TWI775206B - Gas tightness detection equipment and gas tightness detection method - Google Patents

Abstract

Gas tightness detection equipment and a gas tightness detection method are provided. The gas tightness detection equipment includes a supporter, a pressurizing system and a detection system. In the tightness detection method, at first, a crystal oscillator under test is transmitted to a chamber of the pressurizing system, and a gas-tight state of the chamber is maintained. Thereafter, the pressurizing system is used to perform a first pressurizing stage, a second pressurizing stage and a recycling stage. The first pressurizing stage is performed to provide pressurizing gas to the chamber to increase the atmospheric pressure of the chamber to a first atmospheric pressure. The second pressurizing stage is performed to provide the pressurizing gas to the chamber to increase the atmospheric pressure of the chamber to a second atmospheric pressure. The recycling stage is performed to recycle the pressurizing gas from the chamber. In the second pressurizing stage, a resistance value of the crystal oscillator under test is detected, and the gas tightness of the crystal oscillator under test is determined in accordance with the resistance value.

Description

Air tightness testing equipment and air tightness testing method

The present invention relates to an airtight detection device and an airtight detection method, and in particular to an airtight detection device and an airtight detection method of a quartz resonator.

With the advancement of technology, various digital electronic products, such as digital televisions, digital cameras, and digital watches, have gradually replaced traditional analog electronic products. In digital electronic products, logic circuits and sequential circuits are important key components. Generally speaking, most sequential circuits use quartz resonators to provide the clock pulses required by logic circuits. In the manufacturing process of the quartz resonator, the packaging of the quartz resonator is one of the indicators affecting the reliability of the quartz resonator. In order to detect whether the air tightness of the quartz resonator is normal, the air tightness of the quartz resonator is usually tested by a liquid pressurizing method. However, the detection accuracy of the liquid pressurization method is not high, and the quartz resonator is easily damaged during the detection process. Therefore, a new airtightness detection device and an airtightness detection method are required to improve the shortcomings of the prior art.

One aspect of the present invention provides an airtight detection device, which can improve the airtightness detection accuracy of a quartz resonator and reduce the probability of a defective quartz resonator flowing out to a client. The airtight testing equipment includes a carrier plate, a pressurizing system and a testing system. The carrying plate is used for carrying at least one quartz resonator to be tested. The pressurized system contains the chamber, the recovery air reservoir, and the main air reservoir. The chamber is used for accommodating the carrier plate, wherein the chamber has a chamber inlet. After the carrier plate enters the chamber through the chamber inlet, the chamber inlet is closed to keep the chamber airtight. The recovery gas storage cylinder is used for supplying pressurized gas to the chamber to pressurize the chamber to the first gas pressure value in the first pressurizing stage, and for recovering the pressurized gas from the chamber in the recovery stage. The main gas storage cylinder is used for supplying pressurized gas to the chamber in the second pressurizing stage, so as to pressurize the chamber to the second gas pressure value, wherein the second pressurizing stage is successive to the first pressurizing stage, and the recovery stage is Following the second pressurizing stage, the second air pressure value is greater than the first air pressure value. The detection system is used to detect the resistance value of the quartz resonator to be tested in the second pressurizing stage, and to perform an airtight detection step according to the resistance value, so as to judge whether the airtightness of the quartz resonator to be tested is normal.

In some embodiments, the pressurizing system further includes a first valve, a second valve and at least one third valve. The first valve is arranged between the chamber and the main air storage cylinder to control the main air storage cylinder to supply pressurized gas to the chamber. The second valve is disposed between the chamber and the recovery gas storage cylinder, to control the recovery gas storage cylinder to supply pressurized gas to the chamber, or to control the recovery gas storage cylinder to recover the pressurized gas from the chamber. The third valve is arranged between the chamber and the exhaust duct to control the chamber to discharge pressurized gas through the exhaust duct for pressure relief.

In some embodiments, in the aforementioned airtight detection step, the difference between the resistance value of the quartz resonator to be tested and the standard resistance value is first calculated. Then, determine whether the difference is within the standard deviation range. When the difference is within the standard deviation range, it is determined that the air tightness of the quartz resonator to be tested is normal.

