TWI616693B - Opto-electric hybrid board and optically coupled device - Google Patents

Abstract

The invention discloses an optoelectronic hybrid board for converting electrical signals into optical signals for input to an optical fiber. The opto-electric hybrid board includes a circuit substrate having a first through hole and a second through hole, a photoelectric converter disposed on the circuit substrate, and an optical coupling device. The optical coupling device includes a first optical waveguide structure, a second optical waveguide structure, and a connected optical waveguide structure. The first optical waveguide structure has a first slope to totally reflect a portion of the light received by the photoelectric converter to the optical fiber. The first slope is coated with a film layer, and the film layer has an opening for contacting a portion of the first slope to connect the optical waveguide structure, so that part of the light can enter the connection optical waveguide structure. The second optical waveguide structure contacts the optical waveguide structure to receive the light, and has a second slope and a third slope to totally reflect the light to the monitoring light-detecting diode of the photoelectric converter.

Description

Photoelectric hybrid board and optical coupling device

The present invention relates to an opto-electric hybrid board and an optical coupling device, and in particular to an opto-electric hybrid board capable of guiding an optical signal of a photoelectric converter to an optical fiber and guiding part of the optical signal to a monitoring light-emitting diode. And an optical coupling device.

In practice, the optical transmission system is a kind of wired remote communication, which is different from the traditional electric transmission system in that the optical transmission system transmits information by light and optical fiber. Compared with traditional electric transmission technology, optical transmission technology has many advantages such as large transmission capacity and good confidentiality. Therefore, optical fiber communication has become the most important wired communication method today. After the light is modulated, the information can be carried. In a word, the optical transmission technology is implemented by inputting the information to be transmitted to the photoelectric converter to superimpose or modulate the information onto the carrier as the information signal carrier. Then, the modulated carrier is transmitted to the remote receiving end through the transmission medium (optical fiber), and finally the original information is demodulated by the receiver.

In general, in order to maintain the intensity of the transmission signal, a laser diode capable of emitting directional laser light is generally used as the light source of the photoelectric converter. In the prior art, a Vertical-Cavity Surface-Emitting Laser (VCSEL) has been adopted as a data input terminal for a laser source. The vertical cavity surface-emitting laser generator can be tested in any process it produces, while the vertical cavity is exposed. A type of laser generator emits a laser in a direction perpendicular to its reaction zone. Therefore, in the prior art, the vertical cavity surface-emitting laser generator can be disposed on a circuit board or an opto-electric hybrid board by using a flip chip method, so that the laser light emitted by the vertical cavity can pass through the circuit board. The optical waveguide structure disposed on the back surface of the circuit board is entered, and the laser light is introduced into the optical fiber by the optical waveguide structure.

Referring to FIG. 1, FIG. 1 is a schematic view showing a photoelectric hybrid board 1 of the prior art. As shown in FIG. 1, the opto-electric hybrid board 1 has a circuit substrate 10, a photoelectric converter 12 and an optical waveguide structure 14, wherein the circuit substrate 10 includes a functional surface 100 and a back surface 102 opposite to the functional surface 100, and the photoelectric converter 12 is covered. The crystal technology is disposed on the functional surface 100. The photoelectric converter 12 includes a wafer 120 and a vertical cavity surface-emitting laser generator 122, wherein the wafer 120 can be used to control the vertical cavity surface-emitting laser generator 122 to generate laser light with information, and because of the vertical The cavity surface type laser generator 122 is provided on the circuit substrate 10 by a flip chip technique, and the generated laser light L is advanced toward the circuit substrate 10. The circuit substrate 10 is provided with a through hole 104 whose position corresponds to the position of the vertical cavity surface type laser generator 122. Therefore, the laser light L emitted from the vertical cavity surface type laser generator 122 can pass through the through hole 104.

