TWI664135B - Tear film device - Google Patents

Abstract

The film tearing device is suitable for tearing the cover film on the continuous roll under a vacuum environment. The cover film includes a film body and an ear connected to each other. The film tearing device includes a vertical pull-down mechanism and a horizontal back pull mechanism. The vertical pull-down mechanism includes an ear clamping component and a pull-down component. The ear clamping component is used for clamping the ear. The pull-down component is used to pull down the cover film in a vertical direction. The horizontal pull-back mechanism includes a diaphragm clamping component and a pull-back component. The diaphragm clamping component is used for clamping the membrane body. The back pulling component is used to pull the film body in the horizontal direction to tear the cover film from the continuous roll.

Description

Film tearing device

The invention relates to a film tearing device, and in particular to a film tearing device capable of tearing a film in two directions.

The traditional manufacturing process of organic light emitting diodes is to form several semiconductor structure layers of organic light emitting diodes on a carrier board under the atmospheric environment. Then, these semiconductor structure layers are hermetically covered with a cover film in an atmospheric environment. However, tearing the film under atmospheric conditions can easily cause damage to these semiconductor structure layers. Therefore, it is necessary for those skilled in the art to propose a new technology that can improve the aforementioned problems.

Therefore, the present invention provides a film tearing device, which can improve the aforementioned conventional problems.

According to an embodiment of the present invention, a film tearing device is provided. The film tearing device is suitable for tearing a cover film on a continuous roll under a vacuum environment. The cover film includes a film body and an ear connected with each other. The film tearing device includes a vertical pull-down mechanism and a horizontal back pull mechanism. The vertical pull-down mechanism includes an ear clamping assembly and a Pull components. The ear clamping component is used for clamping the ear. The pull-down component is used to pull down the cover film in a vertical direction. The horizontal pull-back mechanism includes a diaphragm clamping component and a pull-back component. The diaphragm clamping component is used for clamping the membrane body. The back-drawing component is used to pull the film body along a first horizontal direction to tear the cover film from the continuous roll.

In order to have a better understanding of the above and other aspects of the present invention, the following specific examples are described in detail below in conjunction with the accompanying drawings:

10‧‧‧roll-to-roll continuous process equipment

11‧‧‧ Unwinding Box

11a‧‧‧ Unwinding cavity

12‧‧‧ Wheel

13‧‧‧Sealing cover

20‧‧‧ continuous coil

21‧‧‧Semiconductor Structure

22‧‧‧ Covering diaphragm

221‧‧‧ membrane

222‧‧‧first ear

223‧‧‧Second ear

100‧‧‧ film tearing device

13‧‧‧Sealing cover

110‧‧‧ Vertical pull-down mechanism

110A‧‧‧ Bellows

111‧‧‧ear clip

1111‧‧‧First Carrier

1112‧‧‧The first jaw group

1112a‧‧‧First jaw

1112b‧‧‧Second gripper

1112c‧‧‧First Gear

1112d‧‧‧Second Gear

1112e‧‧‧Put

1112e1‧‧‧ first end

1112e2‧‧‧ second end

1112f‧‧‧ Pusher

1112g‧‧‧Connecting plate

1112h‧‧‧ Stop

1112j‧‧‧first pivot

1112k‧‧‧ second pivot

1112s‧‧‧ bevel

1113‧‧‧Second jaw set

1114‧‧‧First rack

1115‧‧‧Second rack

1116‧‧‧Drive Gear

1112n‧‧‧first elastic element

1112m‧‧‧Second elastic element

1112p‧‧‧stop

1118‧‧‧First Drive

1119‧‧‧ Magnetic Fluid Device

1120a‧‧‧Vertical shaft

1120b‧‧‧ support rod

112‧‧‧Drop-down component

1121‧‧‧First support

1122‧‧‧First guide nut

1123‧‧‧The first vertical lead screw

1124‧‧‧Second Drive

1125‧‧‧Gear Set

120‧‧‧horizontal pull-back mechanism

120A, 120B‧‧‧Guide

121‧‧‧ Diaphragm holding assembly

1211a‧‧‧First clamp seat

1211b‧‧‧Second clamp seat

1212a‧‧‧First clamp lever

1212b‧‧‧Second Clamp Rod

1213‧‧‧Drive

1214‧‧‧first horizontal shaft

1215a‧‧‧Second guide nut

1215b‧‧‧Third guide nut

1215c‧‧‧Fourth guide nut

1215d‧‧‧Fifth guide nut

1216a‧‧‧first horizontal lead screw

1216b‧‧‧Second horizontal lead screw

1217‧‧‧Third driver

1218‧‧‧ Carrier

1219‧‧‧slide

1220‧‧‧Buffer

125‧‧‧back pull assembly

1251‧‧‧Second support

1252‧‧‧Sixth guide nut

1253‧‧‧third horizontal lead screw

1254‧‧‧Fourth Drive

D1‧‧‧ vertical

D21‧‧‧First horizontal direction

D22‧‧‧Second horizontal direction

D23‧‧‧ Third horizontal direction

V1‧‧‧ perspective

FIG. 1A is a schematic diagram of a roll-to-roll continuous process equipment according to an embodiment of the present invention.

