TWI747442B - Semiconductor memory device and its reading method - Google Patents
Semiconductor memory device and its reading method Download PDFInfo
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- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0483—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells having several storage transistors connected in series
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- G—PHYSICS
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- G11C—STATIC STORES
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- G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
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- G11C16/08—Address circuits; Decoders; Word-line control circuits
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/24—Bit-line control circuits
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- G—PHYSICS
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- G11C16/00—Erasable programmable read-only memories
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- G11C16/26—Sensing or reading circuits; Data output circuits
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- G—PHYSICS
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- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/34—Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
- G11C16/3418—Disturbance prevention or evaluation; Refreshing of disturbed memory data
- G11C16/3427—Circuits or methods to prevent or reduce disturbance of the state of a memory cell when neighbouring cells are read or written
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- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
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Abstract
本發明之實施方式提供一種能夠抑制讀取錯誤之發生之半導體記憶裝置及其讀取方法。 實施方式之半導體記憶裝置包含:NAND串,其具備串聯連接且彼此相鄰之第1及第2記憶胞;第1字元線,其與第1記憶胞之閘極連接;第2字元線,其與第2記憶胞之閘極連接;位元線,其與NAND串連接;及感測放大器,其包含感測節點、連接於感測節點與位元線之間之第1電晶體、及鎖存電路。該半導體記憶裝置能夠執行包含第1讀取動作與第2讀取動作之讀取動作。於選擇第1字元線之讀取動作中,於第1讀取動作時,對第2字元線施加第1讀取電壓,於施加第1讀取電壓之期間,將感測節點經由第1電晶體與位元線連接,於感測節點經由第1電晶體與位元線連接後,將基於感測節點之電壓的第1資料儲存至鎖存電路,於第2讀取動作時,對第1字元線施加第2讀取電壓,於施加第2讀取電壓之期間,將感測節點經由第1電晶體在第1時間與位元線連接,於感測節點經由第1電晶體在第1時間與位元線連接後,將基於感測節點之電壓的第2資料儲存至鎖存電路,在第2資料儲存至鎖存電路後,於施加第2讀取電壓之期間,將感測節點經由第1電晶體在和第1時間不同之第2時間與位元線連接,於感測節點經由第1電晶體在第2時間與位元線連接後,將基於感測節點之電壓的第3資料儲存至鎖存電路。 The embodiments of the present invention provide a semiconductor memory device and a reading method thereof that can suppress the occurrence of read errors. The semiconductor memory device of the embodiment includes: a NAND string having first and second memory cells connected in series and adjacent to each other; a first character line connected to the gate of the first memory cell; and a second character line , Which is connected to the gate of the second memory cell; bit line, which is connected to the NAND string; and a sense amplifier, which includes a sense node, a first transistor connected between the sense node and the bit line, And latch circuit. The semiconductor memory device can perform a reading operation including a first reading operation and a second reading operation. In the read operation of selecting the first word line, in the first read operation, the first read voltage is applied to the second word line, and the sensing node is passed through the first read voltage during the period when the first read voltage is applied. 1 The transistor is connected to the bit line. After the sensing node is connected to the bit line via the first transistor, the first data based on the voltage of the sensing node is stored in the latch circuit. During the second read operation, The second read voltage is applied to the first word line. During the period when the second read voltage is applied, the sensing node is connected to the bit line via the first transistor at the first time, and the sensing node is connected to the bit line via the first transistor at the first time. After the crystal is connected to the bit line at the first time, the second data based on the voltage of the sensing node is stored in the latch circuit. After the second data is stored in the latch circuit, during the period when the second read voltage is applied, Connect the sensing node to the bit line through the first transistor at a second time different from the first time. After the sensing node is connected to the bit line at the second time through the first transistor, it will be based on the sensing node The third data of the voltage is stored in the latch circuit.
Description
實施方式係關於一種半導體記憶裝置及其讀取方法。The embodiment relates to a semiconductor memory device and a reading method thereof.
已知有能夠非揮發性地記憶資料之NAND(Not AND,反及)型快閃記憶體。Known are NAND (Not AND) type flash memory that can store data non-volatilely.
實施方式提供一種能夠抑制讀取錯誤之發生之半導體記憶裝置及其讀取方法。The embodiment provides a semiconductor memory device and a reading method thereof capable of suppressing the occurrence of read errors.
實施方式之半導體記憶裝置包含:NAND串,其具備串聯連接且彼此相鄰之第1及第2記憶胞;第1字元線,其與第1記憶胞之閘極連接;第2字元線,其與第2記憶胞之閘極連接;位元線,其與NAND串連接;及感測放大器,其包含感測節點、連接於感測節點與位元線之間之第1電晶體、及鎖存電路。該半導體記憶裝置能夠執行包含第1讀取動作與第2讀取動作之讀取動作。於選擇第1字元線之讀取動作中,於第1讀取動作時,對第2字元線施加第1讀取電壓,於施加第1讀取電壓之期間,將感測節點經由第1電晶體與位元線連接,於感測節點經由第1電晶體與位元線連接後,將基於感測節點之電壓的第1資料儲存至鎖存電路,於第2讀取動作時,對第1字元線施加第2讀取電壓,於施加第2讀取電壓之期間,將感測節點經由第1電晶體在第1時間與位元線連接,於感測節點經由第1電晶體在第1時間與位元線連接後,將基於感測節點之電壓的第2資料儲存至鎖存電路,在第2資料儲存至鎖存電路後,於施加第2讀取電壓之期間,將感測節點經由第1電晶體在和第1時間不同之第2時間與位元線連接,於感測節點經由第1電晶體在第2時間與位元線連接後,將基於感測節點之電壓的第3資料儲存至鎖存電路。The semiconductor memory device of the embodiment includes: a NAND string having first and second memory cells connected in series and adjacent to each other; a first character line connected to the gate of the first memory cell; and a second character line , Which is connected to the gate of the second memory cell; bit line, which is connected to the NAND string; and a sense amplifier, which includes a sense node, a first transistor connected between the sense node and the bit line, And latch circuit. The semiconductor memory device can perform a reading operation including a first reading operation and a second reading operation. In the read operation of selecting the first word line, in the first read operation, the first read voltage is applied to the second word line, and the sensing node is passed through the first read voltage during the period when the first read voltage is applied. 1 The transistor is connected to the bit line. After the sensing node is connected to the bit line via the first transistor, the first data based on the voltage of the sensing node is stored in the latch circuit. During the second read operation, The second read voltage is applied to the first word line. During the period when the second read voltage is applied, the sensing node is connected to the bit line via the first transistor at the first time, and the sensing node is connected to the bit line via the first transistor at the first time. After the crystal is connected to the bit line at the first time, the second data based on the voltage of the sensing node is stored in the latch circuit. After the second data is stored in the latch circuit, during the period when the second read voltage is applied, Connect the sensing node to the bit line through the first transistor at a second time different from the first time. After the sensing node is connected to the bit line at the second time through the first transistor, it will be based on the sensing node The third data of the voltage is stored in the latch circuit.
以下,參照圖式對實施方式進行說明。各實施方式例示了用於實現發明之技術思想之裝置及方法。圖式係示意性或概念性之圖,各圖式之尺寸及比例等不一定與實物相同。本發明之技術思想並非由構成要素之形狀、構造及配置等特定出。Hereinafter, the embodiments will be described with reference to the drawings. Each embodiment illustrates an apparatus and method for realizing the technical idea of the invention. The drawings are schematic or conceptual drawings, and the sizes and proportions of the drawings are not necessarily the same as the actual objects. The technical idea of the present invention is not specified by the shape, structure, and arrangement of the constituent elements.
再者,以下說明中,對具有大致相同功能及構成之構成要素標註相同符號。構成參照符號之字符後之數位係藉由包含相同字符之參照符號來參照,且用於區分具有相同構成之要素彼此。於無需將由包含相同字符之參照符號表示之要素彼此區分之情形時,該等要素係分別藉由僅包含字符之參照符號來參照。In addition, in the following description, components having substantially the same function and configuration are denoted by the same reference numerals. The digits after the characters constituting the reference symbol are referenced by the reference symbol containing the same character, and are used to distinguish elements with the same composition from each other. When there is no need to distinguish the elements represented by the reference signs containing the same characters from each other, these elements are respectively referred to by the reference signs containing only the characters.
[1]第1實施方式
以下,對第1實施方式之半導體記憶裝置1進行說明。
[1] The first embodiment
Hereinafter, the
[1-1]半導體記憶裝置1之構成
[1-1-1]半導體記憶裝置1之整體構成
圖1表示第1實施方式之半導體記憶裝置1之構成例。半導體記憶裝置1係能夠非揮發性地記憶資料之NAND型快閃記憶體,能夠藉由外部之記憶體控制器2進行控制。如圖1所示,半導體記憶裝置1具備例如記憶胞陣列10、指令暫存器11、位址暫存器12、定序器13、驅動器模組14、列解碼器模組15以及感測放大器模組16。
[1-1] Configuration of semiconductor memory device 1
[1-1-1] Overall structure of
記憶胞陣列10包含複數個區塊BLK0~BLK(N-1)(N為1以上之整數)。區塊BLK包含能夠非揮發性地記憶資料之複數個記憶胞之集合,例如用作資料之抹除單位。又,於記憶胞陣列10中設置有複數條位元線及複數條字元線。各記憶胞例如與1條位元線和1條字元線相關聯。關於記憶胞陣列10之詳細構成將於下文進行詳細敍述。The
指令暫存器11保持半導體記憶裝置1從記憶體控制器2接收到之指令CMD。指令CMD包含例如使定序器13執行讀取動作、寫入動作、抹除動作等之命令。The
位址暫存器12保持半導體記憶裝置1從記憶體控制器2接收到之位址資訊ADD。位址資訊ADD包含例如區塊位址BAd、頁位址PAd及行位址CAd。例如,區塊位址BAd、頁位址PAd及行位址CAd分別用於區塊BLK、字元線及位元線之選擇。The
定序器13控制半導體記憶裝置1整體之動作。例如,定序器13基於指令暫存器11中所保持之指令CMD來控制驅動器模組14、列解碼器模組15及感測放大器模組16等,執行讀取動作、寫入動作及抹除動作等。The
驅動器模組14產生讀取動作、寫入動作及抹除動作等中所使用之電壓。並且,驅動器模組14例如基於位址暫存器12中所保持之頁位址PAd,對與所選擇之字元線對應之信號線施加所產生之電壓。The
列解碼器模組15基於位址暫存器12中所保持之區塊位址BAd,選擇對應之記憶胞陣列10內之1個區塊BLK。並且,列解碼器模組15例如將施加至與所選擇之字元線對應之信號線之電壓傳輸至所選擇之區塊BLK內之被選擇之字元線。The
感測放大器模組16於寫入動作中,根據從記憶體控制器2接收到之寫入資料DAT,對各位元線施加所期望之電壓。又,感測放大器模組16於讀取動作中,基於位元線之電壓判定記憶胞中所記憶之資料,將判定結果以讀取資料DAT之形式傳輸至記憶體控制器2。In the write operation, the
半導體記憶裝置1與記憶體控制器2之間之通信例如支持NAND介面標準。例如,半導體記憶裝置1與記憶體控制器2之間之通信中,使用指令鎖存賦能信號CLE、位址鎖存賦能信號ALE、寫入賦能信號WEn、讀取賦能信號REn、就緒/忙碌信號RBn及輸入輸出信號I/O。The communication between the
指令鎖存賦能信號CLE係表示半導體記憶裝置1所接收到之輸入輸出信號I/O為指令CMD之信號。位址鎖存賦能信號ALE係表示半導體記憶裝置1所接收到之輸入輸出信號I/O為位址資訊ADD之信號。寫入賦能信號WEn係對半導體記憶裝置1命令輸入輸出信號I/O之輸入之信號。讀取賦能信號REn係對半導體記憶裝置1命令輸入輸出信號I/O之輸出之信號。就緒/忙碌信號RBn係向記憶體控制器2通知半導體記憶裝置1為就緒狀態及忙碌狀態中之哪一個之信號。就緒狀態係半導體記憶裝置1受理命令之狀態,忙碌狀態係半導體記憶裝置1不受理命令之狀態。輸入輸出信號I/O例如係8位元寬度之信號,可包含指令CMD、位址資訊ADD、資料DAT等。The command latch enabling signal CLE is a signal indicating that the input/output signal I/O received by the
以上所說明之半導體記憶裝置1及記憶體控制器2亦可藉由其等之組合來構成1個半導體裝置。作為此種半導體裝置,例如可列舉諸如SD(Secure Digital,安全數位)
TM卡之記憶卡、及SSD(solid state drive,固態硬碟)等。
The
[1-1-2]半導體記憶裝置1之電路構成
(關於記憶胞陣列10之電路構成)
圖2係抽選記憶胞陣列10所包含之複數個區塊BLK中之1個區塊BLK來表示第1實施方式之半導體記憶裝置1所具備之記憶胞陣列10的電路構成之一例。如圖2所示,區塊BLK例如包含4個串單元SU0~SU3。
[1-1-2] Circuit configuration of semiconductor memory device 1
(About the circuit configuration of the memory cell array 10)
FIG. 2 shows an example of the circuit configuration of the
各串單元SU包含分別與位元線BL0~BLm(m為1以上之整數)相關聯之複數個NAND串NS。各NAND串NS例如包含記憶胞電晶體MT0~MT7、以及選擇電晶體ST1及ST2。記憶胞電晶體MT包含控制閘極及電荷蓄積層,非揮發性地保持資料。選擇電晶體ST1及ST2分別用於各種動作時之串單元SU之選擇。Each string unit SU includes a plurality of NAND strings NS respectively associated with bit lines BL0 to BLm (m is an integer greater than or equal to 1). Each NAND string NS includes, for example, memory cell transistors MT0 to MT7, and select transistors ST1 and ST2. The memory cell transistor MT includes a control gate and a charge storage layer, and holds data non-volatilely. The selection transistors ST1 and ST2 are respectively used for the selection of the string unit SU during various actions.
