TWI791346B - The ventilation equipment for high-low temperature ic test handler - Google Patents

Abstract

The ventilation equipment of invention easily makes a high-low temperature environment in the chamber of test handler to test and sort ICs (electronic devices) at high or low temperature. The high-low temperature ventilation equipment is comprised of a heat exchanger, a heater, a blower, an inlet pipe of liquid nitrogen, a high-pressure inlet manifold, a nitrogen exhaust pipe, a pipe of return air, a manifold to supply hot or cold high pressure air and a pipe to supply hot or cold circulating air. With the invention of the ventilation equipment for high-low temperature IC test handler, it raises test handler utilization, simplifies the test handler design, diminishes the condensate water which may damage testing ICs and equipment. Furthermore, the ventilation equipment could be replaced individually. This invention also keeps the thermal chamber of the test handler at a positive pressure to prevent air from entering externally and further limit the probability of frosting in the thermal chamber. In addition, the invention increases the utilities in terms of convenience and testing quality during the operation.

Description

High and low temperature air cycle machine used in high and low temperature testing equipment for electronic components

The invention relates to a high and low temperature air cycle machine applied to high and low temperature testing equipment for electronic components, in particular, it can reduce the probability of frosting during low temperature testing of the testing equipment, can replace the circulator alone, increase the utilization rate of testing equipment, and reduce the number of testing equipment. Complexity, reducing the harm of condensed water generated during low-temperature testing to electronic components and testing equipment, maintaining positive pressure in the incubator of the testing equipment, preventing external air from entering, reducing the probability of frosting in the incubating box, and making the present invention reach the goal of using The innovative inventor of the convenience in the world and the practical progress of the improvement of the quality of testing equipment.

Press, please refer to shown in Fig. 9, it is the high and low temperature testing equipment of conventional electronic component, and described electronic component is integrated circuit (Integrated Circuit, IC), and conventional equipment comprises an incubator 1, a heating The heat exchanger 2 is provided with a heater 3 on one side of the heat exchanger 2, and a circulation fan 4 is provided on the other side of the heat exchanger 2, and one end of the heat exchanger 2 is connected to a liquid nitrogen 5 by a pipeline. When the high and low temperature testing equipment is used for high temperature testing, the heater 3 and the circulation fan 4 are turned on to heat up the air in the incubator 1 to the test temperature for testing, and one side of the incubating box 1 is provided with a test Area 6, the upper and lower ends of the test area 6 are respectively provided with a feed track 7 and a discharge track 8, the feed track 7 and the discharge track 8 can be used for pre-testing integrated circuits 9 (Integrated Circuit, IC) Pass, and test through the test area 6; when the conventional equipment is used for low-temperature testing, the liquid nitrogen 5 needs to be connected externally, and the heater 3 and the circulation fan 4 are turned on, so that the heat in the incubator 1 After the air is lowered to the test temperature, the test is carried out; however, the problems that are prone to occur when performing low temperature tests are:

1. Easy to frost: When the test equipment is in operation, due to the problem of the feeding track 7 and the first discharging track 8, the inside of the incubator 1 cannot be completely sealed, so after a period of time, the heat exchanger 2 will Frost starts to form, and finally affects the stability of the temperature.

2. Reduce the utilization rate of equipment: because the defrosting process is very time-consuming, the test equipment also needs to be shut down during the defrosting process, and it is also very time-consuming to cool down the equipment after defrosting.

3. It is easy to cause harm to the integrated circuit (Integrated Circuit, IC) of electronic components: because in addition to the heat exchanger 2 being prone to frost, if the liquid nitrogen 5 pipeline is not well cut off, it will also cause condensation in the pipeline inside the equipment. Frost or condensed water droplets will cause harm to the integrated circuit 9 (Integrated Circuit, IC) of the electronic component.

