TWI757962B - Organic light emitting diode display panel - Google Patents
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本發明是有關於一種顯示面板,且特別是有關於一種有機發光二極體(Organic Light Emitting Diode,OLED)顯示面板。The present invention relates to a display panel, and more particularly, to an organic light emitting diode (Organic Light Emitting Diode, OLED) display panel.
在現有有機發光二極體顯示面板的製造過程中,位在非顯示區內的膜層,例如平坦層,有時具有陡峭的側壁,以至於後續形成於此膜層(例如平坦層)上的光阻層在上述陡峭側壁的底部附近具有偏厚的厚度。如此,在進行曝光期間,位於側壁底部附近的部分光阻層不易完全曝光,造成在顯影後,部分光阻層會殘留在膜層的側壁底部附近而影響到後續製程,導致良率下降。In the manufacturing process of the existing organic light emitting diode display panel, the film layer in the non-display area, such as the flat layer, sometimes has steep sidewalls, so that the subsequent formation on the film layer (such as the flat layer) The photoresist layer has a thicker thickness near the bottom of the above-mentioned steep sidewalls. In this way, during exposure, part of the photoresist layer near the bottom of the sidewall is not easy to be fully exposed, so that after development, part of the photoresist layer will remain near the bottom of the sidewall of the film layer to affect subsequent processes, resulting in a decrease in yield.
本發明至少一實施例提出一種有機發光二極體顯示面板,其所包括的平坦層具有延伸部,而利用此延伸部,有助於降低或避免上述光阻層的殘留。At least one embodiment of the present invention provides an organic light emitting diode display panel, which includes a flat layer with an extension portion, and the use of the extension portion helps to reduce or avoid the residue of the above-mentioned photoresist layer.
本發明另一實施例提出一種有機發光二極體顯示面板,其所包括的鈍化層具有延伸部,而利用此延伸部,有助於降低或避免上述光阻層的殘留。Another embodiment of the present invention provides an organic light emitting diode display panel. The passivation layer includes an extension portion, and the extension portion is used to help reduce or avoid the residue of the photoresist layer.
本發明至少一實施例所提供的有機發光二極體顯示面板包括控制基板、第一平坦層、第二平坦層、絕緣圖案層以及多個發光元件。控制基板具有表面,其中此表面具有顯示區與非顯示區,而非顯示區圍繞顯示區。第一平坦層設置於控制基板的表面上,而第二平坦層設置於第一平坦層上,並包括主體部與延伸部。主體部分佈於顯示區與非顯示區,而延伸部位於非顯示區內,並覆蓋第一平坦層的側表面。延伸部連接主體部,並從主體部沿著控制基板的表面而延伸,其中延伸部相對於控制基板的表面的最大高度小於或等於顯示區內的主體部相對於控制基板的表面的高度。絕緣圖案層設置於第二平坦層上,並具有多個畫素開口,其中絕緣圖案層分佈於顯示區與非顯示區,而這些畫素開口位於顯示區。這些發光元件設置於第二平坦層上,並分別位於這些畫素開口內,其中這些發光元件電性連接控制基板。An organic light emitting diode display panel provided by at least one embodiment of the present invention includes a control substrate, a first planarization layer, a second planarization layer, an insulating pattern layer, and a plurality of light emitting elements. The control substrate has a surface, wherein the surface has a display area and a non-display area, and the non-display area surrounds the display area. The first flat layer is disposed on the surface of the control substrate, and the second flat layer is disposed on the first flat layer and includes a main body portion and an extension portion. The main body part is arranged in the display area and the non-display area, and the extension part is located in the non-display area and covers the side surface of the first flat layer. The extension part is connected to the main body part and extends from the main body part along the surface of the control substrate, wherein the maximum height of the extension part relative to the surface of the control substrate is less than or equal to the height of the main body part in the display area relative to the surface of the control substrate. The insulating pattern layer is disposed on the second flat layer and has a plurality of pixel openings, wherein the insulating pattern layer is distributed in the display area and the non-display area, and the pixel openings are located in the display area. The light-emitting elements are disposed on the second flat layer and respectively located in the pixel openings, wherein the light-emitting elements are electrically connected to the control substrate.
