TWI634384B - Transmission pod and transmission system for semiconductor process component - Google Patents

Abstract

A transfer box includes a base, a control circuit, and a fixing device. The base is disposed inside the transfer case. The fixture is disposed above the base and connected to the control circuit. The fixture includes a transmission and a fixture. Wherein, the control circuit can selectively extend the fixing member toward the base through the transmission.

Description

Transfer box and semiconductor process component transmission system

Embodiments of the present invention relate to a transfer case, and more particularly to a transfer case for housing a semiconductor process component.

In semiconductor processes, semiconductor process components may need to be transferred to different devices at various stages. For example, a photo mask applied to Lithography may need to be transferred between different devices. In general, the reticle is placed in a reticle housing for transport. If the above-mentioned reticle box is manually handled (for example, a plurality of reticle boxes are carried by a cart), there is a risk of falling, or the hood may be subjected to additional vibration during the manual handling process, resulting in light. The cover is damaged.

Therefore, there is a need for a transfer box that can be transferred between different devices of a fab in an automated manner to reduce or avoid the risk of human handling.

Some embodiments of the present invention provide a transport box including a base, a control circuit, and a fixture. The base is disposed inside the transfer case. The fixture is disposed above the base and connected to the control circuit. The fixture includes a transmission and a fixture. The control circuit can selectively move the fixing member to the bottom through the transmission The seat extends.

Some embodiments of the present invention provide a semiconductor process component transfer system including a transfer case and an overhead Hoist Transport (OHT). The transport box includes a base, a control circuit, and a fixture. The base is disposed inside the transfer case. The fixture is disposed above the base and connected to the control circuit. The fixture includes a transmission and a fixture. Wherein, the control circuit can selectively extend the fixing member toward the base through the transmission. An overhead lift handling system is configured to carry the transport cassette.

FP1, FP3‧‧‧ transfer box

FD1-FD4‧‧‧ fixture

C‧‧‧Control circuit

D1, D2‧‧‧ transmission

FX1‧‧‧Fixed parts

ST‧‧‧Base

H‧‧‧ Shell

D1-d3, d41, d51, d52, d81-d83‧‧‧ distance

PD, PD3, PD4‧‧‧ housing box

200, 201‧‧‧ semiconductor process component transmission system

20‧‧‧ Track

21‧‧‧Truck

PW‧‧‧Front open wafer transfer box

S‧‧‧ distance sensing circuit

CS, CS1, CS2‧‧‧ control signals

LT‧‧‧ signal

FL‧‧‧ Elastomer

TC1-TC3‧‧‧Contacts

Direction f1‧‧‧

A1-A4, A61-A66‧‧‧ contact surface

M1, M2, M61, M62‧‧‧ movable parts

T1‧‧‧ upper side

B1‧‧‧ underside

TR1, TR2, TR11, TR22‧‧ track

P1, P2‧‧‧ fixed column

PX1, PX2‧‧‧ piston device

PI‧‧‧ protruding part

SF‧‧‧ side

O‧‧‧ openings

RB‧‧ mechanical arm

CV‧‧‧ lid

FO3‧‧‧Opened transfer box

R1-R3‧‧‧ reflection signal

1A is a schematic view of a transport box according to an embodiment of the present invention; FIG. 1B is a schematic view of a transport box and a housing box according to an embodiment of the present invention; and FIGS. 2A and 2B are diagrams showing transmission of a semiconductor process component according to an embodiment of the present invention; 3 is a schematic view of a transport box and a receiving box according to an embodiment of the present invention; FIG. 4A is a schematic view of a transport box according to an embodiment of the present invention; and FIG. 4B is a transport box according to an embodiment of the present invention; FIG. 5A-5C is a schematic view of a transport box according to an embodiment of the present invention; FIGS. 6A and 6B are schematic views of a fixing device according to an embodiment of the present invention; and FIGS. 7A-7B are diagrams according to the present invention; A top view of the transport case and the accommodating case of the embodiment; and FIGS. 8A-8C are schematic views of the operation of the distance sensing circuit according to an embodiment of the present invention.

The following disclosure provides many different embodiments or examples to implement various features of the present invention. The following disclosure sets forth specific examples of various components and their arrangement to simplify the description. Of course, these specific examples are not intended to be limiting. For example, if a first feature is formed on or above a second feature, it may mean that the first feature is directly in contact with the second feature, and may include additional features. Formed between the first feature and the second feature described above such that the first feature and the second feature are not in direct contact with each other.