The optical waveguide structure 14 is disposed on the back surface 102 of the circuit substrate 10. One end is connected to the through hole 104, and the other end is adjacent to the light receiving end of the optical fiber (not shown). The optical waveguide structure 14 has a refractive index greater than that of the environment, and a slope 140 is formed at one end of the connection via 104. When the laser light L emitted by the vertical cavity surface type laser generator 122 passes through the through hole 104, it enters the optical waveguide structure 14, and since the refractive index of the optical waveguide structure 14 is greater than the refractive index of the environment, the laser light L It will be totally reflected by the ramp 14 to travel in the optical waveguide structure 14, and finally reach the light receiving end of the optical fiber to be received by the optical fiber. Therefore, by Figure 1 The structure of the opto-electric hybrid board 1 can reduce the overall volume of the opto-electric hybrid board 1, and can utilize the space more efficiently.

However, the photoelectric hybrid board 1 of Fig. 1 is not provided with the monitoring light-detecting diode to detect the generated laser light information, such as luminous flux, etc., so that the feedback control function cannot be achieved. Therefore, it is necessary to develop an opto-electric hybrid board capable of detecting the light emitted from the photoelectric converter to solve the above problems.

One aspect of the present invention is to provide an opto-electric hybrid board for converting electrical signals into optical signals and inputting optical signals to optical fibers. According to a specific embodiment, the opto-electric hybrid board comprises a circuit substrate, a photoelectric converter, a first optical waveguide structure, a connecting optical waveguide structure, and a second optical waveguide structure. The circuit substrate includes a functional surface, a back surface, a first through hole and a second through hole, the photoelectric converter is disposed on the functional surface, and the first optical waveguide structure is disposed on the back surface. The photoelectric converter comprises a light source unit and a monitoring light-detecting diode, wherein the light source unit is disposed on the first through hole, and the monitoring light-detecting diode is disposed on the second through hole. The first optical waveguide structure is connected to the first through hole at one end and forms a first inclined surface. The first inclined surface is coated with a film layer and the film layer has an opening on the film layer to expose a portion of the first inclined surface. The connecting optical waveguide structure covers the thin film layer and contacts a portion of the first inclined surface through the opening. The second optical waveguide structure is in contact with the optical waveguide structure at one end and forms a second inclined surface, and the other end is aligned with the second through hole and forms a third inclined surface.

The first optical waveguide structure, the connected optical waveguide structure and the second optical waveguide structure have the same refractive index, and the refractive index is greater than the refractive index of the environment. Therefore, after the light generated by the light source unit passes through the first through hole and enters the first optical waveguide structure, part of the light is first inclined. The surface is totally reflected and travels to the optical fiber within the first optical waveguide structure, and the other portion of the light passes through the opening of the thin film layer into the connected optical waveguide structure having the same refractive index as the first inclined surface. The light entering the structure connecting the optical waveguide further enters the second optical waveguide structure in contact with the optical waveguide structure, and is totally reflected by the second inclined surface and the third inclined surface of the second optical waveguide structure, and finally passes through the second through hole to reach the monitoring. Use a light detector diode.

As described above, in addition to inputting the light emitted by the light source unit of the photoelectric converter to the optical fiber, the photoelectric hybrid board of the present invention can also extract part of the light to the monitoring light detecting diode on the photoelectric hybrid board to detect the generated light. Light characteristics. In addition, the photoelectric converter of the photoelectric hybrid board is located on the functional surface and the optical waveguide structures are located on the back surface of the photoelectric hybrid board, so that the overall volume of the photoelectric hybrid board is small, which is advantageous for space utilization.

Another aspect of the present invention is to provide an optical coupling device for inputting light from a photoelectric converter to an optical fiber. The optical coupling device includes a first optical waveguide structure, a connecting optical waveguide structure, and a second optical waveguide structure, all having the same refractive index, and the refractive index is greater than the refractive index of the environment. The first optical waveguide structure is disposed on the back surface of the circuit substrate of the opto-electric hybrid board, and is connected to the first through hole on the circuit substrate, so that the light generated by the light source unit disposed on the functional surface of the circuit substrate and corresponding to the first perforation can pass through A perforation and entry into the first optical waveguide structure.