各NAND串NS中,記憶胞電晶體MT0~MT7串聯連接。選擇電晶體ST1之汲極與相關聯之位元線BL連接,選擇電晶體ST1之源極與串聯連接之記憶胞電晶體MT0~MT7之一端連接。選擇電晶體ST2之汲極與串聯連接之記憶胞電晶體MT0~MT7之另一端連接。選擇電晶體ST2之源極與源極線SL連接。In each NAND string NS, memory cell transistors MT0 to MT7 are connected in series. The drain of the selected transistor ST1 is connected to the associated bit line BL, and the source of the selected transistor ST1 is connected to one end of the memory cell transistors MT0 to MT7 connected in series. The drain of the selective transistor ST2 is connected to the other end of the memory cell transistors MT0 to MT7 connected in series. The source of the selective transistor ST2 is connected to the source line SL.
同一區塊BLK中,記憶胞電晶體MT0~MT7之控制閘極分別共通連接於字元線WL0~WL7。串單元SU0~SU3內之各個選擇電晶體ST1之閘極分別共通連接於選擇閘極線SGD0~SGD3。同一區塊BLK中所包含之選擇電晶體ST2之閘極共通連接於選擇閘極線SGS。In the same block BLK, the control gates of the memory cell transistors MT0~MT7 are respectively connected to the word lines WL0~WL7 in common. The gates of the selection transistors ST1 in the string units SU0 to SU3 are respectively connected to the selection gate lines SGD0 to SGD3 in common. The gates of the selection transistors ST2 included in the same block BLK are commonly connected to the selection gate line SGS.
以上所說明之記憶胞陣列10之電路構成中,位元線BL由各串單元SU中被分配同一行位址之NAND串NS所共有。源極線SL例如為複數個區塊BLK間所共有。In the circuit configuration of the
1個串單元SU內之連接於共通字元線WL之複數個記憶胞電晶體MT之集合例被稱作如胞單元CU。例如,將包含分別記憶1位元資料之記憶胞電晶體MT之胞單元CU之記憶電容定義為「1頁資料」。胞單元CU可相應於記憶胞電晶體MT所記憶之資料之位元數,具有2頁資料以上之記憶電容。An example of a collection of a plurality of memory cell transistors MT connected to the common word line WL in a string unit SU is called a cell unit CU. For example, the memory capacitor including the cell unit CU of the memory cell transistor MT that respectively stores 1 bit of data is defined as "1 page of data". The cell unit CU can correspond to the number of bits of the data stored in the memory cell transistor MT, and has a memory capacitor with more than 2 pages of data.
再者,第1實施方式之半導體記憶裝置1所具備之記憶胞陣列10之電路構成並不限於以上所說明之構成。例如,各區塊BLK所包含之串單元SU之個數、或各NAND串NS所包含之記憶胞電晶體MT以及選擇電晶體ST1及ST2之個數可分別為任意個數。Furthermore, the circuit configuration of the
(關於列解碼器模組15之電路構成)
圖3表示第1實施方式之半導體記憶裝置1所具備之列解碼器模組15之電路構成之一例。如圖3所示,列解碼器模組15包含例如列解碼器RD0~RD(N-1),且經由信號線CG0~CG7、SGDD0~SGDD3、SGSD、USGD及USGS與驅動器模組14連接。列解碼器RD0~RD(N-1)分別與區塊BLK0~BLK(N-1)相關聯。
(About the circuit configuration of column decoder module 15)
FIG. 3 shows an example of the circuit configuration of the
以下,著眼於與區塊BLK0對應之列解碼器RD0,說明列解碼器RD之詳細電路構成。列解碼器RD包含例如區塊解碼器BD、傳輸閘極線TG及bTG、以及電晶體TR0~TR17。Hereinafter, focusing on the column decoder RD0 corresponding to the block BLK0, the detailed circuit configuration of the column decoder RD will be described. The column decoder RD includes, for example, a block decoder BD, transmission gate lines TG and bTG, and transistors TR0 to TR17.
區塊解碼器BD對區塊位址BAd進行解碼。並且,區塊解碼器BD基於解碼結果分別對傳輸閘極線TG及bTG施加規定電壓。施加至傳輸閘極線TG之電壓與施加至傳輸閘極線bTG之電壓具有互補關係。換言之,對傳輸閘極線bTG輸入傳輸閘極線TG之反相信號。The block decoder BD decodes the block address BAd. In addition, the block decoder BD applies predetermined voltages to the transmission gate lines TG and bTG, respectively, based on the decoding result. The voltage applied to the transmission gate line TG and the voltage applied to the transmission gate line bTG have a complementary relationship. In other words, the inverted signal of the transmission gate line TG is input to the transmission gate line bTG.
電晶體TR0~TR17分別為高耐壓之N型MOS(Metal Oxide Semiconductor,金屬氧化物半導體)電晶體。電晶體TR0~TR12各自之閘極共通連接於傳輸閘極線TG。電晶體TR13~TR17各自之閘極共通連接於傳輸閘極線bTG。又,各電晶體TR連接於從驅動器模組14起佈線之信號線與對應之區塊BLK上所設置之佈線之間。The transistors TR0 to TR17 are high voltage N-type MOS (Metal Oxide Semiconductor) transistors. The respective gates of the transistors TR0 to TR12 are commonly connected to the transmission gate line TG. The respective gates of the transistors TR13 to TR17 are commonly connected to the transmission gate line bTG. In addition, each transistor TR is connected between the signal line wired from the
具體而言,電晶體TR0之汲極與信號線SGSD連接。電晶體TR0之源極與選擇閘極線SGS連接。電晶體TR1~TR8各自之汲極分別與信號線CG0~CG7連接。電晶體TR1~TR8各自之源極分別與字元線WL0~WL7連接。電晶體TR9~TR12各自之汲極分別與信號線SGDD0~SGDD3連接。電晶體TR9~TR12各自之源極分別與選擇閘極線SGD0~SGD3連接。電晶體TR13之汲極與信號線USGS連接。電晶體TR13之源極與選擇閘極線SGS連接。電晶體TR14~TR17各自之汲極共通連接於信號線USGD。電晶體TR14~TR17各自之源極分別與選擇閘極線SGD0~SGD3連接。Specifically, the drain of the transistor TR0 is connected to the signal line SGSD. The source of the transistor TR0 is connected to the select gate line SGS. The drains of the transistors TR1 to TR8 are respectively connected to the signal lines CG0 to CG7. The respective sources of the transistors TR1 to TR8 are respectively connected to the word lines WL0 to WL7. The drains of the transistors TR9 to TR12 are respectively connected to the signal lines SGDD0 to SGDD3. The respective sources of the transistors TR9 to TR12 are respectively connected to the selection gate lines SGD0 to SGD3. The drain of the transistor TR13 is connected to the signal line USGS. The source of the transistor TR13 is connected to the select gate line SGS. The respective drains of the transistors TR14 to TR17 are commonly connected to the signal line USGD. The respective sources of the transistors TR14 to TR17 are respectively connected to the selection gate lines SGD0 to SGD3.
即,信號線CG0~CG7被用作複數個區塊BLK間共有之全局字元線,字元線WL0~WL7被用作針對每個區塊BLK設置之局部字元線。又,信號線SGDD0~SGDD3以及SGSD被用作複數個區塊BLK間共有之全局傳輸閘極線,選擇閘極線SGD0~SGD3以及SGS被用作針對每個區塊BLK設置之局部傳輸閘極線。That is, the signal lines CG0 to CG7 are used as global word lines shared by a plurality of blocks BLK, and the word lines WL0 to WL7 are used as local word lines provided for each block BLK. In addition, the signal lines SGDD0 ~ SGDD3 and SGSD are used as global transmission gate lines shared by a plurality of blocks BLK, and the selection gate lines SGD0 ~ SGD3 and SGS are used as local transmission gates for each block BLK. String.
根據以上構成,列解碼器模組15能夠選擇區塊BLK。具體而言,於各種動作時,與所選擇之區塊BLK對應之區塊解碼器BD將“H(High,高)”位準及“L(Lower,低)”位準之電壓分別施加至傳輸閘極線TG及bTG,與非選擇之區塊BLK對應之區塊解碼器BD將“L”位準及“H”位準之電壓分別施加至傳輸閘極線TG及bTG。According to the above configuration, the
再者,以上所說明之列解碼器模組15之電路構成僅為一例,可適當改變。例如,列解碼器模組15所包含之電晶體TR之個數係基於設置在各區塊BLK之佈線之條數來設計。Furthermore, the circuit configuration of the
(關於感測放大器模組16之電路構成)
圖4係表示第1實施方式之半導體記憶裝置1所具備之感測放大器模組16的電路構成之一例。如圖4所示,各感測放大器單元SAU包含例如位元線連接部BLHU、感測放大器部SA、邏輯電路LC以及鎖存電路SDL、ADL、BDL、CDL、DDL、EDL及XDL。
(About the circuit configuration of the sense amplifier module 16)
FIG. 4 shows an example of the circuit configuration of the
位元線連接部BLHU包含連接於相關聯之位元線BL與感測放大器部SA之間之高耐壓電晶體。感測放大器部SA、邏輯電路LC以及鎖存電路SDL、ADL、BDL、CDL、DDL、EDL及XDL共通連接於總線LBUS。鎖存電路SDL、ADL、BDL、CDL、DDL、EDL及XDL能夠相互收發資料。The bit line connection part BLHU includes a high-resistance piezoelectric crystal connected between the associated bit line BL and the sense amplifier part SA. The sense amplifier section SA, the logic circuit LC, and the latch circuits SDL, ADL, BDL, CDL, DDL, EDL, and XDL are commonly connected to the bus LBUS. The latch circuits SDL, ADL, BDL, CDL, DDL, EDL and XDL can send and receive data to and from each other.
向各感測放大器部SA輸入例如由定序器13產生之控制信號STB。而且,感測放大器部SA基於生效控制信號STB之時點,判定被讀取至相關聯之位元線BL之資料是“0”還是“1”。即,感測放大器部SA基於位元線BL之電壓,對被選擇之記憶胞所記憶之資料加以判定。The control signal STB generated by the
邏輯電路LC使用連接於共通總線LBUS之鎖存電路SDL、ADL、BDL、CDL、DDL、EDL及XDL中所保持之資料執行多種邏輯運算。具體而言,例如邏輯電路LC能夠使用各感測放大器單元SAU中所設置之鎖存電路中之2個鎖存電路所保持之資料,執行AND(及)運算、OR(或)運算、NAND運算、NOR(NOT-OR,反或)運算、EXNOR(Exclusive-NOR,互斥或)運算等。The logic circuit LC uses the data held in the latch circuits SDL, ADL, BDL, CDL, DDL, EDL, and XDL connected to the common bus LBUS to perform various logic operations. Specifically, for example, the logic circuit LC can use the data held by two latch circuits of the latch circuits provided in each sense amplifier unit SAU to perform AND operation, OR operation, and NAND operation. , NOR (NOT-OR, inverse OR) operation, EXNOR (Exclusive-NOR, mutually exclusive OR) operation, etc.
