TWI788855B - Detection system - Google Patents

Abstract

A detection system includes a first device, a second device, a third device and a server. The first device is configured to generate a first detection signal according to a first identification code and a process information, and operate in a feedback state according to one of the feedback commands. The second device establishs a connection with the first device. After receiving the first detection signal, the second device is configured to generate a second detection signal. The third device is configured to transmit a third detection signal. When the first device receives the third detection signal, the first device is driven according to one of the feedback commands. The server is connected with the second device and the third device to record a current position of the first device according to the first identification code and a second identification code in the second detection signal.

Description

detection system

This disclosure relates to a detection system for controlling corresponding devices to operate in different states through detection signals.

Generally speaking, in the processing process of the fab, the wafers will be transported to different workstations through the automatic conveying system to perform development/yellow light (Photo), etching (Etch), thin film (Thinfin), diffusion (Diffusion) And ion implantation (CMP) and other procedures.

A batch (LOT, such as: 24 pieces) of wafers will be stored in a pod (POD) and transported, and each batch of wafers will be transported to the corresponding workstation according to the processing procedure. Therefore, how does the transport system accurately manage each The current position of the crystal box will directly affect the production capacity of the fab.

The present disclosure relates to a detection system, which includes a first device, a second device, a third device and a server. The first device includes a storage device and a feedback device. The storage device stores the first identification code, the process status and a plurality of feedback instructions. The first device is used for producing according to the first identification code and the process state A first detection signal is generated, and the feedback device is driven according to the feedback instructions to operate in a plurality of feedback states, and the feedback states corresponding to the feedback instructions are different from each other. The second device is used for receiving the first detection signal to establish a connection with the first device. The second device is used to generate a second detection signal after receiving the first detection signal, and the second detection signal includes a first identification code and a second identification code. The third device is used for sending a third detection signal. When the first device receives the third detection signal, the first device is used to obtain one of the feedback instructions according to the third detection signal, and drive the feedback device accordingly. The server is used for connecting with the second device and the third device. The server is used for recording the current location of the first device according to the first identification code and the second identification code in the second detection signal.

This disclosure actively sends a signal to the first device through the third device, so that the first device can drive the feedback device accordingly, and operate in the corresponding feedback state, so that the detection system can quickly confirm the first device through the third device current location and status of .

100: detection system

D10: First device

D11: Processor

D12: storage device

D13: Feedback device

D14: Communication device

D15: display screen

D20: Second device

D30: Third device

D40: Server

W1: Workstation

W2: Workstation

R1: communication range

R2: communication range

R3: communication range

FIG. 1 is a schematic diagram of a detection system according to some embodiments of the present disclosure.

FIG. 2 is a schematic diagram of a first device according to some embodiments of the present disclosure.

Several embodiments of the present invention will be disclosed in the following figures. For the sake of clarity, many practical details will be described together in the following description. It should be understood, however, that these practical details should not be used to limit the invention. That is, in some embodiments of the present invention, these practical details are unnecessary. In addition, for the sake of simplifying the drawings, some well-known structures and components will be shown in a simple and schematic manner in the drawings.

Herein, when an element is referred to as "connected" or "coupled", it may mean "electrically connected" or "electrically coupled". "Connected" or "coupled" may also be used to indicate that two or more elements cooperate or interact with each other. In addition, although terms such as “first”, “second”, . Unless clearly indicated by the context, the terms do not imply any particular order or sequence, nor are they intended to be limiting of the invention.

FIG. 1 is a schematic diagram of a detection system 100 according to some embodiments of the present disclosure. The detection system 100 includes a first device D10, a second device D20, a third device D30 and a server D40. In one embodiment, the first device D10 is a wafer box (not shown in the figure) or is installed on the wafer box for holding a plurality of wafer processing objects. The processed wafer can be a wafer coated with a thin film or coated with photoresist. In other embodiments, the first device D10 may be disposed on the crystal box in the form of an electronic tag (Tag).

