TWI649806B - Method for operating microwave heating device and microwave annealing process using the same - Google Patents

Abstract

The invention provides a method for operating a microwave heating device, which includes setting a carrier in a heating chamber, setting a microwave transmitter outside the heating chamber, and providing a half-wave rectified power supply coupled to the microwave transmitter and a half-wave rectified power supply. The condenser includes a capacitor; a longitudinal waveguide tube and a transverse waveguide tube are connected between the heating chamber and the microwave transmitter. Adjust the capacitance value of the capacitor of the half-wave rectified power supply, so that the bandwidth of the microwave waveform emitted by the microwave transmitter is expanded to produce complex overlapping coupling and multiply the number of microwave modes. Power is supplied to the microwave transmitter through the half-wave rectified power supply. The microwave is transmitted to the heating chamber through the longitudinal waveguide tube and the transverse waveguide tube, and multiple microwave modes are formed in the heating chamber to achieve the purpose of uniform heating.

Description

Operation method of microwave heating device and microwave annealing process using the same

The invention relates to a method for operating a microwave heating device and a microwave annealing process using the method, and more particularly to a method for coupling operation of a microwave heating device. By adjusting the capacitance of a capacitor of a half-wave rectified power supply, The microwave waveform bandwidth generated by the microwave transmitter is overlapped and coupled, thereby multiplying the number of microwave modalities to achieve a highly uniform and time-saving energy-saving microwave heating effect.

In addition to microwave heating technology such as drying of wood, wine, etc., rubber vulcanization, meat thawing, etc., it also has the potential to be applied to the semiconductor silicon wafer annealing process. There are hundreds of procedures in the semiconductor manufacturing process, each of which affects the yield and yield of silicon wafers. The wafer annealing is a necessary process after ion implantation. Because trivalent or pentavalent elements are implanted in a tetravalent semiconductor, lattice defects are easily generated, resulting in dramatic changes in semiconductor properties. Therefore, the annealing structure must be used to restore the crystal structure and eliminate defects, and allow impurity atoms in the gap position to enter through annealing. Displacement position, To achieve the purpose of electrical activation. In the semiconductor manufacturing process, since the dopant is prone to diffusion at high temperatures (above 800 ° C), coupled with the use of silicon-germanium materials, the annealing temperature must be lower than 450 ° C to avoid the diffusion of germanium, so a low-temperature The microwave annealing process is a foreseeable trend in the semiconductor process. In addition, other annealing methods such as infrared annealing or far-ultraviolet laser annealing technology have encountered bottlenecks in the face of the shrinking semiconductor device interface thickness and line width, but microwave The annealing method is not limited by the above.

However, the technical threshold of microwave annealing is that the requirement of uniformity must meet the strict standard of high yield. Existing commercial microwave annealing equipment generally uses a 5.8GHz microwave frequency to replace the more common industrial microwave heating frequency of 2.45GHz. By shortening the microwave wavelength and suppressing the standing wave effect, the purpose of uniform annealing is achieved. However, compared to a 2.45GHz magnetron, a 5.8GHz magnetron is costly and inefficient. Therefore, the present invention proposes a method of operating a multi-mode microwave heating device for a semiconductor (silicon, III-V or II-VI semiconductor) microwave annealing program and other heated objects, which can use a general industrial heating frequency of 2.45 GHz. And by doubling the number of microwave heating modes, the microwave heating efficiency and uniformity are improved, and the productivity and yield of the object to be heated are improved.

The invention provides a method for operating a microwave heating device, which can be heated using a general industrial heating frequency of 2.45 GHz (but the invention is not limited to the use of a microwave frequency of 2.45 GHz). By doubling the number of microwave modes, the uniformity of microwave heating can be improved. And save time and energy.

The operating method of the microwave heating device of the present invention includes setting an accommodating space in the heating chamber; one of the pedestals in the accommodating space has a plane for carrying microwave heated objects; and a microwave transmitter is arranged outside the heating chamber for transmitting microwaves. ; Set a half-wave rectified power supply respectively coupled to each microwave transmitter, each half-wave rectified power supply includes a capacitor; a longitudinal waveguide tube and a transverse waveguide tube are connected between the heating chamber and the microwave transmitter, longitudinally The direction of the electric field polarization in the waveguide is perpendicular to the plane of the stage, and the direction of the electric field polarization in the transverse waveguide is parallel to the plane of the stage. Adjust the capacitance of the capacitors of each half-wave rectified power supply, so that the microwave waveform bandwidth from the microwave transmitter is overlapped and coupled, and supply power to the microwave transmitter through the half-wave rectified power supply, so that the microwave passes through the longitudinal waveguide wave. The tube and the transverse waveguide are transmitted to the heating chamber, and multiple microwave modes are formed in the heating chamber.

The invention also provides a microwave annealing process of a semiconductor doped substance and a process of a multi-mode microwave heating device. Using the operating method of the microwave heating device of the present invention, the general industrial heating frequency of 2.45 GHz can be used for heating (but not limited to (Using 2.45GHz microwave frequency), by multiplying the number of microwave modes, the efficiency and uniformity of the microwave annealing process such as semiconductor doped substances are improved, thereby increasing productivity and yield.

The microwave annealing process for a semiconductor doped substance of the present invention includes providing a microwave heating device for a semiconductor element having a doped substance, adjusting the capacitance value of a capacitor of a half-wave rectified power supply of the microwave heating device, and subjecting the half-wave rectification to The power supply supplies power to the microwave transmitter, so that the microwave is transmitted to the heating chamber of the microwave heating device through the longitudinal waveguide tube and the transverse waveguide tube, and the heating chamber Multiple microwave modalities are formed during the annealing process.

The manufacturing process of the multi-modal microwave heating device of the present invention includes providing a microwave heating device, adjusting the capacitance value of the half-wave rectified power supply of the microwave heating device, and expanding the bandwidth of the microwave waveform emitted by the microwave transmitter to produce complex overlapping coupling. , Multiply the number of microwave modes. Power is supplied to the microwave transmitter through a half-wave rectified power supply, so that the microwave is transmitted to the heating chamber of the microwave heating device through the longitudinal waveguide tube and the transverse waveguide tube, and multiple microwave modes are formed in the heating chamber.

According to the above, by adjusting the capacitance value of the capacitor of the half-wave rectified power supply, the present invention expands the microwave waveform bandwidth emitted by the microwave transmitter to produce complex overlapping coupling, doubles the number of microwave modes, and then uses the half-wave rectified power supply. The supplier, the longitudinal waveguide tube and the transverse waveguide tube transmit microwaves to the heating chamber and form multiple microwave modes in the heating chamber, thereby achieving the purpose of uniform heating.

