TWI769950B - Pulse seed laser tunable wavelength circuit module and wavelength control method thereof - Google Patents

Pulse seed laser tunable wavelength circuit module and wavelength control method thereof Download PDF

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TWI769950B
TWI769950B TW110139920A TW110139920A TWI769950B TW I769950 B TWI769950 B TW I769950B TW 110139920 A TW110139920 A TW 110139920A TW 110139920 A TW110139920 A TW 110139920A TW I769950 B TWI769950 B TW I769950B
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seed laser
temperature
wavelength
pulse seed
laser diode
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TW202318745A (en
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楊亞勳
許浩威
王鼎鈞
許玟凱
黃奇咸
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搏盟科技股份有限公司
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本發明為有關一種脈衝種子雷射可調波長電路模組及其波長控制方法,該脈衝種子雷射波長可調電路之脈衝種子雷射二極體進行校正作業後,可通電射出雷射光線,並利用微處理器來解析脈衝種子雷射二極體之熱敏電阻溫度,若解析出的溫度不符微處理器所記錄之溫度時,其微處理器即會驅動溫控器來傳輸調溫訊號至致冷晶片驅動電路,使致冷晶片驅動電路接收到調溫訊號後,可驅動脈衝種子雷射二極體之致冷晶片來對脈衝種子雷射二極體進行調溫,使脈衝種子雷射二極體的溫度調整至符合微處理器所記錄之溫度,再藉由溫度使波長調整,以使脈衝種子雷射二極體可確實發射出符合預設波長之雷射光線,進而避免影響脈衝種子雷射二極體的輸出功率,藉此提升雷射加工作業之穩定性。 The present invention relates to a pulse seed laser adjustable wavelength circuit module and a wavelength control method thereof. After the pulse seed laser diode of the pulse seed laser wavelength adjustable circuit is calibrated, it can be energized to emit laser light. And use the microprocessor to analyze the thermistor temperature of the pulse seed laser diode. If the analyzed temperature does not match the temperature recorded by the microprocessor, the microprocessor will drive the temperature controller to transmit the temperature adjustment signal. To the cooling chip driving circuit, after the cooling chip driving circuit receives the temperature adjustment signal, it can drive the cooling chip of the pulse seed laser diode to adjust the temperature of the pulse seed laser diode, so that the pulse seed laser diode is The temperature of the laser diode is adjusted to match the temperature recorded by the microprocessor, and then the wavelength is adjusted according to the temperature, so that the pulsed seed laser diode can indeed emit laser light with the preset wavelength, thereby avoiding influence The output power of the pulsed seed laser diode improves the stability of the laser processing operation.

Description

脈衝種子雷射可調波長電路模組及其波長控制方法 Pulse seed laser tunable wavelength circuit module and wavelength control method thereof

本發明係提供一種脈衝種子雷射可調波長電路模組及其波長控制方法,尤指脈衝種子雷射二極體發射雷射光線後,利用微處理器解析溫度,並透過溫控器來使致冷晶片驅動電路驅動脈衝種子雷射二極體之致冷晶片,以對脈衝種子雷射二極體調溫,再藉由溫度使波長調整,使脈衝種子雷射二極體射出符合預設波長之雷射光線。 The invention provides a pulse seed laser adjustable wavelength circuit module and a wavelength control method thereof, especially after the pulse seed laser diode emits laser light, the microprocessor is used to analyze the temperature, and the temperature controller is used to control the temperature. The cooling chip driving circuit drives the cooling chip of the pulse seed laser diode to adjust the temperature of the pulse seed laser diode, and then adjust the wavelength according to the temperature, so that the pulse seed laser diode emits in accordance with the preset wavelength of laser light.

按,隨著高科技時代來臨,產業製造生產的加工技術亦不斷提升,傳統機械式加工製程,只能針對加工物件的外表進行加工,但對於加工物件之加工處理、雕刻或切割等作業即無法完成,此外如高科技之半導體產品之晶片、零組件、薄板件鑽孔、切割等,亦無法進行相關加工處理;因此,雷射加工的製程被研發問世,製程應用相當廣泛,舉凡醫療、高精密工業、激發探測、光譜學分析或電漿動力學等領域,都可以透過雷射進行加工製程處理,傳統雷射加工免不了鏡片的機械夾持、高精度平移台等,然而透過光學式雷射進行脈衝光之雷射加工處理作業,因為光纖雷射具有構造緊密、高效能以及能夠產生高輻射品質之雷射光束等優點,故而光纖雷射被廣泛應用於材料加工的製程,且因光纖雷射具有非常好的穩定性、體積小、易於攜帶與易於架設等優點,故在於光通訊、光譜測量 及光學分析之應用佔有一席之地,且又因具有非常高的良好的準直性、高功率及高光強度,也使工業上廣泛應用雷射源加工系統。 Press, with the advent of the high-tech era, the processing technology of industrial manufacturing and production has also been continuously improved. The traditional mechanical processing process can only process the appearance of the processed object, but the processing, engraving or cutting of the processed object cannot be processed. In addition, the drilling and cutting of high-tech semiconductor products, such as chips, components, and thin plate parts, cannot be processed. Therefore, the laser processing process has been developed and developed, and the process is widely used, such as medical, high-tech, etc. Precision industry, excitation detection, spectroscopic analysis or plasma dynamics can all be processed by lasers. Traditional laser processing cannot avoid mechanical clamping of lenses, high-precision translation stages, etc. However, through optical lasers For laser processing operations of pulsed light, fiber lasers are widely used in the process of material processing because of the advantages of compact structure, high efficiency and the ability to generate laser beams with high radiation quality. It has the advantages of very good stability, small size, easy to carry and easy to erect, so it is suitable for optical communication, spectral measurement and so on. And the application of optical analysis occupies a place, and because of its very high good collimation, high power and high light intensity, it also makes the laser source processing system widely used in industry.

