TWI675520B - Thin-disk laser device - Google Patents

Abstract

The invention discloses a thin-disk laser device, which includes: a first parabolic reflector And the second parabolic mirror, which face each other and are arranged coaxially; the first thin disc and the second thin disc are respectively provided with a laser medium and a reflecting surface, and are respectively arranged to the first parabolic mirror and the second parabolic mirror Apex and the first parabolic mirror and the second parabolic mirror form a multipath of the rising light; the first internal mirror and the second internal mirror are arranged to the space between the first parabolic mirror and the second parabolic mirror And reflecting the signal light; and a plurality of mirrors arranged on the light path of the signal light between the first internal mirror and the second internal mirror; and the first internal mirror, the second internal mirror, and the plurality of mirrors are arranged in the first The signal light is repeatedly reflected between the thin disc and the second thin disc to amplify the signal light.

Description

Thin-disk laser device

The present invention relates to a laser device, and more specifically, to a thin-disk laser device using a thin-disk-shaped laser medium.

The present invention relates to a high-output, high-output, ultra-micro / non-thermal processing product capable of effectively constituting microelectronic industrial products and parts such as semiconductors, displays, printed circuit boards (PCBs), and smart phones. High efficiency laser device for picosecond or femtosecond lasers / devices.

A thin-disk laser has a thin-thin (thin-disk) laser-active medium (amplifier medium) that can be sufficiently cooled. Therefore, the concept of a thin-disk laser with very high cooling efficiency is applicable to higher laser power in the range of several kilowatts. However, because the thickness of the amplifier medium is thin, one or less passes of the laser active medium pass hardly absorb the pump photocopy. Therefore, if the laser active medium is surged, it is not appropriate to provide Measures lead to low efficiency of the laser system. In order to achieve the minimum energy or minimum laser power required to satisfy the laser oscillation or amplification conditions in a laser active medium, a multi-path surge structure with a multi-pass absorption structure of pump photocopying is generally required.

The prior art 1 (EP1252687) is a common thin-disk laser technology, which uses two pairs of V-shaped chirped mirrors, a parabolic mirror, and a thin-disk laser medium, and performs dozens of times in order to achieve laser light surge. If the multi-axis surge of the laser is not accurately aligned with the optical axis of the two pairs of chirped mirrors, an error will occur in the overlap of the surge light, the surge efficiency will be reduced, and the magnification will be deteriorated. In addition, since one thin disk laser medium is used, the absorption rate is very low when the thin disk laser medium is reciprocated once, so it takes tens of reciprocating absorption processes. The greater the number of reciprocations, the more the number of laser beams that need to be accurately overlapped, and the higher the accuracy of the optical axis alignment requirements, so that the optical axis alignment errors, machining errors, and long-term reliability-related machinery The burden on optical stability errors and the like has increased significantly.

Furthermore, in order to overcome the problems of the prior art 1, a prior art 2 (US2013-0039378) is proposed. The prior art 2 has the following structure in order to overcome the shortcomings of the prior art 1 that require ultra-accurate optical axis alignment: by using two parabolic mirrors, a thin disk laser medium, and an adjustment mirror, the parabolic mirror is incident The advantage of the parallel light incident on the focal point of the parabolic mirror is maximized, thereby reducing the burden of the need for ultra-precise optical axis alignment; however, the use of a thin disk laser medium in a thin disk module requires Usually, the reciprocating absorption process is the same for dozens or more of 24 times or 48 times or more. Therefore, there is a problem that the efficiency is slightly lower when the amplification efficiency is increased in a single amplifier.

In addition, the prior art 3 (CN102684051A) is proposed to overcome the problems of the prior art 1. The prior art 3 has a structure in which parallel beams incident on the parabolic mirror can be incident by using two parabolic mirrors and two thin-disk laser media. The advantage of the light incident on the focal point of the parabolic mirror is maximized; however, the use of two parabolic mirrors as both a multipath mirror for a rising light and a resonator for a signal light increases the burden of super-accurate optical axis alignment The problem.

The present invention aims to solve the above problems, and aims to obtain the output of a laser resonator or a laser amplifier and make the arrangement of optical elements easier.

A thin disk laser device according to an embodiment of the present invention includes: a first parabolic mirror and a second parabolic mirror, which face each other and are arranged coaxially; the first thin disk and the second thin disk each include a laser The medium and the reflective surface located on the back of the laser medium are respectively arranged at the vertices of the first parabolic mirror and the second parabolic mirror to form a sharp rise together with the first parabolic mirror and the second parabolic mirror. Multipath of light; a first internal mirror and a second internal mirror arranged to reflect the signal light to a space between the first parabolic mirror and the second parabolic mirror; and a plurality of mirrors for connecting the first interior Disposed between the mirror and the second internal mirror on the optical path of the signal light; and the first internal mirror, the second internal mirror, and the plurality of mirrors are between the first thin disk and the second thin disk The signal light is repeatedly reflected to amplify the signal light.

In an embodiment, the first internal mirror can be configured in such a manner that signal light incident on the first thin disc from the first internal mirror is reflected toward the first internal mirror side, and the second internal mirror is configured from the first internal mirror. Two internal mirrors are incident on the second thin disk The signal light is configured to be reflected toward the second internal mirror side.

In an embodiment, the first internal mirror may be located on or near the normal to the front surface of the first thin disk, and the second internal mirror may be located on the normal to the front surface of the second thin disk or the normal. Nearby.

In one embodiment, the signal light is not reflected by the first parabolic mirror and the second parabolic mirror.

In one embodiment, the thin-disk laser device further includes a seed light source for supplying seed light, and the first thin disk and the second thin disk can amplify the seed light into signal light.

In one embodiment, the seed light emitted from the seed light source may be polarized laser light.

The thin disc laser device according to an embodiment may further include an optical path converter, and the optical path converter is arranged on the optical path of the signal light between the first thin disc and the second thin disc, and the signal is changed according to the control signal. The light path is output to the outside.

In one embodiment, the optical path converter may include: an electro-optic element that changes the polarization of the signal light according to the control signal; and a polarizing beam splitter that separates the signal light according to the polarization direction.

In an embodiment, the first beam and the second beam can be irradiated to the first thin disk and the second thin disk by the first internal mirror and the second internal mirror, respectively.

The thin disc laser device according to another embodiment of the present invention may include: a first parabolic mirror and a second parabolic mirror, which face each other and are arranged coaxially; the first thin disc and the second thin disc, each including Laser medium and the back of the laser medium The reflecting surface of the surface is arranged to the apex of the first parabolic mirror and the second parabolic mirror, and forms a multipath of the rising light together with the first parabolic mirror and the second parabolic mirror; a first internal mirror And a second internal mirror, which are disposed in a space between the first parabolic reflector and the second parabolic reflector and reflect the first signal light and the second signal light oscillated from the first thin disk and the second thin disk ; And a first signal light output coupler and a second signal light output coupler, respectively, reflecting part of the first signal light and the second signal light reflected from the first internal mirror and the second internal mirror to the first An internal mirror and the second internal mirror, and output another part.

A thin disc laser device according to another embodiment of the present invention includes: a first parabolic mirror and a second parabolic mirror, which face each other and are arranged coaxially; the first thin disc and the second thin disc each include a laser The radiation medium and the reflection surface located on the back of the laser medium are respectively arranged at the vertices of the first parabolic mirror and the second parabolic mirror, and form an excitation together with the first parabolic mirror and the second parabolic mirror. Multipath of ascending light; and a first internal mirror disposed to a space between the first parabolic mirror and the second parabolic mirror; and the first internal mirror may be disposed to a front surface of the first thin disk to The first signal light incident on the first thin disk from the first internal mirror is reflected toward the first internal mirror side.

The thin-disk laser device of an embodiment further includes a second internal mirror disposed to a space between the first parabolic mirror and the second parabolic mirror, and the second internal mirror may be disposed to the second thin disk. The front side, so that the second signal light incident on the second thin disc from the second inner mirror is reflected toward the second inner mirror side Shoot.

The thin-disk laser device of an embodiment may further include a plurality of mirrors, the plurality of mirrors transmitting the first signal light transmitted from the first internal mirror to the second internal mirror, and transmitting the light transmitted from the second internal mirror. The second signal light is emitted to the first internal mirror.

In one embodiment, the first signal light and the second signal light can be optically separated and separately amplified in the first thin disc and the second thin disc, respectively.

In one embodiment, the first signal light and the second signal light are not reflected by the first parabolic mirror and the second parabolic mirror.

The thin-disk laser device according to an embodiment further includes a second signal light total reflection mirror and a second signal light output coupler disposed outside the first parabolic mirror, and the first parabolic mirror includes a second signal light. The output coupler side path and the total reflection mirror side path, the second signal light reflected from the second signal light total reflection mirror is directed toward the second thin disc through the total reflection mirror side path, and is reflected from the second thin disc. The second signal light is directed toward the second signal light output coupler through the output coupler side path, and a part of the second signal light can be reflected from the second signal light output coupler to the second thin disk. The other part of the second signal light passes through the second signal light output coupler and becomes the output light output in the traveling direction, thereby forming a second signal light resonator, the second signal light total reflection mirror and the second signal light output coupler. Interchangeable and configurable.