在本發明至少一實施例中,上述有機發光二極體顯示面板還包括導電層。導電層設置於絕緣圖案層與第二平坦層上,並覆蓋這些發光元件,其中絕緣圖案層更具有位於非顯示區的第一側壁,而導電層覆蓋第一側壁。第二平坦層的主體部具有凸部,而凸部具有第一頂面,其中第一側壁位於第一頂面上,且第一頂面與第一側壁之間的夾角大於90度。此外,上述夾角可介於120度至160度之間。In at least one embodiment of the present invention, the above-mentioned organic light emitting diode display panel further includes a conductive layer. The conductive layer is disposed on the insulating pattern layer and the second flat layer and covers the light-emitting elements, wherein the insulating pattern layer further has a first sidewall located in the non-display area, and the conductive layer covers the first sidewall. The main body portion of the second flat layer has a convex portion, and the convex portion has a first top surface, wherein the first side wall is located on the first top surface, and the included angle between the first top surface and the first side wall is greater than 90 degrees. In addition, the above-mentioned included angle may be between 120 degrees and 160 degrees.
本發明另一實施例所提供的有機發光二極體顯示面板包括控制基板、鈍化層、絕緣圖案層以及多個發光元件。控制基板具有表面,其中此表面具有顯示區與非顯示區,而非顯示區圍繞顯示區。鈍化層設置於控制基板的表面上,並包括主體部與延伸部。主體部分佈於顯示區與非顯示區,而延伸部位於非顯示區內,並連接主體部,其中延伸部從主體部沿著控制基板的表面而延伸,而延伸部相對於控制基板的表面的最大高度小於或等於顯示區內的主體部相對於控制基板的表面的高度。絕緣圖案層設置於鈍化層上,並具有多個畫素開口,其中絕緣圖案層分佈於顯示區與非顯示區,而這些畫素開口位於顯示區。這些發光元件設置於鈍化層上,並分別位於這些畫素開口內,其中這些發光元件電性連接該控制基板。An organic light emitting diode display panel provided by another embodiment of the present invention includes a control substrate, a passivation layer, an insulating pattern layer, and a plurality of light emitting elements. The control substrate has a surface, wherein the surface has a display area and a non-display area, and the non-display area surrounds the display area. The passivation layer is disposed on the surface of the control substrate and includes a main body part and an extension part. The main body part is distributed in the display area and the non-display area, and the extension part is located in the non-display area and connected to the main body part, wherein the extension part extends from the main body part along the surface of the control substrate, and the extension part is opposite to the surface of the control substrate. The maximum height is less than or equal to the height of the main body portion within the display area relative to the surface of the control substrate. The insulating pattern layer is disposed on the passivation layer and has a plurality of pixel openings, wherein the insulating pattern layer is distributed in the display area and the non-display area, and the pixel openings are located in the display area. The light-emitting elements are disposed on the passivation layer and respectively located in the pixel openings, wherein the light-emitting elements are electrically connected to the control substrate.
在本發明至少一實施例中,上述有機發光二極體顯示面板還包括導電層。導電層設置於絕緣圖案層與鈍化層上,並覆蓋這些發光元件,其中絕緣圖案層更具有位於非顯示區的第一側壁,而導電層覆蓋第一側壁。鈍化層的主體部具有凸部,而凸部具有第一頂面,其中第一側壁位於第一頂面上,且第一頂面與第一側壁之間的夾角大於90度。此外,上述夾角可介於120度至160度之間。In at least one embodiment of the present invention, the above-mentioned organic light emitting diode display panel further includes a conductive layer. The conductive layer is disposed on the insulating pattern layer and the passivation layer and covers the light-emitting elements, wherein the insulating pattern layer further has a first sidewall located in the non-display area, and the conductive layer covers the first sidewall. The main body portion of the passivation layer has a convex portion, and the convex portion has a first top surface, wherein the first sidewall is located on the first top surface, and the included angle between the first top surface and the first sidewall is greater than 90 degrees. In addition, the above-mentioned included angle may be between 120 degrees and 160 degrees.
