TWI774483B - Pressure senor - Google Patents

Abstract

This present invention discloses a pressure sensor comprising an acting device, a force-receiving device and a fiber grating, wherein the bottom end of the force-receiving device is connected to the acting device, and the fiber grating is fixed on the acting device. When the force-receiving device receives pressure, the pressure is converted into the force exerted on the acting device to cause the acting device to produce strain. The actual value of the pressure can be obtained by calculating the degree of center wavelength shift caused by the strain of the fiber grating corresponding to the acting member.

Description

pressure sensor

The present invention is a pressure sensor, especially a pressure sensor which can measure pressure by using fiber grating.

The pressure sensor is used to sense the magnitude of the force, such as pressure and weight, and convert the force into the corresponding value. Therefore, the user can use the pressure sensor to measure the weight of the object.

The conventional pressure sensors are mostly electronic sensors. For example, when the piezoelectric sensor is subjected to pressure, it produces electrical changes. According to the degree of electrical changes, the corresponding electrical signal output is generated. According to the electrical signal, it can be converted into the real value of the pressure that the piezoelectric sensor is subjected to. However, the electronic sensor has the problem of metal oxidation, that is, the longer the electronic sensor is used at any time, the metal oxidation will occur, which will affect the accuracy and correctness of the value measured by the sensor, and even worse , it will cause damage to the sensor, so that the measurement function can no longer be provided.

In view of this, if a non-electronic pressure sensor can be found, especially a sensor with simple structure and long service life, it can avoid the measurement accuracy and service life of the sensor caused by metal oxidation. This will become the goal that those skilled in the art are striving for.

In view of the above problems, the present invention proposes a pressure sensor, which includes: an acting member; a force receiving member includes a first leg and a second leg whose bottom ends are respectively connected to two ends of the acting member; and a fiber grating, is fixed on the action piece.

In one embodiment, the force-receiving member further includes force-receiving members respectively connecting the top ends of the first support leg and the second support leg.

In one embodiment, the present invention further includes two upper stubs disposed at the connection between the force-receiving member, the first leg and the second leg.

In one embodiment, the present invention further includes two lower short posts disposed at the connection between the action piece, the first leg and the second leg.

In one embodiment, the first leg and the second leg form an X-shape.

In one embodiment, the fiber grating is fixed on the acting member with two ends.

In one embodiment, the fiber grating is attached to the action member.

In one embodiment, the acting member includes a groove for the fiber grating to be disposed.

In one embodiment, the present invention further includes a closed container for accommodating the acting member, the force-bearing member and the fiber grating and having a closed space, so that the force-bearing member presses against the top surface of the inner side wall of the closed container.

In one embodiment, the airtight container comprises a container body with an opening, a cover provided on the opening, and an elastic body provided between the container body and the upper cover, so that the upper cover, the elastic body and the container body are combined. form the enclosed space.

In one embodiment, the airtight container includes a container body and an upper cover slidably disposed in the container body, so that the upper cover and the container body are combined to form the airtight space.

In one embodiment, the present invention further includes a closed container for accommodating the acting member, the force receiving member and the fiber grating and having a closed space, and the side wall of the closed space is concavely provided for each of the corresponding upper short columns. a plurality of first accommodating grooves

In one embodiment, the present invention further includes a closed container for accommodating the acting member, the force receiving member and the fiber grating and having a closed space, and the side wall of the closed space is concavely provided for each of the corresponding upper short columns. A plurality of first accommodating grooves for accommodating and a plurality of second accommodating grooves for accommodating the corresponding lower short columns

In yet another embodiment, the bottom of at least one of the plurality of second accommodating grooves is provided with an inclined abutting surface.

To sum up, the pressure sensor of the present invention bears the pressure through the force-receiving member, and then converts the pressure into a force applied to the acting member, so that the acting member generates a corresponding strain, and then generates a corresponding strain through the fiber grating. The drift of the center wavelength is calculated, and the actual value corresponding to the pressure is calculated to achieve the purpose of measuring the pressure. In addition, the pressure sensor of the present invention can accommodate the supply element, the force-receiving element and the fiber grating through airtight accommodating, so as to achieve the purpose of measuring air pressure or hydraulic pressure.

