TWI757158B - High efficiency turbomolecular pump device - Google Patents

Abstract

A high efficiency turbomolecular pump device is provided, and includes a housing, a stator element, a rotor element and a heater. The housing has a chamber and a gas discharge port in communication with the chamber. The stator element is disposed in the chamber, and includes a gas guiding ring. The rotor element is disposed in the chamber and corresponds in position to the stator element. The rotor element includes a rotor base, and the rotor base and the gas guiding ring has a gap channel therebetween. The heater is disposed on the gas guiding ring, and is configured to allow the gap channel to have a plurality of temperature sections. The temperature sections include a first temperature section that has a temperature between 60℃ and 80℃.

Description

High-efficiency turbomolecular pump device

The invention relates to a vacuum pumping device, in particular to a high-efficiency turbo molecular pump device.

As the size of components continues to shrink and semiconductor technology continues to develop in the direction of smaller line width and higher density, semiconductor processes such as thin film deposition, dry etching, etc. need to be carried out in a low-pressure vacuum environment, making turbomolecular pumps in the electronic semiconductor industry. applications are becoming more and more widespread.

However, when the turbomolecular pump is used to evacuate the semiconductor process chamber, dust, particles or other suspended matter entrained in the process gas will enter the turbomolecular pump and deposit at the exhaust port at a lower ambient temperature and the end of the gas flow path. And once the amount of deposits is too large, the gas flow path may be blocked and the vacuum cannot be successfully evacuated. In order to solve this problem, most manufacturers use heating methods to slow down the formation of deposits. The specific method is to install a heater outside the pump body (such as outside the maglev bearing seat) to improve the semiconductor process cavity by heating from the outside of the pump body. ambient temperature.

Although the above method solves the blockage problem of the gas flow path, it still has the following shortcomings: 1. The heating rate is slow; 2. The heat loss is serious and energy consumption; 3. The precision electrical components may fail due to prolonged exposure to high temperature heating .

The technical problem to be solved by the present invention is to provide a high-efficiency turbomolecular pump device in view of the deficiencies of the prior art, which can reduce energy loss and loss during heat transfer, and can operate normally for a long time.

In order to solve the above technical problems, one of the technical solutions adopted by the present invention is to provide a high-efficiency turbomolecular pump device, which includes a casing structure, a stator element, a rotor element and a heater. The housing structure has a cavity and an exhaust port communicating with the cavity; the stator element is arranged in the cavity, wherein the stator element includes an air guide ring; the rotor element is arranged in the a position in the cavity corresponding to the stator element, wherein the rotor element comprises a rotor base, and there is a gas channel between the rotor base and the gas guide ring; the heater is arranged in the On the gas guide ring, wherein the heater is configured so that the gas channel has a plurality of temperature sections, and the plurality of temperature sections include a first temperature section near the exhaust port, the temperature of which is 60°C to 80°C.

In an embodiment of the present invention, the casing structure includes an upper casing and a lower casing, and the upper casing and the lower casing are integrated into one body. The air guide ring is assembled to the lower casing, and the position of the air guide ring corresponds to the rotor base.

In an embodiment of the present invention, a positioning structure is provided between a part of the gas guide ring and the lower casing.

In an embodiment of the present invention, the air guide ring includes a support portion and a main body portion, the main body portion is integrally formed on the support portion and surrounds the rotor base, and the positioning structure is disposed at between the support part and the lower case or between the main body part and the lower case.

In an embodiment of the present invention, the positioning structure includes one or more buffer pads.

In an embodiment of the present invention, the heater is a belt heater, and the heater is built in the air guide ring.

In an embodiment of the present invention, the turbomolecular pump device further includes a temperature sensor, and the temperature sensor is configured to detect a temperature state of the first temperature section.

In an embodiment of the present invention, the temperature sensor is disposed near the heater.

In an embodiment of the present invention, the plurality of temperature sections further include a second temperature section away from the exhaust port and located between the first temperature section and the second temperature section a third temperature zone, the preset temperature of the second temperature zone is 60°C to 80°C, and the preset temperature of the third temperature zone is 70°C to 90°C.

In an embodiment of the present invention, the turbomolecular pump device further includes a controller electrically connected to the heater to control a heating temperature and/or a heating range of the heater .

One of the beneficial effects of the present invention is that the turbomolecular pump device of the present invention can be disposed on the gas guide ring through a heater, and is configured so that the gas passage between the rotor base and the gas guide ring has multiple A temperature zone, including a first temperature zone near the exhaust port with a temperature of 60°C to 80°C” technical means to greatly improve the heat supply efficiency while avoiding the derivatives of the semiconductor process in the gas channel Accumulation occurs and affects the vacuuming efficiency. Moreover, the turbomolecular pump device of the present invention can reach the optimum operating state in a relatively short period of time.

