TWI756229B - wavelength conversion device - Google Patents

Abstract

The subject of the present invention was created in view of the above-mentioned facts. The main technical subject of this work is to provide a wavelength conversion device, which can efficiently perform wavelength conversion when the wavelength conversion mechanism is used to perform wavelength conversion on pulsed laser light with a wide spectral bandwidth.

According to the present invention, a conversion pulse laser light is provided The wavelength conversion device of the wavelength is composed of at least an oscillator, a wavelength selection mechanism, a delay time generation mechanism, an energy amplification mechanism, a delay time correction mechanism, and a wavelength conversion mechanism; wherein, the oscillator oscillates the pulsed laser light; the The wavelength selection mechanism selects at least two wavelengths of pulsed laser light from the spectral bandwidth of the pulsed laser light oscillated by the oscillator; the delay time generation mechanism selects the pulsed laser light of the selected wavelength from the pulsed laser light of the selected wavelength. A delay time is given to at least any one of the pulsed laser rays, and a time interval is generated in the selected at least two kinds of pulsed laser rays; the energy amplifying mechanism generates the energy of each of the pulsed laser rays in the time interval be amplified; the delay time correction mechanism makes the pulse laser light of at least 2 wavelengths that have been amplified to correct the delay time travel the same; the wavelength conversion mechanism is to make the pulse laser light of at least 2 wavelengths traveling at the same time. wavelengths are converted.

Description

wavelength conversion device

The present invention relates to a wavelength conversion device for converting the wavelength of pulsed laser light.

A wafer that is formed on the surface by dividing a plurality of devices such as ICs, LSIs, etc. by the dividing line is a laser processing device, and the laser beam is irradiated on the dividing line to be divided into individual devices, and is used in the portable. telephones, personal computers, etc.

A laser processing apparatus is composed of at least: a holding mechanism for holding a workpiece, and a laser beam irradiation mechanism for irradiating a laser beam to the workpiece held by the holding mechanism; the laser beam irradiation mechanism is composed of the following : a laser light oscillator that oscillates the laser light of the wavelength to be processed; the laser light oscillated by the laser light oscillator is concentrated and the laser light is irradiated to be held by the holding mechanism The condenser of the processed object; and the optical system arranged between the laser light oscillator and the condenser to adjust the output of the laser light and the beam expander for adjusting the beam diameter; The workpiece is subjected to desired processing (for example, refer to Patent Document 1).

Furthermore, when the wavelength of the laser beam oscillated by the laser beam oscillator is a short wavelength such as 355 nm or 266 nm, the optical system is damaged in a relatively short time, and the optical system must be replaced with high frequency. There is an uneconomical problem. In order to solve such a problem, the wavelength of the laser light oscillated by the laser light oscillator is set to a relatively long wavelength such as 1064 nm, and a nonlinear optical crystal (for example, LBO: LiB A technology for converting a wavelength conversion mechanism such as ₃ O ₅ lithium triborate, etc., into a laser beam having a short wavelength of 355 nm or the like is being developed (for example, refer to Patent Document 2).

[Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2006-108478

[Patent Document 2] Japanese Patent Laid-Open No. 2013-193090

However, when a fiber laser is used as the oscillation source of the laser light, the peak power of the laser light is high, and the phenomenon of phase modulation caused by the phase shift occurs due to the Self Phase Modulation (SPM) effect. , unfortunately there is a broadening of the spectral bandwidth. When the spectral bandwidth is widened in this way, when converting the wavelength by a wavelength conversion mechanism such as a nonlinear optical crystal, for example, converting from a wavelength of 1064 nm to a laser beam having a wavelength of 355 nm, the conversion efficiency deteriorates.

The present invention has been made in view of the above-mentioned facts, and its main technical subject is to provide a wavelength conversion device, which can efficiently convert the wavelength of pulsed laser light with a wide spectral bandwidth by the wavelength conversion mechanism. Perform wavelength conversion.