在本發明至少一實施例中,上述主體部還具有多個環形墊部與多個凹槽,而各個環形墊部圍繞其中一個凹槽,並凸出於凹槽的底部。各個環形墊部具有第二頂面,而各個畫素開口具有第二側壁,其中這些第二側壁分別位於這些第二頂面上,而各個發光元件覆蓋其中一個環形墊部的第二頂面。In at least one embodiment of the present invention, the main body further has a plurality of annular pads and a plurality of grooves, and each annular pad surrounds one of the grooves and protrudes from the bottom of the groove. Each annular pad has a second top surface, and each pixel opening has a second sidewall, wherein the second sidewalls are respectively located on the second top surfaces, and each light-emitting element covers the second top surface of one of the annular pads.
在本發明至少一實施例中,上述延伸部具有斜面,而斜面相對於控制基板的表面的高度從主體部朝向遠離顯示區的方向而遞減。In at least one embodiment of the present invention, the extension portion has an inclined surface, and the height of the inclined surface relative to the surface of the control substrate decreases from the main body portion toward the direction away from the display area.
在本發明至少一實施例中,上述主體部具有上表面,其中此上表面連接斜面,而斜面與上表面之間的角度介於120度至160度之間。In at least one embodiment of the present invention, the main body portion has an upper surface, wherein the upper surface is connected to the inclined surface, and the angle between the inclined surface and the upper surface is between 120 degrees and 160 degrees.
基於上述,延伸部能幫助減少在膜層的側壁底部附近(例如在第一平坦層的側表面與控制基板的表面之間的角落附近,或是在延伸部的斜面底部附近)的光阻層厚度,讓光阻層能完全曝光,以減少或避免顯影後的光阻層殘留,從而有助於提升良率。Based on the above, the extension can help reduce the photoresist layer near the bottom of the sidewall of the film layer (for example, near the corner between the side surface of the first planar layer and the surface of the control substrate, or near the bottom of the bevel of the extension). Thickness, so that the photoresist layer can be fully exposed to reduce or avoid the photoresist layer residue after development, which helps to improve the yield.
在以下的內文中,為了清楚呈現本案的技術特徵,圖式中的元件(例如層、膜、基板以及區域等)的尺寸(例如長度、寬度、厚度與深度)會以不等比例的方式放大。因此,下文實施例的說明與解釋不受限於圖式中的元件所呈現的尺寸與形狀,而應涵蓋如實際製程及/或公差所導致的尺寸、形狀以及兩者的偏差。例如,圖式所示的平坦表面可以具有粗糙及/或非線性的特徵,而圖式所示的銳角可以是圓的。所以,本案圖式所呈示的元件主要是用於示意,並非旨在精準地描繪出元件的實際形狀,也非用於限制本案的申請專利範圍。In the following text, the dimensions (such as length, width, thickness and depth) of elements (such as layers, films, substrates and regions, etc.) in the drawings are exaggerated in unequal proportions in order to clearly present the technical features of the present application. . Therefore, the descriptions and explanations of the following embodiments are not limited to the dimensions and shapes of the elements in the drawings, but should cover the dimensions, shapes and deviations caused by actual manufacturing processes and/or tolerances. For example, the flat surfaces shown in the figures may have rough and/or non-linear features, while the acute angles shown in the figures may be rounded. Therefore, the elements shown in the drawings in this application are mainly for illustration, and are not intended to accurately depict the actual shapes of the elements, nor are they intended to limit the scope of the patent application of this application.
