TWI783013B - Apparatus and method for adjusting the angle of rotation of the magnet system of a tubular magnetron - Google Patents

Abstract

The invention concerns a flange unit (11) for rotatably holding a magnet system (36) of a tubular magnetron, such a tubular magnetron and a method for adjusting the angle of the magnet system (36). The flange unit comprises a main scale (1) and a nonius (2), which are designed as discs and each have a rotation angle scale (13). Main scale (1) and nonius (2) are arranged concentrically and adjacent to each other, whereby nonius (2) can be rotated about its common axis (40) relative to main scale (1). The rotation angle scales (13) of main scale (1) and nonius (2) have different scale divisions. Main scale (1) and nonius (2) have connecting means with which the main scale (1) can be mechanically connected to a static component of the tubular magnetron and the nonius (2) to the magnet system (36). The set angle of rotation of the nonius (2) can be locked relative to the main scale (1) by means of a locking device (5).

Description

Device and method for adjusting the angle of rotation of a magnet system of a tubular magnetron

The invention relates to a device and a method for adjusting the angle of rotation of a magnet system of a tubular magnetron relative to a support of the tubular magnetron at an end block of the tubular magnetron. The invention relates in particular to a method for adjusting the angle of rotation of the magnet system of such a tubular magnetron.

In vacuum coating technology, so-called tubular magnetrons are used for sputtering, in which a tubular target (also called tube target) surrounds a magnet arrangement. Tube targets generally comprise carrier tubes with target material applied to side surfaces or tubes made entirely of target material.

The tube target is rotatable relative to the magnet structure such that the tube target can be rotated during the coating operation while the magnet structure is uniformly aligned in the coating chamber. By rotating the tube target uniformly under a steady state magnetic field, the entire cylindrical target surface crosses the raceway area and achieves uniform erosion of the target material.

Such rotating tube targets are usually installed in the vacuum chamber of the vacuum coating plant between the end block and the support, sometimes also between two end blocks, which are designed so that they can close the tube target on both sides and The tube target is held inside it with the magnet system such that the magnet system can rotate about the axis of the tube target within a defined angular range. The term "rotatable" is distinguishable from "rotatable". With respect to angle adjustment, "rotatable" means that the magnet system is mounted such that it can be rotated by at least a certain angle in order to adjust its angle. The magnet system does not rotate like a tube target.

The end block is multi-functional, in addition to the above, it is also used to drive the tube target, power and coolant supply.

To support sputtering, a magnet system with adjacent magnets of locally alternating polarity, also called bar magnets, is arranged in the tube target. Such magnet systems for magnetron sputtering generally comprise a central pole which surrounds a second opposing pole in an annular manner. Due to the thus formed annular tunnel-shaped magnetic field, the target material is removed to a certain extent over the gap between the two magnetic poles, where the magnetic field lines run parallel to the target surface, so that an annular sputtering groove is formed in this area, due to the material removal Increased, also known as erosion trench form.

In order to optimize the function of the vacuum coating tube magnetron, the magnet bar angle of the magnet system must be adjusted and changed to the surface to be coated in a targeted and repeatable manner. Solutions are known in which the angle of the magnet bar is adjusted in 15° increments to an open coating chamber. However, these steps are not sufficient to reproducibly build layers with property definitions for different applications. Precision coatings require nearly infinite angles of adjustability over a range of +/-15° or more with a repeatability of +/-0.1°. Existing tubular magnetrons cannot meet this requirement.

The term repeated here refers to the distance that approached locations spread out from each other when repeatedly approaching a target location from one and the same starting location.

Based on the prior art described above, the object of the present invention is to improve the adjustability of the rotation angle of the magnet system, in particular to reduce the adjustable step size, preferably less than 1°. Repeatability should be ensured at least to a known extent.

Equipment for this purpose is available which requires little technical effort and maintenance.

Furthermore, it is optional to rotate the magnet system without opening the vacuum chamber.