In some embodiments, the detection system further performs the characteristic detection step. In this characteristic detection step, the frequency deviation, impedance value and static capacitance value of the quartz resonator to be tested are obtained first. Then, it is judged whether the frequency deviation is within the standard deviation range, and a first judgment result is provided. Next, it is determined whether the impedance value is within the standard impedance value range, and a second determination result is provided. It is judged whether the static capacitance value is within the standard static capacitance value range, and a third judgment result is provided. When one of the first judgment result, the second judgment result and the third judgment result is no, it is determined that the quartz resonator to be tested is the re-measured product, and after the carrier plate leaves the chamber, the re-measured product is taken out for re-testing again. Perform the air tightness test procedure on this retest.

In some embodiments, the aforementioned second air pressure value is 4.7 kg/cm 2 to 5.0 kg/cm 2 .

One aspect of the present invention provides an airtight detection method, which can improve the airtightness detection accuracy of a quartz resonator, and reduce the probability of a defective quartz resonator flowing out to a client. In this airtight detection method, the quartz resonator to be tested is first sent into the chamber of the pressurized system. Next, the chamber is closed to maintain the airtight state of the chamber. The chamber is then subjected to a pressurizing step using a pressurizing system. In the pressurizing step, the first pressurizing stage is firstly performed to use the recovery gas storage tank to supply pressurized gas to the chamber, and during pressurization, the valve between the chamber and the recovery gas storage tank is opened, so that the compressed air is compressed in the recovery gas storage tank. The air in the barrel is released into the chamber, and after the chamber and the pressure in the recovery air storage barrel are balanced, the valve is closed to reach the first air pressure value. Next, a second pressurizing stage is performed to supply pressurized gas to the chamber using the main gas storage tank, and during pressurization, the valve between the chamber and the main gas storage tank is opened to release the air compressed in the main gas storage tank To the chamber, after the chamber and the pressure in the main gas storage tank are balanced, the valve is closed to reach the second air pressure value. The second pressurizing stage is consecutive to the first pressurizing stage, and the second air pressure value is greater than the first air pressure value. Then, in the recovery stage, the compressed gas in the chamber is stored in the recovery gas storage tank. When the chamber is deflated, the valve between the chamber and the recovery gas storage tank is opened to release the compressed gas in the chamber to the recovery gas storage tank. , After balancing the pressure, close the valve to complete the recovery of the gas, and the recovered gas is used to supply the first pressurizing stage in the next detection. Wherein, in the second pressurizing stage, the resistance value of the quartz resonator to be tested is detected, and the air tightness detection step is performed according to the resistance value, so as to judge whether the air tightness of the quartz resonator to be tested is normal. Among them, the compressed gas is recovered to the recovery gas storage tank when the chamber is deflated, which can save the process cost.

In some embodiments, in the aforementioned airtight detection step, the difference between the resistance value of the quartz resonator to be tested and the standard resistance value is first calculated. Then, determine whether the difference is within the standard deviation range. When the difference is within the standard deviation range, it is determined that the air tightness of the quartz resonator to be tested is normal.

In some embodiments, the aforementioned air tightness detection method further includes a characteristic detection step in the second pressurizing stage. In this characteristic detection step, the frequency deviation, impedance value and static capacitance value of the quartz resonator to be tested are obtained first. Then, it is judged whether the frequency deviation is within the standard deviation range, and a first judgment result is provided. Next, it is determined whether the impedance value is within the standard impedance value range, and a second determination result is provided. Then, it is determined whether the static capacitance value is within the standard static capacitance value range, and a third determination result is provided. When one of the first judgment result, the second judgment result and the third judgment result is no, it is determined that the quartz resonator to be tested is the re-measured product, and after the carrier plate leaves the chamber, the re-measured product is taken out for re-testing again. Perform the air tightness test procedure on this retest.

In some embodiments, the aforementioned second air pressure value is 4.7 kg/cm 2 to 5.0 kg/cm 2 .