Spatially related terms used in the following, such as "below", "below", "lower", "above", "higher" and the like, are used to facilitate the description of one element in the illustration. Or the relationship between a feature and another component or feature(s). In addition to the orientation depicted in the drawings, these spatially relative terms are also meant to refer to devices that may be used in different orientations or in operation.

The same component numbers and/or characters may be repeated in the following various embodiments, which are for the purpose of simplicity and clarity, and are not intended to limit the specific relationship between the various embodiments and/or structures discussed.

The vocabulary of the first and second terms used hereinafter is for illustrative purposes only and is not intended to limit or limit the scope of the patent. In addition, the first feature and the second feature are not limited to the same or different features.

In the drawings, the shape or thickness of the structure may be enlarged to simplify or facilitate the marking. It is to be understood that elements not specifically described or illustrated may be in various forms well known to those skilled in the art.

Fig. 1A is a schematic view of a transport cassette FP1 in accordance with an embodiment of the present invention. The transport box FP1 includes a housing H and a base disposed inside the transport box FP1 ST, control circuit C, and fixed device FD1. The fixture FD1 includes a transmission D1 and a fixture FX1. As shown in FIG. 1A, the control circuit C is connected to the fixing device FD1, and the fixing device FD1 is disposed above the base ST. In some embodiments, the fixture FD1 is disposed on the upper side T1 of the interior of the transport box FP1. In some embodiments, the fixture FD1 is disposed at a base (not shown in FIG. 1A) inside the connection cassette FP1, and the base is located above the base ST. In some embodiments, the base ST is disposed on the lower side B1 of the interior of the transport case FP1 and has a surface facing the fixture FD1.

The control circuit C can selectively extend the fixing member FX1 toward the base ST through the transmission D1. For example, the control circuit C can shorten the distance between the fixing member FX1 and the base ST from the distance d1 to the distance d2 or from the distance d2 to the distance d1. In some embodiments, the transmission D1 can be a motor, and the fixture FX1 can be one of the piston devices driven by the transmission motor. In some embodiments, the fixing member FX1 extends toward the base ST along a first direction, and the first direction is a surface that is placed on the base ST.

The transport box FP1 shown in Fig. 1A can be used to accommodate a housing box. Taking FIG. 1B as an example, after the accommodating case PD is placed inside the transfer box FP1, the control circuit C can control the transmission D1, thereby driving the fixing member FX1 to extend toward the base ST, thereby clamping the fixing member FX1 and the base ST. The box PD is accommodated. In this case, the housing box PD can be fixed inside the transport box FP1 during transport. It is to be understood by those skilled in the art that the housing box PD of FIG. 1B is for illustrative purposes only and does not impose any limitation on the embodiments of the present invention. In some embodiments, the inside of the transport box FP1 can accommodate at least one housing box.

In some embodiments, the transport box FP1 can be moved overhead The Transportation (Overhead Hoist Transport, OHT) is transmitted as shown in Figure 2A. The semiconductor process component transfer system 200 of FIG. 2A includes an overhead lift handling system and a transfer cassette FP1. The overhead lift handling system includes a rail 20 and a transport cart 21, and the transport cart 21 can transport the transport box FP1. In some embodiments, the transport box FP1 has substantially the same external dimensions as the wafer front opening unified pod (wafer FOUP). Therefore, the transfer box FP1 for accommodating the accommodating case and the front opening type wafer transfer cassette for accommodating the semiconductor wafer can be transported using the same overhead lift system, thereby reducing the transfer of the fab. The cost of equipment and the risk of reducing or avoiding human handling. As shown in FIG. 2B, the overhead lift handling system of the semiconductor process component transfer system 201 includes a track 20 and a transport cart 21, and the open wafer transfer cassette PW and the transfer cassette FP1 can be used in the same manner as before the semiconductor wafer is loaded. The overhead lift handling system is transported. For example, the open wafer transfer cassette and the transfer cassette FP1 can be transported by the transport cart 21 in the same overhead lift system before the 12-inch wafer is loaded, and the present invention is not limited thereto.

In some embodiments, the size of the transfer cassette FP1 is substantially the same as that of the open wafer transfer cassette before the semiconductor wafer is loaded, and the housing cassette PD of FIG. 1B may be an extreme ultraviolet reticle. In this case, even if the size (for example, the appearance height) of the extreme ultraviolet reticle is different from the size of the inside of the transfer case FP1, the transfer case FP1 can fix the extreme ultraviolet reticle to the inside of the transfer case FP1 through the fixing device FD1, and Transfer using the same overhead lift system as the front open wafer transfer cassette described above, thereby reducing the cost of the fab's transfer equipment and reducing or avoiding the risk of manual handling.

