TWI710046B - Substrate container with magnetic latching assistance - Google Patents
Substrate container with magnetic latching assistance Download PDFInfo
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- TWI710046B TWI710046B TW105131524A TW105131524A TWI710046B TW I710046 B TWI710046 B TW I710046B TW 105131524 A TW105131524 A TW 105131524A TW 105131524 A TW105131524 A TW 105131524A TW I710046 B TWI710046 B TW I710046B
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Abstract
Description
本發明通常係關於基板容器及晶圓載具,且更特定言之係關於此等基板容器之門閂鎖。 The present invention generally relates to substrate containers and wafer carriers, and more specifically relates to door latches of these substrate containers.
各種習知基板容器(諸如前開式晶圓傳送盒(FOUP)及標準機械界面(SMIF)盒)包含一容器殼體,該外殼界定用於出入於此之一開口。殼體之開口通常由一框架圍繞,該框架接受一門閂鎖至框架中以形成具有殼體之一封裝體。一墊片安置於門與殼體之間以保留封裝體內微環境之完整性。 Various conventional substrate containers, such as front opening wafer transfer boxes (FOUP) and standard mechanical interface (SMIF) boxes, include a container housing that defines an opening for access. The opening of the housing is usually surrounded by a frame that receives a door latch to be locked into the frame to form an enclosure with the housing. A gasket is arranged between the door and the shell to preserve the integrity of the microenvironment in the package.
於周圍環境中可見之特定組分(諸如氧及水蒸氣)會劣化該等基板係所熟知。因此,可期望防止此等組分進入至封裝體內之微環境中。然而,若不用一惰性氣體主動加壓習知基板容器,則其將隨時間容許自環境大氣之環境組分。針對該等環境組分之一個進入點係在門與殼體之間之墊片且該殼體係一已知進入點。因此,將歡迎對在基板容器之門與殼體之間的密封配置之改良。 It is well known that certain components (such as oxygen and water vapor) visible in the surrounding environment can degrade the substrates. Therefore, it may be desirable to prevent these components from entering the microenvironment inside the package. However, if the conventional substrate container is not actively pressurized with an inert gas, it will allow environmental components from the ambient atmosphere over time. An entry point for the environmental components is the gasket between the door and the housing and the housing system has a known entry point. Therefore, improvements to the sealing arrangement between the door and the housing of the substrate container are welcome.
在本發明之各種實施例中,一基板載具包含一機械門閂鎖,其外加磁性耦合器以協助將門密封至殼體。經改良之底座可透過門密封減小滲漏 率。各種實施例改良墊片密封而未增大機械門閂鎖之複雜性。 In various embodiments of the present invention, a substrate carrier includes a mechanical door latch with a magnetic coupler to help seal the door to the housing. Improved base can reduce leakage through door seal rate. Various embodiments improve gasket sealing without increasing the complexity of the mechanical door latch.
該等磁性耦合器定位於接近機械門閂鎖之該等閂鎖位置之間位置處之門墊片的門及殼體上。當門安裝且閂鎖至殼體中時,磁性吸引在沿機械門閂鎖之閂鎖位置之間之墊片的片段處提供額外壓縮密封力抵著墊片。各種實施例將使用業界標準負載埠介面運行。在一些實施例中,凹穴(例如,藉由模具形狀或後模製機械)形成於門外殼及殼體中以減小在可操作地經耦合之磁性耦合器之間之磁性氣隙。在特定實施例中,該等經耦合之磁性耦合器並不彼此接觸,或迫使除使用門密封以外之表面進行接觸,使得磁性耦合不易於產生額外微粒。 The magnetic couplers are positioned on the door and the housing close to the door gasket at the position between the latch positions of the mechanical door latch. When the door is installed and latched into the housing, the magnetic attraction provides additional compressive sealing force against the gasket along the segment of the gasket between the latch positions of the mechanical door latch. The various embodiments will operate using the industry standard load port interface. In some embodiments, pockets (eg, by a mold shape or post-molding machinery) are formed in the door housing and housing to reduce the magnetic air gap between the operatively coupled magnetic couplers. In certain embodiments, the coupled magnetic couplers do not contact each other, or force surfaces other than the door seal to make contact, so that the magnetic coupling is not prone to generate extra particles.
習知基板載具具有機械門閂鎖,其操作以在離散閂鎖位置處將門牽引朝向容器殼體,其在門與容器殼體之間壓縮墊片。歸因於門之固有彈性,可藉由該等機械門閂鎖之制動將墊片接近該等離散閂鎖位置壓縮至一較大程度,而非在沿著遠離該等離散閂鎖位置之墊片之點處壓縮。即,該等閂鎖力並未沿墊片之長度均勻分佈。可存在在門與殼體之間之不均勻密封,其包括密封之完整性。 The conventional substrate carrier has a mechanical door latch that operates to draw the door toward the container housing at discrete latch positions, which compresses the gasket between the door and the container housing. Due to the inherent elasticity of the door, the shim close to the discrete latch positions can be compressed to a greater extent by the braking of the mechanical door latches, rather than along the shim far away from the discrete latch positions Compressed at the point. That is, the latching forces are not evenly distributed along the length of the gasket. There may be an uneven seal between the door and the housing, which includes the integrity of the seal.
