TWI791753B - Solution containing aliphatic polycarbonate and method for producing the same, layer containing aliphatic polycarbonate and method for producing the same - Google Patents

Abstract

The present invention provides a raw material for an aliphatic polycarbonate-containing layer for realizing unevenness with high dimensional accuracy, and the aliphatic polycarbonate-containing layer.

The aliphatic polycarbonate-containing solution according to one aspect of the present invention comprises 99.0% by mass or more of the aliphatic polycarbonate having a number average molecular weight of 10,000 or more among all the aliphatic polycarbonates . With this aliphatic polycarbonate-containing solution, when forming irregularities on the aliphatic polycarbonate-containing layer 22 formed using the solution, the aliphatic polycarbonate-containing layer 22 with high dimensional accuracy of the irregularities can be accurately realized. layer.

Description

Solution containing aliphatic polycarbonate, method for producing the same, and solution containing aliphatic polycarbonate Layers of aliphatic polycarbonate and method of making the same

The present invention relates to a solution containing aliphatic polycarbonate and its production method, and a layer containing aliphatic polycarbonate and its production method.

Among the various forms of information terminals and information home appliances required by the industry and consumers, miniaturized electronic devices are represented, and they are used for wiring of various devices in various fields, and their formation methods continue to evolve at a rapid rate.

As a method of forming wiring and the like used in various electronic devices, a manufacturing method using a vacuum process or a photolithography process, which requires a long time and/or expensive equipment, has been used for a long time.

On the other hand, as a process that can simplify or even save energy and facilitate large-scale production, a low-cost and simple method using "nano transfer printing", also known as "imprint" processing, is disclosed. Pattern technology (Patent Document 1). The "embossing" processing method can provide an industrial and even mass-producible manufacturing method.

In addition, the applicant of the present application disclosed an oxide precursor, which can properly control the viscosity of the binder when the layer is formed by printing using a paste or a solution to which a binder composed of aliphatic polycarbonate is added. Spinnability. (Patent Document 2).

[Prior Art Literature]

[Patent Document]

[Patent Document 1] International Publication No. WO2011/138958

[Patent Document 2] International Publication No. WO2016/098423

[Patent Document 3] International Publication No. WO2013/069686

[Patent Document 4] International Publication No. WO2017/047227

As mentioned above, the manufacturing methods represented by the vacuum process and the photolithography process require a lot of processing and a long time to manufacture various devices, which reduces or deteriorates the use efficiency of raw materials and manufacturing energy. Therefore, this manufacturing method is not only unfavorable from the standpoint of industrial property and mass production, but also it is relatively difficult to enlarge the area.

On the other hand, the low-energy manufacturing process represented by the printing method has attracted the attention of the industry from the viewpoint of the flexibility of electronic devices and the above-mentioned industrial or mass production. If a printing method or a coating method is used, a desired layer can be directly patterned on a substrate, and an advantage of omitting an etching process step for patterning can be obtained. However, for the aliphatic polycarbonate-containing layer, especially when it is desired to form an aliphatic polycarbonate-containing layer with desired unevenness (typically fine unevenness), it is necessary to accurately realize high dimensional accuracy. Bumps are very difficult.

Therefore, research and development are ongoing to realize an aliphatic polycarbonate-containing layer having unevenness with high dimensional accuracy that can be used in various devices in various fields including miniaturized electronic devices.

The present invention contributes greatly to the raw material for the aliphatic polycarbonate-containing layer for realizing unevenness with high dimensional accuracy and the realization of the aliphatic polycarbonate-containing layer, and contributes to the realization of the raw material and the aliphatic polycarbonate-containing layer. The manufacturing method of the polycarbonate layer has a great contribution.

The inventors of the present invention, based on the disclosed technical information, have repeatedly studied and analyzed in order to realize a layer containing aliphatic polycarbonate having unevenness with high dimensional accuracy. However, it has been found that even with an aliphatic polycarbonate having a known molecular weight, it is difficult to accurately realize an aliphatic polycarbonate-containing layer having unevenness with excellent dimensional accuracy.

Then, the inventors of the present application repeatedly made various attempts on the layer containing the aliphatic polycarbonate, including adjusting the heating temperature when forming the unevenness, but no concrete results were obtained. However, as a result of further analysis and research on the particularity of the layer containing aliphatic polycarbonate with unevenness, it turns out that it is not the mass average molecular weight that the inventors of the present invention have focused on so far that has a decisive influence on the dimensional accuracy of the uneven shape. , but the number average molecular weight.

Based on the above new findings, the inventors of the present invention challenged to isolate as much as possible an aliphatic polycarbonate of a specific molecular weight, which was considered beneficial to a certain extent in the past. As a result, it was found that the molecular weight above a predetermined value is decisive, and by using an aliphatic polycarbonate dominated by an aliphatic polycarbonate having a high number-average molecular weight, it is possible to accurately realize aliphatic-containing polycarbonate with high dimensional accuracy. Polycarbonate layer. The present invention is created based on the above-mentioned technology.

A solution containing an aliphatic polycarbonate according to one aspect of the present invention, among all the aliphatic polycarbonates in the solution, the aliphatic polycarbonate having a molecular weight of 10,000 or more accounts for 99.0% by mass or more, and contains a number average The aliphatic polycarbonate having a molecular weight of 10,000 or more.

In this aliphatic polycarbonate-containing solution, aliphatic polycarbonate having a molecular weight of less than 10,000 is substantially not contained, or only less than 1.0 mass % is contained. In addition, the aliphatic poly The carbonate solution contains the aliphatic polycarbonate having a number average molecular weight of 10,000 or more. Therefore, when forming roughness on the aliphatic polycarbonate-containing layer formed using the aliphatic polycarbonate-containing solution using, for example, the nano transfer method, the aliphatic polycarbonate-containing unevenness with high dimensional accuracy can be accurately realized. Carbonate layer.

In another solution containing aliphatic polycarbonate of the present invention, in the molecular weight distribution curve of the aliphatic polycarbonate, the distribution area of the aliphatic polycarbonate with a molecular weight of 10,000 or more occupies the total area of the molecular weight distribution curve. Aliphatic polycarbonate with an area of 99.0% or more and a number average molecular weight of 10,000 or more.

The solution containing aliphatic polycarbonate, which contains in the molecular weight distribution curve of aliphatic polycarbonate, the distribution area of aliphatic polycarbonate with a molecular weight of 10000 or more accounts for more than 99.0% of the total area, and the number average molecular weight is 10000 The above aliphatic polycarbonate. In other words, the solution containing aliphatic polycarbonate substantially or hardly contains aliphatic polycarbonate with molecular weight less than 10,000, and the number average molecular weight is 10,000 or more. Therefore, when forming roughness on the aliphatic polycarbonate-containing layer formed using the aliphatic polycarbonate-containing solution using, for example, the nano transfer method, the aliphatic polycarbonate-containing unevenness with high dimensional accuracy can be accurately realized. Carbonate layer.

In addition, in the layer containing aliphatic polycarbonate according to one aspect of the present invention, among all the aliphatic polycarbonates in the solution, the aliphatic polycarbonate having a molecular weight of 10000 or more accounts for 99.0% by mass or more, and The number average molecular weight is 10000 or more.

