TWI653797B - Esd protected integrated circuit and esd detection circuit - Google Patents
Esd protected integrated circuit and esd detection circuit Download PDFInfo
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Abstract
本發明提供了一種ESD保護積體電路以及ESD檢測電路。ESD保護積體電路包括功能電路和ESD檢測電路,功能電路耦接到第一電源電壓和第二電源電壓,功能電路包括至少一個功能封裝球,以及ESD檢測電路耦接到第二電源電壓,ESD檢測電路不耦接到第一電源電壓並且不耦接到功能電路的至少一個功能封裝球。本發明可以減少ESD失效分析的時間成本,並且還可以用以改善IC裝配或測試期間的ESD保護。 The present invention provides an ESD protection integrated circuit and an ESD detection circuit. The ESD protection integrated circuit includes a functional circuit coupled to the first power supply voltage and the second power supply voltage, the functional circuit including at least one functional package ball, and the ESD detection circuit coupled to the second power supply voltage, ESD The detection circuit is not coupled to the first supply voltage and is not coupled to at least one functional package ball of the functional circuit. The present invention can reduce the time cost of ESD failure analysis and can also be used to improve ESD protection during IC assembly or testing.
Description
本發明涉及靜電放電(Electrostatic Discharge,ESD)檢測電路以及應用了該ESD檢測電路的ESD保護積體電路(integrated circuit,IC)。 The present invention relates to an Electrostatic Discharge (ESD) detection circuit and an ESD protection integrated circuit (IC) to which the ESD detection circuit is applied.
現代高密度IC容易受到來自帶電體(人類或其他)的ESD的損害,特別係當帶電體接觸IC時。靜電放電現象將給半導體器件帶來損害,且會影響IC的正常功能。 Modern high-density ICs are susceptible to damage from ESDs from charged bodies (human or other), especially when charged bodies contact ICs. Electrostatic discharge can cause damage to semiconductor devices and affect the normal function of the IC.
當電荷量超過通過IC的電傳導路徑的能力時,發生ESD損害。典型的ESD失效機制包括在金屬氧化物半導體(metal-oxide-semiconductor,MOS)背景下的結短路(junction shorting)引起的熱耗散(thermal runaway)和閘結短路引起的介質擊穿(dielectric breakdown)。 ESD damage occurs when the amount of charge exceeds the ability to pass the electrical conduction path of the IC. Typical ESD failure mechanisms include thermal runaway caused by junction shorting in the metal-oxide-semiconductor (MOS) background and dielectric breakdown caused by gate junction short-circuit (dielectric breakdown) ).
IC可能在製造過程中、組裝、測試期間或系統應用中受到ESD事件的損害。因此,對IC設計者來說,在設計階段提高積體電路的ESD保護以增加ESD敏感度係一個必要的目標。 The IC may be damaged by ESD events during manufacturing, assembly, testing, or system applications. Therefore, it is a necessary goal for IC designers to improve the ESD protection of integrated circuits during the design phase to increase ESD sensitivity.
有鑑於此,本發明提供一種ESD保護積體電路以及ESD檢測電路,以解決上述問題。 In view of this, the present invention provides an ESD protection integrated circuit and an ESD detection circuit to solve the above problems.
根據至少一個實施方式,提供了一種ESD保護積體電路,包括功能電路和ESD檢測電路,該功能電路耦接到第一電源電壓和第二電源電壓,該功能電路包括至少一個功能封裝球,以及該ESD檢測電路耦接到該第二電源電壓,該ESD檢測電路不耦接到該第一電源電壓並且不耦接到該功能電路的該至少一個功能封裝球。 According to at least one embodiment, an ESD protection integrated circuit is provided, including a functional circuit and an ESD detection circuit coupled to a first supply voltage and a second supply voltage, the functional circuit including at least one functional package ball, and The ESD detection circuit is coupled to the second supply voltage, the ESD detection circuit is not coupled to the first supply voltage and is not coupled to the at least one functional package ball of the functional circuit.
