TWI693163B - Fluid containing member - Google Patents

Abstract

A fluid containing member includes a first containing chamber that contains a first fluid, and a second containing chamber that contains a second fluid. The first containing chamber and the second containing chamber are separated from each other by a first separation film on a side of the first containing chamber and a second separation film on a side of the second containing chamber. The first separation film and the second separation film are partly connected to each other or partly contact each other so as to move together in accordance with a change in an internal pressure of the first containing chamber or an internal pressure of the second containing chamber.

Description

Fluid containment member

One disclosed aspect of this embodiment relates to a fluid containing member that contains fluid.

As the inkjet printer and the imprinting apparatus, there are those including a fluid accommodating member that contains a fluid such as ink or imprinting material. Japanese Patent Laid-Open No. 2016-032103 describes a structure in which the inside of such a fluid containing member is divided into two containing parts or liquid chambers, and one containing part is used to adjust the other containing part pressure. The two accommodating parts are separated by a flexible membrane.

FIG. 10 shows the fluid containing member described in Japanese Patent Laid-Open No. 2016-032103. The fluid containing member described in Japanese Patent Laid-Open No. 2016-032103 includes a mechanism to detect the breakage of the separation membrane 1. On the side of the second storage chamber 6, a liquid that is not easily mixed with the liquid filling the first storage chamber 5 of the communication head 14 is used, or a liquid having a specific gravity smaller than that of the liquid filling the first storage chamber 5 is used. Therefore, when the separation membrane 1 is damaged, the liquid leaking from the first storage chamber 5 to the side of the second storage chamber 6 stays in the measurement area 52 located below the second storage chamber 6. A sensor 53 is provided in the vicinity of the measurement area 52, and the sensor 53 is used as a detection unit capable of detecting physical properties such as refractive index of the liquid. In Japanese Patent Laid-Open No. 2016-032103, by using the sensor 53 to detect the change in the physical properties of the liquid remaining in the measurement area, the breakage of the separation membrane 1 can be detected.

According to the method described in Japanese Patent Laid-Open No. 2016-032103, it is possible to detect breakage of the separation membrane. However, when the internal pressure of the first storage chamber and the internal pressure of the second storage chamber are equal to each other, although the liquid (fluid) filling the first storage chamber and the liquid (fluid) filling the second storage chamber contact each other, each liquid flows out It still takes time to reach the accommodation room on the opposite side, and as a result, the detection may be delayed. Depending on the combination of fluids, even if the fluids are only in contact with each other, either of the fluid in the first storage chamber and the fluid in the second storage chamber may deteriorate. Therefore, it is necessary that the first fluid and the second fluid first avoid contact with each other as much as possible and do not mix with each other.

An aspect of this embodiment provides a fluid containing member including: a first containing chamber containing a first fluid; and a second containing chamber containing a second fluid. The first storage chamber and the second storage chamber are separated from each other by a first separation membrane located on one side of the first storage chamber and a second separation membrane located on the side of the second storage chamber. The first separation membrane and the second separation membrane are partially connected to each other or partially in contact with each other to move together according to a change in the internal pressure of the first storage chamber or a change in the internal pressure of the second storage chamber .

Other features of the present invention will become apparent by the following description of exemplary embodiments with reference to the drawings.

The present invention provides a fluid accommodating member that suppresses mixing of fluids accommodated in two accommodating chambers due to breakage of a separation membrane between the two accommodating chambers.

The following describes embodiments for implementing the present invention.

Figure 1 shows an exemplary fluid containment member. The fluid accommodating member 13 includes a housing 11 and a housing 12 and is a cassette-type accommodating member including a discharge head 14. The discharge head 14 has a discharge port 15 and can discharge the fluid contained in the fluid containing member from the discharge port 15. The discharge head 14 need not be provided in the fluid containing member 13. For example, the discharge head 14 may be arranged separately from the fluid containing member 13 and connected to the fluid containing member 13 via, for example, a communication pipe.

An enlarged view of the discharge head 14 is shown in FIG. 2. The discharge port 15 is a hole formed on the surface of the discharge head 14 with a density of about 500 to 1000 holes per inch. The meniscus 17 on the fluid surface is formed in each discharge port 15. The discharge port 15 communicates with the corresponding pressure chamber 19. An energy generating element (not shown) for generating energy for discharging fluid is provided in the corresponding pressure chamber 19. Piezoelectric elements or heating elements can be used as energy generating elements. When a piezoelectric element is used, by driving and controlling the piezoelectric element in the pressure chamber 19 of the corresponding discharge port 15, the volume in the pressure chamber 19 changes to discharge the fluid in the pressure chamber to the outside. The piezoelectric element can be manufactured by using, for example, MEMS (Micro Electro Mechanical System) technology. The discharge head is not provided with a control valve between the pressure chamber 19 and the first containing chamber 5 containing the fluid discharged from the discharge head 14. Therefore, by controlling the internal pressure of the first storage chamber 5 to a negative pressure that is smaller than the external pressure (atmospheric pressure) by about 0.3 kPa to 0.5 kPa, for example, the fluid forms a meniscus 17 at the opening surface of each discharge port 15, To prevent the fluid from dripping at undesirable moments.