鎖存電路SDL、ADL、BDL、CDL、DDL、EDL及XDL分別暫時保持資料。鎖存電路XDL被用於半導體記憶裝置1之輸入輸出電路與感測放大器單元SAU之間之資料DAT之輸入輸出。又,鎖存電路XDL亦可被用作例如半導體記憶裝置1之快取記憶體。只要至少鎖存電路XDL空閒,半導體記憶裝置1便可成為就緒狀態。The latch circuits SDL, ADL, BDL, CDL, DDL, EDL and XDL respectively temporarily hold data. The latch circuit XDL is used for the input and output of the data DAT between the input/output circuit of the
圖5表示第1實施方式之半導體記憶裝置1之感測放大器單元SAU的電路構成之一例。如圖5所示,例如,感測放大器部SA包含電晶體20~27及電容器28,位元線連接部BLHU包含電晶體29。電晶體20為P型MOS電晶體。電晶體21~27分別為N型MOS電晶體。電晶體29係較電晶體20~27之各者更高耐壓之N型MOS電晶體。FIG. 5 shows an example of the circuit configuration of the sense amplifier unit SAU of the
電晶體20之源極連接於電源線。電晶體20之汲極連接於節點ND1。電晶體20之節點連接於例如鎖存電路SDL內之節點SINV。電晶體21之汲極連接於節點ND1。電晶體21之源極連接於節點ND2。向電晶體21之節點輸入控制信號BLX。電晶體22之汲極連接於節點ND1。電晶體22之源極連接於節點SEN。向電晶體22之節點輸入控制信號HLL。The source of the
電晶體23之汲極連接於節點SEN。電晶體23之源極連接於節點ND2。向電晶體23之節點輸入控制信號XXL。電晶體24之汲極連接於節點ND2。向電晶體24之節點輸入控制信號BLC。電晶體25之汲極連接於節點ND2。電晶體25之源極連接於節點SRC。電晶體25之節點連接於例如鎖存電路SDL內之節點SINV。The drain of the
電晶體26之源極接地。電晶體26之節點連接於節點SEN。電晶體27之汲極連接於總線LBUS。電晶體27之源極連接於電晶體26之汲極。向電晶體27之節點輸入控制信號STB。電容器28之一電極連接於節點SEN。向電容器28之另一電極輸入時脈CLK。The source of the
電晶體29之汲極連接於電晶體24之源極。電晶體29之源極連接於位元線BL。向電晶體29之節點輸入控制信號BLS。The drain of the
鎖存電路SDL包含例如反相器30及31以及N型MOS電晶體32及33。反相器30之輸入節點連接於節點SLAT,反相器30之輸出節點連接於節點SINV。反相器31之輸入節點連接於節點SINV,反相器31之輸出節點連接於節點SLAT。電晶體32之一端連接於節點SINV,電晶體32之另一端連接於總線LBUS,向電晶體32之節點輸入控制信號STI。電晶體33之一端連接於節點SLAT,電晶體33之另一端連接於總線LBUS,向電晶體33之節點輸入控制信號STL。例如,節點SLAT處保持之資料相當於鎖存電路SDL中所保持之資料,節點SINV處保持之資料相當於節點SLAT中所保持之資料之反相資料。The latch circuit SDL includes, for example,
鎖存電路ADL、BDL、CDL、DDL、EDL及XDL之電路構成與例如鎖存電路SDL之電路構成相同。例如,鎖存電路ADL於節點ALAT保持資料,於節點AINV保持其反相資料。又,例如,向鎖存電路ADL之電晶體32之節點輸入控制信號ATI,向鎖存電路ADL之電晶體33之節點輸入控制信號ATL。省略鎖存電路BDL、CDL、DDL、EDL及XDL之說明。The circuit configuration of the latch circuits ADL, BDL, CDL, DDL, EDL, and XDL is the same as the circuit configuration of, for example, the latch circuit SDL. For example, the latch circuit ADL holds data at the node ALAT, and holds its inverted data at the node AINV. Also, for example, the control signal ATI is input to the node of the
以上說明之感測放大器單元SAU之電路構成中,向與電晶體20之源極連接之電源線施加例如電源電壓VDD。向節點SRC施加例如接地電壓VSS。控制信號BLX、HLL、XXL、BLC、STB及BLS、以及時脈CLK分別例如由定序器13產生。節點SEN可被稱作感測放大器部SA之感測節點。In the circuit configuration of the sense amplifier unit SAU described above, for example, the power supply voltage VDD is applied to the power supply line connected to the source of the
再者,第1實施方式之半導體記憶裝置1所具備之感測放大器模組16並不限於以上說明之電路構成。例如,各感測放大器單元SAU所具備之鎖存電路之個數可基於1個胞單元CU所記憶之頁數適當改變。若僅利用感測放大器單元SAU內之鎖存電路便能夠執行邏輯運算,則感測放大器單元SAU內之邏輯電路LC可省略。Furthermore, the
[1-1-3]半導體記憶裝置1之構造
以下,對第1實施方式之半導體記憶裝置1所具備之記憶胞陣列10的構造之一例進行說明。再者,以下所參照之圖式中,X方向對應於選擇閘極線SGD之延伸方向,Y方向對應於位元線BL之延伸方向,Z方向對應於相對於半導體基板之表面之鉛直方向(積層方向),該半導體基板被用於半導體記憶裝置1之形成。剖視圖中適當省略絕緣體層等之影線,以免圖式變得複雜。俯視圖中適當附加有影線,以便容易觀察圖。俯視圖中附加之影線未必必須與附加有影線之構成要素之素材或特性相關。
[1-1-3] Structure of
(關於記憶胞電晶體MT之剖面構造)
以下,使用圖6對第1實施方式之半導體記憶裝置1之構造之一例進行說明。圖6係區塊BLK之局部區域之剖視圖。
(About the cross-sectional structure of the memory cell transistor MT)
Hereinafter, an example of the structure of the
如圖6所示,於半導體層內設置p型井區域(p-well)130。於p型井區域130上設置複數個NAND串NS。即,於p型井區域130上,依序積層作為選擇閘極線SGS發揮功能之佈線層131、作為字元線WL0~WL7發揮功能之8層佈線層132、作為選擇閘極線SGD發揮功能之佈線層133。再者,於相鄰之佈線層間插入絕緣體層。As shown in FIG. 6, a p-well region (p-well) 130 is provided in the semiconductor layer. A plurality of NAND strings NS are arranged on the p-
記憶孔134貫通佈線層131、132、133而設置,記憶孔134之底部到達井區域130。於記憶孔134內設置柱狀之半導體層(半導體柱)135。於半導體柱135之側面,依序設置絕緣膜(隧道絕緣膜)136、絕緣膜(電荷蓄積層)137及絕緣膜(阻障絕緣膜)138。由該等構件構成記憶胞電晶體MT以及選擇電晶體ST1及ST2。半導體柱135作為NAND串NS之電流路徑發揮功能,且係供形成各電晶體之通道之區域。半導體柱135之上端經由接觸插塞139連接於作為位元線BL發揮功能之金屬佈線層140。The
於井區域130之表面區域,設置被導入高濃度之n型雜質之n+型擴散區域141。於n+型擴散區域141上設置接觸插塞142。接觸插塞142連接於作為源極線SL發揮功能之金屬佈線層143。進而,於井區域130之表面區域,設置被導入高濃度之p型雜質之p+型擴散區域144。於p+型擴散區域144上,設置接觸插塞145。接觸插塞145連接於作為井佈線CPWELL發揮功能之金屬佈線層146。井佈線CPWELL係用於經由井區域130向半導體柱135施加電壓之佈線。On the surface area of the
以上構成於圖6之紙面深度方向(X方向)上排列複數個。並且,串單元SU包含排列於X方向之複數個NAND串NS之集合。The above structures are arranged in plural in the depth direction (X direction) of the paper surface in FIG. 6. In addition, the string unit SU includes a set of a plurality of NAND strings NS arranged in the X direction.
(關於記憶胞電晶體MT之平面構造)
圖7表示從Z方向觀察到之各區塊BLK所包含之記憶胞電晶體MT的構造之情況。更具體而言,示出從Z方向觀察時記憶孔134及佈線層132(字元線WL)之包含X方向及Y方向之平面的剖面構造之一例。
(About the planar structure of the memory cell transistor MT)
FIG. 7 shows the structure of the memory cell transistor MT included in each block BLK viewed from the Z direction. More specifically, an example of a cross-sectional structure of a plane including the X direction and the Y direction of the
圖示剖面中,例如,半導體層135設置於記憶孔134之中央部。隧道絕緣膜136包圍半導體層135之側面。電荷蓄積層137包圍隧道絕緣膜136之側面。阻障絕緣膜138包圍電荷蓄積層137之側面。又,佈線層132(字元線WL)包圍阻障絕緣膜138。即,佈線層132(字元線WL)包圍記憶孔134。藉此,記憶孔134與佈線層132(字元線WL)交叉之部分作為記憶胞電晶體MT發揮功能。In the cross-section shown in the figure, for example, the
記憶孔134及佈線層131(選擇閘極線SGS)亦於包含X方向及Y方向之平面,成為與包含字元線WL之剖面相同之剖面構造。即,記憶孔134與佈線層131(選擇閘極線SGS)交叉之部分作為選擇電晶體ST2發揮功能。The
又,記憶孔134及佈線層133(選擇閘極線SGD)亦於包含X方向及Y方向之平面,成為與包含字元線WL之剖面相同之剖面構造。即,記憶孔134與佈線層133(選擇閘極線SGD)交叉之部分作為選擇電晶體ST1發揮功能。In addition, the
[1-1-4]關於資料之記憶方式
第1實施方式之半導體記憶裝置1中,相應於1個記憶胞電晶體MT所能記憶之資料之位元數,設定複數個閾值分佈。並且,各記憶胞電晶體MT之閾值電壓係根據被寫入之資料之種類,配置於複數個閾值分佈中之任一區域。以下,將被分配互不相同之資料之複數個閾值分佈分別稱作“狀態”。
[1-1-4] About the way of memorizing data
In the
圖8係表示第1實施方式之半導體記憶裝置1之記憶胞電晶體MT之閾值分佈、讀取電壓及驗證電壓之一例。再者,以下所參照之閾值分佈圖中,縱軸之NMTs對應於記憶胞電晶體MT之個數,橫軸之Vth對應於記憶胞電晶體MT之閾值電壓。FIG. 8 shows an example of the threshold distribution, read voltage, and verification voltage of the memory cell transistor MT of the
如圖8所示,第1實施方式之半導體記憶裝置1中,例如根據複數個記憶胞電晶體MT形成8種閾值分佈。該8種閾值分佈例如按照閾值電壓由低至高之順序,分別稱作“Er”狀態、“A”狀態、“B”狀態、“C”狀態、“D”狀態、“E”狀態、“F”狀態、“G”狀態。“Er”狀態對應於記憶胞電晶體MT之抹除狀態。“A”狀態~“G”狀態分別對應於向記憶胞電晶體MT寫入資料之狀態。As shown in FIG. 8, in the
並且,對“Er”狀態~“G”狀態之各個狀態分配互不相同之3位元資料,設定為相鄰之2個狀態間僅1位元資料不同。如此使1個記憶胞電晶體記憶3位元資料之方法例如被稱作TLC(Triple-Level Cell,三層胞)方式。以下,羅列針對8種閾值分佈之資料分配之一例。 “Er”狀態:“111(上位位元/中位位元/下位位元)”資料 “A”狀態:“110”資料 “B”狀態:“100”資料 “C”狀態:“000”資料 “D”狀態:“010”資料 “E”狀態:“011”資料 “F”狀態:“001”資料 “G”狀態:“101”資料。 In addition, different 3-bit data is allocated to each of the "Er" state to the "G" state, and it is set that only one bit of data is different between the two adjacent states. Such a method of making a memory cell transistor to store 3-bit data is called a TLC (Triple-Level Cell) method, for example. The following is an example of data allocation for the 8 threshold distributions. "Er" status: "111 (upper bit/middle bit/lower bit)" data "A" status: "110" data "B" status: "100" data "C" status: "000" data "D" status: "010" data "E" status: "011" data "F" status: "001" data "G" status: "101" data.
對相鄰之狀態間分別設定寫入動作中使用之驗證電壓。具體而言,對“Er”狀態及“A”狀態間設定驗證電壓AV。對“A”狀態及“B”狀態間設定驗證電壓BV。對“B”狀態及“C”狀態間設定驗證電壓CV。對“C”狀態及“D”狀態間設定驗證電壓DV。對“D”狀態及“E”狀態間設定驗證電壓EV。對“E”狀態及“F”狀態間設定驗證電壓FV。對“F”狀態及“G”狀態間設定驗證電壓GV。於寫入動作中,半導體記憶裝置1當偵測到記憶某資料之記憶胞電晶體MT之閾值電壓超過與該資料對應之驗證電壓時,完成對該記憶胞電晶體MT之編程。Set the verification voltage used in the write operation for adjacent states. Specifically, the verification voltage AV is set between the "Er" state and the "A" state. Set the verification voltage BV between the "A" state and the "B" state. Set the verification voltage CV between the "B" state and the "C" state. Set the verification voltage DV between the "C" state and the "D" state. Set the verification voltage EV between the "D" state and the "E" state. Set the verification voltage FV between the "E" state and the "F" state. Set the verification voltage GV between the "F" state and the "G" state. In the writing operation, when the
對相鄰之狀態間亦分別設定讀取動作中使用之讀取電壓。具體而言,對“Er”狀態及“A”狀態間設定讀取電壓AR。對“A”狀態及“B”狀態間設定讀取電壓BR。對“B”狀態及“C”狀態間設定讀取電壓CR。對“C”狀態及“D”狀態間設定讀取電壓DR。對“D”狀態及“E”狀態間設定讀取電壓ER。對“E”狀態及“F”狀態間設定讀取電壓FR。對“F”狀態及“G”狀態間設定讀取電壓GR。各讀取電壓被用於區分讀取對象之記憶胞電晶體MT之閾值電壓以該讀取電壓為基準包含於下位及上位之哪一個狀態。又,對較最上位之“G”狀態高之電壓設定讀取通過電壓VREAD。閘極被施加讀取通過電壓VREAD之記憶胞電晶體MT無關於所記憶之資料而成為導通狀態。於讀取動作中,半導體記憶裝置1使用讀取電壓判定記憶胞電晶體MT分佈之狀態,藉此確定讀取資料。The read voltage used in the read operation is also set separately for adjacent states. Specifically, the read voltage AR is set between the "Er" state and the "A" state. Set the read voltage BR between the "A" state and the "B" state. Set the reading voltage CR between the "B" state and the "C" state. Set the read voltage DR between the "C" state and the "D" state. Set the reading voltage ER between the "D" state and the "E" state. Set the read voltage FR between the "E" state and the "F" state. Set the reading voltage GR between the "F" state and the "G" state. Each read voltage is used to distinguish between the lower and upper states of the threshold voltage of the memory cell transistor MT of the read object based on the read voltage. In addition, the read pass voltage VREAD is set for a voltage higher than the uppermost "G" state. The gate electrode is applied with the read pass voltage VREAD and the memory cell transistor MT becomes conductive regardless of the memorized data. In the reading operation, the
例如,當應用圖8所示之資料分配時,由下位位元構成之1頁讀取資料(下位頁資料)係基於使用讀取電壓AR之讀取結果、及使用讀取電壓ER之讀取結果而確定。由中位位元構成之1頁讀取資料(中位頁資料)係基於使用讀取電壓BR之讀取結果、使用讀取電壓DR之讀取結果、及使用讀取電壓FR之讀取結果而確定。由上位位元構成之1頁讀取資料(上位頁資料)係基於使用讀取電壓CR之讀取結果、使用讀取電壓GR之讀取結果而確定。於讀取動作中,邏輯電路LC適當執行使用複數個讀取結果之運算處理,確定讀取資料。For example, when the data allocation shown in Figure 8 is applied, a page of read data (lower page data) composed of lower bits is based on the read result using the read voltage AR and the read using the read voltage ER The result is certain. One page of read data (middle page data) composed of middle bits is based on the reading result using the reading voltage BR, the reading result using the reading voltage DR, and the reading result using the reading voltage FR And ok. One page of read data (upper page data) composed of upper bits is determined based on the read result using the read voltage CR and the read result using the read voltage GR. In the reading operation, the logic circuit LC appropriately executes arithmetic processing using a plurality of reading results to confirm reading data.
