TWI613798B - Printheads and a printer cartridge with high dielectric eprom cells - Google Patents

Printheads and a printer cartridge with high dielectric eprom cells Download PDF

Info

Publication number
TWI613798B
TWI613798B TW105102210A TW105102210A TWI613798B TW I613798 B TWI613798 B TW I613798B TW 105102210 A TW105102210 A TW 105102210A TW 105102210 A TW105102210 A TW 105102210A TW I613798 B TWI613798 B TW I613798B
Authority
TW
Taiwan
Prior art keywords
eprom
dielectric
print head
layer
dielectric layer
Prior art date
Application number
TW105102210A
Other languages
Chinese (zh)
Other versions
TW201637881A (en
Inventor
寧 葛
李次揚
思佳 顧
朝鑫 侯
Original Assignee
惠普發展公司有限責任合夥企業
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 惠普發展公司有限責任合夥企業 filed Critical 惠普發展公司有限責任合夥企業
Publication of TW201637881A publication Critical patent/TW201637881A/en
Application granted granted Critical
Publication of TWI613798B publication Critical patent/TWI613798B/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/14129Layer structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14072Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/17Ink jet characterised by ink handling
    • B41J2/175Ink supply systems ; Circuit parts therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/17Ink jet characterised by ink handling
    • B41J2/175Ink supply systems ; Circuit parts therefor
    • B41J2/17503Ink cartridges
    • B41J2/17526Electrical contacts to the cartridge
    • B41J2/1753Details of contacts on the cartridge, e.g. protection of contacts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/17Ink jet characterised by ink handling
    • B41J2/175Ink supply systems ; Circuit parts therefor
    • B41J2/17503Ink cartridges
    • B41J2/17543Cartridge presence detection or type identification
    • B41J2/17546Cartridge presence detection or type identification electronically
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/13Heads having an integrated circuit

Abstract

於依據本揭示之一範例中,具有數個高介電可抹除可規劃唯讀記憶體(EPROM)胞元之一列印頭被說明。該列印頭是用以沉積流體至一列印媒體上。該列印頭也包括數個EPROM胞元。各個EPROM胞元包括具有一源極和一汲極之一基片、藉由一第一介電質層而與該基片分離的一浮動閘極、以及藉由一第二介電質層而與該浮動閘極分離的一控制閘極。該第二介電質層包括一高介電常數材料。 In an example according to the present disclosure, a print head having several high-dielectric erasable and programmable read-only memory (EPROM) cells is illustrated. The print head is used to deposit fluid onto a print medium. The print head also includes several EPROM cells. Each EPROM cell includes a substrate having a source and a drain, a floating gate separated from the substrate by a first dielectric layer, and a second dielectric layer A control gate separate from the floating gate. The second dielectric layer includes a high dielectric constant material.

Description

具高介電可抹除可規劃唯讀記憶體胞元之列印頭及列印機墨匣 Print head and printer cartridge with high dielectric, erasable and programmable read-only memory cells 發明領域 Field of invention

本發明係有關於具高介電可抹除可規劃唯讀記憶體胞元之列印頭。 The invention relates to a print head with high dielectric erasable and programmable read-only memory cells.

發明背景 Background of the invention

一記憶體系統可以使用以儲存資料。於一些範例中,成像裝置,例如,列印頭可以包括用以儲存關於在其他型式資訊中之列印機墨匣辨識資訊、安全資訊、以及認證資訊的記憶體。 A memory system can be used to store data. In some examples, the imaging device, for example, the print head may include memory for storing printer identification information, security information, and authentication information about other types of information.

發明概要 Summary of invention

依據本發明之一實施例,係特地提出一種具有數個高介電可抹除可規劃唯讀記憶體(EPROM)胞元之列印頭,該列印頭包含:數個噴嘴,其用以沉積一數量的流體至一列印媒體上,各個噴嘴包含:一發射容室,其用以保持該數量的流體;一開孔,其用以分配該數量的流體至該列印媒體上;及一噴射器,其用以經過該開孔而噴射該數量的流體;以及數個EPROM胞元,各個EPROM胞元包含:一基 片,其具有配置於其中的一源極和一汲極;一浮動閘極,其藉由一第一介電質層而與該基片分離;及一控制閘,其藉由一第二介電質層而與該浮動閘極分離;其中該第二介電質層包含一高介電常數材料。 According to an embodiment of the present invention, a print head having a plurality of high-dielectric erasable and programmable read-only memory (EPROM) cells is specifically proposed. The print head includes: a plurality of nozzles, which are used for Depositing a quantity of fluid onto a printing medium, each nozzle comprising: a launching chamber for holding the quantity of fluid; an opening for distributing the quantity of fluid onto the printing medium; and a An ejector for ejecting the quantity of fluid through the opening; and several EPROM cells, each EPROM cell including: a base A chip having a source and a drain disposed therein; a floating gate separated from the substrate by a first dielectric layer; and a control gate by a second dielectric A dielectric layer is separated from the floating gate; wherein the second dielectric layer includes a high dielectric constant material.

100‧‧‧列印系統 100‧‧‧printing system

102‧‧‧計算裝置 102‧‧‧ Computing Device

106‧‧‧控制器 106‧‧‧controller

108‧‧‧處理器 108‧‧‧ processor

110‧‧‧資料儲存裝置 110‧‧‧data storage device

112‧‧‧流體供應器 112‧‧‧ Fluid Supply

114‧‧‧列印機墨匣 114‧‧‧Printer cartridge

116‧‧‧列印頭 116‧‧‧Print head

124‧‧‧噴嘴 124‧‧‧Nozzle

126‧‧‧列印媒體 126‧‧‧Print media

130‧‧‧電源供應 130‧‧‧Power supply

134‧‧‧高介電EPROM陣列 134‧‧‧High Dielectric EPROM Array

248‧‧‧高介電EPROM胞元 248‧‧‧High Dielectric EPROM Cell

336‧‧‧彈性電纜線 336‧‧‧Flexible cable

338‧‧‧導電墊片 338‧‧‧Conductive gasket

342‧‧‧噴射器 342‧‧‧Ejector

344‧‧‧發射容室 344‧‧‧ launch container

346‧‧‧開孔 346‧‧‧Opening

450‧‧‧控制閘 450‧‧‧Control gate

452‧‧‧浮動閘極 452‧‧‧ floating gate

454‧‧‧基片 454‧‧‧ Substrate

456‧‧‧源極 456‧‧‧Source

458‧‧‧汲極 458‧‧‧ Drain

460‧‧‧第一介電層 460‧‧‧First dielectric layer

462‧‧‧多晶矽層 462‧‧‧Polycrystalline silicon layer

464‧‧‧第一傳導層 464‧‧‧The first conductive layer

466‧‧‧第二介電層 466‧‧‧Second dielectric layer

468‧‧‧第二傳導層 468‧‧‧Second conductive layer

478‧‧‧第三介電層 478‧‧‧ third dielectric layer

570‧‧‧浮動閘極電壓 570‧‧‧floating gate voltage

572‧‧‧施加電壓 572‧‧‧ Applied voltage

574‧‧‧控制閘極電容 574‧‧‧Control gate capacitance

576‧‧‧浮動閘極電容 576‧‧‧Floating gate capacitor

680‧‧‧憶阻器 680‧‧‧ Memristor

684‧‧‧第一電極 684‧‧‧first electrode

686‧‧‧切換氧化物 686‧‧‧Switch oxide

688‧‧‧第二電極 688‧‧‧Second electrode

688-1‧‧‧第二電極第一子層 688-1‧‧‧Second electrode first sublayer

688-2‧‧‧第二電極第二子層 688-2‧‧‧second electrode second sublayer

690‧‧‧發射電阻器第一層 690‧‧‧Transmitting resistor first layer

692‧‧‧發射電阻器第二層 692‧‧‧Laser resistor second layer

694‧‧‧發射電阻器第三層 694‧‧‧Third layer of transmitting resistor

696、699‧‧‧列印頭被動層 696, 699‧‧‧Print head passive layer

698-1‧‧‧第一電晶體 698-1‧‧‧First transistor

698-2‧‧‧第二電晶體 698-2‧‧‧Second transistor

附圖例示此處說明之原理的各種範例並且是說明文之一部份。所例示之範例不限定於申請專利範圍之範疇。 The drawings illustrate various examples of the principles described herein and are a part of the description. The illustrated examples are not limited to the scope of patent application.

圖1是依據此處所說明原理之一範例的一列印系統圖解。 FIG. 1 is a diagram of a printing system according to an example of the principles described herein.

圖2是依據此處所說明原理之一範例而使用具有數個高介電可抹除可規劃唯讀記憶體(EPROM)胞元之一列印頭的一列印機墨匣之一方塊圖解。 FIG. 2 is a block diagram of a printer cartridge using a print head with several high-dielectric erasable programmable read-only memory (EPROM) cells in accordance with an example of the principles described herein.

圖3A是依據此處所說明原理之一範例而具有數個高介電EPROM胞元之一列印機墨匣的一圖解。 FIG. 3A is a diagram of a printer cartridge having one of several high-dielectric EPROM cells in accordance with an example of the principles described herein.

圖3B是依據此處所說明原理之範例而具有數個高介電EPROM胞元之一列印機墨匣的一橫截面圖解。 3B is a cross-sectional illustration of a printer cartridge having one of several high-dielectric EPROM cells in accordance with an example of the principles described herein.

圖3C是依據此處所說明原理之範例而具有數個高介電EPROM胞元之一列印頭的一橫截面圖解。 3C is a cross-sectional illustration of a print head having one of several high-dielectric EPROM cells in accordance with an example of the principles described herein.

圖4A是依據此處所說明原理之範例的一高介電EPROM胞元之一電路圖解。 FIG. 4A is a circuit diagram of a high-dielectric EPROM cell according to an example of the principles described herein.

圖4B是依據此處所說明原理之範例的一高介電EPROM胞元之一橫截面圖。 4B is a cross-sectional view of a high-dielectric EPROM cell according to an example of the principles described herein.

圖5是依據此處所說明原理之範例而具有一高介 電EPROM胞元之一列印頭的一電路圖解。 Figure 5 is an example of a principle based on the principles described here. A circuit diagram of a print head of one of the EPROM cells.

圖6是依據此處所說明原理之範例而包括一高介電EPROM胞元、一憶阻器、以及一發射電阻器之一列印頭的一橫截面圖。 6 is a cross-sectional view of a print head including a high-dielectric EPROM cell, a memristor, and an emission resistor according to an example of the principles described herein.

於整體圖形中,相同參考號碼指示相似,但不必定得是相同的元件。 In the overall drawings, the same reference numbers indicate similar, but not necessarily the same components.

較佳實施例之詳細說明 Detailed description of the preferred embodiment

記憶體裝置被使用以儲存用於一列印機墨匣之資訊。列印機墨匣包括用以儲存關於列印頭之操作資訊的記憶體。例如,一列印頭可以包括用以儲存資訊之記憶體,該資訊是關於1)列印頭;關於2)流體,例如,為該列印頭所使用之墨水;或關於3)該列印頭之使用和維修。可以儲存在一列印頭上之其他資訊範例,包括關於在其他型式流體或成像裝置相關資料之中的資訊,包括:1)一流體供應資訊,2)流體辨識資訊,3)流體特徵資訊,以及4)流體使用資料。可以被儲存的更多資訊範例包括在其他型式資訊中之辨識資訊、序號、安全資訊、特點資訊、防偽(ACF)資訊。雖然列印頭上之記憶體利用是所需的,改變情況可以減低它們儲存資訊之功效。 A memory device is used to store information for a printer cartridge. The printer cartridge includes memory to store information about the operation of the print head. For example, a print head may include memory to store information about 1) the print head; about 2) fluid, for example, the ink used for the print head; or about 3) the print head Use and maintenance. Examples of other information that can be stored on a printhead, including information about other types of fluid or imaging device related data, including: 1) a fluid supply information, 2) fluid identification information, 3) fluid characteristics information, and ) Fluid usage information. Examples of more information that can be stored include identification information, serial numbers, security information, feature information, and anti-counterfeiting (ACF) information among other types of information. Although memory utilization on print heads is required, changing circumstances can reduce their effectiveness in storing information.

例如,仿冒之增加趨勢可能致使目前記憶體裝置因太小而無法含有充分的防偽資訊和安全及認證資訊。此外,由於忠誠顧客獎勵規劃、經過雲端列印和其他列印結構之新的業務模組以及其他顧客關係管理規劃、另外的市 場資料、顧客鑑賞數值資訊、加密資訊、以及在上升中之其他型式資訊,一製造商可能要求儲存更多資訊於一列印機墨匣之一記憶體裝置上。 For example, the increasing trend of counterfeiting may cause current memory devices to be too small to contain sufficient security information and security and authentication information. In addition, due to loyal customer reward planning, new business modules through cloud printing and other printing structures, and other customer relationship management planning, additional marketing For field data, customer appreciation value information, encrypted information, and other types of information on the rise, a manufacturer may request to store more information on a memory device in a printer cartridge.