FIG. 1B is a schematic diagram of the film tearing device of FIG. 1 (the continuous coil is not shown).

FIG. 1C is a schematic view of the continuous coil and the cover film attached to it from the perspective V1 of FIG.

FIG. 1D is a schematic diagram of the vertical pull-down mechanism 110 in FIG. 1A.

Figures 1E and 1F show enlarged views of the first jaw set of Figure 1D.

Figure 1G shows a top view of the vertical pull-down mechanism of Figure 1D.

FIG. 2A is a schematic diagram showing that the connecting plate in FIG. 1G is stopped by a stop.

FIG. 2B is a schematic diagram showing the movement of the first jaw group and the second jaw group to the clamping position in FIG. 2A

FIG. 3A is a schematic diagram illustrating that the first pushing member in FIG. 2A continues to move in the second horizontal direction.

FIG. 3B is a schematic diagram of the first clamping jaw and the second clamping jaw being clamped in FIG. 1F.

Figures 3C ~ 3E are schematic diagrams of the first jaw and the second jaw pairing in Figure 2B.

FIG. 4 is a schematic diagram of the vertical movement of the pull-down component of FIG. 3E.

Figures 5A-5D are schematic diagrams of the horizontal pull-back mechanism of Figure 1A.

Figures 6A ~ 6B are schematic views of the first clamping rod and the second clamping rod in Figure 5D holding the film body covering the diaphragm.

FIG. 7 is a schematic diagram of the cover film of FIG. 6B being pulled back by the back-drawing component to the first horizontal direction.

Please refer to FIGS. 1A to 1C. FIG. 1A shows a schematic diagram of a roll-to-roll continuous process equipment 10 according to an embodiment of the present invention, and FIG. 1B shows a schematic diagram of the film tearing device 100 of FIG. 1C), and FIG. 1C shows a schematic view of the continuous coil 20 and the cover film 22 adhered to it from the perspective V1 of FIG. 1A. In order to avoid that the lines of the diagram are too complicated, not every diagram in the present application is drawn with a continuous coil 20 and a cover film 22.

The roll-to-roll continuous process equipment 10 can be applied to a continuous roll-to-roll (R2R) as one of the processes of a semiconductor device (such as an organic light emitting diode). In this embodiment, the roll-to-roll continuous process equipment 10 can be applied to Unwinding step of plasma-assisted chemical vapor deposition (PECVD) process. In the unwinding step, the roll-to-roll continuous process equipment 10 can tear the cover film 22 from the continuous roll 20 to expose the semiconductor structure 21 formed on the continuous roll 20, so as to facilitate the next step. Such as plasma-assisted chemical vapor deposition. The cover film 22 here is, for example, a TD film.

As shown in FIG. 1A, the roll-to-roll continuous process equipment 10 includes a roll-return box 11, a roller 12, at least one sealing cover 13, and a film tearing device 100. The device 100 is partially disposed in the unwinding cavity 11a. The roller 12 can guide the continuous web 20 through the film tearing device 100. As shown in FIG. 1C, a plurality of semiconductor structures 21, such as a layer structure of an organic light emitting diode, are formed on one side of the continuous coil material 20. The cover film 22 is adhered to the same side of the continuous web 20 to cover and seal the semiconductor structures 21. In this way, the semiconductor structures 21 can be prevented from being damaged by the environment due to exposure when the semiconductor structures 21 are unrolled outside. In one embodiment, the cover film 22 can reach the specification of the water blocking gas rate of less than 5 × 10 ^-6 g / m ² / day to maintain the reliability of the semiconductor structures 21. When the continuous roll material 20 enters the unwinding cavity 11a, the film tearing device 100 can remove the tear-off cover film 22 from the continuous roll material 20 to expose the semiconductor structure 21, so that the semiconductor process of the next step can be performed. . In order to avoid product damage caused by contact with water and / or oxygen before the next process, the unwinding cavity 11a is maintained in a vacuum state during the film tearing process.