The aliphatic polycarbonate-containing layer does not substantially contain aliphatic polycarbonate with a molecular weight of less than 10,000, or contains only less than 1.0% by mass. In addition, the aliphatic polycarbonate-containing layer includes the aliphatic polycarbonate having a number average molecular weight of 10,000 or more. Therefore, in the use case For example, when the aliphatic polycarbonate-containing layer is formed with concavities and convexities by the nano-transfer method, the aliphatic polycarbonate-containing layer with high dimensional accuracy of concavities and convexities can be accurately realized.

Also, another aliphatic polycarbonate-containing layer of the present invention comprises, in the molecular weight distribution curve of the aliphatic polycarbonate, the distribution area of the aliphatic polycarbonate having a molecular weight of 10,000 or more accounts for the total area of the molecular weight distribution curve. Aliphatic polycarbonate with an area of 99.0% or more and a number average molecular weight of 10,000 or more.

The layer containing aliphatic polycarbonate, which contains in the molecular weight distribution curve of the aliphatic polycarbonate, the distribution area of the aliphatic polycarbonate with a molecular weight of 10,000 or more accounts for more than 99.0% of the total area of the molecular weight distribution curve, and Aliphatic polycarbonate having a number average molecular weight of 10,000 or more. In other words, the layer containing aliphatic polycarbonate substantially or hardly contains aliphatic polycarbonate with a molecular weight of less than 10,000, and has a number average molecular weight of 10,000 or more. Therefore, when the aliphatic polycarbonate-containing layer is formed with irregularities using, for example, a nano transfer method, the aliphatic polycarbonate-containing layer having irregularities with high dimensional accuracy can be accurately realized.

In addition, the method for producing an aliphatic polycarbonate-containing solution according to the present invention includes a separation step of separating the aliphatic polycarbonate-containing solution with a molecular weight of less than 10,000 from the aliphatic polycarbonate-containing solution. The aliphatic polycarbonate is separated so that the aliphatic polycarbonate having a molecular weight of 10,000 or more is 99.0% by mass or more, and the number average molecular weight is 10,000 or more.

According to the method for producing an aliphatic polycarbonate-containing solution, aliphatic polycarbonate containing aliphatic polycarbonate having a molecular weight less than 10,000 substantially does not contain aliphatic polycarbonate having a molecular weight of less than 10,000. A carbonate solution, or a solution containing only less than 1.0% by mass of aliphatic polycarbonate. In addition, according to the manufacturing method of this aliphatic polycarbonate containing solution, the number average molecular weight can manufacture the aliphatic polycarbonate containing solution of 10000 or more. Therefore, when forming roughness on the aliphatic polycarbonate-containing layer formed using the aliphatic polycarbonate-containing solution using, for example, the nano transfer method, the aliphatic polycarbonate-containing unevenness with high dimensional accuracy can be accurately realized. Carbonate layer.

In addition, another method for producing an aliphatic polycarbonate-containing solution of the present invention includes a separation step of separating the aliphatic polycarbonate with a molecular weight of less than 10,000 from the aliphatic polycarbonate-containing solution. Separation of aliphatic polycarbonate, so that in the molecular weight distribution curve of aliphatic polycarbonate, the distribution area of aliphatic polycarbonate with a molecular weight of more than 10000 accounts for more than 99.0% of the total area of the molecular weight distribution curve, and the number average molecular weight is More than 10000.

According to the method for producing an aliphatic polycarbonate-containing solution, the aliphatic polycarbonate having a molecular weight of 10,000 or more in the molecular weight distribution curve of the aliphatic polycarbonate can be produced by the separation step of separating an aliphatic polycarbonate having a predetermined molecular weight. Solutions containing aliphatic polycarbonate in which the distribution area of aliphatic polycarbonate accounts for more than 99.0% of the total area of the molecular weight distribution curve, or containing substantially or almost no aliphatic polycarbonate with a molecular weight of less than 10,000 Solutions of carbonates containing aliphatic polycarbonates. In addition, according to the production method of this aliphatic polycarbonate-containing solution, a solution containing an aliphatic polycarbonate having a number average molecular weight of 10,000 or more can be produced. Therefore, when forming roughness on the aliphatic polycarbonate-containing layer formed using the aliphatic polycarbonate-containing solution using, for example, the nano transfer method, the aliphatic polycarbonate-containing unevenness with high dimensional accuracy can be accurately realized. Carbonate layer.

In addition, the method for producing an aliphatic polycarbonate-containing layer according to the present invention includes the step of forming the aliphatic polycarbonate-containing layer by heating the aliphatic polycarbonate-containing solution on the substrate. Form a layer on or above it, thereby forming a layer containing aliphatic polycarbonate; in the layer containing aliphatic polycarbonate, among all aliphatic polycarbonates in the solution, the molecular weight is The aliphatic polycarbonate having a number average molecular weight of 10,000 or more is 99.0% by mass or more, and the aliphatic polycarbonate having a number average molecular weight of 10,000 or more is contained.

The method for producing the layer containing aliphatic polycarbonate includes the step of using a solution containing aliphatic polycarbonate to form the layer containing aliphatic polycarbonate; in the layer containing aliphatic polycarbonate, in the Among all the aliphatic polycarbonates in the solution, the aliphatic polycarbonate having a molecular weight of 10,000 or more is 99.0% by mass or more, and the aliphatic polycarbonate having a number average molecular weight of 10,000 or more is contained. Therefore, when the aliphatic polycarbonate-containing layer is formed with irregularities using, for example, a nano transfer method, the aliphatic polycarbonate-containing layer having irregularities with high dimensional accuracy can be accurately realized.

In addition, another method for producing an aliphatic polycarbonate-containing layer of the present invention includes the step of forming the aliphatic polycarbonate-containing layer by heating the aliphatic polycarbonate-containing solution on the substrate. Form a layer on or above it to form a layer containing aliphatic polycarbonate; the solution containing aliphatic polycarbonate contains aliphatic polycarbonate with a molecular weight of 10,000 or more in the molecular weight distribution curve of aliphatic polycarbonate The distribution area of polycarbonate accounts for more than 99.0% of the total area of the molecular weight distribution curve, and the aliphatic polycarbonate with a number average molecular weight of 10,000 or more.

The method for producing the layer containing aliphatic polycarbonate includes the step of forming the layer containing aliphatic polycarbonate using a solution containing aliphatic polycarbonate; the solution containing aliphatic polycarbonate contains the aliphatic polycarbonate In the molecular weight distribution curve of polycarbonate, the distribution area of aliphatic polycarbonate with a molecular weight of 10,000 or more accounts for 99.0% or more of the total area of the molecular weight distribution curve, and the aliphatic polycarbonate with a number average molecular weight of 10,000 or more. Therefore, when the aliphatic polycarbonate-containing layer is formed with irregularities using, for example, a nano transfer method, the aliphatic polycarbonate-containing layer having irregularities with high dimensional accuracy can be accurately realized.

In addition, in this case, "the process from liquid to colloidal state", as a representative example, refers to heat treatment to a certain extent (typically 80% or more in mass ratio relative to the solvent as a whole, but not limited to This value) removes the solvent, but the aliphatic polycarbonate is substantially decomposed or removed.

Also, the "layer" in this case is not only a layer, but also includes the concept of a membrane. On the contrary, the "membrane" in this case is not only a membrane, but also includes the concept of layers.

