TWI802990B - Burn-in socket provided with sliding operation and burn-in apparatus - Google Patents

Abstract

The invention discloses a burn-in socket providing sliding operation, which includes a seat for receiving and exposing a DUT, and a lid slidably connected with the seat having a pipe connecting interface. The lid is freely movable between a first position and a second position.

Description

Slidable burn-in socket and burn-in device

The present invention relates to a burn-in socket and a burn-in device, in particular to a burn-in socket provided with a slidable operation, and a burn-in device equipped with the burn-in socket.

In the semiconductor or PCB industry, burn-in (Burn-In) or burn-in is a process of testing wafers or chips, and a plurality of chips to be tested (ie DUT) will be installed on the socket of the burn-in board correspondingly. Perform tests on various items, such as temperature, stress, frequency, etc., to determine the yield of the wafer.

Burn-in sockets can be roughly divided into air-cooled, liquid-cooled, and hybrid types according to the heat dissipation mechanism installed. With the advent of the 5G and AI era, the demand for higher power ICs has increased, and the burn-in test for high-power ICs has become more stringent. For example, during the burn-in process, the heat generated by high-power IC chips, such as a heat source greater than 1500 watts, may not be able to meet the burn-in test of such devices with an air-cooled burn-in socket.

Compared with the air-cooling mechanism, the known liquid-cooling mechanism has more advantages, such as reducing the volume occupied by the fan disposed on the heat-generating core, and increasing the contact area between the heat-dissipating interface and the heating element. The first picture illustrates a hybrid burn-in device, which is equipped with air cooling and liquid cooling mechanisms. The device includes a host module (1) and a plurality of test modules (2), wherein the host module (1) includes a heat sink (10), and the test modules (2) are arranged on a burning machine On the board (11), each test module (2) is responsible for testing a device under test (DUT, not shown). The host module (1) is connected to the short side of the burner carrier board (11) to conform to the spatial configuration of the test chamber. A plurality of pipelines for delivering cooling liquid are connected between the radiator (10) and the test module (2), and one end of each pipeline is connected to one side of the test module (2).

Each test module (2) includes a burn-in socket. The second figure illustrates a known flip-type burner socket and its flipping process. The burner socket has a base (21) and a cover (22). The base (21) is used for accommodating the device under test (DUT), and the bottom end of the base (21) has a terminal electrically connected to the burner carrier board (11). One side of the cover (22) is pivotally connected to the base (21), and the cover (22) includes an outer frame (23), multiple fins (24) and a water cooling head (25). The outer frame (23) covers the fins (24) and can provide a fan, and the outer frame (23) is also pivotably connected to one side of the water cooling head (25). The fins (24) are connected above the water cooling head (25) for absorbing the heat below. The water cooling head (25) is used to contact the top of the device under test (DUT) and is connected with at least one flexible delivery pipe (26) to receive cooling water and discharge hot water.

As shown in the figure, the delivery pipe (26) is connected to the water cooling head (25) through the outer frame (23), and when the entire cover (22) is pivoted relative to the base (21) and opened, the delivery pipe ( 26) Because of its flexible characteristics, it is bent and squeezed between the cover (26) and the circuit board, especially when the cover (22) is completely opened, the delivery tube (26) is subjected to Bending and twisting are the most severe. Although the delivery pipe (26) is made of flexible material, repeatedly opening the cover (22) will reduce the service life of the pipe body and cause damage to leak coolant. Alternatively, the body may be bent to such an extent that it interferes with other configurations around the receptacle, causing unwanted bumps and friction. This is one of the problems with the integration of this clamshell socket and water cooling mechanism.

In addition, the burn-in socket for high-power test chips is usually equipped with more cooling fins on the cover (22), which significantly increases the volume and weight of the entire cover (22). Although springs are generally arranged at the pivot joint between the base (21) and the cover (22) of the burner socket, when the cover (22) is switched from a locked position to a released position, it can be automatically assisted by the spring The base (21) springs up, but the socket cover part for high-power testing can no longer effectively support the spring. Therefore, whether the cover required by the high-power test is lifted by a human or a robot arm, it is necessary to ensure that the cover is opened completely and gently to place and take out the device under test. Otherwise, the bulky and heavy cover may damage the electrical structure.