The thin disc laser device of an embodiment may further include a plurality of mirrors, and the plurality of mirrors may be transmitted to the second thin disc through the output coupler side path from the first thin disc to be transmitted through the first internal mirror. Of the first signal light will be reflected from the second thin disc The second signal light transmitted through the output coupler side path is emitted to the first internal mirror again.

A thin-disk laser device according to another embodiment of the present invention may include: a first parabolic reflector; and a second parabolic reflector, which are arranged facing each other and coaxially with the first parabolic reflector, including the first signal light. The first output coupler side passage and the first total reflection mirror side passage; the first thin plate and the second thin plate, respectively, include a laser medium and a reflective surface located on a back surface of the laser medium, and are respectively disposed on the first parabolic surface. And the first parabolic mirror and the second parabolic mirror form a multi-path of the rising light; the first signal light output coupler is arranged to the second parabolic reflection The periphery of the mirror reflects a part of the signal light so that it directly faces the first thin disc through the first output coupler side path and outputs a part of the first signal light; and a first signal light total reflection mirror configured To the periphery of the second parabolic reflector, the signal light from the first thin disc is reflected to the first thin disc again.

The thin-disk laser device according to an embodiment further includes a second signal light output coupler and a second signal light total reflection mirror arranged to the periphery of the first parabolic mirror, and a second signal light is disposed on the first parabolic mirror. The second output-coupler-side path and the second total-mirror-side path, the first signal optical output coupler reflects a part of the second signal light so that it directly faces the above through the second output coupler-side signal optical path. The first thin disc, and the second signal light is output, and the signal light total reflection mirror reflects the second signal light from the first thin disc to the first thin disc through the second total mirror side path; .

In one embodiment, the first signal light and the second signal light are not reflected by the first parabolic mirror and the second parabolic mirror.

In one embodiment, the first thin disc and the second thin disc may be inclined with respect to the optical axes of the first parabolic mirror and the second parabolic mirror.

The thin-disk laser device of an embodiment may further include a first heat sink and a second heat sink respectively disposed on the back of the first thin disk and the second thin disk.

In one embodiment, the first parabolic mirror and the second parabolic mirror may be respectively provided with a first mounting hole and a second mounting hole for mounting the first thin disc and the second thin disc at the apex of the parabolic mirror.

The thin-disk laser device according to an embodiment may further include a first laser light source that emits first laser light that excites the laser medium, and is formed on the first parabolic reflector so that the first laser light is incident on the first laser light. A first laser light entrance in a space between a parabolic mirror and a second parabolic mirror.

The thin-disk laser device according to an embodiment may further include a second laser light source that emits the second laser light that excites the laser medium.

In one embodiment, the second parabolic mirror may be formed on the first parabolic mirror with the second parabolic mirror incident on the space between the first parabolic mirror and the second parabolic mirror.

The first laser-light entrance and the second laser-light entrance can be formed symmetrically on the left and right based on the vertex of the first parabolic mirror.

In one embodiment, the second parabolic mirror may be formed so that the second excitation light enters the first parabolic mirror and the second parabolic mirror. Space for the second rising light entrance.

In one embodiment, the second rising light may be incident on a space between the first parabolic mirror and the second parabolic mirror through the second rising light incident port.

The thin-disk laser device of an embodiment may further include a third laser source and a fourth laser source. The third laser source and the fourth laser source emit the third laser source and the third laser source that excite the laser medium. Four laser rises.

The thin-disk laser device according to an embodiment may further include: a rising-beam mode observation device that photographs the first laser formed on the front surfaces of the first and second thin disks. The rising point and the second exciting rising point.

The thin disk laser device of the above embodiment is provided with two thin disks in one thin disk module and is used together with two parabolic reflectors, so that only one thin disk module can be used to input the previously surged power. 2 times the total surge power, so you can also get 2 times the output of the thin disk laser or 2 times the output of the thin disk amplifier under the same maximum temperature operating conditions.

The thin disk laser device of the above embodiment is provided with two thin disks in one thin disk module and is used together with two parabolic reflectors, so that even if a thin disk module is inputted with the same total surge power as before, It is also possible to reduce the surge power input to each thin disk to the previous half, so the temperature operating conditions can be reduced to half to obtain a more stable thin disk laser operation or thin disk amplifier operation.

The thin disk laser device of the above embodiment is provided with two thin disk modules in one thin disk module. Two thin discs and two parabolic reflectors, and two reflectors that change the traveling direction of the laser signal light are arranged approximately in the middle between the two parabolic reflectors, thereby assembling the thin disc module into a laser, Self-Lasing can be performed smoothly.

The thin-disk laser device of the above embodiment includes two thin-disks and two parabolic reflectors in a thin-disk module. Two, which are located approximately in the middle of the two parabolic reflectors, change the travel direction of the laser signal light. Mirrors, which make it easier to arrange optical components when assembling thin-disk modules.

In the thin disk laser device of the above embodiment, a laser light mode observation device capable of real-time observation of the rising light point is set in the thin disk module, whereby each thin disk can be set to an observable position without mechanical interference for observation In the case where the spots of light surges are substantially completely overlapped dozens of times, the overlap can be adjusted substantially so that smooth and effective back-and-forth surge absorption can be achieved.

100, 200, 300, 400, 500, 600, 700, 800‧‧‧ thin disc laser devices

111, 112‧‧‧ thin

111a, 112a‧‧‧normal

115, 116‧‧‧ Radiator

121, 122, 321, 322, 421, 422, 521, 522, 621, 622, 721, 722, 821, 822 ...

123, 124‧‧‧ mounting holes

125, 525, 526, 625, 626, 725, 726, 727, 728, 825‧‧‧ laser light entrance

130‧‧‧ seed light source

140‧‧‧Signal Optical System

141, 144‧‧‧‧ Polarized Beamsplitters

142‧‧‧Faraday rotator

143‧‧‧Half Wave Plate

145‧‧‧1 / 4 wave plate

146‧‧‧Pox Box

150, 551, 552, 651, 652, 751, 752, 753, 754, 851, 852‧‧‧

161, 162‧‧‧Surge-beam mode observation device

241, 242, 341, 345‧‧‧ output couplers

323, 324, 326, 327, 423, 424‧‧‧ access

441、445‧‧‧Signal optical output coupler

442‧‧‧The first signal total reflector

444‧‧‧Second Signal Light Endoscope

L‧‧‧ Seed Light

L1, L2‧‧‧‧light

244, 246, 343, 346, 443, 446‧‧‧ signal light

M1, M2, M3, M4, M5, M6, M7, M8‧‧‧ mirror

243, 245, 342, 344‧‧‧ Total reflection mirror

OA‧‧‧Optical axis

P, P1, P2, P3, P4

S1, S2, S3, S4, S5, S6, S7, S8, S9, S11, S10, S12, S13‧‧‧ position

S1_1, S1_2, S1_3, S1_4, S1_5, S1_6, S1_7, S1_8, S1_9, S1_10, S1_11, S1_12, S1_13, S2_1, S2_2, S2_3, S2_7, S2_4, S2_5, S2_6, S2_2, S2_7, S2_7, S2_13‧‧‧Spotlight

θ1, θ2‧‧‧ angle

FIG. 1 is a schematic configuration diagram of a thin disk laser device according to an embodiment of the present invention.

FIG. 2 shows a ray path of the excitation light of the thin-disk laser device of FIG. 1. FIG.

FIGS. 3 a and 3 b show the formation of the thin-disk laser device of FIG. 1 to the first parabolic mirror and the second parabolic mirror's rising light point and the path of the rising light.

4a to 4c illustrate the incidence, amplification, and output of the seed light source of the thin-disk laser device of FIG. 1, respectively.

5 is a schematic configuration diagram of a thin-disk laser device according to another embodiment of the present invention.

FIG. 6 is a schematic configuration diagram of a thin-disk laser device according to still another embodiment of the present invention.

FIG. 7 is a schematic configuration diagram of a thin disk laser device according to still another embodiment of the present invention.

FIG. 8 is a schematic configuration diagram of a thin-disk laser device according to still another embodiment of the present invention.

9a and 9b show the formation of the thin-disk laser device of FIG. 8 to the first parabolic mirror and the second parabolic mirror's excitation light point and the path of the excitation light.

FIG. 10 is a schematic configuration diagram of a thin-disk laser device according to still another embodiment of the present invention.

11 is a schematic configuration diagram of a thin disk laser device according to still another embodiment of the present invention.

FIG. 12 is a schematic configuration diagram of a thin-disk laser device according to still another embodiment of the present invention.

The advantages and features of the present invention and the method for achieving the above advantages and features will be made clear with reference to the embodiments described later together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, and can be implemented in various forms. These embodiments are only for making the disclosure of the present invention more complete, and for those with common knowledge in the technical field to which the present invention belongs. It is provided by understanding the scope of the invention that the invention is defined solely by the scope of the patent application. Throughout the description, the same reference numerals denote the same constituent elements. For clarity of the description, the dimensions or thicknesses of the constituent elements may be exaggerated in the drawings.

The terms used in this specification will be briefly described, and the present invention will be specifically described.

