TWI657615B - Light-weight proton exchange membrane cell structure and method for manufacturing collectors of fuel cells - Google Patents

Light-weight proton exchange membrane cell structure and method for manufacturing collectors of fuel cells Download PDF

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TWI657615B
TWI657615B TW106146588A TW106146588A TWI657615B TW I657615 B TWI657615 B TW I657615B TW 106146588 A TW106146588 A TW 106146588A TW 106146588 A TW106146588 A TW 106146588A TW I657615 B TWI657615 B TW I657615B
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photoresist
current collector
fuel cell
thin film
layer
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TW201931650A (en
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管衍德
呂俊龍
李興儒
柯廷儒
林煌恩
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國立勤益科技大學
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

本發明中,將石墨薄膜應用於質子交換膜燃料電池之集電板,以提升集電板的抗腐蝕性,進而維持燃料電池長時間運作的穩定性。於一實施例中,在製作該集電板的過程中,以FR4/Epoxy複合材料做為基材,在表面製作出集電層與抗腐蝕層。其中集電層是以熱蒸鍍法鍍上銅薄膜,石墨薄膜作為抗腐蝕層,以提升抗腐蝕性。本發明其他實施例提供了射頻磁控濺鍍、網板印刷、旋轉塗佈等三種不同方法製作集電板的石墨薄膜抗腐蝕層。 In the present invention, a graphite thin film is applied to a current collector plate of a proton exchange membrane fuel cell to improve the corrosion resistance of the current collector plate, thereby maintaining the stability of the fuel cell's long-term operation. In an embodiment, in the process of manufacturing the current collector plate, a FR4 / Epoxy composite material is used as a base material, and a current collector layer and an anti-corrosion layer are formed on the surface. The current collector layer is coated with a copper film by a thermal evaporation method, and a graphite film is used as an anti-corrosion layer to improve the corrosion resistance. Other embodiments of the present invention provide three different methods, such as radio frequency magnetron sputtering, screen printing, and spin coating, to produce a graphite film anticorrosive layer for a current collector plate.

Description

輕量化質子交換膜之電池結構及燃料電池之集 電板的製造方法 Lightweight Proton Exchange Membrane Cell Structure and Fuel Cell Collection Manufacturing method of electric board

本發明係關於一種燃料電池技術,特別有關一種輕量化質子交換膜之電池結構及一種燃料電池之集電板的製造方法。 The invention relates to a fuel cell technology, in particular to a battery structure of a lightweight proton exchange membrane and a method for manufacturing a current collecting plate of a fuel cell.

(一)微型燃料電池的發展 (I) Development of micro fuel cells

近年來,可攜式電子產品的發展突飛猛進,相關的科技也不斷地創新研發,如筆記型電腦越做越輕薄,同時也邁入了平板式觸控電腦;手機由傳統演進到智慧型手機;同時雲端技術的發達,使得各種通訊軟體、線上遊戲與應用軟體,也持續地被開發出來且廣泛地應用於智慧型手機、平板電腦或筆記型電腦等。因此人們越來越多元化地使用可攜式電子產品,使用者也已分佈於各年齡與社會階層,相對而言,人類對於可攜式電子產品的依賴程度也逐步升高到成為大多數人生活或工作中的必需品,且每日的使用時間也逐步拉長,也就是無論在家中、工作、學校、逛街、用餐等,皆會帶著各式的可攜式電子產品。隨著可攜式電 子產品多元化的發展,其電力的持久與補充變得非常重要,所以各公司投入許多研發在提升二次電池的容量,並同時減少其體積。然而在追求二次電池(如鋰電池)輕薄短小且高容量時,也有可能造成二次電池發生自燃或爆炸的危險,二次電池的安全性受到大家的關注。當二次電池的持續發展,必定將會達到極限容量,所以可以預期到以燃料電池做為可攜式電子產品的充電裝置,增加其發電容量,將是未來科技發展與應用的一項重要主題。許多的電子公司,尤其是日本公司,皆推出了可攜式的燃料電池發電系統,提供攜帶式電子裝置如筆記型電腦、手機等充電使用,如Sony、Toshiba、Hitachi、NEC、Fujikura、Yamaha等公司,也就是幾乎著名的大公司,皆曾致力發展過可攜式燃料電池。 In recent years, the development of portable electronic products has advanced by leaps and bounds, and related technologies have also been continuously innovated. For example, as notebook computers become thinner and lighter, they have also entered into tablet-type touch computers; mobile phones have evolved from traditional to smart phones; At the same time, due to the development of cloud technology, various communication software, online games and application software have been continuously developed and widely used in smart phones, tablet computers or notebook computers. As a result, people are increasingly diversifying in the use of portable electronic products, and users have been distributed across all ages and social classes. Relatively speaking, the dependence of humans on portable electronic products has gradually increased to become the majority Necessities in life or work, and the daily use time is gradually extended, that is, no matter at home, work, school, shopping, dining, etc., all kinds of portable electronic products will be brought. With portable electricity With the diversified development of sub-products, the long-term and replenishment of electricity has become very important. Therefore, companies have invested a lot of research and development to increase the capacity of secondary batteries and reduce their volume at the same time. However, when pursuing secondary batteries (such as lithium batteries) that are thin, short, and high-capacity, they may also cause the danger of spontaneous combustion or explosion of secondary batteries, and the safety of secondary batteries has attracted everyone's attention. When the secondary battery continues to develop, it will certainly reach its limit capacity, so it can be expected that using fuel cells as a charging device for portable electronic products and increasing its power generation capacity will be an important theme for future scientific and technological development and application. . Many electronics companies, especially Japanese companies, have launched portable fuel cell power generation systems that provide portable electronic devices such as notebook computers and mobile phones for charging, such as Sony, Toshiba, Hitachi, NEC, Fujikura, Yamaha, etc. The company, which is almost a well-known large company, has been committed to developing portable fuel cells.

燃料電池之所以受到重視,就是其利用電化學直接轉換燃料為電能,不需要經過燃燒反應,因此不會受到卡諾循環的限制,也不會有繁雜的機械組件進行發電,同時燃料來源主要是利用氫作為能量來源,其副產物主要是水,所以燃料電池具備能量轉換效率高、低汙染、低噪音、構造簡單等優點。此外,燃料電池本身較類似於一部發電機而不同於二次電池,其活性物質不是存在於本體,無需充電後再進行放電,而僅需不斷地補充活性物質(燃料),即可持續發電。對於微型可攜式燃料電池的發展,直接甲醇燃料電池(Direct Methanol Fuel Cell,DMFC)是一種重要的技術,DMFC使用甲醇水溶液而非氫氣,可使用普通的溶液罐而非高壓儲氫瓶或儲氫合金罐等來儲存燃料,所以具備了易於儲 存與攜帶燃料的優點,也省去了許多控制氣體的閥件,使整個系統更為簡單與輕便。雖然有上述的許多優點,但是相較於一般使用氫氣做為燃料的質子交換膜燃料電池(Proton Exchange Membrane Fuel Cell,PEMFC),DMFC所需要的觸媒量高出許多,導致成本較高。此外,由於陽極端反應時要避免電化學反應過程中的觸媒鉑(Pt)中間產物一氧化碳(CO)毒化,因此在觸媒會加入釕(Ru)來抑制CO的毒化作用,但也導致發電效能下降。DMFC反應時陽極會有二氧化碳(CO2)的產生,在甲醇燃料水溶液中就會形成氣泡,容易造成管路中的阻塞,因此CO2的移除也成為DMFC運作時相當大的問題。甲醇也容易由陽極穿透質子交換膜到陰極端,此為甲醇穿透(Methanol Crossover)的問題,造成DMFC效能下降與陰極Pt觸媒的毒化,所以進入DMFC本體的,往往都是低濃度的甲醇水溶液,一般濃度都不高於10%vol.。在陰極產物方面,由於DMFC的電化學反應,在陰極會產生較多量的水,因此避免水氾濫(Flooding)也是在DMFC運作時需要特別注意的地方。所以DMFC雖然系統看似簡單,但是在陽極流道、陰極流道及空氣的流速與流量等,皆需要有適當的設計與控制,否則其性能與穩定性將受到嚴重的影響。然而單cell的DMFC操作電壓,往往會在0.2V~0.3V間,要將其應用至可攜式充電裝置,必須將許多顆串聯,再經由升壓電路將電壓升至5V後才得以應用,因此有相當高的複雜性且成本也很高。所以若以PEMFC進行微型化加以應用,將可以克服許多上述的問題。然而一般的PEMFC都朝向高功率的 堆疊及相關應用,例如應用於車輛或備用發電機等,對於低功率的應用鮮少探討。 The reason why fuel cells are valued is that they use electrochemical technology to directly convert fuel to electricity without the need for a combustion reaction, so they are not limited by the Carnot cycle, and there are no complicated mechanical components for generating electricity. At the same time, the fuel source is mainly Using hydrogen as an energy source, and its by-product is mainly water, so fuel cells have the advantages of high energy conversion efficiency, low pollution, low noise, and simple structure. In addition, the fuel cell itself is similar to a generator and is different from a secondary battery. Its active material does not exist in the body. It does not need to be charged and discharged, but only needs to be continuously replenished with the active material (fuel), that is, sustainable power generation. . For the development of micro-portable fuel cells, Direct Methanol Fuel Cell (DMFC) is an important technology. DMFC uses methanol aqueous solution instead of hydrogen, and can use ordinary solution tanks instead of high-pressure hydrogen storage bottles or storage tanks. Hydrogen alloy tanks are used to store fuel, so it has the advantage of being easy to store and carry fuel. It also eliminates many gas control valves, making the entire system simpler and lighter. Although there are many advantages mentioned above, compared with the Proton Exchange Membrane Fuel Cell (PEMFC) which generally uses hydrogen as fuel, the amount of catalyst required by DMFC is much higher, resulting in higher cost. In addition, since the poisoning of the catalyst platinum (Pt) intermediate product carbon monoxide (CO) during the electrochemical reaction must be avoided during the anode reaction, ruthenium (Ru) will be added to the catalyst to suppress the poisoning effect of CO, but it will also lead to power generation. Reduced effectiveness. During the DMFC reaction, carbon dioxide (CO 2 ) is generated at the anode, and bubbles are formed in the methanol fuel aqueous solution, which easily causes blockage in the pipeline. Therefore, the removal of CO 2 has become a considerable problem during the operation of the DMFC. Methanol also easily penetrates the proton exchange membrane from the anode to the cathode. This is a problem of methanol crossover, which reduces the efficiency of DMFC and poisons the cathode Pt catalyst. Therefore, it is often low concentration to enter the body of DMFC. The concentration of methanol aqueous solution is generally not higher than 10% vol. In terms of cathode products, due to the electrochemical reaction of DMFC, a larger amount of water is generated at the cathode, so avoiding flooding is also a place that requires special attention when the DMFC is operating. Therefore, although the DMFC system seems simple, the anode flow channel, cathode flow channel and air flow rate and flow rate must be properly designed and controlled, otherwise its performance and stability will be seriously affected. However, the operating voltage of a single-cell DMFC is often between 0.2V and 0.3V. To apply it to a portable charging device, many must be connected in series, and then the voltage is increased to 5V through a boost circuit before it can be applied. So there is considerable complexity and cost. Therefore, if miniaturized PEMFC is used, many of the above problems can be overcome. However, general PEMFCs are oriented towards high-power stacking and related applications, such as those used in vehicles or standby generators, and it is rarely discussed about low-power applications.

