TWI710046B - Substrate container with magnetic latching assistance - Google Patents

Abstract

A substrate container with magnetic latch assistance. A substrate carrier includes a mechanical door latch with the addition of magnetic couplers to assist with sealing a container door to a container shell. The improved seating may reduce the leak rate through a door gasket, and may improve gasket sealing without increasing the complexity of the mechanical door latch. The magnetic couplers are located on the shell and the door in the proximity of door gasket at locations between latching locations of the mechanical door latch. When the door is latched into the shell, the magnetic attraction provides additional compressive forces against the gasket at segments along the gasket that are between latching locations of the mechanical door latch. In certain cases, the coupled magnetic couplers do not contact each other, so that the magnetic coupling is not prone to additional particle generation.

Description

Substrate container with magnetic latch assist

The present invention generally relates to substrate containers and wafer carriers, and more specifically relates to door latches of these substrate containers.

Various conventional substrate containers, such as front opening wafer transfer boxes (FOUP) and standard mechanical interface (SMIF) boxes, include a container housing that defines an opening for access. The opening of the housing is usually surrounded by a frame that receives a door latch to be locked into the frame to form an enclosure with the housing. A gasket is arranged between the door and the shell to preserve the integrity of the microenvironment in the package.

It is well known that certain components (such as oxygen and water vapor) visible in the surrounding environment can degrade the substrates. Therefore, it may be desirable to prevent these components from entering the microenvironment inside the package. However, if the conventional substrate container is not actively pressurized with an inert gas, it will allow environmental components from the ambient atmosphere over time. An entry point for the environmental components is the gasket between the door and the housing and the housing system has a known entry point. Therefore, improvements to the sealing arrangement between the door and the housing of the substrate container are welcome.

In various embodiments of the present invention, a substrate carrier includes a mechanical door latch with a magnetic coupler to help seal the door to the housing. Improved base can reduce leakage through door seal rate. Various embodiments improve gasket sealing without increasing the complexity of the mechanical door latch.

The magnetic couplers are positioned on the door and the housing close to the door gasket at the position between the latch positions of the mechanical door latch. When the door is installed and latched into the housing, the magnetic attraction provides additional compressive sealing force against the gasket along the segment of the gasket between the latch positions of the mechanical door latch. The various embodiments will operate using the industry standard load port interface. In some embodiments, pockets (eg, by a mold shape or post-molding machinery) are formed in the door housing and housing to reduce the magnetic air gap between the operatively coupled magnetic couplers. In certain embodiments, the coupled magnetic couplers do not contact each other, or force surfaces other than the door seal to make contact, so that the magnetic coupling is not prone to generate extra particles.

The conventional substrate carrier has a mechanical door latch that operates to draw the door toward the container housing at discrete latch positions, which compresses the gasket between the door and the container housing. Due to the inherent elasticity of the door, the shim close to the discrete latch positions can be compressed to a greater extent by the braking of the mechanical door latches, rather than along the shim far away from the discrete latch positions Compressed at the point. That is, the latching forces are not evenly distributed along the length of the gasket. There may be an uneven seal between the door and the housing, which includes the integrity of the seal.