In order to solve the above-mentioned main technical problem, according to the present invention, a wavelength conversion device for converting the wavelength of pulsed laser light is provided, which utilizes at least an oscillator, a wavelength selection mechanism, a delay time generation mechanism, an energy amplification mechanism, a delay time correction mechanism, It is composed of a wavelength conversion mechanism; wherein, the oscillator oscillates pulsed laser light; the wavelength selection mechanism selects at least two wavelengths of pulsed laser light from the spectral bandwidth of the pulsed laser light oscillated by the oscillator light; the delay time generating mechanism gives a delay time to at least any pulsed laser light from the pulsed laser light of the selected wavelength and generates a time interval between the selected at least two kinds of pulsed laser light; the energy The amplifying mechanism amplifies the energy of each of the pulsed laser rays that generate the time interval; the delay time correction mechanism makes the progress of the pulsed laser rays of at least two wavelengths amplified by the correction of the delay time to be the same ; The wavelength conversion mechanism converts the wavelengths of the pulsed laser light of at least two wavelengths traveling simultaneously.

The oscillator can be configured as follows: the oscillator oscillates pulsed laser light with a spectral bandwidth with a wavelength of 1064 nm as the peak; the wavelength selection mechanism selects pulsed laser light with two wavelengths around 1064 nm; the wavelength conversion mechanism generates Pulsed laser light with a wavelength of 532 nm.

It can be configured as: the wavelength conversion device further comprises: a wavelength separation mechanism and a wavelength synthesis mechanism; the delay time correction mechanism includes: a first delay time correction mechanism and a second delay time correction mechanism; the wavelength conversion mechanism includes: The first wavelength conversion mechanism, and the second wavelength conversion switching mechanism; the oscillator oscillates a pulsed laser light with a spectral bandwidth with a wavelength of 1064 nm as its peak; the wavelength selection mechanism selects and outputs pulsed laser light with three wavelengths around 1064 nm; the delay time generating mechanism A delay time is given to the pulsed laser light of at least two wavelengths in the pulsed laser light of the three wavelengths, and the energy amplification mechanism is used to amplify the three pulsed laser light at the time interval between the three kinds of pulsed laser light. The energy of the light; the pulsed laser light of the three wavelengths of which each energy is amplified, is separated into two pulsed laser light and one pulsed laser light by the wavelength separation mechanism; the two pulsed laser light The light is guided to the first delay time correction mechanism constituting the delay time correction mechanism and the first wavelength conversion mechanism constituting the wavelength conversion mechanism, and converted into pulsed laser light with a wavelength of 532 nm, reaching the wavelength synthesis mechanism; the A pulsed laser beam is guided to the second delay time correction mechanism and the wavelength synthesis mechanism constituting the delay time correction mechanism, and through the action of the delay time correction mechanism, the travel is made the same, and the wavelength synthesis mechanism is passed through. The synthesized pulsed laser light is converted into a pulsed laser light with a wavelength of 355 nm by the second wavelength conversion mechanism constituting the wavelength conversion mechanism.

In the wavelength conversion device of the present invention, it is composed of at least an oscillator, a wavelength selection mechanism, a delay time generating mechanism, an energy amplification mechanism, a delay time correction mechanism, and a wavelength conversion mechanism; wherein, the oscillator oscillates the pulsed laser light; The wavelength selection mechanism selects at least two wavelengths of pulsed laser light from the spectral bandwidth of the pulsed laser light oscillated by the oscillator; the delay time generating mechanism is based on the selected wave In the long pulsed laser light, a delay time is given to at least any one of the pulsed laser light, and a time interval is generated in the selected at least two kinds of pulsed laser light; the energy amplifying mechanism generates the pulse of the time interval The energy of each of the laser rays is amplified; the delay time correction mechanism makes the pulse laser rays of at least two wavelengths that have been amplified by the correction of the delay time travel the same; the wavelength conversion mechanism The wavelength of the pulsed laser light with different wavelengths is converted; through this, even if the pulsed laser light with a wide spectral bandwidth is oscillated from the laser light oscillator, the spectrum of the pulsed laser light can be guided to the wavelength conversion mechanism. The bandwidth is narrowed, and the effect of improving the conversion efficiency in the wavelength conversion mechanism is exhibited.