高功率的燃料電池,通常採用直立式堆疊的方式進行堆疊,其採用雙極板模式,一面是陰極,另一面是陽極,雙極板與雙極板間夾著膜電極組(Membrane Electrode Assembly,MEA),如此堆疊起來。流道則是整合於雙極板中,陽極採取密閉式流道,陰極則採用密閉式(以空氣泵供給空氣)或側面開孔(以風扇帶動空氣)。然而此種堆疊的方式體積較為龐大,較不適用於只需要發數瓦電的微型燃料電池。因此,將燃料電池以平面式的方式進行串聯的相關設計研究應運而生,如此設計,陰極亦可以採用自主呼吸式(Self Air Breathing)的設計,省去了風扇或空氣泵,且容易設計成輕薄的燃料電池。一些微機電(Microelectromechanical Systems,MEMS)的製程技術,也被應用於微型燃料電池的製作。Lee等人(文獻1)提出了將燃料電池堆疊方式改為平面式串聯堆疊,並且將微機電製程導入至微型化燃料電池的製作,其研究中顯示了平面式堆疊與MEMS製程應用於燃料電池的可行性。Cha等人(文獻2)則將微型DMFC中,提出將MEMS技術中的金屬舉離法來製作DMFC中的金屬導線,其優點可將燃料電池尺寸縮小及提供較低的接觸阻抗。Lu等人(文獻3)提出以微機電製程,將金屬材料沉積於晶圓上,用以製作燃料電池的集電片,進而開發出微型燃料電池。Hsieh等人(文獻4)運用黃光顯影製程,將特定之圖形顯影於基材上,並將顯影區域以微 機電製程製作出集電片的導電區域。Yun等人(文獻5)提出在集電板上沉積金屬薄膜,用以降低集電板的阻抗,進而提升電池效能。Karst等人(文獻6),利用微機電製程在一片的矽晶圓上,製作出47個micro fuel cells,並將其中一片切割出來,組裝於鋁基材上。此外他們亦提出利用覆蓋於陰極上蓋子的開口率,得以有效地對於呼吸式微型燃料電池進行水管理,避免陰極積水的現象。Omosebi與Besser(文獻7)以微製程的技術,將微流道與觸媒層製作於質子交換膜上,且進行性能測試驗證其可行性。Alanis-Navarro等人(文獻8)以濺鍍法,將銅薄膜鍍於壓克力(PMMA)上,使PMMA得以金屬化(metalized),並組成微型燃料電池原型,進行效能測試。Chen等人(文獻9)以MEMS技術,在矽基板上製作微流道,進而組成微型氫氧燃料單電池,並進行參數影響電池效能的探討,由其研究結果顯示,傳導面積與材料,對於微型燃料電池效能影響最為顯著。Peng等人(文獻10)整合奈微米雙效結構,並以矽晶圓為基底,製作出一款高效能微型氫氧燃料電池,此外文章中利用三種方式提升電池效能,第一種方式為整合奈米與微米結構,提高反應面積;第二種方式為以超薄離子塗佈於三相區,以降低氧氣擴散阻抗;第三種方式為在燃料電池封裝時,利用微型互鎖(micro-interlocks)設計提升介面強度。Hsieh與Huang(文獻11)提出一款平面式陣列模組式的燃料電池堆,其主要製程是利用微機電中的電鑄技術,將微流道製作於銅薄片基板上,再堆疊組裝成平面式的燃料電池堆並進行測試。Lee與Kim(文獻12) 則提出了一款應用於奈米衛星(Nono-Satellites)的微太空動力系統(Micro Space Power System),此系統結合了以MEMS技術所製作出的燃料電池,包含硼氫化納及過氧化氫同時產氫、氧之裝置、微型泵浦與微型反應器等,研究中並進行了相關的實驗以驗證其可行性。Wu等人(文獻13)則提出一款被動式的滲透蒸發供應燃料的微DMFC,其結構中包含了polydimethylsiloxane(PDMS)活性層(Active Layer)與矽支撐層(Silicon Support Layer)等,其設計雖然新穎,但是作者指出他們所提出的微DMFC,目前僅能在一種擺放的方向時層得以運作。Yang等人(文獻14)則以矽為基板,應用MEMS技術製作成集電兼流道板,PDMS則用以輔助支撐組裝結構,文中並探討了四種流道形式對效能的影響。 High-power fuel cells are usually stacked in an upright stack. The bipolar plate mode is used. One side is the cathode and the other is the anode. The membrane electrode group (Membrane Electrode Assembly, MEA), so stacked. The flow channel is integrated in the bipolar plate, the anode adopts a closed flow channel, and the cathode adopts a closed type (supply air by an air pump) or a side opening (a fan drives the air). However, such a stacking method is relatively bulky and is not suitable for micro fuel cells that only need to generate several watts of electricity. Therefore, the related design research of series connection of the fuel cell in a planar manner came into being. With this design, the cathode can also adopt a self-breathing design, eliminating the need for a fan or an air pump, and it is easy to design Thin and light fuel cell. Some microelectromechanical systems (MEMS) process technologies have also been applied to the fabrication of micro fuel cells. Lee et al. (Reference 1) proposed to change the fuel cell stacking method to a planar tandem stack, and introduced the micro-electro-mechanical process to the production of miniaturized fuel cells. The research showed that the planar stacking and MEMS process are applied to fuel cells. Feasibility. Cha et al. (Ref. 2) proposed a method of lifting metal in MEMS technology to make metal wires in DMFC in micro DMFC, which has the advantages of reducing the size of fuel cells and providing lower contact resistance. Lu et al. (Reference 3) proposed that a micro-electro-mechanical process is used to deposit metal materials on a wafer to make a collector sheet for a fuel cell, and then develop a micro fuel cell. Hsieh et al. (Ref. 4) used a yellow light development process to develop a specific pattern on a substrate, and The electromechanical process creates the conductive areas of the current collector. Yun et al. (Reference 5) proposed depositing a metal thin film on a current collector plate to reduce the impedance of the current collector plate, thereby improving battery performance. Karst et al. (Ref. 6) produced 47 micro fuel cells on a piece of silicon wafer using a micro-electromechanical process, cut one of them, and assembled it on an aluminum substrate. In addition, they also proposed to use the aperture ratio of the lid covering the cathode to effectively manage the water of the breathing micro fuel cell and avoid the phenomenon of water accumulation in the cathode. Omosebi and Besser (Ref. 7) used microfabrication technology to fabricate microchannels and catalyst layers on the proton exchange membrane, and performed performance tests to verify their feasibility. Alanis-Navarro et al. (Reference 8) used a sputtering method to deposit a copper thin film on acrylic (PMMA), so that PMMA can be metalized, and a micro fuel cell prototype was formed for performance testing. Chen et al. (Ref. 9) used MEMS technology to fabricate microfluidic channels on silicon substrates to form micro-hydrogen fuel cells, and discussed the effects of parameters on battery performance. The results of their research show that the conductive area and materials, The impact of micro fuel cell performance is most significant. Peng et al. (Ref. 10) integrated a nanometer dual-effect structure and used a silicon wafer as a substrate to produce a high-efficiency micro-hydrogen fuel cell. In addition, the article uses three methods to improve battery performance. The first method is integration. Nano and micro structures increase the reaction area; the second method is to coat the three-phase region with ultra-thin ions to reduce the oxygen diffusion resistance; the third method is to use micro-interlock (micro- interlocks) design to improve interface strength. Hsieh and Huang (Ref. 11) proposed a planar array module fuel cell stack. The main process is to use micro-electromechanical electroforming technology to fabricate micro-channels on a copper sheet substrate, and then stack and assemble the plane. Fuel cell stack and test. Lee and Kim (Reference 12) A Micro Space Power System for Nano Satellites (Nono-Satellites) is proposed. This system combines a fuel cell made with MEMS technology, including sodium borohydride and hydrogen peroxide. Hydrogen and oxygen generating devices, micro-pumps and micro-reactors have been studied and relevant experiments have been carried out to verify their feasibility. Wu et al. (Ref. 13) proposed a passive DMFC for pervaporation and fuel supply. The structure includes a polydimethylsiloxane (PDMS) active layer and a silicon support layer. It is novel, but the authors point out that their proposed micro DMFC can only operate in one direction at a time. Yang et al. (Ref. 14) used silicon as a substrate and applied MEMS technology to produce a current collector and runner plate. PDMS was used to support the support assembly structure. In this paper, the effect of four runner modes on efficiency was discussed.

