TWI722205B - Vacuum valve for controlling a flow and for interrupting a flow path - Google Patents

Abstract

Vacuum valve (10) for controlling a flow, having a valve seat (12) which comprises a valve opening (16), which defines an opening axis (A), and a first sealing surface (13) which runs around the valve opening (16) and defines a first sealing plane (E_S), having a valve disk (11) with a second sealing surface (14) which corresponds to the first sealing surface (13), wherein the second sealing surface (14) defines a second sealing plane (E_T), additionally having a first coupling element, which is connected to the valve disk (11) and comprises a receiving means, for providing controlled guidance of the valve disk (11) and a drive unit which is coupled with the first coupling element and is configured in such a manner that the valve disk (11) is adjustable from an open position, in which the valve disk (11) and the valve seat (12) are present in a contactless manner relative to one another, into a closed position, in which the second sealing surface (14) of the valve disk (11) is pressed against the first sealing surface (13) by means of a seal (15) which lies between them, and back. The drive unit and the valve disk (11) are configured in such a manner and interact in such a manner that the valve disk (11) is adjustable into a fine control position, wherein the valve disk (11) is tilted in a defined manner relative to the valve seat (12) in such a manner that the first sealing plane (E_S) and the second sealing plane (E_T) enclose a defined angle (α), and the seal (15) abuts fully against one of the two sealing surfaces (13, 14) and abuts only in part against the other sealing surface (13, 14).

Description

Vacuum valve for controlling the flow and for interrupting the flow path

The present invention relates to a vacuum control valve, which has a valve disc and a guide for positioning the valve disc in at least three stages.

Generally speaking, various embodiments of vacuum valves that close a flow path running through an opening formed in a valve chamber in a substantially airtight manner have been known from the prior art.

The vacuum slide valve is especially used in the field of integrated circuit and semiconductor manufacturing. This manufacturing must be carried out in a protective gas that may not contain polluting particles. For example, in a production plant for semiconductor wafers or liquid crystal substrates, highly sensitive semiconductor elements or liquid crystal elements run sequentially through multiple processing chambers, in which, in each case, a processing device is used to process the semiconductor in the processing chamber element. Both during the processing process in the processing chamber and during the transportation from the processing chamber to the processing chamber, highly sensitive semiconductor components always need to be placed in a protective gas, especially a vacuum.

These processing chambers are connected to each other by, for example, a connecting passage. The processing chambers can be opened by a vacuum slide valve to transport parts from one processing chamber to the next, and then the processing chambers are closed in an airtight manner to perform each The production steps. These types of valves are also called vacuum delivery valves based on the above-mentioned application fields, and are also called rectangular slides based on their rectangular cross-sectional openings.

Especially when the delivery valve is used in the production of highly sensitive semiconductor components, particle generation due to valve actuation and mechanical load on the valve closing member, as well as the number of free particles in the valve space, must be kept as low as possible. Particle generation Mainly due to friction, such as metal-to-metal contact, and due to wear.

According to the respective driving technology, there is a difference between a spool valve and a pendulum valve, which is also called a valve slide or a rectangular slide. In the prior art, in most cases, the difference is two. Implement closure and opening in phases. In the first step, a valve closing member, in particular, for example, US Patent No. US 6,416,037 (Geiser) or US Patent No. US 6,056,266 (Blecha) discloses a spool valve, particularly L-shaped The lower closed disc is displaced across an opening in a linear manner approximately parallel to the valve seat, or, for example, in the case of a pendulum valve disclosed in U.S. Patent No. 6,089,537 (Olmsted), it surrounds a pivot Pivoting across an opening, so that there will be no contact between the closing disc and the valve seat of the valve chamber. In the second step, the closing disc is pushed onto the valve seat of the valve chamber via its closed side to close the opening in an airtight manner. The sealing can be implemented, for example, by a sealing element or by a sealing ring on the valve seat, wherein the sealing element is arranged on the closed side of the closing disc and is pushed onto the valve seat extending around the opening, and in between The closed side of the closing disc is pushed against the sealing ring. The seal, especially the seal ring, can be held in a groove and/or cured on it.

For example, in the prior art of U.S. Patent No. US 6,629,682 B2 (Duelli), different sealing devices are disclosed. Suitable materials for sealing rings and seals in vacuum valves are, for example, fluorinated rubber, also known as FKM, particularly known as the fluoroelastomer with the brand name "Viton", and perfluorinated rubber, FFKM for short.

In the multi-stage movement described above, the closing member first slides laterally across the opening without causing the seal to be contacted by the valve seat, and then the closing member is pushed substantially vertically onto the valve seat, except that the seal is almost only pushed vertically. In addition to the advantages of pressure without the seal being subjected to lateral or longitudinal loads, it is also possible to control the flow of a medium (such as processing gas) through the valve opening.

For this purpose, a single drive that can achieve an L-shaped movement of a closing member, or a plurality of drives such as two linear drives, or one linear drive and one expansion drive, is used.

In one of the common specific embodiments of the above-mentioned valve type, the closing member (valve The disc) and the valve drive part are connected by at least one adjusting arm, in particular a push rod or valve stem. In this connection, the rigid adjustment arm is connected to the closing member in a rigid manner through one of its ends, and is connected to the valve driver in a rigid manner through the other end thereof. In the case of most valves, the closing disc is connected to the at least one push rod by a screw connection.