As shown in FIG. 1A, the sealing cover 13 is disposed on the unwinding box 11 to maintain the vacuum degree of the unwinding chamber 11 a.

In addition, as shown in FIG. 1C, the cover film 22 includes a film body 221 connected to the first ear portion 222 and a second ear portion 223 opposite to each other. When the cover film 22 is adhered to the continuous roll material 20, the first ear portion 222 and the second ear portion 223 of the cover film 22 protrude from the sides of the continuous roll material 20 to allow the film tearing device 100 to hold. . Since the first ear portion 222 and the second ear portion 223 protrude from the side of the continuous roll material 20, the film tearing device 100 does not grip the continuous roll material 20 when gripping the ear portion.

As shown in FIG. 1A, the film tearing device 100 includes a vertical pull-down mechanism 110 and a horizontal back-pull mechanism 120. The vertical pull-down mechanism 110 can clamp the first ear 222 and the second ear 223, and pull the cover film 22 in the vertical direction D1. Then, the horizontal back pull mechanism 120 can hold the film body 221 covering the film 22, and then The first horizontal direction D21 pulls the film body 221 to tear the cover film 22 from the continuous roll material 20. In this way, the film tearing device 100 can tear the cover film 22 from the continuous roll material 20 in two perpendicular directions.

Please refer to Figs. 1D to 1G and 2A and 2B. Fig. 1D shows a schematic diagram of the vertical pull-down mechanism 110 of Fig. 1A. Figs. 1E and 1F show an enlarged view of the first jaw group 1112 of Fig. 1D. FIG. 1G is a top view of the vertical pull-down mechanism 110 in FIG. 1D. The difference between FIG. 1F and FIG. 1E is that the connecting plate 1112g is not shown in FIG. 1F to show the inclined surface 1112s of the pushing member 1112f and the second elastic element 1112m. FIG. 2A shows a schematic view of the connecting plate 1112g of FIG. 1G being stopped by the stopper 1112h, and FIG. 2B shows the movement of the first jaw group 1112 and the second jaw group 1113 of FIG. 2A to the clamping position. schematic diagram.

As shown in the 1D diagram, the vertical pull-down mechanism 110 includes an ear clamp The component 111 and the pull-down component 112, wherein the ear-clamping component 111 is used to hold the first ear 222 (shown in FIG. 1C) and the second ear 223 (shown in FIG. 1C), and the pull-down component 112 The cover film 22 (not shown) is pulled in the vertical direction D1.

As shown in FIG. 1D, the ear clamping assembly 111 includes a first stage 1111, a first jaw group 1112, a second jaw group 1113, a first rack 1114, a second rack 1115, and a driving gear 1116. The first jaw group 1112, the second jaw group 1113, the first rack 1114, the second rack 1115, and the driving gear 1116 may be disposed on the first stage 1111 to follow the first stage 1111 in the vertical direction D1. Move (shown in Figure 1A).

As shown in Fig. 1D, the first rack 1114 is connected to the first jaw set 1112 and extends along the second horizontal direction D22. The second horizontal direction D22 and the first horizontal direction D21 (shown in Fig. 1A) and the vertical direction D1 (shown in Figure 1A) is approximately vertical. The second rack 1115 is connected to the second jaw set 1113 and extends along the third horizontal direction D23. The third horizontal direction D23 is substantially parallel but opposite to the second horizontal direction D22. The driving gear 1116 is located between the first rack 1114 and the second rack 1115 and meshes with the first rack 1114 and the second rack 1115. In this way, when the driving gear 1116 rotates, the first rack 1114 can be moved (translated) in the second horizontal direction D22 and the second rack 1115 is moved in the third horizontal direction D23 at the same time, and then the first jaw group 1112 can be driven at the same time. Move along the second horizontal direction D22 and the second jaw group 1113 move along the third horizontal direction D23 until the first jaw group 1112 and the second jaw group 1113 move to a position that can hold the first ear 222 and the first jaw respectively. The clamping position of the two ears 223.

As shown in FIGS. 1E and 1F, the first jaw set 1112 includes a first jaw 1112a, a second jaw 1112b, a first gear 1112c, a second gear 1112d, a push rod 1112e, a pusher 1112f, a connecting plate 1112g, The stopper 1112h, the first elastic element 1112n (illustrated in FIG. 1D), the second elastic element 1112m, and the stopper 1112p (illustrated in FIG. 1D). The first clamping jaw 1112a, the second clamping jaw 1112b, the first gear 1112c, and the second gear 1112d are pivotally connected to the connecting plate 1112g.

