TWI612282B - Pressure sensor manufacturing device and pressure sensor manufacturing method - Google Patents

Description

Pressure sensor manufacturing device and pressure sensor manufacturing method

The present invention relates to a pressure sensor manufacturing apparatus and a pressure sensor manufacturing method for manufacturing a pressure sensor, the pressure sensor comprising: a pressure sensing unit that detects a physical quantity that is changed by pressure; The calculation unit calculates an output value using an output calculation formula based on the detected physical quantity of the pressure sensing unit.

For example, pressure sensors that measure the pressure of air pressure or the like exist in various kinds and are used for various purposes. For example, Patent Document 1 describes a pressure measuring device that measures a pressure in a measurement environment using a semiconductor type pressure sensor.

The semiconductor type pressure sensor includes a semiconductor that is deformed by pressure as one of the pressure sensing portions and whose resistance changes by the deformation. In addition, the semiconductor-type pressure sensor includes a calculation unit that calculates a pressure value based on the resistance, and outputs the calculated pressure value as an output value (measurement value). That is, the semiconductor type pressure sensor utilizes a piezoresistive pressure sensor.

In addition to piezoresistive, there are also pressure sensors that utilize electrostatic capacitance or strain.

The capacitance type pressure sensor includes two plate electrodes arranged in parallel as a pressure sensing portion. When a plate electrode is subjected to pressure, it is deformed, whereby the electrostatic capacitance between the plate electrodes changes. Further, the capacitance type pressure sensor includes an arithmetic unit that calculates a pressure value based on the electrostatic capacitance, and outputs the calculated pressure value as an output value.

Moreover, the pressure sensor using strain is constructed in the following manner: The deformation amount of the diaphragm which is deformed by the pressure is detected, and the pressure value is calculated based on the detection result of the strain, and the calculated pressure value is output as an output value.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-291861

Furthermore, in recent years, the industry has pursued pressure sensors that can measure pressure with higher precision.

Therefore, as described above, the output calculation formula necessary for calculating the specific value (output value) of the pressure based on the physical quantity (for example, electric resistance, electrostatic capacitance, and strain) that changes depending on the pressure is appropriately calculated, that is, The correspondence between physical quantity and pressure is important. Further, in order for the pressure sensor to measure the pressure with high precision (outputting a high-precision output value), it is important to consider that the physical quantity changes depending on the temperature of the measurement environment.

Therefore, it is necessary to prepare a plurality of measurement environments having different pressures and temperatures. Further, it is necessary to obtain a correspondence relationship between a physical quantity, a temperature, and a pressure which are changed by pressure in each of the plurality of measurement environments prepared as described above, and based on the plurality of determinations in each of the plurality of measurement environments According to the corresponding relationship, an output calculation formula that can accurately measure the pressure within the pressure range and temperature range assumed by the use of the pressure sensor is appropriately calculated.

In order to prepare a plurality of measurement environments, a thermostatic bath is used in Patent Document 1. In other words, by changing the temperature in the constant temperature bath while the pressure measuring device is housed in the thermostatic chamber, a plurality of different measurement environments are realized. Further, in the case of Patent Document 1, the pressure of a plurality of measurement environments is atmospheric pressure.

However, when the temperature of the measurement environment such as the constant temperature bath described in Patent Document 1 is changed, it takes time to change the temperature, and it is necessary to wait until the temperature after the change is stable. Thus, until the physical quantity changes according to a pressure It takes time (inefficient efficiency) until the output calculation formula necessary for calculating the pressure value is calculated. The result is a reduction in the productivity of the pressure sensor.

As a countermeasure for this, it is considered to prepare a measurement environment in which a plurality of thermostats maintained at different temperatures are prepared. Thereby, there is no need for a time for the temperature to be changed or the temperature after the change is stable.

However, in this case, it is necessary to ensure the correlation of the pressures between the plurality of measurement environments. For example, in the case of Patent Document 1, in the case where a plurality of thermostats having different temperatures are provided, it is necessary to ensure that the pressure is the same (atmospheric pressure) in each of the plurality of thermostats.

Therefore, a pressure measuring device that sets the measurement pressure in each of a plurality of measurement environments having different temperatures (in the case of Patent Document 1 in a plurality of thermostatic chambers) is considered.

However, there is an individual difference in the pressure measuring device provided in each of a plurality of measurement environments having different temperatures. Due to this individual difference, the relationship between the pressures of a plurality of measurement environments cannot be guaranteed. In this way, the output calculation formula calculated by using a plurality of measurement environments in which the relationship of pressures is not guaranteed is low in accuracy (reliability). As a result, the pressure sensor using the output equation as described above cannot output a high-precision output value. That is, the measurement accuracy of the pressure is low.

Further, the pressure measuring device capable of measuring the pressure with high accuracy considers, for example, that the pressure measuring standard is installed in each of a plurality of measurement environments, but there are still individual differences. Also, the pressure measurement standard is very expensive. Thus, if a plurality of pressure measuring standards having a very high price are used, the result is that the production cost of the pressure sensor becomes high.

Therefore, an object of the present invention is to provide a pressure sensor that detects a physical quantity that is changed by a pressure, and a pressure sensor that calculates an output value using an output calculation coefficient based on a detected physical quantity of the pressure sensing unit. The output calculation coefficient will be calculated in a high-accuracy manner and in a short time and at a low cost.

In order to solve the above technical problem, according to an aspect of the present invention, a pressure sensor manufacturing apparatus is provided which is a pressure sensor, and the pressure sensor is provided with a pressure sensing portion that is subjected to pressure The physical quantity of the change is detected; and the calculation unit calculates the output value using the output calculation formula based on the detected physical quantity of the pressure sensing unit; and the manufacturing apparatus includes a plurality of calculation equation calculation chambers, and the like The pressure sensor is maintained at a different temperature; a common pressure measuring device that measures a pressure of a plurality of calculation formula calculation chambers; and a control unit that is configured to be accommodated in the plurality of calculation formulas Calculating the detected physical quantity of the pressure sensing unit of the pressure sensor when each of the chambers is used, and calculating the pressure value of each of the chambers by the plurality of calculation formulas measured by the common pressure measuring device Calculate the aforementioned output calculation formula.

Moreover, according to another aspect of the present invention, a pressure sensor manufacturing method is provided, which is a pressure sensor that is provided with a pressure sensing portion that changes a physical quantity that is subjected to pressure. And an arithmetic unit that calculates an output value using an output calculation formula based on the detected physical quantity of the pressure sensing unit; and the manufacturing method maintains a plurality of calculation formula calculation chambers at different temperatures; and the pressure sensor And the detection physical quantity and the common use of the pressure sensing unit of the pressure sensor when being accommodated in each of the plurality of calculation formulas in the chamber The pressure calculation value of each of the chambers is calculated by the plurality of calculation formulas measured by the pressure measuring device, and the output calculation formula is calculated.

According to the present invention, it is possible to provide a pressure sensor that detects a physical quantity that is subjected to a change in pressure, and a pressure sensor that calculates an output value using an output calculation formula based on the detected physical quantity of the pressure sensing unit. With high accuracy, the output calculation formula is calculated at a low cost in a short time.

10‧‧‧ Pressure sensor manufacturing device

12A‧‧‧ Calculation formula calculation chamber

12B‧‧‧ Calculation formula calculation chamber

12C‧‧‧ Calculation formula calculation chamber

14‧‧‧ calculus confirmation chamber

16‧‧‧ Pressure regulating device

18‧‧‧Pressure measuring device

18a‧‧‧ Pressure test

18b‧‧‧Pressure Sensing Department

20‧‧‧ Body Department

22‧‧‧ 盖部

24‧‧‧Tray

26‧‧‧Contact terminals

28‧‧‧Paltier components

30‧‧‧pressure tube

32‧‧‧Connected pipe

32a‧‧‧Flow obstruction

40‧‧‧ piston components

50‧‧‧Control Department

52‧‧‧Cell Temperature Control Department

54‧‧‧Cell pressure control department

56‧‧‧Pressure Acquisition Department

58‧‧‧Electrostatic Capacitor Acquisition Department

60‧‧‧ Temperature Acquisition Department

62‧‧‧ Output calculation formula calculation unit

100‧‧‧pressure sensor

100a‧‧‧ Pressure Sensing Department

100b‧‧‧pressure test

100c‧‧‧Temperature sensing unit / temperature sensor

100d‧‧‧ Calculation Department

100e‧‧‧Memory Department

100f‧‧‧External connection terminal

C‧‧‧ electrostatic capacitor

F‧‧‧Output calculus

H‧‧‧High level

P‧‧‧ pressure

P1‧‧‧ pressure

P2‧‧‧ pressure

P3‧‧‧ pressure

P4‧‧‧ pressure

Pm‧‧‧ pressure value

Ps‧‧‧ measured value

T‧‧‧temperature

T1‧‧‧ temperature

T2‧‧‧ temperature

T3‧‧‧ temperature

Tc‧‧‧ temperature

Fig. 1 is a schematic block diagram showing a pressure sensor manufacturing apparatus according to an embodiment of the present invention.