1, 3, 6, 7, 7': pressure sensor

11, 61, 71: Action parts

111: Groove

12, 32, 62, 72: Forced parts

121, 121', 621: the first leg

122, 122', 322, 622: Second leg

323, 623, 732: Forced parts

324, 624: The first board

325, 625: The second board

13, 73: Fiber Grating

131, 731: Optical fiber

64: On the short post

65: Lower stub

76, 76', 76", 76''': airtight container

761: upper cover

762: Container body

7621: The first accommodating slot

7622: Second receiving slot

763: Opening

764: Confined Space

765: Perforated

766: Elastomer

767: Upper shell

9: Fasteners

F: pressure

FIG. 1 is a three-dimensional structural view of the first embodiment of the pressure sensor of the present invention.

FIG. 1 ′ is another three-dimensional structural view of the first embodiment of the pressure sensor of the present invention.

FIG. 2 is an exploded view of the three-dimensional structure of the first embodiment of the present invention.

FIG. 3 is a perspective structural view of a second embodiment of the pressure sensor of the present invention.

4 is an exploded perspective view of the second embodiment of the pressure sensor of the present invention.

5A-5C are schematic diagrams of various implementations of the pressure sensor of the present invention.

FIG. 6 is a three-dimensional structural view of the third embodiment of the pressure sensor of the present invention.

FIG. 7 is a perspective structural view of a fourth embodiment of the pressure sensor of the present invention.

8 is a schematic cross-sectional view of the pressure sensor A-A of the present invention.

FIG. 9 is a perspective structural view of a fifth embodiment of the pressure sensor of the present invention.

FIG. 10 is a perspective structural view of a sixth embodiment of the pressure sensor of the present invention.

FIG. 11 is a perspective structural view of a seventh embodiment of the pressure sensor of the present invention.

12 is a schematic cross-sectional view of the pressure sensor B-B of the present invention.

The following describes the technical content of the present invention through specific embodiments, and those skilled in the art can easily understand the advantages and effects of the present invention from the content disclosed in this specification. However, the present invention can be implemented or applied by other different specific embodiments.

FIG. 1 is a three-dimensional structural view of a first embodiment of the pressure sensor of the present invention, and FIG. 2 is an exploded three-dimensional structural view of the first embodiment of the present invention. As shown in the figure, the pressure sensor 1 of the present invention includes an acting member 11, a force receiving member 12 and a fiber grating 13, wherein the bottom of the force receiving member 12 is connected to the two ends of the acting member 11, and the fiber grating 13 is provided with On the acting member 11, when the force receiving member 12 is subjected to a pressure F, the pressure F received is converted into a force applied to the member 11, and then the fiber grating 13 is subjected to relative to the acting member 11 by analyzing the fiber grating 13. The numerical change (such as the central wavelength change) generated after the force is applied to obtain the actual value of the pressure F. A detailed description of the present invention is as follows.

The action piece 11 is used for fixing the fiber grating 13, and it can be a flat, wavy or arc-shaped plate body (the plate-shaped action piece 11 is taken as an example for description below), so that the fiber grating 13 is fixed on the action piece 11 upper side, lower side or side, in addition, the material of the action piece 11 can be metal, plastic or composite type materials (such as carbon fiber or glass fiber, etc.). In one embodiment, the acting member 11 includes a groove 111 for the fiber grating 13 to be disposed. As shown in the figure, in this embodiment, the groove 111 is concavely disposed on the lower side surface of the acting member 11 as an example for description. In one embodiment, the fiber grating 13 can be disposed in the groove 111 in such a way that it does not protrude from the groove 111 , so as to achieve the purpose of protecting the fiber grating 13 .

The force-receiving member 12 includes a first leg 121 and a second leg 122 whose bottom ends are respectively connected to two ends of the acting member 11 , wherein the first legs 121 , 121 ′ and the second legs 122 , 122 ′ can be The plate body is straight (as shown in FIG. 1 ) or arc (as shown in FIG. 1 ′). The angles of θ° are connected to each other, wherein the θ° can be greater than 0° and less than 180° according to requirements, such as 30°, 45° or 60°, that is, the first leg 121 is obliquely connected to the action piece 11 one end. In one embodiment, the first leg 121 and the second leg of the acting member 11 and the force receiving member 12 form a triangle or arc shape.

Furthermore, the material of the force-receiving member 12 can be metal, plastic or composite material, which can be the same material or different material as the acting member 11 . In an embodiment, the force-receiving member 12 has a hardness D, and the acting member 11 has a hardness d, wherein the hardness D of the force-receiving member is greater than or equal to the hardness d of the acting member, so as to avoid the force-receiving member 12 being affected by the hardness d. When the force is applied, deformation is caused or the degree of deformation is greater than that of the acting member 11 , thereby reducing the sensing effect of the pressure sensor of the present invention.

