TWI800006B - 微型揚聲器結構與微型揚聲器結構的製作方法 - Google Patents

微型揚聲器結構與微型揚聲器結構的製作方法 Download PDF

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Publication number
TWI800006B
TWI800006B TW110135440A TW110135440A TWI800006B TW I800006 B TWI800006 B TW I800006B TW 110135440 A TW110135440 A TW 110135440A TW 110135440 A TW110135440 A TW 110135440A TW I800006 B TWI800006 B TW I800006B
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TW
Taiwan
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manufacturing
micro speaker
speaker
micro
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TW110135440A
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English (en)
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TW202315485A (zh
Inventor
周宏達
吳忠威
李勳
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聖德斯貴股份有限公司
大陸商廈門聖德斯貴電子科技有限公司
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Priority to TW110135440A priority Critical patent/TWI800006B/zh
Publication of TW202315485A publication Critical patent/TW202315485A/zh
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TW110135440A 2021-09-24 2021-09-24 微型揚聲器結構與微型揚聲器結構的製作方法 TWI800006B (zh)

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TW110135440A TWI800006B (zh) 2021-09-24 2021-09-24 微型揚聲器結構與微型揚聲器結構的製作方法

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TW110135440A TWI800006B (zh) 2021-09-24 2021-09-24 微型揚聲器結構與微型揚聲器結構的製作方法

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TW202315485A TW202315485A (zh) 2023-04-01
TWI800006B true TWI800006B (zh) 2023-04-21

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201838908A (zh) * 2017-04-28 2018-11-01 英國商席瑞斯邏輯國際半導體有限公司 Ｍｅｍｓ裝置及製程
CN111757225A (zh) * 2020-06-19 2020-10-09 歌尔微电子有限公司 Mems芯片及其制作方法、mems麦克风
CN111935620A (zh) * 2020-09-23 2020-11-13 瑶芯微电子科技(上海)有限公司 Mems麦克风及其制备方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201838908A (zh) * 2017-04-28 2018-11-01 英國商席瑞斯邏輯國際半導體有限公司 Ｍｅｍｓ裝置及製程
CN111757225A (zh) * 2020-06-19 2020-10-09 歌尔微电子有限公司 Mems芯片及其制作方法、mems麦克风
CN111935620A (zh) * 2020-09-23 2020-11-13 瑶芯微电子科技(上海)有限公司 Mems麦克风及其制备方法

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