Figure 2 is a perspective view of a pressure sensor.

Figure 3 is a structural diagram of a pressure sensor.

Figure 4 is a schematic cross-sectional view of a chamber.

Figure 5 is a block diagram showing a control system of a pressure sensor manufacturing apparatus.

Figure 6 is a graph showing the electrostatic capacitance of a pressure sensor obtained in a plurality of different measurement environments.

Fig. 7 is a flow chart showing the flow of calculation of the output calculus of the pressure sensor.

Figure 8 is a diagram showing the height positions of a plurality of chambers.

Fig. 9 is a view showing a communication pipe in which a plurality of chambers and a pressure measuring device are connected to each other in the pressure sensor manufacturing apparatus of another embodiment.

Fig. 10 is a view showing a communication pipe in which a plurality of chambers are connected to a pressure measuring device in a pressure sensor manufacturing apparatus according to still another embodiment.

A pressure sensor manufacturing apparatus according to an aspect of the present invention is a pressure sensor, comprising: a pressure sensing unit that detects a physical quantity that is subjected to pressure changes; and an arithmetic unit that Calculating an output value using an output calculation formula based on the detected physical quantity of the pressure sensing unit; and the manufacturing apparatus includes: a plurality of calculation formula calculation chambers, wherein the pressure sensors are respectively accommodated and respectively have different temperatures a pressure measuring device that is common to the pressure measuring device for measuring the pressure of the plurality of calculation formula chambers; And a control unit for detecting a physical quantity of the pressure sensing unit of the pressure sensor when being accommodated in each of the plurality of calculation formula chambers and the pressure measuring device using the common pressure measuring device The plurality of calculation formulas calculate the pressure values of the respective chambers to calculate the output calculation formula.

According to this aspect, the output calculation formula of the pressure sensor can be calculated in a high-accuracy manner and in a short time and at a low cost.

It is possible that the pressure sensor further includes a temperature sensing unit for detecting a temperature, and the physical quantity is an electrostatic capacitance detected by the pressure sensing unit; and the calculation unit of the pressure sensor is based on the detection temperature of the temperature sensing unit. Calculating the output value by detecting the electrostatic capacitance of the pressure sensing unit and the output calculation formula; the control unit is based on the detected temperature of the temperature sensing unit, the detected capacitance of the pressure sensing unit, and the common The output calculation formula is calculated by the pressure value measured by the pressure measuring device. Thereby, an output equation with higher accuracy can be obtained, and the pressure sensor can measure the pressure with higher precision.

Preferably, the distance between each of the plurality of calculation formula calculation chambers and the common pressure measurement device is substantially the same. Thereby, the pressure of each chamber is measured under substantially the same conditions by a common pressure measuring device. As a result, an output calculus of a pressure sensor with higher accuracy can be obtained.

Preferably, the pressure sensor is housed in the pressure sensing portion of the pressure sensor in the calculation equation in the calculation formula and is located at substantially the same height as the pressure sensing portion of the common pressure measuring device. The calculation formula is calculated in the chamber. Thereby, the error due to the difference between the pressure actually received by the pressure sensing portion and the measured value of the pressure measuring device can be reduced. As a result, an output calculus of a pressure sensor with higher accuracy can be obtained.

Preferably, the plurality of calculation formula calculation chambers are arranged such that the height positions are substantially the same. Thereby, the fluid orientation inside the chamber can be calculated for the high temperature calculation formula Other chamber movements are suppressed. As a result, the pressure measuring device can measure the pressure of the chamber with high precision. As a result, an output calculus of a pressure sensor with higher accuracy can be obtained.

Preferably, the pressure manufacturing apparatus has a common pressure adjusting device that adjusts the pressure of each of the plurality of calculation formula calculation chambers. The configuration and control of the pressure sensor manufacturing apparatus are simplified as compared with the case where the pressure adjusting means is provided in each of the plurality of calculation formula calculation chambers. As a result, the output calculation formula of the pressure sensor can be calculated at a lower cost.

Preferably, the pressure device includes a calculation type confirmation chamber that accommodates a pressure sensor that holds an output calculation formula calculated by the control unit; and the control unit is housed in the calculation type confirmation chamber. The difference between the output value of the pressure sensor and the pressure value of the calculation equation chamber is used to determine the accuracy of the output calculation formula of the pressure sensor in the calculation equation chamber. Thereby, the reliability of the output calculus of the pressure sensor is improved.

Preferably, the pressure and temperature of the chamber for confirming the calculation formula are different from the pressure and temperature of the calculation chamber for the calculation formula. Thereby, the reliability of the output calculus of the pressure sensor is further improved.

Preferably, the pressure of the chamber for confirming the calculation formula is measured by the aforementioned pressure measuring device. Thereby, the accuracy determination of the output calculus of the pressure sensor has high reliability.

Preferably, the distance between the calculation type confirmation chamber and the common pressure measurement device is substantially the same as the distance between each of the plurality of calculation formula calculation chambers and the common pressure measurement device. Thereby, the accuracy determination of the output calculus of the pressure sensor has high reliability.

Preferably, the pressure sensor is located in the pressure sensing portion of the pressure sensor in the chamber of the calculation formula and the pressure sensing portion of the common pressure measuring device. The method of substantially the same height is accommodated in the above-described calculation type confirmation chamber. As a result, the error due to the difference between the pressure actually received by the pressure sensing unit in the chamber for calculating the calculation formula and the measured value of the pressure measuring device can be reduced. As a result, the accuracy determination of the output calculus of the pressure sensor has high reliability.

Preferably, the calculation type confirmation chamber and the plurality of calculation formula calculation chambers are arranged such that the height is substantially the same when the pressure is measured by the common pressure measuring device. As a result, it is suppressed that the fluid inside the chamber for calculating the temperature is shifted toward the calculation chamber for the calculation formula. As a result, the pressure measuring device can accurately measure the pressure of the calculation type confirmation chamber. As a result, the accuracy determination of the output calculus of the pressure sensor has high reliability.

Preferably, the pressure adjusting device that adjusts the pressure of the chamber for confirming the calculation formula is common to the pressure adjusting device that adjusts the pressure of each of the plurality of calculation formula chambers. As a result, the accuracy of the output calculus of the pressure sensor can be determined at a lower cost.

Another aspect of the present invention relates to a pressure sensor manufacturing method for manufacturing a pressure sensor, the pressure sensor comprising: a pressure sensing portion that detects a physical quantity that is changed by pressure; and an arithmetic unit, The output value is calculated using an output calculation formula based on the detected physical quantity of the pressure sensing unit; and the manufacturing method maintains a plurality of calculation formula calculation chambers at different temperatures; and the pressure sensor is sequentially accommodated in the plurality of calculations In the calculation chamber, the detection physical quantity of the pressure sensor of the pressure sensor when the user is accommodated in each of the plurality of calculation formula chambers, and the aforementioned measurement by the common pressure measurement device The above calculation formula is calculated by calculating the pressure value of each of the chambers by a plurality of calculation formulas.

According to this aspect, the output calculation formula of the pressure sensor can be calculated in a high-accuracy manner and in a short time and at a low cost.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

Fig. 1 is a schematic block diagram showing a pressure sensor manufacturing apparatus according to an embodiment of the present invention.

First, the pressure sensor 100 manufactured by the pressure sensor manufacturing apparatus 10 shown in Fig. 1 will be described.

2 is a perspective view of the pressure sensor 100. 3 is a structural view showing the configuration of the pressure sensor 100.

