TWI799559B - 光子晶片、其製造方法及用於使光學連接器與光子晶片對準之方法 - Google Patents

光子晶片、其製造方法及用於使光學連接器與光子晶片對準之方法 Download PDF

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Publication number
TWI799559B
TWI799559B TW108110842A TW108110842A TWI799559B TW I799559 B TWI799559 B TW I799559B TW 108110842 A TW108110842 A TW 108110842A TW 108110842 A TW108110842 A TW 108110842A TW I799559 B TWI799559 B TW I799559B
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Taiwan
Prior art keywords
methods
photonic
manufacturing
same
optical connectors
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TW108110842A
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English (en)
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TW202001314A (zh
Inventor
馬汀 Ａ 史班納杰
布萊恩 羅伯 寇奇
賈德 包特斯
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美商無蓋燈光電公司
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4225—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements by a direct measurement of the degree of coupling, e.g. the amount of light power coupled to the fibre or the opto-electronic element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4227—Active alignment methods, e.g. procedures and algorithms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Couplings Of Light Guides (AREA)
TW108110842A 2018-04-30 2019-03-28 光子晶片、其製造方法及用於使光學連接器與光子晶片對準之方法 TWI799559B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/967,313 US10527796B2 (en) 2018-04-30 2018-04-30 Photonic input/output coupler alignment
US15/967,313 2018-04-30

Publications (2)

Publication Number Publication Date
TW202001314A TW202001314A (zh) 2020-01-01
TWI799559B true TWI799559B (zh) 2023-04-21

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TW108110842A TWI799559B (zh) 2018-04-30 2019-03-28 光子晶片、其製造方法及用於使光學連接器與光子晶片對準之方法

Country Status (6)

Country Link
US (2) US10527796B2 (zh)
EP (1) EP3564719A1 (zh)
KR (1) KR102480774B1 (zh)
CN (2) CN110412692B (zh)
SG (1) SG10201902045XA (zh)
TW (1) TWI799559B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10527796B2 (en) 2018-04-30 2020-01-07 Juniper Networks, Inc. Photonic input/output coupler alignment
US11409047B2 (en) 2019-11-13 2022-08-09 Electronics And Telecommunications Research Institute Optical coupling method and apparatus
US11251874B1 (en) * 2020-08-31 2022-02-15 Juniper Networks, Inc. Optical redistribution layers for high-channel-count photonics
CN114280723A (zh) * 2020-09-27 2022-04-05 中兴光电子技术有限公司 光芯片、光模块和光路对准方法
US11698308B2 (en) * 2020-10-05 2023-07-11 Openlight Photonics, Inc. Optical temperature measurements in photonic circuits
US11561348B2 (en) * 2020-11-12 2023-01-24 Alpine Optoelectronics, Inc. Optical alignment systems and methods
WO2022155326A1 (en) * 2021-01-18 2022-07-21 Aayuna Inc. Dual layer optical coupling configuration between photonic integrated circuit and external single mode optical fiber
US11675130B2 (en) 2021-09-08 2023-06-13 Cisco Technology, Inc. Splicing optical fibers to photonic integrated circuits

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7412138B1 (en) * 2003-04-07 2008-08-12 Luxtera, Inc. Optoelectronic alignment structures for the wafer level testing of optical and optoelectronic chips
US9513447B1 (en) * 2015-05-14 2016-12-06 Huawei Technologies Co.., Ltd. Active photonic integrated circuit (PIC) with embedded coupling efficiency monitoring
US20180062748A1 (en) * 2016-09-01 2018-03-01 Luxtera, Inc. Method And System For Optical Alignment To A Silicon Photonically-Enabled Integrated Circuit

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7378861B1 (en) * 2003-04-07 2008-05-27 Luxtera, Inc. Optical alignment loops for the wafer-level testing of optical and optoelectronic chips
US8676009B2 (en) * 2011-03-15 2014-03-18 Alcatel Lucent Monolithic photonic integrated circuit
EP3142811A1 (en) * 2014-05-15 2017-03-22 Nanoprecision Products, Inc. Optical connection of optical fibers to grating couplers
US9383516B2 (en) * 2014-09-02 2016-07-05 Huawei Technologies Co., Ltd. System and method for optical input/output arrays
US9335480B1 (en) * 2015-03-17 2016-05-10 Huawei Technologies Co., Ltd. Optical alignment using multimode edge couplers
US20160334575A1 (en) 2015-05-12 2016-11-17 Huawei Technologies Co., Ltd. System and Method for Photonic Switching
US9746617B2 (en) 2015-07-07 2017-08-29 Huawei Technologies Co., Ltd. Optical switches with surface grating couplers and edge couplers
CN107065082B (zh) * 2016-02-01 2019-03-05 硅光电科技股份有限公司 带有边缘耦合器的硅光子低回波损耗封装结构
US10527796B2 (en) 2018-04-30 2020-01-07 Juniper Networks, Inc. Photonic input/output coupler alignment

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7412138B1 (en) * 2003-04-07 2008-08-12 Luxtera, Inc. Optoelectronic alignment structures for the wafer level testing of optical and optoelectronic chips
US9513447B1 (en) * 2015-05-14 2016-12-06 Huawei Technologies Co.., Ltd. Active photonic integrated circuit (PIC) with embedded coupling efficiency monitoring
US20180062748A1 (en) * 2016-09-01 2018-03-01 Luxtera, Inc. Method And System For Optical Alignment To A Silicon Photonically-Enabled Integrated Circuit

Also Published As

Publication number Publication date
CN112946825A (zh) 2021-06-11
TW202001314A (zh) 2020-01-01
US10527796B2 (en) 2020-01-07
KR20190125932A (ko) 2019-11-07
US20190331859A1 (en) 2019-10-31
EP3564719A1 (en) 2019-11-06
CN110412692B (zh) 2021-02-23
US10809461B2 (en) 2020-10-20
US20200033538A1 (en) 2020-01-30
CN112946825B (zh) 2023-02-17
SG10201902045XA (en) 2019-11-28
CN110412692A (zh) 2019-11-05
KR102480774B1 (ko) 2022-12-26

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