以下，將對各圖式中所示之相同或等同的構成要件、構件、製程標註相同的符號，並適當地省略其重複的說明。並且，為了便於理解，各圖式中之構件的尺寸經過適當地放大、縮小之後顯示出來。並且，在各圖式中省略顯示了在說明實施形態方面不重要的一部分的構件。
圖1係實施形態之搬運系統200的立體圖。搬運系統200具備至少一個輥(旋轉體)202和對輥202進行驅動之馬達204。藉由馬達204使輥202旋轉，藉此將作為對象之搬運物(卷材)206沿著既定的路徑進行搬運。搬運物206係紙或薄膜等的帶狀或薄片狀的基材，且沿著搬運路徑連續存在。
在搬運路徑上設置有用於調節搬運物206的張力之張力調節系統300。張力調節系統300具備張力調節單元310及控制器320。張力調節單元310包括張力調節輥312。張力調節輥312被支撐成繞旋轉軸314可轉動自如。旋轉軸314能夠平移並且能夠擺動。
成為旋轉軸314的基準之方向係搬運物206的寬度方向，將其設為X軸。平移運動的方向係搬運物206的長度方向(搬運方向)，將其設為Y軸。擺動運動的旋轉軸(Z軸)，是設為與藉由平移運動能夠使旋轉軸314在其上方移動之平面(X-Y平面)垂直。亦即，在平移運動、擺動運動中的任一運動中，旋轉軸在X-Y平面移動。將繞Z軸的擺動亦稱為平擺(Yawing)。
控制器320檢測搬運物206的張力，以使經檢測之張力接近目標值的方式使張力調節輥312的旋轉軸314平移運動。圖1的例子中，若使張力調節輥312向Y軸正方向位移則張力變小，若向Y軸負方向位移，則張力增大。
張力調節系統300因應作為目標之搬運狀態與實際的搬運狀態的偏差而抑制張力調節輥312的擺動。
圖2(a)、圖2(b)係說明搬運狀態的具體例之圖。如圖2(a)所示，可將搬運狀態設為搬運物206的搬運方向(送出方向)。搬運方向可如虛線所示，以搬運物206的中心線(或者成為邊緣之邊)的方向的形式掌握。該例中，目標搬運方向成為Y軸方向。
如圖2(b)所示，搬運狀態能夠設為既定的Y座標(y
0)上之搬運物206的既定位置P(例如中心或者邊緣)的X座標。
搬運狀態並不限定於在此說明者，只要是與搬運物206的蛇行具有相關性之狀態即可。另外，“蛇行”通常係指如蛇般彎彎曲曲的將很多S字形連在一起之形狀者，但當僅著眼於1個張力調節單元310時，應留意搬運對象是朝1個方向彎曲而不一定形成為蛇行。
以上係搬運系統200的基本結構。接著，對其動作進行說明。圖3(a)、圖3(b)係說明圖1的搬運系統200的動作之圖。圖3(a)、圖3(b)中顯示從上方觀察圖1的搬運系統200之俯視圖。
在此，將作為控制對象之搬運狀態設為搬運方向。將搬運物206的實際的搬運方向(行進方向)以搬運物206的中心線的形式掌握，並使用一點鏈線表示。如圖2(a)所示，在搬運物206蛇行時，搬運物206的行進方向會從成為目標之搬運方向(Y軸方向)脫離。搬運系統200以使修正搬運方向的誤差Δθ的方式使張力調節輥312繞Z軸旋轉。圖2(b)顯示使張力調節輥312旋轉之後的情況。該例中，朝逆時針方向產生了誤差Δθ，因此為了抵消該誤差，只要使張力調節輥312朝順時針方向旋轉即可。藉由使張力調節輥312的旋轉軸旋轉，能夠使搬運物206的實際的行進方向接近作為目標之方向，從而能夠抑制蛇行。
圖4(a)、圖4(b)係表示張力調節系統300的控制系統之圖。圖4(a)的張力調節系統300具備：設置於張力調節輥312的下游、亦即比張力調節輥312更靠搬運物206的行進方向(Y軸正方向)側之感測器330。感測器330檢測既定的Y座標(y
0)上之邊緣E的位置(X方向的位移Δx)，來作為搬運物206的搬運狀態。控制器340依據位移Δx來控制張力調節輥312的平擺。例如控制器340以使位移Δx接近目標值的方式反饋控制張力調節輥312的平擺角f。
圖4(b)的張力調節系統300具備：設置於張力調節輥312的上游、亦即比張力調節輥312更靠與搬運物206的行進方向相反的一側(Y軸負方向)之感測器330。感測器330檢測既定的Y座標(y
0)上之邊緣E的位置(X方向的位移Δx)，來作為搬運物206的搬運狀態。控制器340依據位移Δx來控制張力調節輥312的平擺。例如控制器340亦可以依據位移Δx來前饋控制張力調節輥312的平擺角f。
圖4(a)、圖4(b)的例子中，依據搬運物206的邊緣的位置控制了張力調節輥312的平擺，但並不限定於此。亦可以對搬運物206標註標記，依據標記所通過之位置來檢測搬運物206的搬運方向的偏差。
圖5(a)、圖5(b)係說明基於標記檢測之偏差檢測之圖。該例中，在搬運物206的邊緣附近的兩處標註有標記M1,M
2。藉由感測器檢測兩個標記M1,M
2所通過之位置，藉此能夠檢測搬運物206的搬運方向。
基於標記M
1,M
2之搬運方向的計算方法並無特別限定。例如，設M
1,M
2的Y座標係y
1,y
2。當將兩個標記M
1,M
2的距離設為L時，
成立，因此傾斜角θ能夠由
求出。
亦可以檢測M1,M
2的X座標x
1,x
2。當將兩個標記M1,M
2的距離設為L時，
成立，因此傾斜角θ能夠由
求出。
控制器320只要以使傾斜角θ接近零的方式控制張力調節輥312的擺動即可。
控制器320亦可以進行位置控制來代替傾斜角θ的控制。亦即，亦可以以使兩個標記M1,M
2這兩者通過各自的目標位置的方式控制張力調節輥312的擺動。
亦可以將用於檢測搬運狀態之感測器設置於張力調節單元310內。藉此，能夠在張力調節系統300的內部進行封閉處理。
圖6(a)、圖6(b)係表示張力調節系統300的另一控制系統之圖。在該張力調節系統300中，感測器330測定搬運物206的厚度在寬度方向上的分佈(不均勻性)。圖6中示出測定3處的厚度之例子，但測定點的個數不受限定。
考慮在靜態狀態下之厚度為恆定之搬運物206。如圖6(a)所示，搬運物206不蛇行而直行時，張力T在寬度方向上的分佈實質上為恆定，因此厚度亦接近恆定(d
1=d
2= d
3)。如圖6(b)所示，搬運物206蛇行時，張力T的寬度方向分佈變得不均勻，因此厚度亦變得不均勻(d
1≠d
2≠d
3)。亦即，搬運物206的厚度的分佈與搬運狀態具有相關性。因此控制器320能夠依據厚度的分佈(d
1,d
2……)檢測搬運狀態，從而能夠控制張力調節輥312的擺動。
以下，對張力調節系統300的具體的結構例進行說明。
(第1實施形態)
圖7係表示第1實施形態之張力調節系統100的結構之示意圖。張力調節系統100被組裝於卷材處理系統內。卷材處理系統使卷材2經由複數個旋轉體4沿著既定的移動路徑移動，且對於移動中之卷材2實施既定的處理。卷材2係紙或薄膜等的帶狀或薄片狀的基材，且沿著移動路徑連續存在。張力調節系統100調整該卷材2的張力。
張力調節系統100具備：張力檢測器10、控制裝置12及張力調節單元14。張力檢測器10檢測卷材2的張力。作為張力檢測器，通常使用差動變壓器或測重元件，但張力檢測器屬公知的裝置，因此在此不做詳述。控制裝置12控制張力調節單元14。張力調節單元14對於卷材2施加張力，以使卷材2的張力成為所期望的張力。
圖8～圖10係表示張力調節單元14之圖。圖8係張力調節單元14的立體圖。圖9係張力調節單元14的俯視圖。圖10係沿著圖9的A-A線之剖面圖。張力調節單元14包括：台架20、第1軸桿支撐部22a～第4軸桿支撐部22d、輥活動部25、張力調節輥28、連結部30以及致動器32。
第1軸桿支撐部22a～第4軸桿支撐部22d分別設置於台架20的四個角落。第1靜壓氣體軸承23a朝X方向(既定的水平方向)插穿第1軸桿支撐部22a。同樣地，第2靜壓氣體軸承23b、第3靜壓氣體軸承23c、第4靜壓氣體軸承23d分別朝X方向插穿第2軸桿支撐部22b、第3軸桿支撐部22c、第4軸桿支撐部22d。
輥活動部25將張力調節輥28可旋轉地支撐，並且藉由第1軸桿支撐部22a～第4軸桿支撐部22d可沿X方向移動地支撐。輥活動部25包括：第1軸桿24a～第2軸桿24b(以下，亦將這些軸桿統稱為“軸桿24”)、第1張力調節輥支撐部26a～第2張力調節輥支撐部26b以及連接構件27。
第1軸桿24a配置成中心軸實質上與X方向平行，其一端插穿第1軸桿支撐部22a的第1靜壓氣體軸承23a，其另一端插穿第2軸桿支撐部22b的第2靜壓氣體軸承23b。壓縮空氣供給到第1靜壓氣體軸承23a與第1軸桿24a之間的間隙，藉此在第1靜壓氣體軸承23a與第1軸桿24a之間的間隙產生靜壓。同樣地，壓縮空氣亦供給到第2靜壓氣體軸承23b與第1軸桿24a之間的間隙，藉此在第2靜壓氣體軸承23b與第1軸桿24a之間的間隙產生靜壓。利用這些靜壓，以與第1軸桿支撐部22a及第2軸桿支撐部22b不接觸的狀態將第1軸桿24a支撐在Y方向(實質上與X方向正交之其他水平方向)及Z方向(鉛直方向)上。
第2軸桿24b配置成中心軸實質上與X方向平行，其一端插穿第3軸桿支撐部22c的第3靜壓氣體軸承23c，另一端插穿第4軸桿支撐部22d的第4靜壓氣體軸承23d。壓縮空氣供給到第3靜壓氣體軸承23c與第2軸桿24b之間的間隙，藉此在第3靜壓氣體軸承23c與第2軸桿24b之間的間隙產生靜壓。同樣地，壓縮空氣亦供給到第4靜壓氣體軸承23d與第2軸桿24b之間的間隙，藉此在第4靜壓氣體軸承23d與第2軸桿24b之間的間隙產生靜壓。利用這些靜壓，以與第3軸桿支撐部22c及第4軸桿支撐部22d不接觸的狀態將第2軸桿24b支撐在Y方向及Z方向上。
第1張力調節輥支撐部26a包括：第1支架40a及第1滾動軸承41a。第1軸桿24a朝X方向插穿第1支架40a，且固定於第1支架40a。因此，第1支架40a，亦即第1張力調節輥支撐部26a與第1軸桿24a一起移動。第2張力調節輥支撐部26b包括：第2支架40b及第2滾動軸承41b。第2軸桿24b朝X方向插穿第2支架40b，且固定於第2支架40b。因此，第2支架40b，亦即第2張力調節輥支撐部26b與第2軸桿24b一起移動。
第1滾動軸承41a朝Y方向插穿第1支架40a。第2滾動軸承41b朝Y方向插穿第2支架40b。張力調節輥28的一端插穿第1滾動軸承41a，張力調節輥28的另一端插穿第2滾動軸承41b。因此，張力調節輥28經由各滾動軸承被各支架(進而各張力調節輥支撐部)可旋轉地支撐。另外，亦可以使用靜壓氣體軸承和其他軸承，來代替第1滾動軸承41a和第2滾動軸承41b。
連接構件27係細長板狀的構件，一端固定於第1張力調節輥支撐部26a，另一端固定於第2張力調節輥支撐部26b。因此，若隨著後述的活動桿50朝X方向的移動而使得連接構件27朝X方向移動，則第1張力調節輥支撐部26a及第2張力調節輥支撐部26b將會沿著軸桿24的延伸方向朝X方向移動。
張力調節輥28係圓柱狀的構件，以其旋轉軸R實質上與Y方向平行的方式被支撐。卷材2捲繞在張力調節輥28上。若藉由致動器32使輥活動部25朝X方向移動，則張力調節輥28亦隨此朝X方向移動，從而調整卷材2的張力。本實施形態中，若使張力調節輥28朝致動器32側移動，則施加於卷材2上的推壓力變大，從而卷材2的張力亦變大。另一方面，若使張力調節輥28朝與致動器32相反的一側移動，則施加於卷材2上的推壓力變小，從而卷材2的張力變小。
連結部30具有中央部縮窄的鉸鏈形狀。連結部30中介著縮窄部30a其一端側與連接構件27相連接，另一端側與致動器32的活動桿50相連接。亦即，連結部30連結著連接構件27與致動器32的活動桿50。
致動器32係直動式致動器。致動器32藉由使活動桿50朝X方向移動，經由連結部30使輥活動部25及張力調節輥28朝X方向移動。在本實施形態中，致動器32係利用壓縮空氣來使得活動桿50以與流體壓力缸52不接觸的狀態進行移動之氣動致動器。在致動器32的內部設置有能夠檢測流體壓力缸52內的壓力之壓力檢測器。另外，作為氣動致動器例如有：住友重機械工業公司機電部門(Sumitomo Heavy Industries,Ltd. Mechatronics division)製造的Airsonic(商標名)。
接著，對張力調節輥28、張力調節輥支撐部26、連結部30、及致動器32的位置關係進行說明。張力調節輥28的旋轉軸R所在之高度(亦即Z方向的位置)實質上與軸桿24的中心軸所在之高度一致。並且，張力調節輥28的旋轉軸R所在之高度實質上與連結部30的中心軸以及致動器32的活動桿50的中心軸一致。而且，通過活動桿50的中心軸與連結部30的中心軸之直線，亦即致動器32經由連結部30施加到輥活動部25乃至張力調節輥28之合力，是通過張力調節輥28的重心G。亦即，在張力調節輥28上，施加通過張力調節輥28的重心G並且與引導張力調節輥28朝X方向移動之軸桿24平行的方向的力。
圖11係表示控制裝置12的功能及結構之方塊圖。在此所顯示之各方塊，從硬體方面來看，能夠藉由以電腦的CPU(central processing unit)為代表之元件或機械裝置來實現，從軟體方面來看，可藉由電腦程式等來實現，但是，在此描繪出藉由該等軟硬體的配合來實現之功能方塊圖。因此，該等功能方塊圖能夠藉由硬體與軟體的組合而以各種形態來實現乃是所屬技術領域具有通常知者所能理解的。
控制裝置12具備：取得部60及致動器控制部62。取得部60從致動器32的壓力檢測器取得流體壓力缸52內的壓力測定值。致動器控制部62依據取得部60所取得之測定值，計算出活動桿50對於張力調節輥28施加之作用力，並藉由該作用力計算出卷材2的張力。致動器控制部62以使依這種方式計算出之卷材2的張力成為所期望的張力的方式控制致動器32。致動器32若從致動器控制部62接收到指示，則使活動桿50移動。輥活動部25及張力調節輥28隨此移動，且使得施加到卷材2之張力發生變化。
另外，取得部60亦可以從張力檢測器10取得卷材2的張力測定值。致動器控制部62亦可以依據取得部60所取得之測定值，以使卷材2的張力成為所期望的張力的方式控制致動器32。