The fiber grating 13 is fixed on the action piece 11 . Specifically, the fiber grating 13 is arranged in the groove 111 of the action piece 11 , and the two ends are fixed by the fixing piece 9 (such as a fixing glue, a clamp or a clamp). structure) is fixed in the groove 111, in addition, the fiber grating 13 can also be attached to the action piece 11 and fixed on the action piece, for example, the fixing glue is attached to the action piece 11 by covering the fiber grating 13 superior. In one embodiment, the fiber grating 13 can be a short period fiber grating (eg fiber Bragg grating), a long period fiber Gratings, periodically graded fiber gratings, superstructured fiber gratings, or other fiber gratings that can change the center wavelength when subjected to stress changes. The following takes short-period fiber gratings as an example to illustrate, that is, the fiber gratings 13 are reflective The incident light with a specific center wavelength in the incident light source forms the optical fiber element of the reflected light, which defines the center wavelength of the fiber grating 13. Therefore, before being fixed on the action member 11, the fiber grating 13 can be pre-pulled to make it The center wavelength is shifted by a certain degree (for example, the center wavelength of the fiber grating 13 is shifted by 10 nm in advance), and then fixed on the action member 11 .

As shown in FIG. 1 , when the pressure sensor 1 of the present invention senses the pressure F, the force receiving member 12 converts the pressure F into the acting force on the acting member 11 through the first leg 121 . The plate body of the acting member 11 will be strained, wherein the strain system of the acting member can be deformed. The acting force causes the acting member 11 to undergo an axial force to produce a telescopic deformation, so that the fiber grating 13 is in a state of tension or relaxation, resulting in a numerical change of the central wavelength, which is performed according to the numerical change of the central wavelength of the fiber grating 13. Analysis, to measure the strain of the action member 11, and obtain the actual value of the pressure F.

Specifically, one end of the fiber grating 13 extends at least one optical fiber 131, and the optical fiber 131 is connected to one end of an optical coupler (not shown in the figure), and the other end of the optical coupler is respectively connected with the light source and the spectrum analyzer (FIG. (not shown), the incident light is emitted through the light source, and after the incident light is incident on the fiber grating 13 through the coupler, the fiber grating 13 reflects the part of the incident light corresponding to the center wavelength of the fiber grating 13 in the incident light to form reflected light, The optical fiber 131 of the fiber grating 13 is returned to the coupler, and the reflected light is coupled to the spectrum analyzer through the coupler, and the center wavelength of the reflected light can be displayed through the spectrum analyzer, so that when the fiber grating 13 is in a tensioned or relaxed state, the reflected light can be transmitted through the optical fiber grating 13. The change of the central wavelength can be calculated to obtain the actual value of the pressure F. For example, for example, a pressure of 1 unit can cause the center wavelength of the fiber grating to shift by 1 nm. Therefore, When the center wavelength shift of 2 nm generated by the fiber grating is measured, it can be inferred that the pressure sensor of the present invention is subjected to a pressure of 2 units

FIG. 3 is a three-dimensional structural view of the second embodiment of the pressure sensor of the present invention, and FIG. 4 is an exploded three-dimensional structural view of the second embodiment of the pressure sensor of the present invention. In this embodiment, the pressure sensor 3 of the present invention further includes a force receiving member 323 . Details are as follows.

The force-receiving member 323 is used to receive the pressure F, and is connected to the top of the first leg 321 and the top of the second leg 322. In one embodiment, the force-receiving member 323 is directed to the first leg 321 and the second leg respectively. The two legs 322 extend from the first plate body 324 and the second plate body 325 . The force-receiving member 323 is connected to the top of the first leg 321 and the second leg 322 through the first plate body 324 and the second plate body 325 , respectively. Top connection. Therefore, in the present invention, the area bearing the pressure F is reduced by the force bearing member 323, so as to achieve the effect of concentrated force bearing, and also achieve the purpose of measuring the pressure at a specific position. Therefore, when the pressure sensor 3 of the present invention is pressed by the pressure F, the pressure F presses against the force-receiving member 323, thereby causing the acting member 31 to be strained, and then sensed through the fiber grating 33, so as to obtain the value of the pressure F. actual value.