Therefore, it is necessary to develop a burn-in socket suitable for water-cooling mechanisms and a burn-in socket that reduces the risk of operating a large cover.

The object of the present invention is to provide a burner socket that can be slidably operated, comprising: a base for accommodating a device under test and exposing the top of the device under test; a cover slidably connected to the base connected and has a delivery tube connection interface, allowing the cover to slide between a first position and a second position relative to the base; and an operating part, which is pivotally connected to the base and the base Between the cover body, the operating part is moved between a locking position and a release position relative to the cover body, wherein, when the operating part is in the locking position, the cover body is positioned on the base, wherein, when The operating part is located at the release position, and the cover is free to move between the first position and the second position.

In a specific embodiment, the base has a pair of sliding rails for guiding the cover to slide between the first position and the second position relative to the base, and the delivery tube of the cover is connected to the interface between the pair of rails.

In one embodiment, the duct connection interface of the cover includes an inlet port for supplying cooling fluid into the cover and an outlet port for discharging cooling fluid from the cover.

In a specific embodiment, the operating part is a handle, and the handle has two ends connected to the pair of slide rails, and each end has a cam mechanism, so that the handle at the locked position can close the cover by the cam mechanism. Pressed on the base, and the handle at the release position enables the cover to slide along the pair of slide rails through the cam mechanism.

In a specific embodiment, the base has a first delivery tube connection interface connected to a remote coolant source, a second delivery tube connection interface connected to the cover delivery tube connection interface, wherein the first delivery tube connection interface The pipe connection interface communicates with the second delivery pipe connection interface through the interior of the base.

In a specific embodiment, the second delivery tube connection interface of the base is connected to the delivery tube connection interface of the cover through one or more flexible delivery tubes.

In a specific embodiment, the flexible delivery tube has a support chain and a tube supported by the support chain, whereby when the cover slides between the first position and the second position, The flexible delivery tube flexes according to the horizontal displacement of the cover slide.

In a specific embodiment, the cover has a water cooling head for contacting the device under test, the cover has an elastic mechanism, when the operating part is in the locking position, the water cooling head exerts a force on the base When the pressing force is applied, the elastic mechanism exerts an elastic force opposite to the pressing force on the water cooling head.

In a specific embodiment, the cover has a pin, and the base has a positioning hole corresponding to the pin, wherein when the pin is aligned and combined with the positioning hole, the operating part is allowed to be in the locked position, preventing the The cover slides relative to the base.

Another object of the present invention is to provide a slidable burn-in socket, comprising: a base for accommodating a device under test and exposing the top of the device under test; a cover body slidably connected to the device The base is connected and has a delivery pipe connection interface and a water cooling head, so that the cover can slide between a first position and a second position relative to the base; and a handle is pivotally connected to the The base and the cover allow the handle to move relative to the cover between a locking position and a release position, wherein when the handle is in the locking position, the water cooling head of the cover is in a protruding position, wherein , when the handle is at the release position, the cover is free to move between the first position and the second position, and the water cooling head of the cover is at a retracted position.

A further object of the present invention is to provide a burner device, comprising: a burner carrier plate, which is detachably installed in a test chamber; The thickness of the burner device is at least the sum of a height of the burner socket (excluding the handle as the operating part) and a thickness of the burner carrier plate, and when the cover of the burner socket is in the first position and the second The burn-in device does not change in thickness when moving between positions.

In a specific embodiment, when the cover is at the first position, the side of the cover close to the base exposes the base to the device under test, and when the cover is at the second position, the cover Cover the base of the device under test.

In a specific embodiment, when the cover is at the first position, the water cooling head of the cover is at a retracted position, and when the water cooling head of the cover is at a protruding position.

In a specific embodiment, the base and the cover are connected via one or more flexible pipes for exchanging the coolant flowing in the base and the water-cooled head, and when the burn-in socket When the cover moves between the first position and the second position, the flexible delivery tube is not squeezed by the cover and the burner carrier.

Still another object of the present invention is to provide a burner socket that can be slidably operated, comprising: a base for accommodating a device under test and exposing the top of the device under test; a cover body slidably connected to the device the base is connected to make the cover slide relative to the base between a first position and a second position; and an operating part is pivotally connected to the cover so that the operating part is relatively The cover moves between a locking position and a release position, wherein, when the operating part is in the locking position, the cover is positioned on the base, wherein, when the operating part is in the releasing position, the cover Freely move between the first position and the second position.