The first optical waveguide structure is connected to one end of the first through hole and has a first inclined surface. The first inclined surface is coated with a thin film layer and an opening is formed on the thin film layer. Since the refractive index of the first optical waveguide structure is larger than the thin film layer, part of the light is to be A bevel is totally reflected and travels within the first optical waveguide structure. The connecting optical waveguide structure contacts the first inclined surface of the first optical waveguide structure through the opening, so that another portion of the light penetrates into the connected optical waveguide structure. Second optical waveguide structure connection Touching the optical waveguide structure, a part of the light entering the optical waveguide structure enters the second optical waveguide structure, is totally reflected by the second inclined surface and the third inclined surface of the second optical waveguide structure, and finally passes through the second perforation of the circuit substrate. The monitoring light-detecting diode disposed on the circuit board is reached.

As described above, the optical coupling device of the present invention can extract light from the light source unit disposed on the opto-electric hybrid board to the optical fiber, and can also extract part of the light to the monitoring light-detecting diode on the photoelectric hybrid board to detect The resulting light characteristics. In addition, the optical coupling device is disposed on the back surface of the opto-electric hybrid board, so that the overall volume of the opto-electric hybrid board can be reduced, which is advantageous for space utilization.

The advantages and spirit of the present invention will be further understood from the following detailed description of the invention.

1‧‧‧Optoelectronic hybrid board

10‧‧‧ circuit board

12‧‧ ‧ photoelectric converter

14‧‧‧ Optical waveguide structure

100‧‧‧ functional surface

102‧‧‧Back

104‧‧‧Perforation

120‧‧‧ wafer

122‧‧‧Vertical cavity surface-emitting laser generator

140‧‧‧Bevel

L‧‧‧Laser light

2‧‧‧Optoelectronic hybrid board

20‧‧‧ circuit board

22‧‧‧Photoelectric converter

24‧‧‧Optical coupling device

200‧‧‧ functional surface

202‧‧‧Back

204‧‧‧First perforation

206‧‧‧Second perforation

220‧‧‧Light source unit

222‧‧‧Detection light diode for monitoring

224‧‧‧ wafer

240‧‧‧First optical waveguide structure

242‧‧‧Connected optical waveguide structure

244‧‧‧Second optical waveguide structure

2400‧‧‧First bevel

2402‧‧‧film layer

2404‧‧‧ openings

2440‧‧‧second bevel

2442‧‧‧3rd bevel

L1, L2‧‧‧ ray path

3‧‧‧Optoelectronic hybrid board

30‧‧‧ circuit board

32‧‧‧Photoelectric converter

34‧‧‧ Optical waveguide structure

36‧‧‧Connected optical waveguide structure

38‧‧‧Monitoring diodes for monitoring

300‧‧‧ functional surface

302‧‧‧Back

304‧‧‧Perforation

320‧‧‧Light source unit

322‧‧‧ wafer

340‧‧‧Bevel

342‧‧‧film layer

344‧‧‧ openings

Figure 1 is a schematic view showing a prior art optoelectronic hybrid panel.

2 is a schematic view of an opto-electric hybrid panel in accordance with an embodiment of the present invention.

Figure 3 is a schematic illustration of an optoelectronic hybrid panel in accordance with another embodiment of the present invention.

Referring to FIG. 2, FIG. 2 is a schematic diagram of an opto-electric hybrid board 2 according to an embodiment of the present invention. As shown in FIG. 2, the optoelectronic hybrid board 2 includes a circuit board 20 having a functional surface 200, a back surface 202 opposite to the functional surface 200, a first through hole 204 and a second through hole 206, wherein the first through hole 204 and The second through holes 206 respectively penetrate the circuit The body of the substrate 20.

In the present embodiment, functional elements such as circuits or wafers may be disposed on the functional surface 200 of the circuit substrate 20. In detail, the optoelectronic hybrid board 2 further includes a photoelectric converter 22 disposed on the functional surface 200 of the circuit substrate 20, and The photoelectric converter 22 can be electrically connected to a circuit or other electronic components (not shown) disposed on the functional surface 200 to obtain the data to be transmitted and the power required for operation.