That is, the main purpose of the present invention is to provide a high and low temperature air cycle machine applied to high and low temperature testing equipment for electronic components; the problems to be solved are aimed at the conventional 1. easy to frost, 2. reduce the equipment Utilization rate, 3. Improve and break through the problem points that are easy to cause harm to the integrated circuit (IC) of electronic components; and its technical characteristics for solving problems mainly include: a high and low temperature air cycle machine, internally formed An accommodating space, a first guide hole, a second guide hole and a third guide hole communicating with the accommodating space are sequentially provided at predetermined positions on the side wall of the high and low temperature air cycle machine from top to bottom , and the predetermined position on the other side wall of the high and low temperature air cycle machine is sequentially provided with a fourth guide hole, a fifth guide hole and a sixth guide hole communicating with the accommodating space from top to bottom; The heat exchanger is set at a predetermined position in the internal accommodation space of the high and low temperature air cycle machine. A first air outlet pipe is provided at a predetermined position on the top of the heat exchanger. One end of the first air outlet pipe is connected to a blower, and one end of the blower is provided There is a second high and low temperature air outlet pipe, the second high and low temperature air outlet pipe passes through the fourth guide hole of the high and low temperature air cycle machine, wherein the end of the second high and low temperature air outlet pipe is connected with a first group joint; another side wall of the heat exchanger is connected with a liquid Nitrogen input pipe, the liquid nitrogen input pipe passes through the first guide hole of the high and low temperature air cycle machine; the heat exchanger is connected with a high-pressure air introduction pipe adjacent to the liquid nitrogen input pipe, the high-pressure air The introduction pipe system passes through the second guide hole of the high and low temperature air cycle machine; the side of the heat exchanger opposite to the high pressure air introduction pipe is connected with a nitrogen discharge pipe, and the nitrogen discharge pipe system passes through the high and low temperature air cycle machine. The third guide hole of the air cycle machine; and the bottom side wall of the heat exchanger is connected with a high-low temperature high-pressure air outlet pipe, and the high-low temperature high-pressure air outlet pipe is connected with the high-pressure air inlet pipe and the liquid nitrogen input pipe. connected, and the end of the high-low temperature high-pressure air outlet pipe is provided with a third set of joints, the high-low temperature high-pressure air outlet pipe passes through the sixth guide hole of the high-low temperature air cycle machine; the heat exchanger is relatively high A return air pipe is connected to the adjacent side of the low-temperature high-pressure air outlet pipe, and the return air pipe is connected with the first air outlet pipe. The end of the return air pipe is connected with a second set of joints, and the return air pipe is Pass through the fifth guide hole of the high and low temperature air cycle machine; a heater is combined and hung on one side of the heat exchanger, which can be used to heat the first air outlet pipe connected to the inside of the heat exchanger , the liquid nitrogen input pipe, the high-pressure air inlet pipe and the air return pipe; and a control unit, which is used to automatically control the heat exchanger, the heater and the blower inside the high and low temperature air cycle machine for on-off operation; In this way, the high and low temperature air cycle machine applied to the high and low temperature testing equipment of electronic components of the present invention can improve the conventional technology. The circulator is independent of the high and low temperature test equipment for electronic components. In case of failure or frost, the circulator can be replaced separately to increase the utilization rate of the test equipment; third: reduce the complexity of the test equipment; fourth: reduce the condensation generated during low temperature testing The harm of water to electronic components and testing equipment; fifth: the high and low temperature testing equipment for electronic components lacks the mechanism for generating high and low temperature air circulation machines It is connected with the high and low temperature air cycle machine only by the air outlet and return air ducts, and can also be connected with high-pressure air to maintain positive pressure in the incubator of the test equipment, prevent external air from entering, and reduce the chance of frost in the incubator.

Knowledge part:

1: incubator

2: heat exchanger

3: Heater

4: Circulation fan

5: Liquid nitrogen

6: Test area

7: Feeding track

8: Discharge track

9: Integrated circuit

Part of the invention:

10: High and low temperature air cycle machine

101: Switchboard

102: drainage hole

11:Accommodating space

12: The first guide hole

13: Second guide hole

14: The third guide hole

15: The fifth guide hole

16: The sixth guide hole

17: The fourth guide hole

171: Thermometer

20: heat exchanger

201: heater

21: The first outlet pipe

22: Liquid nitrogen input pipe

23: High-pressure air inlet pipe

24: Nitrogen exhaust pipe

25: return air duct

251: The second group of joints

26:High and low temperature high pressure air outlet pipe

261: The third group of joints

30: heater

40: Blower

401: Blower motor

41: High and low temperature second air outlet pipe

411: The first set of joints

50: Liquid Nitrogen Bucket

51: output tube

52: switch valve

60: High and low temperature test equipment for electronic components

601: insulation box

602: wind deflector

61: the first connecting pipe

62: Second connecting pipe

63: The third connecting pipe

64: Feeding track

65: Feeding chute

66: Outlet chute

67: Test area

68: Classification agencies

69: Discharge track

70: Control unit

A: Insulation cotton

Fig. 1: is the three-dimensional appearance diagram of front view of the present invention.

