TWI782675B - Workpiece processing system, distance measuring device and method for setting workpiece placing path - Google Patents

Abstract

A method for setting workpiece placing path is embodied by a workpiece processing system to a workpiece. The workpiece processing system includes a holder and a mechanical arm. Said method includes: obtaining a first position corresponding to the holder, and obtaining a second position corresponding to the workpiece upon the workpiece being placed on the holder, generating a calibrated placing path according to the difference between the first position and the second position. The calibrated placing path is used to control the mechanical arm to place a workpiece to be processed to the holder, so that the distance between the center of the workpiece to be processed and the center of the holder is less than the distance between the first position and the second position.

Description

Workpiece processing system, distance measuring device and method for setting workpiece placement path

The invention relates to a processing system, in particular to a workpiece processing system suitable for workpieces. The present invention also relates to a distance measuring device included in the workpiece processing system, and a method for setting a workpiece placing path implemented by the workpiece processing system.

Many processing industries use robotic arms to place workpieces (such as wafers) into various processing equipment (such as etching equipment) for processing or other processing of the workpieces. Whether the workpiece is placed in the correct position in the processing equipment is very important to the processing result. Therefore, how to ensure that the workpiece can be accurately placed in the correct position in the processing equipment has become a topic worth discussing.

Therefore, one of the objects of the present invention is to provide a A workpiece handling system that accurately places workpieces.

The workpiece processing system of the present invention is suitable for processing a workpiece, and the workpiece processing system includes: a workpiece processing device and a distance measuring device, the workpiece processing device includes a bearing seat suitable for carrying the workpiece, and a support seat suitable for holding and moving the workpiece The mechanical arm of the workpiece and a processing unit, the distance measuring device corresponds to the bearing seat and is electrically connected to the processing unit. Wherein, the processing unit is used for obtaining a first position of the bearing base according to a first sensing result generated by the distance measuring device, and according to a first position of the bearing seat when the workpiece is placed on the bearing base by the distance measuring device. The second sensing result generated under the condition obtains a second position of the workpiece, wherein the distance between the first position and the second position is taken as an offset distance, and the processing unit also uses A corrected placement path of the robot arm is generated at least according to the difference between the first position and the second position, wherein the corrected placement path is used to control the robot arm to place a workpiece to be processed on the bearing seat , and the distance between the central position of the workpiece to be processed when placed on the bearing seat by the robot arm and the central position of the bearing seat is smaller than the offset distance.

In some implementation aspects of the workpiece processing system of the present invention, the processing unit is also electrically connected to the robotic arm, and after the processing unit obtains the first position according to the first sensing result, it is first placed according to an initial The path controls the robot arm to place the workpiece on the bearing base, and then obtains according to the second sensing result generated by the distance measuring device when the workpiece is placed on the bearing base with the initial placement path. The second position is obtained, and the processing unit adjusts the initial placement path according to the difference between the first position and the second position, thereby generating the corrected placement path.

In some implementation aspects of the workpiece processing system of the present invention, the distance measuring device includes a plurality of distance sensors, and each of the first sensing result and the second sensing result includes a plurality of corresponding equidistance sensing The sensing distance value of the device, and the processing unit calculates the first position corresponding to the bearing base at least according to the sensing distance values of the first sensing result, and at least according to the second sensing result The sensing distance values are calculated to correspond to the second position of the workpiece.

In some embodiments of the workpiece processing system of the present invention, the bearing base and the workpiece are each in the shape of a disc, and the equidistance sensors are arranged around the bearing base. Each sensing distance value included in the first sensing result represents the distance between the distance sensor corresponding to the sensing distance value and the side peripheral surface of the bearing seat. The processing unit first calculates a plurality of first circumferential coordinates respectively corresponding to the sensing distance values at least according to the sensing distance values of the first sensing result, and then calculates the first circumferential coordinates according to the first circumferential coordinates A position, and the first position represents the center position of the circular surface of the bearing seat. Each sensing distance value included in the second sensing result represents the distance between the distance sensor corresponding to the sensing distance value and the side peripheral surface of the workpiece. The processing unit calculates a plurality of second circumferential coordinates respectively corresponding to the sensing distance values at least according to the sensing distance values of the second sensing result, and then calculates the second circumferential coordinates according to the second circumferential coordinates. Two positions, and the second position represents the circular surface of the workpiece The center position of the circle.

In some implementation aspects of the workpiece processing system of the present invention, the processing unit is further adapted to be electrically connected to an input unit for user operation, and the initial placement path is determined by the processing unit after receiving an input unit from the After entering the initial placement coordinates of the unit, at least based on the initial placement coordinates generated.

