TWI638685B - Coating liquid supply device - Google Patents

Abstract

The coating liquid supply device is characterized in that it includes: a storage container storing the coating liquid; a rod that moves in the storage container in the axial direction and discharges the coating liquid stored in the storage storage container from the storage storage container; The coating liquid stored in the storage container is isolated from the rod, and an enclosed space is formed between the rod and the rod, and the telescopic hose member is retracted and retracted relative to the movement of the rod in the axial direction. Sealed with liquid.

Description

Coating liquid supply device

FIELD OF THE INVENTION The present invention relates to a coating liquid supply device suitable for a coating device.

Conventionally, a pump for sucking and discharging a coating liquid, such as a desktop coater, is known as a rod-type syringe pump. However, in such a pump, an O-ring or the like is used in the sliding part of the rod, and a small amount of coating liquid may leak or solidify. Therefore, as shown in the reference 1, although the invention has been further provided with a coating liquid recovery chamber outside the O-ring, the structure is complicated and large, and the O-ring is still the result between the coating liquid recovery chamber and the rod. Hermetically sealed has the same problem. Therefore, as shown in the telescopic hose 58 of the reference document 2, a pump is provided that does not contact the sliding part of the rod with the application liquid by using the telescoping of the telescopic hose member. In addition, a syringe pump using a telescopic hose member is generally as shown in reference 3. Prior technical literature Patent literature

[Patent Document 1] JP 2008-161740 [Patent Document 2] JP 2011-14732 [Patent Document 3] JP 60-261464

BACKGROUND OF THE INVENTION Problems to be Solved by the Invention However, since a telescopic hose member is formed of a thin plate of metal or synthetic resin, when a pressure is applied from one side thereof, the member itself bulges and elastically deforms. In the pump using the telescopic hose member described above, one side of the telescopic hose member is opened to atmospheric pressure. Therefore, when the coating liquid is discharged, when the rod is pushed in, the telescopic hose member itself is deformed due to the pushing pressure of the rod, and the amount (volume) of the pushed rod is not consistent with the amount of the coating liquid discharged, There is a problem that it is difficult to apply the uniform thickness to the substrate after the application amount is changed.

Therefore, an object of the present invention is to provide a coating liquid supply device capable of improving the accuracy of the coating liquid application amount.

SUMMARY OF THE INVENTION Means for Solving the Problems The present invention is characterized by comprising: a storage container for storing a coating liquid; and a rod that moves in the storage container in an axial direction so that the coating liquid stored in the storage container is removed from the storage. The container is ejected; and a telescopic hose member is installed on the rod member, isolates the coating liquid stored in the storage container from the rod member, and forms an enclosed space between the rod and the rod member as a closed space, and can be opposed to each other. As the rod moves in the axial direction to expand and contract, a liquid is sealed in the sealed space.

According to the foregoing configuration, by sealing the liquid in the enclosed space, the volume of the enclosed space does not change even if pressure is applied due to movement in the axial direction of the rod, which prevents deformation of the telescopic hose member itself. The amount of volume change in the storage container caused by the direction movement will be consistent with the amount of the coating solution discharged. Therefore, the accuracy of the application amount of the coating liquid can be improved.

The present invention further preferably has the following configuration. (1) The enclosed space has a first space formed between an outer peripheral surface of the rod and an inner surface of the telescopic hose member. When the telescopic hose member expands and contracts, the first space When the volume is increased or decreased, the enclosed space has an adjustment space that allows the liquid enclosed in the enclosed space to move. (2) In the aforementioned configuration (1), a protruding member that is movable in the axial direction with respect to the front end of the lever is attached to a front end portion of the lever, and a distal end of the telescopic hose member is attached to the protruding member. A part of the adjustment space is formed by a front end of the rod and the protruding member. (3) In the aforementioned configuration (1), the axially middle portion of the telescopic hose member is mounted on the front end of the lever, the front end of the telescopic hose member is closed, and the adjustment space is defined by the lever. The front end is formed with the front end portion of the telescopic hose member. (4) In any one of the structures (1) to (3), a part of the adjustment space is communicated with the first space through a space formed inside the lever. (5) In any one of the structures (1) to (4), the liquid is enclosed in the enclosed space in a state where a volume of the first space is maximized. (6) The base end of the telescopic hose member is mounted on the storage container, and the front end itself is closed.

