TWI752755B - Supporting structure of semiconductor device, display panel, manufacturing method of supporting structure of semiconductor device and fixing method of accommodating structure of semiconductor device - Google Patents
Supporting structure of semiconductor device, display panel, manufacturing method of supporting structure of semiconductor device and fixing method of accommodating structure of semiconductor device Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 125
- 238000000034 method Methods 0.000 title claims description 31
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 claims abstract description 68
- 230000002159 abnormal effect Effects 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims 1
- 239000010408 film Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 239000004642 Polyimide Substances 0.000 description 4
- 239000008186 active pharmaceutical agent Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229920001230 polyarylate Polymers 0.000 description 3
- 229920008347 Cellulose acetate propionate Polymers 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- 239000004697 Polyetherimide Substances 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 229920000058 polyacrylate Polymers 0.000 description 2
- 229920001601 polyetherimide Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000002952 polymeric resin Substances 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910020658 PbSn Inorganic materials 0.000 description 1
- 101150071746 Pbsn gene Proteins 0.000 description 1
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- HKQOBOMRSSHSTC-UHFFFAOYSA-N cellulose acetate Chemical compound OC1C(O)C(O)C(CO)OC1OC1C(CO)OC(O)C(O)C1O.CC(=O)OCC1OC(OC(C)=O)C(OC(C)=O)C(OC(C)=O)C1OC1C(OC(C)=O)C(OC(C)=O)C(OC(C)=O)C(COC(C)=O)O1.CCC(=O)OCC1OC(OC(=O)CC)C(OC(=O)CC)C(OC(=O)CC)C1OC1C(OC(=O)CC)C(OC(=O)CC)C(OC(=O)CC)C(COC(=O)CC)O1 HKQOBOMRSSHSTC-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- SAOPTAQUONRHEV-UHFFFAOYSA-N gold zinc Chemical compound [Zn].[Au] SAOPTAQUONRHEV-UHFFFAOYSA-N 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
- H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
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Abstract
Description
本發明關於一種利用環狀電極承載半導體元件之半導體元件的承載結構、顯示面板、半導體元件的承載結構形成方法以及半導體元件的容置結構的修補方法。 The present invention relates to a semiconductor element carrier structure using annular electrodes to carry semiconductor elements, a display panel, a method for forming a semiconductor element carrier structure, and a repair method for a semiconductor element accommodating structure.
近來顯示技術的進步突飛猛進,對顯示器的畫質要求也越來越高,而目前的顯示器為以發光二極體(light-emitting diode,LED)顯示器和有機發光二極體顯示器(organic light-emitting diode,OLED)顯示器為主,有機發光二極體顯示器的畫素雖高,但有機發光二極體的壽命不長;發光二極體顯示器畫素雖低於有機發光二極體顯示器的畫素,但發光二極體的壽命較高。因此,近來廠商想將發光二極體的尺寸縮小為微發光二極體(micro light-emitting diode,micro-LED),並將微發光二極體應用於顯示器,但是,由於微發光二極體的尺寸為微米等級,勢必需要犧牲結構的輔助來進行巨量轉移(mass transfer),以將微發光二極體順利地轉移至顯示器的電路板,但利用微發光二極體製造的顯示器良率始終無法改善。 Recently, the progress of display technology has been advancing by leaps and bounds, and the requirements for the picture quality of the display are also getting higher and higher, and the current display is a light-emitting diode (LED) display and an organic light-emitting diode display (organic light-emitting diode display). Diode, OLED) displays are the main ones. Although the pixels of organic light-emitting diode displays are high, the lifespan of organic light-emitting diodes is not long; although the pixels of light-emitting diode displays are lower than those of organic light-emitting diode displays , but the life of the light-emitting diode is higher. Therefore, recently, manufacturers want to reduce the size of light-emitting diodes to micro light-emitting diodes (micro-LEDs) and apply the micro-light-emitting diodes to displays. The size of the micro-LED is on the order of micrometers, and it is bound to need the assistance of sacrificial structures to perform mass transfer to smoothly transfer the micro-LEDs to the circuit board of the display. can never be improved.
