TWI607674B - Impedance matching method and impedance matching system - Google Patents

Description

Impedance matching method and impedance matching system

The invention belongs to the technical field of semiconductor processing, and in particular relates to an impedance matching method and an impedance matching system.

In the preparation process of the semiconductor device, the RF pulse power source is generally used to excite the process gas in the reaction chamber to form a plasma to deposit, etch, etc. the surface of the workpiece to be processed. In the process of manufacturing, it is usually necessary to match the output impedance and load impedance of the RF pulse power supply by means of an impedance matching system to eliminate power reflection, thereby ensuring that the reaction chamber can obtain maximum power from the RF pulse power source.

Figure 1 is a block diagram of a conventional impedance matching system. Referring to FIG. 1, the impedance matching system includes a detecting unit, a control unit, and an execution unit. The detecting unit is configured to detect whether a radio frequency power signal output by the radio frequency pulse power source exists, and detect a parameter required for performing a matching control algorithm; and the control unit detects the parameter detected by the detecting unit when the radio frequency power signal output by the radio frequency pulse power source exists Performing a matching control algorithm and sending a matching instruction to the execution unit, and the execution unit matches the output impedance and the load impedance of the RF pulse power source according to the matching instruction from the control unit; when the RF power signal output by the RF pulse power supply does not exist, the control unit does not exist. An instruction to return to the preset matching position is sent to the execution unit, and the execution unit does not perform the matching operation according to the instruction returning the preset matching position from the control unit and returns to the preset matching position. The preset matching position is a matching initial position preset by the impedance matching system.

However, the above-mentioned impedance matching system inevitably has the following problems in the process of impedance matching, that is, when the RF power source outputs the RF power signal in the form of a pulse, the frequency of the RF power signal such as the RF power signal shown in FIG. It is 13.56MHz, the pulse frequency is 100Hz, and the duty ratio is 50%. If the RF power supply does not currently output the RF power signal, the matching work will not be performed and the preset matching position will be returned. If the RF power supply does not currently output the RF power signal, then The preset matching position starts to match the output impedance and the load impedance of the RF power supply, which makes the impedance matching speed of the impedance matching system too slow, and each time the RF power signal has a short period, it is easy to cause the RF power signal at each time. Impedance matching cannot be completed when present, resulting in impedance matching not being achieved during the entire process.

The present invention is directed to solving the technical problems existing in the prior art, and provides an impedance matching method and an impedance matching system, which can improve the rate of impedance matching, thereby avoiding the problem that impedance matching cannot be achieved during the entire process.

The present invention provides an impedance matching method for matching an output impedance of a radio frequency pulse power supply with a load impedance, the method comprising the steps of: step S1, collecting a pulse output signal of the radio frequency pulse power source, and determining according to the pulse output signal Whether the RF power source currently outputs the RF power signal, and if so, executing step S2, otherwise performing step S3; step S2, matching the output impedance and the load impedance of the RF pulse power source from the current matching position, and matching the matched The matching position is recorded as the current matching position, and then proceeds to step S1; in step S3, the current matching position is kept unchanged; the above steps S1 to S3 are repeatedly executed until the end of the process.

Step S2 includes the following sub-steps: S21, detecting a parameter required for the matching control algorithm; S22, performing a matching control algorithm according to the parameter to obtain a finger for adjusting the matching position And, according to the instruction, matching the output impedance and the load impedance of the RF pulse power source from the current matching position; S23, the matched matching position is recorded as the current matching position, and the process goes to step S1.

Wherein, before step S1, step S0 is further included: detecting whether the radio frequency pulse power is turned on, and if yes, proceeding to step S1; if not, returning to the preset matching position.

The step S1 includes the following sub-steps: S11, obtaining a current value of the flag bit according to the pulse output signal of the RF pulse power source, wherein the flag bit is used to indicate whether the RF power source currently outputs the RF power signal; S12. Determine, according to the predetermined rule and the current value of the flag bit, whether the RF power source currently outputs a radio frequency power signal; wherein the predetermined rule of the flag bit refers to whether the radio frequency pulse power source currently outputs an RF power signal and The correspondence between the values of the flag bits.