10: Wafer

40: Laser processing device

41: Abutment

42: Keeping Bodies

43: Moving Mechanisms

44: Laser light irradiation mechanism

44a: Condenser

44b: Oscillator

44c, 44c ' : wavelength conversion part

441, 461: wavelength selection mechanism

442, 462: Delay time generating mechanism

443, 463: Energy Amplification Mechanism

444: Delay Time Correction Mechanism

445: wavelength conversion mechanism

464: wavelength separation mechanism

465: 1st Delay Time Correction Mechanism

466: The first wavelength conversion mechanism

467: Second Delay Time Correction Mechanism

468: Wavelength Synthesis Mechanism

469: Second wavelength conversion mechanism

FIG. 1 is an overall perspective view of a laser processing apparatus including a wavelength conversion device constructed according to the present invention.

FIG. 2 is a block diagram illustrating an outline of an embodiment of the wavelength conversion device of the present invention.

3 is a block diagram illustrating the outline of another embodiment of the wavelength conversion device of the present invention.

Hereinafter, the embodiments of the wavelength conversion device according to the present invention will be described in further detail with reference to the accompanying drawings.

In FIG. 1, the whole perspective view which illustrates the laser processing apparatus 40 as a processing apparatus provided with the wavelength conversion apparatus of this invention is shown. The laser processing apparatus 40 shown in the figure is provided with a base 41, which holds, for example, a transparent The holding mechanism 42 of the wafer 10 held to the ring-shaped frame F by the adhesive tape T, the moving mechanism 43 for moving the holding mechanism 42 , and the laser beam for irradiating the laser beam to the workpiece held by the holding mechanism 42 Irradiation mechanism 44 .

The holding mechanism 42 includes a rectangular X-direction movable plate 60 mounted on the base 41 that can move freely in the X direction indicated by arrow X in the figure, and a movable plate 60 that can move freely in the Y direction indicated by arrow Y in the drawing. Mounted on the X-direction movable plate 60 are a rectangular Y-direction movable plate 61 , a cylindrical support 62 fixed to the upper surface of the Y-direction movable plate 61 , and a rectangular cover 63 fixed to the upper end of the support 62 . On the upper surface of the holding bed 64 holding the circular-shaped workpiece held by the cover plate 63 through the elongated hole formed in the cover plate 63 and extending upward, a porous material is arranged to extend substantially horizontally. The circular-shaped suction chuck 65 . The suction chuck 65 is connected to a suction mechanism (not shown) through a flow path passing through the support column 62 . Furthermore, the X direction is the direction indicated by the arrow X in FIG. 1 , and the Y direction is the direction indicated by the arrow Y in FIG. 2 , that is, the direction orthogonal to the X direction. The planes defined in the X direction and the Y direction are substantially horizontal.

The moving mechanism 43 includes an X-direction moving mechanism 80 and a Y-direction moving mechanism 82 . The X-direction moving mechanism 80 , the X-direction moving mechanism 80 converts the rotational motion of the motor into linear motion and transmits it to the X-direction movable plate 60 , and moves the X-direction movable plate 60 forward and backward along the guide rails on the base 41 . in the X direction. The Y-direction moving mechanism 82 converts the rotational motion of the motor into linear motion, and transmits it to the Y-direction movable plate 61, and moves the Y-direction movable plate 61 forward and backward in the Y-direction along the guide rails on the X-direction movable plate 60. In addition, although the illustration is omitted, the moving mechanism 80 in the X direction and the Y direction move. The moving mechanism 82 is provided with a position detection mechanism, which accurately detects the position in the X direction, the position in the Y direction, and the rotational position in the circumferential direction of the holding bed 64, and drives the X direction moving mechanism according to a signal instructed by a control mechanism to be described later. 80. The Y-direction moving mechanism 82 can then keep the bed 64 in a correct position at any position and angle.