綜觀前所述,本發明之發明者思索並設計一種半導體元件的承載結構及其形成方法,以期針對習知技術之缺失加以改善,進而增進產業上之實施利用。 In view of the foregoing, the inventors of the present invention have considered and designed a carrier structure for a semiconductor device and a method for forming the same, with a view to improving the deficiencies of the prior art, thereby enhancing the implementation and utilization in the industry.
基於上述目的,本發明提供一種半導體元件的承載結構及其形成方法,用以解決習知技術中所面臨之問題。 Based on the above objectives, the present invention provides a semiconductor device carrier structure and a method for forming the same, so as to solve the problems faced in the prior art.
基於上述目的,本發明提供一種半導體元件的承載結構,其包括第一基板、第一電極、第二電極、第一孔洞、第三電極以及半導體元件。第一電極和第二電極設置於第一基板上,第一電極和第二電極相對設置。第一孔洞設置於第一電極和第二電極之間。第三電極設置於第一電極和第二電極上,第三電極為環狀且具有第二孔洞,第二孔洞暴露第一孔洞。半導體元件設置於第三電極上。 Based on the above objective, the present invention provides a semiconductor element carrier structure, which includes a first substrate, a first electrode, a second electrode, a first hole, a third electrode, and a semiconductor element. The first electrode and the second electrode are arranged on the first substrate, and the first electrode and the second electrode are arranged oppositely. The first hole is disposed between the first electrode and the second electrode. The third electrode is disposed on the first electrode and the second electrode, the third electrode is annular and has a second hole, and the second hole exposes the first hole. The semiconductor element is arranged on the third electrode.
在本發明的實施例中,本發明進一步包括電晶體層,電晶體層設置於第一基板上,電晶體層包括第一電晶體和第二電晶體,第一電晶體設置於第一基板和第一電極之間,第二電晶體設置於第一基板和第二電極之間。 In an embodiment of the present invention, the present invention further includes a transistor layer, the transistor layer is disposed on the first substrate, the transistor layer includes a first transistor and a second transistor, and the first transistor is disposed on the first substrate and Between the first electrodes, the second transistor is arranged between the first substrate and the second electrode.
在本發明的實施例中,第三電極具有第一導電區和第二導電區,第一導電區對應第一電極且部分覆蓋第一電極,第二導電區對應第二電極且部分覆蓋第二電極,第一導電區和第二導電區電性連接半導體元件。 In an embodiment of the present invention, the third electrode has a first conductive region and a second conductive region, the first conductive region corresponds to the first electrode and partially covers the first electrode, and the second conductive region corresponds to the second electrode and partially covers the second conductive region The electrode, the first conductive area and the second conductive area are electrically connected to the semiconductor element.
在本發明的實施例中,第一電極和第二電極處於相同膜層。 In the embodiment of the present invention, the first electrode and the second electrode are in the same film layer.
在本發明的實施例中,半導體元件以第二孔洞為中心的旋轉範圍為-108度至108度。 In the embodiment of the present invention, the rotation range of the semiconductor element around the second hole is -108 degrees to 108 degrees.
在本發明的實施例中,第三電極的截面形狀為圓形或多邊形。 In the embodiment of the present invention, the cross-sectional shape of the third electrode is a circle or a polygon.
基於上述目的,本發明提供一種顯示面板,其包括第一區以及第二區。第一區包括前述半導體元件的承載結構。第二區包括半導體元件之容置結構,半導體元件之容置結構包括第二基板、第四電極、第五電極、第三孔洞以及初始半導體元件。第四電極設置於第二基板上。第五電極設置於第二基板上,第四電極和第五電極相對設置。第三孔洞設置於第四電極和第五電極之間。初始半導體元件設置於第三孔洞。 Based on the above object, the present invention provides a display panel including a first area and a second area. The first region includes the aforementioned carrier structure for the semiconductor element. The second region includes a accommodating structure of the semiconductor element, and the accommodating structure of the semiconductor element includes a second substrate, a fourth electrode, a fifth electrode, a third hole and an initial semiconductor element. The fourth electrode is disposed on the second substrate. The fifth electrode is arranged on the second substrate, and the fourth electrode and the fifth electrode are arranged oppositely. The third hole is disposed between the fourth electrode and the fifth electrode. The initial semiconductor element is disposed in the third hole.