In order to make the above features of the present invention more comprehensible, embodiments are described below in detail with reference to the accompanying drawings.

50‧‧‧ heated object

100, 200, 500‧‧‧ multi-mode microwave heating devices

110, 210, 310, 410‧‧‧ heating chamber

111a ~ 114a, 111b ~ 114b, 201a ~ 212a, 201b ~ 212b, 311 ~ 316‧‧‧ Input port

120‧‧‧Rotating and lifting mechanism

125, 325‧‧‧

1 ~ 12, 1 ’~ 12’, 1 ”~ 12”, 131 ~ 142, 331 ~ 336, 431 ~ 442‧‧‧microwave transmitter

151 ~ 156, 151a, 152a‧‧‧Vertical waveguide

161 ~ 166, 161a, 162a‧‧‧transverse waveguide

170‧‧‧Three-phase AC power

172‧‧‧ △ Power

174‧‧‧Y connected to power

180‧‧‧ Same-phase equal power splitter

185‧‧‧180 degree phase shift converter

190‧‧‧ Half-wave Rectified Power Supply

191‧‧‧Capacitor

351 ~ 356, 451 ~ 456‧‧‧ Vertical waveguide

461 ~ 466‧‧‧transverse waveguide

570‧‧‧Scrolls

575‧‧‧ conveyor belt

580‧‧‧low-pass filter

h ₁ ~ h ₁₂ ‧‧‧ height

L ₁ ~ L ₆ , L ₁₁ ~ L ₂₂ , L ₃₁ ~ L ₄₂ ‧‧‧length

S101 ~ S106, S201 ~ S203‧‧‧Process

Z _in1 ~ Z _in6 , Z _in11 ~ Z _{in22 ‧‧‧Input} impedance

λ _g ‧‧‧ Waveguide Wavelength

1A-1 and 1A-2 are schematic diagrams of a multi-modal microwave heating device according to a first embodiment of the present invention.

1B-1, FIG. 1B-2, FIG. 1B-3, FIG. 1B-4, FIG. 1B-5, and FIG. 1B-6 are power circuit configurations of a multi-mode microwave heating device according to a first embodiment of the present invention Illustration.

FIG. 2A is a schematic diagram of an excitation method of multiple longitudinal odd modes according to the first embodiment of the present invention.

FIG. 2B is a schematic diagram of an excitation manner of multiple longitudinal even modes according to the first embodiment of the present invention.

FIG. 2C is a schematic diagram of an excitation manner of multiple lateral odd modes according to the first embodiment of the present invention.

FIG. 2D is a schematic diagram of an excitation manner of multiple transverse even modes according to the first embodiment of the present invention.

FIG. 2E is a schematic diagram of an excitation manner combining multiple longitudinal odd modes and multiple longitudinal even modes according to the first embodiment of the present invention.

FIG. 2F is a schematic diagram of an excitation method combining multiple transverse odd modes and multiple transverse even modes according to the first embodiment of the present invention.

FIG. 2G is a schematic diagram of an excitation manner combining multiple longitudinal odd modes, multiple longitudinal even modes, multiple transverse odd modes, and multiple transverse even modes according to the first embodiment of the present invention.

FIG. 2H is a perspective view of a multi-modal microwave heating device according to a second embodiment of the present invention.

3A is a schematic diagram of a multi-modal microwave heating device according to a third embodiment of the present invention.

FIG. 3B is a schematic diagram of a simulation result of the longitudinal electric field intensity distribution of FIG. 3A.

FIG. 3C is a schematic diagram of another embodiment according to a third embodiment of the present invention.

FIG. 4 is a schematic diagram of a multi-modal microwave heating apparatus according to a fourth embodiment of the present invention.

5 is a step diagram of a method of operating a microwave heating apparatus according to a fifth embodiment of the present invention.

FIG. 6 is a step diagram of a microwave annealing process of a semiconductor doped substance according to a sixth embodiment of the present invention.

Please refer to the following embodiments and accompanying drawings to better understand the present invention, but the present invention can still be implemented in many different forms, and should not be construed as being limited to the embodiments described herein. In the drawings, for the sake of clarity, the components and their relative sizes may not be drawn to actual scale.

1A-1 is a schematic diagram of a multi-modal microwave heating device according to a first embodiment of the present invention. Please refer to FIG. 1A-1. The multi-mode microwave heating device 100 has six longitudinal waveguide tubes 151 to 156 and six transverse waveguide tubes 161 to 166, which are respectively connected to the heating chamber 110 and twelve microwave transmitters. Between 131 and 142, the microwaves generated by the microwave transmitters 131 to 142 are transmitted to the heating chamber 110, and multiple natural modes (or intrinsic modes) are formed in the heating chamber 110. In addition, the multi-modal microwave heating device 100 has a stage 125 that is disposed in the heating chamber 110 to carry the object 50 to be heated. In this embodiment, the stage 125 is moved up and down by the stage rotation and lifting mechanism 120 and rotated. The wave propagation modes in the longitudinal waveguide tubes 151 to 156 are TE ₁₀ modes, and the direction of the electric field is perpendicular to the plane (xy plane) of the stage 125. The wave propagation modes in the transverse waveguides 161 to 166 are also TE ₁₀ mode, but the direction of the electric field is parallel to the plane of the stage 125. Since the electric fields of the foregoing two are perpendicular to each other, the multiple natural modes excited by the six longitudinal waveguides 151 to 156 and the multiple natural modes excited by the six lateral waveguides 161 to 166 are orthogonal to each other. . In addition, since the connection positions of the six longitudinal waveguides 151 to 156 and the heating chamber 110 are different, the heights of the bottom surfaces of the six longitudinal waveguides 151 to 156 perpendicular to the heating chamber 110 are h ₁ , h ₃ , h ₅ , h ₇ , h ₉ and h _{11 are} all different. That is, h ₁ ≠ h ₃ ≠ h ₅ ≠ h ₇ ≠ h ₉ ≠ h ₁₁ . Therefore, in this embodiment, as long as the heating chamber 110 is large enough, the heating chamber 110 may have a sufficient number of multiple natural modes, so that the multiple natural modes excited by the six longitudinal waveguides 151 to 156 are multiple. The states can be different.