結構上,在本發明之各種實施例中,一基板容器包含:一容器殼體,其具有一門框架;及一門,其座落於門框架內,門包含繞一門軸具同心性之一外周邊。一墊片可安裝至容器殼體及門框架之一者。在一些實施例中,至少一個機械門閂鎖在接近墊片之複數個離散閂鎖位置處將門閂鎖至門框架。複數個磁性耦合器可安裝至門及門框架之至少一者。藉由複數個磁性耦合器在門與門框架支架產生一整體磁性吸引力。在一些實施例中,至少一個機械門閂鎖安裝至門。在門內可安裝至少一個機械門閂鎖,且包含複數個閂鎖尖端,其透過門之外周邊延伸至門框架中以在繞門之外周邊之複 數個離散閂鎖位置處將門閂鎖於門框架。在一些實施例中,至少一個機械門閂鎖在繞門之外周邊之複數個離散閂鎖位置處將門閂鎖於門框架。在各種實施例中,複數個磁性耦合器之磁性耦合器並不彼此接觸。在一些實施例中,複數個磁性耦合器之第一複數個磁性耦合器接近門框架及在複數個離散閂鎖位置之間安裝,複數個磁性耦合器之第二複數個磁性耦合器安裝至門。複數個磁性耦合器之第二複數個磁性耦合器可與複數個磁性耦合器之第一複數個磁性耦合器實質上對準,其中在複數個磁性耦合器之第一複數個磁性耦合器與複數個磁性耦合器之第二複數個磁性耦合器之間產生整體磁性吸引力。在一些實施例中,複數個磁性耦合器之第一複數個磁性耦合器與複數個磁性耦合器之第二複數個磁性耦合器在平行於門軸之一方向上實質上對準。 Structurally, in various embodiments of the present invention, a substrate container includes: a container shell having a door frame; and a door, which is seated in the door frame, and the door includes an outer periphery that is concentric about a door shaft . A gasket can be installed to one of the container shell and the door frame. In some embodiments, at least one mechanical door latch latches the door to the door frame at a plurality of discrete latch locations close to the gasket. A plurality of magnetic couplers can be installed to at least one of the door and the door frame. A plurality of magnetic couplers generate an overall magnetic attraction between the door and the door frame bracket. In some embodiments, at least one mechanical door latch is mounted to the door. At least one mechanical door latch can be installed in the door, and includes a plurality of latch tips, which extend into the door frame through the outer periphery of the door to recirculate the outer periphery of the door. The door is latched to the door frame at several discrete latch positions. In some embodiments, at least one mechanical door latch latches the door to the door frame at a plurality of discrete latch locations around the outer periphery of the door. In various embodiments, the magnetic couplers of the plurality of magnetic couplers are not in contact with each other. In some embodiments, the first plurality of magnetic couplers of the plurality of magnetic couplers are installed close to the door frame and between the plurality of discrete latch positions, and the second plurality of magnetic couplers of the plurality of magnetic couplers are installed to the door . The second plurality of magnetic couplers of the plurality of magnetic couplers may be substantially aligned with the first plurality of magnetic couplers of the plurality of magnetic couplers, wherein the first plurality of magnetic couplers and the plurality of magnetic couplers An overall magnetic attraction force is generated between the second plurality of magnetic couplers of the two magnetic couplers. In some embodiments, the first plurality of magnetic couplers of the plurality of magnetic couplers and the second plurality of magnetic couplers of the plurality of magnetic couplers are substantially aligned in a direction parallel to the door axis.
在本發明之各種實施例中,揭示一基板容器,其包含:一容器殼體,其具有一門框架;及一門,其座落於門框架。門界定一門軸,且其包含繞門軸之一外周邊。一連續門密封安裝至容器殼體及門框架之一者。在一些實施例中,在門內安裝至少一個機械門閂鎖,且其包含複數個閂鎖尖端,閂鎖尖端透過門之外周邊延伸至門框架中以在繞門之外周邊之複數個離散閂鎖位置處將門閂鎖至門框架。一第一複數個磁性耦合器可接近門框架及在複數個離散閂鎖位置之間安裝。一第二複數個磁性耦合器可安裝至門,第二複數個磁性耦合器與第一複數個磁性耦合器在平行於門軸之一方向上實質上對準。在第一複數個磁性耦合器與第二複數個磁性耦合器之間產生一整體磁性吸引力,該整體磁性吸引力在力之一預定範圍內。在一或多個實施例中,力之預定範圍從80牛頓至140牛頓(包含80牛頓及140牛頓)。本文中,被視為「包含」之一範圍包含經陳述範圍之該等端點。 In various embodiments of the present invention, a substrate container is disclosed, which includes: a container shell having a door frame; and a door seated on the door frame. The door defines a door shaft, and it includes an outer periphery around the door shaft. A continuous door is sealed and installed to one of the container shell and the door frame. In some embodiments, at least one mechanical door latch is installed in the door, and it includes a plurality of latch tips, and the latch tips extend into the door frame through the outer periphery of the door to surround the plurality of discrete latches around the outer periphery of the door. Lock the door latch to the door frame at the lock position. A first plurality of magnetic couplers can be installed close to the door frame and between the plurality of discrete latch positions. A second plurality of magnetic couplers can be installed to the door, and the second plurality of magnetic couplers and the first plurality of magnetic couplers are substantially aligned in a direction parallel to the door axis. An overall magnetic attraction is generated between the first plurality of magnetic couplers and the second plurality of magnetic couplers, and the overall magnetic attraction is within a predetermined range of force. In one or more embodiments, the predetermined range of force is from 80 Newtons to 140 Newtons (including 80 Newtons and 140 Newtons). In this article, a range deemed to be "including" includes the endpoints of the stated range.