再者,以上說明之1個記憶胞電晶體MT所記憶之資料之位元數為一例,不限於此。例如,記憶胞電晶體MT亦可記憶1位元、2位元或4位元以上之資料。於半導體記憶裝置1中,可根據記憶胞電晶體MT所記憶之位元數,適當設定所形成之閾值分佈之數量、或讀取電壓、讀取通過電壓、驗證電壓等。Furthermore, the number of bits of the data memorized by one memory cell transistor MT described above is an example, and it is not limited to this. For example, the memory cell transistor MT can also store data of 1 bit, 2 bits or more than 4 bits. In the
本說明書中,“讀取結果”係藉由生效控制信號STB,而對應於被擷取至感測放大器單元SAU內之資料。“讀取資料”於讀取動作中對應於由半導體記憶裝置1輸出至記憶體控制器2之資料。將用於獲得對應於1個讀取電壓之1個或複數個讀取結果之動作稱作“讀取處理”。讀取電壓AR~GR之讀取處理亦分別被稱作“A”~“G”狀態之讀取處理。各讀取處理中獲取之讀取結果之數量對應於在該讀取處理中生效控制信號STB之次數。In this specification, the “read result” corresponds to the data captured into the sense amplifier unit SAU by the effective control signal STB. "Reading data" corresponds to the data output from the
[1-2]半導體記憶裝置1之動作
其次,對第1實施方式之半導體記憶裝置之動作進行說明。再者,以下說明中,適當地僅利用參照符號來記載對各種佈線施加之電壓。將讀取對象之胞單元CU中所包含之記憶胞電晶體MT稱作選擇記憶胞。於讀取動作中,將選擇之字元線WL稱作WLsel,將非選擇之字元線WL稱作WLusel。向字元線WL施加電壓對應於驅動器模組14經由信號線CG及列解碼器模組15向該佈線施加電壓。將第n條(n為0以上之整數)字元線WL稱作字元線WLn。將連接於第n+1條字元線WLn+1之記憶胞電晶體MT稱作相對於字元線WLn之相鄰記憶胞。
[1-2] Operation of
[1-2-1]關於寫入動作
於第1實施方式之半導體記憶裝置1中,按照如圖9(A)所示之順序,對各區塊BLK中所包含之記憶胞電晶體MT執行寫入動作。即,於第1實施方式中,在某串單元SU中,連接於字元線WLn+1之記憶胞電晶體MT所記憶之資料在連接於字元線WLn之記憶胞電晶體MT所記憶之資料之後被寫入。即,於某串單元SU中,從連接於距源極側選擇閘極線SGS最近之字元線WL0之記憶胞電晶體MT至連接於距汲極側選擇閘極線SGD最近之字元線WL7之記憶胞電晶體MT為止,逐層字元線地依序執行寫入動作。
[1-2-1] About write operation
In the
再者,實施寫入動作之順序不限於此。例如,亦可按照如圖9(B)所示之順序,對半導體記憶裝置1之各區塊BLK所包含之記憶胞電晶體MT執行寫入動作。於此情形時,在某串單元SU中,連接於字元線WLn-1之記憶胞電晶體MT所記憶之資料在連接於字元線WLn之記憶胞電晶體MT所記憶之資料之後被寫入。即,於某串單元SU中,從連接於距汲極側選擇閘極線SGD最近之字元線WL7之記憶胞電晶體MT至連接於距源極側選擇閘極線SGS最近之字元線WL0之記憶胞電晶體MT為止,逐層字元線地依序執行寫入動作。Furthermore, the order of performing the write operation is not limited to this. For example, the memory cell transistor MT included in each block BLK of the
圖10係第1實施方式之半導體記憶裝置1之寫入動作中各佈線之電壓的一例,分別示出輸入輸出信號I/O之狀態與經選擇之字元線WLsel之電壓。作為輸入輸出信號I/O,示出半導體記憶裝置1成為就緒狀態並從外部之記憶體控制器2接收指令集(指令、位址及資料)之期間、及半導體記憶裝置1成為忙碌狀態之期間。FIG. 10 is an example of the voltage of each wiring in the write operation of the
當從外部之記憶體控制器2向半導體記憶裝置1之輸入輸出信號I/O輸入指示寫入動作之執行之指令、記憶資料之記憶胞之位址、及包含寫入資料之指令集時,半導體記憶裝置10從就緒狀態轉變為忙碌狀態後執行寫入動作。When the input/output signal I/O of the
於寫入動作中,定序器13首先執行編程動作。具體而言,向感測放大器模組16、與寫入對象之記憶胞電晶體MT對應之位元線BL施加例如電壓VSS,向與寫入禁止之記憶胞電晶體MT對應之位元線施加例如電壓VINH。電壓VINH高於VSS,與被施加電壓VINH之位元線BL對應之NAND串NS因選擇電晶體ST1截止,而例如成為浮動狀態。並且,驅動器模組14及列解碼器模組15向選擇字元線WLsel施加編程電壓VPGM。編程電壓VPGM係能夠向記憶胞電晶體MT之電荷蓄積層注入電子之高電壓。In the writing operation, the
於是,在寫入對象之記憶胞電晶體MT中,利用閘極-通道間之電位差而向電荷蓄積層注入電子,閾值電壓上升。另一方面,於寫入禁止之記憶胞電晶體MT中,例如因浮動狀態之NAND串NS之通道升壓而導致閘極-通道間之電位差變小,抑制閾值電壓之上升。Then, in the memory cell transistor MT to be written, electrons are injected into the charge storage layer by the potential difference between the gate and the channel, and the threshold voltage is increased. On the other hand, in the memory cell transistor MT with write-inhibited, for example, the potential difference between the gate and the channel is reduced due to the channel boost of the NAND string NS in the floating state, thereby suppressing the increase of the threshold voltage.
其次,定序器13執行驗證動作。具體而言,驅動器模組14及列解碼器模組15對選擇字元線WLsel施加驗證電壓VFY。作為驗證電壓VFY,使用例如圖8所示之驗證電壓AV。Secondly, the
於是,連接於選擇字元線WLsel之記憶胞電晶體MT相應於其閾值電壓而成為導通狀態或斷開狀態。並且,各感測放大器單元SAU基於對應之位元線BL之電壓,判定對應之記憶胞電晶體MT之閾值電壓是否超過所期望之驗證電壓。Then, the memory cell transistor MT connected to the selected word line WLsel is turned on or off according to its threshold voltage. In addition, each sense amplifier unit SAU determines whether the threshold voltage of the corresponding memory cell transistor MT exceeds the desired verification voltage based on the voltage of the corresponding bit line BL.
然後,定序器13當偵測到對應之記憶胞電晶體MT之閾值電壓超過所期望之驗證電壓時,設為該記憶胞電晶體MT之驗證通過,於之後之編程動作中使該記憶胞電晶體MT為寫入禁止。Then, when the
另一方面,定序器13當偵測到對應之記憶胞電晶體MT之閾值電壓為所期望之驗證電壓以下時,設為該記憶胞電晶體MT之驗證失敗,於之後之編程動作中使該記憶胞電晶體MT為寫入對象。On the other hand, when the
定序器13例如可於1次驗證動作中使驅動器模組14及列解碼器模組15對選擇字元線WLsel連續地施加複數種驗證電壓,使感測放大器模組16連續地執行複數個位準之驗證。又,定序器173能夠相應於寫入動作之進行,適當改變1次驗證動作中施加之驗證電壓之種類及數量。再者,定序器13亦可使得於1次驗證動作中僅從驅動器模組14及列解碼器模組15向選擇字元線WLsel施加1種驗證電壓,使感測放大器模組16執行1位準之驗證。For example, the
上述編程動作與驗證動作之組合相當於循環。定序器13反覆執行此種循環,使編程電壓VPGM於每一編程循環中每次上升ΔVPGM。並且,定序器13反覆執行複數次(例如19次)編程循環後,結束寫入動作而使半導體記憶裝置1從忙碌狀態轉變為就緒狀態。The combination of the above-mentioned programming action and verification action is equivalent to a cycle. The
此處,如圖6所示,第1實施方式之半導體記憶裝置1中,於某串單元SU中,連接於某字元線WLn之記憶胞電晶體MT與連接於相鄰之字元線WLn-1之記憶胞電晶體MT及連接於相鄰之字元線WLn+1之記憶胞電晶體MT近接。因此,連接於某字元線WLn之記憶胞電晶體MT之閾值會受到連接於兩側之字元線WLn-1及WLn+1之記憶胞電晶體MT之電荷蓄積層中所保持之電子之影響。Here, as shown in FIG. 6, in the
此處,於按照如圖9(A)所示之順序進行寫入動作之情形時,對字元線WLn-1進行寫入動作後,對字元線WLn執行寫入動作。即,於對與字元線WLn連接之記憶胞電晶體MT執行寫入動作之時間點,與字元線WLn-1連接之記憶胞電晶體MT之電荷蓄積層中所保持之電子之量已確定。即,其後,該記憶溝槽MT之電荷蓄積層中所保持之電子之量基本不發生變動。因此,與字元線WLn-1連接之記憶胞電晶體MT之電荷蓄積層中所保持之電子對與字元線WLn連接之記憶胞電晶體MT之閾值電壓之影響於驗證動作時會加以考慮,從而能夠實質上排除該影響。Here, when the write operation is performed in the order shown in FIG. 9(A), after the write operation is performed on the word line WLn-1, the write operation is performed on the word line WLn. That is, at the time when the write operation is performed on the memory cell transistor MT connected to the word line WLn, the amount of electrons held in the charge storage layer of the memory cell transistor MT connected to the word line WLn-1 is already Sure. That is, thereafter, the amount of electrons held in the charge storage layer of the memory trench MT hardly changes. Therefore, the influence of the electrons held in the charge storage layer of the memory cell transistor MT connected to the word line WLn-1 on the threshold voltage of the memory cell transistor MT connected to the word line WLn will be considered during the verification operation. , So that the influence can be substantially eliminated.
另一方面,對字元線WLn+1之寫入動作係於對字元線WLn執行寫入動作後執行。於對與字元線WLn連接之記憶胞電晶體MT執行寫入動作之時間點(更具體而言,執行驗證動作時),與字元線WLn+1連接之記憶胞電晶體MT之電荷蓄積層中所保持之電子之量尚未確定,之後變動之可能性大。更具體而言,對與字元線WLn連接之記憶胞電晶體MT執行寫入動作後,與字元線WLn+1連接之記憶胞電晶體MT之閾值電壓有可能從“Er”狀態變動為“G”狀態等。On the other hand, the write operation to the word
因此,與字元線WLn+1連接之記憶胞電晶體MT之電荷蓄積層中所保持之電子對與字元線WLn連接之記憶胞電晶體MT之閾值電壓之影響難以於進行寫入動作之過程中排除。Therefore, the influence of the electrons held in the charge storage layer of the memory cell transistor MT connected to the word line WLn+1 on the threshold voltage of the memory cell transistor MT connected to the word line WLn is difficult to perform the writing operation. exclude.
再者,於按照如圖9(B)所示之順序執行寫入動作之情形時,字元線WLn-1與字元線WLn+1之關係相反。即,與字元線WLn+1連接之記憶胞電晶體MT之電荷蓄積層中所保持之電子對與字元線WLn連接之記憶胞電晶體MT之閾值電壓之影響於驗證動作時會加以考慮,從而能夠實質上排除該影響。然而,由於對字元線WLn-1之寫入動作在此之後執行,故於對與字元線WLn連接之記憶胞電晶體MT執行寫入動作之時間點,難以排除該記憶胞電晶體MT對閾值電壓之影響。Furthermore, when the write operation is performed in the order shown in FIG. 9(B), the relationship between the word line WLn-1 and the word
[1-2-2]關於讀取動作
第1實施方式之半導體記憶裝置1能夠執行至少2種讀取動作。例如,半導體記憶裝置1能夠執行之複數種讀取動作包含通常讀取動作及DLA(Direct Look Ahead,直接預測)讀取動作。
[1-2-2] About reading action
The
通常讀取動作係所使用之每個讀取電壓之讀取次數為1次之讀取動作。DLA讀取動作係使用與選擇記憶胞相鄰之相鄰記憶胞之讀取結果,確定選擇記憶胞之讀取結果之讀取動作。即,DLA讀取動作包含相鄰記憶胞之讀取動作、及選擇記憶胞之讀取動作。關於DLA讀取動作之詳細情況將於下文進行敍述。Normally, the reading operation is a reading operation in which the number of readings for each reading voltage used is 1 time. The DLA reading action uses the reading result of the adjacent memory cell adjacent to the selected memory cell to determine the reading action of the reading result of the selected memory cell. That is, the DLA read operation includes the read operation of adjacent memory cells and the read operation of selected memory cells. The details of the DLA reading action will be described below.
