TWI686786B - display system - Google Patents
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本發明係關於一種顯示系統,特別係關於一種用於顯示系統的源極驅動器(source driver)架構。 The present invention relates to a display system, and particularly to a source driver architecture for a display system.
平面顯示器技術於消費性娛樂電子產業佔有舉足輕重的地位。傳統平面顯示器如液晶顯示器,其呈現影像的方式,係透過驅動晶片組以輸出電壓的方式,改變液晶分子排列方向,藉由每點畫素之透光率高低來構成顯示的畫面。驅動晶片主要包括源極驅動器以及閘極驅動器兩部份,當一畫素呈現色彩時,需以閘極驅動器控制一薄膜電晶體開關,以及源極驅動器分別輸入R、G、B三原色訊號。閘極驅動器負責顯示器每列訊號的開關動作,當顯示器逐列進行掃瞄動作時,閘極驅動器配合打開一整列開關,讓源極驅動器進行訊號輸入動作。源極驅動器負責顯示器每行畫素訊號的輸入動作,當閘極驅動器打開一整列開關時,源極驅動器即時配合輸入該列畫素資料電壓,提供顯示畫面所需訊號。當顯示器逐步提昇解析度、亮度與反應速度時,驅動晶片越需要朝向高頻與高壓方向發展,才能符合高速掃瞄頻率與快速驅動需求。 Flat panel display technology occupies a pivotal position in the consumer entertainment electronics industry. Conventional flat panel displays, such as liquid crystal displays, display images by driving the chipset to change the arrangement direction of liquid crystal molecules by output voltage, and the display screen is formed by the light transmittance of each pixel. The driving chip mainly includes a source driver and a gate driver. When a pixel displays colors, a thin film transistor switch needs to be controlled by the gate driver, and the source driver inputs three primary color signals of R, G, and B, respectively. The gate driver is responsible for the switching of the signals in each column of the display. When the display performs a scanning operation row by row, the gate driver turns on a whole row of switches to allow the source driver to perform signal input. The source driver is responsible for the input action of the pixel signals of each row of the display. When the gate driver turns on a whole row of switches, the source driver immediately inputs the data voltage of the row of pixels to provide the signal required for displaying the picture. When the display gradually improves the resolution, brightness and response speed, the more the driver chip needs to develop toward the direction of high frequency and high voltage, in order to meet the needs of high-speed scanning frequency and fast driving.
因此,在此技術領域中,需要一種新源極驅動器電路組成,以改善平面顯示器的顯示品質和反應時間。Therefore, in this technical field, a new source driver circuit composition is needed to improve the display quality and response time of flat panel displays.
本發明之一些實施例係提供一種顯示系統。上述顯示系統包括複數畫素,耦接複數閘極線與複數源極線。一閘極驅動器,產生複數閘極信號予上述等閘極線。一源極驅動器,產生複數影像信號予上述等源極線,上述源極驅動器包括一輸出緩衝器,其中上述輸出緩衝器包括一電晶體元件,上述電晶體元件為一初始導通電晶體元件、一空乏型電晶體元件或一低臨界電壓電晶體元件的其中一個。 Some embodiments of the present invention provide a display system. The above display system includes a plurality of pixels, coupled to a plurality of gate lines and a plurality of source lines. A gate driver generates a plurality of gate signals to the above-mentioned equal gate lines. A source driver generates a complex image signal to the above-mentioned source lines. The source driver includes an output buffer, wherein the output buffer includes a transistor element, the transistor element is an initial conduction transistor element, a One of a depletion type transistor element or a low threshold voltage transistor element.
本發明之一些實施例係提供一種形成源極驅動器之輸出緩衝器的方法。上述形成源極驅動器之輸出緩衝器的方法包括提供一P型基板。於上述P型基板中形成一高壓P型井區和相鄰上述高壓P型井區的相對兩側的兩個高壓N型井區。於上述P型基板上形成一閘極結構,其中上述閘極結構完全覆蓋上述高壓P型井區,且部分覆蓋上述些高壓N型井區。對接近於上述P型基板的一表面的部分上述高壓P型井區進行一第一元件臨界電壓調整摻雜製程。對接近於上述P型基板的上述表面的部分上述高壓P型井區進行一第二元件臨界電壓調整摻雜製程,以使上述輸出緩衝器的的臨界電壓等於或小於0.5伏(V)。 Some embodiments of the present invention provide a method of forming an output buffer of a source driver. The above method of forming the output buffer of the source driver includes providing a P-type substrate. A high-pressure P-type well area and two high-pressure N-type well areas adjacent to the two sides of the high-pressure P-type well area adjacent to the high-pressure P-type well area are formed in the P-type substrate. A gate structure is formed on the P-type substrate, wherein the gate structure completely covers the high-voltage P-type well region and partially covers the high-voltage N-type well regions. A first device threshold voltage adjustment doping process is performed on a part of the high-voltage P-type well region close to a surface of the P-type substrate. A second device threshold voltage adjustment doping process is performed on a portion of the high-voltage P-type well region close to the surface of the P-type substrate, so that the threshold voltage of the output buffer is equal to or less than 0.5 volt (V).
