TWI629524B - Method for micro-optics alignment and assembly using needle pin and temporary attachment - Google Patents

Method for micro-optics alignment and assembly using needle pin and temporary attachment Download PDF

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TWI629524B
TWI629524B TW105125800A TW105125800A TWI629524B TW I629524 B TWI629524 B TW I629524B TW 105125800 A TW105125800 A TW 105125800A TW 105125800 A TW105125800 A TW 105125800A TW I629524 B TWI629524 B TW I629524B
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Taiwan
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pin
component
optical
optical component
substrate
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TW105125800A
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TW201805672A (en
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李堯
蕭啟俊
周峰雷
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逢源科技股份有限公司
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Abstract

本說明書描述用於微光學校準和組裝之技術。藉由將針銷附接於欲組裝之光學元件,光學元件可以在受限空間內被放置及校準。在經校準的光學元件永久黏合於基板或另一元件後,針銷自光學元件拆離。這種技術允許使用者放置、校準及附接一小型光學元件於一預定義位置。 This specification describes techniques for micro-optical calibration and assembly. By attaching the pins to the optical components to be assembled, the optical components can be placed and calibrated in a confined space. After the calibrated optical component is permanently bonded to the substrate or another component, the pin is detached from the optical component. This technique allows the user to place, calibrate and attach a small optical component to a predefined location.

Description

用於使用針銷與暫時附接的微光學校準及組裝之方法 Micro-optical calibration and assembly method for using pin and temporary attachment

本發明一般係關於光通訊的領域。具體言之,本發明係關於在受限空間中校準光學元件。 The invention generally relates to the field of optical communications. In particular, the present invention relates to calibrating optical components in a confined space.

校準過程係組裝微光學元件的過程鏈中的重要步驟。其對微光學系統的裝置效能、必要的組裝時間及製造成本有直接影響。出於這個原因,唯有為每個組裝任務的特殊要求調整校準過程能夠節省成本並獲得最佳的光學系統效能。 The calibration process is an important step in the process chain of assembling micro-optical components. It has a direct impact on the device performance, necessary assembly time and manufacturing cost of the micro-optical system. For this reason, only adjusting the calibration process for the specific requirements of each assembly task can save costs and achieve optimal optical system performance.

傳統上,手動或以工作台延伸臂透過鑷子(tweezers)或真空鑷子來夾持光學元件。隨著光學元件尺寸越來越小,使用傳統夾持工具變得更具挑戰性。某些光學元件的尺寸小到毫米等級(如2.5×2.5mm),甚至次毫米,而鑷子的尖端或真空鑷子的嘴部往往大於光學元件的橫截面。 Traditionally, optical components have been clamped by hand or by a table extension arm through tweezers or vacuum tweezers. As optical components become smaller and smaller, the use of conventional gripping tools becomes more challenging. Some optical components are as small as a millimeter (e.g., 2.5 x 2.5 mm) or even a millimeter, while the tip of the forceps or the mouth of the vacuum tweezing tends to be larger than the cross section of the optical component.

更甚者,許多光學表面不宜觸碰以避免可能的損壞或劃傷,且因而光學元件的夾持區域被進一步限制。因此,需要新的夾持光學元件之方法。此外,新夾持工具不應阻擋光學光路徑亦不應損壞或劃傷光學表面。Moreover, many optical surfaces are not suitable for touching to avoid possible damage or scratches, and thus the clamping area of the optical element is further limited. Therefore, there is a need for new methods of clamping optical components. In addition, the new gripping tool should not block the optical path and should not damage or scratch the optical surface.

這部分的目的在於總結本發明的某些態樣以及簡短介紹某些偏好實施例。可在此部分與摘要中及標題中簡化或省略以避免混淆此部分、摘要及標題的目的。這些簡化或省略並未限制本發明的範圍。The purpose of this section is to summarize some aspects of the invention and to briefly describe certain preferred embodiments. It may be simplified or omitted in this section and in the abstract and in the title to avoid obscuring the purpose of this section, the abstract, and the title. These simplifications or omissions do not limit the scope of the invention.

