TWI729511B - Calibration method, calibration device, calibration system and electronic equipment - Google Patents

Abstract

The invention provides a calibration method, a calibration device, a calibration system and electronic equipment. The calibration method includes: obtaining a first distance, a second distance, a third distance, and a fourth distance; and calibrating a preset polishing head circle to a target polishing head circle according to the first distance, the second distance, the third distance, and the fourth distance. The first distance is equal to the second distance, and the third distance is equal to the fourth distance. Therefore, by making the first distance equal to the second distance, and the third distance equal to the fourth distance, the polishing head circle is calibrated so that the polishing head corresponding to the polishing head circle is consistent with the coaxiality of the loading and unloading table corresponding to the loading and unloading table circle. . The above method is adopted to calibrate the positions of the polishing head and the loading and unloading table, which is convenient and quick, with small errors and high accuracy.

Description

Calibration method, calibration device, calibration system and electronic equipment

The present invention relates to the technical field of chemical mechanical polishing, in particular, to a calibration method, a calibration device, a calibration system and electronic equipment.

Chemical Mechanical Planarization (CMP) equipment includes a polishing head (Head) and a loading and unloading table (Wafer Loader). When the polishing head takes and unloads the film from the loading and unloading table, the polishing head and the loading and unloading table should ensure the same coaxiality , If it is inconsistent, the polishing head will take too long to take and place the film, and if the alignment of the polishing head and the loading and unloading table is too large, it will cause fragmentation and other serious consequences. Therefore, before the chemical mechanical planarization equipment is used, the polishing head and the loading and unloading table need to be calibrated first. The traditional calibration method is mainly to repeatedly measure the difference between the polishing head and the two circumferences of the loading and unloading table with a ruler scale, and repeatedly adjust the position of the polishing head several times after the measurement to achieve the purpose of calibration. However, the error of the result obtained by the traditional calibration method is relatively large.

The invention provides a calibration method, a calibration device, a calibration system and electronic equipment to improve the problem of large errors in calibration results.

In order to achieve the foregoing objectives, the technical solutions provided by the embodiments of the present invention are as follows: In a first aspect, an embodiment of the present invention provides a calibration method, including: obtaining a first distance, a second distance, a third distance, and a fourth distance; wherein the first distance is the first calibration point and the preset polishing head circle The second distance is the shortest distance between the second calibration point and the preset polishing head circle, and the third distance is the minimum arc distance between the third calibration point and the preset polishing head circle, The fourth distance is the minimum arc distance between the fourth calibration point and the preset polishing head circle; the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point The punctual point is located on the loading and unloading table circle; the preset polishing head circle is the circle corresponding to the starting position of the polishing head, and the loading and unloading table circle is the circle corresponding to the fixed position of the loading and unloading table; according to the first distance, the first distance The second distance, the third distance, and the fourth distance align the preset polishing head circle to the target polishing head circle, so that the first distance is equal to the second distance, and the third distance is equal to The fourth distances are equal; wherein the target polishing head circle is a circle corresponding to the target position of the polishing head. Therefore, by making the first distance equal to the second distance, and the third distance equal to the fourth distance, the polishing head circle is calibrated so that the polishing head corresponding to the polishing head circle is consistent with the coaxiality of the loading and unloading table corresponding to the loading and unloading table circle. . The above method is adopted to calibrate the positions of the polishing head and the loading and unloading table, which is convenient and quick, with small errors and high accuracy.

In an optional embodiment of the present invention, before the obtaining the first distance, the method further includes: obtaining first position information of the first calibration point, second position information of the second calibration point, The third position information of the third calibration point and the fourth position information of the fourth calibration point; the first calibration point is marked on the loading platform circle according to the first position information, and according to the The second position information marks the second calibration point on the loading and unloading platform circle, and the third calibration point is marked on the loading and unloading platform circle according to the third position information, and according to the fourth position information Mark the fourth calibration point on the circle of the loading and unloading platform. Therefore, first, the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point are marked on the loading and unloading platform circle, so that the electronic device can be based on the above-mentioned first calibration point, second calibration point, and third calibration point. The punctuality and the fourth calibration point are used to calibrate the positions of the polishing head and the loading and unloading table with high accuracy.

In an optional embodiment of the present invention, the acquiring the first position information of the first calibration point and the second position information of the second calibration point includes: acquiring the first center of the trajectory circle of the polishing head and the The loading and unloading table circle; wherein, the polishing head track circle is a circle corresponding to the polishing head running track; a first line is used to connect the first circle center and the second circle center to obtain the distance between the first line and the loading and unloading table circle A first intersection point and a second intersection point; wherein, the second circle center is the center of the loading dock circle; it is determined that the position information of the first intersection point is the first position information and the position information of the second intersection point is the Second location information. Therefore, the positions of the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point are determined according to the positional relationship of the polishing head trajectory circle, the polishing head circle, and the loading and unloading table circle, so that the electronic device can be based on the above-mentioned first calibration point. The calibration point, the second calibration point, the third calibration point, and the fourth calibration point perform high-accuracy calibration on the positions of the polishing head and the loading and unloading table.

In an optional embodiment of the present invention, the acquiring the third position information of the third calibration point and the fourth position information of the fourth calibration point includes: acquiring the radius of the trajectory circle of the polishing head, the polishing The first center of the head trajectory circle and the loading and unloading table circle; wherein, the polishing head trajectory circle is the circle corresponding to the polishing head running trajectory; according to the radius of the polishing head trajectory circle and the loading and unloading table circle Determine the cosine value of the first angle, and determine the first angle according to the cosine value; wherein the first angle is the angle between the first straight line and the second straight line, and the first straight line is the center of the first circle and the second straight line. The line connecting the center of the circle, the second center is the center of the loading and unloading platform circle, and the second straight line is the line connecting the center of the first circle and the third calibration point or the fourth calibration point; The first angle, the first straight line, and the loading platform circle determine the third position information and the fourth position information. Therefore, the positions of the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point are determined according to the positional relationship of the polishing head trajectory circle, the polishing head circle, and the loading and unloading table circle, so that the electronic device can be based on the above-mentioned first calibration point. The calibration point, the second calibration point, the third calibration point, and the fourth calibration point perform high-accuracy calibration on the positions of the polishing head and the loading and unloading table.