在本發明的實施例中,半導體元件之容置結構包括第三電晶體以及第四電晶體,第三電晶體和第四電晶體設置於第二基板上,第三電晶體設置於第二基板和第四電極之間,第四電晶體設置於第二基板和第五電極之間。 In an embodiment of the present invention, the accommodating structure of the semiconductor element includes a third transistor and a fourth transistor, the third transistor and the fourth transistor are arranged on the second substrate, and the third transistor is arranged on the second substrate and the fourth electrode, the fourth transistor is arranged between the second substrate and the fifth electrode.
在本發明的實施例中,其中第四電極和第五電極設置於相同膜層,第三電晶體和第四電晶體設置於相同膜層。 In the embodiment of the present invention, the fourth electrode and the fifth electrode are disposed in the same film layer, and the third transistor and the fourth transistor are disposed in the same film layer.
基於上述目的,本發明提供一種半導體元件的承載結構的形成方法,其包括:(1)分別形成第一電極和第二電極於基板上,第一電極和第二電極相對設置,第一電極和第二電極之間具有第一孔洞。(2)形成第三電極於第一電極和第二電極上,第三電極為環狀且具有第二孔洞,第二孔洞暴露第一孔洞。(3)黏著半導體元件於第三電極上。 Based on the above object, the present invention provides a method for forming a carrier structure for a semiconductor element, which includes: (1) respectively forming a first electrode and a second electrode on a substrate, the first electrode and the second electrode are oppositely disposed, and the first electrode and the second electrode are opposite to each other. There are first holes between the second electrodes. (2) A third electrode is formed on the first electrode and the second electrode. The third electrode is annular and has a second hole, and the second hole exposes the first hole. (3) Adhering the semiconductor element on the third electrode.
在本發明的實施例中,於分別形成第一電極和第二電極之步驟前,形成電晶體層於基板上,電晶體層包括第一電晶體、第二電晶體,第一電晶體設置於基板和第一電極之間,第二電晶體設置於基板和第二電極之間。 In the embodiment of the present invention, before the step of forming the first electrode and the second electrode respectively, a transistor layer is formed on the substrate, the transistor layer includes a first transistor and a second transistor, and the first transistor is disposed on the substrate Between the substrate and the first electrode, the second transistor is arranged between the substrate and the second electrode.
在本發明的實施例中,於黏著半導體元件後,切割第三電極而使其分為第一導電區和第二導電區,第一導電區對應第一電極且部分覆蓋第一電極,第二導電區對應第二電極且部分覆蓋第二電極。 In the embodiment of the present invention, after adhering the semiconductor element, the third electrode is cut to divide it into a first conductive region and a second conductive region, the first conductive region corresponds to the first electrode and partially covers the first electrode, and the second conductive region The conductive area corresponds to the second electrode and partially covers the second electrode.
在本發明的實施例中,第一電極和第二電極處於相同膜層。 In the embodiment of the present invention, the first electrode and the second electrode are in the same film layer.
在本發明的實施例中,半導體元件以第二孔洞為中心的旋轉範圍為-108度至108度。 In the embodiment of the present invention, the rotation range of the semiconductor element around the second hole is -108 degrees to 108 degrees.
在本發明的實施例中,若檢測第一半導體元件為異常時,剝離第一半導體元件並重新黏著正常的第一半導體元件於第三電極上。 In the embodiment of the present invention, if it is detected that the first semiconductor element is abnormal, the first semiconductor element is peeled off and the normal first semiconductor element is reattached on the third electrode.