然而,目前雷射加工作業中,其不同的雷射加工製程所應用的雷射源輸出功率也都會有些許的不同,而在精密的雷射加工製程中,其雷射波長能容許的誤差範圍大約只有±1nm,若雷射波長超出±1nm範圍皆會影響的雷射的輸出功率,進而連帶影響整體雷射源輸出的總功率,以致於使雷射加工過程趨向不穩定的狀態,導致影響產品整體生產的良率。 However, in the current laser processing operation, the output power of the laser source applied in different laser processing processes will also be slightly different, and in the precise laser processing process, the allowable error range of the laser wavelength It is only about ±1nm. If the laser wavelength exceeds the range of ±1nm, the output power of the laser will be affected, and the total output power of the overall laser source will be affected, so that the laser processing process tends to be unstable, resulting in the impact of The overall production yield of the product.

是以,要如何設法解決上述習用之缺失與不便,即為從事此行業之相關業者所亟欲研究改善之方向所在。 Therefore, how to solve the above-mentioned deficiencies and inconveniences is the direction of research and improvement that the relevant practitioners in this industry are eager to study and improve.

故,發明人有鑑於上述缺失,乃搜集相關資料,經由多方評估及考量,並以從事於此行業累積之多年經驗,經由不斷試作及修改,始設計出此種脈衝種子雷射可調波長電路模組及其波長控制方法的發明專利者。 Therefore, in view of the above deficiencies, the inventor collects relevant information, evaluates and considers from various parties, and designs this kind of pulse seed laser tunable wavelength circuit through continuous trial and modification with years of experience accumulated in this industry. The inventor of the module and its wavelength control method.

本發明之主要目的乃在於該脈衝種子雷射可調波長電路脈衝種子雷射可調波長電路模組之脈衝種子雷射二極體進行校正作業後,為可通電發射雷射光線,並藉由微處理器解解析、比對,若解析出脈衝種子雷射二極體的熱敏電阻溫度不等同於微處理器所記錄之溫度時,其微處理器即會傳輸電子訊號來驅動溫控器,並使溫控器來自動傳輸調溫訊號至致冷晶片驅動電路,以使致冷晶片驅動電路接收到調溫訊號後,可驅動脈衝種子雷射二極體之致冷晶片來對脈衝種子雷射二極體進行調溫,使脈衝種子雷射二極體的溫度自動調整至符合微處理器所記錄之溫度,再藉由溫度 使波長調整,進而使脈衝種子雷射二極體可確實發射出符合預設波長之雷射光線,以避免影響脈衝種子雷射二極體的輸出功率,藉此達到使雷射加工作業輸出確實、穩定性提升之目的。 The main purpose of the present invention is that after the pulse seed laser diode of the pulse seed laser tunable wavelength circuit module of the pulse seed laser tunable wavelength circuit module is calibrated, the laser light can be energized to emit laser light, and The microprocessor analyzes and compares, if the thermistor temperature of the pulse seed laser diode is not equal to the temperature recorded by the microprocessor, the microprocessor will transmit an electronic signal to drive the thermostat , and make the temperature controller automatically transmit the temperature adjustment signal to the cooling chip drive circuit, so that after the cooling chip drive circuit receives the temperature adjustment signal, it can drive the cooling chip of the pulse seed laser diode to control the pulse seed The temperature of the laser diode is adjusted, so that the temperature of the pulse seed laser diode is automatically adjusted to meet the temperature recorded by the microprocessor, and then the temperature is adjusted by the temperature. Adjust the wavelength so that the pulsed seed laser diode can indeed emit laser light with a preset wavelength, so as to avoid affecting the output power of the pulsed seed laser diode, so as to achieve a reliable output of the laser processing operation. , the purpose of improving stability.

本發明之次要目的乃在於該脈衝種子雷射二極體為可直接利用本身構造來進行溫度的調整,再藉由溫度使波長調整,以使雷射波長穩定,而不須於脈衝種子雷射二極體上額外設置、設計新的構造、結構才能調整脈衝種子雷射二極體的溫度,以可供適用市面上多種脈衝種子雷射二極體,進而達到具有高適用性,以及降低製造成本、提高經濟成本效益之目的。 The secondary purpose of the present invention is that the pulse seed laser diode can directly use its own structure to adjust the temperature, and then adjust the wavelength by the temperature, so as to stabilize the laser wavelength, without the need for the pulse seed laser diode. The temperature of the pulse seed laser diode can be adjusted by additional settings on the emitter diode, and new structures and structures can be designed, so as to be applicable to various pulse seed laser diodes on the market, thereby achieving high applicability and reducing The purpose of manufacturing cost and improving economic cost-effectiveness.

1:脈衝種子雷射可調波長電路模組 1: Pulse seed laser adjustable wavelength circuit module

11:微處理器 11: Microprocessor

111:儲存單元 111: Storage unit

12:脈衝種子雷射二極體 12: Pulse Seed Laser Diode

121:熱敏電阻 121: Thermistor

122:致冷晶片 122: Refrigeration wafer

123:光電二極體 123: Photodiode

13:訊號轉換電路 13: Signal conversion circuit

14:溫控器 14: Thermostat

141:升溫調整鈕 141: heating adjustment button

142:降溫調整鈕 142: Cooling adjustment button

15:致冷晶片驅動電路 15: Refrigeration chip drive circuit

2:光譜顯示儀器 2: Spectral display instrument

〔第1圖〕係為本發明之方塊圖。 [Fig. 1] is a block diagram of the present invention.