根據至少一個實施方式,提供了一種ESD檢測電路,用於ESD保護積體電路中,該ESD保護積體電路包括具有至少一個功能封裝球並且耦接到第一電源電壓和第二電源電壓的功能電路,該ESD檢測電路包括:至少一個ESD封裝球,該ESD檢測電路的該ESD封裝球不耦接到該功能電路的該功能封裝球並且不耦接到該第一電源電壓;並行連接的複數個放電路徑,耦接在該ESD封裝球和該第二電源電壓之間,用於對ESD應激事件放電,該複數個放電路徑具有彼此不同的放電電流;以及ESD指示電路,耦接在該ESD封裝球和該第二電源電壓之間,該ESD指示電路處於與ESD合格相關的開啟狀態或者處於與ESD失效相關的短路狀態。 In accordance with at least one embodiment, an ESD detection circuit is provided for use in an ESD protection integrated circuit that includes a function having at least one functional package ball and coupled to a first supply voltage and a second supply voltage a circuit, the ESD detection circuit includes: at least one ESD package ball, the ESD package ball of the ESD detection circuit is not coupled to the function package ball of the function circuit and is not coupled to the first power voltage; a discharge path coupled between the ESD package ball and the second supply voltage for discharging an ESD stress event, the plurality of discharge paths having different discharge currents from each other; and an ESD indicating circuit coupled to the Between the ESD package ball and the second supply voltage, the ESD indicating circuit is in an open state associated with ESD pass or in a short circuit condition associated with an ESD failure.
通過本發明可以減少ESD失效分析的時間成本,並且還可以用以改善IC裝配或測試期間的ESD保護。 The time cost of ESD failure analysis can be reduced by the present invention and can also be used to improve ESD protection during IC assembly or testing.
所屬技術領域中具有通常知識者在閱讀附圖所示優選實施例的下述詳細描述之後,可以毫無疑義地理解本發明的這些目的及其它目的。 These and other objects of the present invention will be apparent from the following detailed description of the preferred embodiments.
100‧‧‧ESD保護IC 100‧‧‧ESD Protection IC
110、110A、110B、110C、110D‧‧‧ESD檢測電路 110, 110A, 110B, 110C, 110D‧‧‧ ESD detection circuit
120_1、120_N‧‧‧電路 120_1, 120_N‧‧‧ circuits
120‧‧‧功能電路 120‧‧‧Functional circuit
VDD‧‧‧高電源電壓 VDD‧‧‧High power supply voltage
VSS‧‧‧低電源電壓 VSS‧‧‧Low supply voltage
210、310、410、510‧‧‧ESD指示電路 210, 310, 410, 510‧‧‧ESD indicating circuit
D1、D2、D3‧‧‧二極體 D1, D2, D3‧‧‧ diode
P1、P2‧‧‧放電路徑 P1, P2‧‧‧ discharge path
MN1、MN2、MN3‧‧‧NMOS電晶體 MN1, MN2, MN3‧‧‧ NMOS transistor
MP1、MP2、MP3‧‧‧PMOS電晶體 MP1, MP2, MP3‧‧‧ PMOS transistors
通過閱讀後續的詳細描述和實施例可以更全面地理解本發明,該實施例參照附圖給出,其中:第1圖根據本發明的一個實施方式示出了ESD保護IC的原理框圖。 The invention will be more fully understood by reading the following detailed description and embodiments, which are illustrated by the accompanying drawings in which: FIG. 1 shows a schematic block diagram of an ESD protection IC in accordance with an embodiment of the present invention.
第2圖至第5圖根據本發明的不同實施方式示出了ESD檢測電路。在下面的詳細描述中,為了說明的目的,闡述了許多具體細節,以便本領域所屬技術領域中具有通常知識者能夠更透徹地理解本發明實施例。然而,顯而易見的係,可以在沒有這些具體細節的情況下實施一個或複數個實施例,不同的實施例可根據需求相結合,而並不應當僅限於附圖所列舉的實施例。 Figures 2 through 5 illustrate an ESD detection circuit in accordance with various embodiments of the present invention. In the following detailed description, numerous specific details are set forth in the However, it is apparent that one or more embodiments may be practiced without these specific details, and different embodiments may be combined as needed, and should not be limited to the embodiments illustrated in the drawings.
以下描述為本發明實施的較佳實施例。以下實施例僅用來例舉闡釋本發明的技術特徵,並非用來限制本發明的範疇。在通篇說明書及申請專利範圍當中使用了某些詞彙來指稱特定的組件。所屬技術領域中具有通常知識者應可理解,製造商可能會用不同的名詞來稱呼同樣的組件。本說明書及申請專利範圍並不以名稱的差異來作為區別組件的方式,而係以組件在功能上的差異來作為區別的基準。本發明的範圍應當參考后附的申請專利範圍來確定。在以下描述和申請專利範圍當中所提及的術語“包含”和“包括”為開放式用語,故應解釋成“包含,但不限定於...”的意思。此外,術 語“耦接”意指間接或直接的電氣連接。因此,若文中描述一個裝置耦接至另一裝置,則代表該裝置可直接電氣連接於該另一裝置,或者透過其它裝置或連接手段間接地電氣連接至該另一裝置。 The following description is of a preferred embodiment of the invention. The following examples are merely illustrative of the technical features of the present invention and are not intended to limit the scope of the present invention. Certain terms are used throughout the specification and claims to refer to particular components. It should be understood by those of ordinary skill in the art that manufacturers may refer to the same components by different nouns. This specification and the scope of the patent application do not use the difference of the names as the means for distinguishing the components, but the difference in function of the components as the basis for the difference. The scope of the invention should be determined with reference to the appended claims. The terms "comprising" and "including" as used in the following description and claims are intended to be interpreted as "included, but not limited to". In addition, surgery The term "coupled" means an indirect or direct electrical connection. Thus, if a device is described as being coupled to another device, it is meant that the device can be directly electrically connected to the other device or indirectly electrically connected to the other device through other means or means.
