TWI670503B - Photoelectric characteristics and appearance detection system of crystal grains - Google Patents

Abstract

The invention provides a photoelectric characteristic and appearance detecting system for a crystal grain, comprising: a first appearance detecting device for detecting a front side of a die, a moving device extracting a die to move, and a second appearance detecting device for detecting a back surface of the die, the first electrical property The detecting device is disposed on the rail device for performing the first electrical detection of the die, the second electrical detecting device performs the second electrical detection of the die, and the third appearance detecting device is disposed on the rail device to enable the second The electrical detecting device is located between the first and third appearance detecting devices, and the third appearance detecting device performs side detection of the crystal grains, and after the detection, the crystal grains are moved to the classification. The invention combines optical detection and electrical detection, thereby detecting the photoelectric characteristics and appearance of the crystal grains together to increase the detection speed.

Description

Photoelectric characteristics and appearance detection system of crystal grains

The present invention relates to a detection system, and more particularly to a system for detecting photoelectricity and appearance of a crystal grain by optical and electrical properties.

Laser can be used in laser spectroscopy, ranging, radar, cutting or fiber-optic communication, and it has a huge use in medical, industrial, military and other fields. The laser can also be classified into a variety of types, of which the laser diode has the smallest volume and the lowest cost, as long as a very small battery is added to the device, it is enough to drive the laser.

Therefore, the laser diode can be widely used in various electronic products, such as smart phones, tablets, etc., and can be used as a sensor or 3D stereo image detection. It is also because the laser diode is used in these high-precision electronic products, and the laser diode itself is very small in volume, which is not easy for the process of yield measurement.

Nowadays, in order to test the stability of the laser diode and avoid the phenomenon of unstable illumination caused by damage in production, the photoelectric characteristic detection of the laser diode is usually performed, and the yield is filtered by the measurement result. Low product to eliminate. However, the current detection method, in addition to the photoelectric characteristics, has not developed a way to effectively detect the appearance of the laser diode grains, and most of them are roughly detected by manual means.

As a result, in the laser diode die which is not problematic in the detection of the photoelectric characteristics, since the appearance defect is not immediately found, it is used in the device in the future, and the use instability may be caused by the defect of the appearance.

In order to improve the detection environment of laser diodes in the present invention, a photoelectric detection and appearance detection system combining optical detection and electrical detection of crystal grains is proposed to improve the yield of the laser diode.

The main object of the present invention is to provide a photoelectric detection and appearance detection system for a crystal grain, which combines optical detection to detect the appearance of a crystal grain, and an electrical detection device for detecting the photoelectric characteristics of the crystal grain to be simultaneously completed in one process. Two kinds of tests.

Another object of the present invention is to provide a photoelectric detecting and appearance detecting system for a crystal grain, which can simultaneously detect optical power and light wavelength during electrical detection, accurately measure photoelectric characteristics of the crystal grain, and perform appearance inspection. In addition to the front side of the die, back and side inspections are provided, which is sufficient to reduce the time and cost of many inspections.

In order to achieve the above object, the present invention provides a photoelectric characteristic and appearance detecting system for a crystal grain, comprising: a first appearance detecting device having a first optical detector and a suction cup, wherein the first optical detector is located above the suction cup, and the suction cup can be placed The die is used for the front side detection of the die by the first optical detector, the moving device can extract the detected front side of the die to move, and the second appearance detecting device has a second optical detector at the bottom for the moving device to extract the die moving Performing back surface detection of the die via the second optical detector, the slide rail device has a slide rail and a transfer component, and the transfer component is disposed on the slide rail to carry the die carried by the mobile device so as to be on the slide rail Moving, the first electrical detecting device is disposed on the rail device, and has a first turntable and a first electrical detecting component, the first turntable can be rotated to the sliding rail device to carry the die, and the first turntable turns the die back to The first electrical detecting component performs the first electrical detection. After the detecting, the first rotating wheel moves the die back to the sliding rail device, and the second electrical detecting device is disposed in the sliding rail device, and is located at the first On the side of the electrical detecting device, the second electrical detecting device has a second turntable and a second electrical detecting component, the second turntable can be rotated to the sliding rail device to carry the die, and the second turntable turns the die back to the second The electrical detecting component performs a second electrical detection. After the detecting, the second rotating wheel moves the die back to the sliding rail device, and the third appearance detecting device is disposed on the sliding rail device, so that the second electrical detecting device is located at the first Between the electrical detecting device and the third appearance detecting device, the third appearance detecting device has a third turntable and a third optical detector, the third turntable can be rotated to the slide rail device carrying the die, and the third turntable turns the die back The third optical detector performs side detection of the die. After the detection, the third turntable moves the die back to the slide device to move the die to the classification.