(二)印刷電路板(Printed-Circuit Board,PCB)製程 (II) Printed-Circuit Board (PCB) manufacturing process

在發展微型燃料電池時,由於需要輕薄短小的設計,其電路與控制電路的元件,也需要以簡潔體積小、不佔空間為考量,且其應用主要是提供可攜式電子產品的充電或電源為主,因此將電子產品中成熟發展且普遍應用的印刷電路板(Printed-Circuit Board,PCB)技術應用至微型燃料電池的構裝中,也是受到相當矚目的一項主題,因為此種技術可有助於將微型燃料電池予以微小化。PCB應用於燃料電池的構裝技術,可追朔至在2003年時,由O'Hayre等人(文獻15)及Schmitz等人(文獻16)的團隊,在同一年中提出。O'Hayre等人(文獻15)提出以PCB製 作PEMFC的技術,並提及PCB具有成熟、穩定可靠的技術、設計多樣性、成本低及重量輕等優點,相當適合應用至微型燃料電池上。Schmitz等人(文獻16及17)提出以PCB技術製作出一款厚度僅3.5mm,平面被動式微型PEMFC。其研究中指出PCB製程應用於微型燃料電池的優點,平面燃料電池在堆疊過程中,燃料電池的串接非常重要,可藉由PCB將電路直接串連,免去了複雜的實體電路。Kim等人(文獻18)則進一步地以結合MEMS製程,將可撓性的PCB作為集電板,製作成平面式PEMFC電池組,其電池組體積為18cm3,此電池組最高功率密度為350mW cm-2。具PCB之燃料電池,其主要的優點,是可以突破傳統石墨製程的許多限制,使得燃料電池得以縮小化與多樣化。PCB的主要觀念為System on Module,也就是以印刷電路板的製程概念,將穿洞的金屬薄片、玻璃纖維、PP(prepreg,預浸層)、傳導電路等等先行做熱壓合,分別做出陰陽極板,之後再將陰陽極板、PP、MEA,以及玻璃纖維等做熱壓合,陰陽極板上接觸各CELL的金屬薄片以電路方導出至某處,再以PCB設計成類似的通道導通方式,以打洞貫穿再以銲錫焊接,將陰陽極做電路的導通,每一片MEA與陰陽極上的集電網,就由陰陽極上PCB的電路的穿洞導通,形成一個單電池。如此一來,可以在極小空間的範圍,放置很多的CELL;電池的串並聯,則可以將各單電池陰陽極板上的接點做串並聯的焊接,或是直接在陰陽極PCB板上的電路上進行設計,即可形成串並聯的效應以達到提升電池工作電壓的目的。本案之發明人於先前研究中(文獻 19),對於PCBDMFC的製程提出了說明,並且探討了在PCB熱壓合過程之中,對於MEA所可能造成的損傷做了一系列的研究。其研究結果指出,MEA在PCB製程時,所受的熱壓溫度,對其效能有著顯著的影響,溫度越低,MEA的損傷越小。也因此,如果PP所需融化後硬化的溫度較高,則MEA區域需要進行局部的冷卻。在PCBDMFC的平面式電池組的結構中,集電板的開口方式,對其效能有相當程度的影響,好的開口排列方式,將有助於電池效能的提升。Kuan等人(文獻20至22)以碎形幾何對空間進行有系統的切割,進行一系列的集電板開口幾何對效能影響之探討。其結果顯示,改變陰極開口對於效能影響,較改變陽極開口為大。開口率小時,電池效能較低,此時提升電池開口率將有助於電池效能的提升。在相同開口率的條件下,開口周長越長,電池效能越好。Kuan等人(文獻23)亦提出了以CFD的mixture model進行了平面式DMFC的流道設計,其研究中先以紅墨水的實驗,驗證模擬的準確性,再以此方法設計流道,並且提出了燃料進出共用流道、等長度分流與立體貫穿匯集點分流及合流等。Yuan等人(文獻24)利用以PCB製作出輕量化集電板,並製作圓盤狀的被動式DMFC模組,其集電區域為銅包鋁片,表面再鍍上金以防止腐蝕。 In the development of micro fuel cells, due to the need for light, thin and short designs, the components of their circuits and control circuits also need to be considered for their simplicity and small size without taking up space, and their applications are mainly to provide charging or power for portable electronic products. Therefore, the application of mature and widely-used printed-circuit board (PCB) technology in electronic products to the construction of micro fuel cells is also a subject that attracts considerable attention because this technology can Helps miniaturize micro fuel cells. The application of PCB to the fuel cell assembly technology can be traced back to 2003. It was proposed by the team of O'Hayre et al. (Ref. 15) and Schmitz et al. (Ref. 16) in the same year. O'Hayre et al. (Ref. 15) proposed a technology for making PEMFC by PCB, and mentioned that PCB has advantages such as mature, stable and reliable technology, design diversity, low cost, and light weight, which is quite suitable for application to micro fuel cells. Schmitz et al. (Refs. 16 and 17) proposed to use PCB technology to make a flat passive micro PEMFC with a thickness of only 3.5 mm. The research points out the advantages of the PCB process applied to micro fuel cells. In the stacking process of flat fuel cells, the series connection of fuel cells is very important. The PCB can be used to directly connect the circuits in series, eliminating complex physical circuits. Kim et al. (Ref. 18) further combined the MEMS process and used a flexible PCB as a current collector to produce a planar PEMFC battery pack with a battery volume of 18 cm 3 and a maximum power density of 350 mW. cm -2 . The main advantage of a fuel cell with a PCB is that it can break through many of the limitations of the traditional graphite process, making the fuel cell smaller and more diverse. The main concept of PCB is System on Module, which is based on the concept of the printed circuit board process. The perforated metal foil, glass fiber, PP (prepreg, prepreg), conductive circuit, etc. are first thermocompression bonded and separately Take out the anode and anode plates, and then heat-clamp the anode and anode plates, PP, MEA, and glass fiber. The metal foils on the anode and anode plates contact each CELL to export to the circuit side, and then use a PCB to design a similar In the channel conduction method, a hole is penetrated and then soldered, and the cathode and anode are used for circuit conduction. Each MEA and the current collector on the cathode and anode are connected by a hole in the PCB circuit on the cathode and anode to form a single cell. In this way, many CELLs can be placed in a very small space; when the batteries are connected in series or in parallel, the contacts on the cathode and anode plates of each single cell can be welded in series or parallel, or directly on the cathode and anode PCB boards. Design on the circuit can form a series-parallel effect to achieve the purpose of increasing the battery operating voltage. In the previous study (Reference 19), the inventor of this case put forward a description of the process of PCBDMFC, and discussed a series of researches on the damage caused by MEA in the process of PCB hot-pressing. The results of the study indicate that the hot pressing temperature that the MEA is subjected to during the PCB manufacturing process has a significant effect on its efficiency. The lower the temperature, the smaller the damage to the MEA. Therefore, if the temperature required for the PP to harden after melting is high, the MEA area needs to be locally cooled. In the structure of the planar battery pack of PCBDMFC, the opening mode of the current collector plate has a considerable influence on its efficiency, and a good opening arrangement mode will help improve the battery efficiency. Kuan et al. (References 20 to 22) systematically cut the space with fractal geometry, and conducted a series of discussions on the effect of the collector plate opening geometry on the efficiency. The results show that changing the cathode opening has a greater effect on efficiency than changing the anode opening. When the aperture ratio is small, the battery performance is low. At this time, increasing the battery aperture ratio will help improve the battery performance. Under the same aperture ratio, the longer the opening perimeter, the better the battery performance. Kuan et al. (Ref. 23) also proposed the flow path design of the flat DMFC with the CFD mixture model. In the research, the red ink experiment was used to verify the accuracy of the simulation, and then the flow path was designed by this method. The common flow passages for fuel in and out, equal-length split and three-dimensional through-collection point split and merge are proposed. Yuan et al. (Ref. 24) used a PCB to make a light-weight current collector plate and a disc-shaped passive DMFC module. The current collection area was a copper-clad aluminum sheet, and the surface was plated with gold to prevent corrosion.