100‧‧‧顯示系統 100‧‧‧Display system
102‧‧‧液晶顯示面板 102‧‧‧LCD display panel
104‧‧‧閘極驅動器 104‧‧‧Gate driver
106‧‧‧時序控制器 106‧‧‧ Timing controller
110‧‧‧薄膜電晶體 110‧‧‧thin film transistor
112‧‧‧畫素 112‧‧‧ pixels
114‧‧‧儲存電容 114‧‧‧storage capacitor
200‧‧‧源極驅動器 200‧‧‧ source driver
208:數位類比轉換器 208: digital to analog converter
210:輸出緩衝器 210: output buffer
212:運算放大器 212: Operational amplifier
VDD:源極驅動電壓 VDD: source drive voltage
VSS:閘極驅動電壓 VSS: gate drive voltage
VCOM:共同電壓 VCOM: common voltage
G1~Gi:閘極線 G1~Gi: gate line
D1、Dk:源極線 D1, Dk: source line
DATA:數位影像信號串 DATA: digital image signal string
GC:閘極控制信號串 GC: gate control signal string
SC:源極控制信號串 SC: source control signal string
SW:開關 SW: switch
P:輸出墊 P: output pad
IN:輸入端 IN: input
OUT:輸出端 OUT: output
Vin:類比信號 Vin: analog signal
Vout:輸出電壓 Vout: output voltage
300:P型基板 300: P-type substrate
301:隔絕物 301: Isolation
302:高壓P型井區 302: High-pressure P-type well area
303:表面 303: Surface
304:高壓N型井區 304: High-pressure N-type well area
306:閘極結構 306: Gate structure
308:N型重摻雜區 308: N-type heavily doped region
310:P型重摻雜區 310: P-type heavily doped region
312:高壓N型擴散汲極區 312: High voltage N-type diffusion drain region
314:高壓P型擴散汲極區 314: High-pressure P-type diffusion drain region
322:深N型井區 322: Deep N-type well area
410、440:高壓元件臨界電壓調整摻雜製程 410, 440: doping process for adjusting the critical voltage of high-voltage devices
420:N型金氧半導體場效電晶體元件臨界電壓調整摻雜製程 420: N-type metal oxide semiconductor field effect transistor device threshold voltage adjustment doping process
430:P型金氧半導體場效電晶體元件臨界電壓調整摻雜製程 430: P-type metal oxide semiconductor field effect transistor device threshold voltage adjustment doping process
462:開口 462: opening
470、480:線 470, 480: line
500a~500d:電晶體元件 500a~500d: transistor element
第1圖顯示本發明一些實施例之一顯示系統之方塊圖。 Figure 1 shows a block diagram of a display system according to some embodiments of the invention.
第2圖顯示本發明一些實施例之源極驅動器的方塊圖。 Figure 2 shows a block diagram of a source driver according to some embodiments of the invention.
第3圖顯示本發明一些實施例之輸出緩衝器的的電路示意圖。 FIG. 3 shows a schematic circuit diagram of an output buffer according to some embodiments of the invention.
第4A~4D圖顯示本發明一些實施例之輸出緩衝器之電晶體元件剖面示意圖。 FIGS. 4A-4D show schematic cross-sectional views of transistor elements of output buffers according to some embodiments of the present invention.
第5A~5C圖顯示本發明一些實施例之輸出緩衝器之電晶體元件剖面示意圖,其顯示當輸出緩衝器為橫向擴散型金氧半導體場效電晶體(LDMOS)時,元件臨界電壓的調整步驟。 FIGS. 5A to 5C show cross-sectional schematic diagrams of transistor elements of an output buffer according to some embodiments of the present invention, which show the adjustment steps of the device threshold voltage when the output buffer is a laterally diffused metal oxide semiconductor field effect transistor (LDMOS) .
第6圖顯示本發明一些實施例之輸出緩衝器和習知技術之輸出緩衝器的電壓-時間(V-T)圖,其顯示兩者的驅動能力比較結果。 FIG. 6 shows a voltage-time (V-T) graph of the output buffer of some embodiments of the present invention and the output buffer of the conventional technology, which shows the comparison of the driving capabilities of the two.