基於上述目的,本發明提供一種半導體元件之容置結構的修補方法,其包括:(1)分別形成第一電極和第二電極於基板上,第一電極和第二電極相對設置,第一電極和第二電極之間具有第一孔洞。(2)設置初始半導體元件於第一孔洞。(3)若檢測初始半導體為異常時,剝離初始半導體元件。(4)形成第三電極於第一電極和第二電極上,第三電極為環狀且具有第二孔洞,第二孔洞暴露第一孔洞。(5)黏著半導體元件於第三電極上。 Based on the above objects, the present invention provides a method for repairing a accommodating structure of a semiconductor element, which includes: (1) respectively forming a first electrode and a second electrode on a substrate, the first electrode and the second electrode are arranged opposite to each other, and the first electrode There is a first hole between the second electrode. (2) Disposing the initial semiconductor element in the first hole. (3) When it is detected that the initial semiconductor is abnormal, the initial semiconductor element is peeled off. (4) A third electrode is formed on the first electrode and the second electrode. The third electrode is annular and has a second hole, and the second hole exposes the first hole. (5) Adhering the semiconductor element on the third electrode.
在本發明的實施例中,於分別形成第一電極和第二電極之步驟前,形成第一電晶體以及第二電晶體於基板上,第一電晶體設置於基板和第一電極之間,第二電晶體設置於基板和第二電極之間。 In an embodiment of the present invention, before the step of forming the first electrode and the second electrode respectively, the first transistor and the second transistor are formed on the substrate, and the first transistor is disposed between the substrate and the first electrode, The second transistor is disposed between the substrate and the second electrode.
在本發明的實施例中,第一電極和第二電極設置於相同膜層,第一電晶體和第二電晶體設置於相同膜層。 In the embodiment of the present invention, the first electrode and the second electrode are arranged in the same film layer, and the first transistor and the second transistor are arranged in the same film layer.
在本發明的實施例中,於黏著半導體元件後,切割第三電極而使其分為第一導電區和第二導電區,第一導電區對應第一電極且部分覆蓋第一電極,第二導電區對應第二電極且部分覆蓋第二電極。 In the embodiment of the present invention, after adhering the semiconductor element, the third electrode is cut to divide it into a first conductive region and a second conductive region, the first conductive region corresponds to the first electrode and partially covers the first electrode, and the second conductive region The conductive area corresponds to the second electrode and partially covers the second electrode.
在本發明的實施例中,其中半導體元件以第二孔洞為中心的旋轉範圍為-108度至108度。 In the embodiment of the present invention, the rotation range of the semiconductor element with the second hole as the center is -108 degrees to 108 degrees.
承上所述,本發明之半導體元件的承載結構及其形成方法,利用第三電極的環狀設置,使本發明能容忍半導體元件的旋轉偏差增大,提高製程良率。 Based on the above, the carrier structure of the semiconductor element and the method for forming the same of the present invention utilize the annular arrangement of the third electrode, so that the present invention can tolerate the increase of the rotational deviation of the semiconductor element and improve the process yield.
10:基板 10: Substrate
10A:第一基板 10A: The first substrate
10B:第二基板 10B: Second substrate
21、21A:第一電極 21, 21A: the first electrode
22、22A:第二電極 22, 22A: the second electrode
23:第四電極 23: Fourth electrode
24:第五電極 24: Fifth electrode
30、30A:第三電極 30, 30A: the third electrode
31、31A:第一導電區 31, 31A: the first conductive area
32、32A:第二導電區 32, 32A: the second conductive area
41、41A:第一電晶體 41, 41A: the first transistor
42、42A:第二電晶體 42, 42A: the second transistor
43:第三電晶體 43: The third transistor
44:第四電晶體 44: Fourth transistor
AS:半導體元件之容置結構 AS: accommodating structure of semiconductor components
BS:半導體元件之承載結構 BS: Bearing Structure for Semiconductor Components
DP:顯示面板 DP: Display Panel
DS:顯示區 DS: Display area
H1、H11、H12:第一孔洞 H1, H11, H12: the first hole
H2:第二孔洞 H2: The second hole
NDS:非顯示區 NDS: non-display area
OSD:初始半導體元件 OSD: Initial Semiconductor Device
R1:第一區 R1: District 1
R2:第二區 R2: Zone 2
SD:半導體元件 SD: Semiconductor Components
S11~S15、S21~S27:步驟 S11~S15, S21~S27: Steps
第1圖為本發明之顯示面板的配置圖。 FIG. 1 is a configuration diagram of a display panel of the present invention.