其次,本案內容中所出現的「約」、「近似」或「實質上」等這類用字不僅涵蓋明確記載的數值與數值範圍,而且也涵蓋發明所屬技術領域中具有通常知識者所能理解的可允許偏差範圍,其中此偏差範圍可由測量時所產生的誤差來決定,而此誤差例如是起因於測量系統或製程條件兩者的限制。此外,「約」可表示在上述數值的一個或多個標準偏差內,例如±30%、±20%、±10%或±5%內。本案文中所出現的「約」、「近似」或「實質上」等這類用字可依光學性質、蝕刻性質、機械性質或其他性質來選擇可以接受的偏差範圍或標準偏差,並非單以一個標準偏差來套用以上光學性質、蝕刻性質、機械性質以及其他性質等所有性質。Secondly, words such as "about", "approximately" or "substantially" appearing in the content of this case not only cover the clearly stated numerical value and numerical value range, but also cover the understanding of those with ordinary knowledge in the technical field to which the invention belongs. The allowable deviation range of , wherein the deviation range can be determined by the error generated during measurement, for example, the error is caused by the limitations of both the measurement system or the process conditions. Further, "about" can mean within one or more standard deviations of the above-mentioned numerical value, eg, within ±30%, ±20%, ±10%, or ±5%. Words such as "about", "approximately" or "substantially" appearing in this text may be used to select acceptable ranges or standard deviations based on optical properties, etching properties, mechanical properties or other properties, not a single Standard deviation to apply all of the above optical, etch, mechanical and other properties.
圖1A是本發明至少一實施例的有機發光二極體顯示面板的剖面示意圖。請參閱圖1A,有機發光二極體顯示面板100包括控制基板150,其中控制基板150可以包括支撐基板151、畫素陣列層152以及絕緣層153。支撐基板151可以是玻璃板或透明塑膠基板,其中上述透明塑膠基板可以是由聚甲基丙烯酸甲酯(Poly(methyl methacrylate),PMMA,即壓克力,Acrylic)或聚醯亞胺(Polyimide,PI)製成。支撐基板151可以是剛性基板(rigid substrate)或可撓性機板(flexible substrate)。換句話說,有機發光二極體顯示面板100可以是不具可撓性的顯示面板或是可撓式顯示面板。1A is a schematic cross-sectional view of an organic light emitting diode display panel according to at least one embodiment of the present invention. Referring to FIG. 1A , the organic light emitting
畫素陣列層152與絕緣層153皆設置在支撐基板151上,其中畫素陣列層152位於絕緣層153與支撐基板151之間,而絕緣層153例如是無機阻隔鈍化層(Inorganic Barrier Passivation Layer,IOBP Layer)。畫素陣列層152具有多個控制元件T15(圖1A僅繪示一個)。具體而言,畫素陣列層152為多層膜,並包括多層金屬層、多層絕緣層與半導體圖案層(皆未繪示)。這些金屬層、這些絕緣層與半導體圖案層彼此堆疊而形成這些控制元件T15,其中控制元件T15可以是電晶體,例如薄膜電晶體(Thin Film Transistor,TFT)。The