In a second aspect, an embodiment of the present invention provides a calibration device, including: a first acquisition module for acquiring a first distance, a second distance, a third distance, and a fourth distance; wherein the first distance is the first distance. The shortest distance between the calibration point and the preset polishing head circle, the second distance is the shortest distance between the second calibration point and the preset polishing head circle, and the third distance is the third calibration point and the preset polishing The minimum arc distance of the head circle, the fourth distance is the minimum arc distance between the fourth calibration point and the preset polishing head circle; the first calibration point, the second calibration point, the third The calibration point and the fourth calibration point are located on the loading and unloading table circle; the preset polishing head circle is the circle corresponding to the starting position of the polishing head, and the loading and unloading table circle is the circle corresponding to the fixed position of the loading and unloading table; Group, used to calibrate the preset polishing head circle to the target polishing head circle according to the first distance, the second distance, the third distance, and the fourth distance, so that the first distance is equal to The second distance is equal, and the third distance is equal to the fourth distance; wherein the target polishing head circle is a circle corresponding to the target position of the polishing head. Therefore, the calibration module calibrates the polishing head circle by making the first distance equal to the second distance, and the third distance equals to the fourth distance, so that the polishing head corresponding to the polishing head circle corresponds to the loading and unloading table corresponding to the loading and unloading table circle. The coaxiality is the same. The above method is adopted to calibrate the positions of the polishing head and the loading and unloading table, which is convenient and quick, with small errors and high accuracy.

In an optional embodiment of the present invention, the device further includes: a second acquisition module for acquiring first position information of the first calibration point, second position information of the second calibration point, and The third position information of the third calibration point and the fourth position information of the fourth calibration point; a marking module for marking the first calibration point on the loading platform circle according to the first position information In the above, the second calibration point is marked on the loading and unloading platform circle according to the second position information, and the third calibration point is marked on the loading and unloading platform circle according to the third position information. The fourth position information marks the fourth calibration point on the loading and unloading platform circle. Therefore, the marking module first marks the first calibration point, the second calibration point, the third calibration point and the fourth calibration point on the circle of the loading and unloading platform, so that the electronic device can be based on the above-mentioned first calibration point, second calibration point, The third calibration point and the fourth calibration point calibrate the positions of the polishing head and the loading and unloading table with high accuracy.

In an optional embodiment of the present invention, the second acquisition module is specifically configured to: acquire the first center of the polishing head trajectory circle and the loading and unloading table circle; wherein, the polishing head trajectory circle is the polishing head The circle corresponding to the running track; connect the first center and the second center with a first straight line to obtain the first and second intersection points of the first straight line and the loading dock circle; wherein, the second center is the The center of the loading dock circle; determining that the position information of the first intersection is the first position information and the position information of the second intersection is the second position information. Therefore, the positions of the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point are determined according to the positional relationship of the polishing head trajectory circle, the polishing head circle, and the loading and unloading table circle, so that the electronic device can be based on the above-mentioned first calibration point. The calibration point, the second calibration point, the third calibration point, and the fourth calibration point perform high-accuracy calibration on the positions of the polishing head and the loading and unloading table.

In an optional embodiment of the present invention, the second acquisition module is specifically configured to: acquire the radius of the polishing head trajectory circle, the first center of the polishing head trajectory circle, and the loading and unloading table circle; wherein, the The polishing head trajectory circle is the circle corresponding to the polishing head running trajectory; the cosine value of the first angle is determined according to the radius of the polishing head trajectory circle and the radius of the loading and unloading table circle, and the first angle is determined according to the cosine value. An angle; wherein the first angle is the angle between the first straight line and the second straight line, the first straight line is the line connecting the first circle center and the second circle center, and the second circle center is the center of the loading and unloading platform circle , The second straight line is the line connecting the first circle center and the third calibration point or the fourth calibration point; the first angle, the first straight line, and the loading platform circle are used to determine the The third location information and the fourth location information. Therefore, the positions of the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point are determined according to the positional relationship of the polishing head trajectory circle, the polishing head circle, and the loading and unloading table circle, so that the electronic device can be based on the above-mentioned first calibration point. The calibration point, the second calibration point, the third calibration point, and the fourth calibration point perform high-accuracy calibration on the positions of the polishing head and the loading and unloading table.

From a third-party perspective, an embodiment of the present invention provides a calibration system, including a measurement device and the calibration device described in the second aspect; the measurement device is used to measure the first distance, the second distance, the third distance, and the fourth distance, The calibration device is used to calibrate the position of the polishing head according to the first distance, the second distance, the third distance, and the fourth distance; wherein, the first distance is a first calibration point The arc distance from the preset polishing head circle, the second distance is the arc distance between the second calibration point and the preset polishing head circle, and the third distance is the third calibration point and the preset polishing The shortest distance of the head circle, the fourth distance is the shortest distance between the fourth calibration point and the preset polishing head circle; the first calibration point, the second calibration point, the third calibration point, and the The fourth calibration point is located on the loading and unloading table circle; the preset polishing head circle is a circle corresponding to the starting position of the polishing head, and the loading and unloading table circle is a circle corresponding to the fixed position of the loading and unloading table. Therefore, the above-mentioned measuring device can be used to measure the first distance, the second distance, the third distance, and the fourth distance, so that the electronic device can make the first distance equal to the second distance, and the third distance equals to the fourth distance, The position of the polishing head and the loading and unloading table are calibrated with high accuracy.

In an optional embodiment of the present invention, the measuring device includes: a fixing piece, a first measuring piece, a second measuring piece, a third measuring piece, and a fourth measuring piece; the size and shape of the fixing piece and the mounting and dismounting The size and shape of the table circle are the same; the first measuring piece is arranged on the fixing piece at a first position corresponding to the loading and unloading table circle, and the second measuring piece is arranged on the fixing piece and the loading and unloading At the second position corresponding to the platform circle, the third measuring part is arranged on the fixing part at a third position corresponding to the loading and unloading platform circle, and the fourth measuring part is arranged on the fixing part and The fourth position corresponding to the loading and unloading platform circle; wherein, the first position is the position of the first calibration point, the second position is the position of the second calibration point, and the third position is the position of the The position of the third calibration point, the fourth position is the position of the fourth calibration point. Therefore, the first measuring piece, the second measuring piece, the third measuring piece, and the fourth measuring piece on the measuring device are respectively arranged at the first position, the second position, the third position, and the fourth position, so that the electronic device can According to the calibration method in the first aspect, the positions of the polishing head and the loading and unloading table are calibrated with high accuracy.