In some embodiments, after the aforementioned second pressurizing stage pressurizes the chamber to the second air pressure value, the second air pressure value is maintained for 3.0 minutes.

The terms "first", "second", .

Please refer to FIG. 1 , which is a functional block diagram of an airtightness detection apparatus 100 according to an embodiment of the present invention. The air tightness detection apparatus 100 includes a carrier plate 110 , a pressurization system 120 and a detection system 130 . The carrier plate 110 is used for carrying at least one quartz resonator OSC to be tested. The pressurization system 120 is used to receive the carrier tray 110 and provide a high pressure environment. The detection system 130 is used to perform the airtightness detection step of the quartz resonator OSC to be tested in the high-voltage environment, so as to determine whether the airtightness of the quartz resonator OSC to be tested is normal.

Please refer to FIG. 2 , FIG. 3 a and FIG. 3 b at the same time. FIG. 2 is a schematic flowchart of an air tightness detection method 200 applicable to the air tightness detection apparatus 100 according to an embodiment of the present invention, and FIGS. 3 a to 3 b are diagrams according to the present invention. The top view of the structure of the air tightness detection apparatus 100 of the embodiment. In the airtight detection method 200 , step 210 is first performed to send the quartz resonator OSC to be tested into the pressurizing system 120 . In an embodiment of the present invention, the quartz resonator OSC to be tested is placed on the carrier plate 110 . The carrier plate 110 has an accommodating space for accommodating the quartz resonator OSC to be tested, such as the slot SL of the carrier plate 163 . After the quartz resonator OSCs to be tested are all placed in the slots of the carrier plate 110, the carrier plate 110 is placed on the platform 140, and then sent into the chamber 121 of the pressurizing system 120 through the rail device 150, as shown in FIG. 3a shown. However, embodiments of the present invention are not limited thereto. In other embodiments of the present invention, the carrier plate 110 can also be placed into the chamber 121 of the pressurizing system 120 by a robot arm. When the carrier plate 110 enters the chamber 121 , the entrance and exit of the chamber 121 are closed, so that the chamber 121 is kept in an airtight state.

Next, step 220 is performed to use the pressurizing system 120 to generate a high pressure environment in the chamber 121 , and use the detection system 130 to airtight each quartz resonator OSC on the carrier plate 110 under the high pressure environment The detection step is to judge whether the air tightness of each quartz resonator OSC to be tested is normal. In one embodiment of the present invention, the detection system 130 includes a detection fixture (not shown) disposed in the chamber 121, and the detection fixture contacts the pins of the quartz resonator OSC to be tested, so as to facilitate the detection system 130 measures the electronic characteristics of the OSC of the quartz resonator to be measured, such as frequency value, impedance value (RR), and static capacitance value in a high-voltage environment. However, embodiments of the present invention are not limited thereto. In other embodiments of the present invention, the electronic properties measured by the detection system 130 can be increased or decreased according to user requirements.

In the embodiment of the present invention, the detection system 130 uses the resistance value of the quartz resonator OSC to be tested to determine whether the air tightness of the quartz resonator OSC to be tested is normal. For example, before the quartz resonator OSC to be tested is detected, the resistance value of the quartz resonator OSC to be tested under normal pressure is recorded as the standard resistance value of the quartz resonator OSC to be tested. In step 220, the difference between the resistance value of the quartz resonator OSC to be tested under the high voltage environment and the standard resistance value is calculated, and it is determined whether the difference value is within a predetermined standard deviation value range. If the difference is within the standard deviation range, it is determined that the airtightness of the OSC of the quartz resonator to be tested is normal. On the contrary, if the difference is outside the standard deviation range, it is determined that the air tightness of the quartz resonator OSC to be tested is abnormal, and it is an abnormal product.

