TWI721433B - Light emitting device and exposing equipment having the same - Google Patents

Abstract

The light emitting device of the present invention includes a light homogenizer, a first concave mirror, and a light source module. The light homogenizer includes a light inlet end and a light outlet end. The first concave mirror is disposed in one side of the light homogenizer and has a first reflecting face facing the light inlet end. The light source module and the light homogenizer are disposed in the same side of the first concave mirror, wherein the light source module includes a plurality of light source devices. Each light source device includes a second concave mirror and a light source. The second concave mirror includes a second reflecting face facing the first reflecting face. The light source is disposed on the second reflecting face and emits a light source light. The light source light emitted to the second reflecting face is reflected to the first reflecting face by the second reflecting face, be reflected to the light inlet end by the first reflecting face, and enters the light homogenizer to be homogenized, wherein a homogenized light is emitted from the light outlet end.

Description

Light-emitting device and exposure equipment with the light-emitting device

The present invention relates to a light-emitting device and exposure equipment with the light-emitting device.

At present, in the semiconductor industry, most of the light sources of lithography equipment are high-pressure mercury lamps. Because a single high-pressure mercury lamp can generate a relatively high radiant flux and has a relatively narrow short-wavelength bandwidth, these advantages can improve the lithography The yield rate of the finished product and the difficulty of optical system design are reduced. However, the high-pressure mercury lamp is less energy-saving, the angle of light is too large, and the spectrum is too wide. Therefore, many people turn to the development of LED exposure lithography equipment, but the LED itself has many disadvantages Need to be overcome, such as: excessive light angle, insufficient luminous efficiency per unit area, and inability to arrange closely.

The purpose of the present invention is to provide a light-emitting device, which can be used by exposure equipment, and has the advantages of energy saving, high coupling efficiency, free control of light emission angle, simultaneous transmission of multiple spectrums, and the like.

Another object of the present invention is to provide an exposure equipment that has the advantages of energy saving, high coupling efficiency, free control of the light exit angle, and simultaneous transmission of multiple spectrums.

The light-emitting device of the present invention includes a light field homogenization element, a first concave mirror, and a light source module. The light field homogenization element has a light input end and a light output end. The first concave mirror is arranged on one side of the light field homogenization element, and has a first reflective surface facing the light incident end. The light source module and the light field homogenization element are arranged on the same side of the first concave mirror and include a plurality of light source devices. Each light source device includes a second concave mirror and a light source. The second concave mirror has a second reflective surface facing the first reflective surface. The light source is arranged on the second reflecting surface and emits light from the light source. Wherein, the light from the light source that hits the second reflective surface is reflected to the first reflective surface via the second reflective surface, and then reflected to the light entrance end via the first reflective surface, enters the light field homogenization element for homogenization, and then exits the light end Emit a homogenized light.

In an embodiment of the present invention, the light emitting device further includes a light path changing device arranged between the first concave mirror and the light source module, wherein the light from the light source that hits the second reflecting surface is reflected by the second reflecting surface and changes through the light path. The device changes the light path through the light path changing device so as to reach the first reflecting surface.

In an embodiment of the present invention, the light path changing device includes a plurality of optical elements with the same number as the plurality of light source devices.

In the embodiment of the present invention, a plurality of optical elements are located on the same plane.

In an embodiment of the present invention, the optical element includes a convex lens.

In an embodiment of the present invention, the optical element includes a lens array.

In the embodiment of the present invention, a plurality of light source devices surround the light field homogenization element.

In an embodiment of the present invention, the light source module further includes a ring-shaped substrate, and a plurality of light source devices are evenly arranged on one side of the ring-shaped substrate.

In an embodiment of the present invention, the exposure equipment of the present invention includes the above-mentioned light emitting device and a light adjusting device. The light adjusting device is arranged on the outer side of the light emitting end to adjust the homogenized light to meet the exposure demand.

In an embodiment of the present invention, the exposure device further includes an exposure platform having an exposed surface, wherein the exposure requirement is that the uniformity deviation of the homogenized light on the exposed surface is less than ±3%.

As shown in the embodiment shown in FIGS. 1A and 1B, the light-emitting device 900 of the present invention includes a light field homogenization element 100, a first concave mirror 200, and a light source module 300. The light field homogenization element 100 has a light input end 110 and a light output end 120. Among them, the light field homogenization element 100 includes, for example, a diffusion element or an optical fiber, etc., and its function is to homogenize the light entering from the light input end 110 and then emit it from the light output end 120. In a preferred embodiment, the light field homogenization element 100 is a cylindrical element, and the light enters the homogenization end 110 from the light entrance end 110 and exits the light exit end 120. Furthermore, in a preferred embodiment, the light emitting end 120 forms a surface light source. However, in different embodiments, the light field homogenization element 100 may also have a square shape or other geometric shapes.

