TWI684071B - Exposure equipment - Google Patents

Abstract

An exposure equipment includes a machine body and two support arms. The machine body includes an exposure unit and a pull-out platform. The pull-out platform is capable of moving relative to the machine body. When the pull-out platform is pulled out of the machine body, the pull-out platform can be correspondingly disposed on the two support arms, and the pull-out platform can rotate relative to the two support arms via pivotal components disposed on the two support arms. After rotating, the pull-out platform enables a user to easily perform a cleaning operation.

Description

Exposure equipment

The invention relates to an exposure device, in particular to an exposure device applied to circuit board exposure.

In the existing exposure equipment, when the relevant personnel perform the replacement or cleaning of the exposure film, due to the narrow space in the machine, the relevant personnel cannot quickly perform the replacement or cleaning operation, and if the cleaning operation is performed, It cannot be cleaned effectively. For this reason, the present inventor has devoted himself to study and cooperate with the application of theory, and proposes a reasonable design and effectively improves the above problems.

The main purpose of the present invention is to provide an exposure device that allows related operators to easily clean the drawing platform used to carry the object to be exposed, thereby improving the existing exposure equipment, and related personnel cannot easily The problem of cleaning the drawing platform of the exposed piece.

In order to achieve the above object, the present invention provides an exposure apparatus including: a machine body and two support arms. The inside of the machine body includes an exposure space. The machine body includes a drawing platform. The drawing platform is located in the exposure space. The drawing platform has a bearing surface for carrying a piece to be exposed. The machine body is provided with a Exposure device, the exposure device can expose the parts to be exposed on the drawing platform; one side of the machine body has an active opening, and the exposure space can communicate with the outside through the moving opening; the drawing platform can be movably set on the machine The platform body, and the drawing platform can leave the exposure space through the movable opening. One end of each support arm is connected to the machine body, the two support arms are arranged facing each other, and the two support arms face each other. The side is defined as an inner side. Each support arm is provided with a guide assembly, a pivot assembly and a fixed assembly. The guide assembly of each support arm is correspondingly located on the inner side. The pivot assembly of each support arm is connected to the fixed assembly. Each fixed component can rotate relative to the corresponding support arm through the connected pivotal component. Among them, when the drawing platform leaves the exposure space, the drawing platform can be moved to the two support arms as a whole by the guidance of the two guide components, and the two support arms can support the drawing platform completely away from the machine body , The two fixed components can be subjected to external force to fix each other with the drawing platform, and the drawing platform fixed to each other with two fixed components can be subjected to external force, and rotate relative to the two support arms through the two pivoting components, so that The bearing surface faces away from the movable opening.

The beneficial effect of the present invention may be that the user can pull the drawing platform used to carry the piece to be exposed out of the machine body through the cooperation of the two supporting arms and the related components provided thereon. , Related personnel can easily clean the drawing platform.

In order to further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings are provided for reference and explanation only, and are not intended to limit the present invention.

1‧‧‧Exposure equipment

10‧‧‧ machine body

10a‧‧‧Exposure space

101‧‧‧ opening

11‧‧‧stage frame

111‧‧‧ track structure

111a‧‧‧sliding channel

1111‧‧‧Scroll wheel

112‧‧‧Limiting components

1121‧‧‧ Driver

1122‧‧‧ connection arm

1123‧‧‧Guide wheel

113‧‧‧Limiting components

1131‧‧‧ Driver

1132‧‧‧Connecting arm

1133‧‧‧Guide wheel

114‧‧‧Limiting components

1141‧‧‧ Driver

1142‧‧‧Connecting arm

11421‧‧‧top structure

12‧‧‧Lower frame

13‧‧‧ Upper exposure unit

14‧‧‧ Lower exposure unit

20‧‧‧Drawing platform

201‧‧‧Side

202‧‧‧Locking hole

21‧‧‧Handle structure

30‧‧‧support arm

301‧‧‧Inside

31‧‧‧Auxiliary fixings

32‧‧‧Guide assembly

321‧‧‧wheel

32a‧‧‧Guide channel

33‧‧‧Pivot assembly

34‧‧‧Fixed components

341‧‧‧Extended arm

342‧‧‧Lock firmware

35‧‧‧Auxiliary support assembly

36‧‧‧Auxiliary limit components

361‧‧‧First magnetic suction unit

362‧‧‧Second magnetic suction unit

37‧‧‧Pivot structure

FIG. 1 is a schematic diagram of the exposure apparatus of the present invention.