圖11係表示第1實施方式之半導體記憶裝置1之讀取動作的指令序列之一例。圖11之上側對應於通常讀取動作之指令序列。圖11之下側對應於DLA讀取動作之指令序列。FIG. 11 shows an example of the command sequence of the read operation of the
如圖11之上側所示,記憶體控制器2於使半導體記憶裝置1執行通常讀取動作之情形時,例如將指令“00h”、位址資訊ADD及指令“30h”依序發送至半導體記憶裝置1。指令“00h”係對半導體記憶裝置1指示執行讀取動作之指令。位址資訊ADD包含與讀取對象之胞單元CU對應之位址。位址資訊ADD可使用複數個週期之輸入輸出信號I/O。指令“30h”係向半導體記憶裝置1指示讀取動作之開始之指令。As shown on the upper side of FIG. 11, when the
另一方面,如圖11之下側所示,記憶體控制器2於使半導體記憶裝置1執行DLA讀取動作之情形時,例如將指令“xxh”、指令“00h”、位址資訊ADD及指令“30h”依序發送至半導體記憶裝置1。指令“xxh”係向半導體記憶裝置1指示DLA讀取動作之執行之前綴指令。通常讀取動作之指令序列與DLA讀取動作之指令序列之間之不同點在於有無指令“xxh”。On the other hand, as shown on the bottom side of FIG. 11, when the
半導體記憶裝置1基於接收到指令“30h”而從就緒狀態轉變為忙碌狀態。並且,半導體記憶裝置1例如於未接收到指令“xxh”之情形時執行通常讀取動作,於接收到指令“xxh”之情形時執行DLA讀取動作。半導體記憶裝置1執行通常讀取動作之時間tR1較半導體記憶裝置1執行DLA讀取動作之時間tR2短。其原因在於,如下所述,DLA讀取動作包含對相鄰記憶胞之讀取動作、及對選擇記憶胞之讀取動作。The
半導體記憶裝置1於讀取動作完成後,從忙碌狀態轉變為就緒狀態。並且,記憶體控制器2當向半導體記憶裝置1指示讀取動作之執行後,偵測到半導體記憶裝置1從忙碌狀態轉變為就緒狀態時,向半導體記憶裝置1指示讀取資料DAT之輸出。於是,半導體記憶裝置1基於記憶體控制器2之指示,向記憶體控制器2輸出讀取資料DAT。The
[1-2-3]關於DLA讀取動作之詳細情況
以下,以讀取下位頁資料之情形為代表,對第1實施方式之半導體記憶裝置1中之DLA讀取動作之具體例進行說明。圖12係第1實施方式之半導體記憶裝置1之下位頁資料之DLA讀取動作的時序圖之一例,示出字元線WLn、WLn+1及WLusel、控制信號BLX、BLC、HLL、XXL及STB、以及節點SEN各自之電壓。本例中,字元線WLn被設定為選擇字元線WLsel。即,與字元線WLn連接之記憶胞電晶體MT為選擇記憶胞,與字元線WLn+1連接之記憶胞電晶體MT為相鄰記憶胞。
[1-2-3] Details about DLA reading action
Hereinafter, a specific example of the DLA reading operation in the
如圖12所示,於DLA讀取動作開始前,字元線WLn、WLn+1及WLusel、以及控制信號BLX及BLC各自之電壓例如為接地電壓VSS,控制信號HLL、XXL及STB、以及節點SEN各自之電壓例如為“L”位準。DLA讀取動作中,定序器13例如於時刻t0~t4期間執行第1讀取,於時刻t4~t16期間執行第2讀取。As shown in FIG. 12, before the DLA reading operation starts, the voltages of the word lines WLn, WLn+1, and WLusel, and the control signals BLX and BLC are, for example, the ground voltage VSS, and the control signals HLL, XXL, and STB, and the node SEN, respectively The voltage is, for example, the "L" level. In the DLA reading operation, the
第1讀取係將與作為該DLA讀取動作之讀取對象之選擇記憶胞相鄰的相鄰記憶胞設為對象之讀取動作。本例之第1讀取中,將相鄰記憶胞設為對象,執行使用讀取電壓XR之讀取動作。作為讀取電壓XR,例如使用讀取電壓DR。再者,作為讀取電壓XR,可使用其他讀取電壓,亦可使用與讀取電壓AR~GR分別不同之電壓。The first reading is a reading operation in which the adjacent memory cell adjacent to the selected memory cell that is the reading target of the DLA reading operation is set as the target. In the first reading of this example, the adjacent memory cell is set as the target, and the reading operation using the reading voltage XR is performed. As the read voltage XR, for example, the read voltage DR is used. Furthermore, as the reading voltage XR, other reading voltages may be used, or voltages different from the reading voltages AR to GR may be used.
第2讀取係將選擇記憶胞設為對象之讀取動作。於本例之第2讀取中,將選擇記憶胞設為對象,執行使用讀取電壓AR及ER之讀取動作。又,於第2讀取中,各狀態之讀取處理包含以互不相同之設定執行之2次讀取(資料判定處理、即生效控制信號STB之處理)。以下,依序對第1讀取及第2讀取各自之詳細情況進行說明。The second reading is a reading operation in which the selected memory cell is set as the target. In the second reading of this example, the selected memory cell is set as the target, and the reading operation using the reading voltages AR and ER is performed. Furthermore, in the second reading, the reading process of each state includes two readings (data determination process, that is, the process of validating the control signal STB) executed with mutually different settings. Hereinafter, the details of each of the first reading and the second reading will be described in order.
(關於第1讀取)
首先,於時刻t0,對字元線WLn、WLn+1及WLusel施加讀取通過電壓VREAD。又,於時刻t0,定序器13使控制信號BLX之電壓從VSS上升至VblxL,使控制信號BLC之電壓從VSS上升至VblcL。VblcL之電壓值例如低於VblxL。於是,閘極被施加VblxL之電晶體21與閘極被施加VblcL之電晶體24分別成為導通狀態。
(About the first reading)
First, at time t0, the read pass voltage VREAD is applied to the word lines WLn, WLn+1, and WUsel. Furthermore, at time t0, the
藉此,位元線BL之電壓基於例如控制信號BLC之電壓與電晶體24之閾值電壓而上升。然後,當字元線WLn、WLn+1及WLusel各自之電壓上升至VREAD,控制信號BLX及BLC之電壓分別上升至VblxL及VblcL時,NAND串NS內之所有電晶體均成為導通狀態。其結果,被選擇之串單元SU中所包含之NAND串NS之通道內之殘留電子被去除。Thereby, the voltage of the bit line BL rises based on, for example, the voltage of the control signal BLC and the threshold voltage of the
其次,於時刻t1,讀取電壓XR被施加至字元線WLn+1。又,於時刻t1,定序器13使控制信號BLX之電壓從VblxL上升至Vblx,使控制信號BLC之電壓從VblcL上升至Vblc。Vblc之電壓值例如低於Vblx。於是,位元線BL之電壓相應於與字元線WLn+1連接之相鄰記憶胞之狀態而變化。具體而言,於相鄰記憶胞為導通狀態之情形時,連接於該相鄰記憶胞之位元線BL之電壓下降。另一方面,於相鄰記憶胞為斷開狀態之情形時,連接於該相鄰記憶胞之位元線BL之電壓維持不變。Next, at time t1, the read voltage XR is applied to the word
進而,於時刻t1,定序器13使控制信號HLL之電壓從“L”位準上升至“H”位準。於是,閘極被施加“H”位準之電壓之電晶體22成為導通狀態。藉此,節點SEN之電壓從“L”位準上升至“H”位準。即,節點SEN經由電晶體22被充電。並且,節點SEN被充電後,定序器13使控制信號HLL從“H”位準下降至“L”位準,使電晶體22成為斷開狀態。Furthermore, at time t1, the
其次,於時刻t2,定序器13使控制信號XXL之電壓從“L”位準上升至“H”位準。於是,閘極被施加“H”位準之電壓之電晶體23成為導通狀態。藉此,形成節點SEN及位元線BL間之電流路徑,節點SEN之電壓相應於與該NAND串NS連接之位元線BL之電壓而變化。具體而言,於連接於字元線WLn+1之相鄰記憶胞為導通狀態之情形時,與該相鄰記憶胞對應之節點SEN之電壓下降(圖12,導通胞)。另一方面,於相鄰記憶胞為斷開狀態之情形時,與該相鄰記憶胞對應之節點SEN之電壓維持“H”位準(圖12,斷開胞)。Secondly, at time t2, the
然後,定序器13於經過特定時間後,基於位元線BL之電壓所得之電壓被反映至節點SEN之後,使控制信號XXL之電壓從“H”位準下降至“L”位準。於是,電晶體23成為斷開狀態,節點SEN之電壓固定。以下,將控制信號XXL之電壓維持“H”位準之時間亦稱作節點SEN之放電時間。Then, the
其後,定序器13生效控制信號STB,對與字元線WLn+1連接之相鄰記憶胞之閾值電壓加以判定。具體而言,感測放大器單元SAU判定相鄰記憶胞之閾值電壓是否為讀取電壓XR以上,將判定結果例如保持於鎖存電路ADL中。以下,將藉由第1讀取獲得之讀取結果亦稱作DLA資料。After that, the
其次,於時刻t3,定序器13使字元線WLn、WLn+1及WLusel、控制信號BLX、BLC、HLL、XXL及STB、以及節點SEN各自之電壓恢復為第1讀取開始前之狀態。藉此,定序器13完成第1讀取,移行至第2讀取。Next, at time t3, the
(關於第2讀取)
首先,於時刻t4,與時刻t0同樣,讀取通過電壓VREAD被施加至字元線WLn、WLn+1及WLusel,定序器13使控制信號BLX及BLC之電壓分別上升至VblxL及VblcL。其結果,與時刻t0同樣,被選擇之串單元SU中所包含之NAND串NS之通道內之殘留電子被去除。
(About the second reading)
First, at time t4, similar to time t0, the read pass voltage VREAD is applied to the word lines WLn, WLn+1, and WLusel, and the
其次,於時刻t5~t10,定序器13執行讀取電壓AR之讀取處理。具體而言,於時刻t5,讀取電壓AR被施加至字元線WLn,與時刻t1同樣,定序器13使控制信號BLX及BLC之電壓分別上升至Vblx及Vblc。於是,位元線BL之電壓相應於與字元線WLn連接之選擇記憶胞之狀態而變化。具體而言,於選擇記憶胞為導通狀態之情形時,連接於該選擇記憶胞之位元線BL之電壓下降。另一方面,於選擇記憶胞為斷開狀態之情形時,連接於該選擇記憶胞之位元線BL之電壓維持不變。Next, from time t5 to t10, the
進而,於時刻t5,與時刻t1同樣,定序器13使控制信號HLL之電壓上升至“H”位準,使電晶體22成為導通狀態。藉此,節點SEN經由電晶體22被充電。並且,定序器13於節點SEN被充電後,使控制信號HLL下降至“L”位準,使電晶體22成為斷開狀態。Furthermore, at time t5, similar to time t1, the
其次,於時刻t6,定序器13與時刻t2同樣,使控制信號XXL之電壓上升至“H”位準,使電晶體23成為導通狀態。藉此,形成節點SEN及位元線BL間之電流路徑,節點SEN之電壓相應於與該NAND串NS連接之位元線BL之電壓而變化。具體而言,於選擇記憶胞為導通狀態之情形時,與該選擇記憶胞對應之節點SEN之電壓下降。另一方面,於選擇記憶胞為斷開狀態之情形時,與該選擇記憶胞對應之節點SEN之電壓維持於“H”位準。並且,定序器13經過時間T1後,使控制信號XXL之電壓從“H”位準下降至“L”位準。於是,電晶體23成為斷開狀態,節點SEN之電壓固定。Next, at time t6, the
再者,圖12中,根據各狀態之讀取電壓,將較佳為成為導通狀態之2種記憶胞電晶體MT分別表示為第1導通胞及第2導通胞。第1導通胞對應於相鄰記憶胞之閾值電壓較低時之導通胞。第2導通胞對應於相鄰記憶胞之閾值電壓較高時之導通胞。例如,時刻t6之處理中,與第2導通胞對應之節點SEN之電壓下降量小於與第1導通胞對應之節點SEN之電壓下降量。本例中,假定藉由時刻t6之處理,連接於第1導通胞之節點SEN之電壓固定為較電晶體26之閾值電壓低之狀態,連接於第2導通胞之節點SEN之電壓固定為較電晶體26之閾值電壓高之狀態。Furthermore, in FIG. 12, according to the read voltage of each state, the two types of memory cell transistors MT that are preferably turned on are represented as the first conductive cell and the second conductive cell, respectively. The first conducting cell corresponds to the conducting cell when the threshold voltage of the adjacent memory cell is low. The second conducting cell corresponds to the conducting cell when the threshold voltage of the adjacent memory cell is higher. For example, in the processing at time t6, the voltage drop amount of the node SEN corresponding to the second conductive cell is smaller than the voltage drop amount of the node SEN corresponding to the first conductive cell. In this example, it is assumed that through the processing at time t6, the voltage of the node SEN connected to the first conduction cell is fixed to a state lower than the threshold voltage of the
其後,定序器13生效控制信號STB,對與字元線WLn+1連接之選擇記憶胞之閾值電壓加以判定。具體而言,感測放大器單元SAU判定選擇記憶胞之閾值電壓是否為讀取電壓AR以上,將判定結果保持於例如鎖存電路BDL。然後,定序器13將節點SEN之電壓重置為“L”位準。After that, the
其次,於時刻t8~t10,定序器13執行與時刻t5~t7類似之處理。時刻t5~t7之處理與時刻t8~t10之處理之間,節點SEN之放電時間不同。具體而言,時刻t9之處理中之節點SEN之放電時間“T2”設定得較時刻t6之處理中之節點SEN之放電時間“T1”長。本例中,假定藉由時刻t9之處理,連接於第1導通胞之節點SEN之電壓與連接於第2導通胞之節點SEN之電壓分別固定為較電晶體26之閾值電壓低之狀態。又,定序器13將時刻t9之處理中使用讀取電壓AR之判定結果保持於例如鎖存電路CDL中。然後,定序器13將節點SEN之電壓重置為“L”位準。時刻t8~t10之其他處理與例如時刻t5~t7之處理相同。Next, at time t8 to t10, the
其次,於時刻t11~t16,定序器13執行讀取電壓ER之讀取處理。時刻t11~t16之處理與時刻t5~t10之處理所施加至字元線WLn之電壓不同。具體而言,於時刻t11,讀取電壓ER被施加至字元線WLn。定序器13將時刻t12之處理中使用讀取電壓ER之判定結果保持於例如鎖存電路DDL中。又,定序器13將時刻t15之處理中使用讀取電壓ER之判定結果保持於例如鎖存電路EDL中。Next, from time t11 to t16, the
然後,於時刻t16,定序器13使字元線WLn、WLn+1及WLusel、控制信號BLX、BLC、HLL、XXL及STB、以及節點SEN各自之電壓恢復為第2讀取開始前之狀態。時刻t11~t16之其他處理與例如時刻t5~t10之處理相同。藉此,定序器13完成第2讀取。Then, at time t16, the
如上所述,定序器13於DLA讀取動作中之第1讀取與第2讀取完成後,基於例如鎖存電路ADL中所保持之DLA資料,執行鎖存電路BDL、CDL、DDL及EDL中所保持之資料之運算處理。以下,將節點SEN之放電時間為“T1”時之讀取結果稱作第1資料,將節點SEN之放電時間為“T2”時之讀取結果稱作第2資料。即,本例中,鎖存電路BDL及CDL分別保持與讀取電壓AR對應之第1及第2資料。鎖存電路DDL及EDL分別保持與讀取電壓ER對應之第1及第2資料。As described above, after the first read and the second read in the DLA read operation are completed, the
例如,當鎖存電路ADL中所保持之DLA資料為“1”時,定序器13使用鎖存電路BDL中所保持之讀取電壓AR之第1資料、及鎖存電路DDL中所保持之讀取電壓ER之第1資料,確定下位頁之讀取資料。並且,定序器13將已確定之下位頁之讀取資料保持於鎖存電路XDL。For example, when the DLA data held in the latch circuit ADL is "1", the
另一方面,當鎖存電路ADL中所保持之DLA資料為“0”時,定序器13使用鎖存電路CDL中所保持之讀取電壓AR之第2資料、及鎖存電路EDL中所保持之讀取電壓ER之第2資料,確定下位頁之讀取資料。並且,定序器13將已確定之下位頁之讀取資料保持於鎖存電路XDL中。On the other hand, when the DLA data held in the latch circuit ADL is "0", the
當已確定之讀取資料被保持於鎖存電路XDL時,定序器13完成DLA讀取動作,使半導體記憶裝置1從忙碌狀態轉變為就緒狀態。其後,定序器13基於記憶體控制器2之指示,將鎖存電路XDL中所儲存之讀取資料輸出至記憶體控制器2。When the determined read data is held in the latch circuit XDL, the
如上所述,第1實施方式之半導體記憶裝置1能夠執行下位頁資料之DLA讀取動作。於中位及上位之各讀取動作中,第1實施方式之半導體記憶裝置1能夠與下位頁資料之讀取動作同樣,適當執行DLA讀取動作。再者,半導體記憶裝置1即便於1個記憶胞電晶體MT所記憶之資料為3位元以外之情形時,亦能夠執行DLA讀取動作。As described above, the
[1-3]第1實施方式之效果
根據以上說明之第1實施方式之半導體記憶裝置1,能夠抑制讀取錯誤之發生。以下,對第1實施方式之半導體記憶裝置1之效果之詳細情況進行說明。
[1-3] Effects of the first embodiment
According to the
於半導體記憶裝置中,寫入動作後之複數個記憶胞之閾值電壓具有接近常態分佈之偏差。又,例如當執行對該記憶胞之資料寫入後執行對相鄰記憶胞之寫入時,記憶胞之閾值電壓有時會根據相鄰字元線WL間之耦合而變化。In a semiconductor memory device, the threshold voltage of a plurality of memory cells after a write operation has a deviation close to the normal distribution. In addition, for example, when data is written to the memory cell and then the adjacent memory cell is written, the threshold voltage of the memory cell sometimes changes according to the coupling between the adjacent word lines WL.