In the present invention, the first alignment device is further disposed on the slide rail device, and the first alignment device moves the mobile device to the crystal grains on the slide rail device to perform alignment detection and adjust displacement.

In the present invention, the second alignment device is further disposed on the slide rail device, and the second alignment device is configured to perform the first electrical detection of the crystal grains for performing the alignment detection and adjusting the displacement.

In the present invention, the third alignment device is further disposed on the slide rail device, and the third alignment device is configured to perform the second electrical detection of the crystal grains for performing the alignment detection and adjusting the displacement.

In the present invention, the fourth alignment device is further disposed on the slide rail device, and the fourth alignment device is configured to perform the side detection of the crystal grains to perform the alignment detection and the displacement adjustment, and then the transfer component will be The grains are moved to the classification.

In the present invention, the first electrical detection performs a first electrical detection of current, power, and wavelength at a first temperature, for example, at 20 to 40 ° C, and the second electrical detection performs current, power, and at a second temperature. The second electrical detection of the wavelength, for example at 70~100 °C.

In the present invention, the first electrical detecting device and the second electrical detecting device further comprise an optical power measuring device and a spectrum analyzer for detecting the photoelectric characteristics and the wavelength of the crystal grains.

In the present invention, the mobile device is a mechanical swing arm having a nozzle.

In the present invention, the third optical detector has two optical lenses, and the two optical lenses are disposed face to face. When the crystal grain is carried between the two optical lenses, the optical lens is used to perform side detection of the crystal grains.

The purpose, technical content, features and effects achieved by the present invention will be more readily understood by the detailed description of the embodiments.

With the rapid development of optical communication, as well as the popularization of users of optical fiber equipment, and with the demand and supply of fiber optic cable, optical components, modules or equipment and other supporting industries corresponding to the future communication system, it will gradually reach the peak. In the meantime, the demand for laser diodes will gradually increase. Accordingly, the present invention provides a photoelectric feature and appearance detection system for a die that is fast, efficient, and time- and cost-effective.

First, referring to the first, second, and third figures of the present invention, a photoelectric characteristic and appearance detecting system 10 for a die includes a first appearance detecting device 12, a second appearance detecting device 14, and a first The three appearance detecting device 16, a moving device 18, a rail device 20, a first electrical detecting device 22, a second electrical detecting device 24, a first alignment device 26, and a second alignment device 28 a third alignment device 30 and a fourth alignment device 32. The first appearance device 12 is located at the foremost end of the entire detection system 10, the second appearance detecting device 14 is disposed beside the first appearance device 12, and the second appearance detecting device 14 is disposed at the foremost end of the rail device 20, A mobile device 18 is further disposed beside the appearance detecting device 14 . The mobile device 18 is provided with a first alignment device 26 on one side of the slide rail device 20 , and the second alignment device 28 is disposed adjacent to the first alignment device 26 . The third aligning device 30 and the fourth aligning device 32, and in the embodiment, the first aligning device 26, the second aligning device 28, the third aligning device 30, and the fourth aligning device 32 are all provided On the same side of the rail assembly 20. The other side of the mobile device 18 is provided with a first electrical detecting device 22, the corresponding rail device 20 is disposed in front of the second alignment device 28, and the second electrical detecting device 22 is provided with a second electrical detecting device on the other side. 24, which is also disposed in front of the third alignment device 30 corresponding to the rail device 20, and a third appearance detecting device 16 is disposed on the other side of the second electrical detecting device 24, which is also disposed in the fourth alignment position corresponding to the rail device 20. The front of the device 32. When the rail device 20 has the second appearance detecting device 14 as the foremost end, a sorting device 34 may be disposed at the end of the rail device 20.

After the description of the positional relationship of the devices in the present invention is completed, the components of each device are described in detail. The first appearance detecting device 12 further includes a first optical detector 122 and a suction cup 124. The optical detector 122 is positioned above the suction cup 124, and at least one of the crystal grains 36 is disposed above the suction cup 124. In the embodiment, the plurality of crystal grains 36 are taken as an example, and the present invention is not limited to the crystal on the suction cup 124. The number of the particles 36, the die 36 of the present embodiment is a laser diode die; the bottom of the second appearance detecting device 14 has a second optical detector 142, and the second optical detector 142 is located at the mobile device 18. The moving device 18 in the present embodiment is a mechanical swing arm having a nozzle; the slide device 20 further has a slide rail 202 and a transfer member 204. The first electrical detecting device 22 has a first rotating plate 222 and a first electrical detecting component 224. The position of the first rotating plate 222 is located at the first electrical detecting component 224 and sliding. Between the rails 202; the second electrical detecting device 24 has a The second turntable 242 and the second electrical detection component 244 are disposed between the second electrical detection component 244 and the slide rail 202. The third appearance detection device 16 has a third turntable 162 and a third optical detection. The third optical detector 164 is disposed between the third optical detector 164 and the sliding rail 202. In this embodiment, the third optical detector 164 can have two optical lenses 166, and the two optical lenses 166 can be face to face. Although the invention does not limit the number of optical lenses 166 and the position of the arrangement, for example, the optical lens 166 also adjusts the illumination angle via rotation, for example, as shown in the third figure, in which case an optical lens 166 can be used as a detector. For measurement purposes.