為了讓本發明之目的、特徵、及優點能更明顯易懂,下文特舉實施例,並配合所附圖示,做詳細之說明。本發明說明書提供不同的實施例來說明本發明不同實施方式的技術特徵。其中,實施例中的各元件之配置係為說明之用,並非用以限制本發明。且實施例中圖式標號之部分重複,係為了簡化說明,並非意指不同實施例之間的關聯性。 In order to make the purpose, features, and advantages of the present invention more obvious and understandable, the following specifically describes the embodiments and the accompanying drawings for detailed description. The description of the present invention provides different examples to illustrate the technical features of different embodiments of the present invention. Among them, the configuration of each element in the embodiment is for illustrative purposes, and is not intended to limit the present invention. In addition, the reference numerals in the embodiments are repeated for the purpose of simplifying the description, and do not mean the correlation between different embodiments.
第1圖顯示本發明一些實施例之一顯示系統100之方塊圖。如第1圖所示,在本發明一些實施例中,顯示系統100包括一液晶顯示裝置(liquid crystal display(LCD)device)。上述液晶顯示裝置包括一液晶顯示面板(LCD panel)102、複數個閘極驅動器(gate driver)104、複數個源極驅動器(source driver)200和一時序控制器106。 Figure 1 shows a block diagram of a
在本發明一些實施例中,液晶顯示面板(LCD panel)102可包括薄膜電晶體基板(TFT substrate)、濾光片基板 (color filter substrate)(圖未顯示)和液晶層(liquid crystal(LC)layer)(圖未顯示)。薄膜電晶體基板具有薄膜電晶體陣列(TFT array)設置於其中,濾光片基板係面向於薄膜電晶體基板設置,且液晶層係設置於薄膜電晶體基板和濾光片基板之間。為了方便顯示起見,在第1圖中,薄膜電晶體基板的位置可相同於液晶顯示面板102的位置。 In some embodiments of the present invention, the liquid crystal display panel (LCD panel) 102 may include a thin film transistor substrate (TFT substrate), a color filter substrate (not shown), and a liquid crystal layer (LC) layer) (not shown). The thin film transistor substrate has a thin film transistor array (TFT array) disposed therein, the filter substrate is disposed facing the thin film transistor substrate, and the liquid crystal layer is disposed between the thin film transistor substrate and the filter substrate. For convenience of display, in FIG. 1, the position of the thin film transistor substrate may be the same as the position of the liquid
在本發明一些實施例中,液晶顯示面板102的薄膜電晶體基板可包括複數閘極線G1~Gi和複數源極線(資料線)D1~Dk。上述閘極線G1~Gi和源極線D1~Dk彼此相交且定義出複數畫素(pixel)112。因此,畫素112係電性耦接至上述閘極線G1~Gi和源極線D1~Dk。每一個畫素112中具有一薄膜電晶體(TFT)110和一儲存電容114。閘極線G1~Gi分別電性耦接至其相應畫素112中的薄膜電晶體110的閘極(gate),且源極線D1~Dk分別電性耦接至其相應畫素112中的薄膜電晶體110的源極(source)。每一個畫素112中的儲存電容114電性耦接至其相應的薄膜電晶體110的汲極(drain)。第1圖所示之實施例之儲存電容114係電性耦接至同一畫素112中的薄膜電晶體110的汲極。 In some embodiments of the present invention, the thin film transistor substrate of the liquid