Fig. 2: is the three-dimensional appearance diagram of rear view of the present invention.

Figure 3: It is a front perspective perspective view of the high and low temperature air cycle machine of the present invention.

Figure 4: It is a rear perspective perspective view of the high and low temperature air cycle machine of the present invention.

Fig. 5: is the internal three-dimensional appearance diagram of the high and low temperature air cycle machine of the present invention.

Figure 6: It is a perspective view of the front left perspective of the high and low temperature test equipment for electronic components.

Figure 7: It is a perspective view of the front right perspective of the high and low temperature test equipment for electronic components.

Fig. 8: is a schematic cross-sectional view of the present invention.

Figure 9: It is a structural diagram of a known high and low temperature air cycle machine.

In order to enable your examiners to have a further in-depth understanding of the present invention, hereby enumerate a preferred embodiment, and describe it with the drawings as follows: Please refer to Figures 1 to 8, which show the application of the present invention to the high and low temperature testing equipment for electronic components The high and low temperature air cycle machine, the electronic component is an integrated circuit (Integrated Circuit, IC) in this embodiment, the present invention includes: a high and low temperature air cycle machine 10, an accommodating space 11 is formed inside, the accommodating A switchboard 101 is arranged in the storage space 11, and a first guide hole 12 and a second guide hole 12 communicating with the accommodation space 11 are sequentially provided at predetermined positions on the side wall of the high and low temperature air cycle machine 10 from top to bottom. Hole 13 and a third guide hole 14, and the predetermined position on the other side wall of the high and low temperature air cycle machine 10 is sequentially provided with a fourth guide hole 17, a fifth guide hole 15 and a sixth guide hole communicating with the accommodating space 11 from top to bottom. Guide hole 16, the high and low temperature air cycle machine 10 is provided with a drainage hole 102 toward the bottom, and the high and low temperature air cycle machine 10 is provided with a thermometer 171 corresponding to the predetermined position of the air outlet, and the thermometer 171 cooperates with the heater 201 to control the air outlet temperature; a heat exchanger 20, the heat exchanger 20 is in the form of an evaporator, located at a predetermined position in the internal accommodation space 11 of the high and low temperature air cycle machine 10, and a first outlet is provided at a predetermined position on the top of the heat exchanger 20 Air duct 21, one end of the first air outlet duct 21 is communicated with a blower 40, and one end of the blower 40 is provided with a blower motor 401 outward, so that the blower 40 is driven by the blower motor 401, and one end of the blower 40 A high and low temperature second air outlet pipe 41 is provided, and the high and low temperature second air outlet pipe 41 passes through the fourth guide hole 17 of the high and low temperature air cycle machine 10, wherein the end of the high and low temperature second air outlet pipe 41 A first set of joints 411 is assembled, wherein the blower 40 is used for forced air circulation; the heat exchanger 20 is used for cooling the circulating air; the predetermined position of the heat exchanger 20 is provided with two heaters 201, and the heater 201 is used for To control the high and low temperature and defrost; In addition, the side wall of the heat exchanger 20 is connected with a liquid nitrogen input pipe 22, and the liquid nitrogen input pipe 22 is passed through the first guide of the high and low temperature air cycle machine 10. Hole 12; the heat exchanger 20 is connected with a high-pressure air introduction pipe 23 on the adjacent side relative to the liquid nitrogen input pipe 22, and the high-pressure air introduction pipe 23 passes through the second guide hole of the high-low temperature air cycle machine 10 13; wherein the high-pressure air introduction pipe 23 is connected with an air compressor (not shown); Stretch out the third guide hole 14 of the high and low temperature air cycle machine 10; and the bottom side wall of the heat exchanger 20 is connected with a high and low temperature high pressure air outlet pipe 26, and the high and low temperature high pressure air outlet pipe 26 is connected with the high pressure Air introduction pipe 23 and this liquid nitrogen input pipe 22 phases Interconnected, and the end of the high-low temperature high-pressure air outlet pipe 26 is provided with a third group of joints 261, the high-low temperature high-pressure air outlet pipe 26 passes through the sixth guide hole 16 of the high-low temperature air cycle machine 10; The heat exchanger 20 is connected with a return air pipe 25 on the adjacent side of the high-low temperature high-pressure air outlet pipe 26. The return air pipe 25 communicates with the first air outlet pipe 21. The end of the return air pipe 25 is A second set of joints 251 is connected, and the return air pipe 25 passes through the fifth guide hole 15 of the high and low temperature air cycle machine 10; a heater 30 is combined and hung on one of the heat exchangers 20 side, which can be used to heat the first air outlet pipe 21, the liquid nitrogen input pipe 22, the high-pressure air introduction pipe 23 and the return air pipe 25 connected to the inside of the heat exchanger 20. The heater 30 can generate high temperature, Used for heating circulating air and defrosting; and a control unit 70 for automatically controlling the heat exchanger 20, the heater 30 and the blower 40 inside the high and low temperature air cycle machine 10 for opening and closing operations.