After the components in the various devices of the present invention are described in detail, the operation mode of the present invention will be described hereinafter. Referring to the first, second and third figures of the present invention, the detection system 10 of the present invention may be independently operated. The machine, or the machine associated with other machines (such as other processes), can independently have a computer-like control system or be shared with other machines, and the present invention does not limit the technical means of control. At the beginning of the operation of the present invention, the die 36 is first placed on the chuck 124 of the first appearance detecting device 12, and is firstly detected by the first optical detector 122 from the front side of the die 36, while the first appearance The detection device 12 can also include a jacking element 126 that separates the die 36 from the blue film by the jacking element 126. After the front side detection, the die 36 is taken out from the blue film of the chuck 124 by the moving device 18. Although the present invention does not limit the number of the crystal grains 36 on the chuck 124, the moving device 18 uses only the nozzle to take out one die 36 at a time. At this time, the mobile device 18 extracts the front surface of the die 36 using the nozzle to move the die 36 toward the second appearance detecting device 14. When the front side of the die 36 is extracted by the moving device 18, after moving to the second appearance detecting device 14, the second optical detector 142 performs backside detection from the back side of the die 36. After the backside inspection is performed, the mobile device 18 moves the die 36 to the track assembly 20, and before the die 36 is placed in the transfer component 204, it can be moved to the positive component 38 by the mobile device 18. The position of the positive die 36 can be rotated, then placed on the transfer element 204 on the slide 202, and the aligned die 36 is aligned by the first alignment device 26, and the die 36 If a positional offset occurs, the displacement can be adjusted simultaneously. After the position of the die 36 is corrected, the transfer element 204 is again moved from the slide 202. For example, the slide assembly 20 utilizes a linear motor to move the transfer element 204 to the slide 202. mobile.

In the upper section, the transfer component 204 first moves the die 36 after the correction position to the proximity position of the corresponding electrical rail device 22 corresponding to the slide rail 202. At this time, please refer to the fourth figure, the first turntable 222 can be used by The rotating member 40 rotates 180 degrees toward the slide rail 202 to assume the pattern shown in the fifth figure. The first turntable 222 can carry the die 36 thereon to the position of the transfer member 204. The first turntable 222 Turn 180 degrees back to the original position, as shown in the second picture. After returning to the initial position, the first electrical detecting component 224 can further have a probe 226 for performing a first electrical detection on the die 36 by using the probe 226, for example, the first electrical detecting component 224 is at the first temperature. The first electrical detection of current, power, and wavelength is performed between 20 and 40 ° C. The present invention does not limit whether the first electrical detection component 224 is detected by the probe 226, and the first electrical detection component 224 may further include An optical power measuring device and a spectrum analyzer (not shown), the optical power measuring device used in this embodiment can be a Keithley 2602B type current-voltage optical power measuring device, as a laser diode The body pulse wave test system provides the current pulse wave required by the laser diode to provide a current, for example, a pulse current of up to 5 amps or a direct current of up to 1 amp to collect the photocurrent and voltage of the die 36, and after calculation, The power is obtained from the graph, and the spectrum analyzer is an Anritsu MS9740A spectrometer that can cover spectral analysis from 600 nm to 750 nm for optical resolution and high-speed measurement to provide waveform data for reference. . After performing the first electrical detection described above, the first turntable 222 is rotated 180 degrees upward in the manner as shown in the fourth figure to bring the die 36 back to the transfer component 204, and at the same time, the second alignment The device 28 performs alignment detection and adjustment of displacement on the transfer element 204 for the die 36 that has undergone the first electrical detection.