The terms used in the present invention are generally used terms that are widely used as far as possible in consideration of the functions in the present invention, but the above terms may be used in accordance with the practice of the present invention. The intentions or jurisprudence of those skilled in the technical field, the emergence of new technologies, etc. are changed. Also, in certain cases, there is a term arbitrarily selected by the applicant. In this case, the meaning is described in detail in the corresponding description section of the invention. Therefore, the terms used in the present invention should be defined based on the meanings of the terms and the entire content of the present invention, and not simply based on the names of the terms.

Throughout this specification, when it is stated that a certain part “includes” a certain constituent element, if there is no particularly contrary description, it means that it further includes other constituent elements, rather than excluding other constituent elements.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art to which the present invention pertains can easily implement them. However, the present invention can be implemented in many different forms, and is not limited to the embodiments described herein. In addition, in order to clearly explain the present invention, parts irrelevant to the description are omitted in the drawings.

FIG. 1 is a schematic configuration diagram of a thin disk laser device 100 according to an embodiment of the present invention.

Referring to FIG. 1, the thin-disk laser device 100 of this embodiment includes a first thin-disk 111, a second thin-disk 112, a first parabolic mirror 121, a second parabolic mirror 122, a seed light source 130, and a signal light optical system 140. And the sharp light source 150.

The paraboloid-shaped reflecting surfaces of the first parabolic mirror 121 and the second parabolic mirror 122 face each other and are arranged coaxially. The first parabolic mirror 121 and the second parabolic mirror 122 may have a parabolic shape with the same curvature, but are not limited thereto. The first parabolic mirror 121 and the second parabolic mirror 122 are The configuration is as follows: the vertex of the first parabolic mirror 121 is the focal point of the second parabolic mirror 122, and the vertex of the second parabolic mirror 122 is the focal point of the first parabolic mirror 121. Parabolic mirror adjustment devices (not shown) may be provided on the first parabolic mirror 121 and the second parabolic mirror 122, respectively, so that a fine optical axis arrangement can be realized. For example, the parabolic mirror adjustment device can independently adjust the inclination of the horizontal axis direction and the vertical axis direction of the first parabolic mirror 121 and the second parabolic mirror 122, respectively.

The peripheral shapes of the end surfaces of the reflective surfaces of the first parabolic mirror 121 and the second parabolic mirror 122 may be circular, but are not limited thereto. A first mounting hole 123 and a second mounting hole 124 pass through the vertices of the first parabolic mirror 121 and the second parabolic mirror 122, respectively. In addition, a laser light entrance 125 is formed on one side of the first parabolic mirror 121 so that the laser light P can be incident from the outside of the first parabolic mirror 121. The shape of the laser light entrance 125 may be a rectangular opening as shown in FIG. 2, but it is not limited thereto. For example, the shape of the laser light entrance 125 may be various opening shapes such as a circle and a polygon.

The first thin disc 111 and the second thin disc 112 include a laser medium. The laser medium may be, for example, a disc shape having a thickness of submillimeter and very thin, and having a diameter of several millimeters to several tens of millimeters. The disc can be in the shape of a circle, a quadrangle, or a polygon. The first thin plate 111 and the second thin plate 112 include a front surface and a back surface with a relatively wide area, and a side surface with a relatively small area. As described below, the laser and signal light are incident on the front of the laser medium. An anti-reflection layer for both the laser light and the signal light may be provided on the front side of the laser medium. The laser medium excites the ions in the medium by the rising light And amplify the role of the signal light. In order to suppress amplified spontaneous emission (ASE: Amplified Spontaneous Emission), the front side of the laser medium may also be formed slightly inclined with respect to the back side. A total reflection layer for both signal light and laser light is formed on the back surface of the laser medium. A first heat sink 115 and a second heat sink 116 are disposed on the back of the first thin plate 111 and the second thin plate 112, respectively. A thermally conductive adhesive layer (Thermally-Conductive Adhesive) is provided between the back surfaces of the first thin plate 111 and the second thin plate 112 and the cooling surfaces of the first heat sink 115 and the second heat sink 116, thereby improving the thermal conductivity and Then force. As another example, the first thin plate 111 and the second thin plate 112 and the first heat sink 115 and the second heat sink 116 may be combined by using a pressure difference or a mechanical device without an adhesive layer. The first radiator 115 and the second radiator 116 can remove heat generated by the first thin plate 111 and the second thin plate 112 in a fluid cooling method using a refrigerant, for example. The refrigerant may be, for example, water, but is not limited thereto.

The first thin plate 111 and the second thin plate 112 are respectively disposed to the first mounting hole 123 and the second mounting hole 124 provided on the first parabolic mirror 121 and the second parabolic mirror 122. The first thin disc 111 and the second thin disc 112 can be arranged such that the front centers thereof are located at the apexes of the first parabolic mirror 121 and the second parabolic mirror 122, respectively. The front surfaces of the first thin disc 111 and the second thin disc 112 are inclined based on an optical plane. Here, the light plane refers to a plane placed along the optical axis OA of the first parabolic mirror 121 and the second parabolic mirror 122 and the incident light of the rising light P. In other words, the normal line 111a on the front surface of the first thin disk 111 and the normal line 112a on the front surface of the second thin disk 112 and the optical axis OA of the first parabolic mirror 121 and the second parabolic mirror 122 are greater than zero. The specific angles θ1 and θ2 are opened. First The inclination angles θ1 and θ2 of one thin disc 111 and the second thin disc 112 may be the same, but are not limited thereto. The first thin disc 111 and the second thin disc 112 may be inclined in the same direction or in opposite directions, but are not limited thereto. The inclination angles θ1, θ2, and inclination directions of the first thin disc 111 and the second thin disc 112 as described above are designed so as to realize the multi-path of the raised light as described below. Thin disk adjusting devices (not shown) may be respectively provided on the first thin disk 111 and the second thin disk 112 so as to achieve a fine optical axis arrangement and the like. For example, the thin disc adjusting device can independently adjust the inclination of the horizontal axis direction and the vertical axis direction of the first thin disc 111 and the second thin disc 112 respectively.

The seed light source 130 may be, for example, a semiconductor laser diode, or a laser source including a picosecond or femtosecond mode-locked fiber seed laser or a nanosecond Q-Switched solid laser, but is not limited to this. As an example, the seed light source 130 can emit horizontally polarized seed light L.

The signal light optical system 140 may include a first polarized beam splitter 141, a Faraday rotator 142, a half-wavelength plate 143, and a second polarized beam splitter 144, quarter-wavelength plate 145, Pockels' cell 146, and first to eighth mirrors M1, M2, M3, M4, M5, M6, M7, M8.

The first polarizing beam splitter 141 passes horizontally polarized light and reflects vertically polarized light.

Faraday rotator 142 uses the Faraday effect to polarize incident horizontally polarized light The polarization of the light undergoes a 45-degree phase change and is converted into 45-degree rotationally polarized light. The 45-degree rotationally polarized light that is returned from the Faraday rotator 142 and returned and then re-incidentally undergoes a 45-degree phase change to convert to vertically polarized light Light.

The half-wavelength plate 143 is a wavelength plate that makes a half-wavelength difference in the polarization direction of the light traveling in the slow axis with respect to the fast axis. The half-wavelength plate 143 converts 45-degree rotating polarized light into horizontally polarized light and horizontally polarized light The light is converted into 45-degree rotating polarized light.

The second polarizing beam splitter 144 can separate the horizontally polarized light and the vertically polarized light toward the transmission direction or the reflection direction and separate them into two rotating polarized light components perpendicular to each other. The second polarized beam splitter 144 can pass the horizontally polarized light and direct the vertically polarized light toward the reflection direction.

The quarter-wave plate 145 is a polarizing plate that produces a quarter-wavelength difference in polarized light traveling along the slow axis with respect to the fast axis. It can convert horizontally polarized light into right circularly polarized light and convert left circularly polarized light. Into vertically polarized light.

The Pox box 146 is an element that actively performs polarization conversion by applying a voltage to a crystal having the Pockels' effect. For example, the Pox box 146 can pass light without polarized light conversion when no voltage is applied, and operates as a quarter-wave plate under a voltage applied condition to convert left circularly polarized light into horizontally polarized light. Converts horizontally polarized light into left circularly polarized light.

The first polarizing beam splitter 141, the Faraday rotator 142, the half-wavelength plate 143, the second polarizing beam splitter 144, the 1 / 4-wavelength plate 145, and the box box 146 are examples of the following optical path converters, of course. Other well-known optical configurations may be used: as described below, by the voltage (ie, the control signal) applied to the Pox box 146 The phase difference between the horizontally polarized and vertical polarized components of the incident polarized light is generated, and the polarized light is changed to be reflected or transmitted by the first polarized beam splitter 141 and the second polarized beam splitter 144, thereby separating the signal light from the path of resonance. And the output.