此處,使用圖13,對基於相鄰記憶胞之閾值電壓而產生之記憶胞電晶體MT之閾值分佈之變化之一例進行說明。圖13之上側與由連接於字元線WLn且相鄰記憶胞之閾值電壓為“Er”狀態之複數個記憶胞電晶體MT形成之閾值分佈對應。圖13之下側與由連接於字元線WLn且相鄰記憶胞之閾值電壓為“G”狀態之複數個記憶胞電晶體MT形成之閾值分佈對應。Here, using FIG. 13, an example of the change in the threshold distribution of the memory cell transistor MT based on the threshold voltage of the adjacent memory cell will be described. The upper side of FIG. 13 corresponds to the threshold distribution formed by the plurality of memory cell transistors MT connected to the word line WLn and the threshold voltage of the adjacent memory cell is in the "Er" state. The lower side of FIG. 13 corresponds to the threshold distribution formed by a plurality of memory cell transistors MT connected to the word line WLn and the threshold voltage of the adjacent memory cell is in the "G" state.
當如圖13之上側所示,相鄰記憶胞之閾值電壓為“Er”狀態時,寫入後之字元線WLn之記憶胞電晶體MT之閾值分佈之變化被抑制。另一方面,當如圖13之下側所示,相鄰記憶胞之閾值電壓為“G”狀態時,寫入動作後之字元線WLn之記憶胞電晶體MT之閾值電壓偏移至正側。例如,相鄰記憶胞之閾值電壓越高,則受到相鄰記憶胞影響之閾值電壓之偏移量越大。As shown on the upper side of FIG. 13, when the threshold voltages of adjacent memory cells are in the "Er" state, the change in the threshold distribution of the memory cell transistor MT of the word line WLn after writing is suppressed. On the other hand, when the threshold voltage of the adjacent memory cell is in the "G" state as shown on the bottom side of FIG. 13, the threshold voltage of the memory cell transistor MT of the word line WLn after the writing operation shifts to positive side. For example, the higher the threshold voltage of an adjacent memory cell, the greater the offset of the threshold voltage affected by the adjacent memory cell.
記憶胞之閾值分佈可根據與上述相鄰記憶胞所記憶之資料相應之記憶胞之閾值電壓變化而擴大。並且,閾值分佈擴大會導致半導體記憶裝置之可靠性、寫入性能或讀取性能下降。因此,閾值分佈之擴大較佳為被抑制。作為減小相鄰記憶胞之閾值電壓之影響之方法,可考慮的是執行DLA讀取動作。The threshold distribution of the memory cell can be expanded according to the change in the threshold voltage of the memory cell corresponding to the data memorized by the adjacent memory cell. In addition, the expansion of the threshold distribution will cause the reliability, write performance, or read performance of the semiconductor memory device to decrease. Therefore, the expansion of the threshold distribution is preferably suppressed. As a method to reduce the influence of the threshold voltage of adjacent memory cells, it can be considered to perform a DLA read operation.
DLA讀取動作於讀取與字元線WLn連接之記憶胞所被寫入之特定狀態之情形時,至少執行1次字元線WLn+1之讀取。該字元線WLn+1之讀取係為了檢查相鄰記憶胞之閾值電壓之高低而執行。並且,於字元線WLn之讀取中,每一狀態至少執行2次使用不同讀取通過電壓之讀取。When the DLA read operation reads the specific state of the memory cell connected to the word line WLn, the read of the word
圖14表示第1實施方式之比較例之半導體記憶裝置1之下位頁資料之DLA讀取動作的時序圖之一例。如圖14所示,第1實施方式之比較例中之DLA讀取動作與第1實施方式之不同點在於:使第2讀取時之節點SEN之放電時間固定,使施加至與相鄰記憶胞連接之字元線WLn+1之電壓變動。FIG. 14 shows an example of a timing chart of the DLA reading operation of the lower bit page data of the
簡而言之,於第1實施方式之比較例之DLA讀取動作之第2讀取中,定序器13於讀取第1資料時,對字元線WLn+1施加讀取通過電壓VREADL。另一方面,定序器13於讀取第2資料時,對字元線WLn+1施加讀取通過電壓VREADH。VREADH係高於VREADL之電壓。VREADL及VREADH分別可為與VREAD相同之電壓,亦可為不同電壓。In short, in the second reading of the DLA reading operation of the comparative example of the first embodiment, the
當藉由第1讀取檢測出相鄰記憶胞之閾值電壓較低時,推測選擇記憶胞之閾值電壓之偏移量較小。另一方面,當藉由第1讀取檢測出相鄰記憶胞之閾值電壓較高時,推測選擇記憶胞之閾值電壓之偏移量較大。因此,第1實施方式之比較例之定序器13藉由將VREADL或VREADH施加至字元線WLn+1,來修正選擇記憶胞之有效閾值電壓。例如,施加至字元線WLn+1之讀取通過電壓越高,越能夠降低選擇記憶胞之有效閾值電壓。When it is detected by the first reading that the threshold voltage of the adjacent memory cell is low, it is estimated that the offset of the threshold voltage of the selected memory cell is small. On the other hand, when it is detected by the first reading that the threshold voltage of the adjacent memory cell is higher, it is estimated that the shift amount of the threshold voltage of the selected memory cell is larger. Therefore, the
藉此,第1實施方式之比較例之半導體記憶裝置1能夠選擇性地利用抑制了相鄰記憶胞之影響之第1資料及第2資料,能夠抑制讀取錯誤之發生。另一方面,於如第1實施方式之比較例之DLA讀取動作中,第2讀取中之字元線WL之電壓之轉變次數增加。例如,於記憶胞經三維積層而成之半導體記憶裝置1中,字元線WL之寄生電阻及寄生電容較大。因此,於第1實施方式之比較例之DLA讀取動作中,有因字元線WL之電壓之轉變次數增加而導致讀取時間變長之虞。Thereby, the
因此,第1實施方式之半導體記憶裝置1於DLA讀取動作中,於使字元線WLn+1之電壓固定之狀態下,對每一狀態執行複數次讀取。並且,第1實施方式之半導體記憶裝置1於每一狀態之複數次讀取中,使節點SEN之放電時間變化。使節點SEN之放電時間延長對應於使第1實施方式之比較例之字元線WLn+1之電壓上升。Therefore, in the
例如,當節點SEN之放電時間較短時(例如,放電時間“T1”),能夠感測閾值電壓相對較低之選擇記憶胞、即與放電迅速之節點SEN連接之選擇記憶胞。另一方面,當節點SEN之放電時間較長時(例如,放電時間“T2”),能夠感測閾值電壓相對較高之選擇記憶胞、即與放電緩慢之節點SEN連接之選擇記憶胞。For example, when the discharge time of the node SEN is short (for example, the discharge time "T1"), the selected memory cell with a relatively low threshold voltage, that is, the selected memory cell connected to the fast-discharged node SEN, can be sensed. On the other hand, when the discharge time of the node SEN is longer (for example, the discharge time "T2"), the selected memory cell with a relatively high threshold voltage can be sensed, that is, the selected memory cell connected to the slow-discharged node SEN.
其結果,與第1實施方式之比較例同樣,第1實施方式之半導體記憶裝置1能夠基於第1讀取之結果,選擇性地利用讀取資料之運算中所使用之第2讀取之讀取結果(第1資料或第2資料)。因此,第1實施方式之第1變化例之半導體記憶裝置1能夠抑制讀取錯誤之發生,能夠提高半導體記憶裝置1之可靠性。As a result, similar to the comparative example of the first embodiment, the
又,第1實施方式之半導體記憶裝置1藉由節點SEN之放電時間之控制、即對控制信號XXL進行控制,來修正選擇記憶胞之閾值電壓。與字元線WL相比,容易將控制信號XXL之信號傳輸延遲設計得較小。因此,控制信號XXL之電壓與字元線WL之電壓相比,能夠高速地轉變。因此,第1實施方式之半導體記憶裝置1能夠控制由相鄰字元線間之耦合引起之閾值分佈之擴大,且執行較第1實施方式之比較例更高速之DLA讀取動作。In addition, the
再者,上述說明係以如圖9(A)所示,從距源極側選擇閘極線SGS最近之字元線WL0至距汲極側選擇閘極線SGD最近之字元線WL7為止逐層依序執行寫入動作之情形為前提,當如圖9(B)所示,從距汲極側選擇閘極線SGD最近之字元線WL7至距源極側選擇閘極線SGS最近之字元線WL0為止逐層依序執行寫入動作時,代替字元線WLn+1而對字元線WLn-1施加相同之電壓。又,於此情形時,對字元線WLn+1賦予與非選擇字元線WLusel相同之電壓。如此一來,本實施方式即便於執行寫入動作之順序已改變之情形時,亦能夠藉由除選擇字元線WLsel以外還適當改變所關注之字元線而應用。In addition, the above description is based on FIG. 9(A), from the word line WL0 closest to the source-side select gate line SGS to the word line WL7 closest to the drain-side select gate line SGD. It is assumed that the layers sequentially perform write operations. As shown in Figure 9(B), from the word line WL7 closest to the drain-side selection gate line SGD to the nearest word line SGS to the source-side selection gate line When the writing operation is sequentially performed layer by layer up to the word line WL0, instead of the word
[1-4]第1實施方式之變化例
以上說明之第1實施方式之半導體記憶裝置1之DLA讀取動作可有各種變化。以下,與第1實施方式同樣,以讀取下位頁資料時為代表,依序對第1實施方式之第1變化例、第2變化例及第3變化例各自之DLA讀取動作之具體例進行說明。
[1-4] Variations of the first embodiment
The DLA reading operation of the
(第1實施方式之第1變化例)
圖15表示第1實施方式之第1變化例之半導體記憶裝置1的DLA讀取動作之時序圖之一例。如圖15所示,第1實施方式之第1變化例之DLA讀取動作與第1實施方式之DLA讀取動作之第2讀取中的節點SEN之放電時間之設定不同。
(The first modification of the first embodiment)
FIG. 15 shows an example of a timing chart of the DLA reading operation of the
具體而言,第1實施方式之第1變化例中,於第2讀取中,控制信號XXL維持於“H”位準之時間設定在時間T1及時間T2之間切換。即,第1實施方式之第1變化例之定序器13於第2讀取之各狀態之讀取處理中,按照第2資料、第1資料之順序執行資料判定處理。第1實施方式之第1變化例之其他動作與第1實施方式相同。Specifically, in the first modification of the first embodiment, in the second reading, the time during which the control signal XXL is maintained at the "H" level is set to switch between the time T1 and the time T2. That is, the
於此種情形時,與第1實施方式同樣,第1實施方式之第1變化例之半導體記憶裝置1能夠基於第1讀取之結果,選擇性地利用讀取資料之運算中所使用之第2讀取之讀取結果。因此,與第1實施方式同樣,第1實施方式之第1變化例之半導體記憶裝置1能夠抑制讀取錯誤之發生,能夠提高半導體記憶裝置1之可靠性。In this case, similar to the first embodiment, the
(第1實施方式之第2變化例)
圖16表示第1實施方式之第2變化例之半導體記憶裝置1的DLA讀取動作之時序圖之一例。如圖16所示,第1實施方式之第2變化例之DLA讀取動作相對於第1實施方式之DLA讀取動作,第1讀取與第2讀取執行之順序切換。
(The second modification of the first embodiment)
FIG. 16 shows an example of a timing chart of the DLA reading operation of the
具體而言,第1實施方式之第2變化例之定序器13於執行第1實施方式中之時刻t4~t16之處理之後,執行時刻t0~t3之處理。即,定序器13於藉由第2讀取獲取各狀態之第1資料及第2資料之後,藉由第1讀取來獲取DLA資料。第1實施方式之第2變化例之其他動作與第1實施方式相同。Specifically, the
