TWI720747B - Leveling structure and fan-out panel-level packaging equipment - Google Patents

Abstract

The present invention provides a leveling structure and a fan-out panel-level packaging device thereof, wherein the leveling structure includes a first lower stub shaft, a second lower stub shaft, and a first upper stub shaft arranged above the first lower stub shaft The second upper short shaft above the first lower short shaft can be connected to each other by connecting the lower shaft or connecting the upper shaft, and is arranged on the first upper short shaft and the second upper short shaft. , Through the pressing spring of the upper and lower pressing tools, the conveying pressing force is provided, so that the substrate of the leveling structure is pushed from the outside, so that the warped part can be leveled during the manufacturing process. At the same time, with the enlarged probe, In order to increase the sensing range of the detection substrate, the substrate can be passed more smoothly, and the transportation process of the detection substrate can be more accurately measured, so as to avoid the occurrence of fragments caused by the problem of the card or the sliding sheet.

Description

Leveling structure and fan-out panel-level packaging equipment

The present invention relates to a clamp pressing and flattening structure and a fan-out panel-level packaging device, in particular to a clamp pressing and flattening structure that can flatten a warped substrate through a pressing spring and a fan-out panel-level packaging device.

Generally speaking, the conventional packaging equipment almost always encounters the so-called warpage of the substrate due to physical properties during the manufacturing process. However, when the sensing device in the packaging equipment cannot sense the actual position of the substrate due to the warping phenomenon In case of failure, it is easy to cause the production of sliding or shooting, and then cause the problem of fragmentation.

However, the general sensing device cannot sense the position of the substrate because the probe is small, so that the position of the substrate is incorrect, and it also causes the problem of card board.

Therefore, how to provide a method that can effectively detect the position of the substrate that is running in the packaging device, and at the same time, can prevent the substrate from achieving a leveling effect during the transportation process, and avoid the problems of warpage, slippage, and fragmentation. Need to overcome the technology and solve the problem.

The main purpose of the present invention is to solve the problem that the conventional implementation cannot effectively achieve leveling and avoid warpage, slippage, and fragmentation during the transportation of the substrate.

Another object of the present invention is to provide a leveling structure and its fan-out panel-level packaging equipment, so that the leveling effect can be achieved when the substrate is transferred, and the sensor of the probe can be enlarged to detect the substrate To avoid problems of warpage, slippage, and fragmentation.

In order to achieve the above objective, the present invention provides a leveling structure which includes at least a lower shaft and an upper shaft arranged above the first lower shaft, wherein: The lower shaft system at least includes: a plurality of upper and lower shaft wheel bodies arranged on the lower shaft; a first lower pressing tool is arranged on one end of the lower shaft, and a first lower shaft is arranged at an end away from the lower shaft Lower gear; a second lower presser, which is arranged at the other end of the lower shaft relative to the first lower presser, and a second lower gear is arranged on the back of the first lower shaft; The upper shaft system at least includes: a plurality of upper shaft wheel bodies correspondingly arranged above the lower shaft wheel body, and each of the upper shaft wheel systems is arranged on the upper shaft at a fixed interval; a first upper pressing tool is arranged On the upper shaft and corresponding to the first lower pressing tool, a first upper gear is arranged at one end of the back of the upper shaft; a first upper pressing spring is arranged on the first upper pressing tool , And is additionally provided with a first spring knob for adjusting the distance between the first upper pressing tool and the first lower pressing tool; a second upper pressing tool is arranged on the upper shaft relative to the first upper pressing tool The other end is arranged corresponding to the second lower pressing tool, and a second upper gear is arranged at one end away from the upper shaft; and a second upper pressing spring is arranged on the second upper pressing tool, In addition, a second spring knob is provided for adjusting the distance between the second upper pressing tool and the second lower pressing tool.

In an embodiment of the present invention, the compression length of the first upper pressure spring and the second upper pressure spring is between 18 mm and 26 mm.

In an embodiment of the present invention, the distance between the first upper pressing tool and the first lower pressing tool is between 0 mm and 3 mm.

In an embodiment of the present invention, the distance between the second upper press tool and the second lower press tool is between 0 mm and 3 mm

In accordance with the purpose of the present invention, the inventor also proposes a leveling structure which includes at least a lower shaft, and a first upper minor shaft and a second upper minor shaft disposed above the lower shaft, wherein: The lower shaft system at least includes: a plurality of upper and lower shaft wheel bodies arranged on the lower shaft; a first lower pressing tool is arranged on one end of the lower shaft, and a first lower shaft is arranged at an end away from the lower shaft Lower gear; a second lower presser, which is arranged at the other end of the lower shaft relative to the first lower presser, and a second lower gear is arranged on the back of the first lower shaft; The first upper stub shaft system at least includes: a first upper stub shaft, which is arranged on a side of the first upper stub shaft opposite to the second upper stub shaft and corresponding to at least one of the lower shafts; A first upper stub shaft and a first upper pressing tool is arranged on the first upper stub shaft, and a first upper stub shaft and first upper gear is provided at an end facing away from the first upper stub shaft, and is connected to the first upper stub shaft. The lower pressing tools are arranged corresponding to each other; a first upper short shaft and first upper pressing spring are arranged on the first upper short shaft and the first upper pressing tool, and is additionally provided with a first upper short shaft to adjust the first upper short shaft. A first upper minor axis and a first spring knob between the upper pressing tool and the first lower pressing tool; a first upper minor axis and a second upper pressing tool are arranged on the first upper minor axis relative to the first upper minor axis The other side of the wheel body of an upper shaft is also provided with a first upper minor shaft and a second upper pressure spring arranged on the first upper minor shaft and the second upper pressing tool. At the same time, a second upper pressure spring is provided to adjust the first upper shaft. The first upper minor shaft and the second spring knob of the second upper compression spring of the minor shaft; The second upper stub shaft includes: a second upper stub shaft, which is disposed on a side of the second upper stub shaft facing the first upper stub shaft and corresponding to the lower shaft wheel; Two upper stub shafts and a first upper press tool are arranged on the second upper stub shaft, and a second upper stub shaft and first upper gear is provided at an end facing away from the second upper stub shaft, and is connected to the second lower shaft. The pressing tools are arranged corresponding to each other; a second upper stub shaft and first upper pressing spring are arranged on the second upper stub shaft and the first upper pressing tool is additionally provided to adjust the first upper pressing of the second upper stub shaft A second upper minor axis first spring knob with a distance between the second lower pressing tool; and a second upper minor axis second upper pressing tool arranged on the second upper minor axis relative to the second On the other side of the upper shaft wheel body, there is also a second upper short shaft second upper pressure spring arranged on the second upper short shaft second upper pressing tool, and a second upper short shaft second upper pressure spring is also provided to adjust the second upper short shaft The second upper short shaft second spring knob of the second upper pressure spring of the shaft.

In an embodiment of the present invention, between the first upper stub shaft and the first upper press tool and the first upper stub shaft second upper press, a bracket is additionally provided to enable the first upper stub shaft to be An upper pressing tool and the first upper short axis and the second upper pressing tool maintain a fixed height at the same time.

In an embodiment of the present invention, a bracket is additionally provided between the first upper pressing tool of the second upper stub shaft and the second upper pressing tool of the second upper stub shaft, so that the second upper stub shaft An upper pressing tool and the second upper short axis and second upper pressing tool maintain a fixed height at the same time.

In an embodiment of the present invention, the compression lengths of the first upper stub shaft and the first upper pressure spring and the first upper stub shaft and the second upper pressure spring are between 18 mm and 26 mm.

In an embodiment of the present invention, the compression length of the first upper compression spring of the second upper stub shaft and the second upper compression spring of the second upper stub shaft is between 18 mm and 26 mm.

In an embodiment of the present invention, the first upper stub shaft and the first upper pressure spring are additionally provided with an adjustment jig that can be selectively placed between the bracket and the first upper stub shaft and the first spring knob, so that The first upper stub shaft and the first upper pressure spring have the same height as the opposite first upper stub shaft and second upper pressure spring.

In an embodiment of the present invention, the second upper stub shaft and the first upper pressure spring is additionally provided with an adjustment jig that can be selectively placed between the bracket and the second upper stub shaft and the second upper pressure spring to The height of the first spring knob of the second upper stub shaft is the same as the height of the second spring knob of the opposite second upper stub shaft.

In an embodiment of the present invention, the distance between the first upper short axis and the first upper presser and the first lower presser is between 0 mm and 3 mm.

In an embodiment of the present invention, the distance between the second upper short axis first upper presser and the second lower presser is between 0 mm and 3 mm.

In accordance with the purpose of the present invention, the present inventor also proposes a leveling structure which at least includes a first lower minor axis, a second lower minor axis and an upper axis, wherein: The first lower stub shaft system at least includes: a first lower stub shaft, which is disposed on a side of the first lower stub shaft facing the second lower stub shaft; a first lower stub shaft and a first presser , Is arranged on the first lower stub shaft, and is provided with a first lower stub shaft and first lower gear at an end facing away from the first lower stub shaft; a first lower stub shaft and a second lower press tool are arranged at The other side of the first lower stub shaft opposite to the first lower spool wheel body is also provided with a first lower stub shaft and a first pressing spring arranged on the first lower stub shaft and second pressing tool , At the same time there is also a first lower stub shaft first spring knob that can adjust the first lower stub shaft and first pressing spring; The second lower stub shaft system at least includes: a second lower stub shaft, which is disposed on a side of the second lower stub shaft facing the first lower stub shaft; a second lower stub shaft and a first presser , Is arranged on the second lower stub shaft, and is provided with a second lower stub shaft and first lower gear at an end that faces away from the second lower stub shaft; a second lower stub shaft and second lower presser are arranged on The other side of the second lower stub shaft opposite to the second lower spool wheel body is also provided with a second lower stub shaft first pressing spring provided on the second lower stub shaft second pressing tool , At the same time there is a second upper short shaft first spring knob which can adjust the second lower short shaft and the first downward pressure spring; and The upper shaft system at least includes: a plurality of upper shaft wheel bodies arranged above the upper shaft; a first upper pressing tool is arranged on one end of the upper shaft, and a first upper shaft is arranged at an end facing away from the upper shaft Gear; a first upper pressure spring, which is arranged on the first upper pressure tool, and is additionally provided with a first upper pressure tool that can adjust the distance between the first upper pressure tool and the first lower short axis first lower pressure tool A spring knob; a second upper presser is arranged at the other end of the upper shaft relative to the first upper presser, and is set corresponding to the second lower short shaft and the first lower presser, and faces away from the upper One end of the shaft is provided with a second upper gear; and a second upper pressing spring, which is arranged on the second upper pressing tool, and is additionally provided with a first upper pressing tool for adjusting the second upper pressing tool and the second lower stub shaft. A second spring knob for the distance between the lower pressing tools.

In an embodiment of the present invention, the compression length of the first upper pressure spring and the second upper pressure spring is between 18 mm and 26 mm.

In an embodiment of the present invention, the compression length of the first lower stub shaft first downward pressure spring and the second lower stub shaft first downward pressure spring is between 18 mm and 26 mm.

In an embodiment of the present invention, the distance between the first upper pressing tool and the first lower short axis first lower pressing tool is between 0 mm and 3 mm.

In an embodiment of the present invention, the distance between the second upper pressing tool and the first lower minor axis second lower pressing tool is between 0 mm and 3 mm.

In accordance with the purpose of the present invention, the inventor also proposes a leveling structure that includes at least a first lower minor axis and a second lower minor axis, and a first lower minor axis disposed above the first lower minor axis. An upper minor axis, and a second upper minor axis arranged above the second lower minor axis, wherein: The first lower stub shaft and the second lower stub shaft system at least include: a first lower stub shaft, which is disposed on a side of the first lower stub shaft facing the second lower stub shaft; a first lower stub shaft The first lower stub shaft is arranged on the first lower stub shaft, and a first lower stub shaft and a first lower gear are arranged at an end facing away from the first lower stub shaft; a first lower stub shaft is a second The lower pressing tool is arranged on the other side of the first lower stub axle relative to the first lower axle wheel body; a second lower axle wheel body is arranged on the second lower stub axle facing the first One side of the lower stub shaft; a second lower stub shaft and first pressing tool, which is arranged on the second lower stub shaft, and a second lower stub shaft is arranged at an end facing away from the second lower stub shaft. Lower gear; a second lower stub shaft and second pressing tool, which is arranged on the other side of the second lower stub shaft relative to the second lower shaft wheel body; The first upper stub shaft and the second upper stub shaft system at least include: a first upper shaft wheel body disposed on a side of the first upper stub shaft opposite to the second upper stub shaft and connected to at least one of the The first lower shaft wheel body is correspondingly arranged; a first upper short shaft and a first upper pressing tool are arranged on the first upper short shaft, and a first upper short shaft is arranged at an end facing away from the first upper short shaft The first upper gear is arranged corresponding to the first lower stub shaft and the first lower pressing tool; a first upper stub shaft and first upper pressing spring is arranged on the first upper stub shaft and the first upper pressing tool, In addition, a first upper short shaft first spring knob is provided to adjust the distance between the first upper short shaft first upper pressing tool and the first lower short shaft first lower pressing tool; a first upper short shaft first spring knob Two upper pressing tools are arranged on the other side of the first upper short shaft relative to the wheel body of the first upper shaft, and there is also a first upper pressing tool arranged on the first upper short shaft and the second upper pressing tool The upper short shaft and the second upper pressure spring are provided with a first upper short shaft and second spring knob which can adjust the first upper short shaft and the second upper pressure spring; a second upper shaft wheel body is arranged on the first upper shaft wheel. Two upper stub shafts face one side of the first upper stub shaft and are arranged corresponding to the second lower shaft wheel body; a second upper stub shaft and a first upper presser are arranged on the second upper stub shaft, A second upper stub shaft and a first upper gear are arranged at an end facing away from the second upper stub shaft, and the second upper stub shaft and first upper gear are arranged corresponding to each other; a second upper stub shaft and a first upper pressure spring are arranged at The second upper stub shaft and the first upper pressing tool are additionally provided with a second upper stub shaft first spring knob for adjusting the distance between the second upper stub shaft first upper pressing tool and the second lower pressing tool ; And a second upper stub shaft and second upper pressing tool, which is arranged on the second upper stub shaft opposite to the second upper shaft wheel body, and is also provided with a second upper stub shaft The second upper stub shaft and second upper pressure spring on the second upper pressing tool are also provided with a second upper stub shaft second spring knob for adjusting the second upper stub shaft and second upper pressure spring.

In an embodiment of the present invention, between the first upper stub shaft and the first upper pressing tool and the first upper stub shaft second upper pressing tool, a bracket is additionally provided to enable the first upper stub shaft to be the first The upper pressing tool and the first upper short axis and the second upper pressing tool maintain a fixed height at the same time.

In an embodiment of the present invention, a bracket is also provided between the first upper pressing tool of the second upper stub shaft and the second upper pressing tool of the second upper stub shaft, so that the second upper stub shaft An upper pressing tool and the second upper short axis and second upper pressing tool maintain a fixed height at the same time.

In an embodiment of the present invention, the compression lengths of the first upper stub shaft and the first upper pressure spring and the first upper stub shaft and the second upper pressure spring are between 18 mm and 26 mm.

In an embodiment of the present invention, the compression length of the first upper compression spring of the second upper stub shaft and the second upper compression spring of the second upper stub shaft is between 18 mm and 26 mm.

In an embodiment of the present invention, the first upper stub shaft and the first upper pressure spring are additionally provided with an adjustment jig that can be selectively placed between the bracket and the first upper stub shaft and the first spring knob, so that The height of the first spring knob of the first upper stub shaft is the same as the height of the second spring knob of the opposite first upper stub shaft.

In an embodiment of the present invention, the second upper stub shaft and the first upper pressure spring are additionally provided with an adjustment jig that can be selectively placed between the bracket and the second upper stub shaft first spring knob, so that The height of the first spring knob of the second upper stub shaft is the same as the height of the second spring knob of the opposite second upper stub shaft.

In an embodiment of the present invention, the distance between the first upper short-axis first upper pressing tool and the first lower short-axis first lower pressing tool is between 0 mm and 3 mm.

In an embodiment of the present invention, the distance between the first upper press tool of the second upper minor axis and the first lower press tool of the second lower minor axis is between 0 mm and 3 mm.

In an embodiment of the present invention, at least one connecting lower shaft is further provided between the first lower stub shaft and the second lower stub shaft.

In an embodiment of the present invention, at least one connecting upper shaft is further provided between the first upper short shaft and the second upper short shaft.

In accordance with the purpose of the present invention, the inventor also proposes a fan-out panel-level packaging device, which includes a plurality of leveling structures, which are arranged side by side at the same distance from each other.

In an embodiment of the present invention, it further includes: a base plate, by which a plurality of lower axle wheel bodies in the leveling structure simultaneously rotate in opposite directions and at a constant speed to drive the base plate to advance and retreat.

In an embodiment of the present invention, it further includes: a plurality of vibrator sensors, including an inlet vibrator sensor arranged behind the inlet gate to sense the speed of the substrate, and an inlet vibrator sensor arranged at the outlet gate An outlet vibrator sensor that controls the opening and simultaneous opening of the inlet and outlet gates, a swing sensor that is arranged between the inlet vibrator sensor and the outlet vibrator sensor to control the closing of the inlet gate, and A gate closing vibrator sensor between the swing sensor and the outlet vibrator sensor to control the simultaneous closing of the feeding and discharging gates, wherein each of the sensors is provided with a probe and a probe opposite to the probe A magnet, and the magnet is adsorbed or separated from a magnet sensor to confirm the entry or exit position of a substrate, and after the substrate passes through the corresponding sensor, the magnet is separated from the substrate to perform the sensing The corresponding action of the detector.

In an embodiment of the present invention, the diameter of the measuring head is between 10 mm and 25 mm.

In an embodiment of the present invention, the diameter of the measuring head is between 15 mm and 20 mm.

In one embodiment of the present invention, the fan-out panel-level packaging equipment is a soaking tank structure of the developing machine, and a warped substrate is pushed to the feed gate through the conveyor belt, and then pressed by the leveling structure , The substrate can be leveled, and after the sensors and the axle wheel body reach the positioning, stop pushing, and the gate has been closed, so that the substrate can move back and forth in the fan-out panel-level packaging equipment to achieve the manufacturing process The effect of uniformity.

In an embodiment of the present invention, the fan-out panel-level packaging equipment is a scrubber structure of a scrubber, and the corresponding settings can be adjusted according to the pressing-in amount of different brush wheels, so as to avoid the generation of sliding sheets. As a result, fragments are caused, and at the same time, the substrate clamping force can be improved to prevent the occurrence of chipping.

In an embodiment of the present invention, the fan-out panel-level packaging equipment is a photoresist peeling machine.

In order to help your examiners understand the technical features, content and advantages of the present invention and the effects that can be achieved, the present invention is described in detail with the accompanying drawings and in the form of embodiment expressions. The drawings used therein are as follows: The subject matter is only for the purpose of illustration and auxiliary description, and may not be the true proportions and precise configuration after the implementation of the invention. Therefore, it should not be interpreted in terms of the proportions and configuration relationships of the accompanying drawings, and should not limit the scope of rights of the invention in actual implementation. Hexian stated.

First of all, please refer to Figures 1 and 5, which are the leveling structure diagram (1) of the leveling structure and its fan-out panel-level packaging equipment and the side view of the upper and lower pressers of the leveling structure. The present invention provides a leveling structure. A flat structure, the leveling structure (10) at least includes a lower shaft (100) and an upper shaft (200) arranged above the first lower shaft (100), wherein:

The lower shaft (100) at least includes: a plurality of upper and lower shaft wheels (110) arranged on the lower shaft (100); a first lower presser (120) arranged on the lower shaft (100) A first lower gear (130) is arranged at one end of the lower shaft (100); a second lower gear (140) is arranged on the lower shaft (100) relative to the first lower gear At the other end of the tool (120), and a second lower gear (150) is arranged on the back of the lower shaft (100);

The upper shaft (200) system at least includes: a plurality of upper shaft wheel bodies (210) correspondingly arranged above the lower shaft wheel body (110), and each of the upper shaft wheel bodies (210) is arranged at a fixed interval on the On the upper shaft (200); a first upper presser (220) is arranged on the upper shaft (200), and is arranged corresponding to the first lower presser (120), and faces away from the upper shaft ( One end of 200) is provided with a first upper gear (230); a first upper pressing spring (240) is arranged on the first upper pressing tool (220), and is additionally provided with the first upper pressing tool to be adjusted (220) a first spring knob (241) at a distance from the first lower presser (120); a second upper presser (250) is arranged on the upper shaft (200) relative to the first upper The other end of the pressing tool (220) is arranged correspondingly to the second lower pressing tool (140), and a second upper gear (260) is arranged opposite to one end of the upper shaft (200); and a second upper The compression spring (270) is arranged on the second upper pressing tool (250), and a second upper pressing tool (250) and the second lower pressing tool (140) can be adjusted. Two spring knobs (271); wherein the pressing length of the first upper pressing spring (240) and the second upper pressing spring (270) is between 18mm and 26mm; the first upper pressing tool (220) and the first The distance between the lower pressing tool (120) is between 0mm and 3mm; the distance between the second upper pressing tool (250) and the second lower pressing tool (140) is between 0mm and 3mm.

Accordingly, through the design of the pressing tool of the leveling structure, the leveling effect can be achieved when the substrate is transferred, and the problem of slippage or fragmentation due to the warping of the substrate can be effectively avoided.

Please also refer to Figure 2, which is a schematic diagram (2) of the leveling structure and the leveling structure of the fan-out panel-level packaging equipment. The present invention provides a leveling structure. The leveling structure (10) is at least Including: a lower shaft (100), and a first upper minor shaft (201) and a second upper minor shaft (202) arranged above the lower shaft (100), wherein:

The lower shaft (100) at least includes: a plurality of upper and lower shaft wheels (110) arranged on the lower shaft (100); a first lower presser (120) arranged on the lower shaft (100) A first lower gear (130) is arranged at one end of the lower shaft (100); a second lower gear (140) is arranged on the lower shaft (100) relative to the first lower gear At the other end of the tool (120), and a second lower gear (150) is arranged on the back of the lower shaft (100);

The first upper short shaft (201) includes at least: a first upper shaft wheel body (2011), which is arranged on a side of the first upper short shaft (201) facing the second upper short shaft (202) And corresponding to at least one lower shaft wheel body (110); a first upper short shaft and first upper presser (2012), which is arranged on the first upper short shaft (201) and faces away from the first upper shaft (201); An upper stub shaft (201) is provided with a first upper stub shaft and first upper gear (2013) at one end, and is arranged corresponding to the first lower pressing tool (120); a first upper stub shaft and first upper pressure spring ( 2014), is set on the first upper short shaft and first upper presser (2012), and is additionally provided with a first upper presser (2012) to adjust the first upper minor shaft and the first lower presser ( 120) a first upper minor axis and first spring knob (20141); a first upper minor axis and a second upper presser (2015), which are arranged on the first upper minor axis (201) relative to the The other side of the first upper shaft wheel body (2011) is also provided with a first upper short shaft and second upper pressure spring (2016) arranged on the first upper short shaft and second upper pressing tool (2015), At the same time, a first upper minor shaft and second spring knob (20161) can be adjusted to adjust the first upper minor shaft and second upper pressure spring (2016);

The second upper stub shaft (202) includes at least: a second upper stub shaft (2021), which is arranged on a side of the second upper stub shaft (202) facing the first upper stub shaft (201) And set corresponding to the lower shaft wheel body (110); a second upper short shaft and first upper presser (2022) is arranged on the second upper short shaft (202), and facing away from the second upper One end of the stub shaft (202) is provided with a second upper stub shaft and a first upper gear (2023), and is arranged corresponding to the second lower presser (140); a second upper stub shaft and a first upper pressure spring (2024) , Is set on the second upper short axis and first upper presser (2022), and is additionally provided with a first upper presser (2022) and the second lower presser (140) to adjust the second upper minor axis A second upper minor shaft first spring knob (20241); and a second upper minor shaft second upper presser (2025), which is arranged on the second upper minor shaft (202) relative to the first spring knob (20241); The other side of the two upper shaft wheel body (2021) is also provided with a second upper short shaft second upper pressure spring (2026) arranged on the second upper short shaft second upper presser (2025), and at the same time There is also a second upper stub shaft second spring knob (20261) that can adjust the second upper stub shaft and second upper pressure spring (2026); wherein, the first upper stub shaft and the first upper presser (2012) and Between the first upper short axis and the second upper press tool (2015), a bracket (400) is additionally provided, so that the first upper short axis, first upper press tool (2012), and the first upper short axis The two upper pressing tools (2015) maintain a fixed height at the same time; between the second upper short axis first upper pressing tool (2022) and the second upper short axis second upper pressing tool (2025), there is another bracket ( 400), so that the second upper stub shaft and first upper presser (2022) and the second upper stub shaft second upper presser (2025) maintain a fixed height at the same time; the first upper stub shaft first upper presser spring (2014) and the pressing length of the first upper short shaft and the second upper pressure spring (2016) are between 18mm and 26mm; the second upper short shaft first upper pressure spring (2024) and the second upper short shaft first The compression length of the second upper compression spring (2026) is between 18mm and 26mm; the first upper minor axis and the first upper compression spring (2014) have another option that can be placed on the support (400) and the first upper The adjustment jig (420) between the first spring knob (20141) of the stub shaft so that the first upper stub shaft first upper pressure spring (2014) is opposite to the first upper stub shaft second upper pressure spring (2016) The height of the second upper stub shaft is the same; the first upper pressure spring (2024) of the second upper stub shaft is additionally provided with an adjustment between the bracket (400) and the second upper pressure spring (2026) of the second upper stub shaft Fixture (420) so that the height of the first spring knob (20241) of the second upper stub shaft is the same as that of the second spring knob (20261) of the opposite second upper stub shaft; the first upper stub shaft has the first upper Press tool (220) and the first lower press tool (120) The distance is between 0mm and 3mm; the distance between the second upper short axis, the first upper presser (2022) and the second lower presser (140) is between 0mm and 3mm; accordingly, through The design of the pressing tool of the leveling structure enables the leveling effect to be achieved when the substrate is transferred, effectively avoiding the problem of slippage or fragmentation due to the warping of the substrate.

Please also refer to Figure 3, which is a schematic diagram (3) of the leveling structure and the leveling structure of the fan-out panel-level packaging equipment. The present invention provides a leveling structure. The leveling structure (10) is at least Including: a first lower short shaft (101), a second lower short shaft (102) and an upper shaft (200), where:

The first lower stub shaft (101) includes at least: a first lower stub shaft (1011), which is arranged on a side of the first lower stub shaft (101) facing the second lower stub shaft (102) ; A first lower stub shaft (1012), which is set on the first lower stub shaft (101), and a first lower stub shaft (101) is set at an end facing away from the first lower stub shaft (101) Shaft first lower gear (1013); a first lower stub shaft and second lower presser (1014), which is arranged on the first lower stub shaft (101) relative to the first lower shaft wheel body (1011) On the other side, there is also a first lower stub shaft and a first pressing spring (1015) arranged on the first lower stub shaft and the second pressing tool (1014). At the same time, there is also a first lower stub shaft first pressing spring (1015) to adjust the first lower stub shaft The first lower stub shaft first spring knob (10151) of the stub shaft first down spring (1015);

The second lower stub shaft (102) includes at least: a second lower stub shaft (1021), which is arranged on a side of the second lower stub shaft (102) facing the first lower stub shaft (101) ; A second lower stub shaft (1022), is set on the second lower stub shaft (102), and a second lower stub shaft (102) is set at an end facing away from the second lower stub shaft (102) Shaft first lower gear (1023); a second lower stub shaft and second lower presser (1024), which is arranged on the second lower stub shaft (102) relative to the second lower shaft wheel body (1021) On the other side, there is also a second lower stub shaft first pressing spring (1025) on the second lower stub shaft second pressing tool (1024), and a second lower stub shaft first pressing spring (1025) is also provided to adjust the second lower stub shaft. The second upper short shaft first spring knob (10251) of the short shaft first down spring (1025); and

The upper shaft (200) at least includes: a plurality of upper shaft wheels (210) arranged above the upper shaft (200); a first upper pressing tool (220) arranged in the upper shaft (200) A first upper gear (230) is arranged at one end and at the end facing away from the upper shaft (200); a first upper pressure spring (240) is arranged on the first upper pressing tool (220), and is additionally provided There is a first spring knob (241) for adjusting the distance between the first upper pressing tool (220) and the first lower short axis first lower pressing tool (1012); a second upper pressing tool (250) is Is arranged at the other end of the upper shaft (200) relative to the first upper presser (220), and is arranged correspondingly to the second lower short shaft and first lower presser (1022), and faces away from the upper shaft ( One end of 200) is provided with a second upper gear (260); and a second upper pressure spring (270), which is arranged on the second upper pressure tool (250), and is additionally provided to adjust the second upper pressure A second spring knob (271) for the distance between the tool (250) and the first lower pressing tool (1022) of the second lower short axis; the first upper pressure spring (240) and the second upper pressure spring (270) The pressing length of the first lower stub shaft is between 18mm and 26mm; the first lower stub shaft first pressing spring (1015) and the second lower stub shaft first pressing spring (1025), the spring pressing length ranges from 18mm to 26mm; the distance between the first upper presser (220) and the first lower short axis first lower presser (1012) is between 0mm and 3mm; the second upper presser (250) and the first lower presser (1012) The distance between the lower short axis and the second lower presser (1014) is between 0mm and 3mm; accordingly, through the design of the presser of the leveling structure, the leveling effect can be achieved when the substrate is transferred, effectively avoiding the substrate The problem of slippage or fragmentation caused by warping.

Please also refer to Figure 4, which is a schematic diagram (4) of the leveling structure and the leveling structure of the fan-out panel-level packaging equipment. The present invention provides a leveling structure. The leveling structure (10) is at least Including: a first lower stub shaft (101) and a second lower stub shaft (102), and a first upper stub shaft (201) arranged above the first lower stub shaft (101), and a first upper stub shaft (201) arranged on the One of the second upper minor axis (202) above the second lower minor axis (102), in which:

The first lower stub shaft (101) and the second lower stub shaft (102) at least include: a first lower shaft wheel body (1011) arranged on the first lower stub shaft (101) facing the first One side of the two lower stub shafts (102); a first lower stub shaft and a first pressing tool (1012), which is arranged on the first lower stub shaft (101) and faces away from the first lower stub shaft (101) A first lower stub shaft and a first lower gear (1013) are arranged at one end; a first lower stub shaft and a second lower presser (1014) are arranged on the first lower stub shaft (101) relative to the The other side of the first lower axle wheel body (1011); a second lower axle wheel body (1021), which is arranged on the second lower axle (102) facing one of the first lower axles (101) Side; a second lower stub shaft (1022), which is set on the second lower stub shaft (102), and a second lower stub shaft (102) is set at an end facing away from the second lower stub shaft (102) Short shaft first lower gear (1023); a second lower short shaft second lower presser (1024), which is arranged on the second lower short shaft (102) relative to the second lower shaft wheel body (1021) On the other side

The first upper stub shaft (201) and the second upper stub shaft (202) at least include: a first upper shaft wheel body (2011) arranged on the first upper stub shaft (201) to face the first upper stub shaft (201) Two upper short shafts (202) are provided on one side corresponding to at least one of the first lower shaft wheel bodies (1011); a first upper short shaft and first upper pressing tool (2012) is set on the first upper short shaft A first upper stub shaft and a first upper gear (2013) is arranged on the shaft (201) and at an end opposite to the first upper stub shaft (201), and is connected to the first lower stub shaft and the first lower presser (1012) ) Are arranged corresponding to each other; a first upper short shaft and first upper pressure spring (2014) is arranged on the first upper short shaft and first upper pressure tool (2012), and is additionally provided to adjust the first upper short shaft A first upper minor axis first spring knob (20141) between the first upper pressing tool (2012) and the first lower minor axis first lower pressing tool (1012); a first upper minor axis second upper The pressing tool (2015) is arranged on the other side of the first upper short shaft (201) relative to the first upper shaft wheel body (2011), and is also provided with a second upper short shaft The first upper short shaft and the second upper pressure spring (2016) on the upper pressing tool (2015), and a first upper short shaft and the second upper short shaft second spring (2016) which can adjust the first upper short shaft and the second upper pressure spring (2016) Spring knob (20161); a second upper shaft wheel body (2021), which is arranged on the side of the second upper short shaft (202) facing the first upper short shaft (201) and is connected to the second lower shaft The wheel body (1021) is correspondingly arranged; a second upper short shaft and a first upper presser (2022) are arranged on the second upper short shaft (202) and facing away from the second upper short shaft (202) One end is provided with a second upper short shaft and first upper gear (2023), and is arranged corresponding to the second lower pressing tool (140); a second upper short shaft and first upper pressure spring (2024) is arranged on the The second upper short axis and the first upper presser (2022) are additionally provided with a first upper presser (2022) that can adjust the distance between the second upper minor axis and the first upper presser (2022) and the second lower presser (140). Two upper stub shafts and first spring knobs (20241); and a second upper stub shaft and second upper presser (2025), which are arranged on the second upper stub shaft (202) relative to the second upper shaft wheel body On the other side of (2021), there is also a second upper short shaft and a second upper pressure spring (2026) arranged on the second upper short shaft and second upper presser (2025). At the same time, there is also an adjustable The second upper stub shaft and the second upper compression spring (2026) are the second upper stub shaft and the second spring knob (20261); wherein, the first upper stub shaft, the first upper pressing tool (2012) and the first upper stub shaft Between the second upper pressing tool (2015) of the shaft, a bracket (400) is additionally provided, so that the first upper short shaft first upper pressing tool (2012) and the first upper short shaft second upper pressing tool (2015) ) While maintaining a fixed height; between the second upper short axis first upper pressing tool (2022) and the second upper short axis second upper pressing tool (2025), The system is also provided with a bracket (400), so that the second upper short shaft first upper presser (2022) and the second upper short shaft second upper presser (2025) maintain a fixed height at the same time; the first upper The compression lengths of the first upper compression spring (2014) of the stub shaft and the second upper compression spring (2016) of the first upper stub shaft are between 18mm and 26mm; the first upper compression spring (2024) of the second upper stub shaft and The compression length of the second upper stub shaft and the second upper pressure spring (2026) is between 18mm and 26mm; the first upper stub shaft and the first upper pressure spring (2014) has another option that can be placed on the bracket ( 400) and the adjustment fixture (420) between the first upper minor shaft first spring knob (20141), so that the first upper minor shaft first spring knob (20141) is opposite to the first upper minor shaft first spring knob (20141) The heights of the two spring knobs (20161) are the same; the second upper stub shaft and the first upper pressure spring (2024) have another one that can be selectively placed on the bracket (400) and the second upper stub shaft first spring knob ( 20241), the first spring knob (20241) of the second upper stub shaft is the same height as the second spring knob (20261) of the opposite second upper stub shaft; the first upper The distance between the short axis first upper press tool (2012) and the first lower short axis first lower press tool (1012) is between 0mm and 3mm; the second upper short axis first upper press tool (2022) The distance between the second lower short axis and the first lower presser (1022) is between 0mm and 3mm; accordingly, the presser design of the leveling structure can achieve the leveling effect when transferring the substrate. Effectively avoid the problem of slippage or fragmentation due to substrate warping.

In an embodiment of the present invention, the lower axle wheel bodies (110) are plural, and are arranged at a fixed or non-fixed interval between the first lower axle (101) and the second lower axle (102) or At least one connecting lower shaft (not shown in the figure), wherein the at least one connecting lower shaft is disposed between the first lower stub shaft (101) and the second lower stub shaft (102).

In another embodiment of the present invention, the upper axle wheel bodies (210) are plural, and are arranged at a fixed interval between the first upper minor axle (201) and the second upper minor axle (202) or at least one The upper connecting shaft (not shown in the figure) is connected, and the at least one upper connecting shaft is arranged between the first upper short shaft (201) and the second upper short shaft (202).

Next, please refer to Figures 6, 7 and 8, which are schematic diagrams of implementations one, two, and three of the flattening structure and fan-out panel-level packaging equipment of the present invention, a fan-out panel-level packaging equipment , The system includes: a plurality of leveling structures (10), which are arranged side by side at the same distance from each other; a base plate, by which the plurality of lower axle wheel bodies (110) in the leveling structure (10) are opposite to each other Rotate at the same speed to drive the substrate to advance and retreat; a plurality of vibrator sensors (520) include an entrance vibrator sensor (521), which is arranged behind the gate of the feed inlet to sense the speed of the substrate, An outlet vibrator sensor (522) installed in front of the discharge gate to control the opening of the inlet and outlet gates at the same time, and an outlet vibrator sensor (522) installed between the inlet vibrator sensor (521) and the outlet vibrator sensor (522) ) Is used to control the swing sensor (523) of the inlet gate to close, and a swing sensor (523) and the outlet vibrator sensor (522) between the swing sensor (523) and the outlet vibrator sensor (522) to control the simultaneous closing of the inlet and outlet gates The gate is closed before the sensor (524), please also refer to Figure 9 which is a schematic diagram of the vibrator sensor of the flattening structure of the present invention and its fan-out panel-level packaging device, wherein each of the vibrator sensors ( 520) is provided with a probe (5201) with a diameter between 10mm and 25mm and a magnet (5202) opposite to the probe. The magnet (5202) attracts a substrate, and the vibrator sensor ( 520) The required height can be adjusted according to the required distance from the substrate, so that the magnet (5202) is properly attached to the substrate, and the substrate passes through the corresponding sensor (520, 521, 522, 523, 524) After that, the magnet (5202) is separated from the substrate, and the corresponding action of the sensor (520, 521, 522, 523, 524) is executed, and the probe (5201) has an optimal size of 15mm To 20mm.

Furthermore, please refer to Figure 10, which is a schematic diagram of the bracket adjustment of the leveling structure of the present invention and the fan-out panel-level packaging equipment, between the first upper pressing tool (220) and the third upper pressing tool (250) and A bracket (400) is provided between the second upper pressing tool (320) and the fourth upper pressing tool (350), so that the first upper pressing tool (220) and the third upper pressing tool (250) ) And the second upper pressing tool (320) and the fourth upper pressing tool (350) maintain a fixed height at the same time, and the first upper pressing spring (240) and the second upper pressing spring (340) are additionally provided with a The adjusting jig (420) can be selected to be placed between the bracket (400) and the first spring knob (241) and the second spring knob (341), so that the first spring knob (241) and the second spring knob (241) The height of the spring knob (341) is the same as that of the third spring knob (261) and the fourth spring knob (361).

It can be seen from the above that the first upper pressure spring and the second upper pressure spring mainly control the pressing amounts of the first upper pressure tool and the second upper pressure tool corresponding to the first lower pressure tool and the second lower pressure tool, respectively. The third upper pressing spring and the fourth upper pressing spring are used to maintain the balance of the substrate between the first upper pressing tool and the first lower pressing tool, and the second upper pressing tool and the second lower pressing tool, so that the substrate can be It can maintain a flat state during the conveying process, and the looseness or tightness of the spring knob will relatively affect the degree of deformation of the substrate. When the spring knob is tightened, the deformation of the substrate can be reduced, which will relatively make the substrate more flat. The degree of tightness between the spring knobs must be the same.

In addition, the first to third embodiments of the leveling structure and fan-out panel-level packaging equipment of the present invention, wherein the leveling structure (10) can be adjusted according to the required width during use, in an implementation of the present invention In the example, the leveling structure can be applied to a washing machine of a fan-out panel-level packaging equipment (50), wherein the washing machine of the washing machine uses an embodiment of the fan-out panel-level packaging equipment (50), which can be With the unequal-spaced arrangement structure of the leveling structure (10), the clamping force for the substrate can be adjusted and increased in response to the input of different brush wheels, preventing the production of shots, and at the same time, avoiding the occurrence of slides and causing substrate fragments ; In an embodiment of the present invention, the leveling structure can be applied to a fan-out panel-level packaging equipment (50) of the photoresist stripper, which is a photoresist stripper press packaging equipment using fan-out panel-level packaging In the embodiment of the device (50), the leveling structure (10) of the sliding sheet caused by the photoresist stripper agent can be arranged in a dense arrangement to improve the clamping force of the substrate, and at the same time, the O-ring can be used. Conveying, thereby increasing the friction of the rollers against the substrate, and avoiding the occurrence of jams; in an embodiment of the present invention, the leveling structure can be applied to a developing machine of a fan-out panel-level packaging device (50), which is a developing machine The immersion tank packaging equipment uses an embodiment of the fan-out panel-level packaging equipment (50). When the substrate with warpage enters the feed gate through the conveyor belt in front of the packaging equipment (50), the flattening structure ( 10) The conveying shaft wheel body allows the substrate to pass through the sensor to form a closed space or an open space for the packaging equipment. Then, by means of the conveying shaft wheel body, the substrate will stop conveying after reaching the set position and close the feeding and discharging gates. , The packaging equipment is formed into a closed space, and it starts to move back and forth, so that the substrate can reach the leveling and uniformity in the manufacturing process, and finally it is sent out of the packaging equipment by the conveying shaft wheel body.

Therefore, in summary, through different configurations of the leveling structure provided in the packaging device, the presser can press the substrate through the spring knob, so that the warped substrate can achieve a leveling effect during the manufacturing process. And by increasing the measuring head of the sensor, the substrate can pass through the conveying shaft wheel body more effectively, avoiding the problem of slippery pieces caused by the card board.

From the above implementation description, it can be seen that compared with the prior art and products, the present invention has the following advantages:

1. The leveling structure of the present invention and its fan-out panel-level packaging equipment can change the pitch of the leveling structure according to requirements.

2. The leveling structure of the present invention and the fan-out panel-level packaging equipment of the present invention can press the press tool against the substrate by the spring knob, so that the warped substrate can achieve a leveling effect during the manufacturing process.

3. The leveling structure of the present invention and its fan-out panel-level packaging equipment can increase the measuring head of the sensor, so that the substrate can pass through the conveying shaft wheel body more effectively, and avoid the sliding piece caused by the card board. problem.

Specifically, the present invention utilizes the different configurations of the leveling structure provided in the packaging device to press the press tool against the substrate through the spring knob, and then by increasing the probe of the sensor, the substrate can be more effective Through the conveying shaft wheel body, the warped substrate can achieve a leveling effect during the manufacturing process, and at the same time, avoid the problem of slippage and fragmentation caused by the card board.

In summary, the leveling structure and the fan-out panel-level packaging equipment of the present invention can indeed achieve the expected use effects through the embodiments disclosed above, and the present invention has not been disclosed before the application, sincerely Has fully complied with the provisions and requirements of the Patent Law. If you file an application for a patent for invention in accordance with the law, you are kindly requested to review and grant a quasi-patent.

However, the above-mentioned illustrations and descriptions are only preferred embodiments of the present invention, and are not intended to limit the scope of protection of the present invention. Anyone familiar with the art will do other things based on the characteristic scope of the present invention. Equivalent changes or modifications should be regarded as not departing from the design scope of the present invention.

(10): Leveling structure

(100): Lower shaft

(101): The first lower short axis

(1011): first lower axle wheel body

(1012):The first lower short axis and the first press tool

(1013): first lower short shaft first lower gear

(1014):The first lower short axis and the second lower press tool

(1015): The first lower short shaft first press spring

(10151): First lower short shaft first spring knob

(102): The second lower short axis

(1021): second lower axle wheel body

(1022):The second lower short axis and the first press tool

(1023): The second lower short shaft and the first lower gear

(1024):Second lower short axis and second press tool

(1025): The second lower stub shaft and the first press spring

(10251): The first spring knob of the second lower short axis

(110): lower axle wheel body

(120): The first lower press

(130): The first lower gear

(140): The second lower press

(150): The second lower gear

(200): Upper shaft

(201): First upper short axis

(2011): The first upper axle wheel body

(2012): The first upper short axis and the first upper press tool

(2013): The first upper short shaft and the first upper gear

(2014): The first upper short shaft and the first upper pressure spring

(20141): The first upper short axis first spring knob

(2015): The first upper short axis and the second upper press tool

(2016): The first upper short shaft and the second upper pressure spring

(20161): The first upper short axis and the second spring knob

(202):Second upper short axis

(2021): Second upper axle wheel body

(2022): The second upper short axis and the first upper press tool

(2023): The second upper short shaft and the first upper gear

(2024): The second upper short shaft and the first upper pressure spring

(20241): The second upper short shaft first spring knob

(2025): The second upper short axis and the second upper press tool

(2026): The second upper short shaft and the second upper pressure spring

(20261): The second upper short shaft second spring knob

(210): Upper shaft wheel body

(220):The first upper press

(230):The first upper gear

(240): The first upper pressure spring

(241): First spring knob

(250):Second upper press tool

(260):Second Upper Gear

(270):Second upper pressure spring

(271): Second spring knob

(400): Bracket

(420): adjust fixture

(50): Packaging equipment

(520): Vibrator sensor

(521): Entrance vibrator sensor

(522): Export vibrator sensor

(523): Swing Sensor

(524): Gate closed vibrator sensor

(5201): Probe

(5202): Magnet

Figure 1: A schematic diagram of the leveling structure of the present invention and the leveling structure of the fan-out panel-level packaging equipment (1). Figure 2: A schematic diagram of the leveling structure of the present invention and the leveling structure of the fan-out panel-level packaging equipment (2). Figure 3: A schematic diagram of the leveling structure of the present invention's leveling structure and its fan-out panel-level packaging equipment (3). Figure 4: A schematic diagram of the leveling structure of the present invention and the leveling structure of the fan-out panel-level packaging equipment (4). Figure 5: Side view of the upper and lower pressing tools of the leveling structure of the present invention and its fan-out panel-level packaging equipment. Figure 6: A schematic diagram of the implementation of the flattening structure of the present invention and its fan-out panel-level packaging equipment. Figure 7: A schematic diagram of the second implementation of the flattening structure of the present invention and its fan-out panel-level packaging equipment. Figure 8: Three schematic diagrams of the implementation of the leveling structure of the present invention and its fan-out panel-level packaging equipment. Figure 9: Schematic diagram of the vibrator sensor of the flattening structure of the present invention and its fan-out panel-level packaging equipment. Figure 10: A schematic diagram of the bracket adjustment of the leveling structure of the present invention and its fan-out panel-level packaging equipment.

(10): Leveling structure

(100): Lower shaft

(110): lower axle wheel body

(120): The first lower press

(130): The first lower gear

(140): The second lower press

(150): The second lower gear

(200): Upper shaft

(210): Upper shaft wheel body

(220):The first upper press

(230):The first upper gear

(240): The first upper pressure spring

(241): First spring knob

(250):Second upper press tool

(260):Second Upper Gear

(270):Second upper pressure spring

(271): Second spring knob

Claims (37)

A leveling structure. The leveling structure (10) includes at least a lower shaft (100) and an upper shaft (200) arranged above the lower shaft (100), wherein the lower shaft (100) at least includes: A plurality of wheel bodies (110) are arranged on the upper and lower shafts of the lower shaft (100); a first lower presser (120) is arranged on one end of the lower shaft (100) and faces away from the lower shaft (100) One end is provided with a first lower gear (130); a second lower presser (140) is arranged at the other end of the lower shaft (100) relative to the first lower presser (120), and is connected to the A second lower gear (150) is arranged opposite to the lower shaft (100); the upper shaft (200) system at least includes: a plurality of upper shaft wheel bodies (210) correspondingly arranged above the lower shaft wheel body (110) ), and each of the upper shaft wheel bodies (210) is arranged on the upper shaft (200) at a fixed interval; a first upper pressing tool (220) is arranged on the upper shaft (200) and is connected to the upper shaft (200). The first lower pressing tools (120) are arranged corresponding to each other, and a first upper gear (230) is arranged opposite to one end of the upper shaft (200); a first upper pressing spring (240) is arranged on the first upper The pressing tool (220) is additionally provided with a first spring knob (241) capable of adjusting the distance between the first upper pressing tool (220) and the first lower pressing tool (120); a second upper pressing tool (250), which is arranged at the other end of the upper shaft (200) relative to the first upper presser (220), and is arranged corresponding to the second lower presser (140), and faces away from the upper shaft ( One end of 200) is provided with a second upper gear (260); and a second upper pressure spring (270), which is arranged on the second upper pressure tool (250), and is additionally provided to adjust the second upper pressure A second spring knob (271) between the tool (250) and the second pressing tool (140). As for the leveling structure described in item 1 of the scope of patent application, the pressing length of the first upper pressure spring (240) and the second upper pressure spring (270) is between 18mm and 26mm. For the leveling structure described in item 1 of the scope of patent application, the distance between the first upper pressing tool (220) and the first lower pressing tool (120) is between 0 mm and 3 mm. As for the leveling structure described in item 1 of the scope of patent application, the distance between the second upper pressing tool (250) and the second lower pressing tool (140) is between 0 mm and 3 mm. A leveling structure, the leveling structure (10) includes at least a lower shaft (100), and a first upper short shaft (201) and a second upper short shaft (202) arranged above the lower shaft (100) ), wherein: the lower shaft (100) at least includes: a plurality of upper and lower shaft wheel bodies (110) arranged on the lower shaft (100); a first lower pressing tool (120) arranged on the lower shaft A first lower gear (130) is arranged at one end of the lower shaft (100) and at the end opposite to the lower shaft (100); a second lower presser (140) is arranged on the lower shaft (100) relative to the lower shaft (100). The other end of the first lower presser (120) is provided with a second lower gear (150) opposite to the second lower shaft (100); the first upper short shaft (201) includes at least: a first upper The shaft wheel body (2011) is arranged on the side of the first upper short shaft (201) facing the side of the second upper short shaft (202) and corresponding to at least one of the lower shaft wheel bodies (110); An upper short shaft and first upper pressing tool (2012) is arranged on the first upper short shaft (201), and a first upper short shaft (201) is provided at an end facing away from the first upper short shaft (201). The upper gear (2013) is arranged corresponding to the first lower pressing tool (120); a first upper short shaft and first upper pressing spring (2014) is arranged on the first upper short shaft and first upper pressing tool (2012), and is additionally provided with a first upper minor axis first spring knob (20141) which can adjust the distance between the first upper minor axis, the first upper pressing tool (2012) and the first lower pressing tool (120) ); A first upper short shaft and a second upper press tool (2015), which is arranged on the other side of the first upper short shaft (201) relative to the first upper shaft wheel body (2011), and is also provided There is a second upper pressing tool on the first upper short axis (2015) The first upper minor shaft and the second upper pressure spring (2016), and there is also a first upper minor shaft and second spring knob (2016) that can adjust the first upper minor shaft and the second upper pressure spring (2016) 20161); The second upper short shaft (202) at least includes: a second upper shaft wheel body (2021), which is arranged on the second upper short shaft (202) facing the first upper short shaft (201) One side is set corresponding to the lower shaft wheel body (110); a second upper short shaft and first upper presser (2022) is set on the second upper short shaft (202) and facing away from the One end of the second upper stub shaft (202) is provided with a second upper stub shaft and a first upper gear (2023), and is arranged corresponding to the second lower pressing tool (140); a second upper stub shaft and a first upper pressure spring (2024), is set on the second upper short shaft first upper presser (2022), and is additionally provided with a first upper presser (2022) to adjust the second upper short shaft and the second lower presser (140) a second upper short shaft first spring knob (20241); and a second upper short shaft second upper presser (2025), which is arranged opposite to the second upper short shaft (202) On the other side of the second upper shaft wheel body (2021), there is also a second upper short shaft second upper pressure spring (2026) arranged on the second upper short shaft second upper pressing tool (2025) ), and a second upper short shaft second spring knob (20261) capable of adjusting the second upper short shaft second upper pressure spring (2026) is also provided. For the leveling structure described in item 5 of the scope of patent application, there is another upper pressing tool (2012) between the first upper minor axis and the first upper pressing tool (2015). The bracket (400) enables the first upper short axis and first upper pressing tool (2012) and the first upper short axis and second upper pressing tool (2015) to maintain a fixed height at the same time. For the leveling structure described in item 6 of the scope of patent application, between the second upper short axis first upper pressing tool (2022) and the second upper short axis second upper pressing tool (2025), there is another The bracket (400) enables the second upper short axis and first upper pressing tool (2022) and the second upper short axis and second upper pressing tool (2025) to maintain a fixed height at the same time. As for the leveling structure described in item 7 of the scope of patent application, the pressing length of the first upper short shaft first upper pressure spring (2014) and the first upper short shaft second upper pressure spring (2016) is between 18mm To 26mm. As for the leveling structure described in item 7 of the scope of patent application, the compression length of the second upper short shaft first upper pressure spring (2024) and the second upper short shaft second upper pressure spring (2026) is between 18mm To 26mm. For the leveling structure described in item 6 of the scope of patent application, the first upper short axis and the first upper compression spring (2014) have another option to be placed on the bracket (400) and the first upper short axis. An adjustment jig (420) between the spring knobs (20141), so that the first upper minor shaft and the first upper pressure spring (2014) and the opposite first upper minor shaft and second upper pressure spring (2016) have the same height . As for the leveling structure described in item 6 of the scope of patent application, the second upper short shaft and the first upper pressure spring (2024) have another option that can be placed on the bracket (400) and the second upper short shaft. The adjustment fixture (420) between the two upper compression springs (2026), so that the height of the second upper minor axis first spring knob (20241) and the opposite second upper minor axis second spring knob (20261) are the same . As for the leveling structure described in item 5 of the scope of patent application, the distance between the first upper short axis and the first upper presser (220) and the first lower presser (120) is between 0mm and 3mm. As for the leveling structure described in item 5 of the scope of patent application, the distance between the second upper short axis first upper presser (2022) and the second lower presser (140) is between 0mm and 3mm. A leveling structure, the leveling structure (10) at least includes a first lower minor axis (101), a second lower minor axis (102) and an upper axis (200), wherein: the first lower minor axis The (101) system includes at least: a first lower shaft wheel body (1011), which is arranged on the side of the first lower stub shaft (101) facing the second lower stub shaft (102); A first lower stub shaft (1012) is arranged on the first lower stub shaft (101), and a first lower stub shaft (101) is provided at one end away from the first lower stub shaft (101) The first lower gear (1013); a first lower stub shaft and a second lower presser (1014), which are arranged on the other of the first lower stub shaft (101) relative to the first lower shaft wheel body (1011) On one side, there is also a first lower stub shaft and a first pressing spring (1015) arranged on the first lower stub shaft and second pressing tool (1014), and there is also a first lower stub shaft to adjust the first lower short shaft. The first lower stub shaft and the first spring knob (10151) of the first down-pressing spring (1015) of the shaft; the second lower stub shaft (102) at least includes: a second lower shaft wheel body (1021), which is arranged in The second lower stub shaft (102) faces one side of the first lower stub shaft (101); a second lower stub shaft and first presser (1022) is arranged on the second lower stub shaft (102) ), and at the end facing away from the second lower stub shaft (102), a second lower stub shaft and a first lower gear (1023) are arranged; a second lower stub shaft and a second presser (1024) are arranged at The other side of the second lower stub shaft (102) opposite to the second lower shaft wheel body (1021) is also provided with a second lower presser (1024) on the second lower stub shaft Two lower stub shafts and first downward pressure springs (1025), and a second upper stub shaft first spring knob (10251) for adjusting the second lower stub shaft and first downward pressure springs (1025); and the upper The shaft (200) at least includes: a plurality of upper shaft wheels (210) arranged above the upper shaft (200); a first upper pressing tool (220) arranged on one end of the upper shaft (200), A first upper gear (230) is arranged at one end of the upper shaft (200); a first upper pressure spring (240) is arranged on the first upper pressing tool (220), and is additionally provided with A first spring knob (241) for adjusting the distance between the first upper pressing tool (220) and the first lower short axis first lower pressing tool (1012); A second upper presser (250) is arranged at the other end of the upper shaft (200) relative to the first upper presser (220), and is connected to the second lower short shaft and first lower presser (1022) Corresponding to each other, and a second upper gear (260) is arranged opposite to one end of the upper shaft (200); and a second upper pressure spring (270) is arranged on the second upper pressure tool (250), In addition, a second spring knob (271) is provided for adjusting the distance between the second upper pressing tool (250) and the second lower short axis first lower pressing tool (1022). As for the leveling structure described in item 14 of the scope of patent application, the pressing length of the first upper pressure spring (240) and the second upper pressure spring (270) is between 18mm and 26mm. As for the leveling structure described in item 14 or 15 of the scope of patent application, the first lower stub shaft first downward pressure spring (1015) and the second lower stub shaft first downward pressure spring (1025), the compression of the springs The length is between 18mm and 26mm. As for the leveling structure described in item 14 of the scope of patent application, the distance between the first upper pressing tool (220) and the first lower minor axis and first lower pressing tool (1012) is between 0mm and 3mm. As for the leveling structure described in item 14 of the scope of patent application, the distance between the second upper pressing tool (250) and the first lower minor axis and second lower pressing tool (1014) is between 0mm and 3mm. A leveling structure, the leveling structure (10) includes at least a first lower short shaft (101) and a second lower short shaft (102), and one of the first lower short shafts (101) arranged above A first upper minor axis (201), and a second upper minor axis (202) disposed above the second lower minor axis (102), wherein: the first lower minor axis (101) and the second lower minor axis The shaft (102) includes at least: a first lower shaft wheel body (1011), which is arranged on the side of the first lower stub shaft (101) facing the second lower stub shaft (102); a first lower shaft The first lower stub shaft (1012) is arranged on the first lower stub shaft (101), and a first lower stub shaft (101) is provided with a first lower stub shaft and first lower gear at an end that faces away from the first lower stub shaft (101) (1013); A first lower stub shaft and a second lower presser (1014), which are arranged on the other side of the first lower stub shaft (101) relative to the first lower shaft wheel body (1011); a second lower shaft The wheel body (1021) is arranged on the side of the second lower stub shaft (102) facing the first lower stub shaft (101); a second lower stub shaft and the first pressing tool (1022) are arranged A second lower stub shaft and a first lower gear (1023) are arranged on the second lower stub shaft (102) and at an end facing away from the second lower stub shaft (102); a second lower stub shaft and a second lower gear The pressing tool (1024) is arranged on the other side of the second lower short shaft (102) relative to the second lower shaft wheel body (1021); the first upper short shaft (201) and the second upper The short shaft (202) includes at least: a first upper shaft wheel body (2011), which is arranged on a side of the first upper short shaft (201) facing one side of the second upper short shaft (202) and is connected to at least one side of the second upper short shaft (202). The first lower axle wheel body (1011) is correspondingly arranged; a first upper minor axle and first upper presser (2012) is arranged on the first upper minor axle (201) and faces away from the first upper One end of the stub shaft (201) is provided with a first upper stub shaft and first upper gear (2013), and is arranged corresponding to the first lower stub shaft and first lower presser (1012); a first upper stub shaft, first upper gear The compression spring (2014) is arranged on the first upper short shaft and the first upper pressing tool (2012), and is additionally provided with the first upper pressing tool (2012) to adjust the first upper short shaft and the first lower A first upper minor axis first spring knob (20141) between the short axis first lower press tool (1012); a first upper minor axis second upper press tool (2015), which is set on the first upper short axis The shaft (201) is opposite to the other side of the first upper shaft wheel body (2011), and is also provided with a first upper short shaft and a second upper pressing tool (2015) on the first upper short shaft and the second upper presser (2015). Two upper compression springs (2016), and at the same time a first upper minor shaft second spring knob (20161) to adjust the first upper minor shaft and second upper pressure spring (2016); a second upper shaft wheel body ( 2021), which is arranged on the side of the second upper stub shaft (202) facing the first upper stub shaft (201) and corresponding to the second lower shaft wheel body (1021); A second upper stub shaft and a first upper presser (2022) is arranged on the second upper stub shaft (202), and a second upper stub shaft (202) is provided at an end facing away from the second upper stub shaft (202) The first upper gear (2023) and the second lower pressing tool (140) are arranged corresponding to each other; a second upper stub shaft and first upper pressure spring (2024) is arranged on the second upper stub shaft and the first upper The pressing tool (2022) is additionally provided with a second upper minor axis first spring knob for adjusting the distance between the second upper minor axis, first upper pressing tool (2022) and the second lower pressing tool (140) (20241); and a second upper short shaft and a second upper presser (2025), which are arranged on the other side of the second upper short shaft (202) relative to the second upper shaft wheel body (2021), There is also a second upper short shaft second upper pressure spring (2026) arranged on the second upper short shaft second upper pressing tool (2025), and a second upper short shaft second pressure spring (2026) is also provided to adjust the second upper short shaft The second upper short shaft and the second spring knob (20261) of the upper pressure spring (2026). For the leveling structure described in item 19 of the scope of patent application, a bracket is additionally provided between the first upper short axis first upper press tool (2012) and the first upper short axis second upper press tool (2015) (400), so that the first upper short axis and first upper presser (2012) and the first upper short axis and second upper presser (2015) can maintain a fixed height at the same time. As the leveling structure described in item 19 of the scope of patent application, there is another upper pressing tool (2022) between the second upper minor axis and the second upper pressing tool (2025). The bracket (400) enables the second upper short shaft and first upper presser (2022) and the second upper short shaft and second upper presser (2025) to maintain a fixed height at the same time. As for the leveling structure described in item 20 or 21 of the scope of patent application, the pressing lengths of the first upper short shaft first upper pressure spring (2014) and the first upper short shaft second upper pressure spring (2016) are related At 18mm to 26mm. As for the leveling structure described in item 19 of the scope of patent application, the compression length of the first upper compression spring (2024) of the second upper minor shaft and the second upper compression spring (2026) of the second upper minor shaft is between 18mm To 26mm. For the leveling structure described in item 20 or 21 of the scope of patent application, the first upper short axis and the first upper compression spring (2014) have another option to be placed on the bracket (400) and the first upper short The adjustment fixture (420) between the first spring knob (20141) of the shaft, so that the height of the first upper minor shaft first spring knob (20141) and the opposite first upper minor shaft second spring knob (20161) the same. For the leveling structure described in item 20 or 21 of the scope of the patent application, the second upper short shaft and the first upper compression spring (2024) have another option to be placed on the bracket (400) and the second upper short The adjustment fixture (420) between the first spring knob (20241) of the shaft, so that the height of the second upper minor shaft first spring knob (20241) and the second upper minor shaft second spring knob (20261) opposite the same. For the leveling structure described in item 19 of the scope of patent application, the distance between the first upper short axis and first upper presser (2012) and the first lower minor axis and first lower presser (1012) is between 0mm and Between 3mm. For the leveling structure described in item 19 of the scope of patent application, the distance between the second upper short axis first upper presser (2022) and the second lower minor axis first lower presser (1022) is between 0mm and Between 3mm. As for the leveling structure described in item 19 of the scope of patent application, at least one lower connecting shaft is further provided between the first lower short shaft (101) and the second lower short shaft (102). For the leveling structure described in item 19 or 28 of the scope of patent application, at least one upper connecting shaft is further provided between the first upper short shaft (201) and the second upper short shaft (202). A fan-out panel-level packaging device, the fan-out panel-level packaging device (50) at least includes: a plurality of leveling structures (10) according to any one of claims 1 to 29, and each of the leveling structures (10) The structures (10) are arranged side by side at equal distances or non-equal distances. The fan-out panel-level packaging device described in item 30 of the scope of the patent application further includes: a substrate by which the plurality of lower axle wheel bodies (110) in the leveling structure (10) are in opposite directions to each other Rotating at the same speed at the same time can drive the substrate forward and backward. The fan-out panel-level packaging device described in item 31 of the scope of the patent application further includes: a plurality of vibrator sensors (520), which include an entrance arranged behind the gate of the feed inlet to sense the speed of the substrate A vibrator sensor (521), an outlet vibrator sensor (522) arranged in front of the discharge gate to control the opening of the feeding and discharge gates at the same time, and an outlet vibrator sensor (522) arranged between the inlet vibrator sensor (521) and A swing sensor (523) between the outlet vibrator sensor (522) to control the closing of the inlet gate, and a swing sensor (523) and the outlet vibrator sensor (522) to control The gate closes at the same time for the feed and discharge gates to close the sensor (524), wherein each of the vibrator sensors (520) is provided with a probe (5201) and a magnet (5202) opposite to the probe (5201) ), and the magnet (5202) is used to attract or detach from the magnet sensor to detect the movement of entering or leaving a substrate. For the fan-out panel-level packaging device described in item 32 of the scope of patent application, the diameter of the probe (5201) is between 10mm and 25mm. For the fan-out panel-level packaging equipment described in item 32 of the scope of patent application, the diameter of the probe (5201) is between 15mm and 20mm. The fan-out panel-level packaging device described in item 30 of the scope of patent application, wherein the fan-out panel-level packaging device (50) is a developing machine. The fan-out panel-level packaging equipment described in item 30 of the scope of patent application, wherein the fan-out panel-level packaging equipment (50) is a washing machine. The fan-out panel-level packaging equipment described in item 30 of the scope of patent application, wherein the fan-out panel-level packaging equipment (50) is a photoresist peeling machine.

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