In one embodiment, the detection system 100 is used to manage the wafer processing line and track the position of the wafer box. Therefore, in the first figure, a plurality of first devices D10 (such as: a crystal box, or a label on a crystal box), a plurality of second devices D20 and at least one third device D30. The present disclosure is not limited to what is shown in FIG. 1 , and in other embodiments, the number of devices D10 - D30 can be adjusted arbitrarily.

The first device D10 stores a first identification code, a process state and a plurality of feedback instructions. The first identification code is used to identify the first device D10, and the process status is used to record the processing process of the wafer processed object in the first device D10 (such as: which processing procedure has been passed), or to record the wafer processing process in the first device D10. The priority level of the circular workpiece (eg: first level priority, second level priority).

FIG. 2 is a schematic diagram of a first device D10 according to some embodiments of the present disclosure. In some embodiments, the first device D10 includes a processor D11, a storage device D12, a feedback device D13, and a communication device D14. The processor D11 is electrically connected to the storage device D12, the feedback device D13 and the communication device D14. The storage device D12 is used for storing the first identification code, process status and feedback instruction. The feedback device D13 is driven according to the feedback instructions to operate in a plurality of feedback states, and the feedback states corresponding to the feedback instructions are different from each other. The content and operation method of the feedback command will be explained in the following paragraphs. In addition, in one embodiment, the first device D10 operates through an internal battery.

The first device D10 generates a first detection signal according to the first identification code and the process state, and regularly sends the first detection signal outward through the communication device D14. The communication protocol used by the first device D10 may be Bluetooth or WiFi, but the present disclosure is not limited thereto. Each first device D10 has a communication range R1, R2, within the communication range, other electronic devices with the same communication protocol can receive the first detection signal.

A communication device is also provided in the second device D20. When the first device D10 is transported and processed, if there is a second device D20 within the communication range of the first device D10, the second device D20 can receive the first detection signal and establish a connection with the first device D10. Since the second device D20 is used to represent a certain area of the wafer processing line, there is a gap between any two second devices D20. In one embodiment, the distance between the two second devices D20 is greater than or equal to the communication range R1 of the first device D10 (eg, greater than its range diameter).

For example, the first device D10 sends out the first detection signal through the bluetooth technology, and all electronic devices with bluetooth modules (such as: the second device D20) within the communication range R1 and R2 can receive the first detection signal. Detecting the signal, obtaining the first identification code in the first detecting signal, and obtaining the information carried in the first detecting signal (ie, the process status) after the connection is established.

As above, after the second device D20 receives the first detection signal, the second device D20 generates the second detection signal according to the first detection signal. The second detection signal includes a first identification code and a second identification code. The second identification code may be a machine code of the second device D20. In other words, the first identification code corresponds to the first device D10, and the second identification code corresponds to the second device D20. In some embodiments, the second detection signal may further include the process status of the first device D10.

In some embodiments, each second device D20 is disposed on the antenna device, and its location may be adjacent to the workstations W1, W2. Each workstation W1, W2 is used to execute different processing procedures on the wafer.

Workstations W1 and W2 can be wired or wireless (such as: NFC, Bluetooth) to connect with the first device D10 to modify or update the process information stored in the first device D10. For example, after the first device D10 is transported to the vicinity of the workstation W1, the workstation W1 sets the process information of the first device D10 as "completed the first development". Next, when the wafer processing in the first device D10 is processed on the workstation W1 and the first device D10 is transported to the workstation W2, the workstation W2 sets the process information of the first device D10 as "completed the first etching". .

The server D40 is connected to the second device D20 to receive the second detection signal sent by the second device D20, and obtain the first identification code and the second identification code in the second detection signal to identify the second detection signal. A device D10 and a second device D20. Since the second device D20 is installed adjacent to the workstations W1 and W2, or used to represent a certain area of the wafer processing line, the server D40 can identify the first device according to the first identification code and the second identification code Which second device D20 D10 is currently close to, so as to record the current location of the first device D10 (for example: located next to the workstation W1).

The third device D30 can be a portable electronic device (such as a mobile phone, a tablet, etc.), and also has a communication device inside for receiving or sending wireless signals. The third device D30 can send a third detection signal. When the first device D10 is within the communication range R3 of the third device D30, the first device D10 will obtain a feedback command stored therein according to the received third detection signal, and drive the feedback device D13 accordingly, so that It operates in the corresponding "feedback state". In some embodiments, the feedback device D13 can exhibit different appearance features in different feedback states, and the appearance features can be any one of sound, image, vibration, or light, or a combination of several of them.

In other words, the first device D10 is used to obtain one of the feedback commands according to the third detection signal, so as to make the feedback device D13 operate in the corresponding feedback state. In other embodiments, the feedback intensity, feedback frequency or feedback time of each feedback state are different from each other.

In one embodiment, the third device D30 is carried by inspectors of the wafer processing line. The third detection signal is actively sent to the first device D10 through the third device D30, so that the feedback device D13 of the first device D10 presents external features such as sound, video, vibration or light. The inspectors will be able to quickly find the first device D10 and transport it to other corresponding workstations for processing.

In addition, the inspector can also connect to the server D40 through the third device D30, so as to know the current location of the first device D10 (such as which workstation it is located in) through the second detection signal received by the server D40. or region). Even if the first device D10 is covered by other objects, or is located in a signal dead spot, and has never been connected to the second device D20, the third device D30 can still know the second device that the first device D10 was last connected to through the server D40. The device D20 determines the possible area where the first device D10 is located, and then actively activates the first device D10 according to the third detection signal of the third device D30, so that the feedback device D13 produces an external feature.

Specifically, in one embodiment, the feedback device D13 includes an indicator light. After the feedback device D13 obtains the feedback instruction according to the third detection signal, it will drive the indicator light according to the feedback instruction. Each feedback command makes the indicator light produce a different color. For example, if the third detection signal is "marked as the first priority", the feedback device D13 of the first device D10 will find the corresponding In response to the "first priority" feedback command (for example: to emit a red light), the corresponding red light-emitting element on the feedback device D13 is driven. Similarly, if the third detection signal is "marked as general priority", the feedback device D13 of the first device D10 will find a feedback command corresponding to "general priority" (for example: send out a green light), and drive the feedback device D13 The corresponding green light-emitting element on.

Specifically, in one embodiment, the feedback device D13 includes an audio player. After the feedback device D13 obtains the feedback instruction according to the third detection signal, it will drive the audio player according to the feedback instruction. Each feedback command causes the audio player to generate sounds of different lengths, frequencies or intensities. For example, if the third detection signal is "finding location", the feedback device D13 of the first device D10 will find the feedback command corresponding to "finding location" (for example: send out a 2Hz short sound), and drive the audio player to play corresponding audio. Similarly, if the third detection signal is "stop searching", the feedback device D13 of the first device D10 will find a feedback command corresponding to the "general priority" (such as: stop playing), and turn off the audio player.

Specifically, in one embodiment, the feedback device D13 includes a vibrator. After the feedback device D13 obtains the feedback instruction according to the third detection signal, it will drive the vibrator according to the feedback instruction. Each feedback command causes the vibrator to generate vibrations of different durations or different intensities. For example, if the third detection signal is "find a location and set it as the first priority", the feedback device D13 of the first device D10 will find the feedback command corresponding to "find the location and set it as the first priority" (For example: 10 seconds of vibration), drive the vibrator to generate vibration. Similarly, if the third detection signal is "Looking for a location and setting it as the second priority", the feedback device D13 of the first device D10 will find the corresponding In response to the feedback command of "find the position and set it to the second" (for example: send out vibration for 5 seconds), drive the vibrator to vibrate.

In other words, in some embodiments, the first device D10 stores a plurality of corresponding third detection signals and feedback instructions, so when the first device D10 receives the third detection signal, it can The third detection signal sent by D30 (such as: "find the location"), find the corresponding number of the third detection signal (such as: "find the location") stored in the internal storage, and then find the corresponding feedback command (such as: send 2Hz Short sound) to perform the corresponding action.