5A-5C are schematic diagrams of various implementations of the pressure sensor of the present invention. As shown in the figure, the acting member and the force-receiving member of the present invention can be integrally formed, and can be formed as a trapezoid (as shown in FIG. 3 ), an inverted trapezoid (as shown in FIG. 5A ) or an arc (as shown in FIG. 5B) geometry. In addition, as shown in FIG. 5C , the first leg and the second leg of the present invention can be staggered to form an X-shaped structure. In one embodiment, the staggered first leg and the second leg are They are arranged adjacent to each other and not connected to each other at the staggered position, so that the lateral viewing angle is the X-shaped structure shown in FIG. 5C .

FIG. 6 is a three-dimensional structural view of the third embodiment of the pressure sensor of the present invention. As shown in the figure, this embodiment is substantially the same as the previous embodiment, and the difference is that in this embodiment, the pressure sensor 6 of the present invention further includes a plurality of upper short bars 64 and/or a plurality of lower short bars 65. Among them, multiple upper short columns are divided into 64 series It is respectively arranged at the connection between the first plate body 624 of the force-receiving member 623 and the first support leg 621 and the second plate body 625 and the second support leg 622 . In addition, a plurality of lower short columns 65 are respectively disposed at the connection between one end of the acting member 61 and the bottom end of the first leg 621 and the other end of the acting member 21 and the bottom end of the second leg 622 .

FIG. 7 is a three-dimensional structural view of a fourth embodiment of the pressure sensor of the present invention, and FIG. 8 is a schematic cross-sectional view of the pressure sensor of the present invention at A-A. As shown in the figure, this embodiment is substantially the same as the previous embodiment, and the difference lies in that in this embodiment, the pressure sensor 7 of the present invention further includes an acting member 71, a force receiving member 72 and an optical fiber. The airtight container 76 of the grating 73 makes the force receiving member 72 push against the top surface of the inner side wall of the airtight container 76 . Specifically, the airtight container 76 includes an upper cover 761 and a container body 762 having an opening 763. The upper cover 761 has a force-bearing surface for bearing the pressure F. Specifically, the upper cover 761 of the airtight container 76 is made of elastic material A film body or an elastic body, and the force-receiving part 723 of the force-receiving member 72 is in contact with the inner side of the upper cover 761, and the container body 762 can be a rigid structure such as metal, plastic or composite material. The upper cover 761 of the container 76 covers and seals the opening 763 of the container body 762 , so that the interior of the airtight container 76 forms a sealed airtight space 764 . In one embodiment, the side edge of the airtight container 76 can be opened with a through hole 765 for the optical fiber 731 of the fiber grating 73 to pass through. After the optical fiber 731 is passed through the airtight container 76 , the through hole 765 can be sealed by the sealing glue. , to maintain the sealed space 764 in a sealed state. In another embodiment, the side of the sealed container 76 can be longitudinally opened from the opening 763 for the optical fiber 731 of the fiber grating 73 to pass through. 731 penetrates out of the airtight container 76, so that the slot hole is sealed with the airtight glue, so that the airtight space 764 is maintained in a sealed state.

In one embodiment, the sidewall of the closed space 764 is concavely provided with a plurality of first accommodating grooves 7621 for accommodating the corresponding upper short posts 74 , so that each upper short post 74 can be freely corresponding to the corresponding upper short posts 74 . Sliding in the first accommodating groove 7621, wherein the first accommodating groove 7621 extends longitudinally downward from the opening of the container body 762, and its transverse width is equal to or greater than the diameter of the upper short column 74 (as the upper short column is When cylindrical, the diameter and length are straight diameter), so that when the pressure sensor 7 of the present invention is under pressure, it can be guided and slid in the first accommodating groove 7621 through the upper short post 74, so as to transmit the pressure directly to the action piece 71, It is ensured that the relative relationship between the pressure and the shift amount of the center wavelength of the fiber grating 73 is linear.