(三)燃料電池之集電板/雙極板 (Three) fuel cell current collector plate / bipolar plate

一般燃料電池雙極板/集電板在設計與製作時所需要考量之處如下所述:較為常見的雙極板皆含有流道設計,具有傳輸燃料供應與收集電子的功能,膜電極組被夾合在兩者之間,電子 經由陽極金屬集電板接至外部電路陰極形成一個迴路後即可發電。目前常見的雙極板主要的材料的分類包含石墨-高分子複合材料集電板、金屬集電板與複合型集電板。燃料電池所產生的電力均需透過集電板或稱雙極板的媒介將電源輸出至外部,因此一般而言適用於質子交換膜燃料電池的雙極板應具備下列基本功能,以提升電池性能:(1)分隔氧化劑與還原劑,避免氫氣經由極板產生crossover的影響。(2)優良的機械強度,使雙極板得以與MEA均衡接觸,以收集電流。(3)適當的流道設計,使燃料能均勻地分佈至Cell之中,產生均勻的電化學反應,並且在陰極得以帶走生成物水,以避免積水的現象,導致電池效能減低。(4)良好的熱傳導效能,使電池內溫度均勻,並且可以達成散熱與溫度控制效果。(5)優良的導電性以收集電流輸出至外部使用。(6)適合的電極板開孔率,流場溝槽面積與電極總面積之比例,應有一適當比例,開孔過高,會造成MEA與雙極板之接觸電阻抗過高而減低性能,開孔過低則會降低MEA觸媒的利用率以及內部流場的阻力過高,也會減低電池效能。(7)雙極板應選用低密度材質,以減輕電池的重量。 General fuel cell bipolar plates / collector plates need to be considered in the design and production of the following: the more common bipolar plates contain a flow channel design, with the function of transmitting fuel supply and collecting electrons, membrane electrode group is Sandwiched between the two, electrons After the anode metal current collector is connected to the external circuit cathode to form a loop, electricity can be generated. At present, the main materials of common bipolar plates are classified into graphite-polymer composite current collector plates, metal current collector plates, and composite current collector plates. The power generated by a fuel cell needs to be output to the outside through the medium of a collector plate or a bipolar plate. Therefore, in general, a bipolar plate suitable for a proton exchange membrane fuel cell should have the following basic functions to improve battery performance : (1) Separate the oxidant from the reducing agent to avoid the effect of hydrogen crossover through the plate. (2) Excellent mechanical strength, enabling the bipolar plate to make balanced contact with the MEA to collect current. (3) Appropriate flow channel design enables the fuel to be evenly distributed into the Cell, which produces a uniform electrochemical reaction, and the product water can be taken away at the cathode to avoid the phenomenon of water accumulation, which leads to the reduction of battery efficiency. (4) Good heat conduction efficiency makes the temperature in the battery uniform, and can achieve heat dissipation and temperature control effects. (5) Excellent conductivity to collect current and output to external use. (6) The appropriate hole ratio of the electrode plate and the ratio of the groove area of the flow field to the total electrode area should have an appropriate ratio. If the hole opening is too high, the contact resistance of the MEA and the bipolar plate will be too high and the performance will be reduced. Too low openings will reduce the MEA catalyst utilization rate and the internal flow field resistance is too high, which will also reduce battery performance. (7) The bipolar plate should be made of low-density material to reduce the weight of the battery.

(四)PCB製程於微型燃料電池中的集電板 (4) Current collector board with PCB process in micro fuel cell

本案發明人先前的研究中,採用PCB中所使用的FR4/Epoxy複合材料做為集電板的基材,集電區域則採用金屬薄片。然而,由於金屬薄片與FR4/Epoxy複合基材間的熱膨脹係數差異很大,燃料電池運作時的電化學反應屬於放熱反應,內部溫度 會升高,因此長時間運作、停止運作下來,因為重複的熱脹冷縮效應,可能會導致集電板與MEA的密合性降低而使接觸阻抗上升,進而使燃料電池的效能下降。此外,由於燃料電池反應時會有水分,無論是DMFC或PEMFC,其擴散層的碳布或碳紙會吸水而膨脹,此時金屬集電片則會承受壓力,有可能會有些微變形,長久運作、停止下,亦有可能導致集電片與MEA的接合性降低而使燃料電池的效能下降。因此本案發明人先前的研究中,提出將二者整合,以MEMS中的熱蒸鍍法鍍上集電層(銅)與抗腐蝕層(鎳)於FR4/Epoxy複合基材的表面,以增加其強度與穩定性。 In the previous research by the inventor of this case, the FR4 / Epoxy composite material used in the PCB was used as the base material of the current collector plate, and the current collection area was made of metal foil. However, due to the large thermal expansion coefficient between the metal foil and the FR4 / Epoxy composite substrate, the electrochemical reaction during fuel cell operation is an exothermic reaction, and the internal temperature It will rise, so it will stop operating for a long time. Due to repeated thermal expansion and contraction effects, the adhesion between the current collector plate and the MEA may be reduced, and the contact resistance may be increased, thereby reducing the efficiency of the fuel cell. In addition, because the fuel cell will have moisture during the reaction, whether it is DMFC or PEMFC, the carbon cloth or carbon paper of the diffusion layer will absorb water and swell. At this time, the metal current collector sheet will be under pressure and may be slightly deformed for a long time. When it is running or stopped, it may also cause the connection between the current collector sheet and the MEA to decrease, and the efficiency of the fuel cell may decrease. Therefore, in the previous research of the inventor of this case, it was proposed to integrate the two, and the collector layer (copper) and anti-corrosion layer (nickel) were plated on the surface of the FR4 / Epoxy composite substrate by thermal evaporation method in MEMS to increase Its strength and stability.

(五)集電板之抗腐蝕性 (5) Corrosion resistance of current collector plate

在以MEMS或PCB製程製作集電板時,會包含金屬層用以集/導電,然而PEMFC或DMFC在反應時,會呈現酸性,長時間運作下,金屬層容易被腐蝕,進而影響到導/集電性,以及Pt觸媒被因腐蝕所析出的金屬離子所毒化,導致效能下降而衰退。因此如何提升集電層的抗腐蝕性,是微型燃料電池開發時的一大關鍵問題。然而集電層的高導電性與抗腐蝕性,往往難以兼顧,如何取得一平衡點,是相當重要的一環。本案發明人先前的研究中提出的輕量化集電板,是在FR4/EPOXY複材基板表面熱蒸鍍上銅薄膜作為導電層,抗腐蝕層則熱蒸鍍鎳薄膜,但是以鎳作為抗腐層應該是可以進一步地改良。也有研究將金屬表面鍍上金薄膜,以防止腐蝕與增加導電性,但是金的成本非常高,降低商品化時因價格提升的競爭力。 When a current collector is fabricated by a MEMS or PCB manufacturing process, a metal layer is included for collecting / conducting. However, when PEMFC or DMFC reacts, it will show acidity. Under long-term operation, the metal layer is easily corroded, which will affect the conductivity / The current-collecting properties and the Pt catalyst are poisoned by metal ions precipitated due to corrosion, resulting in a decline in efficiency and a decline. Therefore, how to improve the corrosion resistance of the current collector is a key issue in the development of micro fuel cells. However, it is often difficult to balance the high conductivity and corrosion resistance of the current collector layer. How to achieve a balance is a very important part. The lightweight current collector plate proposed in the previous research by the inventor of this case is a thermally vapor-deposited copper film on the surface of the FR4 / EPOXY composite substrate as a conductive layer, and a corrosion-resistant layer is thermally vapor-deposited with a nickel film, but nickel is used as a corrosion resistance. The layer should be able to be further improved. There are also studies on coating metal surfaces with gold films to prevent corrosion and increase conductivity, but the cost of gold is very high, which reduces the competitiveness due to price increases during commercialization.

因此,如何提升微型PEMFC集電板的抗腐蝕性,進而可以在長時間運作下仍能維持效能的穩定性,使其具備商品化的可行性,是本技術領域需要解決的重要問題。 Therefore, how to improve the corrosion resistance of the miniature PEMFC current collector plate, so that the stability of performance can be maintained under long-term operation, so that it has commercial feasibility is an important problem to be solved in this technical field.

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文獻15:R. O’Hayre et al., Development of portable fuel cell arrays with printed-circuit technology, J. of Power Sources, Vol.124, 2003, pp.459-472 Reference 15: R. O’Hayre et al., Development of portable fuel cell arrays with printed-circuit technology, J. of Power Sources, Vol. 124, 2003, pp.459-472

文獻16:A. Schmitz et al., Planar self-breathing fuel cells, J. of Power Sources, Vol.118, 2003, pp.162-171 Reference 16: A. Schmitz et al., Planar self-breathing fuel cells, J. of Power Sources, Vol. 118, 2003, pp.162-171

文獻17:A. Schmitz, S. Wagner, R. Hahn, H. Uzun, C. Hebling, Stability of planar PEMFC in printed circuit board technology, J. of power Sources, Vol127, 2004, pp. 197-205. Reference 17: A. Schmitz, S. Wagner, R. Hahn, H. Uzun, C. Hebling, Stability of planar PEMFC in printed circuit board technology, J. of power Sources, Vol127, 2004, pp. 197-205.

文獻18:S.H. Kim et al., Air-breathing miniature planar stack using the flexible printed circuit board as a current collector, International J. of Hydrogen Energy, Vol. 34, 2009, pp.459-466. Reference 18: S.H. Kim et al., Air-breathing miniature planar stack using the flexible printed circuit board as a current collector, International J. of Hydrogen Energy, Vol. 34, 2009, pp.459-466.

文獻19:Y.-D. Kuan and C.-H. Chang, Experimental investigation on the process-induced damage of a DMFC assembled by the printed circuit board technique, J. of Fuel Cell Science and Technology, Vol. 6, 2009, pp011016-1-9. Reference 19: Y.-D. Kuan and C.-H. Chang, Experimental investigation on the process-induced damage of a DMFC assembled by the printed circuit board technique, J. of Fuel Cell Science and Technology, Vol. 6, 2009 , pp011016-1-9.

文獻20:J.-Y. Chang et al., Characterization of a liquid feed direct methanol fuel cell with Sierpinski carpets fractal current collectors, J. of Power Sources, Vol. 184, pp. 180-190, 2008. Reference 20: J.-Y. Chang et al., Characterization of a liquid feed direct methanol fuel cell with Sierpinski carpets fractal current collectors, J. of Power Sources, Vol. 184, pp. 180-190, 2008.

文獻21:Y.-D. Kuan et al., Characterization of a direct methanol fuel cell using Hilbert curve fractal current collectors, J. of Power Sources, Vol. 187, Issue 1, 2009, pp.112-122. Reference 21: Y.-D. Kuan et al., Characterization of a direct methanol fuel cell using Hilbert curve fractal current collectors, J. of Power Sources, Vol. 187, Issue 1, 2009, pp.112-122.

文獻22:Y.-D. Kuan et al., Experimental investigation of the effect of free openings of current collectors on a direct methanol fuel cell, J. of Power Sources, Vol.196, Issue 2, 2011, pp.717-728. Reference 22: Y.-D. Kuan et al., Experimental investigation of the effect of free openings of current collectors on a direct methanol fuel cell, J. of Power Sources, Vol.196, Issue 2, 2011, pp.717- 728.