Similarly, since the connection positions of the six transverse waveguides 161 to 166 and the heating chamber 110 are different, the six transverse waveguides 161 to 166 are perpendicular to the heights h ₂ , h ₄ , and h ₆ , h ₈ , h ₁₀ , h _{12 are} all different. That is, h ₂ ≠ h ₄ ≠ h ₆ ≠ h ₈ ≠ h ₁₀ ≠ h ₁₂ . Therefore, as long as the number of multiple natural modes in the heating chamber 110 is sufficient, the multiple natural modes excited by the six transverse waveguides 161 to 166 can be made different. Therefore, the implementation of this embodiment can achieve the purpose of uniform heating. In this embodiment, an impedance matcher (not shown) is not an essential component, but can be used when the following conditions occur: (1). When the reflected power of the microwave transmitters 131 ~ 142 is very large, the impedance can be determined by the impedance The matcher lowers it. (2). When the multiple modes excited by some waveguides 151 ~ 156, 161 ~ 166 are the same mode, the impedance matcher can be adjusted to excite different modes.

1A-2 is another schematic diagram of a multi-modal microwave heating device according to a first embodiment of the present invention. Please refer to FIG. 1A-2. The multi-mode microwave heating device 100 has six longitudinal waveguide tubes 151 to 156 and six transverse waveguide tubes 161 to 166, which are respectively connected to the heating chamber 110 and twelve microwave transmitters. Between 131 and 142, the microwaves generated by the microwave transmitters 131 to 142 are transmitted to the heating chamber 110, and multiple natural modes (or intrinsic modes) are formed in the heating chamber 110. In addition, the multi-modal microwave heating device 100 has a stage 125 that is disposed in the heating chamber 110 to carry the object 50 to be heated. In this embodiment, the stage 125 is moved up and down by the stage rotation and lifting mechanism 120 and rotated. The wave propagation modes in the longitudinal waveguide tubes 151 to 156 are TE ₁₀ modes, and the direction of the electric field is perpendicular to the plane (xy plane) of the stage 125. The wave propagation modes in the transverse waveguides 161 to 166 are also TE ₁₀ mode, but the direction of the electric field is parallel to the plane of the stage 125. Because the directions of the electric fields are perpendicular to each other, the multiple natural modes excited by the six longitudinal waveguides 151 to 156 and the multiple natural modes excited by the six lateral waveguides 161 to 166 are orthogonal to each other and Different. In addition, the lengths L ₃₁ , L ₃₃ , L ₃₅ , L ₃₇ , L ₃₉ , and L _{41 of the} six longitudinal waveguides 151 to 156 are all different. That is, L ₃₁ ≠ L ₃₃ ≠ L ₃₅ ≠ L ₃₇ ≠ L ₃₉ ≠ L ₄₁ . Therefore, in this embodiment, as long as the heating chamber 110 is large enough, the heating chamber 110 may have a sufficient number of multiple natural modes, so that the multiple natural modes excited by the six longitudinal waveguides 151 to 156 are multiple. The states can be different.

Similarly, the lengths L ₃₂ , L ₃₄ , L ₃₆ , L ₃₈ , L ₄₀ , and L _{42 of the} six transverse waveguides 161 to 166 are all different. That is, L ₃₂ ≠ L ₃₄ ≠ L ₃₆ ≠ L ₃₈ ≠ L ₄₀ ≠ L ₄₂ . Therefore, as long as the number of multiple natural modes in the heating chamber 110 is sufficient, the multiple natural modes excited by the six transverse waveguides 161 to 166 can be made different. Therefore, the implementation of this embodiment can achieve the purpose of uniform heating. In this embodiment, an impedance matcher (not shown) is not an essential component, but can be used when the following conditions occur: (1). When the reflected power of the microwave transmitters 131 ~ 142 is very large, the impedance can be determined by the impedance The matcher lowers it. (2). When the multiple modes excited by some waveguides 151 ~ 156, 161 ~ 166 are the same mode, the impedance matcher can be adjusted to excite different modes.

1B-1, FIG. 1B-2, FIG. 1B-3, FIG. 1B-4, FIG. 1B-5, and FIG. 1B-6 are configuration diagrams of a power circuit of a multi-mode microwave heating device according to a first embodiment of the present invention. Among them, in an embodiment, the power circuit configuration of FIG. 1B-1, FIG. 1B-2, and FIG. 1B-3 is to enable the microwave transmitters 131 to 142 of FIG. 1A-1 and FIG. 1A-2 to be timed. The sequence (sequence control, or serial operation method, Serial mode) emits microwaves without interfering with each other. In addition, the implementation method of the power supply circuit of this embodiment uses an industrial three-phase AC power supply 170 as shown in FIG. 1B-1, which is connected in parallel with the power supply 172 shown in FIG. 1B-2 as shown in FIG. 1B-3. The Y-connected power sources 174 are respectively supplied to the half-wave rectified power supply 190. Then, the microwave transmitters 131 to 142 are powered by the half-wave rectified power supply 190. In detail, the three contacts of the industrial three-phase AC power supply 170 are respectively represented by R, S, and T, so they can provide three-phase power of R-S, S-T, and T-R, and their phases in time domain differ by 120 degrees. In addition, through half-wave rectification, R-S, S-T, T-R, S-R, T-S, and R-T six-phase power can be generated, and the time-phase phase difference of each other is 60 degrees, so as to form a △ connected power source 172.

In addition, as shown in the diagram of FIG. 1B-1, a common contact C can be selected on the three-phase AC power supply 170 to generate R-C, S-C, and T-C triple-phase power, and the phases in time domain differ from each other by 120 degrees. In addition, through half-wave rectification, R-C, S-C, T-C, C-R, C-S, C-T six-phase power, and the time domain phase difference between each other by 60 degrees to form a Y-connected power source 174. Therefore, △ connected to power supply 172 and Y connected to power supply 174 in parallel, and then through half-wave rectification, can generate twelve-phase power of RS, RC, ST, SC, TR, TC, SR, CR, TS, CS, RT, and CT. , And they are 30 degrees out of phase with each other in time domain. The aforementioned twelve-phase power can be respectively shown in FIGS. 1B-2 and 1B-3. There are twelve half-wave rectified power supplies 190 in total. Each half-wave rectified power supply 190 in FIG. 1B-2 and FIG. 1B-3 is shown in FIG. 1B-4, which includes a capacitor 191, such as a variable capacitor. By adjusting the capacitance of the capacitor 191 of each half-wave rectified power supply 190, the bandwidth of the microwave waveforms emitted by the connected microwave transmitters 131 to 142 can be expanded to produce complex overlapping coupling, and the microwave can be achieved. Modal doubling. Please refer to FIG. 1B-5, which shows the operation method of timing control and coupling mode.

Specifically, when the twelve half-wave rectified power supplies 190 whose capacitance values have been adjusted supply power to the twelve microwave transmitters 131 to 142, respectively, the twelve microwave transmitters 131 to 142 can be ordered in time (sequence Control) Transmitting microwaves, twelve waveguides can produce twenty-four modes, which is the twenty-four phase shown in Figure 1B-5; that is, the microwave modes are multiplied by 24, so from Twelve modes have increased to 36 modes, so a total of seventy-two modes are generated by the twenty-four waveguides. By doubling the number of microwave modalities, the operation method of the coupling control doubles the heating efficiency and uniformity compared with the timing control.