文中所用術語“基本”或“大致”係指在可接受的範圍內,所屬技術領域中具有通常知識者能夠解決所要解決的技術問題,基本達到所要達到的技術效果。舉例而言,“大致等於”係指在不影響結果正確性時,所屬技術領域中具有通常知識者能夠接受的與“完全等於”有一定誤差的方式。 The term "substantially" or "substantially" as used herein refers to an acceptable range, and those skilled in the art can solve the technical problems to be solved and substantially achieve the desired technical effect. For example, "substantially equal" refers to a manner in which a person of ordinary skill in the art can accept a certain degree of error with "completely equal" without affecting the correctness of the result.
第1圖根據本發明的一個實施方式示出了ESD保護IC 100的原理框圖。如第1圖所示,ESD保護IC 100包括ESD檢測電路110和功能電路120。ESD檢測電路110包括封裝球(即,ESD封裝球)0-1、...0-a(“a”係大於或等於1的整數)。功能電路120包括電路120-1、...120-N(N係大於或等於1的整數)。功能電路120的電路120-1包括封裝球(即,功能封裝球)1-1、...1-b(“b”係大於或等於1的整數)。功能電路120的電路120-N包括封裝球N-1、...N-n(“n”係大於或等於1的整數)。 Figure 1 shows a functional block diagram of an ESD protection IC 100 in accordance with one embodiment of the present invention. As shown in FIG. 1, the ESD protection IC 100 includes an ESD detection circuit 110 and a function circuit 120. The ESD detection circuit 110 includes package balls (ie, ESD package balls) 0-1, . . . 0-a ("a" is an integer greater than or equal to one). The functional circuit 120 includes circuits 120-1, ... 120-N (N is an integer greater than or equal to 1). The circuit 120-1 of the functional circuit 120 includes package balls (i.e., functional package balls) 1-1, ... 1-b ("b" is an integer greater than or equal to 1). The circuit 120-N of the functional circuit 120 includes package balls N-1, . . . N-n ("n" is an integer greater than or equal to one).
如第1圖所示,ESD檢測電路110的封裝球0-1、...0-a不耦接到高電源電壓VDD。功能電路120的封裝球1-1、...N-n耦接到高電源電壓VDD(也稱為第一電源電壓)、信號引腳或者接地。並且,功能電路120的封裝球1-1、...N-n中的至少一個封裝球耦接到高電源電壓VDD,其他的封裝球可以耦接到信號引腳或者接地。此外,ESD檢測電路110的封裝球0-1、...0-a不耦接到功能電路120的封裝球1-1、...N-n。但是,ESD檢測電路110和功能電路120共用低電源電壓VSS(也稱為第二電源電壓)。 As shown in FIG. 1, the package balls 0-1, ... 0-a of the ESD detection circuit 110 are not coupled to the high power supply voltage VDD. The package balls 1-1, . . . N-n of the functional circuit 120 are coupled to a high supply voltage VDD (also referred to as a first supply voltage), a signal pin, or a ground. Also, at least one of the package balls 1-1, . . . N-n of the functional circuit 120 is coupled to the high supply voltage VDD, and the other package balls may be coupled to the signal pins or to ground. Further, the package balls 0-1, . . . , 0-a of the ESD detection circuit 110 are not coupled to the package balls 1-1, . . . N-n of the function circuit 120. However, the ESD detection circuit 110 and the function circuit 120 share a low power supply voltage VSS (also referred to as a second power supply voltage).
在正常操作(即,沒有ESD應激事件發生)時,功能電路120係 正常的,並且ESD檢測電路110的等效電阻高於電阻閾值(例如,但不限於,ESD檢測電路110的正常等效電阻可以係幾千歐姆)。也就係講,如果ESD檢測電路110從未被比ESD檢測電路的ESD保護閾值高的ESD應激事件衝擊,則ESD檢測電路110處於開啟狀態(open state)(即,ESD合格(ESD pass))。 In normal operation (ie, no ESD stress event occurs), the functional circuit 120 is Normal, and the equivalent resistance of the ESD detection circuit 110 is above the resistance threshold (eg, but not limited to, the normal equivalent resistance of the ESD detection circuit 110 can be several thousand ohms). That is, if the ESD detection circuit 110 is not impacted by an ESD stress event that is higher than the ESD protection threshold of the ESD detection circuit, the ESD detection circuit 110 is in an open state (ie, ESD pass). ).