Figure 3 is a transmission box and a housing box PD3 according to an embodiment of the present invention. Schematic diagram. The difference from the transport box FP1 of FIG. 1A is that the transport box of FIG. 3 includes a housing H and a base ST, a control circuit C, and a fixing device FD1 disposed inside the transport box, and further includes a distance sensing circuit. S. In this embodiment, the distance sensing circuit S is disposed above the base ST, and the distance sensing circuit S can selectively send the signal LT to the base ST. In some embodiments, the signal LT can be an optical signal or an ultrasonic wave or the like for ranging.

If the receiving box is not placed in the transport box of FIG. 3, the signal LT can be reflected by the base ST. The signal LT generates a first reflected signal based on the material or distance of the base ST. The distance sensing circuit S receives the first reflected signal, and determines that the receiving box is not placed on the base ST based on the energy or the delay time of the first reflected signal. Conversely, if the receiving box PD3 has been placed in the transport box of FIG. 3, the signal LT can be reflected by the receiving box PD3. The signal LT generates a second reflection signal based on the material or distance of the housing box PD3. The distance sensing circuit S receives the second reflected signal, and determines that the receiving box PD3 has been placed on the base ST based on the energy or the delay time of the second reflected signal. In some embodiments, the distance sensing circuit S can transmit the above determination result to the control circuit C.

As shown in the third embodiment, the distance sensing circuit S determines that the receiving box PD3 has been placed on the base ST, and transmits the determination result to the control circuit C through the control signal CS. The control circuit C controls the transmission device D1 to drive the fixing member FX1 based on the control signal CS to extend the fixing member FX1 toward the base ST, thereby shortening the distance between the fixing member FX1 and the base ST by the distance d1 to the distance d3, thereby making the fixing member The FX1 is in contact with the housing box PD3. In this case, the fixing member FX1 and the base ST sandwich the housing case PD3 and fix the PD 3 inside the above-described transfer case.

In some embodiments, if there is no placement in the transport box of Figure 3 When the box PD3 is set, the distance sensing circuit S determines that the receiving box is not placed on the base ST, and transmits a second control signal to the control circuit C based on the above determination result. In this case, the control circuit C can also make the distance between the fixing member FX1 and the base ST d1 based on the second control signal.

Figure 4A is a schematic illustration of a transport box FP3 in accordance with an embodiment of the present invention. The transport cassette FP3 includes a housing H and a base ST provided inside the transport box FP3, a control circuit C, a fixing device FD2, and a distance sensing circuit S. The fixture FD2 includes a transmission D2 and a fixture. The fixing member includes a movable member M1, M2, an elastic body FL, and a contact portion TC1. The contact portion TC1 is connected to the elastic body FL and includes contact faces A1, A2. The movable member M1 includes a contact surface A3, and the movable member M2 includes a contact surface A4. In this embodiment, the contact surface A1 is parallel to the contact surface A3, and the contact surface A2 is parallel to the contact surface A4.

As shown in FIG. 4A, the control circuit C is connected to the fixing device FD2, and the fixing device FD2 is disposed above the base ST. In some embodiments, the elastomer FL is disposed on the upper side of the interior of the transport case FP3. In some embodiments, the elastomer FL is disposed at a base (not shown) inside the connection transfer box FP3, and the base is located above the base ST. In some embodiments, transmission D2 can be a motor. In some embodiments, the elastomer FL can be a spring and the spring can be stretched in the direction f1. In some embodiments, the tangential direction of the contact faces A1-A4 is not parallel to the direction f1. In some embodiments, the moving members M1, M2 are moved in a direction perpendicular to the direction f1.

As shown in FIG. 4A, the signal LT transmitted from the sensing circuit S to the base ST can be reflected by the base ST, and the signal LT generates a first reflected signal based on the material or distance of the base ST. The distance sensing circuit S is based on the first reflected signal The energy or delay time determines that the receiving box is not placed on the base ST, and the above determination result is transmitted to the control circuit C through the control signal CS1. The control circuit C controls the transmission D2 based on the control signal CS1 to move the movable members M1, M2 to the position as shown in FIG. 4A. In this case, the elastic body FL accumulates the elastic force extending in the direction f1.