In addition, since the twelve microwave transmitters 131 to 142 transmit microwaves in time sequence (sequence control), and only one microwave transmitter transmits at the same time. Shoot microwave. Therefore, without an isolator, the microwave transmitters 131 to 142 do not interfere with each other and may be in mode lock. Therefore, the efficiency of the microwave transmitters 131 to 142 will not be reduced. At the same time, as long as the waveguides 151 to 156 and 161 to 166 corresponding to each of the microwave transmitters 131 to 142 excite the multiple natural modes of the heating chamber 110, even without an isolator, each microwave transmission The reflected power of the cameras 131 ~ 142 is not too large. Therefore, the efficiency of the microwave transmitters 131 to 142 will not be reduced. In addition, since the arrangement of this embodiment does not require an additional isolator, the situation of interference power loss can be eliminated, thereby improving the heating efficiency of the multi-modal microwave heating device 100.

In another embodiment, when the capacitance value of the half-wave rectified power supply is continuously adjusted, the bandwidth of the microwave power waveform emitted by the microwave transmitter is expanded to generate more complex overlapping couplings, such as 48 multiplications, as shown in Figure 1B-6. As shown in the figure, the number of modes is increased from 12 modes to 60 modes. Therefore, twenty-four waveguides can generate a total of 120 modes.

FIG. 2A is a schematic diagram of an excitation method of multiple longitudinal odd modes according to the first embodiment of the present invention. The first microwave transmitter 131 can input microwaves into the heating chamber 110 through the in-phase equal-power divider 180 and the two longitudinal waveguide tubes 151a. The connection between the longitudinal waveguide 151a and the heating chamber 110 is defined as a microwave input port, as shown in FIG. 2A, marked with a thin arrow symbol, and respectively marked with an input port 111a and an input port 111b. A 180-degree phase shift converter 185 may be installed between the input port 111b and the power splitter 180 of the same phase. However, a 180-degree phase shift converter 185 is not provided between the input port 111a and the power splitter 180 of the same phase. Therefore, the phase of the vertical electric field arriving at the input port 111a differs from the phase of the vertical electric field arriving at the port 111b by 180 degrees (the direction of polarization of the vertical electric field is Symbols are used to indicate that the direction of electric field polarization is perpendicular to the xy plane, and the phases are 180 degrees apart). Therefore, a destructive interference will be formed on the center line (x-axis) of the heating chamber 110, which is called a multiple longitudinal odd mode. The simulation results of the longitudinal electric field intensity distribution of the multiple longitudinal odd modes via the simulator are shown in the right diagram in FIG. 2A. In this embodiment, an impedance matcher (not shown) is not an essential component, but can be used when the following situations occur: When the reflected power of the microwave transmitter 131 is large, the microwave transmitter 131 can be in phase with the same phase. An impedance matcher is arranged between the equal power dividers 180 to reduce the reflected power.

FIG. 2B is a schematic diagram of an excitation manner of multiple longitudinal even modes according to the first embodiment of the present invention. In this embodiment, the third microwave transmitter 133 can input microwaves into the heating chamber 110 via the in-phase equal-power divider 180 and the two longitudinal waveguide tubes 152a. The connection between the longitudinal waveguide 152a and the heating chamber 110 is defined as a microwave input port, which is marked with a thin arrow, and is labeled with an input port 112a and an input port 112b, respectively. In this embodiment, as long as the two longitudinal waveguides 152a are the same length, the phase of the vertical electric field reaching the input port 112a is the same as the potential of the vertical electric field reaching the input port 112b (the direction of polarization of the vertical electric field is indicated by the ⊙ symbol). . Therefore, constructive interference will be formed on the center line (y-axis) of the heating chamber 110, which is called multiple longitudinal even modes. The result of the longitudinal electric field intensity distribution simulation via the simulator is shown in the right diagram in FIG. 2B. Of course, the impedance matcher (not shown) is not an essential component of this embodiment, but can be used when the following situations occur: when the reflected power of the microwave transmitter 133 is very large, the microwave transmitter 133 can be Power points An impedance matcher is installed between the distributors 180 to reduce the reflected power.

FIG. 2C is a schematic diagram of an excitation manner of multiple lateral odd modes according to the first embodiment of the present invention. In this embodiment, the second microwave transmitter 132 can input microwaves into the heating chamber 110 through the in-phase equal-power divider 180 and two transverse waveguide waveguides 161a. The connection between the transverse waveguide 161a and the heating chamber 110 is defined as a microwave input port, which is marked with a thin arrow symbol, and is labeled with an input port 113a and an input port 113b, respectively. A 180-degree phase shift converter 185 may be installed between the input port 113b and the same-phase equal power divider 180, but a 180-degree phase shift converter 185 is not installed between the input port 113a and the same-phase equal power divider 180. Therefore, the horizontal electric field phase arriving at input port 113a and the horizontal electric field phase arriving at input port 113b differ by 180 degrees (in FIG. 2C, the horizontal electric field is indicated by a thick arrow symbol, and the opposite direction of the arrows indicates that the phase is 180 degrees out of phase, and both directions are Parallel to the x'y 'plane). Therefore, a destructive interference will be formed on the center line (z-axis) of the heating chamber 110, which is called a multiple lateral odd mode. The results of the lateral electric field intensity distribution simulated by the simulator are shown in the right diagram in FIG. 2C. In this embodiment, the impedance matcher is not an essential component, but it can be used when the following conditions occur: When the reflected power of the microwave transmitter 132 is large, the microwave transmitter 132 and the same-phase equal power divider 180 can be used. An impedance matcher is installed between them to reduce the reflected power.

FIG. 2D is a schematic diagram of an excitation manner of multiple transverse even modes according to the first embodiment of the present invention. The fourth microwave transmitter 134 can input microwaves into the heating chamber 110 through the in-phase equal-power divider 180 and two transverse waveguide tubes 162a. The connection between the transverse waveguide 162a and the heating chamber 110 is defined as a microwave input port. It is marked with a thin arrow symbol, and it is marked with an input port 114a and an input port 114b, respectively. In this embodiment, as long as the two transverse waveguides 162a are the same length, the phase of the lateral electric field reaching the input port 114a is the same as that of the lateral electric field reaching the input port 114b. (). Therefore, constructive interference will be formed on the center line (z-axis) of the heating chamber 110, which may be referred to as multiple lateral even modes. The results of the lateral electric field intensity distribution simulated by the simulator are shown in the right diagram in FIG. 2D. Of course, in this embodiment, the impedance matcher is not an essential component, but it can be used in the following situations: When the reflected power of the microwave transmitter 134 is very large, the microwave transmitter 134 and the same-phase equal power divider 180 can be used. An impedance matcher is installed between them to reduce the reflected power.