Structurally, in various embodiments of the present invention, a substrate container includes: a container shell having a door frame; and a door, which is seated in the door frame, and the door includes an outer periphery that is concentric about a door shaft . A gasket can be installed to one of the container shell and the door frame. In some embodiments, at least one mechanical door latch latches the door to the door frame at a plurality of discrete latch locations close to the gasket. A plurality of magnetic couplers can be installed to at least one of the door and the door frame. A plurality of magnetic couplers generate an overall magnetic attraction between the door and the door frame bracket. In some embodiments, at least one mechanical door latch is mounted to the door. At least one mechanical door latch can be installed in the door, and includes a plurality of latch tips, which extend into the door frame through the outer periphery of the door to recirculate the outer periphery of the door. The door is latched to the door frame at several discrete latch positions. In some embodiments, at least one mechanical door latch latches the door to the door frame at a plurality of discrete latch locations around the outer periphery of the door. In various embodiments, the magnetic couplers of the plurality of magnetic couplers are not in contact with each other. In some embodiments, the first plurality of magnetic couplers of the plurality of magnetic couplers are installed close to the door frame and between the plurality of discrete latch positions, and the second plurality of magnetic couplers of the plurality of magnetic couplers are installed to the door . The second plurality of magnetic couplers of the plurality of magnetic couplers may be substantially aligned with the first plurality of magnetic couplers of the plurality of magnetic couplers, wherein the first plurality of magnetic couplers and the plurality of magnetic couplers An overall magnetic attraction force is generated between the second plurality of magnetic couplers of the two magnetic couplers. In some embodiments, the first plurality of magnetic couplers of the plurality of magnetic couplers and the second plurality of magnetic couplers of the plurality of magnetic couplers are substantially aligned in a direction parallel to the door axis.

In various embodiments of the present invention, a substrate container is disclosed, which includes: a container shell having a door frame; and a door seated on the door frame. The door defines a door shaft, and it includes an outer periphery around the door shaft. A continuous door is sealed and installed to one of the container shell and the door frame. In some embodiments, at least one mechanical door latch is installed in the door, and it includes a plurality of latch tips, and the latch tips extend into the door frame through the outer periphery of the door to surround the plurality of discrete latches around the outer periphery of the door. Lock the door latch to the door frame at the lock position. A first plurality of magnetic couplers can be installed close to the door frame and between the plurality of discrete latch positions. A second plurality of magnetic couplers can be installed to the door, and the second plurality of magnetic couplers and the first plurality of magnetic couplers are substantially aligned in a direction parallel to the door axis. An overall magnetic attraction is generated between the first plurality of magnetic couplers and the second plurality of magnetic couplers, and the overall magnetic attraction is within a predetermined range of force. In one or more embodiments, the predetermined range of force is from 80 Newtons to 140 Newtons (including 80 Newtons and 140 Newtons). In this article, a range deemed to be "including" includes the endpoints of the stated range.

The door frame can define a plurality of cavities, in which a first plurality of magnetic couplers are installed. In some embodiments, the first plurality of magnetic couplers include a magnetized material. In some embodiments, the second plurality of magnetic couplers include a ferrous material. At least some of the first plurality of magnetic couplers may be centered near one edge of the door frame, and at least some of the second plurality of magnetic couplers may be centered near one edge of the door.

The magnetic shield can be arranged between an internal cavity of the substrate carrier and at least one of the first plurality of magnetic couplers and the second plurality of magnetic couplers. In some embodiments, the magnetic shield is made of an iron-containing material. In some embodiments, some of the first plurality of magnetic couplers or the second plurality of magnetic couplers include a magnetized material contained in a non-magnetic housing.

In various embodiments of the present invention, a substrate container includes: a container shell that includes a door frame; a door that is seated in the door frame, the door defines a door shaft and an outer periphery around the door shaft; and a continuous The door seal is installed to one of the container shell and the door frame. At least one mechanical door latch is installed in the door, and it includes a plurality of latch tips, which extend into the door frame through the outer periphery of the door to lock the door latch to a plurality of discrete latch positions around the outer periphery of the door Door frame. In some embodiments, a plurality of magnetic couplers are mounted to one of the container and the door between the plurality of discrete latch positions. A second magnetic coupler can be installed to the other of the container and the door, and the second magnetic coupler and the first plurality of magnetic couplers are substantially aligned in a direction parallel to the door axis. A magnetic attraction is generated between the first plurality of magnetic couplers and the second plurality of magnetic couplers, and the magnetic attraction is within a predetermined range of force. In some embodiments, the attractive force is within a range between 50 Newtons (N) and 200N (including 50N and 200N); in some embodiments, the attractive force is within a range between 80N and 150N (including 80N). And 150N); in some embodiments, the range is between 100N and 130N (including 100N and 130N); in some embodiments, the Within the range between 120N and 130N (including 120N and 130N). In one embodiment, one of the target values of attraction is 125N. In one or more embodiments, the first plurality of magnetic couplers include a magnetized material, and the second magnetic coupler is a magnetic material.