第2圖為本發明之半導體元件之承載結構的配置圖。 FIG. 2 is a configuration diagram of the carrier structure of the semiconductor element of the present invention.
第3圖為本發明之半導體元件之容置結構的配置圖。 FIG. 3 is a configuration diagram of the accommodating structure of the semiconductor element of the present invention.
第4圖為本發明之第三電極之第一實施例的示意圖。 FIG. 4 is a schematic diagram of the first embodiment of the third electrode of the present invention.
第5圖為本發明之第三電極之第二實施例的示意圖。 FIG. 5 is a schematic diagram of a second embodiment of the third electrode of the present invention.
第6圖為本發明之半導體元件的承載結構的形成方法之流程圖。 FIG. 6 is a flow chart of a method for forming a carrier structure for a semiconductor element of the present invention.
第7圖為本發明之半導體元件的容置結構的修補方法之流程圖。 FIG. 7 is a flow chart of the repairing method of the accommodating structure of the semiconductor device according to the present invention.
本發明之優點、特徵以及達到之技術方法將參照例示性實施例及所附圖式進行更詳細地描述而更容易理解,且本發明可以不同形式來實現,故不應被理解僅限於此處所陳述的實施例,相反地,對所屬技術領域具有通常知識者而言,所提供的實施例將使本揭露更加透徹與全面且完整地傳達本發明的範疇,且本發明將僅為所附加的申請專利範圍所定義。 The advantages, features, and technical means of achieving the present invention will be more easily understood by being described in more detail with reference to the exemplary embodiments and the accompanying drawings, and the present invention may be implemented in different forms, so it should not be construed as being limited to what is described herein. Rather, the embodiments are provided so that this disclosure will be thorough, complete and complete to convey the scope of the invention to those of ordinary skill in the art, and the invention will only be appended Defined by the scope of the patent application.
應當理解的是,儘管術語「第一」、「第二」等在本發明中可用於描述各種元件、部件、區域、層及/或部分,但是這些元件、部件、區域、層及/或部分不應受這些術語的限制。這些術語僅用於將一個元件、部件、區域、層及/或部分與另一個元件、部件、區域、層及/或部分區分開。因此,下文討論的「第一元件」、「第一部件」、「第一區域」、「第一層」及/或「第一部分」可以被稱為「第二元件」、「第二部件」、「第二區域」、「第二層」及/或「第二部分」,而不悖離本發明的精神和教示。 It will be understood that although the terms "first", "second", etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections You should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer and/or section from another element, component, region, layer and/or section. Thus, "first element", "first feature", "first region", "first layer" and/or "first portion" discussed below may be referred to as "second element", "second feature" , "Second Area", "Second Layer" and/or "Second Section" without departing from the spirit and teachings of the present invention.
另外,術語「包括」及/或「包含」指所述特徵、區域、整體、步驟、操作、元件及/或部件的存在,但不排除一個或多個其他特徵、區域、整體、步驟、操作、元件、部件及/或其組合的存在或添加。 Additionally, the terms "comprising" and/or "comprising" refer to the presence of stated features, regions, integers, steps, operations, elements and/or components, but do not exclude one or more other features, regions, integers, steps, operations , elements, components and/or the presence or addition of combinations thereof.
除非另有定義,本發明所使用的所有術語(包括技術和科學術語)具有與本發明所屬技術領域的普通技術人員通常理解的相同含義。將進一步理解的是,諸如在通常使用的字典中定義的那些術語應當被解釋為具有與它們在相關技術和本發明的上下文中的含義一致的定義,並且將不被解釋為理想化或過度正式的意義,除非本文中明確地這樣定義。 Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms such as those defined in commonly used dictionaries should be construed as having definitions consistent with their meanings in the context of the related art and the present invention, and will not be construed as idealized or overly formal meaning, unless expressly defined as such herein.