As shown in FIG. 2 , the laser beam irradiation mechanism 44 includes at least: a condenser 44a for condensing the pulsed laser beam and irradiating the workpiece to be processed, and an oscillator 44b for oscillating the pulsed laser beam and converting the The wavelength conversion device 50 constituted by the wavelength conversion part 44c of the wavelength of the pulsed laser light oscillated by the oscillator 44b. In addition, although omitted in the figure, the laser light irradiation mechanism 44 may be further provided with: a mirror for deflecting the light path, an attenuator for adjusting the output, and a crystal for confirming the crystal applied on the suction chuck 65. Various devices, such as the imaging mechanism of the machining marks on the circle 10, are provided;

The oscillator 44b that oscillates the pulsed laser beam is a fiber laser oscillator that oscillates the pulsed laser beam having a wavelength with a peak of 1064 nm. The pulsed laser light λ irradiated from the oscillator 44b is shown in FIG. 2 , the horizontal axis is the wavelength (w), and the vertical axis is the spectral density. In the case of showing its distribution, due to the influence of the self-phase modulation effect , with a spectral bandwidth including wavelengths from 1062nm to 1066nm.

The wavelength conversion unit 44c is provided with at least: a wavelength selection mechanism 441 for selecting two wavelengths, a delay time generation mechanism 442, an energy amplification mechanism 443, a delay time correction mechanism 444, and a wavelength conversion mechanism 445; The following describes it.

The pulsed laser beam λ having the spectral bandwidth of the wavelength of 1062 nm to 1066 nm oscillated by the oscillator 44 b is incident on the wavelength selection mechanism 441 . The wavelength selection mechanism 441 is composed of the following: an optical filter that selectively separates the incident pulsed laser light λ into a pulsed laser light λ1 with a wavelength of 1062 nm and a pulsed laser light λ2 with a wavelength of 1066 nm and emits each of them. device.

Next, the pulsed laser beams λ1 and λ2 output from the wavelength selection mechanism 441 are incident on the delay time generation mechanism 442 . The delay time generating mechanism 442 is formed by, for example, a volume Bragg grating (VBG), a fiber Bragg grating (FBG), or other general diffraction gratings, and is set so that at least one of them, for example, extends substantially The optical path length makes the transit time of the pulsed laser beam λ2 longer so that a predetermined delay time occurs with respect to the pulsed laser beam λ1 . Next, the delay time is generated, through this, a time interval according to the specified delay time is generated between the pulsed laser beam λ1 and the pulsed laser beam λ2, and the pulsed laser beam is emitted from the delay time generation mechanism 442 λ1, pulsed laser light λ2.

Next, the pulsed laser beams λ1 and λ2 emitted from the delay time generating mechanism 442 are incident on the energy amplifying mechanism 443 , and the respective outputs (pulse energy) are amplified and emitted.

The output pulsed laser beams λ1 and λ2 amplified by the energy amplification mechanism 443 are incident on the delay time correction mechanism 444 . The pulsed laser beams λ1 and λ2 incident on the delay time correction mechanism 444 pass through the action of the above-mentioned delay time generation mechanism 442. Relative to the pulsed laser beam λ1, the pulsed laser beam λ2 travels with a specified delay time, only the The time interval is generated by the specified delay time. Here, the delay time correction mechanism 444 is configured to delay the pulsed laser beam λ1 traveling in advance by only a predetermined time, and resolves the difference between the two pulsed laser beams λ1 and λ2 that have been injected with a time interval. Time interval, the output as the pulsed laser light λ1 and λ2 of two wavelengths becomes the same pulsed laser light λ3. Moreover, the structure for generating the delay time for the pulsed laser light λ1 and eliminating the time interval is slightly the same as the structure for generating the delay time for the pulsed laser light λ2 in the above-mentioned delay time generating mechanism 442 (only delayed Since the wavelengths of the pulsed laser beams are different), the detailed description thereof is omitted.