In a fourth aspect, an embodiment of the present invention provides an electronic device, including: a processor, a memory, and a bus; the processor and the memory communicate with each other through the bus; the memory stores Program instructions that can be executed by the processor, and the processor invokes the program instructions to execute the calibration method in the first aspect.

In a fifth aspect, an embodiment of the present invention provides a non-transitory computer-readable storage medium that stores computer instructions that cause the computer to execute the calibration method in the first aspect.

In order to make the above-mentioned objectives, features and advantages of the present invention more obvious and understandable, embodiments of the present invention will be specifically described below in conjunction with the accompanying drawings, which are described in detail as follows.

The technical solutions in the embodiments of the present invention will be described below in conjunction with the drawings in the embodiments of the present invention.

It should be noted that similar numbers and letters indicate similar items in the following figures. Therefore, once a certain item is defined in a figure, there is no need to further define and explain it in the following figures. At the same time, in the description of the present invention, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

In the following, some embodiments of the present invention will be described in detail with reference to the drawings. In the case of no conflict, the following embodiments and features in the embodiments can be combined with each other.

Please refer to FIG. 1. FIG. 1 is a flowchart of a calibration method provided by an embodiment of the present invention. The calibration method includes the following steps: Step S101: Obtain the first distance, the second distance, the third distance, and the fourth distance.

Exemplarily, in the process of chemical mechanical planarization, in order to ensure that the wafer is intact, the positions of the polishing head and the loading and unloading table in the chemical mechanical planarization equipment need to be calibrated. Among them, chemical mechanical planarization is a means to achieve global planarization in integrated circuit manufacturing, and chemical mechanical planarization can be used to obtain a flat, scratch-free and contaminated surface. The chemical mechanical planarization equipment includes a polishing head and a loading and unloading table: the polishing head is the work of polishing the wafer to be polished; the loading and unloading table is a tool for unloading the polished wafer after the polishing head polishes the wafer. The main work flow of the chemical mechanical planarization equipment can be briefly described as follows: the transfer robot (Wafer Exchanger) transfers the wafer that needs to be planarized to the loading and unloading table; then the polishing head removes the wafer from the loading and unloading table and performs the polishing process ; After polishing, the polishing head unloads the wafer from the loading and unloading table, and then the transfer manipulator grabs the wafer for cleaning and spin-drying. Therefore, if the position of the polishing head and the loading and unloading table does not meet the standard, that is, the polishing head and the loading and unloading table are different axes, it will cause the polishing head to take and place the film too long, and if the center of the polishing head and the loading and unloading table are too different, it will also cause wafers. Serious consequences of fragmentation.

In order to ensure that the wafer is not damaged during the planarization process, it is necessary to ensure that the polishing head and the loading and unloading table are coaxial. As an implementation manner, the electronic device may first obtain the first distance, the second distance, the third distance, and the fourth distance. Among them, the first distance is the shortest distance between the first calibration point and the preset polishing head circle, the second distance is the shortest distance between the second calibration point and the preset polishing head circle, and the third distance is the third calibration point and the preset polishing head. The minimum arc distance of the head circle, and the fourth distance is the minimum arc distance between the fourth calibration point and the preset polishing head circle.

Please refer to FIG. 2, which is a schematic diagram of the positions of the polishing head circle, the loading and unloading table circle, and the polishing head track circle provided by an embodiment of the present invention. The preset polishing head circle is the circle corresponding to the starting position of the polishing head, the loading and unloading table circle is the circle corresponding to the fixed position of the loading and unloading table, and the polishing head trajectory circle is the circle corresponding to the movement trajectory of the polishing head. Electronic equipment can record the position and size of the loading and unloading table and polishing head in the chemical mechanical planarization equipment before calibration through the loading and unloading table circle and preset polishing head circle, so that the position and size of the polishing head can be adjusted according to the recorded position and size. Perform calibration. Among them, the positions of the loading and unloading table circle and the polishing head circle are fixed, and the center position and radius of the loading and unloading table circle correspond to the loading and unloading table in the actual chemical mechanical planarization equipment, that is, the center position and radius of the loading and unloading table circle are fixed and known. . Since the polishing head circle corresponds to the polishing head in the actual chemical mechanical planarization equipment, its radius is also fixed and known. The position of the polishing head circle is the object calibrated by the calibration method of the present invention. The centers of the circles of the above loading and unloading platforms coincide. The trajectory circle of the polishing head is the circle corresponding to the movement trajectory of the polishing head during actual operation, and its radius and center are also fixed and known.

As an implementation manner, the four points ABCD in FIG. 2 are respectively the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point, and they are all located on the circle of the loading and unloading platform. The methods for determining the first calibration point A, the second calibration point B, the third calibration point C, and the fourth calibration point D will be described in subsequent embodiments. In this embodiment, the first distance is the distance of the line segment AA' in FIG. 2, that is, the shortest distance between the first calibration point A and the preset polishing head circle; the second distance is the distance of the line segment BB' in FIG. The shortest distance between the second calibration point B and the preset polishing head circle; the third distance is the distance of the CC' arc in Figure 2, that is, the minimum arc distance between the third calibration point C and the preset polishing head circle; the fourth distance is The arc distance of DD' in Fig. 2 is the minimum arc distance between the fourth calibration point D and the preset polishing head circle.

It should be noted that there are multiple ways for the electronic device to obtain the first distance, the second distance, the third distance, and the fourth distance, which are not specifically limited in the embodiment of the present invention. For example: the electronic device receives the data input by the operator; or, the electronic device reads the pre-stored data from the server; or, the electronic device itself performs data on the first distance, the second distance, the third distance, and the fourth distance. Measurement etc.

Step S102: Calibrate the preset polishing head circle to the target polishing head circle according to the first distance, the second distance, the third distance, and the fourth distance, so that the first distance is the same as the target polishing head circle. The second distance is equal, and the third distance is equal to the fourth distance.

Exemplarily, after the first distance, the second distance, the third distance, and the fourth distance are acquired in step S102, the electronic device can perform the rounding of the polishing head according to the first distance, the second distance, the third distance, and the fourth distance. Perform calibration so that the preset polishing head circle before calibration becomes the target polishing head circle after calibration. Then, the polishing head in the actual chemical mechanical planarization equipment can be controlled to move to the position of the target polishing head circle. At this time, the polishing head and the loading and unloading table circle are coaxial. It should be noted that the electronic device that controls the movement of the polishing head can also be the aforementioned electronic device that sends the calibrated position of the target polishing head circle to other equipment, and the other equipment controls the movement of the polishing head. Technicians can choose according to the actual situation.