German patent DE 10 2008 061 315 B4 describes the installation of a valve plate on a valve stem by a cross member, wherein the cross member extends laterally with respect to the valve stem. The cross member is particularly connected to the valve stem at a central connection point by a screw, and is particularly connected to the valve plate at at least two lateral connection points located on two sides of the central connection point by a screw connection. In a central part, the cross member is spaced apart from the valve plate, wherein the central part includes a central connection point and several parts connected to the central connection point on both sides. The cross member can preferably be laid out as a single piece of material, and in particular can be completely made of metal.

US Patent No. US 6 471 181 B2 describes a similar installation. A cross member to be connected to the valve stem includes a first plate that includes a tapered opening for receiving the end of the valve stem that is screwed to the first plate. The elastic support block is installed to the first plate on the two sides connected to the central connection point of the valve stem, and the second plate connected to the valve plate by screws in each case is installed on the side ends of the elastic support block And it is opposite to the first board.

US Patent No. US 2008/0066811 A1 describes a vacuum valve in which a valve plate is connected to the first and second cross members. These cross members are connected to the valve plate through a plurality of connecting members. These connecting members include connecting arms, which extend from a connecting point in the longitudinal direction of the cross member to both sides of the cross member, and are connected at the ends to a common connecting leg, which extends in the longitudinal direction of the cross member The valve plate is connected to the valve plate by screws at a plurality of points, and these points are spaced apart in the longitudinal direction of the cross member. As a result, a more even force transmission is achieved in the longitudinal direction of the cross member.

US Patent No. US 6,994,311 B2 discloses a vacuum control valve whose goal is to generate a symmetrical flow through an opening in an open valve position. The valve disc is installed on a guide (valve stem) in the center, and can be guided along the axial direction, according to the valve disc and the valve The interval between the seats adjusts a volume flow through the opening.

The above specific embodiments have in common in particular that a control curve (volume flow per unit time) generated by one of these designs during the control period will typically exhibit an unfavorable curve extension. In particular, when transitioning from an almost closed valve state to a completely closed valve state, the curve will show an apparently uneven curve based on the occurrence of a "snapping shut effect" in this situation Stretch. In this case, a flow through the opening will be suddenly interrupted. As a result, fine adjustment in the extremely low pressure range is almost impossible or impossible.

Therefore, the purpose that forms the basis of the present invention is to provide a vacuum valve which on the one hand provides a controlled air-tight closure of a valve opening, and on the other hand provides an improved control function for a flow through the opening.

This purpose is achieved by realizing the characteristics of the independent item of the scope of the patent application. In the appendix of the scope of patent application, we will find another alternative or advantageous way to further develop the features of the present invention.

The present invention is based on motivation, especially in view of the need for precise control ^{of molecular airflow in the extremely low vacuum pressure range (for example, less than 10 -6} millibars (mbar)), the design is based on a reliable control method, and a controllable or In a uniform manner, flow control is performed across the entire possible control curve. Molecular gas flow also plays a role in the transition zone (<10 ^-3 mbar) and is characterized by a relatively large free path length of gas molecules. The present invention is based on the method of realizing flow control. Through the initial oblique contact between the valve disc and the valve seat, the volume flow can be adjusted according to the relative inclination position (when the valve disc and the valve seat are in contact). As such, a larger opening angle means a larger opening size, and therefore possibly a larger flow volume per unit time. By reducing the opening angle, the flow can be reduced in stages and/or continuously until the valve seat and the sealing surface of the valve disc or between the seals are in full contact, and the opening is therefore in a completely closed state (closed position) until.

Using the valve according to the present invention, the flow can be controlled in an advantageous way, even at a very low pressure while providing and maintaining a substantially symmetrical laminar flow.

The present invention relates to a vacuum valve, particularly a vacuum control valve, for controlling a volume flow or mass flow, and for interrupting a flow path in an airtight manner. The valve has a valve seat, which includes a valve opening and a first sealing surface, the valve opening defines an opening axis, the first sealing surface extends around the valve opening and defines a first sealing plane. In addition, a valve disc for controlling the volume flow or mass flow and for interrupting the flow path is provided, and has a second sealing surface corresponding to the first sealing surface, wherein the second sealing surface defines a first sealing surface. Two sealing planes, the modifiable position of the second sealing plane is determined by a respective position and alignment of the valve disc.

In addition, the valve has a first coupling element and a driving unit. The first coupling element is connected to the valve disc and includes a receiving member for providing controlled guidance of the valve disc. The driving unit is particularly coupled with the first coupling element by the receiving member, and is arranged so that the valve disc can be adjusted (adjustable). The valve disc can be adjusted from an open position to a closed position at least approximately along a longitudinal closing direction or a geometric longitudinal axis in a longitudinal opening direction, and then return. In the open position, the valve disc and the valve seat are not in contact with each other. In the closed position, the first sealing surface and the second sealing surface are in axial sealing contact due to a sealing element located between the two, and the valve opening is therefore closed in an airtight manner.