In addition, since step 220 additionally measures the frequency value, impedance value (RR) and static capacitance value of the OSC of the quartz resonator to be tested, the frequency value, impedance value and static capacitance value can be used to determine whether it is necessary to re-detect the quartz to be tested. Resonator OSC. For example, before the quartz resonator OSC to be tested is detected, the frequency value of the quartz resonator OSC to be tested under normal pressure is recorded as the standard frequency value of the quartz resonator OSC to be tested. Then, calculate the frequency deviation between the frequency value of the quartz resonator OSC to be tested under the high pressure environment and the standard frequency value. Next, it is judged whether the frequency deviation is within a preset standard deviation range, and a first judgment result is provided. For another example, it is determined whether the impedance value of the quartz resonator OSC to be tested in a high-voltage environment is within a preset standard impedance value range, and a second determination result is provided. For another example, it is determined whether the static capacitance value of the quartz resonator OSC to be tested under a high voltage environment is within a predetermined standard static capacitance value range, and a third determination result is provided. When one of the aforementioned first determination result, second determination result and third determination result is negative, it is determined that the quartz resonator OSC to be tested is a re-tested product, which needs to be tested again.

After the detection in step 220 is completed, step 230 is followed to select the retested product and the abnormal product, as shown in FIG. 3 b . In the embodiment of the present invention, the air tightness detection apparatus 100 further includes a sorting system 160 , which includes a platform 161 , a robot arm 162 and a carrier plate 163 . The platform 161 is used to receive the carrier tray 110 and move the carrier tray 110 to the working area of the robot arm 162, so that the robot arm 162 can pick out the re-measurement product in the carrier tray 110 and place it in the carrier tray 163, and Anomalies are picked out and placed in container 170 . In the embodiment of the present invention, step 220 records the position of the abnormal product and the re-tested product on the carrier tray 110, so that the robot arm 162 can pick out the abnormal product and the re-tested product.

After all the re-measured items in the carrier tray 110 are picked out and placed on the carrier tray 163 , the carrier tray 163 will be placed on the platform 140 of the airtight testing apparatus 100 to re-test the re-measured items on the carrier tray 163 again. Perform detection (the aforementioned step 220 ), wherein after the re-tested product is still determined to be a re-tested product, the re-tested product will be re-tested again.

Please refer to FIG. 4 , which is a schematic diagram of a simple structure of a pressurizing system 120 according to an embodiment of the present invention. The pressurizing system 120 includes the aforementioned chamber 121 , a main air tank 122 , a recovery air tank 123 , a first valve 124 , a second valve 125 and a third valve 126 . The first valve 124 is disposed between the chamber 121 and the main gas storage cylinder 122 to control the main gas storage cylinder 122 to supply pressurized gas to the chamber 121 . The second valve 125 is disposed between the chamber 121 and the recovery gas storage cylinder 123 to control the recovery gas storage cylinder 123 to supply pressurized gas to the chamber 121 , or control the recovery gas storage cylinder 123 to recover pressurized gas from the chamber 121 . The third valve 126 is disposed between the chamber 121 and the exhaust pipe OU to control the chamber 121 to discharge pressurized gas through the exhaust pipe OU, so as to relieve the pressure of the chamber 121 .

Please refer to FIG. 5 , which is a schematic flowchart of the step 500 of using the pressurizing system 120 to provide a high-pressure environment in the aforementioned step 220 . In this embodiment, step 500 includes a first pressurization stage 510 , a second pressurization stage 520 and a recovery stage 530 . In the first pressurizing stage 510 , the second valve 125 is opened to supply pressurized gas to the chamber 121 from the recovery gas cylinder 123 to pressurize the chamber 121 to the first gas pressure value. In the embodiment of the present invention, the recovery gas storage cylinder 123 recovers the pressurized gas left by the previous pressurizing step, and provides the pressurized gas to the chamber 121 in the first pressurizing stage 510 . In this embodiment, the recovery gas storage cylinder 123 has a gas pressure value of 2 kg/cm2 after recovery, and supplies pressurized gas to the chamber 121 accordingly. In the second pressurizing stage 520 , the second valve 125 is closed and the first valve 124 is opened to supply pressurized gas to the chamber 121 from the main gas reservoir 122 to pressurize the chamber 121 to the second gas pressure value. In this embodiment, the main air storage cylinder 122 has an air pressure of 5 kg/cm 2 , which can pressurize the chamber 121 to 4.7 kg/cm 2 to 5.0 kg/cm 2 (the second air pressure value), and maintain a pressure of 3.0 minute. After the pressure of the chamber 121 reaches 4.7 kg/cm 2 to 5.0 kg/cm 2 , the aforementioned step 220 will detect the OSC of the quartz resonator to be tested.