1 again, the structure of the fluid containing member will be described. The fluid containing member includes a first containing chamber 5 containing a first fluid and a second containing chamber 6 containing a second fluid. In this structure, the first housing chamber 5 is formed in the housing 11 by closing the opening of the concave portion of the housing 11 with the first separation membrane 1 (the first housing chamber 5 includes the housing closed by the first separation membrane 1 A concave portion, and the second accommodating chamber 6 includes a concave portion of the housing closed by the second separation membrane 2). The second storage chamber 6 in the casing 12 is formed by closing the opening of the concave portion of the casing 12 with the second separation membrane 2. By combining the housing 11 and the housing 12, the first separation membrane 1 and the second separation membrane 2 separating the first storage chamber 5 and the second storage chamber 6 are provided between the first storage chamber 5 and the second storage chamber 6 . That is, the first storage chamber 5 and the second storage chamber 6 are separated by the first separation membrane 1 located on the side of the first storage chamber 5 and the second separation membrane 2 located on the side of the second storage chamber 6. In other words, the first separation membrane 1 is a portion of the first storage chamber 5 that directly contacts the first fluid. As will be explained later, the first separation membrane 1 can be moved in any direction to expand or contract the volume of the first storage chamber 5, which accordingly changes the internal pressure of the first storage chamber 5. Similarly, the second separation membrane 2 is a portion of the second containing chamber 6 that directly contacts the second fluid. As will be explained later, the second separation membrane 2 can move together with the first separation membrane 1 in either direction, expanding or contracting the volume of the second storage chamber 6, which accordingly changes the internal pressure of the second storage chamber 6 . As will be explained later, in one embodiment, the first separation membrane 1 and the second separation membrane 2 may be separated by a gap or space 4 and may be connected by a bridge 3.

The first storage chamber 5 communicates with the discharge head 14 and communicates with the external space via the discharge head 14. The second accommodating chamber 6 is connected to the auxiliary storage tank by a connecting pipe 24.

The first separation membrane 1 and the second separation membrane 2 are partially connected to each other or partially in contact with each other. First, an example in which the first separation membrane 1 and the second separation membrane 2 are partially connected to each other is explained. In FIG. 1, the first separation membrane 1 and the second separation membrane 2 are partially connected to each other by a bridge 3.

In this embodiment, the first storage chamber 5 and the second storage chamber 6 are separated by two separation membranes, namely the first separation membrane 1 and the second separation membrane 2. Therefore, even if one of the separation membranes is damaged, as long as the other separation membrane continues to exist, the mixing of the first fluid contained in the first storage chamber 5 and the second fluid contained in the second storage chamber 6 can be suppressed.

Next, the relationship between the internal pressures (pressures of the first and second fluids) of the first storage chamber 5 and the second storage chamber 6 and the corresponding changes in the shape of the storage chamber will be explained. When the internal pressure of the first storage chamber 5 and the internal pressure of the second storage chamber 6 are equal to each other, the shape of each storage chamber is maintained. In contrast, when there is a difference between the internal pressure of the first storage chamber 5 and the internal pressure of the second storage chamber 6, the first separation membrane 1 and the second separation membrane 2 move together to the side with low internal pressure ( Move in the same direction at the same time). When the difference between the internal pressures becomes zero, it stops moving. The loop (moving and stopping) is repeated. Therefore, the internal pressure of the first storage chamber 5 and the internal pressure of the second storage chamber 6 can be kept equal to each other. More specifically, since the volume inside the first storage chamber 5 decreases as the first fluid is discharged from the discharge head 14, the internal pressure decreases accordingly. At this time, since the volume inside the second storage chamber 6 has not changed, the internal pressure of the second storage chamber 6 becomes relatively higher than the internal pressure of the first storage chamber 5. Here, the first separation membrane 1 and the second separation membrane 2 are partially connected to each other. Therefore, in the fluid accommodating member 13, the first separation membrane 1 and the second separation membrane 2 move together toward the side of the first accommodating chamber 5 by an amount corresponding to the volume of the discharged first fluid. At the same time, as a result of the movement of the second separation membrane 2, the second fluid is drawn into the second storage chamber 6 from the auxiliary reservoir 26 via the connection pipe 24. This makes the internal pressure of the first storage chamber 5 and the internal pressure of the second storage chamber 6 equal to each other again, and is in a balanced state. In this way, the internal pressure of the first storage chamber 5 is adjusted by the second fluid contained in the second storage chamber 6. That is, when the internal pressure of any one of the first storage chamber 5 and the second storage chamber 6 changes, the first separation membrane 1 and the second separation membrane 2 move together according to the change in internal pressure. In order to move the first separation membrane 1 and the second separation membrane 2 together, the first separation membrane 1 and the second separation membrane 2 are partially connected to each other by a bridge 3.

The first separation membrane 1 and the second separation membrane 2 are each flexible membranes. It is desirable that the first separation membrane 1 is formed of a material resistant to the first fluid contacted by the first separation membrane 1 and the second separation membrane 2 is formed of a material resistant to the second fluid contacted by the second separation membrane 2. The first separation membrane 1 and the second separation membrane 2 may each be formed of a fluororesin such as PTFE (polytetrafluoroethylene). However, since there are many fluororesins with high hardness, it is technically difficult to form the first separation membrane 1 and the second separation membrane 2 to be thin. Since the first separation membrane 1 contacts the first fluid discharged from the discharge head 14, the first separation membrane 1 is formed of a fluororesin such as PTFE. On the other hand, the second separation membrane 2 does not substantially contact the first fluid. Therefore, examples of the material of the second separation membrane 2 include PE (polyethylene), PVC (polyvinyl chloride), PET (polyethylene terephthalate), PVAL (polyvinyl alcohol), and PVDC (polyvinylidene dichloride) Vinyl chloride). Other examples are polyamide synthetic resins such as nylon. In this way, the first separation membrane 1 and the second separation membrane 2 can be formed of different materials according to their desired characteristics.

As shown in FIG. 1, the second storage chamber 6 is connected to the auxiliary storage tank 26 via a connection pipe 24. Since the secondary reservoir 26 contains the second fluid 27, the interface (liquid surface) of the second fluid 27 is located below the discharge port 15 of the discharge head 14 in the direction of gravity. Fig. 3 shows this state. The liquid level of the second fluid 27 is at the position ΔH below the discharge port 15. Here, each discharge port 15 of the discharge head 14 is circular with a diameter of 10 μm, and it is assumed that a drop of ink having a density approximately equal to the density of water is discharged at 1 pL. In this case, in order to maintain the state of each meniscus 17 shown in FIG. 2, it is desirable to control the internal pressure of the first storage chamber 5 to a pressure lower than the external pressure by 0.40±0.04 kPa. Therefore, it is desirable that ΔH is 41±4 mm. The liquid level sensor 41 is arranged on the side of the auxiliary reservoir 26. When the height of the liquid surface relative to the reference liquid surface (the height of 41 mm below the discharge port 15) exceeds the range of ±4 mm, the correction operation is started. That is, the liquid supply pump 32 and the control valve 31 are driven to supply the second fluid from the main tank 34 to the sub tank 26 or return the second fluid from the sub tank 26 to the main tank 34. This controls the liquid level in the desired area. That is, the pressure of the first fluid is adjusted by the second fluid. The pressure of the second fluid is adjusted by a pressure adjustment unit (such as the liquid supply pump 32, the auxiliary reservoir 26, and the main reservoir 34 in communication with the second storage chamber 6).