FIG. 2 is a front view of FIG. 1.

3 is a schematic diagram of the upper frame of the exposure apparatus of the present invention.

4 is another schematic view of the upper frame of the exposure apparatus of the present invention.

5, 6 and 7 are schematic diagrams of different limiting components of the exposure apparatus of the present invention.

8 is a schematic view of the support arm of the exposure apparatus of the present invention.

9 is a schematic diagram of the drawing platform of the exposure apparatus of the present invention being drawn out of the machine body and installed on two support arms.

FIG. 10 is a partially enlarged schematic diagram of FIG. 9.

FIG. 11 is a partially enlarged schematic view of the front view of FIG. 9.

12 is a schematic diagram of the operation of the support arm of the exposure apparatus of the present invention.

13 is a schematic diagram of the drawing platform of the exposure apparatus of the present invention rotating relative to two support arms.

14 is a schematic diagram of another embodiment of two support arms of the exposure apparatus of the present invention.

The following describes the implementation of the exposure apparatus of the present invention by specific specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied by other different specific examples. Various details in this specification can also be based on different viewpoints and applications, and various modifications and changes can be made without departing from the spirit of the present invention. In addition, the drawings of the present invention are only for simple description, and are not depicted according to actual sizes, that is, the actual sizes of related components are not reflected, and will be described first. The following embodiments further describe the viewpoint of the present invention in detail, but do not limit the scope of the present invention by any viewpoint. In the following description, if you are instructed to refer to a specific drawing or as shown in a specific drawing, it is only used to emphasize in the subsequent description, most of the related content mentioned in this specific drawing, However, it does not limit that only specific patterns can be referred to in the subsequent description.

Please refer to FIGS. 1 to 4 together, which are schematic diagrams of the exposure apparatus of the present invention. As shown in the figure, the exposure apparatus 1 includes a machine body 10 and two support arms 30.

The inside of the machine body 10 includes an exposure space 10a. One side of the machine body 10 has a movable opening 101, and the exposure space 10a can communicate with the outside through the movable opening 101. In practical applications, the machine body 10 can also be provided with a movable door (not shown), and related personnel can operate the movable door to cover the movable opening 101 according to requirements. Among them, the shape and size of the movable opening 101 shown in the figure are only one of the exemplary aspects, which can be changed according to needs.

The machine body 10 is provided with an upper stage frame 11, a lower stage frame 12, an upper exposure unit 13 and a lower exposure unit 14; an upper stage frame 11, a lower stage frame 12, an upper exposure unit 13 and the lower exposure unit 14 are correspondingly provided in the exposure space 10a. The upper stage frame 11 and the lower stage frame 12 are arranged to face each other. The upper stage frame 11 is provided with a drawing platform 20 for setting the exposure film, and the upper stage frame 11 is for setting a piece to be exposed (such as a circuit board). The upper exposure unit 13 and the lower exposure unit 14 are correspondingly disposed on one side of the upper stage frame 11 and the lower stage frame 12, and the upper exposure unit 13 and the lower exposure unit 14 can be controlled to cooperate with the exposure film, and the exposure unit is exposed. In different embodiments, the machine body 10 may be provided with only the upper exposure unit 13 or the lower exposure unit 14, which is not limited herein.

The drawing platform 20 can be pulled away from the table body 10 as a whole with respect to the upper table frame 11. The manner in which the drawing platform 20 can move relative to the upper frame 11 can be designed according to requirements. For example, as shown in FIG. 3, one side of the upper frame 11 can be provided with two track structures 111, each track structure 111 may be L-shaped, and a sliding channel 111a is formed between each rail structure 111 and the upper frame 11, and the two sides of the drawing platform 20 (as shown in FIG. 9) can correspond to two sliding channels Slide in 111a. In practical applications, each rail structure 111 may include a plurality of rollers 1111 to assist the sliding platform 20 to slide relative to the two rail structures 111 more smoothly.

Through the two rail structures 111 provided on the upper table frame 11, the drawing platform 20 can be drawn away from the table body 10 in a manual manner. In practical applications, one side of the drawing platform 20 may be provided with a handle structure 21, and when a relevant person wants to draw the drawing platform 20 out of the machine body 10, the handle structure 21 can be used to conveniently draw The pulling platform 20 is pulled away from the exposure space 10a.

In different embodiments, the drawing platform 20 may use two linear slide rails, and may be movably disposed on the upper frame 11, whereby the drawing platform 20 may be electronically controlled, relative to the upper frame 11 Sliding; in a specific implementation, the track of the linear slide rail may be set on the upper frame 11 or the drawing platform 20, and may be designed according to requirements, which is not limited herein.