In a specific embodiment, the cover body has an outer shell and an inner support, the inner support is accommodated in the outer shell in a vertically movable manner, and the inner support has a space for accommodating a water cooling head.

In a specific embodiment, the operating part has a cam mechanism pivotally connected to the housing, and the inner support has an upper surface corresponding to the cam mechanism, wherein the cam mechanism acts as a cam mechanism when the operating part is in the locked position. The larger diameter portion contacts the upper surface of the inner support, and the cam mechanism contacts the upper surface of the inner support with a smaller diameter portion when the operating portion is in the release position.

In a specific embodiment, an elastic mechanism is provided between an inner surface of the housing and a bottom of the inner support, so that the inner support is clamped by the cam mechanism and the spring mechanism.

In a specific embodiment, the bottom of the internal support has at least one pin, and at least one positioning hole is formed on an upper surface of the base, and when the operating part is at the locking position, the pin is combined with the positioning hole.

The present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which certain exemplary embodiments are shown by way of illustration. However, claimed subject matter may be embodied in many different forms, and thus constructions of covered or claimed subject matter are not limited to any example embodiments disclosed in this specification; the example embodiments are merely illustrations. Likewise, the invention resides in providing a reasonably broad scope for claimed subject matter as claimed or covered.

The term "in one embodiment" used in this specification does not necessarily refer to the same embodiment, and the use of "in other (some/some) embodiments" in this specification does not necessarily refer to different embodiments. It is intended, for example, that claimed subject matter includes combinations of all or some of the exemplified embodiments.

Figure 3 A shows the first embodiment (locked state) of the slidable burn-in socket of the present invention. The third figure B shows the first embodiment (release state) of the slidable burn-in socket of the present invention.

The burner socket includes a base (31) and a cover (32). Similar to the base (21) in the second figure, the bottom of the base (31) has terminals connected to the burner carrier board, and is configured to accommodate a device under test (such as a wafer) and expose the top of the device under test. The base (31) basically has a bottom plate (311) and a pair of sliding rails (312) provided on opposite sides of the bottom plate (311). Each slide rail (312) has a groove, extends along opposite sides of the bottom plate (311) and is located above the bottom plate (311), and makes the pair of grooves face each other.

The other opposite sides of the base plate (311) are respectively provided with a first delivery pipe connection interface (313) and a second delivery pipe connection interface (314), wherein the first delivery pipe connection interface (313) can be connected to a remote coolant source or other part of a coolant circuit, the second delivery pipe connection interface (314) is connected to the cover (32). Although not shown, the interior of the bottom plate ( 311 ) may form channels for the first delivery pipe connection interface ( 313 ) and the second delivery pipe connection interface ( 314 ) for delivering cooling liquid. Specifically, the first delivery pipe connection interface (313) and the second delivery pipe connection interface (314) respectively have an inlet port and an outlet port. As shown by the arrow in the figure, the inlet port of the first delivery pipe connection interface (313) receives the cooling liquid from the remote end, and the outlet port of the first delivery pipe connection interface (313) sends the cooling liquid back into the circuit. The outlet port of the second delivery pipe connection interface (314) supplies the cooling liquid to the cover body (32), and the inlet port of the second delivery pipe connection interface (314) receives the cooling liquid of the cover body (32).

It should be understood that the channel should avoid electronic components so as not to affect the transmission of electrical signals. In addition, the port of the second delivery pipe connection interface (314) is arranged at the gap on one side of the bottom plate (311), and the first delivery pipe connection interface (313) and the second delivery pipe connection interface (314) are arranged at the between the pair of slide rails (312).

The cover (32) has two opposite sides, and the two sides of the cover (32) are slidably connected or coupled to the slide rails (312) on both sides of the base (31), whereby the cover (32) ) can move back and forth between a first position and a second position relative to the base (31) and along the groove between the pair of sliding rails (312). The first position and the second position may be termination surfaces of a slide rail (312) groove.