請參閱第1圖,其為本發明之顯示面板的配置圖。如第1圖所示,本發明之顯示面板DP,其包括顯示區DS和非顯示區NDS,非顯示區NDS環繞於顯示區DS。顯示區DS則包括第一區R1和第二區R2,第一區R1包括半導體元件之承載結構BS,第二區R2包括半導體元件之容置結構AS。 Please refer to FIG. 1 , which is a configuration diagram of the display panel of the present invention. As shown in FIG. 1, the display panel DP of the present invention includes a display area DS and a non-display area NDS, and the non-display area NDS surrounds the display area DS. The display area DS includes a first area R1 and a second area R2, the first area R1 includes a semiconductor element supporting structure BS, and the second area R2 includes a semiconductor element accommodating structure AS.
請參閱第2圖,其為本發明之半導體元件之承載結構的配置圖。如第1圖所示,本發明之半導體元件之承載結構BS,其包括第一基板10A、第一電極21、第二電極22、第一孔洞H1、第三電極30以及半導體元件SD。第一電極
21和第二電極22設置於第一基板10A上,第一電極21和第二電極22相對設置。第一孔洞H1設置於第一電極21和第二電極22之間。第三電極30設置於第一電極21和第二電極22上,第三電極30為環狀且具有第二孔洞H2(如第4圖和第5圖所示),第二孔洞H2暴露第一孔洞H1。半導體元件SD設置於第三電極30上。
Please refer to FIG. 2 , which is a configuration diagram of the carrier structure of the semiconductor device of the present invention. As shown in FIG. 1 , the carrier structure BS of the semiconductor device of the present invention includes a
本發明之半導體元件之承載結構BS進一步包括電晶體層,電晶體層包括第一電晶體41和第二電晶體42,第一電晶體41和第二電晶體42設置於第一基板10A上,第一電晶體41設置於第一基板10A和第一電極21之間,第二電晶體42設置於第一基板10A和第二電極22之間,第一孔洞H1也位於第一電晶體41和第二電晶體42之間。其中,第一電極21和第二電極22位於相同膜層,第一電晶體41和第二電晶體42也位於相同膜層。
The carrier structure BS of the semiconductor element of the present invention further includes a transistor layer, the transistor layer includes a
請參閱第3圖,其為本發明之半導體元件之容置結構的配置圖。如第3圖所示,本發明之半導體元件之容置結構AS,其包括第二基板10B、第三電晶體43和第四電晶體44、第四電極23、第五電極24、第三孔洞H3以及初始半導體元件OSD。第三電晶體43和第四電晶體44設置於第二基板10B上,第四電極23設置於第三電晶體43上且從第三電晶體43的表面延伸至第三電晶體43和第二基板10B之交界處,第五電極24設置於第四電晶體44上;亦即,第三電晶體43設置於第二基板10B和第四電極23之間,第四電晶體44設置於第二基板10B和第五電極24之間。第三孔洞H3設置於第三電晶體43和第四電晶體44之間,第三孔洞H3也設置於第四電極23和第五電極24之間。初始半導體元件OSD設置於第三孔洞H3。其中,第四電極23和第五電極24設置於相同膜層,第三電晶體43和第四電晶體44設置於相同膜層。
Please refer to FIG. 3 , which is a configuration diagram of the accommodating structure of the semiconductor device of the present invention. As shown in FIG. 3, the accommodating structure AS of the semiconductor device of the present invention includes a
