TWI774061B - Laser processing device - Google Patents

Laser processing device Download PDF

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TWI774061B
TWI774061B TW109131596A TW109131596A TWI774061B TW I774061 B TWI774061 B TW I774061B TW 109131596 A TW109131596 A TW 109131596A TW 109131596 A TW109131596 A TW 109131596A TW I774061 B TWI774061 B TW I774061B
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Taiwan
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laser
processing device
laser processing
module
optical lens
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TW109131596A
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Chinese (zh)
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TW202212037A (en
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陳鴻文
丁仁峰
邱時雍
吳澍涵
張耿寧
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台達電子工業股份有限公司
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Abstract

A laser processing device for processing a workpiece is provided. The laser processing device includes a laser emitter, a lens module, a driving module, a camera module, and a processing unit. The camera module can capture an image of the work piece, and the processing unit is electrically connected to the camera module and the driving module. The camera module transmits an image signal to the processing unit according to the image, and the processing unit transmits a driving signal to the driving module according to the image signal, thus driving an optical lens of the lens module to move.

Description

雷射加工裝置Laser processing equipment

本發明是有關於一種雷射加工裝置,特別是有關於一種可調整雷射光斑大小的雷射加工裝置。The present invention relates to a laser processing device, in particular to a laser processing device that can adjust the size of the laser spot.

一般雷射焊錫裝置在進行雷射加工時,可利用光學透鏡組合,將光束的能量匯聚在特定範圍之內以進行焊盤加工。然而,在雷射焊錫加工程序中,往往需要對不同大小的焊盤進行加工,若雷射光斑過小將無法均勻地加熱焊盤,然而當雷射光斑過大時則可能會燒毀印刷電路基板。Generally, when laser soldering equipment is used for laser processing, an optical lens combination can be used to focus the energy of the light beam within a specific range to process the pads. However, in the laser soldering process, it is often necessary to process pads of different sizes. If the laser spot is too small, the pads cannot be heated uniformly. However, if the laser spot is too large, the printed circuit substrate may be burned.

第1圖表示一習知雷射加工裝置10對一基板B(例如印刷電路基板)上之焊盤S進行加工的示意圖。如第1圖所示,在一習知雷射加工裝置10內部通常設有一或數個光學透鏡11,且位在雷射加工裝置10內部之一雷射光源可發出雷射光E,且該雷射光E會穿過前述光學透鏡11後投射在一基板B的焊盤S上(如雷射光E’所示)。FIG. 1 shows a schematic diagram of a conventional laser processing apparatus 10 processing pads S on a substrate B (eg, a printed circuit board). As shown in FIG. 1, a conventional laser processing device 10 is usually provided with one or more optical lenses 11, and a laser light source located inside the laser processing device 10 can emit laser light E, and the laser The emitted light E will pass through the aforementioned optical lens 11 and then be projected on the pad S of a substrate B (as shown by the laser light E').

從第1圖中可以看出,基板B上的焊盤S具有一直徑Ld,而從雷射加工裝置10所發出的雷射光E’則可在基板B上形成與焊盤S大小相對應之光斑。然而,由於習知雷射加工裝置10內部的光學透鏡11無法任意移動,故習知若需調整光斑大小時,必須移動整個雷射加工裝置10到一特定位置,惟如此往往會造成使用上的不便,同時亦會降低生產效率。As can be seen from FIG. 1, the pad S on the substrate B has a diameter Ld, and the laser light E' emitted from the laser processing device 10 can form a diameter corresponding to the size of the pad S on the substrate B spot. However, since the optical lens 11 inside the conventional laser processing device 10 cannot be moved arbitrarily, the conventional laser processing device 10 must be moved to a specific position when the spot size needs to be adjusted, which often results in the use of Inconvenient, but also reduce production efficiency.

有鑒於此,如何提供一種高效率且更具使用彈性的雷射加工裝置始成為一重要之挑戰。In view of this, how to provide a high-efficiency and more flexible laser processing device has become an important challenge.