在本發明一些實施例中,顯示系統100的閘極驅動器104係電性耦接至閘極線G1~Gi,且用以依序啟動液晶顯示面板102的閘極線G1~Gi。顯示系統100的源極驅動器200係電性耦接至源極線D1~Dk,且用於將類比信號施加至液晶顯示面板102之源極線D1~Dk。顯示系統100的時序控制器106係電性耦接至閘極驅動器104和源極驅動器200,且用於控制源極驅動器110以及閘極驅動器130之操作時序及提供液晶顯示面板102所 需的影像訊號,以及對液晶顯示面板102的儲存電容114提供電壓。 In some embodiments of the present invention, the
時序控制器106可接收自外部輸入之影像信號和控制信號,上述控制信號可為水平同步信號、垂直同步信號、主時脈信號以及資料啟用信號。並且,時序控制器106可根據液晶顯示面板102之操作條件來處理上述影像信號,以產生數位影像信號串DATA和源極控制信號串SC傳輸至源極驅動器200,並產生閘極控制信號串GC傳輸至閘極驅動器104。在本發明一些實施例中,上述源極控制信號串SC可包括用於指示將類比信號施加至對應的源極線的輸出控制信號,以及時脈信號。在本發明一些實施例中,上述閘極控制信號串GC可包括用於指示畫素112的閘極接通電壓之開始的垂直開始信號、閘極時脈信號以及用於控制閘極接通電壓之持續時間的輸出啟用信號。在本發明一些實施例中,時序控制器106係對液晶顯示面板102的儲存電容114提供一共同電壓VCOM。 The
閘極驅動器104接收並處理來自時序控制器106的閘極控制信號串GC,用以產生複數閘極信號予閘極線G1~Gi。源極驅動器200接收並處理來自時序控制器106的數位影像信號串DATA和源極控制信號串SC,用以產生複數影像信號予源極線D1~Dk。 The
第2圖顯示本發明一些實施例之源極驅動器200的方塊圖。在本發明一些實施例中,源極驅動器200可包括一移位暫存器(shift register)202、一資料閂鎖器(data latch)204、一位準轉換器(level shifter)206、一數位類比轉換器(digital to analog converter(DAC))206和一輸出緩衝器(output buffer)210。在本發明一些實施例中,移位暫存器202和資料閂鎖器204用以接收數位資料,數位類比轉換器208和輸出緩衝器210用以輸出類比信號。
FIG. 2 shows a block diagram of the
在本發明一些實施例中,源極驅動器200的移位暫存器202係接收並處理外部施加的數位影像信號串DATA,用以產生複數移位信號。詳細來說,移位暫存器202係回應例如時脈信號和水平開始信號等控制信號串SC,以控制接收的數位影像信號串DATA,並輸出產生複數移位信號且依時間順序儲存於資料閂鎖器204中。
In some embodiments of the present invention, the
在本發明一些實施例中,源極驅動器200的資料閂鎖器204接收並處理上述多個移位信號,用以產生複數閂鎖信號。詳細來說,資料閂鎖器204回應移位信號而接收並儲存影像信號串DATA,且回應例如時脈信號等控制信號串SC而輸出複數閂鎖信號。
In some embodiments of the present invention, the data latch 204 of the
在本發明一些實施例中,源極驅動器200的位準轉換器206接收並處理上述多個閂鎖信號,用以產生複數轉換信號。詳細來說,位準轉換器206將資料閂鎖器204輸出的閂鎖信號由一低電壓範圍轉換至一高電壓範圍而輸出高電壓範圍的轉換信號。
In some embodiments of the present invention, the
在本發明一些實施例中,源極驅動器200的數位類比轉換器208接收並處理上述多個轉換信號,用以產生複數類比信號。詳細來說,數位類比轉換器208接收位準轉換器206輸出高電壓範圍的數位轉換信號以將所接收的數位轉換信號轉換為一類比信號,來驅動相應的源極線。 In some embodiments of the present invention, the digital-to-
在本發明一些實施例中,源極驅動器200的輸出緩衝器210,接收並處理上述多個類比信號,用以對相應的源極線D1~Dk(第1圖)產生複數影像信號。輸出緩衝器210可用以隔離信號輸入端與輸出端,以避免信號輸入端受負載影響,並提供足夠的驅動能力以應對相應的源極線之負載(資料線)並輸出符合顯示系統規格所需之類比影像信號。 In some embodiments of the present invention, the
第3圖顯示本發明一些實施例之輸出緩衝器210的電路示意圖。第3圖為對應每一條源極線(例如第1圖的源極線D1~Dk)的輸出緩衝器的電路示意圖。在本發明一些實施例中,輸出緩衝器210可包括一運算放大器(operational amplifier)212、一開關SW和一輸出墊P。運算放大器212包括一輸入端IN和一輸出端OUT。如第3圖所示,運算放大器212的輸入端IN以接收上述類比信號Vin。輸出緩衝器210的開關SW電性連接運算放大器212的輸出端OUT和輸出墊P,用以做為電性連接至輸出墊P的對應源極線的電傳輸路徑。運算放大器212可根據輸入端IN接收的類比信號Vin,產生相應電壓準位的輸出電壓Vout至輸出端OUT。當開關SW開啟時,運算放大器212的輸出端OUT會電性連接至源極驅動器200的輸出墊P的源極線(例如源極線D1~Dk的其中之一),且將源極線的電壓驅動至某一電壓準位。 FIG. 3 shows a schematic circuit diagram of the