In some implementation aspects of the workpiece processing system of the present invention, the processing unit generates the correction placement path by at least generating a test placement path for the robot arm based on the difference between the first position and the second position , and execute a test program according to the test placement path, wherein the test program includes: controlling the mechanical arm to place the workpiece on the bearing seat with the test placement path, and judging the time when the workpiece is placed on the bearing seat Whether the distance between the current center position and the center position of the bearing seat is less than an offset threshold value smaller than the offset distance, if the judgment result is yes, the test placement path is used as the correction placement path, if the judgment result If no, update the second position with the current center position, and at least generate another test placement path corresponding to the robot arm according to the updated second position, and execute the test procedure again according to the other test placement path.

Another object of the present invention is to provide a distance measuring device included in the workpiece processing system.

The distance measuring device of the present invention is suitable for being arranged in a workpiece processing equipment, and the workpiece processing equipment includes a bearing seat for carrying a workpiece; the distance measuring device The installation includes a body and a plurality of distance sensors, the body is suitable for being arranged on the workpiece processing equipment, the equidistance sensors are arranged on the body and each faces the bearing seat, so that each distance sensor can Measure the distance between itself and the bearing seat when no workpiece is placed on the bearing seat, and measure the distance between itself and the workpiece when the workpiece is placed on the bearing seat.

In some embodiments of the distance measuring device of the present invention, the bearing base is in the shape of a disc, and the equidistance sensors are arranged in a fan shape relative to the bearing base.

In some implementation aspects of the distance measuring device of the present invention, the number of the equidistance sensors is at least three.

In some embodiments of the distance measuring device of the present invention, the workpiece processing equipment further includes a surrounding wall surrounding the bearing seat, and a wall located on one side of the bearing seat for placing the workpiece on the bearing seat The mechanical arm, and the body of the distance measuring device is adapted to be arranged on the surrounding wall, and is located on the opposite side of the bearing seat to the mechanical arm.

Another object of the present invention is to provide a workpiece placement path setting method implemented by the workpiece processing system.

The workpiece placement path setting method of the present invention is implemented on a workpiece by a workpiece processing system, wherein the workpiece processing system includes a bearing seat for carrying the workpiece, a distance measuring device corresponding to the position of the bearing seat, and a A robotic arm for holding and moving the workpiece, and a processing unit electrically connected to the distance measuring device. Should The workpiece placement path setting method includes: the processing unit obtains a first position of a pair of bearing seats according to a first sensing result generated by the distance measuring device, and according to a distance measuring device when the workpiece is placed on the The second sensing result generated under the condition of the carrier obtains a second position of the workpiece, wherein the distance between the first position and the second position is taken as an offset distance; the processing unit at least A corrected placement path of the robot arm is generated according to the difference between the first position and the second position, wherein the corrected placement path is used to control the robot arm to place a workpiece to be processed on the bearing seat, and The distance between the central position of the workpiece to be processed when placed on the bearing base by the robot arm and the central position of the bearing base is smaller than the offset distance.

In some implementation aspects of the workpiece placement path setting method of the present invention, the processing unit is also electrically connected to the robotic arm, and after the processing unit obtains the first position according to the first sensing result, it first obtains the first position according to an initial The placement path controls the mechanical arm to place the workpiece on the bearing base, and then obtains the first sensing result according to the second sensing result generated by the distance measuring device when the workpiece is placed on the bearing base through the initial placement path. two positions, and the processing unit adjusts the initial placement path according to the difference between the first position and the second position, so as to generate the corrected placement path.

In some implementation aspects of the workpiece placement path setting method of the present invention, the distance measuring device includes a plurality of distance sensors, and each of the first sensing result and the second sensing result includes a plurality of the sensing distance value of the sensor, and Moreover, the processing unit calculates the first position corresponding to the bearing seat at least according to the sensing distance values of the first sensing result, and calculates at least according to the sensing distance values of the second sensing result The second position corresponding to the workpiece is displayed.

In some implementation aspects of the method for setting the workpiece placement path of the present invention, the bearing base and the workpiece are each in the shape of a disc, and the equidistance sensors are arranged around the bearing base. Each sensing distance value included in the first sensing result represents the distance between the distance sensor corresponding to the sensing distance value and the side peripheral surface of the bearing seat. The processing unit first calculates a plurality of first circumferential coordinates respectively corresponding to the sensing distance values at least according to the sensing distance values of the first sensing result, and then calculates the first circumferential coordinates according to the first circumferential coordinates A position, and the first position represents the center position of the circular surface of the bearing seat. Each sensing distance value included in the second sensing result represents the distance between the distance sensor corresponding to the sensing distance value and the side peripheral surface of the workpiece. The processing unit calculates a plurality of second circumferential coordinates respectively corresponding to the sensing distance values at least according to the sensing distance values of the second sensing result, and then calculates the second circumferential coordinates according to the second circumferential coordinates. Two positions, and the second position represents the center position of the circular surface of the workpiece.