有鑑於前述習知問題點,本發明之一實施例提供一種雷射加工裝置,用以對一工件進行加工。雷射加工裝置包括一雷射光源、一透鏡模組、一驅動模組、一攝像模組以及一處理單元。透鏡模組具有一第一光學透鏡以及一第二光學透鏡。雷射光源發出一雷射光經過第一、第二光學透鏡並投射於工件上。驅動模組用以驅使第一光學透鏡相對於第二光學透鏡移動。攝像模組用以擷取工件之一影像,處理單元電性連接攝像模組以及驅動模組,攝像模組根據工件之影像傳送一影像資料至處理單元,且處理單元根據影像資料傳送一驅動訊號至驅動模組,以驅使第一光學透鏡相對於第二光學透鏡移動。In view of the aforementioned conventional problems, an embodiment of the present invention provides a laser processing apparatus for processing a workpiece. The laser processing device includes a laser light source, a lens module, a driving module, a camera module and a processing unit. The lens module has a first optical lens and a second optical lens. The laser light source emits a laser beam that passes through the first and second optical lenses and is projected on the workpiece. The driving module is used for driving the first optical lens to move relative to the second optical lens. The camera module is used for capturing an image of the workpiece, the processing unit is electrically connected to the camera module and the driving module, the camera module transmits an image data to the processing unit according to the image of the workpiece, and the processing unit transmits a driving signal according to the image data to the driving module to drive the first optical lens to move relative to the second optical lens.

於一實施例中,雷射加工裝置更包括一功率量測模組,用以量測雷射光之功率強度。In one embodiment, the laser processing apparatus further includes a power measurement module for measuring the power intensity of the laser light.

於一實施例中,雷射加工裝置更包括一分光鏡,從雷射光源所發出之雷射光的一部份經由分光鏡反射後到達工件,且雷射光的另一部份穿過分光鏡而到達功率量測模組。In one embodiment, the laser processing device further includes a beam splitter, a part of the laser light emitted from the laser light source is reflected by the beam splitter and then reaches the workpiece, and the other part of the laser light passes through the beam splitter to reach the workpiece. Reach the power measurement module.

於一實施例中,雷射加工裝置更包括一反射鏡,從雷射光源所發出之雷射光經由反射鏡反射後穿過透鏡模組而到達分光鏡。In one embodiment, the laser processing device further includes a reflector, and the laser light emitted from the laser light source is reflected by the reflector and then passes through the lens module to reach the beam splitter.

於一實施例中,驅動模組包括一馬達、一載台以及一滾珠螺桿,第一光學透鏡設置於載台上,且滾珠螺桿連接馬達以及載台,其中當馬達驅使滾珠螺桿旋轉時,載台相對於滾珠螺桿沿第一光學透鏡之一光軸方向運動。In one embodiment, the driving module includes a motor, a stage and a ball screw, the first optical lens is disposed on the stage, and the ball screw is connected to the motor and the stage, wherein when the motor drives the ball screw to rotate, the load The stage moves relative to the ball screw in the direction of an optical axis of the first optical lens.

於一實施例中,雷射加工裝置更包括一分光鏡,且從雷射光源所發出之雷射光的一部份經由分光鏡反射後到達工件。In one embodiment, the laser processing apparatus further includes a beam splitter, and a part of the laser light emitted from the laser light source is reflected by the beam splitter and reaches the workpiece.

於一實施例中,一外界光線經由工件反射後穿過分光鏡而到達攝像模組。In one embodiment, an external light is reflected by the workpiece and then passes through the beam splitter to reach the camera module.

於一實施例中,雷射加工裝置更包括兩個反射鏡,且經由工件反射後之外界光線穿過分光鏡,並依序經由些反射鏡反射後到達攝像模組。In one embodiment, the laser processing device further includes two mirrors, and the external light after being reflected by the workpiece passes through the beam splitter, and is reflected by the mirrors in sequence to reach the camera module.

於一實施例中,雷射加工裝置更包括一距離感測器,用以感測雷射加工裝置與工件間之一距離,且距離感測器,並根據距離傳送一高度位置訊號至處理單元。In one embodiment, the laser processing device further includes a distance sensor for sensing a distance between the laser processing device and the workpiece, and the distance sensor transmits a height position signal to the processing unit according to the distance .

於一實施例中,處理單元根據高度位置訊號以及影像資料傳送一驅動訊號至驅動模組,以驅使第一光學透鏡相對於第二光學透鏡移動。In one embodiment, the processing unit transmits a driving signal to the driving module according to the height position signal and the image data, so as to drive the first optical lens to move relative to the second optical lens.