一般來說,本發明係關於用於微光學校準和組裝之技術。藉由將針銷附接於欲組裝之光學元件,光學元件可以在受限空間內被放置及校準。在經校準的光學元件永久黏合於基板或另一元件之後,針銷自光學元件拆離。這種技術允許使用者放置及校準一小型光學元件於一所需位置。In general, the present invention relates to techniques for micro-optical calibration and assembly. By attaching the pins to the optical components to be assembled, the optical components can be placed and calibrated in a confined space. After the calibrated optical element is permanently bonded to the substrate or another component, the pin is detached from the optical element. This technique allows the user to place and calibrate a small optical component at a desired location.

根據本發明的另一個態樣,該針銷係在手動或自動致動的多維平移台上的機械延伸臂上的一針銷。According to another aspect of the invention, the pin is a pin on a mechanical extension arm on a manually or automatically actuated multi-dimensional translation stage.

根據本發明的又一個態樣,為了在6個自由度執行光學校準,藉由黏合劑將光學元件暫時安裝於針銷,且藉由連接針銷與延伸臂的3D平移台,光學元件在XYZ座標空間上的位置是可控且可調整的。光學元件的角度校準係由旋轉台和測角計(goniometer)執行。According to still another aspect of the present invention, in order to perform optical alignment at 6 degrees of freedom, the optical component is temporarily mounted to the pin by an adhesive, and by connecting the pin and the 3D translation stage of the extension arm, the optical component is The position on the XYZ coordinate space is controllable and adjustable. The angular calibration of the optical element is performed by a rotary table and a goniometer.

根據一個實施例,本發明是一種用於微光學校準和組裝的方法,且該方法包括以下步驟:決定針銷的尖端可以附接於光學元件的一位置;將針銷的尖端附接於該位置;使用針銷移動光學元件靠近一預定義位置以永久容納該光學元件;使用針銷使該光學元件相對於另一元件校準;以一類型的黏合劑將該光學元件永久黏合於該預定義位置;及將針銷自該光學元件拆離。According to one embodiment, the invention is a method for micro-optical calibration and assembly, and the method comprises the steps of: determining that a tip of the pin can be attached to a position of the optical element; attaching the tip of the pin to The position; using the pin to move the optical element close to a predefined position to permanently accommodate the optical element; using the pin to align the optical element relative to the other element; permanently bonding the optical element to the pre-preg with a type of adhesive Defining the position; and detaching the pin from the optical component.

根據另一個實施例,本發明是一種用於微光學校準和組裝的方法,且該方法包括以下步驟:決定至少兩個針銷的個別尖端可以分別附接於一光學元件的至少兩個位置;將該等至少兩個針銷附接於該光學元件的至少兩個位置;藉由夾持該等至少兩個針銷而移動該光學元件靠近一預定義位置以永久容納該光學元件,使得該光學元件的移動受限;使用該等至少兩個針消將該光學元件相對於另一元件校準;以一類型的黏合劑將該光學元件永久黏合於該預定義位置;及將該等至少兩個針銷自該光學元件拆離。According to another embodiment, the invention is a method for micro-optical calibration and assembly, and the method comprises the steps of determining that individual tips of at least two pins can be attached to at least two locations of an optical component, respectively Attaching at least two pins to at least two positions of the optical element; moving the optical element close to a predefined position by clamping the at least two pins to permanently accommodate the optical element such that The movement of the optical element is limited; the optical element is calibrated relative to the other element using the at least two needles; the optical element is permanently bonded to the predefined location with a type of adhesive; and the at least The two pins are detached from the optical element.

本發明的目的、特徵、優點之一是提供一種用於微光學校準和組裝之技術。One of the objects, features, and advantages of the present invention is to provide a technique for micro-optical calibration and assembly.