The cover (32) has a water cooling head, which protrudes downward from the bottom of the cover (32) to contact the top of the device to be tested. The cover (32) also has a delivery tube connection interface (321), which is disposed on the top of the cover (32), but the invention is not limited thereto. The delivery pipe connection interface (321) also has corresponding inlet port and outlet port, wherein the inlet port receives the cooling liquid provided by the second delivery pipe connection interface (314), and the outlet port returns the cooling liquid that takes away the heat to the second delivery pipe connection interface (314). The pipe connection interface (314), and finally returns to the coolant circuit via the first delivery pipe connection interface (313). Although not shown, a heat exchange channel is formed in the cover body ( 32 ), which allows the coolant to pass through and take away the heat accumulated in the water block.

The operating part (33) is movably connected to the base (31) and the cover (32), and can move between a locked position (as shown in Figure 3 A) and a release position (as shown in Figure 3 B) . When the operating part (33) is in the locked position, the operating part (33) falls and the mechanism is blocked between the cover (32) and the slide rail (312), so that the cover (32) cannot move relative to the base (31 )slide. When the operation part (33) is located at the release position, the operation part (33) tilts up, and the mechanism hinders removal, so that the cover body (32) can freely slide between the first position and the second position.

Figures 4A and 4B show that the operating part ( 33 ) can be embodied as a handle, which has a bar and arms extending downward from both ends of the bar, and a cam mechanism ( 331 ) is formed at the end of the arm. As shown, the radial distance from the circumference of the cam mechanism (331) to the shaft hole is different, making its structure have different diameters. Referring back to Figures 3 A and 3 B, the cam mechanism (331) is connected between the slide rail (312) of the base (31) and the cover (32), and the cam mechanism (331) is accommodated in the slide rail ( 312) in the groove. Therefore, when the cam mechanism (331) contacts the slide rail (312) with a larger diameter, a mechanical obstacle is generated and the operation part (33) cannot move along the slide rail (312), even if the cover body (32) is in a locked state; When the cam mechanism (331) contacts the slide rail (312) with a smaller diameter, the mechanical resistance is reduced so that the operating part (33) can move along the slide rail (312), even if the cover body (32) is in a released state. The "smaller diameter" and "larger diameter" mentioned in this article are compared by comparing the diameter length from the pivot to the edge. Although not shown, the cam mechanism (331) is pivotably connected to both sides of the cover (32), so that when the operating part (33) moves, the cover (32) is also moved by the operating part (33) The cam mechanism (331) pulls but does not pivot.

Therefore, the operating part ( 33 ) implemented as a handle can serve two purposes, one is to lock and release the cover ( 32 ) via pivoting, and the other is to slide the cover ( 32 ) via the push handle. And, both uses can be done in one motion with one hand.

The flexible delivery pipeline (34) is connected to the delivery pipe connection interface (321) and the second delivery pipe connection interface (314) of the cover body (32) for exchanging coolant. It can be seen from the changes in Figures 3A and 3B that the flexible delivery pipeline (34) flexes with the horizontal displacement of the cover (32), or it can be said that it is connected according to the delivery pipe of the cover (32). The relative position of the interface (321) and the second delivery pipe connection interface (314) is deflected. More specifically, the position of the second delivery pipe connection interface (314) is fixed, and only the delivery pipe connection interface (321) of the cover (32) changes position on a horizontal plane, which means that the delivery pipeline (34) can be flexible. One end is fixed, only the other end can change position along the horizontal plane. This configuration solves the problem of the service life of the delivery pipe in the previous technology, because there is no vertical displacement at one end of the delivery pipeline, and the pipe body is no longer squeezed by the cover (32) and the circuit board below, which greatly reduces the probability of surface friction damage .

Figures 5A to 5D show the second embodiment of the slidable burner socket of the present invention, wherein Figures 5A and 5B show that the operating part (53) is in a release position so that the cover (52) can Relative to the base (51), the fifth C and fifth D diagrams show that the operating part (53) is in a locking position so that the cover (52) is fixed on the base (51).

Compared with the first embodiment, the flexible conveying pipe (54) of the second embodiment shown has a support structure for stabilizing the conveying hose, that is, a drag chain (drag chain) is combined with the aforementioned flexible Delivery tube (34). By virtue of the mechanical characteristics of the drag chain, the flexible form of the flexible delivery pipe (54) can be controlled, and it can be ensured that when the two ends of the delivery pipe (54) are close, that is, the cover (52) shown in the fifth A and fifth B ) moves toward the second delivery tube connection interface of the base (51) to expose the inner side of the base (51), the bent tube body will not expand laterally. In a possible embodiment, the two ends of the towline are connected to the delivery pipe connection interface of the base (51) and the delivery pipe connection interface of the cover (32) respectively by a rotatable mechanism, so as to avoid the tension of the towline. Helps extend service life.