The first storage chamber 5 and the second storage chamber 6 are separated by the first separation membrane 1 and the second separation membrane 2. When the first separation membrane 1 and the second separation membrane 2 move and deform independently, even if the height of the liquid level in the sub tank 26 is adjusted, it is difficult to control the pressure in the discharge head 14. For example, even if an attempt is made to control the liquid level in the auxiliary storage tank 26 below the discharge port 15, only the second separation membrane 2 continues to move in the X direction in FIG. 1 until the internal pressure of the second storage chamber 6 Becomes equal to the external pressure. In addition, the second fluid overflows from the inlet 25 of the sub-tank 26 or the second fluid is supplied to the main tank 34 in an amount corresponding to the amount of the second fluid returned due to the liquid adjustment function of the sub-tank 26. In either case, the second containing chamber 6 eventually runs out of the second fluid, and the second separation membrane 2 is trapped on the wall surface of the housing 12. Therefore, the second separation membrane 2 is directly trapped on the wall surface of the casing, and the shape of the second separation membrane 2 is changed to fit the wall surface of the casing. At this time, since the first separation membrane 1 does not move together with the second separation membrane 2, the pressure in the discharge head 14 does not change in response to the liquid level in the sub tank 26.

In contrast, in the present embodiment, the first separation membrane 1 and the second separation membrane 2 are partially connected to each other. In FIG. 1, the first separation membrane 1 and the second separation membrane 2 are connected to each other by a plurality of bridges 3. Therefore, the first separation membrane 1 and the second separation membrane 2 move together, and the internal pressure of the first storage chamber 5 and the internal pressure of the second storage chamber 6 remain equal to each other. This makes the internal pressure of the storage chamber equal to each other due to the negative pressure generated by the meniscus 17 at each discharge port 15.

4A and 4B show details of the shape of the first separation membrane 1 and the shape of the second separation membrane 2. The first separation membrane 1 and the second separation membrane 2 are formed by molding the flexible membrane into a convex shape so as to match the shape of the concave portion of the case. As shown in FIG. 4A, the first separation membrane 1 and the second separation membrane 2 overlap each other to irradiate them with a laser by using a laser processor according to the weld line 71 shown in FIG. 4B, and the thermal fusion is irradiated section. The thermally welded portion becomes the bridge 3. As shown in FIG. 1, the portion between the first separation membrane 1 and the second separation membrane 2 is formed in such a manner as to be connected to outside air through the vent hole 18. Here, the first storage chamber 5 and the second storage chamber 6 are maintained in a negative pressure state equal to the external pressure, so that the unwelded portions of the two separation membranes are in an expanded state relative to the storage chamber, and a space 4 is formed.

It is desirable that as the amount of the first fluid decreases, the first separation membrane 1 and the second separation membrane 2 move smoothly. The first separation membrane 1 shown in FIG. 4A includes: a top portion 1a, which is a convex top and a flat surface; a side portion 1c, which is located on the side and inclined with respect to the top portion 1a; and a rounded portion 1b, which It has a rounded shape and is arranged between the top portion 1a and the side portion 1c. Since the second separation membrane 2 has a shape consistent with that of the first separation membrane 1, the convex portion of the second separation membrane 2 fits inside the concave side of the convex portion of the first separation membrane 1. The rounded shape here refers to a curved line of at least two curved segments having different curvatures and connected at an inflection point, similar to the curved line in the letter "R". In such a separation membrane, it is desirable that the arrangement density of the bridge 3 per unit area is higher at the top portion than at the side portion 1c and the rounded portion 1b. In addition, it is desirable that the arrangement density of the bridge 3 per unit area is the lowest at the rounded portion 1b. This is because when there are too many bridges 3 at the rounded portion 1b and the side portion 1c, the rigidity increases, making it difficult for the separation membrane to move smoothly. Here, a weld line 71 is arranged for the bridge. However, it is desirable that the number of weld lines 71 is as follows: the number of weld lines 71 at the rounded portion 1b <the number of weld lines 71 at the side portion 1c <the number of weld lines 71 at the top portion 1a.

It is desirable that when the first separation membrane 1 or the second separation membrane 2 is broken, the fluid contained in the storage chamber is suppressed from dripping from the cartridge. Therefore, it is desirable that the weld line 71 (bridge 3) is formed to extend in the Y-axis direction (in a direction orthogonal to the gravity direction) in the orientation of the fluid containing member in use. It is desirable that the weld line 71 (bridge 3) has a lattice form. The orientation of the fluid containing member in use refers to the orientation of the fluid containing member when, for example, the fluid containing member is installed in a recording device such as an inkjet printer or an imprinting apparatus.

The following method is an example of combining the first separation membrane 1 and the second separation membrane 2. First, the first separation membrane 1 and the second separation membrane 2 are formed into a convex shape extending along the inner wall surface of the casing 11. Next, when they are combined in the fluid accommodating member 13, they are temporarily deformed in such a manner as to project in the opposite direction along the inner wall surface of the housing 12. Thereafter, the first separation membrane 1 and the second separation membrane 2 are sandwiched between the casing 11 and the casing 12. The spacer may be sandwiched between the first separation membrane 1 and the second separation membrane 2 so that the first separation membrane 1 and the second separation membrane 2 do not contact each other except at the bridge. The spacer may be at least integrally formed with at least one separation membrane.