此外,隨著新的技術產生,電路空間是非常珍貴的。因此,對於在一裝置之內佔用較小空間之較大數量的資料儲存可能是所需的。可抹除可規劃唯讀記憶體(EPROM)胞元由於它們的簡單構造、非消逝性、以及有效的資料儲存而可以被使用。EPROM陣列包括行和列之一傳導網格。安置在列和行之相交處的EPROM胞元具有兩個閘極,其是藉由一介電層而彼此分離。該等閘極之一者被稱為一浮動閘極並且另一者被稱為一控制閘極。一邏輯數值可以藉由允許電流流通過、或防止電流流通過該EPROM胞元之任一者而被表示。換句話說,一EPROM胞元之邏輯數值可以藉由該EPROM胞元之電阻被判定。此一電阻是取決於在該EPROM胞元之浮動閘極的電壓。雖然該等EPROM胞元可以作為有益的記憶體儲存裝置,它們的使用呈現出數個錯雜性。 In addition, as new technologies are created, circuit space is very precious. Therefore, a larger amount of data storage that occupies less space within a device may be required. Erasable and Programmable Read-Only Memory (EPROM) cells can be used because of their simple structure, non-erasability, and efficient data storage. The EPROM array includes a conductive grid of one of rows and columns. EPROM cells placed at the intersection of columns and rows have two gates that are separated from each other by a dielectric layer. One of these gates is called a floating gate and the other is called a control gate. A logical value can be expressed by either allowing current to flow or preventing current from flowing through the EPROM cell. In other words, the logical value of an EPROM cell can be determined by the resistance of the EPROM cell. This resistance is dependent on the voltage of the floating gate in the EPROM cell. Although such EPROM cells can be used as useful memory storage devices, their use presents several intricacies.

例如,列印頭藉由沉積材料層於一基片表面上而被形成。因一EPROM胞元包括二個閘極,多重另外的材料層被使用以形成這些的EPROM胞元。該等另外的層增加列印頭厚度以及該列印頭之整體大小。此外,如將在下面之說明,為了產生容易地自介電層讀取及被寫入至該介電層的一EPROM,亦即,在該EPROM胞元的一控制閘極和一浮動閘極之間的層,可能是相當地厚,其厚度進一步地增加 作為一記憶體儲存裝置之EPROM的大小和無效率性。 For example, a print head is formed by depositing a layer of material on a substrate surface. Because an EPROM cell includes two gates, multiple additional layers of material are used to form these EPROM cells. The additional layers increase the print head thickness and the overall size of the print head. In addition, as will be explained below, in order to generate an EPROM that is easily read from and written to a dielectric layer, that is, a control gate and a floating gate in the EPROM cell The layers in between may be quite thick, and their thickness is further increased The size and inefficiency of EPROM as a memory storage device.

因此,本揭示說明具有減輕這些和其他錯雜性之EPROM胞元的一列印頭。例如,一EPROM胞元可以使用一記憶性電容器形成一部份EPROM胞元而被形成。更明確地說,一第一傳導層,其形成浮動閘極之部份,可以是藉由一介電層而與形成該控制閘極之一第二傳導層分離。該介電層可以是由具有一高介電常數的一氧化物材料所形成。使用具有高介電常數氧化物材料之此一夾層作為在二導電、或金屬平板之間的介電質材料,可以允許一較薄的EPROM胞元被形成而同時保持用於有效的記憶體儲存之一充分電容。 Thus, this disclosure illustrates a printhead with EPROM cells that mitigate these and other complications. For example, an EPROM cell can be formed using a memory capacitor to form a portion of the EPROM cell. More specifically, a first conductive layer, which forms a part of the floating gate, may be separated from a second conductive layer forming one of the control gates by a dielectric layer. The dielectric layer may be formed of an oxide material having a high dielectric constant. Using this interlayer with a high dielectric constant oxide material as a dielectric material between two conductive, or metal flat plates, allows a thinner EPROM cell to be formed while retaining it for efficient memory storage One is fully capacitive.

更明確地說,本揭示說明具有數個高介電可抹除可規劃唯讀記憶體(EPROM)胞元之一列印頭。該列印頭包括用以沉積一數量的流體至一列印媒體上之數個噴嘴。各噴嘴包括用以保持該數量的流體之一發射容室、用以分配該數量的流體至該列印媒體上的一開孔、以及用以經過該開孔而噴射該數量的流體之一噴射器。該列印頭同時也包括數個EPROM胞元。各EPROM胞元包括一基片(其具有配置於其中的一源極和一汲極)、藉由一第一介電層而與該基片分離的一浮動閘極、以及藉由一第二介電層而與該浮動閘極分離的一控制閘極。該第二介電層包括一高介電常數材料。 More specifically, this disclosure illustrates a print head having one of several high-dielectric erasable and programmable read-only memory (EPROM) cells. The print head includes a plurality of nozzles for depositing a quantity of fluid onto a print medium. Each nozzle includes a firing chamber for holding one of the quantity of fluid, an opening for distributing the quantity of fluid to the printing medium, and one for ejecting the quantity of fluid through the opening. Device. The print head also includes several EPROM cells. Each EPROM cell includes a substrate having a source and a drain disposed therein, a floating gate separated from the substrate by a first dielectric layer, and a second gate by a second dielectric layer. A control gate separated from the floating gate by a dielectric layer. The second dielectric layer includes a high dielectric constant material.

本揭示也說明具有數個高介電EPROM胞元之一列印機墨匣。該列印機墨匣包括一流體供應器以及用以將 來自該流體供應器之流體沉積至一列印媒體上的列印頭。該列印頭包括數個EPROM胞元。各EPROM胞元包括一基片(其具有配置於其中的一源極和一汲極)、藉由一第一介電層而與該基片分離的一多晶矽層、以及藉由一第三介電層而與該多晶矽層分離的一第一傳導層。該第一傳導層經過該第三介電層中之一間隙而接觸該多晶矽層,並且該第一傳導層和該多晶矽層形成該EPROM胞元之一浮動閘極。同時該列印頭也包括藉由一第二介電層而與該第一傳導層分離的一第二傳導層。該第二傳導層形成該EPROM胞元之一控制閘極並且該第二介電層具有一高介電常數。 This disclosure also illustrates a printer cartridge having one of several high-dielectric EPROM cells. The printer cartridge includes a fluid supply and a The fluid from the fluid supply is deposited on a print head on a print medium. The print head includes several EPROM cells. Each EPROM cell includes a substrate having a source and a drain disposed therein, a polycrystalline silicon layer separated from the substrate by a first dielectric layer, and a third dielectric A first conductive layer separated from the polycrystalline silicon layer; The first conductive layer contacts the polycrystalline silicon layer through a gap in the third dielectric layer, and the first conductive layer and the polycrystalline silicon layer form a floating gate of the EPROM cell. At the same time, the print head also includes a second conductive layer separated from the first conductive layer by a second dielectric layer. The second conductive layer forms a control gate of the EPROM cell and the second dielectric layer has a high dielectric constant.

採用高介電EPROM胞元之一列印機墨匣和一列印頭可以EPROM記憶體之形式而提供記憶體儲存部至一列印頭,而減低被使用以形成該列印頭的層數和層厚度。此外,被使用以形成EPROM之該等層可以對應至被使用以形成其他構件(例如,列印頭之發射電阻器和憶阻器)的層。因此,設定之數個層可以協同採用以形成該等EPROM記憶體胞元。 Using a high-dielectric EPROM cell printer cartridge and a print head can provide a memory storage section to a print head in the form of EPROM memory, and reduce the number of layers and layer thickness used to form the print head . In addition, the layers used to form the EPROM may correspond to layers used to form other components, such as the emission resistors and memristors of a print head. Therefore, several layers set can be used cooperatively to form the EPROM memory cells.

如於本說明文中和附加申請專利範圍中所使用地,詞語“列印機墨匣”可以是涉及被使用於將墨水、或其他流體噴射至一列印媒體上的一裝置。通常,一列印機墨匣可以是分配流體(例如,墨水、蠟、聚合物、或其他流體)之一流體噴射裝置。一列印機墨匣可以包括一列印頭。於一些範例中,一列印頭係可以使用於列印機、圖形繪圖機、影印機、以及傳真機器中。於這些範例中,一列印頭可以 將墨水、或另一流體噴射至一媒體(例如,紙張)上,以形成所需的影像或所需的三維幾何形狀。 As used in this description and in the scope of the additional patent application, the term "printer cartridge" may refer to a device used to eject ink, or other fluids, onto a print medium. Generally, a printer cartridge may be a fluid ejection device that dispenses a fluid (eg, ink, wax, polymer, or other fluid). A printer cartridge may include a print head. In some examples, a print head can be used in printers, graphics plotters, photocopiers, and fax machines. In these examples, a print head can Ink, or another fluid, is sprayed onto a medium (e.g., paper) to form a desired image or a desired three-dimensional geometry.

因此,如於本說明文中和附加申請專利範圍中所使用地,詞語“列印機”是表示將廣泛地理解作為能夠選擇性地將一流體置放至一列印媒體上的任何裝置。於一範例中,該列印機是一噴墨列印機。於另一範例中,該列印機是一三維列印機。然而於另一範例中,該列印機是一數位滴定裝置。 Therefore, as used in this description and in the scope of the appended patent application, the word "printer" is meant to be broadly understood as any device capable of selectively placing a fluid on a print medium. In one example, the printer is an inkjet printer. In another example, the printer is a three-dimensional printer. However, in another example, the printer is a digital titration device.

更進一步地,如於本說明文中和於附加申請專利範圍中所使用地,詞語“流體”是表示將廣泛地理解作為在一施加的剪切應力之下連續地變形的任何物質。於一範例中,一流體可以是一藥物。於另一範例中,該流體可以是一墨水。於另一範例中,該流體可以是一液體。 Furthermore, as used in this description and in the scope of the additional patent application, the word "fluid" means any substance that is widely understood as continuously deforming under an applied shear stress. In one example, a fluid may be a drug. In another example, the fluid may be an ink. In another example, the fluid may be a liquid.

更進一步地,如於本說明文中和於附加申請專利範圍中所使用地,詞語“列印媒體”是表示將廣泛地理解作為任何表面,其中自一列印機墨匣之一噴嘴所噴射的一流體可以被沉積至該表面上。於一範例中,該列印媒體可以是紙張。於另一範例中,該列印媒體可以是一可食用基片。然而於另一範例中,該列印媒體可以是一藥丸。 Furthermore, as used in this description and in the scope of the appended patent application, the word "printing medium" is used to mean a broad understanding of any surface in which a nozzle ejected from a nozzle of a printer cartridge Fluid can be deposited on the surface. In one example, the print medium may be paper. In another example, the print medium may be an edible substrate. However, in another example, the print medium may be a pill.

更進一步地,如於本說明文中和於附加申請專利範圍中所使用地,詞語“憶阻器”可以是涉及一被動式兩端點電路元件,其維持在電流的時間積分和電壓的時間積分之間的一函數關係。 Furthermore, as used in this description and in the scope of additional patent applications, the word "memristor" may refer to a passive two-point circuit element that is maintained between the time integral of current and the time integral of voltage. A functional relationship between them.

更進一步地,如於本說明文中和於附加申請專利 範圍中所使用地,詞語“高電介質”可以是涉及包括具有較大於6之一介電質常數的一介電層之任何結構。例如,一高介電EPROM可以是具有至少一介電層(亦即,具有較大於6的一介電質常數之第二介電層)的一EPROM。同樣地,一高介電氧化物材料可以是具有較大於6之一介電質常數的一氧化物材料。 Further, as in this description and in additional patent applications As used in the context, the term "high dielectric" may refer to any structure that includes a dielectric layer having a dielectric constant greater than one of six. For example, a high dielectric EPROM may be an EPROM having at least one dielectric layer (ie, a second dielectric layer having a dielectric constant greater than 6). Similarly, a high dielectric oxide material may be an oxide material having a dielectric constant greater than one of six.

更進一步地,如於本說明文中和於附加申請專利範圍中所使用地,詞語“短通道”可以是涉及具有一短通道長度的一電晶體。例如,該通道,在源極和汲極之間的空間,可以是為消耗層寬度之相同級數。如一數值範例,在一短通道電晶體的一源極和一汲極之間的距離可以是較小於2.4微米(micron)。 Furthermore, as used in this description and in the scope of the additional patent application, the word "short channel" may refer to a transistor having a short channel length. For example, the space between the source and the drain of the channel can be the same number of stages for the width of the consumption layer. As a numerical example, the distance between a source and a drain of a short-channel transistor may be smaller than 2.4 micron.

再進一步地,如於本說明文中和於附加申請專利範圍中所使用地,除非本文脈絡清楚地表明,否則"一"、"一個"、以及"該"也是意欲包括複數形式。 Still further, as used in this specification and in the scope of additional patent applications, unless clearly indicated by the context herein, "a", "an", and "the" are intended to include the plural.

再進一步地,如於本說明文中和於附加申請專利範圍中所使用地,詞語“數個”或相似語言可以包括任何正數(包括1至無窮大),但不包括零,零不算是一正數。 Still further, as used in this description and in the scope of additional patent applications, the word "several" or similar language may include any positive number (including 1 to infinity), but excluding zero, which is not a positive number.

在下面的說明中,為了說明之目的,許多特定細節被提出以便提供對本系統和方法之完全地了解。但是,一熟習本技術者應明白,本設備、系統、和方法可以被實施而不必這些特定細節。說明文中涉及“一範例”或相似語言意謂著上述之一特定的特點、結構、或特性是包括在至少一範例中,但不必定得是在其他範例中。 In the following description, for the purposes of illustration, many specific details are set forth in order to provide a thorough understanding of the system and method. However, those skilled in the art will understand that the devices, systems, and methods may be implemented without these specific details. The reference to "an example" or similar language in the description means that one of the specific features, structures, or characteristics mentioned above is included in at least one example, but not necessarily in other examples.