Then, the end of the liquid nitrogen input pipe 22 of the heat exchanger 20 is connected to an output pipe 51 connected to a liquid nitrogen barrel 50, wherein a switch is connected between the liquid nitrogen input pipe 22 and the output pipe 51 valve 52; moreover, the high and low temperature air cycle machine 10 opposite to the internal heat exchanger 20 and the high and low temperature second air outlet pipe 41 provided by the blower 40, the return air pipe 25 and the high and low temperature high pressure air are exported The pipe 26 is used to connect with an electronic component high and low temperature testing equipment 60 in an external plug-in type. The electronic component high and low temperature testing equipment 60 is provided with an insulated box 601 inside. The insulated box 601 is provided with an air guide 602. There is a feed track 64, a discharge track 69 is provided on the bottom side of the feed track 64, a test area 67 is arranged between the feed track 64 and the discharge track 69, and a feed track 64 is provided on one side of the feed track 64. A chute 65, and one side of the discharge track 69 is provided with a discharge chute 66, and a predetermined position of the electronic component high and low temperature testing equipment 60 is provided with a classification mechanism 68: wherein One side of the high and low temperature testing equipment for electronic components 60 is respectively provided with a first connecting pipe 61, a second connecting pipe 62 and a third connecting pipe 63 from top to bottom, wherein the first connecting pipe 61 is connected to The first group of joints 411 of the high and low temperature second air outlet pipe 41; the second connecting pipe 62 is connected to the second group of joints 251 of the return air pipe 25; the third connecting pipe 63 is connected to In the third group of joints 261 of the high and low temperature high-pressure air outlet pipe 26, the high and low temperature second air outlet pipes that are connected to the first group of joints 411, the second group of joints 251 and the third group of joints 261 41 and the first connecting pipe 61, the return air pipe 25 and the second connecting pipe 62, the high and low temperature high-pressure air outlet pipe 26 and the third connecting pipe 63 are connected in the form of screw caps with threads respectively. Connect set.

Preferably, the liquid nitrogen input pipe 22, the high-low temperature high-pressure air outlet pipe 26, the output pipe 51 and the third connecting pipe 63 are further coated with an insulating cotton A; therefore, the application of the present invention The high and low temperature air cycle machine 10 in the high and low temperature test equipment 60 for electronic components is the key to improving the conventional technology: first: it can reduce the chance of frosting during low temperature testing of the test equipment; second: the high and low temperature air cycle machine 10 is independent of In addition to the high and low temperature test equipment for electronic components 60, when there is a failure or frost, the cycler can be replaced separately to increase the utilization rate of the test equipment; third: reduce the complexity of the test equipment; fourth: reduce the impact of condensed water generated during low temperature testing on electronics Harm of components and testing equipment; Fifth: the high and low temperature testing equipment 60 for electronic components lacks the structure to produce high and low temperature air circulation machines 10, and the high and low temperature air circulation machines are connected only by the air outlet and return air ducts, and can be connected to high pressure Air in order to maintain a positive pressure in the incubator of the test equipment, prevent external air from entering, and reduce the chance of frosting in the incubator.

Accordingly, the present invention is actually a highly practical and progressive design. However, no similar product or publication has been published, which meets the requirements for a patent application, and the application is filed according to law.

10: High and low temperature air cycle machine

11:Accommodating space

12: The first guide hole

13: Second guide hole

14: The third guide hole

15: The fifth guide hole

16: The sixth guide hole

17: The fourth guide hole

20: heat exchanger

21: The first outlet duct

22: Liquid nitrogen input pipe

23: High-pressure air inlet pipe

24: Nitrogen exhaust pipe

25: return air duct

251: The second group of joints

26:High and low temperature high pressure air outlet pipe

261: The third group of joints

30: heater

40: Blower

41: High and low temperature second air outlet pipe

411: The first set of joints

50: Liquid Nitrogen Bucket

51: output tube

52: switch valve

60: High and low temperature test equipment for electronic components

61: the first connecting pipe

62: Second connecting pipe

63: The third connecting pipe

70: Control unit

Claims (5)