According to the aforementioned configuration (1), since the enclosed space has a liquid-movable adjustment space, it is possible to easily achieve a configuration in which the volume of the enclosed space is movable relative to the axial direction of the rod.

According to the aforementioned configuration (2), a part of the adjustment space is formed by the front end of the rod and the protruding member, so that the movement source and destination of the liquid can be formed when the volume of the first space increases or decreases due to the expansion and contraction of the telescopic hose member. . As a result, it is possible to easily achieve a configuration in which the telescopic hose member moves smoothly during expansion and contraction and the volume of the enclosed space is fixed.

According to the aforementioned configuration (3), an adjustment space is formed by the front end of the rod and the front end portion of the telescopic hose member, thereby forming a source of liquid movement when the volume of the first space increases or decreases due to the expansion and contraction of the telescopic hose member, Move destination. As a result, it is possible to easily achieve a configuration in which the volume of the enclosed space can be fixed when the telescopic hose expands and contracts.

According to the aforementioned configuration (4), when the volume of the first space is increased or decreased due to the expansion and contraction of the telescopic hose member, liquid can pass through the inside of the rod and move between the first space and the adjustment space.

According to the aforementioned configuration (5), by filling the liquid in a state where the volume of the first space is maximized, the above functions can be accurately performed regardless of the position of the rod.

According to the aforementioned configuration (6), it is possible to provide a coating liquid supply device having a very simple structure of a telescopic hose member. Invention effect

In summary, according to the present invention, it is possible to provide a coating liquid supply device capable of improving the accuracy of the coating liquid coating amount.

Detailed Description of the Preferred Embodiment (Overall Structure) Fig. 1 is a schematic view of a coating apparatus 10 according to a first embodiment of the present invention. As shown in FIG. 1, the coating device 10 includes: a storage tank 1 that stores a coating liquid; a slit nozzle 2 that applies the coating liquid to the substrate 12 on the support table 11; A coating liquid supply device 3; and a control device 4 that controls the coating device 10. The slit nozzle 2 is a slit nozzle for a desktop coater (registered trademark), and forms a slit with a predetermined width for automatically discharging the coating liquid from the nozzle. The slit nozzle 2 is moved to apply the coating liquid to the substrate. 12. The movement of the slit nozzle 2 is controlled by the control device 4.

The compressed air is supplied to the storage tank 1 and the coating liquid is pushed out from below by the pressure of the compressed air. In addition, the coating liquid in the storage tank 1 may be pushed out by gravity without using compressed air.

The coating liquid supply device 3 includes a storage container 5 that stores the coating liquid, a lever 6 that discharges the coating liquid stored in the storage container 5 from the storage container 5 to the slit nozzle 2, and a drive that moves the lever 6 in the axial direction. Component 7.

The storage container 5 is constituted by a cylindrical cylinder. In this embodiment, a glass cylinder is used for the storage container 5 to improve the visibility of the interior. However, the storage container 5 may be made of a metal material such as stainless steel. In this case, the inner surface of the storage container 5 must be reduced in surface roughness by mirror processing or the like.

One end of the storage container 5 is closed, and a packaging member 51 is mounted on the other end of the storage container 5. The packaging member 51 is formed with an insertion hole 51 a through which the rod member 6 can be inserted. A sealing member 52 such as an O-ring is arranged on the inner peripheral surface of the insertion hole 51a. The sealing member 52 ensures the sealing property between the packaging member 51 and the rod 6.

The coating liquid is supplied from the storage tank 1 to the storage container 5 through the coating liquid supply pipe 13. The coating liquid supply pipe 13 is provided with a supply valve 13 a. The supply valve 13 a is opened and closed to supply and stop the supply of the coating liquid to the storage container 5. The opening and closing of the supply valve 13 a is controlled by the control device 4.

