TWI799940B - 碳化矽材料驗證方法及裝置 - Google Patents

碳化矽材料驗證方法及裝置 Download PDF

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Publication number
TWI799940B
TWI799940B TW110129529A TW110129529A TWI799940B TW I799940 B TWI799940 B TW I799940B TW 110129529 A TW110129529 A TW 110129529A TW 110129529 A TW110129529 A TW 110129529A TW I799940 B TWI799940 B TW I799940B
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TW
Taiwan
Prior art keywords
verifying
silicon carbide
carbide material
silicon
verifying silicon
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TW110129529A
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English (en)
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TW202307423A (zh
Inventor
王上棋
徐文慶
蔡佳琪
李依晴
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環球晶圓股份有限公司
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Priority to TW110129529A priority Critical patent/TWI799940B/zh
Priority to CN202210499914.1A priority patent/CN115708092A/zh
Publication of TW202307423A publication Critical patent/TW202307423A/zh
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Publication of TWI799940B publication Critical patent/TWI799940B/zh

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TW110129529A 2021-08-10 2021-08-10 碳化矽材料驗證方法及裝置 TWI799940B (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW110129529A TWI799940B (zh) 2021-08-10 2021-08-10 碳化矽材料驗證方法及裝置
CN202210499914.1A CN115708092A (zh) 2021-08-10 2022-05-09 碳化硅材料验证方法及装置

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Application Number Priority Date Filing Date Title
TW110129529A TWI799940B (zh) 2021-08-10 2021-08-10 碳化矽材料驗證方法及裝置

Publications (2)

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TW202307423A TW202307423A (zh) 2023-02-16
TWI799940B true TWI799940B (zh) 2023-04-21

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TW110129529A TWI799940B (zh) 2021-08-10 2021-08-10 碳化矽材料驗證方法及裝置

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CN (1) CN115708092A (zh)
TW (1) TWI799940B (zh)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160231256A1 (en) * 2013-09-20 2016-08-11 Nippon Steel & Sumikin Materials Co., Ltd. Method for evaluating internal stress of silicon carbide monocrystalline wafer and method for predicting warpage in silicone carbide monocrystalline wafer
US20190194823A1 (en) * 2017-12-22 2019-06-27 Showa Denko K.K. METHOD OF MANUFACTURING SiC INGOT
CN112567077A (zh) * 2018-08-13 2021-03-26 昭和电工株式会社 SiC单晶、SiC晶锭的制造方法及SiC晶片的制造方法
TW202117107A (zh) * 2019-10-29 2021-05-01 南韓商Ｓｋｃ股份有限公司 碳化矽晶圓以及碳化矽晶圓之製備方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160231256A1 (en) * 2013-09-20 2016-08-11 Nippon Steel & Sumikin Materials Co., Ltd. Method for evaluating internal stress of silicon carbide monocrystalline wafer and method for predicting warpage in silicone carbide monocrystalline wafer
US20190194823A1 (en) * 2017-12-22 2019-06-27 Showa Denko K.K. METHOD OF MANUFACTURING SiC INGOT
CN112567077A (zh) * 2018-08-13 2021-03-26 昭和电工株式会社 SiC单晶、SiC晶锭的制造方法及SiC晶片的制造方法
TW202117107A (zh) * 2019-10-29 2021-05-01 南韓商Ｓｋｃ股份有限公司 碳化矽晶圓以及碳化矽晶圓之製備方法

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CN115708092A (zh) 2023-02-21
TW202307423A (zh) 2023-02-16

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