As an implementation manner, the electronic device can make the first distance and the second distance equal, and the third distance and the fourth distance equal, so as to achieve the purpose of making the centers of the loading and unloading table circle and the polishing head circle coincide.

For example, the calibration process is as follows: please refer to Figure 3a, Figure 3a is a schematic diagram of the polishing head circle provided by an embodiment of the present invention before calibration in the CD direction. At this time, the third distance CC' and the fourth distance DD' are not equal ; Please refer to Figure 3b, Figure 3b is a schematic diagram of the polishing head circle provided by the embodiment of the present invention after calibration in the CD direction, at this time, the third distance CC' and the fourth distance DD' are equal. Therefore, you can first calibrate the angular position of the polishing head circle in the arc CD direction (Head Rotation direction). Please refer to Figure 4a, Figure 4a is a schematic diagram of the polishing head circle provided by an embodiment of the present invention before being calibrated in the AB direction. At this time, the first distance AA' and the second distance BB' are not equal; please refer to Figure 4b, Figure 4b This is a schematic diagram of the polishing head circle calibrated in the AB direction according to an embodiment of the present invention. At this time, the first distance AA′ is equal to the second distance BB′. Therefore, the linear position of the polishing head circle can then be calibrated in the straight line AB direction (Head Sweep direction). After calibration in the CD direction and AB direction, the center of the calibrated loading and unloading table circle coincides with the center of the polishing head circle.

It should be noted that the above calibration process is only a solution provided by the embodiment of the present invention, and the AB direction can be calibrated first and then the CD direction can be calibrated, and those skilled in the art can make a selection according to the actual situation.

In the embodiment of the present invention, the polishing head circle is calibrated by making the first distance equal to the second distance, and the third distance equals to the fourth distance, so that the polishing head corresponding to the polishing head circle corresponds to that of the loading and unloading table circle. The coaxiality of the loading and unloading platform is consistent. The above method is adopted to calibrate the positions of the polishing head and the loading and unloading table, which is convenient and quick, with small errors and high accuracy.

Further, please refer to FIG. 5, which is a flowchart of another calibration method provided by an embodiment of the present invention. Before step S101, the above-mentioned calibration method further includes the following steps: Step S501: Obtain the first position information of the first calibration point, the second position information of the second calibration point, the third position information of the third calibration point, and the fourth position of the fourth calibration point News.

Step S502: mark the first calibration point on the loading and unloading platform circle according to the first position information, mark the second calibration point on the loading and unloading platform circle according to the second position information, and The third position information marks the third calibration point on the loading and unloading platform circle, and the fourth calibration point is marked on the loading and unloading platform circle according to the fourth position information.

Exemplarily, before calibrating the positions of the polishing head circle and the loading and unloading table circle, the electronic device can first obtain the first position information of the first calibration point, the second position information of the second calibration point, and the second position information of the third calibration point. The third position information and the fourth position information of the fourth calibration point, and according to the acquired first position information, second position information, third position information, and fourth position information, the first calibration point, the second calibration point, and the fourth position information The three calibration points and the fourth calibration point are marked on the circle of the loading and unloading platform, so as to determine the first distance, the second distance, and the third distance according to the positions of the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point. Distance and fourth distance.

As an implementation manner, after acquiring the first location information, the second location information, the third location information, and the fourth location information, the electronic device can use the first location information, the second location information, the third location information, and the fourth location information according to the Position information and the position of the loading and unloading platform circle, mark the first calibration point, the second calibration point, the third calibration point and the fourth calibration point on the loading and unloading platform in the actual chemical mechanical planarization equipment. That is, before each chemical mechanical planarization equipment leaves the factory, its loading and unloading platform is marked with four points: the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point, so as to facilitate the polishing head when there is a deviation. Fast and accurate calibration.

It should be noted that the electronic device obtains the first position information of the first calibration point, the second position information of the second calibration point, the third position information of the third calibration point, and the fourth position information of the fourth calibration point. There are many types, and the embodiments of the present invention do not make specific limitations. For example: the electronic device receives the data input by the operator; or the electronic device reads the pre-stored data from the server; or the electronic device itself according to the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point. The punctual position can be used to obtain location information and so on.

In the embodiment of the present invention, first, the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point are marked on the loading and unloading platform circle, so that the electronic device can be based on the above-mentioned first calibration point and second calibration point. The punctuality, the third calibration point and the fourth calibration point perform highly accurate calibration of the positions of the polishing head and the loading and unloading table.

Further, please refer to FIG. 6, which is a flowchart of another calibration method provided by an embodiment of the present invention. Step S401 includes the following steps: Step S601: Obtain the first center of the polishing head trajectory circle and the loading and unloading table circle; wherein the polishing head trajectory circle is a circle corresponding to the polishing head running trajectory.

Exemplarily, please refer to FIG. 2. As shown in FIG. 2, the polishing head trajectory circle is a circle corresponding to the movement trajectory of the polishing head, and its radius and center are fixed and known. In the process of determining the first calibration point and the second calibration point, the electronic device can first obtain the first center of the polishing head trajectory circle and the second center and circumference of the loading and unloading table circle, so that the second center of the polishing head trajectory circle can be used later. A center and the second center and circumference of the loading and unloading platform circle determine the first calibration point and the second calibration point.

It should be noted that there are many ways for the electronic device to obtain the first center of the polishing head trajectory circle and the loading and unloading table circle, which are not specifically limited in the embodiment of the present invention. For example: the electronic device receives the data input by the operator; or the electronic device reads the pre-stored data from the server, etc.

Step S602: Use a first straight line to connect the first circle center and the second circle center to obtain a first intersection point and a second intersection point of the first straight line and the loading dock circle.

Exemplarily, please refer to FIG. 7, which is a schematic diagram of determining ABCD calibration points according to an embodiment of the present invention. As shown in Fig. 7, the first calibration point A and the second calibration point B are the two intersection points of the first straight line AB and the circle of the loading and unloading table respectively. Wherein, the first straight line AB is the line connecting the first center of the polishing head track circle and the second center of the loading and unloading table circle. Therefore, the electronic device can use the first straight line to connect the first circle center and the second circle center, so that the first intersection point and the second intersection point of the first straight line and the docking station circle can be obtained.