The coating liquid is supplied from the storage container 5 through the coating liquid discharge pipe 14 to the slit nozzle 2. The coating liquid discharge pipe 14 is provided with a discharge valve 14a, and the supply of the coating liquid to the slit nozzle 2 is stopped and stopped by opening and closing the discharge valve 14a. The opening and closing of the discharge valve 14 a is controlled by the control device 4.

An air exhaust pipe 15 is connected to the storage container 5 to exhaust the air in the storage container 5. The air discharge pipe 15 is provided with a discharge valve 15a, and the air in the storage container 5 is discharged by opening the discharge valve 15a. The opening and closing of the discharge valve 15 a is controlled by the control device 4.

A liquid sealing tube 16 is connected to the storage container 5 for sealing the sealing liquid W in a sealing space described later. An sealing valve 16 a is provided in the liquid sealing tube 16, and the sealing liquid W is sealed in the sealing space by opening the sealing valve 16 a. When the sealing liquid W fills the sealing space, the sealing valve 16a is closed. The opening and closing of the sealing valve 16 a is controlled by the control device 4.

The rod 6 is formed by, for example, chrome plating on the surface of stainless steel, synthetic resin, or a metal material, and has a cylindrical shape. The surface of the rod 6 is reduced in surface roughness by mirror processing or the like.

The driving member 7 is driven by the motor 71 which is a stepping motor, and rotates the ball screw 72 integrally formed on the rotation shaft of the motor 71. The support portion (ball nut) 73 screwed to the ball screw 72 causes the The lever 6 is reciprocated in the axial direction.

FIG. 2 is a schematic view of the storage container 5. As shown in FIG. 2, a protruding member 61 that is movable in the axial direction relative to the front end of the lever 6 is attached to the front end of the lever 6. The protruding member 61 includes a circular plate portion 61 a and a cylindrical pin portion 61 b. The lever 6 includes a circular guide hole 6 a that guides the pin portion 61 b of the protruding member 61 to slide in the axial direction of the lever 6, and an outer peripheral hole 6 b provided on the outer peripheral surface of the lever 6. In addition, in order to prevent distortion of a telescopic hose member described later, a plurality of pin portions 61b and guide holes 6a of the protruding member 61 or a polygonal shape may be used to stop the protruding member 61.

A telescopic hose member 8 is attached to the protruding member 61. One end of the telescopic hose member 8 is attached to the outer periphery (A in the figure) of the circular plate portion 61a of the protruding member 61, and the other end is attached to the ring member 8a (B in the figure). The outer periphery of the ring member 8a is sandwiched and fixed between the structures 5a and 5b in which the storage container 5 has a divided structure, for example. The connection method of the structural body 5a and the structural body 5b may be either. Thereby, the coating liquid P stored in the storage container 5 is separated from the rod member 6, and an enclosed space 9 is formed as a closed space between the coating liquid P and the rod member 6. Furthermore, a gap C1 is provided between the outer peripheral surface of the lever 6 and the inner surface of the telescopic hose member 8, and a gap C2 is provided between the outer peripheral surface of the lever 6 and the inner periphery of the ring member 8a, so that it can be extended The hose member 8 expands and contracts and the sealing liquid W passes. In addition, the telescopic hose member 8 expands and contracts with respect to movement in the axial direction of the lever 6.

The sealing liquid W is sealed in the sealing space 9 from the liquid sealing tube 16. The enclosed sealing liquid W is a non-compressible fluid. The enclosed space 9 includes a first space 91 formed between the inner surface of the telescopic hose member 8 and the outer peripheral surface of the rod 6, and a second space 92 formed between the storage container 5, the packaging member 51, and the rod 6. A third space 93 formed between the protruding member 61, the telescopic hose member 8 and the front end of the rod 6; a fourth space 94 formed inside the rod 6 and formed between the protruding member 61 and the rod 6; And a fifth space 95 formed in the lever 6 and connecting the first space 91 and the fourth space 94. The sealing liquid W can go back and forth in the whole by the first space 91 to the fifth space 95 and the gaps C1 and C2 described above.

Before using the coating apparatus 10, the following preparations are performed.