在本發明一些實施例中,輸出緩衝器210的開關SW可包括一電晶體元件,上述電晶體元件為一初始導通電晶體元件(native transistor device)、一空乏型電晶體元件(depletion transistor device)或一低臨界電壓電晶體元件(low threshold transistor device)的其中一個。在本發明一些實施例中,當上述電晶體元件為低臨界電壓電晶體元件時,電晶體元件的臨界電壓等於或小於0.5伏(V)。在本發明一些實施例中,當上述電晶體元件為初始導通電晶體元件或空乏型電晶體元件時,電晶體元件的臨界電壓等於或小於0伏(V)。
In some embodiments of the present invention, the switch SW of the
第4A~4D圖顯示本發明一些實施例之一顯示系統之輸出緩衝器之電晶體元件500a~500d剖面示意圖。在本發明一些實施例中,輸出緩衝器的電晶體元件可包括一N型金氧半導體場效電晶體(NMOS)或一P型金氧半導體場效電晶體(PMOS)。在本發明一些實施例中,輸出緩衝器的電晶體元件可包括一橫向擴散型金氧半導體場效電晶體(LDMOS)或一雙擴散汲極金氧半導體場效電晶體(DDDMOS)。
FIGS. 4A-4D show schematic cross-sectional views of
如第4A圖所示,在本發明一些實施例中,電晶體元件500a可為一橫向擴散型N型金氧半導體場效電晶體(可簡稱為LDNMOS)。因此,電晶體元件500a又可稱為LDNMOS 500a。LDNMOS 500a包括一P型基板300、高壓P型井區(HVPW)302、高壓N型井區(HVNW)304、閘極結構306、N型重摻雜區(N+)308和P型重摻雜區(P+)310。在本發明一些實施例中,P型基板300例如為一P型磊晶基板。複數個高壓P型井區(HVPW)302和複數個高壓N型井區(HVNW)304,交錯設置於P型基板300上。因此,每一個高壓P型井區(HVPW)302的兩相對側係鄰接不同的高壓N型井區(HVNW)304。並且,每一個高壓N型井區(HVNW)304的兩相對側係鄰接不同的高壓P型井區(HVPW)302。 As shown in FIG. 4A, in some embodiments of the present invention, the
如第4A圖所示,LDNMOS 500a可包括一個或多個隔絕物301,從P型基板300的頂面延伸至部分P型基板300中,以定義出N型重摻雜區(N+)308和P型重摻雜區(P+)310的形成位置。隔絕物301例如可為淺溝槽隔絕物(STI)或矽局部氧化物(LOCOS)。 As shown in FIG. 4A, the
如第4A圖所示,LDNMOS 500a的閘極結構306設置於P型基板300的表面,並完全覆蓋一個高壓P型井區(HVPW)302,且部分覆蓋相鄰上述高壓P型井區(HVPW)302的相對兩側的兩個高壓N型井區(HVNW)304。另外,閘極結構306會完全覆蓋分別位於上述高壓N型井區(HVNW)304中的隔絕物301。被閘極結構306完全覆蓋且接近閘極結構306的部分高壓P型井區(HVPW)302可視為LDNMOS 500a的通道區(channel region),而相鄰上述高壓P型井區(HVPW)302的相對兩側的兩個高壓N型井區(HVNW)304可視為LDNMOS 500a的源/汲極區(S/D region)。 As shown in FIG. 4A, the
如第4A圖所示,LDNMOS 500a的複數個N型重摻雜區(N+)308分別設置於高壓N型井區(HVNW)304中,LDNMOS 500a的複數個P型重摻雜區(P+)310分別設置於複數個高壓P型井區(HVPW)302中。並且,N型重摻雜區(N+)308和P型重摻雜區(P+)310分別被隔絕物301圍繞。LDNMOS 500a的N型重摻雜區(N+)308可視為源/汲極區接線摻雜區(S/D pick-up region)。LDNMOS 500a的P型重摻雜區(P+)310可視為主體接線摻雜區(bulk pick-up region)。 As shown in FIG. 4A, a plurality of N-type heavily doped regions (N+) 308 of the
如第4B圖所示,在本發明一些實施例中,電晶體元件500b可為一橫向擴散型P型金氧半導體場效電晶體(可簡稱為LDPMOS)。因此,開關元件500b又可稱為LDPMOS 500b。LDPMOS 500b包括一P型基板300、深N型井區(DNW)322、高壓P型井區(HVPW)302、高壓N型井區(HVNW)304、閘極結構306、N型重摻雜區(N+)308和P型重摻雜區(P+)310。上述圖式中的各元件如有與第4A圖所示相同或相似的部分,則可參考前面的相關敍述,在此不做重複說明。
As shown in FIG. 4B, in some embodiments of the present invention, the
如第4B圖所示,LDPMOS 500b的深N型井區(DNW)322設置於P型基板300上。LDPMOS 500b的高壓P型井區(HVPW)302和高壓N型井區(HVNW)304,交錯設置於深N型井區(DNW)322上。
As shown in FIG. 4B, the deep N-type well region (DNW) 322 of the
LDPMOS 500b的閘極結構306完全覆蓋一個高壓N型井區(HVNW)304,且部分覆蓋相鄰上述高壓N型井區(HVNW)304的相對兩側的兩個高壓P型井區(HVPW)302。另外,閘極結構306會完全覆蓋分別位於上述兩個高壓P型井區(HVPW)302中的隔絕物301。被閘極結構306完全覆蓋且接近閘極結構306的部分的高壓N型井區(HVNW)304可視為LDPMOS 500b的通道區(channel region),而相鄰上述高壓N型井區(HVNW)304的相對兩側的兩個高壓P型井區(HVPW)302可視為LDPMOS 500b的源/汲極區(S/D region)。