The photoelectric converter 22 further includes a light source unit 220, a monitoring light-detecting diode 222, and a wafer 224, wherein the light source unit 220, the monitoring light-detecting diode 222 are connected to the wafer 224 and controlled by the wafer 224. In the present embodiment, the photoelectric converter 22 and the unit thereof, such as the light source unit 220, the monitoring light-detecting diode 222, and the wafer 224, can be flip-chip mounted on the functional surface 200 of the circuit substrate 20, and The light source unit 220 and the monitoring light-detecting diode 222 are respectively disposed on the first through-hole 204 and the second through-hole 206. Therefore, the light-emitting surface of the light source unit 220 and the light-receiving surface of the monitoring light-detecting diode 222 can face the first The through hole 204 and the second through hole 206. The light source unit 220 may be a Vertical-Cavity Surface-Emitting Laser (VCSEL) in the practice, and the light exiting the first through hole 204 may emit the laser light through the first through hole 204. The wafer 224 can control the vertical cavity surface-emitting laser generator to superimpose or modulate the information to be transmitted onto the generated laser light.

The optoelectronic hybrid panel 2 further includes an optical coupling device 24 disposed on the back surface 202 of the circuit substrate 20. The optical coupling device 24 includes a first optical waveguide structure 240, a connecting optical waveguide structure 242, and a second optical waveguide structure 244, all of which have the same refractive index and greater than the refractive index of the surrounding environment (e.g., air). The first optical waveguide structure 240 is disposed on the circuit substrate 20 The back surface 202 is connected to the first through hole 204 at one end, so that the light generated by the light source unit 220 can be directly incident on the first optical waveguide structure 240. The first optical waveguide structure 240 includes a first inclined surface 2400 at one end of the connection first through hole 204. In practice, the first inclined surface 2400 can be at an angle of 45° with the back surface 202 of the circuit substrate 20, and due to the first optical waveguide structure The refractive index of 240 is greater than the ambient refractive index, and the light incident from the first perforation 204 is totally reflected by the first bevel 2400 to travel within the first optical waveguide structure 240, as shown by the light path L1 of FIG. The other end of the first optical waveguide structure 240 can be adjacent to the light receiving end of the optical fiber (not shown in the figure). Therefore, the light that is totally reflected by the first inclined surface 2400 and travels in the first optical waveguide structure 240 finally reaches the optical fiber. The light receiving end.

The first bevel 2400 can be coated with a film layer 2402 having an opening 2404 thereon to expose a portion of the first bevel 2400. Please note that the refractive index of the film layer 2402 is smaller than that of the first optical waveguide structure 240, so that the portion of the first slope 2400 covered with the film layer still totally reflects light. In another embodiment, the film layer 2402 can also be a metal film layer. The connecting optical waveguide structure 242 may cover the thin film layer 2402 and contact the first inclined surface 2400 through the opening 2404. Since the first optical waveguide structure 240 and the connecting optical waveguide structure 242 have the same refractive index, when the light reaches the region where the first inclined surface 2400 and the connecting optical waveguide structure 242 are in contact with each other, it is not totally reflected and penetrates into the connecting optical waveguide. The structure 242, in other words, the portion of the light generated by the light source unit 220 is totally reflected to the optical fiber, and the other portion penetrates into the connected optical waveguide structure 242. In practice, the opening 2404 can be formed by drilling a thin film layer 2402 and then being drilled on the thin film layer 2402, and the opening 2404 can be sized to make the light entering the optical waveguide structure 242 a small portion of the original light to avoid It affects the light input to the fiber. In practice, the connecting optical waveguide structure 242 is formed on the thin film layer by filling epoxy resin. 2402 is filled into opening 2404 to contact first optical waveguide structure 240.

One end of the second optical waveguide structure 244 is in contact with the connecting optical waveguide structure 242, so that light entering the connecting optical waveguide structure 242 can be further incident into the second optical waveguide structure 244. The second optical waveguide structure 224 and the connecting optical waveguide structure 242 are in contact with one end to form a second inclined surface 2440. Similarly, since the refractive index of the second optical waveguide structure 224 is greater than the refractive index of the surrounding environment, when the light travels to the second inclined surface 2440 It will be totally reflected by the second slope 2440 to travel in the second optical waveguide structure 244. The other end of the second optical waveguide structure 244 is aligned with the second through hole 206 of the circuit substrate 20, and this end further forms a third inclined surface 2442. When the light travels to the third inclined surface 2442 in the second optical waveguide structure 244, it is totally reflected by the third inclined surface 2442 to advance toward the second through hole 206. Please note that the shape of the second optical waveguide structure 244 and the inclination angle of the third inclined surface 2442 can be designed such that when the third inclined surface 2442 totally reflects the light, the light can be perpendicularly emitted from the second optical waveguide structure 244, so that it is no longer The other surfaces of the second optical waveguide structure 244 are totally reflective. As shown in FIG. 2, a portion of the light generated by the light source unit 220 enters the optical waveguide structure 242 from the opening 2404 of the thin film layer 2402, and then travels along the light path L2 to return to the second through hole 206.

The light emitted from the second optical waveguide structure 244 is finally received through the second through hole 206 to the light receiving surface of the monitoring light detecting diode 222, and the monitoring light detecting diode 222 can obtain the light source unit 220 from the received partial light. Information about the light produced, such as luminous flux. Then, the wafer 224 can perform feedback control on the light source unit 220 according to the light information detected by the monitoring light-detecting diode 222, so that the light source unit 220 can generate the required light more efficiently and accurately.

In summary, the optical coupling device of the present invention can be coupled by a first optical waveguide Constructing, connecting the optical waveguide structure and the structural configuration of the second optical waveguide structure, and guiding the light generated by the light source unit of the photoelectric converter on the photoelectric hybrid board (for example, the vertical cavity surface-emitting laser generator) to the optical fiber, And the part of the light is taken out to the monitoring light-detecting diode to obtain the light information, thereby performing feedback control. Further, the opto-electric hybrid board using the optical coupling device of the present invention has a reduced overall volume, which is advantageous for space utilization.

The present invention can also provide another opto-electric hybrid board and optical coupling device to achieve the effects of the foregoing specific embodiments. Referring to FIG. 3, FIG. 3 is a schematic diagram showing a photoelectric hybrid panel 3 according to another embodiment of the present invention. As shown in FIG. 3, the optoelectronic hybrid board 3 includes a circuit substrate 30 having a functional surface 300, a back surface 302 opposite the functional surface 300, and a through hole 304, wherein the through hole 304 penetrates the body of the circuit substrate 20.

In addition to the circuit substrate 30, the opto-electric hybrid board 3 further includes a photoelectric converter 32 disposed on the functional surface 300 of the circuit substrate 30. The photoelectric converter 32 can include a light source unit 320 and a wafer 322 connected to the light source unit 320. The wafer 322 can control the light source unit 320 to emit light with information. In detail, the wafer 322 can receive the electrical signal and carry the electrical signal. Some information is superimposed or modulated into the light emitted by the light source unit 320. The light source unit 320 is disposed on the through hole 304 of the circuit substrate 30, and the light exiting opening faces the through hole 304. Therefore, the light emitted by the light source unit 320 can pass through the through hole 304 to the other side of the circuit substrate 30.

The optoelectronic hybrid board 3 further includes an optical waveguide structure 34 disposed on the back surface 302 of the circuit substrate 30, and one end of the optical waveguide structure 34 is connected to the through hole 304 so that the light emitted by the light source unit 320 passes through the through hole 304 and enters the optical waveguide. Structure 34, in addition, the other end of optical waveguide structure 34 is adjacent to or connected to the light receiving end of the fiber. Please note that although the optical waveguide structure 34 of the present embodiment is located on the back surface 302, it is not limited in practice. The back surface 302 is touched as long as the optical waveguide structure 34 receives light in a vertical plane. One end of the optical waveguide structure 34 connecting the through holes 304 has a slope 340, and the film layer 342 is coated on the slope 340. Further, the film layer 342 has an opening 344 to expose a portion of the slope 340.