The predetermined rule of the flag bit is: when the flag bit is high level, the RF power source currently outputs the RF power signal, and when the flag bit is low level, the RF power source does not currently output the RF power signal; or When the flag bit is low, it indicates that the RF power supply currently outputs the RF power signal. When the flag bit is high, it indicates that the RF power supply does not currently output the RF power signal.

The present invention also provides an impedance matching system including an impedance matcher for matching an output impedance and a load impedance of a radio frequency pulse power supply. The system further includes a pulse detecting unit electrically connected to the RF pulse power source and the impedance matching device for collecting a pulse output signal of the RF pulse power source, and determining, according to the pulse output signal, whether the RF pulse power source is currently The RF power signal is output, and the judgment result is output to the impedance matcher. Moreover, the impedance matcher is configured to: when the RF power source currently outputs the RF power signal, start from the current matching position, the output impedance and the load impedance of the RF pulse power source are Matching the line, and matching the matched matching position as the current matching position, and then instructing the pulse detecting unit to continue collecting the pulse output signal of the RF pulse power source; and maintaining the current match when the RF pulse power source does not currently output the RF power signal The position is unchanged.

The pulse detecting unit is configured to obtain a current value of the flag bit according to the pulse output signal of the RF pulse power source; and determine whether the RF power source currently outputs the RF power based on the predetermined rule and the current value of the flag bit. a signal, wherein the flag bit is used to indicate whether the RF power source currently outputs an RF power signal; the predetermined rule of the flag bit refers to whether the RF power source currently outputs an RF power signal and a value of the flag bit Correspondence between them.

The predetermined rule of the flag bit is: when the flag bit is high level, the RF power source currently outputs the RF power signal, and when the flag bit is low level, the RF power source does not currently output the RF power signal; or When the flag bit is low, it indicates that the RF power supply currently outputs the RF power signal. When the flag bit is high, it indicates that the RF power supply does not currently output the RF power signal.

Wherein, the impedance matcher comprises an impedance detecting unit, a control unit and an execution unit. The impedance detecting unit is configured to detect a parameter required for the matching control algorithm and send it to the control unit. The control unit is electrically connected to the pulse detecting unit, the impedance detecting unit and the executing unit, and is configured to: when receiving a judgment result from the pulse detecting unit indicating that the RF power source currently outputs the RF power signal, Performing a matching control algorithm according to parameters from the impedance detecting unit, and transmitting an instruction for adjusting the matching position to the executing unit; and receiving a judgment from the pulse detecting unit that the RF power signal is not currently outputting the RF power signal As a result, an instruction to adjust the matching position is sent to the execution unit. The execution unit is configured to match the output impedance and the load impedance of the RF pulse power source from the current matching position upon receiving an instruction to adjust the matching position from the control unit, and The matched matching position is recorded as the current matching position; and when the instruction from the control unit that does not adjust the matching position is received, the current matching position is kept unchanged.

Wherein, the execution unit comprises a motor and a variable impedance element. The motor is electrically coupled to the control unit and the variable impedance element, respectively, and is configured to adjust the variable impedance element from the current matching position upon receiving an instruction to adjust the matching position from the control unit Starting to match the output impedance and the load impedance of the RF pulse power supply, and recording the matched matching position as the current matching position; and when receiving the instruction from the control unit that does not adjust the matching position, the variable impedance is not The component is adjusted while leaving the current matching position unchanged.