In addition, the "substrate" in this application is not limited to the base of a plate-shaped object, but also includes bases of other forms (such as curved surfaces) and base materials. In addition, in the various embodiments described later in this case, "coating" refers to forming a layer on a substrate by a low-energy manufacturing process. The low-energy manufacturing process is typified by printing, spin coating, rod coating, etc. coating method, slit coating method or nano transfer method.

In addition, in this application, "substantially excluding aliphatic polycarbonate with a molecular weight of less than 10,000" refers to a commercially available analysis device (manufactured by TOSOH Co., Ltd., model: HLC-8020) at the time of filing this application. ), below the detection limit.

According to the aliphatic polycarbonate-containing solution according to one aspect of the present invention, when the aliphatic polycarbonate-containing layer formed using the aliphatic polycarbonate-containing solution is formed with unevenness using, for example, a nano transfer method, it is possible to A layer containing aliphatic polycarbonate that accurately realizes unevenness with high dimensional accuracy.

Also, according to the aliphatic polycarbonate-containing layer of the present invention, when the aliphatic polycarbonate-containing layer is formed with concavities and convexities using, for example, a nano transfer method, it is possible to accurately realize the concavity and convexity with high dimensional accuracy. A layer of aliphatic polycarbonate.

Also, according to the method for producing a solution containing aliphatic polycarbonate according to one of the present invention, it is possible to provide an The raw material of the aliphatic polycarbonate-containing layer that can accurately realize the unevenness with high dimensional accuracy when the formed aliphatic polycarbonate-containing layer forms unevenness.

Also, according to the method for producing an aliphatic polycarbonate-containing layer according to one aspect of the present invention, it is possible to provide an aliphatic polycarbonate-containing layer that can accurately realize unevenness with high dimensional accuracy when forming unevenness using, for example, a nano transfer method. layer.

10: Substrate

10a: Surface of the substrate

22: layer containing aliphatic polycarbonate

22a: Area pressed by the convex part of the mold M1

23a: Protrusion

23b: Bottom

24: A layer containing aliphatic polycarbonate irradiated with ultraviolet light

72:Metallic printing ink

74: metal layer

80: Ultraviolet light irradiation device

90: Coating device

100, 200: composite components

M1: Mold

The first figure is a graph showing an example of TG-DTA characteristics of a solution containing aliphatic polycarbonate according to the first embodiment.

The second graph shows the molecular weight distribution obtained by gel permeation chromatography (hereinafter also referred to as "GPC") for the aliphatic polycarbonate contained in the solution containing the aliphatic polycarbonate in the first embodiment. chart.

The third figure is a graph showing the molecular weight distribution obtained by GPC for the aliphatic polycarbonate contained in the other aliphatic polycarbonate-containing solution in the first embodiment.

The fourth figure is a graph showing the molecular weight distribution obtained by GPC for the aliphatic polycarbonate contained in the other aliphatic polycarbonate-containing solution in the first embodiment.

The fifth figure is a graph showing the molecular weight distribution obtained by GPC for the aliphatic polycarbonate contained in the other aliphatic polycarbonate-containing solution in the first embodiment.

The sixth figure is a graph showing the molecular weight distribution obtained by GPC for the aliphatic polycarbonate contained in the aliphatic polycarbonate-containing solution of the comparative example.

The seventh figure is a side view showing the overall composition of the composite member in the second embodiment.

The eighth figure is a schematic cross-sectional view showing one process of the manufacturing method of the composite member in the second embodiment.

Figure 9 is a schematic cross-sectional view showing one process of the manufacturing method of the composite member in the second embodiment.

Figure 10A is a schematic cross-sectional view showing one of the manufacturing methods of the composite member in the second embodiment.

FIG. 10B is an example of a graph showing the result of step difference measurement, and the step difference measurement result shows a process of the manufacturing method of the composite member in the second embodiment.

Figure 11 is a schematic cross-sectional view showing a process of a manufacturing method of a composite member in a comparative example.

Figure 12 is a schematic cross-sectional view showing one of the manufacturing methods of the composite member in the second embodiment.

Figure 13 is a schematic cross-sectional view showing one process of the manufacturing method of the composite component in the second embodiment.

Figure 14 is a schematic cross-sectional view showing one of the manufacturing methods of the composite member in the second embodiment.

Fig. 15 is a schematic cross-sectional view showing one process of the manufacturing method of the composite member in the second embodiment.

Figure 16 is a schematic cross-sectional view showing one process of the manufacturing method of the composite member in the second embodiment.

A composite member, an aliphatic polycarbonate-containing layer, and a method for producing the composite member according to an embodiment of the present invention will be described in detail with reference to the drawings. In addition, in the description here, in all the drawings, unless otherwise mentioned, common reference signs are given to common parts. In addition, the elements of the various embodiments described in the drawings do not necessarily maintain the scale of each other. In addition, in order to make each drawing easy to see, some symbols are omitted.

<The first embodiment>

1. Solution containing aliphatic polycarbonate, layer containing aliphatic polycarbonate, and methods for producing the same

The solution containing aliphatic polycarbonate (may contain unavoidable impurities, hereinafter the same) of this embodiment is the layer containing aliphatic polycarbonate (may contain unavoidable impurities, hereinafter the same) of this embodiment. raw material. In addition, the aliphatic polycarbonate-containing layer having unevenness with high dimensional accuracy can be patterned with high dimensional accuracy by a simple subsequent step. The aliphatic polycarbonate-containing solution of the present embodiment and the aliphatic polycarbonate-containing layer of the present embodiment will be described below.

(About solution containing aliphatic polycarbonate and layer containing aliphatic polycarbonate)

In this embodiment, among all the aliphatic polycarbonates, the aliphatic polycarbonate having a molecular weight of 10000 or more is dissolved in a certain The state in a solvent (typically an organic solvent) constitutes the "solution containing aliphatic polycarbonate" in this embodiment. In addition, the above-mentioned "all" means all in the solution containing the aliphatic polycarbonate. In addition, if other expressions are used, in the molecular weight distribution curve of aliphatic polycarbonate, the distribution area of aliphatic polycarbonate with a molecular weight of 10,000 or more accounts for the The total area of the molecular weight distribution curve is 99.0% or more, and the aliphatic polycarbonate-containing solution containing the number-average molecular weight of 10,000 or more is the "aliphatic polycarbonate-containing solution" of this embodiment. .

Also, by heating the solution containing the aliphatic polycarbonate, the solvent is removed to a state where it can be used in nano transfer method or various printing methods (for example, screen printing method) (representatively referred to as "glue"). State") is the "layer containing aliphatic polycarbonate" in this embodiment.

The solution containing aliphatic polycarbonate in this embodiment mainly contains aliphatic polycarbonate, but may also contain compounds, compositions or materials other than aliphatic polycarbonate. In addition, in the solution containing the aliphatic polycarbonate, the lower limit of the content of the aliphatic polycarbonate is not particularly limited, but as a representative, the mass ratio of the aliphatic polycarbonate to the total amount of solute is 80 %above. In addition, in the solution containing the aliphatic polycarbonate, the upper limit of the content of the aliphatic polycarbonate is not particularly limited, and as a representative, the mass ratio of the aliphatic polycarbonate to the total amount of the solute is 100%. the following.

In addition, the aliphatic polycarbonate-containing layer becomes the aliphatic polycarbonate-containing layer in which unevenness is formed, for example, by an embossing step described later.