As shown in FIGS. 1 and 2, the pressure sensor 100 includes a pressure sensing unit 100a that senses pressure.

In the case of the present embodiment, the pressure sensor 100 is an electrostatic capacitance type pressure sensor. The pressure sensing unit 100a includes two plate electrodes arranged in parallel. A plate electrode is constructed in such a manner as to be deformed by pressure. When the one plate electrode is deformed, the electrostatic capacitance C between the two plate electrodes changes. The pressure sensing unit 100a detects the electrostatic capacitance C that is changed by the pressure. Further, the pressure sensing unit 100a is provided inside the pressure sensor 100, and is provided with a pressure port 100b that communicates with the outside and the pressure sensing portion 100a so that pressure acts on the pressure sensing portion 100a.

Further, in order to measure the pressure with high precision, as shown in FIG. 3, the pressure sensor 100 includes a temperature sensing unit (temperature sensor) 100c that senses the temperature. Specifically, the physical quantity detected by the pressure sensing unit 100a (the electrostatic capacitance C in the case of the present embodiment) also changes depending on the temperature. Therefore, the pressure sensor 100 includes the temperature sensing unit 100c so as to output an output value that is considered in consideration of a change in the physical quantity caused by the temperature.

Further, the pressure sensor 100 includes an arithmetic unit 100d that calculates a pressure value Pm based on the electrostatic capacitance C detected by the pressure sensing unit 100a and the temperature T detected by the temperature sensing unit 100c, and calculates the pressure. The value Pm is output to the outside as an output value (measured value).

Specifically, the calculation unit 100d calculates the pressure value Pm based on the capacitance C, the temperature T, and the output calculation formula F stored in the memory unit 100e. Output calculus F is used to The electrostatic capacitance C and the temperature T are used to calculate the pressure value Pm. In the case of the present embodiment, the output calculation formula F is defined by a high-order polynomial using a plurality of coefficients b00 to bnm as shown in the equation 1.

If the output calculation formula F is marked in rows and columns, it can be expressed as in Equation 2.

That is, the pressure value Pm can be regarded as the product of the row C of the column 1 m rows, the row B of the m columns × n rows, and the row T of the n columns × 1 row. In the formulas 1 and 2, m and n are integers. The larger the number of m and n, the more accurately the pressure value Pm can be obtained from the electrostatic capacitance C and the temperature T.

Therefore, in the case of the present embodiment, the pressure sensor 100 outputs a plurality of coefficients b00 to bnm of the output equation F shown in Equation 1, that is, each component b00 to bnm of the rank B shown by the number 2 It is stored (held) in the memory unit 100e, and is used as an output calculation formula F for calculating the pressure value Pm based on the electrostatic capacitance C detected by the pressure sensing unit 100a and the temperature T detected by the temperature sensing unit 100c.

Further, as shown in FIG. 3, the pressure sensor 100 includes a plurality of external connection terminals 100f for connection to an external device (not shown). Via the external connection terminal 100f, The pressure sensor 100 can calculate the electrostatic capacitance C detected by the pressure sensing unit 100a, the temperature T detected by the temperature sensing unit 100c, and the output expression F shown by the formula 1 (or Equation 2). The calculated pressure value Pm is output.

The pressure sensor manufacturing apparatus 10 of the present embodiment in which the pressure sensor 100 described above is manufactured is configured to calculate a plurality of coefficients b00 to bnm represented by Equation 1 as a function for using the capacitance C and the temperature. T calculates the output calculation formula F of the pressure value Pm.

As will be described in a rough manner, the pressure sensor manufacturing apparatus 10 prepares a plurality of measurement environments having different pressures from temperature, and sets the pressure sensor 100 in each measurement environment. Next, the electrostatic capacitance C and the temperature T of the pressure sensor 100 of each measurement environment are obtained. The obtained electrostatic capacitance C and temperature T are substituted into the output calculation formula F shown in Formula 1, and the pressure of the corresponding measurement environment is substituted into Pm. Thereby, a plurality of equations in which a plurality of coefficients b00 to bnm are unknowns are formed (that is, a simultaneous equation is formed), and the joint equation is solved to calculate coefficients b00 to bnm.

Further, in order to calculate the m × n coefficients b00 to bnm of the output equation shown in the formula 1, the pressure of the measurement environment in which the pressure value Pm is substituted, the capacitance C of the pressure sensor 100, and the pressure are required. A combination of the temperatures T of the sensors 100. Thus, the pressure sensor manufacturing apparatus 10 prepares m x n measurement environments having different pressures from temperature. Further, m×n simultaneous equations are formed based on the electrostatic capacitance C and the temperature T of the pressure sensor 100 in each measurement environment and the pressure of the measurement environment. By solving the m × n simultaneous equations, m × n coefficients b00 to bnm are calculated.

Hereinafter, a specific configuration of the pressure sensor manufacturing apparatus 10 for calculating the output calculation formula F (that is, the plurality of coefficients b00 to bnm) of the pressure sensor 100 shown in the formula 1 will be described.

Further, for the sake of easy understanding, the configuration of the pressure sensor manufacturing apparatus 10 for calculating the output calculation formula F shown in the equation 3, that is, the twelve coefficients b00 to b32 will be described below.

[Number 3] Pm = b 00. C ⁰ . T ⁰ + b 01. C ⁰ . T ¹ + b 02. C ⁰ . T ² + b 10. C ¹ . T ⁰ + b 11. C ¹ . T ¹ + b 12. C ¹ . T ² + b 20. C ² . T ⁰ + b 21. C ² . T ¹ + b 22. C ² . T ² + b 30. C ³ . T ⁰ + b 31. C ³ . T ¹ + b 32. C ³ . T ² (Expression 3)

As shown in Fig. 1, the pressure sensor manufacturing apparatus 10 includes first to third arithmetic equation calculation chambers 12A to 12C and a calculation type confirmation chamber 14, which can accommodate the pressure sensor 100; The device 16 adjusts the pressure (in chamber pressure) in the plurality of chambers 12A-12C, 14; the pressure measuring device 18 measures the chamber pressure of the plurality of chambers 12A-12C, 14; and the control unit 50 .

The first to third arithmetic formula calculation chambers 12A to 12C and the calculation type confirmation chamber 14 are for providing a plurality of measurement environments having different pressures and temperatures, and the pressure sensors 100 are sequentially accommodated in order. The chambers 12A to 12C and 14 have substantially the same configuration. Therefore, only the first calculation formula calculation chamber 12A will be described, and the description of the other chambers will be omitted.

FIG. 4 is a schematic cross-sectional view showing the inside of the first calculation formula calculation chamber 12A.

As shown in FIG. 4, in the case of the present embodiment, the first calculation formula calculation chamber 12A is roughly provided with a main body portion 20 having an opening thereon and accommodating a plurality of pressure sensors 100, and a lid portion 22, The opening of the body portion 20 is covered. By covering the opening of the main body portion 20 by the lid portion 22, a sealed space is formed in the calculation formula calculation chamber 12A.

Further, in the case of the present embodiment, the plurality of pressure sensors 100 are placed on the tray 24, and the trays 24 are housed in the main body portion 20 of the first calculation formula calculation chamber 12A.

As shown in FIG. 4, a plurality of external connection terminals 100f of the pressure sensor 100 are in contact with a plurality of contact terminals 26 provided in the calculation formula calculation chamber 12A. The contact terminals 26 are provided in the lid portion 22 of the calculation formula calculation chamber 12A, and the lid portion 22 closes the opening of the main body portion 20 to come into contact with the external connection terminal 100f of the pressure sensor 100. Moreover, the details of the contact terminals 26 will be described below, which are connected to the control of the pressure sensor manufacturing device 10. Department 50.

Further, the calculation formula calculation chamber 12A includes, for example, a Peltier element 28 as a temperature adjustment mechanism for adjusting the temperature (chamber temperature) inside thereof. The plurality of Peltier elements 28 are provided in the calculation formula calculation chamber 12A so as to sandwich the pressure sensor 100. This Peltier element 28 is controlled by a control unit 50 of a pressure sensor manufacturing apparatus 10 to be described later.