The casing 11 and the casing 12 may be formed in a symmetrical shape with respect to a plane bounded by the mounting portion of the first separation membrane 1 or the second separation membrane 2. For example, the convex shape of the first separation membrane 1 and the convex shape of the second separation membrane 2 may be formed so as to be convex in opposite directions. Thus, when the first fluid is consumed, the first fluid in the first storage chamber 5 can be sufficiently consumed until the first separation membrane 1 and the second separation membrane 2 are deformed along the inner wall surface of the housing 11.

In order to smoothly move the first separation membrane 1 and the second separation membrane 2, it is desirable to perform spot welding (such as round spot welding) on the side portion. It is desirable to perform line welding in a direction orthogonal to the moving directions of the first separation membrane 1 and the second separation membrane 2. That is, it is desirable to form the bridge 3 in the shape of dots (such as dots) or lines. When the shape is a line, the first separation membrane 1 and the second separation membrane 2 are connected to each other by a linear bridge.

The structure in which the first separation membrane 1 and the second separation membrane 2 are partially connected to each other by the bridge 3 shown in FIG. 1 has been explained above. However, in the present embodiment, the first separation membrane 1 and the second separation membrane 2 may partially contact each other. That is, the bridge 3 need not be a portion protruding from the surface of the first separation membrane 1 and the surface of the second separation membrane 2. For example, the portions of the first separation membrane 1 and the second separation membrane 2 are fused and only contact with each other may be the bridge 3.

In FIGS. 4A and 4B, for example, by using PTFE membranes as the first separation membrane 1 and the second separation membrane 2, they are irradiated with laser light according to the weld line 71, and they are thermally welded, the first separation membrane 1 and the first The two separation membranes 2 are partially connected to each other (or partially in contact with each other). Laser welding is a technique often used when joining two parts of the same material together. On the other hand, the fluid containing member of this embodiment can contain a photoresist as the first fluid. In particular, when the photoresist is an imprint material, it is necessary to minimize the contamination of metal ions. Therefore, the separation membrane is, for example, a PTFE membrane. However, considering the ease of laser welding, one of the components needs to transmit the laser beam. Therefore, it is desirable that a transparent PTFE membrane is used for the first separation membrane 1. On the other hand, it is desirable that the interface to be welded is an opaque surface that allows heat to be easily generated by laser irradiation. Therefore, it is desirable that an opaque PTFE membrane is used for the second separation membrane 2. When the second separation membrane 2 is a PTFE membrane, since it is difficult to coat the surface of the second separation membrane 2, by adding carbon powder to the material and reducing the transmittance, an opaque surface can be achieved. Since the first separation film 1 is a separation film that directly contacts the photoresist, the material of the first separation film 1 needs to be a material with a small amount of additives. Therefore, it is desirable that the first separation membrane 1 does not contain additives. On the other hand, when formed of a thin-film resin member, static electricity is easily generated, and as a result, carbon is added to the second separation membrane 2 and grounded to allow charge to escape.

4A and 4B show that the first separation membrane 1 and the second separation membrane 2 are thermally welded by using a laser and the welded portion becomes a bridge 3, that is, the first separation membrane 1 and the second separation membrane 2 are in contact with each other (or They are connected to each other). The first separation membrane 1 and the second separation membrane 2 may be partially in contact with each other (or partially connected to each other) by other methods. An example of this is the connection shown in FIGS. 5A to 5C. As shown in FIG. 5A, as in FIGS. 4A and 4B, the first separation membrane 1 and the second separation membrane 2 are molded with a convex shape and overlapped with each other in parallel. However, as shown in FIG. 5B, the surface of the second separation membrane 2 is provided with a convex portion 72. The convex portion 72 may be formed in a partially convex manner by molding and processing the second separation membrane 2 or may be formed by forming a different convex member such as PTFE. The bridge 3 is formed by welding and fusing the protruding portions 72 with respect to the first separation membrane 1 to fix and connect them. Alternatively, as shown in FIG. 5C, by arranging the convex portion 72 such as a linear convex portion as a different member between the first separation membrane 1 and the second separation membrane 2, and welding or fusing They are fixed and contacted (connected), and can also form a bridge 3 (when the protruding portion 72 is welded to the first separation membrane 1 and the second separation membrane 2, the protruding portion 72 becomes the bridge 3). When the convex portion 72 is formed by molding the second separation membrane 2, the first separation membrane 1 and the second separation membrane 2 are in contact with each other. When the convex portions 72 are formed from the first separation membrane 1 and the second separation membrane 2, respectively, the first separation membrane 1 and the second separation membrane 2 are connected to each other.

As an example of the bridge 3, a so-called double-sided tape having adhesive layers on both sides of the support member can be used. In order to maintain each separation membrane even when the first separation membrane 1 or the second separation membrane is damaged and fluid leaks from there, it is desirable that the first separation membrane 1 and the second separation membrane 2 be separated by A fluid material and a material resistant to the second fluid are formed. When the fluid containing member is used as, for example, a cassette of an imprinting apparatus, it is desirable to use a material that allows little degassing to enter the imprinting apparatus. From these viewpoints, it is desirable that the adhesive layer is formed of acrylic resin.

The first separation membrane 1 and the second separation membrane 2 do not have to have a convex shape protruding from the center thereof. FIG. 6A shows the fluid containing member 13 closing the first separation membrane 1 and the second separation membrane 2 in the form of a bag. FIG. 6B is an enlarged view of the first separation membrane 1 and the second separation membrane 2 and shows the connection pipe 24 protruding from the inside to the outside of the bag-shaped second separation membrane 2 in the form of a straw. Similar to the form shown in FIG. 1, the connection pipe 24 penetrates the housing of the fluid containing member 13 and reaches the auxiliary reservoir 26, and the second fluid is contained in the bag-shaped second separation membrane 2. The bag-shaped separation membrane 1 is arranged outside the second separation membrane 2 so as to wrap the second separation membrane 2. The first separation membrane 1 and the second separation membrane 2 are partially in contact with each other (partially connected to each other) by the bridge 3. The vent hole 18 penetrates the first separation membrane 1 from the space 4 between the first separation membrane 1 and the second separation membrane 2 and protrudes from there. The vent hole 18 penetrates the housing of the fluid accommodating member 13 and is connected to the outside.