The basic concept of the invention will be described as the use of two part movable, in this case rotatable, rotating angle scales, which are rotated by their mechanical connection with the rotating magnetic system of the magnet system. The use of a two-part scale is also suitable for achieving the desired step size by appropriate graduations of the first and/or second rotation angle scale. In addition, proper selection of the locking device combined with the design of the scale can achieve the required repeatability.

The device with a two-part rotation angle scale is set at one of the two end blocks of the tubular magnetron, and has a flange-like structure due to the rotatable support, and the magnet system is regularly arranged in the tube. It is called a flange unit here. The flange unit can be arranged in the tube target and can close the tube with the magnet system arranged on its side. Alternative configurations depend, for example, on the design of the tubular magnetron, the available installation space or the adjustable angular range of the magnet system.

Features for implementing this concept will be described below. These will in various embodiments be combined with each other in different ways to the extent that it makes sense and is suitable for the application.

One feature is the use of a scale with at least two parts, a main scale with a first angle of rotation scale and a first vernier with a second angle of rotation. A distinction is made between the term "scale" which describes a physical element of a device, and "scale" or "rotation angle scale", where "scale" or "rotation angle scale" means, for example, an angle of rotation, which applies to the degree of rotation of the scale describe.

Usually, the rotation angle scale is divided symmetrically. From the central zero mark, the same scale runs clockwise and counterclockwise, using a positive sign in one direction and a negative sign in the other. Alternatively, other rotation angle scales can be used. Description will be made using the examples mentioned later. The subdivision of the rotation angle scale is referred to below as the "scale part", since the term "tick marks" does not always coincide with the actual implementation of the scale part. The order of scale division is "scale division".

The term "cursor" means a rotatable scale relative to the main scale. According to the invention, at least one cursor is arranged, which is designated for distinguishing as a "first cursor". Optionally, at least one further cursor can be arranged, which is likewise rotatable relative to the main scale. In this way, a third rotation angle scale can be formed. This can apply to either the first cursor or the second cursor. In the first case, the further sliders can be realized by the same disc as the first slider is formed. In this case, the other vernier can be an additional rotation angle scale on the same disc parallel to the other rotation angle scale, ie a second rotation angle scale. In the second case, the additional vernier can be realized by a separate disk with its own angle of rotation scale arranged concentrically to the first vernier. For greater clarity, the invention will be described below with reference to only one cursor. Their properties and implementation can be similarly applied to other cursors.

The lower main scale and vernier are formed as circular, annular or disk-shaped discs and are arranged concentrically and adjacent to each other. This means that there is a gap between the two disks or that the two disks are directly adjacent to each other.

The location of the main scale and the vernier next to each other may, for example, be formed by the orientation of layers on top of each other based on their common axis.

The side-by-side position of the main scale and the vernier in combination with a concentric common axis arrangement can be achieved by means of two annular discs forming a vernier scale or major scale, the outer radius of one disc being slightly smaller than the inner radius of the other disc. Therefore, two discs can be placed side by side in a plane. Alternatively, one of the two disks can be formed in a ring shape, while the other disk has a thickness deviation into which the ring disk can be inserted. Other alternatives for adjacent discs are possible.

The rotation angle scales of the main scale and vernier can be realized and positioned differently depending on their design. For example, it can be applied on the circumference, ie on the outer edge of the disc or on the semicircular arcs extending parallel thereto and/or on the lateral surfaces of the main dial and vernier. Obviously, the angle of rotation scales are arranged and formed such that in certain cases both angle of rotation scales are visible. This can be achieved, for example, by means of openings in the upper part of the two scales. In the case of congruent disks, the arrangement of at least one angle of rotation takes place, for example, on the side surface of one disk or below the opening in the top-located disk. Or, the main scale and the vernier cannot be coincident. The latter can be achieved, for example, in that the upper outer radius of the two disks is smaller than the outer radius of the lower disk, so that the two disks can be positioned one above the other and the angle of rotation of the lower disk is still visible. Alternatively, the main scale and vernier may be formed as adjacent annular discs.

