TWI719686B - Method of evaluating dispersion of pollutants in whole rock matrix through scanning electron microscopy and energy scatter analysis - Google Patents

Method of evaluating dispersion of pollutants in whole rock matrix through scanning electron microscopy and energy scatter analysis Download PDF

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TWI719686B
TWI719686B TW108138579A TW108138579A TWI719686B TW I719686 B TWI719686 B TW I719686B TW 108138579 A TW108138579 A TW 108138579A TW 108138579 A TW108138579 A TW 108138579A TW I719686 B TWI719686 B TW I719686B
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rock
analysis
diffusion
contaminated
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TW202117302A (en
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施宇鴻
蔡翠玲
陳亮丞
蘇德晏
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行政院原子能委員會核能研究所
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Abstract

A method is provided for evaluating the dispersion of pollutants in a whole rock matrix. The method is done through scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS). On obtaining a rock sample, detection and examination of contaminant diffusion are processed. A clean-cut method is used to ensure reduction in redistribution or contamination on a section of the sample. SEM is used to analyze an image of a cross-sectional area of the contaminated sample. Inductively coupled plasma atomic emission spectrometry (ICP-AES) or inductively coupled plasma-mass spectrometry (ICP-MS) is supplemented to identify spectrum for confirming and analyzing elements of the contaminated sample. At last, SEM is combined with EDS to analyze specific contaminants in the cross-sectional area of the contaminated sample. When EDS is combined with image tools, a region having a diameter smaller than nano-meter scale is provided to process elemental analysis for image scanning and analysis of the sample. Thus, the characterized X-rays of the elements of the contaminated sample obtained by striking the contaminated sample with an electron beam is used to determine the elemental composition at a single point for analysis of the diffusion degree of the pollutant elements in the section of the contaminated sample. In such a way, a lateral concentration profile of pollutant elements in the imaged region is plotted.

Description

以掃描式電子顯微鏡暨能量散佈分析評估汙染物於完整岩石基質擴散之分析方法Analytical method to evaluate the diffusion of pollutants in intact rock matrix by scanning electron microscope and energy dispersion analysis

本發明係有關於一種以掃描式電子顯微鏡暨能量散佈分析評估 汙染物於完整岩石基質擴散之分析方法,特別係指可應用於用過核子燃料最終處置放射性汙染物質於岩石的擴散研究、環保及工業汙染擴散鑑定分析方面者。 The present invention relates to a scanning electron microscope and energy dispersion analysis and evaluation Analysis methods for the diffusion of pollutants in intact rock substrates, especially those that can be applied to the study of the diffusion of radioactive contaminants in rocks for the final disposal of used nuclear fuel, environmental protection, and the identification and analysis of industrial pollution diffusion.

傳統分析汙染物於完整母岩基質擴散之分析方法為穿透擴散 法、內擴散或是利用井場進行現地示蹤劑試驗。其中穿透擴散法在岩石擴散分析法耗時過長需要數年時間才可完成;內擴散法目前文獻已知方法須利用X射線光電子能譜儀(X-ray photoelectron spectrometer, XPS)、拉塞福背向散射譜儀(Rutherford backscattering spectrometer, RBS)、及二次離子質譜儀(Secondary ion mass spectrometer, SIMS)等貴重精密儀器才能進行;然而現地挖井用示蹤劑試驗測試則會有環境污染之疑慮。傳統研磨切割樣本也會使樣品切片內部分材料成分的重新分布或汙染,造成分析上之不確定性。 The traditional analysis method for analyzing the diffusion of pollutants in the intact parent rock matrix is penetration diffusion Method, internal diffusion, or use the well site to conduct on-site tracer tests. Among them, the penetration diffusion method in the rock diffusion analysis method takes too long to complete, and it takes several years to complete; the internal diffusion method currently known in the literature requires the use of X-ray photoelectron spectrometer (X-ray photoelectron spectrometer, XPS), pull plug Rutherford backscattering spectrometer (RBS), secondary ion mass spectrometer (SIMS) and other expensive precision instruments can only be carried out; however, the tracer test and test used for on-site excavation will cause environmental pollution. Of doubts. Traditional grinding and cutting samples will also redistribute or contaminate part of the material components in the sample slices, causing analytical uncertainty.