接著轉至圖形,圖1是依據此處所說明原理之範例而具有一列印機墨匣(114)和列印頭(116)之一列印系統(100)的圖解。於一些範例中,列印系統(100)可以包括在一列印機之上。該系統(100)包括具有一計算裝置(102)之一介面。該介面致能系統(100),並且明確地說,該處理器(108)用以介面於各種硬體元件,例如,外接於及內接於該系統(100)之計算裝置(102)。外部裝置之其他範例包括外部儲存裝置、網路裝置(例如,伺服器)、開關、路由器、以及在其他型式的外部裝置之中的客戶裝置。 Turning next to the figure, FIG. 1 is a diagram of a printing system (100) having a printer cartridge (114) and a print head (116) according to an example of the principles described herein. In some examples, the printing system (100) may be included on a printer. The system (100) includes an interface having a computing device (102). The interface enables the system (100), and specifically, the processor (108) is used to interface to various hardware components, such as a computing device (102) external to and internal to the system (100). Other examples of external devices include external storage devices, network devices (eg, servers), switches, routers, and client devices among other types of external devices.

通常,計算裝置(102)可以是任何來源,系統(100)可以自該來源接收資料,該資料描述將藉由控制器(106)所執行的一作業,以便將流體噴射至列印媒體(126)上。例如,經由該介面,該控制器(106)自該計算裝置(102)接收資料並且暫時地儲存該資料於資料儲存裝置(110)中。資料可以沿著一電器、紅外線、光學、或其他資訊轉移路徑被傳送至該控制器(106)。該資料可以代表將被列印之一文件及/或檔案。因此,資料形成一作業並且包括作業命令及/或命令參數。 Generally, the computing device (102) can be from any source, and the system (100) can receive data from that source, which describes a job to be performed by the controller (106) to eject fluid to the print medium (126 )on. For example, via the interface, the controller (106) receives data from the computing device (102) and temporarily stores the data in the data storage device (110). Data can be transmitted to the controller (106) along an electrical, infrared, optical, or other information transfer path. This information may represent one document and / or file to be printed. Therefore, the data forms a job and includes job commands and / or command parameters.

一控制器(106)包括一處理器(108)、一資料儲存裝置(110)、以及用以與列印頭(116)通訊和控制該列印頭(116)之其他電器。該控制器(106)自該計算裝置(102)接收資料並且暫時地儲存該資料於資料儲存裝置(110)中。 A controller (106) includes a processor (108), a data storage device (110), and other electrical appliances for communicating with and controlling the print head (116). The controller (106) receives data from the computing device (102) and temporarily stores the data in a data storage device (110).

控制器(106)控制列印頭(116)以自噴嘴(124)噴射流體。例如,該控制器(106)界定形成文字、符號、及/或其 他圖形或影像於列印媒體(126)上的一噴射流體點滴之樣型。噴射流體點滴之樣型藉由自計算裝置(102)所接收的列印作業命令及/或命令參數而被判定。該控制器(106)可以是,例如,一列印機上之一特定應用積體電路(ASIC),以基於集成於列印頭(116)上之EPROM胞元的電阻數值而判定列印頭(116)中之流體液位。該ASIC可以包括一電源和一類比至數位轉換器(ADC)。該ASIC轉換呈現在該電源之一電壓以判定一EPROM胞元之一電阻,並且接著經過該ADC判定一對應的數位電阻數值。電腦可讀取程式碼,經過可執行指令被執行,致能電阻判定以及經過該ADC之隨後的數位轉換。 A controller (106) controls the print head (116) to eject fluid from a nozzle (124). For example, the controller (106) defines the words, symbols, and / or The pattern of other graphics or images on a print medium (126) as a jet of fluid. The pattern of the ejected fluid droplets is determined by a print job command and / or command parameters received from the computing device (102). The controller (106) may be, for example, an application specific integrated circuit (ASIC) on a printer to determine the print head based on the resistance value of the EPROM cell integrated on the print head (116). 116) fluid level. The ASIC may include a power supply and an analog-to-digital converter (ADC). The ASIC converts a voltage present at the power source to determine a resistance of an EPROM cell, and then passes the ADC to determine a corresponding digital resistance value. The computer can read the code, execute the executable instructions, enable the resistance determination, and then perform the digital conversion of the ADC.

處理器(108)可以包括硬體結構以自資料儲存裝置(110)取得可執行的程式碼並且執行該可執行程式碼。當藉由處理器(108)執行時,該可執行程式碼可以導致該處理器(108)實行至少噴射流體至列印媒體(126)上之功能。當藉由處理器(108)執行時,該可執行程式碼也可以導致該處理器(108)實行提供指令至電源供應(130)之功能,以至於該電源供應(130)提供電力至系統(100)之構件。 The processor (108) may include a hardware structure to obtain executable code from the data storage device (110) and execute the executable code. When executed by the processor (108), the executable code can cause the processor (108) to perform a function of at least ejecting fluid onto the print medium (126). When executed by the processor (108), the executable code can also cause the processor (108) to perform the function of providing instructions to the power supply (130), so that the power supply (130) provides power to the system ( 100).

資料儲存裝置(110)可以儲存資料,例如,藉由處理器(108)或其他處理裝置所執行之可執行程式碼。該資料儲存裝置(110)可以特定地儲存代表處理器(108)執行之數個應用程式的電腦程式碼,以實行至少如此處所說明之功能。 The data storage device (110) may store data, for example, executable code executed by a processor (108) or other processing device. The data storage device (110) may specifically store computer program code representing several application programs executed by the processor (108) to perform at least the functions described herein.

資料儲存裝置(110)可以包括各種型式之記憶體 模數,其包括依電性和非依電性記憶體。例如,本範例之資料儲存裝置(110)包括隨機存取記憶體(RAM)、唯讀記憶體(ROM)、以及硬碟驅動器(HDD)記憶體。許多其他型式的記憶體也可以被採用,並且本說明文預期於資料儲存裝置(110)中許多變化型式記憶體的使用可以適用於此處所說明之原理的一特定應用。在某些範例中,資料儲存裝置(110)中不同型式的記憶體可以使用於不同的資料儲存需求。例如,在某些範例中,該處理器(108)可以自唯讀記憶體(ROM)啟動、維持非依電性儲存於硬碟驅動器(HDD)記憶體中、以及執行儲存於隨機存取記憶體(RAM)中之程式碼。 The data storage device (110) may include various types of memory Modulus, which includes electrical and non-electrical memory. For example, the data storage device (110) of this example includes a random access memory (RAM), a read-only memory (ROM), and a hard disk drive (HDD) memory. Many other types of memory can also be used, and this description anticipates that the use of many variants of memory in the data storage device (110) can be adapted to a particular application of the principles described herein. In some examples, different types of memory in the data storage device (110) can be used for different data storage requirements. For example, in some examples, the processor (108) may be booted from read-only memory (ROM), maintained non-electrically stored in hard disk drive (HDD) memory, and executed in random access memory Code in the RAM (RAM).

通常,資料儲存裝置(110)可以包括一電腦可讀取媒體、一電腦可讀取儲存媒體、或一非暫態電腦可讀取媒體、等等。例如,該資料儲存裝置(110)可以是一電子式、磁式、光學式、電磁式、紅外線、或半導體系統、設備、或裝置、或上述之任何適當組合。電腦可讀取儲存媒體之更多特定範例可以包括,例如,下列者:具有數條線路之一電氣連接、一輕便型電腦磁盤、一硬碟、一隨機存取記憶體(RAM)、一唯讀記憶體(ROM)、一可抹除可規劃唯讀記憶體(EPROM或快閃記憶體)、一輕便型小型碟片唯讀記憶體(CD-ROM)、一光學儲存裝置、一磁式儲存裝置、或上述之任何適當組合。在這文件之脈絡中,一電腦可讀取儲存媒體可以是任何有形體的媒體,其可以含有或儲存電腦可使用程式碼以供一指令執行系統、設備、或裝置之使用或與其連接。於另一範例中,一電腦可讀取儲存媒體可以 是任何非暫態媒體,其可以含有或儲存一程式以供一指令執行系統、設備、或裝置之使用或與其連接。 Generally, the data storage device (110) may include a computer-readable medium, a computer-readable storage medium, or a non-transitory computer-readable medium, and so on. For example, the data storage device (110) may be an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, device, or device, or any suitable combination of the foregoing. More specific examples of computer-readable storage media may include, for example, the following: an electrical connection with one of several lines, a portable computer diskette, a hard disk drive, a random access memory (RAM), a unique memory Read memory (ROM), an erasable and programmable read-only memory (EPROM or flash memory), a compact compact disc read-only memory (CD-ROM), an optical storage device, a magnetic type A storage device, or any suitable combination of the foregoing. In the context of this document, a computer-readable storage medium can be any tangible medium that can contain or store computer-usable code for use by or connected to an instruction execution system, device, or device. In another example, a computer-readable storage medium may Is any non-transitory medium that can contain or store a program for use by or in connection with a command execution system, device, or device.

列印系統(100)包括一列印機墨匣(114),該列印機墨匣(114)包括一列印頭(116)和一流體供應器(112)。該列印機墨匣(114)可以是可自該系統(100)移除的,例如,作為一可替換之列印機墨匣(114)。 The printing system (100) includes a printer cartridge (114). The printer cartridge (114) includes a print head (116) and a fluid supply (112). The printer cartridge (114) may be removable from the system (100), for example, as a replaceable printer cartridge (114).

列印機墨匣(114)包括一列印頭(116),其經過複數個噴嘴(124)朝向一列印媒體(126)噴射流體點滴。該列印媒體(126)可以是任何型式之適當的薄片或滾動材料,例如,紙張、卡片紙、透明膠片、聚酯、膠合板、泡沫板、布料、帆布、以及其類似者。於另一範例中,該列印媒體(126)可以是一可食用基片。再於另一個範例中,該列印媒體(126)可以是一藥丸。 The printer cartridge (114) includes a print head (116) that ejects fluid droplets toward a print medium (126) through a plurality of nozzles (124). The print medium (126) may be any type of suitable sheet or rolling material, such as paper, card stock, transparencies, polyester, plywood, foam board, cloth, canvas, and the like. In another example, the print medium (126) may be an edible substrate. In yet another example, the print medium (126) may be a pill.

噴嘴(124)可以行或陣列被配置,以至於當列印頭(116)和列印媒體(126)彼此相對地移動時,來自該等噴嘴(124)的流體之噴射適當地被排序而導致文字、符號、及/或其他圖形或影像被列印在列印媒體(126)上。於一範例中,發射的該等數個噴嘴(124)可以是較小於在該列印頭(116)上可用的和所界定的噴嘴(124)總數目之一數目。 The nozzles (124) can be arranged in rows or arrays, so that when the print head (116) and the print medium (126) move relative to each other, the jets of fluid from the nozzles (124) are properly ordered, resulting in Text, symbols, and / or other graphics or images are printed on the print medium (126). In one example, the number of nozzles (124) emitted may be smaller than one of the total number of nozzles (124) available and defined on the print head (116).

列印機墨匣(114)也包括一流體供應器(112)以供應一數量的流體至列印頭(116)。通常,流體在流體供應器(112)和列印頭(116)之間流動。於一些範例中,被供應至列印頭(116)之一部份的流體在操作期間被消耗並且列印期間未被消耗之流體返回至該流體供應器(112)。 The printer cartridge (114) also includes a fluid supply (112) to supply a quantity of fluid to the print head (116). Generally, fluid flows between the fluid supply (112) and the print head (116). In some examples, the fluid supplied to a portion of the print head (116) is consumed during operation and the fluid not consumed during printing is returned to the fluid supply (112).

於一些範例中,一架置總成相對於一媒體輸送總成而置放列印頭(116),並且媒體輸送總成相對於列印頭(116)而置放該列印媒體(126)。因此,一列印區(128),藉由虛線框所表示,被界定而相鄰至在該列印頭(116)和該列印媒體(126)之間的一區域中之該等噴嘴(124)。於一範例中,該列印頭(116)是一掃描型式列印頭(116)。因而,該架置總成包括一輸送筒用以相對至該媒體輸送總成而移動該列印頭(116)以掃描列印媒體(126)。於另一範例中,該列印頭(116)是一非掃描型式列印頭(116)。因而,該架置總成固定該列印頭(116)在相對至該媒體輸送總成之一預定位置。因此,該媒體輸送總成相對至該列印頭(116)而置放該列印媒體(126)。 In some examples, a mounting assembly places a print head (116) relative to a media transport assembly, and a media transport assembly places the print medium (126) relative to the print head (116). . Therefore, a printing area (128), represented by a dashed frame, is defined adjacent to the nozzles (124) in an area between the printing head (116) and the printing medium (126). ). In one example, the print head (116) is a scan-type print head (116). Thus, the mounting assembly includes a transport cylinder for moving the print head (116) relative to the media transport assembly to scan the print medium (126). In another example, the print head (116) is a non-scanning print head (116). Thus, the mounting assembly fixes the print head (116) at a predetermined position relative to the media transport assembly. Therefore, the print medium (126) is placed relative to the print head (116) by the media transport assembly.