The pulsed laser beam λ3 emitted from the delay time correction mechanism 444 is incident on the wavelength conversion mechanism 445 . As the wavelength conversion mechanism 445, a generally known nonlinear optical crystal (for example, LBO: LiB ₃ O ₅ lithium triborate) can be used. Next, the pulsed laser beam λ3 incident on the wavelength conversion mechanism 445 is converted into a pulsed laser beam with a wavelength of 532 nm and emitted. As described above, the pulsed laser beam λ oscillated from the oscillator 44b is subjected to wavelength conversion via the wavelength conversion section 44c.

According to the above-described wavelength conversion device 50 constituted by the present invention, for example, even in the case of wavelength conversion of pulsed laser light having a broadened spectral bandwidth in a fiber laser oscillator, pulsed lasers of two wavelengths can be selectively extracted. The emitted light is used as the seed light with narrow spectral linewidth. Next, the output of each pulsed laser beam is amplified by causing a time interval to occur by causing a delay time to occur on at least one of them, and after the amplification is performed, the time interval generated by the delay time is eliminated. The travel of the pulsed laser light is the same, and the wavelength is changed by the wavelength conversion mechanism. Change. As a result, high wavelength conversion efficiency can be achieved, and processing efficiency when laser processing is performed can be improved.

Moreover, in the above-mentioned wavelength selection mechanism 441, from the pulsed laser light oscillated by the oscillator 44b, the pulsed laser light with the wavelength of 1062 nm and the pulsed laser light with the wavelength of 1066 nm are selectively extracted; A combination of two wavelengths is selected, for example, a pulsed laser light with a wavelength of 1063 nm and a pulsed laser light with a wavelength of 1065 nm can also be selected, as long as the spectral bandwidth included in the pulsed laser light λ oscillated by the oscillator 44b is selected For pulsed lasers with two different wavelengths, any combination of wavelengths is possible.

Another embodiment of the wavelength conversion device of the present invention will be described with reference to FIG. 3 . The laser beam irradiating mechanism 44 also shown in FIG. 3 is composed of an oscillator 44b that oscillates a pulsed laser beam having a spectral bandwidth ranging from 1062 nm to 1066 nm with 1064 nm as the apex, and a wavelength conversion section, as in the embodiment described in FIG. 2 . 44c ' and the concentrator 44a constitute the same point. Moreover, compared with the embodiment of FIG. 2 described above, in the wavelength conversion section 44c ′ , the incident pulsed laser light λ is converted into a pulsed laser light with a wavelength of 355 nm and emitted, which is different. This difference will be described with a focus on it.

The wavelength conversion unit 44c ' includes a wavelength selection mechanism 461 for selecting three wavelengths, a delay time generation mechanism 462, an energy amplification mechanism 463, a wavelength separation mechanism 464, a first delay time correction mechanism 465, a first wavelength conversion mechanism 466, The second delay time correction mechanism 467, the wavelength synthesis mechanism 468, and the second wavelength conversion mechanism; the functions of the wavelength conversion portion 44c ' will be described below.

The pulsed laser light λ having the spectral bandwidth of 1062 nm to 1066 nm oscillated by the oscillator 44 b is initially incident on the wavelength selection mechanism 461 . The wavelength selection mechanism 461 selectively separates the incident pulsed laser light λ into a pulsed laser light λ1 with a wavelength of 1062 nm, a pulsed laser light λ2 with a wavelength of 1066 nm, and a pulsed laser light with a wavelength of 1064 nm. λ4, and shoot each.