以下說明本發明實施例之雷射加工裝置。然而,可輕易了解本發明實施例提供許多合適的發明概念而可實施於廣泛的各種特定背景。所揭示的特定實施例僅僅用於說明以特定方法使用本發明,並非用以侷限本發明的範圍。The laser processing apparatus according to the embodiment of the present invention will be described below. It can be readily appreciated, however, that embodiments of the invention provide many suitable inventive concepts that can be embodied in a wide variety of specific contexts. The specific embodiments disclosed are merely illustrative of particular ways to use the invention, and are not intended to limit the scope of the invention.

除非另外定義,在此使用的全部用語(包括技術及科學用語)具有與此篇揭露所屬之一般技藝者所通常理解的相同涵義。能理解的是這些用語,例如在通常使用的字典中定義的用語,應被解讀成具有一與相關技術及本揭露的背景或上下文一致的意思,而不應以一理想化或過度正式的方式解讀,除非在此特別定義。Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. It is to be understood that these terms, such as those defined in commonly used dictionaries, should be interpreted to have a meaning consistent with the relevant art and the context or context of this disclosure, and not in an idealized or overly formal manner Interpretation, unless specifically defined herein.

有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之一較佳實施例的詳細說明中,將可清楚的呈現。以下各實施例中所提到的方向用語,例如:上、下、左、右、前或後等,僅是參考附加圖式的方向。因此,實施方式中所使用的方向用語是用來說明並非用來限制本發明。The foregoing and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of a preferred embodiment with reference to the drawings. The directional terms mentioned in the following embodiments, such as: up, down, left, right, front or rear, etc., are only for referring to the directions of the attached drawings. Therefore, the directional terms used in the embodiments are used to describe and not to limit the present invention.

第2圖表示本發明一實施例之雷射加工裝置100對一基板B(例如印刷電路基板)上之焊盤S進行雷射焊錫加工的示意圖。如第2圖所示,本發明一實施例之雷射加工裝置100主要包括有一雷射光源L、一驅動模組V以及一透鏡模組K。透鏡模組K包括一第一光學透鏡K1以及一第二光學透鏡K2,其中設置在雷射加工裝置100內部之雷射光源L可發出一雷射光L1,且該雷射光L1在通過第一、第二光學透鏡K1、K2後可聚焦並投射在基板B的焊盤S上,藉以對焊盤S進行雷射焊錫加工。FIG. 2 is a schematic diagram showing the laser processing apparatus 100 according to an embodiment of the present invention performing laser soldering processing on the pads S on a substrate B (eg, a printed circuit board). As shown in FIG. 2 , the laser processing apparatus 100 according to an embodiment of the present invention mainly includes a laser light source L, a driving module V and a lens module K. The lens module K includes a first optical lens K1 and a second optical lens K2, wherein the laser light source L disposed inside the laser processing device 100 can emit a laser light L1, and the laser light L1 passes through the first, The second optical lenses K1 and K2 can then be focused and projected on the pad S of the substrate B, so that the pad S can be processed by laser soldering.

從第2圖中可以看出,驅動模組V主要包括有一馬達V1、一導螺桿V2(例如滾珠導螺桿)以及一可動之載台V3,其中第一光學透鏡K1設置於可動之載台V3上,第二光學透鏡K2固定於雷射加工裝置100內部,導螺桿V2則連接馬達V1以及載台V3。應了解的是,當欲對基板B上的不同焊盤S加工而需要改變雷射光L1在焊盤S上的光斑大小時,可透過驅動模組V中的馬達V1帶動導螺桿V2旋轉,從而可驅使載台V3以及載台V3上的第一光學透鏡K1一起相對於導螺桿V2沿著第一光學透鏡K1之光軸方向移動(如第2圖中箭頭方向所示),藉以適當地改變第一、第二光學透鏡K1、K2間之距離d,並使雷射光L1能夠聚焦在基板B的焊盤S且形成大小適中的光斑。As can be seen from Figure 2, the driving module V mainly includes a motor V1, a lead screw V2 (such as a ball lead screw) and a movable stage V3, wherein the first optical lens K1 is disposed on the movable stage V3 Above, the second optical lens K2 is fixed inside the laser processing apparatus 100, and the lead screw V2 is connected to the motor V1 and the stage V3. It should be understood that, when the spot size of the laser light L1 on the pad S needs to be changed to process different pads S on the substrate B, the lead screw V2 can be driven by the motor V1 in the driving module V to rotate, thereby The stage V3 and the first optical lens K1 on the stage V3 can be driven to move together relative to the lead screw V2 along the optical axis direction of the first optical lens K1 (as shown by the arrow direction in Fig. 2), so as to appropriately change The distance d between the first and second optical lenses K1 and K2 enables the laser light L1 to be focused on the pad S of the substrate B and form a light spot with a moderate size.

第3圖表示本發明另一實施例之雷射加工裝置100對一基板B上之焊盤S進行雷射加工的示意圖。如第3圖所示,本實施例之雷射加工裝置100與第2圖的主要不同之處在於,本實施例之雷射加工裝置100更包括一殼體H、一攝像模組C、一距離感測器P以及一功率量測模組W,其中雷射光源L以及攝像模組C皆設置於殼體H內,距離感測器P設置於殼體H之一第一側101,功率量測模組W則是嵌設於殼體H之一第二側102。FIG. 3 is a schematic diagram showing the laser processing apparatus 100 according to another embodiment of the present invention performing laser processing on the pads S on a substrate B. As shown in FIG. As shown in FIG. 3 , the main difference between the laser processing apparatus 100 of this embodiment and FIG. 2 is that the laser processing apparatus 100 of this embodiment further includes a casing H, a camera module C, a The distance sensor P and a power measurement module W, wherein the laser light source L and the camera module C are both arranged in the casing H, the distance sensor P is arranged on a first side 101 of the casing H, the power The measurement module W is embedded in a second side 102 of the housing H.

在本實施例中,距離感測器P可包括一雷射位移計(Laser Displacement meter),用以感測雷射加工裝置100與基板B之間的距離D,功率量測模組W則可包含一光功率計(optical power meter),用以在雷射加工過程中即時監測雷射光的輸出功率,其中基板B可為一印刷電路板。In this embodiment, the distance sensor P may include a laser displacement meter for sensing the distance D between the laser processing device 100 and the substrate B, and the power measurement module W may be An optical power meter is included to monitor the output power of the laser light in real time during the laser processing, wherein the substrate B can be a printed circuit board.

當欲使用雷射加工裝置100對基板B(例如印刷電路基板)進行雷射加工時,可透過雷射光源L發出一雷射光L1,雷射光L1會經由反射鏡R1反射後依序穿過第一、第二光學透鏡K1、K2而到達一分光鏡R2(splitter)。接著,雷射光L1的一部分會經由該分光鏡R2反射後通過殼體H上的穿孔H1而到達該基板B,藉以對該基板B上之一焊盤S進行雷射加工,而雷射光L1的另一部分則會穿過分光鏡R2而到達功率量測模組W(如第3圖中之光線L3所示),藉此能夠在加工過程中即時監控雷射光的輸出功率。When the laser processing apparatus 100 is to be used to perform laser processing on the substrate B (such as a printed circuit substrate), a laser light L1 can be emitted through the laser light source L, and the laser light L1 will be reflected by the mirror R1 and then pass through the first 1. The second optical lenses K1 and K2 reach a beam splitter R2 (splitter). Next, a part of the laser light L1 is reflected by the beam splitter R2 and then reaches the substrate B through the through hole H1 on the housing H, so that a pad S on the substrate B is subjected to laser processing, and the laser light L1 is The other part will pass through the beam splitter R2 and reach the power measurement module W (as shown by the light L3 in Figure 3), so that the output power of the laser light can be monitored in real time during the processing.

另一方面,外界光線可被基板B反射後經由穿孔H1進入到殼體H內,之後該外界光線會穿過分光鏡R2而到達一反射鏡R3(如第3圖中之光線L2所示);接著,經過反射鏡R3反射後的光線L2會再被另一反射鏡R4反射而到達攝像模組C。在此,攝像模組C可藉由接收光線L2以獲得基板B表面上之一局部影像 (例如焊盤S的影像),且根據該影像可計算出一理想的雷射光斑大小資訊。On the other hand, the external light can be reflected by the substrate B and then enter the housing H through the through hole H1, and then the external light will pass through the beam splitter R2 and reach a reflector R3 (as shown by the light L2 in the third figure) ; Next, the light L2 reflected by the mirror R3 will be reflected by another mirror R4 to reach the camera module C. Here, the camera module C can obtain a partial image (eg, the image of the pad S) on the surface of the substrate B by receiving the light L2, and can calculate an ideal laser spot size information according to the image.

需特別說明的是,本實施例的殼體H內側表面上設有一導軌G,其中第一光學透鏡K1和/或第二光學透鏡K2可透過如第2圖所示的驅動模組V帶動而沿著導軌G滑行,藉此能夠適當地調整第一、第二光學透鏡K1、K2在其光軸方向(X軸方向)上的距離d,從而使雷射光源L所發出之雷射光L1能夠在基板B的表面上形成一對應於焊盤S尺寸大小的雷射光斑。It should be noted that, a guide rail G is provided on the inner surface of the housing H in this embodiment, wherein the first optical lens K1 and/or the second optical lens K2 can be driven by the driving module V as shown in FIG. 2 . By sliding along the guide rail G, the distance d of the first and second optical lenses K1 and K2 in the optical axis direction (X axis direction) can be properly adjusted, so that the laser light L1 emitted by the laser light source L can be A laser spot corresponding to the size of the pad S is formed on the surface of the substrate B.

第4圖表示本發明另一實施例之雷射加工裝置100對一基板B(例如印刷電路基板)上之焊盤S進行雷射焊錫加工的系統方塊示意圖。如第4圖所示,本實施例之雷射加工裝置100與第3圖的主要不同之處在於,本實施例之雷射加工裝置100更包括一處理單元110以及一雷射控制器120,其中該處理單元110例如為一工業電腦(Industrial PC, IPC),電性連接距離感測器P、攝像模組C以及驅動模組V,雷射控制器120則是電性連接該處理單元110以及該雷射光源L。FIG. 4 is a schematic block diagram of a system for performing laser soldering on a pad S on a substrate B (eg, a printed circuit board) by a laser processing apparatus 100 according to another embodiment of the present invention. As shown in FIG. 4 , the main difference between the laser processing apparatus 100 of this embodiment and FIG. 3 is that the laser processing apparatus 100 of this embodiment further includes a processing unit 110 and a laser controller 120 . The processing unit 110 is, for example, an Industrial PC (IPC), which is electrically connected to the distance sensor P, the camera module C and the driving module V, and the laser controller 120 is electrically connected to the processing unit 110 and the laser light source L.

具體而言,距離感測器P在進行雷射加工程序之前可預先量測雷射加工裝置100與基板B之間的距離D,並據此傳送一高度位置訊號N1到處理單元110;此外,外界光線在經過基板B上之焊盤S反射後會進入到雷射加工裝置100內部並穿過分光鏡R2(如第4圖中光線L2所示),其中攝像模組C可接收光線L2以獲得基板B上之焊盤S的影像資料,並可在進行雷射加工之前根據該影像資料傳送一影像訊號N2到處理單元110。Specifically, the distance sensor P can measure the distance D between the laser processing device 100 and the substrate B in advance before performing the laser processing procedure, and transmit a height position signal N1 to the processing unit 110 accordingly; in addition, After being reflected by the pad S on the substrate B, the external light will enter the interior of the laser processing device 100 and pass through the beam splitter R2 (as shown by the light L2 in FIG. 4 ), wherein the camera module C can receive the light L2 to The image data of the pad S on the substrate B is obtained, and an image signal N2 can be sent to the processing unit 110 according to the image data before laser processing.

接著,處理單元110可根據高度位置訊號N1和影像訊號N2計算出一理想的雷射光斑大小資訊,然後再根據該雷射光斑大小資訊傳送一驅動訊號N3到驅動模組V,以透過驅動模組V中的連接機構(例如導螺桿V2)驅使透鏡模組K中的一或多個光學透鏡(例如第一、第二光學透鏡K1、K2)彼此產生相對運動,從而使透鏡模組K中之各光學透鏡間形成適當之距離。Next, the processing unit 110 can calculate an ideal laser spot size information according to the height position signal N1 and the image signal N2, and then transmit a driving signal N3 to the driving module V according to the laser spot size information, so as to pass the driving module The connecting mechanism (such as the lead screw V2) in the group V drives one or more optical lenses (such as the first and second optical lenses K1, K2) in the lens module K to move relative to each other, so that the lens module K An appropriate distance is formed between the optical lenses.