列印頭(116)也包括一高介電EPROM陣列(134)。如上所述,一高介電EPROM陣列(134)可以使用以儲存資料。例如,各EPROM胞元啟始地可以使所有的閘極,亦即,該控制閘和該浮動閘極打開,將陣列(134)中各EPROM胞元置在低電阻狀態。為規劃EPROM陣列(134)之一EPROM胞元,或用以改變EPROM胞元之狀態,例如,至一高電阻狀態,一規劃電壓被施加至EPROM胞元之一控制閘極和汲極,而EPROM之一源極和基片被維持在接地。這規劃電壓經過熱載體注射而自該汲極汲取電子至該浮動閘極。該等激勵的電子被推動經過和被陷在介電層的其他側上,提供更多負電荷給該浮動閘極,因而增加EPROM胞元之浮動閘極的有效臨界電壓。指示一最小電壓之臨界電壓 用以導通電晶體或EPROM胞元。在EPROM胞元之使用期間,一胞元阻抗量測單元監視EPROM胞元之電阻。如果該EPROM胞元電阻是低的,該EPROM胞元被判定是在與一第一邏輯值相關聯的一第一狀態(或規劃前狀態)。如果該胞元電阻是高的,該胞元被判定是在與一第二邏輯值相關聯的一第二狀態(或規劃狀態)。因此,在一EPROM陣列(134)中一串列規劃和未規劃的EPROM胞元之位元符形成一串列的1和0,其被使用以代表儲存於列印頭(116)中之資料。 The print head (116) also includes a high-dielectric EPROM array (134). As mentioned above, a high dielectric EPROM array (134) can be used to store data. For example, each EPROM cell can initially make all the gates, that is, the control gate and the floating gate open, placing each EPROM cell in the array (134) in a low resistance state. To plan one EPROM cell of the EPROM array (134), or to change the state of the EPROM cell, for example, to a high resistance state, a planning voltage is applied to one of the EPROM cells to control the gate and the drain, and One of the EPROM sources and the substrate is maintained at ground. The planned voltage is injected through the heat carrier to draw electrons from the drain to the floating gate. The excited electrons are pushed through and trapped on the other side of the dielectric layer, providing more negative charge to the floating gate, thereby increasing the effective threshold voltage of the floating gate of the EPROM cell. Threshold voltage indicating a minimum voltage Used to energize a crystal or EPROM cell. During the use of EPROM cells, a cell impedance measurement unit monitors the resistance of the EPROM cells. If the EPROM cell resistance is low, the EPROM cell is determined to be in a first state (or pre-planning state) associated with a first logic value. If the cell resistance is high, the cell is determined to be in a second state (or planning state) associated with a second logic value. Therefore, a string of planned and unplanned EPROM cell symbols in an EPROM array (134) forms a series of 1s and 0s, which are used to represent the data stored in the print head (116) .

在讀取期間,一EPROM陣列(134)中之一單一EPROM胞元可以被辨識。在這範例中,各EPROM胞元被連接至用於多工化的一行選擇電晶體和一列選擇電晶體。當兩電晶體皆被導通時,則該EPROM胞元被選擇。該等選擇電晶體藉由多工化信號而被控制。 During reading, a single EPROM cell in an EPROM array (134) can be identified. In this example, each EPROM cell is connected to a row of select transistors and a column of select transistors for multiplexing. When both transistors are turned on, the EPROM cell is selected. The selection transistors are controlled by a multiplexed signal.

EPROM陣列(134)是一高介電EPROM陣列(134),其意謂該EPROM陣列(134)是由具有至少一介電層(其具有一高介電常數)之EPROM胞元所形成。例如,具有一高介電常數之一介電質材料層可以置放在EPROM胞元的浮動閘極和控制閘極之間。具有一高介電常數之一材料可以允許一較薄的EPROM胞元,以及對應之較薄EPROM陣列(134)被使用於所有的列印頭(116)上而維持一EPROM胞元在狀態之間具有充分之區別。換句話說,高介電常數可能導致在對應至一EPROM胞元之一未規劃和規劃狀態的電壓之間有一較大的間隙,以至於容易檢測不同電壓且對應的邏輯值被致能。如將在下面之說明,該EPROM胞元 可以包括一短通道電晶體,其包括一源極、一汲極、以及一閘極氧化物。 The EPROM array (134) is a high-dielectric EPROM array (134), which means that the EPROM array (134) is formed of EPROM cells having at least one dielectric layer (which has a high dielectric constant). For example, a layer of a dielectric material having a high dielectric constant may be placed between the floating gate and the control gate of the EPROM cell. A material with a high dielectric constant allows a thinner EPROM cell and a correspondingly thinner EPROM array (134) to be used on all print heads (116) while maintaining an EPROM cell in its There is a sufficient difference between them. In other words, a high dielectric constant may cause a large gap between the voltages corresponding to an unplanned and planned state of one EPROM cell, so that it is easy to detect different voltages and corresponding logic values are enabled. As will be explained below, the EPROM cell A short-channel transistor may be included, which includes a source, a drain, and a gate oxide.

如將在下面之說明,高介電EPROM陣列(134)係可以被使用以儲存任何型式之資料。在其他形式的資料之中,可以儲存於高介電EPROM陣列(134)中之資料範例包括流體供應器特定資料及/或流體辨識資料、流體特徵化資料、流體使用資料、列印頭(116)特定資料、列印頭(116)辨識資料、保證資料、列印頭(116)特徵資料、列印頭(116)使用資料、認證資料、安全資料、防偽資料(ACF)、墨水滴重量、發射頻率、啟始列印位置、加速資訊、以及迴旋儀資訊。在數個範例中,該高介電EPROM陣列(134)在製造時及/或在列印機墨匣(114)操作期間被寫入。藉由它所儲存的資料可以提供資訊至控制器以調整列印機之操作且確保正確之操作。 As will be explained below, the high-dielectric EPROM array (134) can be used to store any type of data. Among other types of data, examples of data that can be stored in the high-dielectric EPROM array (134) include fluid supply specific data and / or fluid identification data, fluid characterization data, fluid usage data, print head (116 ) Specific data, print head (116) identification data, warranty data, print head (116) characteristic data, print head (116) usage data, authentication data, security data, anti-counterfeit data (ACF), ink drop weight, Transmit frequency, start print position, acceleration information, and gyroscope information. In several examples, the high-dielectric EPROM array (134) is written during manufacturing and / or during printer cartridge (114) operation. The stored data can provide information to the controller to adjust the operation of the printer and ensure correct operation.

圖2是依據此處所說明原理之範例而使用具有數個高介電EPROM胞元(248)之一列印頭(116)的一列印機墨匣(114)之一方塊圖。於一些範例中,該列印機墨匣(114)包括實行列印機墨匣(114)之至少一部份功能的一列印頭(116)。例如,該列印頭(116)可以包括數個噴嘴(圖1,124)。該列印頭(116)依據一接收的列印作業自噴嘴(圖1,124)噴射流體點滴至一列印媒體上(圖1,126)。該列印頭(116)也可以包括用以實行關於列印之各種功能的其他電路。於一些範例中,該列印頭(116)是一較大系統的部件,例如,一集成列印頭(IPH)。該列印頭(116)可以是變化型式。例如, 在其他型式的列印頭(116)之中,該列印頭(116)可以是一熱噴墨(TIJ)列印頭或一壓電式噴墨(PIJ)列印頭。 Figure 2 is a block diagram of a printer cartridge (114) using a print head (116) with several high-dielectric EPROM cells (248) according to an example of the principles described herein. In some examples, the printer cartridge (114) includes a print head (116) that performs at least a portion of the functions of the printer cartridge (114). For example, the print head (116) may include several nozzles (FIG. 1, 124). The print head (116) ejects fluid from a nozzle (Fig. 1, 124) onto a print medium according to a received print job (Fig. 1, 126). The print head (116) may also include other circuits for performing various functions related to printing. In some examples, the print head (116) is a component of a larger system, such as an integrated print head (IPH). The print head (116) may be a variant. E.g, Among other types of print heads (116), the print head (116) may be a thermal inkjet (TIJ) print head or a piezoelectric inkjet (PIJ) print head.

列印頭(116)包括一高介電EPROM陣列(134)以儲存關於列印機墨匣(114)和列印頭(116)之至少一者的資訊。於一些範例中,該高介電EPROM陣列(134)包括形成於該列印頭(116)中之數個高介電EPROM胞元(248-1,248-2)。為了儲存資訊,一EPROM胞元(248)可以被設定至一特定邏輯值。 The print head (116) includes a high-dielectric EPROM array (134) to store information about at least one of a printer cartridge (114) and a print head (116). In some examples, the high-dielectric EPROM array (134) includes several high-dielectric EPROM cells (248-1, 248-2) formed in the print head (116). To store information, an EPROM cell (248) can be set to a specific logical value.

如將在下面之說明,一EPROM胞元(248)包括一控制閘極、一浮動閘極極、以及一半導體基片。該控制閘極和該浮動閘極彼此電容式地耦合至在它們之間的一介電質材料,以至於該控制閘極電壓耦合至該浮動閘極電壓。另一介電質材料層也配置在該浮動閘極和該半導體基片之間。 As will be described below, an EPROM cell (248) includes a control gate, a floating gate, and a semiconductor substrate. The control gate and the floating gate are capacitively coupled to each other with a dielectric material between them, so that the control gate voltage is coupled to the floating gate voltage. Another dielectric material layer is also disposed between the floating gate and the semiconductor substrate.

一EPROM陣列(134)可以藉由設定數個EPROM胞元(248)至不同的邏輯值而儲存資訊。設定一EPROM胞元(248)至除了其之啟始數值以外的一數值可以被稱為規劃該EPROM胞元(248)。在規劃期間,在EPROM胞元(248)之汲極上的一高電壓偏壓產生有活力的“熱”電子。在該控制閘極和該汲極之間的一正電壓偏壓將一些的這些熱電子拖拉至浮動閘極上。當電子被拖拉至該浮動閘極上時,例如,經過福勒-諾德海姆(Fowler-Nordheim(FN))隧道,EPROM胞元(248)之臨界電壓增加,亦即,被使用以調整閘極/汲極以引導電流之電壓增加。如果充分的電子被拖拉至該浮動閘 極上,該有效的胞元臨界電壓將增加。因而,對於一所給予的閘極和汲極偏壓電壓,該源極-至-汲極電流將被減低或被中止。這將導致EMPROM胞元(248)以阻住在那電壓位準之電流,其將EPROM胞元(248)之操作狀態自一低電阻狀態改變至一高電阻狀態。在EPROM胞元(248)的規劃之後,一胞元感測器(未展示於圖形中)在操作期間被使用以檢測EPROM胞元(248)之狀態。 An EPROM array (134) can store information by setting several EPROM cells (248) to different logical values. Setting an EPROM cell (248) to a value other than its initial value can be referred to as planning the EPROM cell (248). During the planning period, a high voltage bias on the drain of the EPROM cell (248) generates vibrant "hot" electrons. A positive voltage bias between the control gate and the drain pulls some of these hot electrons onto the floating gate. When electrons are dragged onto the floating gate, for example, through a Fowler-Nordheim (FN) tunnel, the threshold voltage of EPROM cells (248) increases, that is, used to adjust the gate The pole / drain increases with a voltage that conducts current. If full electrons are dragged to the floating gate At the pole, the effective cell threshold voltage will increase. Thus, for a given gate and drain bias voltage, the source-to-drain current will be reduced or stopped. This will cause the EMPROM cell (248) to block the current at that voltage level, which changes the operating state of the EPROM cell (248) from a low resistance state to a high resistance state. After the EPROM cell (248) was planned, a cell sensor (not shown in the figure) was used during operation to detect the state of the EPROM cell (248).

一特定數量範例被提供於下。在這範例中,在規劃之前,一EPROM胞元(248)之一電阻可以是低的,例如,大約為3000歐姆。在規劃期間,一正偏壓被施加至EPROM胞元(248)之閘極和汲極,以至於一電位產生在該汲極和該控制閘極之間。被施加至該汲極之正偏壓可以是接近崩潰位準,例如,在12-16伏特之間。同時,源極以及被配置於源極和汲極中之一基片可以被設定至接地。在源極和汲極之間的正電壓差朝向該汲極汲取電子。大的正電位激勵電子並且當該等電子具有充分的能量時,經過熱載體注射自該汲極拖拉電子至該浮動閘極,提供更多的負電荷給該浮動閘極,因而增加浮動閘極的有效臨界電壓。浮動閘極之臨界電壓是用以導通電晶體或EPROM胞元(248)之一電壓。因此,於一些範例中,足夠的電子可以被傳送至該浮動閘極以增加其之電阻,例如,增加至6000歐姆。換句話說,該陷住的電子可能導致大約為-5V之一臨界電壓。因此,當5V的一信號被施加至控制閘極時,沒有通道將被形成於浮動閘極中,因此增加電阻;其電阻之增加可以藉由 一控制器(圖1,106)被讀取,以判定EPROM胞元(248)之一邏輯值。因此,EPROM胞元(248)之電阻、以及對應的邏輯值依賴於浮動閘極之電壓。 A specific number of examples are provided below. In this example, before planning, the resistance of one of the EPROM cells (248) may be low, for example, about 3000 ohms. During planning, a positive bias is applied to the gate and drain of the EPROM cell (248), so that a potential is generated between the drain and the control gate. The positive bias voltage applied to the drain can be close to the collapse level, for example, between 12-16 volts. Meanwhile, the source and one of the substrates disposed in the source and the drain can be set to ground. A positive voltage difference between the source and the drain draws electrons towards the drain. A large positive potential excites the electrons and when the electrons have sufficient energy, the electrons are drawn from the drain to the floating gate through the heat carrier injection, providing more negative charges to the floating gate, thereby increasing the floating gate. Effective threshold voltage. The threshold voltage of the floating gate is used to energize a crystal or one of the EPROM cells (248). Therefore, in some examples, enough electrons can be transferred to the floating gate to increase its resistance, for example, to 6000 ohms. In other words, the trapped electrons may cause a threshold voltage of approximately -5V. Therefore, when a 5V signal is applied to the control gate, no channel will be formed in the floating gate, thus increasing the resistance; the increase in resistance can be achieved by A controller (Figure 1, 106) is read to determine a logical value of the EPROM cell (248). Therefore, the resistance of the EPROM cell (248) and the corresponding logic value depend on the voltage of the floating gate.