First, as shown in FIG. 3, the lever 6 is advanced to a position where the volume of one mountain portion of the telescopic hose member 8 is maximized. The volume of one mountain portion of the telescopic hose member 8 is the maximum, and the angle θ of one mountain portion of the telescopic hose member 8 is a predetermined angle (although it is based on the shape of the telescopic hose member 8, it is usually about 60 degrees ), At this time, the volume of the first space 91 also becomes maximum. Next, at this time, due to the elastic force of the telescopic hose member 8, the front end face of the rod member 6 comes into contact with the circular plate portion 61a, and the fourth space 94 has a minimum volume. Here, the sealing valve 16 a is opened to exhaust the internal air in the sealing space 9, and the sealing liquid 16 is supplied to the sealing space 9 through the liquid sealing tube 16, and then the sealing valve 16 a is closed so that air does not remain in the sealing space 9. The sealing solution W was sealed. In addition, whether or not the sealing liquid W fills the sealing space 9 may be determined by using the case where the circular plate portion 61 a is slightly separated from the front end of the rod 6 by the supply of the sealing liquid W. At this time, the supply valve 13a, the discharge valve 14a, and the discharge valve 15a are closed. However, in order to make the lever 6 operate smoothly, the discharge valve 15a may be opened and the air inside the storage container 5 may be passed through the air discharge pipe 15. discharge.

As shown in FIG. 4, the lever 6 is retracted to the most retracted position (the position where the front end face of the lever 6 is closest to the other end of the storage container 5 (hereinafter referred to as the initial position)), the supply valve 13 a is opened, and the coating liquid is supplied through The tube 13 supplies the coating liquid P stored in the storage tank 1 into the storage container 5. At this time, the exhaust valve 15 a is opened, and the air in the storage container 5 is exhausted through the air exhaust pipe 15. The air discharge pipe 15 is located at the highest position in the storage container 5 on the side opposite to the coating liquid supply pipe 13. Therefore, the air in the storage container 5 is smoothly discharged. Furthermore, when the coating liquid P overflows from the air discharge pipe 15, the discharge valve 15a is closed.

Here, the sealing liquid W is a non-compressible fluid, and since no air remains in the sealing space 9, even if the telescopic hose member 8 is deformed as the rod 6 moves forward and backward, the volume of the sealing space 9 is often fixed. Therefore, during the advance and retreat of the rod 6, the flow of the encapsulation liquid W occurs between the first space 91, the third space 93, the fourth space 94, and the fifth space 95 shown in FIG. The volumes of the space 93 and the fourth space 94 change. No volume change occurs in the fifth space 95, and no volume change or flow of the encapsulation liquid W occurs in the second space 92. Therefore, the adjustment spaces for the volume increase and decrease with respect to the first space 91 are the third space 93 and the fourth space 94.

Specifically, from the state of FIG. 3 to the state of FIG. 4, the entire angle θ of the telescopic hose member 8 decreases, and the volume of the first space 91 gradually decreases. However, since the volume of the sealing liquid W is fixed, the volume of the first space 91 becomes smaller and the pushed-out sealing liquid W flows to the third space 93. As a result, the front end face of the rod 6 and the circular plate portion of the protruding member 61 are obtained. 61a is opened, and the rod 6 is retracted.

In addition, as the pin portion 61b and the circular plate portion 61a move together, the volume of the fourth space 94 increases. However, the sealing liquid W flows from the first space 91 through the fifth space 95 to the sealing space. The volume of W remains fixed.

Furthermore, due to design convenience, when the outer peripheral hole 6b forming the fifth space 95 reaches the second space 92, the flow of the sealing liquid W also occurs in the second space 92 (see FIG. 5). In designing, the peripheral hole 6b must pass through the second space 92 and not be hidden by the packaging member 51 (the distance T shown in FIG. 5 is required).

As described above, when the sealing liquid W is sealed in the sealing space 9 and the coating liquid P is filled in the storage container 5, the coating apparatus 10 operates as described below. Actually, the coating liquid P is also filled in the coating liquid discharge pipe 14 and the slit nozzle 2, but the description is omitted here.