The optoelectronic hybrid panel 3 further includes a connection optical waveguide structure 36 overlying the thin film layer 342 and in direct contact with the slope 340 through the opening 344, wherein the connection optical waveguide structure 36 has substantially the same refractive index as the optical waveguide structure 34, and this The refractive index is greater than the refractive index of the surrounding environment. Therefore, when the light emitted by the light source unit 320 enters the optical waveguide structure 34, a part of the light contacts the inclined surface 340 covered by the thin film layer 342, and is totally reflected by the inclined surface 340 to advance toward the optical fiber in the optical waveguide structure 34. When another portion of the light contacts the slope 340 that is not covered by the film layer 342 (i.e., the slope 340 exposed from the opening 344), since the refractive index of the connecting optical waveguide structure 36 and the optical waveguide structure 34 are substantially the same, Therefore, part of the light is not totally reflected, but will enter the connecting optical waveguide structure 36 through the opening 344. Then, it is emitted from a vertical plane connecting the optical waveguide structures 36.

The optoelectronic hybrid panel 3 further includes a monitoring photodiode 38 that is disposed relative to the optical waveguide structure 36. The light-receiving surface 380 of the monitoring light-receiving diode 38 faces the optical waveguide structure 36 and the opening 344, and thus enters the optical waveguide structure 36 from the opening 344 and emits light from the optical waveguide structure 36, and can be monitored for the detection diode. The light receiving surface 360 of the body 36 is received. In practice, the monitoring light-detecting diode 36 can detect the received light characteristic, and the monitoring light-detecting diode 36 can be further electrically connected to the photoelectric converter 32 to transmit the detected light characteristic to the photoelectric converter. 32 to carry out feedback control. Therefore, the photoelectric hybrid panel 3 of the present embodiment can guide the light to the monitoring light-emitting diode to obtain light information, thereby performing feedback control.

The features and spirit of the present invention will be more apparent from the detailed description of the preferred embodiments. On the contrary, the intention is to cover various modifications and equivalents within the scope of the invention as claimed.

Claims (10)