As shown in FIGS. 3 to 7, the upper stage frame 11 may also be provided with multiple limit components 112, 113, 114, each of the limiting components 112, 113, 114 may be corresponding to the three axes of the vertical coordinate system of the drawing platform 20 relative to the upper frame 11 (the X axis in the coordinates shown in FIG. 4) Direction, Y axis direction and Z axis direction). In the drawings of this embodiment, the number and position of the limiting components 112, 113, 114 shown are only one of the exemplary aspects, and the actual application is not limited thereto.

Specifically, as shown in FIGS. 4 and 5, a limiting component 112 for limiting the amount of movement of the drawing platform 20 relative to the upper frame 11 in the X-axis direction may include a driver 1121 and a connecting arm 1122 And a guide wheel 1123, the driver 1121 is connected to the connecting arm 1122, and the driver 1121 can be controlled to move the connecting arm 1122, and a guide wheel 1123 is provided at the end of the connecting arm 1122.

As shown in FIGS. 4 and 6, the limiting component 113 for limiting the amount of movement of the drawing platform 20 relative to the upper frame 11 in the Y-axis direction may also have a driver 1131, a connecting arm 1132 and a guide wheel 1133. When the platform 20 is pulled, the driver 1131 is connected to the connecting arm 1132, and the guide wheel 1133 is disposed at the end of the connecting arm 1132. The driver 1131 can be controlled to drive the connecting arm 1132 to move. As shown in FIGS. 4 and 7, the limiting component 114 for limiting the amount of movement of the drawing platform 20 relative to the upper frame 11 in the Z-axis direction may include a driver 1141 and a connecting arm 1142, and the driver 1141 is connected and connected In the arm 1142, the end of the connecting arm 1142 has an abutment structure 11421. The driver 1141 can be controlled to move the connecting arm 1142.

As shown in FIGS. 3 to 7, when the drawing platform 20 (as shown in FIG. 9) is installed on the upper stage frame 11, and the two sides of the drawing platform 20 are corresponding to the two sliding channels 111 a, the limiting component 112 , 113 drives 1121, 1131 can drive the connecting arms 1122, 1132 to move to the two sides adjacent to the drawing platform 20, so that the guide wheels 1123, 1133 abut against the two sides adjacent to the drawing platform 20, thereby, Restrict the movement of the drawing platform 20 relative to the upper stage frame 11 in the X-axis and Y-axis directions; when the drawing platform 20 (as shown in FIG. 9) is set on the upper stage frame 11, the driver 1141 of the limit assembly 114 can also be driven The connecting arm 1142, so that the abutment structure 11421 of the connecting arm 1142 abuts against one side of the drawing platform 20, thereby restricting the drawing platform 20 in the Z-axis direction relative to the upper stage frame 11 mobile.

In practical applications, the upper stage frame 11 may be provided with at least one detection module (not shown). The detection module can detect whether the drawing platform 20 is located in the exposure space 10a (as shown in FIG. 1). In practical applications, the detection module is, for example, an infrared detector, and it can be used to detect the position of the drawing platform 20 relative to the upper frame 11. For example, the drawing platform 20 corresponds to a position on the upper frame 11. When it is on the side, the infrared rays emitted by the detection module can be shielded, whereby the control device electrically connected to the detection module can determine that the drawing platform 20 is corresponding to the side of the upper frame 11. When the control device determines that the drawing platform 20 is located in the exposure space 10a according to the detection result of the detection module, the control device may correspondingly control a plurality of limiting components 112, 113, 114 to operate to limit the drawing platform 20 The movement range in the exposure space 10a, that is, the movement range of the drawing platform 20 relative to the upper stage frame 11 in the three axial directions of the vertical coordinate system is limited. The implementation mode of the detection module and its installation position, number, etc. can be designed according to actual needs, and are not limited herein. Wherein, the control device is a computer device, a processor, etc. for controlling the movement of the relevant components of the machine body 10, which may be installed in the machine body 10, or may be installed independently of the machine body 10.

As shown in FIGS. 1 and 8, the machine body 10 is adjacent to the movable opening 101, and two support arms 30 are provided. One end of each support arm 30 is connected to the machine body 10, and the two support arms 30 are disposed to face each other, and a side surface of the two support arms 30 facing each other is defined as an inner side surface 301. In practical applications, each support arm 30 may be a rectangular body, and the inner side 301 of each support arm 30 may correspond to a wide side.