文獻23:Y.-D. Kuan et al., A novel flow design on the planar printed-circuit-board DMFC modules, Proceedings of FuelCell2008 Sixth International Fuel Cell Science, Engineering and Technology Conference, June 16-18, 2008, Denver, Colorado, USA. Reference 23: Y.-D. Kuan et al., A novel flow design on the planar printed-circuit-board DMFC modules, Proceedings of FuelCell2008 Sixth International Fuel Cell Science, Engineering and Technology Conference, June 16-18, 2008, Denver , Colorado, USA.

文獻24:W. Yuan et al., Lightweight current collector based on printed-circuit-board technology and its structural effects on the passive air-breathing direct methanol fuel cell, Renewable Energy, Vol. 81, 2015, pp.664-670. Reference 24: W. Yuan et al., Lightweight current collector based on printed-circuit-board technology and its structural effects on the passive air-breathing direct methanol fuel cell, Renewable Energy, Vol. 81, 2015, pp.664-670 .

本發明的一個目的在於提供一種輕量化質子交換膜燃料電池之電池結構及一種燃料電池之集電板的製造方法,以提升集電板的抗腐蝕性,進而維持燃料電池長時間運作的穩定性。 An object of the present invention is to provide a light-weight proton exchange membrane fuel cell battery structure and a method for manufacturing a fuel cell current collector plate, so as to improve the corrosion resistance of the current collector plate, thereby maintaining the stability of the fuel cell's long-term operation. .

為達成上述目的,本發明一方面提供一種輕量化質子交換膜燃料電池之電池結構,包含:一陽極流道板,其內側具有由蜿蜒溝槽構成的流道區域,該溝槽的一端形成一氣體入口,另一端形成一氣體出口;一陽極集電板,具有複數個呈矩陣排列 的第一貫通孔,該陽極集電板包含一第一樹脂基板、形成於該第一樹脂基板上的一第一金屬層、以及形成於該第一金屬層上的一第一石墨薄膜;一質子交換膜;以及一陰極集電板,具有複數個呈矩陣排列的第二貫通孔,該陰極集電板包含一第二樹脂基板、形成於該第二樹脂基板上的一第二金屬層、以及形成於該第二金屬層上的一第二石墨薄膜,該陽極集電板的第一貫通孔與該陰極集電板的第二貫通孔相對應。 In order to achieve the above object, one aspect of the present invention is to provide a battery structure of a lightweight proton exchange membrane fuel cell, including: an anode flow channel plate having a flow channel region formed by a meandering groove on an inner side thereof, and one end of the groove is formed A gas inlet and a gas outlet at the other end; an anode current collector plate with a plurality of arrays arranged in a matrix A first through hole, the anode current collector plate includes a first resin substrate, a first metal layer formed on the first resin substrate, and a first graphite film formed on the first metal layer; A proton exchange membrane; and a cathode current collector plate having a plurality of second through holes arranged in a matrix, the cathode current collector plate includes a second resin substrate, a second metal layer formed on the second resin substrate, And a second graphite film formed on the second metal layer, the first through hole of the anode current collector plate corresponds to the second through hole of the cathode current collector plate.

本發明另一方面提供一種燃料電池之集電板的製造方法,包含:於一樹脂基板上塗布一第一光阻;進行曝光顯影,圖案化該第一光阻,以定義出一集電與電路圖案;以熱蒸鍍法鍍上一銅薄膜層;進行舉離製程,移除剩餘的第一光阻,以形成與該集電與電路圖案相對應的一銅薄膜圖案層;塗布一第二光阻;進行曝光顯影,依據該集電與電路圖案,圖案化該第二光阻;形成一石墨薄膜層;以及進行舉離製程,移除剩餘的第二光阻,以在該銅薄膜圖案層上形成與該集電與電路圖案相對應的石墨薄膜圖案層。 Another aspect of the present invention provides a method for manufacturing a current collector plate for a fuel cell, including: coating a first photoresist on a resin substrate; performing exposure and development, and patterning the first photoresist to define a current collector and Circuit pattern; plating a copper thin film layer by thermal evaporation method; performing a lift-off process to remove the remaining first photoresist to form a copper thin film pattern layer corresponding to the current collecting and circuit pattern; coating a first Two photoresists; performing exposure and development, patterning the second photoresist according to the current collecting and circuit pattern; forming a graphite film layer; and performing a lift-off process to remove the remaining second photoresist to the copper film A graphite thin film pattern layer corresponding to the current collecting and circuit pattern is formed on the pattern layer.

於一實施例中,形成該石墨薄膜層的步驟包含:以石墨靶材為材料,利用射頻磁控濺鍍法形成該石墨薄膜層。 In one embodiment, the step of forming the graphite thin film layer includes: using a graphite target as a material, and forming the graphite thin film layer by a radio frequency magnetron sputtering method.

於一實施例中,形成該石墨薄膜層的步驟包含:以石墨烯油墨為材料,利用網板印刷法形成該石墨薄膜層。 In an embodiment, the step of forming the graphite thin film layer includes: using a graphene ink as a material to form the graphite thin film layer by a screen printing method.

於一實施例中,形成該石墨薄膜層的步驟包含:以石墨烯分散液為材料,利用旋轉塗佈法形成該石墨薄膜層。 In an embodiment, the step of forming the graphite thin film layer includes: using the graphene dispersion liquid as a material to form the graphite thin film layer by a spin coating method.

於一實施例中,在圖案化該第一光阻的步驟後包含一對該第一光阻進行高溫定型的步驟;在圖案化該第二光阻的步驟後包含一對該第二光阻進行高溫定型的步驟。 In an embodiment, the step of patterning the first photoresist includes a pair of the first photoresist to perform a high-temperature setting step; the step of patterning the second photoresist includes a pair of the second photoresist Perform high temperature setting steps.

於一實施例中,該第一光阻和該第二光阻為正光阻。 In one embodiment, the first photoresist and the second photoresist are positive photoresists.

於一實施例中,該燃料電池為質子交換膜燃料電池(Proton Exchange Membrane Fuel Cell,PEMFC)。 In one embodiment, the fuel cell is a Proton Exchange Membrane Fuel Cell (PEMFC).

於一實施例中,該燃料電池為直接甲醇燃料電池(Direct Methanol Fuel Cell,DMFC)。 In one embodiment, the fuel cell is a direct methanol fuel cell (DMFC).

本發明再一方面提供一種輕量化質子交換膜燃料電池之電池結構,包含:一陽極流道板,其內側具有由蜿蜒溝槽構成的流道區域,該溝槽的一端形成一氣體入口,另一端形成一氣體出口;一陽極集電板,具有複數個呈矩陣排列的第一貫通孔,該陽極集電板包含一第一樹脂基板、形成於該第一樹脂基板上的一第一金屬層、以及形成於該第一金屬層上的一第一石墨薄膜;一質子交換膜;一陰極集電板,具有複數個呈矩陣排列的第二貫通孔,該陰極集電板包含一第二樹脂基板、形成於該第二樹脂基板上的一第二金屬層、以及形成於該第二金屬層上的一第二石墨薄膜,該陽極集電板的第一貫通孔與該陰極集電板的第二貫通孔相對應;以及一陰極通透板,具有複數個透孔,穿透該陰極通透板兩側;其中氫氣依序從該陽極流道板的氣體入口和流道區域內的溝槽,通過該陽極集電板的第一貫通孔,擴散到該質子交換膜的一側;且其中空氣中的氧氣依序通過該陰極通透板的透孔和該 陰極集電板的第二貫通孔,擴散到該質子交換膜的另一側。 Another aspect of the present invention provides a battery structure of a lightweight proton exchange membrane fuel cell, including: an anode flow channel plate having a flow channel region formed by a meandering groove on an inner side thereof, and one end of the groove forming a gas inlet, A gas outlet is formed at the other end; an anode current collector plate having a plurality of first through holes arranged in a matrix. The anode current collector plate includes a first resin substrate and a first metal formed on the first resin substrate. Layer, and a first graphite thin film formed on the first metal layer; a proton exchange membrane; a cathode current collector plate having a plurality of second through holes arranged in a matrix, the cathode current collector plate includes a second A resin substrate, a second metal layer formed on the second resin substrate, and a second graphite film formed on the second metal layer, a first through hole of the anode current collector plate and the cathode current collector plate Corresponding to the second through hole; and a cathode penetrating plate having a plurality of penetrating holes penetrating both sides of the cathode penetrating plate; wherein hydrogen is sequentially passed from the gas inlet of the anode flow channel plate and in the flow channel area. Groove Through the first through hole of the anode current collector plate, the diffusion of the proton exchange membrane side; and wherein the oxygen in the air sequentially through the through holes of the cathode and the transparent plate The second through hole of the cathode current collector plate diffuses to the other side of the proton exchange membrane.

本發明中,將石墨薄膜應用於質子交換膜燃料電池之集電板,以提升集電板的抗腐蝕性,進而維持燃料電池長時間運作的穩定性。於一實施例中,在製作該集電板的過程中,以FR4/Epoxy複合材料做為基材,在表面製作出集電層與抗腐蝕層。其中集電層是以熱蒸鍍法鍍上銅薄膜,石墨薄膜作為抗腐蝕層,以提升抗腐蝕性。本發明其他實施例提供了射頻磁控濺鍍、網板印刷、旋轉塗佈等三種不同方法製作集電板的石墨薄膜抗腐蝕層。 In the present invention, a graphite thin film is applied to a current collector plate of a proton exchange membrane fuel cell to improve the corrosion resistance of the current collector plate, thereby maintaining the stability of the fuel cell's long-term operation. In an embodiment, in the process of manufacturing the current collector plate, a FR4 / Epoxy composite material is used as a base material, and a current collector layer and an anti-corrosion layer are formed on the surface. The current collector layer is coated with a copper film by a thermal evaporation method, and a graphite film is used as an anti-corrosion layer to improve the corrosion resistance. Other embodiments of the present invention provide three different methods, such as radio frequency magnetron sputtering, screen printing, and spin coating, to produce a graphite film anticorrosive layer for a current collector plate.