Furthermore, the main scale and the vernier are rotatable relative to each other, and due to the rotation of the vernier, the rotation angles are shifted relative to each other and can be oppositely set to different scale values.

Next, the two rotation angle scales have different scale graduations, which are suitable for the angle range to be set and the step size of the rotation angle adjustment. Thus, the scale of the main scale covers the entire angular range, eg from a position of 0° (eg vertical position), 30° clockwise from the central axis of the magnet system and vice versa (+/−30°). The vernier graduations of the vernier have a step size, here also called vernier step, which is calculated from the step size of the main scale, also called here main step, plus the desired subdivision of the main step. For example, a main step size of 1° and a vernier step size of 1.1° result in a 0.1° increase in the magnet system. Because each rotation of the cursor adds an additional increment of 0.1° to the previous value. The set angle is produced by two scale portions of the first and second rotation angle scale, which are directly above or opposite each other. Any other angular range and increment or subdivision into degrees, minutes or seconds is possible, adapted to the corresponding requirements of the tubular magnetron due to the coating task at hand.

In order to realize the rotation of the magnet system through the above flange unit, the vernier scale is designed as a rotatable scale, wherein the magnet system and the main scale are non-rotatable (ie static) scales. The static scale is mechanically connected to the static assembly of the tubular magnetron by suitable connection means. According to another embodiment of a suitable connection means, the pins are mounted concentrically with respect to their common axis on the main scale and/or on the first vernier. The connection is considered mechanical to distinguish it from an electrical connection and includes both detachable and non-detachable connections. This connection is used to entrain the magnet system by the rotation of the vernier. As connection means, the skilled person has sufficient alternatives for permanent static and rotational connections.

Furthermore, the flange unit comprises means for locking, with which means the angle of rotation of the vernier is fixed at a set angular position with respect to the main scale. Alternatively, the locking means may use a form fit or friction connection with the main scale and vernier or directly between them or a combination of connection types. A frictional connection can be achieved, for example, by pressing together or a magnetic mount of two discs. For example, a form-fit connection can be formed by means of terminals, pins, etc., which engage on the main scale and the vernier. The latter define the position of the main scale and the vernier in a well-defined relation to each other and, depending on the tolerances of the locking device, allows a very high repeatability. For many applications a repeatability of 0.1° is acceptable, but lower values such as 0.5° repeatability can also be achieved.

According to one embodiment, it is possible by at least one angle of rotation scale, preferably that of the first vernier or two angle of rotation scales, having or being formed by a groove associated with the scale, and the locking means being designed to fit into the groove Groove, resulting in a form-fit connection. The groove may be a hole or channel, a half-hole at the edge of the scale, a surface groove or similar groove shaped such that the locking means engages in the groove to provide an adequate contact surface. For example, protruding holes from the side surfaces are suitable for securing annular disks adjacent to each other. In this case, the outer disc extends the channel by means of the ring and the inner disc is parallel to the surface, eg a hole with a corresponding channel. It is obvious and usual that the geometry of the main scale and vernier grooves and of the locking means are adapted to each other, in particular in the way that the locking means fix the vernier relative to the main scale.

In another embodiment, the flange unit has a readout mark designed to indicate the angular value set with a vernier, optionally also with two verniers. This facility for angle reading is advantageous if one or more rotation angle scales are formed by grooves or if the rotation angle adjustment takes place within a closed coating chamber. The read marks are rotatable about a common axis on which the main scale and the vernier are arranged concentrically and about which the vernier is rotatable. In this way, superimposed or relative scale portions of two rotational angle scales can be marked by a read mark and repeatability can be increased.

In one embodiment of the flange unit, the flange unit has read markings on which the locking means can be arranged. In this way, the read mark can be set to a set angle of rotation while locking, for example, the locking means being pins, protrusions, springs or equivalent.