As shown in FIG. 1G, when the first rack 1114 is connected to the pushing member 1112f, when the first rack 1114 is moved in the second horizontal direction D22, the pushing member 1112f can be moved in the second horizontal direction D22 at the same time. The first elastic element 1112n connects the front end of the pushing member 1112f and the connecting plate 1112g. Thus, when the pushing member 1112f moves in the second horizontal direction D22, the first elastic member 1112n can pull the connecting plate 1112g and move to the second horizontal direction D22 at the same time. Then, the first clamping jaw 1112a, the second clamping jaw 1112b, the first gear 1112c, and the second gear 1112d pivoted on the connecting plate 1112g are moved to the second horizontal direction D22 as shown in FIGS. 2A and 2B. Clamping position. In addition, the first elastic element 1112n in FIG. 1G may be in an initial state (free-length state) or in a pre-tensioned state.

As shown in Figs. 2A and 2B, the stopper 1112h is arranged on the first carrier 1111 and is located on the moving path of the connecting plate 1112g. , The stop connecting plate 1112g continues to advance in the second horizontal direction D22.

Please refer to FIGS. 3A to 3E. FIG. 3A shows a schematic diagram of the second pusher 1112f in FIG. 2A continuing to move to the second horizontal direction D22, and FIG. 3B shows FIG. 1F shows the schematic diagram of the first clamping jaw 1112a and the second clamping jaw 1112b, and FIGS. 3C to 3E show the schematic diagram of the first clamping jaw 1112a and the second clamping jaw 1112b in FIG. 2B.

As shown in FIG. 3A, the first rack 1114 is connected to the pusher 1112f. Thus, even if the connecting plate 1112g is stopped by the stopper 1112h, under the continued driving of the drive gear 1116, the first rack 1114 continues to drive the pusher 1112f moves to the second horizontal direction D22 until it is stopped by the stopper 1112p. The stopper portion 1112p is disposed on the first stage 1111 and is located on the moving path of the pusher 1112f, so the pusher 1112f can be stopped.

As shown in FIG. 3B, the push rod 1112e includes a first end 1121e1 and a second end 1121e2. The first end 1121e1 is pivotally connected to the first clamping jaw 1112a. The pushing member 1112f has a wedge-shaped structure. For example, the pushing member 1112f has an inclined surface 1112s (shown in FIG. 1F). When the pusher 1112f continues to move in the second horizontal direction D22, the inclined surface 1112s pushes the second end 1121e2 of the push rod 1112e to move upward, thereby driving the first clamping jaw 1112a to rotate until the first clamping jaw 1112a and the second clamping jaw 1112b Facing. When the first clamping claw 1112a and the second clamping claw 1112b are clamped, the first ear portion 222 (not shown) is clamped between the first clamping claw 1112a and the second clamping claw 1112b.

The second elastic element 1112m connects the second end 1112e2 of the push rod 1112e and the first jaw 1112a. When the second end 1112e2 of the push rod 1112e moves upward, the second elastic element 1112m is compressed and deformed, and the elastic potential energy is stored. When the push rod 1112e is reset (for example, the driver is reversed), the second elastic element 1112m releases the elastic potential energy to help the push rod 1112e to reset.

As shown in FIGS. 3B and 3C, the first clamping claw 1112a and the second clamping claw 1112b are pivotally connected to the two different pivotal contact points of the connecting plate 1112g (the connecting plate 1112g is shown in FIG. 1E). For example, the first clamping jaw 1112a and the second clamping jaw 1112b include a first pivot shaft 1112j and a second pivot shaft 1112k, respectively, wherein the first pivot shaft 1112j and the second pivot shaft 1112k are respectively different from the second pivot plate 1112g. point. The axis of the first gear 1112c is fixed to the first pivot 1112j, so that the first gear 1112c and the first jaw 1112a can rotate concentrically. The axis of the second gear 1112d is fixed to the second pivot shaft 1112k, so that the second gear 1112d and the second jaw 1112b can rotate concentrically. In addition, the first gear 1112c is meshed with the second gear 1112d. In this way, when the first gear 1112c rotates, the second gear 1112d can be driven to rotate, and then the first jaw 1112a and the second jaw 1112b can be rotated at the same time and can be clamped . As shown in FIG. 3C, when the first jaw 1112a and the second jaw 1112b of the first jaw group 1111 are clamped, and when the first jaw 1112a and the second jaw 1112b of the second jaw group 1113 are clamped, , The first ear portion 222 and the second ear portion 223 of the cover film 22 can be clamped respectively.