11‧‧‧陽極流道板 11‧‧‧Anode runner plate

12‧‧‧陽極集電板 12‧‧‧Anode current collector plate

13‧‧‧質子交換膜 13‧‧‧ proton exchange membrane

14‧‧‧陰極集電板 14‧‧‧ cathode current collector

15‧‧‧陰極通透板 15‧‧‧cathode transparent plate

16‧‧‧矽膠墊片 16‧‧‧ Silicone Gasket

60‧‧‧樹脂基板 60‧‧‧resin substrate

62‧‧‧第一光阻 62‧‧‧first photoresist

64‧‧‧銅薄膜層 64‧‧‧Cu film layer

65‧‧‧銅薄膜圖案層 65‧‧‧ Copper film pattern layer

66‧‧‧第二光阻 66‧‧‧Second photoresist

68‧‧‧石墨薄膜層 68‧‧‧graphite film layer

69‧‧‧石墨薄膜圖案層 69‧‧‧graphite film pattern layer

110‧‧‧鎖固孔 110‧‧‧lock hole

111‧‧‧溝槽 111‧‧‧ trench

112‧‧‧氣體入口 112‧‧‧Gas inlet

113‧‧‧氣體出口 113‧‧‧Gas outlet

121‧‧‧第一貫通孔 121‧‧‧first through hole

141‧‧‧第二貫通孔 141‧‧‧second through hole

151‧‧‧透孔 151‧‧‧through hole

S10~S17‧‧‧步驟 S10 ~ S17‧‧‧step

第1圖顯示本發明採用的輕量化質子交換膜之電池結構的示意圖。 FIG. 1 is a schematic diagram showing a battery structure of a lightweight proton exchange membrane used in the present invention.

第2圖顯示第1圖中的陽極流道板的結構示意圖。 FIG. 2 is a schematic diagram showing the structure of the anode flow channel plate in FIG. 1.

第3圖顯示依據本發明的一種雙面雙cell之PEMFC的爆炸示意圖。 FIG. 3 shows an explosion diagram of a PEMFC with double-sided and double-cell according to the present invention.

第4圖顯示第3圖的PEMFC的組合示意圖。 Fig. 4 shows the combined schematic diagram of the PEMFC of Fig. 3.

第5圖顯示依據本發明的一種以熱壓合方式製造的雙面雙cell之PEMFC的組合示意圖。 FIG. 5 shows a schematic diagram of a PEMFC with a double-sided and dual-cell manufacturing method according to the present invention.

第6圖顯示依據本發明的燃料電池之集電板的製造方法的流程圖。 FIG. 6 shows a flowchart of a method for manufacturing a current collector plate for a fuel cell according to the present invention.

第7圖及第8圖顯示射頻磁控濺鍍的動作原理機制。 Figures 7 and 8 show the principle of operation of RF magnetron sputtering.

第9圖顯示以網版印刷技術轉印石墨烯油墨於基板的示意圖。 Figure 9 shows a schematic diagram of transferring graphene ink to a substrate by screen printing technology.

第10圖顯示旋轉塗佈治具設計示意圖。 Figure 10 shows a schematic design of a spin coating jig.

為使本發明的目的、技術方案及效果更加清楚、明確,以下參照圖式並舉實施例對本發明進一步詳細說明。 In order to make the objectives, technical solutions, and effects of the present invention more clear and clear, the present invention is further described in detail below with reference to the drawings and examples.

本發明說明書和所附申請專利範圍中所使用的冠詞「一」一般地可以被解釋為意指「一個或多個」,除非另外指定或從上下文可以清楚確定單數形式。 The article "a" or "an" as used in the specification of the invention and the scope of the appended patents can be generally interpreted as meaning "one or more" unless specified otherwise or clear from context.

第1圖顯示本發明採用的輕量化質子交換膜之電池結構的示意圖,第2圖顯示第1圖中的陽極流道板11的結構示意圖。請參閱第1圖和第2圖,本發明中輕量化質子交換膜之電池結構包含:一陽極流道板11,其內側具有由蜿蜒溝槽111構成的流道區域,該溝槽111的一端形成一氣體入口112,另一端形成一氣體出口113;一陽極集電板12,具有複數個呈矩陣排列的第一貫通孔121,該陽極集電板12包含一第一樹脂基板、形成於該第一樹脂基板上的一第一金屬層、以及形成於該第一金屬層上的一第一石墨薄膜(見第6圖,樹脂基板對應元件60、金屬層對應元件65、石墨薄膜對應元件69);一質子交換膜13;一陰極集電板14,具有複數個呈矩陣排列的第二貫通孔141,該陰極集電板14包含一第二樹脂基板、形成於該第二樹脂基板上的一第二金屬層、以及形成於該第二金屬層上的一第二石墨薄膜(見第6圖,樹脂基板對應元件60、金屬層對應元件65、石墨薄膜對應元件69),該陽極集電板12的第一貫通孔121與該陰極集電板14的第二貫通孔141相對應;一 陰極通透板15,具有複數個透孔151,穿透該陰極通透板15兩側;其中氫氣依序從該陽極流道板11的氣體入口112和流道區域內的溝槽111,通過該陽極集電板12的第一貫通孔121,擴散到該質子交換膜13的一側;空氣中的氧氣依序通過該陰極通透板15的透孔151和該陰極集電板14的第二貫通孔141,擴散到該質子交換膜13的另一側。 FIG. 1 shows a schematic diagram of a battery structure of a lightweight proton exchange membrane used in the present invention, and FIG. 2 shows a schematic diagram of a structure of an anode flow channel plate 11 in FIG. 1. Referring to FIG. 1 and FIG. 2, the battery structure of the lightweight proton exchange membrane in the present invention includes: an anode flow channel plate 11 having a flow channel region formed by a meandering groove 111 on the inner side thereof, A gas inlet 112 is formed at one end and a gas outlet 113 is formed at the other end; an anode current collector plate 12 having a plurality of first through holes 121 arranged in a matrix. The anode current collector plate 12 includes a first resin substrate and is formed in A first metal layer on the first resin substrate, and a first graphite film formed on the first metal layer (see FIG. 6, a resin substrate corresponding element 60, a metal layer corresponding element 65, and a graphite thin film corresponding element 69); a proton exchange membrane 13; a cathode current collector plate 14 having a plurality of second through holes 141 arranged in a matrix, the cathode current collector plate 14 includes a second resin substrate formed on the second resin substrate A second metal layer and a second graphite film formed on the second metal layer (see FIG. 6, a resin substrate corresponding element 60, a metal layer corresponding element 65, and a graphite film corresponding element 69), the anode set First through hole of the electric board 12 121 corresponds to the second through hole 141 of the cathode current collecting plate 14; The cathode permeation plate 15 has a plurality of through holes 151, penetrating both sides of the cathode permeation plate 15; hydrogen gas sequentially passes from the gas inlet 112 of the anode flow channel plate 11 and the groove 111 in the flow channel area, and passes through The first through hole 121 of the anode current collector plate 12 diffuses to one side of the proton exchange membrane 13; oxygen in the air sequentially passes through the through holes 151 of the cathode through plate 15 and the first through hole 151 of the cathode current collector plate 14. The two through holes 141 diffuse to the other side of the proton exchange membrane 13.

燃料電池所產生的電力均需透過集電板或稱雙極板(即陽極集電板12和陰極集電板14)的媒介將電源輸出至外部,本發明的質子交換膜燃料電池的雙極板在樹脂基板上鍍上金屬層(如銅層)後,並鍍上石墨抗腐蝕層(石墨薄膜或稱石墨稀),石墨(Graphite)具有良好的導電與導熱性,同時也具有良好的抗腐蝕性,提升微型PEMFC集電板的抗腐蝕性,進而在長時間運作下仍能維持效能的穩定性,使得燃料電池的性能獲得提升。 The power generated by the fuel cell needs to output power to the outside through the medium of the collector plate or bipolar plate (ie, the anode collector plate 12 and the cathode collector plate 14). The bipolar of the proton exchange membrane fuel cell of the present invention After the plate is plated with a metal layer (such as a copper layer) on the resin substrate, and then coated with a graphite anti-corrosion layer (graphite film or graphite thin), graphite (Graphite) has good electrical and thermal conductivity, and also has good resistance Corrosiveness, which improves the corrosion resistance of the micro PEMFC collector plate, and can still maintain the stability of performance under long-term operation, which improves the performance of the fuel cell.

如第1圖所示,本發明中輕量化質子交換膜之電池結構還包含有多個矽膠墊片16,設置於陽極流道板11和陽極集電板12之間、陽極集電板12和質子交換膜13之間以及陰極集電板14和質子交換膜13之間。這些矽膠墊片16、陽極流道板11、陽極集電板12、陰極集電板14和陰極通透板15的外圍並設置有鎖固孔110,主要用來鎖合燃料電池時,能使鎖合扭力均勻分佈每一處,防止施力不平均造成燃料洩漏。 As shown in FIG. 1, the battery structure of the lightweight proton exchange membrane in the present invention further includes a plurality of silicon gaskets 16 disposed between the anode flow channel plate 11 and the anode current collector plate 12, and the anode current collector plate 12 and Between the proton exchange membrane 13 and between the cathode current collector plate 14 and the proton exchange membrane 13. These silicon gaskets 16, anode flow channel plate 11, anode current collector plate 12, cathode current collector plate 14, and cathode transparent plate 15 are provided with locking holes 110 at the periphery, which are mainly used to lock fuel cells when The locking torque is distributed evenly to prevent fuel leakage caused by uneven force application.

