TWI714149B - Temperature controlling circuit and temperature controlling system - Google Patents

Abstract

The invention discloses a temperature controlling circuit and a temperature controlling system. The temperature controlling circuit comprises N power sources and a current controlling unit. The N power sources are serially coupled and located at a current path between a high voltage end and a low voltage end. The current controlling unit, serially coupled with the N power sources, modulates a heating current in the current path according to a current setting voltage. Cross voltage of the current controlling unit is defined as a second voltage difference determined by the cross voltages of the N power sources and the first voltage difference between the high voltage end and the low voltage end. The heat generated by the i-th power source relates to the heating current and its cross voltage, and the heat generated by the current controlling unit relates to the heating current and the second voltage difference.

Description

Temperature control circuit and temperature control system

The present invention relates to a temperature control circuit and a temperature control system, in particular to a temperature control circuit and a temperature control system that use a voltage source or a current source for heating.

In order to ensure the quality of electronic components, all electronic components need to be fully tested before they are shipped. In practice, the operating performance of most electronic components will be affected by ambient temperature. For example, passive components may have different impedance characteristics at different ambient temperatures, or light-emitting diodes (LED or OLED, etc.) may have different ambient temperatures. There may be different color temperatures. In addition, the service life of electronic components may also change significantly due to long-term operation in a high-temperature environment. Therefore, in the process of testing electronic components, it is often necessary to heat the testing machine to check the working conditions of the electronic components under various ambient temperatures.

In order to heat the test machine, a temperature control circuit is generally installed on the test machine. The temperature control circuit is usually composed of several resistors, and utilizes the characteristic that the resistors will generate heat after passing current, and have the effect of changing the ambient temperature. However, due to widespread manufacturing errors in resistors, it is not easy for engineers to control the amount of heat generated by each resistor, so that traditional temperature control circuits often suffer from uneven heating. In addition, in the traditional temperature control circuit, the ohmic value selected for the resistance is determined in advance. If there is uneven heating, it cannot be corrected in time, and it lacks a dynamic adjustment mechanism. Therefore, the industry needs a new temperature control circuit. In addition to being able to uniformly heat each position in the temperature control circuit, it also hopes to have the opportunity to dynamically adjust the heat generation of individual positions.

The present invention provides a temperature control circuit that utilizes multiple voltage sources and current control units to generate heat at the same time. Because multiple voltage sources and current control units all contain active components that can be controlled, the temperature control circuit can evenly generate heat and realize the function of dynamic adjustment.

The present invention provides a temperature control circuit. The temperature control circuit includes N voltage sources and current control units. The N voltage sources are coupled in series in the current path between the high voltage terminal and the low voltage terminal, the i-th voltage source of the N voltage sources is set with the i-th cross voltage, and the high voltage terminal is connected to the There is a first voltage difference between the low voltage terminals. The current control unit is coupled to the N voltage sources in series for adjusting the heating current flowing in the current path according to the current setting voltage. The current control unit has a second voltage difference, and the second voltage difference is determined by the first voltage difference and the first voltage difference. The voltage from 1 to the Nth is determined. The thermal energy emitted by the i-th voltage source is related to the heating current and the i-th cross-voltage, and the thermal energy emitted by the current control unit is related to the heating current and the second voltage difference. N is a natural number, and i is a natural number not greater than N.

In some embodiments, the i-th voltage source may include a voltage setting unit and an active element. The voltage setting unit is used for setting a reference value and a driving signal, and the reference value is used for determining the i-th cross voltage. The active element is coupled to the voltage setting unit, and the active element is coupled in series in the current path, controlled by the driving signal to selectively turn on or off the current path. When the active element conducts the current path, the active element is used to emit thermal energy, and the emitted thermal energy is related to the heating current and the i-th cross-voltage. In addition, the temperature control circuit may further include a plurality of temperature detection units and temperature control units. The plurality of temperature detection units are used for detecting the temperature in the plurality of heating regions, and accordingly generate a plurality of temperature detection signals. The temperature control unit is coupled to the plurality of temperature detection units and the current control unit, and is used to compare the plurality of temperature detection signals with the temperature reference signal to determine the current setting voltage accordingly.

In some embodiments, the temperature control unit may be further coupled to the plurality of N voltage sources, and the temperature control unit is further used to determine the reference value set by the voltage setting unit in each voltage source. In addition, the N voltage sources and current control units are arranged on the same surface in a first pattern, and the first pattern is a symmetrical pattern.

The present invention provides a temperature control circuit that uses multiple current sources to generate heat, and detects the temperature of each position, so as to control the heat generation of active components in each current source. Thereby, the temperature control circuit can effectively control the heat generation of each current source.

The present invention provides a temperature control circuit. The temperature control circuit includes a plurality of current sources, a plurality of temperature detection units, and a temperature control unit. The multiple current sources are coupled in parallel between the high voltage terminal and the low voltage terminal, and each current source has an active element, and the active element adjusts the heating current flowing through it according to the driving signal. The plurality of temperature detection units are used for detecting the temperature in the plurality of heating regions, and accordingly generate a plurality of temperature detection signals. The temperature control unit is coupled to the plurality of temperature detection units and the plurality of current sources, and is used to compare the plurality of temperature detection signals with a temperature reference signal to determine a driving signal of each current source. There is a first voltage difference between the high voltage terminal and the low voltage terminal, and the thermal energy emitted by each current source is related to the heating current and the first voltage difference.

The present invention provides a temperature control system, which uses a plurality of heaters to heat a carrier. Because each heater contains active components that can be controlled, the temperature control system can effectively control the temperature of each position on the stage.

The present invention provides a temperature control system. The temperature control system includes a carrier and a plurality of heaters. The carrier has a bearing surface, and a plurality of heating areas are defined on the bearing surface. The plurality of heaters are arranged on the heating plate, the heating plate is adjacent to the bearing surface, and the plurality of heaters are coupled between the high voltage terminal and the low voltage terminal for providing heat energy to the plurality of heating regions . Each heater has an active element, and each heater determines the cross voltage of the active element at least according to a reference value, or at least determines the heating current of the active element according to the current setting voltage, and the heat energy emitted by each heater is related to Cross voltage and heating current.

In summary, the temperature control circuit and temperature control system provided by the present invention can be composed of multiple heaters with active elements, and the multiple heaters can generate heat at the same time. By controlling the active components in the heater, the temperature control circuit and the temperature control system can evenly generate heat and realize the function of dynamic adjustment. In addition, the temperature control circuit and the temperature control system can also detect the temperature of multiple heating zones, thereby controlling the heating value of the active element in each heater.

The features, objectives and functions of the present invention will be further disclosed below. However, the following are only examples of the present invention, and should not be used to limit the scope of the present invention, that is, all equivalent changes and modifications made in accordance with the scope of the patent application of the present invention will still be the essence of the present invention. Without departing from the spirit and scope of the present invention, it should be regarded as a further embodiment of the present invention.

Please refer to FIG. 1. FIG. 1 is a functional block diagram of a temperature control circuit according to an embodiment of the present invention. As shown in FIG. 1, the temperature control circuit 1 exemplified in this embodiment may include a plurality of voltage sources 10, a current control unit 12, a temperature detection unit 14 and a temperature control unit 16. Here, the temperature control circuit 1 uses the voltage source 10 and the current control unit 12 to generate heat at the same time, so that the objects around the voltage source 10 and the current control unit 12 are affected by heat radiation to achieve the effect of heating the objects. This embodiment does not limit the shape and size of the voltage source 10 and the current control unit 12, nor does it limit the installation positions of the voltage source 10 and the current control unit 12, as long as the voltage source 10 and the current control unit 12 can be used for heating at the same time, namely It belongs to the scope of the temperature control circuit 1 of this embodiment. In practice, the temperature control circuit 1 can be used to heat the electronic components on the stage (not shown in FIG. 1), so that other testing devices can be used to detect the working conditions of the electronic components under various ambient temperatures.

Taking the example shown in FIG. 1 as an example, in the structure of the temperature control circuit 1, a plurality of voltage sources 10 and a current control unit 12 are coupled in series in the same current path, and the current path refers to The electric energy transfer path from the high-voltage terminal V1 to the low-voltage terminal V2. Since the multiple voltage sources 10 and the current control unit 12 are connected in series, it can be seen that the current flowing through the multiple voltage sources 10 will also flow through the current control unit 12, that is, the current flowing through the voltage source 10 and the current control unit 12 The current (heating current) should be the same. In addition, this embodiment does not limit the actual voltage range of the high-voltage terminal V1 and the low-voltage terminal V2, as long as there is a voltage difference (first voltage difference) between the high-voltage terminal V1 and the low-voltage terminal V2, it conforms to the Definition of the high voltage terminal V1 and the low voltage terminal V2. Those with ordinary knowledge in the technical field should understand that the voltage difference between the high voltage terminal V1 and the low voltage terminal V2 is equal to the cross voltage of each voltage source 10 plus the cross voltage of the current control unit 12 (the second voltage Difference) sum. In other words, the first voltage difference can be related to the number of voltage sources 10 connected in series in the current path. Assuming that the voltage across each voltage source 10 is the same, a person with ordinary knowledge in the relevant technical field should understand that the greater the number of voltage sources 10, the greater the first voltage difference is likely to be.

In addition, the thermal energy generated by the voltage source 10 and the current control unit 12 is related to the respective operating power of the voltage source 10 and the current control unit 12. In practice, the operating power can usually be represented by the product of voltage and current. The so-called voltage refers to the voltage across the voltage source 10 or the current control unit 12, and the current refers to the voltage flowing through the voltage source 10 or the current control unit. 12 heating current. Therefore, it can be seen that the thermal energy emitted by each voltage source 10 should be related to the current (heating current) flowing through the voltage source 10 and the cross-voltage of the voltage source 10, and the thermal energy emitted by the current control unit 12 is also related to the current flowing through. The current of the control unit 12 (heating current) and the voltage across the current control unit 12 (the second voltage difference). In terms of actual operation, assuming that the temperature control circuit 1 requires multiple voltage sources 10 and current control units 12 to emit the same thermal energy, the voltage sources 10 and current control units 12 can be set to the same operating power.

As mentioned above, since the heating current flowing through each voltage source 10 is approximately the same, as long as the cross voltage of each voltage source 10 is set to be the same, the operating power (the product of the cross voltage and the heating current) will be The same, that is, multiple voltage sources 10 connected in series should be able to emit the same heat energy. As for the current control unit 12, because the current control unit 12 is also connected in series in the same current path, the current (heating current) flowing through the voltage source 10 and the current control unit 12 should be the same. At this time, although the current control unit 12 is not a voltage source, there is no way to directly set the value of the cross voltage, but since the voltage difference (first voltage difference) between the high voltage terminal V1 and the low voltage terminal V2 is known, only the first The voltage difference minus the sum of the voltage across all voltage sources 10 can still simply calculate the voltage across the current control unit 12 (the second voltage difference). In one example, if the cross voltage of the current control unit 12 is the same as the cross voltage of each voltage source 10, the multiple voltage sources 10 and the current control unit 12 can emit the same thermal energy.

For example, assuming that the first voltage difference between the high voltage terminal V1 and the low voltage terminal V2 is 12V, four voltage sources 10 and one current control unit 12 are coupled in series in the current path. If the cross voltage of each voltage source 10 is 2.4V, the sum of the cross voltages of the four voltage sources 10 is 9.6V. At this time, subtracting the total cross voltage of 9.6V from the first voltage difference 12V, it can be seen that the cross voltage of the current control unit 12 is 2.4V (the same as the cross voltage of a single voltage source 10). It can be seen that if each voltage source 10 and current control unit 12 are regarded as a heater, as long as the first voltage difference is evenly distributed to each heater, all heaters can emit the same heat energy. Of course, this embodiment is not limited to multiple voltage sources 10 and current control units 12 generating the same heat energy. In practice, some voltage sources 10 or current control units 12 may be required to generate different heat energy.

In order to further explain the voltage source 10 exemplified in this embodiment, please refer to FIG. 1 and FIG. 2 together. FIG. 2 is a functional block diagram of the voltage source according to an embodiment of the present invention. As shown in the figure, Fig. 2 shows the internal structure of one of the voltage sources 10 in Fig. 1. The two ends of the voltage source 10 can be represented as node A and node B, and the voltage difference between node A and node B is the voltage Trans-voltage of source 10. In an example, the node A can be used to connect to the node B of the previous voltage source 10, and the node B can be used to connect to the node A of the next voltage source 10. Of course, if it is the first voltage source 10, the node A of the first voltage source 10 can be connected to the high voltage terminal V1, and the node B of the first voltage source 10 can be connected to the second voltage source Node A of 10. If it is the last voltage source 10, the node A of the last voltage source 10 can be connected to the node B of the previous voltage source 10, and the node B of the last voltage source 10 can be connected to the current control unit 12. It is worth mentioning that although FIG. 1 shows that the current control unit 12 is connected in series after a plurality of voltage sources 10, in fact, this embodiment does not limit the arrangement order of the current control unit 12, for example, the current control unit 12 is also It can be connected in series between multiple voltage sources 10.

In addition, the voltage source 10 shown in FIG. 2 may include a voltage setting unit 100, an active element 102, and a voltage dividing unit 104, and the voltage setting unit 100, the active element 102, and the voltage dividing unit 104 may be coupled in parallel at node A. To node B. The voltage setting unit 100 is used to set a reference value and a driving signal. The reference value can be provided to the voltage dividing unit 104, and the voltage dividing unit 104 determines the voltage difference between node A and node B (the voltage across the voltage source 10) . In practice, the voltage setting unit 100 may be an integrated circuit component or a chip, and the reference value and the value of the driving signal may be preset, or it may receive the reference value and the driving signal indicated by the outside, which is not limited in this embodiment.

The active element 102 can be a bipolar transistor (BJT) or a field effect transistor (MOSFET), and can be controlled by the voltage setting unit 100. The driving signal given by the voltage setting unit 100 can be different according to different active components 102. For example, the voltage setting unit 100 can give a driving current to control a bipolar transistor, or the voltage setting unit 100 can give a driving voltage to control a field effect voltage. Crystal. Taking the active element 102 as a pnp type bipolar transistor as an example, the base of the active element 102 can be connected to the voltage setting unit 100 to receive a driving signal (for example, a current used to drive a BJT). The emitter of the element 102 may be connected to node A, and the collector of the active element 102 may be connected to node B. When the base of the active element 102 receives the driving signal heating current from the voltage setting unit 100 and turns on, almost all the heating current will flow through the active element 102. In practice, the voltage setting unit 100 and the partial voltage can be ignored. Cell 104 current. In other words, the voltage source 10 provides thermal energy through the active element 102, and the thermal energy provided by the active element 102 is related to the voltage difference between node A and node B (the voltage across the voltage source 10) and the heating current. .

In addition, the voltage dividing unit 104 may determine the voltage difference between the node A and the node B according to the reference value. Assuming that the voltage divider unit 104 is composed of two resistors in series, as long as the reference value is given between the two resistors in series, a person with ordinary knowledge in the technical field should be able to reverse the voltage between node A and node B. difference. Of course, this embodiment does not limit the voltage divider unit 104 to be composed of two resistors in series, as long as the voltage divider unit 104 can determine the voltage difference between node A and node B according to a reference value, it belongs to the category of the voltage source 10 of this embodiment. . In one example, the engineer can control the voltage setting unit 100 to give different reference values, that is, the voltage difference between the node A and the node B can be adjusted, that is, the voltage across the voltage source 10 can be changed. Of course, the voltage divider unit 104 may also include a programmable variable resistor. Even if the reference value is unchanged, the engineer can also control the resistance value of the variable resistor to change the inversely derived voltage difference between node A and node B. , That is, the voltage across the voltage source 10 can be changed.

Please continue to refer to FIG. 1. The current control unit 12 shown in FIG. 1 can be controlled by the current setting voltage to adjust the heating current flowing in the current path. In practice, the current control unit 12 may be a power switch, such as a field effect transistor. Those with ordinary knowledge in the relevant technical field should understand that the current of the field effect transistor is related to the voltage of the gate (or control electrode). For example, the greater the current setting voltage, the greater the heating current. In addition, this embodiment does not limit the temperature control circuit 1 to have a temperature detection unit 14 and a temperature control unit 16. In other words, the current setting voltage can be provided by the temperature control unit 16 shown in FIG. 1. Of course, the current setting voltage can also be preset, so that the temperature detection unit 14 and the temperature control unit 16 are not needed. Taking the example shown in FIG. 1 as an example, the temperature control circuit 1 may have one or more temperature detection units 14 arranged on the carrier (not shown in FIG. 1) to detect the carrier or the specific heating area Temperature, and then generate a temperature detection signal. Then, the temperature control unit 16 can compare the temperature detection signal with the temperature reference signal to determine the magnitude of the current setting voltage.

In one example, the temperature detecting unit 14 can be any temperature detector, for example, a thermocouple type, resistance type temperature detector, or a circuit unit composed of a thermistor, which is not limited in this embodiment. In order to accurately detect the temperature of more than one heating zone, in fact, multiple temperature detection units 14 can be used in the temperature control circuit 1 of this embodiment at the same time. In addition, the temperature detection unit 14 may also be implemented by using a camera, such as an infrared thermometer. At this time, different areas in the photographing screen can correspond to more than one heating area. In other words, the number of heating regions can be freely defined, and the number of heating regions and the number of temperature detecting units 14 may not necessarily have a corresponding relationship, so this embodiment is not limited here.

Taking the foregoing example as an example, assuming that four voltage sources 10 and one current control unit 12 are coupled in series in the current path, one or more temperature detection units 14 may be arranged in the heating area on the carrier. Here, the temperature detection signal from the temperature detection unit 14 is used to indicate the temperature of the heating area. For example, the voltage of the temperature detection signal can be used to indicate the temperature. When the temperature control unit 16 receives the temperature detection signal and determines that the temperature detection signal is less than the temperature reference signal, it indicates that the temperature of the heating area is lower than a certain threshold, so it is obviously necessary to provide more heat energy in the heating area. Accordingly, the temperature control unit 16 can increase the current setting voltage, so that the current control unit 12 can be controlled by the current setting voltage to give a larger heating current. At this time, because the heating current is increased, based on the foregoing description, it can be known that the operating power of the voltage source 10 and the current control unit 12 will also increase. In this way, the temperature control circuit 1 of this embodiment can increase the thermal energy emitted by the voltage source 10 and the current control unit 12 without changing the respective cross voltages of the voltage source 10 and the current control unit 12.

In the above-mentioned means, since the heating current is increased, it can be expected that the heat energy emitted by the temperature control circuit 1 as a whole will be increased, but this embodiment is not limited to this. For example, among a plurality of temperature detection units 14, some of the temperature detection units 14 have detected a situation of insufficient temperature, and this insufficient temperature area can correspond to a certain voltage source 10 or several voltage sources 10, this embodiment It is also possible to separately increase the thermal energy emitted by the voltage source 10 or the current control unit 12. For example, when the temperature control unit 16 determines that a part of the temperature detection signal is less than the temperature reference signal, the temperature control unit 16 may give a new reference value to the voltage source 10 corresponding to the region with insufficient temperature. For example, the temperature control unit 16 may issue a control command to the voltage setting unit 100 of the specific voltage source 10 so that the voltage setting unit 100 gives a higher reference value, thereby increasing the voltage across the specific voltage source 10. At this time, because the cross-voltage of the specific voltage source 10 is increased, based on the foregoing description, it can be known that the operating power of the voltage source 10 will also increase. In this way, the temperature control circuit 1 of this embodiment can increase the heat energy emitted by the specific voltage source 10 without changing the heating current of the voltage source 10.

Then, if the area with insufficient temperature can correspond to the current control unit 12, although the temperature control unit 16 cannot directly set the cross voltage of the current control unit 12, the temperature control unit 16 can increase the voltage source 10 and the current control unit 12 as a whole At the same time, the voltage across multiple voltage sources 10 is reduced. In detail, it can be seen from the foregoing description that because the first voltage difference remains unchanged, reducing the cross voltage of the multiple voltage sources 10 means that the cross voltage of the current control unit 12 will increase. At this time, because the voltage across the voltage source 10 is reduced, in order to avoid insufficient heat provided by the voltage source 10 causing other problems, the temperature control unit 16 can increase the heating current so that the heat energy emitted by the voltage source 10 is substantially unchanged. In addition, since the cross-voltage of the current control unit 12 is increased synchronously with the heating current, the heat energy emitted by the current control unit 12 can be quickly increased, so that the insufficient temperature area can be heated and compensated.

Although the example in FIG. 1 demonstrates that the temperature control circuit 1 generates thermal energy from multiple voltage sources 10 and current control units 12, the present invention does not limit the components that generate thermal energy. FIG. 3 is a functional block diagram of a temperature control circuit according to another embodiment of the invention. The same as FIG. 1, the temperature control circuit 2 shown in FIG. 3 may also include one or more temperature detection units 22 and temperature control units 24, and also define a high voltage terminal V1 and a low voltage terminal V2. Wherein, a plurality of temperature detection units 22 can also be arranged in a plurality of heating regions (not shown in FIG. 3) to detect the temperature in the plurality of heating regions and generate a plurality of temperature detection signals accordingly. The temperature control unit 24 can also compare the temperature detection signals with the temperature reference signal to determine the current setting voltage.

The difference from FIG. 1 is that the temperature control circuit 2 may include a plurality of current sources 20 which are coupled in parallel between the high voltage terminal V1 and the low voltage terminal V2. As described in the previous embodiment, each current source 20 may also have an active element (not shown in FIG. 3), and the active element may also include a bipolar transistor (BJT) or a field effect transistor (MOSFET), Therefore, the heating current flowing through can be adjusted according to the current setting voltage. Of course, since each current source 20 shown in FIG. 3 is coupled in parallel between the high voltage terminal V1 and the low voltage terminal V2, the voltage across each current source 20 is the first voltage difference. That is to say, if the heating current of each current source 20 is the same, each current source 20 can have the same operating power, and the temperature control circuit 2 can generate heat uniformly. If different heating currents are set between different current sources 20, the operating powers of the different current sources 20 will be different, and different current sources 20 can emit different heat energy.

In order to illustrate the application of the aforementioned temperature control circuit, please refer to Figures 4, 5 and 6 together. Figure 4 is a schematic diagram showing the architecture of a temperature control system according to an embodiment of the present invention, and Figure 5 is a schematic diagram showing the temperature control system according to an embodiment of the present invention. A schematic structural diagram of a heating plate according to an embodiment. FIG. 6 is a schematic structural diagram of a carrier according to an embodiment of the present invention. As shown in the figure, the temperature control system 3 may include a stage 30 and a heating plate 32. The stage 30 has a bearing surface 30a on which electronic components (not shown) to be tested can be placed. The heating plate 32 may be adjacent to the bearing surface 30a, or the heating plate 32 may be substantially parallel to the bearing surface 30a. If the heating plate 32 is parallel to the carrying surface 30a, when the electronic component is placed on the carrying surface 30a, the heating plate 32 can also be basically parallel to one side surface of the electronic component, so that the electronic component can be evenly heated. In addition, multiple heaters 34 may be provided on the heating plate 32, and multiple heating areas (not shown) may be defined on the carrier 30. When the number of electronic components is large, each heating area can be regarded as a place around an electronic component, which is not limited in this embodiment.

Here, this embodiment also demonstrates that more than one temperature detection unit 36 can be provided on the stage 30. In a simpler example, one temperature detection unit 36 can be used to detect the temperature in a heating area. . However, as explained in the previous embodiment, the number of temperature detecting units 36 and the number of heating regions may not actually have a corresponding relationship, and this embodiment will not be repeated here. In addition, the plurality of heaters 34 may respectively correspond to the plurality of voltage sources 10 and the current control unit 12 shown in FIG. 1, or the plurality of heaters 34 may respectively correspond to the plurality of currents shown in FIG. Source 20. This embodiment does not limit the type of heater 34 here. As long as the heater 34 contains active elements (not shown) like the voltage source 10, the current control unit 12 and the current source 20, it should conform to the heater of this embodiment. 34 categories. In other words, since the multiple voltage sources 10 and the current control unit 12 shown in FIG. 1 can use active components for heating at the same time, and the multiple current sources 20 shown in FIG. 3 also use active components for heating, Therefore, all conform to the meaning of the heater 34 in this embodiment. Here, when the heater 34 is the voltage source 10 shown in FIG. 1, it means that the heater 34 can determine the voltage across the active element by a reference value. When the heater 34 is the current control unit 12 shown in FIG. 1 or the multiple current sources 20 shown in FIG. 3, it means that the heater 34 can determine the heating current of the active element by the current setting voltage. As mentioned above, the thermal energy emitted by each heater 34 is related to the cross voltage and the heating current.

It is worth mentioning that FIG. 5 shows a form in which the heater 34 is arranged on the heating plate 32 (first, second, and third patterns), and FIG. 6 shows a temperature detecting unit 36 arranged on The form of the carrier 30. In practice, the heater 34 is roughly placed on the side of the heating plate 32 adjacent to the carrier 30, and the temperature detection unit 36 can be placed on the side of the carrier 30 adjacent to the heater 34 (carrying The surface 30a) can also be embedded in the carrier 30, and this embodiment is not limited here. The side surface may be a flat surface or a three-dimensional surface, which is not limited in this embodiment. On the other hand, in the example shown in the figure, the heaters 34 can be symmetrically arranged on the heating plate 32, and the symmetrical arrangement of the heaters 34 is beneficial to uniformly heat the heating area. In addition, the temperature detection unit 36 may also be symmetrically arranged on the stage 30, but the arrangement position of the heater 34 and the installation position of the temperature detection unit 36 may not necessarily have a corresponding relationship.

In summary, the temperature control circuit and temperature control system provided by the present invention can be composed of multiple heaters with active elements, and the multiple heaters can generate heat at the same time. By controlling the active components in the heater, the temperature control circuit and the temperature control system can evenly generate heat and realize the function of dynamic adjustment. In addition, the temperature control circuit and the temperature control system can also detect the temperature of multiple heating zones, thereby controlling the heating value of the active element in each heater.

1: Temperature control circuit 10: Voltage source 100: Voltage setting unit 102: Active component 104: Voltage dividing unit 12: Current control unit 14: Temperature detection unit 16: Temperature control unit 2: Temperature control circuit 20: Current source 22 : Temperature detection unit 24: temperature control unit 3: temperature control system 30: stage 30a : bearing surface 32: heating plate 34: heater 36: temperature detection unit V1: high voltage terminal V2: low voltage terminal

FIG. 1 is a functional block diagram of a temperature control circuit according to an embodiment of the invention.

FIG. 2 is a functional block diagram of a voltage source according to an embodiment of the invention.

FIG. 3 is a functional block diagram of a temperature control circuit according to another embodiment of the invention.

4 is a schematic diagram showing the structure of a temperature control system according to an embodiment of the present invention.

FIG. 5 is a schematic diagram showing the structure of a heating plate according to an embodiment of the invention.