Each supporting arm 30 is provided with an auxiliary fixing member 31, a guiding component 32, a pivoting component 33, and a fixing component 34. The guiding component 32 of each supporting arm 30 is correspondingly located on the inner side 301, and the pivoting connection of each supporting arm 30 The assembly 33 is connected to the fixed assembly 34, and each fixed assembly 34 can rotate relative to the corresponding support arm 30 through the connected pivot assembly 33. The length and shape of the support arm 30 may be designed according to the size of the actual drawing platform 20, and are not limited to those shown in the figures. Should actually In use, one end of each support arm 30 may be fixedly disposed on the machine body 10, and the mechanical strength of the two support arms 30 connected to the machine body 10 is capable of supporting the weight of the drawing platform 20.

The auxiliary fixing member 31 of each support arm 30 is located on one side of the inner side 301 of the support arm 30, and the auxiliary fixing member 31 is connected to the support arm 30 through the pivot assembly 33; the auxiliary fixing member 31 can be controlled (for example, by human power) Way or electric way), and rotate relative to the support arm 30 through the pivot assembly 33.

The guide assembly 32 of each support arm 30 is disposed on the side of the auxiliary fixing member 31 opposite to the inner side 301 of the support arm 30. The guide assembly 32 may have two rows of rollers 321, and a guide channel 32a is formed between the two rows of rollers 321. The number and arrangement of the rollers 321 of each support arm 30 may vary according to needs. For example, the number of rollers 321 may vary according to the length of the support arm 30, but not shown in the figure as limit.

As shown in FIGS. 9 to 11, the drawing platform 20 can be controlled by the relevant operator or related machinery, and through the two guide channels 32a on the two support arms 30, the whole body leaves the machine body 10 and moves As far as the two support arms 30 are concerned, the drawing platform 20 as a whole can be supported by the two support arms 30 and is located outside the machine body 10.

As shown in FIGS. 8 and 11, the fixing assembly 34 of each support arm 30 may have an extension arm 341 and a locking member 342. The extension arm 341 is fixedly disposed on the support arm 30, and the locking member 342 is connected to the extension arm 341. The locking member 342 can be operated, and has a locking hole 202 corresponding to the drawing platform 20 to lock with each other. Specifically, as shown in FIGS. 10 and 11, when the drawing platform 20 is disposed on the two support arms 30, the user or the relevant electronic control mechanism can operate the lock firmware 342 to make the lock firmware 342 and The locking holes 202 provided on the drawing platform 20 are locked with each other, thereby fixing the drawing platform 20 and the auxiliary fixing member 31 to each other.

As shown in FIGS. 12 and 13, the pivot assembly 33 of each support arm 30 may be disposed at the end of each support arm 30 away from the table body 10, and the pivot assembly 33 can be controlled to rotate relative to the support arm 30. When the pulling platform 20 is set on two supports When the arm 30 is on, the drawing platform 20 can rotate relative to the two support arms 30 through the two pivoting components 33. As shown in FIG. 13, when the drawing platform 20 rotates relative to the two support arms 30, one side of the drawing platform 20 will be correspondingly located in front of the user, so that the relevant user can easily replace the The exposure film or related components on the platform 20 are pulled, and the user can also easily pull the platform 20 for cleaning operations.

Of course, in practical applications, the pivot assembly 33 of each support arm 30 has an associated fixing mechanism to restrict the pivot assembly 33 from rotating relative to the support arm 30, that is, the user can then pull the drawing platform 20 Before leaving the machine body 10, the relevant fixing mechanism will be used to prevent the pivot assembly 33 from rotating relative to the support arm 30, and then the relevant fixing is released after the drawing platform 20 is integrally installed on the two support arms 30 The mechanism restricts the pivot assembly 33 so that the drawing platform 20 can rotate relative to the two support arms 30 through the pivot assembly 33.

As shown in FIGS. 10 and 13, each support arm 30 may also be provided with an auxiliary support assembly 35, which can be used to support the drawing platform 20 rotated relative to the two support arms 30, so that the drawing platform 20 can be more The two support arms 30 are steadily inclined. The auxiliary support assembly 35 may be directly fixed on the support arm 30, or in special applications, or may be installed on the machine body within a range that does not affect the movement of the drawing platform 20 relative to the machine body 10 10.