Further, as shown in Fig. 1, the first calculation formula calculation chamber 12A is connected to a pressure adjusting device 16 that adjusts the pressure in the chamber. The pressure adjusting device 16 includes, for example, a positive pressure source (for example, a compressor) (not shown) and a negative pressure source (for example, a vacuum pump) (not shown) connected to the first calculation formula calculation chamber 12A, and the compressor The output (positive pressure) and the output of the vacuum pump (negative pressure) are controlled, and the chamber pressure of the chamber 12A for the first calculation formula is controlled.

Further, the pressure adjusting device 16 is not provided for each of the calculation formula calculation chambers 12A to 12C and the calculation type confirmation chamber 14, but is opposed to the plurality of chambers 12A as shown in FIG. One of the ~12C and 14 is commonly set. The common pressure adjusting device 16 is connected to each of the plurality of chambers 12A to 12C, 14 via a pressure pipe 30. Therefore, the chamber pressures of the plurality of chambers 12A to 12C, 14 are the same.

In this manner, by providing one pressure adjusting device 16 in common with respect to the plurality of chambers 12A to 12C, 14 , the configuration of the pressure sensor manufacturing device 10 is compared with the case where the pressure adjusting device is provided in each of the chambers. Control is simplified and the cost of the device 10 is suppressed to a low level.

Further, details of the pressure regulating device 16 will be described later, which are controlled by the control unit 50 of the pressure sensor manufacturing apparatus 10.

The chamber pressures of the calculation formula calculation chambers 12A to 12C and the calculation type confirmation chamber 14 adjusted by the pressure adjustment device 16 are measured by the pressure measuring device 18. Based on the measurement result of the pressure measuring device 18, the control unit 50 of the pressure sensor manufacturing device 10 controls the pressure adjusting device 16. Thereby, the pressure in the chamber is fixedly maintained at a specific pressure.

The pressure measuring device 18 is a pressure measuring device that can measure pressure with high precision. Further, the details will be described later, and in order to calculate the output calculation formula F of the pressure sensor 100 shown in the equation 3, the pressure measuring device 18 is also used. For example, the pressure measuring device 18 is a pressure measuring device that is corrected by a pressure measuring device that measures the pressure with higher precision, such as a primary standard device or a secondary standard device, and that is adjusted based on the calibration result.

Further, the pressure measuring device 18 is not provided for each of the calculation formula calculation chambers 12A to 12C and the calculation type confirmation chamber 14, but is opposed to the plurality of chambers 12A as shown in FIG. One of the ~12C and 14 is commonly set. As shown in FIG. 1, the common pressure measuring device 18 measures the pressure in the chamber by measuring the pressure in the communication tube 32 that communicates with each of the plurality of chambers 12A to 12C, 14. Therefore, as shown in FIG. 4, the communication pipe 32 is connected to the pressure port 18a of the pressure measuring device 18.

Hereinafter, a control system of the pressure sensor manufacturing apparatus 10 will be described.

FIG. 5 shows a control system of the pressure sensor manufacturing apparatus 10 for calculating the output calculation formula F of the pressure sensor 100 shown in Equation 3.

In order to calculate the output calculation formula F of the pressure sensor 100, the control unit 50 of the pressure sensor manufacturing apparatus 10 includes a chamber temperature control unit 52 for confirming the calculation formula calculation chambers 12A to 12C and the calculation formula. The chamber temperature of each of the chambers 14 is controlled; and the chamber pressure control unit 54 controls the chamber pressure of each of the plurality of chambers 12A to 12C, 14 via the pressure adjusting device 16.

The chamber temperature control unit 52 of the control unit 50 of the pressure sensor manufacturing apparatus 10 controls the Peltier elements 28 of each of the first to third arithmetic equation calculation chambers 12A to 12C, and has different chambers. The chamber temperature is maintained inside the chamber. For example, the temperature of the chamber in the first calculation formula calculation chamber 12A is maintained at T1, the temperature in the chamber in the second calculation formula calculation chamber 12B is maintained at T2, and the temperature in the third calculation formula calculation chamber 12C is maintained. Maintain as T3 (T1>T2>T3).

The chamber temperature control unit 52 controls the Peltier element 28 of the calculation type confirmation chamber 14 to maintain the chamber temperature at a predetermined temperature Tc. The predetermined temperature Tc is, for example The intermediate temperature between temperatures T1 and T3.

The chamber pressure control unit 54 of the control unit 50 of the pressure sensor manufacturing apparatus 10 controls the pressure adjusting device 16 to sequentially change the first to third arithmetic equation calculating chambers 12A to 12C and the arithmetic type checking chamber 14 Pressure in the chamber. For example, the chamber pressure of each of the plurality of chambers 12A-12C, 14 will be described later, and is sequentially changed to a specific pressure P1, P2, P3, P4 (P1>P2>P3>P4). .

Further, the control unit 50 of the pressure sensor manufacturing apparatus 10 includes a pressure acquiring unit 56 that acquires the first to third arithmetic equation calculation chambers 12A to 12C and the calculation type confirmation chamber measured by the pressure measuring device 18. The measured value of the chamber pressure of 14 is Ps. Further, the control unit 50 includes a capacitance acquiring unit 58 that acquires an electrostatic capacitance detected by the pressure sensing unit 100a of the pressure sensor 100 when it is housed in each of the plurality of chambers 12A to 12C and 14. C; and a temperature acquisition unit 60 that acquires the temperature T detected by the temperature sensing unit 100c.

The pressure acquiring unit 56 of the control unit 50 of the pressure sensor manufacturing apparatus 10 receives the measured value Ps of the pressure measuring device 18. Specifically, the pressure measuring device 18 measures the pressure in the communication pipe 32 that communicates with each of the plurality of chambers 12A to 12C and 14 , and outputs the measured value Ps to the control unit 50 .

Further, the chamber pressure control unit 54 controls the pressure adjusting device 16 based on the measured value Ps of the pressure measuring device 18 acquired by the pressure acquiring unit 56. Thereby, the chamber pressures of the first to third arithmetic equation calculation chambers 12A to 12C and the calculation type confirmation chamber 14 are accurately adjusted to specific pressures P1, P2, P3, and P4. Alternatively, the chamber pressure can be adjusted based on the measured value of the pressure gauge of the pressure regulating device.

The capacitance acquiring unit 58 of the control unit 50 of the pressure sensor manufacturing apparatus 10 receives the electrostatic capacitance C from the pressure sensor 100 in the first to third arithmetic equation calculation chambers 12A to 12C.

Further, the electrostatic capacitance C detected by the pressure sensing unit 100a of the pressure sensor 100 differs depending on the pressure and differs depending on the temperature. Therefore, the electrostatic capacitance C can be pressurized with P and temperature. The function of degree T (P, T) is expressed. In the case of the present embodiment, the chambers 12A to 12C of the first to third equations are calculated, and the chamber pressures are sequentially changed to P1, P2, P3, and P4 as described above. Further, each of the first to third arithmetic expression calculation chambers 12A to 12C is maintained at different temperatures T1, T2, and T3. Thus, in the twelve measurement environments different from the pressure and the temperature, as shown in FIG. 6, 12 electrostatic capacitances C (P1, T1) to C (P4, T3) can be obtained. In FIG. 6, for example, the electrostatic capacitance C (P1, T1) indicates the electrostatic capacitance obtained when the pressure in the chamber is P1 and the chamber temperature is T1.

Further, the temperature acquisition unit 60 acquires the temperature T from the temperature sensing unit 100c of the pressure sensor 100 in the first to third arithmetic expression calculation chambers 12A to 12C. Since the first to third arithmetic equation calculation chambers 12A, 12B, and 12C are maintained at temperatures T1, T2, and T3, respectively, the temperature acquired by the temperature acquisition unit 60 is substantially the same as the temperatures.

Further, the capacitance acquiring unit 58 and the temperature acquiring unit 60 of the control unit 50 of the pressure sensor manufacturing apparatus 10 acquire the electrostatic capacitance C (P, T) and the temperature T from the pressure sensor 100 via the contact terminal 26 of the chamber. . Therefore, the pressure sensor 100 includes a mode in which the capacitance C (P, T) and the temperature T are output via the external connection terminal 100f; and based on the capacitance C (P, T), the temperature T, and the output. The mode in which the pressure value Pm is calculated by the calculation formula F.