In some implementation aspects of the workpiece placement path setting method of the present invention, the processing unit is further adapted to be electrically connected to an input unit for user operation, and the initial placement path is determined by the processing unit after receiving a After initial placement coordinates from the input cell, generated based on at least the initial placement coordinates.

In some implementation aspects of the method for setting the workpiece placement path of the present invention, the processing unit generates the correction placement path by at least generating a test of the robot arm according to the difference between the first position and the second position Place a path, and execute a test program according to the test placement path, wherein the test program includes: controlling the mechanical arm to place the workpiece on the bearing seat with the test placement path, and judging that the workpiece is placed on the bearing seat Whether the distance between a current center position at the time and the center position of the bearing seat is less than an offset threshold value smaller than the offset distance, if the judgment result is yes, the test placement path is used as the correction placement path, if If the judgment result is no, update the second position with the current center position, and generate another test placement path corresponding to the robot arm at least according to the updated second position, and execute the test program again according to the other test placement path .

The effect of the present invention is: by obtaining the first position corresponding to the bearing base, and the second position corresponding to the workpiece when the workpiece is on the bearing base, the workpiece processing system can The corrected placement path is generated by the relative positional relationship between the time and the bearing seat, and the corrected placement path can make the robot arm place the workpiece to be processed more aligned with the bearing seat, so it can avoid the placement of the workpiece to be processed. Positional deviations negatively affect the processing of the workpiece to be processed.

1: Workpiece handling system

11:Workpiece handling equipment

111: base

112: bearing seat

113: wall

114: Mechanical arm

115: processing unit

116: round surface

117: side surface

12: Distance measuring device

121: Ontology

122: distance sensor

2: Input unit

5: Workpiece

51: round surface

52: Side surface

S1~S6: steps

Other features and effects of the present invention will be described with reference to the implementation of the drawings Clearly presented in the formula, wherein: Fig. 1 is a schematic block diagram, which exemplarily shows an embodiment of the workpiece processing system of the present invention, and an input unit suitable for cooperating with the embodiment; Fig. 2 is a schematic top view, exemplarily depicts a workpiece processing equipment and a distance measuring device included in this embodiment; FIG. 3 is a schematic top view, schematically illustrating that a workpiece is placed on a bearing seat of the workpiece processing equipment; and FIG. 4 is a flow chart, which is used to exemplarily explain how this embodiment implements a method for setting a workpiece placement path for the workpiece.

Before the present invention is described in detail, it should be noted that if there is no special definition, the "electrical connection" mentioned in this patent specification generally refers to the "wire connection" realized by connecting multiple electronic devices/devices/elements to each other through conductive materials. Electrical connection" and "radio connection" for one-way/two-way wireless signal transmission through wireless communication technology. Moreover, if not specifically defined, the "electrical connection" mentioned in this patent specification also generally refers to the "direct electrical connection" formed by direct connection between multiple electronic devices/devices/components, and multiple electronic devices/ The "indirect electrical connection" between devices/components is also indirectly connected to each other through other electronic devices/devices/components.

Referring to Fig. 1 and Fig. 2, one embodiment of the workpiece processing system 1 of the present invention is for example Contains a workpiece processing device 11, and a distance measuring device 12 that is detachably arranged on the workpiece processing device 11, and the workpiece processing device 11 is suitable for example with an input unit 2 for user operation (shown in Figure 1) electrical connections.

The workpiece processing device 11 is suitable for the automated processing of a workpiece 5 (shown by way of example in FIG. 3 ). More specifically, for example, in the application of this embodiment, the workpiece 5 can be, for example, a disk-shaped wafer (wafer), and has a circular surface 51 and a circular surface 51 extending from the edge The side peripheral surface 52 (shown in Figure 3).

On the other hand, the workpiece processing device 11 in this embodiment may be implemented as a wafer etching device for performing etching processing on the workpiece 5 placed in the workpiece processing device 11 . However, in other embodiments, the workpiece processing equipment 11 can also be implemented, for example, as a wafer cleaning equipment for cleaning wafers, or as a wafer processing equipment for performing other treatments on wafers. Therefore, the workpiece The actual implementation of the processing device 11 is not limited to this embodiment.

In this embodiment, the workpiece processing equipment 11 includes, for example, a base 111, a bearing seat 112 arranged on the base 111 for carrying the workpiece 5, a bearing seat 112 arranged on the base 111 and surrounding the bearing seat 112. A surrounding wall 113, a robot arm 114 for holding and moving the workpiece 5, and a processing unit 115 electrically connected to the robot arm 114 and the distance measuring device 12 (shown in FIG. 1 ).

The bearing seat 112 is, for example, disc-shaped and has a circular surface 116 in a horizontal direction (equivalent to the top surface of the bearing seat 112), and a The edge of 116 extends downwards to the side peripheral surface 117 , and when the bearing seat 112 carries the workpiece 5 , the circular surface 116 of the bearing seat 112 will be in contact with the bottom surface of the workpiece 5 .