門框架可界定複數個凹穴,在其內安裝第一複數個磁性耦合器。在一些實施例中,第一複數個磁性耦合器包含一經磁化材料。在一些實施例中,第二複數個磁性耦合器包含一含鐵材料。第一複數個磁性耦合器之至少一些該等磁性耦合器可以接近門框架之一各自邊緣為中心,且第二複數個磁性耦合器之至少一些可以接近門之一各自邊緣為中心。 The door frame can define a plurality of cavities, in which a first plurality of magnetic couplers are installed. In some embodiments, the first plurality of magnetic couplers include a magnetized material. In some embodiments, the second plurality of magnetic couplers include a ferrous material. At least some of the first plurality of magnetic couplers may be centered near one edge of the door frame, and at least some of the second plurality of magnetic couplers may be centered near one edge of the door.
磁性屏蔽罩可係安置於基板載具之一內部腔室與第一複數個磁性耦合器及第二複數個磁性耦合器之至少一者之間。在一些實施例中,磁性屏蔽罩係由一含鐵材料製成。在一些實施例中,第一複數個磁性耦合器或第二複數個磁性耦合器之一些該等磁性耦合器包含一經磁化材料,該經磁化材料係包含於一非磁性外殼中。 The magnetic shield can be arranged between an internal cavity of the substrate carrier and at least one of the first plurality of magnetic couplers and the second plurality of magnetic couplers. In some embodiments, the magnetic shield is made of an iron-containing material. In some embodiments, some of the first plurality of magnetic couplers or the second plurality of magnetic couplers include a magnetized material contained in a non-magnetic housing.
在本發明之各種實施例中,一基板容器包含:一容器殼體,其包含一門框架;一門,其座落於門框架內,門界定一門軸及繞門軸之一外周邊;及一連續門密封,其經安裝至容器殼體及門框架之一者。在門內安裝至少一個機械門閂鎖,且其包含複數個閂鎖尖端,其透過門之外周邊延伸至門框架中,以在繞門之外周邊之複數個離散閂鎖位置處將門閂鎖至門框架。在一些實施例中,複數個磁性耦合器經安裝至容器及在複數個離散閂鎖位置之間之門之一者。一第二磁性耦合器可係安裝至容器及門之另一者,第二磁性耦合器與第一複數個磁性耦合器在平行於門軸之一方向上實質上對準。在第一複數個磁性耦合器與第二複數個磁性耦合器之間產生一磁性吸引力,磁性吸引力在力之一預定範圍內。在一些實施例中,吸引力係在50牛頓(N)至200N之間之一範圍內(包含5 0N及200N);在一些實施例中,係在80N與150N之間之範圍內(包含80N及150N);在一些實施例中,係在100N與130N之間之範圍內(包含100N及130N);在一些實施例中,係 在120N與130N之間之範圍內(包含120N及130N)。在一實施例中,吸引力之一目標值係125N。在一或多個實施例中,第一複數個磁性耦合器包含一經磁化材料,且第二磁性耦合器係一磁性材料。 In various embodiments of the present invention, a substrate container includes: a container shell that includes a door frame; a door that is seated in the door frame, the door defines a door shaft and an outer periphery around the door shaft; and a continuous The door seal is installed to one of the container shell and the door frame. At least one mechanical door latch is installed in the door, and it includes a plurality of latch tips, which extend into the door frame through the outer periphery of the door to lock the door latch to a plurality of discrete latch positions around the outer periphery of the door Door frame. In some embodiments, a plurality of magnetic couplers are mounted to one of the container and the door between the plurality of discrete latch positions. A second magnetic coupler can be installed to the other of the container and the door, and the second magnetic coupler and the first plurality of magnetic couplers are substantially aligned in a direction parallel to the door axis. A magnetic attraction is generated between the first plurality of magnetic couplers and the second plurality of magnetic couplers, and the magnetic attraction is within a predetermined range of force. In some embodiments, the attractive force is within a range between 50 Newtons (N) and 200N (including 50N and 200N); in some embodiments, the attractive force is within a range between 80N and 150N (including 80N). And 150N); in some embodiments, the range is between 100N and 130N (including 100N and 130N); in some embodiments, the Within the range between 120N and 130N (including 120N and 130N). In one embodiment, one of the target values of attraction is 125N. In one or more embodiments, the first plurality of magnetic couplers include a magnetized material, and the second magnetic coupler is a magnetic material.
在本發明之各種實施例中,製造一基板載具之一方法包含:製造一基板載具,其具有殼體及一門,門在沿一門軸之一框架內係可安裝,門包含用於將門固定至門框架之至少一個機械門閂鎖;將一墊片安裝於門與殼體之間;接近門框架安裝至少一個磁性耦合器;及將至少一個磁性耦合器安裝至門,門之至少一個磁性耦合器與門框架之至少一個磁性耦合器實質上對準。實質對準可在平行於門軸之一方向上。在一些實施例中,實質對準在平行於門軸之一方向上。在一些實施例中,於接近門框架安裝至少一個磁性耦合器之步驟中安裝的至少一個磁性耦合器係安裝於複數個離散閂鎖位置之間。方法亦包含選擇接近門框架安裝之至少一個磁性耦合器,且至少一個磁性耦合器係安裝至門,以產生在力之一預定範圍內之一整體磁性吸引力。在一實施例中,力之預定範圍自80牛頓至140牛頓(包含80牛頓及140牛頓)。 In various embodiments of the present invention, a method of manufacturing a substrate carrier includes: manufacturing a substrate carrier having a housing and a door, the door is installable in a frame along a door axis, and the door includes Fix at least one mechanical door latch to the door frame; install a gasket between the door and the housing; install at least one magnetic coupler close to the door frame; and install at least one magnetic coupler to the door, at least one magnetic The coupler is substantially aligned with at least one magnetic coupler of the door frame. The substantial alignment may be in a direction parallel to the door axis. In some embodiments, the substantial alignment is in a direction parallel to the door axis. In some embodiments, the at least one magnetic coupler installed in the step of installing at least one magnetic coupler close to the door frame is installed between a plurality of discrete latch positions. The method also includes selecting at least one magnetic coupler installed close to the door frame, and at least one magnetic coupler installed to the door to generate an overall magnetic attraction within a predetermined range of force. In one embodiment, the predetermined range of force is from 80 Newton to 140 Newton (including 80 Newton and 140 Newton).