於此種情形時,第1實施方式之第2變化例之半導體記憶裝置1與第1實施方式同樣,能夠基於第1讀取之結果,選擇性地利用讀取資料之運算中使用之第2讀取之讀取結果。因此,第1實施方式之第2變化例之半導體記憶裝置1與第1實施方式同樣,能夠抑制讀取錯誤之發生,能夠提高半導體記憶裝置1之可靠性。In this case, the
(第1實施方式之第3變化例)
圖17表示第1實施方式之第3變化例之半導體記憶裝置1的DLA讀取動作之時序圖之一例。如圖17所示,第1實施方式之第3變化例之DLA讀取動作相對於第1實施方式之DLA讀取動作,於第2讀取中施加之讀取電壓之順序切換。
(The third modification of the first embodiment)
FIG. 17 shows an example of a timing chart of the DLA reading operation of the
具體而言,第1實施方式之第3變化例之定序器13按照電壓由高至低之順序執行讀取處理。即,定序器13例如於讀取下位頁資料之情形時,按照讀取電壓ER、AR之順序執行第2讀取之讀取處理。第1實施方式之第3變化例之其他動作與第1實施方式相同。Specifically, the
於此種情形時,第1實施方式之第3變化例之半導體記憶裝置1亦與第1實施方式相同,能夠基於第1讀取之結果,選擇性地利用讀取資料之運算中使用之第2讀取之讀取結果。因此,第1實施方式之第3變化例之半導體記憶裝置1與第1實施方式同樣,能夠抑制讀取錯誤之發生,能夠提高半導體記憶裝置1之可靠性。In this case, the
[2]第2實施方式
第2實施方式之半導體記憶裝置1具有與第1實施方式之半導體記憶裝置1相同之構成。並且,第2實施方式之半導體記憶裝置1執行第1實施方式與第1實施方式之比較例組合後之DLA讀取動作。以下,關於第2實施方式之半導體記憶裝置1,說明與第1實施方式不同之處。
[2] Second embodiment
The
[2-1]DLA讀取動作
以下,以讀取下位頁資料之情形為代表,對第2實施方式之半導體記憶裝置1之DLA讀取動作的具體例進行說明。圖18表示第2實施方式之半導體記憶裝置1之下位頁資料的DLA讀取動作之時序圖之一例。如圖18所示,第2實施方式之DLA讀取動作具有將第1實施方式之比較例之字元線WLn+1之動作與第1實施方式之除字元線WLn+1以外之動作組合之構成。
[2-1] DLA reading action
Hereinafter, a specific example of the DLA reading operation of the
具體而言,於第2實施方式之DLA讀取動作中,定序器13於與第1資料之判定處理對應之讀取處理時,將節點SEN之充電時間設定為“T1”,對與相鄰記憶胞連接之字元線WLn+1施加讀取通過電壓VREADL。同樣,定序器13於與第2資料之判定處理對應之讀取處理時,將節點SEN之充電時間設定為“T2”,對與相鄰記憶胞連接之字元線WLn+1施加讀取通過電壓VREADH。第2實施方式之DLA讀取動作之其他動作與第1實施方式相同。Specifically, in the DLA reading operation of the second embodiment, the
[2-2]第2實施方式之效果
如上所述,第2實施方式之半導體記憶裝置1執行將第1實施方式與第1實施方式之比較例組合後之DLA讀取動作。簡而言之,第1實施方式之第2讀取將與相鄰記憶胞連接之字元線WLn+1之電壓維持於VREAD。另一方面,第2實施方式之第2讀取使字元線WLn+1之電壓適當轉變為VREADL或VREADH。並且,第2實施方式之第2讀取使字元線WLn+1之電壓轉變,並且亦使節點SEN之放電時間變化。
[2-2] Effects of the second embodiment
As described above, the
藉此,第2實施方式之半導體記憶裝置1與第1實施方式相比,可使DLA讀取動作中之選擇記憶胞之閾值電壓之修正範圍擴大。其結果,第2實施方式之半導體記憶裝置1與第1實施方式相比,能夠抑制讀取錯誤之發生,能夠提高半導體記憶裝置1之可靠性。Thereby, the
再者,於第2實施方式之半導體記憶裝置1中,DLA讀取動作之第2讀取中之字元線WLn+1之讀取通過電壓變動,因此有讀取速度降低之虞。然而,於第2實施方式之半導體記憶裝置1中,藉由與利用控制信號XXL進行之閾值電壓修正之組合,字元線WLn+1之振幅可設計得較第1實施方式之比較例小。因此,第2實施方式之半導體記憶裝置1能夠使DLA讀取動作較第1實施方式之比較例高速化。Furthermore, in the
[2-3]第2實施方式之變化例
以上說明之第2實施方式之半導體記憶裝置1之DLA讀取動作可有各種變化。以下,與第2實施方式同樣,以讀取下位頁資料之情形為代表,依序對第2實施方式之第1變化例及第2變化例各自之DLA讀取動作之具體例進行說明。
[2-3] Variations of the second embodiment
The DLA reading operation of the
(第2實施方式之第1變化例)
圖19表示第2實施方式之第1變化例之半導體記憶裝置1的DLA讀取動作之時序圖之一例。如圖19所示,第2實施方式之第1變化例之DLA讀取動作相對於第2實施方式之DLA讀取動作,第2讀取中之節點SEN之放電時間之設定不同。
(The first modification of the second embodiment)
FIG. 19 shows an example of a timing chart of the DLA reading operation of the
具體而言,於第2實施方式之第1變化例之DLA讀取動作中,與第1實施方式之第1變化例同樣,第2讀取中控制信號XXL維持於“H”位準之時間之設定在時間T1與時間T2之間切換。又,於第2實施方式之第1變化例之DLA讀取動作之第2讀取中,讀取第1資料時,與相鄰記憶胞連接之字元線WLn+1被施加之電壓在VREADH與VREADL之間切換。即,第2實施方式之第1變化例之定序器13在第2讀取中之各狀態之讀取處理中,按照第2資料、第1資料之順序執行資料判定處理。第2實施方式之第1變化例之其他動作與第1實施方式相同。Specifically, in the DLA reading operation of the first modification of the second embodiment, as in the first modification of the first embodiment, the time during which the control signal XXL is maintained at the "H" level in the second reading The setting is switched between time T1 and time T2. In addition, in the second reading of the DLA reading operation of the first modification of the second embodiment, when reading the first data, the voltage applied to the word line WLn+1 connected to the adjacent memory cell is between VREADH and VREADL Switch between. That is, the
於此種情形時,第2實施方式之第1變化例之半導體記憶裝置1與第2實施方式相同,能夠基於第1讀取之結果,選擇性地利用讀取資料之運算中使用之第2讀取之讀取結果。因此,第2實施方式之第1變化例之半導體記憶裝置1與第2實施方式同樣,能夠抑制讀取錯誤之發生,能夠提高半導體記憶裝置1之可靠性。In this case, the
(第2實施方式之第2變化例)
圖20表示第2實施方式之第2變化例之半導體記憶裝置1的DLA讀取動作之時序圖之一例。如圖20所示,第2實施方式之第2變化例之DLA讀取動作具有如下構成:相對於第2實施方式之DLA讀取動作,與第2讀取中於各狀態下執行之2次資料判定處理對應之設定互不相同。
(Second modification of the second embodiment)
FIG. 20 shows an example of a timing chart of the DLA reading operation of the
具體而言,第2實施方式之第2變化例之定序器13於第2讀取中之最初狀態之讀取處理中,按照第1資料、第2資料之順序執行判定處理。並且,定序器13於持續狀態之讀取處理中,按照第2資料、第1資料之順序執行判定處理。如此,於第2實施方式之第2變化例中,最初狀態之讀取處理中之第2資料之判定處理與持續狀態之讀取處理中之第2資料之判定處理連續。因此,與相鄰記憶胞連接之字元線n+1例如於第2讀取之時刻t8~t14,被連續地施加VREADH。第2實施方式之第2變化例之其他動作與第2實施方式之第1變化例相同。Specifically, the
於此種情形時,第2實施方式之第2變化例之半導體記憶裝置1與第2實施方式同樣,能夠基於第1讀取之結果,選擇性地利用讀取資料之運算中使用之第2讀取之讀取結果。因此,第2實施方式之第2變化例之半導體記憶裝置1與第2實施方式同樣,能夠抑制讀取錯誤之發生,能夠提高半導體記憶裝置1之可靠性。In this case, the
[3]第3實施方式
第3實施方式之半導體記憶裝置1具有與第1實施方式之半導體記憶裝置1相同之構成。並且,第3實施方式之半導體記憶裝置1執行省略節點SEN之充電處理之一部分之DLA讀取動作。以下,關於第3實施方式之半導體記憶裝置1,說明與第1及第2實施方式不同之處。
[3] Third Embodiment
The
[3-1]DLA讀取動作
以下,以讀取下位頁資料之情形為代表,對第3實施方式之半導體記憶裝置1之DLA讀取動作之具體例進行說明。圖21表示第3實施方式之半導體記憶裝置1之下位頁資料的DLA讀取動作之時序圖之一例。如圖21所示,第2實施方式之DLA讀取動作具有從第1實施方式之DLA讀取動作中省略時刻t7、t8、t13及t14之各處理之構成。
[3-1] DLA reading action
Hereinafter, a specific example of the DLA reading operation of the
具體而言,於第3實施方式之DLA讀取動作之第2讀取中,例如時刻t9之節點SEN之電壓維持藉由時刻t6之處理而放電之狀態。並且,節點SEN之電壓藉由與第1實施方式相同之時刻t9之處理,從該狀態持續放電。因此,於第3實施方式中,與第1實施方式相同,連接於與讀取電壓AR對應之第2導通胞之節點SEN之電壓藉由時刻t9之處理而低於電晶體26之閾值電壓。Specifically, in the second reading of the DLA reading operation of the third embodiment, for example, the voltage of the node SEN at time t9 maintains the state of being discharged by the processing at time t6. In addition, the voltage of the node SEN is continuously discharged from this state by the same processing at time t9 as in the first embodiment. Therefore, in the third embodiment, as in the first embodiment, the voltage of the node SEN connected to the second conduction cell corresponding to the read voltage AR is lower than the threshold voltage of the
同樣,於第3實施方式之DLA讀取動作之第2讀取中,例如時刻t15之節點SEN之電壓維持藉由時刻t12之處理而放電之狀態。並且,節點SEN之電壓藉由與第1實施方式相同之時刻t15之處理,從該狀態持續放電。因此,於第3實施方式中,與讀取電壓ER對應之連接於第2導通胞之節點SEN之電壓和第1實施方式同樣,藉由時刻t15之處理而低於電晶體26之閾值電壓。第3實施方式之其他動作與第1實施方式相同。Similarly, in the second reading of the DLA reading operation of the third embodiment, for example, the voltage of the node SEN at time t15 maintains the state of being discharged by the processing at time t12. In addition, the voltage of the node SEN is continuously discharged from this state by the process at the time t15 as in the first embodiment. Therefore, in the third embodiment, the voltage of the node SEN connected to the second conduction cell corresponding to the read voltage ER is lower than the threshold voltage of the
再者,圖21中表示時刻t9及t15之各處理中之節點SEN之放電時間為“T2”之情形,但不限於此。於第3實施方式之DLA讀取動作中,第2讀取中之各狀態之讀取處理中,與第1次資料判定處理相關之節點SEN之放電時間“T1”和第1實施方式相同,與第2次資料判定處理相關之節點SEN之放電時間和“T1”之和只要設定為至少第1實施方式之放電時間“T2”以上即可。Furthermore, FIG. 21 shows the case where the discharge time of the node SEN in each process at time t9 and t15 is "T2", but it is not limited to this. In the DLA reading operation of the third embodiment, in the reading process of each state in the second reading, the discharge time "T1" of the node SEN related to the first data determination process is the same as that of the first embodiment. The sum of the discharge time of the node SEN and "T1" related to the second data determination process can be set to at least the discharge time "T2" of the first embodiment or more.
[3-2]第3實施方式之效果
如上所述,第3實施方式之半導體記憶裝置1之DLA讀取動作省略了第2讀取中之節點SEN之充電處理之一部分。並且,於第3實施方式之DLA讀取動作之第2讀取之各狀態之讀取處理中,與第2次資料判定處理相關聯之節點SEN之放電係從與第1次資料判定處理相關聯之節點SEN之放電狀態開始。
[3-2] Effects of the third embodiment
As described above, the DLA reading operation of the
於此種情形時,第3實施方式之半導體記憶裝置1與第1實施方式同樣,能夠基於第1讀取之結果,選擇性地利用讀取資料之運算中使用之第2讀取之讀取結果。又,第3實施方式之第2讀取之處理時間由於省略了一部分處理,故可縮短。因此,第3實施方式之半導體記憶裝置1能夠與第1實施方式同樣,抑制讀取錯誤之發生,且與第1實施方式相比能夠縮短DLA讀取動作之時間。In this case, the
[4]其他變化例等
上述實施方式中,例示了DLA資料為1位元資料之情形,但不限於此。DLA讀取動作亦可使用複數個位元之DLA資料。於此情形時,於DLA讀取動作中之第1讀取中,執行複數個位元之讀取處理。該複數個位元之讀取處理中所使用之讀取電壓可與通常讀取動作中使用之讀取電壓相同,亦可不同。例如,使用複數個位元之DLA資料時之第2讀取中,定序器13於各狀態之讀取處理中執行3次以上之資料判定處理。第2讀取之各狀態之複數個讀取結果與複數個位元之DLA資料相關。並且,定序器13基於複數個位元之DLA資料,選擇讀取資料之運算中使用之第2讀取之讀取結果,確定讀取資料。藉此,半導體記憶裝置1能夠提高相鄰記憶胞之閾值電壓之檢測精度,能夠更精密地修正選擇記憶胞之有效閾值電壓。
[4] Other changes, etc.