鑑於目前國內外在汙染物於完整母岩擴散之分析方法中,傳統研 磨切割樣本會使樣品切片內部分材料成分的重新分布或汙染,造成分析上的不 確定性;傳統放射性汙染物於環境擴散分析,示蹤劑試驗測試會因為環保及安全因素無法於現地執行;傳統穿透擴散法受限於實驗時間過長而無法短時間知道結果;傳統內擴散法需要貴重精密儀器才能進行分析。雖然曾有專利提出涵蓋掃描式電子顯微鏡能利用多像素固態電子偵測器進行影像放大檢查樣品表面,惟其並未提及與能量散佈光譜結合分析樣品元素分布之應用。故,一般習用者係無法符合使用者於實際使用時之所需。 In view of the current domestic and foreign analysis methods for the diffusion of pollutants in the intact parent rock, traditional research Grinding and cutting the sample will redistribute or contaminate part of the material components in the sample slice, causing analysis inconsistencies. Certainty; traditional radioactive pollutants are diffused in the environment, and tracer testing cannot be performed on-site due to environmental protection and safety factors; the traditional penetrating diffusion method is limited by the long experimental time and the result cannot be known in a short time; traditional internal diffusion The method requires expensive precision instruments to perform analysis. Although there have been patents that cover scanning electron microscopes that can use multi-pixel solid-state electronic detectors for image magnification and inspection of the sample surface, it does not mention the application of combining energy dispersive spectroscopy to analyze the element distribution of samples. Therefore, general users cannot meet the needs of users in actual use.

本發明之主要目的係在於,克服習知技藝所遭遇之上述問題並提 供一種利用掃描式電子顯微鏡結合能量散佈分析儀器分析切割過的岩石或地質樣品剖面,先針對表面進行掃描式電子顯微鏡分析樣品表面影像分析,輔以感應耦合電漿原子放射光譜分析或感應耦合電漿質譜儀鑑定出光譜確認分析汙染樣品元素組成,最終以能量散佈分析儀器掃描,繪製出成像區域汙染物元素的橫向分布,確保放射性汙染物可以於實驗室內進行地質材料的擴散行為研究之以掃描式電子顯微鏡暨能量散佈分析評估汙染物於完整岩石基質擴散之分析方法。 The main purpose of the present invention is to overcome the above-mentioned problems encountered by the prior art and to improve Provide a scanning electron microscope combined with an energy dispersion analysis instrument to analyze the cut rock or geological sample section. First, perform scanning electron microscope analysis on the surface of the sample surface image analysis, supplemented by inductively coupled plasma atomic emission spectroscopy or inductively coupled electrical The plasma mass spectrometer identified the spectrum to confirm and analyze the element composition of the contaminated sample, and finally scanned with the energy dispersive analysis instrument to map the horizontal distribution of the contaminant elements in the imaging area, ensuring that radioactive contaminants can be used in the laboratory to study the diffusion behavior of geological materials. Scanning electron microscopy and energy dispersion analysis are an analytical method to evaluate the diffusion of pollutants in the intact rock matrix.

本發明之次要目的係在於,提供一種可應用於用過核子燃料最終 處置放射性汙染物質於岩石的擴散研究、環保及工業汙染擴散鑑定分析方面之以掃描式電子顯微鏡暨能量散佈分析評估汙染物於完整岩石基質擴散之分析方法。 The secondary objective of the present invention is to provide a method that can be applied to the final Disposal of radioactive contaminants in rock diffusion research, environmental protection, and industrial pollution diffusion identification analysis. Scanning electron microscope and energy dispersion analysis are used to evaluate the analysis method of pollutant diffusion in intact rock substrates.

為達以上之目的,本發明係一種以掃描式電子顯微鏡暨能量散佈 分析評估汙染物於完整岩石基質擴散之分析方法,其至少包含下列步驟:樣品 分析評估汙染物於完整岩石基質擴散之分析方法,其至少包含下列步驟:樣品前處理步驟:取得一岩石樣品,將該岩石樣品進行切割、研磨及拋光之前處理加工,對該岩石樣品切割為岩石薄片樣品中,加工該岩石薄片樣品厚度至0.03~0.5毫米(mm),再經過研磨及拋光處理成表面平整之岩石薄片樣品;汙染擴散步驟:將表面平整之岩石薄片樣品先進行水飽和處理,再將其浸泡汙染物進行汙染擴散形成岩石薄片汙染樣品;無汙染切割步驟:在該岩石薄片汙染樣品背面貼上玻璃片,切片過程採用鑽石刀划切或雷射劃片方式切割該玻璃片端,使切割完成之岩石薄片汙染樣品可完整黏於該玻璃片上不易碎裂,達成減少切面上的重新分布或汙染;以及掃描分析斷面步驟:對切片處理後之岩石薄片汙染樣品剖面進行掃描式電子顯微鏡(SEM)分析汙染樣品剖面區域影像,輔以感應耦合電漿原子放射光譜分析(ICP-AES)或感應耦合電漿質譜儀(ICP-MS)鑑定出光譜確認分析汙染樣品元素組成,最終以掃描式電子顯微鏡結合能量散佈分析儀器(SEM-EDS)分析汙染樣品剖面區域特定汙染物元素,當該能量散佈分析儀器與該些影像工具結合到一起時,可以提供直徑小至nm的區域進行元素分析,進行樣品的影像掃描與分析,藉由利用電子束對汙染樣品的撞擊會產生汙染樣品元素的特性X-射線,可用於確定單點的元素成分,分析汙染物元素於該岩石薄片汙染樣品內的擴散程度,繪製出成像區域汙染物元素的橫向濃度分布圖。 In order to achieve the above purpose, the present invention is a scanning electron microscope and energy dispersing An analytical method for analyzing and evaluating the diffusion of contaminants in the intact rock matrix, which at least includes the following steps: Sample An analysis method for analyzing and evaluating the diffusion of contaminants in a complete rock matrix, which at least includes the following steps: Sample pretreatment step: Obtain a rock sample, cut, grind and polish the rock sample before processing, and cut the rock sample into rock Among the thin slice samples, the rock thin slice samples are processed to a thickness of 0.03~0.5 millimeters (mm), and then they are ground and polished to form a flat rock thin slice sample; the pollution diffusion step: the rock thin slice sample with a flat surface is first subjected to water saturation treatment. Then soak the contaminants for contamination diffusion to form a rock flake contaminated sample; non-polluting cutting steps: stick a glass slice on the back of the rock flake contaminated sample, and use a diamond knife scribing or laser scribing method to cut the end of the glass slice during the slicing process. Make the sliced rock flakes contaminated sample can be completely adhered to the glass sheet and not easily broken, so as to reduce the redistribution or pollution on the section; and the scanning analysis section step: scan the section of the rock flakes contaminated sample after the slicing process. Microscope (SEM) analyzes the image of the cross-sectional area of the contaminated sample, supplemented by inductively coupled plasma atomic emission spectroscopy (ICP-AES) or inductively coupled plasma mass spectrometry (ICP-MS) to identify the spectrum to confirm and analyze the element composition of the contaminated sample, and finally Scanning electron microscope combined with energy dispersion analysis instrument (SEM-EDS) analyzes specific pollutant elements in the cross-sectional area of the contaminated sample. When the energy dispersion analysis instrument is combined with these imaging tools, it can provide an area as small as nm in diameter for element analysis. Analyze, perform image scanning and analysis of the sample. By using the electron beam to collide with the contaminated sample, the characteristic X-ray of the contaminated sample element will be generated, which can be used to determine the elemental composition of a single point and analyze the contaminant element in the rock flake contaminated sample The degree of diffusion in the imaging area draws the horizontal concentration distribution map of the pollutant elements in the imaging area.

於本發明上述實施例中,該岩石樣品係為質地堅硬之花崗岩、玄 武岩或安山岩之火成岩。 In the above-mentioned embodiment of the present invention, the rock sample is hard granite, basalt The igneous rock of martial or andesite.

於本發明上述實施例中,該岩石薄片樣品進行水飽和處理之時間 為7~30天。 In the above-mentioned embodiment of the present invention, the water saturation treatment time for the rock flake sample is For 7 to 30 days.

於本發明上述實施例中,該岩石薄片樣品係浸泡於濃度大於 0.001M之汙染物,其浸泡時間為7~30天。 In the above embodiment of the present invention, the rock flake sample is immersed in a concentration greater than For 0.001M pollutants, the soaking time is 7-30 days.

於本發明上述實施例中,該鑽石刀划切係在切割處加一刻痕,使 局部應力集中,達成折斷。 In the above-mentioned embodiment of the present invention, the diamond knife scribing system adds a notch to the cut to make Local stress is concentrated and breakage is achieved.

於本發明上述實施例中,該雷射劃片係以高能量密度雷射在脆性 材料的玻璃片表面進行掃描,使材料受熱蒸發出一條小槽,然後施加一定壓力,使該玻璃片沿小槽處裂開。 In the above-mentioned embodiment of the present invention, the laser scribing is made by using a high-energy density laser in the brittle The surface of the glass sheet of the material is scanned, the material is heated to evaporate a small groove, and then a certain pressure is applied to crack the glass sheet along the small groove.

請參閱『第1圖~第3圖』所示,係分別為本發明分析方法之流 程示意圖、本發明無汙染切割之流程示意圖、以及本發明分析方法之影像解析示意圖。如圖所示:本發明係一種以掃描式電子顯微鏡暨能量散佈分析評估汙染物於完整岩石基質擴散之分析方法,主要係針對取得岩石樣品後,進行汙染物擴散試驗與檢測,其至少包含下列步驟: Please refer to "Figure 1 to Figure 3", which are the flow of the analysis method of the present invention. The schematic diagram of the process, the schematic diagram of the pollution-free cutting process of the present invention, and the schematic diagram of image analysis of the analysis method of the present invention. As shown in the figure: The present invention is an analysis method for evaluating the diffusion of pollutants in the intact rock matrix by scanning electron microscope and energy dispersion analysis. It is mainly for the pollutant diffusion test and detection after the rock sample is obtained. It includes at least the following step:

樣品前處理步驟s11:取得一岩石樣品1,該岩石樣品1可為質 地堅硬之花崗岩、玄武岩或安山岩之火成岩,將該岩石樣品1進行切割、研磨及拋光等前處理加工,對該岩石樣品切割為岩石薄片樣品1a中,加工該岩石薄片樣品1a厚度至0.03~0.5毫米(mm),再經過研磨及拋光處理成表面平整之岩石薄片樣品1a。 Sample pre-processing step s11: Obtain a rock sample 1, which can be quality For the hard granite, basalt or andesite igneous rock, the rock sample 1 is cut, ground and polished, and the rock sample is cut into rock flake sample 1a, and the thickness of the rock flake sample 1a is processed to 0.03~0.5 Millimeter (mm), and then ground and polished into a flat rock flake sample 1a.

汙染擴散步驟s12:在實驗室中先將切割研磨後,表面平整之岩 石薄片樣品1a進行水飽和處理7~30天,待該岩石薄片樣品1a完成水飽和後,再將其浸泡於濃度大於0.001M之汙染物7~30天進行汙染擴散形成岩石薄片汙染樣品1b。 Pollution diffusion step s12: After cutting and grinding in the laboratory, the rock with a smooth surface The rock flake sample 1a is subjected to water saturation treatment for 7-30 days. After the rock flake sample 1a is saturated with water, it is immersed in a pollutant with a concentration greater than 0.001M for 7-30 days for pollution diffusion to form a rock flake pollution sample 1b.

無汙染切割步驟s13:在該岩石薄片汙染樣品1b背面貼上玻璃 片2,切片過程採用鑽石刀划切或雷射劃片方式切割該玻璃片2端,該鑽石刀划切係利用樣品的脆性、抗張應力低及有殘餘應力之特性,在切割處加一刻痕,使局部應力集中,達成折斷;該雷射劃片係利用高能量密度雷射在脆性材料的玻璃片2表面進行掃描,使材料受熱蒸發出一條小槽,然後施加一定壓力,使該玻璃片2沿小槽處裂開。切割完成之岩石薄片汙染樣品1b可完整黏於該玻璃片2上不易碎裂,本方法可以確保樣品達成減少切面上的重新分布或汙染。 Non-polluting cutting step s13: paste glass on the back of the rock flake contaminated sample 1b Sheet 2, the slicing process uses a diamond knife scribing or laser scribing method to cut the 2 ends of the glass sheet. The diamond knife scribing utilizes the brittleness, low tensile stress and residual stress characteristics of the sample, and adds a moment to the cut. This laser scribing system uses a high-energy density laser to scan the surface of the glass sheet 2 of the brittle material, so that the material is heated to evaporate a small groove, and then a certain pressure is applied to make the glass Piece 2 splits along the small groove. The cut rock slice contaminated sample 1b can be completely adhered to the glass sheet 2 and not easily broken. This method can ensure that the sample can achieve the reduction of redistribution or pollution on the cut surface.