一旦檢視了以下本發明實施例的詳盡說明結合附圖之後,本發明的其它目的、特徵和優點將得以彰顯。Other objects, features, and advantages of the present invention will be apparent from the description of the appended claims.

本發明的詳細描述主要以直接或間接相似於可以在光學網路中使用的光學裝置或系統的操作之過程、步驟、邏輯塊、處理或其它符號表示來呈現。此等描述和表示通常由本領域具有通常知識者所使用以最有效地傳達他們的工作內容給其他本領域的技術人員。The detailed description of the present invention is presented primarily in terms of procedures, steps, logic blocks, processing, or other symbolic representations that are directly or indirectly similar to the operation of an optical device or system that can be used in an optical network. Such descriptions and representations are generally used by those of ordinary skill in the art to <RTIgt;

本文對「一個實施例」或「一實施例」的參考是指結合實施例所述的特定特徵、結構、或特性可以包含於本發明的至少一個實施例。在本說明書中各處的用語「在一個實施例中」之出現不一定全部指的是同一實施例,亦不必是其他實施例中互斥的單獨的或替代的實施例。References to "one embodiment" or "an embodiment" are used to mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the invention. The appearances of the phrase "a" or "an" or "an"

現在參照圖式,在圖式中相同的數字編號代表全部數個視圖中的相同元件,圖1表示根據本發明一個實施例的一配置100。假設光學元件102將被放置於一基板(圖1中未圖示)上。光學元件102可以是鏡、濾光器(filter)、稜鏡或透鏡等,且具有可附接於柄部104的至少一個側面。由於實體尺寸,所以柄部104被稱為針銷104。根據一個實施例,光學元件102藉由一類型的黏合劑而附接於針銷104,其中在特定情況下(如熱或壓力)針銷104可自光學元件102移除。Referring now to the drawings, like reference numerals in the drawings It is assumed that the optical element 102 will be placed on a substrate (not shown in Figure 1). The optical element 102 can be a mirror, a filter, a file or a lens, and the like, and has at least one side attachable to the handle 104. The handle 104 is referred to as a pin 104 due to the physical size. According to one embodiment, the optical element 102 is attached to the pin 104 by a type of adhesive, wherein the pin 104 can be removed from the optical element 102 under certain circumstances, such as heat or pressure.

在操作中,針銷104的針尖可以暫時透過膠、環氧樹脂或焊料110(其可以在光學元件102校準於且固定於基板或另一元件之後被移除)而暫時黏合於光學元件102的頂表面106。In operation, the tip of the pin 104 can be temporarily bonded to the optical element 102 by temporarily passing through the glue, epoxy or solder 110 (which can be removed after the optical element 102 is calibrated and secured to the substrate or another component). Top surface 106.

一旦針銷104和光學元件102暫時結合在一起,使用者可以握持針銷104並將光學元件102移動到基板上,以及隨後藉由在六個自由度(沿著XYZ軸平移及繞X、Y或Z軸作角度旋轉)上移動針銷104施行校準過程。在一個實施例中,基於校準器的針銷具有在手動或自動致動的多維平移台(未圖示)上的機械延伸臂120上的針銷104。Once the pin 104 and optical element 102 are temporarily bonded together, the user can hold the pin 104 and move the optical element 102 onto the substrate, and then by shifting and circling X along the XYZ axis, The Y or Z axis is angularly rotated. The upper pin 104 is moved to perform the calibration process. In one embodiment, the calibrator-based pin has a pin 104 on a mechanical extension arm 120 on a manually or automatically actuated multi-dimensional translation stage (not shown).