The drive unit and the valve disc are arranged and interact with each other, and are specifically coupled so that the valve disc can be adjusted to a fine control position, wherein the valve disc is inclined in a predetermined manner relative to the valve seat, so that the The first sealing plane and the second sealing plane enclose a defined angle, and the seal is sufficiently close to one of the two sealing surfaces, and only partially close to the other sealing surface. In other words, the first and second sealing surfaces are only partially contacted by the sealing member. The first or the second sealing surface is therefore only partially pushed onto the seal. The other parts of the seal remain untouched by the opposite sealing surfaces. As a result, a deliberately incomplete opening seal is produced.

As a result, the surface portion of the sealing member that is in contact with or pressed by the opposite sealing surface in the finely controlled position is greater than that of the sealing member in the closed position small.

Based on such a targeted tilt position and the opening range of the valve opening that can be adjusted according to the tilt, favorable pressure and flow control may result. This type of control is typically used when, for example, processing gas is used and there is a final demand to adjust the demand pressure. Based on the laminar flow of a permanent medium that can be induced to pass through the opening, pressure fluctuations can be avoided, and the required pressure can be reached in a faster way. Based on the possibility of additionally providing a completely separated valve disc and valve seat (open position), a very large flow opening can be additionally selected.

The drive unit and the valve disc are arranged and coupled to, in particular, so that when the valve disc is adjusted from the open position to the closed position, or from the closed position to the open position, the valve disc will reach the closed position. Before the position, or before reaching the open position, occupy the fine control position. For example, this can be actuated by the corresponding drive unit, for example based on the controlled tilt of the guide rod or the disc relative to the valve seat. The tilt can be provided, for example, under the guidance of the guide rod, that is, based on the corresponding pivotable support configuration of the guide. It is also possible to provide only the tilt of the disk relative to the seat based on the corresponding variable support configuration of the disk relative to the guide rod or relative to an adjustment arm.

Another option for this is that the disc can already be arranged at a pre-determined transverse position with respect to the sealing surface of the valve seat. In this way, the desired tilt position can also be achieved.

In addition, it is possible to perform a different linear movement (closing movement) with respect to the two end sides of the valve disc (not the top and bottom surfaces, but with respect to the edge of the disc), so that one side of the disc reaches the side earlier than the opposite side. seat.

According to a specific embodiment of the present invention, the valve disc is positioned at the fine control position so that the second sealing plane defined by the extension of the second sealing surface is inclined toward the opening axis or the longitudinal axis. In particular, the position of the longitudinal axis is defined by the adjustment direction provided by the drive unit. Therefore, the valve disc will not move in a direction parallel to a normal line of the bottom surface of the disc, for example, but move in its inclined position transverse to the normal line, in particular so that it is therefore in the inclined position and the valve Block contact.

Regarding the alignment of the sealing surface of the valve seat based on a realization (realization) Positive, the first sealing surface (of the valve seat) can point in a direction parallel to the opening axis or the longitudinal axis, and extend orthogonally to the opening axis or the longitudinal axis. This structure is a typical embodiment of a valve according to the present invention.

However, another option for this is that the first sealing surface may also point in a direction transverse to the opening axis or the longitudinal axis, and for a plane clamp extending orthogonally to the opening axis or the longitudinal axis. One angle. According to the embodiment of the present invention, even in the case of orthogonal alignment with respect to the longitudinal axis or the opening axis, the valve disc can still move at an angle and be supported on the valve seat, and by the inclination Location provides control. In other words, the valve seat or its sealing surface can be inclined to replace a targeted transverse position of the valve disc.

In a specific embodiment, the first and second sealing planes enclose a predetermined angle (α) in the open position and the fine control position, and the first and second sealing planes are in the closed position Align roughly in parallel. When moving from the fine control position to the closed position, the value of the angle α therefore moves closer and closer to "zero", and finally to "zero".

Obviously, according to a specific embodiment, the valve disc has not only a single adjustable fine control position, but also a second, multiple or plural fine control positions that can be adjusted, especially continuously adjusted. _{In this case, the angle α n} enclosed by the first and the second sealing plane in each case is different in each case, and the first and the second sealing surface are different in each case. The seal is only in partial contact. The multiple fine control positions can therefore correspond to another inclined position of the valve disc with respect to the valve seat in each situation. In particular, during a continuous closing movement, each tilt position can be assigned to a separate fine control position.

In particular, the fine control positions can be adjusted independently or successively in a controlled manner in each situation, and as a result, can provide continuous control of the volume flow or mass flow of a medium through the valve opening. In each case, the flow can be maintained particularly in a laminar flow mode. Such control is particularly provided by a stepping motor or a servo motor of the drive unit for moving the guide rod or push rod.

Regarding the coupling of the valve disc and the drive unit, or regarding the elastic pivotability in a specific frame due to the installation of the valve disc, the first coupling element can be arranged to be related to The opening shaft or a cross member extending transversely with respect to the longitudinal axis is connected to the valve disc at at least one connection point on a rear side of the valve disc.

This cross member is arranged elastically with respect to the material and/or form used, that is, it will provide a certain torsion, and therefore the pivot of the disc around a pivot, the pivot is by means of the member The extension and definition of those. The characteristics of the cross member allow the sealing surface to be evenly pushed onto the seal (or vice versa) when the sealing surface passes over possible fine control positions and the valve is completely closed. A valve disc (closed) movement type can be implemented by twisting the cross member without any lateral load on the sealing material, and as a result, no useless particles are generated. Therefore, a movement from an inclined position to a position parallel to the sealing planes is carried out.