Step S603: Determine that the location information of the first intersection is the first location information and the location information of the second intersection is the second location information.

Exemplarily, as described in step S602, the first intersection point and the second intersection point of the first straight line and the dock circle are the first calibration point and the second calibration point, respectively. Therefore, the electronic device can determine the position information of the first intersection point Is the first position information of the first calibration point and the position information of the second intersection is determined as the second position information of the second calibration point.

It should be noted that after determining the four points of the first calibration point, the second calibration point, the third calibration point and the fourth calibration point on the loading and unloading platform of a chemical mechanical flattening equipment, according to the interchangeability, The coaxiality of the polishing head and the loading and unloading table in the large-scale equipment can be corrected.

In the embodiment of the present invention, the positions of the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point are determined according to the positional relationship of the polishing head trajectory circle, the polishing head circle, and the loading and unloading table circle, so that the electronic device The positions of the polishing head and the loading and unloading table can be calibrated with high accuracy according to the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point.

Further, please refer to FIG. 8. FIG. 8 is a flowchart of another calibration method provided by an embodiment of the present invention. Step S401 further includes the following steps: Step S801: Obtain the radius of the polishing head trajectory circle, the first center of the polishing head trajectory circle, and the loading and unloading table circle.

Exemplarily, please refer to FIG. 2. As shown in FIG. 2, the polishing head trajectory circle is a circle corresponding to the movement trajectory of the polishing head, and its radius and center are fixed and known. In the process of determining the third calibration point and the fourth calibration point, the electronic device can first obtain the radius and first center of the polishing head trajectory circle, and the second center and circumference of the loading and unloading table circle, so that the polishing head trajectory circle can be used later. The radius of and the second center and circumference of the loading platform circle determine the third calibration point and the fourth calibration point.

It should be noted that there are many ways for the electronic device to obtain the radius of the polishing head trajectory circle, the first center of the polishing head trajectory circle, and the loading and unloading table circle, which are not specifically limited in the embodiment of the present invention. For example: the electronic device receives the data input by the operator; or the electronic device reads the pre-stored data from the server, etc.

Step S802: Determine the cosine value of the first angle according to the radius of the polishing head track circle and the radius of the loading and unloading table circle, and determine the first angle according to the cosine value.

Exemplarily, please refer to FIG. 7. As shown in FIG. 7, the radii EO and EC of the polishing head track circle and the radii OE and OC of the loading and unloading table circle are known, and the third calibration point C and the fourth calibration point D They are the intersection points of the loading and unloading table circle and the polishing head trajectory circle. However, in the actual chemical mechanical planarization equipment, a cylinder is set at the center of the polishing head track circle, and the specific location of the center E cannot be determined. Therefore, the actual chemical mechanical planarization equipment cannot be determined based on the length of the EC. The specific position of the upper third calibration point C. Based on the above reasons, the following method is used to determine the specific location of the third calibration point C:

為第一直線OE與第二直線OC的夾角，其中，第一直線OE為拋光頭軌跡圓的第一圓心E與裝卸台圓的第二圓心O的連線，第二直線OC為拋光頭軌跡圓的第一圓心E與所述第三校準點C的連線。則，第一角度

的餘弦值為：

其中，

為第一角度

的餘弦值，

為第一直線OE的長度，

為第二直線OC的長度。 Please refer to Figure 7, the first angle in Figure 7

Is the angle between the first straight line OE and the second straight line OC, where the first straight line OE is the connection line between the first center E of the polishing head track circle and the second center O of the loading and unloading table circle, and the second straight line OC is the line of the polishing head track circle The connection line between the first circle center E and the third calibration point C. Then, the first angle

The cosine of is:

among them,

For the first angle

The cosine of

Is the length of the first straight line OE,

Is the length of the second straight line OC.

的餘弦值後，可以根據第一角度

的餘弦值確定第一角度

為：

其中，

為第一角度

的餘弦值，

為第一角度的值。 After confirming the first angle

After the cosine value of, can be based on the first angle

The cosine of determines the first angle

for:

among them,

For the first angle

The cosine of

Is the value of the first angle.

Step S803: Determine the third position information and the fourth position information according to the first angle, the first straight line, and the dock circle.

的值後，可以根據第一直線OE的位置以及第一角度

的值確定裝卸台圓上第三校準點的第三位置資訊。需要說明的是，確定第四校準點的第四位置資訊的方式與上述確定第三校準點的第三位置資訊的方式相同，此處不再贅述。 Exemplarily, the first angle is determined in step S802

After the value of OE, it can be based on the position of the first straight line OE and the first angle

The value of determines the third position information of the third calibration point on the dock circle. It should be noted that the method for determining the fourth position information of the fourth calibration point is the same as the above method for determining the third position information of the third calibration point, and will not be repeated here.

的值，將第三校準點C以及第四校準點D標註在實際化學機械平坦化設備中裝卸台上，從而方便出現偏差時對拋光頭進行快速精確的校準。 Therefore, the third calibration point and the fourth calibration point determined by the above method can be determined according to the position of the first calibration point A and the first angle

The third calibration point C and the fourth calibration point D are marked on the loading and unloading table in the actual chemical mechanical planarization equipment, so as to facilitate quick and accurate calibration of the polishing head when deviations occur.

In the embodiment of the present invention, the positions of the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point are determined according to the positional relationship of the polishing head trajectory circle, the polishing head circle, and the loading and unloading table circle, so that the electronic device The positions of the polishing head and the loading and unloading table can be calibrated with high accuracy according to the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point.

Please refer to FIG. 9, which is a structural block diagram of a calibration device provided by an embodiment of the present invention. The calibration device 90 includes a first acquisition module 901 for acquiring a first distance, a second distance, and a third distance. And a fourth distance; wherein the first distance is the arc distance between the first calibration point and the preset polishing head circle, and the second distance is the arc distance between the second calibration point and the preset polishing head circle , The third distance is the shortest distance between the third calibration point and the preset polishing head circle, and the fourth distance is the shortest distance between the fourth calibration point and the preset polishing head circle; the first calibration The punctuality, the second calibration point, the third calibration point, and the fourth calibration point are located on the loading and unloading table circle; the preset polishing head circle is the circle corresponding to the starting position of the polishing head, and the loading and unloading table The circle is the circle corresponding to the fixed position of the loading and unloading table; the calibration module 902 is used to calibrate the preset polishing head circle according to the first distance, the second distance, the third distance, and the fourth distance To the target polishing head circle, so that the first distance is equal to the second distance, and the third distance is equal to the fourth distance; wherein the target polishing head circle is the target of the polishing head The circle corresponding to the position.