FIG. 2E is a schematic diagram of an excitation manner combining multiple longitudinal odd modes and multiple longitudinal even modes according to the first embodiment of the present invention. As shown in FIG. 2E, this embodiment combines the multiple longitudinal odd modes of FIG. 2A with the multiple longitudinal even modes of FIG. 2B. For example, in FIG. 2E, the two input ports 111 a and 111 b in the multiple longitudinal odd modes are on the y-axis. In addition, the two input ports 112a and 112b of the multiple longitudinal even modes are on the x-axis. The multiple longitudinal odd modes and the multiple longitudinal even modes are orthogonal, so the symmetry in the x direction and the y direction is maintained.

FIG. 2F is a schematic diagram of an excitation method combining multiple transverse odd modes and multiple transverse even modes according to the first embodiment of the present invention. As shown in FIG. 2F, this embodiment combines the multiple horizontal odd modes of FIG. 2C and the multiple horizontal even modes of FIG. 2D. For example, in FIG. 2F, the two input ports 113a and 113b in multiple lateral odd modes are on the y 'axis. In addition, the two input ports 114a and 114b of the multiple transverse even mode are at x ’ On the shaft. The multiple transverse even modes and the multiple transverse odd modes are orthogonal, so the symmetry in the x 'direction and the y' direction is maintained. Furthermore, the multiple transverse modes and the multiple longitudinal modes are orthogonal to each other, so the symmetry of the x-direction and the y-direction is maintained. In this embodiment, the x'y 'coordinate is a new coordinate in which the xy coordinate is rotated 45 degrees around the z axis.

FIG. 2G is a schematic diagram of an excitation method combining multiple longitudinal odd modes, multiple longitudinal even modes, multiple transverse odd modes, and multiple transverse even modes according to the first embodiment of the present invention. In this implementation, the input ports of the first group of multiple vertical odd modes, multiple vertical even modes, multiple horizontal odd modes, and multiple horizontal even modes are: input port 111a, input port 111b, input port 112a, input Port 112b, input port 113a, input port 113b, input port 114a, and input port 114b. For the sake of simplicity, FIG. 2G only indicates the above eight input ports and the direction of electric field polarization. The four microwave transmitters corresponding to the above eight input ports are not shown.

2H is a perspective view of a multi-modal microwave heating device according to a second embodiment of the present invention. In FIG. 2H, the thin arrow indicates the microwave input direction, and the thick arrow indicates the electric field polarization direction. The multi-mode microwave heating device 200 of this embodiment combines three sets of multiple longitudinal odd modes, multiple longitudinal even modes, multiple transverse odd modes, and multiple transverse even modes. The first group of multiple vertical odd modal, multiple vertical even modal, multiple horizontal odd modal, and multiple horizontal even modal input ports are: input port 201a, input port 201b, input port 202a, input port 202b, input Port 203a, input port 203b, input port 204a, and input port 204b. The aforementioned input ports input microwaves from the middle section of the heating chamber 210, respectively. Multiple longitudinal odd modes, multiple longitudinal even modes, multiple transverse odd modes, and multiple transverse even modes of the second group The state input ports are: input port 205a, input port 205b, input port 206a, input port 206b, input port 207a, input port 207b, input port 208a, input port 208b. The aforementioned input ports input microwaves from the upper section of the heating chamber 210, respectively. The third group of multiple vertical odd modal, multiple vertical even modal, multiple horizontal odd modal, and multiple horizontal even modal input ports are: input port 209a, input port 209b, input port 210a, input port 210b, input port 211a, input port 211b, input port 212a, and input port 212b. The aforementioned input ports input microwaves from the lower section of the heating chamber 210, respectively. For the sake of simplicity, FIG. 2H only indicates the above-mentioned twenty-four input ports and the direction of electric field polarization, and the twelve microwave transmitters corresponding to the above-mentioned input ports are not shown.

The power supply circuit configuration of this embodiment is the same as the first embodiment of FIG. 1B-1. Therefore, the twelve microwave transmitters of this embodiment can transmit microwaves in time sequence (sequence control). During the same period, only one microwave transmitter transmitted microwaves. Therefore, without the need for an isolator, the microwave transmitters do not interfere with each other to lock the mode. Therefore, the efficiency of the microwave transmitter is not reduced. At the same time, as long as the waveguide corresponding to each microwave transmitter excites the multiple natural modalities of the heating chamber 210, the reflected power that the microwave transmitter can withstand without requiring an isolator is not excessive. In addition, due to the configuration of this embodiment, there is no need to configure an isolator separately, thereby eliminating power loss from other microwave transmitters, thereby improving heating efficiency.

3A is a schematic diagram of a multi-modal microwave heating device according to a third embodiment of the present invention. The six microwave transmitters 331 to 336 and the six longitudinal waveguides 351 to 356 are respectively connected to the heating chamber 310 at an angle of 60 degrees. The lengths of the six longitudinal waveguides 351 to 356 are L ₁ and L _2. , L ₃ , L ₄ , L ₅ , and L _{6 are} all different and satisfy L ₆ -L ₅ = L ₅ -L ₄ = L ₄ -L ₃ = L ₃ -L ₂ = L ₂ -L ₁ = λ _g / 12. That is, the length difference between the adjacent longitudinal waveguide waveguides 351 to 356 is one twelfth of the wavelength λ _g of the waveguide, so that each microwave transmitter 331 to 336 is connected to the longitudinal waveguide waveguides 351 to 351. junction 356 at the input impedance Z _in1 (input port embodiment of the present embodiment is defined) _{of, Z in2, Z in3, Z} in4, Z in5, Z in6 vary. That _{is, Z in1 ≠ Z in2 ≠ Z} in3 ≠ Z in4 ≠ Z in5 ≠ Z in6, resulting in pulling extent of each transmitter frequency varies. In this embodiment, as long as the heating chamber 310 is large enough, the number of multiple natural modes is sufficient, so that each of the microwave transmitters 331 to 336 with slightly different traction frequencies communicate with the corresponding waveguides 351 to 356. The multiple natural modes excited by them are different, so as to achieve the purpose of uniform heating of multiple modes.