數個EPROM胞元(248)被群聚在一起而成為一EPROM陣列(134)。於一些範例中,該EPROM陣列(134)可以是一交叉陣列。在這範例中,EPROM胞元(248)可以被形成於一第一組元件和第二數個元件之一相交處,該等元件形成相交節點之一網格,該節點界定一EPROM胞元(248)。 Several EPROM cells (248) are grouped together to form an EPROM array (134). In some examples, the EPROM array (134) may be a cross-array. In this example, the EPROM cell (248) can be formed at the intersection of a first set of elements and one of a second number of elements, which form a grid of intersecting nodes that define an EPROM cell ( 248).

EPROM陣列(134)係可以使用以儲存任何型式之資料。在其他形式資料之中,可以儲存於該EPROM陣列(134)中之資料範例包括流體供應器特定資料及/或流體辨識資料、流體特徵資料、流體使用資料、列印頭(116)特定資料、列印頭(116)辨識資料、保證資料、列印頭(116)特徵化資料、列印頭(116)使用資料、認證資料、安全資料、防偽資料(ACF)、墨水滴重量、發射頻率、啟始列印位置、加速資訊、以及迴旋儀資訊。在數個範例中,該EPROM陣列(134)在製造時及/或在列印機墨匣(114)操作的期間被寫入。 The EPROM array (134) can be used to store any type of data. Among other forms of data, examples of data that can be stored in the EPROM array (134) include fluid supply specific data and / or fluid identification data, fluid characteristic data, fluid usage data, print head (116) specific data, Print head (116) identification data, warranty data, print head (116) characterization data, print head (116) usage data, authentication data, security data, anti-counterfeit data (ACF), ink drop weight, emission frequency, Start printing position, acceleration information, and gyroscope information. In several examples, the EPROM array (134) is written at the time of manufacture and / or during operation of the printer cartridge (114).

於一些範例中,列印機墨匣(114)可以耦合至配置在系統(100)之內的一控制器(圖1,106)。該控制器(圖1,106)自一外部計算裝置(圖1,102)接收一控制信號。該控制器(圖1,106)可以是發現於一列印機上的一特定應用積體電路(ASIC)。一計算裝置(圖1,102)可以傳送一列印作業至該列印機墨匣(114),該列印作業是構成將列印的文字、影像、或其組合。該控制器(圖1,106)可以便利地將資訊儲存至該 EPROM陣列(134)。明確地說,該控制器(圖1,106)可以傳送至少一個控制信號至數個EPROM胞元(248)。例如,該控制器(圖1,106)可以經由一控制線(例如,一辨識線)而耦合至該列印頭(116)。經由該辨識線,該控制器(圖1,106)可以改變EPROM陣列(134)中之EPROM胞元(248)的邏輯狀態以有效地將資訊儲存至一EPROM陣列(134)。例如,該控制器(106)可以傳送資料(例如,除了其他型式資料之外的認證資料、安全資料、以及列印作業資料),至該列印頭(116)以儲存在EPROM陣列(134)上。 In some examples, the printer cartridge (114) may be coupled to a controller (FIG. 1, 106) configured within the system (100). The controller (Figure 1, 106) receives a control signal from an external computing device (Figure 1, 102). The controller (Figure 1, 106) may be an application specific integrated circuit (ASIC) found on a printer. A computing device (FIG. 1, 102) can send a print job to the printer cartridge (114), the print job constituting text, images, or a combination thereof to be printed. The controller (Figure 1, 106) can conveniently store information to the EPROM array (134). Specifically, the controller (Figure 1, 106) can transmit at least one control signal to several EPROM cells (248). For example, the controller (FIG. 1, 106) may be coupled to the print head (116) via a control line (e.g., an identification line). Through the identification line, the controller (FIG. 1, 106) can change the logic state of the EPROM cell (248) in the EPROM array (134) to effectively store information to an EPROM array (134). For example, the controller (106) can transmit data (e.g., authentication data, security data, and print job data in addition to other types of data) to the print head (116) for storage in the EPROM array (134) on.

圖3A和3B是依據此處所說明原理之範例而具有數個高介電EPROM胞元(248)的一列印機墨匣(114)之圖形。如上面之討論,列印頭(116)可以包括數個噴嘴(124)。於一些範例中,該列印頭(116)可以分成為數個列印晶粒,而各個晶粒具有數個噴嘴(124)。該列印頭(116)可以是任何型式之列印頭(116),例如,包括如圖3A-3C中所說明的一列印頭(116)。展示於圖3A-3C中之範例是不表示用以限制本說明。反而,各種型式之列印頭(116)可以配合此處所說明之原理而被使用。 3A and 3B are diagrams of a printer cartridge (114) with several high-dielectric EPROM cells (248) according to an example of the principles described herein. As discussed above, the print head (116) may include a number of nozzles (124). In some examples, the print head (116) can be divided into a plurality of print dies, and each die has a plurality of nozzles (124). The print head (116) may be any type of print head (116), for example, including a print head (116) as illustrated in FIGS. 3A-3C. The examples shown in FIGS. 3A-3C are not meant to limit the description. Instead, various types of print heads (116) can be used in conjunction with the principles described herein.

列印機墨匣(114)也包括一流體貯存器(112)、一撓性電纜線(336)、以及導電墊片(338)。於一些範例中,該流體可以是墨水。例如,該列印機墨匣(114)可以是一噴墨列印機墨匣,該列印頭(116)可以是一噴墨列印頭,並且該墨水可以是噴墨墨水。 The printer cartridge (114) also includes a fluid reservoir (112), a flexible cable (336), and a conductive gasket (338). In some examples, the fluid may be ink. For example, the printer cartridge (114) may be an inkjet printer cartridge, the print head (116) may be an inkjet print head, and the ink may be an inkjet ink.

展示於圖3C中之EPROM陣列(134)可以是相似 於展示於圖1和2中之EPROM陣列(134)。明確地說,該EPROM陣列(134)可以包括至少部份地藉由利用一高介電氧化物材料所形成之一介電層而形成的EPROM胞元(圖2,248)。撓性電纜線(336)是緊黏至列印機墨匣(114)二側並且包含藉由導電墊片(338)電氣地連接EPROM陣列(134)和列印頭(116)的跡線。 The EPROM array (134) shown in Figure 3C can be similar EPROM array (134) shown in Figures 1 and 2. Specifically, the EPROM array (134) may include EPROM cells formed at least in part by using a dielectric layer formed from a high dielectric oxide material (FIG. 2, 248). The flexible cable (336) is a trace that is tightly adhered to both sides of the printer cartridge (114) and includes an EPROM array (134) and a print head (116) electrically connected by a conductive pad (338).

列印機墨匣(114)可以被安裝進入整合於一列印機之輸送筒的一托架。當該列印機墨匣(114)正確地被安裝時,導電墊片(338)對著該托架中之對應的電氣接觸處被擠壓,而允許與列印機通訊,並且控制該列印機墨匣(114)之電氣功能。例如,該等導電墊片(338)允許該列印機用以存取和寫入至該EPROM陣列(134)。 The printer cartridge (114) can be installed into a carriage integrated in a printer cartridge. When the printer cartridge (114) is correctly installed, the conductive pad (338) is squeezed against the corresponding electrical contact in the bracket, allowing communication with the printer and controlling the column Electrical functions of the printer cartridge (114). For example, the conductive pads (338) allow the printer to access and write to the EPROM array (134).

EPROM陣列(134)可以包含多種資訊,該資訊包括列印機墨匣(114)之型式、包含於列印機墨匣(114)中之流體種類、餘留在流體貯存器(112)中之流體數量的一估計、校正資料、錯誤資訊、以及其他資料。於一範例中,該EPROM陣列(134)可以包括關於何時該列印機墨匣(114)應該維修之資訊。 The EPROM array (134) can contain a variety of information, including the type of printer cartridge (114), the type of fluid contained in the printer cartridge (114), and the remaining fluid in the fluid reservoir (112). An estimate of fluid quantity, correction data, error information, and other data. In one example, the EPROM array (134) may include information about when the printer cartridge (114) should be serviced.

為了產生一影像,系統(圖1,100)移動含有列印機墨匣(114)之輸送筒經一列印媒體之上(圖1,126)。在適當的時間,該系統(圖1,100)經由托架中之電氣接觸點而傳送電氣信號至該列印機墨匣(114)。該等電氣信號經過該等導電墊片(338)而傳送並且路由安排而經過撓性電纜線(336)至列印頭(116)。該列印頭(116)接著自貯存器(112)將流體之 小點滴噴射至列印媒體(圖1,126)表面上。這些小點滴組合以形成一影像於列印媒體(圖1,126)表面上。 To generate an image, the system (Fig. 1, 100) moves a conveyor containing a printer cartridge (114) over a print medium (Fig. 1, 126). At the appropriate time, the system (Figure 1, 100) sends electrical signals to the printer cartridge (114) via electrical contacts in the carriage. The electrical signals are transmitted through the conductive pads (338) and routed through flexible cables (336) to the print head (116). The print head (116) then removes the fluid from the reservoir (112). Small droplets are ejected onto the surface of the print medium (Figure 1, 126). These small dots are combined to form an image on the surface of the print medium (Figure 1, 126).

圖3C是依據此處所說明原理之範例而具有數個高介電EPROM胞元(圖2,248)之一列印頭(116)的一圖解。更明確地說,如此處所說明地,如展示於圖3A中,該列印頭(116)可以包括一高介電EPROM陣列(134),其包括數個高介電EPROM胞元(圖2,248)。該列印頭(116)也可以包括用以沉積一流體至一列印媒體(圖1,126)上之數個構件。例如,該列印頭(116)可以包括數個噴嘴(124)。為簡單起見,圖3C詳細說明一單一噴嘴(124);但是數個噴嘴(124)是呈現於該列印頭(116)上。該列印頭(116)可以包括任何數量噴嘴(124)。在其中流體是一墨水的一範例中,一第一子集之噴嘴(124)可以噴射一第一色彩墨水,而一第二子集的噴嘴(124)可以噴射一第二色彩墨水。另外族群的噴嘴(124)可以被保留以供用於另外色彩的墨水。 FIG. 3C is an illustration of a print head (116) having several high-dielectric EPROM cells (FIG. 2, 248) according to an example of the principles described herein. More specifically, as illustrated here, as shown in FIG. 3A, the print head (116) may include a high-dielectric EPROM array (134), which includes several high-dielectric EPROM cells (FIG. 2, 248). The print head (116) may also include several components for depositing a fluid onto a print medium (FIG. 1, 126). For example, the print head (116) may include a number of nozzles (124). For simplicity, FIG. 3C illustrates a single nozzle (124) in detail; however, several nozzles (124) are presented on the print head (116). The print head (116) may include any number of nozzles (124). In an example where the fluid is an ink, a nozzle (124) of a first subset can eject a first color ink, and a nozzle (124) of a second subset can eject a second color ink. Nozzles (124) of another group can be reserved for inks of different colors.

一噴嘴(124)可以包括一噴射器(342)、一發射容室(344)、以及一開孔(346)。開孔(346)可以允許流體,例如,墨水,被沉積至一表面上,例如,一列印媒體上(圖1,126)。發射容室(344)可以包括小數量的流體。該噴射器(342)可以是用以自一發射容室(344)經過一開孔(346)而噴射流體之一機構,其中該噴射器(342)可以包括一發射電阻器或其他加熱裝置、一壓電式元件、或用以自該發射容室(344)而噴射流體的其他機構。 A nozzle (124) may include an ejector (342), a launching chamber (344), and an opening (346). The opening (346) may allow a fluid, such as ink, to be deposited on a surface, such as a print medium (FIG. 1, 126). The launch chamber (344) may include a small amount of fluid. The ejector (342) may be a mechanism for ejecting fluid from a firing chamber (344) through an opening (346). The ejector (342) may include a firing resistor or other heating device, A piezoelectric element, or other mechanism for ejecting fluid from the launch chamber (344).

例如,噴射器(342)可以是一發射電阻器。該發 射電阻器響應於一被施加電壓而加熱。當該發射電阻器加熱時,發射容室(344)中之一部份的流體汽化以形成一氣泡。這氣泡將液體推離出開孔(346)以及推到列印媒體(圖1,126)上。當汽化的流體氣泡爆裂時,在發射容室(344)之內的一真空壓力自該流體供應器(112)將流體汲取進入發射容室(344),並且該處理程序重複。在這範例中,該列印頭(116)可以是一熱噴墨列印頭。 For example, the injector (342) may be an emission resistor. The hair The radio resistor is heated in response to an applied voltage. When the firing resistor is heated, a portion of the fluid in the firing chamber (344) vaporizes to form a bubble. This bubble pushes the liquid out of the opening (346) and onto the print medium (Figure 1, 126). When the vaporized fluid bubble bursts, a vacuum pressure within the launching chamber (344) draws fluid from the fluid supply (112) into the launching chamber (344), and the process is repeated. In this example, the print head (116) may be a thermal inkjet print head.

於另一範例中,噴射器(342)可以是一壓電式裝置。當一電壓被施加時,該壓電式裝置改變形狀,其於發射容室(344)中產生一壓力脈波而將一流體推離出開孔(346)並且推到列印媒體上(圖1,126)。在這範例中,該列印頭(116)可以是一壓電式噴墨列印頭。 In another example, the ejector (342) may be a piezoelectric device. When a voltage is applied, the piezoelectric device changes shape. It generates a pressure pulse in the emission chamber (344), and pushes a fluid out of the opening (346) and onto the printing medium (Figure 1,126). In this example, the print head (116) may be a piezoelectric inkjet print head.