The first to eighth mirrors M1, M2, M3, M4, M5, M6, M7, and M8 are arranged such that the seed beam is incident on the first thin disc 111 and the second thin disc 112, and the seed beam is amplified. The post-resonance is configured as a light path of signal light and output. At least two of the first to eighth mirrors M1, M2, M3, M4, M5, M6, M7, and M8, that is, the fourth mirror (first internal mirror) M4 and the eighth mirror (second internal mirror) M8 is arranged to the space between the first parabolic mirror 121 and the second parabolic mirror 122, for example, near the middle. The fourth mirror (first internal mirror) M4 is arranged such that signal light incident on the first thin disc 111 from the fourth mirror (first internal mirror) M4 is reflected toward the fourth mirror (first internal mirror) M4 side. The eighth mirror (second internal mirror) M8 is arranged so that the signal light incident on the second thin disc 112 from the eighth mirror (second internal mirror) M8 is reflected toward the eighth mirror (second internal mirror) M8 side. . More specifically, the fourth mirror (first internal mirror) M4 can be arranged at an angle of 45 degrees to the normal 111a of the front of the first thin disc 111 or near the normal 111a, and the eighth mirror (second internal Mirror) M8 is arranged at an angle of 45 degrees to the normal line 112a on the front surface of the second thin disc 112 or near the normal line 112a. This embodiment is described by taking the case where the inclination angle of the fourth mirror (first internal mirror) M4 and the eighth mirror (second internal mirror) M8 is 45 degrees as an example, but it is not limited thereto. The first to eighth mirrors M1, M2, M3, M4, M5, M6, M7, and M8 may be flat mirrors. Depending on the situation, some of the first to eighth mirrors M1, M2, M3, M4, M5, M6, M7, and M8 can also be focusing lenses. mirror).

The excitation light source 150 emits the excitation light P that excites the first thin disk 111 and the second thin disk 112. The rising light source 150 is arranged so that the rising light P enters a space between the first parabolic mirror 121 and the second parabolic mirror 122 through the rising light entrance 125 of the first parabolic mirror 121. Furthermore, the pumping light source 150 can be arranged such that the pumping light P is incident parallel to the optical axis OA through the pumping light entrance port 125, but is not limited thereto. A pumping light adjusting device (not shown) may be provided in the pumping light source 150 so that a fine optical axis arrangement and the like can be realized.

The thin-disk laser device 100 of this embodiment may further include a first laser beam mode observation device 161 and a second laser beam mode observation device 162. The first rising-beam mode observation device 161 and the second rising-beam mode observation device 162 may be, for example, photographing devices (ie, cameras) that can obtain images in real time, and are respectively set to positions without mechanical interference involving optical interference to capture the first The front side of a thin plate 111 and a second thin plate 112. The ascending light P emitted from the self-excitation light source 150 is repeatedly incident and reflected dozens of times on the first and second thin discs 111 and 112 to form an ascending light spot on the front surface of the first and second thin discs 111 and 112. The first rising beam mode observation device 161 and the second rising beam mode observation device 162 can observe the surfaces of the first thin disk 111 and the second thin disk 112 including the rising light point in real time through a display. As described above, by using the first laser beam mode observation device 161 and the second laser beam mode observation device 162 to observe the laser beam points in real time, the laser beam points can be adjusted in such a manner that they substantially overlap with each other. Therefore, smooth and effective multi-path reciprocating surge absorption can be achieved.

The thin disc laser device 100 of this embodiment may further include a signal for measuring output Laser output monitoring device for the intensity of light. In the case of an optical power meter or a pulsed laser disposed to the output side of the first polarizing beam splitter 141, such a laser output monitoring device may be a photo detector (such as a photodiode).

In the thin disc laser device 100 of this embodiment, the first thin disc 111, the second thin disc 112, the first parabolic mirror 121, the second parabolic mirror 122, and a part of the optical components of the signal optical system 140 (for example, The fourth mirror (first internal mirror) M8 and the eighth mirror (second internal mirror) M8) can be configured as a thin disk module that can be independently set to the laser processing device. Furthermore, the seed light source 130, the remaining optical parts of the signal light optical system 140, and the rising light source 150 can be mounted to a thin-disk module and used together as a plug-in module.

Next, the multi-path surge operation of the thin-disk laser device 100 according to the present embodiment will be described with reference to FIGS. 2, 3 a, and 3 b.

FIG. 2 shows the ray path of the rising light of the thin-disk laser device 100 in this embodiment, and FIGS. 3a and 3b show the formation of the thin-disk laser device 100 in this embodiment to the first parabolic mirror 121 and the second The rising light point of the parabolic mirror 122 and the light path of the rising light.

The laser light P emitted from the laser light source 150 is incident on the space between the first parabolic mirror 121 and the second parabolic mirror 122 through the laser light entrance 125 of the first parabolic mirror 121. As shown in FIG. 3a and FIG. 3b, the laser light P incident through the laser light entrance 125 is located in the fourth quadrant of the second parabolic mirror 122 (to observe the reflection surface of the second parabolic mirror 122 as The first position S1 at the uppermost end of the reference) forms a rising light spot. The rising light P is parallel to the optical axis OA. The incident light P is reflected at the first position S1 of the second parabolic mirror 122 and is incident on the first thin disc 111 at the apex of the first parabolic mirror 121. After being incident on the first thin disc 111, the rising light P reflects and forms a rising light spot at a second position S2 located slightly above the lowermost end of the second quadrant of the second parabolic mirror 122. The first thin disc 111 is slightly inclined, so the second position S2 is not symmetrical with the first position S1 based on the apex of the second parabolic mirror 122, and has a slight deviation in the vertical direction. Therefore, although it is left-right symmetrical, it is in the vertical direction. It rises slightly, and the rising distance is proportional to the inclination angle of the first thin plate 111. The vertex of the second parabolic mirror 122 is the focal point of the first parabolic mirror 121. Therefore, after the incident light P enters the second position S2 of the second parabolic mirror 122, it is parallel to the optical axis OA at the second position S2. Way reflection. The second position S2 at the second parabolic mirror 122 is parallel to the optical axis and the incident light P is incident in parallel with the optical axis OA into the first quadrant of the first parabolic mirror 121 (to observe the second The third end S3, which is slightly above the lowermost end of the parabolic mirror 122, is reflected toward the second thin plate 112 at the vertex of the second parabolic mirror 122. At this time, the second quadrant of the second parabolic mirror 122 faces the first quadrant of the first parabolic mirror 121. The rising light P emitted from the focal point of the first thin disc 111 is caused by the reflection of the second thin disc 112 to form a sharp rise at a fourth position S4 located slightly below the uppermost end of the third quadrant of the first parabolic mirror 121. light spot. The second thin disc 112 is slightly inclined, so the fourth position S4 is not symmetrical with the third position S3 based on the apex of the first parabolic mirror 121 and has a slight deviation in the vertical direction. The vertex of the second parabolic mirror 122 is the focal point of the first parabolic mirror 121, so it is incident on the first parabolic The boosted light P at the fourth position S4 of the mirror 121 is light emitted from the focal point, and is thus reflected in parallel to the optical axis OA. The iterative realization of the ascending light P as described above is repeated to form a multi-path like the first position S1, the second position S2, ..., and the thirteenth position S13, and the ascending light P repeatedly excites the first thin disc 111. And laser medium ions in the second thin plate 112. The number of repetitions of the boosted light P in FIG. 3a and FIG. 3b is an example. For example, the repetition of reflection can be achieved 24 times, 48 times, etc. to achieve multipath surge.

Next, referring to FIGS. 4 a to 4 c, the incidence, amplification, and output of the seed light (signal light) of the thin-disk laser device 100 of this embodiment will be described.

FIG. 4a illustrates a process in which the seed light L is incident on the signal light optical system 140, and at this time, the state of the box box 146 is not applied with voltage.

Referring to FIG. 4A, the horizontally polarized seed light L emitted from the seed light source 130 is reflected by the first mirror M1 and is incident on the signal light optical system 140. The horizontally polarized seed light L directly passes through the first polarized beam splitter 141. The polarized light of the horizontally-polarized seed light L passing through the first polarized beam splitter 141 is the light of the rotated polarized light rotated 45 degrees in the Faraday rotator 142, and is converted into the horizontally-polarized seed light L again through the half-wavelength plate 143. At this time, the Faraday rotator 142 is a device that rotates the rotating polarized light based on the magneto-optic effect into other rotating polarized light, and the Faraday medium length d and the magnetic flux density B of the rotation size and the traveling direction of the light beam It is directly proportional to the Verdet constant, which is a characteristic of the medium. (At this time, when the Faraday rotator 142 uses a permanent magnet, the magnetic field formed by the permanent magnet has directivity in the absolute coordinate system, so it is rotationally polarized. Absolute directivity when rotating. If used in Faraday rotator 142 The polarization direction of the light beam incident at the radiation position is rotated 45 degrees clockwise, and then the polarization direction of the light beam incident again at the emission position is rotated 45 degrees counterclockwise. The horizontally polarized seed light L that has passed through the half-wavelength plate 143 passes directly through the second polarizing beam splitter 144 in a horizontally polarized state, and is incident on the quarter-wavelength plate 145. The horizontally polarized seed light L is converted into right-circularly polarized seed light L by the 1/4 wavelength plate 145, and then incident on the Pox box 146 (unlike the Faraday rotator 142, the 1/4 wavelength plate 145 does not maintain an absolute direction This device has symmetry in the absolute coordinate system. Therefore, if the polarization direction of the light beam incident on the incident position is rotated clockwise by 45 degrees, the polarization direction of the light beam incident on the exit position is also asymmetric. Rotate 45 degrees clockwise). Since the voltage is applied to the Bokeh box 146, the right circularly polarized seed light L does not pass through the polarization conversion in the Bokeh box 146. The seed light L that has passed through the Box box 146 is incident perpendicularly to the first thin disc 111 through the second mirror M2, the third mirror M3, and the fourth mirror M4. The seed light L incident on the first thin disk 111 is reflected in an enlarged state in the first thin disk 111 excited by the excitation light P. The right circularly polarized seed light L is reflected by the first thin plate 111 and a 180-degree phase difference is generated between the two vertically polarized components, so it is converted into left circularly polarized light L1. For convenience, the reference number L1 indicates light reflected on the first thin disc 111 and traveling in a clockwise direction in the loop. The left circularly polarized light L1 is returned in the order of the fourth mirror M4, the third mirror M3, and the second mirror M2 again, and is converted into vertical polarized light by the quarter wave plate 145 through the Pox box 146 without polarization conversion. The vertically polarized light L1 is reflected by the second polarizing beam splitter 144 and enters the second thin disk 112 vertically through the fifth mirror M5, the sixth mirror M6, the seventh mirror M7, and the eighth mirror M8. Incident on the second thin plate 112 The light L1 is reflected in an enlarged state in the second thin disk 112 excited by the excitation light P. The vertically polarized light L2 is reflected by the second thin disc 112 to maintain a polarized state. For convenience, the reference number L2 indicates light reflected on the second thin plate 112 and traveling in a counterclockwise direction in the loop. The vertically polarized light L2 returns again in the order of the eighth mirror M8, the seventh mirror M7, the sixth mirror M6, and the fifth mirror M5, and is reflected by the second polarizing beam splitter 144 toward the first thin disk 111 side.

FIG. 4b illustrates a process in which a regenerative amplifier (Regenerative Amplifier) is formed in the first thin disk 111 and the second thin disk 112 to amplify the seed light L. At this time, the state of the voltage is applied to the box box 146. The regenerative amplifier is a device that, when the pulsed beam travels, additionally constitutes a resonator with a closed structure, so that the polarized pulsed beam that is oscillated and output in the first resonator can obtain resonance amplification of a desired number of times, and amplify it to Up to the desired pulse energy. In terms of using another resonator to amplify the laser pulse generated by the first laser, it is called a regenerative amplifier because the laser pulse is re-amplified. The voltage applied to the box box uses a magnitude of a phase change of 1/4 wavelength of the two polarized light components, and the phase change degree is changed according to the magnitude of the voltage applied to the crystal used in the box box. The linear electro-optic effect is the Polkes effect, the degree of phase change and the amplitude of the electric field (electric field amplitude) and the refractive index of ordinary beam (refractive index of ordinary beam). The power is directly proportional to the product of the electro-optic constant, which is an inherent characteristic of the non-linear crystal used in the Box box. At this time, the applied electric field is directional in the absolute coordinate system, so it has polarized light similar to the Faraday rotator. Rotational characteristics, but the difference is that when a 1/4 wavelength rotational voltage is applied, the rotationally polarized light becomes circularly polarized light.

First, the process of causing a pulsed beam to enter the regenerative amplifier will be described using FIG. 4b. Referring to FIG. 4b, as described above, the vertically polarized light L2 reflected on the second thin disc 112 passes through the eighth mirror M8, the seventh mirror M7, the sixth mirror M6, and the fifth mirror M5 and passes through the second polarizing beam splitter 144. Reflected and converted into left circularly polarized light L2 through the 1/4 wavelength plate 145 (if horizontal polarized light is incident on the 1/4 wavelength plate, it is converted into right circularly polarized light, and if vertical polarized light is incident on the 1/4 wavelength plate, it is converted Into left circular polarized light). The left circularly polarized light L2 that has passed through the 1/4 wavelength plate 145 is incident on the Box box 146. The voltage of the Box box 146 is applied, so the left circularly polarized light L2 is further rotated by about 1/4 wavelength in the Box box 146, so that the polarized light is converted into horizontally polarized light and passed through. The horizontally polarized light L2 that has passed through the box 146 passes through the second mirror M2, the third mirror M3, and the fourth mirror M4 to be incident on the first thin disk 111 vertically, and is reflected in an enlarged state. The horizontally polarized light L1 is reflected by the first thin disc 111 to maintain the polarization direction, returns again in the order of the fourth mirror M4, the third mirror M3, and the second mirror M2, and enters the Pox box 146 again. The horizontally polarized light L1 is converted into left circularly polarized light L1 by a voltage applied to the Box box 146, and is converted into vertical polarized light in the 1/4 wavelength plate 145. The vertically polarized light L1 is reflected by the second polarizing beam splitter 144 and enters the second thin disk 112 vertically through the fifth mirror M5, the sixth mirror M6, the seventh mirror M7, and the eighth mirror M8, and is magnified. reflection. The vertically polarized light L2 is reflected by the second thin disc 112 to maintain a polarized state. The vertically polarized light L2 returns in the order of the eighth mirror M8, the seventh mirror M7, the sixth mirror M6, and the fifth mirror M5 again, and is transmitted to the second polarizing beam splitter. 144 reflects and faces the first thin plate 111 side. As described above, when a voltage is applied to the box 146, the seed light L incident on the signal light optical system 140 is closed by a closed loop and the light path is closed, so that resonance and oscillation are caused. The change of polarized light is as follows: (a) horizontally polarized light → 1/4 wavelength plate 145 → right circularly polarized light; (b) right circularly polarized light → mirror reflection (first thin plate 111 reflection) → left circularly polarized light; (c) left circular Polarized light → 1/4 wave plate 145 → Vertically polarized light. (D) Vertical polarized light → 1/4 wave plate 145 → Left circularly polarized light. (E) Left circularly polarized light → Pox box 146 → Horizontally polarized light. (F) Horizontally polarized light. → Mirror reflection (reflection of the second thin plate 112) → Horizontal polarized light. (G) Horizontal polarized light → Box box 146 → Left circular polarized light. (H) Left circular polarized light → 1/4 wavelength plate 145 → Vertical polarized light.

FIG. 4c illustrates the process of outputting the amplified light, that is, the signal light, in the first thin disc 111 and the second thin disc 112. If the intensity of the signal light in the step of enlarging the signal light described with reference to FIG. 4b satisfies a specific size or a certain time has elapsed, the signal light returned after being amplified and reflected in the second thin disc 112 is about to be incident on the box. Previously, the application of voltage to the Bokeh box 146 was blocked.

4c, as described above, the vertically polarized light L2 reflected on the second thin disc 112 passes through the eighth mirror M8, the seventh mirror M7, the sixth mirror M6, and the fifth mirror M5 and passes through the second polarizing beam splitter 144. The reflected light is converted into left circularly polarized light L2 through the 1/4 wavelength plate 145. The left circularly polarized light L2 that has passed through the 1/4 wavelength plate 145 is incident on the Box box 146. Since the voltage of the Box box 146 is not applied, the left-circularly polarized light L2 passes directly without being subjected to polarization conversion in the Box box 146. The left circularly polarized light L2 passing through the Box box 146 passes through the second mirror M2, the third mirror M3, and the fourth mirror M4. On the other hand, it is incident on the first thin disc 111 perpendicularly and is reflected in an enlarged state. The left circularly polarized light L2 is reflected by the first thin disc 111 and converted into the right circularly polarized light L1, and returns again in the order of the fourth mirror M4, the third mirror M3, and the second mirror M2. It enters the 1/4 wavelength plate 145. The right circularly polarized light L1 is converted into horizontally polarized light in the 1/4 wavelength plate 145. The horizontally polarized light L1 directly passes through the second polarizing beam splitter 144 and is directed toward the half-wavelength plate 143. The horizontally polarized light L1 is converted into vertically polarized light L1 through the half-wavelength plate 143 and the Faraday rotator 142, and is reflected by the first polarized beam splitter 141 and output.

The thin-disk laser device 100 of this embodiment operating as described above can be understood as an example of the aforementioned Regenerative Amplifiers.

In the case of using two parabolic mirrors (ie, the first parabolic mirror 121 and the second parabolic mirror 122) as in this embodiment, the first parabolic mirror 121 is reflected even if it repeatedly reflects the rising light P dozens of times. And the arrangement of the optical axis of the second parabolic mirror 122 or the arrangement of the optical axes of the first thin plate 111 and the second thin plate 112 also need to accurately make the light spot formed to the first thin plate 111 and the second thin plate 112 accurate Consistent. The power amplification can be effectively achieved only if the above-mentioned raised light spots are accurately consistent. The beam mode does not deteriorate and can clearly constitute the desired single-mode or multi-mode Gaussian beam. The heat of the thin-disk laser medium The distribution becomes uniform to prevent damage and the like. Therefore, the thin-disk laser device 100 of this embodiment can be used to align the optical axes of the first thin disk 111 and the second thin disk 112 by irradiating the alignment beam with the fourth mirror M4 and the eighth mirror M8.

In the thin-disk laser device 100 of this embodiment, a multi-path optical system (a first thin disk 111 and a second thin disk 112, and a first paraboloid) capable of optically separating the rising light Mirror 121 and second parabolic mirror 122), the optical optical system (the first thin disc 111 and the second thin disc 112), and the first to eighth mirrors M1, M2, M3, M4, M5, M6, M7, and M8) can be adjusted independently, so the freedom of arrangement of optical components can be further ensured.