The surrounding wall 113 is, for example, annular and surrounds the bearing seat 112 at a distance from the bearing seat 112 . More specifically, since the workpiece processing device 11 is exemplarily implemented as a wafer etching device in this embodiment, the surrounding wall 113 is used in this embodiment, for example, to block the etching process during the The etchant flowing around the bearing seat 112, but not limited thereto.

The robot arm 114 is, for example, disposed on a first side of the bearing seat 112, and the robot arm 114 can be controlled by the processing unit 115 to hold the workpiece 5 and move the workpiece 5, and place the workpiece 5 on the The bearing base 112 is moved on or away from the bearing base 112 .

In this embodiment, the processing unit 115 can be implemented as a CPU, for example, and the processing unit 115 is suitable for being electrically connected with the input unit 2 . More specifically, the input unit 2 can be, for example, a keyboard, but the input unit 2 can also be replaced by other types of input devices or the input interface of the workpiece processing equipment 11 itself. Moreover, in a similar implementation, the processing unit 115 can also be implemented as a plurality of central processing units electrically connected to each other, or a control circuit board including a central processing unit. Generally speaking, the processing unit 115 The unit 115 can be implemented as long as it is computer hardware with data processing and computing functions, so its actual implementation is not limited to this embodiment.

In this embodiment, the distance measuring device 12 is, for example, disposed on the surrounding wall 113 in a detachable manner, and the distance measuring device 12 is, for example, located on a second side of the bearing base 112 opposite to the first side. Two sides, and spaced from the bearing seat 112 , whereby the mechanical arm 114 will not collide with the distance measuring device 12 when moving.

More specifically, in this embodiment, the distance measuring device 12 includes, for example, a body 121 that is detachably disposed on the surrounding wall 113, and three The distance sensor 122 is electrically connected.

In this embodiment, the body 121 of the distance measuring device 12 has, for example, a straight central section and two extension sections, wherein the two extension sections are, for example, respectively connected to the opposite two sides of the central section. and the central section and the two extension sections form an obtuse angle, for example, as shown in FIG. However, in other embodiments, the main body 121 can also be implemented as a non-bent bar shape, or an arc shape matched with the surrounding wall 113, and even the main body 121 is not limited to setting on the surrounding wall 113 . Generally speaking, the body 121 of the distance measuring device 12 can be implemented as long as it can be arranged around the supporting base 112 , so its actual implementation is not limited to this embodiment.

In this embodiment, each distance sensor 122 of the distance measuring device 12 may be, for example, a laser distance measuring sensor implemented by optical technology. However, in other embodiments, the equidistance sensor 122 can also use infrared rays or radar, etc. Other technologies are used to realize the distance measuring function, and the number of the equidistance sensors 122 may be more than three, for example, therefore, the actual implementation of the equidistance sensors 122 is not limited to this embodiment.

Further, in this embodiment, relative to the bearing seat 112, the equidistance sensors 122 are arranged fan-shaped around the bearing base 112 as shown in FIG. 117. Thereby, when the workpiece 5 is not placed on the bearing seat 112 (i.e. the situation shown in FIG. 2 ), each distance sensor 122 can measure itself and the side peripheral surface 117 of the bearing base 112 Moreover, the distance between each distance sensor 122 and the side peripheral surface 117 of the bearing seat 112 is equivalent to the horizontal distance between the distance sensor 122 and the edge of the circular surface 116 The separation distance in the direction. On the other hand, when the workpiece 5 is placed on the bearing seat 112 (i.e. the situation shown in FIG. 3 ), since the workpiece 5 protrudes out of the bearing base 112, each distance sensor 122 Then the distance between itself and the side peripheral surface 52 of the workpiece 5 can be measured, and the distance between each distance sensor 122 and the side peripheral surface 52 of the workpiece 5 is equivalent to the distance sensing The distance between the tool 122 and the edge of the circular surface 116 in the horizontal direction. Furthermore, in a preferred implementation mode, when the body 121 of the distance measuring device 12 is arranged on the surrounding wall 113 and is in a horizontal state, the horizontal heights of the equidistance sensors 122 are the same as each other, Moreover, the horizontal height of the equidistant sensor 122 is substantially the same as the side peripheral surface 117 of the bearing base 112 .