Furthermore, the turbomolecular pump device of the present invention can not only prolong the maintenance period, but also avoid the failure of the magnetic bearing due to long-term high temperature heating.

For a further understanding of the features and technical content of the present invention, please refer to the following detailed descriptions and drawings of the present invention. However, the drawings provided are only for reference and description, and are not intended to limit the present invention.

Since the working efficiency of the turbomolecular pump may have a negative impact on product yield and economic benefits, the present invention provides a high-efficiency turbomolecular pump device. This turbo molecular pump device installs the heater at a specific position inside the pump, which can reduce energy loss and loss in the process of heat transfer, and avoid the failure of precision electrical components due to long-term high-temperature heating.

The following are specific examples to illustrate the embodiments of the “high-efficiency turbomolecular pump device” disclosed in the present invention, and those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are merely schematic illustrations, and are not drawn according to the actual size, and are stated in advance. The following embodiments will further describe the related technical contents of the present invention in detail, but the disclosed contents are not intended to limit the protection scope of the present invention. In addition, the term "or", as used herein, should include any one or a combination of more of the associated listed items, as the case may be.

Please refer to FIGS. 1 to 3 . FIG. 1 shows the main components of the turbomolecular pump device of the present invention, and FIGS. 2 and 3 show the structure of the turbomolecular pump device of the present invention. As shown in the above drawings, the turbomolecular pump device Z of the present invention mainly includes a pump main body 1 and a controller 2 for controlling the operating state of the pump main body 1, wherein the pump main body 1 includes a casing structure 11, a rotor Element 12 , stator element 13 , a heater 14 and a driver 15 . The housing structure 11 has a chamber 110 in a sealed state and an exhaust port 112 communicating with the chamber 110; the rotor element 12 and the stator element 13 are arranged in the chamber 110, and their positions correspond to each other, wherein the rotor element There is a gas channel G between 12 and the stator element 13 to guide the gas to the exhaust port 112; the heater 14 is arranged on the stator element 13 to make the gas channel G in a specific thermal environment, wherein the heat The environment has a temperature gradient distribution; the driver 15 is arranged in the chamber 110 to drive the rotor element 12 to rotate at high speed relative to the stator element 13 .

In use, the turbomolecular pump device Z can be communicated with a process chamber (not shown in the figure) through an isolation valve, wherein the controller 2 is electrically connected to the heater 14 and the driver 15, and the controller 2 can activate the heater 14 and Make it reach the target heating temperature, and make the driver 15 drive the rotor element 12 and make it reach the target speed; in this way, the turbomolecular pump device Z enters the normal operation mode, and the process chamber can be evacuated to a target vacuum degree . The controller 2 may be any kind of processor or programmable circuit, but is not limited thereto.

It is worth mentioning that the heater 14 may be configured so that the gas passage G has a plurality of temperature zones with different ambient temperatures, wherein the temperature zone closest to the exhaust port 112 has a temperature of 60°C to 80°C. In this way, derivatives of the semiconductor process, such as the products generated by the reactants and the etched objects in the dry etching process, can be prevented from accumulating in the gas channel to hinder the flow of the gas, and the precision electrical components can be prevented from being damaged for a long time. Failure to withstand high temperature heating.

As shown in FIG. 2 and FIG. 3 , in this embodiment, the casing structure 11 includes an upper casing 11 a and a lower casing 11 b, which can be integrated into one body by means of locking. The upper casing 11a and the lower casing 11b are each substantially cylindrical, and together form a chamber 110, wherein the upper casing 11a defines an upstream area of the chamber 110, and the upper casing 11a has a connection with the chamber. An air inlet 111, the lower casing 11b defines a downstream area of the chamber 110, and the lower casing 11b has an exhaust port 112 communicating with the chamber. The above description is only a feasible implementation manner, and is not intended to limit the present invention.

The rotor element 12 includes a rotor base 121, a rotor shaft 122 and a plurality of rotating wings 123, wherein the rotor shaft 122 passes through the center of the rotor base 121 and is integrated with the rotor base 121 by means of locking. The rotating blades 123 are fixedly connected to the outer wall of the rotor base 121 in a manner of layering up and down along the axial direction. In addition, the stator element 13 includes a plurality of fixed wings 131 and a gas guide ring 132, wherein the plurality of fixed wings 131 are fixedly connected to the inner wall of the upper casing 11a, and the plurality of fixed wings and the plurality of rotating wings 123 are alternately arranged, namely Each fixed wing 131 is located in a gap between the two rotating wings 123 ; the air guide ring 132 is arranged below the rotating wing 123 and the fixed wing 131 , and the air guide ring 132 and the rotor base 121 together define an annular Gas channel G.