當ESD應激事件發生時,ESD檢測電路110將對ESD應激事件放電以保護功能電路120。然而,如果ESD應激事件ESD超過了ESD檢測電路110的ESD保護閾值,那麼ESD檢測電路110將被損壞,因而ESD檢測電路110的等效電阻將非常低(例如,但不限於1歐姆)。即,如果ESD檢測電路110已被比ESD檢測電路的ESD保護閾值高的ESD應激事件衝擊,則ESD檢測電路110的等效電阻會低於電阻閾值,並且ESD檢測電路110處於短路狀態(short state)(例如,ESD失效(ESD failed))。 When an ESD stress event occurs, the ESD detection circuit 110 will discharge the ESD stress event to protect the functional circuit 120. However, if the ESD stress event ESD exceeds the ESD protection threshold of the ESD detection circuit 110, the ESD detection circuit 110 will be damaged and thus the equivalent resistance of the ESD detection circuit 110 will be very low (eg, but not limited to 1 ohm). That is, if the ESD detection circuit 110 has been struck by an ESD stress event that is higher than the ESD protection threshold of the ESD detection circuit, the equivalent resistance of the ESD detection circuit 110 may be lower than the resistance threshold, and the ESD detection circuit 110 is in a short-circuit state (short State) (for example, ESD failed).
因此,通過將ESD檢測電路110的封裝球耦接到ESD測試引腳(未示出)用於讀取ESD檢測電路110的等效電阻,則可以確定ESD檢測電路110是否損壞(由於ESD應激事件高於保護閾值)。也就係說,如果ESD檢測電路110的等效電阻比電阻閾值高,則ESD檢測電路110係正常的。如果ESD檢測電路110的等效電阻低於電阻閾值,則ESD檢測電路110由於非常高的ESD應激事件已經係損壞的。 Therefore, by coupling the package ball of the ESD detection circuit 110 to the ESD test pin (not shown) for reading the equivalent resistance of the ESD detection circuit 110, it can be determined whether the ESD detection circuit 110 is damaged (due to ESD stress) The event is above the protection threshold). That is to say, if the equivalent resistance of the ESD detecting circuit 110 is higher than the resistance threshold, the ESD detecting circuit 110 is normal. If the equivalent resistance of the ESD detection circuit 110 is below the resistance threshold, the ESD detection circuit 110 is already damaged due to the very high ESD stress event.
第2圖至第5圖根據本發明的幾個可能的實施方式示出了ESD檢測電路。現在參考第2圖。如第2圖所示,根據本發明的一個實施方式,ESD檢測電路110A包括放電路徑P1、P2和ESD指示電路210。放電路徑P1、P2並行連接。 Figures 2 through 5 illustrate an ESD detection circuit in accordance with several possible embodiments of the present invention. Refer now to Figure 2. As shown in FIG. 2, in accordance with an embodiment of the present invention, ESD detection circuit 110A includes discharge paths P1, P2 and ESD indicating circuit 210. The discharge paths P1, P2 are connected in parallel.
放電路徑P1包括二極體D1。二極體D1耦接在封裝球0-1與低電源電壓VSS之間。放電路徑P1對ESD保護IC處的負ESD應激電壓進行放電。 The discharge path P1 includes a diode D1. The diode D1 is coupled between the package ball 0-1 and the low power supply voltage VSS. The discharge path P1 discharges the negative ESD stress voltage at the ESD protection IC.
放電路徑P2包括串聯的二極體D2和D3。二極體D2耦接在封裝球0-1和二極體D3的一端之間。二極體D3耦接在二極體D2的一端和低電源電壓VSS之間。放電路徑P2對ESD保護IC處的正ESD應激電壓進行放電。因此,放電路徑P1和P2具有彼此不同的放電方向。並且,放電路徑P1和P2具有相反的放電方向。 The discharge path P2 includes diodes D2 and D3 connected in series. The diode D2 is coupled between the package ball 0-1 and one end of the diode D3. The diode D3 is coupled between one end of the diode D2 and the low power supply voltage VSS. The discharge path P2 discharges the positive ESD stress voltage at the ESD protection IC. Therefore, the discharge paths P1 and P2 have discharge directions different from each other. Also, the discharge paths P1 and P2 have opposite discharge directions.
ESD指示電路210由例如但不限於NMOS電晶體MN1實現。NMOS電晶體MN1包括耦接到封裝球0-1的第一端(例如但不限於閘極)、均耦接到低電源電壓VSS的第二端和第三端(例如但不限於源極和漏極)。 The ESD indicating circuit 210 is implemented by, for example, but not limited to, an NMOS transistor MN1. The NMOS transistor MN1 includes a first end coupled to the package ball 0-1 (such as, but not limited to, a gate), a second end and a third end each coupled to the low supply voltage VSS (such as, but not limited to, a source and Drain).
正常情況下,在ESD保護IC中沒有ESD應激事件。因此,正常情況下,放電路徑P1和P2上沒有放電電流,並且ESD指示電路210係關斷的。因此,正常情況下,ESD指示電路210具有高等效電阻。 Under normal circumstances, there is no ESD stress event in the ESD protection IC. Therefore, under normal conditions, there is no discharge current on the discharge paths P1 and P2, and the ESD indicating circuit 210 is turned off. Therefore, under normal circumstances, the ESD indicating circuit 210 has a high equivalent resistance.
如果在ESD保護IC中發生的ESD應激事件低於ESD檢測電路110A的保護閾值,則放電路徑P1和P2中至少一個放電路徑導電對ESD應激事件進行放電用於保護ESD保護IC。然而,如果ESD應激事件過高,超過了ESD檢測電路110A的保護閾值,則ESD指示電路210的NMOS電晶體MN1將損壞(即使過高ESD應激事件通過放電路徑P1或P2放電),因此,NMOS電晶體MN1的等效電阻將非常低(即,ESD失效)。 If the ESD stress event occurring in the ESD protection IC is lower than the protection threshold of the ESD detection circuit 110A, at least one of the discharge paths P1 and P2 conducts to discharge the ESD stress event for protection of the ESD protection IC. However, if the ESD stress event is too high and exceeds the protection threshold of the ESD detection circuit 110A, the NMOS transistor MN1 of the ESD indication circuit 210 will be damaged (even if an excessively high ESD stress event is discharged through the discharge path P1 or P2), The equivalent resistance of the NMOS transistor MN1 will be very low (ie, ESD is disabled).
因此,通過檢查ESD檢測電路110A的等效電阻,可以確定高ESD應激事件是否已經發生。 Therefore, by checking the equivalent resistance of the ESD detecting circuit 110A, it can be determined whether a high ESD stress event has occurred.
現在參考第3圖。如第3圖所示,根據本發明的一個實施方式,ESD檢測電路110B包括放電路徑P1、P2和ESD指示電路310。放電路徑P1、P2可以與第2圖中類似,此處不再贅述。 Refer now to Figure 3. As shown in FIG. 3, in accordance with an embodiment of the present invention, ESD detection circuit 110B includes discharge paths P1, P2 and ESD indicating circuit 310. The discharge paths P1 and P2 can be similar to those in FIG. 2 and will not be described again here.
ESD指示電路310由例如但不限於複數個級聯的NMOS電晶體MN2和MN3實現。NMOS電晶體MN2包括浮動的第一端(例如但不限於閘極)、耦接到封裝球0-1的第二端(例如但不限於漏極)和耦接到NMOS電晶體MN3的第三端(例如但不限於源極)。NMOS電晶體MN3包括耦接到低電源電壓VSS的第一端(例如但不限於閘極)、耦接到NMOS電晶體MN2的第三端的第二端(例如但不限於漏極)和耦接到低電源電壓VSS的第三端(例如但不限於源極)。 The ESD indicating circuit 310 is implemented by, for example, but not limited to, a plurality of cascaded NMOS transistors MN2 and MN3. NMOS transistor MN2 includes a floating first end (such as, but not limited to, a gate), a second end coupled to package ball 0-1 (such as, but not limited to, a drain), and a third coupled to NMOS transistor MN3 End (such as but not limited to source). The NMOS transistor MN3 includes a first end (such as, but not limited to, a gate) coupled to the low supply voltage VSS, a second end (such as, but not limited to, a drain) coupled to the third end of the NMOS transistor MN2, and coupled To the third end of the low supply voltage VSS (such as but not limited to a source).
正常情況下,在ESD保護IC中沒有ESD應激事件。因此,正常情況下,放電路徑P1和P2上沒有放電電流,並且ESD指示電路310係關斷的(即,NMOS電晶體MN2和MN3係關斷的)。因此,正常情況下,ESD指示電路310具有高等效電阻(即,ESD合格)。 Under normal circumstances, there is no ESD stress event in the ESD protection IC. Therefore, under normal conditions, there is no discharge current on the discharge paths P1 and P2, and the ESD indicating circuit 310 is turned off (i.e., the NMOS transistors MN2 and MN3 are turned off). Therefore, under normal circumstances, the ESD indicating circuit 310 has a high equivalent resistance (ie, ESD pass).