Further, the control unit 50 of the pressure sensor manufacturing apparatus 10 includes an output calculation formula calculation unit 62 based on the measured value Ps (that is, P1 to P4) of the pressure measuring device 18 acquired by the pressure acquiring unit 56, and the electrostatic capacitance. The electrostatic capacitance C (P, T) of the pressure sensing unit 100a of the pressure sensor 100 acquired by the acquisition unit 58 and the temperature T of the temperature sensing unit 100c of the pressure sensor 100 acquired by the temperature acquisition unit 60 (T1 to T3), and the output equation F (the 12 coefficients b00 to b32) shown in Equation 3 is calculated.

Specifically, the output calculation formula calculation unit 62 forms a coefficient b00~ for each of a plurality of measurement environments (the first to third calculation formula calculation chambers 12A to 12C) having different chamber temperatures and chamber pressures. B32 is the equation of the unknown.

For example, for the first calculation formula calculation chamber 12A, according to the pressure P1 to P4, the temperature T1, and electrostatic capacitance C (P1, T1) ~ C (P4, T1) make four equations. In other words, the first equation obtained by substituting P1, T1, and C (P1, T1) into the output equation F shown in Equation 3, and the number obtained according to P2, T1, and C (P2, T1) are created. 2 equation, the third equation obtained from P3, T1, and C (P3, T1), and the fourth equation obtained from P4, T1, and C (P4, T1).

Similarly, in the second calculation formula calculation chamber 12B, four equations are created based on the pressures P1 to P4, the temperature T2, and the capacitances C (P1, T2) to C (P4, T2). That is, the fifth equation obtained by substituting P1, T2, and C (P1, T2) into the output equation F shown in Equation 3, and the number obtained according to P2, T2, and C (P2, T2) are created. Equation 6, Equation 7 obtained from P3, T2, and C (P3, T2), and Equation 8 obtained from P4, T2, and C (P4, T2).

Similarly, in the third calculation formula calculation chamber 12C, four equations are created based on the pressures P1 to P4, the temperature T3, and the capacitances C (P1, T3) to C (P4, T3). That is, the ninth equation obtained by substituting P1, T3, and C (P1, T3) into the output equation F shown in the equation 3, and the number obtained according to P2, T3, and C (P2, T3) are formed. Equation 10, Equation 11 obtained from P3, T3, and C (P3, T3), and Equation 12 obtained from P4, T3, and C (P4, T3).

The output calculation formula calculation unit 62 uses the first to fourth equations obtained for the first calculation formula calculation chamber 12A, the fifth to eighth equations obtained for the second calculation formula calculation chamber 12B, and The calculus formula calculates the ninth to twelfth equations obtained by the chamber 12C, that is, solves the cascading equation including the twelve equations, and calculates the twelve coefficients b00 to b32 of the output calculus F shown in the equation 3. Thereby, the output calculation formula calculation unit 62 calculates the output calculation formula F of the pressure sensor 100.

Hereinafter, an example of the calculation of the output calculation formula F of the pressure sensor 100 of the pressure sensor manufacturing apparatus 10 will be described with reference to the flowchart shown in FIG. 7 . Moreover, the calculation of the output equation F of the pressure sensor 100 described herein is The process is not intended to limit the inventors.

First, as shown in FIG. 7, in step S100, for example, the pressure sensor 100 before shipment from the factory is set (accommodated) in the first calculation formula calculation chamber 12A in which the chamber temperature is T1.

Then, in step S110, the control unit 50 of the pressure sensor manufacturing apparatus 10 acquires the electrostatic capacitance C detected by the pressure sensing unit 100a from the pressure sensor 100 in the first calculation formula calculation chamber 12A ( P1, T1) to C (P4, T1), and temperature T1 detected by the temperature sensing unit 100c. That is, the first combination of P1, T1, and C (P1, T1), the second combination of P2, T1, and C (P2, T1), and the third combination of P3, T1, and C (P3, T1) And the fourth combination of P4, T1, and C (P4, T1) is acquired by the control unit 50.

Then, in step S120, the pressure sensor 100 is carried out from the first calculation formula calculation chamber 12A, and is set in the second calculation formula calculation chamber 12B whose chamber temperature is T2.

In step S130, the control unit 50 of the pressure sensor manufacturing apparatus 10 acquires the electrostatic capacitance C (P1 detected by the pressure sensing unit 100a from the pressure sensor 100 in the second calculation formula calculation chamber 12B. T2) to C (P4, T2) and the temperature T2 detected by the temperature sensing unit 100c. That is, the fifth combination of P1, T2, and C (P1, T2), the sixth combination of P2, T2, and C (P2, T2), and the seventh combination of P3, T2, and C (P3, T2) And the eighth combination of P4, T2, and C (P4, T2) is acquired by the control unit 50.

In the step S140, the pressure sensor 100 is carried out from the second calculation formula calculation chamber 12B, and is set to the third calculation formula calculation chamber 12C whose chamber temperature is T3.

In step S150, the control unit 50 of the pressure sensor manufacturing apparatus 10 acquires the electrostatic capacitance C (P1 detected by the pressure sensing unit 100a from the pressure sensor 100 in the third calculation equation calculation chamber 12C. T3) to C (P4, T3) and the temperature T3 detected by the temperature sensing unit 100c. That is, the ninth combination of P1, T3, and C (P1, T3), the tenth combination of P2, T3, and C (P2, T3), the eleventh combination of P3, T3, and C (P3, T3) And the 12th combination of P4, T3, and C (P4, T3) is acquired by the control unit 50.

In step S160, the control unit 50 (output calculation formula calculation unit 62) of the pressure sensor manufacturing apparatus 10 takes the pressures P1 to P4, the temperature T1, and the electrostatic capacitance C (P1, T1) to C acquired in step S110 ( The first to fourth combinations of P4 and T1), the pressures P1 to P4 obtained in step S130, the temperature T2, and the fifth to eighth combinations of the capacitances C (P1, T2) to C (P4, T2), and Each of the ninth to twelfth combinations of the pressures P1 to P4 and T3 obtained in step S150 and the electrostatic capacitances C (P1, T3) to C (P4, T3) are substituted into the output equation F shown in Equation 3. . Thereby, a parallel equation including 12 equations in which the coefficients b00 to b32 are unknown is formed. The output calculation formula calculation unit 62 calculates the simultaneous equation and calculates a plurality of coefficients b00 to b32, that is, calculates the output calculation formula F.

When the calculation of the plurality of coefficients b00 to b32, that is, the calculation of the output calculation formula F is completed in step S160, in order to confirm the reliability (accuracy) of the output calculation formula F, the pressure sensor is performed in step S170. 100 is provided in the calculation type confirmation chamber 14.

In step S180, the control unit 50 of the pressure sensor manufacturing apparatus 10 determines the accuracy of the plurality of coefficients b00 to b32 calculated in step 160, that is, the output calculation formula F.

Specifically, the control unit 50 of the pressure sensor manufacturing apparatus 10 writes the plurality of coefficients b00 to b32 calculated in step S160, that is, the output calculation formula F, into the pressure sensing accommodated in the calculation type confirmation chamber 14. In the memory unit 100e of the device 100.

The pressure sensor 100, in which the output equation F is written, measures the pressure in the chamber 14 for the calculation formula. In other words, the pressure value Pm is calculated based on the electrostatic capacitance C detected by the pressure sensing unit 100a and the temperature T detected by the temperature sensing unit 100c, and the output calculation formula F written in the memory unit 100e is used. This pressure value Pm is output to the control unit 50 of the pressure sensor manufacturing apparatus 10.

The pressure value Pm outputted from the pressure sensor 100 in the calculation-type confirmation chamber 14 is compared with the measured value Ps of the chamber pressure of the calculation chamber chamber 14 measured by the pressure measuring device 18, and the pressure is used. The control unit 50 of the sensor manufacturing apparatus 10 determines the accuracy of the output calculation formula F written in the pressure sensor 100.

For example, based on the difference between the pressure value Pm of the pressure sensor 100 and the measured value Ps of the pressure measuring device 18, the accuracy of the output calculation formula F is determined. When the difference is below a certain threshold, it is determined that the output equation F is reliable.

Further, in the case of the present embodiment, the temperature in the calculation type confirmation chamber 14 and the first to third calculation formula calculation cavities for calculating the calculation formula F (the plurality of coefficients b00 to b32) are calculated. The temperature T1 of the chamber 12 is different from Tc. Therefore, in the measurement environment of the temperature Tc different from the temperature T1 to T3 for calculating the calculation of the calculation formula F, it is determined that the output equation F which is good is high in accuracy and reliability. Therefore, the pressure sensor 100 that measures the pressure using the output calculation formula F having high accuracy and reliability can measure the pressure with high precision and high reliability.