FIG. 6 is a schematic diagram showing the structure of a carrier according to an embodiment of the present invention.

no

1: Temperature control circuit

10: Voltage source

12: Current control unit

14: Temperature detection unit

16: temperature control unit

V1: High voltage terminal

V2: Low voltage side

Claims (10)

A temperature control circuit includes: N voltage sources coupled in series in a current path between a high voltage terminal and a low voltage terminal, and an i-th voltage source among the N voltage sources is set with an i-th voltage source A voltage across, and a first voltage difference between the high voltage terminal and the low voltage terminal; and a current control unit, coupled to the N voltage sources in series, for adjusting the current flowing through it according to a current setting voltage A heating current in the path, the current control unit has a second voltage difference, the second voltage difference is determined by the first voltage difference and the first cross voltage to the Nth cross voltage; wherein the i-th cross voltage The thermal energy emitted by a voltage source is related to the heating current and the i-th cross-voltage, and the thermal energy emitted by the current control unit is related to the heating current and the second voltage difference. N is a natural number, and i is a natural number not greater than N. number. The temperature control circuit according to claim 1, wherein the i-th voltage source includes: a voltage setting unit for setting a reference value and a driving signal, and the reference value is used to determine the i-th cross-voltage; and An active element is coupled to the voltage setting unit, and the active element is coupled in series in the current path, controlled by the driving signal to selectively turn on or off the current path; wherein the active element turns on the current path In the current path, the active element is used to emit thermal energy, and the emitted thermal energy is related to the heating current and the first cross-voltage. The temperature control circuit described in claim 2 further includes: A plurality of temperature detection units are used to detect temperatures in a plurality of heating areas, and accordingly generate a plurality of temperature detection signals; and a temperature control unit, which is coupled to the temperature detection units and the current control unit, The temperature detection signal is compared with a temperature reference signal to determine the current setting voltage. The temperature control circuit according to claim 2, further comprising: a plurality of temperature detection units for detecting temperatures in a plurality of heating regions, and generating a plurality of temperature detection signals accordingly; and a temperature control unit coupled The temperature detection units and the voltage sources are connected to compare the temperature detection signals with a temperature reference signal to determine the reference value set by the voltage setting unit in each voltage source. The temperature control circuit according to claim 1, wherein the N voltage sources and the current control unit are arranged on the same plane in a first pattern, and the first pattern is a symmetrical pattern. A temperature control circuit includes: a plurality of current sources, coupled in parallel between a high voltage terminal and a low voltage terminal, each of the current sources has an active element, the active element adjusts the flow through according to a driving signal A heating current; a plurality of temperature detection units to detect the temperature in a plurality of heating areas, and generate a plurality of temperature detection signals accordingly; and a temperature control unit, coupled to the temperature detection units and the The current sources are used to compare the temperature detection signals with a temperature reference signal to determine the driving signal of each current source; There is a first voltage difference between the high voltage terminal and the low voltage terminal, and the thermal energy emitted by each current source is related to the heating current and the first voltage difference. The temperature control circuit according to claim 6, wherein the current sources are arranged in a second pattern on the same surface, and the second pattern is a symmetrical pattern. A temperature control system includes: a stage with a bearing surface, and a plurality of heating areas are defined on the bearing surface; and a plurality of heaters arranged on a heating plate, the heating plate being adjacent to the bearing On the other hand, the heaters are coupled between a high voltage terminal and a low voltage terminal to provide heat to the heating areas; wherein each heater has an active element, and each heater is at least according to A reference value determines a cross voltage of the active element, or at least determines a heating current of the active element according to a current setting voltage, the heat energy of each heater is provided by the active element, and each heating The thermal energy emitted by the heater is related to the cross voltage and the heating current. The temperature control system according to claim 8, further comprising: a plurality of temperature detection units for detecting the temperature in the heating areas, and thereby generating a plurality of temperature detection signals; and a temperature control unit, coupled The temperature detection units and the heaters are connected to compare the temperature detection signals with a temperature reference signal to determine the reference value or the current setting voltage of each heater. The temperature control system according to claim 8, wherein the heaters are arranged in a third pattern on the same surface, and the third pattern is a symmetrical pattern.

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