In another embodiment, a plurality of second accommodating grooves 7622 are recessed on the side wall of the closed space 764 for accommodating the corresponding lower short posts 75 , and each of the lower short posts 75 is accommodated in the When the corresponding second accommodating groove 7622 is used, there is a gap between the action piece 71 and the bottom surface of the airtight container 762 (as shown in FIG. 8 ), that is, the action piece is not in contact with the bottom surface of the airtight container, so as to prevent the action piece 71 from contacting the bottom surface of the airtight container. The frictional force generated between the bottom surfaces of the airtight container 762 reduces the sensitivity of the pressure sensor 7 of the present invention, and the second accommodating groove 7622 extends longitudinally downward from the opening 763 of the container body 762, and its lateral width is The diameter is greater than the length of the lower stub 75 (when the stub 75 is cylindrical, the diameter is the length of the diameter), so that the lower stub 75 can move laterally at the bottom of the second accommodating groove 7622 to provide a lateral movement of the action piece 71. force. In one embodiment, the first accommodating groove 7621 and the second accommodating groove 7622 are disposed in parallel. In addition, the bottom of at least one of the plurality of second accommodating grooves 7622 is provided with an inclined abutting surface (not shown in the figure), so that each of the lower short posts 75 is accommodated in the manner of pressing against the corresponding inclined abutting surface. In the second accommodating groove 7622 , when the pressure sensor 7 of the present invention is pressed down against the lower stub 75 under pressure, the lower stub 75 moves on the inclined abutting surface, so as to provide the axis of the action member 71 force towards it. In addition, when the inclined contact surface is arranged in the second accommodating groove 7622 of the airtight container 76, the contact between the first leg and the acting member and the second leg and the acting member of the force-receiving member of the pressure sensor of the present invention The angle is 90°, and a rectangular structure can also be formed between the force-bearing member and the acting member. Accordingly, when the force-bearing member is under pressure, the axis of the acting member 71 can be provided through the lower short post 75 through the inclined abutting surface. The force in the direction (or lateral direction) can also achieve the purpose of measuring the pressure.

In practical applications, the air pressure in the airtight space 764 can be increased or decreased according to the requirements, such as greater than atmospheric pressure or less than atmospheric pressure, so that the upper cover 761 is not affected by the pressure inside and outside the airtight container 76 in an unstressed state. In the same way, the upper cover 761 pre-presses the force-receiving member 71, so as to make the optical fiber The purpose of pre-shifting the central wavelength of the grating makes the pressure sensor of the present invention applicable to measure negative pressure (for example, the air pressure outside the airtight container 76 is lower than the air pressure inside), and accordingly, in the airtight airtight container When the 76 is under pressure, the pressure is applied to the force-receiving member 723 through the upper cover 76, so that the fiber grating 73 can produce a corresponding numerical change. Therefore, the pressure sensor 7 of the present invention forms a sealed closed space 764 by the closed container 76, It can be used to measure air pressure or hydraulic pressure, that is, when the pressure sensor 7 of the present invention is placed in a liquid or gas environment, due to the hydraulic pressure or air pressure, pressure will be generated between the closed space 764 and the hydraulic pressure or air pressure. The pressure is applied to the force-receiving member 723 through the upper cover 761, and then the force-receiving member 72 causes the acting member 71 to produce strain, and the hydraulic pressure or air pressure outside the airtight container 76 can be known according to the change of the center wavelength of the fiber grating 73. , accordingly, the pressure sensor 7 of the present invention can be used as a pneumatic pressure sensor or a hydraulic pressure sensor.

FIG. 9 is a perspective structural view of a fifth embodiment of the pressure sensor of the present invention. As shown in the figure, this embodiment is substantially the same as the previous embodiment, the difference is that in this embodiment, the pressure sensor 7 ′ of the present invention further includes an elastic body 766 disposed between the upper cover 761 and the container body 762 , that is, the airtight container 76' of the present invention includes an upper cover 761, a container body 762 and an elastic body 766. Specifically, the upper cover 761 and the container body 762 in this embodiment are made of metal, plastic or composite materials. Therefore, when the pressure sensor 7' of the present invention is placed in a liquid or gas environment, a pressure difference is generated between the hydraulic pressure or the air pressure and the closed space, so that the upper cover 761 and the container body 762 press the elastic body 766 , so that the upper cover 761 is pressed against the force-receiving member 723 to perform pressure sensing.

FIG. 10 is a perspective structural view of a sixth embodiment of the pressure sensor of the present invention. As shown in the figure, this embodiment is substantially the same as the previous embodiment, the difference is that the airtight container 76 ″ of this embodiment includes an upper shell 767 with a first space, a container body 762 with a second space, and a container body 762 with a second space. The elastic body 766 between the upper casing 767 and the container main body 762, the upper casing 767 and the container main body 762 are arranged correspondingly, and the elastic body 766 is formed between the upper casing 767 and the container main body 762, so as to make the first space with the second space into a confined space. When the acting member 71, the force-bearing member 72 and the fiber grating are accommodated in the airtight container 76", the force-bearing member 723 is brought into contact with and pushes against the top of the first space, so that the upper casing 767 is connected to the top of the first space when subjected to air pressure or hydraulic pressure. The container body 762 compresses or stretches the elastic body 766, and then exerts a force on the force-receiving member 723 for pressure sensing, so as to achieve the purpose of measuring the pressure.