It is added that since the area of the circular surface 51 of the workpiece 5 is larger than the area of the circular surface 116 of the bearing seat 112, when the workpiece 5 is placed on the bearing seat 112, the equidistance sensing The sensor 122 will naturally sense the side peripheral surface 52 of the workpiece 5 instead of the side peripheral surface 117 of the bearing seat 112 . On the other hand, in other embodiments, as long as the equidistance sensor 122 is approximately the same as the level of the bearing seat 112, it can detect the side peripheral surface 117 of the bearing seat 112 and the side peripheral surface of the workpiece 5 respectively. Multiple points on 52 can be implemented by performing distance measurement. Therefore, in other embodiments, the equidistance sensors 122 can also be arranged in a straight line, for example, and are not limited to the arrangement in this embodiment. On the other hand, in other embodiments, any one of the bearing seat 112 and the workpiece 5 may also have other shapes, and is not limited to the disc shape described in this embodiment.

With reference to FIG. 4 , how the workpiece processing system 1 of this embodiment implements a workpiece placement path setting method for the workpiece 5 will be described in detail below.

First, in step S1, when the workpiece 5 is not placed on the bearing seat 112 (that is, the situation shown in FIG. 2 ), the processing unit 115 controls the equidistance sensor 122 of the distance measuring device 12 Operates to obtain a first sensing result related to the bearing base 112 from the distance measuring device 12 . In this embodiment, the first sensing result includes, for example, three sensing distance values generated by the three distance sensors 122 for ranging, and each of the first sensing results includes The sensing distance value represents the distance between the distance sensor 122 and the side peripheral surface 117 of the bearing seat 112 corresponding to the sensing distance value.

After the processing unit 115 obtains the first sensing result, the process proceeds to step S2.

In step S2 , the processing unit 115 obtains a pair of first positions of the bearing seat 112 according to the sensing distance values included in the first sensing result.

In this embodiment, the processing unit 115, for example, firstly according to the angle of each distance sensor 122, the relative positional relationship between each distance sensor 122 and a reference point coordinate, and the first sensing result and other sensing distance values, and calculate a plurality of first circumferential coordinates respectively corresponding to the sensing distance values, and then, the processing unit 115 calculates the corresponding to the bearing seat 112, for example, according to the first circumferential coordinates first position.

More specifically, in this embodiment, each first circumferential coordinate represents, for example, the position of one point on the edge of the circular surface 116 of the bearing seat 112, that is, the position of one point on the circumference of the circular surface 116. coordinate. On the other hand, the first position is, for example, the center position of the circular surface 116 representing the bearing seat 112, and the processing unit 115, for example, calculates the first position by using the first circumferential coordinates and the circle equation , but not limited to this.

After the processing unit 115 calculates the first position, the process proceeds to step S3.

In step S3, the processing unit 115 controls the robotic arm 114 to hold the workpiece 5, and controls the robotic arm 114 to place the workpiece 5 according to an initial placement path. Place it on the bearing seat 112. More specifically, in this embodiment, the initial placement path is, for example, determined by the processing unit 115 after receiving an initial placement coordinate from the input unit 2, according to the initial placement coordinates and the robot arm 114 and the carrier produced by the relative positional relationship between the seats 112. Moreover, the initial placement coordinates are, for example, generated by the input unit 2 according to the user's input operation and provided to the processing unit 115. In other words, the initial placement coordinates are manually passed through the The input unit 2 inputs the workpiece processing system 1, but it is not limited thereto.

After the processing unit 115 controls the robot arm 114 to place the workpiece 5 on the carrier 112 according to the initial placement path, the process proceeds to step S4.

In step S4, when the workpiece 5 has been placed on the bearing seat 112 by the robot arm 114 (such as the situation shown in FIG. 3 ), the processing unit 115 controls the equidistance sense of the distance measuring device 12 again. The detector 122 operates to obtain a second sensing result related to the workpiece 5 from the distance measuring device 12 . In this embodiment, the second sensing result includes, for example, three other sensing distance values generated by the distance measurement by the three distance sensors 122, and each of the second sensing results includes A sensing distance value represents the distance between the distance sensor 122 and the side peripheral surface 52 of the workpiece 5 corresponding to the sensing distance value.

After the processing unit 115 obtains the second sensing result, the process proceeds to step S5.

In step S5, the processing unit 115 determines according to the second sensing result The included sensing distance values correspond to the second position of the workpiece 5 .

Similar to the first position, in this embodiment, the processing unit 115 firstly, for example, according to the angle of each of the distance sensors 122, the relative positional relationship between each of the distance sensors 122 and the coordinates of the reference point, and the The sensing distance values of the second sensing result, and calculate a plurality of second circumferential coordinates respectively corresponding to the sensing distance values of the second sensing result, and then, the processing unit 115 again, for example, according to the The second circumferential coordinates are calculated corresponding to the second position of the workpiece 5 .

More specifically, in this embodiment, each second circumferential coordinate is, for example, the position of one point on the edge of the circular surface 51 representing the workpiece 5, that is, one of the points on the circumference of the circular surface 51 of the workpiece 5. The coordinates of a point. On the other hand, the second position is, for example, the center position of the circular surface 51 representing the workpiece 5, and the processing unit 115, for example, calculates the second position by using the second circumferential coordinates and the circle equation, But not limited to this.