其中,第一基板10A和第二基板10B例如可包括玻璃基板、石英基板、聚合物樹脂所形成的基板或例如聚亞醯胺之可撓性材料形成的可撓性基板。聚合物樹脂的材料可包括聚醚碸(polyethersulfone,PES)、聚丙烯酸酯(polyacrylate,PA)、聚芳酯(polyarylate,PAT)、聚醚醯亞胺(polyetherimide,PEI)、聚2,6萘二甲酸乙二酯(polyethylene naphthalate,PEN)、聚對酞酸乙二酯(polyethylene terephthalate,PET)、聚苯硫(polyphenylene sulfide,PPS)、聚芳基酸酯(polyallylate)、聚亞醯胺(polyimide,PI)、聚碳酸酯(polycarbonate,PC)、纖維素三乙酸酯(cellulose triacetate,CAT或TAC)、醋酸丙酸纖維素(cellulose acetate propionate,CAP)或其組合物,第一基板10A和第二基板10B可為相同或相異材料的基板。第一電極21、第二電極22、第三電極30、第四電極23以及第五電極24的材料例如可包括銦(In)、錫(Sn)、鋁(Al)、金(Au)、鉑(Pt)、銦(In)、鋅(Zn)、鍺(Ge)、銀(Ag)、鉛(Pb)、鈀(Pd)、銅(Cu)、鈹化金(AuBe)、鈹化鍺(BeGe)、鎳(Ni)、錫化鉛(PbSn)、鉻(Cr)、鋅化金(AuZn)、鈦(Ti)、鎢(W)以及鎢化鈦(TiW)等所組成材料中至少一種。第一電晶體41、第二電晶體42、第三電晶體43以及第四電晶體44可包括薄膜電晶體(thin film transistor,TFT)、底閘極式(bottom-gate)電晶體、頂閘極式(top-gate)電晶體或立體式的電晶體(vertical TFT)。半導體元件SD和初始半導體元件OSD例如可以是水平式發光二極體、覆晶式發光二極體、垂直式發光二極體或其他電子元件,而未侷限於本發明所列舉的範圍。
The
請參閱第4圖和第5圖,其為本發明之第三電極之第一實施例的示意圖和本發明之第三電極之第二實施例的示意圖。如第4圖所示,第三電極30為圓形環狀並具有第二孔洞H2,第二孔洞H2的截面形狀也為圓形,半導體元件SD的設置於第三電極30上。根據半導體元件SD的設置位置,劃分第一導電區31和
第二導電區32,第一導電區31對應第一電極21且部分覆蓋第一電極21,第二導電區32對應第二電極22且部分覆蓋第二電極22;半導體元件SD以第二孔洞H2為中心的旋轉範圍為-105度至105度,本發明能容忍半導體元件SD的旋轉偏差,進而提高製程良率。
Please refer to FIG. 4 and FIG. 5 , which are schematic diagrams of the first embodiment of the third electrode of the present invention and a schematic diagram of the second embodiment of the third electrode of the present invention. As shown in FIG. 4 , the
如第5圖所示,第三電極30為方形環狀並具有第二孔洞H2,第二孔洞H2的截面形狀也為方形,半導體元件SD的設置於第三電極30上。同樣地,根據半導體元件SD的設置位置,劃分第一導電區31和第二導電區32,第一導電區31對應第一電極21且部分覆蓋第一電極21,第二導電區32對應第二電極22且部分覆蓋第二電極22;半導體元件SD以第二孔洞H2為中心的旋轉範圍為-108度至108度,本發明能容忍半導體元件SD的旋轉偏差,進而提高製程良率。
As shown in FIG. 5 , the
其中,根據半導體元件SD的所需,第三電極30的截面形狀可為圓形或多邊形,而未侷限於本發明所列舉的範圍。在一實施例中,第一導電區31和第一電極21的極性為正極,第二導電區32和第二電極22的極性為負極;在另一實施例中,第一導電區31和第一電極21的極性為負極,第二導電區32和第二電極22的極性為正極。
Wherein, according to the requirements of the semiconductor element SD, the cross-sectional shape of the
請參閱第6圖,其為本發明之半導體元件的承載結構的形成方法之流程圖。如第6圖所示,並搭配第1圖和第4圖所示說明本發明之半導體元件的承載結構的形成方法如下:S11步驟:形成第一電晶體41和第二電晶體42於基板10上,第一孔洞H11位於第一電晶體41和第二電晶體42之間,第一電晶體41和第二電晶體42相對設置。
Please refer to FIG. 6 , which is a flow chart of the method for forming the carrier structure of the semiconductor device of the present invention. As shown in FIG. 6 , together with FIGS. 1 and 4 , the method for forming the carrier structure of the semiconductor device of the present invention is described as follows: Step S11 : forming the
S12步驟:分別形成第一電極21和第二電極22於第一電晶體41上和第二電晶體42上,第一孔洞H11也位於第一電極21和第二電極22之間。
Step S12 : respectively forming the
S13步驟:形成第三電極30於第一電極21和第二電極22上,第三電極30為環狀且具有第二孔洞(如第4圖所示),第二孔洞暴露第一孔洞H11。
Step S13 : forming a
S14步驟:黏著半導體元件SD於第三電極30上。
Step S14 : adhering the semiconductor element SD on the
S15步驟:根據半導體元件SD的設置位置,切割第三電極30而使其分為第一導電區31和第二導電區32,第一導電區31對應第一電極21且部分覆蓋第一電極21,第二導電區32對應第二電極22且部分覆蓋第二電極22。
Step S15: According to the setting position of the semiconductor element SD, the