In various embodiments of the present invention, a method of manufacturing a substrate carrier includes: manufacturing a substrate carrier having a housing and a door, the door is installable in a frame along a door axis, and the door includes Fix at least one mechanical door latch to the door frame; install a gasket between the door and the housing; install at least one magnetic coupler close to the door frame; and install at least one magnetic coupler to the door, at least one magnetic The coupler is substantially aligned with at least one magnetic coupler of the door frame. The substantial alignment may be in a direction parallel to the door axis. In some embodiments, the substantial alignment is in a direction parallel to the door axis. In some embodiments, the at least one magnetic coupler installed in the step of installing at least one magnetic coupler close to the door frame is installed between a plurality of discrete latch positions. The method also includes selecting at least one magnetic coupler installed close to the door frame, and at least one magnetic coupler installed to the door to generate an overall magnetic attraction within a predetermined range of force. In one embodiment, the predetermined range of force is from 80 Newton to 140 Newton (including 80 Newton and 140 Newton).

30: Substrate container

32: container shell

34: door frame

36: Door

37: Internal chamber

36a: front panel

36b: Rear panel

38: outer periphery

42: Door shaft

43: seat surface

44: Gasket

44a: tip

45: Seat surface

52: Mechanical door latch

54: Latch tip

56: Discrete latch position

58: Magnetic coupler

61: Magnetized material

62: Magnetic coupler

63: Non-magnetic case

64: direction

65: gap size

66: Magnetic coupling

68: Magnetic attraction

69: total magnetic attraction

71: predetermined range

74: Noodles

76: part of stacking surface 78

78: stacking surface

80: Chart

92: frame cavity

94: door pocket

98: Align the surface

102: to the front

104: Align the surface

130: door

132: Subject

134: inner surface

136: Rib

138: Flange

142: Seat Surface

144: Outer periphery

146: Door Cavity

148: Magnetic Coupler

162: Through hole

164: plug

166: Cylindrical cavity

172: Outer Surface

174: Gap

176: Keyhole

178: Shallow slot blind hole

179: Internal void

200: door

202: Shield

204: shielding magnet

206: outer periphery

208: Fastener

212: pit

250: substrate container

252: shell part

254: Frame

256: door

258: Board

The following description of various illustrative embodiments of the present invention can be considered in conjunction with the accompanying drawings to more fully understand the present invention.

Fig. 1 is a partial exploded view of a substrate container according to an embodiment of the present invention.

Fig. 2 is a partial cross-sectional view of a door and a magnetic coupler close to the door frame according to an embodiment of the present invention.

FIG. 3 is a front view of a door of the substrate container of FIG. 1 according to an embodiment of the present invention.

Fig. 4 is a side sectional view of a substrate container according to an embodiment of the present invention.

Figure 5A is a partial cross-sectional view of a door aligned with a door frame for joining according to an embodiment of the present invention.

Fig. 5B is a partial cross-sectional view of the door and door frame of Fig. 5A in the joint according to an embodiment of the present invention.

Fig. 6 is a perspective view of a partial alignment of a magnetic coupler according to an embodiment of the present invention.

Fig. 7 is a graph of magnetic force versus gap size for one magnetic coupler and ten magnetic couplers according to an embodiment of the present invention.

Fig. 8 is a rear perspective view of a shell of a substrate container according to an embodiment of the present invention.

Figure 9 is an enlarged, partial view of the housing of Figure 8.

Fig. 10 is a perspective view of a rear panel of a substrate container door according to an embodiment of the present invention.

Figure 11 is an exploded perspective view of a door with a single-piece body according to an embodiment of the present invention.

Figure 12 is a front perspective view of the door assembly of Figure 11.

Figure 13 is a rear perspective view of one of the doors of Figure 12.

Fig. 14 is a partial view of a substrate container with a magnet and a magnetic shield according to an embodiment of the present invention.