列印頭(116)和列印機墨匣(114)也可以包括用以實行關於列印之各種功能的其他構件。為簡單起見,於圖3A-3C中,包括於列印頭(116)和列印機墨匣(114)中的這些數個構件和電路並不被表明;但是此些構件可以是呈現於列印頭(116)和列印機墨匣(114)中。於一些範例中,該列印機墨匣(114)是可自一列印系統移除的,例如,如一可拋式列印機墨匣。 The print head (116) and the printer cartridge (114) may also include other components for performing various functions related to printing. For simplicity, in Figures 3A-3C, these components and circuits included in the print head (116) and printer cartridge (114) are not shown; however, these components may be presented in In the print head (116) and the printer cartridge (114). In some examples, the printer cartridge (114) is removable from a printing system, such as a disposable printer cartridge.

圖4A和4B是依據此處所說明原理之範例的一高介電EPROM胞元(248)之圖形。明確地說,圖4A是高介電EPROM胞元(248)之一電路圖並且圖4B是高介電EPROM胞元(248)層之一橫截面圖。 4A and 4B are diagrams of a high-dielectric EPROM cell (248) according to an example of the principles described herein. Specifically, FIG. 4A is a circuit diagram of one of the high-dielectric EPROM cells (248) and FIG. 4B is a cross-sectional view of one of the high-dielectric EPROM cells (248) layers.

EPROM胞元(248)包括一控制閘(450)、一浮動閘 極(452)、一源極(456)以及一汲極(458)。於一些範例中,該源極(456)以及該汲極(458)可以被形成於一基片(454)中。於一些範例中,該基片(454)可以是具有形成該源極(456)和該汲極(458)之p-摻雜部份的一n-型基片(454)。在其他範例中,該基片(454)可以是具有形成該源極(456)和該汲極(458)之n-摻雜部份的一p-型基片(454)。於一些範例中,該EPROM胞元(248)可以包括一短通道電晶體。例如,該EPROM胞元(248)可以包括一短通道電晶體,其包括源極(456)、汲極(458)以及一第一介電層(460),例如,一閘極氧化物。一短通道EPROM電晶體中之閘極氧化物的寬度可以是在2.2微米和2.4微米之間。 EPROM cell (248) includes a control gate (450), a floating gate Electrode (452), a source electrode (456), and a drain electrode (458). In some examples, the source (456) and the drain (458) may be formed in a substrate (454). In some examples, the substrate (454) may be an n-type substrate (454) having p-doped portions forming the source (456) and the drain (458). In other examples, the substrate (454) may be a p-type substrate (454) having n-doped portions forming the source (456) and the drain (458). In some examples, the EPROM cell (248) may include a short-channel transistor. For example, the EPROM cell (248) may include a short-channel transistor including a source (456), a drain (458), and a first dielectric layer (460), such as a gate oxide. The width of the gate oxide in a short-channel EPROM transistor can be between 2.2 microns and 2.4 microns.

EPROM胞元(248)之浮動閘極(452)可以是藉由一第一介電層(460)而與基片(454)分離。該第一介電層(460)可以是一閘極氧化物,其電氣地隔離該浮動閘極(452)與源極(456)和汲極(458)。於一些範例中,該閘極氧化物可以是由一高介電常數材料所組成,例如,在該控制閘極(450)和該浮動閘極(452)之間所使用的高介電常數材料。於一些範例中,該第一介電層(460)可以是在其他介電質材料之中的二氧化矽、矽碳化物、以及矽氮化物。於一些範例中,該閘極氧化物可以是700埃(Angstrom)厚度。 The floating gate (452) of the EPROM cell (248) may be separated from the substrate (454) by a first dielectric layer (460). The first dielectric layer (460) may be a gate oxide, which electrically isolates the floating gate (452) from the source (456) and the drain (458). In some examples, the gate oxide may be composed of a high dielectric constant material, for example, a high dielectric constant material used between the control gate (450) and the floating gate (452). . In some examples, the first dielectric layer (460) may be silicon dioxide, silicon carbide, and silicon nitride among other dielectric materials. In some examples, the gate oxide may be 700 Angstroms thick.

於一些範例中,EPROM胞元(248)之浮動閘極(452)可以是藉由一多晶矽層(462)以及一第一傳導層(464)(其電氣地耦合至該多晶矽層(462))而形成。於一些範例中,該多晶矽層(462)可以是能夠被摻雜之多晶矽。例如, 該多晶矽層(462)可以是n-摻雜之多晶矽。該第一傳導層(464)可以是由一導電材料所形成。導電材料範例可以包括在其他導電材料之中的一鋁銅合金、一鋁銅矽合金、和具有一鋁銅合金的一鉭鋁合金、以及具有一鋁銅合金的一鉭矽氮化物。 In some examples, the floating gate (452) of the EPROM cell (248) may be through a polycrystalline silicon layer (462) and a first conductive layer (464) (which is electrically coupled to the polycrystalline silicon layer (462)). And formed. In some examples, the polycrystalline silicon layer (462) may be polycrystalline silicon capable of being doped. E.g, The polycrystalline silicon layer (462) may be n-doped polycrystalline silicon. The first conductive layer (464) may be formed of a conductive material. Examples of the conductive material may include an aluminum copper alloy, an aluminum copper silicon alloy, and a tantalum aluminum alloy with an aluminum copper alloy, and a tantalum silicon nitride with an aluminum copper alloy, among other conductive materials.

基片(454)之疊層,第一介電層(460)和多晶矽層(462)可以展示於一電路中作為一電容器,如下面圖5中所詳細說明。於一些範例中,在形成期間,該多晶矽層(462)啟始地可以藉由一第三介電層(478)而與第一傳導層(464)分離。該第三介電層(478)可以是由其他介電質材料之中的磷矽酸鹽玻璃(PSG)、硼磷矽酸鹽玻璃(BPSG)及/或無摻雜矽鹽酸玻璃(USG)所形成。該第一傳導層(464)可以經由該第三介電層(478)中之一間隙而接觸該多晶矽層(462)。概要地說,EPROM胞元(248)之浮動閘極(452)可以是由可以經過一第三介電層(478)中之一間隙而電氣地彼此耦合的一第一傳導層(464)和一多晶矽層(462)所形成。在該多晶矽層(462)和該基片(454)之間的該第一介電層(460)在該多晶矽層(462)和該基片(454)之間產生一電容式耦合。 The stack of the substrate (454), the first dielectric layer (460) and the polycrystalline silicon layer (462) can be shown in a circuit as a capacitor, as explained in detail in FIG. 5 below. In some examples, during the formation, the polycrystalline silicon layer (462) may be initially separated from the first conductive layer (464) by a third dielectric layer (478). The third dielectric layer (478) may be made of phosphosilicate glass (PSG), borophosphosilicate glass (BPSG), and / or undoped silicate glass (USG) among other dielectric materials. Formed. The first conductive layer (464) may contact the polycrystalline silicon layer (462) through a gap in the third dielectric layer (478). In brief, the floating gate (452) of the EPROM cell (248) may be a first conductive layer (464) and a first conductive layer (464) electrically coupled to each other through a gap in a third dielectric layer (478). A polycrystalline silicon layer (462) is formed. The first dielectric layer (460) between the polycrystalline silicon layer (462) and the substrate (454) creates a capacitive coupling between the polycrystalline silicon layer (462) and the substrate (454).

EPROM胞元(248)之控制閘極(450)可以是藉由一第二介電層(466)而與浮動閘極(452)分離。於一些範例中,該第二介電層(466)可以是由正矽酸乙酯(TEOS)或其他介電質材料所形成。控制閘極(450)可以藉由一第二傳導層(468)被提供。該第二傳導層(468)可以是由一導電材料所形成。導電材料之範例可以包括在其他導電材料之中的一鋁 銅合金、一鋁銅矽合金、和具有一鋁銅合金之一鉭鋁合金、以及具有一鋁銅合金之鉭矽氮化物。 The control gate (450) of the EPROM cell (248) may be separated from the floating gate (452) by a second dielectric layer (466). In some examples, the second dielectric layer (466) may be formed of TEOS or other dielectric materials. The control gate (450) may be provided by a second conductive layer (468). The second conductive layer (468) may be formed of a conductive material. Examples of the conductive material may include aluminum, among other conductive materials. A copper alloy, an aluminum copper silicon alloy, and a tantalum aluminum alloy having one aluminum copper alloy, and a tantalum silicon nitride having an aluminum copper alloy.

在浮動閘極(452)的第一傳導層(464)和控制閘極(450)的第二傳導層(468)之間的第二介電層(466)在該第一傳導層(464)和該第二傳導層(468)之間產生一電容式耦合。換句話說,藉由該第二介電層(466)和第一介電層(460)分別地在該等對應層之間形成一電容式耦合,該第二傳導層(468)形成該控制閘極(450),並且該第一傳導層(464)和該多晶矽層(462)形成該EPROM胞元(248)之浮動閘極(452)。 A second dielectric layer (466) between the first conductive layer (464) of the floating gate (452) and the second conductive layer (468) of the control gate (450) is on the first conductive layer (464) A capacitive coupling is generated with the second conductive layer (468). In other words, a capacitive coupling is formed between the corresponding layers by the second dielectric layer (466) and the first dielectric layer (460), and the second conductive layer (468) forms the control The gate (450), and the first conductive layer (464) and the polycrystalline silicon layer (462) form a floating gate (452) of the EPROM cell (248).

於一些範例中,第二介電層(466)可以是具有一高介電常數之一氧化物材料。例如,該第二介電層(466)可以是由具有至少為6之一介電質常數的一材料所形成。該第二介電層(466)可以是具有一高介電常數之一氮化物材料。明確地說,該第二介電層(466)可以是由鉭氧化物、鋁氧化物、矽氮化物(Si3N4)、鉿氧化物、鋯氧化物、鈦元素氧化物(具有一介電質常數80)或其組合所形成。雖然特定參考至可以使用以形成第二介電層(466)之各種材料,亦可以使用任何適當材料。 In some examples, the second dielectric layer (466) may be an oxide material having a high dielectric constant. For example, the second dielectric layer (466) may be formed of a material having a dielectric constant of at least one of six. The second dielectric layer (466) may be a nitride material having a high dielectric constant. Specifically, the second dielectric layer (466) may be made of tantalum oxide, aluminum oxide, silicon nitride (Si3N4), hafnium oxide, zirconium oxide, titanium oxide (having a dielectric constant) 80) or a combination thereof. Although specific reference is made to various materials that can be used to form the second dielectric layer (466), any suitable material can also be used.

包括具有一高介電常數之一第二介電層(466)可以藉由減低第二介電層(466)之大小而允許一較薄的EPROM胞元(248),而保留EPROM胞元(248)之一所需的電容。例如,如上所述地,EPROM胞元(248)之電阻,以及對應的邏輯數值,是取決於在浮動閘極(452)之電壓。在該浮動閘極(452)之電壓是至少部分地取決於控制閘極(450)之 電容,為了在EPROM胞元(248)的狀態之間產生一更清晰的區別,在該控制閘極(450)之一較大的電容是需要的。因此,使用具有一較小介電質常數之一材料使得需要一較大的介電質以達成在控制閘極(450)之所需的電容。換句話說,高介電常數第二介電層(466)可以允許一可能地較薄的第二介電層(466),而同時保持一所需的電容。例如,該第二介電層(466)可以是在2和100奈米之間的厚度。例如,該第二介電層(466)可以是在5和15奈米之間的厚度。於一些範例中,第二介電層(466)之厚度係可以被操作以達成一所需的電容。 Including a second dielectric layer (466) with a high dielectric constant allows for a thinner EPROM cell (248) by reducing the size of the second dielectric layer (466), while retaining EPROM cells ( 248). For example, as mentioned above, the resistance of the EPROM cell (248), and the corresponding logic value, depends on the voltage at the floating gate (452). The voltage at the floating gate (452) depends at least in part on the voltage of the control gate (450) Capacitors. In order to make a clearer distinction between the states of the EPROM cell (248), a larger capacitor at one of the control gates (450) is needed. Therefore, the use of a material with a smaller dielectric constant makes a larger dielectric required to achieve the required capacitance at the control gate (450). In other words, the high dielectric constant second dielectric layer (466) may allow a possibly thinner second dielectric layer (466) while maintaining a desired capacitance. For example, the second dielectric layer (466) may be a thickness between 2 and 100 nanometers. For example, the second dielectric layer (466) may be a thickness between 5 and 15 nanometers. In some examples, the thickness of the second dielectric layer (466) can be manipulated to achieve a desired capacitance.

於一些範例中,第二介電層(466)可以具有至少0.15微微法拉之一電容。如上所述地,使用一高介電質材料之一第二介電層(466),例如,鋁、鉭、矽或其組合之一氧化物或氮化物時,對於一所給予電容,一較小EPROM胞元(248)可以被形成。於一些範例中,第一傳導層(464)和第二傳導層(468)之至少一者可以是較小於400平方微米。例如,該第一傳導層(464)和該第二傳導層(468)之至少一者可以是較小於100平方微米。換句話說,於一些範例中,第二介電層(466)之介電質常數可以是充分地高,以至於第二介電層(466)之面積可以是較小於400平方微米並且該厚度可以是在2奈米和100奈米厚之間,而具有至少0.15微微法拉之一電容。 In some examples, the second dielectric layer (466) may have a capacitance of at least 0.15 picofarad. As described above, when using a second dielectric layer (466) of a high dielectric material, such as an oxide or nitride of aluminum, tantalum, silicon, or a combination thereof, for a given capacitance, a Small EPROM cells (248) can be formed. In some examples, at least one of the first conductive layer (464) and the second conductive layer (468) may be smaller than 400 square microns. For example, at least one of the first conductive layer (464) and the second conductive layer (468) may be smaller than 100 square microns. In other words, in some examples, the dielectric constant of the second dielectric layer (466) may be sufficiently high that the area of the second dielectric layer (466) may be smaller than 400 square microns and the The thickness can be between 2 nm and 100 nm thick, with a capacitance of at least 0.15 picofarad.