30:基板容器 30: Substrate container
32:容器殼體 32: container shell
34:門框架 34: door frame
36:門 36: Door
37:內部腔室 37: Internal chamber
36a:前面板 36a: front panel
36b:後面板 36b: Rear panel
38:外周邊 38: outer periphery
42:門軸 42: Door shaft
43:安座表面 43: seat surface
44:墊片 44: Gasket
44a:尖端 44a: tip
45:安座表面 45: Seat surface
52:機械門閂鎖 52: Mechanical door latch
54:閂鎖尖端 54: Latch tip
56:離散閂鎖位置 56: Discrete latch position
58:磁性耦合器 58: Magnetic coupler
61:經磁化材料 61: Magnetized material
62:磁性耦合器 62: Magnetic coupler
63:非磁性外殼 63: Non-magnetic case
64:方向 64: direction
65:間隙尺寸 65: gap size
66:磁性耦合 66: Magnetic coupling
68:磁性吸引力 68: Magnetic attraction
69:總磁性吸引力 69: total magnetic attraction
71:預定範圍 71: predetermined range
74:面 74: Noodles
76:堆疊面78之部分
76: part of stacking
78:堆疊面 78: stacking surface
80:圖表 80: Chart
92:框架凹穴 92: frame cavity
94:門凹穴 94: door pocket
98:對準表面 98: Align the surface
102:向前面 102: to the front
104:對準表面 104: Align the surface
130:門 130: door
132:主體 132: Subject
134:內表面 134: inner surface
136:肋條 136: Rib
138:凸緣 138: Flange
142:安座表面 142: Seat Surface
144:外周邊 144: Outer periphery
146:門凹穴 146: Door Cavity
148:磁性耦合器 148: Magnetic Coupler
162:通孔 162: Through hole
164:插塞 164: plug
166:圓柱形腔 166: Cylindrical cavity
172:外表面 172: Outer Surface
174:空隙 174: Gap
176:鑰匙孔 176: Keyhole
178:淺槽盲孔 178: Shallow slot blind hole
179:內部空隙 179: Internal void
200:門 200: door
202:屏蔽罩 202: Shield
204:屏蔽磁鐵 204: shielding magnet
206:外周邊 206: outer periphery
208:緊固件 208: Fastener
212:凹穴 212: pit
250:基板容器 250: substrate container
252:殼體部分 252: shell part
254:框架 254: Frame
256:門 256: door
258:板 258: Board
可結合附圖考量本發明各種闡釋性實施例之以下說明來更全面地明瞭本發明。 The following description of various illustrative embodiments of the present invention can be considered in conjunction with the accompanying drawings to more fully understand the present invention.
圖1係根據本發明之一實施例之一基板容器的一部分分解圖。 Fig. 1 is a partial exploded view of a substrate container according to an embodiment of the present invention.
如2係根據本發明之一實施例之門及接近門框架之磁性耦合器的部分剖視圖。 Fig. 2 is a partial cross-sectional view of a door and a magnetic coupler close to the door frame according to an embodiment of the present invention.
圖3係根據本發明之一實施例之針對圖1之基板容器的一門之正向示意圖。 FIG. 3 is a front view of a door of the substrate container of FIG. 1 according to an embodiment of the present invention.
圖4係根據本發明之一實施例之一基板容器之一側視截面圖。 Fig. 4 is a side sectional view of a substrate container according to an embodiment of the present invention.
圖5A係根據本發明之一實施例之一門與一門框架對準以用於接合之一部分截面圖。 Figure 5A is a partial cross-sectional view of a door aligned with a door frame for joining according to an embodiment of the present invention.
圖5B係根據本發明之一實施例之圖5A之門與門框架接合中之一部分截面圖。 Fig. 5B is a partial cross-sectional view of the door and door frame of Fig. 5A in the joint according to an embodiment of the present invention.
圖6係根據本發明之一實施例之磁性耦合器部分對準之一透視圖。 Fig. 6 is a perspective view of a partial alignment of a magnetic coupler according to an embodiment of the present invention.
圖7係根據本發明之一實施例繪製針對一個磁性耦合器及針對十個磁性耦合器之磁力相對於間隙尺寸之一圖表。 Fig. 7 is a graph of magnetic force versus gap size for one magnetic coupler and ten magnetic couplers according to an embodiment of the present invention.
圖8係根據本發明之一實施例之一基板容器的一殼體之一後透視圖。 Fig. 8 is a rear perspective view of a shell of a substrate container according to an embodiment of the present invention.
圖9係圖8之殼體之放大、部分視圖。 Figure 9 is an enlarged, partial view of the housing of Figure 8.
圖10係根據本發明之一實施例之一基板容器門的一向後面板之一透視圖。 Fig. 10 is a perspective view of a rear panel of a substrate container door according to an embodiment of the present invention.
圖11係根據本發明之一實施例之具有一單片主體的一門之一分解透視圖。 Figure 11 is an exploded perspective view of a door with a single-piece body according to an embodiment of the present invention.
圖12係圖11之門之總成的一前透視圖。 Figure 12 is a front perspective view of the door assembly of Figure 11.
圖13係圖12之門之一後透視圖。 Figure 13 is a rear perspective view of one of the doors of Figure 12.
圖14係根據本發明之一實施例之具有磁體及磁性屏蔽罩之一基板容器的一部分視圖。 Fig. 14 is a partial view of a substrate container with a magnet and a magnetic shield according to an embodiment of the present invention.
圖15係圖14之門之放大、部分橫截面圖。 Figure 15 is an enlarged, partial cross-sectional view of the door of Figure 14.
圖16係根據本發明之一實施例之一基板容器殼體及門之一透視圖。 Figure 16 is a perspective view of a substrate container housing and door according to an embodiment of the present invention.
雖然本發明可有各種修改及替代形式,但其具體形式已經由實例展示於附圖中,並將作詳細論述。然而,應明瞭本意並不是將本發明之態樣限制於所論述之特定闡釋性實施例。反之,本意為涵蓋所有本發明精神及範 疇內之修改、等效物,及替代物。 Although the present invention may have various modifications and alternative forms, its specific form has been shown in the drawings by examples and will be discussed in detail. However, it should be understood that the intention is not to limit the aspect of the present invention to the specific illustrative embodiments discussed. On the contrary, the original intention is to cover all the spirit and scope of the present invention Modifications, equivalents, and replacements within the time limit.
參考圖1至圖4,根據本發明之一實施例描繪具有磁性閂鎖協助之一基板容器30。基板容器30包含:一容器殼體32,其具有一門框架34;及一門36,其經定尺寸以形成門框架34內之一閉合,閉合界定基板容器30之一內部腔室37(圖4)。門36包含:一向前面板36a;一向後面板36b;及繞一門軸42之一外周邊。在一些實施例中,門框架34界定一安座表面43(圖5),其經組態以接收一連續密封或墊片44,其經安裝至門36以提供在門36與容器殼體32之間之一密封。在一些實施例中,一安座表面45而非或以及門框架34上之安座表面43經組態於門36上。在一些實施例中(未描繪),墊片44係安裝至門框架34而非門36。
1 to 4, a
在各種實施例中,至少一個機械門閂鎖52係安裝於門36內。機械門閂鎖52可包含複數個閂鎖尖端54,其透過門36之外周邊38延伸至門框架34中,以在繞門36之外周邊38之複數個離散閂鎖位置56處將門36閂鎖至門框架34。在一些實施例中,一第一複數個磁性耦合器58係接近在複數個離散閂鎖位置56之間之容器殼體32的門框架34安裝。一第二複數個磁性耦合器62經安裝至門36,第二複數個磁性耦合器與第一複數個磁性耦合器58在平行於門軸42之一方向上實質上對準。在各種實施例中,第一複數個磁性耦合器58及第二複數個磁性耦合器62的一些或全部包含一經磁化材料61,其經囊封或以其他方式包含於一非磁性(例如,聚合物)外殼63中。
In various embodiments, at least one
對於本申請案之目的,一「磁性耦合器」經定義為一磁性材料或吸附至一磁化材料之一材料。一「磁化材料」係具有磁性之一材料,諸如一永久稀土磁鐵或一激活電磁鐵。經吸附至一經磁化材料之一材料之實例包含 含鐵材料,諸如經吸附至磁化材料之鋼或鐵及相關聯合金。 For the purpose of this application, a "magnetic coupler" is defined as a magnetic material or a material adsorbed to a magnetized material. A "magnetized material" is a material with magnetism, such as a permanent rare earth magnet or an activated electromagnet. Examples of materials adsorbed to a magnetized material include Ferrous materials, such as steel or iron and related union gold that are adsorbed to the magnetized material.