若檢測半導體元件SD為異常時,剝離半導體元件SD並重新黏著正常的半導體元件SD於第三電極30上。其中,剝離半導體元件SD的方法可例如利用雷射剝離或濕式剝離。
If it is detected that the semiconductor element SD is abnormal, the semiconductor element SD is peeled off and the normal semiconductor element SD is re-attached on the
請參閱第7圖,其為本發明之半導體元件的容置結構的修補方法之流程圖。如第7圖所示,說明本發明之半導體元件的容置結構的修補方法如下:S21步驟:分別形成第一電晶體41A和第二電晶體42A於基板10上,第一孔洞H12位於第一電晶體41A和第二電晶體42A之間,第一電晶體41A和第二電晶體42A相對設置。其中,第一電晶體41A和第二電晶體42A設置於相同膜層。
Please refer to FIG. 7 , which is a flowchart of the repairing method of the accommodating structure of the semiconductor device of the present invention. As shown in FIG. 7 , the repairing method of the accommodating structure of the semiconductor device of the present invention is described as follows: Step S21 : respectively forming the
S22步驟:形成第一電極21A於第一電晶體41A上,第一電極21A從第一電晶體41A的表面延伸至第一電晶體41A和基板10之交界處。
Step S22 : forming the
S23步驟:設置初始半導體元件OSD於第一孔洞H12,形成第二電極22A於第二電晶體42A上,而第一電極21A和第二電極22A分別電性接觸初始半導體元件OSD的正極和負極。其中,第一電極21A和第二電極22A設置於相同膜層。
Step S23: disposing the initial semiconductor element OSD in the first hole H12, forming a
S24步驟:若檢測初始半導體OSD為異常時,剝離初始半導體元件OSD。 Step S24: if it is detected that the initial semiconductor OSD is abnormal, the initial semiconductor element OSD is peeled off.
S25步驟:形成第三電極30A於第一電極21A和第二電極22A上,第三電極30A為環狀且具有第二孔洞(如第4圖所示),第二孔洞暴露第一孔洞H12。
Step S25 : forming a
S26步驟:重新黏著正常的半導體元件SD於第三電極30A上。
Step S26: Re-adhere the normal semiconductor element SD on the
S27步驟:切割第三電極30A而使其分為第一導電區31A和第二導電區32A,第一導電區31A對應第一電極21A且部分覆蓋第一電極21A,第二導電區32A對應第二電極22A且部分覆蓋第二電極22A。
Step S27: Cutting the
承上所述,本發明之半導體元件的承載結構及其形成方法,利用第三電極30的環狀設置,使本發明能容忍半導體元件SD的旋轉偏差增大,提高製程良率。
Based on the above, the carrier structure of the semiconductor device and the method for forming the same of the present invention utilize the annular arrangement of the
以上所述僅為舉例性,而非為限制性者。任何未脫離本發明之精神與範疇,而對其進行之等效修改或變更,均應包含於後附之申請專利範圍中。 The above description is exemplary only, not limiting. Any equivalent modifications or changes that do not depart from the spirit and scope of the present invention shall be included in the appended patent application scope.
10A:第一基板 10A: The first substrate
21:第一電極 21: The first electrode
22:第二電極 22: Second electrode
30:第三電極 30: Third electrode
41:第一電晶體 41: The first transistor
42:第二電晶體 42: The second transistor
BS:半導體元件之承載結構 BS: Bearing Structure for Semiconductor Components
H1:第一孔洞 H1: The first hole
SD:半導體元件 SD: Semiconductor Components
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