TWI624968B - Led package structure provided with a predetermined view angle, led package module, manufacturing method therefor - Google Patents
Led package structure provided with a predetermined view angle, led package module, manufacturing method therefor Download PDFInfo
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Abstract
一種可提供預定視角的發光二極體封裝結構的成形方法,包括至少下列步驟:放置一覆晶式晶片於一承載基板上;填入底膠於所述覆晶式晶片的電極間的空隙以支撐所述覆晶式晶片;雷射剝離所述覆晶式晶片的一成長基板而形成一薄型化晶片,並且外露出的所述薄型化晶片的一磊晶結構;粗化所述薄型化晶片外露的所述磊晶結構;提供一視角調整結構於所述薄型化晶片;以及選定一預定的視角,依據線性迴歸分析的算式調整所述視角調整結構以達成所述預定的視角。 A method for forming a light emitting diode package structure capable of providing a predetermined viewing angle, comprising at least the steps of: placing a flip chip on a carrier substrate; filling a gap between the electrodes of the flip chip of the flip chip Supporting the flip chip; laser stripping a growth substrate of the flip chip to form a thinned wafer, and exposing an epitaxial structure of the thinned wafer; roughening the thinned wafer Exposed the epitaxial structure; providing a viewing angle adjustment structure to the thinned wafer; and selecting a predetermined viewing angle, adjusting the viewing angle adjustment structure according to a linear regression analysis formula to achieve the predetermined viewing angle.
Description
本發明涉及一種可提供預定視角的發光二極體封裝結構、發光二極體封裝模組、及其成形方法,特別是指一種發光二極體封裝結構具有視角調整結構,以依據線性迴歸分析的算式調整所述視角調整結構以達成所述預定的視角。 The invention relates to a light emitting diode package structure, a light emitting diode package module and a forming method thereof, which can provide a predetermined viewing angle, in particular to a light emitting diode package structure having a viewing angle adjusting structure for linear regression analysis. The algorithm adjusts the viewing angle adjustment structure to achieve the predetermined viewing angle.
一般車用及閃光燈等發光二極體(LED)應用,常需要較小的視角以搭配二次光學透鏡,達到所需的光形及最佳的光利用率。目前多以透鏡的光學設計來調整LED的視角大小,產品通常有薄型化的需求,例如手機閃光燈會使用較薄的菲涅爾透鏡。除了較小的視角外,為符合不同應用的需求,常需要特定的視角用以搭配特定設計的二次光學透鏡。二次光學透鏡在設計上與製造上均增加成本。 In general, LED applications such as automotive and flashlights often require a smaller viewing angle to match the secondary optical lens to achieve the desired shape and optimum light utilization. At present, the optical design of the lens is often used to adjust the viewing angle of the LED, and the product is usually required to be thinner, for example, a thin flash Fresnel lens is used for the mobile phone flash. In addition to the smaller viewing angles, in order to meet the needs of different applications, specific viewing angles are often required to match the secondary optics of a particular design. Secondary optical lenses add cost in both design and manufacturing.
塑料電極晶片載體(PLCC)LED或燈泡形(Lamp type)LED是以碗杯設計或封裝體結構設計來控制視角,若要調整視角便需要開發相關的模具,期間花費的時間、設備與成本較高。 Plastic Electrode Wafer Carrier (PLCC) LED or Lamp type LED is designed with a cup design or a package structure to control the viewing angle. To adjust the viewing angle, it is necessary to develop the relevant mold, which takes time, equipment and cost. high.
模塑成型(Molding type)的LED,透過透鏡的設計或是LED的形狀,可以調整視角。一般為了達到縮小視角的效果,會於LED外圍增加反射牆結構,但反射牆會吸收晶片的側向光,造成亮度下降。 Molding type LEDs can be adjusted through the lens design or the shape of the LED. Generally, in order to achieve the effect of narrowing the viewing angle, a reflective wall structure is added to the periphery of the LED, but the reflective wall absorbs the lateral light of the wafer, causing a decrease in brightness.
本發明所要解決的技術問題,在於提供一種可提供預定視角的發光二極體封裝結構的成形方法及發光二極體結構,藉由調整視角調整結構的波長轉換層整體厚度、反射牆的反射率及二者相對應的高度,而達成所述預定的視角,使得光學設計的彈性空間更大。 The technical problem to be solved by the present invention is to provide a method for forming a light emitting diode package structure and a light emitting diode structure capable of providing a predetermined viewing angle, and adjusting the overall thickness of the wavelength conversion layer and the reflectivity of the reflective wall by adjusting the viewing angle adjustment structure. And the corresponding height of the two, and the predetermined viewing angle is achieved, so that the elastic space of the optical design is larger.
為了能更進一步瞭解本發明為達成既定目的所採取之技術、方法及功效,請參閱以下有關本發明之詳細說明、圖式,相信本發明之目的、特徵與特點,當可由此得以深入且具體之瞭解,然而所附圖式與附件僅提供參考與說明用,並非用來對本發明加以限制者。 In order to further understand the technology, method and effect of the present invention in order to achieve the intended purpose, reference should be made to the detailed description and drawings of the present invention. The drawings and the annexed drawings are intended to be illustrative and not to limit the invention.
100‧‧‧覆晶式晶片 100‧‧‧Flip-chip wafer
100a‧‧‧第一表面 100a‧‧‧ first surface
100b‧‧‧第二表面 100b‧‧‧ second surface
10‧‧‧磊晶結構 10‧‧‧ epitaxial structure
11‧‧‧緩衝層 11‧‧‧buffer layer
12‧‧‧N型半導體層 12‧‧‧N type semiconductor layer
121‧‧‧上表面 121‧‧‧ upper surface
1211‧‧‧角錐 1211‧‧‧Corner
13‧‧‧發光層 13‧‧‧Lighting layer
14‧‧‧N型接觸墊 14‧‧‧N type contact pad
15‧‧‧P型半導體層 15‧‧‧P type semiconductor layer
17‧‧‧P型接觸墊 17‧‧‧P type contact pad
S‧‧‧空隙 S‧‧‧ gap
20‧‧‧成長基板 20‧‧‧ Growth substrate
30‧‧‧承載基板 30‧‧‧Loading substrate
31、32‧‧‧電路結構 31, 32‧‧‧ circuit structure
40‧‧‧填充層 40‧‧‧Filling layer
50、50a、50b‧‧‧波長轉換層 50, 50a, 50b‧‧‧ wavelength conversion layer
70‧‧‧反射牆 70‧‧‧Reflection wall
200、200a、200b‧‧‧發光晶片二極體結構 200, 200a, 200b‧‧‧Lighting chip diode structure
400‧‧‧發光二極體封裝結構 400‧‧‧Light Emitting Diode Structure
500‧‧‧發光二極體封裝模組 500‧‧‧Light Emitting Diode Module
H0‧‧‧磊晶結構厚度 H0‧‧‧ epitaxial structure thickness
H1‧‧‧波長轉換層頂面至磊晶結構頂面的厚度 H1‧‧‧ Thickness from the top surface of the wavelength conversion layer to the top surface of the epitaxial structure
圖1為本發明之發光二極體結構的晶片接合示意圖。 1 is a schematic view of wafer bonding of a light emitting diode structure of the present invention.