After the processing unit 115 calculates the second position, the process proceeds to step S6.

In step S6, the processing unit 115 generates a corrected placement path for the robot arm 114 according to the position difference between the first position and the second position and the initial placement path, and for example outputs the corrected placement path to A storage unit (not shown in the figure) stores. Wherein, the storage unit may be, for example, a data storage device (such as a hard disk or a memory) for storing digital data, and the storage unit may be, for example, It is arranged inside the workpiece processing device 11 , but it can also be arranged, for example, in an external server independent of the workpiece processing device 11 .

In particular, when the workpiece 5 is placed on the bearing base 112 , the center point of the workpiece 5 should ideally be aligned with the bearing base 112 . And, since the first position and the second position respectively represent the center of circle of the bearing seat 112 and the workpiece 5 in this embodiment, the distance between the first position and the second position is, for example, taken as An offset distance in this embodiment, in other words, the offset distance is not only equivalent to the distance between the center of the bearing seat 112 and the center of the workpiece 5, but also equivalent to the placement of the robot arm 114 on the initial placement path. The amount of error caused by the workpiece 5.

On the other hand, the corrected placement path stored in the storage unit is used for the processing unit 115 to control the robotic arm 114 to place one or more workpieces (not shown) that are consistent with the size of the workpiece 5 When it is placed on the bearing seat 112, and the workpiece to be processed is placed on the bearing base 112 by the robot arm 114 with the correct placement path, the center position of the workpiece to be processed (equivalent to the center of the workpiece to be processed) is the same as the center of the workpiece to be processed. The distance between the centers of the bearing seats 112 (corresponding to the center of circle of the bearing seats 112 ) can be smaller than the offset distance, that is, the center of the workpiece to be processed can be more aligned with the center of circle of the bearing seats 112 . It is added that the workpiece 5 itself may be, for example, one of the workpieces waiting to be processed.

In more detail, in this embodiment, the processing unit 115 is, for example, the root The initial placement path is adjusted according to the position difference between the first position and the second position, so as to generate the corrected placement path. For example, assuming that the second position (corresponding to the center of circle of the workpiece 5) is shifted to the right by 1 millimeter from the first position (corresponding to the center of circle of the bearing seat 112), the processing unit 115 will, for example, use The position of "moving 1 mm to the left from the initial placement coordinates" is used as a corrected placement coordinate for the initial placement coordinates, and the initial placement path is adjusted accordingly according to the relative positional relationship between the corrected placement coordinates and the initial placement coordinates , so as to generate the correction for the initial placement path, but not limited thereto.

After the processing unit 115 generates and outputs the corrected placement path, the flow of the workpiece placement path setting method ends.

The above is an example description of how the workpiece processing system 1 of this embodiment implements the workpiece placement path setting method. It should be added that, in similar implementations, the workpiece processing system 1 can also implement the workpiece placement path setting method on a wafer model that matches the size of the real wafer, not necessarily on the real wafer. The circle (that is, the workpiece 5 in this embodiment) implements the workpiece placement path setting method.

In particular, steps S1 to S6 of this embodiment and the flow chart in FIG. 4 are only used to illustrate one possible implementation of the method for setting the workpiece placement path of the present invention. It should be understood that even if steps S1 to S6 are merged, split or adjusted in order, if the process after the merge, split or order adjustment achieves substantially the same effect in substantially the same way as in this embodiment, still belong to the invention The implementable aspect of the method for setting the path of the component placement. Therefore, steps S1 to S6 of this embodiment and the flow chart in FIG. 4 are not intended to limit the scope of the present invention.

In addition, in a further implementation aspect of this embodiment, the way the processing unit 115 generates the corrected placement path in step S6 may, for example, be based on the position difference between the first position and the second position and the The initial placement path generates a test placement path for the robot arm 114 , and then a test program is executed according to the test placement path. Wherein, the manner of the processing unit 115 executing the test program may be, for example, firstly controlling the robot arm 114 to move along the test placement path, and placing the workpiece 5 on the bearing seat 112, and then judging that the workpiece 5 is placed on the test placement path. Whether the distance between a current central position (equivalent to the position of the center of circle of the workpiece 5) and the center position of the bearing seat 112 (equivalent to the position of the center of circle of the bearing seat 112) when the bearing seat 112 is on is less than one or less The offset threshold for this offset distance. If the judgment result of the processing unit 115 is yes, the processing unit 115, for example, uses the test placement path as the correction placement path; on the other hand, if the judgment result of the processing unit 115 is no, the processing unit 115 uses the The current center position of the workpiece 5 updates the second position (that is, the current center position of the workpiece 5 is used as a new second position), and generates another corresponding robot arm according to the first position and the updated second position the test placement path, and execute the test procedure again according to another test placement path until a test placement path that can be used as the correction placement path is generated. By the processing unit 115 executing the test program, the workpiece processing system 1 can further ensure the accuracy of the calibration placement path.