參考圖4、圖5A及圖5B,根據本發明之一實施例來描繪在基板容器30之門框架34內之門36的操作。使用門框架34來安置門36。如參考圖1及圖3所述,可制動機械門閂鎖52以將門36固定至門框架34。在一些實施例中,機械門閂鎖52操作以將門牽引朝向容器殼體32,且在門36與容器殼體32之間壓縮墊片44。歸因於門36之固有彈性,可藉由機械門閂鎖52之制動接近離散閂鎖位置56來壓縮墊片44。在一些實施例中,當門36係座落及/或經閂鎖於門框架34中時,墊片44之一尖端44a接合門36及門框架34兩者(例如,接合門框架34之安座表面43及門36之安座表面45),藉此在基板容器30之內部與外部之間建立兩個連續密封線。
Referring to FIGS. 4, 5A and 5B, the operation of the
門框架34內之門36的基座使第一複數個磁性耦合器58及第二複數個磁性耦合器62在一距離或間隙尺寸65內,其中在相對第一磁性耦合器58及與第二磁性耦合器62之各者之間產生一磁性耦合66(圖5B)。各磁性耦合66可建立一磁性吸引力68,該力足以將門36局部牽引至更靠近門框架34之安座表面,藉此進一步接近各自相對第一磁性耦合器58及第二磁性耦合器62壓縮墊片44。磁性吸引力68之一總和建立一總磁性吸引力69。
The base of the
功能上,磁性吸引力68及後續總磁性吸引力69在沿複數個離散閂鎖位置56之間之墊片44的位置處將門36牽引或偏轉更靠近門框架34。門36之偏轉對墊片44施加一額外壓縮力,在沿離散閂鎖位置56之間之墊片的點或片段處增強密封的完整性。
Functionally, the
在一些實施例中,當門36座落於門框架34內時,機械門閂鎖52提供必要結構,結構提供一經設計門固持力,其在一假想最壞情況震動事件期間保持門36在適當位置中。總磁性吸引力69外加經設計門固持力且提供足以
維持以一設計傳導率在門框架34與門36之間之墊片44之完整性的一力。「傳導率」係關於在一高壓下一基板載具之一滲漏率或壓力衰減的一參數。在一給定壓力下針對一給定基板載具之傳導率愈大,滲漏率愈小。
In some embodiments, when the
在一或多個實施例中,經接合機械門閂鎖52與總磁性吸引力69組合以提供經設計門固持力。藉由此等配置,總磁性吸引力經設計僅以提供一最小或所需傳導率,其可實質上小於用以在一最壞情況震動事件中保持門在適當位置中之所需力。因此,當解鎖機械門閂鎖時,門36可輕易地自門框架34移除。
In one or more embodiments, the engaged
參考圖6,針對本發明之好各種實施例描繪之第一磁性耦合器58與第二磁性耦合器62實質上對準。為本發明之目的,「實質上對準」定義為其中在平行於門軸42之方向64上一第一磁性耦合器58之一面74之一正常突起與一第二磁性耦合器62之一對置面78之至少一部分76重疊之一對準。亦為本發明之目的,一「最佳對準」定義為其中磁性耦合器58之面74與磁性耦合器62之面78彼此平行,且第一磁性耦合器58之面74之正常突起與第二磁性耦合器62之對置面78之部分重疊至最大程度。
Referring to FIG. 6, the first
參考圖7,根據本發明之一實施例呈現作為間隙尺寸65之一函數在磁性耦合器58與磁性耦合器62之間之磁力曲線82及磁力曲線84的一圖表80。磁力曲線82及磁力曲線84分別表示一個別磁鐵之磁性吸引力68及複數個磁性耦合器58與複數個磁性耦合器62之總磁性吸引力69。圖表80表示當第一複數個磁性耦合器58與第二複數個磁性耦合器62兩者皆係由經磁化材料製成時,且磁性耦合器58與磁性耦合器62之相對磁極彼此面對時係最佳對準之預期力位準。
Referring to FIG. 7, a
對應於一N 42類型之釹塊磁鐵之磁力曲線82之資料具有2英吋(in.)
(0.25英吋之誤差)之一尺寸,諸如由K&J Magnetics,Inc.of Pipersville,Pennsylvania,U.S.A供應之模型BY044釹塊磁鐵。該等總磁性吸引力69之磁力曲線84表示十個磁性耦合器58與十個磁性耦合器62最佳對準,各磁性耦合器58及磁性耦合器62係一N42類型之釹塊磁鐵。
The data corresponding to the
在特定實施例中,磁性吸引力68在力之一預定範圍內。同樣地,總磁性吸引力69可在力之一預定範圍71內。例如,根據圖表80,自力曲線84獲取之針對一10磁鐵對系統之總磁性吸引力69在8毫米(mm)最佳對準之一間隙尺寸處將為約125牛頓(N)。容許在第一複數個磁性耦合器58與第二複數個耦合器62之間之一些未對準,且容許在該等最初經預測磁力中之不確定性,針對總磁性吸引力69之力之一代表性及非限制性範圍,可預期包含在80N與140N之間(包含80N及140N)之一8mm間隙尺寸65。在一些實施例中,吸引力係在50牛頓(N)與200N之間之一範圍內(包含50N及200N);在一些實施例中,係在80N與150N之間之範圍內(包含80N及150N);在一些實施例中,係在100N與130N之間之範圍內(包含100N及130N)。在一個實施例中,吸引力之一目標值係125N。
In a particular embodiment, the
參考圖8至圖10,根據本發明之一實施例,基板容器30之門框架34經描繪為界定複數個框架凹穴92,及門框架34經描繪為界定複數個門凹穴94。框架凹穴92定位於門框架34之一向後面96上,各框架凹穴92界定與門框架34之安座表面43(圖5B)相對之一對準表面98。門凹穴94定位於門36之向後面板36b之一向前面102上,各門凹穴94界定與門36之安座表面45(圖5A及圖5B)相對之一對準表面104。在一些實施例中,當用門36座落於門框架34內時,複數個框架凹穴92之各者經定向且與複數個門凹穴94之一對應者對準。
Referring to FIGS. 8 to 10, according to an embodiment of the present invention, the
功能上,框架凹穴92與門凹穴94使磁性耦合器58與磁性耦合器62彼此接近,接著在無凹穴92、凹穴94的情況下用於一組態。磁性耦合器58與磁性耦合器62愈接近使磁性吸引力68及磁性吸引力69愈強,及/或使具有經減小磁性強度之磁體的磁性吸引力68及磁性吸引力69處於相同位準。凹穴92、凹穴94亦可在製造及組裝製程期間針對磁性耦合器58、磁性耦合器62提供安裝位置之準備識別。
Functionally, the