In the form shown in FIG. 1, the housing 11 and the housing 12 respectively have the functions of an external partition of the storage chamber that contains the first fluid and an external partition of the storage chamber that contains the second fluid. However, in the form shown in FIG. 6A, the bag containing the second fluid floats in the first fluid. Other aspects are the same as those illustrated in FIG. 1, for example. Even in the form shown in FIG. 6A, the effect of the present embodiment can be achieved.

It is desirable that the thickness of the first separation membrane 1 and the thickness of the second separation membrane 2 are greater than or equal to 10 μm and less than or equal to 100 μm. The thickness of the first separation membrane 1 and the thickness of the second separation membrane 2 may be different from each other. When the thickness of the first separation membrane 1 and the thickness of the second separation membrane 2 are different from each other, the rigidity of the separation membrane as a whole is reduced, so that it is possible to smoothly as the amount of the first fluid decreases due to the discharge of the first fluid The first separation membrane 1 and the second separation membrane 2 are moved. Considering that the first separation membrane 1 contacts the first fluid, it is desirable that the first separation membrane 1 is thicker than the second separation membrane 2. For example, it is desirable that the thickness of the first separation membrane 1 is greater than or equal to 1.3 times and less than or equal to 2.5 times the thickness of the second separation membrane 2. However, for example, when the internal pressure of the first storage chamber 5 is maintained at an internal pressure lower than the external pressure by 0.4±0.04 kPa, it is desirable that the first separation membrane 1 and the second separation membrane 2 have a pressure difference of 0.01 kPa or less Freely deform and move without resistance. Here, it is assumed that the thickness of the first separation membrane 1 and the thickness of the second separation membrane 2 are approximately uniform in their corresponding separation membranes (at least the thickness of the top portion 1a, the thickness of the rounded portion 1b and the thickness of the side portion 1c Is roughly uniform).

On the other hand, the separation membrane thickness in one separation membrane can be made different. For example, FIG. 7 shows the structure of the first separation membrane 1. As shown in FIG. 7, it is desirable that the outer edge portion 7 of the first separation membrane 1 is thicker than the top portion 8 of the first separation membrane 1. This can suppress the breakage of the separation membrane when welding or adhering the separation membrane. When the thickness of the top portion 8 is greater than the thickness of the rounded portion and the thickness of the side portion, the separation membrane can be smoothly moved.

Examples of the method of molding the top portion 8 include vacuum molding while heating, blow molding while heating, and molding using a mold while heating. When molding using a mold, the outer edge portion 1d of the separation membrane in a planar state is fixed to the fixing frame and the outer edge portion 1d is heated, and the protruding portion (top portion 1a) shown in FIG. 4A is pushed out by using the mold , Fillet portion 1b and side portion 1c) methods are available. However, the method is not limited to such vacuum forming and forming using a mold, so that it is possible to select a forming method suitable for the material of the flexible member that becomes the separation membrane and for the required shape of the separation membrane.

As the separation membrane, a separation membrane other than the first separation membrane 1 and the second separation membrane 2 can be used. For example, three separation membranes can be used. Even in such a structure, by partially connecting or partially contacting the separation membranes, the separation membranes can be moved together and the effect of the present embodiment can be provided.

For example, when a separation membrane is manufactured or a hole is formed during the movement of the separation membrane, the separation membrane may be damaged. When the first fluid and the second fluid are mixed, there is a problem that the first fluid is trapped in the discharge head, and even if the first fluid is discharged from the discharge head, a good image or pattern cannot be formed. In contrast, in this embodiment, as described above, even if one of the first separation membrane 1 and the second separation membrane 2 breaks, as long as the other of the first separation membrane 1 and the second separation membrane 2 Without damage, the mixing of the first fluid and the second fluid can be suppressed.

FIG. 8 shows a state where the second separation membrane 2 is broken and holes 73 are formed in the second separation membrane 2. Since the space 4 that is a gap between the first separation membrane 1 and the second separation membrane 2 communicates with outside air, the pressure in the space 4 is equal to the atmospheric pressure. On the other hand, as shown in FIG. 3, the pressure of the first storage chamber 5 and the pressure of the second storage chamber 6 are each adjusted to a negative pressure that is smaller than the atmospheric pressure, for example, 0.4 kPa. Thereby, from the relatively high-pressure space 4 toward the relatively low-pressure second storage chamber 6, the air from the hole 73 is converted into bubbles 74 and the bubbles 74 are sucked in. Since the pressure of the air bubble 74 is equal to the atmospheric pressure, the internal pressure of the second accommodating chamber 6 rises, and the second fluid is pushed toward the auxiliary reservoir 26 via the connection pipe 24. In this way, even if the second separation membrane 2 is formed with the hole 73, it is possible to prevent the first fluid contained in the first storage chamber 5 and the fluid contained in the second storage chamber 6 from contacting each other.

On the other hand, when holes are formed in the first separation membrane 1, air bubbles are sucked into the first storage chamber 5 and the internal pressure of the first storage chamber 5 rises. As a result, the first separation membrane 1 and the second separation membrane 2 move toward the second storage chamber 6 side, so that the amount of the second fluid whose volume is equal to the volume of the second fluid that has moved is directed toward the auxiliary reservoir 26 via the connection pipe 24 roll out. In addition, it is possible to prevent the first fluid contained in the first storage chamber 5 and the second fluid contained in the second storage chamber 6 from contacting each other.

Since the space 4 is connected to outside air, the description so far assumes that the pressure in the space 4 between the first separation membrane 1 and the second separation membrane 2 is equal to the atmospheric pressure. However, even if an airtight space is formed as a result of first adjusting the pressure of a valve provided for communication with outside air and then closing the valve, the pressure in the space 4 and the first storage chamber 5 can be maintained And the difference between the pressure of the second storage chamber 6.