(Example of solution containing aliphatic polycarbonate and layer containing aliphatic polycarbonate)

In this embodiment, an aliphatic polycarbonate having good thermal decomposability is used. Such aliphatic polycarbonate has a high oxygen content and can be decomposed into low-molecular compounds at a relatively low temperature.

Also, in this embodiment, the organic solvent that can be used in the solution containing aliphatic polycarbonate, that is, the "solution containing aliphatic polycarbonate", as long as it is an organic solvent that can dissolve aliphatic polycarbonate, then Not particularly limited. As a specific example of the organic solvent, it is preferable to use the organic solvent disclosed in International Publication No. WO2016/098423.

In addition, in the solution containing aliphatic polycarbonate, that is, the solution containing aliphatic polycarbonate, the dispersant and/or plasticizer disclosed in International Publication No. WO2016/098423 can be added according to demand. .

Also, the method of forming the aliphatic polycarbonate-containing layer of the present embodiment is not particularly limited. In a preferred aspect, the layers are formed by a low energy manufacturing process. More specifically, it is preferable to form an aliphatic polycarbonate-containing layer having concavities and convexities formed on the base material by a particularly simple method such as a nano transfer method.

<TG-DTA (Thermogravimetry and Differential Thermal) Characteristics>

Here, the inventors of the present invention investigated more specifically the process of decomposition and disappearance of aliphatic polycarbonate, which can be decomposed into low-molecular-weight compounds at a relatively low temperature.

The first figure is a representative example of aliphatic polycarbonate, that is, polypropylene carbonate as a solute solution (that is, the solution containing aliphatic polycarbonate in this embodiment) of an example of its TG-DTA characteristics chart. In addition, this graph shows the results of the DEGMEA solution containing 6.25% by mass of polypropylene carbonate under normal pressure. Also, as shown in the first figure, the solid line in the figure is the thermogravimetric (TG) measurement result, and the dotted line in the figure is the differential thermal (DTA) measurement result.

From the results of thermogravimetric measurement shown in the first figure, it was observed that the solvent of the solution containing aliphatic polycarbonate disappeared at around 140°C to around 190°C, and a part of the polypropylene carbonate itself was decomposed or even disappeared, resulting in weight obviously decrease. It is also considered that polypropylene carbonate is changed into carbon dioxide and water by this decomposition. Also, from the results shown in the first figure, it was confirmed that 90 wt% or more of the aliphatic polycarbonate was decomposed and removed at around 190°C. When observed in more detail, it can be seen that at around 250°C, more than 95 wt% of the aliphatic polycarbonate is decomposed, and at around 260°C, the aliphatic polycarbonate is almost completely (99 wt%) decomposed. Therefore, by adopting heat treatment at 250°C or higher (more preferably 260°C or higher) The aliphatic polycarbonate-containing solution that substantially disappears or is removed may decompose or decompose the aliphatic polycarbonate-containing layer formed by heating the layer of the aliphatic polycarbonate-containing solution. is removed. Therefore, it is possible to function, for example, as a sacrificial layer for the formation of a metal layer using a layer having high dimensional accuracy formed of the aliphatic polycarbonate-containing layer having unevenness with high dimensional accuracy. The pattern is formed with a layer of aliphatic polycarbonate. In other words, the pattern of the aliphatic polycarbonate-containing layer can be decomposed or removed without substantially leaving its own residue.

In addition, the above-mentioned results are the result of decomposing the aliphatic polycarbonate by heat treatment for a short time, but in the case of heat treatment for a long time, even at a relatively low temperature (for example, 180° C.) , It was also confirmed that the aliphatic polycarbonate was sufficiently decomposed. In other words, the typical lower limit of the temperature at which the aliphatic polycarbonate is decomposed or removed by heating can be said to be 180°C. However, the temperature of the lower limit is not limited to the temperature at which one or more of the aliphatic polycarbonates are combined, but means that it can be confirmed that the aliphatic polycarbonate is substantially or almost decomposed. reduced temperature. Therefore, by using a layer containing aliphatic polycarbonate that is substantially or almost decomposed or removed when heated at 180° C. or higher, it can be used as a sacrificial layer for the formation of a metal layer, for example, as described above. The sacrificial layer is formed by patterning a layer containing aliphatic polycarbonate with high dimensional accuracy. In other words, the pattern of the aliphatic polycarbonate-containing layer can be decomposed or removed without substantially leaving its own residue.

In addition, a typical example of the pattern of the layer containing the aliphatic polycarbonate is a representative pattern of lines and spaces or dots that can be used in the field of nano transfer printing, the field of semiconductors, or the field of electronic devices, but The shape of the pattern of this embodiment is not limited to these patterns. The aliphatic polycarbonate-containing layer having various known pattern shapes may also be included in the "pattern of the aliphatic polycarbonate-containing layer" in this embodiment.

(About the type of aliphatic polycarbonate)

In this embodiment, polypropylene carbonate is used as an example of aliphatic polycarbonate, but the type of aliphatic polycarbonate used in this embodiment is not particularly limited. For example, an aliphatic polycarbonate obtained by polymerizing epoxide and carbon dioxide is also a preferred aspect that can be used in this embodiment. By using such an aliphatic polycarbonate that polymerizes epoxy and carbon dioxide, it is possible to improve thermal decomposition by controlling the structure of the aliphatic polycarbonate, and to obtain an aliphatic polycarbonate with a desired molecular weight. effect of esters. Especially among the aliphatic polycarbonates, the aliphatic polycarbonate is preferably selected from polyethylene carbonate, polypropylene carbonate, and at least one of the group consisting of polybutylene carbonate. Furthermore, as the layer containing aliphatic polycarbonate, from the viewpoint of achieving higher liquid repellency, the aliphatic polycarbonate is preferably selected from the group consisting of polypropylene carbonate and polybutylene carbonate. At least 1 of them.

In addition, the above-mentioned epoxy is not particularly limited as long as it polymerizes with carbon dioxide to form an aliphatic polycarbonate having an aliphatic structure in its main chain. For example, ethylene oxide, propylene oxide, 1-epoxybutylene, 2-epoxybutylene, isobutylene oxide, 1-epoxypentane, 2-epoxypentane, 1-epoxyhexyl Alkane, 1-epoxyoctane, 1-epoxydecane, epoxycyclopentane, epoxycyclohexane, phenyloxirane, vinyl epoxycyclohexane, 3-phenyloxypropylene, 3,3,3-Trifluoropropylene oxide, 3-naphthyloxypropylene, 3-phenoxypropylene oxide, 3-naphthyloxypropylene oxide, butadiene monoxide, 3-ethylene Epoxides such as oxypropylene oxide and 3-trimethylsiloxypropylene oxide are examples that can be used in this embodiment. Among these epoxides, ethylene oxide, propylene oxide, and 1,2-butylene oxide are preferably used from the viewpoint of having high polymerization reactivity with carbon dioxide. In addition, each of the above-mentioned epoxides may be used alone, respectively, or may be used in combination of two or more.

(About the production method of aliphatic polycarbonate)

As an example of the production method of the aliphatic polycarbonate of the present embodiment, a method of polymerizing epoxy and carbon dioxide in the presence of a metal catalyst or the like can be employed.