As shown in FIGS. 10 and 12, in actual application, each supporting arm 30 may also be provided with an auxiliary limiting component 36, which includes a first magnetic attraction unit 361 and a second magnetic attraction unit 362, the first magnetic The suction unit 361 is fixed to the support arm 30, and the second magnetic suction unit 362 is fixed to the auxiliary fixture 31. As shown in FIG. 10, when the drawing platform 20 is disposed on the two support arms 30, the first magnetic attraction unit 361 and the second magnetic attraction unit 362 will attract each other, thereby making the drawing platform 20 more stable on Two support arms 30. As shown in FIGS. 12 and 13, when the auxiliary fixing member 31 and the drawing platform 20 are operated by the user or related mechanisms, and rotate relative to the two support arms 30 through the pivot assembly 33, the second magnetic attraction unit 362 will work with the first magnetic suction unit 361 Separated from each other.

Please refer to FIG. 1, FIG. 9 and FIG. 13 together. The above embodiment takes the drawing platform 20 corresponding to the side of the upper frame 11 as an example, and the drawing platform 20 is pulled away from the machine body 10 and is provided in When the two supporting arms 30 are on, the drawing platform 20 can be operated to rotate clockwise relative to the two supporting arms 30, thereby making the side of the drawing platform 20 used to set the exposure film 201 substantially facing user.

In different embodiments, the drawing platform 20 may be correspondingly located on one side of the lower stage frame 12, and a side 201 of the drawing platform 20 may be used to carry the object to be exposed. When the drawing platform 20 carrying the object to be exposed is drawn out of the machine body 10 and is correspondingly located on the two supporting arms 30, the drawing platform 20 may rotate counterclockwise relative to the two supporting arms 30, thereby, The side 201 of the drawing platform 20 carrying the object to be exposed can face the user substantially.

Please refer to FIGS. 8 and 14. In actual applications, each support arm 30 can be pivotally connected to the machine body 10 through the pivot structure 37, and each support arm 30 can be operated by a user or related electronically controlled machinery. In order to rotate relative to the machine body 10, each supporting arm 30 can move between a retracted position (as shown in FIG. 14) and an expanded position (as shown in FIG. 1). Wherein, when the two support arms 30 are in the folded position, the inner sides of the two support arms 30 are arranged facing the machine body 10; when the two support arms 30 are in the deployed position, the inner sides of the two support arms 30 It is set facing each other.

Specifically, when two support arms 30 are not needed, the relevant user or related electronically controlled machine may operate the two support arms 30 so that the two support arms 30 can pass through the pivot structure 37. 1, the unfolded position shown in FIG. 1, rotates in the direction of the machine body 10, and is converted into the folded position as shown in FIG. 14, so that the support arm 30 protruding from the machine body 10 can be avoided. In the case of a collision with related personnel or machinery.

The above are only the preferred and feasible embodiments of the present invention, and do not limit the patent scope of the present invention. Therefore, equivalent technical changes made by using the description and drawings of the present invention are included in the protection scope of the present invention. .

1‧‧‧Exposure equipment

10‧‧‧ machine body

10a‧‧‧Exposure space

101‧‧‧ opening

11‧‧‧stage frame

20‧‧‧Drawing platform

30‧‧‧support arm

31‧‧‧Auxiliary fixings

33‧‧‧Pivot assembly

Claims (10)