In summary, by implementing the workpiece placement path setting method, the workpiece processing system 1 can calculate the first position corresponding to the bearing seat 112, and the corresponding position of the workpiece 5 when the workpiece 5 is on the bearing base 112. The second position, and correct the initial placement path according to the relative positional relationship between the workpiece 5 and the bearing seat 112 to generate the corrected placement path, and the corrected placement path can enable the mechanical arm 114 to place the The workpiece to be processed is more aligned with the center of the bearing seat 112 , so that the processing of the workpiece to be processed can be avoided from being negatively affected by the position deviation of the workpiece to be processed. It is worth mentioning that it usually takes more than half an hour to adjust the path of the robotic arm 114 to place the workpiece to be processed by manual operation, and it may happen that different users have different calibration standards. In the workpiece placement path setting method, the workpiece processing system 1 can obtain the corrected placement path in about ten minutes, which can save at least 60% of the adjustment time, and there will be no problem of different adjustment standards, so it can indeed Reach the purpose of the present invention.

But what is described above is only an embodiment of the present invention, and should not limit the scope of the present invention. All simple equivalent changes and modifications made according to the patent scope of the present invention and the content of the patent specification are still within the scope of the present invention. Within the scope covered by the patent of the present invention.

S1~S6: steps

Claims (12)