The pulsed laser rays λ1, λ2 and λ4 selected by the wavelength selection mechanism 461 are injected into the delay time generating mechanism 462, and at least two kinds of pulsed laser rays (in this embodiment, the pulsed laser rays λ1, λ2 ) is only given a delay time for the designated time, and the pulsed laser beams λ4, λ1, and λ2 are emitted in the same time interval in the order. Next, the pulsed laser beams λ4 , λ1 , and λ2 given the time interval are injected into the energy amplifying mechanism 463 .

The pulsed laser beams λ4 , λ1 , and λ2 incident on the energy amplifying mechanism 463 are respectively amplified and emitted, and then enter the wavelength separation mechanism 464 . The wavelength separation mechanism 464 may have the same structure as the wavelength selection mechanism 461, and is composed of an optical filter for transmitting the wavelengths of the pulsed laser beams λ1 and λ2, and an optical filter for branching the wavelength of the pulsed laser beam λ4, Through this, the pulsed laser beams λ1 , λ2 , and the pulsed laser beam λ4 are respectively emitted to different optical paths.

The pulsed laser beams λ1 and λ2 separated by the wavelength separation mechanism 464 are sent to the first delay time correction mechanism 465 by the time interval given by the delay time generation mechanism 462, and pass through the first delay time The function of the correction mechanism 465 is to give a delay time to the preceding pulsed laser beam λ1 only for a specified time, and after this, the time interval is eliminated and synthesized so as to travel the same as the pulsed laser beam λ2 .

The first delay time correction mechanism 465 eliminates the delay time to synthesize the pulsed laser beams λ1 and λ2 traveling simultaneously, which are incident on the first wavelength conversion mechanism 466, converted into pulsed laser beams λ3 with a wavelength of 532 nm, and emitted. Furthermore, the first delay time correction mechanism 465 and the first wavelength conversion mechanism 466 of the present embodiment may have completely the same configuration as the delay time correction mechanism 444 and the wavelength conversion mechanism 445 of the embodiment shown in FIG. 2 .

The other pulsed laser beam λ4 separated by the wavelength separation mechanism 464 is incident on the second delay time correction mechanism 467 . In the second delay time correcting mechanism 467, the incident pulsed laser beam λ4 passes through other optical paths so as to travel in the same way as the pulsed laser beam λ3 synthesized in the subsequent process, that is, only the previous delay is corrected. The delay time given to the pulsed laser light λ2 in the time generating mechanism 462 is adjusted so that no time interval is generated for the pulsed laser light λ3 during synthesis in the post-process.

The pulsed laser beam λ3 converted into the pulsed laser beam with a wavelength of 532 nm and the pulsed laser beam λ4 with a wavelength of 1064 nm whose delay time has been adjusted are incident on the wavelength combining means 468 and synthesized. As the wavelength combining means 468, it is possible to employ an optical means that transmits only a specific wavelength and reflects light rays of other wavelengths. Using such a wavelength synthesis mechanism 468, the pulsed laser beam λ4 with a wavelength of 1064 nm is transmitted, and the pulsed laser beam λ3 with a wavelength of 532 nm converted by the wavelength conversion mechanism 467 is transmitted. Reflect, make the optical paths consistent, and combine the pulsed laser beams λ3 and λ4 to emit.

The pulsed laser beams λ3 and λ4 synthesized by the wavelength synthesis mechanism 468 are incident on the second wavelength conversion mechanism 469 to emit a pulsed laser beam λ5 with a wavelength of 355 nm. The second wavelength conversion mechanism 469 is composed of a nonlinear crystal that can obtain laser light with a wavelength of 355 nm by injecting pulsed laser light with two wavelengths (532 nm, 1064 nm). For example, LBO: LiB ₃ O can be used. ₅ lithium triborate). Furthermore, the LBO is a nonlinear crystal made of the same material as the first wavelength conversion mechanism; however, the LBO of the first wavelength conversion mechanism has a different crystal axis orientation and is produced according to the wavelength to be converted.