In another embodiment, the housing box PD4 is placed over the base ST of the transport box FP3 as shown in FIG. 4B. In this embodiment, the signal LT sent by the distance sensing circuit S is reflected by the accommodating box PD4, and the signal LT generates a second reflected signal based on the material or distance of the accommodating box PD4. The distance sensing circuit S determines that the accommodating box PD4 has been placed on the base ST based on the energy or the delay time of the second reflected signal, and transmits the determination result to the control circuit C through the control signal CS2. In this case, the control circuit C controls the transmission D2 based on the control signal CS2 to move the movable members M1, M2 away from each other. As shown in FIG. 4B, the contact surface A1 and the contact surface A3 are in contact with each other, and the contact surface A2 and the contact surface A4 are in contact with each other. The contact portion TC1 receives the above-described elastic force of the elastic body FL and is pushed down in the direction f1. When the movable members M1, M2 are spaced apart from each other by a distance d41, the contact portion TC1 is in contact with the accommodating case PD4, whereby the accommodating case PD4 is fixed in the transfer case FP3.

In the embodiment shown in Fig. 4B, the elastic body FL still accumulates the elastic force extending in the direction f1, but the elastic force accumulated by the elastic body FL in Fig. 4B is different from the elastic force accumulated in the elastic body FL in Fig. 4A. . In some embodiments, the transmission D2 can move the movable members M1, M2 away from each other without coming into contact with the contact portion TC1. In some embodiments, when the movable members M1, M2 are not in contact with the contact portion TC1, the transmission D2 can also bring the movable members M1, M2 close to each other, and cause the contact faces A1, A2 and the contact faces A3, A4, respectively. contact.

In some embodiments, when the movable members M1, M2 are spaced apart from each other by a distance d41 and the elastic force of the elastic body FL is known, the control circuit C can cause the movable members M1, M2 to generate forces close to each other (not to The contact portion TC1 is pushed up by the contact faces A3, A4, and the component of the force in the direction f1 is applied to the contact portion TC1 by the contact faces A1-A4, whereby the adjustment elastic body FL is applied through the contact portion TC1. The elastic force of the box PD4 extending in the direction f1.

In some embodiments, a mechanical device (e.g., a robotic arm) can enter the transfer box FP3 of Figure 4B. In this case, the signal LT transmitted from the distance sensing circuit S to the base ST is reflected by the mechanical device, and the signal LT generates a third reflected signal based on the material of the mechanical device or the distance from each other. The distance sensing circuit S determines that the mechanical device has entered the transport box FP3 based on the energy or delay time of the third reflected signal, and transmits the determination result to the control circuit C through a third control signal.

In this case, the control circuit C controls the transmission D2 to bring the movable members M1, M2 close to each other to the configuration of FIG. 4A based on the determination result of the distance sensing circuit S (for example, the above-described third control signal). If the movable members M1, M2 are moved from the position of FIG. 4B to the position of FIG. 4A, the movable members M1, M2 are made by the contact faces A3, A4 in the process in which the movable members M1, M2 are close to each other. The contact portion TC1 is pushed up in the direction f1 and leaves the housing box PD4 while causing the elastic body FL to accumulate the elastic force extending in the direction f1. When the configuration of the fixing device FD2 is the same as that of FIG. 4A, the housing box PD4 is not sandwiched by the fixing device FD2 and the bottom plate ST. In some embodiments, the third control signal may be the same as the control signal CS1.

5A-5C are schematic views of a transport cassette FP3 in accordance with an embodiment of the present invention. For the sake of simplicity and clarity, Figures 5A-5C only depict fixture FD2 Some of the components, the housing H and the base ST. As shown in Fig. 5A, the fixing device FD2 further includes rails TR1, TR2 which are respectively disposed on the left side surface and the right side surface inside the transport case FP3. The transmission D2 can drive the movable members M1, M2 to move the movable members M1, M2 along the track TR1 and the track TR2, respectively. In some embodiments, the distance d51 must be greater than the height of the accommodating case so that the accommodating case can be placed on the base ST smoothly. For example, in some embodiments, the height of the extreme ultraviolet reticle housing is about 102 millimeters, so if the transport box FP3 is intended to accommodate the above-described extreme ultraviolet hood, the distance d51 must be greater than 102 millimeters.

As shown in Fig. 5B, the fixing device FD2 further includes fixing posts P1, P2 respectively disposed on the upper side of the inside of the transport case FP3, and tracks TR11, TR22 respectively connecting the fixed posts P1, P2. The transmission D2 can drive the movable members M1, M2 to move the movable members M1, M2 along the rail TR11 and the track TR22, respectively.