In one embodiment, the receiving member of the cross member provides a central coupling point for coupling the driving unit laterally with respect to an extension direction of the cross member, and the cross member is provided with a central coupling point relative to the extension direction of the cross member. An adjustment arm extending laterally is connected to the drive unit. In this way, the cross member will therefore be connected to the adjusting arm, and the valve disc is guided by the movement of the adjusting arm.

According to another embodiment, the cross member can be connected to the valve disk at least two lateral connection points on two sides of the central coupling point in a corresponding manner. A central part includes the central coupling point and several parts connected to the coupling point on two sides, and the central part extends between the lateral connection points, so the cross member can be connected to the rear side A certain distance apart, and can be arranged elastically so that based on the torsion of the cross member, the valve disc can be pivoted relative to the adjustment arm around a pivot, the pivot is connected with the opening shaft or with The longitudinal axis is at right angles. The cross member and the adjusting arm are specially arranged as a single piece.

In particular, the connection between the cross member and the valve disc at the at least one connection point includes a friction stir welding connection. As a result, for example, the risk of particle generation in the case of screw connections will be further reduced.

According to an embodiment of the present invention, the driving unit includes at least one motor and at least one guiding component, the guiding component is in particular a guide rod, which can be driven along or in a controlled manner by the at least one motor It moves parallel to the longitudinal axis, and the valve disc is connected to the guide assembly by the receiving member and can move relative to the valve seat. For example, the disc is indirectly connected to the guide assembly by an adjusting arm and a cross member. The position of the longitudinal axis is particularly defined by the extension of the guide assembly and/or by the direction of linear movement, wherein the guide assembly is arranged or called a push rod or guide rod, for example, and the linear movement is Provided by the drive unit.

According to a specific embodiment, the drive unit includes at least one motor, particularly two motors, and two guide components, particularly guide rods. The guide components can be based on the at least one motor or the two motors. A controlled movement parallel to the longitudinal axis. The two guiding components define a common longitudinal axis in each case, and the common longitudinal axis forms, for example, a center parallel to the two guide rods.

In particular, the valve disc may include a second coupling element connected to the valve disc and having a receiving member, wherein the first and the second coupling element are directly arranged on the valve disc , In particular, it is arranged as a single piece with the valve disc, and in each case, a guide assembly is connected to each of the receiving members of the first and the second coupling element. The coupling elements are particularly arranged opposite to each other, that is, they can pass through the center of the valve disc with respect to a vertical direction, and are installed in an axially symmetrical manner or formed on the edge of the disc. As a result, the alignment of the disc with respect to the valve seat can be changed by the independent movement of the two guide rods. If one rod moves farther than the other, for example, the disc can be aligned with the seat clamp at an angle and can be guided to the fine control position.

According to a specific embodiment, the driving unit may therefore include two motors, and each of the two guiding components can be moved in a controlled manner by one of the two motors. The fine control position, in particular the plurality of fine control positions, can be pivoted by a predetermined, in particular, independent actuation of the two motors, so that the first sealing plane is inclined relative to the second sealing plane Location can be caused.

In one embodiment, the valve includes a bridge connecting the two guide components Piece, wherein the first coupling element is connected to the bridge piece. With this embodiment, the valve disc can be arranged at the center between the guide rods. The desired tilting position of the disc can be set by the corresponding motor actuation, that is, the end of the first disc coupled with the first guide rod is guided so that the distance between the end of the first disc and the valve seat is longer than that of the valve seat. The distance between the end of the first disc and the end of the second disc is small. In this way, the coupling element can be specially arranged as the cross member. As a result, the combination of the elasticity of the cross member and the respective independent motor actuation implements a highly precise control of the flow through the valve opening to provide uniform seal pressing and laminar flow across the opening.

As a result, the above specific embodiment will combine a two-piece disc guide (with two guide rods) and a cross member, wherein the valve disc will be coupled to the guide rods at least in an indirect manner by the cross member.

10: (Vacuum) valve

11: (valve) plate

12: (valve) seat

13: Sealing surface

14: Sealing surface

15: Seal

16: (valve) opening

20: (vacuum) valve

21: (valve) plate

22: (valve) seat

23: sealing surface

24: sealing surface

25: Seal

26: (valve) opening

30: (vacuum) valve

31: (valve) plate

32: (valve) seat

33: sealing surface

35: seal

36: (valve) opening

37: (adjustment) arm

38: Cross member

39: drive unit

40: (vacuum) valve

41: (valve) plate

42: (valve) seat

45: seal

46: (valve) opening

47: guide rod

48: coupling element

49: drive unit

49a: Motor

49b: Motor

A: (open) shaft

B: axis

E _S : Sealing plane

E _T : Sealing plane

S: (Pivot) axis

α: Angle

In the following, the device according to the present invention will be described in more detail in a purely exemplary manner through specific exemplary embodiments schematically shown in the drawings, and the further advantages of the present invention will also be paid attention to. The drawings are as follows: Figures 1a to 1b show the first and second embodiments of the vacuum valve according to the present invention, the vacuum valve is in an open position; Figures 2a to 2b show the vacuum according to the present invention The first and second embodiments of the valve, the vacuum valve is in a finely controlled position; Figures 3a to 3b show the first and second embodiments of the vacuum valve according to the present invention, the vacuum valve is in A closed position; Figures 4a to 4c show the third embodiment of the vacuum valve according to the present invention, various perspective views in an open position and a fine control position; and Figures 5a to 5c show the basis Various perspective views of the fourth embodiment of the vacuum valve of the present invention in an open position and a fine control position.