如果在ESD保護1C中發生的ESD應激事件低於ESD檢測電路110B的保護閾值,則放電路徑P1和P2中至少一個放電路徑導電對ESD應激事件進行放電用於保護ESD保護IC。然而,如果ESD應激事件過高,超過了ESD檢測電路110B的保護閾值,則ESD指示電路310的NMOS電晶體MN2和MN3將損壞(即使過高ESD應激事件通過放電路徑P1或P2放電),因此,NMOS電晶體MN2和MN3都將發生漏-源短路。因此,如果ESD應激事件過高並且超過了ESD檢測電路110B的保護閾值,NMOS電晶體MN2和MN3的等效電阻將非常低(即,ESD失效)。 If the ESD stress event occurring in the ESD protection 1C is lower than the protection threshold of the ESD detection circuit 110B, at least one of the discharge paths P1 and P2 is electrically discharged to discharge the ESD stress event for protecting the ESD protection IC. However, if the ESD stress event is too high and exceeds the protection threshold of the ESD detection circuit 110B, the NMOS transistors MN2 and MN3 of the ESD indication circuit 310 will be damaged (even if an excessively high ESD stress event is discharged through the discharge path P1 or P2) Therefore, both the NMOS transistors MN2 and MN3 will have a drain-source short circuit. Therefore, if the ESD stress event is too high and exceeds the protection threshold of the ESD detection circuit 110B, the equivalent resistance of the NMOS transistors MN2 and MN3 will be very low (ie, ESD is disabled).
因此,通過檢查ESD檢測電路110B的等效電阻,可以確定高ESD應激事件是否已經發生。 Therefore, by checking the equivalent resistance of the ESD detecting circuit 110B, it can be determined whether a high ESD stress event has occurred.
現在參考第4圖。如第4圖所示,根據本發明的一個實施方式,ESD檢測電路110C包括放電路徑P1、P2和ESD指示電路410。放電路徑P1、P2可以與第2圖中類似,此處不再贅述。 Refer now to Figure 4. As shown in FIG. 4, in accordance with an embodiment of the present invention, ESD detection circuit 110C includes discharge paths P1, P2 and ESD indicating circuit 410. The discharge paths P1 and P2 can be similar to those in FIG. 2 and will not be described again here.
ESD指示電路410由例如但不限於複數個級聯的PMOS電晶體MP1和MP2實現。PMOS電晶體MP1的第一端(例如但不限於閘極)耦接到封裝球0-1、第二端(例如但不限於漏極)耦接到PMOS電晶體MP2、第三端(例如但不限於源極)耦接到封裝球0-1和PMOS電晶體MP1的第一端。PMOS電晶體MP2的第一端(例如但不限於閘極)係浮動的、第二端(例如但不限於漏極)耦接到低電源電壓VSS、第三端(例如但不限於源極)耦接到PMOS電晶體MP1的第二端。 The ESD indicating circuit 410 is implemented by, for example, but not limited to, a plurality of cascaded PMOS transistors MP1 and MP2. A first end of the PMOS transistor MP1 (such as but not limited to a gate) is coupled to the package ball 0-1, and a second end (such as but not limited to a drain) is coupled to the PMOS transistor MP2, the third end (eg, but Not limited to the source) is coupled to the package ball 0-1 and the first end of the PMOS transistor MP1. A first end (such as but not limited to a gate) of the PMOS transistor MP2 is floating, and a second end (such as but not limited to a drain) is coupled to the low power supply voltage VSS, the third end (such as but not limited to a source) It is coupled to the second end of the PMOS transistor MP1.
正常情況下,在ESD保護IC中沒有ESD應激事件。因此,正常情況下,放電路徑P1和P2上沒有放電電流,並且ESD指示電路410係斷開的(即,PMOS電晶體MP1和MP2係關斷的)。因此,正常情況下,ESD指示電路410具有高等效電阻。 Under normal circumstances, there is no ESD stress event in the ESD protection IC. Therefore, under normal conditions, there is no discharge current on the discharge paths P1 and P2, and the ESD indicating circuit 410 is turned off (i.e., the PMOS transistors MP1 and MP2 are turned off). Therefore, under normal circumstances, the ESD indicating circuit 410 has a high equivalent resistance.