圖1A為本發明之覆晶式晶片一種覆晶結構實施例的示意圖。 1A is a schematic view showing an embodiment of a flip chip structure of a flip chip of the present invention.
圖2為本發明之覆晶式晶片黏貼於承載基板的示意圖。 2 is a schematic view showing the flip chip of the present invention adhered to a carrier substrate.
圖3為本發明的覆晶式晶片的剝離流程示意圖。 3 is a schematic view showing the stripping process of the flip chip of the present invention.
圖4為本發明的薄型化晶片的粗化磊晶結構的示意圖。 4 is a schematic view showing a roughened epitaxial structure of a thinned wafer of the present invention.
圖4A為本發明圖4中A部分的局部放大示意圖。 4A is a partially enlarged schematic view showing a portion A of FIG. 4 of the present invention.
圖5為本發明的薄型化晶片貼合波長轉換層的示意圖。 Figure 5 is a schematic illustration of a thinned wafer bonded wavelength conversion layer of the present invention.
圖5A為本發明的薄型化晶片貼合波長轉換層另一實施例的示意圖。 5A is a schematic view of another embodiment of a thinned wafer bonded wavelength conversion layer of the present invention.
圖5B為本發明的薄型化晶片貼合波長轉換層又一實施例的示意圖。 Figure 5B is a schematic illustration of yet another embodiment of a thinned wafer bonded wavelength conversion layer of the present invention.
圖5C為本發明的薄型化晶片貼合波長轉換層再一實施例的示意圖。 5C is a schematic view showing still another embodiment of the thinned wafer bonding wavelength conversion layer of the present invention.
圖6為本發明第一實驗例數據的座標圖。 Figure 6 is a graph showing the coordinates of the data of the first experimental example of the present invention.
圖7為本發明依圖4未貼附波長轉換層的0度視角的光形圖。 Fig. 7 is a plan view showing a 0 degree angle of view of the wavelength conversion layer not attached to Fig. 4 according to the present invention.
圖8為本發明具有反射牆的發光二極體封裝結構的示意圖。 FIG. 8 is a schematic diagram of a light emitting diode package structure having a reflective wall according to the present invention.
圖8A為本發明具有另一種反射牆的發光二極體封裝結構的示意圖。 FIG. 8A is a schematic diagram of a light emitting diode package structure with another reflective wall according to the present invention.
圖8B為本發明配合圖5C加上反射牆的發光二極體封裝結構的示意圖。 FIG. 8B is a schematic diagram of a light emitting diode package structure with a reflective wall in FIG. 5C according to the present invention. FIG.
圖9為本發明依據圖8配合反射牆反射率100%的光形圖。 Figure 9 is a plan view showing the reflectance of the reflective wall in accordance with Figure 8 in accordance with Figure 8 of the present invention.
圖10為本發明不同反射牆材料與光線波長的反射率的曲線圖。 Figure 10 is a graph showing the reflectance of different reflective wall materials and light wavelengths of the present invention.
圖10A為本發明依第二實驗例實驗數據的座標分佈圖。 Fig. 10A is a graph showing the coordinates of experimental data according to the second experimental example of the present invention.
圖10B為本發明依第三實驗例實驗數據的座標分佈圖。 Fig. 10B is a coordinate distribution diagram of experimental data according to a third experimental example of the present invention.
圖11為本發明的發光二極體封裝模組的俯視圖。 11 is a top plan view of a light emitting diode package module of the present invention.
請參考圖1,為本發明之發光二極體結構的晶片接合示意圖。本發明提供一種發光二極體結構的製造方法,首先,第一步驟是提供一覆晶式晶片100。該覆晶式晶片100具有一成長基板20、以及一形成於該成長基板20上的磊晶結構10、以及至少一對晶片金屬墊14、17形成於該磊晶結構10上,該對晶片金屬墊14、17具有一間隔空隙S。 Please refer to FIG. 1 , which is a schematic diagram of wafer bonding of a light emitting diode structure of the present invention. The present invention provides a method of fabricating a light emitting diode structure. First, the first step is to provide a flip chip 100. The flip chip 100 has a growth substrate 20 and an epitaxial structure 10 formed on the growth substrate 20, and at least a pair of wafer metal pads 14, 17 are formed on the epitaxial structure 10, the pair of wafer metal The pads 14, 17 have a spacing gap S.
本實施例的成長基板20可以是藍寶石基板(Sapphire substrate)。覆晶式晶片100具有彼此相對地的一第一表面100a(如圖1的上側)及一第二表面100b(如圖1的下側),第一表面側為生長基板20,第二表面側具有至少一P型接觸墊(P-contact pad)17及至少一N型接觸墊(N-contact pad)14作為電極,且該兩接觸墊(14,17)之間具有間隔空隙S。 The growth substrate 20 of the present embodiment may be a sapphire substrate. The flip chip 100 has a first surface 100a (such as the upper side of FIG. 1) and a second surface 100b (such as the lower side of FIG. 1) opposite to each other, and the first surface side is a growth substrate 20, and the second surface side There are at least one P-contact pad 17 and at least one N-contact pad 14 as electrodes, and a gap S between the two contact pads (14, 17).