As shown in FIG. 3A, the first elastic element 1112 n connects the pusher 1112 f and the connection plate 1112 g. When the first rack 1114 continues to drive the pushing member 1112f to move in the second horizontal direction D22, the connecting member 1112g is stopped by the stopper 1112h and does not move, so the pushing member 1112f lengthens the first elastic element 1112n. The first elastic element 1112n is deformed to store elastic potential energy. When the ear clamping assembly 111 returns (when the driving gear 1116 is reversed) to the initial position (as shown in FIG. 1G), the first elastic element 1112n releases the elastic potential energy, and helps the pusher 1112f return to the first position. The initial position shown in Figure 1G.

In addition, the structure and operating principle of the second clamping jaw group 1113 are the same as or similar to those of the first clamping jaw group 1112, and details are not described herein again.

As shown in FIGS. 3D and 3E, the ear clamping assembly 111 further includes a first driver 1118, a magnetic fluid device 1119, a vertical rotation shaft 1120a, and at least one support rod 1120b. The vertical rotation shaft 1120a is connected to the driving gear 1116. The first driver 1118 can drive the vertical rotation shaft 1120a to rotate, so as to drive the driving gear 1116 to rotate. The first driver 1118 is, for example, a motor. The support rod 1120b is connected to the first carrier 1111 and the pull-down component 112, so that the first carrier 1111 can be pulled down by the pull-down component 112 through the support rod 1120b. The vertical rotating shaft 1120a is penetrated through the magnetic fluid device 1119, and the vacuum property of the unwinding cavity 11a can be maintained.

As shown in FIG. 3D, the vertical pull-down mechanism 110 further includes at least one bellows 110A. A plurality of bellows 110A are sleeved on the vertical rotating shaft 1120a and the supporting rod 1120b. The bellows 110A is connected to the sealing cover 13 and the first support member 1121 of the pull-down assembly 112. The bellows 110A is expandable to allow a relative amount of movement of the sealing cover 13 and the first support 1121.

Please refer to FIG. 4, which is a schematic diagram illustrating the movement of the pull-down component 112 in the vertical direction D1 in FIG. 3E. When the first ear portion 222 and the second ear portion 223 are clamped by the first jaw group 1112 and the second jaw group 1113, respectively, the pull-down component 112 can be moved in the vertical direction D1 to drive the ear clamping component 111 along The vertical direction D1 is moved to tear off a part of the cover film 22 from the continuous web 20 as shown in FIG. 4.

As shown in FIGS. 4 and 3D, the pull-down assembly 112 includes a first support member 1121, a first guide nut 1122, a first vertical lead screw 1123, and a second driver. 1124. The first support 1121 is connected to the first stage 1111 of the ear clamping assembly 111 through the support rod 1120b. The first guide nut 1122 is fixed on the first support member 1121. The first vertical lead screw 1123 is pivotally connected at both ends in the vertical direction D1 and is screwed to the first guide nut 1122 to rotate under the driving of the second driver 1124 and drive the first stage 1111 up and down in the vertical direction D1. mobile. The second driver 1124 is, for example, a motor.

In detail, the second driver 1124 can drive the first vertical lead screw 1123 to rotate through a gear set 1125 (shown in FIG. 3E). The gear set 1125 is, for example, a helical gear set. When the first vertical lead screw 1123 is rotated in place, the first support nut 1122 is fixed on the first support member 1121 and the rotation of the first support member 1121 is restricted, so the first support member 1121 is subject to the first guide nut. The 1122 drive moves up and down in the vertical direction D1. Because the aforementioned first stage 1111 connects the ear clamping component 111 and the first support member 1121, when the first support member 1121 moves downward in the vertical direction D1, the ear clamping component 111 follows in the vertical direction D1. Move downward to tear off part of the cover film 22 in the vertical direction D1, as shown in FIG. 4.

Please refer to Figs. 5A to 5D and 6A to 6B. Figs. 5A to 5D show schematic diagrams of the horizontal pull-back mechanism 120 in Fig. 1A, and Figs. 6A to 6B show the first clamping rod 1212a and the first drawing in Fig. 5D. A schematic view of the two clamping rods 1212 b holding the film body 221 covering the film sheet 22.

The horizontal back-pulling mechanism 120 includes a membrane clamping assembly 121 and a back-pulling assembly 125, wherein the membrane clamping assembly 121 is configured to clamp a membrane body 221 covering the membrane 22, Then, the rear pulling component 125 is used to pull the film body 221 in the first horizontal direction D21 to completely remove the cover film 22 from the continuous roll material 20.