Figure 1a shows a schematic cross-sectional view through a specific embodiment of a vacuum valve 10 according to the present invention, the vacuum valve 10 being in an open position. Valve 10 includes a The valve disc 11 serves as a closing element and a valve seat 12 opposite to the valve disc 11. The valve seat 12 extends around a valve opening 16 and thus defines the valve opening 16. The valve disc 11 is configured to be movable relative to the valve seat 12, wherein at least one of the opening axes A defined by the opening 16 or the second sealing surface 14 is aligned with one of the defined axes B to provide mobility. Based on the parallel alignment of the disk 11, or its sealing surface 14 with respect to the seat 12, the axes A and B will overlap in the position shown.

Alternatively, when the valve disc 11 is in the open position, it is not parallel to the valve seat 12, but at least an angle (inclined).

Both the valve disc 11 and the valve seat 12 have a sealing surface, a first sealing surface 13 and a second sealing surface 14 in each case. The first sealing surface 13 further includes a sealing element 15. The seal 15 can be cured on the valve seat 12, such as a vulcanized polymer. Alternatively, the seal 15 may be arranged as an O-ring seal in a groove of the valve seat 12, for example. A sealing material can also be bonded to the valve seat 12, and therefore the sealing element 15 is implemented in detail. Alternatively, the seal 15 may be arranged on the side of the valve disc 11, in particular on the second sealing surface 14. Combinations of these manifestations can also be envisaged.

The sealing surface 13 defines a first sealing plane E _{S of the} valve seat 12, and the sealing surface 14 defines a second sealing plane E _{T of the} valve disc 11. The positions of the sealing planes E _T and E _S therefore firstly depend on the extension of the respective sealing surfaces, and secondly depend on the spatial alignment (and position) of the valve disc 11 or the valve seat 12.

Figure 1b shows another embodiment of a valve 20 according to the present invention, the valve 20 being in an open position. The valve 20 is designed in a manner similar to that shown in Figure 1a.

In contrast, the sealing element 25 is here arranged on the side of the sealing surface 24 of the valve disc 21, and a corresponding sealing surface 23 is arranged on the valve seat 22. The sealing surfaces 23 and 24 sequentially define corresponding sealing planes E _S and E _T.

Figures 1a and 1b show the manifestations of the respective valves in a purely schematic manner. In either case, a driving unit that moves the valve disc 11 or 21 relative to the respective valve seat is not shown. Such a drive unit typically includes a motor, in particular a stepping motor or a servo motor. The valve disc can be coupled to the drive by a corresponding structure unit. According to the present invention, this may be embodied in different ways.

First, the driving unit may include a push rod (guide rod), which can be moved in a linear manner along a longitudinal axis by the motor. A first end of an adjusting arm is connected to the push rod, in particular diagonally transverse or orthogonal to the push rod. The connection between the push rod and the adjustment arm is arranged in a rigid manner. A cross member that extends transversely with respect to the adjusting arm and is connected to the valve disc in turn is attached to a second end (set opposite to the first end). The cross member is elastically arranged so that the disk can pivot around a pivot, and the pivot is defined by the extension of the cross member. In this way, based on the twisting of the member, it is possible to achieve the desired pivotability of the disc, and therefore a desired tilt position of the disc relative to the valve seat and the possibility of changing the tilt.

A device with two guiding components (push rods) can be deployed as an alternative to the valve disc output, or can also be a combinable design. In this way, the disc has two receiving members, which are arranged in particular on two opposite sides with respect to the periphery of the disc. Each of the receiving members has a push rod connected to it. The driving of the push rods is preferably implemented by two motors, but can also be implemented by at least one motor and a gearing unit. It can also be based on the linear movement of the push rods that are not implemented in parallel (with respect to the linear position of the push rods), and a controlled manner is provided to provide an inclination position of the valve disc relative to the valve seat and the inclination position Adjustment.

Fig. 2a and Fig. 2b show the embodiment of the valve according to Fig. 1a and Fig. 1b, which is not in the open position, but in a finely controlled position. In this way, the valve disc 11 or 21 is not aligned parallel to the valve seat 12 or 22 in each case, but is inclined relative to each other. These valves are arranged (and act in a controlled manner) so that they can reach and occupy a finely controlled position in each case during a closing movement before the valve disc reaches a closed position.

In this case, the sealing planes E _T and E _{S are} not parallel, and therefore intersect, enclosing an angle α. By maintaining at least partial contact with the seal 15 or 25 (here, the left-hand side of the peripheral seal), the desired tilt position, that is, the opening angle α, can be changed. As a result, excellent flow control can be provided. The smaller the angle α is adjusted, the smaller the possible flow rate of the medium per unit time. In this case, an advantage is particularly that even in the case of a relatively small angle, the angle α will remain adjustable stepwise or continuously, and is caused by the pressure difference between the two valve disc sides (top and bottom) One force will also change continuously on the plate. As a result, a very precise closing or opening movement can be performed, especially when the orientation, or from the closed position, or the transition to the control position, can be controlled to continuously act or interrupt the flow of the medium.

In particular, when the angle changes, the surface of the contacted seal also changes. When the angle becomes smaller and smaller, the contact surface of the sealing material will become larger.

Especially when a smaller pressure prevails over the bottom of the disc (in the direction of the valve seat) and overtakes the top, it will facilitate control. Based on the local contact between the valve disc and the valve seat (by the seal), the part of the force (based on the pressure difference) acting on the disc can be absorbed by the contact surface, and therefore does not need to be driven by the valve Pieces or tray stand absorbs.

In this fine control position, the valve disc 11 or 21 can also be regarded as a flap, which can rotate or pivot around an axis when it contacts the valve seat 12 or 22.

It is also conceivable to provide different mechanical solutions in which the valve discs 11 and 12 abut against the respective valve seats 12 and 22 in an oblique direction. Generally, in vacuum technology, and in particular vacuum valve solutions, a sealing solution that avoids or obviously reduces the risk of particle generation is the better one. For this reason, it is better to avoid the relative mobility of the components, or when such mobility is necessary, the component supporting configuration that may prevent friction between these components is preferable.

As a result, according to the present invention, a solution for driving and retaining particles for the disk is proposed, as shown in Figs. 4 and 5 below. The linear mobility of the valve disc relative to the individual valve seats is undoubtedly provided in this case, however, in this case, the disc pivots around a pivot to adjust in the fine control position The concept of tilting with respect to the seat is also considered and achieved in accordance with the present invention (to avoid particle generation).

Figures 3a and 3b show that the valves 10 and 20 are in a sealed closed position in each case, in which the flow of a medium through the valve opening 16 or 26 is completely based on the sealing effect provided by the seal 15 or 25. Interrupted. In this case, each sealing member 15 or 25 fully contacts the corresponding sealing surface of the opposite side opposite to it, is located on the entire periphery of the valve opening, and is pressed to a predetermined degree (pre-determined degree). The sealing planes E _T and E _S are parallel.

Figures 4a and 4b show a specific embodiment of the vacuum valve 30 in an open position according to the present invention. A valve disc 31 is positioned at an interval from a valve seat 32 in a parallel manner, and a valve opening 36 is exposed.

A seal 35 is installed on the sealing surface 33 of the valve seat 32. The progression of the sealing surface 33 can define a sealing plane E _S.

The valve disc 31 is connected to an adjusting arm 37 by a coupling element which is arranged as a cross member 38. Extending the sealing surface of the valve disc 31 can define a sealing plane E _T , wherein the sealing surface and the sealing surface 33 of the valve seat 32 are arranged oppositely and correspond to the same in terms of form and size. In the open position, the sealing planes E _T and E _S are aligned parallel to each other.

The cross member 38 defines a pivot S by its lateral extension with respect to the adjustment arm 37, and it also extends laterally with respect to the adjustment arm 37. The cross member 38 is fixedly connected (here: screwed) to the adjustment arm 37 in the central area of the cross member, and is fixedly connected to the valve disc 31 at the end of the cross member. However, it is also possible to make separate fastenings by another alternative method, such as bolts or welding (for example, friction stir welding). In particular, the adjustment arm 37 and the cross member 38 may be arranged as a single piece.

The cross member 38 itself is formed to provide elasticity of a certain material, and therefore can be twisted in a substantially wear-free manner within a predetermined range (for example, with respect to a torsion angle and force absorption) around the pivot axis S.

The adjusting arm 37 is connected to a driving unit 39 via a push rod or a guide rod. The disk 31 can be moved in a linear manner along the extension of the push rod by the driving member 39.

Figure 4c shows the valve 30 in a fine control position. The valve disc 31 is in partial contact with the seal 35. On the right-hand side of the cross-sectional view passing through the disc 31, there is no contact between the disc 31 and the seal 35, so the valve disc 31 is not aligned parallel to the valve seat 32. The sealing plane E _T and E _S intersect at a predetermined angle α.

Since the connection between the cross member 38 and the adjusting arm 37 is arranged to be pivotable (in a controlled manner), the fine control position shown can be generated. When the valve disc 31 moves closer to the valve seat 32, a slight pivot can be established and maintained (fixed). Another option for this is to buckle the disc 31 by the cross member 38, so that the disc 31 is not parallel to the valve seat 32 in the open position, but already includes a relatively inclined position. In this case, the sealing planes E _T and E _{S are} not correspondingly parallel, but enclose a certain angle α.

The disk 31 then abuts against the seat 32 in a correspondingly inclined manner based on almost linear motion. Based on the further linear adjustment by the driving member 39, the tilt of the disk 31 can be changed by twisting the cross member 38. Therefore, if the push rod is further retracted, the opening angle α will become smaller. In this case, it acts via an internal twist, that is, to twist the cross member 38. As a result, the disk sealing surface can be continuously changeable, and in this case, uniformly kept pressed against the sealing member 35. This can cause the opening 36 to be completely closed, so that here also with regard to the expansion of the seal, the seal is pushed in a uniform manner.

As a result, the cross member can continuously (or stepwise) change its inclination position based on being twisted, pushing the seal 35 in a uniform manner. Because the seal is pressed in a uniform manner, and therefore no lateral load acts on the seal, and particle generation is minimized or completely avoided.

Another option for adjusting the inclined position of the connection between the arm 37 and the cross member 38 is to provide the inclined position of the disk 31 relative to the seat 32 by the pivoting of the push rod or the permanent inclined position of the push rod. . Therefore, the effect provided by the cross member will correspond to the above variants.

Figures 5a and 5b show another embodiment of the vacuum valve 40 in an open position according to the present invention. A valve disc 41 is spaced apart from a valve seat 42 in a parallel manner, and the valve opening 46 is exposed.

Compared with the embodiment according to Figs. 4a to 4c, the valve disc 41 is configured to be movable relative to the valve seat 42 by two guide rods 47, each of which is driven by a drive unit 49 and a motor. Movement in a controlled manner. The sealing member 45 is located on the bottom surface of the disk 41. Each sealing surface sequentially defines sealing planes E _T and E _S.

The guide rod 47 is connected to the receiving member of the two coupling elements 48. These coupling elements 48 are here arranged as a single piece with the valve disc 41. However, it is obvious that these coupling elements 48 can also be designed as separate components. These coupling elements can be connected by screws or welded to them, for example.盘41.

As shown in Figure 5c, in order to adjust a specific fine control position, the motors 49a and 49b of the drive unit 49 can be actuated in a separate and independent manner. In this case, one of the two motors 49a, 49b will make one of the guide rods 47 travel a distance that is greater than the distance that the second driving member provides the other guide rod 47 in the same period of time. In other words, at least after a certain period of time, one of the guide rods 47 retracts faster than the other. Another option for this is that the linear motion generated by the first drive element can be started earlier than the one generated by the second drive element, with the result that the drive elements provide a substantially synchronized motion.

In this way, a valve disc 41 that is inclined with respect to the valve seat 42 is achieved. The valve disc 41 or its sealing member 45 is in contact (partially) with the valve seat 42 in the inclined position that can be adjusted in this way (Figure 5c). Once the first guide rod 47 that is guided faster or farther has reached a first end position, the second guide rod 47 can be further displaced in a linear manner to pass through the valve opening 46. One is flow or stream for control. The first end position may roughly correspond to the position of the disc 41 where there is contact between the seal 45 and the valve seat. However, it is obvious that once contact has been made, a further linear displacement can be implemented to achieve the required pressing of the seal 45. The first and also second end positions can therefore also correspond to the compression required to generate a seal.

Obviously, the drawings shown only show possible exemplary embodiments in a schematic manner. According to the present invention, different methods can also be combined with each other and with several methods and devices to control the volume flow or pressure in a processing volume under the vacuum conditions of the prior art.

20‧‧‧(Vacuum) Valve

21‧‧‧(valve) plate

22‧‧‧(valve) seat

23‧‧‧Seal surface

24‧‧‧Sealing surface

25‧‧‧Seal

26‧‧‧(valve) opening

A‧‧‧(open) shaft

B‧‧‧Axis

E _S ‧‧‧Seal plane

E _T ‧‧‧Seal plane

Claims (15)