請參閱圖1A,每一覆晶式晶片100的磊晶結構10形成在成長基板20上表面,磊晶結構10包含有緩衝層11、N型半導體層12、發光層13、及P型半導體層15。其中緩衝層11可以是未摻雜的氮化鎵(undoped-GaN),N型半導體層12可以是N型的氮化鎵,發光層13可以是多層量子井(MQW,multiple quantum well)的 半導體結構;P型半導體層15可以是P型的氮化鎵。N型接觸墊(N-contact pad)14連接N型半導體層12,P型接觸墊(P-contact pad)17連接P型半導體層15。更進一步的說,該相隔的空隙S亦延伸至相對應的P型半導體層15與N型半導體層12之間。 Referring to FIG. 1A, an epitaxial structure 10 of each flip chip 100 is formed on the upper surface of the growth substrate 20. The epitaxial structure 10 includes a buffer layer 11, an N-type semiconductor layer 12, a light-emitting layer 13, and a P-type semiconductor layer. 15. The buffer layer 11 may be undoped gallium nitride (undoped-GaN), the N-type semiconductor layer 12 may be N-type gallium nitride, and the light-emitting layer 13 may be a multilayer quantum well (MQW). The semiconductor structure; the P-type semiconductor layer 15 may be a P-type gallium nitride. An N-type contact pad 14 is connected to the N-type semiconductor layer 12, and a P-contact pad 17 is connected to the P-type semiconductor layer 15. Furthermore, the spaced gaps S also extend between the corresponding P-type semiconductor layer 15 and the N-type semiconductor layer 12.
上述磊晶結構10的層狀結構僅為一舉例說明。本發明不限制於上述磊晶結構10的層狀結構,例如,可以省略緩衝層11,直接將N型半導體層12形成於成長基板20上。此外,P型半導體層15可以額外再形成一金屬層、或透明電極層…等,然後再形成上述P型接觸墊17。 The layered structure of the above epitaxial structure 10 is merely an example. The present invention is not limited to the layered structure of the epitaxial structure 10 described above. For example, the buffer layer 11 may be omitted, and the N-type semiconductor layer 12 may be directly formed on the growth substrate 20. Further, the P-type semiconductor layer 15 may be additionally formed with a metal layer, or a transparent electrode layer, etc., and then the above-described P-type contact pad 17 is formed.
請再參閱圖1,將本發明的覆晶式晶片100接合於一承載基板30,承載基板30具有電路結構31、32,作為電極的N型接觸墊14與P型接觸墊17接觸於電路結構31、32。然後再將底膠材料填入N型接觸墊14與P型接觸墊17之間的空隙S。電路結構31、32可以依據設計需要,延伸至承載基板30的底面或其他位置。 Referring to FIG. 1 again, the flip chip 100 of the present invention is bonded to a carrier substrate 30. The carrier substrate 30 has circuit structures 31 and 32. The N-type contact pads 14 as electrodes are in contact with the P-type contact pads 17 to the circuit structure. 31, 32. The primer material is then filled into the gap S between the N-type contact pad 14 and the P-type contact pad 17. The circuit structures 31, 32 may extend to the bottom surface or other locations of the carrier substrate 30 as desired by the design.
如圖2所示,為本發明之覆晶式晶片接合於基板的示意圖。本實施例的底膠材料填入於覆晶式晶片100與承載基板30之間的空隙S,而形成一填充層40。 As shown in FIG. 2, a schematic diagram of a flip chip of the present invention bonded to a substrate is shown. The underfill material of this embodiment is filled in the gap S between the flip chip 100 and the carrier substrate 30 to form a filling layer 40.
其中,要注意的是,本實施例的填充層40除填入N型接觸墊14與P型接觸墊17之間的空隙S外,較佳的亦填入覆晶式晶片100的第二表面100b與承載基板30之間所有空間,以期達到覆晶式晶片100藉由填充層40能有效地獲得承載基板30支撐。換言之,填充層40需接觸覆晶式晶片100的第二表面100b以及承載基板30的上表面,且環繞N型接觸墊14、P型接觸墊17以及電路結構31、32外圍。再者,填充層40亦可延伸至磊晶結構10的位置。 It should be noted that, in addition to filling the gap S between the N-type contact pad 14 and the P-type contact pad 17, the filling layer 40 of the present embodiment is preferably filled in the second surface of the flip-chip wafer 100. All the space between the 100b and the carrier substrate 30, in order to achieve the flip-chip wafer 100 can effectively obtain the support substrate 30 support by filling the layer 40. In other words, the filling layer 40 needs to contact the second surface 100b of the flip chip 100 and the upper surface of the carrier substrate 30, and surround the N-type contact pad 14, the P-type contact pad 17, and the periphery of the circuit structures 31, 32. Furthermore, the filling layer 40 can also extend to the position of the epitaxial structure 10.
如圖3所示,為本發明的覆晶式晶片的剝離流程示意圖。本發明第二流程,對該覆晶式晶片100的成長基板20進行雷射剝離(laser lift off,LLO),也就是形成本發明之無成長基板20的一薄型 化晶片,亦可稱為薄膜覆晶式晶片。較佳是以晶片等級進行雷射剝離,可避免晶圓等級的雷射剝離所產生的過大的應力,其使整片晶圓嚴重翹曲。舉例而言,本實施例可以使用紫外光雷射,如波長248nm的氪氟準分子雷射(KrF excimer laser)。其優點在於氮化鎵(GaN)對248nm氪氟準分子雷射的吸收係數較高,雷射能量大多在界面就被吸收完畢。相較之下,氮化鎵(GaN)對波長355nm的摻釹釔鋁石榴石固態雷射(Nd:YAG laser)的吸收係數較小,雷射穿透深度深,導致大多缺陷都在材料內部形成。 FIG. 3 is a schematic view showing a stripping process of the flip chip of the present invention. In the second flow of the present invention, the lifted substrate 20 of the flip chip 100 is subjected to laser lift off (LLO), that is, a thin type forming the non-growth substrate 20 of the present invention. Wafers, also known as film flip-chips. Laser stripping is preferably performed at the wafer level to avoid excessive stresses at the wafer level of laser lift, which causes severe warpage of the entire wafer. For example, the present embodiment may use an ultraviolet laser such as a KrF excimer laser having a wavelength of 248 nm. The advantage is that gallium nitride (GaN) has a high absorption coefficient for the 248 nm 氪-fluorine excimer laser, and the laser energy is mostly absorbed at the interface. In contrast, gallium nitride (GaN) has a small absorption coefficient for a 355 nm ytterbium-doped yttrium aluminum garnet solid-state laser (Nd:YAG laser), and the penetration depth of the laser is deep, resulting in most defects being inside the material. form.