As shown in FIG. 6, by opening the discharge valve 14 a and driving the motor 71 of the drive member 7, the ball screw 72 is rotated, and the rod 6 is advanced in accordance with the discharge amount and speed required by the slit nozzle 2. As the lever 6 advances, the protruding member 61 attached to the front end of the lever 6 also advances. However, since the volume of the enclosed space 9 is maintained constant, the protruding member 61 advances only a distance smaller than the amount of advance of the lever 6 (The distance L between the front end surface of the lever member 6 shown in FIG. 4B and the circular plate portion 61a is reduced). The telescopic hose member 8 attached to the protruding member 61 advances only by extending the protruding member 61. The coating liquid P in the storage container 5 passes through the coating liquid discharge pipe 14 and is discharged to the slit nozzle 2. The coating liquid P discharged to the slit nozzle 2 is applied to the base material 12 from the slit of the slit nozzle 2. When the coating is stopped, the discharge valve 14a is closed, and when the coating is restarted, the discharge valve 14a is opened.

In addition, when the rod member 6 continues to advance, when the entire angle θ of the telescopic hose member 8 exceeds a predetermined angle (for example, about 60 degrees) (when the rod member 6 advances from the position in FIG. 3), the volume of the first space 91 gradually decreases. When it becomes smaller, the flow of the sealing liquid W is reversed, the distance L in FIG. 4B is enlarged, and the rod 6 is advanced.

In this way, in the coating device 10, since the volume of the enclosed space 9 does not change, the change in the internal volume of the storage container 5 by advancing the lever 6 advances with the discharge amount of the coating liquid P. In addition, since the inside and outside of the telescopic hose member 8 formed of a thin plate is filled with a non-compressible liquid, the pressure generated when the rod 6 is advanced is transmitted through the elastic telescopic hose member 8 because the coating liquid P and the sealing liquid Since W is the same pressure, the telescopic hose member 8 is not elastically deformed. Thereby, the application amount of the coating liquid P does not change, and the coating liquid P is applied to the base material 12 with a uniform thickness.

When the lever 6 is advanced to the most advanced position (hereinafter referred to as the most inserted position), as shown in FIG. 7, when the discharge valve 14 a is closed and the supply valve 13 a is opened, the motor 71 of the drive member 7 is driven to rotate in the reverse direction. Then, the lever 6 is retracted from the most inserted position to the initial position, and the coating liquid P is supplied into the storage container 5 through the coating liquid supply pipe 13. The coating liquid P is sequentially supplied by cooperating with the space volume that is increased when the lever 6 is retracted into the storage container 5. Therefore, in the second and subsequent coating liquid supply process, the discharge valve 15 a is maintained in a closed state. Further, when the amount of the sealing liquid W enclosed in the sealing space 9 is small, as the rod 6 is advanced, as shown in FIG. 12, the film of the telescopic hose member 8 starts to deform and sag, and it becomes impossible to obtain the correct The discharge amount, however, as shown in FIG. 3, the sealing liquid W is sealed in a state where the entire stack volume of the telescopic hose member 8 is maximized, so no such problem occurs.

By repeating the above processes, the coating operation is performed.

According to the coating device 10 configured as described above, the following effects can be exhibited.

(1) By sealing the sealing liquid W, which is a liquid, to the sealing space 9, the volume of the sealing space 9 does not change with respect to the movement of the rod 6 in the axial direction, and the telescopic hose member 8 itself formed of a thin plate can be prevented Therefore, by moving the rod 6 in the axial direction, the amount of change in the volume in the storage container 5 is consistent with the amount of the coating solution P that is discharged. Therefore, the accuracy (quantitative) of the application amount of the coating liquid P can be improved.

(2) When the volume of the first space 91 is increased or decreased by the expansion and contraction of the telescopic hose member 8, the enclosed space 9 has an adjustment space (the third space 93 and the fourth space) in which the sealing liquid W enclosed in the enclosed space 9 is movable. 94). Therefore, it is easy to achieve a configuration in which the volume of the enclosed space 9 can be fixed by moving with respect to the axial direction of the rod 6.