In the embodiment of the present invention, the calibration module 902 calibrates the polishing head circle by making the first distance equal to the second distance, and the third distance equals to the fourth distance, so that the polishing head corresponding to the polishing head circle can be assembled and disassembled. The coaxiality of the loading and unloading platform corresponding to the Taiwan circle is the same. The above method is adopted to calibrate the positions of the polishing head and the loading and unloading table, which is convenient and quick, with small errors and high accuracy.

Further, the calibration device 90 further includes: a second acquisition module for acquiring the first position information of the first calibration point, the second position information of the second calibration point, and the third calibration point The third position information of the fourth calibration point and the fourth position information of the fourth calibration point; a marking module for marking the first calibration point on the loading and unloading platform circle according to the first position information, according to the The second position information marks the second calibration point on the loading and unloading platform circle, and the third calibration point is marked on the loading and unloading platform circle according to the third position information, and according to the fourth position information Mark the fourth calibration point on the circle of the loading and unloading platform.

In the embodiment of the present invention, the marking module first marks the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point on the loading and unloading platform circle, so that the electronic device can be based on the above-mentioned first calibration point, The second calibration point, the third calibration point and the fourth calibration point calibrate the positions of the polishing head and the loading and unloading table with high accuracy.

Further, the second acquisition module is specifically configured to: acquire the first center of the polishing head trajectory circle, the first center of the polishing head trajectory circle, and the loading and unloading table circle; wherein the polishing head trajectory circle is The circle corresponding to the running track of the polishing head; connect the first center and the second center by a first straight line to obtain the first and second intersection points of the first straight line and the loading and unloading table circle; wherein, the second The center of the circle is the center of the loading dock circle; it is determined that the position information of the first intersection is the first position information and the position information of the second intersection is the second position information.

In the embodiment of the present invention, the positions of the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point are determined according to the positional relationship of the polishing head trajectory circle, the polishing head circle, and the loading and unloading table circle, so that the electronic device The positions of the polishing head and the loading and unloading table can be calibrated with high accuracy according to the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point.

Further, the second acquisition module is specifically configured to: acquire the radius of the polishing head trajectory circle and the loading and unloading table circle; wherein the polishing head trajectory circle is a circle corresponding to the polishing head running trajectory; The radius of the polishing head track circle and the radius of the loading and unloading table circle determine the cosine value of the first angle, and the first angle is determined according to the cosine value; wherein the first angle is the angle between the first straight line and the second straight line , The first straight line is the line connecting the first circle center and the second circle center, the second circle center is the center of the loading and unloading platform circle, and the second straight line is the first circle center and the third calibration line. Punctual point or the connection of the fourth calibration point; the third position information and the fourth position information are determined according to the first angle, the first straight line, and the dock circle.

In the embodiment of the present invention, the positions of the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point are determined according to the positional relationship of the polishing head trajectory circle, the polishing head circle, and the loading and unloading table circle, so that the electronic device The positions of the polishing head and the loading and unloading table can be calibrated with high accuracy according to the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point.

An embodiment of the present invention also provides a calibration system, including a measuring device and the above-mentioned calibration device 90; the measuring device is used for measuring the first distance, the second distance, the third distance, and the fourth distance, and the calibration device 90 is used for measuring according to The first distance, the second distance, the third distance, and the fourth distance are used to calibrate the position of the polishing head; wherein the first distance is the distance between the first calibration point and the preset polishing head circle The arc distance, the second distance is the arc distance between the second calibration point and the preset polishing head circle, and the third distance is the shortest distance between the third calibration point and the preset polishing head circle, so The fourth distance is the shortest distance between the fourth calibration point and the preset polishing head circle; the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point are located in loading and unloading On the table circle; the preset polishing head circle is a circle corresponding to the starting position of the polishing head, and the loading and unloading table circle is a circle corresponding to the fixed position of the loading and unloading table.

Further, please refer to FIG. 10, which is a schematic structural diagram of a measuring device provided by an embodiment of the present invention. The measuring device includes: a fixing piece, a first measuring piece, a second measuring piece, a third measuring piece, and a fourth measuring piece. Measuring piece; the size and shape of the fixing piece is the same as the size and shape of the loading and unloading platform circle; the first measuring piece is arranged on the fixing piece at a first position corresponding to the loading and unloading platform circle, the first Two measuring pieces are arranged on the fixing piece at a second position corresponding to the loading and unloading platform circle, and the third measuring piece is arranged on the fixing piece at a third position corresponding to the loading and unloading platform circle, so The fourth measuring part is set on the fixing part at a fourth position corresponding to the loading and unloading platform circle; wherein, the first position is the position of the first calibration point, and the second position is the The position of the second calibration point, the third position is the position of the third calibration point, and the fourth position is the position of the fourth calibration point.

Exemplarily, in order to implement the calibration method in the foregoing embodiment, the calibration system provided in the embodiment of the present invention may be used. Among them, the calibration system includes a measuring device and a calibration device 90.

As an embodiment, as shown in FIG. 10, the measuring device includes a fixing member whose shape and size are the same as the shape and size of the loading and unloading platform circle, so that the measuring device can be fixed on the loading and unloading platform circle. Please refer to FIG. 11, which is a schematic diagram of the installation of the measuring device and the loading and unloading platform according to an embodiment of the present invention. The fixing part of the measuring device can be stuck on the loading and unloading platform. The measuring device also includes a plurality of measuring pieces. As shown in FIG. 10, the measuring device includes four measuring pieces, which are respectively arranged on the fixing piece and the first calibration point, the second calibration point, and the third calibration point corresponding to the circle of the loading and unloading platform. And at the fourth calibration point. Among them, multiple measuring pieces can be a cylindrical screw-in measuring ruler and an arc-shaped angle measuring ruler. The cylinder of the cylindrical screw-in measuring ruler is engraved with a linear scale, the unit of measurement is mm, and the arc angle measuring ruler is engraved with an angle scale. The unit of measurement is °. For example, the first measuring piece located at the first position and the second measuring piece located at the second position may be cylindrical screw-in measuring rulers, the third measuring piece located at the third position and the second measuring piece located at the fourth position The fourth measuring piece can be an arc-shaped angle measuring ruler.