上述雷射剝離流程,具體舉例如下,當成長基板20為藍寶石基板時,首先,聚焦於緩衝層11,本實施例為氮化鎵層,以適當的雷射能量剝離藍寶石基板,如750至1100mJ(微焦耳)。以45密耳(Mil)覆晶式晶片為例,950mJ(微焦耳)即能完全剝離。能量不足會使藍寶石基板剝離不完全導致發光層破損。再者,雷射光束大小須略大於欲剝除的覆晶式晶片尺寸,較佳的,邊長範圍比覆晶式晶片多40微米(um)以上。以45密耳(Mil)的覆晶式晶片為例,邊長1143微米(um),每邊預留60微米(um)左右,雷射束大小可為1260微米(um),確保樣品完全受雷射輻照。補充說明,由於雷射光源之能量呈高斯分布,若有能量不均,可能造成晶片破損,因此可依情況調整光源位置。 The laser stripping process is specifically exemplified as follows. When the growth substrate 20 is a sapphire substrate, first, focusing on the buffer layer 11, this embodiment is a gallium nitride layer, and the sapphire substrate is stripped with an appropriate laser energy, such as 750 to 1100 mJ. (micro joules). Taking a 45 mil (Mil) flip chip as an example, 950 mJ (microjoules) can be completely stripped. Insufficient energy causes the sapphire substrate to be peeled off incompletely, resulting in damage to the luminescent layer. Furthermore, the size of the laser beam must be slightly larger than the size of the flip chip to be stripped. Preferably, the side length is more than 40 micrometers (um) above the flip chip. For example, a 45 mil flip-chip wafer has a side length of 1123 micrometers (um), 60 micrometers (um) left on each side, and a laser beam size of 1260 micrometers (um) to ensure that the sample is completely affected. Laser irradiation. In addition, since the energy of the laser light source is Gaussian, if the energy is uneven, the wafer may be damaged, so the position of the light source can be adjusted according to the situation.
如圖4及圖4A所示,為本發明的薄型化晶片的粗化磊晶結構的示意圖,圖4A為圖4中A部分的放大圖。本發明第三流程,.為粗化因剝離成長基板20後外露的磊晶結構10的一半導體層;其中上述半導體層為N型半導體層12,本實施例為N型氮化鎵層。粗化半導體層的流程,包括下列步驟:以鹼性氫氧化物進行濕式蝕刻,直到半導體層的上表面121生成的角錐1211佔表面積20%以上。必要時,其中上述濕式蝕刻的流程還包括以紫外光或熱能輔助蝕刻,以增加形成角錐。 4 and 4A are schematic views showing a roughened epitaxial structure of a thinned wafer of the present invention, and FIG. 4A is an enlarged view of a portion A in FIG. The third flow of the present invention is to roughen a semiconductor layer of the epitaxial structure 10 exposed after the substrate 20 is grown by peeling off; wherein the semiconductor layer is an N-type semiconductor layer 12, and this embodiment is an N-type gallium nitride layer. The flow of roughening the semiconductor layer includes the following steps: wet etching with an alkali hydroxide until the pyramid 1211 formed on the upper surface 121 of the semiconductor layer occupies 20% or more of the surface area. Where necessary, the above-described wet etching process further includes etching with ultraviolet light or heat to increase the formation of pyramids.
本實施例,舉例說明,其中上述濕式蝕刻的流程包括下列步 驟,浸泡已移除成長基板20的覆晶式晶片100於3M(體積莫耳濃度mol/L)的氫氧化鉀(KOH)的溶液中10分鐘以上,以氫氧離子粗化N型半導體層12的表面。然後,取出該覆晶式晶片100,並以去離子水超音波震盪一預定時間,例如10分鐘。若有殘餘的鎵金屬粒子,可被濃度更高的氫氧化鉀(KOH)或酸類,例如鹽酸(HCl)清除。 In this embodiment, the flow of the above wet etching includes the following steps: Then, the flip-chip wafer 100 from which the growth substrate 20 has been removed is immersed in a 3M (volume molar concentration mol/L) potassium hydroxide (KOH) solution for 10 minutes or more to roughen the N-type semiconductor layer with hydroxide ions. The surface of 12. Then, the flip chip 100 is taken out and oscillated with deionized water for a predetermined time, for example, 10 minutes. If there are residual gallium metal particles, they can be removed by a higher concentration of potassium hydroxide (KOH) or an acid such as hydrochloric acid (HCl).
請參閱圖5,為本發明的薄型化晶片的貼合波長轉換層的示意圖。本發明第四流程,為接合一可透光的波長轉換層50於上述薄型化晶片的磊晶結構10。依圖1A的實施例,也就是位於磊晶結構10頂面的N型半導體層12。因而形成一發光二極體封裝結構200。本實施例的波長轉換層50為一具有波長轉換材料的透光層,如螢光粉片。本發明的波長轉換層50可以是螢光粉片或包含波長轉換材料的膠材。 Please refer to FIG. 5 , which is a schematic diagram of a bonding wavelength conversion layer of a thinned wafer of the present invention. The fourth flow of the present invention is to bond a light transmissive wavelength conversion layer 50 to the epitaxial structure 10 of the thinned wafer. According to the embodiment of FIG. 1A, that is, the N-type semiconductor layer 12 on the top surface of the epitaxial structure 10. Thus, a light emitting diode package structure 200 is formed. The wavelength conversion layer 50 of the present embodiment is a light transmissive layer having a wavelength conversion material, such as a phosphor powder sheet. The wavelength conversion layer 50 of the present invention may be a phosphor powder sheet or a gel material containing a wavelength converting material.
舉例而言,上述接合該波長轉換層50的流程包括以螢光粉片貼合於該磊晶結構10上,也就是說,螢光粉片貼合於如圖1A所示的該磊晶結構10的N型半導體層12上,一種較佳實施例,其中螢光粉片可以是螢光粉末與膠體、陶瓷或玻璃製成混合的片狀,螢光粉片固化後硬度大於蕭氏(Shore)硬度D40,厚度可控制於60微米(μm)至350微米(μm)之間。尺寸可大於或等於薄型化晶片的磊晶結構10。一種實際的作法,以固晶機台貼片,約120g輕壓薄型化晶片(由覆晶式晶片100移除成長基板20)確保完整貼合。 For example, the process of bonding the wavelength conversion layer 50 includes attaching a phosphor powder sheet to the epitaxial structure 10, that is, the phosphor powder sheet is attached to the epitaxial structure as shown in FIG. 1A. A preferred embodiment of the N-type semiconductor layer 12 of 10, wherein the phosphor powder sheet may be a sheet of phosphor powder mixed with colloid, ceramic or glass, and the hardness of the phosphor sheet is greater than that of Shaw (Shore). The hardness D40, the thickness can be controlled between 60 micrometers (μm) and 350 micrometers (μm). The size can be greater than or equal to the epitaxial structure 10 of the thinned wafer. One practical approach is to ensure a complete fit with a die attaching machine patch, about 120g of lightly pressed thinned wafer (removing the grown substrate 20 from the flip chip 100).