有機發光二極體顯示面板100還包括第一平坦層110與第二平坦層120。第一平坦層110與第二平坦層120皆為絕緣層,並且可以是圖案化光阻層,其中第一平坦層110與第二平坦層120兩者構成材料可以彼此相同或不同。第一平坦層110與第二平坦層120皆設置在控制基板150上。控制基板150具有表面153s。以圖1A為例,表面153s可以是絕緣層153的上表面,其中第一平坦層110設置於控制基板150的表面153s上,而第二平坦層120設置於第一平坦層110上。The organic light emitting
控制基板150的表面153s具有顯示區A15與非顯示區N15。非顯示區N15位於顯示區A15的周圍,並圍繞顯示區A15。第一平坦層110與第二平坦層120不僅分佈於顯示區A15,而且還分佈於非顯示區N15。第二平坦層120包括延伸部121與主體部122,其中延伸部121連接主體部122,並從主體部122沿著表面153s而延伸。主體部122分佈於顯示區A15與非顯示區N15,而延伸部121位於非顯示區N15內,並且僅分佈於非顯示區N15內,不分佈於顯示區A15內。The
延伸部121覆蓋第一平坦層110的側表面111,因此延伸部121會凸出於第一平坦層110的邊緣。此外,延伸部121相對於控制基板150表面153s的最大高度H12a小於或等於顯示區A15內的主體部122相對於表面153s的高度H12b,而延伸部121相對於表面153s的平均高度會小於顯示區A15內的主體部122相對於表面153s的平均高度。The
延伸部121具有斜面121s。從圖1A來看,斜面121s相對於表面153s的高度是從主體部122朝向遠離顯示區A15的方向而遞減,其中斜面121s可以是曲面(如圖1A所示)或平面。主體部122具有連接斜面121s的上表面122u,而斜面121s與上表面122u之間的角度A12可以介於120度至160度之間。然而,角度A12不以此前述範圍為限制。此外,延伸部121與主體部122可以是由同一層光阻經曝光與顯影而形成,其中延伸部121可以利用具有半透光區域的光罩來形成,而此種具有半透光區域的光罩例如是半調式光罩(half-tone mask)或灰階光罩(gray tone mask)。The
有機發光二極體顯示面板100還包括絕緣圖案層130,其中絕緣圖案層130設置於第二平坦層120上,並且分佈於顯示區A15與非顯示區N15。絕緣圖案層130具有多個畫素開口131(圖1A僅繪示一個),其中這些畫素開口131位於顯示區A15,但是可以不位於非顯示區N15。這些畫素開口131是貫穿絕緣圖案層130而形成,所以各個畫素開口131底下的第二平坦層120不會被絕緣圖案層130覆蓋。The organic light emitting
絕緣圖案層130更具有位於非顯示區N15的第一側壁133,而第二平坦層120的主體部122具有凸部122p,其中凸部122p具有第一頂面U1,而第一側壁133位於第一頂面U1上。第一頂面U1與第一側壁133實質上並不垂直,而且第一頂面U1與第一側壁133之間的夾角A23大於90度,例如介於120度至160度之間。由於夾角A23可介於120度至160度之間,因此第一側壁133可為平緩的斜面。The insulating
有機發光二極體顯示面板100還包括多個發光元件140,其中這些發光元件140設置於第二平坦層120的主體部122上,並分別位於這些畫素開口131內。在本實施例中,各個發光元件140為有機發光二極體元件(OLED Component),並包括導電層141與發光層142,其中導電層141可以是金屬層或透明導電層,而發光層142包括多個有機半導體層。上述透明導電層的材料例如是氧化銦錫(Indium Tin Oxide,ITO)或氧化銦鋅(Indium Zinc Oxide,IZO)等透明金屬氧化物。The organic light emitting
這些發光元件140電性連接控制基板150。以圖1A為例,控制基板150的這些控制元件T15可以利用多個接觸窗C11來連接發光元件140的導電層141,以使這些發光元件140電性連接控制基板150,其中接觸窗C11可為金屬柱,而接觸窗C11的材料可相同於導電層141的材料。這些控制元件T15能控制輸入至這些發光元件140的電能,以控制這些發光元件140發光。The light-emitting
另外,有機發光二極體顯示面板100可以還包括導電層160。導電層160設置於絕緣圖案層130與第二平坦層120上,並且覆蓋這些發光元件140、第二平坦層120的主體部122以及絕緣圖案層130,其中導電層160分佈於顯示區A15與非顯示區N15,並且覆蓋絕緣圖案層130的第一側壁133。In addition, the organic light emitting
導電層160可以是金屬層或上述透明導電層,並可利用物理氣相沉積(Physical vapor deposition,PVD)來形成,其中物理氣相沉積例如是濺鍍或蒸鍍。由於第一側壁133為平緩的斜面,因此形成於第一側壁133上的導電層160不是處於陡峭的斜面上,以使位在第一側壁133與第一頂面U1之間角落處的導電層160不易斷裂,進而有助於提升有機發光二極體顯示面板100的良率。The
導電層160電性連接這些發光元件140,而發光層142位於導電層141與160之間。當發光元件140為有機發光二極體時,導電層141與160可以分別作為發光元件140的陽極與陰極。畫素陣列層152可具有共用接墊152p,而導電層160可經由至少一個接觸孔H10連接共用接墊152p,以使導電層160電性連接共用接墊152p,其中共用接墊152p可接地。此外,有機發光二極體顯示面板100還可包括覆蓋層(capping layer)170,其中覆蓋層170可以覆蓋導電層160,如圖1A所示。The
在本實施例中,有機發光二極體顯示面板100可以還包括導電層141a,其中導電層141a的一部分形成於主體部122上,而導電層141a的另一部分則形成於接觸孔H10內。導電層141a可以覆蓋凸部122p,並從凸部122p沿著主體部122上表面122u而延伸至接觸孔H10的側壁與底部,如圖1A所示。In this embodiment, the organic light emitting
這些導電層141與141a可以是由同一層導電層經微影與蝕刻而形成,其中微影包括曝光與顯影。換句話說,這些導電層141與141a可以利用作為遮罩的圖案化光阻層進行蝕刻而形成。在本實施例中,延伸部121覆蓋第一平坦層110的側表面111,並從主體部122沿著控制基板150的表面153s而延伸,以使延伸部121能填入位於側表面111與表面153s之間的角落。The
因此,在形成導電層141與141a的過程中,延伸部121能減少尚未曝光的光阻層在側表面111底部附近(即側表面111與表面153s之間的角落附近,或是延伸部121的斜面121s底部附近)的厚度,以使在曝光期間,位於側表面111底部附近的光阻層可完全曝光,從而在顯影之後,減少或避免圖案化光阻層殘留在延伸部121上。如此,原本位延伸部121上的部分導電層不會被圖案化光阻層遮蓋而能被蝕刻移除,以使導電層141a不覆蓋延伸部121,降低或避免導電層141a發生短路。Therefore, in the process of forming the
圖1B是圖1A中的有機發光二極體顯示面板在其中一個畫素開口處的局部俯視示意圖,其中圖1B所示的有機發光二極體顯示面板100是在省略導電層160、覆蓋層170與發光層142的情況下而繪示,而圖1A是沿著圖1B中的線1A-1A剖面而繪製。請參閱圖1A與圖1B,主體部122還具有多個環形墊部122r與多個凹槽R12。各個環形墊部122r圍繞其中一個凹槽R12,並凸出於凹槽R12的底部。各個環形墊部122r具有第二頂面U2,而各個畫素開口131具有第二側壁134,其中這些第二側壁134分別位於這些第二頂面U2上,而各個發光元件140覆蓋其中一個環形墊部122r的第二頂面U2。1B is a partial top view of the organic light emitting diode display panel in FIG. 1A at one of the pixel openings, wherein the organic light emitting
這些發光元件140的發光層142可以利用噴墨方式來形成,所以這些發光層142可以是由液態油墨所形成。在形成發光層142的過程中,發光層142會附著於絕緣圖案層130的第二側壁134,所以發光層142具有呈現凹面形狀的上表面142u,如圖1A所示。換句話說,在同一個發光層142中,上表面142u周圍區域的高度會高於上表面142u中央區域的高度。The light-emitting
由於環形墊部122r凸出於凹槽R12的底部,而畫素開口131的第二側壁134位於第二頂面U2上,因此位於邊緣部分的發光層142會覆蓋高度較高的第二頂面U2,而位於中央部分的發光層142會覆蓋位於凹槽R12底部且高度較低的導電層141。因此,縱使發光層142上表面142u周圍區域的高度高於上表面142u中央區域的高度,發光層142在邊緣部分的厚度與在中央部分的厚度不會差異太大,從而有助於發光元件140的亮度均勻。Since the
另外,須說明的是,在本實施例中,發光層142可以利用噴墨方式來形成,但在其他實施例中,發光層142也可以利用物理氣相沉積(PVD),例如蒸鍍,來形成。所以,發光層142不限制只用噴墨方式來形成。In addition, it should be noted that, in this embodiment, the light-emitting
圖2是本發明另一實施例的有機發光二極體顯示面板的剖面示意圖。請參閱圖2,圖2實施例的有機發光二極體顯示面板200與圖1A實施例的有機發光二極體顯示面板100相似。舉例而言,有機發光二極體顯示面板100與200兩者具有相同的功效,也包括一些相同的元件,例如控制基板150、絕緣圖案層130、發光元件140、導電層160、141a以及覆蓋層170。2 is a schematic cross-sectional view of an organic light emitting diode display panel according to another embodiment of the present invention. Please refer to FIG. 2 , the organic light emitting