為了執行6個自由度的光學校準,光學元件102藉由黏合劑110暫時安裝於針銷104且其在XYZ座標空間中的位置係可藉由連接針銷104與延伸臂的3D平移台而控制及調整。光學元件102的角度校準係由旋轉台和測角計(goniometer)執行。在將光學元件102定位於適當位置之後,光學元件102藉由膠或焊料而永久性黏接於基板上。隨後在預定義的條件下(如熱、特殊光或壓力)移除針銷104。In order to perform an optical calibration of 6 degrees of freedom, the optical element 102 is temporarily mounted to the pin 104 by the adhesive 110 and its position in the XYZ coordinate space can be achieved by connecting the pin 104 to the 3D translation stage of the extension arm. Control and adjustment. The angular calibration of the optical element 102 is performed by a rotary table and a goniometer. After positioning the optical element 102 in place, the optical element 102 is permanently bonded to the substrate by glue or solder. The pin 104 is then removed under predefined conditions such as heat, special light or pressure.

由於可用空間的限制且希望不以針銷104阻擋光學元件102的一或多個光學表面,所以當執行校準時,可只使用光學元件102的特定表面以用於夾持目的。圖2表示針銷104接合於光學元件102的側表面108上之側面夾持的實施例。Due to the limited space available and it is desirable not to block one or more optical surfaces of the optical element 102 with the pins 104, only certain surfaces of the optical elements 102 may be used for clamping purposes when performing the calibration. 2 illustrates an embodiment in which the pin 104 is joined to the side of the side surface 108 of the optical element 102.

根據一個實施例,針銷104是彎曲的(在本說明書亦稱為彎的),或許具有多個匝(turn)以符合校準與固定的幾何形狀。圖3表示以彎曲針銷104夾持的光學元件102。圖4表示使用針銷104中的兩個之另一實施例。兩個針銷的解決方案可以提供光學元件藉由致動器(未圖示)沿特定軸的部分旋轉。According to one embodiment, the pin 104 is curved (also referred to herein as a bend) and may have a plurality of turns to conform to the calibrated and fixed geometry. FIG. 3 shows the optical element 102 held by the curved pin 104. FIG. 4 shows another embodiment in which two of the pins 104 are used. The two pin solutions provide for the rotation of the optical element by a portion of the actuator (not shown) along a particular axis.

在光學元件102的光學校準被校準且永久黏合於基底上之後,在預定義條件(如熱或壓力方法)下,針銷104自光學元件102拆離。一般來說,針銷和光學元件之間的結合相對弱。因此,針銷102和光學元件102之間的暫時結合力遠比光學元件與基板或其它元件之間的永久結合力弱,使得在拆離期間及拆離之後,針銷104沒有被損壞而光學元件102亦未被移動。圖5表示以膠或焊料112永久結合於基板504上的光學元件502以及自光學元件502拆離的針銷506。After the optical alignment of the optical element 102 is calibrated and permanently bonded to the substrate, the pin 104 is detached from the optical element 102 under predefined conditions, such as a thermal or pressure method. In general, the bond between the pin and the optical element is relatively weak. Therefore, the temporary bonding force between the pin 102 and the optical element 102 is much weaker than the permanent bonding force between the optical element and the substrate or other components, so that the pin 104 is not damaged and optically during detachment and after detachment. Element 102 is also not moved. FIG. 5 shows optical element 502 permanently bonded to substrate 504 with glue or solder 112 and pin 506 detached from optical element 502.

圖6表示安裝光學元件的過程或流程圖600。過程600可結合先前的圖示而可以有更好的理解。Figure 6 shows a process or flow diagram 600 for mounting an optical component. Process 600 can be better understood in conjunction with previous illustrations.

在602,假設有一基板,各個光學元件在該基板上,在適當校準後,該等光學元件黏合於基板上。根據一個實施例,元件為小且依次放置在基板上。最初,因為相較於元件尺寸,基板上的空間相對大,所以將部分元件放置於基板上是相當容易的。當空間相對較大時,選擇一針銷,光學元件附接於該針銷,在這種情況下,針銷是直的。隨著更多元件放置於基板上,當空間相對小時,選擇彎的針銷。在任一情況下,審慎地決定針銷可以附接於光學元件的確切位置。當針銷附接於光學元件時,針銷不應阻擋或影響光學元件為了與另一元件校準而放置時的校準過程(通常在受限空間內)。根據一個實施例,彎的針銷在某種程度上係彎的而允許使用者移動元件到其所期望的位置並有利於其在受限空間內的校準。At 602, a substrate is assumed, with each optical component on the substrate, and after proper alignment, the optical components are bonded to the substrate. According to one embodiment, the components are small and placed in turn on the substrate. Initially, placing a portion of the component on the substrate is relatively easy because the space on the substrate is relatively large compared to the component size. When the space is relatively large, a pin is selected and the optical element is attached to the pin, in which case the pin is straight. As more components are placed on the substrate, when the space is relatively small, the curved pin is selected. In either case, it is prudent to determine the exact position at which the pin can be attached to the optical element. When the pin is attached to the optical element, the pin should not block or affect the calibration process (usually in confined space) when the optical element is placed for calibration with another component. According to one embodiment, the curved pin is bent to some extent to allow the user to move the element to its desired position and facilitate its alignment within the confined space.

無論在604中使用哪一種針銷(直或曲的),使用者或所使用的機器將光學元件放置靠近其目的點(如基板或另一元件附近),並施行校準,實質上將光學元件與一或多個其他元件校準。一般來說,當校準光學元件時,注入或使用光束,使得光束射到一個元件上且被如濾光、折射或反射。可使用一或多個儀器量測該經濾光、折射或反射的光束。Regardless of which pin (straight or curved) is used in 604, the user or machine used places the optic near its intended point (such as near the substrate or another component) and performs calibration, essentially the optics Calibrate with one or more other components. In general, when calibrating an optical component, a beam of light is injected or used such that the beam strikes an element and is filtered, refracted or reflected. The filtered, refracted or reflected beam can be measured using one or more instruments.

在606,經校準的光學元件以一類型的黏合劑(如環氧樹脂)或焊料永久黏合於基板或另一元件。一旦元件永久地黏合於基板或另一元件,在608,針銷被移除。取決於將光學元件附接於針銷所使用的材料,開始處理到將針銷自所黏合的光學元件拆離而沒有影響光學元件與基板或另一元件的黏合。At 606, the calibrated optical component is permanently bonded to the substrate or another component with a type of adhesive such as an epoxy or solder. Once the component is permanently bonded to the substrate or another component, at 608, the pin is removed. Depending on the material used to attach the optical element to the pin, processing begins by detaching the pin from the bonded optical element without affecting the bonding of the optical element to the substrate or another element.

儘管本發明已經參考具體的實施例而描述,但該描述為本發明之示例而不視為本發明之限制。在不背離所附專利申請範圍所界定之本發明的真實精神及範圍下,發明所屬領域中具有通常知識者可以就本發明較佳實施例作變化。因此,本發明的範圍是由所附的專利申請範圍所界定而非前面的實施例描述所界定。Although the present invention has been described with reference to the specific embodiments, the description is not to be construed as limiting the invention. Variations in the preferred embodiments of the invention may be made by those of ordinary skill in the art without departing from the scope of the invention. Accordingly, the scope of the invention is defined by the scope of the appended claims

100‧‧‧配置
102‧‧‧光學元件
104‧‧‧針銷
106‧‧‧頂表面
108‧‧‧側表面
110‧‧‧黏合劑
120‧‧‧機械延伸臂
502‧‧‧光學元件
504‧‧‧基板
506‧‧‧針銷
600‧‧‧過程
602‧‧‧步驟
604‧‧‧步驟
606‧‧‧步驟
608‧‧‧步驟
100‧‧‧Configuration
102‧‧‧Optical components
104‧‧‧ Pin
106‧‧‧ top surface
108‧‧‧ side surface
110‧‧‧Binder
120‧‧‧Mechanical extension arm
502‧‧‧Optical components
504‧‧‧Substrate
506‧‧‧ Pin
600‧‧‧ Process
602‧‧ steps
604‧‧‧Steps
606‧‧‧Steps
608‧‧‧Steps

本發明的這些和其它特徵、態樣和優點將就以下說明、所附的專利申請範圍與圖式而更好地理解:These and other features, aspects, and advantages of the present invention will be better understood from the following description, the appended claims.

圖1根據本發明所揭露的一或多個實施例表示針銷暫時黏合於光學元件頂表面的配置;1 illustrates an arrangement in which a pin is temporarily bonded to a top surface of an optical element in accordance with one or more embodiments of the present disclosure;

圖2根據本發明所揭露的一或多個實施例表示針銷暫時黏合於光學元件側表面的配置;2 is a view showing a configuration in which a pin is temporarily bonded to a side surface of an optical element according to one or more embodiments of the present invention;

圖3根據本發明所揭露的一或多個實施例表示彎曲或彎的(bent or curved)針銷暫時黏合於光學元件的配置;3 illustrates a configuration in which a bent or curved pin is temporarily bonded to an optical element in accordance with one or more embodiments of the present disclosure;

圖4根據本發明所揭露的一或多個實施例表示兩個針銷暫時黏合於光學元件的配置,使得可以施行藉由致動器(未圖示)將光學元件沿特定軸旋轉;4 illustrates a configuration in which two pins are temporarily bonded to an optical element in accordance with one or more embodiments of the present disclosure, such that an optical member can be rotated along a particular axis by an actuator (not shown);

圖5根據本發明所揭露的一或多個實施例表示在光學元件永久黏合於基板之後,針銷自光學元件拆離;及5 illustrates the pin being detached from the optical element after the optical component is permanently bonded to the substrate, in accordance with one or more embodiments of the present disclosure;

圖6表示使用針銷安裝光學元件的過程或流程圖。Figure 6 shows a process or flow diagram for mounting an optical component using a pin.

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Claims (17)