如果在ESD保護IC中發生的ESD應激事件低於ESD檢測電路110C的保護閾值,則放電路徑P1和P2中至少一個放電路徑導電對ESD應激事件進行放電用於保護ESD保護IC。然而,如果ESD應激事件過高,超過了ESD檢測電路110C的保護閾值,則ESD指示電路410的PMOS電晶體MP1和MP2將損壞(即使過高ESD應激事件通過放電路徑P1或P2放電),因此,PMOS電晶體MP1和MP2都將發生漏-源短路。因此,如果 ESD應激事件過高並且超過了ESD檢測電路110C的保護閾值,PMOS電晶體MP1和MP2的等效電阻將非常低。 If the ESD stress event occurring in the ESD protection IC is lower than the protection threshold of the ESD detection circuit 110C, at least one of the discharge paths P1 and P2 conducts to discharge the ESD stress event for protection of the ESD protection IC. However, if the ESD stress event is too high and exceeds the protection threshold of the ESD detection circuit 110C, the PMOS transistors MP1 and MP2 of the ESD indication circuit 410 will be damaged (even if an excessively high ESD stress event is discharged through the discharge path P1 or P2) Therefore, both the PMOS transistors MP1 and MP2 will have a drain-source short circuit. So if The ESD stress event is too high and exceeds the protection threshold of the ESD detection circuit 110C, and the equivalent resistance of the PMOS transistors MP1 and MP2 will be very low.
因此,通過檢查ESD檢測電路110C的等效電阻,可以確定高ESD應激事件是否已經發生。 Therefore, by checking the equivalent resistance of the ESD detecting circuit 110C, it can be determined whether a high ESD stress event has occurred.
現在參考第5圖。如第5圖所示,根據本發明的一個實施方式,ESD檢測電路110D包括放電路徑P1、P2和ESD指示電路510。放電路徑P1、P2可以與第2圖中類似,此處不再贅述。 Refer now to Figure 5. As shown in FIG. 5, in accordance with an embodiment of the present invention, ESD detection circuit 110D includes discharge paths P1, P2 and ESD indicating circuit 510. The discharge paths P1 and P2 can be similar to those in FIG. 2 and will not be described again here.
ESD指示電路510由例如但不限於PMOS電晶體MP3實現。PMOS電晶體MP3的第一端(例如但不限於閘極)耦接到低電源電壓VSS、第二端和第三端(例如但不限於漏極和源極)均耦接到封裝球0-1。 The ESD indicating circuit 510 is implemented by, for example, but not limited to, a PMOS transistor MP3. A first end of the PMOS transistor MP3 (such as but not limited to a gate) is coupled to the low supply voltage VSS, and the second end and the third end (such as but not limited to the drain and the source) are coupled to the package ball 0- 1.
正常情況下,在ESD保護IC中沒有ESD應激事件。因此,正常情況下,放電路徑P1和P2上沒有放電電流,並且ESD指示電路510係斷開的。因此,正常情況下,ESD指示電路510具有高等效電阻。 Under normal circumstances, there is no ESD stress event in the ESD protection IC. Therefore, under normal conditions, there is no discharge current on the discharge paths P1 and P2, and the ESD indicating circuit 510 is disconnected. Therefore, under normal circumstances, the ESD indicating circuit 510 has a high equivalent resistance.
如果在ESD保護IC中發生的ESD應激事件低於ESD檢測電路110D的保護閾值,則放電路徑P1和P2中至少一個放電路徑導電對ESD應激事件進行放電用於保護ESD保護IC。然而,如果ESD應激事件過高,超過了ESD檢測電路110D的保護閾值,則ESD指示電路510的PMOS電晶體MP3將損壞(即使過高ESD應激事件通過放電路徑P1或P2放電),因此,PMOS電晶體MP3的等效電阻將非常低。 If the ESD stress event occurring in the ESD protection IC is lower than the protection threshold of the ESD detection circuit 110D, at least one of the discharge paths P1 and P2 conducts to discharge the ESD stress event for protection of the ESD protection IC. However, if the ESD stress event is too high and exceeds the protection threshold of the ESD detection circuit 110D, the PMOS transistor MP3 of the ESD indication circuit 510 will be damaged (even if an excessively high ESD stress event is discharged through the discharge path P1 or P2), The equivalent resistance of the PMOS transistor MP3 will be very low.
因此,通過檢查ESD檢測電路110D的等效電阻,可以確定高ESD應激事件是否已經發生。 Therefore, by checking the equivalent resistance of the ESD detecting circuit 110D, it can be determined whether a high ESD stress event has occurred.