The wavelength conversion unit 44c ' in this embodiment is configured as above, and the pulsed laser light λ with a wide spectral bandwidth oscillated by the oscillator 44b is efficiently converted into a pulsed laser light λ5 with a wavelength of 355 nm, Through the concentrator 44a, it is irradiated to the wafer 10, which is the object to be processed.

10: Wafer

44: Laser light irradiation mechanism

44a: Condenser

44b: Oscillator

44c: wavelength conversion part

50: wavelength conversion device

65: Adsorption chuck

441: wavelength selection mechanism

442: Delay time generating mechanism

443: Energy Amplification Mechanism

444: Delay Time Correction Mechanism

445: wavelength conversion mechanism

Claims (3)

A wavelength conversion device for converting the wavelength of pulsed laser light is composed of at least an oscillator, a wavelength selection mechanism, a delay time generation mechanism, an energy amplification mechanism, a delay time correction mechanism, and a wavelength conversion mechanism; wherein, the oscillator is an oscillating mechanism. pulsed laser light; the wavelength selection mechanism selects pulsed laser light with at least two wavelengths from the spectral bandwidth of the pulsed laser light oscillated by the oscillator; the delay time generating mechanism is based on the selected wavelength Among the pulsed laser rays, a delay time is given to at least any one of the pulsed laser rays, and a time interval is generated in the selected at least two pulsed laser rays; the energy amplification mechanism is to generate the pulsed laser rays of the time interval The energy of each of the radiated rays is amplified; the delay time correction mechanism makes the pulse laser rays of at least two wavelengths that have been amplified by the correction of the delay time travel the same; the wavelength conversion mechanism The wavelength of the pulsed laser light of the wavelength is converted. The wavelength conversion device according to claim 1, wherein the oscillator oscillates a pulsed laser beam having a spectral bandwidth with a wavelength of 1064 nm as a peak; the wavelength selection mechanism selects pulsed laser light of two wavelengths around 1064 nm The wavelength conversion mechanism generates pulsed laser light with a wavelength of 532nm. The wavelength conversion device of claim 1, wherein, It further includes: wavelength separation mechanism and wavelength synthesis mechanism; the delay time correction mechanism includes: a first delay time correction mechanism and a second delay time correction mechanism; the wavelength conversion mechanism includes: a first wavelength conversion mechanism and a second wavelength Conversion mechanism; the oscillator oscillates pulsed laser light with a spectral bandwidth with a wavelength of 1064 nm as the peak; the wavelength selection mechanism selects and outputs pulsed laser light with three wavelengths around 1064 nm; the delay time generating mechanism A delay time is given to the pulsed laser light of at least two wavelengths in the pulsed laser light of the three wavelengths, and the energy amplification mechanism is used to amplify the three pulsed laser light at the time interval between the three kinds of pulsed laser light. The energy of the light; the pulsed laser light of the three wavelengths of which each energy is amplified, is separated into two pulsed laser light and one pulsed laser light by the wavelength separation mechanism; the two pulsed laser light The light is guided to the first delay time correction mechanism constituting the delay time correction mechanism and the first wavelength conversion mechanism constituting the wavelength conversion mechanism, and converted into pulsed laser light with a wavelength of 532 nm, reaching the wavelength synthesis mechanism; the A pulsed laser beam is guided to the second delay time correction mechanism and the wavelength synthesis mechanism constituting the delay time correction mechanism, and through the action of the delay time correction mechanism, the travel is made the same, and the wavelength synthesis mechanism is passed through. The synthesized pulsed laser light is converted into a pulsed laser light with a wavelength of 355 nm by the second wavelength conversion mechanism constituting the wavelength conversion mechanism.

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