FIG. 3B is a schematic diagram of a simulation result of the longitudinal electric field intensity distribution of FIG. 3A. Since one of the six microwave transmitters 331 to 336 is inputting microwaves, the other five microwave transmitters are inactive, so only one input port is set to input microwaves at a time, and the remaining five input ports are set to Short-circuit surface. For example, as shown in the upper left diagram in FIG. 3B, the microwave can be input to the microwave through the input port 311, and the remaining five input ports 312 to 316 are set as short-circuit surfaces. The simulation results in FIG. 3B show that the microwave transmitters 331 to 336 with slightly different frequencies in FIG. 3A communicate with the corresponding longitudinal waveguides 351 to 356, and the multiple natural modes excited by them are different.

In this embodiment, the configuration of the power source can be in accordance with the first embodiment of FIG. 1B-1. A three-phase AC power source 170 for industrial use is selected. The delta power source 172 or the Y power source 174 is used to supply six half-wave rectified power supplies. 190, and then rectified by six half-waves The source supplier 190 supplies power to six microwave transmitters 331-336.

FIG. 3C is a schematic diagram of another embodiment according to a third embodiment of the present invention. In this embodiment, the twelve microwave transmitters 431 to 442 are respectively connected to the heating chamber 410 by six longitudinal waveguide tubes 451 to 456 and six transverse waveguide tubes 461 to 466, with an interval of 30 degrees. . The lengths L ₁₂ , L ₁₄ , L ₁₆ , L ₁₈ , L ₂₀ , and L _{22 of} the longitudinal waveguides 451 to 456 are different, but satisfy L ₂₂ -L ₂₀ = L ₂₀ -L ₁₈ = L ₁₈ -L ₁₆ = L ₁₆ -L ₁₄ = L ₁₄ -L ₁₂ = λ _g / 12. That is, the difference in length between adjacent longitudinal waveguides 451 to 456 is one twelfth of the wavelength λ _g of the waveguide, so that each microwave transmitter 432, 434, 436, 438, 440, 442 is connected to it. The input impedances Z _in12 , Z _in14 , Z _in16 , Z _in18 , Z _in20 , and Z _in22 at the interfaces of the longitudinal waveguides 451 to 456 (defined as the input ports of this embodiment) are different, that is, Z _in12 ≠ Z _in14 ≠ Z _in16 ≠ Z _in18 ≠ Z _in20 ≠ Z _in22 , which results in different degrees of frequency pulling of each microwave transmitter 432, ₄₃₄ , ₄₃₆ , ₄₃₈ , ₄₄₀ , 442.

Similarly, the lengths L ₁₃ , L ₁₅ , L ₁₇ , L ₁₉ , and L ₂₁ of the transverse waveguides 461 to 466 of this embodiment are also different, which satisfy L ₂₁ -L ₁₉ = L ₁₉ -L ₁₇ = L ₁₇ -L ₁₅ = L ₁₅ -L ₁₃ = L ₁₃ -L ₁₁ = λ _g / 12. That is, the length difference between the adjacent transverse waveguides 461 to 466 is one twelfth of the wavelength λ _g of the waveguide, so that each of the microwave transmitters 431, 433, 435, 437, 439, and 441 is connected to it. The input impedances _Zin11 , _Zin13 , _Zin15 , _Zin17 , _Zin19 , and _Zin21 at the interfaces of the transverse waveguides 461 to 466 (defined as the input ports of this embodiment) are different, that is, Z _in11 ≠ Z _in13 ≠ Z _in15 ≠ Z _in17 ≠ Z _in19 ≠ Z _in21 , which results in different degrees of frequency pulling of each microwave transmitter 431, ₄₃₃ , ₄₃₅ , ₄₃₇ , ₄₃₉ , 441. Therefore, in this embodiment, as long as the heating chamber 410 is large enough, the number of multiple natural modalities is sufficient, and the microwave transmitters 431 to 442 having different degrees of traction frequency can communicate with the corresponding guides. The wave tubes 451 to 456 and 461 to 466 have different multiple natural modes excited by them, thereby achieving the purpose of uniform heating of multiple modes.

The power configuration of the power supply in this embodiment can be completely in accordance with the first embodiment of FIG. 1B-1. The industrial three-phase AC power supply 170 is connected to the power supply 172 in parallel to the Y power supply 174 to supply twelve half-wave rectified power supplies. (Not shown), and then power is supplied from the twelve half-wave rectifier power supplies to the twelve microwave transmitters 431 to 442.

FIG. 4 is a schematic diagram of a multi-modal microwave heating apparatus according to a fourth embodiment of the present invention. This embodiment outlines a heating implementation method in which the multi-modal microwave heating device 500 continuously drives a conveyor belt 575 with a reel 570 to a roll to convey a heated object 50 in the direction of the arrow in FIG. 4. The multi-modal microwave heating device 500 may have a plurality (only three are shown in FIG. 4 as examples) of heating chambers 511, 512, 513 and a plurality of groups (only three are shown in FIG. 4 as examples). 532, 533, which have twelve microwave transmitters 1-12, 1 '~ 12', 1 "~ 12", and each group of microwave transmitters is equipped with six longitudinal waveguides and six transverse waveguides Tube (not shown). In this embodiment, the connection modes of the waveguides of each group and the heating chambers 511, 512, and 513 can be implemented by referring to the above embodiments and selecting one of them. In addition, a plurality of low-pass filters 580 can be arranged at the entrances and exits of the heating chambers 511, 512, and 513 to prevent high-frequency microwaves from leaking to the outside or interfering with multiple natural modes in adjacent chambers.

In this embodiment, the manner of power source power allocation can be according to FIG. 1B-1 The first embodiment of the invention uses industrial three-phase AC power supply 170 to choose △ power supply 172 or Y power supply 174 to power each group of twelve half-wave rectified power supplies, and then twelve half-wave rectified power supplies Power is supplied to each group of twelve duplex microwave transmitters. Because each heating chamber 511, 512, 513 blocks microwave interference by a low-pass filter 580, there is no interference between the transmitters of each group, which may cause the possibility of a magnetron mode lock. Ensure the efficiency of each microwave transmitter and the diversity of multiple intrinsic modes.

FIG. 5 is a step diagram illustrating a method of operating a microwave heating apparatus according to a fifth embodiment of the present invention.

In step S101, a carrier is provided in the accommodating space in the heating chamber, and a plane of the carrier is used to carry a microwave heated object.

In step S102, a plurality of microwave transmitters are set outside the heating cavity for transmitting microwaves.

In step S103, a plurality of half-wave rectified power supplies are provided and coupled to the plurality of microwave transmitters. The half-wave rectified power supplies each include a capacitor, and the capacitor is, for example, a variable capacitor. As for the number and operation of the half-wave rectified power supplies, reference may be made to the above embodiments, and details are not described herein again.