As shown in FIGS. 5A to 5C, the diaphragm clamping assembly 121 includes a first clamping base 1211aa, a second clamping base 1211b, a first clamping lever 1212a, a second clamping lever 1212b, a transmission group 1213, a first horizontal rotating shaft 1214, Second guide nut 1215a, third guide nut 1215b, fourth guide nut 1215c, fifth guide nut 1215d, first horizontal lead screw 1216a, second horizontal lead screw 1216b, third driver 1217, carrier 1218, and slide 1219 .

As shown in FIG. 5A, the first clamp lever 1212a and the second clamp lever 1212b are respectively disposed on the first clamp base 1211a and the second clamp base 1211b to move with the first clamp base 1211a and the second clamp base 1211b. Since the first clamp lever 1212a and the second clamp lever 1212b are oppositely disposed, the two opposite sides of the film body 221 covering the diaphragm 22 can be clamped respectively. The transmission group 1213 is disposed on the carrier 1218. The carrier 1218 is fixed on the slide base 1219 to move back and forth along the first horizontal direction D21 with the slide base 1219. The two ends of the first horizontal rotating shaft 1214 are respectively connected to the third driver 1217 and the transmission group 1213 along the first horizontal direction D21, so that the first horizontal rotating shaft 1214 can drive the driving group 1213 to be driven by the third driver 1217. The third driver 1217 is, for example, a motor. When the transmission group 1213 is running, the first clamp base 1211a and the second clamp base 1211b can be brought close to each other.

The first clamp base 1211a and the second clamp base 1211b can be connected through the first horizontal lead screw 1216a and the second horizontal lead screw 1216b. As shown in FIG. 5A, the second guide nut 1215a and the fourth guide nut 1215c are disposed on the first clamp seat 1211a. The first horizontal lead screw 1216a is screwed to the second lead nut 1215a and the fourth lead nut 1215c to connect the first clamp base 1211a and the second clamp base 1211b. As shown in FIG. 5B, the third guide nut 1215b and the fifth guide nut 1215d are arranged in the second clamp seat 1211b, and the second horizontal guide screw 1216b is screwed to the third guide nut 1215b and the fifth guide nut 1215d to connect the first guide nut 1215b and the fifth guide nut 1215d. A clip base 1211a and a second clip base 1211b.

When the first horizontal rotating shaft 1214 rotates, the drive group 1213 can be driven to drive the first horizontal lead screw 1216a and the second horizontal lead screw 1216b to rotate at the same time. Because the guide nut (the second guide nut 1215a, the third guide nut 1215b, the third guide screw) The nut 1215b and the fourth guide nut 1215c) do not move, so the first clamp base 1211a and the second clamp base 1211b are driven to move (translate) in a direction approaching each other until the first clamp lever 1212a and the second clamp are arranged on it. The rod 1212b holds the membrane body 221 as shown in FIGS. 6A and 6B.

As shown in FIG. 6B, the diaphragm clamping assembly 121 further includes two buffer members 1220. The two buffer members 1220 are respectively disposed on the first horizontal lead screw 1216a and the second horizontal lead screw 1216b, and are located between the first clamp base 1211a and the second clamp base 1211b. In this way, when the first clamp base 1211a and the second clamp base 1211b are close to each other until the first clamp lever 1212a and the second clamp lever 1212b are clamped, the first clamp base 1211a and the second clamp base 1211b press the buffer member 1220. The buffer member 1220 can buffer the clamping force of the first clamping lever 1212a and the second clamping lever 1212b, and avoid excessive pressure on the cover film 22 by the first clamping lever 1212a and the second clamping lever 1212b.

As shown in FIG. 5A, the horizontal pull-back mechanism 120 further includes at least one guide rod 120A. The first clamp base 1211a and the slide base 1218 are slidably disposed on the guide. On the lever 120A, the first clamp base 1211a and the second clamp base 1211b connected to the slide base 1218 are caused to slide relative to the guide lever 120A with low resistance.

In addition, as shown in FIGS. 5A and 5B, the transmission group 1213 is, for example, a gear chain transmission assembly, and is arranged on the carrier 1218. The transmission group 1213 includes a plurality of sprocket wheels and a chain, which are configured to drive the first horizontal lead screw 1216a and the second horizontal lead screw 1216b to rotate at the same time. The carrier 1218 is fixed on the sliding base 1219 to move with the sliding base 1219. The carrier 1218 and the first clamp base 1211a are not fixed, so they can move relative to each other. In this way, when the first clamp base 1211a moves in the direction of the second clamp base 1211b, the first clamp base 1211a will not be subject to the slide base. The restriction of 1219 can smoothly access the second clamp base 1211b, so that the first clamp lever 1212a and the second clamp lever 1212b can be smoothly clamped.