舉例而言,就膠材而言,其中上述黏貼該波長轉換層的流程包括以膠材直接覆蓋於該磊晶結構10上。一種實際的作法,可以將具有波長轉換材料的膠材覆蓋薄型化晶片(亦即已移除成長基板20的覆晶式晶片)所有外露表面,包含磊晶結構10的上表面121及其四個側面。如圖5A所示,波長轉換層50a延伸至磊晶結構10的兩側,完全蓋住磊晶結構10,而形成發光晶片二極體結構 200a。此外,因膠材會直接接觸覆晶式晶片100,需要使用耐熱與耐光的膠材,如折射率1.4的矽膠。 For example, in the case of a rubber material, the above-described process of adhering the wavelength conversion layer includes directly covering the epitaxial structure 10 with a rubber material. In a practical practice, the adhesive material having the wavelength converting material can cover all exposed surfaces of the thinned wafer (ie, the flip-chip wafer from which the grown substrate 20 has been removed), including the upper surface 121 of the epitaxial structure 10 and four of them. side. As shown in FIG. 5A, the wavelength conversion layer 50a extends to both sides of the epitaxial structure 10, completely covering the epitaxial structure 10, and forming a light-emitting chip diode structure. 200a. In addition, since the rubber material directly contacts the flip chip 100, it is necessary to use a heat-resistant and light-resistant glue such as a silicone having a refractive index of 1.4.
請參閱圖5B,為本發明的覆晶式晶片貼合波長轉換層又一實施例的示意圖。與上述實施例不同之處在於,發光晶片二極體結構200b的波長轉換層50b的寬度大致等於磊晶結構10的寬度。請再參閱圖5C,為本發明的覆晶式晶片貼合波長轉換層再一實施例的示意圖。本實施例的發光晶片二極體結構200b的波長轉換層50b的寬度大致等於磊晶結構10的寬度,另外,填充層40進一步延伸大致覆蓋於上述磊晶結構10的側邊。此外,本實施例的填充層40較佳的是不透明的底膠材料,框住薄型化晶片的發光層。不透明的底膠材料可以縮小整體視角,具有控制視角的功能,膠材可使用矽膠或環氧樹脂,較佳為白色底膠材料可維持亮度。綜上各種實施例,本發明的波長轉換層的寬度可以大於或等於磊晶結構10的寬度。 Please refer to FIG. 5B , which is a schematic diagram of still another embodiment of the flip chip wafer bonding wavelength conversion layer of the present invention. The difference from the above embodiment is that the width of the wavelength conversion layer 50b of the light-emitting wafer diode structure 200b is substantially equal to the width of the epitaxial structure 10. Please refer to FIG. 5C again, which is a schematic diagram of still another embodiment of the flip-chip wafer bonding wavelength conversion layer of the present invention. The width of the wavelength conversion layer 50b of the luminescent wafer diode structure 200b of the present embodiment is substantially equal to the width of the epitaxial structure 10. Further, the filling layer 40 is further extended to substantially cover the side of the epitaxial structure 10. In addition, the filling layer 40 of the present embodiment is preferably an opaque primer material that frames the light-emitting layer of the thinned wafer. The opaque primer material can reduce the overall viewing angle and has the function of controlling the viewing angle. The rubber material can be made of silicone or epoxy resin, and the white primer material can maintain the brightness. In summary, the width of the wavelength conversion layer of the present invention may be greater than or equal to the width of the epitaxial structure 10.
本實施例經過移除成長基板20,以Epistar 45密耳(mil)覆晶式晶片為例,藍光晶片本身的視角約為130度,若移除成長基板20,厚度可減少約140μm,減少光的折射與散射,磊晶結構10也就是晶片的發光層厚度(參圖5A的H0)僅約8~10μm,視角可達約117度。另外,由於厚度小於10μm,藍光幾乎只剩正向發光,大部分藍光皆可被波長轉換層轉換為白光。此外,移除成長基板20後,具有波長轉換材料的波長轉換層50,50a,50b可加強整體結構,並且可藉由控制可透光的波長轉換層的寬度避免發光層13的藍光漏出。 In this embodiment, the growth substrate 20 is removed, and an Epistar 45 mil flip chip is taken as an example. The viewing angle of the blue light wafer itself is about 130 degrees. If the growth substrate 20 is removed, the thickness can be reduced by about 140 μm, and the light is reduced. The refraction and scattering, the epitaxial structure 10, that is, the thickness of the light-emitting layer of the wafer (refer to H0 of FIG. 5A) is only about 8 to 10 μm, and the viewing angle can reach about 117 degrees. In addition, since the thickness is less than 10 μm, almost all of the blue light is positively emitted, and most of the blue light can be converted into white light by the wavelength conversion layer. Further, after the growth substrate 20 is removed, the wavelength conversion layers 50, 50a, 50b having the wavelength conversion material can enhance the overall structure, and the blue light leakage of the light-emitting layer 13 can be prevented by controlling the width of the light-transmissive wavelength conversion layer.
本實施例的特點之一在於,藉由利用控制上述波長轉換層50的厚度,進而改變發光二極體封裝結構200的整體視角。進一步根據預期的視角製造所需要視角的發光二極體封裝結構200。上述波長轉換層可視為視角調整結構。 One of the features of this embodiment is that the overall viewing angle of the light emitting diode package structure 200 is changed by controlling the thickness of the wavelength conversion layer 50. The LED package structure 200 of the desired viewing angle is further fabricated according to the intended viewing angle. The above wavelength conversion layer can be regarded as a viewing angle adjustment structure.