Here, the production example of the aliphatic polycarbonate is as follows. The interior of a 1L (liter) autoclave equipped with a stirrer, a gas introduction tube, and a thermometer was replaced with a nitrogen atmosphere beforehand, and the reaction solution containing an organic zinc catalyst, hexane, and propylene oxide were added. Next, carbon dioxide was added while stirring to replace the inside of the reaction system with a carbon dioxide atmosphere, and carbon dioxide was filled until the inside of the reaction system became about 1.5 MPa. Thereafter, the temperature of the autoclave was raised to 60° C., and a polymerization reaction was performed for several hours while replenishing carbon dioxide consumed by the reaction. After the reaction was completed, the autoclave was cooled, depressurized, and filtered. Thereafter, polypropylene carbonate was obtained by drying under reduced pressure.

In addition, as the metal catalyst mentioned above, it is preferable to use the catalyst disclosed in International Publication No. WO2016/098423, especially the organozinc catalyst.

In addition, as the above-mentioned organozinc catalyst, it is preferable to use the catalyst disclosed in International Publication No. WO2016/098423.

Here, the production example of the organic zinc catalyst is as follows. First, zinc oxide, glutaric acid, acetic acid, and toluene were added to a four-necked flask equipped with a stirrer, a nitrogen gas introduction tube, a thermometer, and a reflux cooling tube. Next, after replacing the inside of the reaction system with a nitrogen atmosphere, the temperature of the flask was raised to 55° C., and the mixture was stirred at the same temperature for 4 hours to perform the reaction treatment of each of the aforementioned materials. Thereafter, the temperature was raised to 110° C., and stirred at the same temperature for 4 hours to perform azeotropic dehydration and only water was removed. Thereafter, the flask was cooled to room temperature, whereby a reaction solution containing an organic zinc catalyst was obtained. Separately, a part of the reaction solution was taken out and filtered, and IR measurement was performed on the obtained organozinc catalyst (manufactured by Thermo Nicolet Japan Co., Ltd., trade name: AVATAR360). As a result, no peaks based on carboxylic acid groups were confirmed.

In addition, the amount of the metal catalyst used in the polymerization reaction is preferably the amount disclosed in International Publication No. WO2016/098423.

In addition, the reaction solvent used in the above-mentioned polymerization reaction is not particularly limited according to need. Specifically, the example disclosed in International Publication No. WO2016/098423 can be used.

In addition, the usage amount of the above-mentioned reaction solvent is preferably the amount disclosed in International Publication No. WO2016/098423.

In addition, in the above-mentioned polymerization reaction, there is no particular limitation as a method for reacting an epoxy oxide and carbon dioxide in the presence of a metal catalyst. For example, the method disclosed in International Publication No. WO2016/098423 can be used.

In addition, the use pressure of the carbon dioxide used for the above-mentioned polymerization reaction is not specifically limited. As a representative thereof, the pressure disclosed in International Publication No. WO2016/098423 can be used.

In addition, the polymerization reaction temperature in the said polymerization reaction is not specifically limited. Typically, it is preferably from 30°C to 100°C, more preferably from 40°C to 80°C. When the polymerization reaction temperature is lower than 30° C., there is a possibility that the polymerization reaction takes a long time. Moreover, when the polymerization reaction temperature exceeds 100 degreeC, there exists a possibility that a side reaction may generate|occur|produce and a yield may fall. Since the polymerization reaction time varies depending on the polymerization reaction temperature, it cannot be generalized, but as a representative, it is preferably 2 hours to 40 hours.

After the completion of the polymerization reaction, the following steps are performed on the obtained aliphatic polycarbonate, whereby the solution containing the aliphatic polycarbonate of this embodiment can be produced.

(About the production method of the solution containing aliphatic polycarbonate)

In this embodiment, after dissolving the above-mentioned aliphatic polycarbonate in an organic solvent (for example, diethylene glycol monoethyl ether acetate) that can dissolve the aliphatic polycarbonate, the aliphatic polycarbonate is removed by filtration. In addition to the catalyst mentioned above. Thereafter, the aliphatic polycarbonate-containing solution of the present embodiment can be produced by adopting a separation step capable of separating the aliphatic polycarbonate having a molecular weight in a specific numerical range as much as possible.

[Separation step]

Specifically, in the separation step of this embodiment, an ultrafiltration membrane (UF membrane) with a molecular weight cutoff of 10,000 is used to discharge aliphatic polycarbonate with a molecular weight of less than 10,000 from the above-mentioned filtered filtrate to the permeate filtrate side for separation. Afterwards, the non-breakthrough filtrate was concentrated and dried.

The aliphatic polycarbonate having a molecular weight in a specific numerical range obtained by carrying out the above separation step is dissolved in an organic solvent (for example, diethylene glycol monoethyl ether acetate) in which the aliphatic polycarbonate can be dissolved. As a result, an aliphatic polycarbonate-containing solution that satisfies the following (X) or (Y) in the present embodiment in the analysis result described later can be produced.

(X) Among all the aliphatic polycarbonates, the aliphatic polycarbonate having a molecular weight of 10,000 or more accounts for 99.0% by mass or more, and the aliphatic polycarbonate containing the aliphatic polycarbonate having a number average molecular weight of 10,000 or more polycarbonate solution

(Y) A solution containing an aliphatic polycarbonate having a molecular weight distribution curve in which the portion with a molecular weight of 10,000 or more accounts for 99.0% or more of the total area, and containing an aliphatic polycarbonate with a number average molecular weight of 10,000 or more

Several examples of the aliphatic polycarbonate-containing solution obtained by employing the above separation steps are described below.

The second figure to the fifth figure are graphs showing the measurement results of the molecular weight distribution of the aliphatic polycarbonate contained in the solution containing the aliphatic polycarbonate in this embodiment measured by GPC. Also, Figure 6 is a graph showing the results of GPC measurement of the molecular weight distribution of aliphatic polycarbonate contained in an aliphatic polycarbonate-containing solution of a comparative example in which the above separation step was not performed. In addition, in the second to sixth figures, the solid line represents the differential molecular weight distribution curve, and the dotted line represents the integral molecular weight distribution curve.

Also, the numerical values of the number average molecular weight and the numerical values of the mass average molecular weight of the aliphatic polycarbonate contained in each of the aliphatic polycarbonate-containing solutions shown in Figs. 2 to 6 were calculated. In addition, the measurement conditions are as follows.

Model: HLC-8020 (manufactured by TOSOH Co., Ltd.)

Column: GPC column (trade name of TOSOH Co., Ltd.: TSK GEL Multipore HXL-M)

Column temperature: 40°C

Eluent: Chloroform

Flow rate: 1mL/min

As a result of the above calculation, the number average molecular weight and mass average molecular weight of each aliphatic polycarbonate in each of the aliphatic polycarbonate-containing solutions shown in Figures 2 to 6 are as follows.

(a) The aliphatic polycarbonate shown in the second figure has a number average molecular weight (Mn) of about 93,400 and a mass average molecular weight (Mw) of about 113,000. Also, the value (Mw/Mn) obtained by dividing Mw by Mn is about 1.21.

(b) The aliphatic polycarbonate shown in Figure 3 has a number average molecular weight (Mn) of about 308,000 and a mass average molecular weight (Mw) of about 354,000. Also, the value (Mw/Mn) obtained by dividing Mw by Mn is about 1.15.

(c) The aliphatic polycarbonate shown in Figure 4 has a number average molecular weight (Mn) of about 171,000 and a mass average molecular weight (Mw) of about 494,000. Also, the value (Mw/Mn) obtained by dividing Mw by Mn is about 2.89.