When a hole is formed in one of the separation membranes and the second fluid is pushed toward the secondary reservoir 26, any damage in the separation membrane can be detected by detecting the movement of the second fluid.

Here, the weld line 71 as the bridge 3 will be described in more detail. In FIG. 4B, the weld line 71 is an independent line and does not cross each other. Due to the above structure, no closed space is formed between the first separation membrane 1 and the second separation membrane 2. When the entire surface of the first separation membrane 1 and the entire surface of the second separation membrane 2 are in close contact with each other, or when the weld line forms a closed space, even if the first separation membrane 1 or the second separation membrane 2 is damaged, it is supplied from the outside. The air path of the bubble 74 shown in 8 is blocked. Therefore, the bridge 3 is arranged discretely so that even if various positions in the first separation membrane 1 and the second separation membrane 2 in the fluid containing member 13 are damaged, a path for supplying external air to the damaged position is retained.

In particular, when the first separation membrane 1 and the second separation membrane 2 are in close contact with each other, the separation membrane in close contact with each other has a rigidity equal to that of a thin film having a thickness equal to the thickness of the two membranes together. The force required to deform the membrane is about ten times the force required when the two separation membranes move and deform together. Therefore, the membrane may no longer be able to respond to weak pressure differences.

So far, the case where the space that is the gap between the first separation membrane 1 and the second separation membrane 2 communicates with the outside air via the vent hole 18 has been described. However, the space between the first separation membrane 1 and the second separation membrane 2 need not be filled with air. As shown in FIG. 3, the case where the internal pressure of the first storage chamber 5 and the internal pressure of the second storage chamber 6 are equal to each other and these internal pressures are set to a negative pressure of a few kPa relative to the external pressure. In this state, when one of the separation membranes is broken, in order to keep the first fluid and the second fluid from contacting each other, the fluid filling the space 4 need not be air. In addition, the pressure of the space 4 need not be equal to the external pressure. That is, the vent hole 18 does not have to communicate with outside air.

9 shows the fluid containing member 13 in which the vent hole 18 communicates with the air reservoir 37 in an airtight state. The gas storage tank 37 has a pressure of, for example, 110 kPa, which is greater than or equal to the external pressure. The gas storage tank 37 is sealed with chemically cleaned nitrogen. According to such a structure, for example, the first fluid is a photoresist, and even if the first separation membrane 1 is damaged, it is possible to suppress the change in the photosensitive performance of the photoresist due to the contact of oxygen with the first fluid. Since the chemically cleaned nitrogen does not contain metal ions, even if the chemically cleaned nitrogen comes into contact with the first fluid, the first fluid will not be contaminated with metal ions. In addition, since the internal pressure of nitrogen gas is higher than the internal pressure of the first storage chamber 5, when the separation membrane is broken, the nitrogen gas flows into the first storage chamber 5 side earlier than the first fluid flows out to the space 4 side. By raising the pressure of the first storage chamber 5 and the pressure of the second storage chamber 6, any breakage of the separation membrane can be detected.

So far, a description has been given of a structure in which the first separation membrane 1 and the second separation membrane 2 are partially connected to each other or partially contact each other by the bridge 3. Instead of bringing the first separation membrane 1 and the second separation membrane 2 into contact through the bridge 3, it is possible to reduce the pressure of the space 4 between the first separation membrane 1 and the second separation membrane 2 (for example, by making their The pressure is lower than the external pressure (atmospheric pressure)) to bring the first separation membrane 1 and the second separation membrane 2 into contact with each other. More specifically, it is possible to hermetically seal the space 4, provide a pressure control unit for controlling the pressure of the space 4 to a predetermined pressure, adjust the pressure of the space 4 by the pressure control unit and make the first separation membrane 1 and the second separation membrane 2 touch each other. According to this method, due to, for example, wrinkles generated when the first separation membrane 2 and the second separation membrane 2 are in contact with each other or wrinkles originally possessed by the first separation membrane 1 and the second separation membrane, the first separation membrane 1 and The second separation membranes 2 are partially in contact without contacting their entire surfaces. As a result, as explained so far, the first separation membrane 1 and the second separation membrane 2 can move together according to the change in the internal pressure of the first storage chamber 5 or the second storage chamber 6. Compared with a method in which the first separation membrane 1 and the second separation membrane 2 are brought into contact due to thermal fusion (the first separation membrane 1 and the second separation membrane 2 are thermally welded together), this method can suppress the hardening of the separation membrane And damaged. Compared with when the first separation membrane and the second separation membrane are brought into contact with or connected to each other by the bridge 3 (in particular, when the bridge 3 is a double-sided tape), it is possible to suppress an increase in the rigidity of the separation membrane. In order to achieve an ideal contact state, it is desirable that the pressure of the space 4 between the first separation membrane 1 and the second separation membrane 2 is smaller than the external pressure, in the range of greater than or equal to 0.4 kPa and less than or equal to 5.0 kPa. It is more desirable that the pressure of the space 4 between the first separation membrane 1 and the second separation membrane 2 is smaller than the external pressure and is in the range of 0.5 kPa or more and 3.0 kPa or less.

Although the first separation membrane 1 and the second separation membrane 2 may be basically formed to move together by being partially connected to each other or by being in partial contact with each other, a more desirable range is illustrated. The more desirable range differs depending on whether they are connected to each other or contact each other.

First, the case where the first separation membrane 1 and the second separation membrane 2 are partially connected to each other is explained. It is expected that they are connected at multiple locations. In order to prevent the formation of a large gap between the first separation membrane 1 and the second separation membrane 2 when they move together, it is desirable to arrange a plurality of connection positions as discretely as possible. Therefore, it is desirable that in the plane where the first separation membrane 1 and the second separation membrane 2 face each other, a plurality of connection positions are arranged at least near the center of gravity of the plane (at a position closer to the center of gravity than near the outer periphery) and close to the outer periphery (At a position closer to the periphery than to the center of gravity). When the first separation membrane 1 and the second separation membrane 2 are partially connected to each other, as the area of the connection position decreases, the rigidity of the entire separation membrane can be reduced, and the first separation membrane 1 and the second separation membrane 2 can be suppressed The pressure changes when moving together. Therefore, in the plane where the first separation membrane 1 and the second separation membrane 2 are opposed to each other, the total area of the plurality of connection positions is desirably 40% or less of the area of the entire plane, and more desirably less than or equal to the area of the entire plane 10%, even more desirably less than or equal to 5% of the area of the entire plane. On the other hand, when the area of the connection position is too small, the connection force (adhesion force) of the separation membrane at the connection position is small, and as a result, the separation membranes are easily peeled from each other. Therefore, it is desirable that in a plane where the first separation membrane 1 and the second separation membrane 2 face each other, the total area of the connection position is 1% or more of the area of the entire plane.