最後,處理單元110可傳送一控制指令N4到雷射控制器120,且雷射控制器120可根據控制指令N4傳送一發射指令N5到雷射光源L,並透過雷射光源L發射雷射光L1到透鏡模組K。Finally, the processing unit 110 can send a control command N4 to the laser controller 120 , and the laser controller 120 can send an emission command N5 to the laser light source L according to the control command N4 , and emit the laser light L1 through the laser light source L to lens module K.

雷射光L1的一部分在通過透鏡模組K後可經由分光鏡R2反射而到達基板B,藉以對基板B上之一焊盤S進行雷射焊錫加工。此外,雷射光L1的另一部分則可穿過分光鏡R2而到達功率量測模組W(如第4圖中之光線L3所示),藉此能夠在加工過程中即時監控雷射光L1的輸出功率。After passing through the lens module K, a part of the laser light L1 can be reflected by the beam splitter R2 to reach the substrate B, so as to perform laser soldering on a pad S on the substrate B. In addition, another part of the laser light L1 can pass through the beam splitter R2 to reach the power measurement module W (as shown by the light L3 in Fig. 4 ), so that the output of the laser light L1 can be monitored in real time during the processing. power.

綜上所述,本發明之雷射加工裝置100主要係用以對一工件(workpiece)進行雷射加工(例如對基板B上的焊盤S進行雷射焊錫加工),其可透過攝像模組C擷取當下焊盤S的影像,並透過處理單元110(例如工業電腦)自動計算出理想的雷射光斑大小資訊,因此不再需要藉由人為設定輸入以及判別,從而能大幅降低人力成本及誤判之風險,同時亦可滿足智能製造之需求,本發明之雷射加工裝置係可應用於雷射切割、 雷射鑽孔或雷射焊接等。To sum up, the laser processing apparatus 100 of the present invention is mainly used to perform laser processing on a workpiece (for example, laser solder processing on the pad S on the substrate B), which can pass through the camera module. C captures the image of the current pad S, and automatically calculates the ideal laser spot size information through the processing unit 110 (such as an industrial computer), so it is no longer necessary to manually set input and determine, thereby greatly reducing labor costs and The risk of misjudgment can also meet the needs of intelligent manufacturing. The laser processing device of the present invention can be applied to laser cutting, laser drilling or laser welding.

需特別說明的是,除了光路當中之光學透鏡的相對距離外,由於雷射光斑尺寸也與工作高度有關,因此在本發明的雷射加工裝置100中亦整合了距離感測器P(例如雷射位移計),以即時監測雷射焊錫時工作高度的變異,同時可補償雷射加工過程中因入料件的高度偏差或是治具加工誤差所造成的工作高度變異,以有效改善加工精度並大幅提高生產效率。It should be noted that, in addition to the relative distance of the optical lenses in the optical path, since the size of the laser spot is also related to the working height, the laser processing apparatus 100 of the present invention also integrates a distance sensor P (such as a laser beam). Laser displacement meter) to monitor the variation of working height in real time during laser soldering, and at the same time, it can compensate for the variation of working height caused by the height deviation of the incoming material or the processing error of the fixture during the laser processing, so as to effectively improve the processing accuracy And greatly improve production efficiency.

雖然本發明的實施例及其優點已揭露如上,但應該瞭解的是,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作更動、替代與潤飾。此外,本發明之保護範圍並未侷限於說明書內所述特定實施例中的製程、機器、製造、物質組成、裝置、方法及步驟,任何所屬技術領域中具有通常知識者可從本發明揭示內容中理解現行或未來所發展出的製程、機器、製造、物質組成、裝置、方法及步驟,只要可以在此處所述實施例中實施大抵相同功能或獲得大抵相同結果皆可根據本發明使用。因此,本發明之保護範圍包括上述製程、機器、製造、物質組成、裝置、方法及步驟。另外,每一申請專利範圍構成個別的實施例,且本發明之保護範圍也包括各個申請專利範圍及實施例的組合。Although the embodiments of the present invention and their advantages have been disclosed above, it should be understood that those skilled in the art can make changes, substitutions and modifications without departing from the spirit and scope of the present invention. In addition, the protection scope of the present invention is not limited to the process, machine, manufacture, material composition, device, method and steps in the specific embodiments described in the specification. Anyone with ordinary knowledge in the technical field can learn from the present disclosure. It is understood that processes, machines, manufactures, compositions of matter, devices, methods and steps developed in the present or in the future can be used in accordance with the present invention as long as they can perform substantially the same functions or achieve substantially the same results in the embodiments described herein. Therefore, the protection scope of the present invention includes the above-mentioned process, machine, manufacture, composition of matter, device, method and steps. In addition, each claimed scope constitutes a separate embodiment, and the protection scope of the present invention also includes the combination of each claimed scope and the embodiments.

雖然本發明已以較佳實施例揭露於上,然其並非用以限定本發明,任何熟習此項工藝者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Anyone skilled in the art can make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, The protection scope of the present invention shall be determined by the scope of the appended patent application.

10:雷射加工裝置 11:光學透鏡 100:雷射加工裝置 101:第一側 102:第二側 110:處理單元 120:雷射控制器 B:基板 C:攝像模組 d:距離 D:距離 E:雷射光 E’:雷射光 G:導軌 H:殼體 H1:穿孔 K:透鏡模組 K1:第一光學透鏡 K2:第二光學透鏡 L:雷射光源 L1:雷射光 L2:光線 L3:光線 Ld:直徑 N1:高度位置訊號 N2:影像訊號 N3:驅動訊號 N4:控制指令 N5:發射指令 P:距離感測器 R1:反射鏡 R2:分光鏡 R3:反射鏡 R4:反射鏡 S:焊盤 V:驅動模組 V1:馬達 V2:導螺桿 V3:載台 W:功率量測模組 10: Laser processing device 11: Optical lens 100: Laser processing device 101: First side 102: Second Side 110: Processing unit 120: Laser Controller B: substrate C: camera module d: distance D: distance E: laser light E': laser light G: rail H: shell H1: perforated K: lens module K1: The first optical lens K2: Second Optical Lens L: laser light source L1: Laser light L2: light L3: Light Ld: diameter N1: height position signal N2: video signal N3: drive signal N4: Control command N5: launch command P: Distance sensor R1: Reflector R2: Beamsplitter R3: Reflector R4: Reflector S: pad V: drive module V1: Motor V2: Lead screw V3: Stage W: Power measurement module

第1圖表示一習知雷射加工裝置10對一基板B上之焊盤S進行加工的示意圖。 第2圖表示本發明一實施例之雷射加工裝置100對一基板B上之焊盤S進行加工的示意圖。 第3圖表示本發明另一實施例之雷射加工裝置100對一基板B上之焊盤S進行雷射加工的示意圖。 第4圖表示本發明另一實施例之雷射加工裝置100對一基板B上之焊盤S進行雷射加工的系統方塊示意圖。 FIG. 1 shows a schematic diagram of a conventional laser processing apparatus 10 processing a pad S on a substrate B. As shown in FIG. FIG. 2 shows a schematic diagram of processing a pad S on a substrate B by a laser processing apparatus 100 according to an embodiment of the present invention. FIG. 3 is a schematic diagram showing the laser processing apparatus 100 according to another embodiment of the present invention performing laser processing on the pads S on a substrate B. As shown in FIG. FIG. 4 is a schematic block diagram of a system for laser processing a pad S on a substrate B by a laser processing apparatus 100 according to another embodiment of the present invention.

100:雷射加工裝置 100: Laser processing device

B:基板 B: substrate

d:距離 d: distance

K:透鏡模組 K: lens module

K1:第一光學透鏡 K1: The first optical lens

K2:第二光學透鏡 K2: Second Optical Lens

L:雷射光源 L: laser light source

L1:雷射光 L1: Laser light

S:焊盤 S: pad

V:驅動模組 V: drive module

V1:馬達 V1: Motor

V2:導螺桿 V2: Lead screw

V3:載台 V3: Stage

Claims (10)