A high and low temperature air cycle machine used in high and low temperature testing equipment for electronic components, which includes: a high and low temperature air cycle machine, forming a storage space inside, and the predetermined positions of the side walls of the high and low temperature air cycle machine are arranged from top to bottom A first guide hole, a second guide hole, and a third guide hole connected to the accommodating space are arranged sequentially, and the predetermined position on the other side wall of the high and low temperature air cycle machine is sequentially arranged from top to bottom There are a fourth guide hole, a fifth guide hole and a sixth guide hole communicating with the accommodating space; a heat exchanger is arranged at a predetermined position in the accommodating space of the high and low temperature air cycle machine, and the heat exchanger A first air outlet pipe is provided at a predetermined position on the top of the device, and one end of the first air outlet pipe is connected to a blower, and one end of the blower is provided with a high and low temperature second air outlet pipe, and the high and low temperature second air outlet pipe is worn out. The fourth guide hole of the high and low temperature air cycle machine, wherein the end of the second high and low temperature air outlet pipe is connected with a first group of joints; in addition, a liquid nitrogen input pipe is connected to the side wall of the heat exchanger, and the liquid nitrogen The nitrogen input pipe is passed through the first guide hole of the high and low temperature air cycle machine; the side of the heat exchanger opposite to the liquid nitrogen input pipe is connected with a high-pressure air introduction pipe, and the high-pressure air introduction pipe is passed through The second guide hole of the high-low temperature air cycle machine; the side of the heat exchanger opposite to the high-pressure air inlet pipe is connected with a nitrogen discharge pipe, and the nitrogen gas discharge pipe passes through the second guide hole of the high-low temperature air cycle machine Three guide holes; and the bottom side wall of the heat exchanger is connected with a high and low temperature high pressure air outlet pipe, the high and low temperature high pressure air outlet pipe is connected with the high pressure air inlet pipe and the liquid nitrogen input pipe, and the high and low temperature The end of the high-pressure air outlet pipe is provided with a third group of joints. The high-low temperature high-pressure air outlet pipe is passed through the sixth guide hole of the high-low temperature air cycle machine; the heat exchanger is adjacent to the high-low temperature high-pressure air outlet pipe. The side is connected with a return air pipe, the return air pipe is connected with the first air outlet pipe, the end of the return air pipe is connected with a second set of joints, and the return air pipe passes through the high and low temperature The fifth guide hole of the air cycle machine; A heater, which is combined and hung on one side of the heat exchanger, can be used to heat the first air outlet pipe, the liquid nitrogen input pipe, the high-pressure air introduction pipe and the return air connected to the inside of the heat exchanger. tube; and a control unit, which is used to automatically control the heat exchanger, the heater and the blower inside the high and low temperature air cycle machine for on-off operation. The high and low temperature air cycle machine applied to high and low temperature testing equipment for electronic components as described in claim 1, wherein the end of the liquid nitrogen input pipe of the heat exchanger is connected to an output pipe connected to a liquid nitrogen barrel, wherein the A switching valve is connected between the liquid nitrogen input pipe and the output pipe. The high and low temperature air cycle machine used in high and low temperature testing equipment for electronic components as described in claim 1, wherein the other side of the high and low temperature air cycle machine is opposite to the internal heat exchanger and the second high and low temperature air outlet pipe set by the blower . The return air pipe and the high-low temperature high-pressure air outlet pipe are used to connect a high and low temperature testing equipment for electronic components in a plug-in type, wherein one side of the high and low temperature testing equipment for electronic components is respectively provided with a first A connecting pipe, a second connecting pipe and a third connecting pipe, wherein the first connecting pipe is connected to the first set of joints of the high and low temperature second outlet pipe; the second connecting pipe is connected to the The second group of joints of the air return pipe; the third connecting pipe is connected to the third group of joints of the high-low temperature, high-pressure air outlet pipe. The high and low temperature air cycle machine applied to high and low temperature testing equipment for electronic components as described in claim 3, wherein the high and low temperature second outlets of the first set of joints, the second set of joints and the third set of joints are relatively assembled The air duct and the first connecting pipe, the air return pipe and the second connecting pipe, the high and low temperature high pressure air outlet pipe and the third connecting pipe are connected by threaded nuts. . The high and low temperature air cycle machine applied to high and low temperature testing equipment for electronic components as described in claim 1, wherein the heat exchanger is in the form of an evaporator.

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