(d) The aliphatic polycarbonate shown in the fifth figure has a number average molecular weight (Mn) of about 170,500 and a mass average molecular weight (Mw) of about 590,000. Also, the value (Mw/Mn) obtained by dividing Mw by Mn is about 3.46.

(e) The aliphatic polycarbonate shown in Figure 6 has a number average molecular weight (Mn) of about 44,800 and a mass average molecular weight (Mw) of about 358,000. Also, the value (Mw/Mn) obtained by dividing Mw by Mn is about 7.99.

Here, as shown in the second figure to the fourth figure, in the solution containing the aliphatic polycarbonate of this embodiment, the low molecular weight aliphatic polycarbonate is separated so that the log molecular weight (X axis) cannot be confirmed from the graph Up to aliphatic polycarbonate below 4.0 (3.5 in a narrower sense). In addition, the number average molecular weight (Mn) when the Log molecular weight (X-axis) is 4.0 is about 10,000. On the other hand, in the comparative examples shown in the fifth and sixth figures, the presence of low-molecular-weight aliphatic polycarbonates with a Log molecular weight (X-axis) of 3.8 or less was confirmed.

From the results of the second figure to the fourth figure and the results of other additional experiments by the inventors of the present application (for example, the number average molecular weight (Mn) is about 141000, the mass average molecular weight (Mw) is about 212000, and the Mw/Mn is about 1.5), it can be In this embodiment, it was confirmed that the aliphatic polycarbonate contained in the aliphatic polycarbonate-containing solution was an aliphatic polycarbonate-containing solution satisfying (X) or (Y) above.

<Second Embodiment>

(About the production method of the layer containing aliphatic polycarbonate)

Next, the inventors of the present application used the aliphatic polycarbonate-containing solution of the first embodiment to manufacture the aliphatic polycarbonate-containing layer formed on the substrate and the aliphatic polycarbonate-containing layer that can be produced. Composite components.

The seventh figure is a side view showing the overall composition of the composite member 100 in this embodiment. As shown in FIG. 7 , in the composite member 100 , the aliphatic polycarbonate-containing layer 24 and metallic ink 72 of the present embodiment are provided on the base material 10 . More specifically, the composite member 100 is provided with a plurality of island-like layers 24, 24, 24 containing aliphatic polycarbonate arranged on the substrate 10, and sandwiched between the layers 24, 24 containing aliphatic polycarbonate. At least a part of the area between 24 and 24 is provided with metallic ink 72 on the substrate 10 . In the seventh figure, the space indicated by "V" represents the state where no metallic ink is arranged. Of course, a configuration in which metallic ink is arranged in the space indicated by the "V" can also be adopted. In addition, the material of the substrate 10 in this embodiment is not particularly limited, and as representatives, various glass materials, silicon, other known insulating materials (including resin materials) or semiconductor materials can be used as the substrate 10 . In addition, the composite member 200 is a member including the base material 10 and the metal layer 74 disposed on the base material 10 and using metallic ink as a starting material. The composite member 200 will be described later. In addition, the base material 10 of this embodiment also includes a pattern in which a conductor layer, a semiconductor layer, or an insulator layer is preliminarily formed on the base material 10 . Therefore, a modification example of one of the present embodiments is to form the plurality of island-shaped layers 24, 24 containing aliphatic polycarbonate in the present embodiment on the conductor layer, the semiconductor layer, or the insulator layer. , 24 composite components.

(Manufacturing method of composite member)

Next, the manufacturing method of the composite member 100 and the composite member 200 is shown and demonstrated in 8th figure to 16th figure.

[Step of forming layer containing aliphatic polycarbonate]

In this embodiment, as shown in FIG. 8, a layer 22 containing aliphatic polycarbonate is formed on glass or polyimide as the substrate 10 using a known spin coating method or bar coating method. An example of this is a layer containing polypropylene carbonate. This step is an example of a step of forming an aliphatic polycarbonate-containing layer. In addition, the thickness of the aliphatic polycarbonate-containing layer 22 of the present embodiment is not particularly limited, but the typical thickness is 300 nm or more and 4000 nm or less.

[Concavity forming step/imprinting step]

Then carry out the following steps (pre-sintering step or drying step, hereinafter collectively referred to as "pre-sintering step"), by heating the layer 22 containing aliphatic polycarbonate until it can be formed by subsequent nano transfer printing method The solvent component contained in the aliphatic polycarbonate-containing layer 22 is removed to the extent that the embossed structure is formed. In this embodiment, as a pre-sintering step, heat treatment at 100° C. to 150° C. is performed.

Next, as shown in FIG. 9, an imprinting step is performed. For the layer 22 containing aliphatic polycarbonate, a pressure of 0.1 MPa to 20 MPa is applied to press the mold M1, thereby forming the layer 22 containing aliphatic polycarbonate. imprinted structure. By performing imprint processing, as shown in FIG. 10A, the thickness of the region 22a pressed by the convex portion of the mold M1 becomes thinner than other regions, thereby forming the concave portion. Therefore, in this embodiment, the step of performing the embossing process is a concave portion forming step/imprinting step. In addition, the formation of this concave part can also be said to be the process of forming a convex part from another point of view.

In addition, in the nano transfer method of the present embodiment, imprint processing is performed on the layer 22 containing aliphatic polycarbonate in a plurality of islands in a state of being heated at 40° C. or higher and 150° C. or lower. In addition, the aliphatic polycarbonate-containing layer 22 can remain without being decomposed at all during the imprint process, in other words, under pressure. Also, during imprint processing, for example, the same as the technical idea disclosed in International Publication No. WO2013/069686, the substrate 10 is heated by a known heater, and the mold M1 itself is also made of a known heated by the heater. During the imprint process, the temperatures of the base material 10 and the mold M1 can be appropriately adjusted. A typical heating temperature of the base material 10 is not less than 40° C. and not more than 150° C., and a typical heating temperature of the mold M1 is Above 40°C and below 150°C.

In addition, the technical idea of the numerical range of the above-mentioned pressure is the same as the technical idea disclosed in International Publication No. 2017/047227.

(About the number average molecular weight and mass average molecular weight of aliphatic polycarbonate)

Here, the inventors of the present application carefully observed the aliphatic polycarbonate-containing layer having unevenness, and found several problems that may affect the dimensional accuracy. Specifically, for example, in the case of using the solution containing aliphatic polycarbonate shown as the comparative example (sixth figure) of the first embodiment, in the mold M1 After pressing, when the mold M1 is lifted, as shown in the eleventh figure, the defect that the bottom 23b of the concave part of the layer containing aliphatic polycarbonate rises and/or the convex part of the layer containing aliphatic polycarbonate ( In other words, a defect of the protrusion 23a is formed in the recess edge). Therefore, there is a need for a technique that can accurately realize the aliphatic polycarbonate-containing layer 22 having concavities and convexities with good dimensional accuracy and avoid the aforementioned various defects. In this embodiment, this technology can finally affect the quality of the accuracy of the composite member 100 and the composite member 200 .