本實施例依圖5A的結構進行實驗,以EPISTAR(晶元光電公司)45密耳(mil)覆晶式晶片經過雷射剝離成長基板為例,其中H0代表移除成長基板20後的磊晶結構10厚度,約10μm;H1代表波長轉換層頂面至磊晶結構10頂面的厚度。其中H0+H1的厚度,以H表示波長轉換層整體厚度,等於由波長轉換層50a頂面至磊晶結構10的底面的厚度。請參下列第一實驗例的表1:
由上述表1,隨著波長轉換層的厚度增加,視角跟著增大。波長轉換層整體厚度由350μm調整至60μm時,視角可由133.7度達到120.4度。上述視角的量測是依光形圖最大的光強度的50%的範圍,其中對照例,為依圖4未貼附波長轉換層的0度視角光形圖參圖7。如圖6所示,為本發明依上述表1畫出第一實驗例數據的座標圖,可分析視角(View angle)與波長轉換層整體厚度之間的關係大致呈線性關係。本發明依據線性迴歸分析(linear regression),根據自變數X(波長轉換層整體厚度)和因變數Y(視角)的相關關係,建立X與Y的線性迴歸方程進行預測的方法,可以整理得著下列關係式:算式一:視角=117°+0.05×波長轉換層整體厚度(H) From the above Table 1, as the thickness of the wavelength conversion layer increases, the viewing angle increases. When the overall thickness of the wavelength conversion layer is adjusted from 350 μm to 60 μm, the viewing angle can be 120.4 degrees from 133.7 degrees. The measurement of the above viewing angle is in the range of 50% of the maximum light intensity of the light pattern, and in the comparative example, the 0 degree viewing angle pattern of the wavelength conversion layer is not attached according to FIG. As shown in FIG. 6, the present invention draws a graph of the data of the first experimental example according to the above Table 1, and can analyze the relationship between the viewing angle and the overall thickness of the wavelength conversion layer in a substantially linear relationship. The present invention is based on linear regression analysis, and based on the correlation between the independent variable X (the overall thickness of the wavelength conversion layer) and the variable Y (angle of view), a method for predicting the linear regression equation of X and Y can be obtained. The following relationship: Equation 1: Angle of view = 117 ° + 0.05 × overall thickness of the wavelength conversion layer (H)
綜上,本發明可以依據上述線性迴歸方程,依據發光二極體封裝結構的產品所需要的視角,貼附相對應的波長轉換層的厚度在磊晶結構10,即可達成。藉此可以避免多餘的試驗。 In summary, the present invention can be achieved according to the linear regression equation described above, and the thickness of the corresponding wavelength conversion layer is attached to the epitaxial structure 10 according to the viewing angle required for the product of the LED package structure. This can avoid unnecessary tests.
請參閱圖8,為本發明具有反射牆的發光二極體封裝結構的示意圖。此流程,可稱為白牆成型流程。除了上面實施例的波長轉換層50,本實施例以與磊晶結構10等大的波長轉換層50、及反射牆70形成發光二極體封裝結構400。反射牆70包覆磊晶結構10與波長轉換層50,反射牆70與波長轉換層50頂面等高或略高10~50μm,可覆蓋或不覆蓋波長轉換層50頂面。一種實施的方法,例如,將白色樹脂以模塑方式包覆磊晶結構10與波長轉換層50的周圍,減小視角。其優點在於,白色樹脂可作為反射杯,且因晶片的發光層只剩10μm,反射杯結構對側向光影響甚小,能在亮度不減的結構下縮小視角。上述波長轉換層50及反射牆70可視為視角調整結構。 Please refer to FIG. 8 , which is a schematic diagram of a light emitting diode package structure with a reflective wall according to the present invention. This process can be called a white wall molding process. In addition to the wavelength conversion layer 50 of the above embodiment, the present embodiment forms the light emitting diode package structure 400 with the wavelength conversion layer 50 and the reflection wall 70 which are larger than the epitaxial structure 10. The reflective wall 70 covers the epitaxial structure 10 and the wavelength conversion layer 50. The reflective wall 70 is equal to or slightly higher than the top surface of the wavelength conversion layer 50 by 10 to 50 μm, and may or may not cover the top surface of the wavelength conversion layer 50. An embodiment of the method, for example, coating a white resin with the periphery of the epitaxial structure 10 and the wavelength conversion layer 50 in a molding manner to reduce the viewing angle. The advantage is that the white resin can be used as a reflective cup, and since the light-emitting layer of the wafer has only 10 μm left, the reflective cup structure has little influence on the lateral light, and the viewing angle can be reduced in a structure in which the brightness is not reduced. The wavelength conversion layer 50 and the reflection wall 70 can be regarded as a viewing angle adjustment structure.
本實施例的優點之一在於利用反射牆70的不同反射率,以調整發光二極體封裝結構400的整體視角。具體的實驗如下:控制反射牆的反射率可調整整體的視角大小,以0%反射率至100%反射率為例,分別以四種反射牆材料攙入不同比例的反射顆粒,而形成編號矽樹脂1-4的試驗樣本。 One of the advantages of this embodiment is that the different viewing angles of the reflective wall 70 are utilized to adjust the overall viewing angle of the LED package structure 400. The specific experiment is as follows: Control the reflectivity of the reflective wall to adjust the overall viewing angle. From 0% reflectance to 100% reflectivity, the reflective particles of different proportions are infiltrated into the four reflective wall materials to form the number 矽. Test sample of resin 1-4.
本發明的第二實驗例,以反射牆70與波長轉換層50頂面等高(如圖8所示);本發明的第三實驗例,以反射牆70高於波長轉換層50頂面(如圖8A或圖8B所示,其中圖8A是配合圖5的結構,圖8B是配合圖5C的結構),其中反射牆70高於波長轉換層50頂面10~50μm即可縮小視角;反射牆的反射率越高時(大於70%),影響越明顯。 In the second experimental example of the present invention, the reflective wall 70 is equal to the top surface of the wavelength conversion layer 50 (as shown in FIG. 8); in the third experimental example of the present invention, the reflective wall 70 is higher than the top surface of the wavelength conversion layer 50 ( 8A or 8B, wherein FIG. 8A is the structure of FIG. 5, and FIG. 8B is the structure of FIG. 5C, wherein the reflective wall 70 is 10 to 50 μm higher than the top surface of the wavelength conversion layer 50 to reduce the viewing angle; The higher the reflectivity of the wall (greater than 70%), the more obvious the effect.
本發明依據圖8配合反射牆反射率100%,經過量測後,視角可由142.0度縮小至115.3度,其中115.3度請參圖9的光形圖。整理成下列表2,具有反射牆的發光二極體封裝結構的視角實驗表格。 According to FIG. 8, the reflectivity of the reflective wall is 100%. After the measurement, the viewing angle can be reduced from 142.0 degrees to 115.3 degrees, and 115.3 degrees is referred to the light pattern of FIG. The viewing angle experiment table of the light emitting diode package structure with the reflective wall is organized into the following list 2.