Further, the method of determining the accuracy of the output calculation formula F can be changed in accordance with the measurement accuracy and reliability required by the pressure sensor 100.

For example, after the end of step S150 shown in FIG. 7, the pressure sensor 100 in the third calculation formula calculation chamber 12C is kept in the original state, and the output calculation formula F is calculated in step S160. The calculated output calculation formula F is written in the memory unit 100e of the pressure sensor 100 that is waiting in the third calculation equation calculation chamber 12C. Further, the pressure sensor 100 measures the chamber pressure of the third calculation formula calculation chamber 12C, and acquires the measured pressure value Pm. The difference D1 between the measured value Pm obtained and the measured value Ps of the chamber pressure of the third calculation formula chamber 12C measured by the pressure measuring device 18 is calculated.

Next, the pressure sensor 100 is transported into the calculation type confirmation chamber 14, and the chamber pressure of the calculation type confirmation chamber 14 is measured by the pressure sensor 100, and the measured pressure value Pm is obtained. The difference D2 between the measured value Pm obtained and the measured value Ps of the intracavity pressure of the chamber 14 for the calculation formula measured by the pressure measuring device 18 is calculated.

The difference D1 obtained by the third calculation formula calculation chamber 12C for outputting the calculated temperature T3 of the calculation formula F is compared with the temperature Tc different from the calculated temperature T1 to T3 for outputting the calculation formula F. The calculation formula confirms the difference D2 obtained by the chamber 14. Larger in comparison When the difference is below a certain threshold, the output expression F is determined to be reliable.

In this case, an output equation F of higher reliability can be obtained as compared with the case where only the difference D2 is used to determine the output expression F. Therefore, the pressure sensor 100 that measures the pressure using the more reliable output calculation formula F can measure the pressure with high precision and higher reliability.

Further, the method of determining the accuracy of the output calculation formula F can be performed by other methods. For example, in order to calculate the twelve coefficients b00 to b32 of the output calculation formula F shown in the formula 3, as described above, a combination of 12 sets of measurement data (that is, a measured value (pressure value) of the pressure measuring device 18, The electrostatic capacitance detected by the pressure sensing unit 100a of the pressure sensor 100 and the combination of the temperatures detected by the temperature sensing unit 100c of the pressure sensor 100 are used. By substituting the 12 sets of measurement data into the output calculation formula F as shown in the equation 3, 12 equations (12 equations) in which the coefficients b00 to b32 are unknowns are created, and the joint equation is solved by solving the equation And calculate (determine) 12 coefficients b00~b32.

The electrostatic capacitance and the temperature of the combination of the measurement data are substituted into a plurality of coefficients b00 to b32, and the pressure value is calculated by the determined output calculation formula F. The difference D3 between the calculated pressure value and the measured value of the pressure measuring device 18 corresponding to the electrostatic capacitance and temperature substituted for this purpose is calculated. The calculation of the difference D3 was performed for each of the combinations of the twelve sets of measurement data. The difference D3, which is the difference between the specific maximum and the maximum difference D3max, is calculated by comparing each of the 12 differences D3 calculated based on each of the combinations of the 12 sets of measurement data. If the maximum difference D3max is equal to or less than the specific threshold value, it is determined that the output calculation formula F is reliable.

In this case, the plurality of measurement data used for calculating (determining) the plurality of coefficients b00 to b32 of the output calculation formula F are used to output the determination of the accuracy of the calculation formula F. That is, the determination of the accuracy of the output calculation formula F can be performed without using the calculation type confirmation chamber 14 and further, without accommodating the pressure sensor 100 in the chamber. Therefore, the determination of the output calculation formula F can be completed in a short time.

And, each of the 12 calculations based on the combination of the 12 sets of measurement data was compared. The difference D3 is the difference D2 (the difference between the measured value measured by the pressure sensor 100 and the measured value measured by the pressure measuring device 18 and the measured value measured by the pressure measuring device 18), and the difference between the maximum and the maximum is determined. If the specific difference is less than the threshold value, the output calculation formula F can be determined to be reliable. In this case, the accuracy determination of the output calculation formula F can be performed with higher reliability.

According to the pressure sensor manufacturing apparatus 10 of the present embodiment described above, the output calculation formula F of the pressure sensor 100 can be calculated in a short time and at a low cost with high accuracy (reliability).

First, in order to calculate the output calculus of the pressure sensor 100, a plurality of measurement environments having different temperatures are required. As shown in FIG. 5, the cavity is calculated by the first to third equations maintained at different temperatures. It is realized by chambers 12A to 12C. Therefore, the output calculation formula F can be calculated in a short time as compared with the case where a plurality of measurement environments having different temperatures are realized by changing the temperature of one chamber. That is, the time required for the change of the temperature or the standby time until the temperature after the change is stable is no longer present.

In addition, the pressure in the plurality of measurement environments having different temperatures, that is, the pressures in the chambers of the first to third arithmetic equations 12A to 12C, which are different in temperature, are measured by a common pressure measuring device 18. That is, the pressure in the chambers of the chambers 12A to 12C is accurately measured by one common reference. Thus, the relationship between the pressures between the chambers 12A-12C is ensured. For example, it is ensured that the chamber pressure of the first calculation formula calculation chamber 12A is the same as the chamber pressure of the second calculation formula calculation chamber 12B. In addition, when the chamber pressure of the first calculation formula calculation chamber 12A is changed from P1 to P2 and again to P1, it is ensured that P1 before changing to P2 is the same as P1 after changing from P2.

Therefore, the pressure in the chamber is measured with high precision by the common pressure measuring device 18, and the relationship between the pressures in the chamber is ensured in a plurality of measurement environments, that is, using the first to third The calculation formula calculates the output calculation formula F calculated by the chambers 12A to 12C, and the accuracy (reliability) thereof is high. As a result, the output equation F as described above is used. The pressure sensor 100 can output a high-precision output value (pressure value Pm). That is, the measurement accuracy of the pressure is high.

Further, the chamber pressures of the first to third arithmetic expression calculation chambers 12A to 12C are measured by a common pressure measuring device 18. Therefore, the pressure sensor 100 can be calculated at a lower cost than when the pressure measuring device 18 is provided in each of the first to third arithmetic equation calculation chambers 12A to 12C to measure the pressure in the chamber. Highly accurate output calculus F.

As described above, in the pressure sensor manufacturing apparatus 10 of the present embodiment, it is possible to calculate the output required for the pressure sensor 100 that accurately measures the pressure in a short time and at a low cost with high accuracy. The calculus F.

Moreover, in order to calculate the high-accuracy output calculation formula F of the pressure sensor 100, the pressure sensor manufacturing apparatus 10 of the present embodiment has the following features.

First, in the case of the present embodiment, as described above, the accuracy of the output calculation formula F of the pressure sensor 100 performed by the calculation type confirmation chamber 14 is based on the calculation measured by the pressure measurement device 18. The type confirmation is performed using the measured value Ps of the chamber 14. In other words, the calculation formula confirmation chamber used for the determination of the intracavity pressure of the first to third arithmetic expression calculation chambers 12A to 12C and the accuracy of the output calculation formula F is used. The chamber pressure of 14 is measured by a common pressure measuring device 18. Therefore, the determination of the output calculation formula F has high reliability. Therefore, the output calculation formula F judged to be good by the determination with high reliability has high accuracy.

Further, in the case of the present embodiment, as shown in FIG. 1, the first to third arithmetic expression calculation chambers 12A to 12C and the calculation type confirmation chamber 14 have substantially the same distance from the pressure measurement device 18. The way it is configured. In the case of the present embodiment, a plurality of chambers 12A to 12C and 14 are disposed on the same circumference C centering on the pressure measuring device 18. Thereby, the pressure measuring device 18 can measure the chamber pressure of the plurality of chambers 12A to 12C, 14 under substantially the same conditions. Due to the pressure measuring device 18 based on substantially the same conditions The calculation of the output calculation formula F of the pressure sensor 100 and the determination of the accuracy thereof are performed based on the measured values, so that the output calculation formula F obtained as described above has high accuracy.