有機發光二極體顯示面板100與200兩者之間的差異僅在於:有機發光二極體顯示面板200包括鈍化層210,但不包括第一平坦層110與第二平坦層120,其中鈍化層210可由單一層光阻層經曝光與顯影而形成,而此曝光可利用具有半透光區域的光罩來進行,例如半調式光罩或灰階光罩。因此,圖2所示的有機發光二極體顯示面板200基本上是以鈍化層210取代圖1A中的第一平坦層110與第二平坦層120而實現,而鈍化層210相似於第一平坦層110與第二平坦層120。The only difference between the organic light emitting
具體而言,絕緣圖案層130、多個發光元件140與導電層160皆設置於鈍化層210上,而鈍化層210設置於控制基板150的表面153s上,並包括主體部212以及連接主體部212的延伸部211。主體部212分佈於顯示區A15與非顯示區N15,而延伸部211位於非顯示區N15內,但不分佈於顯示區A15,其中延伸部211從主體部212沿著表面153s而延伸。其次,與前述實施例相似,延伸部211也具有最大高度H12a,而主體部212也具有高度H12b,其中最大高度H12a小於或等於高度H12b。Specifically, the insulating
此外,鈍化層210的延伸部211也具有斜面211s,而斜面211s相對於表面153s的高度從主體部212朝向遠離顯示區A15的方向而遞減,如圖2所示。主體部212的上表面212u連接斜面211s,而斜面211s與上表面212u之間的角度A22範圍可相同於圖1A中的角度A12範圍。此外,鈍化層210的主體部212也具有凸部122p、多個環形墊部122r與多個凹槽R12,因此凸部122p的第一頂面U1與絕緣圖案層130的第一側壁133之間也會形成夾角A23。In addition, the extending
因此,鈍化層210的表面形貌(topography)相似於第二平坦層120的表面形貌,而圖2所示的鈍化層210實質上等同於一體成型(be integrally formed into one)圖1A中的第一平坦層110與第二平坦層120。例如,當圖1A中的第一平坦層110與第二平坦層120是由單一層光阻層經曝光與顯影而形成時,第一平坦層110與第二平坦層120為一體成型,即第一平坦層110與第二平坦層120之間沒有明顯可分辨的接縫(seam)或邊界(boundary),而一體成型的第一平坦層110與第二平坦層120實質上可為圖2中的鈍化層210。Therefore, the topography of the
綜上所述,利用上述延伸部,可以減少光阻層在角落處(例如在第一平坦層的側表面與控制基板的表面之間的角落附近,或是在延伸部的斜面底部附近)的厚度,以使光阻層能完全曝光,減少或避免顯影後的光阻層殘留,從而有助於提升良率。To sum up, by using the above extension, the photoresist layer can be reduced at corners (for example, near the corner between the side surface of the first flat layer and the surface of the control substrate, or near the bottom of the inclined plane of the extension). Thickness, so that the photoresist layer can be fully exposed, reducing or avoiding the residue of the photoresist layer after development, which helps to improve the yield.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,本發明所屬技術領域中具有通常知識者,在不脫離本發明精神和範圍內,當可作些許更動與潤飾,因此本發明保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed above by the embodiments, it is not intended to limit the present invention. Those with ordinary knowledge in the technical field to which the present invention pertains can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the invention shall be determined by the scope of the appended patent application.