上述表2中反射牆材料的顏色、以及對於光線波長449nm的反射率各自如下:矽樹脂1顏色為透明(transparent)、反射率0%;矽樹脂2顏色為灰白(gray-white)、反射率74.7%;矽樹脂3顏色為類白(off-white)、反射率89.1%;矽樹脂4顏色為白色(white)、反射率100%。 The color of the reflective wall material in Table 2 above and the reflectance for the light wavelength of 449 nm are as follows: the resin 1 color is transparent, the reflectance is 0%; the resin 2 color is gray-white, and the reflectance is 74.7%; the color of the enamel resin 3 is off-white, the reflectance is 89.1%; the color of the enamel resin 4 is white (white), and the reflectance is 100%.
請參閱圖10,上述反射牆70的反射率,本實施例的編號矽樹脂2~4為板狀厚度0.5mm的實驗樣品,選擇光線波長449nm。實際上可以適用於大於波長425nm以上,即有明顯的差異。波長大於450nm光線,矽樹脂3~4的反射率開始降低。 Referring to FIG. 10, the reflectance of the reflective wall 70, the number of the enamel resins 2 to 4 of the present embodiment is an experimental sample having a plate-shaped thickness of 0.5 mm, and the wavelength of the light is selected to be 449 nm. In fact, it can be applied to a wavelength greater than 425 nm or more, that is, there is a significant difference. When the wavelength is greater than 450 nm, the reflectivity of the resin 3 to 4 begins to decrease.
請參閱圖10A,為本發明依第二實驗例實驗數據的座標分佈圖。由第二實驗例的座標圖,可分析視角與反射牆的反射率之間的關係大致呈線性關係。本發明依據線性迴歸分析,根據自變數X(反射牆的反射率,R)和因變數Y(視角)的相關關係,建立X與Y的線性迴歸方程進行預測的方法,可以整理得著下列關係式:算式二:視角=141.8-0.2709×反射牆的反射率% Please refer to FIG. 10A , which is a coordinate distribution diagram of experimental data according to a second experimental example of the present invention. From the coordinate map of the second experimental example, the relationship between the viewing angle and the reflectance of the reflective wall can be analyzed substantially linearly. According to the linear regression analysis, according to the correlation between the self-variable X (reflectance of the reflective wall, R) and the variable Y (angle of view), the method of predicting the linear regression equation of X and Y is established, and the following relationship can be obtained. Equation: Equation 2: Viewing angle = 141.8-0.2709 × Reflectivity of reflective wall%
再者,請參閱圖10B,為本發明依第三實驗例實驗數據的座標分佈圖。反射牆70高於波長轉換層50頂面20μm。由第三實驗例的座標圖,可分析視角與反射牆的反射率之間的關係大致呈線 性關係。本發明依據線性迴歸分析,根據自變數X(反射牆的反射率)和因變數Y(視角)的相關關係,建立X與Y的線性迴歸方程進行預測的方法,可以整理得著下列關係式:算式三:視角=141.9-0.2809×反射牆的反射率% Furthermore, please refer to FIG. 10B , which is a coordinate distribution diagram of experimental data according to a third experimental example of the present invention. The reflective wall 70 is 20 μm higher than the top surface of the wavelength conversion layer 50. From the coordinate plot of the third experimental example, the relationship between the angle of view and the reflectivity of the reflective wall can be analyzed. Sexual relationship. According to the linear regression analysis, the present invention establishes a linear regression equation of X and Y for prediction based on the correlation between the self-variable X (reflectance of the reflective wall) and the variable Y (viewing angle), and the following relationship can be obtained: Equation 3: Angle of view = 141.9-0.2809 × Reflectivity of reflective wall %
由表2,反射牆70的反射率100%時,反射牆與波長轉換層頂面的高度差20μm可減少視角1.2至1.3度。反射牆70的反射率愈高,視角減少愈明顯。本發明另外測試,高度差50μm時減少約2度,兩者之間相差約0.7至0.8。為使反射牆達到最佳的縮小視角效果,略高的反射牆70結構需緊鄰波長轉換層50頂面。 From Table 2, when the reflectance of the reflective wall 70 is 100%, the difference in height between the reflective wall and the top surface of the wavelength conversion layer of 20 μm can reduce the viewing angle by 1.2 to 1.3 degrees. The higher the reflectivity of the reflective wall 70, the more pronounced the viewing angle is reduced. The present invention additionally tests that the height difference is reduced by about 2 degrees at a difference of 50 μm, and the difference between the two is about 0.7 to 0.8. In order to achieve the best reduction of the viewing angle of the reflective wall, the structure of the slightly higher reflective wall 70 needs to be adjacent to the top surface of the wavelength conversion layer 50.
綜上,本發明可以依據上述線性迴歸分析所獲得算式進行預測,依據發光二極體封裝結構的產品所需要的視角,以相符合的反射率的反射牆圍繞在磊晶結構10及波長轉換層50,即可達成。藉此可以避免多餘的試驗。 In summary, the present invention can be predicted according to the equation obtained by the above linear regression analysis, and surrounds the epitaxial structure 10 and the wavelength conversion layer with a reflective wall corresponding to the reflectance according to the required viewing angle of the product of the LED package structure. 50, you can achieve. This can avoid unnecessary tests.