As shown in the embodiment shown in FIGS. 1A and 1B, the first concave mirror 200 is disposed on one side of the light field homogenization element 100 and has a first reflective surface 210 facing the light incident end 110. In other words, the concave portion of the first concave mirror 200 has a reflection effect and faces the light incident end 110. The function of the first concave mirror 210 is to reflect the light incident on the first reflective surface 210 to the light incident end 110. In a preferred embodiment, the light incident end 110 is located at the focal point of the first concave mirror 200, and light incident in a direction parallel to the central axis 201 of the first concave mirror 200 will be reflected by the first reflecting surface 210 to the light incident end 110.

As shown in the embodiment shown in FIGS. 1A and 1B, the light source module 300 and the light field homogenization element 100 are arranged on the same side of the first concave mirror 200. Viewed from different angles, the first reflective surface 210 faces the light source module 300 and the light field homogenization element 100 at the same time. The light source module 300 includes a plurality of light source devices 310. Each light source device 310 includes a second concave mirror 311 and a light source 312. The second concave mirror 311 has a second reflective surface 313 facing the first reflective surface 210. The light source 312 is disposed on the second reflecting surface 313 and emits light from the light source. Wherein, the light source 312 is preferably arranged at the focal point of the second concave mirror 311, so that the light emitted from the light source is reflected by the second reflective surface 313 and then travels in a direction parallel to the middle axis 314 of the second concave mirror 311. The center axis 314 of the second concave mirror 311 is preferably parallel to the center axis 201 of the first concave mirror 200.

In a preferred embodiment, a plurality of light source devices 310 surround the light field homogenization element 100. The light source module 300 further includes a ring-shaped substrate 320, and a plurality of light source devices 310 are evenly arranged on one side of the ring-shaped substrate 320. The light source 312 is preferably a light-emitting diode (LED) to achieve energy saving effect, and the ring-shaped substrate 320 is a ring-shaped circuit board. However, in different embodiments, the light source 312 may use a light source other than LEDs, and the ring substrate 320 may have other shapes according to manufacturing, design, or use requirements.

As shown in the embodiment shown in FIG. 1C, the light source light 410 emitted by the light source 312 hits the second reflecting surface 313 (see FIG. 1B), and is reflected by the second reflecting surface 313 along a direction parallel to the middle axis 314 of the second concave mirror 311 Proceed to the first reflecting surface 210, and then reflected to the light entrance end 110 via the first reflecting surface 210, enter the light field homogenization element 100 for homogenization, and then the light exit end 120 emits homogenized light 420.

2A and 2B shown in the embodiment, the light emitting device 900 further includes a light path changing device 500 disposed between the first concave mirror 200 and the light source module 300, wherein the light source light 410 incident on the second reflective surface 313 passes through the first concave mirror 200 and the light source module 300. The two reflective surfaces 313 reflect and pass through the light path changing device 500, and the light path is changed through the light path changing device 500 to be emitted to the first reflective surface 210. As shown in FIG. 2C, in a preferred embodiment, after the light source light 410 passes through the light path changing device 500, its light path is changed by the light path changing device 500 to be parallel to the center axis 201 of the first concave mirror 200. In other words, for the embodiment in which the light source 312 is not set at the focal point of the second concave mirror 311, the emitted light source light 410 is substantially divergent with respect to the center axis 314 of the second concave mirror 311, the light source light 410 can be transmitted through the light path changing device 500 The light path is changed to be parallel to the middle axis 201 of the first concave mirror 200, thereby increasing the possibility of reaching the light incident end 110.

As shown in the embodiment shown in FIGS. 2A and 2B, the light path changing device 500 preferably includes the same number of optical elements 510 as the light source device 310. The optical elements 510 are preferably located on the same plane. In this embodiment, the optical element 510 is a convex lens. However, in different embodiments, the optical element 510 may be an element having a light-gathering effect such as a lens array.

Furthermore, the light source module 300 includes a plurality of light source devices 310, and the light beam emitted by the individual light source device 310 can be controlled by the second concave mirror 311 to control its light output angle and traveling direction, and the first concave mirror 200 can separate the light beam from the second concave mirror 311. The light beam emitted from the concave mirror 311 is efficiently coupled into the light field homogenization element 100, thereby generating a uniform surface light source. Among them, the light source module 300 can have different settings based on manufacturing, use, or design requirements. As shown in the different embodiments shown in FIG. 3, the number of light source devices 310 can be reduced to three. For another example, the output power of the light source device 310 can be adjusted individually, so that the final output light field has a high uniformity performance through mutual compensation. On the other hand, the use of two sets of curved mirrors of the first concave mirror 200 and the second concave mirror 311 can improve the coupling efficiency of the light source and guide the beam direction to optimize the equipment space. For example, when the number of light source devices 310 is increased in order to increase the light intensity of the light emitting end, the area of the first concave mirror 200 can be correspondingly enlarged to fully reflect the light emitted by the light source device 310. Based on the above, the light-emitting device has the advantages of energy saving, high coupling efficiency, free control of the light output angle, and simultaneous transmission of multiple spectrums.

As shown in the embodiment shown in FIG. 4, the exposure equipment 800 of the present invention includes a light emitting device 900 and a light adjusting device 600. The light adjusting device 600 is arranged outside the light emitting end 120 for adjusting the homogenized light to meet the exposure requirements. Wherein, the exposure device 800 further includes an exposure platform 700 having an exposed surface 710, wherein the exposure requirement is that the uniformity deviation of the homogenized light on the exposed surface 710 is less than ±3%. More specifically, the light adjusting device 600 may include a mirror and a lens, and the homogenized light emitted from the light emitting end 120 can be adjusted in the traveling direction by the light adjusting device 600 and focused on the exposed surface 710 for exposure.

Although the foregoing description and drawings have disclosed the preferred embodiment of the present invention, it must be understood that various additions, many modifications and substitutions may be used in the preferred embodiment of the present invention without departing from the scope of the attached patent application. The spirit and scope of the principles of the present invention. Those skilled in the art to which the present invention belongs will be able to appreciate that the present invention can be used for many modifications of forms, structures, arrangements, proportions, materials, elements and components. Therefore, the embodiments disclosed herein should be considered to illustrate the present invention, rather than to limit the present invention. The scope of the present invention should be defined by the scope of the attached patent application, and cover its legal equivalents, and is not limited to the previous description.

100: Light field homogenization element 110: light end 120: light end 200: The first concave mirror 201: The middle axis of the first concave mirror 210: first reflecting surface 300: light source module 310: Light source device 311: The second concave mirror 312: light source 313: second reflective surface 314: The middle axis of the second concave mirror 320: Ring substrate 410: light source light 420: Homogenize the light 500: Light path changing device 510: optical components 600: light adjustment device 610: Mirror 611: lens 700: Exposure Platform 800: Exposure equipment 900: Light-emitting device

1A to 1C are schematic diagrams of embodiments of the light-emitting device of the present invention.

2A to 2C are schematic diagrams of embodiments of the light-emitting device of the present invention including the light path changing device.

Fig. 3 is a schematic diagram of different embodiments of the light-emitting device of the present invention.

Fig. 4 is a schematic diagram of an embodiment of the exposure equipment of the present invention.

(no)

100: Light field homogenization element

110: light end

120: light end

200: The first concave mirror

210: first reflecting surface

300: light source module

310: Light source device

311: The second concave mirror

312: light source

313: second reflecting surface

320: Ring substrate

500: Light path changing device

510: optical components

900: Light-emitting device

Claims (10)

A light emitting device, comprising: A light field homogenization element with a light input end and a light output end; A first concave mirror, arranged on one side of the light field homogenization element, with a first reflecting surface facing the light incident end; A light source module, which is arranged on the same side of the first concave mirror as the light field homogenization element, includes a plurality of light source devices, and each light source device includes: A second concave mirror having a second reflecting surface facing the first reflecting surface; A light source, which is arranged on the second reflecting surface and emits light from a light source; Wherein, the light from the light source irradiated to the second reflective surface is reflected to the first reflective surface via the second reflective surface, and then reflected to the light incident end via the first reflective surface, and enters the light field homogenization element Homogenization is performed, and then a homogenized light is emitted from the light-emitting end. The light-emitting device according to claim 1, further comprising a light path changing device provided between the first concave mirror and the light source module, wherein the light from the light source irradiated to the second reflective surface passes through the second reflective surface Reflect and pass through the light path changing device, and change the light path through the light path changing device to reach the first reflecting surface. The light emitting device according to claim 2, wherein the light path changing device includes a plurality of optical elements the same number as the plurality of light source devices. The light-emitting device according to claim 3, wherein the plurality of optical elements are located on the same plane. The light-emitting device according to claim 3, wherein the optical element includes a convex lens. The light-emitting device according to claim 3, wherein the optical element includes a lens array. The light emitting device according to claim 1, wherein the plurality of light source devices surround the light field homogenization element. The light-emitting device according to claim 7, wherein the light source module further includes a ring-shaped substrate, and the plurality of light source devices are evenly arranged on one side of the ring-shaped substrate. An exposure equipment, including: The light-emitting device according to any one of claims 1 to 8; A light adjusting device is arranged outside the light emitting end for adjusting the homogenized light to meet an exposure requirement. The exposure equipment according to claim 9, further comprising an exposure platform having an exposed surface, wherein the exposure requirement is that the uniformity deviation of the homogenized light on the exposed surface is less than ±3%.

Images