陽極流道板11的流道區域採用蜿蜒式流道以增加反應面積,燃料進出孔(即氣體入口112和氣體出口113)設置於流 道對角處,孔徑依照導管(即溝槽111)孔徑所設計,其導管主要用於燃料輸入及輸出所使用。 The flow path area of the anode flow path plate 11 uses a meandering flow path to increase the reaction area. The fuel inlet and outlet holes (that is, the gas inlet 112 and the gas outlet 113) are provided in the flow. At the opposite corner of the channel, the aperture is designed according to the diameter of the duct (ie, the groove 111), and the duct is mainly used for fuel input and output.

上述架構中,在陰極集電板14外側採用的是陰極通透板15,其可直接與外界空氣接觸,直接使用空氣中的氧氣作為燃料,此種架構為開放式架構。本發明亦可將陰極通透板15取代為陰極流道板,其採用與陽極流道板11相同的結構,不同的是,輸入氧氣作為燃料,此種架構為封閉式架構。相對於封閉式架構,開放式架構的優點在於不需配置氧氣燃料,進一步縮減產品體積,更達小型化之目的。 In the above structure, a cathode permeation plate 15 is used on the outside of the cathode current collecting plate 14, which can directly contact the outside air and directly use oxygen in the air as a fuel. This structure is an open structure. The present invention can also replace the cathode permeation plate 15 with a cathode flow channel plate, which adopts the same structure as the anode flow channel plate 11, except that oxygen is input as fuel, and this structure is a closed structure. Compared with the closed architecture, the advantages of the open architecture are that it does not need to be equipped with oxygen fuel, which further reduces the product volume and achieves the purpose of miniaturization.

在各個輕量化元件(即陽極流道板11、陽極集電板12、質子交換膜13、陰極集電板14、陰極通透板15和矽膠墊片16)完成後,依序將構件進行組裝與鎖合後,即完成輕量化PEMFC單電池。也可以採用熱壓合方式將上述元件壓合組裝來完成PEMFC單電池的製作。 After the lightweight components (namely, the anode flow channel plate 11, the anode current collecting plate 12, the proton exchange membrane 13, the cathode current collecting plate 14, the cathode transparent plate 15, and the silicone gasket 16) are completed, the components are sequentially assembled After being locked together, the lightweight PEMFC single battery is completed. The above-mentioned components can also be assembled by thermocompression bonding to complete the production of PEMFC cells.

基於上述單cell(單元)PEMFC的製作,本發明也可應用到雙面雙cell之PEMFC的製作,如第3圖所示,其相對兩面各具有兩個電池模組,依次可以提升電池容量。雙面雙cell之PEMFC可以採用鎖固方式組裝,如第4圖所示;也可以採用熱壓合方式組裝,如第5圖所示。 Based on the production of the single-cell (cell) PEMFC described above, the present invention can also be applied to the production of double-sided and dual-cell PEMFCs. As shown in FIG. 3, the opposite two sides each have two battery modules, which can sequentially increase the battery capacity. The PEMFC with double-sided and double-cell can be assembled by locking, as shown in Figure 4; it can also be assembled by thermocompression, as shown in Figure 5.

本發明並提出一種燃料電池之集電板的製造方法,如第6圖所示,其顯示依據本發明的燃料電池之集電板的製造方法的流程圖,該集電板即上述之陽極集電板12和陰極集電板14,所 述製造方法包括如下步驟: The present invention also provides a method for manufacturing a current collector plate for a fuel cell. As shown in FIG. 6, it shows a flowchart of a method for manufacturing a current collector plate for a fuel cell according to the present invention. The current collector plate is the foregoing anode collector. The electric plate 12 and the cathode current collecting plate 14 The manufacturing method includes the following steps:

步驟S10:於一樹脂基板60上塗布一第一光阻62。該樹脂基板60可為FR4/Epoxy複合材料,該第一光阻62可為正光阻。 Step S10: A first photoresist 62 is coated on a resin substrate 60. The resin substrate 60 may be a FR4 / Epoxy composite material, and the first photoresist 62 may be a positive photoresist.

步驟S11:進行曝光顯影,圖案化該第一光阻62,以定義出一集電與電路圖案。 Step S11: performing exposure and development, and patterning the first photoresist 62 to define a current collecting and circuit pattern.

步驟S12:以熱蒸鍍法鍍上一銅薄膜層64。 Step S12: plating a copper thin film layer 64 by a thermal evaporation method.

步驟S13:進行舉離製程,移除剩餘的第一光阻,以形成與該集電與電路圖案相對應的一銅薄膜圖案層65。 Step S13: A lift-off process is performed to remove the remaining first photoresist to form a copper thin film pattern layer 65 corresponding to the current collecting and circuit patterns.

步驟S14:塗布一第二光阻66。該第二光阻66可為正光阻。 Step S14: apply a second photoresist 66. The second photoresist 66 may be a positive photoresist.

步驟S15:進行曝光顯影,依據該集電與電路圖案,圖案化該第二光阻66。 Step S15: performing exposure and development, and patterning the second photoresist 66 according to the current collecting and circuit patterns.

步驟S16:形成一石墨薄膜層68。 Step S16: forming a graphite thin film layer 68.

步驟S17:進行舉離製程,移除剩餘的第二光阻,以在該銅薄膜圖案層65上形成與該集電與電路圖案相對應的石墨薄膜圖案層69。 Step S17: A lift-off process is performed to remove the remaining second photoresist to form a graphite thin film pattern layer 69 corresponding to the current collecting and circuit patterns on the copper thin film pattern layer 65.

PEMFC的基材可以採用PCB製程中所使用的FR4/Epoxy複合材料,導電層則使用熱蒸鍍製程(Thermal Evaporation)鍍上一層銅薄膜作為導電層。採用熱蒸鍍製程而非採用濺鍍沉積法(Sputtering Deposition)的主要原因,是因為熱蒸鍍法可以控制較快的沉積速率,可以製作出較厚的金屬薄膜,進而製作出導電性較高的集電板,濺鍍沉積法雖然有較佳的沉積 均勻性與階梯覆蓋性,但是要鍍厚的薄膜則較為困難,且需要花相當長的時間。由於此流程所製作出的具銅薄膜之PEMFC複材集電基板,將在後續的步驟中鍍上石墨薄膜抗腐蝕層,以及串接的導電電路,因此會先於FR4/Epoxy基板上在塗上一層正光阻與曝光顯影及高溫定型的步驟後,再熱蒸鍍上銅薄層,接著進行金屬舉離,製作金屬集電層所需的集電與電路圖案。隨後將進行二次塗佈正光阻、曝光顯影、高溫定型,如此集電基板已完成進行製作石墨薄膜抗之腐蝕層的前置準備。FR4 Glass/Epoxy基板厚度約為0.5mm,銅集電層的厚度約為30~50kÅ之間。在集電板完成石墨薄膜抗腐蝕層後,將進行舉離過程,以完成所需的石墨抗腐蝕層的集電與電路圖案,到此即完成具備銅薄膜集電層與石墨薄膜抗腐蝕層之集電板之製作。 The base material of PEMFC can be FR4 / Epoxy composite material used in the PCB manufacturing process, and the conductive layer is coated with a copper thin film as the conductive layer using Thermal Evaporation. The main reason for using thermal evaporation instead of sputtering deposition is that thermal evaporation can control a faster deposition rate, can produce thicker metal films, and thus has higher conductivity. Collector plate, sputter deposition method although better deposition Uniformity and step coverage, but it is more difficult to plate a thick film, and it takes a long time. Since the PEMFC composite collector substrate with copper film produced by this process will be coated with a graphite film anti-corrosion layer and conductive circuits connected in series in the subsequent steps, it will be coated on the FR4 / Epoxy substrate before After the previous steps of positive photoresist, exposure, development, and high-temperature sizing, a thin layer of copper is then thermally evaporated, and then the metal is lifted off to produce the current collecting and circuit patterns required for the metal current collecting layer. Subsequently, secondary coating of positive photoresist, exposure and development, and high-temperature setting will be performed. In this way, the current collector substrate has been prepared for the preparation of a corrosion-resistant layer of a graphite film. The thickness of the FR4 Glass / Epoxy substrate is about 0.5mm, and the thickness of the copper current collector layer is about 30 ~ 50kÅ. After the current collector plate has completed the graphite thin film anti-corrosion layer, the lift-off process will be performed to complete the current collecting and circuit pattern of the graphite anti-corrosion layer. This completes the copper thin film current collector layer and the graphite thin film anti-corrosion layer. The production of collector plates.

本發明並提出三種方法來製作石墨薄膜(對應上述步驟S16及S17),第一種方法為射頻磁控濺鍍,材料為石墨靶材;第二種方法為網板印刷,材料為石墨烯油墨;第三種方法為旋轉塗佈法,材料為石墨烯分散液。 The present invention also proposes three methods to make a graphite film (corresponding to steps S16 and S17 above). The first method is radio frequency magnetron sputtering and the material is a graphite target. The second method is screen printing and the material is graphene ink. The third method is a spin coating method, and the material is a graphene dispersion.

第一、射頻磁控濺鍍製作石墨薄膜抗腐蝕層 First, radio frequency magnetron sputtering to produce anticorrosive layer of graphite film

射頻磁控濺鍍的動作原理機制如第7及8圖所示,首先將石墨靶材置入濺鍍機的真空腔體後,將腔體抽真空,施加電力於兩極之間產生電子,這些加速電子與腔體內惰性氣體(如氬原子)碰撞時,會產生一個自由電子與帶正電的氬離子電漿,這些氬離子會受到陰極石墨靶材的吸引而撞擊石墨靶材,使石墨原 子或分子離開靶材表面,並以蒸氣的形式在真空腔體內行進,進而沉積於基板表面,形成石墨薄膜。 The operation principle and mechanism of RF magnetron sputtering is shown in Figures 7 and 8. First, the graphite target is placed in the vacuum cavity of the sputtering machine, the cavity is evacuated, and electricity is generated between the two electrodes to generate electrons. These When the accelerated electron collides with an inert gas in the cavity (such as argon atoms), a free electron and a positively charged argon ion plasma are generated. These argon ions will be attracted by the cathode graphite target and impact the graphite target, so that The electrons or molecules leave the surface of the target and travel in the vacuum cavity in the form of vapor, and then deposit on the surface of the substrate to form a graphite film.