As shown in Fig. 5C, the fixing device FD2 further includes piston devices PX1, PX2 respectively disposed on the left and right sides of the inside of the transfer case FP3, and the piston devices PX1, PX2 respectively include movable members M1, M2. The transmission D2 can drive the piston devices PX1, PX2 such that the movable members M1, M2 are pushed out or pulled back from the piston devices PX1, PX2, respectively, whereby the movable members M1, M2 are brought closer to or away from each other. In some embodiments, the housing of the housing includes at least one recess. The base ST may include a protrusion PI matching the groove of the accommodating case, and the distance d52 shall be greater than the height of the accommodating case so that the accommodating case can be smoothly placed on the base ST. For example, the height of the extreme ultraviolet reticle as described above is about 102 mm. Therefore, if the transfer box FP3 is intended to accommodate the above-mentioned extreme ultraviolet reticle, the distance d52 must be at least greater than 102 mm.

6A is an illustration of a fixing device FD3 according to an embodiment of the present invention. It is intended that the fixture FD3 can be used in place of the fixture FD2 of Figures 4A, 4B. The contact portion TC2 of the fixing device FD3 is different from the contact portion TC1 of the fixing device FD2, and the remaining components are the same as the fixing device FD2, and details are not described herein again. The contact portion TC2 includes contact faces A61, A62, wherein the contact faces A61, A62 are curved surfaces. In some embodiments, when the movable members M1, M2 are moved to the configuration as shown in FIG. 6A, the elastic body FL accumulates the elastic force extending in the direction f1.

Fig. 6B is a schematic view of the fixing device FD4 according to an embodiment of the present invention, and the fixing device FD4 can be used in place of the fixing device FD2 of Figs. 4A and 4B. The fixture FD4 includes a transmission D2 and a fixture. The fixing member includes movable members M61, M62, an elastic body FL, and a contact portion TC3. Among them, the transmission device D2 of the fixing device FD4 is the same as the fixing device FD2.

As shown in FIG. 6B, the contact portion TC3 is connected to the elastic body FL and includes contact faces A63, A64, wherein the contact faces A63, A64 are curved surfaces. The movable member M61 includes a contact surface A65, and the movable member M62 includes a contact surface A66. In some embodiments, when the movable members M1, M2 are moved to the configuration as shown in FIG. 6B, the elastic body FL accumulates the elastic force extending in the direction f1.

Fig. 7A is a plan view of the transport case FP3 and the accommodating case PD4 according to an embodiment of the present invention. For the sake of brevity and clarity, FIG. 7A only depicts some of the components of the transport box FP3 and the housing box PD4. In this embodiment, the signal LT transmitted from the sensing circuit S to the base ST is mainly reflected by the receiving box PD4 (as shown in FIG. 4B).

In some embodiments, the transport cassette FP3 is a front open transport cassette and the opening of the transport cassette FP3 is located on the side SF. In this case, the transport box FP3 is an open transport box formed by the open transport box FO3 and the cover CV (as shown in FIG. 7B). Show). When the cover CV located on the side SF of the transport case FP3 is opened, a mechanical device (for example, a robot arm) can enter the opened transfer case FO3 from the opening O, and the receiving case PD4 can be taken out. In some embodiments, when a mechanical device enters the open transport box FO3, the signal LT transmitted by the distance sensing circuit S can also be reflected by the mechanical device.

In some embodiments, when the transport box FP3 is the above-mentioned front open transport box composed of the open transport box FO3 and the cover CV (as shown in FIG. 7B), the distance sensing circuit S interacts with a mechanical device. As shown in Figure 8A-8C. For the sake of brevity and clarity, Figures 8A-8C depict only some of the components of the open transport box FO3.

As shown in FIG. 8A, when the receiving box is not placed on the base ST of the open transport box FO3, the signal LT transmitted from the sensing circuit S to the base ST is reflected by the base ST, and the distance sensing circuit S generates a reflection signal R1 based on the material of the base ST or the distance d81. The distance sensing circuit S receives the reflected signal R1 and determines that the receiving box is not placed on the base ST based on the energy or delay time of the reflected signal R1, and then transmits the corresponding control signal to the control circuit (for example, the control circuit C). In this case, the arrangement of the fixing device FD2 of the opened transfer cassette FO3 is the same as that of the fixing device FD2 of Fig. 4A.