An opto-electric hybrid board for converting an electrical signal into an optical signal and inputting the optical signal to an optical fiber, the optoelectronic hybrid board comprising: a circuit substrate having a functional surface and a back surface opposite to the functional surface The circuit board further includes a first through hole and a second through hole through the circuit substrate; a photoelectric converter is disposed on the functional surface, the photoelectric converter includes: a light source unit disposed on the first through hole, The light source unit is configured to generate a light passing through the first through hole; and a monitor photodiode (MPD) is disposed on the second through hole; a first optical waveguide structure is located on the circuit substrate The first optical waveguide structure has one end connected to the first through hole and the other end is adjacent to a light receiving end of the optical fiber, and the first optical waveguide structure connecting the first end of the first through hole includes a first inclined surface, the first Applying a film layer on the inclined surface, the film layer has an opening to expose a portion of the first slope; and connecting an optical waveguide structure over the film layer and passing through the opening a first inclined surface of the contact portion; and a second optical waveguide structure, one end contacting the connecting optical waveguide structure and the other end being aligned with the second through hole, the second optical waveguide structure contacting the one end of the connecting optical waveguide structure including a first a second inclined surface, and the other end of the second through hole includes a third inclined surface; wherein the first optical waveguide structure, the second optical waveguide structure and the connecting optical waveguide structure have the same refractive index; wherein the light source After the light generated by the unit passes through the first through hole into the first optical waveguide structure, a portion of the light is totally reflected by the first inclined surface and transmitted to the light receiving end of the optical fiber in the first optical waveguide structure. Another portion of the light enters the connecting optical waveguide structure through the opening, and then enters the second optical waveguide structure by the connecting optical waveguide structure, and is totally reflected by the second inclined surface and passes through the second Pierce to the monitoring light-detecting diode. The optoelectronic hybrid panel of claim 1, wherein the film layer is a metal film layer. The photoelectric hybrid panel of claim 1, wherein the light source unit is a Vertical-Cavity Surface-Emitting Laser (VCSEL), and the light is a laser light. The photoelectric hybrid board according to claim 3, wherein the vertical cavity surface-emitting laser generator is disposed on the functional surface by a flip chip, and the vertical cavity is exposed. One of the light-emitting surfaces of the type of laser generator faces the functional surface and the first perforation. The photoelectric hybrid board according to claim 1, wherein the monitoring photodiode system is provided on the functional surface by a flip chip technique, and one of the monitoring light-receiving diodes faces the functional surface. And the second perforation. The photoelectric hybrid panel of claim 1, wherein the photoelectric converter further comprises a wafer disposed on the functional surface of the circuit substrate, the wafer being electrically connected to the light source unit to control the light source unit to generate the light source unit Light. The photoelectric hybrid board of claim 6, wherein the wafer is electrically connected to the monitoring light detecting diode, and the monitoring light detecting diode transmits back information of the received light to the wafer. For feedback control. An optical coupling device for inputting an optical signal emitted by a photoelectric converter to an optical fiber, the optical converter being disposed on a circuit substrate, the circuit substrate having a first through hole and a second through hole penetrating the circuit a substrate, the light converter comprises a light source unit and a monitoring light-detecting diode respectively disposed on the first through hole and the second through hole, wherein the light source unit can generate a light through the first through hole, and the light coupling device comprises a first optical waveguide structure, one end is connected to the first through hole and the other end is adjacent to a light receiving end of the optical fiber, and the first optical waveguide structure is connected to one end of the first through hole and includes a first inclined surface, the first inclined surface Coating a film layer having an opening on the film layer to expose a portion of the first slope; a first bevel that connects the optical waveguide structure over the thin film layer and through the opening contact portion; and a second optical waveguide structure, one end of which contacts the connecting optical waveguide structure and the other end of which is aligned with the second perforation, One end of the second optical waveguide structure contacting the connecting optical waveguide structure includes a second inclined surface, and the other end aligned with the second through hole includes a third inclined surface; wherein the first optical waveguide structure and the second optical waveguide structure And the connecting optical waveguide structure has the same refractive index; wherein the light emitted by the light source unit passes through the first through hole and enters the first optical waveguide structure, and the first inclined surface totally reflects one of the light portions In the first optical waveguide structure, it is transmitted toward the light receiving end of the optical fiber, and another portion of the light enters the connecting optical waveguide structure from the opening, and then the connecting optical waveguide structure enters the second optical waveguide structure. And passing through the second inclined surface and the third inclined surface, and then passing through the second through hole to the monitoring light-detecting diode. The optical coupling device of claim 8, wherein the film layer is a metal film layer. An opto-electric hybrid board for converting an electrical signal into an optical signal and inputting the optical signal to an optical fiber, the optoelectronic hybrid board comprising: a circuit substrate having a functional surface and a back surface opposite to the functional surface The circuit substrate further includes a first through hole passing through the circuit substrate; a photoelectric converter disposed on the functional surface, the photoelectric converter comprising: a light source unit disposed on the first through hole, the light source unit is used An optical waveguide structure is disposed on the back surface of the circuit substrate, one end is connected to the first through hole and the other end is adjacent to a light receiving end of the optical fiber, and the first optical waveguide structure is connected to the optical waveguide structure. One end of the first perforation includes a beveled surface, and the inclined surface is coated with a film layer having an opening to expose a portion of the inclined surface; a connecting optical waveguide structure covering the thin film layer and contacting through the opening Part of the first bevel; a monitoring light-detecting diode disposed at the connected optical waveguide structure, the monitoring light-detecting diode comprising a light-receiving surface facing the connecting optical waveguide structure and the opening; wherein the light generated by the light source unit passes through After the first through hole enters the first optical waveguide structure, a portion of the light is partially reflected by the inclined surface covered with the thin film layer and transmitted to the light receiving end of the optical fiber in the first optical waveguide structure, and the light is further A portion passes through the opening and then enters the light receiving surface of the monitoring light-detecting diode.