Figure 15 is an enlarged, partial cross-sectional view of the door of Figure 14.

Figure 16 is a perspective view of a substrate container housing and door according to an embodiment of the present invention.

Although the present invention may have various modifications and alternative forms, its specific form has been shown in the drawings by examples and will be discussed in detail. However, it should be understood that the intention is not to limit the aspect of the present invention to the specific illustrative embodiments discussed. On the contrary, the original intention is to cover all the spirit and scope of the present invention Modifications, equivalents, and replacements within the time limit.

1 to 4, a substrate container 30 with magnetic latch assistance is depicted according to an embodiment of the present invention. The substrate container 30 includes: a container shell 32 having a door frame 34; and a door 36 sized to form a closure within the door frame 34, closing and defining an internal chamber 37 of the substrate container 30 (Figure 4) . The door 36 includes: a front panel 36a; a rear panel 36b; and an outer periphery around a door shaft 42. In some embodiments, the door frame 34 defines a seating surface 43 (FIG. 5), which is configured to receive a continuous seal or gasket 44, which is mounted to the door 36 to provide between the door 36 and the container housing 32 One of the rooms is sealed. In some embodiments, a seating surface 45 instead of or and the seating surface 43 on the door frame 34 are configured on the door 36. In some embodiments (not depicted), the gasket 44 is mounted to the door frame 34 instead of the door 36.

In various embodiments, at least one mechanical door latch 52 is installed in the door 36. The mechanical door latch 52 may include a plurality of latch tips 54 that extend through the outer periphery 38 of the door 36 into the door frame 34 to latch the door 36 at a plurality of discrete latch positions 56 around the outer periphery 38 of the door 36 To the door frame 34. In some embodiments, a first plurality of magnetic couplers 58 are installed close to the door frame 34 of the container housing 32 between the plurality of discrete latch positions 56. A second plurality of magnetic couplers 62 are installed to the door 36, and the second plurality of magnetic couplers and the first plurality of magnetic couplers 58 are substantially aligned in a direction parallel to the door axis 42. In various embodiments, some or all of the first plurality of magnetic couplers 58 and the second plurality of magnetic couplers 62 include a magnetized material 61 that is encapsulated or otherwise contained in a non-magnetic (eg, polymeric物) In the housing 63.

For the purpose of this application, a "magnetic coupler" is defined as a magnetic material or a material adsorbed to a magnetized material. A "magnetized material" is a material with magnetism, such as a permanent rare earth magnet or an activated electromagnet. Examples of materials adsorbed to a magnetized material include Ferrous materials, such as steel or iron and related union gold that are adsorbed to the magnetized material.

Referring to FIGS. 4, 5A and 5B, the operation of the door 36 in the door frame 34 of the substrate container 30 is depicted according to an embodiment of the present invention. The door frame 34 is used to position the door 36. As described with reference to FIGS. 1 and 3, the mechanical door latch 52 can be braked to secure the door 36 to the door frame 34. In some embodiments, the mechanical door latch 52 operates to draw the door toward the container housing 32 and compress the gasket 44 between the door 36 and the container housing 32. Due to the inherent elasticity of the door 36, the shim 44 can be compressed by the braking of the mechanical door latch 52 approaching the discrete latch position 56. In some embodiments, when the door 36 is seated and/or latched in the door frame 34, a tip 44a of the spacer 44 engages both the door 36 and the door frame 34 (e.g., engages the seat of the door frame 34 The surface 43 and the seating surface 45 of the door 36), thereby establishing two continuous sealing lines between the inside and the outside of the substrate container 30.

The base of the door 36 in the door frame 34 is such that the first plurality of magnetic couplers 58 and the second plurality of magnetic couplers 62 are within a distance or gap size 65, which is opposite to the first magnetic coupler 58 and the second A magnetic coupling 66 is generated between each of the magnetic couplers 62 (FIG. 5B). Each magnetic coupling 66 can establish a magnetic attraction 68, which is sufficient to pull the door 36 partly closer to the seating surface of the door frame 34, thereby further approaching the respective compression pads of the first magnetic coupler 58 and the second magnetic coupler 62片44. The sum of one of the magnetic attraction 68 creates a total magnetic attraction 69.

