it is difficult to determine the actual CD (before injury).

Conversely, by using the concentration difference between the first monitor and the second monitor of volatile by-products or by using the first monitor of volatile by-products to the third monitor of volatile by-products The CD of the patterned photoresist layer 201 is determined by integrating the concentration of the patterned photoresist layer 201, which may be non-destructive to the pattern. That is, the CD of the actual pattern can be measured. It can also imply that virtual markers are not needed for measurements, saving space for metering and allowing more space for multiple functional circuits.

In addition, the CD of the actual pattern can be verified by physical failure analysis (PFA), such as transmission electron microscopy (TEM). After validation of the PFA, the correlation between TEM data and CD determined by monitoring volatile by-products can be determined. In this case, the CD determined by monitoring the volatile by-products alone can be used as a standard for CD measurement. Therefore, the throughput of CD measurement can be improved.

In some embodiments, the residual gas analyzer may be small enough to only collect volatile gases within a specific area. The area can be the area containing an actual pattern in a die, a single die area within a wafer, some die within a wafer, or the entire wafer.

In some embodiments, the spin-coating process, the exposure process 300 , the post-exposure bake process, and the development process may be performed in a lithography tracking system. The residual gas analyzer can be integrated in the post-exposure bake module of the lithography tracking system. For example, a residual gas analyzer can be installed anywhere along the exhaust line of a lithographic tracking system, coupled to a lithographic Trace the exhaust pipe of the system.

FIG. 11 is a schematic cross-sectional view illustrating a partial process of measuring the critical dimension of a semiconductor device 1B according to another embodiment of the present disclosure. FIG. 12 is a schematic diagram of concentration distribution, illustrating an exemplary photoacid concentration distribution and an exemplary photosensitizer concentration distribution in FIG. 11 according to another embodiment of the present disclosure.

Please refer to FIG. 11 , the photoresist layer 201 may include an unactivated polymer resin, a photoacid generator and a photosensitizer generator. The unactivated polymer resin, photoacid generator, and sensitizer generator together configure a photo-sensitized chemically amplified photoresist system that requires a two-step illumination process to generate photoacid.

Please refer to FIG. 11 and FIG. 12 , in the photosensitive chemically amplified photoresist system, a first exposure process 310 can be performed. During the first exposure process 310, a radiation source at a first wavelength can be exposed on the photoresist layer 201 through a mask 501 to form a plurality of exposed regions inside the photoresist layer 201 and a plurality of unresisted regions. Exposure area. During the first exposure process 310, a photosensitizer (PS) is generated from the photosensitizer generator in the exposed regions of the photoresist layer 201 to form a photosensitizer concentration distribution PSP as enlarged in FIG. 12 .

Depending on the chemical composition of the photochemically amplified photoresist system, in some embodiments photoacids may be formed from the photoacid generators inside the exposed regions of the photoresist layer 301 during the first exposure process 310, to form the photoacid concentration profile PAP as enlarged in FIG. 12 . In this case, monitoring of volatile byproducts may be performed (or initiated) prior to the first exposure process 310 .

In other embodiments, there is no overlap between the mildly sensitive range of the sensitizer generator and the mildly sensitive range of the photoacid generator, so that no photoacid is generated during the first exposure process 310 . In this case, after the first exposure process 310, the volatile secondary Product monitoring.

In some embodiments, electron beam (eBeam), KrF (krypton fluoride) or ArF (argon fluoride) exposure may be used for the first exposure process 310 .

FIG. 13 is a schematic cross-sectional view illustrating a partial process of measuring the critical dimension of a semiconductor device 1B according to another embodiment of the present disclosure. FIG. 14 is a schematic diagram of concentration distribution, illustrating an exemplary photoacid concentration distribution and an exemplary photosensitive agent concentration distribution in FIG. 13 according to another embodiment of the present disclosure.