參考圖11至圖13,根據本發明之一實施例描繪針對基板載具30之一門130。門130包含一整體或單件主體132。在各種實施例中,墊片44安裝至門130。一內表面134可包含肋條136。在特定實施例中,門130之一外部凸緣138包含與墊片44介接之安座表面142。凸緣138亦可包含一外周邊144。在一些實施例中,在自外周邊114接達之外部凸緣138中界定複數個門凹穴146。複數個磁性耦合器148可安置於複數個門凹穴146中。在各種實施例中,磁性耦合器148與接近基板容器30之門框架34安裝之該等磁性耦合器58對準(圖1)。在所描繪之實施例中,門130並不包含一機械門閂鎖。因此,在一或多個實施例中,磁性耦合器58、磁性耦合器148經定大小以在一假想最壞情況震動事件期間用於保持門36在適當位置中從而保持在經設計門固持力處之門130。在各種實施例中,門130界定通孔162。該等通孔162可配裝有插塞164,其(例如,藉由超音波焊接或雷射焊接)自內表面134密封該等通孔162。該等通孔162及/或插塞164可界定鄰近門130之內表面134之一圓柱形腔166。
Referring to FIGS. 11 to 13, a
參考圖12,門130之主體132亦包含一外表面172。在各種實施例中,主體132界定自外表面172接達之空隙174僅需要以介接機器自動。例如,該等空隙174可包含該等通孔162,各通孔162界定一鑰匙孔176。空隙174
可包含淺槽盲孔178。
Referring to FIG. 12, the
功能上,肋條136致能使用射出成形或鑄造技術製造主體132,且亦對門130提供剛性。在肋條136之間界定之內部空隙179減小優於具有凸緣138之一厚度的一板之門130之重量。該等鑰匙孔176經組態以介接半導體設備及材料國際協會(SEMI®)標準鑰匙(未描繪)。該等圓柱形腔166具有大於鑰匙孔176之尺寸,其使該等鑰匙隨著門130之主體132旋轉,且當該等鑰匙旋轉時有效地掛鉤門130。該等淺槽盲孔178能夠介接SEMI®標準門探針。圍繞該等盲孔178之平坦表面182可能夠介接SEMI®標準真空杯。
Functionally, the
藉由界定空隙174僅需要以介接機器自動,從而減小在門130與一負載埠之一基座(未描繪)之間之腔內陷獲之氧體積。當移除具有負載埠及門130之基板容器30時,陷獲於門空隙174之氧體積釋放至設備前端模組(EFEM)環境中。減小或最小化藉由減小該等空隙174之體積釋放之氧體積從而降低在EFEM環境中增加氧體積之量。
By defining the
參考圖14及圖15,根據本發明之一實施例描繪一門200,其包含用於屏蔽磁鐵204之屏蔽罩202。該等屏蔽罩202接近門200之一外周邊206(例如)使用緊固件208安裝。在一些實施例中,該等屏蔽罩202界定凹穴212用於容置該等磁鐵204。可將配置併入門36或門130,該等凹穴212與常駐磁鐵204對準以用於與第一複數個磁性耦合器58之磁性耦合。在一些實施例中,將一可比較屏蔽配置併入門框架34中。
14 and 15, a
功能上,在一些實施例中,屏蔽配置屏蔽或減小自該等磁鐵204之磁通的內部腔室37。屏蔽罩亦可將磁能聚焦於一所需方向上(諸如),例如朝向與磁鐵204配對之一對應磁性耦合器。
Functionally, in some embodiments, the shielding configuration shields or reduces the
參考圖16,根據本發明之一實施例描繪一基板容器250。基板容器250
包含:一殼體部分252,其具有一框架254;及一門256,其用於提供閉合基板容器250。門256配裝有如上文針對門36及門130之該等磁性耦合器58所述之磁鐵(未描繪)。一墊片(未描繪)可安置於門256與殼體部分252之間。在所描繪之實施例中,殼體部分252包含接近框架254安置之板258。該等板258由吸附至該等磁鐵之一材料製成,諸如一含鐵材料(例如,鋼或鐵及特定相關聯合金)。
Referring to FIG. 16, a
基板容器250之磁性閂鎖或磁性閂鎖協助基於如基板容器30之相同原則操作。門256之該等磁鐵吸附至該等板258,藉此提供壓縮至墊片。
The magnetic latch or magnetic latch assistance of the
參考圖式讀取[實施方式],其中不同圖式中之類似元件編號相同。[實施方式]及該等圖式未必按比例描繪闡釋性實施例且並非意欲顯示本發明之範圍。所描繪之該等闡釋性實施例並非意欲僅作為實例。除非明確說明相反的情形,否則任何闡釋性實施例之經選擇特徵會併入至一額外實施例中。 Read [Embodiment] with reference to the drawings, where similar components in different drawings have the same number. [Embodiment] and the drawings do not necessarily depict illustrative embodiments to scale and are not intended to show the scope of the present invention. The illustrative embodiments depicted are not intended to be examples only. Unless the contrary is clearly stated, the selected features of any illustrative embodiment will be incorporated into an additional embodiment.
本文揭示之該等額外特徵及方法之各者可分開使用,或可結合其他特徵及方法使用,以提供改良之裝置及方法及其製造及使用方法。因此,本文揭示之特徵及方法之組合可無需在最廣意義上實踐本發明且代替性地僅揭示以特定描述代表性且較佳實施例。 Each of the additional features and methods disclosed herein can be used separately or combined with other features and methods to provide improved devices and methods, and methods of manufacturing and using them. Therefore, the combination of the features and methods disclosed herein may not need to practice the present invention in the broadest sense and instead only disclose the specific description representative and preferred embodiments.