100、200:有機發光二極體顯示面板
110:第一平坦層
111:側表面
120:第二平坦層
121、211:延伸部
121s、211s:斜面
122、212:主體部
122p:凸部
122u、142u、212u:上表面
122r:環形墊部
130:絕緣圖案層
131:畫素開口
133:第一側壁
134:第二側壁
140:發光元件
141、141a、160:導電層
142:發光層
150:控制基板
151:支撐基板
152:畫素陣列層
152p:共用接墊
153:絕緣層
153s:表面
170:覆蓋層
210:鈍化層
A12、A22:角度
A15:顯示區
A23:夾角
C11:接觸窗
H10:接觸孔
H12a:最大高度
H12b:高度
N15:非顯示區
R12:凹槽
T15:控制元件
U1:第一頂面
U2:第二頂面
100, 200: organic light emitting diode display panel
110: First flat layer
111: side surface
120: Second
圖1A是本發明至少一實施例的有機發光二極體顯示面板的剖面示意圖。 圖1B是圖1A中的有機發光二極體顯示面板在其中一個畫素開口處的局部俯視示意圖。 圖2是本發明另一實施例的有機發光二極體顯示面板的剖面示意圖。 1A is a schematic cross-sectional view of an organic light emitting diode display panel according to at least one embodiment of the present invention. FIG. 1B is a partial top view of the organic light emitting diode display panel in FIG. 1A at one of the pixel openings. 2 is a schematic cross-sectional view of an organic light emitting diode display panel according to another embodiment of the present invention.
100:有機發光二極體顯示面板 100: Organic Light Emitting Diode Display Panel
110:第一平坦層 110: First flat layer
111:側表面 111: side surface
120:第二平坦層 120: Second flat layer
121:延伸部 121: Extensions
121s:斜面 121s: Bevel
122:主體部 122: main body
122p:凸部 122p: convex part
122u、142u:上表面 122u, 142u: upper surface
122r:環形墊部 122r: Ring pad
130:絕緣圖案層 130: insulating pattern layer
131:畫素開口 131: Pixel opening
133:第一側壁 133: First side wall
134:第二側壁 134: Second side wall
140:發光元件 140: Light-emitting element
141、141a、160:導電層 141, 141a, 160: Conductive layer
142:發光層 142: Light-emitting layer
150:控制基板 150: Control substrate
151:支撐基板 151: Support substrate
152:畫素陣列層 152: Pixel Array Layer
152p:共用接墊 152p: common pad
153:絕緣層 153: Insulation layer
153s:表面 153s: Surface
170:覆蓋層 170: Overlay
A12:角度 A12: Angle
A15:顯示區 A15: Display area
A23:夾角 A23: Angle
C11:接觸窗 C11: Contact window
H10:接觸孔 H10: Contact hole
H12a:最大高度 H12a: Maximum height
H12b:高度 H12b: height
N15:非顯示區 N15: Non-display area
R12:凹槽 R12: groove
T15:控制元件 T15: Control element
U1:第一頂面 U1: First top surface
U2:第二頂面 U2: Second top surface
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Citations (3)
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US20180151838A1 (en) * | 2016-11-29 | 2018-05-31 | Lg Display Co., Ltd. | Organic light-emitting display device |
TW201929283A (en) * | 2017-12-27 | 2019-07-16 | 南韓商樂金顯示科技股份有限公司 | Top-emissive organic light-emitting diode display |
CN110808340A (en) * | 2019-11-14 | 2020-02-18 | 京东方科技集团股份有限公司 | Display substrate, manufacturing method thereof and display device |
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US20180151838A1 (en) * | 2016-11-29 | 2018-05-31 | Lg Display Co., Ltd. | Organic light-emitting display device |
TW201929283A (en) * | 2017-12-27 | 2019-07-16 | 南韓商樂金顯示科技股份有限公司 | Top-emissive organic light-emitting diode display |
CN110808340A (en) * | 2019-11-14 | 2020-02-18 | 京东方科技集团股份有限公司 | Display substrate, manufacturing method thereof and display device |
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