掃描分析斷面步驟s14:對切片處理後之岩石薄片汙染樣品1b 剖面進行掃描式電子顯微鏡(SEM)分析汙染樣品剖面區域影像,輔以感應耦合電漿原子放射光譜分析(ICP-AES)或感應耦合電漿質譜儀(ICP-MS)鑑定出光譜確認分析汙染樣品元素組成,最終以掃描式電子顯微鏡結合能量散佈分析儀器(SEM-EDS)分析汙染樣品剖面區域特定汙染物元素,當該能量散佈分析儀器與該些影像工具結合到一起時,可以提供直徑小至nm的區域進行元素分析,進行樣品的影像掃描與分析。如第3圖所示,圖中黑點為汙染物元素分布,藉由利用電子束所激發的特性X-射線來進行該岩石薄片汙染樣品1b的元素分布分析,判別樣品基質與該岩石薄片汙染樣品1b的元素分布分析,分析推測汙染物元素於該岩石薄片汙染樣品內的擴散程度,繪製出成像區域汙染物元素的橫向分布,亦可應用於用過核子燃料最終處置核種遷移評估之實驗研究。如是,藉由上述揭露之流程構成一全新之。 Scanning and analyzing section step s14: contaminate the sample 1b of the rock slice after the slice processing Scanning electron microscopy (SEM) analysis of the profile of the contaminated sample profile area image, supplemented by inductively coupled plasma atomic emission spectrometry (ICP-AES) or inductively coupled plasma mass spectrometry (ICP-MS) to identify the spectrum to confirm the analysis of the contaminated sample The element composition is finally analyzed by scanning electron microscope combined with energy dispersion analysis instrument (SEM-EDS) to analyze specific pollutant elements in the section area of the contaminated sample. When the energy dispersion analysis instrument is combined with these imaging tools, the diameter can be as small as Elemental analysis is performed in the nm region, and image scanning and analysis of the sample are performed. As shown in Figure 3, the black dots in the figure are the distribution of pollutants. The characteristic X-rays excited by the electron beam are used to analyze the element distribution of the rock flake contamination sample 1b to distinguish the sample matrix and the rock flake contamination. The element distribution analysis of sample 1b analyzes the degree of diffusion of pollutant elements in the rock flake contamination sample, and plots the horizontal distribution of pollutant elements in the imaging area. It can also be applied to the experimental study of nuclear species migration evaluation for the final disposal of used nuclear fuel. . If so, the above-mentioned disclosure process constitutes a brand new one.

以下實施例僅舉例以供了解本發明之細節與內涵,但不用於限制 本發明之申請專利範圍。 The following examples are only examples for understanding the details and connotation of the present invention, but not for limitation The scope of patent application of the present invention.

於一具體實施例中,取得岩石樣品1以花崗岩為例。當運用時, 首先執行花崗岩前處理製作,進行切割、研磨、及拋光等步驟,加工其岩石薄片樣品1a厚度至0.03mm。在實驗室中先將切割研磨後,表面平整之岩石薄片樣品1a進行水飽和處理7天,花崗岩的岩石薄片樣品1a完成水飽和後,浸泡於含金膠體之溶液,將其浸泡處理7天形成岩石薄片汙染樣品1b後,再進行後續切片。樣品切片步驟中,首先要在該岩石薄片汙染樣品1b背面貼上玻璃片2,切片過程採用鑽石刀划切或雷射劃片方式切割該玻璃片2端,其中鑽石刀划切係利用樣品的脆性、抗張應力低及有殘餘應力之特性,在切割處加一刻痕,造成局部應力集中,即可折斷;該雷射劃片係利用高能量密度的雷射在脆性材料的表面進行掃描,使材料受熱蒸發出一條小槽,然後施加一定壓力,脆性材料就會沿小槽處裂開。切割完成之岩石薄片汙染樣品1b可完整黏於玻璃片2上不易碎裂,此方法可以確保樣品減少切面上的重新分布或汙染。待樣品切片處理後,後續針對要分析之岩石薄片汙染樣品剖面進行掃描式電子顯微鏡分析汙染樣品剖面區域組成畫面,輔以感應耦合電漿原子放射光譜分析或感應耦合電漿質譜儀鑑定出光譜確認分析汙染樣品元素組成,最終以掃描式電子顯微鏡結合能量散佈分析儀器分析汙染樣品剖面區域特定汙染物元素,當該能量散佈分析儀器與該些影像工具結合到一起時,可以提供直徑小至nm的區域進行元素分析。電子束對汙染樣品的撞擊會產生汙染樣品元素的特性X-射線,能量散佈分析儀器分析可用於確定單點的元素成分,可分析膠體金於花崗岩內的擴散情況,繪製出成像區域金元素的橫向濃度分布圖,經過溶質的擴散行為以菲克(Fick)定律表示,溶質在多孔介質中的擴散行為使用Fick第二定律(在介質中的一維擴散方程式),藉由方程式可求得擴散係數,可求得20nm金膠體在花崗岩上的擴散係數參數範圍在10 -16m 2/s至10 -17m 2/s。 In a specific embodiment, the obtained rock sample 1 is granite as an example. When in use, first perform granite pre-processing, cutting, grinding, and polishing steps, and process the rock flake sample 1a to a thickness of 0.03mm. After cutting and grinding in the laboratory, the rock flake sample 1a with a flat surface is subjected to water saturation treatment for 7 days. After the granite rock flake sample 1a is saturated with water, it is immersed in a gold-containing colloid solution and formed by immersion treatment for 7 days. After the rock flakes contaminate the sample for 1b, follow-up sectioning is performed. In the sample slicing step, the glass sheet 2 must be attached to the back of the rock flake contaminated sample 1b. The slicing process uses a diamond knife scribing or laser scribing method to cut the 2 ends of the glass sheet, and the diamond knife scribing is based on the sample. The characteristics of brittleness, low tensile stress and residual stress, add a notch to the cutting place, causing local stress concentration, and then it can be broken; this laser scribing system uses a high-energy density laser to scan the surface of brittle materials. The material is heated to evaporate into a small groove, and then a certain pressure is applied, and the brittle material will crack along the small groove. The cut rock flake contaminated sample 1b can be completely adhered to the glass flake 2 and will not break easily. This method can ensure that the sample reduces redistribution or contamination on the cut surface. After the sample is sliced and processed, follow-up scanning electron microscope analysis of the contaminated sample section of the rock slice to be analyzed is performed to analyze the composition of the contaminated sample section area, supplemented by inductively coupled plasma atomic emission spectroscopy or inductively coupled plasma mass spectrometer to identify the spectrum confirmation Analyze the element composition of the contaminated sample, and finally analyze the specific pollutant elements in the cross-sectional area of the contaminated sample with a scanning electron microscope combined with an energy dispersion analysis instrument. When the energy dispersion analysis instrument is combined with these imaging tools, it can provide diameters as small as nm Elemental analysis of the area. The impact of the electron beam on the contaminated sample will produce the characteristic X-ray of the contaminated sample element. The energy dispersion analysis instrument analysis can be used to determine the elemental composition of a single point. It can analyze the diffusion of colloidal gold in the granite and map out the gold element in the imaging area. Lateral concentration distribution diagram. The diffusion behavior of the solute is expressed by Fick's law. The diffusion behavior of the solute in the porous medium uses Fick's second law (one-dimensional diffusion equation in the medium). The diffusion can be obtained by the equation It can be calculated that the diffusion coefficient of 20nm gold colloid on granite ranges from 10 -16 m 2 /s to 10 -17 m 2 /s.

藉此,本發明主要乃利用掃描式電子顯微鏡結合能量散佈分析儀 器分析切割過的岩石或地質樣品剖面,先針對表面進行掃描式電子顯微鏡分析樣品表面影像分析,輔以感應耦合電漿原子放射光譜分析或感應耦合電漿質譜儀鑑定出光譜確認分析汙染樣品元素組成,最終以能量散佈分析儀器掃描,繪製出成像區域汙染物元素的橫向分布,確保放射性汙染物可以於實驗室內進行地質材料的擴散行為研究。 Therefore, the present invention mainly uses scanning electron microscope combined with energy dispersion analyzer Analyze the cut rock or geological sample section, first perform scanning electron microscope analysis on the surface of the sample surface image analysis, supplemented by inductively coupled plasma atomic emission spectroscopy or inductively coupled plasma mass spectrometer to identify spectra confirmation analysis of contaminated sample elements The composition is finally scanned with an energy dispersion analysis instrument to map the horizontal distribution of pollutant elements in the imaging area, ensuring that radioactive pollutants can be studied in the laboratory for the diffusion behavior of geological materials.

綜上所述,本發明係一種以掃描式電子顯微鏡暨能量散佈分析評 估汙染物於完整岩石基質擴散之分析方法,可有效改善習用之種種缺點,可應用於用過核子燃料最終處置放射性汙染物質於岩石的擴散研究、環保及工業汙染擴散鑑定分析方面,進而使本發明之產生能更進步、更實用、更符合使用者之所須,確已符合發明專利申請之要件,爰依法提出專利申請。 In summary, the present invention is a scanning electron microscope and energy dispersion analysis evaluation The analysis method for estimating the diffusion of pollutants in the complete rock matrix can effectively improve the various shortcomings of the conventional use. It can be applied to the study of the diffusion of radioactive contaminants in the rock, environmental protection and industrial pollution diffusion identification and analysis of the used nuclear fuel. The creation of an invention can be more advanced, more practical, and more in line with the needs of users, and it has indeed met the requirements of an invention patent application, and a patent application is filed in accordance with the law.

惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定 本發明實施之範圍;故,凡依本發明申請專利範圍及發明說明書內容所作之簡單的等效變化與修飾,皆應仍屬本發明專利涵蓋之範圍內。 However, the above are only the preferred embodiments of the present invention, and should not be limited by this The scope of implementation of the present invention; therefore, all simple equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the content of the description of the invention should still fall within the scope of the patent of the present invention.

1:岩石樣品 1a:岩石薄片樣品 1b:岩石薄片汙染樣品 2:玻璃片 s11~s14:步驟 1: Rock samples 1a: Rock slice sample 1b: Rock flake contamination sample 2: Glass sheet s11~s14: steps

第1圖,係本發明分析方法之流程示意圖。 第2圖,係本發明無汙染切割之流程示意圖。 第3圖,係本發明分析方法之影像解析示意圖。 Figure 1 is a schematic flow diagram of the analysis method of the present invention. Figure 2 is a schematic diagram of the pollution-free cutting process of the present invention. Figure 3 is a schematic diagram of image analysis of the analysis method of the present invention.

1:岩石樣品 1: Rock sample

1a:岩石薄片樣品 1a: Rock flake sample

1b:岩石薄片汙染樣品 1b: Rock flake contamination sample

2:玻璃片 2: glass sheet

s11~s14:步驟 s11~s14: steps

Claims (4)

一種以掃描式電子顯微鏡暨能量散佈分析評估汙染物於完整岩石基質擴散之分析方法,其至少包含下列步驟:樣品前處理步驟:取得一岩石樣品,將該岩石樣品進行切割、研磨及拋光之前處理加工,對該岩石樣品切割為岩石薄片樣品中,加工該岩石薄片樣品厚度至0.03~0.5毫米(mm),再經過研磨及拋光處理成表面平整之岩石薄片樣品;汙染擴散步驟:將表面平整之岩石薄片樣品先進行水飽和處理,再將其浸泡汙染物進行汙染擴散形成岩石薄片汙染樣品;無汙染切割步驟:在該岩石薄片汙染樣品背面貼上玻璃片,切片過程採用鑽石刀划切或雷射劃片方式切割該玻璃片端,該鑽石刀划切係在切割處加一刻痕,使局部應力集中,達成折斷,而該雷射劃片係以高能量密度雷射在脆性材料的玻璃片表面進行掃描,使材料受熱蒸發出一條小槽,然後施加一定壓力,使該玻璃片沿小槽處裂開,使切割完成之岩石薄片汙染樣品可完整黏於該玻璃片上不易碎裂,達成減少切面上的重新分布或汙染;以及掃描分析斷面步驟:對切片處理後之岩石薄片汙染樣品剖面進行掃描式電子顯微鏡(SEM)分析汙染樣品剖面區域影像,輔以感應耦合電漿原子放射光譜分析(ICP-AES)或感應耦合電漿質譜儀(ICP-MS)鑑定出光譜確認分析汙染樣品元素組成,最終以掃描式電子顯微鏡結合能量散佈分析儀器(SEM-EDS)分析汙染樣品剖面區域特定汙染物元素,當該能量散佈分析儀器與該些影像工具結合到一起時,可以提供直徑小至nm的區域進行元素分 析,進行樣品的影像掃描與分析,藉由利用電子束對汙染樣品的撞擊會產生汙染樣品元素的特性X-射線,可用於確定單點的元素成分,分析汙染物元素於該岩石薄片汙染樣品內的擴散程度,繪製出成像區域汙染物元素的橫向濃度分布圖。 An analysis method for evaluating the diffusion of pollutants in an intact rock matrix by scanning electron microscope and energy dispersive analysis, which at least includes the following steps: Sample pretreatment step: Obtain a rock sample, and process the rock sample before cutting, grinding and polishing Processing, cutting the rock sample into rock flake samples, processing the rock flake sample to a thickness of 0.03~0.5 millimeters (mm), and then grinding and polishing to form a rock flake sample with a flat surface; pollution diffusion step: flatten the surface The rock flake samples are first saturated with water, and then the contaminants are soaked for contamination and diffusion to form rock flake contaminated samples; non-polluting cutting steps: a glass flake is pasted on the back of the rock flake contaminated sample, and the slicing process is cut with a diamond knife or thunder The end of the glass piece is cut by shooting scribing. The diamond knife scribing system adds a notch to the cutting position to concentrate local stress and achieve breakage. The laser scribing system uses high-energy density lasers on the surface of the glass sheet of brittle materials. Scanning, heat the material to evaporate into a small groove, and then apply a certain pressure to crack the glass sheet along the small groove, so that the cut rock flake contaminated sample can be completely adhered to the glass sheet and is not easy to break, reducing the cut surface Redistribution or contamination on the surface; and scanning analysis section steps: Scanning electron microscopy (SEM) analysis of the contaminated sample section area image of the contaminated sample section of the rock slice after the slicing process, supplemented by inductively coupled plasma atomic emission spectroscopy ( ICP-AES) or Inductively Coupled Plasma Mass Spectrometer (ICP-MS) identified the spectra to confirm and analyze the elemental composition of the contaminated sample, and finally analyzed the specific pollutants in the section of the contaminated sample with scanning electron microscope combined with energy dispersive analysis instrument (SEM-EDS) When the energy dispersion analysis instrument is combined with these imaging tools, it can provide an area as small as nm in diameter for element analysis. Analyze, perform image scanning and analysis of the sample. By using the electron beam to collide with the contaminated sample, the characteristic X-ray of the contaminated sample element will be generated, which can be used to determine the element composition of a single point and analyze the contaminant element in the rock flake contaminated sample The degree of diffusion in the imaging area draws the horizontal concentration distribution map of the pollutant elements in the imaging area. 依申請專利範圍第1項所述之以掃描式電子顯微鏡暨能量散佈分析評估汙染物於完整岩石基質擴散之分析方法,其中,該岩石樣品係為質地堅硬之花崗岩、玄武岩或安山岩之火成岩。 According to the first item of the scope of patent application, scanning electron microscope and energy dispersive analysis are used to evaluate the diffusion of pollutants in a complete rock matrix, wherein the rock sample is igneous rock of hard granite, basalt or andesite. 依申請專利範圍第1項所述之以掃描式電子顯微鏡暨能量散佈分析評估汙染物於完整岩石基質擴散之分析方法,其中,該岩石薄片樣品進行水飽和處理之時間為7~30天。 According to the first item of the scope of patent application, the scanning electron microscope and energy dispersive analysis method is used to evaluate the diffusion of pollutants in the intact rock matrix, wherein the water saturation treatment time for the rock flake samples is 7 to 30 days. 依申請專利範圍第1項所述之以掃描式電子顯微鏡暨能量散佈分析評估汙染物於完整岩石基質擴散之分析方法,其中,該岩石薄片樣品係浸泡於濃度大於0.001M之汙染物,其浸泡時間為7~30天。 According to the first item of the scope of patent application, scanning electron microscope and energy dispersive analysis are used to evaluate the diffusion of pollutants in the intact rock matrix, wherein the rock flake sample is immersed in pollutants with a concentration greater than 0.001M. The time is 7 to 30 days.
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CN102037492A (en) * 2008-05-23 2011-04-27 澳大利亚国立大学 Image data processing
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CN109804272A (en) * 2016-07-28 2019-05-24 南洋理工大学 Device for Electromagnetic Wave Detection

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102037492A (en) * 2008-05-23 2011-04-27 澳大利亚国立大学 Image data processing
CN104931646A (en) * 2014-03-23 2015-09-23 阿斯派克国际(2015)私人有限公司 Means and methods for multimodality analysis and processing of drilling mud
CN109804272A (en) * 2016-07-28 2019-05-24 南洋理工大学 Device for Electromagnetic Wave Detection

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