As an implementation manner, the steps for calibrating the positions of the polishing head and the loading and unloading table using the above calibration system are as follows: In the first step, the calibration device determines the positions of the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point, and sets the first calibration point, the second calibration point, the third calibration point and the fourth calibration point Marked on the loading dock.

The second step is to determine the first, second, third, and third measurement parts in the measurement device according to the positions of the first, second, third, and fourth calibration points determined by the calibration device. 4. The position of the measuring piece.

The third step is to snap the measuring device with the first measuring piece, the second measuring piece, the third measuring piece and the fourth measuring piece into the corresponding position of the loading and unloading platform.

The fourth step is to move the first measurement piece and the second measurement piece until the first measurement piece and the second measurement piece touch the polishing table and stop moving, and read the first calibration point and the second calibration point to the first point of the polishing head One distance and second distance.

The fifth step is to move the third measuring piece and the fourth measuring piece until the third and fourth measuring pieces touch the polishing table and then stop moving, and read the third calibration point and the fourth calibration point to the first position of the polishing head. Three distance and fourth distance.

In the sixth step, the calibration device calibrates the positions of the polishing head and the loading and unloading table according to the first distance, the second distance, the third distance, and the fourth distance.

In the embodiment of the present invention, the first measuring piece, the second measuring piece, the third measuring piece, and the fourth measuring piece on the measuring device are respectively arranged at the first position, the second position, the third position, and the fourth position, Then use the above-mentioned measuring device to measure the first distance, the second distance, the third distance, and the fourth distance, so that the electronic device can make the first distance equal to the second distance, and the third distance equals to the fourth distance, to polish The positions of the head and the loading and unloading platform are calibrated with high accuracy.

Please refer to FIG. 12, which is a structural block diagram of an electronic device according to an embodiment of the present invention. The electronic device includes: at least one processor 1201, at least one communication interface 1202, at least one memory 1203, and at least one communication bus 1204. Among them, the communication bus 1204 is used for realizing the direct connection and communication of these components, the communication interface 1202 is used for signaling or data communication with other node devices, and the memory 1203 stores machine-readable instructions executable by the processor 1201. When the electronic device is running, the processor 1201 and the memory 1203 communicate through the communication bus 1204, and the machine-readable instructions are executed when the processor 1201 executes the above-mentioned calibration method.

The processor 1201 may be an integrated circuit chip with signal processing capability. The aforementioned processor 1201 may be a general-purpose processor, including a central processing unit (CPU), a network processor (Network Processor, NP), etc.; it may also be a digital signal processor (DSP), a dedicated integrated circuit ( ASIC), ready-made programmable gate array (FPGA) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components. It can implement or execute various methods, steps, and logical block diagrams disclosed in the embodiments of the present invention. The general-purpose processor may be a microprocessor or the processor may also be any conventional processor or the like.

The memory 1203 may include but is not limited to Random Access Memory (RAM), Read Only Memory (Read Only Memory, ROM), Programmable Read-Only Memory (PROM), Erasable Programmable Read-Only Memory (EPROM), Electric Erasable Programmable Read-Only Memory (EEPROM), etc.

An embodiment of the present invention also provides a computer program product, including a computer program stored on a non-transitory computer-readable storage medium. The computer program includes program instructions. When the program instructions are executed by a computer, the computer can execute the calibration method in the above-mentioned embodiment The steps of, for example, include: obtaining a first distance, a second distance, a third distance, and a fourth distance; and calibrating the first distance, the second distance, the third distance, and the fourth distance according to the first distance, the second distance, the third distance, and the fourth distance. The polishing head circle is preset to the target polishing head circle, so that the first distance is equal to the second distance, and the third distance is equal to the fourth distance.

The above are only preferred embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, the present invention can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

The above are only specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention. It should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the patent application.

It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply one of these entities or operations. There is any such actual relationship or order between. Moreover, the terms "include", "include" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes those that are not explicitly listed Other elements of, or also include elements inherent to this process, method, article or equipment. If there are no more restrictions, the element defined by the sentence "including a..." does not exclude the existence of other identical elements in the process, method, article, or equipment that includes the element.

90 Calibration device 901 First acquisition module 902 Calibration module 1201 Processor 1202 Communication interface 1203 Memory 1204 Communication bus S101 Step S102 Step S501 Step S502 Step S601 Step S602 Step S603 Step S801 Step S802 Steps S803 Steps

In order to explain the technical solutions of the embodiments of the present invention more clearly, the following will briefly introduce the drawings that need to be used in the embodiments. It should be understood that the following drawings only show certain embodiments of the present invention, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, they can also Obtain other related schemas based on these schemas.

Fig. 1 is a flowchart of a calibration method provided by an embodiment of the present invention.

Fig. 2 is a schematic diagram of the positions of the polishing head circle, the loading and unloading table circle, and the polishing head track circle provided by the embodiment of the present invention.

Fig. 3a is a schematic diagram of a polishing head circle provided by an embodiment of the present invention before being calibrated in the CD direction.

Fig. 3b is a schematic diagram of the polishing head circle provided by the embodiment of the present invention after being calibrated in the CD direction.

Fig. 4a is a schematic diagram of a polishing head circle provided by an embodiment of the present invention before being calibrated in the AB direction.

Fig. 4b is a schematic diagram of the polishing head circle provided by the embodiment of the present invention after being calibrated in the AB direction.

Fig. 5 is a flowchart of another calibration method provided by an embodiment of the present invention.

Fig. 6 is a flowchart of another calibration method provided by an embodiment of the present invention.

FIG. 7 is a schematic diagram of determining ABCD calibration points according to an embodiment of the present invention.

FIG. 8 is a flowchart of another calibration method provided by an embodiment of the present invention.

FIG. 9 is a structural block diagram of a calibration device provided by an embodiment of the present invention.

FIG. 10 is a schematic structural diagram of a measuring device provided by an embodiment of the present invention.

FIG. 11 is a schematic diagram of the installation of the measuring device and the loading and unloading platform provided by the embodiment of the present invention.

FIG. 12 is a structural block diagram of an electronic device according to an embodiment of the present invention.