一種用於相對於一基板或另一元件校準一光學元件之方法,該方法包括以下步驟:決定在該光學元件的一表面上的一區域內的一附接位置;將一針銷的一尖端附接於在該光學元件的該表面上的該區域內的該附接位置;使用該針銷,相對於該基板或該另一元件移動及校準該光學元件;以一黏合劑將該光學元件黏合於該基板或該另一元件;及在該光學元件係黏合於該基板或該另一元件之後,將該針銷自在該光學元件上的該附接位置拆離。 A method for aligning an optical component relative to a substrate or another component, the method comprising the steps of: determining an attachment location in an area on a surface of the optical component; a tip of a pin Attached to the attachment location in the region on the surface of the optical component; using the pin to move and align the optical component relative to the substrate or the other component; the optical component being bonded with an adhesive Bonding to the substrate or the other component; and after the optical component is bonded to the substrate or the other component, the pin is detached from the attachment location on the optical component. 如請求項1所述之方法,其中在該光學元件上的該附接位置係在要由該光學元件進行處理的一光束不會撞擊的該光學元件的一表面上。 The method of claim 1, wherein the attachment location on the optical component is on a surface of the optical component that does not strike a beam of light to be processed by the optical component. 如請求項1所述之方法,其中該針銷係用於在六個自由度上移動及校準該光學元件。 The method of claim 1 wherein the pin is for moving and calibrating the optical element in six degrees of freedom. 如請求項1所述之方法,其中該針銷是一直針銷或一彎針銷。 The method of claim 1 wherein the pin is a pin or a loop pin. 如請求項1所述之方法,其中該針銷係由連接該針銷與一延伸臂的一多維平移台來控制及調 整。 The method of claim 1, wherein the pin is controlled and adjusted by a multi-dimensional translation stage connecting the pin and an extension arm. whole. 如請求項1所述之方法,其中相對於該基板或該另一元件的該光學元件的角度校準係由旋轉台和測角計來執行。 The method of claim 1, wherein the angular alignment of the optical element relative to the substrate or the other component is performed by a rotating stage and a goniometer. 如請求項1所述之方法,其中係在不損傷該光學元件的情況下將該針銷自該附接位置拆離。 The method of claim 1 wherein the pin is detached from the attachment location without damaging the optical component. 如請求項7所述之方法,其中係使用光、壓力或熱將該針銷自該附接位置拆離。 The method of claim 7 wherein the pin is detached from the attachment location using light, pressure or heat. 如請求項1所述之方法,其中該附接位置係在該光學元件的一頂表面上。 The method of claim 1 wherein the attachment location is on a top surface of the optical component. 如請求項1所述之方法,其中該附接位置係在該光學元件的一側表面上。 The method of claim 1, wherein the attachment location is on a side surface of the optical component. 如請求項1所述之方法,其中該光學元件是一鏡、一濾光器、一稜鏡或一透鏡。 The method of claim 1, wherein the optical component is a mirror, a filter, a cymbal or a lens. 一種用於相對於一基板或另一元件校準一光學元件之方法,該方法包括以下步驟:決定至少兩個附接位置,該等附接位置係在該光學元件的個別表面上;將至少兩個針銷的個別尖端附接於(attach)在該光學元件上的該等附接位置;使用該等針銷,相對於該基板或該另一元件移動及校準該光學元件; 以一黏合劑將該光學元件黏合於該基板或該另一元件;及在該光學元件係黏合於該基板或該另一元件之後,將該等至少兩個針銷自在該光學元件上的該等附接位置拆離(detach)。 A method for aligning an optical component relative to a substrate or another component, the method comprising the steps of: determining at least two attachment locations, the attachment locations being on individual surfaces of the optical component; Individual tips of the pins are attached to the attachment locations on the optical component; using the pins, the optical component is moved and calibrated relative to the substrate or the other component; Bonding the optical component to the substrate or the other component with a bonding agent; and after the optical component is bonded to the substrate or the other component, the at least two pins are self-contained on the optical component Wait for the attachment location to detach. 如請求項12所述之方法,其中該等至少兩個針銷是直的或彎的。 The method of claim 12, wherein the at least two pins are straight or curved. 如請求項12所述之方法,其中該等至少兩個針銷中的各者係在手動或自動致動的一多維平移台上的一機械延伸臂上之一針銷。 The method of claim 12, wherein each of the at least two pins is a pin on a mechanical extension arm on a multi-dimensional translation stage that is manually or automatically actuated. 如請求項12所述之方法,其中相對於該基板或該另一元件的該光學元件的角度校準係由旋轉台和測角計來執行。 The method of claim 12, wherein the angular calibration of the optical element relative to the substrate or the other component is performed by a rotating stage and a goniometer. 如請求項12所述之方法,其中係在不損傷該光學元件的情況下將該等至少兩個針銷自在該光學元件上的該附接位置拆離。 The method of claim 12, wherein the at least two pins are detached from the attachment location on the optical element without damaging the optical element. 如請求項16所述之方法,其中係使用光、壓力或熱將該等至少兩個針銷的各者自該光學元件拆離。 The method of claim 16 wherein each of the at least two pins is detached from the optical element using light, pressure or heat.
TW105125800A 2016-08-12 2016-08-12 Method for micro-optics alignment and assembly using needle pin and temporary attachment TWI629524B (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4724030A (en) * 1985-05-17 1988-02-09 American Telephone And Telegraph Company At&T Technologies, Inc. Adhesive aided transfer of chips
US4829665A (en) * 1986-12-01 1989-05-16 Matsushita Electric Industrial Co., Ltd. Method and apparatus for mounting electronic components
US5458387A (en) * 1991-11-27 1995-10-17 Microscience Group, Inc. Microgripper

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4724030A (en) * 1985-05-17 1988-02-09 American Telephone And Telegraph Company At&T Technologies, Inc. Adhesive aided transfer of chips
US4829665A (en) * 1986-12-01 1989-05-16 Matsushita Electric Industrial Co., Ltd. Method and apparatus for mounting electronic components
US5458387A (en) * 1991-11-27 1995-10-17 Microscience Group, Inc. Microgripper

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