Functionally, the magnetic attraction 68 and the subsequent total magnetic attraction 69 pull or deflect the door 36 closer to the door frame 34 at positions along the spacer 44 between the plurality of discrete latch positions 56. The deflection of the door 36 exerts an additional compressive force on the gasket 44, enhancing the integrity of the seal at points or segments along the gasket between the discrete latch locations 56.

In some embodiments, when the door 36 is seated in the door frame 34, the mechanical door latch 52 provides the necessary structure. The structure provides a designed door retention force that keeps the door 36 in place during a hypothetical worst-case shock event. in. The total magnetic attraction 69 plus the designed door holding force and provide enough A force to maintain the integrity of the gasket 44 between the door frame 34 and the door 36 with a design conductivity. "Conductivity" is a parameter related to a leakage rate or pressure attenuation of a substrate carrier under a high pressure. The greater the conductivity for a given substrate carrier under a given pressure, the smaller the leakage rate.

In one or more embodiments, the engaged mechanical door latch 52 is combined with a total magnetic attraction 69 to provide a designed door retention force. With this configuration, the total magnetic attraction is designed only to provide a minimum or required conductivity, which can be substantially less than the force required to keep the door in place during a worst-case shock event. Therefore, when the mechanical door latch is unlocked, the door 36 can be easily removed from the door frame 34.

Referring to FIG. 6, the first magnetic coupler 58 and the second magnetic coupler 62 depicted for various embodiments of the present invention are substantially aligned. For the purpose of the present invention, "substantially aligned" is defined as a pair of a normal protrusion on a surface 74 of a first magnetic coupler 58 and a second magnetic coupler 62 in a direction 64 parallel to the door axis 42 At least a portion 76 of the placement surface 78 overlaps with one of the alignments. Also for the purpose of the present invention, an "optimal alignment" is defined as where the surface 74 of the magnetic coupler 58 and the surface 78 of the magnetic coupler 62 are parallel to each other, and the normal protrusion of the surface 74 of the first magnetic coupler 58 and the first The opposite surface 78 of the two magnetic couplers 62 overlap to the maximum extent.

Referring to FIG. 7, a graph 80 of the magnetic force curve 82 and the magnetic force curve 84 between the magnetic coupler 58 and the magnetic coupler 62 as a function of the gap size 65 is presented according to an embodiment of the present invention. The magnetic force curve 82 and the magnetic force curve 84 respectively represent the magnetic attraction 68 of a separate magnet and the total magnetic attraction 69 of the plurality of magnetic couplers 58 and the plurality of magnetic couplers 62. Graph 80 shows that when the first plurality of magnetic couplers 58 and the second plurality of magnetic couplers 62 are both made of magnetized material, and the opposite magnetic poles of the magnetic coupler 58 and the magnetic coupler 62 face each other It is the expected force level for best alignment.

The data corresponding to the magnetic force curve 82 of a N 42 type neodymium block magnet has 2 inches (in.) (0.25 inch error) One size, such as the model BY044 neodymium block magnet supplied by K&J Magnetics, Inc. of Pipersville, Pennsylvania, U.S.A. The magnetic force curve 84 of the total magnetic attraction force 69 shows that the ten magnetic couplers 58 and the ten magnetic couplers 62 are optimally aligned. Each of the magnetic couplers 58 and the magnetic couplers 62 is a N42-type neodymium block magnet.