The invention has the following beneficial effects: The impedance matching method provided by the invention obtains a pulse output signal of a radio frequency pulse power source, and determines whether the radio frequency pulse power source currently outputs a radio frequency power signal according to the pulse output signal, and if the current output radio frequency power signal is output, starting from the current matching position The output impedance of the RF pulse power supply is matched with the load impedance, and the matched matching position is recorded as the current matching position; if the RF power signal is not currently output, the current matching position is kept unchanged (ie, the current matching position of the current time is For the next current matching position). In this way, compared with the prior art, the impedance matching method provided by the present invention can improve the rate of impedance matching, and thus avoid the occurrence of low matching rate, compared with the case where the matching is started from the preset matching position each time the RF power signal is outputted. Impedance matching is not possible during the entire process.

The impedance matching system provided by the invention comprises a pulse detecting unit and an impedance matching unit, and the pulse detecting unit determines whether the RF pulse power source currently outputs an RF power signal according to the collected pulse output signal; and the impedance matching device outputs the RF power at the RF pulse power source. When the signal is received, the output impedance and the load impedance of the RF pulse power source are matched from the current matching position, and the matched matching position is recorded as the current matching position; and the impedance matching device is in the RF pulse. When the power supply does not currently output the RF power signal, keep the current matching position unchanged. In this way, compared with the prior art, the impedance matching system provided by the present invention can improve the rate of impedance matching, and thus avoid the occurrence of low matching rate, compared with the case where the matching is started from the preset matching position each time the RF power signal is outputted. Impedance matching is not possible during the entire process.

20‧‧‧impedance matcher

21‧‧‧RF pulse power supply

22‧‧‧Pulse detection unit

201‧‧‧Impedance detection unit

202‧‧‧Control unit

203‧‧‧Execution unit

2031‧‧‧Variable impedance components

2032‧‧‧Motor

S0, S1, S2, S3, S10, S20, S30, S40, S50, S60‧‧ steps

1 is a schematic block diagram of a conventional impedance matching system; FIG. 2 is a schematic diagram of a radio frequency pulse power supply for outputting a radio frequency power signal by pulse; FIG. 3 is a flowchart of an impedance matching method according to a first embodiment of the present invention; 4 is a schematic diagram of the RF power signal and the flag bit of the RF pulse power output; FIG. 5 is another schematic diagram of the RF power signal and the flag bit of the RF pulse power output; FIG. 6 is the impedance provided by the embodiment of the present invention. The working principle block diagram of the matching system; and Fig. 7 is a working flow chart for applying the impedance matching system shown in Fig. 6 to perform impedance matching on the RF pulse power supply.

In order to enable those skilled in the art to better understand the technical solutions of the present invention, the impedance matching method and the impedance matching system provided by the embodiments of the present invention are described in detail below with reference to the accompanying drawings.

FIG. 3 is a flowchart of an impedance matching method according to a first embodiment of the present invention. As shown in FIG. 3, the impedance matching method provided in this embodiment is used to match the output impedance of the RF pulse power supply with the load impedance, and includes the following steps:

S1: Acquire a pulse output signal of the RF pulse power source, and determine, according to the pulse output signal, whether the RF pulse power source currently outputs the RF power signal, and if yes, execute Step S2; otherwise, execute Step S3.

S2: Match the output impedance and the load impedance of the RF pulse power source from the current matching position, and record the matched matching position as the current matching position, and then proceed to step S1.

S3, keeping the current matching position unchanged. In this step, there is no need to pass the matching control algorithm, which can reduce the time required to perform the matching control algorithm, thereby further increasing the rate of impedance matching.

The above steps S1 to S3 are repeatedly executed until the end of the process.

In this embodiment, step S1 further includes the following sub-steps: S11: Obtain a current value of the flag bit according to the pulse output signal of the radio frequency pulse power source. The flag bit is used to indicate whether the RF power source currently outputs an RF power signal, and the flag bit has a predetermined rule reflecting a correspondence between the current output RF power signal of the RF pulse power source and the value of the flag bit. The value of the flag bit refers to whether the flag bit is high or low.