第二、網板印刷製作石墨薄膜抗腐蝕層 Second, screen printing production of graphite film anti-corrosion layer

石墨烯導電油墨是其相當常見的一種運用,通常是由石墨烯、基底樹脂、助劑與溶劑等組成,使其具備有如導電等特殊功能的油墨產品,其具有優異的導電性、重量輕、加工條件良好易於控制與成本低等優點。第9圖為以網版印刷技術轉印石墨烯油墨於基板之示意圖。首先須將具銅集電層之複材集電基板平放,將石墨烯導電油墨倒入網板,再以刮刀刮抹石墨烯導電油墨,使其轉印至集電基板上,接著再將基板製入之真空烘箱,抽真空且加熱,將石墨烯油墨中的溶劑予以蒸發,提升其導電性,進而完成集電板中的石墨薄膜抗腐蝕層之製作。在真空烘箱的加熱過程中,為了避免石墨烯油墨之成份因沸騰蒸發形成孔洞而降低導電性,可以採用階梯式加熱,也就是分段逐步提高溫度。 Graphene conductive ink is a very common application. It is usually composed of graphene, base resin, auxiliary agent and solvent, which make it have ink products with special functions such as conductivity. It has excellent conductivity, light weight, Good processing conditions, easy control and low cost. FIG. 9 is a schematic diagram of transferring graphene ink to a substrate by screen printing technology. First, the composite current collector substrate with a copper current collector layer must be laid flat, the graphene conductive ink is poured into the screen, and then the graphene conductive ink is scraped with a scraper to transfer it to the current collector substrate. The vacuum oven in which the substrate is made is evacuated and heated to evaporate the solvent in the graphene ink to improve its conductivity, thereby completing the production of the anticorrosive layer of the graphite film in the current collector plate. In the heating process of the vacuum oven, in order to prevent the components of the graphene ink from forming holes due to boiling and evaporation, thereby reducing the conductivity, step heating can be adopted, that is, the temperature is gradually increased in stages.

第三、旋轉塗佈製作石墨薄膜抗腐蝕層 Third, spin coating to produce anticorrosive layer of graphite film

石墨烯也常以石墨烯懸浮液(Graphene Suspension)方式存在,其是一種均勻分散的石墨烯複合流體,本發明採用的石墨烯懸浮液,主要是以石墨烯薄片分散於乙醇溶劑中,再以旋轉塗佈方式,將石墨烯懸浮液均勻地塗佈在具銅導電層的集電基板上。完成後,再將集電基板置入真空烘箱,以階梯式加熱方式逐漸增溫,使乙醇溶劑揮發後,留下石墨烯薄膜。第10圖為旋轉塗佈治具設計示意圖。其中在進行旋轉塗佈過程時,可以製作一 圓形的治具,將集電基板置於此治具內,使石墨烯懸浮液得以更均勻順暢地分佈在集電基板上,此外圓形最外圈可設計成一溝槽,讓甩出去的石墨烯懸浮液得以回收後再用,節省材料。 Graphene also often exists as a graphene suspension (Graphene Suspension), which is a uniformly dispersed graphene composite fluid. The graphene suspension used in the present invention is mainly dispersed in graphene flakes in an ethanol solvent, and then In a spin coating method, a graphene suspension is uniformly coated on a current collector substrate having a copper conductive layer. After the completion, the current collecting substrate was placed in a vacuum oven, and the temperature was gradually increased in a stepwise heating manner to evaporate the ethanol solvent, leaving a graphene film. Figure 10 is a schematic design of a spin coating jig. During the spin coating process, one can make a The round fixture, the current collector substrate is placed in this fixture, so that the graphene suspension can be more evenly and smoothly distributed on the current collector substrate. In addition, the outermost circle of the circle can be designed as a groove to allow the The graphene suspension is recovered and reused, saving material.

本發明中,將石墨薄膜應用於質子交換膜燃料電池之集電板,以提升集電板的抗腐蝕性,進而維持燃料電池長時間運作的穩定性。於一實施例中,在製作該集電板的過程中,以FR4/Epoxy複合材料做為基材,在表面製作出集電層與抗腐蝕層。其中集電層是以熱蒸鍍法鍍上銅薄膜,石墨薄膜作為抗腐蝕層,以提升抗腐蝕性。本發明其他實施例提供了射頻磁控濺鍍、網板印刷、旋轉塗佈等三種不同方法製作集電板的石墨薄膜抗腐蝕層。 In the present invention, a graphite thin film is applied to a current collector plate of a proton exchange membrane fuel cell to improve the corrosion resistance of the current collector plate, thereby maintaining the stability of the fuel cell's long-term operation. In an embodiment, in the process of manufacturing the current collector plate, a FR4 / Epoxy composite material is used as a base material, and a current collector layer and an anti-corrosion layer are formed on the surface. The current collector layer is coated with a copper film by a thermal evaporation method, and a graphite film is used as an anti-corrosion layer to improve the corrosion resistance. Other embodiments of the present invention provide three different methods, such as radio frequency magnetron sputtering, screen printing, and spin coating, to produce a graphite film anticorrosive layer for a current collector plate.

本發明本發明已用較佳實施例揭露如上,然其並非用以限定本發明,本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 The present invention has been disclosed as above with preferred embodiments, but it is not intended to limit the present invention. Those with ordinary knowledge in the technical field to which the present invention pertains may make various changes without departing from the spirit and scope of the present invention. And retouching, so the scope of protection of the present invention shall be determined by the scope of the attached patent application.

Claims (8)

一種燃料電池之集電板的製造方法,包含:於一樹脂基板上塗布一第一光阻;進行曝光顯影,圖案化該第一光阻,以定義出一集電與電路圖案;以熱蒸鍍法鍍上一銅薄膜層;進行舉離製程,移除剩餘的第一光阻,以形成與該集電與電路圖案相對應的一銅薄膜圖案層;塗布一第二光阻;進行曝光顯影,依據該集電與電路圖案,圖案化該第二光阻;形成一石墨薄膜層;以及進行舉離製程,移除剩餘的第二光阻,以在該銅薄膜圖案層上形成與該集電與電路圖案相對應的石墨薄膜圖案層。A manufacturing method of a fuel cell current collector plate includes: coating a first photoresist on a resin substrate; performing exposure and development, and patterning the first photoresist to define a current collecting and circuit pattern; A copper thin film layer is plated by plating; a lift-off process is performed to remove the remaining first photoresist to form a copper thin film pattern layer corresponding to the current collecting and circuit pattern; a second photoresist is applied; and exposure is performed Developing, patterning the second photoresist according to the current collecting and circuit pattern; forming a graphite thin film layer; and performing a lift-off process to remove the remaining second photoresist to form the copper thin film pattern layer and the Collects the graphite thin film pattern layer corresponding to the circuit pattern. 如申請專利範圍第1項所述之方法,其中形成該石墨薄膜層的步驟包含:以石墨靶材為材料,利用射頻磁控濺鍍法形成該石墨薄膜層。The method according to item 1 of the scope of the patent application, wherein the step of forming the graphite thin film layer includes: using a graphite target as a material to form the graphite thin film layer by a radio frequency magnetron sputtering method. 如申請專利範圍第1項所述之方法,其中形成該石墨薄膜層的步驟包含:以石墨烯油墨為材料,利用網板印刷法形成該石墨薄膜層。The method according to item 1 of the scope of the patent application, wherein the step of forming the graphite thin film layer includes: using a graphene ink as a material to form the graphite thin film layer by a screen printing method. 如申請專利範圍第1項所述之方法,其中形成該石墨薄膜層的步驟包含:以石墨烯分散液為材料,利用旋轉塗佈法形成該石墨薄膜層。The method according to item 1 of the scope of the patent application, wherein the step of forming the graphite thin film layer comprises: using the graphene dispersion liquid as a material to form the graphite thin film layer by a spin coating method. 如申請專利範圍第1項所述之方法,其中在圖案化該第一光阻的步驟後包含一對該第一光阻進行高溫定型的步驟;在圖案化該第二光阻的步驟後包含一對該第二光阻進行高溫定型的步驟。The method according to item 1 of the patent application scope, wherein the step of patterning the first photoresist includes a step of performing a high-temperature setting of the pair of the first photoresist; and after the step of patterning the second photoresist, the method includes A step of setting the second photoresist at a high temperature. 如申請專利範圍第1項所述之方法,其中該第一光阻和該第二光阻為正光阻。The method according to item 1 of the patent application range, wherein the first photoresist and the second photoresist are positive photoresists. 如申請專利範圍第1項所述之方法,其中該燃料電池為質子交換膜燃料電池(Proton Exchange Membrane Fuel Cell,PEMFC)。The method according to item 1 of the application, wherein the fuel cell is a Proton Exchange Membrane Fuel Cell (PEMFC). 如申請專利範圍第1項所述之方法,其中該燃料電池為直接甲醇燃料電池(Direct Methanol Fuel Cell,DMFC)。The method according to item 1 of the scope of patent application, wherein the fuel cell is a direct methanol fuel cell (DMFC).
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM280544U (en) * 2005-07-25 2005-11-11 Antig Tech Co Ltd Electricity collection board for use with fuel cell
TW201733193A (en) * 2016-03-14 2017-09-16 國立勤益科技大學 Power bank module utilizing light-weight proton exchange membrane fuel cell (PEMFC)

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM280544U (en) * 2005-07-25 2005-11-11 Antig Tech Co Ltd Electricity collection board for use with fuel cell
TW201733193A (en) * 2016-03-14 2017-09-16 國立勤益科技大學 Power bank module utilizing light-weight proton exchange membrane fuel cell (PEMFC)

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