In a particular embodiment, the magnetic attraction 68 is within a predetermined range of force. Likewise, the total magnetic attraction 69 may be within a predetermined range 71 of the force. For example, according to the graph 80, the total magnetic attractive force 69 for a 10-magnet pair system obtained by the self-force curve 84 will be approximately 125 Newtons (N) at a gap size of 8 millimeters (mm) optimal alignment. To allow some misalignment between the first plurality of magnetic couplers 58 and the second plurality of couplers 62, and to allow uncertainty in the initially predicted magnetic forces, for the total magnetic attractive force 69 A representative and non-limiting range can be expected to include an 8mm gap size 65 between 80N and 140N (including 80N and 140N). In some embodiments, the attractive force is within a range between 50 Newtons (N) and 200N (including 50N and 200N); in some embodiments, it is within a range between 80N and 150N (including 80N and 150N); In some embodiments, it is in the range between 100N and 130N (including 100N and 130N). In one embodiment, one of the target values of attraction is 125N.

Referring to FIGS. 8 to 10, according to an embodiment of the present invention, the door frame 34 of the substrate container 30 is depicted as defining a plurality of frame cavities 92, and the door frame 34 is depicted as defining a plurality of door cavities 94. The frame pockets 92 are positioned on one of the rearward faces 96 of the door frame 34, and each frame pocket 92 defines an alignment surface 98 opposite to the seating surface 43 of the door frame 34 (FIG. 5B). The door pockets 94 are positioned on one of the rearward panels 36b of the door 36 on the front face 102, and each door pocket 94 defines an alignment surface 104 opposite to the seating surface 45 of the door 36 (FIGS. 5A and 5B). In some embodiments, when the door 36 is seated in the door frame 34, each of the plurality of frame pockets 92 is oriented and aligned with a corresponding one of the plurality of door pockets 94.

Functionally, the frame cavity 92 and the door cavity 94 make the magnetic coupler 58 and the magnetic coupler 62 close to each other, and then used in a configuration without the cavity 92 and the cavity 94. The closer the magnetic coupler 58 and the magnetic coupler 62 make the magnetic attraction 68 and the magnetic attraction 69 stronger, and/or the magnetic attraction 68 and the magnetic attraction 69 of the magnet with reduced magnetic strength are at the same level . The cavity 92 and the cavity 94 can also provide a ready identification of the installation position of the magnetic coupler 58 and the magnetic coupler 62 during the manufacturing and assembly process.

Referring to FIGS. 11 to 13, a door 130 for the substrate carrier 30 is depicted according to an embodiment of the present invention. The door 130 includes an integral or single-piece body 132. In various embodiments, the gasket 44 is mounted to the door 130. An inner surface 134 may include ribs 136. In a specific embodiment, an outer flange 138 of the door 130 includes a seating surface 142 that interfaces with the gasket 44. The flange 138 may also include an outer periphery 144. In some embodiments, a plurality of door pockets 146 are defined in the outer flange 138 that is accessed from the outer periphery 114. A plurality of magnetic couplers 148 may be disposed in a plurality of door pockets 146. In various embodiments, the magnetic couplers 148 are aligned with the magnetic couplers 58 mounted close to the door frame 34 of the substrate container 30 (FIG. 1). In the depicted embodiment, the door 130 does not include a mechanical door latch. Therefore, in one or more embodiments, the magnetic coupler 58, the magnetic coupler 148 are sized to keep the door 36 in place during a hypothetical worst-case shock event to maintain the designed door retention force The door of the place 130. In various embodiments, the door 130 defines a through hole 162. The through holes 162 may be equipped with plugs 164 that seal the through holes 162 from the inner surface 134 (for example, by ultrasonic welding or laser welding). The through holes 162 and/or plugs 164 can define a cylindrical cavity 166 adjacent to the inner surface 134 of the door 130.

Referring to FIG. 12, the main body 132 of the door 130 also includes an outer surface 172. In various embodiments, the main body 132 defining the void 174 accessible from the outer surface 172 only needs to interface with the machine. For example, the voids 174 may include the through holes 162, and each through hole 162 defines a key hole 176. Gap 174 A shallow slot blind hole 178 may be included.