於一些範例中,該第二介電層(466)可以藉由一控制閘極(450)電容和一浮動閘極(452)電容之一比率而被 界定。該控制閘極(450)電容涉及藉由第一傳導層(464)/第二介電層(466)/第二傳導層(468)所產生的電容,並且該浮動閘極(452)電容涉及藉由基片(454)/第一介電層(460)/多晶矽層(462)所產生的電容。換句話說,該控制閘極(450)和該浮動閘極(452)之電容可以藉由介電層(462,466)之性質被界定。例如,藉由第二介電層(466)使第一傳導層(464)與第二傳導層(468)之分離產生控制閘極(450)之一電容式耦合。換句話說,平行相對的電容器平板被形成於第一傳導層(464)和第二傳導層(468)中。同樣地,藉由第一介電層(460)使多晶矽層(462)與基片(454)之分離產生浮動閘極(452)和源極(456)及汲極(458)的一電容式耦合。 In some examples, the second dielectric layer (466) may be controlled by a ratio of a control gate (450) capacitance to a floating gate (452) capacitance. Define. The control gate (450) capacitance relates to the capacitance generated by the first conductive layer (464) / the second dielectric layer (466) / the second conductive layer (468), and the floating gate (452) capacitance involves Capacitance generated by the substrate (454) / first dielectric layer (460) / polycrystalline silicon layer (462). In other words, the capacitance of the control gate (450) and the floating gate (452) can be defined by the properties of the dielectric layers (462, 466). For example, the separation of the first conductive layer (464) from the second conductive layer (468) by the second dielectric layer (466) produces a capacitive coupling of the control gate (450). In other words, parallel-opposed capacitor plates are formed in the first conductive layer (464) and the second conductive layer (468). Similarly, the separation of the polycrystalline silicon layer (462) from the substrate (454) by the first dielectric layer (460) produces a capacitive type of floating gate (452), source (456), and drain (458). coupling.

返回至比率,依據本說明之EPROM胞元(248)可以具有至少為2之控制閘極(450)電容和浮動閘極(452)電容的一比率。在這範例中,該浮動閘極(452)可以具有70毫微微法拉(femtofarad)之一電容。具有如上所述之至少為2的一傳導比率可以進一步地增加浮動閘極(452)之電壓,並且可以改進EPROM胞元(248)之控制。換句話說,如上所述之比率可以進一步地藉由增加浮動閘極(452)電壓而增加在規劃和未規劃狀態之間的間隙。例如,如於圖5中展示,EPROM胞元(248)可以被繪製如相似於一分壓器的一電路。因此,相對至在控制閘極(圖4,450)所施加的一施加電壓(572),Vdd,在浮動閘極(圖4,452)所見之電壓(570),Vfloat,可以藉由下面之方程式1而表示。 Returning to the ratio, the EPROM cell (248) according to this description may have a ratio of the control gate (450) capacitance and the floating gate (452) capacitance of at least two. In this example, the floating gate (452) may have a capacitance of 70 femtofarads. Having a conduction ratio of at least 2 as described above can further increase the voltage of the floating gate (452) and improve the control of the EPROM cell (248). In other words, the ratio as described above can further increase the gap between the planned and unplanned states by increasing the floating gate (452) voltage. For example, as shown in Figure 5, the EPROM cell (248) can be drawn as a circuit similar to a voltage divider. Therefore, relative to an applied voltage (572), V dd applied to the control gate (Figure 4, 450), the voltage (570), V float , seen at the floating gate (Figure 4, 452), can be obtained by The following Equation 1 is shown.

Figure TWI613798BD00001
Figure TWI613798BD00001

在方程式1中,Ccg指示控制閘極電容(574),並且Cfg指示浮動閘極電容(576)。因此,一較大的控制閘極電容(574)導致在浮動閘極(圖4,452)所見之一較大的電壓(570),Vfloat,其增加EPROM胞元(248)之規劃電阻。 In Equation 1, C cg indicates the control gate capacitance (574), and C fg indicates the floating gate capacitance (576). Accordingly, a larger capacitance control gate (574) results in a large voltage seen one (570) pole (FIG. 4,452) in the floating gate, V float, which increases the EPROM cell element (248) of the programming resistor.

圖6是依據此處所說明原理之範例的一列印頭(116)橫截面圖,該列印頭(116)包括一高介電EPROM胞元(248)、一憶阻器(680)、以及一發射電阻器(342)。如上所述地,該列印頭(116)可以包括含有一源極(456)和一汲極(458)的一EPROM胞元(248)。源極(456)和汲極(458)可以是藉由一第一介電層(460-1)而與多晶矽層(462-1)分離。 FIG. 6 is a cross-sectional view of a print head (116) according to an example of the principles described herein. The print head (116) includes a high-dielectric EPROM cell (248), a memristor (680), and a Emission resistor (342). As described above, the print head (116) may include an EPROM cell (248) including a source (456) and a drain (458). The source (456) and the drain (458) may be separated from the polycrystalline silicon layer (462-1) by a first dielectric layer (460-1).

如上所述,EPROM胞元(248)也包括一第一傳導層(464)、一第二介電層(466)以及一第二傳導層(468)。於一些範例中,該第二傳導層(468)可以包括具有不同的氧化性質之多重子層。例如,第一子層(468-1)可以包括鉭鋁合金且第二子層(468-2)可以包括一鋁銅合金。於一些範例中,如於圖6中展示,EPROM胞元(248)層可以是平面的。 As mentioned above, the EPROM cell (248) also includes a first conductive layer (464), a second dielectric layer (466), and a second conductive layer (468). In some examples, the second conductive layer (468) may include multiple sub-layers with different oxidation properties. For example, the first sublayer (468-1) may include a tantalum aluminum alloy and the second sublayer (468-2) may include an aluminum copper alloy. In some examples, as shown in Figure 6, the EPROM cell (248) layer may be planar.

於一些範例中,這些層之至少一者可以具有相同材料性質,或是如列印頭(116)中之其他構件的相同材料。例如,該列印頭(116)可以包括含有一第一電極(684)之一憶阻器(680)、配置在該第一電極(684)之頂部上的一切換氧化物(686)、以及配置在該切換氧化物(686)頂部上之一第二電極(688)。於一些範例中,如於圖6中展示,該第二電極(688)可以是一雙層電極,亦即,其可以包括多重材料層。例如,該第二電極可以包括一第一子層(688-1)和一第二子層 (688-2)。 In some examples, at least one of these layers may have the same material properties, or the same material as other components in the print head (116). For example, the print head (116) may include a memristor (680) including a first electrode (684), a switching oxide (686) disposed on top of the first electrode (684), and A second electrode (688) is disposed on top of the switching oxide (686). In some examples, as shown in FIG. 6, the second electrode (688) may be a double-layer electrode, that is, it may include multiple material layers. For example, the second electrode may include a first sub-layer (688-1) and a second sub-layer (688-2).

在這範例中,EPROM胞元(248)之第一傳導層(464)可以是相同材料,並且於一些情況中是由相同材料之相同層所形成,如憶阻器(680)的第一電極(684)以及發射電阻器(342)的一第一層(690)之至少一者。同樣地,EPROM胞元(248)之第二介電層(466)可以是相同材料,且於一些情況中是由相同材料之相同層所形成,如憶阻器之切換氧化物(686)。更進一步地,EPROM胞元(248)之第二傳導層(468)可以是相同材料,且於一些情況中是由相同材料之相同層所形成,如憶阻器(680)的第二電極(688)以及發射電阻器(342)的一第二層(692)及/或第三層(694)之至少一者。 In this example, the first conductive layer (464) of the EPROM cell (248) may be the same material, and in some cases is formed from the same layer of the same material, such as the first electrode of a memristor (680) (684) and at least one of a first layer (690) of a transmit resistor (342). Similarly, the second dielectric layer (466) of the EPROM cell (248) may be the same material, and in some cases is formed from the same layer of the same material, such as the switching oxide (686) of a memristor. Furthermore, the second conductive layer (468) of the EPROM cell (248) may be the same material, and in some cases is formed of the same layer of the same material, such as the second electrode of the memristor (680) ( 688) and at least one of a second layer (692) and / or a third layer (694) of the emission resistor (342).

更明確地說,第一EPROM子層(468-1)、第二電極(688)的第一子層(688-1)、以及發射電阻器(342)的一第二層(692)之各者各可以是一相似材料,例如,一鉭鋁合金。於一些範例中,第一EPROM子層(468-1)、第二電極(688)的第一子層(688-1)、以及發射電阻器(342)的一第二層(692)之各者可以是相同材料層。換句話說,這些構件可以同時地藉由沉積一單一材料層而被形成。 More specifically, each of the first EPROM sublayer (468-1), the second sublayer (688-1) of the second electrode (688), and a second layer (692) of the emission resistor (342). Each may be a similar material, such as a tantalum aluminum alloy. In some examples, each of the first EPROM sublayer (468-1), the second sublayer (688-1) of the second electrode (688), and a second layer (692) of the emission resistor (342) This can be the same material layer. In other words, these components can be formed simultaneously by depositing a single material layer.

同樣地,第二EPROM子層(468-2)、第二電極(688)的第二子層(688-2)、以及發射電阻器(342)的一第三層(694)之各者可以是由相同材料所形成,例如,一鋁銅合金。於一些範例中,第二EPROM子層(468-2)、第二電極(688)的第二子層(688-2)、以及發射電阻器(342)的一第三層(694)之各者可以是相同材料層。換句話說,這些構件可以同時地藉 由沉積一單一材料層而被形成。 Similarly, each of the second EPROM sublayer (468-2), the second sublayer (688-2) of the second electrode (688), and a third layer (694) of the emission resistor (342) can be It is formed from the same material, for example, an aluminum-copper alloy. In some examples, each of the second EPROM sublayer (468-2), the second sublayer (688-2) of the second electrode (688), and a third layer (694) of the emission resistor (342) This can be the same material layer. In other words, these components can borrow simultaneously It is formed by depositing a single material layer.

列印頭(116)也可以包括數個被動層(696,699),其可以是自3000至6000埃(Angstroms)之厚度。雖然不同的構件可以共用一列印頭(116),該等構件可以是與不同的電晶體相關聯。例如,對應至閘極(460-1)和第一介電層(462-1)的一第一電晶體(698-1)可以為EPROM胞元(248)所採用,而對應至閘極(460-2)和第一介電層(462-2)的一第二電晶體(698-2)可能不為EPROM胞元(248)所採用。各電晶體可以是不同的,例如,第二電晶體(698-2)可以是具有大約為2.8微米之寬度的一電晶體並且第一電晶體(698-1)可以是具有在2.2和2.4微米厚度之間的寬度之一短通道電晶體。 The print head (116) may also include several passive layers (696, 699), which may have a thickness from 3000 to 6000 Angstroms. Although different components may share a print head (116), the components may be associated with different transistors. For example, a first transistor (698-1) corresponding to the gate (460-1) and the first dielectric layer (462-1) may be adopted by the EPROM cell (248), and corresponding to the gate ( 460-2) and a second transistor (698-2) of the first dielectric layer (462-2) may not be used by the EPROM cell (248). Each transistor may be different. For example, the second transistor (698-2) may be a transistor having a width of about 2.8 microns and the first transistor (698-1) may have a width between 2.2 and 2.4 microns. One of the widths between the short channel transistors.

藉由共同利用這些層,不同構件之多重層可以同時地被形成,因此減低形成一列印頭(116)之構件的操作。此外,因被使用以形成高介電EPROM胞元(248)之疊層目前可以被使用於其他構件,例如,憶阻器(680)和發射電阻器(342),高介電EPROM胞元(248)可以被形成而不必另外的製造設備或處理程序。 By using these layers together, multiple layers of different components can be formed simultaneously, thus reducing the operation of forming the components of a print head (116). In addition, stacks used to form high-dielectric EPROM cells (248) can currently be used in other components, such as memristors (680) and emission resistors (342), high-dielectric EPROM cells ( 248) can be formed without the need for additional manufacturing equipment or processing procedures.

本揭示之某些範例是針對具有數個高介電EPROM胞元(圖2,248)之一列印機墨匣(圖1,114)以及列印頭(圖1,116),其提供未於先前提供的數個優點,其包括用以產生小型且具有一高耦合比率的一EPROM記憶體裝置,其致使改進的記憶體裝置之規劃比率;減低一EPROM胞元(圖2,248)之覆蓋區以便釋出供用於其他構件之寶貴的矽空間並且提供與現有的列印機之反向兼容性。但是,其 預期此處所揭示的裝置可以提供有用地滿足其他主張以及數個技術性區域之不足。因此在此處所揭示之系統和方法不應被理解為對付所討論之任何特定的議題。 Some examples of this disclosure are for a printer cartridge (FIG. 1, 114) and a print head (FIG. 1, 116) having one of several high-dielectric EPROM cells (FIG. 2, 248), which are not provided in Several previously provided advantages include the ability to generate an EPROM memory device that is small and has a high coupling ratio, which results in an improved memory device planning ratio; reduced coverage of an EPROM cell (Figure 2, 248) Zone to free up valuable silicon space for other components and provide backward compatibility with existing printers. However, its It is expected that the devices disclosed herein can provide useful fulfillment of other claims as well as the deficiencies of several technical areas. The systems and methods disclosed herein should therefore not be understood as dealing with any particular issue discussed.