Then, the transfer component 204 moves the die 36 to the proximity position of the corresponding electrical rail device 24 corresponding to the slide rail 202. At this time, the second turntable 242 is like the first turntable 222, and has the rotating component as shown in the fourth figure. 40 and the first turntable 222 of the fifth figure rotates 180 degrees in the direction of the slide rail 202 to carry the die 36 on the transfer component 204, and then return to the original position as shown in the second figure, the second The electrical detection component 244 can also have a probe 246 and perform a second electrical detection on the die 36 by using the probe 246. In this embodiment, the second electrical detection component 244 is similar to the first electrical component 224. Each includes an optical power meter and an optical spectrum analyzer, such as a Keithley 2602B type current-voltage optical power meter and an Anritsu MS9740A type spectrometer, with the difference that the second electrical detecting component 244 is at the second temperature: The second electrical detection of current, power and wavelength is performed at 70~100 °C. Because the laser diode generates heat due to long illumination time, it is necessary to perform electrical detection at different temperatures. After the second electrical detection described above is performed, the second turntable 242 is further rotated 180 degrees to bring the die 36 back to the transfer member 204. Next, the third alignment device 30 performs the alignment detection and the adjustment displacement on the transfer element 204 after the second electrical detection of the die 36.

After the die 36 performs the photoelectricity detection of the two different temperatures, the die 36 is moved by the transfer component 204 to the position corresponding to the slide rail 202 of the third appearance detecting device 16, and the third turntable 162 is also Like the first turntable 222, the rotation of the rotating member 40 as shown in the fourth figure and the first turntable 222 of the fifth figure is rotated 180 degrees toward the slide rail 202 to carry the die 36 on the transfer member 204. Turning back to the original position as shown in the second figure, the side detection of the die 36 is performed by the second optical lens 166 of the third optical detector 164. After the detection, the die 36 is moved back to the transfer component 204 on the slide device 20 by the third turntable 162. At this time, the die 36 on which the side detection is performed is performed by the fourth alignment device 32 on the transfer component 204. The alignment detection and the adjustment of the displacement are performed. After confirming that the position of the die 36 is not offset, the die 36 is moved to the sorting device 34 by the transfer member 204 for classification, and the die 36 is performed at each station. In appearance or electrical detection, the detection result can be immediately transmitted to a control system such as a computer to analyze and compare the detection results to perform classification at different levels in the classification device 34, such as good products, sub-goods, inferior products, etc. Classification, however, the above description is based on the best case detection of the die 36. If the die 36 has a front defect or a back defect or is electrically defective, the subsequent detection can be skipped directly and directly entered into the sorting device. 34.

The above embodiments are described by taking the detection of a single crystal grain as an example. However, the photoelectric characteristics and appearance detection system of the present invention can be used to detect only one crystal grain at a time, for example, when the first crystal grain is used. After the front side detection is performed, when the back side detection is performed, the front side of the second crystal grain can be detected on the first appearance detecting device, and when the first back surface is detected and moved to the rail device, the second piece can be moved to the first The second appearance detecting device performs back surface detection. At this time, the first appearance detecting device can perform front detecting of the third crystal grain. When each crystal grain is moved backward to another station for detecting, the pushing can be performed. The new die detection allows the detection system of the present invention to have a die for detection or movement at each station during operation.

Therefore, the present invention can perform the detection of the appearance and photoelectricity of the laser diode grains in a large amount, and from the initial detection to the final classification, it takes only about six seconds, so that the present invention can provide crystals. In addition to the appearance detection of the particles, combined with the photoelectric characteristics detection of different temperatures, it is completed in one process, which saves the cost of detection and the detection time, and because of the increased appearance detection, the problem can be eliminated first, and the detection is greatly improved. After the laser diode, the future yield on the product.

The embodiments described above are merely illustrative of the technical spirit and the features of the present invention, and the objects of the present invention can be understood by those skilled in the art, and the scope of the present invention cannot be limited thereto. That is, the equivalent variations or modifications made by the spirit of the present invention should still be covered by the scope of the present invention.

10‧‧‧Detection system

12‧‧‧First appearance inspection device

122‧‧‧First optical detector

124‧‧‧Sucker

126‧‧‧Uplift components

14‧‧‧Second appearance inspection device

142‧‧‧Second optical detector

16‧‧‧ Third appearance inspection device

162‧‧‧ Third turntable

164‧‧‧ third optical detector

166‧‧‧ optical lens

18‧‧‧Mobile devices

20‧‧‧Slide device

202‧‧‧rails

204‧‧‧Transfer components

22‧‧‧First electrical detection device

222‧‧‧First turntable

224‧‧‧First electrical detection component

226‧‧‧ probe

24‧‧‧Second electrical detection device

242‧‧‧Second turntable

244‧‧‧Second electrical detection component

246‧‧‧ probe

26‧‧‧First registration device

28‧‧‧Second registration device

30‧‧‧ third alignment device

32‧‧‧ fourth alignment device

34‧‧‧Classification device

36‧‧‧ grain

38‧‧‧Transitive components

40‧‧‧Rotating components

The first figure is a top view of the invention. The second figure is a perspective view of the present invention. The third figure is a perspective view of a partial structure of the present invention. The fourth figure is a schematic view showing the rotating elements of the first electrical detecting device according to the present invention. The fifth figure is a schematic view of the rotation of the first turntable in the present invention.