Figures 6A to 6D show the third embodiment of the burner socket which can be slidably operated according to the present invention, and Figure 6 shows that the operating part (63) is in a locked position to fix the cover (62) on the base (61), the sixth figure B shows that the operating part (63) is in a release position so that the movement of the cover (62) is not restricted, and the sixth figure C shows that the cover (62) is displaced to a terminal position to expose the base ( 61) Inside, panel 6D shows another view of panel 6C.

The base (61) is basically a board with a groove in the center for accommodating the device to be tested, and a pair of sliding rails (611) on two sides thereof. Each slide rail (611) is formed with a groove, and the opening of the groove faces the cover body (62). At least one end of each slide rail (611) is provided with a stop portion (612) as a terminal position where the cover (62) can slide. In addition, a pair of positioning holes (613) are formed on both sides of the groove in the base (61), as shown in the sixth figure C, which are used to cooperate with the corresponding parts of the cover (62) to place the cover (62) ) locked in the base (61).

The cover (62) is slidably connected to the slide rail (611) of the base (61). As shown in Figures 6C and 6D, the bottom of the cover (62) has a track (621) matching the groove of the slide rail (611). Through the combination of the slide rail (611) and the track (621), the cover (62) can slide relative to the base (61) between a first position and a second position.

The fin set (622) is included in the cover (62) and partially exposed on the top of the cover (62). The bottom end of the fin group (622) is connected to a water-cooling head (623), as shown in Figure 6D of the bottom, the bottom of the water-cooling head (623) is exposed through an opening (624) at the bottom of the cover (62). The device under test accommodated in the groove of the contact base (61). The air diffusers (625) are respectively provided on the opposite sides of the cover (62), so that convection can be formed between the opposite sides of the cover (62), helping to eliminate the air accumulated in the fins (622) hot.

The operating part ( 63 ) is similar to the aforementioned operating parts ( 33 , 53 ), and has two ends pivotally connected to the cover ( 62 ). Likewise, the operating part (63) can be switched between a locking position (as shown in Figure 6 A) and a release position (as shown in Figure 6 B), so that the burner socket is in a locked state and a released state correspondingly. In the locked state, the operating part (63) forces the water cooling head (623) through the opening (624) to a protruding position, so as to contact the top of the device under test. In the release state, the operating part (63) can force the water cooling head (623) to pass through the opening (624) to a retracted position, and release the device under test.

Figures 7A and 7B show the cross-sectional structure of the third embodiment. In addition to the aforementioned fin set (622), water cooling head (623) and fan set (625), the cover (62) also includes a shell (626) and an internal support (627) accommodated in the shell. The internal support (627) provides space for accommodating the fin set (622) and the water cooling head (623), and can move vertically relative to the shell (626). Two ends of the operating part (63) are respectively located in the slits at the top of the casing (626) and connected to the casing (626) by a pivot (631). Two sides of the water cooling head (623) respectively have a pin (628), which has a more protruding end than the water cooling head (623), so as to facilitate entry into the corresponding positioning hole (613).

Corresponding two sides of the inner support (627) respectively have an upper surface (629), which faces an inner surface of the casing (626) and resists the cam structure connected to the pivot (631). Accordingly, it can be understood that the movement of the inner support (627) in the housing (626) is achieved by controlling the position of the cam mechanism to control the distance between the upper surface (629) and the inner side of the housing (626). And the movement of the inner support (627) enables the fin set (622) and the water cooling head (623) to move between the protruding position and the retracting position.