11 is a perspective structural view of a seventh embodiment of the pressure sensor of the present invention, and FIG. 12 is a schematic cross-sectional view of the pressure sensor of the present invention at B-B. This embodiment is substantially the same as the fourth embodiment, except that the airtight container 76''' includes a container body 762 and an upper cover 761' slidably disposed in the container body, so that the upper cover 761' and The container body 762 is combined to form the closed space, so that when the external pressure (eg, air pressure) changes, when the internal and external pressures of the airtight container 76''' are different, for example, the external air pressure of the airtight container 76''' is greater than the internal air pressure, the upper cover 761' is at this time. It will be pushed by the force to slide in the container body 762, and then press against the force-receiving member 723 for pressure sensing, so as to achieve the purpose of measuring the pressure.

To sum up, in the present invention, when the force-receiving member is under pressure, the pressure can be converted into a force applied to the acting member, so that the acting member can be strained in response to the acting force, so that the degree of strain can be measured through the fiber grating. The actual value of the pressure can be obtained by calculation. In addition, the present invention can also measure the external pressure such as air pressure or hydraulic pressure by setting up a closed container for accommodating the acting member, the force receiving member and the fiber grating, so as to measure the pressure. In addition, the present invention provides a better setting structure by disposing a plurality of upper stubs and a plurality of lower stubs in the corresponding first accommodating groove and the second accommodating groove, so as to achieve the The internal structure of the pressure sensor is more stable, which can prevent the measurement results from being affected.

The above-mentioned embodiments are only used to illustrate the principle and effect of the present invention, but are not intended to limit the present invention. Any person skilled in the art can modify and change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be as listed in the patent application scope described later.

1: Pressure sensor

11: Action piece

111: Groove

12: Forced parts

121: The first leg

122: Second leg

13: Fiber Bragg Grating

131: Optical fiber

9: Fasteners

F: pressure

Claims (12)

A pressure sensor, comprising: an acting part; a force receiving part, comprising a first leg and a second leg whose bottom ends are respectively connected to two ends of the acting part, and a first leg and a second leg connected to the first leg and the second leg The force-receiving part at the top of the foot; the fiber grating, which is fixed on the acting part; and two upper short posts, which are arranged at the connection between the force-receiving part, the first support leg and the second support leg. The pressure sensor as claimed in claim 1 further comprises two lower stubs disposed at the connection between the action element, the first support leg and the second support leg. The pressure sensor of claim 1, wherein the first leg and the second leg form an X-shape. The pressure sensor according to claim 1, wherein the fiber grating is fixed on the acting member with two ends. The pressure sensor according to claim 1, wherein the fiber grating is attached to the acting member. The pressure sensor according to claim 1, wherein the acting member comprises a groove for the fiber grating to be arranged. The pressure sensor according to claim 1, further comprising a closed container for accommodating the acting member, the force-bearing member and the fiber grating and having a closed space, so that the force-bearing member pushes the inside of the closed container Side wall top surface. The pressure sensor according to claim 6, wherein the airtight container comprises a container body with an opening, an upper cover provided on the opening, and an elastic body provided between the container body and the upper cover, so that the upper cover, the elastic body The body is combined with the container body to form the closed space. According to the pressure sensor of claim 6, the airtight container comprises a container body and an upper cover slidably provided in the container body, so that the upper cover and the container body are combined to form the airtight space. The pressure sensor according to claim 1, further comprising a closed container for accommodating the acting member, the force receiving member and the fiber grating and having a closed space, the side wall of the closed space is concavely provided for the corresponding The upper short column accommodates a plurality of first accommodating grooves. The pressure sensor according to claim 2, further comprising a closed container for accommodating the acting member, the force receiving member and the fiber grating and having a closed space, and the side wall of the closed space is concavely provided for the corresponding A plurality of first accommodating grooves accommodated by the upper short column and a plurality of second accommodating grooves for accommodating the corresponding lower short columns. The pressure sensor of claim 11, wherein a bottom of at least one of the plurality of second accommodating grooves is provided with an inclined abutting surface.

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