The
如第4B圖所示,LDPMOS 500b的複數個N型重摻雜區(N+)308分別設置於複數個高壓N型井區(HVNW)304中,LDNMOS 500b的複數個P型重摻雜區(P+)310分別設置於複數個高壓P型井區(HVPW)302中。並且,N型重摻雜區(N+)308和P型重摻雜區(P+)310分別被隔絕物301圍繞。LDPMOS 500b的P型重摻雜區(P+)310可視為源/汲極區接線摻雜區(S/D pick-up region)。LDPMOS 500b的N型重摻雜區(N+)308可視為主體接線摻雜區(bulk pick-up region)。 As shown in FIG. 4B, the plural N-type heavily doped regions (N+) 308 of the
如第4C圖所示的電晶體元件500c可為一雙擴散汲極N型金氧半導體場效電晶體(可簡稱為DDDNMOS)。上述圖式中的各元件如有與第4A~4B圖所示相同或相似的部分,則可參考前面的相關敍述,在此不做重複說明。 The
如第4C圖所示,DDDNMOS 500c包括一P型基板300、高壓P型井區(HVPW)302、高壓N型擴散汲極區(HVNDD)312、閘極結構306、N型重摻雜區(N+)308和P型重摻雜區(P+)310。 As shown in FIG. 4C,
如第4C圖所示,DDDNMOS 500c的高壓P型井區(HVPW)302設置於P型基板300上。DDDNMOS 500c具有兩個高壓N型擴散汲極區(HVNDD)312,分別設置於高壓P型井區(HVPW)302上。DDDNMOS 500c的閘極結構306設置於高壓P型井區(HVPW)302上,且閘極結構306的相對兩側分別與兩個高壓N型擴散汲極區(HVNDD)312部分重疊。因此,高壓N型擴散汲極區(HVNDD)312可視為DDDNMOS 500c的源/汲極區,位於閘極結構306的正下方並位於高壓N型擴散汲極區(HVNDD)312之間,且接近閘極結構306的部分的高壓P型井區(HVPW)302可視為DDDNMOS 500c的通道區。 As shown in FIG. 4C, the high-voltage P-type well area (HVPW) 302 of the
DDDNMOS 500c具有兩個N型重摻雜區(N+)308, 分別設置於兩個高壓N型擴散汲極區(HVNDD)312上,且相鄰於閘極結構306的相對兩側。因此,N型重摻雜區(N+)308可視為DDDNMOS 500c的源/汲極區接線摻雜區。另外,DDDNMOS 500c具有兩個P型重摻雜區(P+)310,分別設置於兩個高壓N型擴散汲極區(HVNDD)312外側的高壓P型井區(HVPW)302上,且藉由隔絕物301與N型重摻雜區(N+)308隔開。因此,P型重摻雜區(P+)310可視為DDDNMOS 500c的主體接線摻雜區。 The
如第4D圖所示的電晶體元件500d可為一雙擴散汲極P型金氧半導體場效電晶體(可簡稱為DDDPMOS)。上述圖式中的各元件如有與第4A~4C圖所示相同或相似的部分,則可參考前面的相關敍述,在此不做重複說明。 The
如第4D圖所示,DDDPMOS 500d包括一P型基板300、高壓P型井區(HVPW)302、高壓N型井區(HVNW)304、高壓P型擴散汲極區(HVPDD)314、閘極結構306、N型重摻雜區(N+)308和P型重摻雜區(P+)310。 As shown in FIG. 4D,
如第4D圖所示,DDDPMOS 500d的高壓P型井區(HVPW)302設置於P型基板300上,高壓N型井區(HVNW)304設置於高壓P型井區(HVPW)302上。DDDPMOS 500d具有兩高壓P型擴散汲極區(HVPDD)314,分別設置於高壓N型井區(HVNW)304上。DDDPMOS 500d的閘極結構306設置於高壓N型井區(HVNW)304上,且閘極結構306的相對兩側分別與兩個高壓P型擴散汲極區(HVPDD)314部分重疊。因此,高壓P型擴散汲極區(HVPDD)314可視為DDDPMOS 500d的源/汲極區,位於閘極結構306的正下方並位於高壓P型擴散汲極區 (HVPDD)314之間,且接近閘極結構306的部分高壓N型井區(HVNW)304可視為DDDPMOS 500d的通道區。 As shown in FIG. 4D, the high-voltage P-type well region (HVPW) 302 of the
DDDPMOS 500d的兩個P型重摻雜區(P+)310,分別設置於兩個高壓P型擴散汲極區(HVPDD)314上,且相鄰於閘極結構306的相對兩側。因此,P型重摻雜區(P+)310可視為DDDPMOS 500d的源/汲極區接線摻雜區。另外,DDDPMOS 500d的兩個N型重摻雜區(N+)308,分別設置於兩個P型擴散汲極區(HVPDD)314外側的高壓N型井區(HVNW)304上,且藉由隔絕物301與P型重摻雜區(P+)310隔開。因此,N型重摻雜區(N+)308可視為DDDPMOS 500d的主體接線摻雜區。 The two P-type heavily doped regions (P+) 310 of the