Figures 8 A and 8 B respectively show the water block (623) and latch (628) in a retracted position and a protruding position, where Figure 8 A shows the water block (623) and the housing (626) inside a At least one spring (S) is also provided between the surfaces for providing an upward elastic force to support the water cooling head (623). When the operating part is in the release position, the upper surface (629) of the inner support (627) is against the cam mechanism with a smaller diameter, even against the inner surface of the housing (626). At this time, the water cooling head ( 623 ) is located at the retracted position away from the groove of the base ( 61 ), and the pin ( 628 ) also leaves the corresponding positioning hole ( 613 ). When the operating part is in the locked position, that is, the position where the handle is dropped, the upper surface ( 629 ) of the inner support ( 627 ) is against the larger diameter of the cam mechanism. At this time, the internal support (627) is pressed downward by the cam mechanism, and the spring (S) exerts a reverse elastic force at the same time, so as to prevent the cooling head (623) from excessively pressing the device under test. The pin (628) is also partially inserted into the positioning hole (613), so that the cover cannot slide between the first position and the second position.

From Figures 8 A to 8 B, the base ( 61 ) at most bears the force brought by the cam mechanism pushing the inner support ( 627 ). Compared with the existing burn-in socket operated by lifting the cover, the base (61) does not need to bear extra gravitational acceleration, so the burn-in socket operated by the sliding cover is more suitable for the cover models with larger volume and weight.

Figures 9 A and 9 B illustrate a burn-in device, wherein a plurality of burn-in sockets operated by the slide cover of the present invention are arranged on a burn-in carrier board (9). The burn-in carrier (9) is a large circuit board on which multiple components are mounted, such as control units, DC/DC converters, heat sinks and/or coolant delivery pipes, etc., and usually has a long side (L ) and a short side (W). One short side (W) located on the outside can be equipped with a handle, while the other short side located on the inside can be equipped with a data bus for connecting to a circuit board in a test chamber so that the burner carrier board (9) receives Power signal, control signal and test signal. The handle can be grasped by the operator during installation, and the entire burner carrier board (9) can be inserted into or removed from the test cavity by pushing or pulling.

As shown in the picture, the orientation of these burner sockets is the same. When the operating part is pulled inward and the cover is pulled inward, the socket is in a released state or an open state, and at this time, the groove in the base is exposed, and the device to be tested can be placed or the device that has been tested can be taken out. When the operating part falls to the outside and the cover is pulled outward, the socket is in a locked state. At this time, the groove in the base has been covered by the cover, and the water cooling head (or a general cooling head) in the cover is located in a protruding position to contact the device under test. Compared with the existing flip-top operation, the burn-in device of the present invention does not need to lift the cover to place or take out the device to be tested, so the thickness or height of the device will not change due to the operation, which is helpful to save space. However, the drawings do not imply that the burner socket operated by the sliding cover of the present invention can only be configured on the burner carrier board according to this arrangement. According to the use environment or the direction of airflow, the direction of opening the cover can be opposite to that shown in the figure or adjusted to be symmetrical.

In addition to the arrangement exemplified in Figure 9A, in a possible embodiment, the slide rail on the base can have a longer distance, and the groove on the base for accommodating the device under test can be bounded by the two ends of the cover Between the positions, the cover is allowed to selectively stay in one of the terminal positions so that the device under test of the base can be exposed. The implication is that by modifying the length of the slide rail and the cam mechanism of the handle, the cover body is not limited to the shape shown in Figure 9A, and the cover can only be opened in one direction.

To sum up, the burn-in socket operated by the sliding cover of the foregoing embodiments of the present invention, through the sliding mechanism of the cover and the base, prevents the flexible tube for conveying the cooling liquid from being over-extruded and twisted, which can increase the usage life. Furthermore, the operation method of the sliding mechanism can also reduce the operation of the acceleration of gravity on the heavy and bulky cover model, reduce the impact on the entire burn-in carrier board, and prolong the service life of the burn-in device.

1 host module 2 Test modules 10 radiator 11 Burning the carrier board 21 base 22 Cover 23 frame 24 fins 25 water block 26 delivery tube 31 base 311 bottom plate 312 rail 313 The first delivery pipe connection interface 314 Second delivery pipe connection interface 32 Cover 321 Conduit connection interface 33 Operation Department 331 Cam mechanism 34 flexible delivery lines 51 base 52 Cover 53 Operation Department 54 flexible delivery tube 61 base 611 slide rail 612 stopper 613 Positioning hole 62 Cover 621 tracks 622 fin set 623 water block 624 openings 625 Wind Scatter Group 626 shell 627 Internal support 628 Latch 629 upper surface 63 Operation Department 631 Pivot 9 Burn the carrier board S spring W short side L long side

The present invention can be further understood with reference to the following drawings and descriptions. Non-limiting and non-exhaustive examples are described with reference to the following drawings. The components in the drawings are not necessarily in actual size; the emphasis is on illustrating the structures and principles.