Functionally, the ribs 136 enable the main body 132 to be manufactured using injection molding or casting techniques, and also provide rigidity to the door 130. The internal void 179 defined between the ribs 136 reduces the weight of the door 130 of a plate having a thickness of one of the flanges 138. The keyholes 176 are configured to interface with semiconductor equipment and materials international association (SEMI®) standard keys (not depicted). The cylindrical cavities 166 have a size larger than the key hole 176, which allows the keys to rotate with the main body 132 of the door 130 and effectively hook the door 130 when the keys are rotated. These shallow slot blind holes 178 can interface with SEMI® standard door probes. The flat surface 182 surrounding the blind holes 178 may be able to interface with a SEMI® standard vacuum cup.

By defining the gap 174, it is only necessary to interface with the machine, thereby reducing the volume of oxygen trapped in the cavity between the door 130 and a base (not shown) of a load port. When the substrate container 30 with the load port and the door 130 is removed, the volume of oxygen trapped in the door gap 174 is released into the EFEM environment. Reduce or minimize the volume of oxygen released by reducing the volume of the voids 174, thereby reducing the amount of oxygen volume that is increased in the EFEM environment.

14 and 15, a door 200 is depicted according to an embodiment of the present invention, which includes a shield 202 for shielding a magnet 204. The shield covers 202 are installed close to an outer periphery 206 of the door 200 (for example) using fasteners 208. In some embodiments, the shielding covers 202 define cavities 212 for receiving the magnets 204. The gate 36 or the gate 130 can be configured and the cavities 212 are aligned with the permanent magnets 204 for magnetic coupling with the first plurality of magnetic couplers 58. In some embodiments, a comparable shielding configuration is incorporated into the entry frame 34.

Functionally, in some embodiments, the shielding configuration shields or reduces the internal cavity 37 of the magnetic flux from the magnets 204. The shield can also focus the magnetic energy in a desired direction (such as), for example, toward a corresponding magnetic coupler paired with the magnet 204.

Referring to FIG. 16, a substrate container 250 is depicted according to an embodiment of the present invention. Substrate container 250 It includes: a housing part 252 with a frame 254; and a door 256 for providing a closed substrate container 250. Door 256 is equipped with magnets (not depicted) as described above for the magnetic couplers 58 of door 36 and door 130. A gasket (not depicted) can be placed between the door 256 and the housing portion 252. In the depicted embodiment, the housing portion 252 includes a plate 258 positioned proximate to the frame 254. The plates 258 are made of a material that is adsorbed to the magnets, such as an iron-containing material (for example, steel or iron and certain related union gold).

The magnetic latch or magnetic latch assistance of the substrate container 250 operates based on the same principle as the substrate container 30. The magnets of the door 256 are attracted to the plates 258, thereby providing compression to the gasket.

Read [Embodiment] with reference to the drawings, where similar components in different drawings have the same number. [Embodiment] and the drawings do not necessarily depict illustrative embodiments to scale and are not intended to show the scope of the present invention. The illustrative embodiments depicted are not intended to be examples only. Unless the contrary is clearly stated, the selected features of any illustrative embodiment will be incorporated into an additional embodiment.

Each of the additional features and methods disclosed herein can be used separately or combined with other features and methods to provide improved devices and methods, and methods of manufacturing and using them. Therefore, the combination of the features and methods disclosed herein may not need to practice the present invention in the broadest sense and instead only disclose the specific description representative and preferred embodiments.

Those skilled in the art can understand various modifications to the embodiments after reading the present invention. For example, those skilled in the related art will recognize that the various features described for different embodiments can be appropriately combined, not combined, and recombined with other features; alone; or combined in different combinations. Likewise, the various features described above should all be regarded as example embodiments, rather than limiting the scope and spirit of the present invention.

Those who are familiar with related technologies will recognize that various embodiments can include more than any of the above Few features described in the embodiment. The embodiments described herein are not intended to describe in detail the ways in which various features can be combined. Therefore, these embodiments are not mutually exclusive combinations of features; on the contrary, the scope of patent application may include combinations of different individual features selected from different individual embodiments as known to those skilled in the art.