Claims (11)

A photoelectric detecting and appearance detecting system for a crystal grain, comprising: a first appearance detecting device having a first optical detector and a suction cup, wherein the first optical detector is located above the suction cup, and the suction cup is detachable Having at least one die for the first optical detector to perform front detection of the die; a moving device for extracting the front side of any of the at least one die after the front side detection, For moving; a second appearance detecting device having a second optical detector at the bottom thereof for causing the moving device to extract the front side movement of the die, and performing back surface detection of the die via the second optical detector a slide rail device having a slide rail and a transfer component, wherein the transfer component is disposed on the slide rail, and the transfer component is capable of carrying the back surface inspection carried by the mobile device a first electrode and a first electrical detecting component, the first electrical detecting device is disposed on the sliding rail device, and has a first rotating wheel and a first electrical detecting component, the first The turntable can be rotated to the The track device carries the die on the transfer component, and the first turntable then turns the die back to the first electrical detection component for a first electrical detection. After the detection, the first turntable is The dies are moved back to the transfer component of the slide rail device; a second electrical detection device is disposed on the slide rail device and located on one side of the first electrical detection device, the second electrical property The detecting device has a second turntable and a second electrical detecting component, and the second rotating wheel is rotatable to the sliding rail device to carry the die on the transfer component for performing the first electrical detection, the second The turntable then turns the die back to the second electrical detection component for a second electrical detection. After the detection, the second turntable moves the die back to the transfer component of the slide rail device; and a third appearance detecting device is disposed on the rail device and located on one side of the second electrical detecting device, such that the second electrical detecting device is located in the first electrical detecting device and the third appearance Between the detecting devices, the third appearance detecting device has a third turntable and a third optical a third turntable rotatable to the slide rail device to carry the die on the transfer component for performing the second electrical detection, the third turntable rotating the die back to the third optics The side detection of the die is performed in the detector. After the detection, the third turntable moves the die back to the transfer component of the slide device to cause the transfer component to move the die to the classification. The photoelectric characteristics and appearance detecting system of the die of claim 1, further comprising a first alignment device located on the rail device, wherein the first alignment device moves the mobile device to the sliding rail The die on the device is used for alignment detection and displacement adjustment on the transfer component. The photoelectric characteristics and appearance detecting system of the die of claim 1, further comprising a second alignment device located on the rail device, wherein the second alignment device is to perform the first electrical property The die is detected to perform alignment detection and adjust displacement on the transfer component. The photoelectric characteristic and appearance detecting system of the die of claim 1, further comprising a third alignment device located on the rail device, wherein the third alignment device is to perform the second electrical property The die is detected to perform alignment detection and adjust displacement on the transfer component. The photoelectric characteristics and appearance detecting system of the die of claim 1, further comprising a fourth alignment device located on the rail device, wherein the fourth alignment device is to perform the side detection The die is used for the alignment detection and the displacement adjustment on the transfer component, and then the transfer component moves the die to the classification. The photoelectric property and appearance detecting system of the die of claim 1, wherein the first electrical detecting performs the first electrical detection of current, power and wavelength at a first temperature, and the second electrical property The detection system performs the second electrical detection of current, power, and wavelength at a second temperature. The photoelectric characteristics and appearance detecting system of the crystal grain according to claim 6, wherein the first temperature system is 20 to 40 ° C, and the second temperature system is 70 to 100 ° C. The optical characteristics and appearance detecting system of the die of claim 1, wherein the first electrical detecting device and the second electrical detecting device each further comprise an optical power measuring device and an optical spectrum analyzer for performing Detection of the photoelectric characteristics and wavelength of the crystal grain. The photoelectric characteristics and appearance detecting system of the crystal grain according to claim 1, wherein the crystal grain is a laser diode grain. The photoelectric characteristics and appearance detecting system of the die according to claim 1, wherein the moving device is a mechanical swing arm having a nozzle. The photoelectric characteristic and appearance detecting system of the die of claim 1, wherein the third optical detector has two optical lenses, the two optical lenses are disposed face to face, and when the die is located between the two optical lenses, The two optical lenses perform the side detection of the die.