After the first clamping rod 1212a and the second clamping rod 1212b hold the film body 221, the rear pull-up assembly 125 of the horizontal back-drawing mechanism 120 can pull the film body 221 back along the first horizontal direction D21 to cover the film 22 It is completely torn from the continuous web 20.

Please refer to FIGS. 5A and 7. FIG. 7 is a schematic diagram illustrating that the cover film 22 in FIG. 6B is pulled back by the pull-back component 125 toward the first horizontal direction D21. The rear pull assembly 125 includes a second support member 1251, a sixth guide nut 1252, a third horizontal lead screw 1253, and a fourth driver 1254.

The third driver 1217 of the diaphragm clamping assembly 121 is fixed on the second support 1251. The first horizontal rotating shaft 1214 of the clamping assembly 121 is connected to the third driver 1217 through the second support 1251. In this way, when the second support 1251 moves in the first horizontal direction D21, the third driver 1217 and the first horizontal rotating shaft 1214 can be moved along the first horizontal direction D21 with the second support 1251.

As shown in FIG. 5A, the sixth guide nut 1252 is disposed on the second support 1251. The third horizontal lead screw 1253 is screwed to the sixth lead nut 1252 to drive the diaphragm clamping assembly 121 to move forward and backward in the first horizontal direction D21. In detail, the fourth driver 1254 can drive the third horizontal lead screw 1253 to rotate. The fourth driver 1254 is, for example, a motor. Since the sixth guide nut 1252 is fixed on the second support member 1251 and does not move, the second support member 1251 is driven to move back and forth along the first horizontal direction D21. Since the diaphragm holding assembly 121 and the second supporting member 1251 have no relative movement relationship with each other, when the second supporting member 1251 moves backward in the first horizontal direction D21, the diaphragm holding assembly 121 can be driven to the first level The direction D21 is moved backward to completely remove the cover film 22 from the continuous roll 20 as shown in FIG. 7.

In summary, it can be known that the film tearing device 100 according to the embodiment of the present invention can provide a vacuum environment, and the film tearing action can be completed in a vacuum environment, which can reduce the damage to the semiconductor structure 21 formed on the continuous coil 20 and minimize the damage. In addition, the film tearing device 100 can tear the cover film 22 from the continuous roll material 20 in two perpendicular directions. Therefore, the film tearing device 100 can be adapted to operate in a vacuum chamber with limited space or a non-narrow type. .

After the cover film 22 is completely removed from the continuous web 20, the first driver 1118, the second driver 1124, the third driver 1217, and the fourth driver 1254 can be reversed to return to the initial position (such as the first 1A ~ 1G position). Then, the next cover film 22 adhered to the continuous web 20 is transferred to the vertical pull-down mechanism 110 of the tearing device 100, and then the above steps are repeated to tear In addition, the next sheet covers the film sheet 22.

As shown in FIG. 5A, the horizontal pull-back mechanism 120 further includes at least one guide rod 120B. The second support 1251 is slidably disposed on the guide rod 120B, and the second support 1251 slides the guide rod 120B with low resistance.

In summary, although the present invention has been disclosed as above with the embodiments, it is not intended to limit the present invention. Those with ordinary knowledge in the technical field to which the present invention pertains can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the scope of the attached patent application.

Claims (20)