Any incorporation of the above-mentioned documents by reference is limited, so that the incorporation of objects contrary to the content explicitly disclosed herein is not included. The incorporation of any of the above-mentioned documents by reference is further restricted, so that the scope of patent applications contained in these documents is not incorporated by reference. The incorporation of any of the above-mentioned documents by reference is further restricted, so that unless expressly included in this document, any definitions provided in these documents are not incorporated by reference.

As used in this specification and the scope of the appended patent application, the singular forms "one" and "the" include plural references unless the text clearly indicates otherwise. As used in the scope of this specification and the accompanying patent application, the term "or" is adopted in its meaning including "and/or", unless explicitly indicated otherwise herein. The "embodiments", "disclosures", "inventions", "embodiments of the present invention", "disclosed embodiments" and the like contained in the reference refer to the specification of this patent application that is not considered to be prior art, Unless otherwise explicitly indicated in this article.

For the purpose of explaining the scope of the patent application, unless the specific terms "components for..." and "steps for..." are cited in the respective patent applications, it is expressly not intended to invoke 112(f) USC Clause 35 .

30‧‧‧Substrate Container

32‧‧‧Container shell

34‧‧‧Door frame

36‧‧‧door

36a‧‧‧Front panel

36b‧‧‧rear panel

38‧‧‧Outer periphery

52‧‧‧Mechanical door latch

54‧‧‧Latch tip

56‧‧‧Discrete latch position

58‧‧‧Magnetic Coupler

61‧‧‧Magnetized material

62‧‧‧Magnetic Coupler

63‧‧‧Non-magnetic housing

Claims (11)

A substrate container, comprising: a container shell, which includes a door frame; a door, which is seated in the door frame, the door includes an outer periphery concentrically around a door shaft; and a gasket installed to the One of the container shell and the door frame; at least one mechanical door latch that latches the door to the door frame at a plurality of discrete latch positions close to the gasket; and a plurality of magnetic couplers, which are installed To at least one of the door and the door frame, wherein an overall magnetic attraction force is generated between the door and the door frame by the plurality of couplers. The substrate container of claim 1, wherein the at least one mechanical door latch is installed to the door. The substrate container of claim 2, wherein the at least one mechanical door latch is installed in the door, which includes a plurality of latch tips, which extend into the door frame through the outer periphery of the door, so as to move around the door The door is latched to the door frame at the plurality of discrete latch positions of the outer periphery. Such as the substrate container of claim 1, wherein the overall magnetic attraction is within a predetermined range of force. Such as the substrate container of claim 1, wherein: one of the plurality of magnetic couplers and the first plurality of magnetic couplers are installed close to the door Frame and between the plurality of discrete latch positions; a second plurality of magnetic couplers of the plurality of magnetic couplers are mounted to the door, the second plurality of magnetic couplers of the plurality of magnetic couplers are Are substantially aligned with the first plurality of couplers of the plurality of couplers, wherein the first plurality of couplers of the plurality of magnetic couplers and the second plurality of the plurality of magnetic couplers are magnetically coupled The overall magnetic attraction is generated between the devices. The substrate container of claim 5, wherein the first plurality of magnetic couplers of the plurality of magnetic couplers and the second plurality of magnetic couplers of the plurality of magnetic couplers are in a direction parallel to the door axis Essentially aligned. Such as the substrate container of claim 5, wherein the door frame defines a plurality of cavities, and the first plurality of magnetic couplers are installed therein. The substrate container of claim 5, wherein the first plurality of magnetic couplers include a magnetized material and the second plurality of magnetic couplers include an iron-containing material. The substrate container of claim 1, wherein at least some of the magnetic couplers of the first plurality of magnetic couplers are centered near a respective edge of the door frame, and at least some of the second plurality of magnetic couplers are The respective edge of one of the doors is centered. Such as the substrate container of claim 5, wherein a magnetic shielding cover is arranged in at least one of an internal cavity of the substrate carrier and the first plurality of magnetic couplers and the second plurality of magnetic couplers Between those. The substrate container of claim 5, wherein at least some of the first plurality of magnetic couplers or the second plurality of magnetic couplers contain a magnetized material in a non-magnetic housing.

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