(3) A part of the adjustment space (third space) is formed by the front end of the lever 6 and the protruding member 61, whereby the expansion and contraction of the telescopic hose member 8 can be used to form a seal when the volume of the first space 91 is increased or decreased. The source and destination of the liquid W. As a result, when the telescopic hose member 8 is expanded and contracted, the structure can be easily achieved, and the volume of the enclosed space 9 can be fixed.

(4) A part of the adjustment space (the fourth space 94) is communicated with the first space 91 through the fifth space 95 formed inside the rod 6, and therefore, the first space is adjusted by the expansion and contraction of the telescopic hose member 8. When the volume of the space 91 increases or decreases, liquid can pass through the inside of the rod 6 and move between the first space 91 and the adjustment space.

(5) The sealing liquid W is sealed in the sealing space 9 in a state in which the volume of the first space 91 is maximized. Therefore, the above-mentioned functions can be accurately performed regardless of the position of the rod 6. Specifically, when the liquid is sealed in a state where the volume of the first space 91 is small, when the lever member 6 is pushed in, as shown in FIG. 12, the telescopic hose member 8 is adsorbed on the inside and deformed, resulting in The state in which the amount of the coating liquid is discharged is smaller than the amount of the rod 6 to be pushed in. This configuration can solve this problem.

(6) Since the rod member 6 is not in direct contact with the coating solution P, it is possible to prevent the coating member P from being dried, dust, and liquid leakage caused by the rod member 6 being moved. In addition, it is possible to prevent liquid sedimentation and uneven agglomeration of the coating liquid P during its retention.

(Other Embodiments) FIGS. 8 and 9 are schematic diagrams of a coating liquid supply device in which the protruding member 61 is not attached to the rod 6 according to another embodiment of the present invention. The other embodiment is different from the above-mentioned embodiment in that it does not include the protruding member 61, and the other structures are the same as the above-mentioned embodiment. Therefore, in the description of other embodiments, the same parts as those in the above-mentioned embodiments are given the same reference numerals, and detailed descriptions of these contents are omitted.

As shown in FIG. 8 and FIG. 9, the middle portion of the telescopic hose member 8 in the axial direction is installed at the front end of the rod 6 (the part X1 in the figure), and the front end of the telescopic hose member 8 is closed (in the figure) X2 part). The telescopic hose member 8 includes a first telescopic hose member 81, one end of which is attached to the front end of the rod 6, and the other end of which is attached to the boundary between the rod 6 and the storage container 5, and a second telescopic hose member 82, which is closed at one end. Yes, the other end is mounted on the front end of the rod 6. Furthermore, a gap or a communication hole 6c is provided between the first telescopic hose member 81 and the second telescopic hose member 82, so that the enclosed liquid can move freely.

The enclosed space 9 includes a first space 91 formed between the inner surface of the first telescopic hose member 81 and the outer peripheral surface of the rod member 6, and a second space 92 formed between the storage container 5, the packaging member 51, and the rod member 6. And a sixth space 96 formed between the second telescopic hose member 82 and the front end of the rod 6.

The telescopic hose member 8 moves and expands with respect to the axial direction of the rod 6. As a result, the volume of the first space 91 and the volume of the sixth space 96 vary, but the volume of the second space 92 is fixed. As shown in FIGS. 8 to 9, when the lever member 6 is inserted into the storage container 5, the first telescopic hose member 81 is extended and the second telescopic hose member 82 is contracted. As a result, although the volume of the first space 91 is increased, the volume of the first space 91 is increased, and the volume of the sixth space 96 is decreased. Therefore, the entire volume of the enclosed space 9 is fixed, and the pressure of the liquid enclosed in the enclosed space 9 is also fixed.

When the lever 6 is retracted from the storage container 5, as shown in the operation of FIG. 9 to FIG. 8, the first telescopic hose member 81 is contracted, and the second telescopic hose member 82 is extended. As a result, the volume of the first space 91 is reduced, but the volume of the first space 91 is reduced, and the volume of the sixth space 96 is increased. Therefore, the entire volume of the enclosed space 9 is fixed, and the pressure of the liquid enclosed in the enclosed space 9 is also fixed.

According to the coating device 10 configured as described above, the following effects can be exhibited.

(1) An adjustment space (sixth space 96) is formed by the front end of the lever 6 and the front end portion of the telescopic hose member 8, whereby the volume of the first space 91 can be increased due to the expansion and contraction of the telescopic hose member 8. The source and destination of the time-delayed liquid. As a result, it is possible to easily achieve a configuration in which the volume of the enclosed space 9 is fixed when the telescopic hose member 8 is retracted.

(2) When the axial direction middle portion of the telescopic hose member 8 is mounted on the front end of the rod 6 with the middle portion as a boundary, when the first telescopic hose member 81 on one side of the telescopic hose member 8 is extended, Then, when the second telescopic hose member 82 on the other side is contracted, and when the first telescopic hose member 81 on one side is contracted, the second telescopic hose member 82 on the other side is extended. As a result, with this configuration, the volume of the enclosed space 9 can be fixed with respect to the movement in the axial direction of the lever 6.

(3) It is not necessary to provide a protruding member that can move in the axial direction with respect to the front end of the rod 6, and it is not necessary to form a space enclosed in the enclosed space 9 and sealed in the liquid inside the rod 6. Therefore, the structure around the rod member 6 can be simplified.

As shown in FIG. 10, the telescopic hose member 8 may not be attached to the rod 6. In this case, a very simple structure can be made to expand and contract the telescopic hose member 8 with respect to the axial direction of the rod 6 to maintain the volume of the enclosed space 9 fixed. However, in this case, since the telescopic hose member 8 is not attached to the rod member 6, care must be taken so that the telescopic hose member 8 does not cause unevenness in deflection, distortion, or expansion and contraction. Furthermore, according to the embodiment up to FIG. 9, the telescopic hose member 8 does not cause the problems described above when it is retracted. The smooth movement of the telescopic hose member 8 can be realized, and the telescopic hose member 8 can be improved. Of durability.

(Other embodiments)

In each of the above-mentioned embodiments, the driving member 7 is driven by the motor 71 to rotate the ball screw 72 integrally formed on the rotation shaft of the motor 71, and through the support portion 73 screwed to the ball screw 72, the lever 6 is placed on the shaft. Move back and forth in the direction. However, as shown in FIG. 11, the lever 6 may be reciprocated in the axial direction by the shaft motor 74.

The drive member 7 includes a shaft motor 74 and a spherical pad 75 that supports the shaft motor 74.

According to this embodiment, since the driving force is directly transmitted from the shaft motor 74 to the lever member 6, the responsiveness of the movement of the lever member 6 in the axial direction can be improved. In addition, since the ball screw and the supporting member can be removed, the space required for the driving member 7 can be reduced. Furthermore, it is possible to prevent the influence of the vibration caused by the rotational movement of the ball screw on the rod, and to improve the accuracy of the rod's axial movement. As a result, the uneven application of the coating liquid can be reduced.

Furthermore, in each of the above embodiments, the coating liquid supply device 3 is horizontally arranged, that is, the rod 6 is moved back and forth in the horizontal direction, but the coating liquid supply device can also be vertically arranged, that is, the rod is moved back and forth in the vertical direction. Tilt configuration.

Various modifications and changes can be made without departing from the spirit and scope of the invention contained in the scope of the patent application.

Industrial Applicability According to the present invention, a coating liquid supply device capable of improving the accuracy of the coating liquid application amount can be provided, so that the industrial utilization cost is high.