After the detection is complete, the recovery stage 530 proceeds. In the recovery stage 530 , the first valve 124 is closed and the second valve 125 is opened to recover the pressurized gas from the chamber 121 using the recovery gas storage tank 123 . In the present embodiment, when the recovery air storage cylinder 123 has an air pressure value of 2 kg/cm 2 , the second valve 125 is closed and the third valve 126 is opened, so as to use the exhaust pipe OU to relieve pressure.

It can be seen from the above description that the airtightness detection apparatus 100 and the airtightness detection method 200 according to the embodiments of the present invention use pressure to detect the airtightness of the quartz resonator to be tested, wherein the airtightness detection apparatus 100 can recover the pressurized gas In order to reduce the cost of detection, the airtightness detection method 200 assists in determining whether the quartz resonator to be tested needs to be re-measured or abnormal by measuring a plurality of electronic characteristics of the quartz resonator to be tested. Therefore, the airtightness detection apparatus and the airtightness detection method of the embodiments of the present invention can improve the detection accuracy of the quartz resonator and reduce the cost required for detection.

Although the present invention has been disclosed above by the embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, The protection scope of the present invention shall be determined by the scope of the appended patent application.

100: Air tightness testing equipment 110: Carrier plate 120: Pressurized system 121: Chamber 122: Main air reservoir 123: Recycle Air Tank 124: The first valve 125: Second valve 126: The third valve 130: Detection System 140: Platform 150: Track Device 160: Selection System 161: Platform 162: Robot Arm 163: Carrier plate 170: Container 200: Air tightness detection method 210~230: Steps 500: Steps 510~530: Steps OSC: Quartz resonator to be tested SL: slotted hole

FIG. 1 is a functional block diagram illustrating an air tightness detection apparatus according to an embodiment of the present invention. FIG. 2 is a schematic flowchart of an airtight detection method to which the airtightness detection apparatus according to an embodiment of the present invention is applicable. 3a and 3b are top views of the structure of the air tightness detection apparatus according to the embodiment of the present invention. FIG. 4 is a schematic diagram illustrating a simple structure of a pressurizing system according to an embodiment of the present invention. FIG. 5 is a schematic flow chart illustrating the steps of using a pressurized system to provide a high pressure environment.

none

200: Air tightness detection method

210~230: Steps

Claims (10)