A workpiece processing system is suitable for processing a workpiece, and the workpiece processing system includes: a workpiece processing device, including a bearing seat suitable for carrying the workpiece, a mechanical arm suitable for holding and moving the workpiece, and an electrical connection The processing unit of the mechanical arm; and a distance measuring device, which is detachably arranged on the workpiece processing equipment, corresponds to the position of the bearing seat and is electrically connected to the processing unit; wherein, the processing unit is used to execute a workpiece A method for setting a placement path, and the method for setting a workpiece placement path includes: obtaining a first position of a pair of bearing seats according to a first sensing result generated by the distance measuring device; controlling the mechanical arm according to an initial placement path to The workpiece is placed on the bearing seat; a second position of the workpiece is obtained according to a second sensing result generated by the distance measuring device when the workpiece is placed on the bearing seat, wherein the first the distance between the position and the second position is taken as an offset distance; and adjusting the initial placement path based on at least the difference between the first position and the second position to generate a corrected placement path for the robotic arm, and output the corrected placement path to a storage unit for storage, wherein the corrected placement path is used to control the robotic arm to place one or more workpieces to be processed on the carrier, and make the workpieces to be processed by the robotic arm The center position when placed on the bearing seat The distance between the position and the central position of the bearing seat is smaller than the offset distance. The workpiece processing system as claimed in claim 1, wherein the distance measuring device includes a plurality of distance sensors, and each of the first sensing result and the second sensing result includes a plurality of corresponding equidistance sensing The sensing distance value of the device, and the processing unit calculates the first position corresponding to the bearing base at least according to the sensing distance values of the first sensing result, and at least according to the second sensing result The sensing distance values are calculated to correspond to the second position of the workpiece. The workpiece processing system as described in claim 2, wherein: the bearing seat and the workpiece are each in the shape of a disc, and the equidistance sensors are arranged around the bearing base; the first sensing result includes Each sensing distance value represents the distance between the distance sensor corresponding to the sensing distance value and the side peripheral surface of the bearing seat; the processing unit first at least according to the first sensing result of the A plurality of first circumferential coordinates corresponding to the corresponding sensing distance values are calculated for the sensing distance value, and then the first position is calculated according to the first circumferential coordinates, and the first position is a circle representing the bearing seat The center position of the shaped surface; each sensing distance value included in the second sensing result represents the distance between the distance sensor corresponding to the sensing distance value and the side peripheral surface of the workpiece; and The processing unit first calculates a plurality of second circles respectively corresponding to the sensing distance values at least according to the sensing distance values of the second sensing result The second position is calculated according to the second circumferential coordinates, and the second position represents the center position of the circular surface of the workpiece. The workpiece processing system as claimed in claim 1, wherein the processing unit is further adapted to be electrically connected to an input unit for user operation, and the initial placement path is determined by the processing unit after receiving an input unit from the After entering the initial placement coordinates of the unit, at least based on the initial placement coordinates generated. The workpiece processing system as claimed in claim 1, wherein the processing unit generates the correction placement path by at least generating a test placement path for the robot arm based on the difference between the first position and the second position , and execute a test program according to the test placement path, wherein the test program includes: controlling the mechanical arm to place the workpiece on the bearing seat with the test placement path, and judging the time when the workpiece is placed on the bearing seat Whether the distance between the current center position and the center position of the bearing seat is less than an offset threshold value smaller than the offset distance, if the judgment result is yes, the test placement path is used as the correction placement path, if the judgment result If no, update the second position with the current center position, and at least generate another test placement path corresponding to the robot arm according to the updated second position, and execute the test procedure again according to the other test placement path. A distance measuring device, which is suitable for being installed in a workpiece processing equipment, and the workpiece processing equipment includes a disc-shaped bearing seat for carrying a workpiece, and a ring-shaped bearing seat spaced apart from the bearing seat to surround the bearing The surrounding wall of the seat, and a mechanical arm located on one side of the bearing seat and used to place the workpiece on the bearing seat; the distance measuring device includes: a body, adapted to be detachably arranged on the surrounding wall of the workpiece processing equipment, and located on the other side of the bearing seat opposite to the robot arm; and a plurality of distance sensors arranged on the The main body is arranged in a fan shape around the bearing seat and faces the bearing seat respectively, so that each distance sensor can measure the distance between itself and the bearing seat when no workpiece is placed on the bearing seat, and at the bearing seat When the workpiece is placed on the bearing seat, the distance between itself and the workpiece is measured. The distance measuring device as claimed in claim 6, wherein the number of the equidistance sensors is at least three. A workpiece placement path setting method is implemented on a workpiece by a workpiece processing system, wherein the workpiece processing system includes a workpiece processing device and a distance measuring device, and the workpiece processing device includes a bearing seat for carrying the workpiece, a A robotic arm for holding and moving the workpiece, and a processing unit electrically connected to the distance measuring device and the robotic arm, the distance measuring device is detachably arranged on the workpiece processing equipment and corresponds to the position of the bearing seat The workpiece placement path setting method includes: the processing unit obtains a first position of the bearing seat according to a first sensing result generated by the distance measuring device, and controls the robot arm to place the workpiece according to an initial placement path placed on the bearing seat, and obtain a second position of the workpiece according to a second sensing result generated by the distance measuring device when the workpiece is placed on the bearing seat, wherein the first position the distance from the second position is taken as an offset distance; and The processing unit at least adjusts the initial placement path according to the difference between the first position and the second position to generate a corrected placement path of the robot arm, and outputs the corrected placement path to a storage unit for storage, wherein, The correction placement path is used to control the robot arm to place one or more workpieces to be processed on the bearing seat, and make the center position of the workpiece to be processed on the bearing seat when the robot arm is placed on the bearing seat and the center of the bearing seat The distance between locations is less than the offset distance. The workpiece placement path setting method according to claim 8, wherein the distance measuring device includes a plurality of distance sensors, and each of the first sensing result and the second sensing result includes a plurality of The sensing distance value of the sensor, and the processing unit calculates the first position corresponding to the bearing seat at least according to the sensing distance values of the first sensing result, and at least according to the second sensing The resulting sensing distance values are calculated to correspond to the second position of the workpiece. The method for setting the workpiece placement path as described in claim 9, wherein: the bearing seat and the workpiece are each in the shape of a disc, and the equidistance sensors are arranged around the bearing base; the first sensing result is Each sensing distance value included represents the distance between the distance sensor corresponding to the sensing distance value and the side peripheral surface of the bearing seat; the processing unit firstly at least according to the first sensing result Based on the sensing distance values, a plurality of first circumferential coordinates respectively corresponding to the sensing distance values are calculated, and then the first position is calculated according to the first circumferential coordinates, and the first position represents the bearing seat The center position of the circular surface; Each sensing distance value included in the second sensing result represents the distance between the distance sensor corresponding to the sensing distance value and the side peripheral surface of the workpiece; and the processing unit firstly at least Calculate a plurality of second circumferential coordinates respectively corresponding to the sensing distance values according to the sensing distance values of the second sensing result, and then calculate the second position according to the second circumferential coordinates, and the first The second position represents the center position of the circular surface of the workpiece. The method for setting a workpiece placement path according to claim 8, wherein the processing unit is further adapted to be electrically connected to an input unit for user operation, and the initial placement path is determined by the processing unit after receiving a After initial placement coordinates from the input cell, generated based on at least the initial placement coordinates. The workpiece placement path setting method according to claim 8, wherein the method of generating the corrected placement path by the processing unit is to generate a test of the robot arm at least according to the difference between the first position and the second position Place a path, and execute a test program according to the test placement path, wherein the test program includes: controlling the mechanical arm to place the workpiece on the bearing seat with the test placement path, and judging that the workpiece is placed on the bearing seat Whether the distance between a current center position at the time and the center position of the bearing seat is less than an offset threshold value smaller than the offset distance, if the judgment result is yes, the test placement path is used as the correction placement path, if If the judgment result is negative, update the second position with the current central position, and generate another test placement path corresponding to the robot arm at least according to the updated second position, and execute the test procedure again according to the other test placement path sequence.

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