An exposure device comprising: a machine body, which contains an exposure space inside, the machine body contains a drawing platform, the drawing platform is located in the exposure space, and the drawing platform has a bearing Surface, the bearing surface is used to carry a piece to be exposed, the machine body is provided with an exposure device, the exposure device can expose the piece to be exposed on the drawing platform; the machine One side of the table body has a movable opening, and the exposure space can communicate with the outside through the movable opening; the drawing platform can be movably arranged on the machine body, and the drawing platform can pass through the The movable opening leaves the exposure space; two support arms, one end of each support arm is connected to the machine body, the two support arms are disposed facing each other, and the two support arms are opposite each other A facing side is defined as an inner side, each of the support arms is provided with a guide assembly, a pivot assembly and a fixed assembly, the guide assembly of each of the support arms is correspondingly located on the inner side, each The pivot assembly of the support arm is connected to the fixed assembly, and each of the fixed assemblies can rotate relative to the corresponding support arm through the connected pivot assembly; wherein, when the pumping When the pulling platform leaves the exposure space, the pulling platform can be moved to the two supporting arms as a whole by the guidance of the two guiding components, and the two supporting arms can support the complete separation from the For the drawing platform of the machine body, two of the fixing components can be subjected to external forces to fix each other with the drawing platform, and the drawing platforms that are fixed to the two fixing components can be subjected to external forces , And the two pivoting components are rotated relative to the two support arms so that the bearing surface faces away from the movable opening. The exposure apparatus according to claim 1, wherein the guide assembly of each support arm is provided with two rows of rollers, and a guide channel is formed between the two rows of the rollers; the drawing platform can pass through two Each of the guide channels moves integrally to the two support arms. The exposure apparatus according to claim 2, wherein each of the support arms has an auxiliary fixing member and an auxiliary limiting component, one end of the auxiliary fixing member is connected to the pivotal assembly, and the auxiliary fixing The member can rotate relative to the support arm through the pivot assembly; the two rows of the rollers are fixedly arranged with the auxiliary fixing member; the auxiliary limit assembly includes a first magnetic attraction unit and a second magnetic attraction unit, The first magnetic attraction unit is fixed to the support arm, the second magnetic attraction unit is fixed to the auxiliary fixture, the first magnetic attraction unit and the second magnetic attraction unit can attract each other, The first magnetic attraction unit and the second magnetic attraction unit attracting each other can restrict the auxiliary fixing member from rotating relative to the support arm through the pivotal assembly; each fixing assembly of the support arm is fixedly arranged For the auxiliary fixing member; wherein, when the drawing platform rotates relative to the two support arms through the two pivotal assemblies, the two auxiliary fixing members are opposite to the drawing platform together The two support arms rotate. The exposure apparatus according to claim 1, wherein each of the support arms has an auxiliary fixing member and an auxiliary limiting component, one end of the auxiliary fixing member is connected to the pivotal assembly, and the auxiliary fixing The component can rotate relative to the support arm through the pivot assembly; the auxiliary limit assembly includes a first magnetic attraction unit and a second magnetic attraction unit, the first magnetic attraction unit is fixedly disposed on the support Arm, the second magnetic attraction unit is fixedly arranged on the auxiliary fixing member, the first magnetic attraction unit and the second magnetic attraction unit can attract each other, and the first magnetic attraction unit and the The second magnetic attraction unit can restrict the auxiliary fixing member from rotating relative to the support arm through the pivotal assembly; The fixing assembly of the supporting arm is fixedly arranged on the auxiliary fixing member; wherein, when the drawing platform rotates relative to the two supporting arms through the two pivoting assemblies, the two auxiliary fixing members Rotate relative to the two support arms together with the drawing platform. The exposure apparatus according to claim 4, wherein each of the auxiliary fixing members is provided with the fixing assembly, each of the fixing assemblies includes a locking member, and the drawing platform has two locking holes corresponding to each The locking member can be subjected to an external force, and interlocks with the corresponding locking hole, whereby the drawing platform can be fixed to the two auxiliary fixing members, and the drawing platform can receive an external force Function to rotate relative to the two support arms through the two pivotal assemblies. The exposure apparatus according to claim 1, wherein each of the fixing components includes a locking member, and the drawing platform has two locking holes corresponding to the two locking members; each of the locking members can be subjected to external force To lock the corresponding locking holes with each other. The exposure apparatus according to claim 1, wherein the machine body is provided with a plurality of limit components, the plurality of limit components are electrically connected to a control device, and the control device can control the plurality of limit devices The position component is actuated to limit the movement range of the drawing platform in the exposure space; the control device can control the actuation of the plurality of limit components so that the plurality of the limit components does not limit the extraction The movable range of the pulling platform in the exposure space, whereby the pulling platform can be externally applied to leave the exposure space as a whole. The exposure apparatus according to claim 7, wherein at least three of the plurality of limit components can be controlled by the control device to correspondingly limit the three-axis direction of the drawing platform in the vertical coordinate system Range of activities. The exposure apparatus according to claim 7, wherein the machine body is provided with A detection module, the detection module is electrically connected to the control device, the detection module can detect whether the drawing platform is located in the exposure space, when the detection module detects When the drawing platform is located in the exposure space, the control device can control a plurality of the limiting components to limit the movable range of the drawing platform in the exposure space. The exposure apparatus according to any one of claims 1 to 9, wherein one end of the two support arms is pivotally connected to the machine body, and each of the support arms can be subjected to an external force so as to be opposite to the The machine body rotates, and each of the support arms can move between a retracted position and a deployed position accordingly; when the two support arms are located at the retracted position, the The sides are arranged facing the machine body; when the two support arms are in the deployed position, the inner sides of the two support arms are arranged to face each other.

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