S101 Step S102 Step

Claims (10)

A calibration method includes the following steps: Obtain a first distance, a second distance, a third distance, and a fourth distance; wherein the first distance is the shortest distance between the first calibration point and the preset polishing head circle, and the second distance is the second calibration point and the The shortest distance of the preset polishing head circle, the third distance is the minimum arc distance between the third calibration point and the preset polishing head circle, and the fourth distance is the fourth calibration point and the preset The minimum arc distance of the polishing head circle; the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point are located on the loading and unloading table circle; the preset polishing head circle is The circle corresponding to the starting position of the polishing head, and the loading and unloading table circle is the circle corresponding to the fixed position of the loading and unloading table; and Calibrate the preset polishing head circle to the target polishing head circle according to the first distance, the second distance, the third distance, and the fourth distance, so that the first distance is the same as the second distance. The distance is equal, and the third distance is equal to the fourth distance; wherein the target polishing head circle is a circle corresponding to the target position of the polishing head. The calibration method according to claim 1, wherein, before the obtaining the first distance, the calibration method further includes: Acquiring first position information of the first calibration point, second position information of the second calibration point, third position information of the third calibration point, and fourth position information of the fourth calibration point; The first calibration point is marked on the loading and unloading platform circle according to the first position information, the second calibration point is marked on the loading and unloading platform circle according to the second position information, and according to the first position information Three-position information marks the third calibration point on the loading and unloading platform circle, and marking the fourth calibration point on the loading and unloading platform circle according to the fourth position information. The calibration method according to claim 2, wherein said obtaining the first position information of the first calibration point and the second position information of the second calibration point comprises: Obtaining the first center of the polishing head trajectory circle and the loading and unloading table circle; wherein the polishing head trajectory circle is a circle corresponding to the polishing head running trajectory; Use a first straight line to connect the first circle center and the second circle center to obtain a first intersection point and a second intersection point of the first straight line and the loading dock circle; wherein the second circle center is the center of the loading dock circle; It is determined that the position information of the first intersection is the first position information and the position information of the second intersection is the second position information. The calibration method according to claim 2, wherein said obtaining the third position information of the third calibration point and the fourth position information of the fourth calibration point includes: Obtaining the radius of the polishing head trajectory circle, the first center of the polishing head trajectory circle, and the loading and unloading table circle; wherein the polishing head trajectory circle is a circle corresponding to the polishing head running trajectory; The cosine value of the first angle is determined according to the radius of the polishing head track circle and the radius of the loading and unloading platform circle, and the first angle is determined according to the cosine value; wherein the first angle is the first straight line and the second The included angle of a straight line, the first straight line is the line connecting the first circle center and the second circle center, the second circle center is the center of the loading and unloading platform circle, and the second straight line is the first circle center and the The connection line of the third calibration point or the fourth calibration point; The third position information and the fourth position information are determined according to the first angle, the first straight line, and the dock circle. A calibration device, including: The first acquisition module is used to acquire the first distance, the second distance, the third distance and the fourth distance; wherein the first distance is the shortest distance between the first calibration point and the preset polishing head circle, and the first distance is the shortest distance between the first calibration point and the preset polishing head circle. The second distance is the shortest distance between the second calibration point and the preset polishing head circle, the third distance is the minimum arc distance between the third calibration point and the preset polishing head circle, and the fourth distance is the first The minimum arc distance between the four calibration points and the preset polishing head circle; the first calibration point, the second calibration point, the third calibration point, and the fourth calibration point are located on the loading and unloading platform circle; The preset polishing head circle is a circle corresponding to the starting position of the polishing head, and the loading and unloading table circle is a circle corresponding to the fixed position of the loading and unloading table; and The calibration module is used to calibrate the preset polishing head circle to the target polishing head circle according to the first distance, the second distance, the third distance, and the fourth distance, so that the first The distance is equal to the second distance, and the third distance is equal to the fourth distance; wherein the target polishing head circle is a circle corresponding to the target position of the polishing head. The calibration device according to claim 5, wherein the calibration device further includes: The second acquisition module is used to acquire the first position information of the first calibration point, the second position information of the second calibration point, the third position information of the third calibration point, and the fourth calibration point. On-time fourth location information; The marking module is configured to mark the first calibration point on the loading and unloading platform circle according to the first position information, and mark the second calibration point on the loading and unloading platform circle according to the second position information In the above, the third calibration point is marked on the loading and unloading platform circle according to the third position information, and the fourth calibration point is marked on the loading and unloading platform circle according to the fourth position information. A calibration system, including a measuring device and the calibration device described in claim 5; The measuring device is used to measure a first distance, a second distance, a third distance, and a fourth distance, and the calibration device is used to measure the first distance, the second distance, the third distance, and the The fourth distance is to calibrate the position of the polishing head; Wherein, the first distance is the arc distance between the first calibration point and the preset polishing head circle, the second distance is the arc distance between the second calibration point and the preset polishing head circle, and the third The distance is the shortest distance between the third calibration point and the preset polishing head circle, the fourth distance is the shortest distance between the fourth calibration point and the preset polishing head circle; the first calibration point, the second The second calibration point, the third calibration point, and the fourth calibration point are located on the loading and unloading table circle; the preset polishing head circle is the circle corresponding to the starting position of the polishing head, and the loading and unloading table circle is the circle of the loading and unloading table. The circle corresponding to the fixed position. The calibration system according to claim 7, wherein the measuring device includes: a fixing part, a first measuring part, a second measuring part, a third measuring part, and a fourth measuring part; The size and shape of the fixing member are the same as the size and shape of the loading and unloading platform circle; The first measuring piece is arranged on the fixing piece at a first position corresponding to the loading and unloading platform circle, and the second measuring piece is arranged on the fixing piece at a second position corresponding to the loading and unloading platform circle Where, the third measuring piece is set on the fixing piece at a third position corresponding to the loading and unloading platform circle, and the fourth measuring piece is set on the fixing piece at the first position corresponding to the loading and unloading platform circle. Four positions Wherein, the first position is the position of the first calibration point, the second position is the position of the second calibration point, the third position is the position of the third calibration point, and the second position is the position of the third calibration point. The fourth position is the position of the fourth calibration point. An electronic device, including: a processor, a memory, and a bus; The processor and the memory communicate with each other through the bus; The memory stores program instructions that can be executed by the processor, and the processor invokes the program instructions to execute the calibration method as described in any one of request items 1 to 4. A non-transitory computer-readable storage medium, wherein the non-transitory computer-readable storage medium stores computer instructions, and the computer instructions cause the computer to execute any one of claims 1 to 4 Calibration method.

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