〔第2圖〕係為本發明之流程圖。 [Fig. 2] is a flow chart of the present invention.

〔第3圖〕係為本發明另一實施例之流程圖(一)。 [Fig. 3] is a flowchart (1) of another embodiment of the present invention.

〔第4圖〕係為本發明另一實施例之流程圖(二)。 [Fig. 4] is a flowchart (2) of another embodiment of the present invention.

為達成上述目的及功效,本發明所採用之技術手段及其構造,茲繪圖就本發明之較佳實施例詳加說明其特徵與功能如下,俾利完全瞭解。 In order to achieve the above objects and effects, the technical means and structures adopted by the present invention are described in detail with reference to the preferred embodiments of the present invention, and the features and functions are as follows, so as to be fully understood.

請參閱第1圖所示,係為本發明之方塊圖,由圖中可清楚看出,本發明之脈衝種子雷射可調波長電路模組1係包括微處理器11、脈衝種子雷射二極體12、訊號轉換電路13、溫控器14及致冷晶片驅動電路15, 其中: Please refer to FIG. 1, which is a block diagram of the present invention. It can be clearly seen from the figure that the pulse seed laser tunable wavelength circuit module 1 of the present invention includes a microprocessor 11, a pulse seed laser two The pole body 12, the signal conversion circuit 13, the temperature controller 14 and the cooling chip driving circuit 15, in:

該微處理器11(Microcontroller Unit;MCU)為具有運算功能,並於內部設有儲存單元111。 The microprocessor 11 (Microcontroller Unit; MCU) has a computing function and has a storage unit 111 inside.

該脈衝種子雷射二極體12(Seed Laser Diode)為包括熱敏電阻121(Thermistor)、致冷晶片122(Thermoelectric Cooler;TEC)、光電二極體123(Photo Diode),其中該熱敏電阻121之電阻值會隨著溫度變化而改變,且該致冷晶片122為可對脈衝種子雷射二極體12進行控溫以改變熱敏電阻121的電阻值,而該光電二極體123可將光能轉換成電壓。 The pulsed seed laser diode 12 includes a thermistor 121 (Thermistor), a cooling chip 122 (Thermoelectric Cooler; TEC), and a photodiode 123 (Photo Diode), wherein the thermistor 123 (Photo Diode) The resistance value of 121 will change with temperature, and the cooling chip 122 can control the temperature of the pulsed seed laser diode 12 to change the resistance value of the thermistor 121, and the photodiode 123 can Convert light energy into voltage.

該訊號轉換電路13可為類比數位轉換器電路(ADC Circuit),其訊號轉換電路13為耦接於微處理器11及脈衝種子雷射二極體12的熱敏電阻121之間,即可將熱敏電阻121變化的電阻值轉換成數位訊號傳輸至微處理器11進行解析。 The signal conversion circuit 13 can be an analog-to-digital converter circuit (ADC Circuit), and the signal conversion circuit 13 is coupled between the microprocessor 11 and the thermistor 121 of the pulse seed laser diode 12 , which can convert the The changed resistance value of the thermistor 121 is converted into a digital signal and transmitted to the microprocessor 11 for analysis.

該溫控器14為連接於微處理器11,並可接收來自微處理器11傳輸之電子訊號而傳輸出調溫訊號,且溫控器14電性連接有可供按壓之升溫調整鈕141及降溫調整鈕142。 The temperature controller 14 is connected to the microprocessor 11 and can receive the electronic signal transmitted from the microprocessor 11 to transmit a temperature adjustment signal, and the temperature controller 14 is electrically connected with a temperature rise adjustment button 141 that can be pressed and Cool down adjustment knob 142 .

該致冷晶片驅動電路15(Thermoelectric Cooler Driver Cir cuit)為連接於溫控器14與脈衝種子雷射二極體12的致冷晶片122之間,其可接收來自溫控器14傳輸的調溫訊號,以驅動致冷晶片122進行調溫作業。 The cooling chip driver circuit 15 (Thermoelectric Cooler Driver Circuit) is connected between the temperature controller 14 and the cooling chip 122 of the pulse seed laser diode 12 , and can receive the temperature adjustment transmitted from the temperature controller 14 . The signal is used to drive the cooling chip 122 to perform the temperature adjustment operation.

再請參閱第2圖所示,係為本發明之流程圖,由圖中可清楚看出,本發明脈衝種子雷射可調波長電路模組1之波長控制方法為可事先將脈衝種子雷射可調波長電路模組1之脈衝種子雷射二極體12進行預設波 長(如:基本波長1064nm)的校正作業,以於脈衝種子雷射可調波長電路模組1微處理器11的儲存單元111中記錄有脈衝種子雷射二極體12於預設波長時的溫度,再將校正完成之脈衝種子雷射二極體12依據下列步驟實施: Please refer to FIG. 2 again, which is a flow chart of the present invention. It can be clearly seen from the figure that the wavelength control method of the pulse seed laser tunable wavelength circuit module 1 of the present invention is that the pulse seed laser can be used in advance. The pulse seed laser diode 12 of the adjustable wavelength circuit module 1 performs a preset wave Long (eg: basic wavelength 1064nm) calibration operation, in order to record the pulse seed laser diode 12 at the preset wavelength in the storage unit 111 of the pulse seed laser tunable wavelength circuit module 1 microprocessor 11 temperature, and then the calibrated pulse seed laser diode 12 is implemented according to the following steps:

(A)係先通電驅動脈衝種子雷射可調波長電路模組1,使脈衝種子雷射二極體12發射出雷射光線,此時,該脈衝種子雷射二極體12內部之熱敏電阻121即會感測溫度變化而改變電阻值,並可透過熱敏電阻121耦接之訊號轉換電路13來將熱敏電阻121變化的電阻值轉換成數位訊號,再傳輸至脈衝種子雷射可調波長電路模組1之微處理器11進行解析,藉以解析出脈衝種子雷射二極體12發射出雷射光線時,其脈衝種子雷射二極體12的溫度。 (A) The circuit module 1 is first powered on to drive the pulse seed laser adjustable wavelength circuit module 1, so that the pulse seed laser diode 12 emits laser light. At this time, the thermal sensitivity inside the pulse seed laser diode 12 The resistor 121 senses the temperature change and changes the resistance value, and can convert the resistance value changed by the thermistor 121 into a digital signal through the signal conversion circuit 13 coupled to the thermistor 121, and then transmit it to the pulsed seed laser. The microprocessor 11 of the wavelength modulation circuit module 1 performs analysis, thereby analyzing the temperature of the pulse seed laser diode 12 when the pulse seed laser diode 12 emits laser light.

(B)若脈衝種子雷射可調波長電路模組1之微處理器11解析出的溫度不等於校正作業時,其儲存單元111所記錄之溫度時,即執行步驟(C),而若解析出的溫度等於儲存單元111所記錄之溫度,則執行步驟(E)。 (B) If the temperature analyzed by the microprocessor 11 of the pulse seed laser tunable wavelength circuit module 1 is not equal to the temperature recorded by the storage unit 111 of the calibration operation, step (C) is executed. If the output temperature is equal to the temperature recorded by the storage unit 111, step (E) is executed.

(C)該脈衝種子雷射可調波長電路模組1之微處理器11即會傳輸電子訊號至溫控器14,以驅動溫控器14傳輸調溫訊號至致冷晶片驅動電路15。 (C) The microprocessor 11 of the pulse seed laser tunable wavelength circuit module 1 transmits electronic signals to the temperature controller 14 to drive the temperature controller 14 to transmit the temperature regulation signal to the cooling chip driving circuit 15 .

(D)而該致冷晶片驅動電路15接收到調溫訊號後,則會驅動致冷晶片122進行調溫(升溫或降溫)作業,以藉由致冷晶片122來將脈衝種子雷射二極體12的溫度調整至符合儲存單元111所記錄之溫度,便可執行步驟(E)。 (D) After receiving the temperature adjustment signal, the cooling chip driving circuit 15 drives the cooling chip 122 to perform a temperature adjustment (heating or cooling) operation, so that the pulsed seed laser diode is driven by the cooling chip 122 After the temperature of the body 12 is adjusted to match the temperature recorded by the storage unit 111, step (E) can be executed.

(E)再藉由溫度使波長調整,其脈衝種子雷射二極體12 便會發射出符合預設波長之雷射光線,進而完成本發明之使用。 (E) The wavelength is adjusted by temperature, and the pulsed seed laser diode 12 The laser light with the preset wavelength will be emitted, thereby completing the use of the present invention.

本發明脈衝種子雷射可調波長電路模組1之脈衝種子雷射二極體12進行校正作業後,為可通電發射雷射光線,並藉由微處理器11解析、比對,若解析出脈衝種子雷射二極體12的溫度不等同於微處理器11之儲存單元111內所記錄之溫度時,其微處理器11即會傳輸一電子訊號來驅動溫控器14,而該溫控器14則會自動傳輸調溫訊號至致冷晶片驅動電路15,以使致冷晶片驅動電路15接收到調溫訊號後,可驅動脈衝種子雷射二極體12之致冷晶片122來對脈衝種子雷射二極體12進行調溫(升溫或降溫)作業,使脈衝種子雷射二極體12的溫度自動調整至符合儲存單元111所記錄之溫度,再藉由溫度使波長調整,進而使脈衝種子雷射二極體12可確實發射出符合預設波長之雷射光線,以避免影響脈衝種子雷射二極體12的輸出功率,藉此達到使雷射加工作業(如工業、醫療、激發探測、光譜學分析或電漿動力學等)輸出確實、穩定性提升之效果。 After the pulse seed laser diode 12 of the pulse seed laser adjustable wavelength circuit module 1 of the present invention is calibrated, it can be energized to emit laser light, and is analyzed and compared by the microprocessor 11. When the temperature of the pulsed seed laser diode 12 is not equal to the temperature recorded in the storage unit 111 of the microprocessor 11, the microprocessor 11 will transmit an electronic signal to drive the temperature controller 14, and the temperature control The device 14 will automatically transmit the temperature adjustment signal to the cooling chip driving circuit 15, so that after the cooling chip driving circuit 15 receives the temperature adjustment signal, it can drive the cooling chip 122 of the pulse seed laser diode 12 to control the pulse The seed laser diode 12 performs a temperature adjustment (heating or cooling) operation, so that the temperature of the pulsed seed laser diode 12 is automatically adjusted to meet the temperature recorded by the storage unit 111, and then the wavelength is adjusted by the temperature, so that the The pulsed seed laser diode 12 can indeed emit laser light with a predetermined wavelength, so as to avoid affecting the output power of the pulsed seed laser diode 12, thereby achieving laser processing operations (such as industrial, medical, Excitation detection, spectroscopic analysis or plasma dynamics, etc.) output the effect of reliable and stable improvement.

再者,本發明脈衝種子雷射可調波長電路模組1之脈衝種子雷射二極體12包含有熱敏電阻121、致冷晶片122、光電二極體123係為習知既有之技術,所以本發明便可直接利用脈衝種子雷射二極體12本身構造來進行溫度的調整,再藉由溫度使波長調整,藉以使雷射波長穩定,而不須於脈衝種子雷射二極體12上額外設置、設計新的構造、結構才能調整脈衝種子雷射二極體12的溫度,以可供適用市面上多種脈衝種子雷射二極體12,達到具有高適用性,以及降低製造成本、提高經濟成本效益之效用。 Furthermore, the pulse seed laser diode 12 of the pulse seed laser adjustable wavelength circuit module 1 of the present invention includes the thermistor 121 , the cooling chip 122 , and the photodiode 123 , which are known in the prior art. , so the present invention can directly use the structure of the pulse seed laser diode 12 to adjust the temperature, and then adjust the wavelength by the temperature, so as to stabilize the laser wavelength, without the need for the pulse seed laser diode. The temperature of the pulse seed laser diode 12 can be adjusted by additionally setting up and designing new structures and structures on the 12, so as to be applicable to various pulse seed laser diodes 12 on the market, so as to achieve high applicability and reduce manufacturing costs. , Improve the effectiveness of economic cost-effectiveness.

再請參閱第3、4圖所示,係為本發明另一實施例之流程圖(一)及(二),由圖中可清楚看出,本發明之步驟(A)前的校正作業 ,為可依據下列步驟執行: Please refer to Figures 3 and 4, which are flowcharts (1) and (2) of another embodiment of the present invention. It can be clearly seen from the figures that the calibration operation before step (A) of the present invention is , in order to follow the steps below:

(A01)係先通電驅動脈衝種子雷射可調波長電路模組1之脈衝種子雷射二極體12,以使脈衝種子雷射二極體12發射出雷射光線,此時,其脈衝種子雷射二極體12內部之熱敏電阻121即會感測溫度變化而改變電阻值,同時,該熱敏電阻121耦接之訊號轉換電路13便會將熱敏電阻121變化的電阻值轉換成數位訊號,並傳輸至脈衝種子雷射可調波長電路模組1之微處理器11進行解析,以解析出脈衝種子雷射二極體12發射出雷射光線時熱敏電阻121的溫度。 (A01) The pulse seed laser diode 12 of the pulse seed laser adjustable wavelength circuit module 1 is powered on first, so that the pulse seed laser diode 12 emits laser light. The thermistor 121 inside the laser diode 12 will sense the temperature change and change the resistance value. At the same time, the signal conversion circuit 13 coupled to the thermistor 121 will convert the resistance value of the thermistor 121 into The digital signal is transmitted to the microprocessor 11 of the pulse seed laser adjustable wavelength circuit module 1 for analysis, so as to analyze the temperature of the thermistor 121 when the pulse seed laser diode 12 emits laser light.

(A02)再利用外部光譜顯示儀器2(如:光譜分析儀)來量取脈衝種子雷射二極體12內部光電二極體123的電壓,以得知脈衝種子雷射二極體12所發射出雷射光線的波長,若脈衝種子雷射二極體12所發射出雷射光線的波長不符合使用者所設定的預設值,即執行步驟(A03),而若符合預設值,則執行步驟(A05)。 (A02) Then use the external spectrum display device 2 (eg, a spectrum analyzer) to measure the voltage of the photodiode 123 inside the pulsed seed laser diode 12 to know the emitted light of the pulsed seed laser diode 12 The wavelength of the outgoing laser light, if the wavelength of the laser light emitted by the pulsed seed laser diode 12 does not conform to the preset value set by the user, step (A03) is executed, and if it conforms to the preset value, then Step (A05) is performed.

(A03)該脈衝種子雷射可調波長電路模組1之微處理器11即會傳輸電子訊號至溫控器14,以驅動溫控器14傳輸調溫訊號(升溫或降溫)至致冷晶片驅動電路15。 (A03) The microprocessor 11 of the pulsed seed laser tunable wavelength circuit module 1 will transmit an electronic signal to the temperature controller 14 to drive the temperature controller 14 to transmit a temperature regulation signal (heating or cooling) to the cooling chip drive circuit 15 .

(A04)而該致冷晶片驅動電路15接收到調溫訊號後,則會驅動脈衝種子雷射二極體12的致冷晶片122進行調溫作業,以藉由致冷晶片122來改變脈衝種子雷射二極體12的溫度,再藉由溫度使波長調整,直至外部光譜顯示儀器2觀測脈衝種子雷射二極體12所發射出雷射光線的波長符合使用者所設定的預設波長時,再執行步驟(A05)。 (A04) After receiving the temperature adjustment signal, the cooling chip driving circuit 15 drives the cooling chip 122 of the pulse seed laser diode 12 to perform temperature adjustment operation, so as to change the pulse seed by the cooling chip 122 The temperature of the laser diode 12, and then the wavelength is adjusted by the temperature until the wavelength of the laser light emitted by the pulse seed laser diode 12 observed by the external spectrum display instrument 2 conforms to the preset wavelength set by the user , and then execute step (A05).

(A05)該脈衝種子雷射可調波長電路模組1之微處理器 11為可透過儲存單元111來記錄此顆脈衝種子雷射二極體12之波長為符合預設波,藉此完成校正作業,繼續執行步驟(A)。 (A05) The microprocessor of the pulse seed laser tunable wavelength circuit module 1 11 indicates that the wavelength of the pulsed seed laser diode 12 can be recorded through the storage unit 111 to conform to the preset wave, thereby completing the calibration operation, and continuing to execute step (A).

上述步驟(A03)中之溫控器14較佳為可利用手動模式來傳輸調溫訊號,其溫控器14電性連接有可供使用者按壓之升溫調整鈕141及降溫調整鈕142,以可透過按壓升溫調整鈕141或降溫調整鈕142來使溫控器14傳輸升溫或降溫訊號至致冷晶片驅動電路15,進而改變脈衝種子雷射二極體12發射雷射光線時的溫度,再藉由溫度使波長調整,藉此可利用升溫調整鈕141或降溫調整鈕142來將脈衝種子雷射二極體12發射出雷射光線的波長調整至符合預設波長,但於實際應用時,其溫控器14內部或微處理器11內部亦可安裝有溫度校正程式(圖中未示出),以利用溫度校正程式來自動調校脈衝種子雷射二極體12發射雷射光線時的溫度,再藉由溫度使波長調整,進而使脈衝種子雷射二極體12發射出雷射光線的波長自動調整至符合預設波長,即不須以人工方式進行調整,而可減少人力成本。 Preferably, the thermostat 14 in the above step (A03) can transmit the temperature adjustment signal in a manual mode, and the thermostat 14 is electrically connected with a temperature increase adjustment button 141 and a temperature decrease adjustment button 142 that can be pressed by the user, so as to By pressing the heating adjustment button 141 or the cooling adjustment button 142, the temperature controller 14 transmits a heating or cooling signal to the cooling chip driving circuit 15, thereby changing the temperature when the pulsed seed laser diode 12 emits laser light, and then The wavelength is adjusted by the temperature, whereby the heating adjustment knob 141 or the cooling adjustment knob 142 can be used to adjust the wavelength of the laser light emitted by the pulsed seed laser diode 12 to meet the preset wavelength, but in practical application, A temperature correction program (not shown in the figure) can also be installed in the temperature controller 14 or in the microprocessor 11, so as to use the temperature correction program to automatically adjust the temperature when the pulsed seed laser diode 12 emits laser light. Then, the wavelength is adjusted by the temperature, so that the wavelength of the laser light emitted by the pulsed seed laser diode 12 is automatically adjusted to meet the preset wavelength, that is, manual adjustment is not required, and labor costs can be reduced.

是以,以上所述僅為本發明之較佳實施例而已,非因此侷限本發明之專利範圍,本發明為主要針對該脈衝種子雷射可調波長電路模組1之脈衝種子雷射二極體12通電射出雷射光線後,並利用微處理器11來解析脈衝種子雷射二極體12之熱敏電阻121溫度,若解析出的溫度不符校正作業所記錄之溫度時,其微處理器11即會驅動溫控器14來傳輸調溫訊號至致冷晶片驅動電路15,以使致冷晶片驅動電路15接收到調溫訊號後,可驅動脈衝種子雷射二極體12之致冷晶片122來對脈衝種子雷射二極體12進行調溫,使脈衝種子雷射二極體12的溫度調整至符合校正作業所記錄之溫度,再藉由溫度使波長調整,以使脈衝種子雷射二極體12可確實發射出符 合預設波長之雷射光線,進而避免影響脈衝種子雷射二極體12的輸出功率,藉此達到提升雷射加工作業穩定性之效果,故舉凡可達成前述效果之結構、裝置皆應受本發明所涵蓋,此種簡易修飾及等效結構變化,均應同理包含於本發明之專利範圍內,合予陳明。 Therefore, the above descriptions are only the preferred embodiments of the present invention, and do not limit the patent scope of the present invention. The present invention is mainly aimed at the pulse seed laser diode of the pulse seed laser tunable wavelength circuit module 1 After the body 12 is energized to emit laser light, the microprocessor 11 is used to analyze the temperature of the thermistor 121 of the pulse seed laser diode 12. If the analyzed temperature does not match the temperature recorded in the calibration operation, the microprocessor 11 will 11 will drive the temperature controller 14 to transmit the temperature adjustment signal to the cooling chip driving circuit 15, so that the cooling chip driving circuit 15 can drive the cooling chip of the pulse seed laser diode 12 after receiving the temperature adjustment signal 122 to adjust the temperature of the pulse seed laser diode 12, so that the temperature of the pulse seed laser diode 12 is adjusted to meet the temperature recorded in the calibration operation, and then the wavelength is adjusted by the temperature, so that the pulse seed laser The diode 12 can indeed emit a symbol The laser light of the preset wavelength is combined to avoid affecting the output power of the pulsed seed laser diode 12, thereby achieving the effect of improving the stability of the laser processing operation. Therefore, all structures and devices that can achieve the aforementioned effects should be Such simple modifications and equivalent structural changes covered by the present invention should be similarly included in the patent scope of the present invention, and are hereby stated.

綜上所述,本發明上述脈衝種子雷射可調波長電路模組及其波長控制方法於使用時,為確實能達到其功效及目的,故本發明誠為一實用性優異之發明,為符合發明專利之申請要件,爰依法提出申請,盼審委早日賜准本案,以保障發明人之辛苦發明,倘若 鈞局審委有任何稽疑,請不吝來函指示,發明人定當竭力配合,實感德便。 To sum up, the above-mentioned pulse seed laser tunable wavelength circuit module and its wavelength control method of the present invention can truly achieve its effect and purpose when it is used. Therefore, the present invention is an invention with excellent practicability. The application requirements for an invention patent should be filed in accordance with the law. We hope that the review committee will approve the case as soon as possible to protect the inventor's hard work. If the review committee has any doubts, please do not hesitate to send a letter for instructions. The inventor will do his best to cooperate. easy.

1:脈衝種子雷射可調波長電路模組 1: Pulse seed laser adjustable wavelength circuit module

11:微處理器 11: Microprocessor

111:儲存單元 111: Storage unit

12:脈衝種子雷射二極體 12: Pulse Seed Laser Diode

121:熱敏電阻 121: Thermistor

122:致冷晶片 122: Refrigeration wafer

123:光電二極體 123: Photodiode

13:訊號轉換電路 13: Signal conversion circuit

14:溫控器 14: Thermostat

141:升溫調整鈕 141: heating adjustment button

142:降溫調整鈕 142: Cooling adjustment button

15:致冷晶片驅動電路 15: Refrigeration chip drive circuit

2:光譜顯示儀器 2: Spectral display instrument

Claims (7)

一種脈衝種子雷射可調波長電路模組,係設有具儲存單元之微處理器及脈衝種子雷射二極體,其脈衝種子雷射二極體為包括電阻值會隨著溫度變化而改變之熱敏電阻與供調整脈衝種子雷射二極體溫度之致冷晶片,以及將光能轉換成電壓之光電二極體,並於微處理器及熱敏電阻之間耦接有將熱敏電阻變化的電阻值轉換成數位訊號傳輸至微處理器進行解析之訊號轉換電路,且微處理器亦連接有供傳輸調溫訊號之溫控器,而溫控器與脈衝種子雷射二極體的致冷晶片之間耦接有供接收溫控器的調溫訊號,以驅動致冷晶片進行調溫作業之致冷晶片驅動電路。 A pulse seed laser adjustable wavelength circuit module is provided with a microprocessor with a storage unit and a pulse seed laser diode. The pulse seed laser diode includes a resistance value that changes with temperature changes. The thermistor and the cooling chip for adjusting the temperature of the pulse seed laser diode, as well as the photodiode for converting light energy into voltage, are coupled between the microprocessor and the thermistor to thermally The resistance value of the resistance change is converted into a digital signal and transmitted to the signal conversion circuit of the microprocessor for analysis, and the microprocessor is also connected with a temperature controller for transmitting the temperature regulation signal, and the temperature controller and the pulse seed laser diode A cooling chip driving circuit is coupled between the cooling chips for receiving the temperature adjustment signal of the temperature controller to drive the cooling chips to perform the temperature adjustment operation. 如請求項1所述之脈衝種子雷射可調波長電路模組,其中該訊號轉換電路為類比數位轉換器電路。 The pulse seed laser adjustable wavelength circuit module of claim 1, wherein the signal conversion circuit is an analog-to-digital converter circuit. 如請求項1所述之脈衝種子雷射可調波長電路模組,其中該溫控器為電性連接有供按壓升溫調整鈕及降溫調整鈕。 The pulse seed laser adjustable wavelength circuit module as claimed in claim 1, wherein the temperature controller is electrically connected with a heating adjustment button and a cooling adjustment button for pressing. 一種脈衝種子雷射可調波長電路模組之波長控制方法,該脈衝種子雷射可調波長電路模組之脈衝種子雷射二極體為事先進行預設波長的校正作業,以於脈衝種子雷射可調波長電路模組微處理器的儲存單元中記錄有脈衝種子雷射二極體於預設波長時的溫度,再將校正完成之脈衝種子雷射二極體依據下列步驟實施: A wavelength control method for a pulse seed laser adjustable wavelength circuit module, wherein the pulse seed laser diode of the pulse seed laser adjustable wavelength circuit module is calibrated with a preset wavelength in advance, so as to be used in the pulse seed laser. The temperature of the pulse seed laser diode at the preset wavelength is recorded in the storage unit of the microprocessor of the tunable wavelength circuit module, and then the calibrated pulse seed laser diode is implemented according to the following steps: (A)係先通電驅動脈衝種子雷射可調波長電路模組,使脈衝種子雷射二極體發射出雷射光線,此時,該脈衝種子雷射二極體內部 之熱敏電阻即會感測溫度變化而改變電阻值,並可透過熱敏電阻耦接之訊號轉換電路來將熱敏電阻變化的電阻值轉換成數位訊號,再傳輸至脈衝種子雷射可調波長電路模組之微處理器進行解析,藉以解析出脈衝種子雷射二極體發射出雷射光線時,其脈衝種子雷射二極體的溫度; (A) The circuit module of the pulse-seed laser adjustable wavelength is powered on first, so that the pulse-seed laser diode emits laser light. At this time, the inside of the pulse-seed laser diode is The thermistor will sense the temperature change and change the resistance value, and can convert the resistance value changed by the thermistor into a digital signal through the signal conversion circuit coupled with the thermistor, and then transmit it to the pulse seed laser to adjust The microprocessor of the wavelength circuit module performs analysis, so as to analyze the temperature of the pulse seed laser diode when the pulse seed laser diode emits laser light; (B)若脈衝種子雷射可調波長電路模組之微處理器解析出的溫度不等於校正作業時,其儲存單元所記錄之溫度時,即執行步驟(C),而若解析出的溫度等於儲存單元所記錄之溫度,則執行步驟(E); (B) If the temperature analyzed by the microprocessor of the pulsed seed laser adjustable wavelength circuit module is not equal to the temperature recorded by the storage unit during the calibration operation, step (C) is executed, and if the analyzed temperature is equal to the temperature recorded by the storage unit, then perform step (E); (C)該脈衝種子雷射可調波長電路模組之微處理器即會傳輸電子訊號至溫控器,以驅動溫控器傳輸調溫訊號至致冷晶片驅動電路; (C) The microprocessor of the pulse seed laser adjustable wavelength circuit module will transmit electronic signals to the temperature controller, so as to drive the temperature controller to transmit the temperature adjustment signal to the cooling chip driving circuit; (D)而該致冷晶片驅動電路接收到調溫訊號後,則會驅動致冷晶片進行調溫作業,以藉由致冷晶片來將脈衝種子雷射二極體的溫度調整至符合儲存單元所記錄之溫度,便可執行步驟(E); (D) After receiving the temperature adjustment signal, the cooling chip driving circuit will drive the cooling chip to perform the temperature adjustment operation, so as to adjust the temperature of the pulsed seed laser diode to match the storage unit through the cooling chip After the recorded temperature, step (E) can be performed; (E)再藉由溫度使波長調整,其脈衝種子雷射二極體便會發射出符合預設波長之雷射光線。 (E) The wavelength is adjusted by temperature, and the pulsed seed laser diode will emit laser light with a preset wavelength. 如請求項4所述脈衝種子雷射可調波長電路模組之波長控制方法,其中該步驟(A)前的校正作業,為可依據下列步驟執行: The wavelength control method of the pulse seed laser tunable wavelength circuit module according to claim 4, wherein the calibration operation before the step (A) can be performed according to the following steps: (A01)係先通電驅動脈衝種子雷射可調波長電路模組之脈衝種子雷射二極體,以使脈衝種子雷射二極體發射出雷射光線, 此時,其脈衝種子雷射二極體內部之熱敏電即會感測溫度變化而改變電阻值,同時,該熱敏電阻耦接之訊號轉換電路便會將熱敏電阻變化的電阻值轉換成數位訊號,並傳輸至脈衝種子雷射可調波長電路模組之微處理器進行解析,以解析出脈衝種子雷射二極體發射出雷射光線時熱敏電阻的溫度; (A01) The pulse seed laser diode of the pulse seed laser adjustable wavelength circuit module is powered on first, so that the pulse seed laser diode emits laser light, At this time, the thermistor inside the pulse seed laser diode will sense the temperature change and change the resistance value, and at the same time, the signal conversion circuit coupled to the thermistor will convert the resistance value of the thermistor changed. It is converted into a digital signal and transmitted to the microprocessor of the pulse seed laser adjustable wavelength circuit module for analysis, so as to analyze the temperature of the thermistor when the pulse seed laser diode emits laser light; (A02)再利用外部光譜顯示儀器來量取脈衝種子雷射二極體內部光電二極體的電壓,以得知脈衝種子雷射二極體所發射出雷射光線的波長,若脈衝種子雷射二極體所發射出雷射光線的波長不符合使用者所設定的預設值,即執行步驟(A03),而若符合預設值,則執行步驟(A05); (A02) Then use the external spectrum display instrument to measure the voltage of the photodiode inside the pulse seed laser diode to know the wavelength of the laser light emitted by the pulse seed laser diode. If the wavelength of the laser light emitted by the emitter diode does not conform to the preset value set by the user, step (A03) is executed, and if it conforms to the preset value, step (A05) is executed; (A03)該脈衝種子雷射可調波長電路模組之微處理器即會傳輸電子訊號至溫控器,以驅動溫控器傳輸調溫訊號至致冷晶片驅動電路; (A03) The microprocessor of the pulse seed laser adjustable wavelength circuit module will transmit electronic signals to the temperature controller, so as to drive the temperature controller to transmit the temperature adjustment signal to the cooling chip driving circuit; (A04)而該致冷晶片驅動電路接收到調溫訊號後,則會驅動脈衝種子雷射二極體的致冷晶片進行調溫作業,以藉由致冷晶片來改變脈衝種子雷射二極體的溫度,再藉由溫度使波長調整,直至外部光譜顯示儀器觀測脈衝種子雷射二極體所發射出雷射光線的波長符合使用者所設定的預設波長時,再執行步驟(A05); (A04) After receiving the temperature adjustment signal, the cooling chip driving circuit will drive the cooling chip of the pulse seed laser diode to perform temperature adjustment operation, so as to change the pulse seed laser diode by the cooling chip The temperature of the body is adjusted, and the wavelength is adjusted by the temperature until the wavelength of the laser light emitted by the pulsed seed laser diode observed by the external spectrum display instrument conforms to the preset wavelength set by the user, and then the step (A05) is performed. ; (A05)該脈衝種子雷射可調波長電路模組之微處理器為可透過儲 存單元來記錄此顆脈衝種子雷射二極體之波長為符合預設波長,藉此完成校正作業。 (A05) The microprocessor of the pulse seed laser tunable wavelength circuit module is transparent to the storage The storage unit is used to record that the wavelength of the pulsed seed laser diode conforms to the preset wavelength, thereby completing the calibration operation. 如請求項5所述脈衝種子雷射可調波長電路模組之波長控制方法,其中該步驟(A03)中之溫控器為電性連接有供按壓之升溫調整鈕及降溫調整鈕,且按壓升溫調整鈕或降溫調整鈕時,其溫控器會傳輸升溫或降溫訊號至致冷晶片驅動電路。 The wavelength control method of the pulse seed laser adjustable wavelength circuit module according to claim 5, wherein the temperature controller in the step (A03) is electrically connected with a heating adjustment button and a cooling adjustment button for pressing, and pressing When the heating adjustment button or the cooling adjustment button is used, the temperature controller will transmit the heating or cooling signal to the driving circuit of the cooling chip. 如請求項4所述脈衝種子雷射可調波長電路模組之波長控制方法,其中該步驟(A)中之訊號轉換電路為可將電阻變化值轉換成數位訊號之類比數位轉換器電路。 The wavelength control method of the pulse seed laser tunable wavelength circuit module according to claim 4, wherein the signal conversion circuit in the step (A) is an analog-to-digital converter circuit capable of converting the resistance change value into a digital signal.
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WO2004028047A1 (en) * 2002-09-19 2004-04-01 Novera Optics, Inc. Apparatuses and methods for automatic wavelength-locking of an optical transmitter to the wavelength of an injected incoherent light signal
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