Optionally, the vernier may comprise an already improved secondary rotational angle scale, for example, a scaled representation of a second rotational angle scale allowing improved angular adjustment, especially in very small angular steps. Optionally, the locking device can also influence this auxiliary rotation angle scale, so that repeatability can also be improved.

The main scale and vernier are formed as circular, annular or circular segmented disks and are both connected to two distinct components of the tubular magnetron. To permanently fix the position of the two scales relative to each other, the main scale and vernier may be held by a ring segment or arc segment mounted on either the main scale or the first vernier and segmented cover both components. This design supports the use of the main scale and/or vernier surfaces to arrange and implement the rotation angle scale as previously described. It also avoids the use of a common concentric shaft, so that the axial channels through the two disks remain free to feed and/or cool the magnet system.

A tubular magnetron according to the invention comprises a tube target, a magnet system arranged in the tube target for forming erosion tracks on the target surface, a rotatably mounted target shaft for holding and rotating the tube target and a magnet system arranged in the target shaft Nozzles for retaining magnet systems, as described above in more detail for the prior art. The nozzle holds the magnet system in place within the tube target and cannot rotate and is therefore stationary relative to the coating chamber around it.

The rotation of the magnet system is effected by means of a flange unit, which flange unit and its various configurations have been described in detail above, in order to adjust the angle of the magnet system for a defined coating task. In order to achieve rotation of the magnet system relative to the tube target and thus relative to the coating chamber and the substrate, the main scale of the flange unit with nozzle and vernier is mechanically connected to the magnet system.

The nozzle is arranged inside the target shaft, so it is suitable for holding the flange unit and the associated magnet system. This arrangement of the flange unit and its support prevents the flange unit from being exposed to the coating material so that associated frequent maintenance can be avoided and maintenance of uncoated plant components reduced.

According to one embodiment, a drive for moving one of the following components is also included: the first slider, the second slider (if present) or the locking means. The movement in the case of the first and second cursors as described above is a rotation around a desired defined angle. The movement of the locking device depends on its embodiment and may be a rotational or translational movement or a combination of both. Translational movement is required, for example, when a pin or spring is used for locking, which engages in a groove on the main scale and/or vernier. Various options are available to the person skilled in the art for the drives used to achieve this movement, such as various electric motors or magnetic units that trigger the translational movement by activating and deactivating the magnetic field.

The angular adjustment of the magnet system of the tubular magnetron with the flange unit described above is achieved by first rotating the vernier until the central zero mark of its dial graduation is opposite to the graduated portion of the rotational angle scale of the main scale, which is as close as possible to The angle to be set, also known as the desired angle. Produced by the adjustability should be the graduated portion of the main scale to the set angle, which is provided by the vernier. This results from the angular amount determined by each of the two half-turn scales of the vernier, ie the portion of the scale either side of the zero mark that is clockwise or counterclockwise is adjustable.

For example, if a vernier has a vernier corner scale with 0.1° graduations and fifteen graduations either side of the zero mark, the vernier can be set to +/- 1.5°, ie, an angular adjustability of 1.5 for each half-turn angle graduation °. Therefore, if the angle to be set is +10.5°, the zero mark of the vernier is, for example, set to +9° or +10° of the main scale.

Thereby, the vernier in the positive direction is further rotated by fifteen scale parts, and was previously set to 9°. If the first setting is 10°, then the second rotation has only five divisions.

Alternatively, it is also possible to combine the rotation of the vernier in the positive and negative directions, thereby determining the angle to be set by simply adding the rotation angle of the main scale and the vernier, taking into account the sign of the corresponding half-turn scale.

If multiple cursors are arranged, this method step initially concerns the first cursor. Any other cursor for further finer subdivision of the angle of rotation of the previous cursor, applied in the same manner as described for the first cursor in terms of angle adjustment, where the angle of rotation scale instead of the main scale is based on that of the previous cursor Rotation angle scale.