在本發明的其他可能的實施方式中,ESD保護IC可以包括保護閾 值彼此不同的兩個或兩個以上的ESD檢測電路。例如但不限於,ESD保護IC可以包括保護閾值分別係125V和250V的兩個ESD檢測電路。因此,當100V的ESD應激事件發生時,兩個ESD檢測電路都具有較高的等效電阻。當在125V和250V(例如但不限於200V)之間的ESD應激事件發生時,其中一個ESD檢測電路具有較高的等效電阻,另一個ESD檢測電路的具有低等效電阻。當高於250V的ESD應激事件發生時,兩個ESD檢測電路都具有較低的等效電阻。 In other possible implementations of the invention, the ESD protection IC may include a protection threshold Two or more ESD detection circuits having different values from each other. For example, without limitation, the ESD protection IC can include two ESD detection circuits with protection thresholds of 125V and 250V, respectively. Therefore, when an ESD stress event of 100V occurs, both ESD detection circuits have a higher equivalent resistance. When an ESD stress event between 125V and 250V (such as but not limited to 200V) occurs, one of the ESD detection circuits has a higher equivalent resistance and the other ESD detection circuit has a low equivalent resistance. Both ESD detection circuits have lower equivalent resistance when an ESD stress event above 250V occurs.
在本發明的實施方式中,ESD檢測電路的ESD保護閾值可以基於放電路徑的二極體的尺寸和ESD指示電路的電晶體的比例尺寸確定。因此,ESD檢測電路的ESD保護閾值可以通過改變放電路徑的二極體的尺寸或者ESD指示電路的電晶體的比例尺寸而改變。 In an embodiment of the invention, the ESD protection threshold of the ESD detection circuit may be determined based on the size of the diode of the discharge path and the proportional size of the transistor of the ESD indicating circuit. Therefore, the ESD protection threshold of the ESD detection circuit can be changed by changing the size of the diode of the discharge path or the proportional size of the transistor of the ESD indicating circuit.
在本發明的其他實施方式中,ESD檢測電路可以包括放電路徑(即,ESD檢測電路不包括ESD指示電路),並且ESD檢測電路的ESD保護閾值可以基於放電路徑的二極體的尺寸確定。因此,ESD檢測電路的ESD保護閾值可以通過改變放電路徑的二極體的尺寸而改變。 In other embodiments of the invention, the ESD detection circuit may include a discharge path (ie, the ESD detection circuit does not include an ESD indication circuit), and the ESD protection threshold of the ESD detection circuit may be determined based on the size of the diode of the discharge path. Therefore, the ESD protection threshold of the ESD detection circuit can be changed by changing the size of the diode of the discharge path.
在本發明的其他實施方式中,ESD檢測電路可以包括ESD指示電路(即,ESD檢測電路不包括放電路徑),並且ESD檢測電路的ESD保護閾值可以基於ESD指示電路的電晶體的比例尺寸確定。因此,ESD檢測電路的ESD保護閾值可以通過改變ESD指示電路的電晶體的比例尺寸而改變。 In other embodiments of the invention, the ESD detection circuit may include an ESD indicating circuit (ie, the ESD detecting circuit does not include a discharge path), and the ESD protection threshold of the ESD detecting circuit may be determined based on a proportional size of a transistor of the ESD indicating circuit. Therefore, the ESD protection threshold of the ESD detection circuit can be changed by changing the proportional size of the transistor of the ESD indicating circuit.
本發明的實施方式具有快速ESD測試能力,因為可以通過檢查ESD檢測電路的等效電阻來確定ESD測試是否通過或失敗。因此,本發明 可以減少ESD失效分析的時間成本。此外,本發明的實施方式還可以用以改善IC裝配或測試期間的ESD保護。 Embodiments of the present invention have fast ESD testing capabilities because it is possible to determine if an ESD test passes or fails by examining the equivalent resistance of the ESD detection circuit. Therefore, the present invention The time cost of ESD failure analysis can be reduced. In addition, embodiments of the invention may also be used to improve ESD protection during IC assembly or testing.
已經對本發明實施例及其優點進行了詳細說明,但應當理解的係,在不脫離本發明的精神以及申請專利範圍所定義的範圍內,可以對本發明進行各種改變、替換和變更,例如,可以通過結合不同實施例的若干部分來得出新的實施例。所描述的實施例在所有方面僅用於說明的目的而並非用於限制本發明。本發明的保護範圍應當視所附的申請專利範圍所界定者為准。本領域所屬技術領域中具有通常知識者皆在不脫離本發明之精神以及範圍內做些許更動與潤飾。 The embodiments of the present invention and its advantages are described in detail, but it is understood that various changes, substitutions and changes may be made in the invention without departing from the spirit and scope of the invention. New embodiments are derived by combining several parts of the various embodiments. The described embodiments are to be considered in all respects as illustrative and not limiting. The scope of the invention should be determined by the scope of the appended claims. Those skilled in the art will be able to make some modifications and refinements without departing from the spirit and scope of the invention.
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