The first figure shows an example of an air-cooled and liquid-cooled burner unit.

The second figure illustrates a known flip-type burner socket and its flipping process.

Figures 3A and 3B show the first embodiment of the slidable burner socket of the present invention.

Figures 4A and 4B show an embodiment of the operating unit.

Figures 5A to 5D show the second embodiment of the slidable burn-in socket of the present invention.

Figures 6A to 6D show the third embodiment of the slidable burn-in socket of the present invention.

The seventh A and seventh B figures show the cross-section of the third embodiment.

Figures 8A and 8B respectively show that the water cooling head of the third embodiment is in a retracted position and a protruding position according to the release position and the locking position of the operating part.

Figures 9A and 9B illustrate the arrangement of the slidable burner socket of the present invention on the burner carrier board and the direction of opening the cover.

61 base 611 slide rail 612 stopper 613 Positioning hole 62 Cover 625 Wind Scatter Group 63 Operation Department

Claims (26)

A slidable burner socket, comprising: A base for accommodating a device under test and exposing the top of the device under test; a cover slidably connected to the base and having a delivery tube connection interface for sliding the cover relative to the base between a first position and a second position; and an operating part, pivotally connected between the base and the cover, so that the operating part can move relative to the cover between a locked position and a released position, Wherein, when the operating part is at the locking position, the cover is positioned on the base, Wherein, when the operation part is at the release position, the cover is free to move between the first position and the second position. The slidable burner socket according to claim 1, wherein the base has a pair of sliding rails for guiding the cover to slide relative to the base between the first position and the second position, And the connecting interface of the delivery pipe of the cover is located between the pair of sliding rails. The slidable burner socket according to claim 2, wherein the delivery pipe connection interface of the cover includes an inlet port for supplying cooling liquid into the cover and an outlet port for discharging cooling liquid from the cover . The burner socket that can be slidably operated as described in claim 2, wherein the operating part is a handle, and the handle has two ends connected to the pair of slide rails, and each end has a cam mechanism, so that the handle in the locked position The cover is pressed on the base by the cam mechanism, and the handle at the release position enables the cover to slide along the pair of slide rails by the cam mechanism. The slidably operated burner socket as described in claim 2, wherein the base has a first delivery pipe connection interface connected to a remote coolant source, and a second delivery pipe connection interface connected to the cover body delivery pipe connection interface. A tube connection interface, wherein the first delivery tube connection interface communicates with the second delivery tube connection interface through the base. The slidably operable burner socket according to claim 5, wherein the second delivery tube connection interface of the base is connected to the delivery tube connection interface of the cover through one or more flexible delivery tubes. The slidably operated burner socket according to claim 6, wherein the flexible conveying pipe has a support chain and a pipe body supported by the support chain, whereby when the cover is in the first position and When sliding between the second positions, the flexible delivery tube flexes according to the horizontal displacement of the sliding cover. The burner socket that can be slidably operated as described in claim 2, wherein the cover has a water cooling head for contacting the device under test, and the cover has an elastic mechanism. When the operating part is in the locking position, the When the water cooling head exerts a pressing force on the base, the elastic mechanism exerts an elastic force opposite to the pressing force on the water cooling head. The burner socket that can be slidably operated according to claim 2, wherein the cover has a pin, and the base has a positioning hole corresponding to the pin, wherein when the pin is aligned and combined with the positioning hole, the operation The portion is allowed to be in the locked position, preventing the cover from sliding relative to the base. A slidable burner socket, comprising: A base for accommodating a device under test and exposing the top of the device under test; a cover, slidably connected to the base and having a delivery tube connection interface and a water block, allowing the cover to slide relative to the base between a first position and a second position; and a handle pivotally connected to the base and the cover for movement of the handle relative to the cover between a locked position and a released position, Wherein, when the handle is at the locking position, the water cooling head of the cover is at a protruding position, Wherein, when the handle is at the release position, the cover is free to move between the first position and the second position, and the water cooling head of the cover is at a retracted position. The slidably operated burner socket according to claim 10, wherein the base has a pair of grooves for guiding the cover to slide relative to the base between the first position and the second position, And the delivery pipe connection interface of the cover is located between the pair of grooves. The slidable burner