Next, the case where the first separation membrane 1 and the second separation membrane 2 are partially in contact with each other will be explained. When the first separation membrane 1 and the second separation membrane 2 are brought into contact with each other by reducing the pressure of the space 4 between the first separation membrane 1 and the second separation membrane 2, the area of the contact position is relatively large. When the first separation membrane 1 and the second separation membrane 2 are in contact with each other, as the area of the contact position decreases, it is difficult for the separation membranes to move together. Therefore, in the plane where the first separation membrane 1 and the second separation membrane 2 are opposed to each other, the total area of the contact portion is desirably 80% or more of the area of the entire plane, and more desirably 90% or more of the area of the entire plane %. Although they only contact each other, if the entire opposing surfaces contact each other and the rigidity of the separation membrane as a whole becomes too high, the state is close to the state when the thickness of only one separation membrane increases. Therefore, it is desirable that the difference between the pressure of the space 4 and the external pressure (atmospheric pressure) is less than or equal to 10 kPa, and the degree of contact can be adjusted.

The first fluid can be discharged from the discharge head 14. Therefore, the first fluid may be, for example, ink used in an inkjet printer.

The second fluid is a fluid for adjusting the pressure of the first fluid. Therefore, the second fluid need not be expensive ink. The second fluid may be, for example, water that generally has a specific gravity close to that of ink. However, it is desirable to use water added with additives that provide antiseptic effects for the purpose of inhibiting the spoilage of water and inhibiting the propagation of bacteria.

Although it is desired that the first fluid and the second fluid are liquids, they may be viscous fluids (or corrosion-resistant materials). In particular, since the second fluid regulates the pressure of the first fluid, the second fluid may be a gas.

In the fluid containing member, it is more effective that the first fluid contained in the first containing chamber 5 is an imprinting material. The reasons are as follows. In the manufacturing process of, for example, a semiconductor device, a so-called imprinting technique in which a mold having a pattern is brought into contact with an imprint material located on a substrate and the shape of the mold is transferred to the imprint material to form a pattern is available. The embossed material is contained in the first storage chamber 5 as the first fluid. Since the embossing material is used to form a very fine molding, the embossing material cannot be mixed with the second fluid. Depending on the composition of the second fluid, only a small amount of contact changes the composition of the first fluid (imprint material). For example, only a small amount of metal ions in the second fluid entering the first fluid causes the first fluid to be contaminated with metal ions, and makes it difficult for the first fluid to be used as an imprinting material. In addition, only a small amount of foreign matter entering the first fluid will affect the pattern formation. Therefore, when a fluid containing member capable of suppressing the mixing of the first fluid and the second fluid is used as the imprinting material containing member, its effect is very large. When the first fluid is an imprinting material, the fluid containing member can be used as a member (cassette) installed in the imprinting apparatus.

Even if the flat mold (flattening member) is pressurized on the substrate instead of the mold having the pattern, the fluid containing member is effectively used. This is because, in this case, although the first fluid is, for example, a resist, the composition of the resist located on the substrate is as important as the composition of the above imprint material.

Although the present invention has been described with reference to exemplary embodiments, it should be understood that the present invention is not limited to the disclosed exemplary embodiments. The scope of the appended patent application should conform to the broadest interpretation to include all these variations, equivalent structures, and functions.

1‧‧‧ First separation membrane 1a‧‧‧Top part 1b‧‧‧Rounded corner part 1c‧‧‧Side part 1d‧‧‧Outer edge part 2‧‧‧Second separation membrane 3‧‧‧‧Bridge 4‧‧ ‧Space 5‧‧‧First storage room 6‧‧‧Second storage room 8‧‧‧Top part 11‧‧‧Housing 12‧‧‧‧Housing 13‧‧‧Fluid containing member 14‧‧‧Discharge head 15 ‧‧‧Discharge port 17‧‧‧Menopaus 18 18‧‧‧Ventilation hole 19‧‧‧Pressure chamber 24‧‧‧Connecting pipe 25‧‧‧Inlet 26‧‧‧Auxiliary storage tank 27‧‧‧Second fluid 31 ‧‧‧Control valve 32‧‧‧Liquid supply pump 34‧‧‧Main reservoir 37‧‧‧Gas reservoir 41‧‧‧ Liquid level sensor 52‧‧‧Measurement area 53‧‧‧Sensor 71‧ ‧‧Welded wire 72‧‧‧projection 73‧‧‧hole 74‧‧‧bubble

Figure 1 shows a fluid containing member.

Figure 2 shows the discharge head.

Figure 3 shows a fluid containing member.

4A and 4B show the separation membrane.

5A to 5C show the separation membrane.

6A and 6B show the fluid containing member.

Fig. 7 shows a separation membrane.

FIG. 8 shows a state where a hole is formed in the separation membrane of the fluid containing member.

Fig. 9 shows a fluid containing member.

Fig. 10 shows a conventional fluid containing member.