Further, in the case of the present embodiment, as shown in FIG. 4, the pressure sensation of the pressure sensor 100 accommodated in the first to third arithmetic expression calculation chambers 12A to 12C and the calculation type confirmation chamber 14 is shown in FIG. The measuring unit 100a and the pressure sensing unit 18b of the pressure measuring device 18 are located at substantially the same height level H. That is, the pressure sensor 100 is housed in the plurality of chambers 12A to 12C, 14 such that the pressure sensing portion 100a is at the height level H.

Thereby, there is no difference in pressure between the position of the pressure sensing portion 100a of the pressure sensor 100 and the position of the pressure sensing portion 18b of the pressure measuring device 18 due to the difference in height. Therefore, the error between the actual pressure generated by the electrostatic capacitance C detected by the pressure sensing unit 100a and the measured value Ps of the pressure measuring device 18 is reduced. As a result, the output calculation formula F of the pressure sensor 100 calculated based on the capacitance C and the measured value Ps of the pressure measuring device 18 has high accuracy.

Further, in the case of the present embodiment, as shown schematically in FIG. 8, the first to third arithmetic equation calculation chambers 12A to 12C and the calculation type confirmation chamber 14 are disposed at substantially the same height position.

As shown in FIG. 8 , the pressure measuring device 18 communicates with each of the first to third calculation formula calculation chambers 12A to 12C and the calculation type confirmation chamber 14 via the communication pipe 32 . Therefore, the plurality of chambers 12A to 12C and 14 are also in communication with each other via the communication tube 32. Thus, fluid (e.g., air) inside each of the plurality of chambers 12A-12C, 14 can be moved to other chambers.

In addition, as described above, the temperatures of the first to third arithmetic equation calculation chambers 12A to 12C and the calculation type confirmation chamber 14 are different from each other. Therefore, in a case where the chamber having a high internal temperature is disposed at a lower position than the chamber having a lower internal temperature, the passage from the chamber having the higher internal temperature toward the chamber having a lower internal temperature rises through the communication tube 32. The flow of fluid.

In order to suppress the occurrence of the flow of the fluid passing through the communication pipe 32, as shown in FIG. 8, the first to third equation calculation chambers 12A to 12C and the calculation type confirmation chamber 14 are arranged at substantially the same height position. . Thereby, the pressure measuring device 18 can accurately measure the chamber pressure of the chambers 12A to 12C and 14 via the communication tube 32. As a result, the output calculation formula F of the pressure sensor 100 calculated based on the measured value of the pressure measuring device 18 has high accuracy.

As described above, according to the present embodiment, the pressure sensing unit 100a that detects the electrostatic capacitance C that is changed by the pressure and the detection capacitance F that is detected by the pressure sensing unit 100a use the output calculation formula F to calculate the output. The pressure sensor 100 of the value calculation unit 100d can calculate the output calculation formula F at a low cost in a short time with high accuracy.

The present invention has been described above by way of the above embodiments, but the embodiments of the present invention are not limited thereto.

For example, in the case of the above-described embodiment, the first to third calculation formula calculation chambers 12A to 12C and the calculation type confirmation chamber 14 are used to suppress the occurrence of fluid flow through the communication tube 32 that communicates with them. And is configured at the same height position. Further, in order to suppress the occurrence of the flow of the fluid passing through the communication pipe 32, as shown in FIG. 9, the flow passage choke portion 32a may be provided in the communication pipe 32. For example, the flow path choke portion 32a is formed by the reduced diameter portion of the communication tube 32, and is provided between the first calculation formula calculation chamber 12A and the pressure measurement device 18 having a high internal temperature. Thereby, it is possible to suppress the high-temperature fluid in the first calculation formula calculation chamber 12A from flowing into the communication tube 32. Thereby, the influence on the measured value of the pressure measuring device 18 due to the flow of the fluid passing through the communication pipe 32 is further suppressed, and as a result, the output calculus of the pressure sensor 100 can be calculated with higher accuracy. Formula F.

As shown in FIG. 9, a filter may be provided at the communication pipe 32 instead of providing the reduced diameter portion 32a. Further, as shown in FIG. 10, a plurality of piston members 40 may be disposed inside the communication pipe 32. The piston member 40 is slidably contacted with the inner circumferential surface of the communication tube 32 and is extendable in the direction in which the communication tube 32 extends The moving mode is disposed in the communication pipe 32. In addition, the piston member 40 is disposed between each of the first to third arithmetic equation calculation chambers 12A to 12C and the calculation type confirmation chamber 14 and the pressure measurement device 18.

According to the piston member 40 as described above, the movement of the fluid between the chambers is prevented, and the pressure is transmitted from the chamber to the pressure measuring device 18. Thereby, the occurrence of the flow of the fluid passing through the communication pipe 32 is prevented, and as a result, the output calculation formula F of the pressure sensor 100 can be calculated with higher accuracy.

Further, in the case of the above-described embodiment, in order to determine the accuracy of the output calculation formula F of the pressure sensor 100, the calculation type confirmation chamber 14 is provided. Further, the calculation type confirmation chamber 14 adjusts the pressure in the chamber by adjusting the pressure adjusting means 16 of the chamber pressures of the chambers 12A to 12C by adjusting the first to third equations. Further, the calculation type confirmation chamber 14 measures the pressure in the chamber by measuring the pressure in the chambers of the chambers 12A to 12C in the first to third calculation formulas. Therefore, the calculation type confirmation chamber 14 has a low rate of utilization.

Specifically, in the case of the above-described embodiment, the accuracy determination of the output calculation formula F of the pressure sensor 100 of the calculation formula confirmation chamber 14 is performed under a specific pressure P3. Therefore, when the pressures P1, P2, and P4 different from the specific pressure P3 are maintained by the pressure adjusting device 16 to maintain the pressure in the chambers of the first to third arithmetic expression calculating chambers 12A to 12C, the calculation formula is confirmed. Since the chamber pressure in the chamber 14 is different from the specific pressure P3, the accuracy determination of the output calculation formula F of the pressure sensor 100 of the calculation type confirmation chamber 14 cannot be performed. Therefore, the calculation type confirmation chamber 14 has a low rate of utilization, and thus the output of the pressure sensor manufacturing apparatus 10 is low.

As a countermeasure for this, the chamber pressure of the calculation type confirmation chamber 14 is adjusted by another pressure adjustment device different from the pressure adjustment device 16, and is measured by a pressure measuring device different from the pressure measuring device 18. Thereby, the utilization rate of the calculation type confirmation chamber 14 can be increased, and the output of the pressure sensor manufacturing apparatus 10 can be increased. high. However, in this case, if the reliability of the accuracy determination of the output calculation formula F of the pressure sensor 100 of the chamber 14 is considered, it is preferable to check the cavity of the chamber 14 for the calculation formula. The pressure measuring device that measures the indoor pressure substantially has the same measurement accuracy as the pressure measuring device 18 that measures the chamber pressures of the first to third arithmetic formula calculating chambers 12A to 12C.

The calculation type confirmation chamber 14 itself may be omitted. That is, the determination operation of the accuracy of the output calculation formula F of the pressure sensor 100 may be omitted.

For example, in the case of the above-described embodiment, 12 measurement environments having different temperatures (T1 to T3) and pressures (P1 to P4) are realized by using the first to third equations to calculate the chambers 12A to 12C. . In each of the plurality of measurement environments, the electrostatic capacitance C of the pressure sensing unit 100a of the pressure sensor 100 and the temperature T of the temperature sensing unit 100c are acquired, and the measured value Ps of the pressure measuring device 18 is acquired. The calculation of the output calculation formula F of the pressure sensor 100 is performed based on a combination of 12 sets of the electrostatic capacitance C, the temperature T, and the Ps.

On the other hand, for example, the number of calculation formula calculation chambers having different chamber temperatures can be increased, and the number of times of the pressure change in each of the calculation formula calculation chambers can be increased to increase the temperature. The number of measurement environments that differ from the pressure increases. Thereby, a combination of more electrostatic capacitance C, temperature T, and measured value Ps can be obtained. Further, based on the combination of the more acquisitions, the output calculation formula F of the sensor 100 having higher accuracy can be calculated. Thus, the operation for determining the accuracy of the output calculation formula F of the pressure sensor 100 can be omitted.