After the rotation angle is adjusted, each vernier for the angle adjustment as described above is fixed by the turn-up unit locking means on the main scale, thereby locking the adjustment. By virtue of the mechanical connection of the main scale, the static assembly of the tubular magnetron and the vernier of the magnet system are fixed on the latter relative to the tubular magnetron.

According to various embodiments of the method, locking may be accomplished by reading a tag. The advantage is that the target angle is increased by setting the read mark to the opposite position of the main scale and the scale portion of the vernier. If at least one of the angle of rotation scales, preferably all of the angle of rotation scales, has or is formed by grooves associated with the scale and the locking means are designed to engage in the grooves, these grooves can be used both as scale graduations and fixed.

The flange unit of the above-mentioned tubular magnetron, the tubular magnetron and the method by which it can be realized, make it possible to achieve at least +/-0.1° and +/-0.05° repeatable magnet system in increments of maximum 0.1° Angular adjustability, which also takes into account the often limited space conditions on and within the tubular magnetron. The scale difference between the main scale and the vernier rotation scale determines the repeatability and can be achieved upon request. If more than two scales are used, the third scale can be used as another vernier relative to the first vernier, which is used as the main scale in this phase. Finally, step size and repeatability can be further improved.

1‧‧‧main scale

2‧‧‧cursor

4‧‧‧Reading mark

5‧‧‧Locking device

6‧‧‧Scale part

7‧‧‧Mark

8‧‧‧circular segment

9‧‧‧Cursor nozzle

10‧‧‧flange nozzle

11‧‧‧flange unit

12‧‧‧Zero mark

13‧‧‧rotation angle scale

14‧‧‧Auxiliary rotation angle scale

30‧‧‧end block

31‧‧‧Tube target

32‧‧‧Target axis

35‧‧‧magnetron

36‧‧‧magnet system

37‧‧‧carrying tube

38‧‧‧flange unit

39‧‧‧Nozzle

40‧‧‧axis

The present invention will be explained in more detail with reference to Examples. 1A and 1B are perspective views and cross-sectional views of an embodiment of the flange unit of the first increment of the angle adjuster shown in the accompanying drawings; FIGS. 2A to 2C are another embodiment of the flange unit of the angle adjustment with the second step. Perspective view, cross-sectional view and enlarged detail of an embodiment; and Fig. 3 shows an end block of a tubular magnetron with a flange unit.

The figures only schematically show devices to the extent necessary to explain the invention. It is not claimed to be complete or to scale.

In Fig. 1A, the flange unit 11 is shown with a circular vernier 2 in which the scale portion 6 is formed by a hole. On the vernier 2 formed by the first disc, which is the first and only vernier 2, on the arc segment of the zero mark 12, there are six scale parts 6 each starting from two directions, illustrative but not Restrictive half-holes were formed at 8° intervals. On the main scale 1, the second disc, six scale portions 6 are also arranged in the form of half-holes at intervals of 10°. This results in a step size of 2° with a repeatability of 0.1°.

The different angles are achieved by facing the different scale portions 6 of the two rotation angle scales 13 and being fixed in this position by suitable locking means 5 , in FIGS. 1A and 1B by way of example but not limited to spring loaded pins. Suspension of the pin is achieved by means of leaf springs, which also serve as reading marks 4 .

FIG. 1B is a sectional view of the flange unit of FIG. 1A , in which it is possible to see two directly overlapping disks of the main scale 1 and the vernier 2 , which have different diameters and are interconnected by a ring segment 8 . As a non-limiting example, the diameter of the vernier 2 is greater than the diameter of the main scale 1 . The arc segment 8 is mounted on the vernier 2 and its inner circumference covers the outer edge of the main scale 1 so that it can rotate freely.

On the back of the cursor 2, a cursor nozzle 9 is arranged, which can be connected to a magnet system 36 (Fig. 3). In front of the main scale 1 there is also arranged a nozzle, called a flange nozzle 10, which serves as a connection device for the main scale 1, which has a static nozzle 39 ( 3), and thus assemble the flange unit 11 on the tubular magnetron.