This embodiment is described by taking the case where the first thin disk 111 and the second thin disk 112 amplify the common signal light as an example, but of course, the optical signal can be separately provided for the first signal light amplified by the first thin disk 111. An amplifying optical system and an amplifying optical system separately for the second signal light amplified by the second thin disk 112.

FIG. 5 is a schematic configuration diagram of a thin disk laser device 200 according to another embodiment of the present invention. In the thin-disk laser device 200 of this embodiment, the constituent elements related to the laser beam are substantially the same as those of the embodiment described with reference to FIG. 1, and therefore, the differences will be mainly described.

Referring to FIG. 5, the thin-disk laser device 200 of this embodiment includes a first thin disk 111 and a second thin disk 112, a first parabolic mirror 121 and a second parabolic mirror 122, a first signal light output coupler 241, and The second signal optical output coupler 242. The first signal light output coupler 241 and the second signal light output coupler 242 are located at the periphery of a space formed between the first parabolic mirror 121 and the second parabolic mirror 122.

The first signal optical output coupler 241 forms a first signal optical resonator of the first signal light 246 together with the first thin disc 111 and the first internal mirror 243. The first internal mirror 243 is located at or near the normal to the front surface of the first thin disc 111 and is arranged at an angle of 45 degrees. If the first thin disc 111 is excited as in the above embodiment, the first signal light 246 It oscillates on the first thin disc 111. The first signal light 246 resonates between the first thin disc 111 and the first signal light output coupler 241. The first signal light output coupler 241 may have a reflectance of 95%, for example. The first signal light 246 is amplified by resonance in the first signal light output coupler 241 and the first thin disc 111, and a part of the first signal light 246 is output through the first signal light output coupler 241.

The second signal light output coupler 242 forms a resonator structure of the second signal light 247 together with the second thin plate 112 and the second internal mirror 245. The second internal mirror 245 is located at or near the normal to the front surface of the second thin disc 112 and is arranged at an angle of 45 degrees. If the second thin disc 112 is excited, the second signal light 247 self-oscillates on the second thin disc 112. The second signal light 247 resonates between the second thin disc 112 and the second signal light output coupler 242. The second signal light output coupler 242 may have a reflectance of 95%, for example. The second signal light 247 is amplified by resonance in the second signal light output coupler 242 and the second thin disc 112, and a part of the second signal light 247 is output through the second signal light output coupler 242.

The thin-disk laser device 200 of this embodiment is provided with a first signal light resonance structure and a second signal light resonance structure independently, and therefore can independently output and control the first signal light 246 and the second signal light 247.

The thin-disk laser device 200 of this embodiment has separate resonator structures for the first signal light 246 and the second signal light 247, but it is not limited thereto. As another example, a resonator optical system of a signal light may be formed by optically connecting the first signal light 246 and the second signal light 247. Another example described above can be understood by a practitioner. For example, a plurality of mirrors may be provided so that the transmission from the first thin disc 111 via the first internal mirror 243 The first signal light 346 is emitted to the second thin disc 112 through the second internal mirror 245, and the second signal light 244 transmitted from the second thin disc 112 through the second internal mirror 245 is emitted to the first through the first internal mirror 243 Thin dish 111.

The thin disc laser device 200 of this embodiment has a resonator structure, but it is not limited to this. As another example, separate amplifier optical systems may be configured for the first signal light 246 and the second signal light 247 instead of the first signal light output coupler 241 and the second signal light output coupler 242, respectively. As yet another example, a signal optical amplifier optical system may be configured for optically connecting the first signal light 246 and the second signal light 244.

FIG. 6 is a schematic configuration diagram of a thin-disk laser device according to still another embodiment of the present invention. In the thin-disk laser device 300 of this embodiment, the constituent elements related to the laser beam are substantially the same as those of the embodiment described with reference to FIGS. 1 to 5, and therefore, the differences will be mainly described.

Referring to FIG. 6, the thin-disk laser device 300 of this embodiment includes a first thin-disk 111 and a second thin-disk 112, a first parabolic mirror 321 and a second parabolic mirror 322, a first signal light output coupler 341, and The second signal light output coupler 345, the first signal light total reflection mirror 342, and the second signal light total reflection mirror 344.

A first output-coupler-side passage 323 and a first total-mirror-side passage 324 are provided in the second parabolic mirror 322 for the first signal light 343 to pass through. The first signal light output coupler 341 is disposed outside the second parabolic mirror 322 to reflect or transmit the first signal light 343 passing through the first output coupler side path 323. The above structure is symmetrical, so the first signal optical output coupler 341 and the first output coupler The combiner-side path 323 and the first signal light output coupler 341 can also be symmetrically transformed with each other to follow the first signal light output coupler 341, the first total mirror side path 324, and the first signal light output coupler 341. Used sequentially. The first signal light total reflection mirror 342 is disposed outside the second parabolic mirror 322 to reflect the first signal light 343 passing through the first total mirror side passage 324. The first signal light output coupler 341, the first thin disc 111, and the first signal light total reflection mirror 342 form a first signal light resonator of the first signal light 343. The first signal light 343 incident through the first signal light output coupler 341 is incident on the first thin disc 111 through the first output coupler side passage 323 of the second parabolic mirror 322. The first signal light 343 can be amplified and reflected on the first thin disc 111 and passes through the first total mirror side path 324 of the second parabolic mirror 322 toward the first signal light total mirror 342, and then reflects again along the same path Resonance after returning. The first signal light output coupler 341 may have a reflectance of 95%, for example. The first signal light 343 is resonated and amplified in the first signal light resonator, and is output through the first signal light output coupler 341.

A second output-coupler-side passage 327 and a second total-mirror-side passage 326 are provided on the first parabolic mirror 321 for the second signal light 346 to pass through. The second signal light output coupler 345 is disposed outside the first parabolic mirror 321 to reflect or transmit the second signal light 346 passing through the second output coupler side passage 327. The second signal light total reflection mirror 344 is disposed outside the first parabolic mirror 321 and reflects the second signal light 346 passing through the second total mirror side passage 326. The second signal light output coupler 345, the second thin disk 112, and the second signal light total reflection mirror 344 constitute a second signal light resonator of the second signal light 346. Optical output coupling through second signal The second signal light 346 that is incident on the reflector 345 is incident on the second thin disc 112 through the second output coupler side passage 327 of the first parabolic mirror 321. The second signal light 346 is amplified and reflected on the second thin disc 112 and passes through the second total mirror side path 326 of the first parabolic mirror 321 toward the second signal light total reflection mirror 344, reflects again and returns along the same path again. After resonance. The second signal light output coupler 345 may have a reflectance of 95%, for example. The second signal light 346 is resonated and amplified in the second signal light resonator, and is output through the second signal light output coupler 345.

The thin-disk laser device 300 of this embodiment is provided with a first signal light resonance structure and a second signal light resonance structure independently, and therefore can independently output and control the first signal light 343 and the second signal light 346.

The first signal light resonance structure and the second signal light resonance structure are provided independently of the multi-path surge structure, and therefore are provided to the second output coupler side passage 327 and the second total mirror side passage 326 of the first parabolic mirror 321. The positions of the first output coupler-side passage 323 and the first total-mirror-side passage 324 provided to the second parabolic mirror 122 may not be incident on the rising light provided to the side of the first parabolic mirror 321. The port 125 is designed freely within a range where mechanical interference occurs. For example, in the first parabolic mirror 321, the rising light entrance port 125 may be disposed on the same line as the second output coupler-side passage 327 and the second total-mirror-side passage 326, or may be disposed at a position apart from the same line.

The thin disc laser device 300 of this embodiment has resonator structures of the first signal light 343 and the second signal light 346, but it is not limited thereto. As another example, a signal may be formed by optically connecting the first signal light 343 and the second signal light 346. The optical resonator optical system, another example described above can be understood by the practitioner. For example, a plurality of mirrors may be provided so that the first signal light 343 transmitted from the first thin disc 111 through the first output coupler side path 323 is transmitted to the second thin disc 112 through the second output coupler side path 327. The second signal light 346 transmitted from the second thin disc 112 through the second output coupler side path 327 is transmitted to the first thin disc 111 through the first output coupler side path 323.

The thin-disk laser device 300 of this embodiment has a resonator structure, but it is not limited to this. As another example, separate amplifier optical systems may be configured for the first signal light 443 and the second signal light 446 instead of the first signal light output coupler 341 and the second signal light output coupler 345, respectively. As another example, an amplifier optical system of a signal light may be configured for optically connecting the first signal light 343 and the second signal light 346.

FIG. 7 is a schematic configuration diagram of a thin disk laser device 400 according to still another embodiment of the present invention. In the thin-disc laser device 400 of this embodiment, the remaining constituent elements other than the resonance structure of the signal light are substantially the same as those of the embodiment described with reference to FIGS. 1 to 6, and therefore the differences will be mainly described.

Referring to FIG. 7, the thin-disk laser device 400 of this embodiment includes a first thin disk 111 and a second thin disk 112, a first parabolic mirror 421 and a second parabolic mirror 422, a first signal light output coupler 441, The first signal light total reflection mirror 442, the second signal light internal mirror 444, and the second signal light output coupler 445.