Further, in the case of the above-described embodiment, there are three calculation equation calculation chambers, but the embodiment of the present invention is not limited thereto. In the embodiment of the present invention, at least two calculation equation calculation chambers are provided, and the internal pressure of at least two chambers is measured by a common pressure measuring device.

Further, in the case of the above embodiment, the pressure sensor manufacturing apparatus 10 manufactures the electrostatic capacitance type pressure sensor 100, specifically, the pressure sensing unit 100a is used. The measured electrostatic capacitance C is used to calculate the output calculation formula F. However, the pressure sensor manufacturing apparatus according to the embodiment of the present invention is not limited to the electrostatic capacitance type pressure sensor.

For example, the pressure sensing unit may be a semiconductor type pressure sensor composed of a semiconductor that is subjected to pressure and whose resistance changes. In this case, the pressure sensor manufacturing device replaces the electrostatic capacitance and calculates the output calculation formula of the pressure sensor based on the resistance.

That is, the pressure sensor manufacturing apparatus according to the embodiment of the present invention broadly manufactures a pressure sensor having a pressure sensing unit that detects a physical quantity that is changed by pressure.

In this regard, the physical quantity detected by the pressure sensing portion of the pressure sensor may be pressure. In this case, the output calculation formula for calculating the output value (pressure value) based on the pressure is used to correct the pressure.

Further, the pressure sensor 100 manufactured by the pressure sensor manufacturing apparatus 10 of the above-described embodiment is calculated based on the electrostatic capacitance C (physical quantity), the temperature T, and the output calculation formula F which are changed by the pressure. The pressure value is output as the output value, but is not limited thereto.

For example, the pressure sensor may be configured to calculate a pressure value based on an electrostatic capacitance that changes in pressure and an output calculation formula, and output the calculated pressure value as an output value. The output calculation formula in this case does not include the parameter of the temperature T as in the output calculation formula F shown in the equation 3. However, since the output calculus of the pressure sensor is calculated based on the electrostatic capacitance and pressure obtained by each of a plurality of measurement environments (plurality of chambers) having different temperatures, the output calculation formula considers the temperature. formula. Therefore, the pressure sensor using the output calculation formula as described above is excellent in temperature characteristics.

[Industrial availability]

The present invention is directed to a pressure sensing unit that detects a physical quantity that is subjected to a change in pressure, and a pressure sensor that manufactures a calculation unit that calculates an output value using an output calculation formula based on the detected physical quantity of the pressure sensing unit, and The manufacturing method is applicable.

12A‧‧‧ Calculation formula calculation chamber

12B‧‧‧ Calculation formula calculation chamber

12C‧‧‧ Calculation formula calculation chamber

16‧‧‧ Pressure regulating device

18‧‧‧Pressure measuring device

28‧‧‧Paltier components

30‧‧‧pressure tube

32‧‧‧Connected pipe

50‧‧‧Control Department

52‧‧‧Cell Temperature Control Department

54‧‧‧Cell pressure control department

56‧‧‧Pressure Acquisition Department

58‧‧‧Electrostatic Capacitor Acquisition Department

60‧‧‧ Temperature Acquisition Department

62‧‧‧ Output calculation formula calculation unit

100‧‧‧pressure sensor

C‧‧‧ electrostatic capacitor

P‧‧‧ pressure

P1~P4‧‧‧ pressure

Pm‧‧‧ pressure value

Ps‧‧‧ measured value

T‧‧‧temperature

T1‧‧‧ temperature

T2‧‧‧ temperature

T3‧‧‧ temperature

Tc‧‧‧ temperature

Claims (16)

A pressure sensor manufacturing apparatus for manufacturing a pressure sensor, the pressure sensor comprising: a pressure sensing unit that detects a physical quantity that is changed by pressure; and an arithmetic unit that is based on the pressure sense The detected physical quantity of the measuring unit calculates an output value using an output calculation formula; and the manufacturing apparatus includes: a plurality of calculation formula calculation chambers, wherein the pressure sensors are respectively accommodated and maintained at different temperatures; common a pressure measuring device that measures a pressure of the plurality of calculation formula calculation chambers; and a control unit that is configured to be based on the pressure sensor when being accommodated in each of the plurality of calculation formula calculation chambers The detected physical quantity of the pressure sensing unit and the pressure value of each of the plurality of calculation formulas measured by the pressure measuring device that is commonly used are used to calculate the output calculation formula. The pressure sensor manufacturing apparatus according to claim 1, wherein the pressure sensor further includes a temperature sensing unit that detects a temperature; and the calculating unit of the pressure sensor is based on the detected temperature of the temperature sensing unit and the pressure sensing. Calculating the physical value and the output calculation formula to calculate the output value; and the control unit is based on the detected temperature of the temperature sensing unit, the detected physical quantity of the pressure sensing unit, and the pressure measuring device by the common pressure measuring device The aforementioned output calculation formula is calculated from the pressure value. The pressure sensor manufacturing apparatus of claim 1 or 2, wherein the detected physical quantity of the pressure sensing portion is an electrostatic capacitance. The pressure sensor manufacturing apparatus of claim 1 or 2, wherein the detected physical quantity of the pressure sensing portion is a resistance. The pressure sensor manufacturing apparatus according to claim 1 or 2, wherein a distance between each of said plurality of calculation formula calculation chambers and said common pressure measuring means is substantially the same. The pressure sensor manufacturing apparatus according to claim 1 or 2, wherein the pressure sensor calculates pressure sensing of the pressure sensing unit of the pressure sensor in the chamber and the pressure measuring device in common by the aforementioned calculation formula The part is located at substantially the same height and is accommodated in the calculation equation calculation chamber. The pressure sensor manufacturing apparatus according to claim 1 or 2, wherein the plurality of calculation formula calculation chambers are disposed in such a manner that the height positions are substantially the same. A pressure sensor manufacturing apparatus according to claim 1 or 2, wherein there is a common pressure adjusting means for adjusting the pressure of each of said plurality of calculation formula calculating chambers. The pressure sensor manufacturing apparatus according to claim 1 or 2, further comprising: a calculation type confirmation chamber that accommodates a pressure sensor that holds an output calculation formula calculated by the control unit; and the control unit is based on the accommodation The difference between the output value of the pressure sensor in the chamber for the calculation of the equation and the pressure value of the chamber for the calculation formula is determined, and the output equation of the pressure sensor in the chamber for calculating the equation is determined. Accuracy. The pressure sensor manufacturing apparatus according to claim 9, wherein the pressure and temperature of the calculation type confirmation chamber are different from the pressure and temperature of the calculation formula calculation chamber. The pressure sensor manufacturing apparatus according to claim 9, wherein the pressure of the arithmetic verification chamber is measured by the common pressure measuring device. The pressure sensor manufacturing apparatus according to claim 11, wherein the distance between the calculation type confirmation chamber and the common pressure measuring device and the pressure of each of the plurality of calculation formula calculation chambers and the common pressure are measured. The distance between the devices is approximately the same. The pressure sensor manufacturing apparatus according to claim 11, wherein the pressure sensor is located in the pressure sensing portion of the pressure sensor in the chamber for confirming the equation and the pressure sensing portion of the pressure measuring device in common The method of substantially the same height is accommodated in the above-described calculation type confirmation chamber. The pressure sensor manufacturing apparatus according to claim 11, wherein the calculation type confirmation chamber and the plurality of calculation formula calculation chambers are disposed substantially at the same height position. The pressure sensor manufacturing apparatus according to claim 9, wherein the adjusting means for adjusting the pressure of the chamber for confirming the calculation formula and the pressure adjusting means for adjusting the pressure of each of the plurality of calculating chambers For common. A pressure sensor manufacturing method for manufacturing a pressure sensor, the pressure sensor comprising: a pressure sensing portion that detects a physical quantity that is changed by pressure; and an arithmetic unit that is based on the aforementioned pressure sense The detected physical quantity of the measuring unit calculates an output value using an output calculation formula; and the manufacturing method maintains a plurality of calculation formula calculation chambers at different temperatures; and the pressure sensor is sequentially housed in the plurality of calculation formula calculation chambers And based on the detected physical quantities of the pressure sensing unit of the pressure sensor when being stored in each of the plurality of calculation formulas, and the plurality of calculation formulas measured by the common pressure measuring device The output calculation formula is calculated using the pressure values of the respective chambers.