In the above embodiment, the case where the DLA data is 1-bit data is exemplified, but it is not limited to this. The DLA reading action can also use multiple bits of DLA data. In this case, in the first reading in the DLA reading operation, the reading process of a plurality of bits is executed. The reading voltage used in the reading process of the plurality of bits may be the same as or different from the reading voltage used in the normal reading operation. For example, in the second reading when DLA data of a plurality of bits are used, the
上述實施方式及變化例可於可能之範圍內組合。例如,如第1實施方式之第2變化例般切換DLA讀取動作中之第1讀取及第2讀取之順序亦可分別應用於第2及第3實施方式。如第1實施方式之第3變化例般改變第2讀取中施加讀取電壓之順序亦可分別應用於第2及第3實施方式。又,可將3種以上之實施方式及變化例組合。藉此,半導體記憶裝置1能夠獲得組合後之實施方式及變化例各自之效果。The above-mentioned embodiments and modification examples can be combined as far as possible. For example, switching the order of the first reading and the second reading in the DLA reading operation as in the second modification of the first embodiment can also be applied to the second and third embodiments, respectively. Like the third modification of the first embodiment, changing the order of applying the reading voltage in the second reading can also be applied to the second and third embodiments, respectively. In addition, three or more embodiments and modification examples can be combined. Thereby, the
於上述實施方式中,例示了根據指令序列分開使用通常讀取動作與DLA讀取動作之情形,但不限於此。DLA讀取動作可根據半導體記憶裝置1之模式執行。於此情形時,記憶體控制器2向半導體記憶裝置1指示變更為於讀取動作中執行DLA讀取動作之模式。並且,執行DLA讀取動作之模式之半導體記憶裝置1基於接收到例如第1實施方式中所說明之通常讀取動作中使用之指令序列,來執行DLA讀取動作。In the above-mentioned embodiment, the case where the normal reading operation and the DLA reading operation are used separately according to the command sequence is illustrated, but it is not limited to this. The DLA read operation can be performed according to the mode of the
上述實施方式中用於寫入動作之說明之時序圖僅為一例。例如,於各時刻對信號及佈線各自之電壓進行控制之時點可存在偏差。於DLA讀取動作中,時刻t0及t1間之動作與時刻t4及t5間之動作亦可省略。於上述實施方式中,對記憶胞陣列10內之各種佈線施加之電壓可基於驅動器模組14及列解碼器模組15間之信號線之電壓推測出。例如,對字元線WLsel施加之電壓可基於信號線CG之電壓推測出。The timing chart used for the description of the write operation in the above embodiment is only an example. For example, there may be deviations at the time when the voltage of the signal and the wiring is controlled at each time. In the DLA reading operation, the operation between time t0 and t1 and the operation between time t4 and t5 can also be omitted. In the above embodiment, the voltage applied to the various wirings in the
本說明書中,“電晶體之一端”表示MOS電晶體之汲極或源極。“電晶體之另一端”表示MOS電晶體之源極或汲極。所謂“連接”係表示電性連接,不包含例如中間介隔其他元件。“斷開狀態”表示向對應之電晶體之節點施加未達該電晶體之閾值電壓之電壓,不包含流通例如電晶體之漏電流般之微小電流。In this specification, "one end of the transistor" means the drain or source of the MOS transistor. "The other end of the transistor" means the source or drain of the MOS transistor. The so-called "connection" means electrical connection, and does not include, for example, intervening other components. The "off state" means that a voltage that does not reach the threshold voltage of the transistor is applied to the node of the corresponding transistor, and does not include the flow of a small current such as the leakage current of the transistor.
本說明書中,“H”位準之電壓係閘極被施加該電壓之N型MOS電晶體成為導通狀態,閘極被施加該電壓之P型MOS電晶體成為斷開狀態之電壓。“L”位準之電壓係閘極被施加該電壓之N型MOS電晶體成為斷開狀態,閘極被施加該電壓之P型MOS電晶體成為導通狀態之電壓。“生效”對應於定序器13使對象之控制信號暫時從“L”位準成為“H”位準。“經由電晶體23使感測節點放電之時間”對應於例如控制信號XXL為“H”位準,電晶體23成為導通狀態之期間。In this specification, the "H" level voltage is the voltage at which the gate is turned on by the N-type MOS transistor to which the voltage is applied, and the gate is turned off by the P-type MOS transistor to which the voltage is applied. The voltage at the "L" level is the voltage at which the gate is turned off by the N-type MOS transistor to which the voltage is applied, and the gate is turned on by the P-type MOS transistor to which the voltage is applied. "Enable" corresponds to the
雖說明瞭本發明之若干個實施方式,但該等實施方式係作為示例提示,並不意圖限定發明之範圍。該等新穎之實施方式能以其他多種方式實施,可於不脫離發明之主旨之範圍內進行各種省略、置換、變更。該等實施方式及其變化包含於發明之範圍及主旨中,並且包含於申請專利範圍所記載之發明及其均等之範圍中。 [相關申請] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other ways, and various omissions, substitutions, and changes can be made without departing from the spirit of the invention. These embodiments and their changes are included in the scope and spirit of the invention, and are included in the invention described in the scope of the patent application and its equivalent scope. [Related Application]
本申請案享有以日本專利申請案2020-27018號(申請日:2020年2月20日)為基礎申請案之優先權。本申請藉由參照該基礎申請案而包含基礎申請案之全部內容。This application enjoys the priority of the basic application based on Japanese Patent Application No. 2020-27018 (application date: February 20, 2020). This application contains all the contents of the basic application by referring to the basic application.
1:半導體記憶裝置 2:記憶體控制器 10:記憶胞陣列 11:指令暫存器 12:位址暫存器 13:定序器 14:驅動器模組 15:列解碼器模組 16:感測放大器模組 20~27:電晶體 28:電容器 29:電晶體 30,31:反相器 32,33:N型MOS電晶體 130:p型井區域 131:佈線層 132:佈線層 133:佈線層 134:記憶孔 135:半導體柱 136:絕緣膜(隧道絕緣膜) 137:絕緣膜(電荷蓄積層) 138:絕緣膜(阻障絕緣膜) 139:接觸插塞 140:金屬佈線層 141:n+型擴散區域 142:接觸插塞 143:金屬佈線層 144:p+型擴散區域 145:接觸插塞 146:金屬佈線層 BD:區塊解碼器 BL:位元線 BL0~BLm:位元線 BLHU:位元線連接部 BLK:區塊 BLK0~BLK(N-1):區塊 CG0~CG7:信號線 CPWELL:井佈線 CU:胞單元 LBUS:總線 LC:邏輯電路 MT:記憶胞電晶體 MT0~MT7:記憶胞電晶體 ND1:節點 ND2:節點 NS:NAND串 RD:列解碼器 RD0~RD(N-1):列解碼器 SA:感測放大器部 SAU:感測放大器單元 SDL, ADL, BDL, CDL, DDL, EDL, XDL:鎖存電路 SEN:節點 SGD:選擇閘極線 SGD0~SGD3:選擇閘極線 SGDD0~SGDD3:信號線 SGS:選擇閘極線 SGSD:信號線 SINV:節點 SL:源極線 SLAT:節點 SRC:節點 ST1:選擇電晶體 ST2:選擇電晶體 SU:串單元 SU0~SU3:串單元 TG,bTG:傳輸閘極線 TR0~TR17:電晶體 USGD:信號線 USGS:信號線 WL:字元線 WL0~WL7:字元線 WLn:字元線 WLn+1:字元線 WLsel:字元線 WLusel:字元線 XDL:鎖存電路 1: Semiconductor memory device 2: Memory controller 10: Memory cell array 11: Command register 12: Address register 13: Sequencer 14: drive module 15: column decoder module 16: Sensing amplifier module 20~27: Transistor 28: Capacitor 29: Transistor 30, 31: inverter 32, 33: N-type MOS transistor 130: p-well area 131: Wiring layer 132: Wiring layer 133: Wiring layer 134: Memory Hole 135: Semiconductor column 136: Insulating film (tunnel insulating film) 137: Insulating film (charge storage layer) 138: Insulating film (barrier insulating film) 139: contact plug 140: Metal wiring layer 141: n+ type diffusion region 142: contact plug 143: Metal wiring layer 144: p+ type diffusion area 145: contact plug 146: Metal wiring layer BD: block decoder BL: bit line BL0~BLm: bit line BLHU: Bit line connection part BLK: block BLK0~BLK(N-1): block CG0~CG7: signal line CPWELL: Well wiring CU: Cell unit LBUS: bus LC: Logic circuit MT: Memory cell transistor MT0~MT7: Memory cell transistor ND1: Node ND2: Node NS: NAND string RD: column decoder RD0~RD(N-1): column decoder SA: Sense Amplifier Division SAU: Sense Amplifier Unit SDL, ADL, BDL, CDL, DDL, EDL, XDL: latch circuit SEN: Node SGD: select gate line SGD0~SGD3: select gate line SGDD0~SGDD3: signal line SGS: Select gate line SGSD: signal line SINV: Node SL: source line SLAT: Node SRC: Node ST1: select transistor ST2: select transistor SU: String unit SU0~SU3: String unit TG, bTG: Transmission gate line TR0~TR17: Transistor USGD: signal line USGS: signal line WL: Character line WL0~WL7: Character line WLn: Character line WLn+1: character line WLsel: character line WLusel: character line XDL: latch circuit
圖1係表示第1實施方式之半導體記憶裝置之構成例之方塊圖。 圖2係表示第1實施方式之半導體記憶裝置所具備之記憶胞陣列的電路構成之一例之電路圖。 圖3係表示第1實施方式之半導體記憶裝置所具備之列解碼器模組的電路構成之一例之電路圖。 圖4係表示第1實施方式之半導體記憶裝置所具備之感測放大器模組的電路構成之一例之電路圖。 圖5係表示第1實施方式之半導體記憶裝置所具備之感測放大器模組中所包含之感測放大器單元的電路構成之一例之電路圖。 圖6係表示第1實施方式之半導體記憶裝置所具備之記憶胞陣列的剖面構造之一例之剖視圖。 圖7係表示第1實施方式之半導體記憶裝置之記憶體柱的剖面構造之一例之剖視圖。 圖8係表示第1實施方式之半導體記憶裝置中應用於記憶胞電晶體之資料之分配的一例之概略圖。 圖9(A)、(B)係表示第1實施方式之半導體記憶裝置中執行寫入動作之順序的一例之表格。 圖10係表示第1實施方式之半導體記憶裝置之寫入動作的一例之時序圖。 圖11係表示第1實施方式之半導體記憶裝置之讀取動作之指令序列的一例之概念圖。 圖12係表示第1實施方式之半導體記憶裝置之DLA讀取動作的一例之時序圖。 圖13係表示第1實施方式之半導體記憶裝置之記憶胞電晶體之閾值分佈的一例之概念圖。 圖14係表示第1實施方式之比較例之半導體記憶裝置之DLA讀取動作的一例之時序圖。 圖15係表示第1實施方式之第1變化例之半導體記憶裝置之DLA讀取動作的一例之時序圖。 圖16係表示第1實施方式之第2變化例之半導體記憶裝置之DLA讀取動作的一例之時序圖。 圖17係表示第1實施方式之第3變化例之半導體記憶裝置之DLA讀取動作的一例之時序圖。 圖18係表示第2實施方式之半導體記憶裝置之DLA讀取動作的一例之時序圖。 圖19係表示第2實施方式之第1變化例之半導體記憶裝置之DLA讀取動作的一例之時序圖。 圖20係表示第2實施方式之第2變化例之半導體記憶裝置之DLA讀取動作的一例之時序圖。 圖21係表示第3實施方式之半導體記憶裝置之DLA讀取動作的一例之時序圖。 FIG. 1 is a block diagram showing a configuration example of the semiconductor memory device of the first embodiment. 2 is a circuit diagram showing an example of the circuit configuration of the memory cell array included in the semiconductor memory device of the first embodiment. 3 is a circuit diagram showing an example of the circuit configuration of the row decoder module included in the semiconductor memory device of the first embodiment. 4 is a circuit diagram showing an example of the circuit configuration of the sense amplifier module included in the semiconductor memory device of the first embodiment. 5 is a circuit diagram showing an example of the circuit configuration of the sense amplifier unit included in the sense amplifier module included in the semiconductor memory device of the first embodiment. 6 is a cross-sectional view showing an example of the cross-sectional structure of the memory cell array included in the semiconductor memory device of the first embodiment. 7 is a cross-sectional view showing an example of the cross-sectional structure of the memory pillar of the semiconductor memory device of the first embodiment. FIG. 8 is a schematic diagram showing an example of data distribution applied to the memory cell transistor in the semiconductor memory device of the first embodiment. 9(A) and (B) are tables showing an example of the sequence of performing a write operation in the semiconductor memory device of the first embodiment. FIG. 10 is a timing chart showing an example of the write operation of the semiconductor memory device of the first embodiment. FIG. 11 is a conceptual diagram showing an example of the command sequence of the read operation of the semiconductor memory device of the first embodiment. FIG. 12 is a timing chart showing an example of the DLA reading operation of the semiconductor memory device of the first embodiment. FIG. 13 is a conceptual diagram showing an example of the threshold distribution of the memory cell transistor of the semiconductor memory device of the first embodiment. FIG. 14 is a timing chart showing an example of the DLA reading operation of the semiconductor memory device of the comparative example of the first embodiment. FIG. 15 is a timing chart showing an example of the DLA reading operation of the semiconductor memory device of the first modification of the first embodiment. FIG. 16 is a timing chart showing an example of the DLA reading operation of the semiconductor memory device of the second modification of the first embodiment. FIG. 17 is a timing chart showing an example of the DLA reading operation of the semiconductor memory device of the third modification of the first embodiment. FIG. 18 is a timing chart showing an example of the DLA reading operation of the semiconductor memory device of the second embodiment. FIG. 19 is a timing chart showing an example of the DLA reading operation of the semiconductor memory device of the first modification of the second embodiment. FIG. 20 is a timing chart showing an example of the DLA reading operation of the semiconductor memory device of the second modification of the second embodiment. FIG. 21 is a timing chart showing an example of the DLA reading operation of the semiconductor memory device of the third embodiment.
SEN:節點 WLn:字元線 WLn+1:字元線 WLsel:字元線 WLusel:字元線 SEN: Node WLn: Character line WLn+1: character line WLsel: character line WLusel: character line
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