An air tightness detection device, comprising: a carrier plate for carrying at least one quartz resonator to be tested; a pressurization system, comprising: a chamber for accommodating the carrier plate, wherein the chamber has a chamber an inlet, when the carrier plate enters the chamber from the chamber inlet, the chamber inlet is closed to keep the chamber airtight; a recovery air storage cylinder is used for supplying in a first pressurizing stage pressurizing gas to the chamber for pressurizing the chamber to a first gas pressure value and for recovering pressurized gas from the chamber in a recovery stage; and a main gas reservoir for a second gas pressure In the pressurizing stage, pressurized gas is supplied to the chamber to pressurize the chamber to a second gas pressure value, wherein the second pressurizing stage is subsequent to the first pressurizing stage, and the recovery stage is subsequent to the In the second pressurizing stage, the second air pressure value is greater than the first air pressure value; and a detection system is used for detecting a resistance value of the at least one quartz resonator to be tested in the second pressurizing stage, and according to the The resistance value is used to perform an airtightness detection step to determine whether the airtightness of the at least one quartz resonator to be tested is normal; wherein the first air pressure value is greater than an atmospheric pressure and smaller than the second air pressure value. The air tightness detection equipment as described in item 1 of the scope of the application, wherein the pressurization system further comprises: A first valve is arranged between the chamber and the main gas storage cylinder to control the main gas storage cylinder to supply pressurized gas to the chamber; a second valve is arranged between the chamber and the recovery gas storage cylinder , to control the recovery gas storage cylinder to supply pressurized gas to the chamber, or control the recovery gas storage cylinder to recover pressurized gas from the chamber; and at least one third valve, arranged between the chamber and an exhaust pipe , so as to control the chamber to discharge the pressurized gas through the exhaust pipe for pressure relief. The airtight detection device as described in claim 1, wherein the airtight detection step performed by the detection system comprises: calculating a difference between the resistance value of the at least one quartz resonator to be measured and a standard resistance value and judging whether the difference is within a standard deviation range; when the difference is within the standard deviation range, it is judged that the airtightness of the at least one quartz resonator to be tested is normal. The air-tightness detection device as described in claim 3, wherein the detection system is further used to perform a characteristic detection step, and the characteristic detection step comprises: acquiring a frequency deviation, an impedance of the at least one quartz resonator to be measured value and a static capacitance value: determine whether the frequency deviation is within a standard deviation range, and provide a first judgment result; determine whether the impedance value is within a standard impedance value range, and provide a the second judgment result; and judge whether the static capacitance value is within a standard static capacitance value range, and provide a third judgment result; wherein, when the first judgment result, the second judgment result and the third judgment result are among the When one is no, it is determined that the at least one quartz resonator to be tested is a re-tested product, and after the carrier plate leaves the chamber, the re-tested product is taken out to perform the air tightness detection step on the re-tested product again . The air-tightness detection device as described in item 1 of the patent application scope, wherein the second air pressure value is 4.7 kg/cm 2 to 5.0 kg/cm 2 . An airtight detection method, comprising: sending a quartz resonator to be tested into a chamber of a pressurizing system; sealing the chamber to keep the chamber airtight; using the pressurizing system to The chamber is subjected to a pressurizing step, wherein the pressurizing step includes: performing a first pressurizing stage, to use a recovery gas storage tank to supply pressurized gas to the chamber to pressurize the chamber to a first pressurizing stage air pressure value; performing a second pressurizing stage to pressurize the chamber to a second air pressure value by supplying pressurized gas to the chamber using a main gas storage tank, wherein the second pressurizing stage is followed by In the first pressurizing stage, the second air pressure value is greater than the first air pressure value; and a recovery stage is performed to use the recovery gas storage tank to return from the chamber collecting pressurized gas; and in the second pressurizing stage, detecting a resistance value of the quartz resonator to be tested, and performing an airtight detection step according to the resistance value to determine the airtightness of the quartz resonator to be tested Whether the air pressure is normal; wherein the first air pressure value is greater than an atmospheric pressure and smaller than the second air pressure value. The airtight detection method as described in claim 6, wherein the airtight detection step comprises: calculating a difference between the resistance value of the quartz resonator to be measured and a standard resistance value; and judging whether the difference value is is within a standard deviation value range; wherein, when the difference value is within the standard deviation value range, it is determined that the air tightness of the quartz resonator to be tested is normal. The air-tightness detection method described in item 7 of the scope of the patent application further comprises: in the second pressurizing stage, performing a characteristic detection step, wherein the characteristic detection step comprises: obtaining a frequency of the quartz resonator to be measured Deviation, an impedance value, and a static capacitance value: determine whether the frequency deviation is within a standard deviation range, and provide a first judgment result; determine whether the impedance value is within a standard impedance value range, and provide a the second judgment result; and judge whether the static capacitance value is within a standard static capacitance value range, and provide a third judgment result; wherein, when the first judgment result, the second judgment result and the third judgment result are among the When one is no, it is determined that the quartz resonator to be tested is a re-tested product, and after the carrier plate leaves the chamber, the re-tested product is taken out to perform the airtight detection step on the re-tested product again. The air tightness detection method described in item 6 of the scope of the patent application, wherein the second air pressure value is 4.7 kg/cm 2 to 5.0 kg/cm 2 . The air tightness detection method as described in claim 9, wherein after the second pressurizing stage pressurizes the chamber to the second air pressure value, the second air pressure value is maintained for 3.0 minutes.

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