本實施例該覆晶式晶片100經過雷射剝離該成長基板後,或稱薄型化晶片,其包含磊晶結構10及作為電極的接觸墊。因厚度減薄,側向光驟減,光形更為集中。分別以不同應用所需的光照角度做為比較基準,例如投影機應用只需±10度的光,臉部辨識需±40度內的光,照明應用需±60度內的光。以藍光晶片為例,移除成長基板後即可於±10度內有3%光強度(luminous intensity,candlepower,I)增加。光強度的單位為坎德拉(candela,cd)=lm/sr(立體角內之光通量[lm]/立體角Ω[sr]) In the present embodiment, the flip chip 100 is subjected to laser stripping of the grown substrate, or a thinned wafer, comprising an epitaxial structure 10 and a contact pad as an electrode. Due to the thinning of the thickness, the lateral light is sharply reduced and the light shape is more concentrated. The illumination angles required for different applications are used as benchmarks. For example, the projector requires only ±10 degrees of light, the face recognition requires ±40 degrees of light, and the illumination application requires ±60 degrees of light. Taking a blue light wafer as an example, after removing the grown substrate, 3% light intensity (luminous power, I) can be increased within ±10 degrees. The unit of light intensity is candela (cd) = lm / sr (light flux [m] / solid angle Ω [sr] in solid angle)
以封裝後的白光元件為例,移除成長基板之後的光強也有增加,而略高反射牆結構可使光形更為集中。較薄的厚度也有助於光形的集中。以不同反射率的反射牆做比較,反射率高的反射牆於小角度時有較高的光強,證明高反射率的反射牆可使光形更為集中。依據第一實驗例的表1,量測不同光照角度的光強度(%)如下表3,第一實驗例的光強度表。 Taking the packaged white light element as an example, the light intensity after removing the grown substrate is also increased, and the slightly higher reflective wall structure can make the light shape more concentrated. A thinner thickness also contributes to the concentration of the light shape. Compared with reflective walls with different reflectivity, the reflective wall with high reflectivity has a higher light intensity at a small angle, which proves that the reflective wall with high reflectivity can make the light shape more concentrated. According to Table 1 of the first experimental example, the light intensity (%) of the different illumination angles was measured as shown in Table 3 below, the light intensity table of the first experimental example.
此外,依據第二及第三實驗例的表2,量測不同光照角度的光強度(%)如下表4,光強度表。 Further, according to Table 2 of the second and third experimental examples, the light intensity (%) of different illumination angles was measured as shown in Table 4 below, the light intensity meter.
此外,依據第二及第三實驗例的表2,量測不同光照角度的光強度(%)如下表5,光強度表。以不同反射率的反射牆做比較,反射率高的反射牆於小角度時有較高的光強,證明高反射率反射牆可使光形更為集中。 Further, according to Table 2 of the second and third experimental examples, the light intensity (%) of different illumination angles was measured as shown in Table 5 below, the light intensity meter. Compared with reflective walls with different reflectivity, the reflective wall with high reflectivity has a higher light intensity at a small angle, which proves that the high reflectivity reflective wall can make the light shape more concentrated.
再者,依據上述實施例,積分視角內的光強度面積為分母,±40度以內為分子,比值越大表示其光形越集中於±40度以內。顯示本發明的發光二極體結構相當具有實用性。 Furthermore, according to the above embodiment, the light intensity area in the integrated viewing angle is the denominator, and the numerator is within ±40 degrees. The larger the ratio, the more concentrated the light shape is within ±40 degrees. It is shown that the structure of the light-emitting diode of the present invention is quite practical.
為量化其集中度,定義±10度的光強度佔23~27%,10~40度內的光強度佔50~53%。因此可見,本發明的發光二極體封裝結構發出的光在光照角度±40度的光強度總和與在視角角度以內的光強面積比值大於0.7;其中0~10度,比值0.23~0.27;其中10~40度,比值0.50~0.53。 To quantify the concentration, the light intensity of ±10 degrees is defined as 23~27%, and the light intensity within 10~40 degrees is 50~53%. Therefore, it can be seen that the light-emitting diode package structure of the present invention has a light intensity ratio of ±40 degrees in the light angle and a light intensity area within the viewing angle of more than 0.7; wherein 0 to 10 degrees, the ratio is 0.23 to 0.27; 10~40 degrees, the ratio is 0.50~0.53.
請再參閱圖11,為本發明的發光二極體封裝模組的俯視圖。本發明還可應用於一種發光二極體封裝模組的成形方法,與上述實施例的差異在於,將數個覆晶式晶片以陣列的方式放置於一承載基板30上,例如圖示2x2的陣列,但數量不限於此。先將該些數個覆晶式晶片的電極分別與承載基板30上的相對應電路結構接合,之後類似於上述發光二極體封裝結構的成形方法,經過填入底膠、雷射剝離、粗化磊晶結構的步驟,然後再個別將可透光的波長轉換層50置於上述薄型化晶片的磊晶結構。最後,形成反射牆70以環繞每一所述波長轉換層50與每一所述薄型化晶片,而形成一發光二極體封裝模組500。 Please refer to FIG. 11 again, which is a top view of the LED package module of the present invention. The present invention is also applicable to a method for forming a light-emitting diode package module. The difference from the above embodiment is that a plurality of flip-chip wafers are placed in an array on a carrier substrate 30, for example, 2x2. Array, but the number is not limited to this. First, the electrodes of the plurality of flip-chip wafers are respectively bonded to corresponding circuit structures on the carrier substrate 30, and then similar to the forming method of the above-mentioned LED package structure, after filling the primer, laser stripping, and rough The step of the epitaxial structure is followed by separately placing the light transmissive wavelength converting layer 50 on the epitaxial structure of the thinned wafer. Finally, a reflective wall 70 is formed to surround each of the wavelength conversion layer 50 and each of the thinned wafers to form a light emitting diode package module 500.
必要時,可以沿著圖11中的虛線切割上述發光二極體封裝模組500,而形成多個發光二極體封裝結構400(如圖8、8A、8B所示)。 If necessary, the LED package module 500 can be cut along the broken line in FIG. 11 to form a plurality of LED package structures 400 (as shown in FIGS. 8, 8A, and 8B).
本發明的特點及功能在於,藉由控制波長轉換層的厚度,進而改變發光二極體封裝結構的整體視角根據期望的視角,依線性迴歸分析所獲得算式進行預測,製造所需要視角的發光二極體封裝結構。此外,藉由控制反射牆的反射率,可調整發光二極體封裝結構的整體的視角大小。本發明在LED本身的視角與厚度上加以調整,可使光學設計的彈性空間更大。 The feature and function of the present invention is that by controlling the thickness of the wavelength conversion layer, the overall viewing angle of the LED package structure is changed according to the desired viewing angle, and the calculation obtained by linear regression analysis is used to predict the illumination of the desired viewing angle. Polar body package structure. In addition, by controlling the reflectivity of the reflective wall, the overall viewing angle of the LED package structure can be adjusted. The invention adjusts the viewing angle and thickness of the LED itself to make the elastic space of the optical design larger.
以上所述僅為本發明之較佳可行實施例,凡依本發明申請專利範圍所做之均等變化與修飾,皆應屬本發明之涵蓋範圍。 The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.
以上所述僅為本發明之較佳可行實施例,凡依本發明申請專利範圍所做之均等變化與修飾,皆應屬本發明之涵蓋範圍。 The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.
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US11894503B2 (en) | 2020-03-06 | 2024-02-06 | Lextar Electronics Corporation | Light emitting diode device |
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