The second parabolic mirror 422 is provided with an output coupler-side passage 423 and a total-mirror side passage 424 through which the first signal light 443 can pass. First signal light output The coupler 441, the first thin disc 111, and the first signal light total reflection mirror 442 form a resonator structure of the first signal light 443. The resonator structure of the first signal light 443 is substantially the same as the resonator structure of the first signal light described with reference to FIG. 6.

The second signal light internal mirror 444 is located at or near the normal of the front surface of the second thin disc 112, and is arranged at an angle of 45 degrees. The second signal light output coupler 445, the second thin disc 112, and the second signal light internal mirror 444 form a resonator structure of the second signal light 446. The resonator structure of the second signal light 446 is substantially the same as the resonator structure of the second signal light described with reference to FIG. 5.

The thin-disk laser device 400 of this embodiment may independently set a first signal light resonance structure and a second signal light resonance structure, but it is not limited thereto. As another example, the first signal light 443 and the second signal light 446 may be optically connected to form a resonator optical system of a signal light. The above-mentioned another example can be understood by a practitioner. For example, a plurality of mirrors may be provided so that the first signal light 443 transmitted from the first thin disc 111 through the output coupler side path 423 is transmitted to the second thin disc 112 through the second signal light internal mirror 444, so that The second signal light 446 reflected by the two thin discs 112 and reflected by the second signal light internal mirror 444 is transmitted to the first thin disc 111 through the output coupler side path 423.

The thin-disk laser device 400 of this embodiment has a resonator structure, but it is not limited to this. As another example, separate amplifier optical systems may be configured for the first signal light 443 and the second signal light 446 instead of the first signal light output coupler 441 and the second signal light output coupler 445. As another example, a signal optical amplifier optical system may be configured for optical connection between the first signal light 443 and the second signal light 446.

FIG. 8 is a schematic configuration diagram of a thin disk laser device 500 according to still another embodiment of the present invention. In the thin-disc laser device 500 of this embodiment, the remaining constituent elements other than the multi-path pumping structure of the pumping light can be substantially the same as those of the embodiment described with reference to FIGS. 1 to 7. Center.

Referring to FIG. 8, the thin-disk laser device 500 of this embodiment includes a first thin disk 111 and a second thin disk 112, a first parabolic mirror 521 and a second parabolic mirror 522, a first laser source 551, and a second Laser light source 552.

The paraboloid-shaped reflecting surfaces of the first parabolic mirror 521 and the second parabolic mirror 522 face each other and are arranged coaxially. The first parabolic mirror 521 is provided with a first laser light entrance 525 and a second laser light entrance 526 symmetrically on the vertex as a reference. The first soaring light source 551 and the second soaring light source 552 are configured in the following manner: the emitted first soaring light P1 and the second soothing light P2 pass through the first soothing light entrance 525 and the second soothing light, respectively The entrance port 526 enters a space between the first parabolic mirror 521 and the second parabolic mirror 522.

FIGS. 9a and 9b respectively show the formation of the thin-disk laser device 500 to the first parabolic mirrors 521 and the first parabolic mirrors 522 of the second parabolic mirror 522 at the first ascending light points S1_1, S1_2,... The light paths of the second excitation light points S2_1, S2_2, ..., S2_13, and the first excitation light P1 and the second excitation light P2.

The first laser light P1 emitted from the first laser light source 551 passes through the first laser light entrance 525 of the first parabolic mirror 521 and enters the first parabolic mirror 521 and the optical axis OA in parallel. A space between the second parabolic mirrors 522. Multi-path laser light path of the first laser light P1 and refer to FIG. 2 and FIG. 3a The excitation light path of the embodiment described with reference to FIG. 3b is substantially the same. Similarly, the second rising light P2 emitted from the second rising light source 552 is incident on the first parabolic reflection through the second rising light entrance 526 of the first parabolic mirror 521 in a manner parallel to the optical axis OA. A space between the mirror 521 and the second parabolic mirror 522. The second laser light entrance port 526 is symmetrically arranged on the left and right sides with the vertex of the first parabolic mirror 521 as a reference. The light-up path is formed symmetrically with reference to the optical axis OA. Therefore, the first ascending light points S1_1, S1_2, ..., S1_S13 and the second ascending light points S2_1, S2_2, ..., S2_13 formed to the first parabolic mirror 521 and the second parabolic mirror 522 are formed across And the first parabolic mirror 521 and the second parabolic mirror 522 are formed over the entire area, so the first parabolic mirror 521 and the second parabolic mirror 522 can be effectively utilized.

FIG. 10 is a schematic configuration diagram of a thin disk laser device 600 according to still another embodiment of the present invention. In the thin-disc laser device 600 of this embodiment, the remaining constituent elements other than the multi-path soaring structure of the ascending light may be substantially the same as those of the embodiment described with reference to FIGS. 1 to 8. Center.

Referring to FIG. 10, the thin-disk laser device 600 of this embodiment includes a first thin disk 111 and a second thin disk 112, a first parabolic mirror 621 and a second parabolic mirror 622, a first laser source 651, and a second Laser light source 652.

The paraboloid-shaped reflecting surfaces of the first parabolic mirror 621 and the second parabolic mirror 622 face each other and are arranged coaxially. The first parabolic mirror 621 is provided with a first rising light entrance 625, and the second parabolic mirror 622 is provided The second exciting light incident port 626. The second ascending light entrance 626 is provided in a manner that is symmetrical with respect to a center point between the first parabolic mirror 621 and the second parabolic mirror 622 on the optical axis OA, and is centered on the centers of the two parabolic mirrors The point is a reference and is symmetrical with the first laser light entrance 625. The first soaring light source 651 and the second soaring light source 652 are configured in the following manner: the emitted first soaring light P1 and the second soaring light P2 pass through the first soothing light entrance 625 and the second soothing light, respectively. The light incident port 626 enters a space between the first parabolic mirror 521 and the second parabolic mirror 522. The multi-path pumping path of the first pumping light P1 is substantially the same as the pumping path of the embodiment described with reference to FIGS. 2, 3 a, and 3 b. Similarly, the multi-path excitation light path of the second excitation light P2 is also substantially the same as the excitation light path of the embodiment described with reference to FIGS. 2, 3 a, and 3 b. The first ascending light entrance 625 and the second ascending light entrance 626 are symmetrically provided with reference to the center points of the two parabolic mirrors. Therefore, the first parabolic mirror 621 and the second parabolic mirror 622 are formed symmetrically. The first and second rising spots are formed across the entire area of the first parabolic mirror 621 and the second parabolic reflecting mirror 622, so the first parabolic reflecting mirror 621 and the second parabolic reflecting can be effectively utilized.镜 622.

FIG. 11 is a schematic configuration diagram of a thin disk laser device 700 according to still another embodiment of the present invention. In the thin-disk laser device 700 of this embodiment, the remaining constituent elements other than the multi-path pumping structure of the pumping light may be substantially the same as those of the embodiment described with reference to FIGS. 1 to 10. Center.

Referring to FIG. 11, the thin-disk laser device 700 of this embodiment includes a first thin-disk 111 and a second thin-disk 112, a first parabolic mirror 721, and a second parabolic mirror 722. The first to fourth rising light sources 751, 752, 753, and 754.

The parabolic-shaped reflecting surfaces of the first parabolic mirror 721 and the second parabolic mirror 722 face each other and are arranged coaxially. In the first parabolic mirror 721, the first ascending light entrance 725 and the second ascending light entrance 726 are symmetrically disposed with reference to the vertex of the first parabolic mirror 721, and are disposed in the second parabolic mirror 722. The third soaring light entrance 727 and the fourth soaring light entrance 728 are symmetrically provided with the vertex of the second parabolic mirror 722 as a reference.

The first to fourth illuminating light sources 751, 752, 753, and 754 are configured in the following manner: the first to fourth irradiating light P1, P2, P3, and P4 emitted by the first The ascending light entrance to the fourth ascending light entrances 725, 726, 727, and 728 enter the space between the first parabolic mirror 721 and the second parabolic mirror 722. The multi-path laser path of each of the first to fourth laser beams P1, P2, P3, and P4 is substantially the same as the laser path of the embodiment described with reference to FIGS. 2, 3a, and 3b. . The formation positions of the first to fourth laser light entrances 725, 726, 727, and 728, or the inclination angles and directions of the first and second thin disks 111 and 112 can be set as follows: The first to fourth laser light spots formed to the first parabolic mirror 721 and the second parabolic mirror 722 are overlapped with each other. The thin disk laser device 700 of this embodiment spans the entire area of the first parabolic mirror 721 and the second parabolic mirror 722 to form the first to fourth laser light spots, so the first laser light spot to the fourth laser light spot can be effectively utilized. A parabolic mirror 721 and a second parabolic mirror 722.

FIG. 12 is a schematic view of a thin disk laser device 800 according to another embodiment of the present invention. Sketch map. In the thin-disk laser device 800 of this embodiment, the remaining constituent elements other than the multi-path pumping structure of the pumping light may be substantially the same as those of the embodiment described with reference to FIGS. 1 to 11. Center.