In step S104, the longitudinal waveguide tube and the transverse waveguide tube are respectively connected between the heating chamber and the corresponding microwave transmitter, wherein the direction of the electric field polarization in each longitudinal waveguide tube is perpendicular to the plane of the carrier, The direction of electric field polarization in each transverse waveguide is parallel to the above-mentioned plane of the stage. As for the arrangement of the longitudinal waveguide tube and the transverse waveguide tube, reference may be made to the above embodiments, and details are not described herein again.

In step S105, the capacitance values of the respective capacitors of the plurality of half-wave rectified power supplies are adjusted so that the bandwidth of the microwave waveform emitted by the connected microwave transmitter is expanded to produce complex overlapping coupling, thereby achieving a multiplication of the microwave mode.

In step S106, power is supplied to the microwave transmitter through a half-wave rectified power supply, so that the microwave is transmitted to the heating chamber through the longitudinal waveguide tube and the transverse waveguide tube, and multiple microwave modes are formed in the heating chamber. , Heating the microwave heated object.

FIG. 6 illustrates the microwave annealing process steps of a semiconductor doped substance according to a sixth embodiment of the present invention.

In step S201, a semiconductor heating device having a doped substance is provided with a microwave heating device, such as the microwave heating device described in the above embodiment.

In step S202, the capacitance value of the capacitor of the half-wave rectified power supply of the microwave heating device is adjusted so that the bandwidth of the microwave waveform emitted by the connected microwave transmitter is expanded to produce complex overlapping coupling, thereby achieving a multiplication of the microwave mode.

In step S203, power is supplied to the microwave transmitter through a half-wave rectified power supply, so that the microwave is transmitted to the heating chamber of the microwave heating device through the longitudinal waveguide tube and the transverse waveguide tube, and is formed in the heating chamber. Multiple microwave modes, an annealing process is performed on a semiconductor device with a doped substance.

Experiments are listed below to verify the efficacy of the present invention, but the present invention is not limited to the following.

Experimental example: Comparison of the results of the non-coupling and coupling methods of the microwave waveform in the microwave annealing process.

In this experimental example, arsenic (As) doping (annealing process) was performed using a 12-inch wafer, using a microwave frequency of 2.45 GHz; operating methods (1) timing control mode (transmit microwaves in time sequence, Serial mode) ) And operation method (2) timing coordination coupling control mode (enlarges the bandwidth of the microwave waveform emitted by the microwave transmitter to produce complex overlapping coupling to achieve a doubling of the microwave mode, Coupling mode), compares the quality of various processes, and results Shown in Table 1 below.

As can be seen from Table 1, under the coupling operation method of (2), compared with the sequential operation method of (1), the microwave annealing time is reduced by about 20%, the sheet resistance value is reduced by about 2.5%, and the heating uniformity is improved (unevenness). (About 80% reduction).

In summary, in the present invention, the microwave transmitter is connected to the heating chamber through the longitudinal waveguide tube and the transverse waveguide tube, and is used to input microwaves into the heating chamber and form multiple natural modes in the heating chamber. , And then achieve the purpose of uniform heating. The three-phase AC power supply can supply power to the half-wave rectified power supply, and the half-wave rectified power supply separately supplies power to the microwave transmitters. By increasing the capacitance value of the half-wave rectifier power supply, the output bandwidth of the microwave waveform is increased, so that the front and rear waveforms overlap and form a coupling, which doubles the number of modal modes. The more the number of microwave modal modes, the more heated the workpiece. The better the uniformity is, it can increase the efficiency and uniformity of the wafer doping annealing process or the microwave heating of the workpiece.

Although the present invention has been disclosed as above with the examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some modifications and retouching without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the attached patent application.

Claims (20)