熟悉此項技術者在閱讀本發明之後可明白對該等實施例之各種修改。例如,熟悉相關技術之一般技術者將認知針對不同實施例描述之各種特徵可適當地與其他特徵組合、不組合、及重組合;單獨;或在不同組合中組合。同樣地,上文所描述之各種特徵全部應視為實例實施例,而非對本發明之範圍及精神之限制。 Those skilled in the art can understand various modifications to the embodiments after reading the present invention. For example, those skilled in the related art will recognize that the various features described for different embodiments can be appropriately combined, not combined, and recombined with other features; alone; or combined in different combinations. Likewise, the various features described above should all be regarded as example embodiments, rather than limiting the scope and spirit of the present invention.
熟習相關技之一般技術者將認知各種實施例可包含比上述任何個別 實施例中所說明者少之特徵。本文所述實施例不欲詳盡提出可將各種特徵組合之方式。因此,該等實施例並非特徵之相互排他性的組合;反之,申請專利範圍可包括選自如熟習此項技之一般者所明瞭之不同個別實施例之不同個別特徵之組合。 Those who are familiar with related technologies will recognize that various embodiments can include more than any of the above Few features described in the embodiment. The embodiments described herein are not intended to describe in detail the ways in which various features can be combined. Therefore, these embodiments are not mutually exclusive combinations of features; on the contrary, the scope of patent application may include combinations of different individual features selected from different individual embodiments as known to those skilled in the art.
上述文獻之任何以引用方式的併入受到限制,以致未併入與本文明確揭示內容相反之標的。進一步限制任何上述文件以引用方式之併入,以致不將包含於該等文件中之申請專利範圍以引用方式併入本文中。又進一步限制任何上述文件以引用方式之併入,以致除非本文中明文包括,否則不將該等文件中所提供之任何定義以引用方式併入本文。 Any incorporation of the above-mentioned documents by reference is limited, so that the incorporation of objects contrary to the content explicitly disclosed herein is not included. The incorporation of any of the above-mentioned documents by reference is further restricted, so that the scope of patent applications contained in these documents is not incorporated by reference. The incorporation of any of the above-mentioned documents by reference is further restricted, so that unless expressly included in this document, any definitions provided in these documents are not incorporated by reference.
如在此說明書及附屬申請專利範圍中所使用,單數形式「一」及「該」包含複數指涉,除非本文另外明確指示。如本說明書及隨附申請專利範圍中所使用,術語「或」以其之意義包含「及/或」採用,除非本文另外明確指示。參考文中含有之「實施例」、「揭示」、「本發明」、「本發明之實施例」、「所揭示實施例」及類似者指代不認為係先前技術之此專利申請案之說明書,除非本文另外明確指示。 As used in this specification and the scope of the appended patent application, the singular forms "one" and "the" include plural references unless the text clearly indicates otherwise. As used in the scope of this specification and the accompanying patent application, the term "or" is adopted in its meaning including "and/or", unless explicitly indicated otherwise herein. The "embodiments", "disclosures", "inventions", "embodiments of the present invention", "disclosed embodiments" and the like contained in the reference refer to the specification of this patent application that is not considered to be prior art, Unless otherwise explicitly indicated in this article.
為達說明申請專利範圍之目的,除非在各自申請專利範圍中引用特定術語「用於…之構件」「用於…之步驟」,否則明確地不欲援引112(f)U.S.C.之條款35之規定。 For the purpose of explaining the scope of the patent application, unless the specific terms "components for..." and "steps for..." are cited in the respective patent applications, it is expressly not intended to invoke 112(f) USC Clause 35 .
30‧‧‧基板容器 30‧‧‧Substrate Container
32‧‧‧容器殼體 32‧‧‧Container shell
34‧‧‧門框架 34‧‧‧Door frame
36‧‧‧門 36‧‧‧door
36a‧‧‧前面板 36a‧‧‧Front panel
36b‧‧‧後面板 36b‧‧‧rear panel
38‧‧‧外周邊 38‧‧‧Outer periphery
52‧‧‧機械門閂鎖 52‧‧‧Mechanical door latch
54‧‧‧閂鎖尖端 54‧‧‧Latch tip
56‧‧‧離散閂鎖位置 56‧‧‧Discrete latch position
58‧‧‧磁性耦合器 58‧‧‧Magnetic Coupler
61‧‧‧經磁化材料 61‧‧‧Magnetized material
62‧‧‧磁性耦合器 62‧‧‧Magnetic Coupler
63‧‧‧非磁性外殼 63‧‧‧Non-magnetic housing
Claims (11)
Priority Applications (1)
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TW105131524A TWI710046B (en) | 2016-09-30 | 2016-09-30 | Substrate container with magnetic latching assistance |
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TW105131524A TWI710046B (en) | 2016-09-30 | 2016-09-30 | Substrate container with magnetic latching assistance |
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TW201812957A TW201812957A (en) | 2018-04-01 |
TWI710046B true TWI710046B (en) | 2020-11-11 |
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CN114743905B (en) * | 2022-04-19 | 2023-11-17 | 荣耀半导体材料(嘉善)有限公司 | Semiconductor wafer storage container |
Citations (1)
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US8272827B2 (en) * | 2005-11-07 | 2012-09-25 | Bufano Michael L | Reduced capacity carrier, transport, load port, buffer system |
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Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US8272827B2 (en) * | 2005-11-07 | 2012-09-25 | Bufano Michael L | Reduced capacity carrier, transport, load port, buffer system |
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