Referring to FIG. 12, the thin-disk laser device 800 of this embodiment includes a first thin disk 111 and a second thin disk 112, a first parabolic mirror 821 and a second parabolic mirror 822, a first laser source 851, and a second Light source 852.

The paraboloid-shaped reflecting surfaces of the first parabolic mirror 821 and the second parabolic mirror 822 face each other and are arranged coaxially. A first light entrance port 825 is provided on the first parabolic mirror 821. A first soaring light source 851 and a second soaring light source 852 are arranged in parallel so that the first and second soaring lights P1 and P2 emitted are incident on the first parabolic reflector through the same soothing light entrance port 825. The space between 821 and the second parabolic mirror 822. The multi-path laser light path of each of the first laser light P1 and the second laser light P2 is substantially the same as the laser light path of the embodiment described with reference to FIGS. 2, 3 a, and 3 b. The thin-disk laser device 800 of this embodiment is described by taking the case where two laser beams are incident on one laser beam entrance port 825 as an example, but three or more laser beams may be incident in parallel. In addition, when there are multiple laser light entrances as in the embodiment described with reference to FIGS. 8 to 11, multiple laser light entrances may be made incident on each laser light entrance.

In order to facilitate understanding, the thin-disk laser device according to the present invention has been described with reference to the embodiments shown in the drawings, but the above-mentioned embodiments are merely examples, and those having ordinary knowledge in the technical field should understand that the above-mentioned implementation Examples realize various modifications and equivalent other embodiments. Therefore, the true technical protection scope of the present invention should be covered by the accompanying Definition of patent application scope.

Claims (19)

A thin disk laser device includes: a first parabolic mirror and a second parabolic mirror, which face each other and are arranged coaxially; a first thin disk and a second thin disk, respectively, including a laser medium and the laser; The reflecting surfaces on the back surface of the transmission medium are respectively arranged to the vertices of the first parabolic mirror and the second parabolic mirror, and together with the first parabolic mirror and the second parabolic mirror, form an ascending light. A multi-path; a first internal mirror and a second internal mirror configured to reflect a signal light to a space between the first parabolic mirror and the second parabolic mirror; and a plurality of mirrors configured to the first On the light path of the signal light between an internal mirror and the second internal mirror, and the rising light is incident on the mirror multiple times by the first parabolic mirror and the second parabolic mirror. The first thin disc and the second thin disc to excite the first thin disc and the second thin disc, wherein the first inner mirror, the second inner mirror, and the plurality of mirrors are borrowed The first thin plate excited by the rising light and Said signal light repeatedly reflected between the thin plate and the second optical amplifying the signal, wherein the signal light is not to the first parabolic mirror and said second parabolic mirror reflector. The thin-disk laser device according to item 1 of the scope of patent application, wherein the first internal mirror is configured to input the signal from the first internal mirror to the first thin disk. The light is configured to reflect toward the first internal mirror side, and the second internal mirror reflects the signal light incident on the second thin disk from the second internal mirror toward the second internal mirror side. Way to configure. The thin-disk laser device according to item 1 of the patent application scope, wherein the first internal mirror is located on or near the normal to the front surface of the first thin disk, and the second internal mirror is located The normal line of the front surface of the second thin disc or the vicinity of the normal line. The thin-disk laser device according to item 1 of the patent application scope further includes a seed light source for supplying seed light, and the first thin disk and the second thin disk amplify the seed light into the signal light. The thin-disk laser device according to item 4 of the patent application scope, wherein the seed light emitted from the seed light source is polarized laser light. The thin-disk laser device according to item 1 of the scope of patent application, further comprising an optical path converter configured to the first thin disk and the second thin disk. On the optical path of the signal light, the path of the signal light is changed according to the control signal and output to the outside. The thin-disk laser device according to item 1 of the patent application scope, wherein the first thin disk and the second thin disk are relative to the optical axis of the first parabolic mirror and the second parabolic mirror tilt. The thin-disk laser device according to item 1 of the scope of the patent application, further comprising a first laser light source that emits a first laser light that excites the laser medium, and is formed on the first parabolic mirror. Said first rising light is incident on said A first laser light entrance in a space between the first parabolic mirror and the second parabolic mirror. The thin-disk laser device according to item 8 of the scope of patent application, further comprising a second laser source that emits a second laser light that excites the laser medium. The thin-disk laser device according to item 9 of the scope of patent application, wherein the first parabolic mirror or the second parabolic mirror is formed so that the second excitation light is incident on the first parabolic reflection. A second rising light entrance in the space between the mirror and the second parabolic reflector. The thin-disk laser device according to item 9 of the scope of patent application, wherein the second laser light is incident on the first parabolic mirror and the second laser light through the first laser light entrance port. Space between parabolic mirrors. The thin-disk laser device according to item 1 of the scope of patent application, further comprising a soaring-beam mode observation device that is photographed and formed on the first and second thin-disc plates. The first and second rising points of light on the front side of the lens. A thin disk laser device includes: a first parabolic mirror and a second parabolic mirror, which face each other and are arranged coaxially; a first thin disk and a second thin disk, respectively, including a laser medium and the laser; The reflecting surfaces on the back surface of the transmission medium are respectively arranged to the vertices of the first parabolic mirror and the second parabolic mirror, and together with the first parabolic mirror and the second parabolic mirror, form an ascending light. Multipath The first internal mirror and the second internal mirror are disposed in a space between the first parabolic mirror and the second parabolic mirror to reflect the first oscillating first and second oscillating mirrors. A signal light and a second signal light; and a first signal light output coupler and a second signal light output coupler respectively reflecting the first signal light from the first internal mirror and the second internal mirror And a part of the second signal light is reflected to the first internal mirror and the second internal mirror, and another part is output. A thin disk laser device includes: a first parabolic mirror and a second parabolic mirror, which face each other and are arranged coaxially; a first thin disk and a second thin disk, respectively, including a laser medium and the laser; The reflecting surface on the back of the transmission medium is arranged to the apex of the first parabolic mirror and the second parabolic mirror, and forms the ascending light together with the first parabolic mirror and the second parabolic mirror. Multipath; and a first internal mirror configured to a space between the first parabolic mirror and the second parabolic mirror to reflect a first signal light, and the rising light passes through the first The parabolic reflector and the second parabolic reflector are incident on the first thin disc and the second thin disc multiple times to excite the first thin disc and the second thin disc, and the first interior A mirror is disposed on the front surface of the first thin disc, so that the first signal light incident on the first thin disc from the first internal mirror is reflected toward the first internal mirror side, The first signal light is amplified by the first thin disc excited by the rising light, and the first signal light is not reflected by the first parabolic mirror and the second parabolic mirror. The thin-disk laser device according to item 14 of the patent application scope, further comprising a second internal mirror disposed to a space between the first parabolic mirror and the second parabolic mirror, and the second The internal mirror is disposed on the front surface of the second thin disk, so that the second signal light incident on the second thin disk from the second internal mirror is reflected toward the second internal mirror side. The thin disc laser device according to item 15 of the scope of patent application, wherein the first signal light and the second signal light are optically separated and separated in the first thin disc and the second thin disc, respectively. To zoom in. The thin-disk laser device according to item 14 of the scope of patent application, further comprising a second signal light total reflection mirror and a second signal light output coupler provided to the outside of the first parabolic mirror. A parabolic mirror includes an output coupler side path and a total reflection side path of the second signal light, and the second signal light reflected from the second signal light total reflection mirror passes through the total reflection mirror side. Path toward the second thin disc, the second signal light reflected from the second thin disc is directed toward the second signal optical output coupler through the output coupler side path, and the second A part of the signal light is coupled from the second signal light output The combiner reflects again to the second thin disc, and the other part of the second signal light is output in the form of output light through the second signal light output coupler, the second signal light output coupler, the A second thin disc and the second signal light total reflection mirror form a resonator to the second signal light. A thin-disk laser device includes: a first parabolic reflector; a second parabolic reflector, and the first parabolic reflector are arranged facing each other and coaxially, and include a first output coupler side of a first signal light The channel and the first total-mirror side channel; the first thin plate and the second thin plate, respectively, include a laser medium and a reflecting surface on the back of the laser medium, and are respectively arranged to the first parabolic mirror and the reflecting plate. The apex of the second parabolic mirror and the first parabolic mirror and the second parabolic mirror form a multi-path of the rising light; a first signal light output coupler is arranged to the second parabolic reflection The periphery of the mirror reflects a part of the first signal light so that it directly faces the first thin disc through the first output coupler side path, and outputs a part of the first signal light; and A signal light total reflection mirror is arranged to the periphery of the second parabolic mirror, so that the first signal light from the first thin disc is reflected to the first thin disc again. The thin-disk laser device according to item 18 of the patent application scope, further comprising a second signal light output coupler arranged to the periphery of the first parabolic mirror. And a second signal light total reflection mirror, a second output coupler side path and a second total reflection mirror side path of the second signal light are provided in the first parabolic mirror, and the first signal light output coupler reflects A part of the second signal light is directed to the first thin disc through the second output coupler side signal light path, and the second signal light is output, and the signal light total reflection mirror is borrowed. Reflecting the second signal light from the first thin disc to the first thin disc through the second total reflection mirror side path.