The inventors of the present case found that it is not the mass average molecular weight but the number average molecular weight that has a decisive influence on the dimensional accuracy of the concavo-convex shape. Therefore, by forming the layer containing aliphatic polycarbonate by using the solution containing aliphatic polycarbonate of the first embodiment satisfying the conditions of (X) and/or (Y) above as a starting material, it is possible to accurately suppress occurrence of the aforementioned defects. As a result, the inventors of the present application found that, as shown in FIG. 10A , an aliphatic polycarbonate-containing layer having unevenness with high dimensional accuracy can be accurately realized.

Figure 10B is an example of a graph showing the result of step difference measurement showing one of the processes of the manufacturing method of the composite member in this embodiment. As indicated by "S" in Fig. 10B, the shape of the edge of the recessed part included in the aliphatic polycarbonate-containing layer of this embodiment is almost vertical, and no protruding defects were observed. Also, as shown in FIG. 10B , no defect of raised bottom was observed in the concave portion of the aliphatic polycarbonate-containing layer according to the present embodiment.

In addition, in this embodiment, when the thickness of the plane is 1, if the height of the protrusion on the edge of the concave portion relative to the plane is between 0 and 0.5 (more preferably between 0 and 0.15), high precision can be finally obtained. Composite member 100 and composite member 200 . In addition, the above-mentioned "plane" refers to the region shown in F in Figure 11, which is formed from the above-mentioned embossing process after forming a layered layer containing aliphatic polycarbonate with the same thickness. The place where the protrusions 23a are sufficiently separated, that is, the place slightly beyond the bottom edge of the protrusions 23a (representatively, a place separated by 1 μm from the apex of the protrusions 23a).

In addition, the inventors of this case learned after repeated analysis and review that the number average molecular weight has a decisive influence on the dimensional accuracy of the concave-convex shape. In order to more accurately realize the concave-convex shape with high dimensional accuracy, the relationship between the number average molecular weight and the mass average molecular weight must be adjusted.

As a result of the analysis and review by the inventors of this case, the value of dividing the mass average molecular weight (Mw) of aliphatic polycarbonate by the number average molecular weight (Mn) of aliphatic polycarbonate, that is, the value of Mw/Mn, as long as it is 1 to 5 (preferably 1 to 3.5), finally high-precision composite member 100 and composite member 200 can be obtained.

In addition, since the aliphatic polycarbonate-containing layer of the present embodiment and the aliphatic polycarbonate-containing solution of the first embodiment can be applied in a wide range of technical fields, it is stated that these applications are not limited. For example, one of the advantages of using a layer containing aliphatic polycarbonate having unevenness with high dimensional accuracy, as described later, can be achieved by using a known ashing device to decompose or remove the aliphatic polycarbonate in the concave portion. Patterns of layers containing aliphatic polycarbonate were obtained with high dimensional accuracy. If the pattern of the layer containing aliphatic polycarbonate is used, it is not necessary to use plasma or stripping liquid as when using a conventional resist, and it can be very simply and accurately removed by heat treatment at a relatively low temperature. The aliphatic polycarbonate-containing layer decomposes or is removed. Therefore, by forming the pattern of the aliphatic polycarbonate-containing layer with high dimensional accuracy, even in the case of using a material with low resistance to a high-heat (for example, 300° C. or higher) environment as the base material, the This substrate modification may be able to provide a very versatile technique, which is a noteworthy result.

In this embodiment, etching treatment is performed afterwards, which is to expose the entire surface of the aliphatic polycarbonate-containing layer 22 having the imprint structure formed by the nano transfer method to the plasma generated in the atmospheric pressure environment, Etching is performed by this. In addition, in order to form the plasma of this embodiment, specific gases introduced into the processing chamber are oxygen, argon and helium. Also, the applied high-frequency power was about 500W. In this implementation, use Atmospheric pressure plasma device manufactured by Yamato Science Co., Ltd. (model YAP510S). As a result, as shown in FIG. 12, a plurality of island-shaped layers 22, 22, 22 containing aliphatic polycarbonate are formed.

In addition, in addition to the plasma generated in the atmospheric pressure environment, an oxygen plasma under reduced pressure can also be used to assist in the etching process, which is the same as the technical idea disclosed in International Publication No. 2017/047227.

Here, among the plurality of island-shaped aliphatic polycarbonate-containing layers 22, 22, 22, the shortest distance between the layers 22, 22, 22 each containing aliphatic polycarbonate (in other words, each layer containing aliphatic polycarbonate The shortest distance between the ester layers 22, 22, 22) can be 500 nm or more and 20 μm or less when at least a patterning method typified by the transfer printing method is used.

Also, in this embodiment, the entire surface of the aliphatic polycarbonate-containing layer 22 having an embossed structure is etched using plasma under atmospheric pressure, thereby forming a plurality of island-like aliphatic polycarbonate-containing layers. Layers 22, 22, 22. However, the method of forming the plurality of island-shaped layers 22, 22, 22 containing aliphatic polycarbonate is not limited to the aforementioned method. For example, if the screen printing method is used, when the aliphatic polycarbonate-containing layer 22 is coated on the substrate 10, a plurality of island-shaped aliphatic polycarbonate-containing layers 22, 22, 22 are formed.

Next, in this embodiment, as shown in the thirteenth figure, the ultraviolet light irradiation step is carried out, which uses a known ultraviolet light irradiation device 80 (manufactured by Multiply Co., Ltd., model MHU-110WB). The aliphatic polycarbonate-containing layers 22, 22, 22, and the surface 10a of the substrate 10 without the aliphatic polycarbonate-containing layer 22 are all irradiated with ultraviolet light having a wavelength of not less than 180nm and not more than 370nm. In addition, in this embodiment, another example of the ultraviolet light irradiation device that irradiates ultraviolet light with a wavelength of 180nm or more and 370nm or less is a commercially available ultraviolet light lamp with 365nm as the main wavelength (manufactured by AS ONE Co., Ltd., model SLW-8).

As a result, by exposing to ultraviolet light, the pollutants such as organic substances formed on the surface 10a through the steps of the above-mentioned present embodiment up to now, or the pollutants such as organic substances adhered due to long-term exposure to the outside air can be removed. Decomposition and/or removal of substances etc. In addition, because the surface 10a of the substrate 10 can accurately obtain hydrophilicity, when the subsequent configuration of the metallic ink is performed, a high affinity between the metallic ink and the substrate 10 can be achieved, that is, high wetness. wettability (hereinafter collectively referred to as "high wettability").

In addition, as mentioned above, the base material 10 of this embodiment also includes a pattern in which a conductor layer, a semiconductor layer, or an insulator layer is preliminarily formed on the base material 10 . Here, for example, when the base material is a silicon substrate, and other layers (such as a silicon oxide layer) are interposed between the surface of the base material and the layer 22 containing aliphatic polycarbonate, it is necessary to realize the metal printing ink and the "other layer". ”High wettability of the surface. In the ultraviolet light irradiation step in this case, the above-mentioned ultraviolet light is directly irradiated on the surface of the "other layer". Therefore, the base material 10 in this case regards the silicon substrate of the base material and the "other layers" provided on the surface of the silicon substrate as the same object.

On the other hand, the aliphatic polycarbonate-containing layer 24 irradiated with ultraviolet light in the ultraviolet light irradiation step is required to maintain high liquid repellency to the metallic ink when disposing the subsequent metallic ink. As means for obtaining the high liquid repellency, the means disclosed in International Publication No. 2017/047227 can be used.