As shown in FIG. 8B, when the robot arm RB and the accommodating box PD4 enter the open transport box FO3, the signal LT transmitted from the sensing circuit S to the base ST is reflected by the robot arm RB, and the distance sensing circuit S is based on The material of the robot arm RB or the distance d82 produces a reflection signal R2. The distance sensing circuit S receives the reflected signal R2 and determines that the robot arm RB has entered the open transport box FO3 based on the energy or delay time of the reflected signal R2, thereby transmitting the corresponding control signal to the control. Circuit (eg control circuit C). In this case, the arrangement of the fixing device FD2 of the opened transfer cassette FO3 is the same as that of the fixing device FD2 of Fig. 4A.

As shown in FIG. 8C, when the robot arm RB has placed the accommodating box PD4 on the base ST and leaves the open transport box FO3, the signal LT transmitted from the sensing circuit S to the base ST is accommodated in the box PD4. The reflected sensing circuit S generates the reflected signal R3 based on the material of the receiving box PD4 or the distance d83. The distance sensing circuit S receives the reflected signal R3 and determines that the receiving box PD4 has been placed on the base ST based on the energy or the delay time of the reflected signal R3, and then transmits the corresponding control signal to the control circuit (for example, the control circuit C). . In this case, the arrangement of the fixing device FD2 of the opened transfer cassette FO3 is the same as that of the fixing device FD2 of Fig. 4B.

In some embodiments, the distance sensing circuit S continues to receive the energy of the reflected signal R3 for a predetermined period of time before the configuration of the fixed device FD2 of the opened transport cassette FO3 is the same as that of the fixed device FD2 of FIG. In some embodiments, the process of placing the receiving box PD4 into the open transport box FO3 is performed in the order of FIG. 8A, FIG. 8B, and FIG. 8C. In some embodiments, the process of taking out the accommodating case PD4 in the opened transfer cassette FO3 is performed in the order of FIG. 8C, FIG. 8B, and FIG. 8A.

Although the present invention has been disclosed above in the foregoing embodiments, it is not intended to limit the invention. Those skilled in the art having the ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

Claims (10)

A transport box comprising: a base disposed inside the transport box; a control circuit; and a fixing device disposed above the base and connected to the control circuit, the fixing device comprising: a transmission device; and a fixing member The control circuit can selectively extend the fixing member toward the base through the transmission. The transmission box of claim 1, further comprising: a distance sensing circuit coupled to the control circuit for selectively outputting a control signal to the control circuit; wherein the control circuit is controlled according to the control signal The transmission causes the fixing member to extend toward the base. The transmission box of claim 2, wherein the distance sensing circuit selectively transmits a signal to the base and receives a first reflected signal generated by the signal; wherein, when the distance is sensed When the circuit receives the first reflected signal having a first energy, the distance sensing circuit sends the control signal to the control circuit. The transport case of claim 1, wherein the fixing member comprises: a first movable member; and a second movable member; An elastic body that is expandable and contractible in a first direction; and a contact portion that connects the elastic body, and the contact portion includes a first contact surface and a second contact surface; wherein the first contact surface is selectively contactable One of the first movable members has a third contact surface, and the second contact surface selectively contacts one of the fourth movable surfaces of the second movable member. The transmission box of claim 4, further comprising: a distance sensing circuit coupled to the control circuit for selectively outputting a control signal to the control circuit; wherein the control circuit is controlled according to the control signal The transmission device causes the first movable member and the second movable member to approach each other, and causes the contact portion to be pushed up by the third contact surface and the fourth contact surface in the first direction. The transmission box of claim 4, further comprising: a distance sensing circuit coupled to the control circuit for selectively outputting a control signal to the control circuit; wherein the control circuit is controlled according to the control signal The transmission device causes the first movable member and the second movable member to move away from each other by a first predetermined distance, and causes the contact portion to be pushed down by the elastic body in the first direction. The transport cassette of claim 4, wherein the third contact surface is parallel to the first contact surface, and the fourth contact surface is parallel to the second contact surface. The transfer case of claim 1, wherein the transfer case is configurable to carry a pole UV hood, and the transmission is configured to The fixing member is selectively extended toward the base such that the fixing member and the base sandwich the ultraviolet ray mask case. A semiconductor process component transmission system comprising: the transfer case of claim 1; and a overhead lift handling system configured to carry the transfer case. The semiconductor process component transfer system of claim 9, wherein the overhead lift handling system is configurable to carry a front open wafer transfer cassette.