Please refer to FIGS. 2 and 3 together with FIG. 4 . FIG. 4 shows the arrangement of the rotating wing 123 and the fixed wing 131 and the resulting gas flow path. In practical application, each of the rotor blades 123 and the fixed blades 131 can be arranged in seven layers, wherein each rotor blade 123 includes a plurality of rotor blades 1231 arranged radially, and each fixed blade 131 includes a plurality of rotor blades 1231 arranged radially. Stator blades 1311. Also, as shown in FIG. 4 , the inclination direction of the rotor blades 1231 is opposite to the inclination direction of the stator blades 1311 , and the inclination angle of the rotor blades 1231 in the upper layer is greater than or equal to the inclination angle of the rotor blades 1231 in the lower layer. The inclination angle is greater than or equal to the inclination angle of the lower stator blades 1311 . Thereby, the irreversible outward flow of the gas molecules can be ensured. In addition, the air guide ring 132 can be assembled to the lower casing 11b, and the position corresponds to the rotor base 121 . The above description is only a feasible implementation manner, and is not intended to limit the present invention.

The heater 14 is embedded in the air guide ring 132 of the stator element 13 , and the heater 14 can be a belt heater, but not limited thereto. In order to eliminate mechanical tolerances, a positioning structure 16 may be provided between a part of the air guide ring 132 and the lower casing 11b, wherein the positioning structure 16 may include one or more buffer gaskets (such as Washers gaskets), but not limited thereto . Further, the gas guide ring 132 includes a support portion 1321 and a main body portion 1322. The main body portion 1322 is integrally formed on the support portion 1321 and surrounds the rotor base 121, wherein the main body portion 1322 may have a thread groove (not shown in the figure). ). The positioning structure 16 may be disposed between the support portion 1321 of the air guide ring 132 and the lower casing 11b, as shown in FIG. 2; or, the positioning structure 16 may be disposed between the main body portion 1322 of the air guide ring 132 and the lower casing 11b time, as shown in Figure 3. In practical application, the gas guide ring 132 can be connected to the lower casing 11b through one or more locking elements (such as bolts, not numbered in the figure) into one body; the position of the positioning structure 16 can correspond to the locking elements (such as bolts, (not numbered in the figure), and the locking element can be passed through the positioning structure 16 as needed.

The drive 15 may include a magnetic bearing that supports and drives the rotor shaft 122 in a non-contact manner. As a magnetic bearing of the driver 15, it may include a drive motor, axial and radial electromagnetic elements, and axial and radial displacement sensors, but is not limited thereto.

Please refer to FIG. 1 again in conjunction with FIG. 2 and FIG. 5, the turbomolecular pump device of the present invention may further include a temperature sensor 3, which may be configured to detect the temperature state of each temperature section of the gas channel G; For example, the temperature sensor 3 is disposed near the heater 14 . In use, the controller 2 is electrically connected to the temperature sensor 3, and the controller 2 can determine the heating temperature and/or heating range of the heater 14 according to the temperature change detected by the temperature sensor 3, so as to avoid Cause unnecessary energy waste.

It is worth noting that under the heating effect of the heater 14, the plurality of temperature sections of the gas channel G may include a first temperature section G1, a second temperature section G2 and a third temperature section G3, such as shown in Figure 5. The position of the first temperature zone G1 is close to the exhaust port 112 and its temperature is 60°C to 80°C; the second temperature zone G2 is located far from the exhaust port 112 and its temperature is 60°C to 80°C; the third temperature zone The section G3 is located between the first temperature section G1 and the second temperature section G2 and corresponds to the heater 14, the temperature of which is 70°C to 90°C. However, the present invention is not limited to the above-mentioned examples.

[Advantageous effects of the embodiment]

One of the beneficial effects of the present invention is that the turbomolecular pump device of the present invention can be disposed on the gas guide ring through a heater, and is configured so that the gas passage between the rotor base and the gas guide ring has multiple A temperature zone, including a first temperature zone near the exhaust port with a temperature of 60°C to 80°C” technical means to greatly improve the heat supply efficiency while avoiding the derivatives of the semiconductor process in the gas channel Accumulation occurs and affects the vacuuming efficiency. Moreover, the turbomolecular pump device of the present invention can reach the optimum operating state in a relatively short period of time.

Furthermore, the turbomolecular pump device of the present invention can not only prolong the maintenance period, but also avoid the failure of the magnetic bearing due to long-term high temperature heating.

Furthermore, in the turbomolecular pump device of the present invention, a positioning structure may be provided between a part of the gas guide ring and the lower casing to eliminate mechanical tolerances, and the positioning structure may include one or more buffer washers (such as washer gasket). In this way, the operation of the turbomolecular pump unit can be more stable and reliable.

The content disclosed above is only a preferred feasible embodiment of the present invention, and is not intended to limit the scope of the present invention. Therefore, any equivalent technical changes made by using the contents of the description and drawings of the present invention are included in the application of the present invention. within the scope of the patent.

Z: Turbo molecular pump device 1: Pump body 11: Shell structure 11a: Upper shell 11b: Lower shell 110: Chamber 111: Air intake 112: exhaust port 12: Rotor element 121: Rotor base 122: Rotor shaft 123: Rotary Wing 1231: Rotor Blades 13: Stator element 131: Fixed wing 1311: Stator Blades 132: Air guide ring 1321: Support Department 1322: main body 14: Heater 15: Drive 16: Positioning the structure 2: Controller 3: Temperature sensing unit G: Gas channel G1: The first temperature zone G2: Second temperature zone G3: The third temperature zone

FIG. 1 is a functional block diagram of the turbomolecular pump device of the present invention.

FIG. 2 is a schematic structural diagram of one of the pump bodies of the turbomolecular pump device of the present invention.

FIG. 3 is another schematic structural diagram of the pump main body of the turbomolecular pump device of the present invention.

4 is a schematic diagram of a gas flow path of the pump body of the turbomolecular pump device of the present invention.

FIG. 5 is a partial enlarged view of the portion V in FIG. 2 .

1: Pump body

11: Shell structure

11a: Upper shell

11b: Lower shell

110: Chamber

111: Air intake

112: exhaust port

12: Rotor element

121: Rotor base

122: Rotor shaft

123: Rotary Wing

13: Stator element

131: Fixed wing

132: Air guide ring

1321: Support Department

1322: main body

14: Heater

15: Drive

16: Positioning the structure

G: Gas channel

Claims (10)

A high-efficiency turbomolecular pump device comprising: a shell structure, the shell structure has a cavity and an exhaust port communicating with the cavity; a stator element, the stator element is disposed in the chamber, wherein the stator element includes an air guide ring; a rotor element, the rotor element is disposed in the cavity and its position corresponds to the stator element, wherein the rotor element comprises a rotor base, and there is a gas passages; and a heater disposed on the gas guide ring, wherein the heater is configured such that the gas channel has a plurality of temperature zones, and the plurality of temperature zones include adjacent to the row A first temperature section of the gas port whose temperature is 60°C to 80°C. The high-efficiency turbomolecular pump device according to claim 1, wherein the casing structure includes an upper casing and a lower casing, and the upper casing and the lower casing are integrated into one; wherein, The air guide ring is assembled to the lower casing, and the position of the air guide ring corresponds to the rotor base. The high-efficiency turbomolecular pump device according to claim 2, wherein a positioning structure is provided between a part of the gas guide ring and the lower casing. The high-efficiency turbomolecular pump device according to claim 3, wherein the gas guide ring includes a support portion and a main body portion, and the main body portion is integrally formed on the support portion and surrounds the rotor base , and the positioning structure is arranged between the support part and the lower casing or between the main body part and the lower casing. The high-efficiency turbomolecular pump device of claim 4, wherein the positioning structure includes one or more buffer spacers. The high-efficiency turbomolecular pump device according to claim 1, wherein the heater is a belt heater, and the heater is built in the gas guide ring. The high-efficiency turbomolecular pump device of claim 1, further comprising a temperature sensor configured to detect a temperature state of the first temperature segment. The high-efficiency turbomolecular pump device according to claim 7, wherein the temperature sensor is arranged near the heater. The high-efficiency turbomolecular pump device according to claim 1, wherein the plurality of temperature sections further include a second temperature section far away from the exhaust port and a second temperature section located between the first temperature section and the A third temperature section between the second temperature sections, the preset temperature of the second temperature section is 60°C to 80°C, and the preset temperature of the third temperature section is 70°C to 80°C 90°C. The high-efficiency turbomolecular pump device according to claim 1, further comprising a controller electrically connected to the heater to control a heating temperature and/or a heating range of the heater .

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