In this embodiment, after forming a plurality of island-like (typically patterned) layers 24, 24, 24 containing aliphatic polycarbonate irradiated with ultraviolet light, as shown in FIG. 14 , performing an arranging step, which is to use a known metal ink coating device (for example, a coating device for inkjet method) 90 to dispose the metal ink 72 on the substrate 10 . In addition, the metal ink 72 of this embodiment can use known metal catalyst nanoparticles. Also, in this embodiment, in the region sandwiched between the layers 24, 24, 24 containing aliphatic polycarbonate, only a part of the metal ink 72 is arranged, but the metal ink 72 is arranged in all the regions. The printing ink 72 is also one of other forms that can be adopted.

The composite member 100 shown in FIG. 15 is manufactured by going through the steps of disposing the metallic ink 72 as described above. This metallic ink 72 can function as an intermediate material for metal wiring as will be described later.

In this embodiment, after the above-mentioned configuration steps, a heating step is further performed, which is to heat the layers 24, 24, 24 and the metal ink 72 containing the aliphatic polycarbonate until the layer 24, 24, 24 containing the aliphatic polycarbonate can be heated. Above the temperature at which the layers 24 , 24 , 24 decompose or are removed, and above the temperature at which the metallic layer 74 can be formed from the metallic ink 72 . As a result, as shown in FIG. 16, a composite member 200 in which the metal layer 74 is disposed on the base material 10 can be produced. Here, by means of this heating step, the layers 24 , 24 , 24 containing aliphatic polycarbonate as sacrificial layers can be precisely, in other words substantially decomposed or removed. As a result, since the metal layer 74 is provided on the base material 10 arranged in a state where substantially no residue remains, the composite member 200 can be a composite member with high reliability and even high stability.

In addition, when the metal ink 72 is used as an intermediate material for metal wiring, the metal layer 74 formed by the heat treatment of the metal ink 72 becomes a metal wiring. However, the metal layer 74 formed using the metal ink 72 as a starting material can perform functions other than wiring (eg, electrodes, etc.).

The heating step in this embodiment will be described more specifically. In this embodiment, the aliphatic polycarbonate-containing layers 24, 24, 24 and the metal ink 72 disposed on the substrate 10 are heat-treated by using a conventional heater, for example, at about 150° C. Or heating above 180°C (preferably above 250°C, more preferably above 260°C) for about ten minutes to about 30 minutes. As a result, the composite member 200 including the metal layer 74 having a fine width can be manufactured. In addition, although the conventional heater of this embodiment is a heating plate (model TH-900) manufactured by AS ONE Co., Ltd., the heating means is not limited to this heater. For example, heaters such as other known heating plates are one of other forms that can be adopted.

<Modification example of the second embodiment>

In addition, in the second embodiment, in order to form the metal layer 74, the metal ink 72 is used as the starting material, and as a variation of the second embodiment, the starting material layer used in the conventional electroless plating method can be used. Instead of the configuration of the metallic ink 72, the step of forming the starting material layer of the metal plating layer can also be used.

For example, after the configuration step, the method disclosed in International Publication No. 2017/047227 can be used to manufacture the composite member 200 with the metal layer 74 as shown in FIG. 16; On 10, on at least a part of the region sandwiched by the layers 24, 24, 24 each containing aliphatic polycarbonate, a starting material layer of a metal plating layer is disposed. In addition, in this embodiment, of course, the means of each embodiment disclosed in International Publication No. 2017/047227 can be appropriately adopted.

In addition, in the second embodiment, although the composite member 200 including the layer 24 containing aliphatic polycarbonate irradiated with ultraviolet light was disclosed, the second embodiment is not limited to this aspect. For example, a composite member having a layer containing aliphatic polycarbonate in a state not irradiated with ultraviolet light is disadvantageous for the composite member 200 from the viewpoint of liquid repellency and hydrophilicity, but it can also be used in various devices .

As mentioned above, the above-mentioned disclosures of the various embodiments are described for the purpose of explaining these embodiments, and are not intended to limit the present invention. In addition, variations within the scope of the present invention including other combinations of various embodiments are also included in the scope of the patent application.

[industrial availability]

The present invention can be widely used in the field of electronic devices including various semiconductor components, including mobile terminals, information appliances, sensors, other known electronic products, micro-electro-mechanical systems (MEMS; Micro Electro Mechanical Systems) or Nano Nano Electro Mechanical Systems (NEMS; Nano Electro Mechanical Systems) and medical equipment, etc.

10: Substrate

22: layer containing aliphatic polycarbonate

M1: Mold

Claims (6)

A layer containing aliphatic polycarbonate, wherein among all the aliphatic polycarbonates, the aliphatic polycarbonate having a molecular weight of 10,000 or more accounts for 99.0% by mass or more, and the number average molecular weight is 10,000 or more, wherein the layer It has a concave portion and a flat surface subjected to embossing, and when the thickness of the flat surface is 1 (nm), the height of the protrusion at the edge of the concave portion relative to the flat surface is not less than 0 (nm) and not more than 0.5 (nm). A layer containing aliphatic polycarbonate, which is contained in the molecular weight distribution curve of the aliphatic polycarbonate, and the distribution area of the aliphatic polycarbonate with a molecular weight of 10,000 or more accounts for more than 99.0% of the total area of the molecular weight distribution curve, and an aliphatic polycarbonate having a number average molecular weight of 10,000 or more, wherein the layer has a concave portion and a flat surface subjected to embossing processing, and when the thickness of the flat surface is 1 (nm), the protrusion at the edge of the concave portion is relative to the flat surface The height is above 0 (nm) and below 0.5 (nm). Such as the layer containing aliphatic polycarbonate of item 1 or 2 of the patent scope, wherein the mass average molecular weight (Mw) of the aliphatic polycarbonate is divided by the number average molecular weight (Mn) of the aliphatic polycarbonate The value is between 1 and 5. A method for producing an aliphatic polycarbonate-containing layer, comprising: a step of forming an aliphatic polycarbonate-containing layer, which is to contain the aliphatic polycarbonate having a molecular weight of 10,000 or more among all the aliphatic polycarbonate A solution containing aliphatic polycarbonate containing 99.0% by mass or more of polycarbonate and having a number average molecular weight of 10,000 or more, forms a layer on or over a substrate, and is formed by heating A layer containing aliphatic polycarbonate; and an embossing step, which is to implement embossing to have a concave portion and a flat surface, and when the thickness of the flat surface is 1 (nm), the height of the protrusion at the edge of the concave portion relative to the flat surface Above 0 (nm) and below 0.5 (nm). A method of making a layer comprising aliphatic polycarbonate, comprising: The step of forming the layer containing aliphatic polycarbonate, which is to make the layer containing aliphatic polycarbonate having a molecular weight of 10000 or more accounted for 99.0% or more of the total area of the molecular weight distribution curve and having a number average molecular weight of 10000 or more. A solution of aliphatic polycarbonate, forming a layer on or over a base material, and forming a layer containing aliphatic polycarbonate by heating; and an embossing step, which is to perform embossing to have concave parts and flat surfaces, And when the thickness of the plane is 1 (nm), the height of the protrusion at the edge of the recess relative to the plane is not less than 0 (nm) and not more than 0.5 (nm). The manufacturing method of the aliphatic polycarbonate-containing layer as claimed in claim 4 or 5, which further includes an embossing step, which is to perform embossing processing on the aliphatic polycarbonate-containing layer, thereby forming a Embossed structure of recesses.

Images