In one embodiment, the first device D10 further includes a display screen D15 (such as a color screen or electronic paper). The display screen D15 is electrically connected to the processor D11 for displaying process status. In some embodiments, when the first device D10 receives the third detection signal and "sets as the first priority", the first device D10 can find out the corresponding feedback command and control the display screen D15, for example: On the display screen D15, the font of "first priority" is displayed. In other embodiments, the display screen D15 can also be a feedback device D13 to operate in different feedback states (for example, characters on the screen blink at a fixed frequency).

In some embodiments, the first device D10 is connected to the second device D20 and/or the third device D30 through a first communication protocol (eg, Bluetooth). The server D40 is connected to the second device D20 and/or the third device D30 through the second communication protocol. The communication transmission distance of the first communication protocol is smaller than the communication transmission distance of the second communication protocol. The maximum area of the output. For example: the first communication protocol may be Bluetooth, and the second communication protocol may be WiFi, but the disclosure is not limited thereto.

Accordingly, in the wafer processing production line, inspectors can connect to the server D40 through the third device D30 to know the process information and current position of each first device D10. When the inspector approaches the first device D10, the third detection signal can be sent through the third device D30 to drive the feedback device D13 on the first device D10, so as to accurately and quickly find the specific first device D10. As mentioned above, the third device D30 can still be applied to detect when the first device D10 is located in a communication dead zone, resulting in no connection with any second device D20.

Various components, method steps or technical features in the above-mentioned embodiments can be combined with each other, and are not limited by the order of description in words or presentation in drawings in the present disclosure.

Although the content of this disclosure has been disclosed above in terms of implementation, it is not intended to limit the content of this disclosure. Anyone who is skilled in this art can make various changes and modifications without departing from the spirit and scope of this disclosure. Therefore, this disclosure The scope of protection of the content shall be defined by the scope of the attached patent application.

100: detection system D10: First device D20: Second device D30: Third device D40: Server W1: Workstation W2: Workstation R1: communication range R2: communication range R3: communication range

Claims (10)

A detection system comprising: A first device, including a storage device and a feedback device, wherein the storage device stores a first identification code, a process state and a plurality of feedback instructions, and the first device is used to generating a first detection signal, and the feedback device is driven according to the feedback instructions to operate in a plurality of feedback states, and the feedback states corresponding to the feedback instructions are different from each other; A second device for receiving the first detection signal to establish a connection with the first device, wherein the second device is used for generating a second detection signal after receiving the first detection signal , the second detection signal includes the first identification code and a second identification code; A third device for sending a third detection signal, wherein when the first device receives the third detection signal, the first device is used for obtaining the feedback instructions according to the third detection signal one of them, according to which the feedback device is driven; and a server for connecting with the second device and the third device, wherein the server is used for recording the first identification code and the second identification code in the second detection signal A current location of a device. The detection system as described in claim 1, wherein the first device is used to obtain one of the feedback instructions according to the third detection signal, so that the feedback device operates in one of the feedback states, And the feedback intensity, feedback frequency or feedback time of these feedback states are different from each other. The detection system as described in claim 2, wherein the feedback device includes an indicator light, and the feedback device is used to drive the indicator light to generate different light colors according to the feedback instructions. The detection system as described in claim 2, wherein the feedback device includes an audio player, and the feedback device is used to drive the audio player to generate sounds of different lengths, frequencies or intensities according to the feedback instructions. The detection system according to claim 2, wherein the feedback device includes a vibrator, and the feedback device is used to drive the vibrator to generate vibrations of different intensities or durations according to the feedback instructions. The detection system according to claim 1, wherein the first device further includes a display screen for displaying the process status. The detection system as described in claim 1, wherein the third device is used to connect to the server to obtain the current location. The detection system as described in claim 1, wherein the first device is connected to the second device or the third device through a first communication protocol, and the server is connected to the second device through a second communication protocol The second device or the third device is connected by wire, and the communication transmission distance of the first communication protocol is smaller than the communication transmission distance of the second communication protocol. The detection system according to claim 8, wherein the first communication protocol is Bluetooth. The detection system as claimed in claim 1, wherein the first device is used to hold a plurality of wafer processing objects.

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