A method for operating a microwave heating device includes: setting a receiving space in a heating chamber; providing a carrier in the receiving space, the carrier having a plane for carrying at least one microwave heated object; and A plurality of microwave transmitters are arranged outside the heating cavity for transmitting microwaves; a plurality of half-wave rectified power supplies are provided, respectively coupled to the microwave transmitters, and each of the half-wave rectified power supplies includes a A capacitor; between the heating chamber and the corresponding microwave transmitters, a plurality of longitudinal waveguides and a plurality of transverse waveguides are respectively connected, and the direction of the electric field polarization in each of the longitudinal waveguides is perpendicular to the carrier The plane of the stage, the direction of the electric field polarization in each of the transverse waveguides is parallel to the plane of the stage; the capacitance values of the capacitors in the half-wave rectified power supplies are adjusted so that the microwave transmitters emit The microwave waveform bandwidth is expanded to produce complex overlapping coupling; and the half-wave rectified power supply is used to supply power to the microwave transmitters so that the microwaves pass through the longitudinal waveguide waves TWT transmitted to the heating chamber and the plurality of transverse waveguide, and forming a multi-mode microwave in the heating chamber. The operation method according to item 1 of the scope of patent application, wherein the longitudinal waveguides are divided into two groups of longitudinal waveguides in the form of equal power, and are connected to the heating chamber opposite to each other and symmetrically to transfer The microwaves of the opposite electric field phase go to the inside of the heating chamber to form multiple longitudinal odd modes in the heating chamber. The operation method according to item 1 of the scope of patent application, wherein the longitudinal waveguides are divided into two groups of longitudinal waveguides in the form of equal power, and are connected to the heating chamber opposite to each other and symmetrically to transfer The microwaves with the same electric field phase go to the inside of the heating chamber to form multiple longitudinal even modes in the heating chamber. The operation method according to item 1 of the scope of patent application, wherein the transverse waveguides are divided into two groups of transverse waveguides in the form of equal power, and are connected to the heating chamber oppositely and symmetrically to transfer The microwaves of the opposite electric field phase go to the inside of the heating chamber to form multiple transverse odd modes in the heating chamber. The operation method according to item 1 of the scope of patent application, wherein the transverse waveguides are divided into two groups of transverse waveguides in the form of equal power, and are connected to the heating chamber oppositely and symmetrically to transfer The microwaves with the same electric field phase go to the inside of the heating chamber and are used to form multiple transverse even modes in the heating chamber. The operating method according to item 1 of the scope of patent application, wherein the longitudinal waveguides are connected between the heating chamber and the corresponding microwave transmitters at a fixed angle from each other to transfer the microwaves to the The interior of the heating chamber is used to form multiple transverse even modes in the heating chamber. The length difference between the waveguides adjacent to each other is a half of the wavelength of the waveguide and then divided by the longitudinal directions. Number of waveguide tubes. The operation method according to item 1 of the scope of patent application, wherein the transverse waveguides are connected between the heating chamber and the corresponding microwave transmitters at a fixed angle from each other to transfer the microwaves to the The interior of the heating chamber is used to form multiple longitudinal even modes in the heating chamber, wherein the length difference of the waveguides adjacent to each other is one-half of the wavelength of the waveguide and then divided by the transverse directions. Number of waveguide tubes. The operating method according to item 1 of the scope of patent application, wherein the number of these half-wave rectified power supplies is twelve, and before adjusting the capacitor value, it includes three contacts R, S using industrial three-phase power. , T are in the form of △ connected power supply, which form RS, ST, TR, SR, TS, RT six-phase power to be supplied to six of the twelve half-wave rectified power supplies. The operating method according to item 8 of the scope of patent application, wherein before adjusting the capacitance value, the three contacts R, S, and T of the industrial three-phase power supply are connected to a C connection in the form of a Y connection power supply. Points to form six phases of RC, SC, TC, CR, CS, and CT to supply the other six of the twelve half-wave rectified power supplies. The operating method according to item 1 of the scope of patent application, wherein the number of these half-wave rectified power supplies is twelve, and before adjusting the capacitor value, it includes three contacts R, S using industrial three-phase power. T and T are in the form of △ connected to power in parallel with Y connected to power, forming RS, RC, ST, SC, TC, TR, CR, SR, CS, TS, RT, and CT. Rectified power supply. The operating method according to item 1 of the patent application scope, wherein the capacitor is a variable capacitor. A microwave annealing process for a semiconductor doped substance includes: providing a microwave heating device, including: a heating chamber having a receiving space; a carrier disposed in the receiving space, the carrier having a A plane for carrying at least one heated object, the heated object being a semiconductor element with a doped substance; a plurality of microwave transmitters arranged outside the heating cavity to emit microwaves; a plurality of half-wave rectified power sources A power supply respectively coupled to the microwave transmitters, each of the half-wave rectified power supplies includes a capacitor; and a plurality of longitudinal waveguides and a plurality of transverse waveguides are respectively connected to the heating cavity Between the chamber and the corresponding microwave transmitters, the direction of the electric field polarization in each of the longitudinal waveguides is perpendicular to the plane of the carrier, and the direction of the electric field polarization in each of the transverse waveguides is parallel to the carrier. The plane; adjust the capacitance of the capacitors in the half-wave rectified power supplies to expand the microwave waveform bandwidth emitted by the microwave transmitters to produce complex overlapping coupling, Increasing the number of microwave modes; and supplying power to the microwave transmitters through the half-wave rectified power supplies, so that the microwaves are transmitted to the heating chamber through the longitudinal waveguides and the transverse waveguides And forming a multiple microwave mode in the heating chamber, and performing an annealing process on the semiconductor element having a doped substance. A process for manufacturing a multi-modal microwave heating device includes: providing a microwave heating device, including: a heating chamber having a receiving space; a carrier set in the receiving space, the carrier having a A plane for carrying at least one object to be heated; a plurality of microwave transmitters arranged outside the heating cavity for transmitting microwaves; a plurality of half-wave rectified power supplies respectively coupled to the microwave transmitters, the Each of the half-wave rectified power supplies includes a capacitor; and a plurality of longitudinal waveguides and a plurality of transverse waveguides are respectively connected between the heating chamber and the corresponding microwave transmitters, and each of the longitudinal The direction of the electric field polarization in the waveguide is perpendicular to the plane of the carrier, and the direction of the electric field polarization in each of the transverse waveguides is parallel to the plane of the carrier; adjusting the half-wave rectifier power supply in the The capacitance value of the capacitor expands the bandwidth of the microwave waveforms emitted by the microwave transmitters to produce complex overlapping coupling, multiplying the number of microwave modes; and the power is supplied through the half-wave rectified power supplies. The plurality of microwave power to the transmitter, the plurality of the vertical waveguide by microwave waveguide and the plurality of transverse wave tube is transmitted to the waveguide heating chamber, and forms a multi-mode microwave in the heating chamber. The process according to item 12 or 13 of the scope of patent application, wherein the longitudinal waveguides are divided into two groups of longitudinal waveguides in the form of equal power, and are connected to the heating chamber facing each other and symmetrically to transfer The microwaves having opposite electric-phase phases go to the inside of the heating chamber to form multiple longitudinal odd modes in the heating chamber. The process according to item 12 or 13 of the scope of patent application, wherein the longitudinal waveguides are divided into two groups of longitudinal waveguides in the form of equal power, and are connected to the heating chamber facing each other and symmetrically to transfer The microwaves having the same electric field phase go to the inside of the heating chamber to form multiple longitudinal even modes in the heating chamber. The process according to item 12 or 13 of the scope of patent application, wherein the transverse waveguides are divided into two groups of transverse waveguides in the form of equal power, and are connected to the heating chamber facing each other and symmetrically to transfer The microwaves having opposite electric-phase phases go to the inside of the heating chamber to form multiple transverse odd modes in the heating chamber. The process according to item 12 or 13 of the scope of patent application, wherein the transverse waveguides are divided into two groups of transverse waveguides in the form of equal power, and are connected to the heating chamber facing each other and symmetrically to transfer The microwaves having the same electric field phase go to the inside of the heating chamber to form multiple transverse even modes in the heating chamber. The process according to item 12 or 13 of the scope of the patent application, wherein the longitudinal waveguides are connected between the heating chamber and the corresponding microwave transmitters at a fixed angle from each other to transmit the microwaves to The interior of the heating chamber is used to form multiple transverse even modes in the heating chamber. The length difference between the waveguides adjacent to each other is a half of the wavelength of the waveguide and then divided by the wavelengths. The number of longitudinal waveguides; wherein the transverse waveguides are connected at a fixed angle from each other between the heating chamber and the corresponding microwave transmitters to transmit the microwaves to the interior of the heating chamber, Configured to form multiple longitudinal even modes in the heating chamber, wherein the length difference between the waveguides adjacent to each other is a half of the wavelength of the waveguide and then divided by the number of the transverse waveguides; Among them, there are twelve half-wave rectified power supplies, and before adjusting the capacitor value, the method further includes: using the three contacts R, S, and T of the industrial three-phase power supply to form RS, respectively, forming RS , ST, TR, SR, TS, RT six-phase power Six of the twelve half-wave rectified power supplies were provided; and three contacts R, S, and T using the industrial three-phase power supply were connected in common to a C contact in the form of a Y power supply. Six phases of RC, SC, TC, CR, CS, and CT are formed to supply the other six of the twelve half-wave rectified power supplies. According to the process described in the patent application No. 12 or 13, the number of the half-wave rectified power supplies is twelve, and before adjusting the capacitor value, the three contacts R, S, T are in the form of △ connected to the power supply in parallel with Y connected to the power supply, forming RS, RC, ST, SC, TC, TR, CR, SR, CS, TS, RT, and CT. Wave Rectified Power Supply. The process as described in claim 12 or 13, wherein the capacitor is a variable capacitor.