依以上所說明之實施形態之張力調節系統100，致動器32經由連結部30對於輥活動部25施加之力量的延長線通過張力調節輥28的重心G。因此，經由連結部30及輥活動部25施加於張力調節輥28之力量(合力)通過張力調節輥28的重心G。藉此，能夠抑制為了使張力調節輥28移動而由致動器32施加之力量的傳遞損失，結果能夠精確地控制卷材2的張力。
並且，依本實施形態之張力調節系統100，張力調節輥28的旋轉軸R的高度實質上與引導輥活動部25及張力調節輥28朝X方向移動之軸桿24的中心軸的高度一致。藉此，能夠進一步抑制為了使張力調節輥28移動而由致動器32施加之力量的傳遞損失。
並且，依本實施形態之張力調節系統100，輥活動部25與致動器32藉由具有鉸鏈形狀之連結部30連結。亦即，輥活動部25與致動器32藉由具有旋轉自由度之連結部30而連結。而且，依本實施形態之張力調節系統100，輥活動部25的軸桿24藉由靜壓氣體軸承以與軸桿支撐部不接觸的狀態支撐。因此，在輥活動部25的軸桿24與靜壓氣體軸承之間存在間隙，輥活動部25可在該間隙的範圍內擺動。輥活動部25例如可繞Z方向進行擺動。
在此，有時會在卷材2上存在著扭曲之部分，在該扭曲的部分通過張力調節輥28時，卷材2的寬度方向的張力會變得不均勻，會對於張力調節輥28施加相對於X方向呈傾斜之方向之張力。此時，若張力調節輥28無法繞Z方向進行擺動，則卷材2的寬度方向的一端側的張力變高，亦即卷材2的寬度方向上的張力變得不均勻。相對於此，依本實施形態之張力調節系統100，如上所述，輥活動部25與致動器32藉由具有旋轉自由度之連結部30而連結，並且輥活動部25藉由靜壓氣體軸承以與軸桿支撐部不接觸的狀態支撐。因此，輥活動部25能夠在軸桿24與靜壓氣體軸承之間的間隙的範圍內繞Z方向進行擺動，張力調節輥28亦能夠隨此繞Z方向進行擺動。因此，能夠使得卷材2在寬度方向上的張力比較均勻。
並且，第1實施形態之張力調節系統100中，作為靜止體之第1軸桿支撐部22a～第4軸桿支撐部22d具有靜壓氣體軸承。在此，若在活動之構件上設置靜壓氣體軸承，則用於對於靜壓氣體軸承供給空氣之配管可能造成其移動受阻。相對於此，在本實施形態之張力調節系統100中，由於在靜止體上設置有靜壓氣體軸承，因此能夠抑制這種問題的發生。
(第2實施形態)
第2實施形態之張力調節系統與第1實施形態之張力調節系統100同樣地具備張力檢測器10、控制裝置12及張力調節單元14。
圖12、圖13係表示第2實施形態之張力調節單元14之圖。圖12係張力調節單元14的立體圖。圖13係張力調節單元14的俯視圖。圖12、圖7分別與圖8、圖9對應。在本實施形態中，張力調節單元14包括：台架20、第1軸桿支撐部22a～第4軸桿支撐部22d、輥活動部25、張力調節輥28、第1連結部130a～第2連結部130b及第1致動器132a～第2致動器132b。
第1連結部130a、第2連結部130b分別具有與第1實施形態的連結部30相同的結構。第1連結部130a的一端側與第1軸桿24a連接，另一端側固定於第1致動器132a的活動桿50。第2連結部130b的一端側與第2軸桿24b連接，另一端側固定於第2致動器132b的活動桿50。
第1致動器132a、第2致動器132b分別具有與第1實施形態的致動器32相同的結構。第1致動器132a與第2致動器132b配置成，使經由輥活動部25傳遞到張力調節輥28之第1致動器132a與第2致動器132b的合力通過張力調節輥28的重心G。
在第1致動器132a、第2致動器132b的內部設置有能夠檢測各活動桿的伸縮量(例如各活動桿的位置)之位置檢測器。另外，位置檢測器亦可以設置在第1致動器132a、第2致動器132b的外部。
控制裝置12包括：取得部60及致動器控制部62。取得部60在本實施形態中，從各致動器的位置檢測器取得各活動桿的位置測定值。致動器控制部62依據取得部60所取得之測定值，以使卷材2的張力成為所期望的張力的方式控制第1致動器132a及第2致動器132b。致動器控制部62尤其依據來自各致動器的位置檢測器的測定值，以使各致動器的活動桿的伸縮量實質上相同的方式控制各致動器。第1致動器132a若從致動器控制部62接收到指示，則經由第1軸桿24a使第1張力調節輥支撐部26a移動。同樣地，第2致動器132b若從致動器控制部62接收到指示，則經由第2軸桿24b使第2張力調節輥支撐部26b移動。張力調節輥28隨著各張力調節輥支撐部的移動而移動，使得施加到卷材2之張力發生變化。
依以上所說明之第2實施形態之張力調節系統，可獲得與第1實施形態之張力調節系統100的作用效果相同的作用效果。
並且，依第2實施形態之張力調節系統，藉由配置在Y方向(亦即卷材2的寬度方向)上不同位置之兩個致動器來使輥活動部25移動。因此，能夠更為準確地控制張力調節輥28。例如，與藉由一個致動器來使輥活動部移動之情況相比，能夠更確實地保持張力調節輥28的旋轉軸R與Y方向平行，並且還能夠使張力調節輥28朝X方向移動。藉此，能夠使得卷材2的寬度方向的張力更加均勻。
(第3實施形態)
第3實施形態之張力調節系統與第2實施形態之張力調節系統同樣地具備張力檢測器10、控制裝置12及張力調節單元14。該張力調節系統能夠利用於上述的蛇行控制。
張力檢測器10在本實施形態中檢測卷材2的寬度方向上的兩端的張力。張力檢測器10將檢測到的卷材2的寬度方向兩端的張力發送到控制裝置12。張力調節單元14基本上具有與第2實施形態的張力調節單元14相同的功能及結構。但是，本實施形態中，在第1致動器132a、第2致動器132b的內部設置有能夠檢測各流體壓力缸52內的壓力之壓力檢測器。
控制裝置12包括：取得部60及致動器控制部62。取得部60從第1致動器132a、第2致動器132b的各壓力檢測器取得各流體壓力缸52內的壓力測定值。致動器控制部62依據取得部60所取得之測定值來計算出各活動桿50對於張力調節輥28施加之作用力，並藉由該作用力來計算出卷材2的寬度方向的兩端的張力。致動器控制部62以使依這種方式計算出之卷材2的兩端的張力都成為所期望的張力的方式控制第1致動器132a及第2致動器132b。致動器控制部62尤其以使來自各致動器的壓力檢測器的測定值實質上相同的方式控制各致動器。
另外，取得部60亦可從張力檢測器10取得卷材2的寬度方向兩端上的張力測定值。致動器控制部62亦可依據取得部60所取得之測定值，以使卷材2的寬度方向的兩端的張力實質上相同的方式控制各致動器。
第1致動器132a若從致動器控制部62接收到指示，則經由第1軸桿24a使第1張力調節輥支撐部26a移動。第2致動器132b若從致動器控制部62接收到指示，則經由第2軸桿24b使第2張力調節輥支撐部26b移動。亦即，各張力調節輥支撐部藉由各致動器而受到個別控制而移動。張力調節輥28隨著各張力調節輥支撐部的移動而移動，且使得施加到卷材2之張力發生變化。
依以上所說明之第3實施形態之張力調節系統，可獲得與第2實施形態之張力調節系統的作用效果相同的作用效果。
並且，依第3實施形態之張力調節系統，第1軸桿24a與第1致動器132a藉由具有鉸鏈形狀之第1連結部130a而連結。同樣地，第2軸桿24b與第2致動器132b藉由具有鉸鏈形狀之第2連結部130b而連結。亦即，各軸桿與各致動器藉由具有旋轉自由度之連結部而連結。而且，依第3實施形態之張力調節系統，輥活動部25藉由靜壓氣體軸承以與第1軸桿支撐部22a～第4軸桿支撐部22d不接觸的狀態支撐。因此，在輥活動部25與各軸桿支撐部的靜壓氣體軸承之間存在間隙，輥活動部25可在該間隙的範圍內進行擺動。輥活動部25尤其可繞Z方向進行擺動。而且，依第3實施形態之張力調節系統，張力調節單元14具備兩個致動器，且能夠個別控制輥活動部25的各張力調節輥的移動。
亦即，依第3實施形態之張力調節單元14，藉由兩個致動器，能夠產生張力調節輥的旋轉軸的平移運動和擺動運動。
如參閱圖1進行的說明，以使搬運狀態接近目標狀態的方式藉由兩個致動器使輥活動部25、進而使張力調節輥28繞Z方向積極地進行擺動，藉此可抑制蛇行。
在將第3實施形態之張力調節單元14利用於蛇行控制之情況下，亦可以利用在兩個致動器中取得之壓力的測定值來檢測搬運狀態。
以上，對實施形態之張力調節系統進行了說明。該實施形態僅為例示而已，該等構成要件和各處理製程的組合存在著各種變形例，並且，這種變形例亦落在本發明的範圍內乃是所屬技術領域具有通常知識者所能理解的。以下將說明變形例。
(變形例1)
在第1、第2實施形態中，對於連結部具有鉸鏈形狀之情況進行了說明，但並不限於此，連結部只要是具有旋轉自由度之構造即可。圖14係表示第1實施形態的變形例之張力調節系統的張力調節單元之俯視圖。圖14與圖9對應。在本變形例中，連結部30的一端側與致動器32的活動桿50連接。連結部30的另一端側具有球面形狀，且與連接構件27抵接。依本變形例，可獲得與第1實施形態之張力調節系統的作用效果相同的作用效果。
(變形例2)
在第1、第2實施形態中，對於輥活動部藉由靜壓氣體軸承可沿X方向移動地支撐之情況進行了說明，但並不限於此。輥活動部亦可以藉由滾動軸承或者其他軸承所支撐。
(變形例3)
對於第1實施形態中的張力調節單元具備一個致動器，第2實施形態中的張力調節單元具備兩個致動器之情況進行了說明，但並不限於此。張力調節單元，亦可以具備三個以上的致動器。另外，當具備複數個致動器時，亦可以設置成：使得該等致動器的合力的延長線通過重心G。並且，亦可以設置成：使得該等致動器的合力的延長線實質上與引導輥活動部及張力調節輥28朝X方向移動之軸桿24的高度一致。
上述實施形態與變形例的任意組合作為本發明的實施形態亦同樣有效。藉由組合而成之新的實施形態組合具有被組合之實施形態及變形例各自的效果。
Hereinafter, the same or equivalent constituent elements, components, and manufacturing processes shown in the drawings will be denoted by the same symbols, and their repeated descriptions will be omitted as appropriate. In addition, for ease of understanding, the dimensions of the components in each drawing are displayed after being appropriately enlarged or reduced. In addition, in each drawing, a part that is not important in explaining the embodiment is omitted. FIG. 1 is a perspective view of a conveyance system 200 according to an embodiment. The conveyance system 200 includes at least one roller (rotating body) 202 and a motor 204 that drives the roller 202. The roller 204 is rotated by the motor 204, whereby the object to be transported (coil) 206 is transported along a predetermined path. The transported object 206 is a belt-shaped or sheet-shaped base material such as paper or film, and continuously exists along the transport path. A tension adjusting system 300 for adjusting the tension of the conveyed object 206 is provided on the conveying path. The tension adjustment system 300 includes a tension adjustment unit 310 and a controller 320. The tension adjustment unit 310 includes a tension adjustment roller 312. The tension adjusting roller 312 is supported rotatably about a rotation axis 314. The rotating shaft 314 can translate and can swing. The direction which becomes the reference of the rotating shaft 314 is the width direction of the conveyed object 206, and it is set as the X axis. The direction of the translational movement is the longitudinal direction (transport direction) of the conveyed object 206, and this is referred to as the Y axis. The rotation axis (Z axis) of the swing motion is set to be perpendicular to the plane (XY plane) over which the rotation axis 314 can be moved by the translation motion. That is, in any of the translation movement and the swing movement, the rotation axis moves in the XY plane. The swinging around the Z axis is also called Yawing. The controller 320 detects the tension of the conveyed object 206, and causes the rotary shaft 314 of the tension adjustment roller 312 to move in translation so that the detected tension approaches the target value. In the example of FIG. 1, if the tension adjusting roller 312 is displaced in the positive direction of the Y axis, the tension becomes smaller, and if it is displaced in the negative direction of the Y axis, the tension increases. The tension adjustment system 300 suppresses the swing of the tension adjustment roller 312 according to the deviation of the target conveyance state from the actual conveyance state. 2(a) and 2(b) are diagrams illustrating specific examples of the conveyed state. As shown in FIG. 2(a), the conveyance state can be set as the conveyance direction of the conveyed object 206 (feeding direction). The conveying direction can be grasped in the form of the direction of the center line (or the edge of the edge) of the conveyed object 206 as indicated by a broken line. In this example, the target conveying direction becomes the Y-axis direction. As shown in FIG. 2(b), the conveyance state can be set to the X coordinate of the predetermined position P (for example, center or edge) of the conveyed object 206 on the predetermined Y coordinate (y 0 ). The conveyance state is not limited to those described here, as long as it is a state related to the meandering of the conveyed object 206. In addition, "snake" usually refers to a shape that bends and bends a lot of S-shapes together, but when looking at only one tension adjustment unit 310, it should be noted that the conveying object is curved in one direction. Not necessarily formed as a snake. The above is the basic structure of the transport system 200. Next, the operation will be described. 3(a) and 3(b) are diagrams illustrating the operation of the conveyance system 200 of FIG. 1. 3(a) and 3(b) show plan views of the conveying system 200 of FIG. 1 viewed from above. Here, let the conveyance state to be controlled be the conveyance direction. The actual conveying direction (travel direction) of the conveyed object 206 is grasped in the form of the center line of the conveyed object 206, and is indicated by a chain line. As shown in FIG. 2( a ), when the conveyed object 206 snakes, the traveling direction of the conveyed object 206 is separated from the target conveying direction (Y-axis direction). The conveyance system 200 rotates the tension adjustment roller 312 around the Z axis so as to correct the error Δθ in the conveyance direction. FIG. 2(b) shows the situation after the tension adjusting roller 312 is rotated. In this example, an error Δθ occurs in the counterclockwise direction, so in order to offset the error, the tension adjusting roller 312 may be rotated clockwise. By rotating the rotation axis of the tension adjustment roller 312, the actual traveling direction of the conveyed object 206 can be brought close to the target direction, and meandering can be suppressed. 4(a) and 4(b) are diagrams showing the control system of the tension adjustment system 300. FIG. The tension adjustment system 300 of FIG. 4(a) includes a sensor 330 provided downstream of the tension adjustment roller 312, that is, on the side in the traveling direction (positive direction of the Y axis) of the conveyed object 206 than the tension adjustment roller 312. The sensor 330 detects the position (displacement Δx in the X direction) of the edge E on the predetermined Y coordinate (y 0 ) as the conveyance state of the conveyed object 206. The controller 340 controls the flat swing of the tension adjusting roller 312 according to the displacement Δx. For example, the controller 340 feedback-controls the yaw angle f of the tension adjusting roller 312 so that the displacement Δx approaches the target value. The tension adjustment system 300 of FIG. 4(b) includes sensing provided upstream of the tension adjustment roller 312, that is, on the side opposite to the traveling direction of the conveyed object 206 (the negative direction of the Y axis) than the tension adjustment roller 312.器330. The sensor 330 detects the position (displacement Δx in the X direction) of the edge E on the predetermined Y coordinate (y 0 ) as the conveyance state of the conveyed object 206. The controller 340 controls the flat swing of the tension adjusting roller 312 according to the displacement Δx. For example, the controller 340 can also feedforwardly control the yaw angle f of the tension adjusting roller 312 according to the displacement Δx. In the examples of FIGS. 4(a) and 4(b), the swing of the tension adjusting roller 312 is controlled according to the position of the edge of the conveyed object 206, but it is not limited to this. A mark may be added to the conveyed object 206, and the deviation of the conveyance direction of the conveyed object 206 may be detected based on the position where the mark passes. 5(a) and 5(b) are diagrams illustrating deviation detection based on mark detection. In this example, marks M1 and M 2 are marked at two places near the edge of the conveyed object 206. With two sensor detects marks M1, M 2 of the position adopted, thereby enabling the detection of the conveying direction of the load 206. The calculation method of the transport direction based on the marks M 1 and M 2 is not particularly limited. For example, suppose the Y coordinate system of M 1 , M 2 is y 1 , y 2 . When the distance between the two markers M 1 and M 2 is set to L, Holds, so the tilt angle θ can be determined by Find out. The X coordinates x 1 , x 2 of M1, M 2 can also be detected. When the distance between the two markers M1, M 2 is set to L, Holds, so the tilt angle θ can be determined by Find out. The controller 320 only needs to control the swing of the tension adjusting roller 312 so that the inclination angle θ approaches zero. The controller 320 may perform position control instead of controlling the tilt angle θ. That is, the two markers may also M1, M 2 both by the respective target positions is controlled oscillating roller 312 of the tension adjustment. A sensor for detecting the conveyance state may also be provided in the tension adjusting unit 310. With this, the closing process can be performed inside the tension adjustment system 300. 6(a) and 6(b) are diagrams showing another control system of the tension adjustment system 300. FIG. In this tension adjustment system 300, the sensor 330 measures the distribution (nonuniformity) of the thickness of the conveyed object 206 in the width direction. FIG. 6 shows an example of measuring the thickness at three locations, but the number of measurement points is not limited. Consider the conveyed object 206 whose thickness in a static state is constant. As shown in FIG. 6(a), when the conveyed object 206 travels straight without meandering, the distribution of the tension T in the width direction is substantially constant, so the thickness is also nearly constant (d 1 = d 2 = d 3 ). As shown in FIG. 6(b), when the conveyed object 206 snakes, the width direction distribution of the tension T becomes uneven, so the thickness becomes uneven (d 1 ≠ d 2 ≠ d 3 ). That is, the distribution of the thickness of the conveyed object 206 has a correlation with the conveyed state. Therefore, the controller 320 can detect the conveyance state according to the thickness distribution (d 1 , d 2 ... ), and can control the swing of the tension adjusting roller 312. Hereinafter, a specific configuration example of the tension adjustment system 300 will be described. (First Embodiment) FIG. 7 is a schematic diagram showing the structure of a tension adjustment system 100 according to a first embodiment. The tension adjustment system 100 is assembled in the web processing system. The coil processing system moves the coil 2 along a predetermined moving path via a plurality of rotating bodies 4 and performs predetermined processing on the moving coil 2. The roll material 2 is a belt-shaped or sheet-shaped base material such as paper or film, and continuously exists along the moving path. The tension adjustment system 100 adjusts the tension of the web 2. The tension adjustment system 100 includes a tension detector 10, a control device 12, and a tension adjustment unit 14. The tension detector 10 detects the tension of the web 2. As the tension detector, a differential transformer or a weight measuring element is usually used, but the tension detector is a well-known device, so it will not be described in detail here. The control device 12 controls the tension adjusting unit 14. The tension adjusting unit 14 applies tension to the web 2 so that the tension of the web 2 becomes a desired tension. 8 to 10 are diagrams showing the tension adjusting unit 14. FIG. 8 is a perspective view of the tension adjusting unit 14. FIG. 9 is a plan view of the tension adjusting unit 14. FIG. 10 is a cross-sectional view taken along line AA of FIG. 9. The tension adjustment unit 14 includes a gantry 20, first to fourth shaft support portions 22a to 22d, a roller movable portion 25, a tension adjustment roller 28, a coupling portion 30, and an actuator 32. The first shaft support portion 22a to the fourth shaft support portion 22d are respectively provided at four corners of the gantry 20. The first static pressure gas bearing 23a is inserted through the first shaft support portion 22a in the X direction (predetermined horizontal direction). Similarly, the second static pressure gas bearing 23b, the third static pressure gas bearing 23c, and the fourth static pressure gas bearing 23d are inserted through the second shaft support portion 22b, the third shaft support portion 22c, and the fourth in the X direction, respectively. Shaft support 22d. The roller movable portion 25 rotatably supports the tension adjusting roller 28 and is movably supported in the X direction by the first shaft support portion 22a to the fourth shaft support portion 22d. The roller movable portion 25 includes a first shaft 24a to a second shaft 24b (hereinafter, these shafts are also collectively referred to as "shaft 24"), and a first tension adjusting roller support portion 26a to a second tension adjusting roller support portion 26b及连接机构27。 26b and the connection member 27. The first shaft 24a is arranged such that the central axis is substantially parallel to the X direction, one end of which is inserted into the first static pressure gas bearing 23a of the first shaft support 22a, and the other end of which is inserted through the second shaft support 22b. 2 Static pressure gas bearing 23b. Compressed air is supplied to the gap between the first static pressure gas bearing 23a and the first shaft 24a, whereby static pressure is generated in the gap between the first static pressure gas bearing 23a and the first shaft 24a. Similarly, compressed air is also supplied to the gap between the second static pressure gas bearing 23b and the first shaft 24a, whereby static pressure is generated in the gap between the second static pressure gas bearing 23b and the first shaft 24a. Using these static pressures, the first shaft 24a is supported in the Y direction (the other horizontal direction substantially orthogonal to the X direction) without contacting the first shaft support 22a and the second shaft support 22b, and Z direction (vertical direction). The second shaft 24b is arranged such that the central axis is substantially parallel to the X direction, one end is inserted through the third static pressure gas bearing 23c of the third shaft support 22c, and the other end is inserted through the fourth of the fourth shaft support 22d Static pressure gas bearing 23d. Compressed air is supplied to the gap between the third static pressure gas bearing 23c and the second shaft 24b, whereby static pressure is generated in the gap between the third static pressure gas bearing 23c and the second shaft 24b. Similarly, compressed air is also supplied to the gap between the fourth static pressure gas bearing 23d and the second shaft 24b, whereby static pressure is generated in the gap between the fourth static pressure gas bearing 23d and the second shaft 24b. With these static pressures, the second shaft 24b is supported in the Y direction and the Z direction without contacting the third shaft support 22c and the fourth shaft support 22d. The first tension adjusting roller support portion 26a includes a first holder 40a and a first rolling bearing 41a. The first shaft 24a is inserted into the first bracket 40a in the X direction, and is fixed to the first bracket 40a. Therefore, the first holder 40a, that is, the first tension adjusting roller support portion 26a moves together with the first shaft 24a. The second tension-adjusting roller support portion 26b includes a second holder 40b and a second rolling bearing 41b. The second shaft 24b is inserted into the second holder 40b in the X direction, and is fixed to the second holder 40b. Therefore, the second holder 40b, that is, the second tension-adjusting roller support portion 26b moves together with the second shaft 24b. The first rolling bearing 41a is inserted into the first holder 40a in the Y direction. The second rolling bearing 41b is inserted into the second holder 40b in the Y direction. One end of the tension adjusting roller 28 is inserted through the first rolling bearing 41a, and the other end of the tension adjusting roller 28 is inserted through the second rolling bearing 41b. Therefore, the tension adjusting roller 28 is rotatably supported by each bracket (and each tension adjusting roller support portion) via each rolling bearing. In addition, hydrostatic gas bearings and other bearings may be used instead of the first rolling bearing 41a and the second rolling bearing 41b. The connecting member 27 is an elongated plate-shaped member, and one end is fixed to the first tension adjusting roller support portion 26a, and the other end is fixed to the second tension adjusting roller support portion 26b. Therefore, if the connecting member 27 moves in the X direction as the movable lever 50 described later moves in the X direction, the first tension adjusting roller support portion 26a and the second tension adjusting roller support portion 26b will follow the shaft 24 The direction of the extension moves towards the X direction. The tension adjusting roller 28 is a cylindrical member, and its rotation axis R is supported substantially parallel to the Y direction. The web 2 is wound on the tension adjusting roller 28. When the roller movable portion 25 is moved in the X direction by the actuator 32, the tension adjusting roller 28 also moves in the X direction accordingly, thereby adjusting the tension of the web 2. In the present embodiment, if the tension adjusting roller 28 is moved toward the actuator 32 side, the pressing force applied to the web 2 increases, and the tension of the web 2 also increases. On the other hand, if the tension adjustment roller 28 is moved to the side opposite to the actuator 32, the pressing force applied to the web 2 becomes smaller, and the tension of the web 2 becomes smaller. The connecting portion 30 has a hinge shape with a narrowed central portion. One end side of the connecting portion 30 is connected to the connecting member 27 via the narrowed portion 30 a, and the other end side is connected to the movable rod 50 of the actuator 32. That is, the connecting portion 30 connects the connecting member 27 and the movable rod 50 of the actuator 32. The actuator 32 is a direct-acting actuator. The actuator 32 moves the movable lever 50 in the X direction, and moves the roller movable portion 25 and the tension adjusting roller 28 in the X direction via the coupling portion 30. In this embodiment, the actuator 32 is a pneumatic actuator that uses compressed air to move the movable rod 50 without contacting the fluid pressure cylinder 52. A pressure detector capable of detecting the pressure in the fluid pressure cylinder 52 is provided inside the actuator 32. In addition, examples of the pneumatic actuator include Airsonic (trade name) manufactured by Sumitomo Heavy Industries, Ltd. Mechatronics division. Next, the positional relationship of the tension adjusting roller 28, the tension adjusting roller supporting portion 26, the connecting portion 30, and the actuator 32 will be described. The height of the rotation axis R of the tension adjusting roller 28 (that is, the position in the Z direction) is substantially the same as the height of the central axis of the shaft 24. In addition, the height at which the rotation axis R of the tension adjusting roller 28 is substantially coincides with the central axis of the coupling portion 30 and the central axis of the movable rod 50 of the actuator 32. Moreover, the straight line passing through the central axis of the movable lever 50 and the central axis of the connecting portion 30, that is, the total force applied by the actuator 32 to the roller movable portion 25 and the tension adjusting roller 28 via the connecting portion 30 is through the tension adjusting roller 28 Center of gravity G. That is, a force that passes through the center of gravity G of the tension adjustment roller 28 and is parallel to the shaft 24 that guides the movement of the tension adjustment roller 28 in the X direction is applied to the tension adjustment roller 28. FIG. 11 is a block diagram showing the function and structure of the control device 12. The various blocks shown here can be realized by components or mechanical devices represented by the CPU (central processing unit) of the computer from the hardware side, and by computer programs from the software side Implementation, however, here depicts a functional block diagram realized by the cooperation of these hardware and software. Therefore, these functional block diagrams can be implemented in various forms by a combination of hardware and software, which is understood by those skilled in the art. The control device 12 includes an acquisition unit 60 and an actuator control unit 62. The acquisition unit 60 acquires the pressure measurement value in the fluid pressure cylinder 52 from the pressure detector of the actuator 32. The actuator control unit 62 calculates the force applied by the movable lever 50 to the tension adjusting roller 28 based on the measurement value obtained by the obtaining unit 60, and calculates the tension of the web 2 from the force. The actuator control unit 62 controls the actuator 32 so that the tension of the web 2 calculated in this way becomes a desired tension. When the actuator 32 receives an instruction from the actuator control unit 62, it moves the movable lever 50. The roller movable portion 25 and the tension adjusting roller 28 move accordingly, and the tension applied to the web 2 changes. In addition, the acquisition unit 60 may acquire the tension measurement value of the coil 2 from the tension detector 10. The actuator control unit 62 may also control the actuator 32 so that the tension of the web 2 becomes the desired tension based on the measurement value obtained by the acquisition unit 60. According to the tension adjustment system 100 of the embodiment described above, the actuator 32 passes the center of gravity G of the tension adjustment roller 28 via the extension line of the force applied to the roller movable portion 25 via the connecting portion 30. Therefore, the force (total force) applied to the tension adjusting roller 28 via the connecting portion 30 and the roller movable portion 25 passes through the center of gravity G of the tension adjusting roller 28. With this, the transmission loss of the force applied by the actuator 32 to move the tension adjusting roller 28 can be suppressed, and as a result, the tension of the web 2 can be accurately controlled. In addition, according to the tension adjustment system 100 of the present embodiment, the height of the rotation axis R of the tension adjustment roller 28 substantially matches the height of the central axis of the shaft 24 that moves the guide roller movable portion 25 and the tension adjustment roller 28 in the X direction. With this, the transmission loss of the force applied by the actuator 32 to move the tension adjusting roller 28 can be further suppressed. In addition, according to the tension adjusting system 100 of this embodiment, the roller movable portion 25 and the actuator 32 are connected by the connecting portion 30 having a hinge shape. That is, the roller movable part 25 and the actuator 32 are connected by the connection part 30 having rotational freedom. In addition, according to the tension adjustment system 100 of the present embodiment, the shaft 24 of the roller movable portion 25 is supported by the static pressure gas bearing without contacting the shaft support portion. Therefore, there is a gap between the shaft 24 of the roller movable portion 25 and the static pressure gas bearing, and the roller movable portion 25 can swing within the range of the gap. The roller movable portion 25 can swing around the Z direction, for example. Here, there may be a twisted portion on the web 2, and when the twisted portion passes through the tension adjusting roller 28, the tension in the width direction of the web 2 may become uneven and may be applied to the tension adjusting roller 28 Tension in an oblique direction with respect to the X direction. At this time, if the tension adjusting roller 28 cannot swing around the Z direction, the tension on the one end side of the width direction of the coil 2 becomes high, that is, the tension in the width direction of the coil 2 becomes uneven. On the other hand, according to the tension adjustment system 100 of this embodiment, as described above, the roller movable portion 25 and the actuator 32 are connected by the connecting portion 30 having rotational freedom, and the roller movable portion 25 is connected by the static pressure gas The bearing is supported without contacting the shaft support portion. Therefore, the roller movable portion 25 can swing around the Z direction within the range of the gap between the shaft 24 and the static pressure gas bearing, and the tension adjusting roller 28 can also swing around the Z direction accordingly. Therefore, the tension of the coil 2 in the width direction can be made relatively uniform. In addition, in the tension adjustment system 100 of the first embodiment, the first shaft support portion 22a to the fourth shaft support portion 22d which are stationary bodies have static pressure gas bearings. Here, if a static pressure gas bearing is provided on the movable member, the piping for supplying air to the static pressure gas bearing may cause its movement to be hindered. In contrast, in the tension adjustment system 100 of the present embodiment, since the static pressure gas bearing is provided on the stationary body, it is possible to suppress the occurrence of such a problem. (Second Embodiment) The tension adjustment system of the second embodiment includes the tension detector 10, the control device 12, and the tension adjustment unit 14 similarly to the tension adjustment system 100 of the first embodiment. 12 and 13 are diagrams showing the tension adjusting unit 14 of the second embodiment. FIG. 12 is a perspective view of the tension adjusting unit 14. FIG. 13 is a plan view of the tension adjusting unit 14. Figures 12 and 7 correspond to Figures 8 and 9, respectively. In the present embodiment, the tension adjusting unit 14 includes the stage 20, the first shaft support 22a to the fourth shaft support 22d, the roller movable portion 25, the tension adjusting roller 28, and the first connecting portion 130a to the second The connecting portion 130b and the first to second actuators 132a to 132b. The first coupling portion 130a and the second coupling portion 130b each have the same structure as the coupling portion 30 of the first embodiment. One end of the first coupling portion 130a is connected to the first shaft 24a, and the other end is fixed to the movable rod 50 of the first actuator 132a. One end of the second coupling portion 130b is connected to the second shaft 24b, and the other end is fixed to the movable rod 50 of the second actuator 132b. The first actuator 132a and the second actuator 132b each have the same structure as the actuator 32 of the first embodiment. The first actuator 132a and the second actuator 132b are arranged such that the total force of the first actuator 132a and the second actuator 132b transmitted to the tension adjusting roller 28 via the roller movable portion 25 passes through the tension adjusting roller 28. Center of gravity G. Inside the first actuator 132a and the second actuator 132b, a position detector capable of detecting the amount of expansion and contraction of each movable rod (for example, the position of each movable rod) is provided. In addition, the position detector may be provided outside the first actuator 132a and the second actuator 132b. The control device 12 includes an acquisition unit 60 and an actuator control unit 62. In this embodiment, the acquisition unit 60 acquires the position measurement value of each movable rod from the position detector of each actuator. The actuator control unit 62 controls the first actuator 132a and the second actuator 132b so that the tension of the web 2 becomes a desired tension based on the measurement value acquired by the acquisition unit 60. The actuator control unit 62 controls each actuator so that the amount of expansion and contraction of the movable rod of each actuator is substantially the same based on the measurement value from the position detector of each actuator. When the first actuator 132a receives an instruction from the actuator control unit 62, it moves the first tension-adjusting roller support 26a via the first shaft 24a. Similarly, when the second actuator 132b receives an instruction from the actuator control section 62, it moves the second tension-adjusting roller support section 26b via the second shaft 24b. The tension adjusting roller 28 moves as each tension adjusting roller supporting portion moves, so that the tension applied to the web 2 changes. According to the tension adjustment system of the second embodiment described above, the same effects as those of the tension adjustment system 100 of the first embodiment can be obtained. In addition, according to the tension adjustment system of the second embodiment, the roller movable portion 25 is moved by two actuators arranged at different positions in the Y direction (that is, the width direction of the web 2). Therefore, the tension adjusting roller 28 can be controlled more accurately. For example, it is possible to more reliably keep the rotation axis R of the tension adjustment roller 28 parallel to the Y direction, and also move the tension adjustment roller 28 in the X direction, as compared to the case where the roller movable portion is moved by one actuator . With this, the tension in the width direction of the coil 2 can be made more uniform. (Third Embodiment) The tension adjustment system of the third embodiment includes the tension detector 10, the control device 12, and the tension adjustment unit 14 as in the tension adjustment system of the second embodiment. This tension adjustment system can be used for the above-mentioned meandering control. In this embodiment, the tension detector 10 detects the tension of both ends in the width direction of the web 2. The tension detector 10 sends the detected tension at both ends in the width direction of the web 2 to the control device 12. The tension adjusting unit 14 basically has the same function and structure as the tension adjusting unit 14 of the second embodiment. However, in this embodiment, a pressure detector capable of detecting the pressure in each fluid pressure cylinder 52 is provided inside the first actuator 132a and the second actuator 132b. The control device 12 includes an acquisition unit 60 and an actuator control unit 62. The acquisition unit 60 acquires the pressure measurement value in each fluid pressure cylinder 52 from each pressure detector of the first actuator 132a and the second actuator 132b. The actuator control unit 62 calculates the force applied by each movable bar 50 to the tension adjusting roller 28 based on the measurement value obtained by the obtaining unit 60, and calculates the widthwise ends of the web 2 from the force tension. The actuator control unit 62 controls the first actuator 132a and the second actuator 132b so that the tensions at both ends of the web 2 calculated in this way have desired tensions. The actuator control unit 62 controls each actuator in particular so that the measured value from the pressure detector of each actuator is substantially the same. In addition, the acquisition unit 60 may acquire the tension measurement values at both ends in the width direction of the web 2 from the tension detector 10. The actuator control unit 62 may control each actuator so that the tensions at both ends in the width direction of the web 2 are substantially the same based on the measurement value obtained by the obtaining unit 60. When the first actuator 132a receives an instruction from the actuator control unit 62, it moves the first tension-adjusting roller support 26a via the first shaft 24a. When the second actuator 132b receives an instruction from the actuator control section 62, it moves the second tension-adjusting roller support section 26b via the second shaft 24b. That is, each tension adjusting roller supporting portion is individually controlled and moved by each actuator. The tension adjusting roller 28 moves as each tension adjusting roller supporting portion moves, and causes the tension applied to the web 2 to change. According to the tension adjustment system of the third embodiment described above, the same effects as those of the tension adjustment system of the second embodiment can be obtained. Furthermore, according to the tension adjustment system of the third embodiment, the first shaft 24a and the first actuator 132a are connected by the first connecting portion 130a having a hinge shape. Similarly, the second shaft 24b and the second actuator 132b are connected by the second connecting portion 130b having a hinge shape. That is, each shaft and each actuator are connected by a connection part having rotational freedom. In addition, according to the tension adjustment system of the third embodiment, the roller movable portion 25 is supported by the static pressure gas bearing in a state where it does not contact the first shaft support portion 22a to the fourth shaft support portion 22d. Therefore, there is a gap between the roller movable portion 25 and the static pressure gas bearing of each shaft support portion, and the roller movable portion 25 can swing within the range of the gap. In particular, the roller movable portion 25 can swing around the Z direction. Furthermore, according to the tension adjustment system of the third embodiment, the tension adjustment unit 14 includes two actuators, and can individually control the movement of each tension adjustment roller of the roller movable portion 25. That is, according to the tension adjustment unit 14 of the third embodiment, the translation movement and the swing movement of the rotation shaft of the tension adjustment roller can be generated by the two actuators. As described with reference to FIG. 1, the roller movable portion 25 and the tension adjustment roller 28 are actively oscillated around the Z direction by two actuators so that the conveyance state approaches the target state, thereby suppressing the meandering. When the tension adjusting unit 14 of the third embodiment is used for meandering control, the conveyance state can also be detected using the measured value of the pressure obtained by the two actuators. In the above, the tension adjustment system of the embodiment has been described. This embodiment is merely an example, and there are various modifications to the combination of these constituent elements and each processing process, and such modifications also fall within the scope of the present invention and can be understood by those having ordinary knowledge in the technical field. of. Modifications will be explained below. (Modification 1) In the first and second embodiments, the case where the connecting portion has a hinge shape has been described, but it is not limited to this, and the connecting portion may have a structure having a degree of freedom in rotation. 14 is a plan view showing a tension adjusting unit of a tension adjusting system according to a modification of the first embodiment. Fig. 14 corresponds to Fig. 9. In this modification, one end side of the connecting portion 30 is connected to the movable rod 50 of the actuator 32. The other end side of the connecting portion 30 has a spherical shape, and is in contact with the connecting member 27. According to this modification, the same effect as that of the tension adjustment system of the first embodiment can be obtained. (Modification 2) In the first and second embodiments, the case where the roller movable portion is supported by the static pressure gas bearing so as to be movable in the X direction has been described, but it is not limited to this. The roller movable part can also be supported by rolling bearings or other bearings. (Modification 3) The case where the tension adjusting unit in the first embodiment includes one actuator and the tension adjusting unit in the second embodiment includes two actuators has been described, but it is not limited to this. The tension adjustment unit may be provided with more than three actuators. In addition, when a plurality of actuators are provided, it may be set such that the extension line of the resultant force of these actuators passes through the center of gravity G. Also, it may be provided such that the extension line of the resultant force of these actuators substantially matches the height of the shaft 24 that the guide roller movable portion and the tension adjusting roller 28 move in the X direction. Any combination of the above-described embodiment and modified examples is also effective as an embodiment of the present invention. The new embodiment combination formed by the combination has respective effects of the combined embodiment and modification.