socket according to claim 11, wherein the delivery pipe connection interface of the cover includes an inlet port for supplying cooling liquid into the cover and an outlet port for discharging cooling liquid from the cover , and the inlet port and the outlet port are located at a top of the cover. The slidable burner socket as described in claim 11, wherein the handle has two ends connected to the cover, and each end has a cam mechanism, so that the handle at the locked position will be locked by the cam mechanism The water cooling head moves to the protruding position, and the handle at the releasing position moves the water cooling head to the retracting position through the cam mechanism. The slidably operated burner socket as described in claim 11, wherein the base has a first delivery pipe connection interface connected to a remote coolant source, and a second delivery pipe connection interface connected to the cover body. The delivery tube connection interface, wherein the first delivery tube connection interface and the second delivery tube connection interface communicate through the base interior, the first delivery tube connection interface has an inlet port for receiving the cooling liquid from the distal end and the cooling liquid An outlet port for discharging, the second delivery pipe connection interface and the delivery pipe connection interface of the cover are connected via a flexible delivery pipe to exchange the coolant in the base and the water cooling head. The slidably operable burner socket according to claim 11, wherein the flexible conveying pipe has a support chain and a pipe body supported by the support chain, whereby when the cover is in the first position and When sliding between the second positions, the flexible delivery tube flexes according to the horizontal displacement of the sliding cover. The slidably operated burner socket according to claim 11, wherein the cover body has an elastic mechanism, and when the handle is in the locked position, the elastic mechanism provides a buffer between the water cooling head and the base. The burner socket which can be slidably operated according to claim 11, wherein the cover has a pin, and the base has a positioning hole corresponding to the pin, wherein when the handle is at the locking position, the pin is forced to be combined to avoid The cover slides relative to the base. A burner device, comprising: a burner carrier board removably installed in a test cavity; and A plurality of slidable burn-in sockets as described in claim 10, Wherein, the thickness of the burn-in device is at least the sum of a height of the burn-in socket and a thickness of the burn-in carrier plate, and when the cover of the burn-in socket moves between the first position and the second position , the thickness of the burn-in device does not change. The burn-in device according to claim 18, wherein when the cover is at the first position, the side of the cover close to the base exposes the base to the device under test, and when the cover is at the second position When, the cover covers the device under test of the base. The burner device as described in claim 18, wherein when the cover is in the first position, the water cooling head of the cover is in a retracted position, and when the cover is in the second position, the water cooling head of the cover The head is in a protruding position. The burner device as claimed in claim 18, wherein the base and the cover are connected via one or more flexible delivery pipes for exchanging the coolant flowing in the base and the water cooling head, and When the cover of the burner socket moves between the first position and the second position, the flexible delivery tube is not pressed by the cover and the burner carrier. A slidable burner socket, comprising: A base for accommodating a device under test and exposing the top of the device under test; a cover slidably connected to the base such that the cover slides relative to the base between a first position and a second position; and an operating part pivotably connected to the cover, so that the operating part moves relative to the cover between a locked position and a released position, Wherein, when the operating part is at the locking position, the cover is positioned on the base, Wherein, when the operation part is at the release position, the cover is free to move between the first position and the second position. The burner device as described in claim 22, wherein the cover body has an outer shell and an inner support, the inner support is housed in the outer shell in a vertically movable manner, and the inner support has a water block for accommodating space. The burn-in device as claimed in claim 23, wherein the operating part has a cam mechanism pivotally connected to the housing, and the inner support has an upper surface corresponding to the cam mechanism, wherein when the operating part is in the locked position The cam mechanism contacts the upper surface of the inner support with a larger diameter, and the cam mechanism contacts the upper surface of the inner support with a smaller diameter when the operating part is in the release position. The burner device as claimed in claim 23, wherein an elastic mechanism is provided between an inner surface of the housing and a bottom of the inner support, so that the inner support is clamped by the cam mechanism and the spring mechanism. The burner device as described in claim 23, wherein the bottom of the internal support has at least one pin, and an upper surface of the base is formed with at least one positioning hole. When the operating part is in the locked position, the pin is combined with the the positioning hole.

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