1‧‧‧ storage tank

10‧‧‧ Coating device

11‧‧‧ support

12‧‧‧ substrate

13‧‧‧ Coating liquid supply tube

13a‧‧‧Supply valve

14‧‧‧ Coating liquid discharge tube

14a‧‧‧Eject valve

15‧‧‧air exhaust pipe

15a‧‧‧Exhaust valve

16‧‧‧Liquid sealing tube

16a‧‧‧sealing valve

2‧‧‧ Slot Nozzle

3‧‧‧ coating liquid supply device

4‧‧‧control device

5‧‧‧Storage Container

5a‧‧‧ structure

5b‧‧‧ structure

51‧‧‧Packaging components

51a‧‧‧Plug-in hole

52‧‧‧sealing member

6‧‧‧ lever

6a‧‧‧Guide hole

6b‧‧‧ peripheral hole

6c‧‧‧Connecting hole

61‧‧‧ protruding components

61a‧‧‧Circular Department

61b‧‧‧ Sales Department

7‧‧‧Driver

71‧‧‧ Motor

72‧‧‧ Ball Screw

73‧‧‧ support

74‧‧‧ shaft motor

75‧‧‧ spherical pad

8‧‧‧ Telescopic hose member

8a‧‧‧Ring member

81‧‧‧The first telescopic hose member

82‧‧‧ 2nd telescopic hose member

9‧‧‧ enclosed in space

91‧‧‧ the first space

92‧‧‧ 2nd space

93‧‧‧ 3rd space

94‧‧‧ 4th space

95‧‧‧ 5th space

96‧‧‧ 6th space

One end of A‧‧‧ telescopic hose member

B‧‧‧ Other end of telescopic hose

C1‧‧‧ Clearance

C2‧‧‧ Clearance

T‧‧‧distance

P‧‧‧coating solution

W‧‧‧ Sealing liquid

FIG. 1 is a schematic view of a coating apparatus according to a first embodiment of the present invention. FIG. 2 is a schematic view of a storage container. FIG. 3 is a schematic diagram of a storage container in a state where the volume of the first space is maximized. FIG. 4A is a schematic view of the storage container in a state where the lever is retracted last. FIG. 4B is a detailed view of the first to fifth spaces and θ and L. FIG. FIG. 5 is a schematic view when a peripheral hole formed in the fifth space reaches the second space. FIG. 6 is a schematic view of the storage container in a state where the lever is advanced from the initial position and is located at the most inserted position. Fig. 7 is a schematic view of a storage container in a state where the lever is retracted from the most inserted position and is located at an initial position. 8 is a schematic view of another embodiment of the present invention, and is a coating liquid supply device in which a protruding member is not attached to a rod. FIG. 9 is a schematic view of another embodiment of the present invention, and is a coating liquid supply device in which a protruding member is not attached to a rod. FIG. 10 is a schematic view of a coating liquid supply device in which the telescopic hose member 8 is not attached to the rod member 6 according to another embodiment of the present invention. FIG. 11 is a schematic view of a coating liquid supply device according to another embodiment of the present invention, in which a rod is moved back and forth in the axial direction by a shaft motor. FIG. 12 is a schematic view showing the shape of a telescopic hose member when a rod is pushed into a rod when the enclosed liquid is small.

Claims (5)

A coating liquid supply device, comprising: a storage container for storing the coating liquid; a rod moving in the axis direction of the storage container so that the coating liquid stored in the storage container is discharged from the storage container ; And a telescopic hose member, which is installed on the rod, isolates the coating liquid stored in the storage container from the rod, and forms an enclosed space between the rod and the rod as a closed space, and can be relative to the rod The rod is moved and retracted in the axial direction. Liquid is enclosed in the enclosed space. The enclosed space has a first space formed between an outer peripheral surface of the rod and an inner surface of the telescopic hose member. When the volume of the first space increases or decreases due to the expansion and contraction of the telescopic hose member, the enclosed space has an adjustment space that allows the liquid enclosed in the enclosed space to move. The coating liquid supply device according to claim 1, wherein a protruding member that is movable in the axial direction with respect to the front end of the rod is mounted on a front end portion of the rod, and a tip of the telescopic hose member is mounted on the protruding member A part of the adjustment space is formed by a front end of the rod and the protruding member. As in the coating liquid supply device of claim 1, wherein the axial middle portion of the telescopic hose member is installed at the front end of the rod, the front end of the telescopic hose member is closed, and the adjustment space is provided by the rod. The front end is formed with the front end portion of the telescopic hose member. The coating liquid supply device according to claim 1, wherein a part of the adjustment space is in communication with the first space through a space formed inside the rod. The coating liquid supply device according to any one of claims 1 to 4, wherein the liquid is sealed in the sealed space in a state where a volume of the first space is maximized.