先前之說明已被呈現以例示和說明所述原理之範例。這說明不意欲排除或限制這些原理於所揭示的任何精確形式。許多修改和變化可鑑於上面之教示而成為可能。 The previous description has been presented to illustrate and illustrate examples of the principles described. This illustration is not intended to exclude or limit these principles to any precise form disclosed. Many modifications and variations are possible in light of the above teachings.

248‧‧‧高介電EPROM胞元 248‧‧‧High Dielectric EPROM Cell

454‧‧‧基片 454‧‧‧ Substrate

456‧‧‧源極 456‧‧‧Source

458‧‧‧汲極 458‧‧‧ Drain

460‧‧‧第一介電層 460‧‧‧First dielectric layer

462‧‧‧多晶矽層 462‧‧‧Polycrystalline silicon layer

464‧‧‧第一傳導層 464‧‧‧The first conductive layer

466‧‧‧第二介電層 466‧‧‧Second dielectric layer

468‧‧‧第二傳導層 468‧‧‧Second conductive layer

478‧‧‧第三介電層 478‧‧‧ third dielectric layer

Claims (15)

一種具有數個高介電可抹除可規劃唯讀記憶體(EPROM)胞元之列印頭,該列印頭包含:數個噴嘴,其用以沉積一數量的流體至一列印媒體上,各個噴嘴包含:一發射容室,其用以保持該數量的流體;一開孔,其用以分配該數量的流體至該列印媒體上;及一噴射器,其用以經過該開孔而噴射該數量的流體;以及數個EPROM胞元,各個EPROM胞元包含:一基片,其具有配置於其中的一源極和一汲極;一浮動閘極,其藉由一第一介電層而與該基片分離;及一控制閘,其藉由一第二介電層而與該浮動閘極分離;其中該第二介電層包含一高介電常數材料。 A printing head having several high-dielectric erasable and programmable read-only memory (EPROM) cells, the printing head includes: a plurality of nozzles for depositing a quantity of fluid onto a printing medium, Each nozzle includes: a firing chamber for holding the quantity of fluid; an opening for distributing the quantity of fluid to the printing medium; and an ejector for passing through the opening and The amount of fluid is ejected; and several EPROM cells, each EPROM cell includes: a substrate having a source and a drain disposed therein; and a floating gate through a first dielectric And a control gate separated from the floating gate by a second dielectric layer; wherein the second dielectric layer includes a high dielectric constant material. 如請求項1之列印頭,其中該流體是噴墨墨水。 A print head as claimed in claim 1, wherein the fluid is inkjet ink. 如請求項1之列印頭,其中該第二介電層包含一高介電常數氧化物材料、一高介電常數氮化物材料、或其組合。 The printing head as claimed in claim 1, wherein the second dielectric layer comprises a high dielectric constant oxide material, a high dielectric constant nitride material, or a combination thereof. 如請求項1之列印頭,其中:該浮動閘極包含: 一多晶矽層;以及與該多晶矽層接觸之一第一傳導層;並且該控制閘包含一第二傳導層。 For example, the print head of claim 1, wherein: the floating gate includes: A polycrystalline silicon layer; and a first conductive layer in contact with the polycrystalline silicon layer; and the control gate includes a second conductive layer. 如請求項1之列印頭,其中該第二介電層具有大於6之一介電質常數。 The print head of claim 1, wherein the second dielectric layer has a dielectric constant greater than one. 如請求項1之列印頭,其中該第二介電層之一電容與該第一介電層之一電容的一比率是較大於2。 For example, the print head of claim 1, wherein a ratio of a capacitance of the second dielectric layer to a capacitance of the first dielectric layer is greater than two. 如請求項1之列印頭,其中該第二介電層包含鋁氧化物、鉭氧化物、或其組合。 The printing head of claim 1, wherein the second dielectric layer comprises aluminum oxide, tantalum oxide, or a combination thereof. 一種列印機墨匣,其具有數個高介電可抹除可規劃唯讀記憶體(EPROM)胞元,該墨匣包含:一流體供應器;以及一列印頭,其用以將來自該流體供應器之流體沉積至一列印媒體上,該列印頭包含;數個EPROM胞元,各個EPROM胞元包含:一短通道EPROM電晶體,其包含配置在一基片上之一源極、一汲極、以及一閘極氧化物;一多晶矽層,其藉由該閘極氧化物而與該基片分離;一第一傳導層,其藉由一第三介電層而與該多晶矽層分離;其中:該第一傳導層經過該第三介電層中之一間隙而接觸該多晶矽層;且該第一傳導層和該多晶矽層形成該 EPROM胞元之一浮動閘極;以及一第二傳導層,其藉由一第二介電層而與該第一傳導層分離,其中:該第二傳導層形成該EPROM胞元之一控制閘;且該第二介電層具有一高介電常數。 A printer cartridge includes a plurality of high-dielectric erasable and programmable read-only memory (EPROM) cells. The ink cartridge includes: a fluid supply device; and a print head for receiving the The fluid from the fluid supply is deposited on a print medium, the print head includes; several EPROM cells, each EPROM cell includes: a short-channel EPROM transistor, which includes a source, a A drain and a gate oxide; a polycrystalline silicon layer separated from the substrate by the gate oxide; a first conductive layer separated from the polycrystalline silicon layer by a third dielectric layer Wherein: the first conductive layer contacts the polycrystalline silicon layer through a gap in the third dielectric layer; and the first conductive layer and the polycrystalline silicon layer form the A floating gate of an EPROM cell; and a second conductive layer separated from the first conductive layer by a second dielectric layer, wherein the second conductive layer forms a control gate of the EPROM cell And the second dielectric layer has a high dielectric constant. 如請求項8之列印機墨匣,其中:該流體是噴墨墨水;該列印機墨匣是一噴墨列印機墨匣;並且該列印頭是一噴墨列印頭。 The printer cartridge of claim 8, wherein: the fluid is inkjet ink; the printer cartridge is an inkjet printer cartridge; and the printhead is an inkjet printhead. 如請求項8之列印機墨匣,其中該第二介電層是在2奈米和100奈米厚度之間。 The printer cartridge of claim 8, wherein the second dielectric layer is between 2 nm and 100 nm thick. 如請求項8之列印機墨匣,其中該第一傳導層和該第二傳導層之一者具有小於400平方微米之一面積。 The printer cartridge of claim 8, wherein one of the first conductive layer and the second conductive layer has an area of less than 400 square microns. 如請求項8之列印機墨匣,其中該第二介電層之一電容大於0.15微微法拉(picofarad)。 The printer cartridge of claim 8, wherein a capacitance of one of the second dielectric layers is greater than 0.15 picofarad. 如請求項8之列印機墨匣,其中該第二介電層包含鋁氧化物、鉭氧化物、或其組合。 The printer cartridge of claim 8, wherein the second dielectric layer comprises aluminum oxide, tantalum oxide, or a combination thereof. 如請求項8之列印機墨匣,其進一步地包含一憶阻器,該憶阻器包含:一第一電極;一切換氧化物,其配置在該第一電極之頂部上;以及一第二電極,其配置在該切換氧化物之頂部上; 其中該憶阻器之該切換氧化物包含如該等數個EPROM胞元之該第二介電層的相同材料。 The printer cartridge of claim 8, further comprising a memristor, the memristor comprising: a first electrode; a switching oxide disposed on top of the first electrode; and a first Two electrodes arranged on top of the switching oxide; Wherein the switching oxide of the memristor comprises the same material as the second dielectric layer of the several EPROM cells. 如請求項14之列印機墨匣,其中該憶阻器之該切換氧化物係形成於如該等數個EPROM胞元之該第二介電層的一相同層中。 The printer cartridge of claim 14, wherein the switching oxide of the memristor is formed in a same layer as the second dielectric layer of the several EPROM cells.
TW105102210A 2015-04-15 2016-01-25 Printheads and a printer cartridge with high dielectric eprom cells TWI613798B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/US2015/025944 WO2016167763A1 (en) 2015-04-15 2015-04-15 Printheads with high dielectric eprom cells
??PCT/US15/25944 2015-04-15

Publications (2)

Publication Number Publication Date
TW201637881A TW201637881A (en) 2016-11-01
TWI613798B true TWI613798B (en) 2018-02-01

Family

ID=57126683

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105102210A TWI613798B (en) 2015-04-15 2016-01-25 Printheads and a printer cartridge with high dielectric eprom cells

Country Status (2)

Country Link
TW (1) TWI613798B (en)
WO (1) WO2016167763A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019009903A1 (en) 2017-07-06 2019-01-10 Hewlett-Packard Development Company, L.P. Data lines to fluid ejection devices
WO2019009902A1 (en) 2017-07-06 2019-01-10 Hewlett-Packard Development Company, L.P. Decoders for memories of fluid ejection devices
MX2021009129A (en) 2019-02-06 2021-09-10 Hewlett Packard Development Co Memories of fluidic dies.
CN113439027A (en) * 2019-02-06 2021-09-24 惠普发展公司,有限责任合伙企业 Problem determination in response to measurements
AU2019428297B2 (en) 2019-02-06 2023-03-09 Hewlett-Packard Development Company, L.P. Multiple circuits coupled to an interface
MX2021008895A (en) * 2019-02-06 2021-08-19 Hewlett Packard Development Co Communicating print component.
EP3710276B1 (en) 2019-02-06 2021-12-08 Hewlett-Packard Development Company, L.P. Die for a printhead
WO2020162970A1 (en) 2019-02-06 2020-08-13 Hewlett-Packard Development Company, L.P. Print component with memory circuit
HUE055167T2 (en) 2019-02-06 2021-11-29 Hewlett Packard Development Co Die for a printhead
JP7146094B2 (en) 2019-02-06 2022-10-03 ヒューレット-パッカード デベロップメント カンパニー エル.ピー. die for print head
PL3713768T3 (en) 2019-02-06 2023-09-11 Hewlett-Packard Development Company, L.P. Die for a printhead
US11787173B2 (en) 2019-02-06 2023-10-17 Hewlett-Packard Development Company, L.P. Print component with memory circuit
PL3749524T3 (en) 2019-04-19 2022-01-24 Hewlett-Packard Development Company, L.P. Integrated circuit for a fluid ejection device with a first memory and a second memory

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090250745A1 (en) * 2008-04-07 2009-10-08 Kim Jae-Ho Memory devices and methods of forming and operating the same
US20110310181A1 (en) * 2009-03-31 2011-12-22 Hewlett-Packard Development Company, L.P. Inkjet pen/printhead with shipping fluid
US20140218436A1 (en) * 2011-09-27 2014-08-07 Ning Ge Circuit that selects eproms individually and in parallel

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6750502B1 (en) * 2000-03-21 2004-06-15 Micron Technology, Inc. Technique to quench electrical defects in aluminum oxide film
US7446369B2 (en) * 2005-08-04 2008-11-04 Spansion, Llc SONOS memory cell having high-K dielectric
US7365387B2 (en) * 2006-02-23 2008-04-29 Hewlett-Packard Development Company, L.P. Gate-coupled EPROM cell for printhead
US20090067256A1 (en) * 2007-09-06 2009-03-12 Micron Technology, Inc. Thin gate stack structure for non-volatile memory cells and methods for forming the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090250745A1 (en) * 2008-04-07 2009-10-08 Kim Jae-Ho Memory devices and methods of forming and operating the same
US20110310181A1 (en) * 2009-03-31 2011-12-22 Hewlett-Packard Development Company, L.P. Inkjet pen/printhead with shipping fluid
US20140218436A1 (en) * 2011-09-27 2014-08-07 Ning Ge Circuit that selects eproms individually and in parallel

Also Published As

Publication number Publication date
TW201637881A (en) 2016-11-01
WO2016167763A1 (en) 2016-10-20

Similar Documents

Publication Publication Date Title
TWI613798B (en) Printheads and a printer cartridge with high dielectric eprom cells
JP5879434B2 (en) Ink level sensor and related methods
US20130182022A1 (en) On-chip fluid recirculation pump for micro-fluid applications
US7837886B2 (en) Heating element
JP2016501138A (en) Fluid ejecting apparatus incorporating an ink level sensor
WO2016068927A1 (en) Printhead with a number of shared enclosed selectors
EP2761656A1 (en) Circuit that selects eproms individually and in parallel
US7524036B2 (en) Liquid ejection head and liquid ejection apparatus
JP5382905B2 (en) Method for manufacturing piezoelectric element and method for manufacturing liquid discharge head
US8382257B2 (en) Piezoelectric actuator, method of manufacturing piezoelectric actuator, liquid ejection head, method of manufacturing liquid ejection head and image forming apparatus
US9950520B2 (en) Printhead having a number of single-dimensional memristor banks
US7862156B2 (en) Heating element
US9776400B2 (en) Printhead with a number of memristor cells and a parallel current distributor
JP7064649B1 (en) Head tip, liquid injection head and liquid injection recording device
CN107073954B (en) Printhead assembly and method of printing
US20180022103A1 (en) Printheads with eprom cells having etched multi-metal floating gates
WO2016068833A1 (en) Head with a number of silicon nitride non-volatile memory devices
WO2016014082A1 (en) Printhead with a number of memristor cells and a number of firing cells coupled to a shared fire line
JP2006111000A (en) Liquid ejection head and image forming apparatus having it
US20180186151A1 (en) Alternative ground lines for inter-slot grounding
JP2009218401A (en) Method of driving piezoelectric actuator, and method of driving liquid ejection head
JP2017533129A (en) Inkjet print head
JP6047548B2 (en) Inkjet recording head
US9987842B2 (en) Printhead with a number of memristors and inverters
WO2016068872A1 (en) Printhead with memristors having different structures

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees