TWI701426B - Temperature measuring device - Google Patents

Abstract

A temperature sensor comprising: at least one supporting member; and at least one temperature sensing member. The temperature sensing member includes a balance bar, a sensing member and an elastic member. The balance bar is connected to the support member at a single point and is arranged on the support Below the member, one end of the balance bar is connected to the elastic member, and the other end of the balance bar is connected to the sensing member. The end of the sensing member is more normal than the supporting member. When the sensing member is subjected to a torque relative to the fulcrum, the elastic member is stored An elastic potential energy; when the torque is released, the elastic member releases the elastic potential energy to make the sensing member return to its original position. Through the temperature measuring device of the present invention, fully automatic and real-time temperature monitoring can be performed, and various variables of temperature measurement can be reduced.

Description

Temperature measuring device

The invention relates to a temperature measuring device, and more particularly to a temperature measuring device for real-time monitoring.

During the thermal process, the temperature monitoring of the heat-treated object is often not instantaneous. The traditional method is to take a piece of sample to be tested, manually glue the temperature sensor on the surface of the sample to be tested, send the sample to be tested into the thermal process equipment, and estimate the measured temperature data as the actual thermal process data . This method is not only time-consuming and labor-intensive, the temperature measurement point will also lose accuracy due to the possible offset of the artificial adhesion. The most important thing is that the estimated data cannot replace the temperature data of the actual process, which means that the heat-treated products in production lack real-time temperature monitoring.

Therefore, in order to solve the various problems of the conventional temperature measuring device, the present invention proposes a temperature measuring device for real-time monitoring.

In order to achieve the above and other objectives, the present invention provides a temperature measuring device, which includes: at least one supporting member; and at least one temperature sensing member, including a balance bar, a sensing member and an elastic member, the balance bar The support member is connected with a fulcrum and is arranged below the support member, one end of the balance rod is connected to the elastic member, and the other end of the balance rod is connected to the sensing member, wherein the end of the sensing member is more normal than For the supporting member, when the sensing element is subjected to a torque relative to the fulcrum, the elastic element stores an elastic potential energy; when the torque is released, the elastic element releases the elastic potential energy to make the sensing element return to its original position.

In an embodiment of the present invention, the supporting member includes a frame body and a supporting body, the upper part of the frame body carries the supporting body, and the lower part of the frame body is connected to the fulcrum.

In an embodiment of the present invention, it further includes an adjusting member connected to the elastic member, and the adjusting member applies an adjusting torque to the fulcrum to adjust the height of the sensing member.

In an embodiment of the present invention, there are two supporting members and four temperature sensing members. The supporting members are elongated and arranged parallel to each other. The two ends of each of the supporting members are respectively provided with the Temperature sensing component.

In an embodiment of the present invention, it further includes a temperature recording module connected to the temperature sensing component.

In this way, the temperature measurement device of the present invention can be used to perform fully automatic and real-time temperature monitoring and reduce various variables of temperature measurement.

In order to fully understand the present invention, a detailed description of the present invention is given with the following specific embodiments and accompanying drawings. Those skilled in the art can understand the purpose, features and effects of the present invention from the content disclosed in this specification. It should be noted that the present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be based on different viewpoints and applications, and various modifications and changes can be made without departing from the spirit of the present invention. The following embodiments will further describe the related technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of patent application of the present invention. The description is as follows:

As shown in FIGS. 1 to 3, the temperature measuring device 100 of the embodiment of the present invention includes: at least one supporting member 1 and at least one temperature sensing member 2.

The support member 1 is used to support a test object S, and the support member 1 and the test object S can be in point contact or line contact. Preferably, the test object S is a sheet-shaped glass sheet or silicon substrate, but the invention is not limited to this.

The temperature sensing component 2 includes a balance bar 21, a sensing element 22 and an elastic element 23. The balance bar 21 is connected to the support member 1 with a fulcrum 211 and is provided below the support member 1. One end of the balance rod 21 is connected to the elastic member 23, and the other end of the balance rod 21 is connected to the sensing member 22. As shown in FIG. 1, the normality of the end 221 of the sensor 22 (that is, when the supporting member 1 does not support any object S) is slightly higher than the supporting member 1.

As shown in FIG. 2, when the supporting member 1 supports the object S to be measured, the end 221 is therefore pressed down to ensure that it contacts the object S to be detected and senses the temperature of the object S. A moment is received, so that the elastic member 23 stores an elastic potential energy. When the torque is released (the object to be measured S is removed), the elastic member 23 releases the elastic potential energy to return the sensing member 22 to its original position. At this time, the end 221 returns to be slightly higher than the supporting member 1 to prepare for the next temperature sensing.

With the temperature measuring device 100 of the present invention, when the object S to be measured is fed into the supporting member 1 in the thermal processing equipment in a fully automatic manner (using a robotic arm, etc.), the temperature sensing member 2 can be directly used throughout the entire process. Record real-time temperature monitoring. During the process, it is possible to perform fully automatic and real-time temperature monitoring without manual labor, and reduce various variables of temperature measurement.

Further, in one embodiment, the supporting member 1 includes a frame body 11 and a supporting body 12, the upper part of the frame body 11 carries the supporting body 12, and the lower part of the frame body 11 is connected to the supporting point 211. As shown in FIG. 2, the shape of the support body 12 can reach the smallest area contact with the object S to be measured.

Further, in one embodiment, as shown in FIGS. 1 and 2, the temperature measuring device 100 further includes an adjusting member 3. The adjusting member 3 is connected to the elastic member 23 and applies an adjusting torque to the supporting point 211 to adjust the height of the sensing member 22. For example, the adjusting member 3 may include a bolt, and the adjusting torque is changed according to the depth of the screw down, and the height of the sensing member 22 is correspondingly changed.

Further, in one embodiment, as shown in FIGS. 1 and 2, the temperature measuring device 100 further includes a temperature recording module 4, which is connected to the temperature sensing component 2 to analyze and record the temperature measured by the temperature sensing component 2. Temperature data.

One supporting member 1 and one temperature sensing member 2 can constitute a set of temperature measuring device 100, but the present invention is not limited to this. As shown in FIG. 3, in a preferred aspect, the temperature measuring device 100 has two supporting members 1 and four temperature sensing members 2. The supporting members 1 are elongated and arranged parallel to each other. The two ends of the supporting member 1 are respectively provided with temperature sensing members 2. When the object S to be measured is placed on the supporting member 1, the temperature sensing member 2 can respectively sense four points to be measured of the object S to be measured. However, the present invention is not limited to this. The temperature measuring device 100 may include more groups of the supporting member 1 and the temperature sensing member 2, and the position of the temperature sensing member 2 can also be changed at will.

The present invention has been disclosed in the above embodiments. However, those skilled in the art should understand that the embodiments are only used to describe the present invention and should not be interpreted as limiting the scope of the present invention. It should be noted that all changes and substitutions equivalent to this embodiment should be included in the scope of the present invention. Therefore, the protection scope of the present invention should be defined by the scope of the patent application.

100: Temperature measuring device 1: supporting member 11: Frame 12: Support 2: Temperature sensing component 21: Balance bar 211: Fulcrum 22: sensor 221: End 23: Elastic 3: adjust components 4: Temperature recording module S: DUT

FIG. 1 is a schematic diagram of the unsupported state of the temperature measuring device according to the embodiment of the present invention. 2 is a schematic diagram of the supporting state of the temperature measuring device according to the embodiment of the present invention. FIG. 3 is a three-dimensional schematic diagram of a temperature measuring device according to an embodiment of the present invention.

100: Temperature measuring device

1: supporting member

11: Frame

12: Support

2: Temperature sensing component

21: Balance bar

211: Fulcrum

22: sensor

221: End

23: Elastic

3: adjust components

4: Temperature recording module

Claims (5)

A temperature measuring device, which includes: At least one supporting member; and At least one temperature sensing member includes a balance bar, a sensing element and an elastic member, the balance bar is connected to the support member at a point and is disposed below the support member, one end of the balance bar is connected to the elastic member, The other end of the balance bar is connected to the sensing element, wherein the end of the sensing element is more normal than the supporting member, and when the sensing element is subjected to a moment relative to the fulcrum, the elastic element stores an elastic potential energy; When the torque is released, the elastic element releases the elastic potential energy to return the sensing element to its original position. The temperature measuring device according to claim 1, wherein the supporting member includes a frame body and a supporting body, the upper part of the frame body carries the supporting body, and the lower part of the frame body is connected to the fulcrum. The temperature measuring device according to claim 1, further comprising an adjusting member connected to the elastic member, and the adjusting member applies an adjusting torque to the fulcrum to adjust the height of the sensing member. The temperature measuring device according to claim 1, having two supporting members and four temperature sensing members, the supporting members are elongated and arranged parallel to each other, and the two ends of each supporting member are respectively The temperature sensing member is provided. The temperature measuring device according to claim 1, further comprising a temperature recording module connected to the temperature sensing component.

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