第5A~6C圖顯示本發明一些實施例之一顯示系統之輸出緩衝器之電晶體元件剖面示意圖,其顯示當輸出緩衝器之電晶體元件為LDNMOS 500a時,元件臨界電壓的調整步驟。 FIGS. 5A to 6C are schematic cross-sectional views of the transistor elements of the output buffer of a display system according to some embodiments of the present invention, which show the adjustment steps of the device threshold voltage when the transistor elements of the output buffer are
如第5A圖所示,首先,提供一P型基板300,並於基板300之上形成隔離區301,接著進行數道摻雜製程,於P型基板300中形成複數個井區,包括交錯設置的複數個高壓P型井區(HVPW)302和複數個高壓N型井區(HVNW)304。接著,於P型基板300的表面上形成閘極結構306,閘極結構306完全覆蓋一個高壓P型井區(HVPW)302,且部分覆蓋相鄰上述高壓P型井區(HVPW)302的相對兩側的兩個高壓N型井區(HVNW)304和位於上述高壓N型井區(HVNW)304中的隔絕物301。 As shown in FIG. 5A, first, a P-
接著,如第5A圖所示,為了降低LDNMOS 500a的臨界電壓使其成為初始導通電晶體元件、空乏型電晶體元件或一低臨界電壓電晶體元件的其中一種,可選擇不進行(或跳過 (skip))對LDNMOS 500a的通道區(位於閘極結構306正下方且接近P型基板300的一表面303的部分的高壓P型井區(HVPW)302)的高壓元件臨界電壓調整摻雜製程(HVNMOS Vt implant process)410。 Next, as shown in FIG. 5A, in order to reduce the threshold voltage of the
之後,可再進行數道摻雜製程,以分別於複數個高壓N型井區(HVNW)304中形成複數個N型重摻雜區(N+)308,且分別於複數個高壓P型井區(HVPW)302中形成複數個P型重摻雜區(P+)310。經過上述製程,形成本發明一些實施例之一顯示系統之輸出緩衝器之LDNMOS 500a。 After that, several doping processes may be performed to form a plurality of N-type heavily doped regions (N+) 308 in the plurality of high-voltage N-type well regions (HVNW) 304, and in a plurality of high-pressure P-type well regions, respectively In (HVPW) 302, a plurality of P-type heavily doped regions (P+) 310 are formed. Through the above process, the
第5B圖顯示本發明一些實施例之輸出緩衝器(LDNMOS 500a)之元件臨界電壓的調整步驟。上述圖式中的各元件的形成步驟如有與第5A圖所示相同或相似的部分,則可參考前面的相關敍述,在此不做重複說明。 FIG. 5B shows the steps of adjusting the device threshold voltage of the output buffer (
如第5B圖所示,在本發明一些實施例中,形成閘極結構306之後,可同時對LDNMOS 500a的通道區(位於閘極結構306正下方的且接近P型基板300的表面303的部分高壓P型井區(HVPW)302)進行N型金氧半導體場效電晶體(NMOS)元件臨界電壓調整摻雜製程420和P型金氧半導體場效電晶體(PMOS)元件臨界電壓調整摻雜製程430,使LDNMOS 500a臨界電壓接近於0V或者等於或小於0V。舉例來說,進行NMOS臨界電壓調整摻雜製程420和PMOS臨界電壓調整摻雜製程430之後,LDNMOS 500a的通道區的導電類型可轉變為N型,且可視為空乏型電晶體元件。在本發明一些實施例中,N型金氧半導體場效電晶體(NMOS)元件臨界電壓調整摻雜製程420為高壓N型金 氧半導體場效電晶體元件臨界電壓調整摻雜製程(HVNMOS Vt implant process),且P型金氧半導體場效電晶體(PMOS)元件臨界電壓調整摻雜製程430為高壓P型金氧半導體場效電晶體元件臨界電壓調整摻雜製程(HVPMOS Vt implant process)。在本發明一些實施例中,NMOS臨界電壓調整摻雜製程420和PMOS臨界電壓調整摻雜製程430於通道區植入的摻質具有相反導電類型。 As shown in FIG. 5B, in some embodiments of the present invention, after forming the
進行NMOS臨界電壓調整摻雜製程420和PMOS臨界電壓調整摻雜製程430之後,可再進行數道摻雜製程,以分別於複數個高壓N型井區(HVNW)304中形成複數個N型重摻雜區(N+)308,且分別於複數個高壓P型井區(HVPW)302中形成複數個P型重摻雜區(P+)310。經過上述製程,形成本發明一些實施例之一顯示系統之輸出緩衝器之LDNMOS 500b。 After the NMOS threshold voltage
第5C圖顯示本發明一些實施例之輸出緩衝器(LDNMOS 500a)之元件臨界電壓的調整步驟。上述圖式中的各元件的形成步驟如有與第5A圖所示相同或相似的部分,則可參考前面的相關敍述,在此不做重複說明。 FIG. 5C shows the steps of adjusting the device threshold voltage of the output buffer (