一種雷射加工裝置,用以對一工件進行加工,該雷射加工裝置包括:一雷射光源;一透鏡模組,具有一第一光學透鏡以及一第二光學透鏡,其中該雷射光源發出一雷射光經過該第一、第二光學透鏡並投射於該工件上;一驅動模組,用以驅使該第一光學透鏡相對於該第二光學透鏡移動;一攝像模組,用以擷取該工件之一影像;一處理單元,電性連接攝像模組以及該驅動模組,其中該攝像模組根據該工件之該影像傳送一影像資料至該處理單元,且該處理單元根據該影像資料傳送一驅動訊號至該驅動模組,以驅使該第一光學透鏡相對於該第二光學透鏡移動;以及一距離感測器,用以感測該雷射加工裝置與該工件間之一距離,且該距離感測器根據該距離傳送一高度位置訊號至該處理單元。 A laser processing device is used for processing a workpiece, the laser processing device comprises: a laser light source; a lens module having a first optical lens and a second optical lens, wherein the laser light source emits A laser light passes through the first and second optical lenses and is projected on the workpiece; a driving module is used to drive the first optical lens to move relative to the second optical lens; a camera module is used to capture An image of the workpiece; a processing unit electrically connected to the camera module and the driving module, wherein the camera module transmits an image data to the processing unit according to the image of the workpiece, and the processing unit according to the image data sending a driving signal to the driving module to drive the first optical lens to move relative to the second optical lens; and a distance sensor for sensing a distance between the laser processing device and the workpiece, And the distance sensor transmits a height position signal to the processing unit according to the distance. 如請求項1之雷射加工裝置,其中該雷射加工裝置更包括一功率量測模組,用以量測該雷射光之功率強度。 The laser processing device of claim 1, wherein the laser processing device further comprises a power measuring module for measuring the power intensity of the laser light. 如請求項2之雷射加工裝置,其中該雷射加工裝置更包括一分光鏡,從該雷射光源所發出之該雷射光的一部份經由該分光鏡反射後到達該工件,且該雷射光的另一部份穿過該分光鏡而到達該功率量測模組。 The laser processing device of claim 2, wherein the laser processing device further comprises a beam splitter, a part of the laser light emitted from the laser light source is reflected by the beam splitter to reach the workpiece, and the laser beam Another part of the emitted light passes through the beam splitter and reaches the power measuring module. 如請求項3之雷射加工裝置,其中該雷射加工裝置更包括一反射鏡,從該雷射光源所發出之該雷射光經由該反射鏡反射後穿過該透鏡模組而到達該分光鏡。 The laser processing device of claim 3, wherein the laser processing device further comprises a reflector, and the laser light emitted from the laser light source is reflected by the reflector and then passes through the lens module to reach the beam splitter . 如請求項1之雷射加工裝置,其中該驅動模組包括一馬達、一載台以及一滾珠螺桿,該第一光學透鏡設置於該載台上,且該滾珠 螺桿連接該馬達以及該載台,其中當該馬達驅使該滾珠螺桿旋轉時,該載台相對於該滾珠螺桿沿該第一光學透鏡之一光軸方向運動。 The laser processing device of claim 1, wherein the driving module comprises a motor, a stage and a ball screw, the first optical lens is disposed on the stage, and the ball The screw is connected with the motor and the stage, wherein when the motor drives the ball screw to rotate, the stage moves relative to the ball screw along an optical axis direction of the first optical lens. 如請求項1之雷射加工裝置,其中該雷射加工裝置更包括一分光鏡,且從該雷射光源所發出之該雷射光的一部份經由該分光鏡反射後到達該工件。 The laser processing device of claim 1, wherein the laser processing device further comprises a beam splitter, and a part of the laser light emitted from the laser light source is reflected by the beam splitter to reach the workpiece. 如請求項6之雷射加工裝置,其中一外界光線經由該工件反射後穿過該分光鏡而到達該攝像模組。 The laser processing device of claim 6, wherein an external light is reflected by the workpiece and then passes through the beam splitter to reach the camera module. 該如請求項7之雷射加工裝置,其中該雷射加工裝置更包括兩個反射鏡,且經由該工件反射後之該外界光線穿過該分光鏡,並依序經由該些反射鏡反射後到達該攝像模組。 The laser processing device according to claim 7, wherein the laser processing device further comprises two mirrors, and the external light after being reflected by the workpiece passes through the beam splitter, and is sequentially reflected by the mirrors to the camera module. 如請求項1之雷射加工裝置,其中該處理單元根據該高度位置訊號以及該影像資料傳送一驅動訊號至該驅動模組,以驅使該第一光學透鏡相對於該第二光學透鏡移動。 The laser processing apparatus of claim 1, wherein the processing unit transmits a driving signal to the driving module according to the height position signal and the image data, so as to drive the first optical lens to move relative to the second optical lens. 如請求項1之雷射加工裝置,其中該雷射加工裝置係應用於雷射切割、雷射鑽孔或/以及雷射焊接。The laser processing device of claim 1, wherein the laser processing device is applied to laser cutting, laser drilling or/and laser welding.
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