1‧‧‧ First separation membrane

2‧‧‧Separation membrane

3‧‧‧ bridge

4‧‧‧Space

5‧‧‧ First storage room

6‧‧‧ Second storage room

11‧‧‧Housing

12‧‧‧Housing

13‧‧‧ fluid containing member

14‧‧‧Discharge head

15‧‧‧Export

18‧‧‧vent

24‧‧‧Connecting pipe

25‧‧‧ entrance

26‧‧‧Auxiliary storage tank

27‧‧‧Second Fluid

31‧‧‧Control valve

32‧‧‧Liquid supply pump

34‧‧‧Main storage tank

41‧‧‧Liquid level sensor

Claims (28)

A fluid accommodating member includes: a first accommodating chamber that accommodates a first fluid; and a second accommodating chamber that accommodates a second fluid, wherein the first accommodating chamber and the second accommodating chamber are located by The first separation membrane on one side of the first storage chamber and the second separation membrane on the side of the second storage chamber are separated from each other, wherein the first separation membrane and the second separation membrane are partially separated from each other Connected or partially in contact with each other to move together according to a change in the internal pressure of the first storage chamber or a change in the internal pressure of the second storage chamber, and wherein a space as a gap is provided in the first separation membrane It communicates with the second separation membrane and with outside air. The fluid accommodating member according to item 1 of the patent application range, wherein the first fluid is a fluid discharged from a discharge head. The fluid accommodating member according to item 1 of the scope of the patent application further includes a discharge head that is in communication with the first accommodating chamber and is configured to discharge the first fluid. The fluid accommodating member according to item 1 of the scope of the patent application further includes a pressure adjustment unit that communicates with the second accommodating chamber and is configured to adjust the pressure of the second fluid. The fluid accommodating member according to item 1 of the patent application range, wherein the first accommodating chamber includes a recessed portion of the housing closed by the first separation membrane, and the second accommodating chamber includes the second accommodating chamber The recess of the housing closed by the separation membrane. The fluid containing member according to item 1 of the scope of the patent application, wherein at least one of the first separation membrane and the second separation membrane has a convex shape. The fluid containing member according to item 6 of the patent application range, wherein the convex shape includes a top portion, a side portion, and a rounded portion disposed between the top portion and the side portion, and wherein, The top portion is thicker than the side portion and the rounded portion. The fluid containing member according to item 1 of the patent application range, wherein the first separation membrane is thicker than the second separation membrane. The fluid accommodating member according to item 1 of the patent application range, wherein the internal pressure of the first accommodating chamber is lower than the external pressure. The fluid containing member according to item 1 of the patent application range, wherein the first separation membrane and the second separation membrane are at each other at a plurality of positions Connect or touch each other. The fluid containing member according to item 1 of the patent application scope, wherein the first separation membrane and the second separation membrane are thermally welded together. The fluid containing member according to item 1 of the scope of the patent application, wherein the first separation membrane and the second separation membrane are connected to each other by a linear bridge. The fluid containing member according to item 12 of the patent application range, wherein, in the orientation of the fluid containing member in use, the linear bridge extends in a direction orthogonal to the direction of gravity. The fluid containing member according to item 1 of the patent application range, wherein the first separation membrane and the second separation membrane are separated from each other by different members different from the first separation membrane and the second separation membrane connection. The fluid containing member according to item 14 of the patent application scope, wherein the different member is a double-sided tape. The fluid accommodating member according to item 1 of the patent application scope, wherein the second fluid is a liquid. According to the fluid containing member described in item 1 of the patent application scope, which In this, the first fluid is an embossed material. A fluid accommodating member includes: a first accommodating chamber that accommodates a first fluid; and a second accommodating chamber that accommodates a second fluid, wherein the first accommodating chamber and the second accommodating chamber are located by The first separation membrane on one side of the first storage chamber and the second separation membrane on the side of the second storage chamber are separated from each other, wherein the first separation membrane and the second separation membrane are partially separated from each other Connected or partially in contact with each other to move together according to a change in the internal pressure of the first storage chamber or a change in the internal pressure of the second storage chamber, wherein the first separation membrane and the second separation membrane Each has a convex shape including a top portion, a side portion, and a rounded portion disposed between the top portion and the side portion, and wherein the first separation membrane and the first The arrangement density of the bridges where the two separation membranes are connected to each other is higher at the top portion than at the side portion and the rounded portion. A fluid accommodating member includes: a first accommodating chamber that accommodates a first fluid; and a second accommodating chamber that accommodates a second fluid, wherein the first accommodating chamber and the second accommodating chamber are located by The first separation membrane on one side of the first storage chamber and the second separation membrane on the side of the second storage chamber are separated from each other, Wherein the first separation membrane and the second separation membrane are partially connected to each other or partially in contact with each other to change according to the change in the internal pressure of the first storage chamber or the change in the internal pressure of the second storage chamber Move together, and wherein a space as a gap is provided between the first separation membrane and the second separation membrane, and the first separation membrane and the second separation membrane are reduced by reducing the pressure of the space The separation membranes are partially in contact with each other. The fluid accommodating member according to item 19 of the patent application range, wherein the first fluid is a fluid discharged from a discharge head. The fluid accommodating member according to item 19 of the patent application scope further includes a discharge head that communicates with the first accommodating chamber and is configured to discharge the first fluid. The fluid accommodating member according to item 19 of the scope of the patent application further includes a pressure adjustment unit that communicates with the second accommodating chamber and is configured to adjust the pressure of the second fluid. The fluid accommodating member according to item 19 of the patent application range, wherein the first accommodating chamber includes a recessed portion of the housing closed by the first separation membrane, and the second accommodating chamber includes the second accommodating chamber The recess of the housing closed by the separation membrane. According to the fluid containing member described in Item 19 of the patent application scope, which In, at least one of the first separation membrane and the second separation membrane has a convex shape. The fluid containing member according to item 24 of the patent application range, wherein the convex shape includes a top portion, a side portion, and a rounded portion disposed between the top portion and the side portion, and wherein, The top portion is thicker than the side portion and the rounded portion. The fluid containing member according to item 19 of the patent application range, wherein the first separation membrane is thicker than the second separation membrane. The fluid containing member according to item 19 of the patent application range, wherein the internal pressure of the first containing chamber is lower than the external pressure. The fluid containing member according to item 19 of the patent application range, wherein the first separation membrane and the second separation membrane are connected to each other or contact each other at a plurality of positions.

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