Other rotational angle scales 13 with other scale divisions can be used in a similar manner if the angle adjustment is performed in steps of less than 2°. For example, to obtain an angular displacement of 0.1° increments, the inner scale 6 of the vernier 2 may be arranged at a distance of 3.1° and the outer scale 6 of the main scale 1 at a distance of 3° ( FIGS. 2A to 2C ). This embodiment of the flange unit 11 allows reproducible setting of precise angles in 0.1° increments with a repeatability of at least +/- 0.1° due to the graduated division distance of the vernier 2 at 3.1°.

FIGS. 2A to 2C differ from FIGS. 1A and 1B by an auxiliary rotation angle scale 14 which, in addition to the arc segments of the cursor 2 , is also formed by a half hole. The auxiliary rotation angle scale 14 has a scale corresponding to the scale of the vernier 2 . However, it is designed in the form of a vertical line so that in combination with optional markings 7 (eg grooves) for reading markings 4, the reading accuracy can be increased.

FIG. 2B shows a section through the flange unit of FIG. 2A in a sectional view. An alternative analogous embodiment of main scale 1 and vernier 2 can be seen here, together with its flange nozzle 10 and vernier nozzle 9 , reading mark 4 and pin, which serves as locking device 5 . This is also engaged and fixed relative to each other by two opposing halves of main scale 1 and vernier 2 .

FIG. 2C shows a top view of the three rotation angle scales, the rotation angle scale 13 of the main scale 1 and the rotation angle scale 13 and the auxiliary rotation angle scale 14 of the vernier 2 , and the positions of their scale parts 6 relative to each other.

Forming the rotation angle scale 13 by means of a groove (eg a half hole or an opening of a different shape) facilitates a fixed setting. If the holes are replaced by grooves, the fixation of the angular position can also be done by means of spring-mounted expanded metal. Appropriate labeling of the two rows of holes is meaningful. Alternatively, the fixing of the rotation angle scale 13 and the adjustment can also be done in other ways.

FIG. 3 shows the flange unit 11 according to FIG. 1A schematically shown in the end piece 30 of the tubular magnetron in the installed state. The tubular magnetron comprises a tube target 31 mounted and operated by an end block 30 in a coating plant (not shown). In the tube target 31 a magnet system 36 for forming erosion tracks on the target surface is arranged. The tube target 31 is held and rotated by a rotatably mounted target shaft 32 . In the target shaft 32 a nozzle 39 for mounting a magnet system 36 is arranged, as described in more detail above with respect to the prior art. The nozzle 39 holds the magnet system 36 in place within the tube target 31 and is non-rotatable and therefore stationary relative to the surrounding coating chamber.

The flange unit 11 is mechanically connected by means of its flange nozzle 10 to the nozzle 39 and is thus mounted on the end piece 30 .

The slider 2 is connected to the magnet system 36 by means of the slider nozzle 9 . This mechanical connection is to the carrier tube 37 holding the magnet system 36 such that the carrier tube 37 and the magnet system 36 follow each rotation of the vernier 2 about the common axis 40 of the main scale and the vernier 2 .

1‧‧‧main scale

2‧‧‧cursor

4‧‧‧Reading mark

5‧‧‧Locking device

9‧‧‧Cursor nozzle

10‧‧‧flange nozzle

11‧‧‧flange unit

30‧‧‧end block

31‧‧‧Tube target

32‧‧‧Target axis

35‧‧‧magnetron

36‧‧‧magnet system

37‧‧‧carrying tube

39‧‧‧Nozzle

40‧‧‧axis

Claims (16)

A flange unit for rotatably mounting a magnet system (36) of a tubular magnetron, comprising the following components: a main scale (1) formed as a circular, annular or circular segmented disc and comprising a first Rotation angle scale (13) formed on the side surface of the disc or on the circumference of the main scale (1) or on an arc extending parallel thereto, a first vernier (2) formed in the form of a circle, ring or circle The segmented disk also includes a second rotation angle scale (13), which is formed on the side surface of the disk or on the circumference of the first vernier (2) or on an arc extending parallel to it, wherein the main scale (1) and The first vernier (2) is arranged concentrically and adjacent to each other, wherein the first vernier (2) is rotatable about its common axis (40) relative to the main scale (1), wherein the first rotation angle scale (13 ) and the second rotation angle scale (13) have different scale graduations, the main scale (1) and the first vernier (2) have a connection device, using the connection device, there is a static state of a tubular magnetron The main scale (1) of the assembly and the first vernier (2) with a magnet system (36) can be mechanically connected, and at least one locking device (5) for locking the first vernier (2) relative to the Set rotation angle of the main scale (1). The flange unit according to claim 1, wherein at least one of the first rotation angle scale (13) and the second rotation angle scale (13) has a groove related to the scale, or the first rotation angle scale ( 13) At least one of the second rotation angle scale (13) is formed by a groove, and the at least one locking means (5) is designed to engage in the groove. The flange unit according to claim 1 or 2, wherein the flange unit (11) includes a reading mark (4), which can be around the first vernier (2) and the main scale (1) The common shaft (40) rotates. The flange unit according to claim 1 or 2, wherein the flange unit (11) has the read mark (4), and the at least one locking device (5) is arranged on the read mark (4). The flange unit according to claim 1 or 2, wherein the first cursor (2) includes an auxiliary rotation angle scale (14) for indicating the scale of the second rotation angle scale (13). Flange unit as claimed in claim 1 or 2, wherein at least one of the connection means of the main scale (1) or the first vernier (2) is a nozzle (9, 10), relative to its common axis ( 40) Concentrically mounted on the main scale (1) or the first vernier (2). The flange unit according to claim 1 or 2, wherein the main scale (1) is inconsistent with the disc of the first vernier (2). Flange unit according to claim 1 or 2, wherein the main scale (1) and the first vernier (2) are held in proper position with each other by a ring or ring segment (8), which is mounted on the on one of the main scale (1) or the first vernier (2), and the segments cover both components. The flange unit according to claim 8, wherein the flange unit (11) has the read mark (4), and the at least one locking device (5) is arranged on the read mark (4). The flange unit according to claim 1 or 2, wherein, on the first cursor (2) or on a second cursor concentric with the first cursor (2), parallel to the second rotation angle scale (13 ) is extended to form a third rotation angle scale. A tubular magnetron comprising the following components: a tube target (31), a magnet system (36) arranged in the tube target (31) for forming erosion marks on the target surface, a rotatably mounted target shaft (32) for holding and rotating the tube target (31), a nozzle (39) arranged in the target shaft (32) for holding the magnet system (36), A flange unit (11) for rotatably supporting said magnet system (36) according to any one of the preceding claims, the main scale (1) of the flange unit (11) being mechanically connected to a nozzle ( 39), the first slider (2) is mechanically connected to the magnet system (36). A tubular magnetron according to claim 11, further comprising a drive for moving components from the following list: the first slider (2), the second slider, the at least one locking device (5). A method for adjusting the angle of a magnet system (36) of a tubular magnetron according to claim 11 or 12, comprising the steps of: by rotating at least the first vernier (2) relative to the main scale (1) Rotating the magnet system (36) by a desired angle, the scale portion (6) of the first angle of rotation scale (13) of the main scale (1) and the second angle of rotation scale ( The scale parts (6) of 13) are opposite, and the desired angle comes from the addition of the values of the opposite scale parts (6), and by the at least one locking device (5) of the flange unit (11) locking each A vernier (, for angle adjustment on the main scale (1). The method of claim 13, wherein the flange unit (11) comprises the read mark (4) and is locked by means of the read mark (4). The method according to claim 13 or 14, wherein at least the rotation of the first cursor (2) is performed through the driver. The method according to claim 13 or 14, wherein the movement of the at least one locking device (5) is performed by the drive.

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