A vacuum valve (10, 20, 30, 40) for controlling a volume flow or mass flow and for interrupting a flow path in an airtight manner. The vacuum valve has a valve seat (12, 22, 32, 42). ), which includes a valve opening (16, 26, 36, 46) and a first sealing surface (13, 23, 33), the valve opening defines an opening axis (A), and the first sealing surface surrounds the valve opening (16, 26, 36, 46) extend and define a first sealing plane (E _S ), a valve disc (11, 21, 31, 41) for controlling the volume flow or mass flow, and for interrupting The flow path, the valve disc has a second sealing surface (14, 24) corresponding to the first sealing surface (13, 23, 33), wherein the second sealing surface (14, 24) defines a second sealing one plane (E _T), the plane of the second seal line may be changed by the position of the valve disc (11,21,31,41) and the respective positions of the positive decision, a first coupling element, connected to the The valve disc (11, 21, 31, 41) and includes a receiving member for providing controlled guidance of the valve disc (11, 21, 31, 41), and a drive unit (39, 49), which is connected with The first coupling element is coupled and arranged so that the valve disc (11, 21, 31, 41) can be adjusted, and at least approximately along a geometric longitudinal axis in a longitudinal closing direction, from an open position, wherein the The valve disc (11, 21, 31, 41) and the valve seat (12, 22, 32, 42) are not in contact with each other, to a closed position, wherein the first sealing surface (13, 23, 33) and the The second sealing surface (14, 24) is in axial sealing contact due to a sealing element (15, 25, 35, 45) located between the two, and the valve opening (16, 26, 36, 46) in it Therefore, it is closed in an airtight manner and returned. It is characterized in that the drive unit (39, 49) and the valve disc (11, 21, 31, 41) are arranged and interact to make the valve disc (11, 21) , 31, 41) can be adjusted to a fine control position, wherein the valve disc (11, 21, 31, 41) is tilted in a predetermined manner relative to the valve seat (12, 22, 32, 42), so that the first A sealing plane (E _S ) and the second sealing plane (E _T ) enclose a predetermined angle (α), and the sealing element (15, 25, 35, 45) is sufficiently close to the first or second sealing surface (13,23,33,14,24), and only partially abut the other sealing surface (13,23,33,14,24). The vacuum valve (10, 20, 30, 40) described in item 1 of the scope of patent application, wherein the driving unit (39, 49) and the valve disc (11, 21, 31, 41) are arranged and coupled So that when the valve disc (11, 21, 31, 41) is adjusted from the open position to the closed position, or from the closed position to the open position, the valve disc (11, 21, 31, 41) will be at Before reaching the closed position or before reaching the open position, occupy the fine control position. For example, the vacuum valve (10, 20, 30, 40) described in item 1 or item 2 of the scope of patent application, wherein the valve disc (11, 21, 31, 41) is positioned at the fine control position so that sealing the second plane (E _T) extending in the second sealing surface (14, 24) of the opening defined by this axis (a), or inclined to the longitudinal axis. For example, the vacuum valve (10, 20, 30, 40) described in item 1 or item 2 of the scope of patent application, wherein the first sealing surface (13, 23, 33) points to the opening axis (A) or the longitudinal direction The axis is parallel to one direction and extends orthogonally to the opening axis (A) or the longitudinal axis. For example, the vacuum valve (10, 20, 30, 40) described in item 1 or item 2 of the scope of patent application, wherein the first and second sealing planes (E _S , E _T ) are in the open position and the A predetermined angle (α) is enclosed in the fine control position, and the first and second sealing planes (E _S , E _T ) are aligned substantially in parallel in the closed position. For example, the vacuum valve (10, 20, 30, 40) described in item 1 or item 2 of the scope of patent application, wherein one of the valve discs (11, 21, 31, 41) is one of the second, multiple or plural The fine control position is adjustable, wherein the _{angle (α n ) enclosed by the first and second sealing planes (E S} , E _T ) in each situation is different in each situation, and the sealing element (15, 25, 35, 45) in each case are fully close to one of the two sealing surfaces (13, 23, 33, 14, 24), and only partially close to the other sealing surface (13, 23, 33, 14, 24). Such as the vacuum valve (10, 20, 30, 40) described in item 6 of the scope of patent application, wherein the fine control positions can be adjusted independently or continuously in a controlled manner in each situation, and As a result, a continuously controlled volume flow or mass flow of the medium can be provided through the valve opening (16, 26, 36, 46). The vacuum valve (10, 20, 30, 40) described in item 1 or item 2 of the scope of patent application, wherein the first coupling element is arranged to be transverse to the opening axis (A) or to the longitudinal axis A cross member (38) extends ground, and is connected to the valve disc (11, 21, 31, 41) at at least one connection point on one of the rear sides of the valve disc (11, 21, 31, 41), Wherein the receiving member provides a central coupling point, which is used to laterally couple the drive unit (39) with respect to an extension direction of the cross member (38), and the cross member (38) is related to the extension direction by a An adjusting arm (37) extending laterally is connected to the driving unit (39). The vacuum valve (10, 20, 30, 40) described in item 8 of the scope of patent application, wherein the connection between the cross member (38) and the valve disc (11, 21, 31, 41) includes a The friction stir welding connection at the at least one connection point. The vacuum valve (10, 20, 30, 40) described in item 8 of the scope of patent application, wherein the cross member (38) is located at at least two lateral connection points on two sides of the central coupling point, The valve disc (11, 21, 31, 41) is connected to the valve disc (11, 21, 31, 41) on the rear side, a central portion is spaced apart from the rear side, and the central portion includes the central coupling Point, and several parts connected to the coupling point on both sides, and the center part is on these sides It extends between the connecting points and is elastically arranged so that based on the twisting of the cross member (38), the valve disc (11, 21, 31, 41) can surround a pivot (S) relative to the adjustment arm (37) Pivoting, the pivot axis is at right angles to the opening axis (A) or the longitudinal axis, and is arranged as a single piece. For example, the vacuum valve (10, 20, 30, 40) described in item 1 or item 2 of the scope of patent application, wherein the driving unit (39, 49) includes at least one motor (49a, 49b) and at least one guide Component, which can be moved along or parallel to the longitudinal axis in a controlled manner by the at least one motor (49a, 49b), and the valve disc (11, 21, 31, 41) by the receiving member It is connected to the guide assembly and can move relative to the valve seat (12, 22, 32, 42). The vacuum valve (10, 20, 30, 40) described in item 11 of the scope of patent application, wherein the driving unit (39, 49) includes two guide rods (47), which can be controlled by the at least one motor A controlled manner moves parallel to the longitudinal axis. The vacuum valve (10, 20, 30, 40) described in item 12 of the scope of patent application, wherein the valve disc (11, 21, 31, 41) includes a second coupling element (48), and the second The coupling element is connected to the valve disc and has a receiving member, wherein the first and the second coupling element (48) are directly arranged on the valve disc (11, 21, 31, 41), and in each case , The guide rod (47) is connected to each of the receiving members of the first and the second coupling element (48). The vacuum valve (10, 20, 30, 40) described in item 12 of the scope of patent application, wherein the driving unit (49) includes two motors (49a, 49b), and each of the two guide rods (47) One is moved in a controlled manner by one of the motors, and the fine control position can be provided by a predetermined actuation of one of the two motors (49a, 49b), so that the first sealing plane is relative to the The inclined position of the second sealing plane can be caused. The vacuum valve (10, 20, 30, 40) described in item 12 of the scope of patent application, in which, The vacuum valve (10, 20, 30, 40) includes a bridge connecting the guide rods (47), and the first coupling element is connected to the bridge and arranged as a cross member.

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