A film tearing device includes: a vertical pull-down mechanism, including: an ear clamping component for clamping an ear of a cover film, the cover film includes a film body connected to the ear; And a pull-down component for pulling down the cover film in a vertical direction; and a horizontal back-pulling mechanism including: a diaphragm-clamping component for holding the membrane body; and a back-pulling component for The cover film is pulled in a first horizontal direction to tear the cover film from a continuous roll. The film tearing device described in item 1 of the scope of the patent application is suitable for tearing off the cover film on the continuous roll in a vacuum environment. The film tearing device according to item 1 of the scope of the patent application, wherein the ear portion of the cover film protrudes outward relative to the edge of the continuous coil. The film tearing device according to item 1 of the scope of patent application, wherein the ear clamping component comprises: a first clamping jaw group; a first rack connected to the first clamping jaw group and along a second horizontal direction Extending, the second horizontal direction is perpendicular to the first horizontal direction; a second clamping jaw group; and a second rack connected to the second clamping jaw group and extending along a third horizontal direction, the third horizontal direction It is parallel but opposite to the second horizontal direction; a driving gear is engaged with the first rack and the second rack, respectively, to drive the first rack to move in the second horizontal direction, thereby driving the first A gripper group moves along the second horizontal direction, and drives the second rack to move along the third horizontal direction, thereby driving the second gripper group to move along the third horizontal direction. According to the film tearing device described in item 4 of the patent application scope, wherein the cover film includes two ears, the two ears respectively protrude outward relative to two opposite edges of the continuous coil, and the first jaw group and The second clamping jaw set is used for clamping the two ears respectively. The film tearing device according to item 4 of the scope of patent application, wherein the driving gear is located between the first rack and the second rack to simultaneously drive the first jaw group to move along the second horizontal direction and The second jaw group moves in the third horizontal direction. The film tearing device according to item 4 of the scope of patent application, wherein the first clamping jaw group includes: a first clamping jaw; a second clamping jaw; a push rod including a first end and a second end, The first end is pivotally connected to the first clamping jaw; and a pushing member has an inclined surface for pushing the second end of the push rod, so that the first end of the push rod pushes the first clamp The claw rotates to clamp the second clamping claw. The film tearing device according to item 4 of the scope of patent application, wherein the first clamping jaw group further comprises: a connecting plate, the first clamping jaw and the second clamping jaw are pivotally connected to the connecting plate; a stopper, It is located on the moving path of the connecting plate to stop the connecting plate. The film tearing device according to item 8 of the scope of the patent application, wherein the first clamping jaw and the second clamping jaw are pivotally connected to two different pivotal joints of the connecting plate. The film tearing device according to item 8 of the scope of patent application, wherein the first clamping jaw group further comprises: a first elastic element connected to the connecting plate and the pushing member; a second elastic element connected to the first clip A claw and the second end of the push rod; a first gear fixed to the first clamping jaw; and a second gear fixed to the second clamping jaw and meshing with the first gear. The film tearing device according to item 4 of the scope of patent application, wherein the ear clamping assembly includes a first carrier, and the first carrier carries the first jaw group, the driving gear, and the first rack. . The film tearing device according to item 1 of the scope of patent application, wherein the pull-down assembly includes: a first support member connected to the first carrier; a first guide nut disposed on the first support member; and a first A vertical lead screw is fixed at both ends along the vertical direction, and is screwed to the first guide nut to drive the first carrier and the first support member to move in the vertical direction. The film tearing device according to item 1 of the patent application scope, wherein the pull-down assembly includes a driver, and the driver drives the first vertical lead screw through a gear set. The film tearing device according to item 1 of the scope of patent application, wherein the diaphragm clamping assembly includes: a first clamping base; a first clamping rod; arranged on the first clamping base; a slide base; A seat is fixed on the slide seat and is movably arranged relative to the first clamp seat; a transmission group is arranged on the carrier seat; a second clamp seat; a second clamp rod; arranged on the second The clamping base is disposed opposite to the first clamping rod; and a first horizontal rotating shaft is connected to the transmission group along the first horizontal direction. The film tearing device according to item 14 of the scope of patent application, wherein the diaphragm clamping assembly includes a second guide nut, a third guide nut, a fourth guide nut, and a fifth guide nut, and the second guide nut And the third guide nut is disposed on the first clamp seat, the third guide nut and the fourth guide nut are disposed on the second clamp seat; the diaphragm clamping assembly includes: a first horizontal guide screw, screwed A second guide nut and the fourth guide nut; and a second horizontal lead screw that is screwed to the third and fifth guide nuts; wherein the transmission group is used to drive the first horizontal lead screw The rotation and the second horizontal lead screw rotate to drive the first clamp base and the second clamp base to approach each other. The film tearing device according to item 15 of the scope of patent application, wherein the transmission group is a gear chain transmission assembly. The film tearing device according to item 14 of the scope of patent application, further includes a driver, which is used to drive the first horizontal rotating shaft to drive the transmission group to operate. The film tearing device according to item 1 of the scope of patent application, wherein the back-pulling component includes: a second support member connected to the diaphragm clamping component; a sixth guide nut disposed on the second support member; And a third horizontal lead screw screwed to the sixth guide nut to drive the diaphragm clamping assembly to move in the first horizontal direction. According to the film tearing device described in item 18 of the scope of the patent application, wherein the back pull assembly further includes a driver for driving the third horizontal lead screw to rotate. The film tearing device according to item 1 of the patent application scope, wherein the horizontal pull-back mechanism further includes at least one guide rod.