如第5C圖所示,在本發明一些實施例中,形成閘極結構306且進行第5A圖所示之高壓元件臨界電壓調整摻雜製程(HVNMOS Vt implant process)410之後,可於LDNMOS 500a製程中增加一光罩460,其具有僅暴露出LDNMOS 500a的通道區的一開口462。因此可藉由上述光罩460對LDNMOS 500a的通道區(位於閘極結構306正下方且接近P型基板300的表面303的部分的高壓P型井區(HVPW)302)進行另一道高壓元件臨界電 壓調整摻雜製程440,使LDNMOS 500a臨界電壓接近於0V,或者等於或小於0V。在本發明一些實施例中,高壓元件臨界電壓調整摻雜製程410和高壓元件臨界電壓調整摻雜製程440可於通道區植入相同導電類型的摻質或相反導電類型的摻質。 As shown in FIG. 5C, in some embodiments of the present invention, after forming the
進行高壓元件臨界電壓調整摻雜製程410和高壓元件臨界電壓調整摻雜製程440之後,可再進行數道摻雜製程,以分別於複數個高壓N型井區(HVNW)304中形成複數個N型重摻雜區(N+)308,且分別於複數個高壓P型井區(HVPW)302中形成複數個P型重摻雜區(P+)310。經過上述製程,形成本發明一些實施例之一顯示系統之輸出緩衝器之LDNMOS 500c。 After the high-voltage device threshold voltage
在本發明其他實施例中,當輸出緩衝器之電晶體元件為LVPMOS 500b(第4B圖)時,也可對其通道區進行額外的元件臨界電壓調整摻雜製程,或不對其通道區進行原製程具有的高壓元件臨界電壓調整摻雜製程使LVPMOS 500b臨界電壓接近於0V,或者等於或小於0V。舉例來說,進行上述元件臨界電壓調整摻雜製程之後,LVPMOS 500b的通道區可轉變為P型,且可視為空乏型電晶體元件。 In other embodiments of the present invention, when the transistor component of the output buffer is
第6圖顯示本發明一些實施例之輸出緩衝器和習知技術之輸出緩衝器的電壓-時間(V-T)圖,其顯示兩者的驅動能力比較結果。 FIG. 6 shows a voltage-time (V-T) graph of the output buffer of some embodiments of the present invention and the output buffer of the conventional technology, which shows the comparison of the driving capabilities of the two.
在第6圖中,線470為習知技術之輸出緩衝器的電壓-時間曲線,而線480為本發明一些實施例之輸出緩衝器的電壓-時間曲線。由於習知技術使用增強型金氧半導體場效電晶體(enhancement MOS)做為輸出緩衝器的電晶體元件,所以習 知輸出緩衝器的驅動能力和效能(開關頻率)會受元件本身的導通電阻(Ron)、閘極電荷(Qg)、閘極-汲極電荷(Qgd)或閘極-源極電荷(Qgs)影響而無法有效提升。相較於習知技術之輸出緩衝器(線470),本發明一些實施例之輸出緩衝器的(開關)元件(線480)使用初始導通電晶體元件、空乏型電晶體元件或一低臨界電壓電晶體元件的其中一種,上述元件的臨界電壓接近於0V(例如等於或小於0.5V),或者等於或小於0V,因而可以增加元件的操作頻率(切換速度),在更短的時間達到畫素112所需的類比電壓,提升輸出緩衝器的驅動能力和效能,且進一步改善顯示系統的影像顯示品質和影像反應時間。 In FIG. 6,
雖然本發明已以實施例揭露於上,然其並非用以限定本發明,任何熟習此項技藝者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed above with examples, it is not intended to limit the present invention. Anyone who is familiar with this skill can make some modifications and retouching without departing from the spirit and scope of the present invention. Therefore, the present invention The scope of protection shall be as defined in the scope of the attached patent application.
210‧‧‧輸出緩衝器 210‧‧‧Output buffer
212‧‧‧運算放大器 212‧‧‧Operational amplifier
D1、Dk‧‧‧源極線 D1, Dk‧‧‧ source line
SW‧‧‧開關 SW‧‧‧switch
P‧‧‧輸出墊 P‧‧‧ Output pad
IN‧‧‧輸入端 IN‧‧‧input
OUT‧‧‧輸出端 OUT‧‧‧Output
Vin‧‧‧類比信號 Vin‧‧‧Analog signal
Vout‧‧‧輸出電壓 Vout‧‧‧Output voltage
Claims (7)
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