Referring to FIG. 13 and FIG. 14 , a second exposure process 320 may be performed on the photoresist layer 201 . During the second exposure process 320, a radiation source at a second wavelength different from the first wavelength can be exposed on the photoresist layer 201 without any mask. In other words, the second exposure process 320 is a flood exposure process. The chemical composition of the photosensitive chemically amplified photoresist system is selected such that the sensitizer is sensitive to the second wavelength used in the second exposure process 320 while other photoresist components are insensitive. Thus, the radiation source at the second wavelength can cause the sensitizer generated in the previously exposed (i.e., unmasked) regions to amplify the photoacid generated from the photoacid generator molecules in its vicinity, thereby forming 14. Photoacid concentration profile in PAP. The photoacid concentration profile PAP has a higher peak and therefore better contrast.

It should be understood that, even though blanket exposure is involved (i.e., second exposure process 320), unlike conventional blanket exposure processes, no photoacid is generated in these unexposed (masked) regions during first exposure process 310, and therefore There is no DC-bias and high contrast is maintained. This is because, in photochemically amplified photoresist systems, the generation and amplification of photoacids occurs only in the presence of a photosensitive agent.

Compared to the photosensitizer concentration profile PSP in FIG. 12, after the second exposure process 320, the photosensitizer concentration profile PSP may undergo small changes, but in some chemical embodiments, large changes may occur .

In some embodiments, the first wavelength may be less than 300 nm and the second wavelength may be greater than 300 nm or approximately 365 nm.

In some embodiments, an additional heating or baking process may be inserted between the first exposure process 310 and the second exposure process 320 to mitigate the extreme ultraviolet shot noise effect of the first exposure process 310. effect). For example, a heating process can be used between the first exposure process 310 and the second exposure process 320 to diffuse the photosensitive agent and smooth the photosensitive agent concentration distribution PSP affected by the EUV shot noise effect.

15 and 16 are schematic cross-sectional views illustrating a partial process of measuring the critical dimension of a semiconductor device 1B according to another embodiment of the present disclosure.

Referring to FIG. 15 , a post-exposure bake process can be implemented similarly to the procedure described in FIG. 7 , and its description will not be repeated here. The post-exposure bake process also activates the conversion of the unactivated polymer resin. In this case, the monitoring of volatile by-products may be performed (or terminated) after the post-exposure bake process or the cool-down process.

In some embodiments, when a photochemically amplified photoresist system is used, the post-exposure bake process may be omitted. In this case, after the second exposure process 320, monitoring of volatile by-products may be performed (or terminated).

Referring to FIG. 16 , the developing process can be implemented similarly to the procedure described in FIG. 10 , and the description thereof will not be repeated here.

An embodiment of the present disclosure provides a critical dimension measurement method, including providing a substrate; forming a photoresist layer on the substrate; monitoring a volatile by-product generated from the photoresist layer to obtain the volatile by-product a first quantity of the photoresist; exposing the photoresist to a radiation source; monitoring the volatile byproduct produced from the photoresist to obtain a second quantity of the volatile byproduct; and based on the volatile byproduct The first amount of product and the volatile by-product The critical dimension is obtained by the difference between the second quantity.

Another embodiment of the present disclosure provides a critical dimension measurement method, including providing a substrate; forming a photoresist layer on the substrate; exposing the photoresist layer to a radiation source; heating the photoresist layer; continuously monitoring a volatile by-product generated from the photoresist layer on the substrate to a second time point after heating the photoresist layer to obtain an a concentration curve; and subtracting the critical dimension based on the integration of the concentration curve between the first time point and the second time point.

Another embodiment of the present disclosure provides a critical dimension measurement method, including providing a substrate; forming a photoresist layer on the substrate, wherein the photoresist layer includes a solvent, an unactivated polymer resin, a photoacid generator and sensitizer generator; exposing the photoresist layer to a radiation source at a first wavelength; exposing the photoresist layer to a radiation source at a second wavelength, the second wavelength being different from the first wavelength ; heating the photoresist layer; continuously monitoring a volatile by-product generated from the photoresist layer from a first time point after forming the photoresist layer on the substrate to a time point after heating the photoresist layer obtaining a concentration profile of the volatile by-product at a second time point; and subtracting the critical dimension according to the integration of the concentration curve between the first time point and the second time point. The photosensitizer generator is sensitive to the second wavelength, while the photoacid generator is not sensitive to the second wavelength.

Due to the design of the CD measurement method of the present disclosure, the actual pattern CD can be measured without any damage by monitoring the volatile by-products generated from the photoresist layer 201 . Furthermore, no dummy marks for metrology are required. Areas previously occupied by virtual markers for metering can be saved. Therefore, more physical space can be provided for multiple functional circuits, so that the cost can be reduced.

While the present disclosure and its advantages have been described in detail, it should be understood that various changes can be made. changes, substitutions and substitutions without departing from the spirit and scope of the present disclosure as defined by the claims. For example, many of the processes described above can be performed in different ways and replaced by other processes or combinations thereof.

Furthermore, the scope of the present application is not limited to the specific embodiments of the process, machine, manufacture, composition of matter, means, methods and steps described in the specification. Those skilled in the art can understand from the disclosure content of this disclosure that existing or future developed processes, machinery, manufacturing, A composition of matter, means, method, or step. Accordingly, such process, machinery, manufacture, material composition, means, method, or steps are included in the patent scope of this application.

1A: Semiconductor components

101: Base

103: lower layer

201: photoresist layer

Z: Direction

Claims (10)

A method for measuring a critical dimension, comprising: providing a substrate; forming a photoresist layer on the substrate, wherein the photoresist layer includes a solvent, an unactivated polymer resin, a photoacid generator and a photosensitizer to generate agent; exposing the photoresist layer to a radiation source of a first wavelength; exposing the photoresist layer to a radiation source of a second wavelength different from the first wavelength; heating the photoresist layer continuously monitoring a volatile by-product generated from the photoresist layer from a first time point after forming the photoresist layer on the substrate to a second time point after heating the photoresist layer, to obtaining a concentration profile of the volatile by-product; and subtracting the critical dimension based on the integral of the concentration profile between the first time point and the second time point; wherein the sensitizer generator is to the second wavelength sensitive, while the photoacid generator is not sensitive to the second wavelength. The method for measuring critical dimension according to claim 1, wherein the first wavelength is less than 300nm, and the second wavelength is greater than 300nm. The method for measuring critical dimension as described in claim 2, wherein the solvent includes propylene glycol monomethyl ether acetate, water or a volatile amine-containing compound. The measuring method of critical dimension as described in claim 1, wherein the volatile by-products include carbon dioxide, propylene glycol monomethyl ether acetate, water, alcohols, volatile amine-containing compounds, hydrocarbons, aldehydes, vinyl ethers and / or sulfide. The critical dimension measurement method as claimed in claim 4, further comprising performing a soft bake between forming the photoresist layer on the substrate and exposing the photoresist layer to the radiation source at the first wavelength Process. The critical dimension measurement method as claimed in claim 5, wherein performing the soft bake process includes heating the photoresist layer to about a glass transition temperature of the unactivated polymer resin. The method for measuring critical dimension according to claim 6, wherein the volatile by-products produced from the photoresist layer are continuously monitored by a residual gas analyzer. The critical dimension measurement method as claimed in item 7, wherein the residual gas analyzer is integrated in a post-exposure baking module of a lithography tracking system. The method for measuring critical dimension as described in claim 8, further comprising comparing the critical dimension subtracted from the integral of the concentration curve between the first time point and the second time point with a plurality of physical failure analysis results associated. The critical dimension measurement method as claimed in claim 9 further includes performing a development process after heating the photoresist layer.

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