In this embodiment, as shown in FIG. 4, the radio frequency pulse power source outputs the radio frequency power signal in a pulse form, and the predetermined rule of the flag bit is: when the flag bit is a high level “1”, the radio frequency pulse power source currently outputs the radio frequency. When the power signal and the flag bit are low level “0”, it indicates that the RF pulse power supply does not currently output the RF power signal. In this case, for a continuous period of time, the flag bit forms a pulse signal consisting of a high level "1" and a low level "0", and the frequency and duty cycle of the pulse signal and the RF power signal The pulse modulation frequency and duty cycle are the same.

S12. Determine whether the radio frequency pulse power source currently outputs the radio frequency power signal based on the predetermined rule and the current value of the flag bit. Specifically, when the flag bit is high level “1”, it is determined that the radio frequency pulse power source currently outputs the radio frequency power signal; when the flag bit is low level “0”, it is determined that the radio frequency pulse power source does not currently output the radio frequency power signal. .

Moreover, in this embodiment, step S2 further includes the following sub-steps: S21, detecting parameters required for the matching control algorithm.

S22: Perform a matching control algorithm according to the parameter to obtain an instruction for adjusting the matching position, and adjust the matching position according to the instruction from the current matching position to match the output impedance of the RF pulse power source and the load impedance.

S23, the matched matching position is recorded as the current matching position, and the process goes to step S1.

In addition, before step S1, step S0 is further included to detect whether the radio frequency pulse power is turned on, and if so, proceed to step S1; if not, return to the preset matching position.

It should be noted that although the predetermined rule of the flag bit in the foregoing embodiment is: when the flag bit is at a high level “1”, it indicates that the RF pulse power source currently outputs the RF power signal, and the flag bit is low level “0”. It indicates that the RF power supply does not currently output the RF power signal; however, in practical applications, the predetermined rule of the flag bit can also be set, that is, the correspondence between the value of the flag bit and the RF power signal is defined as follows: The case where the element is high level “0” is defined as the current output RF power signal, and the case where the flag bit is “1” is defined as the current unoutput RF power signal, as shown in FIG. 5. In this case, the determination process of the above step S12 will become: when the flag bit is low level "0", it is determined that the RF power signal is currently output; when the flag bit is high level "1", It is determined that the RF power signal is not currently output.

It should be noted that, in this embodiment, it is determined by step S11 and step S12 whether the radio frequency pulse power source currently outputs a radio frequency power signal. However, the present invention is not limited thereto. In practical applications, other methods may be used to determine whether the radio frequency pulse power source currently outputs an RF power signal, for example, using sound and/or light and/or electric signals, as long as the The change of the signal can indicate whether the RF power signal of the RF pulse power supply is currently output or not.

The impedance matching method provided by the invention obtains a pulse output signal of a radio frequency pulse power source, and determines whether the radio frequency pulse power source currently outputs a radio frequency power signal according to the pulse output signal, and if the current output radio frequency power signal is output, starting from the current matching position The output impedance of the RF pulse power supply is matched with the load impedance, and the matched matching position is recorded as the current matching position; if the RF power signal is not currently output, the current matching position is kept unchanged (ie, the current matching position of the current time is For the next current matching position). In this way, compared with the prior art, the impedance matching method provided by the present invention can improve the rate of impedance matching, and thus avoid the occurrence of low matching rate, compared with the case where the matching is started from the preset matching position each time the RF power signal is outputted. Impedance matching is not possible during the entire process.

FIG. 6 is a block diagram showing the working principle of the impedance matching system according to an embodiment of the present invention. Referring to FIG. 6, the impedance matching system in this embodiment is disposed outside the reaction chamber and connected to the RF pulse power source 21, and includes an impedance matching unit 20 and a pulse detecting unit 22 electrically connected to each other.

The pulse detecting unit 22 is electrically connected to the RF pulse power source 21 and the impedance matching unit 20, and includes a sensor for collecting the pulse output signal of the RF pulse power source 21, and determining whether the RF pulse power source 21 is currently based on the pulse output signal. The RF power signal is output, and the judgment result is output to the impedance matcher 20.

Specifically, the pulse detecting unit 22 is configured to obtain a current value of the flag bit according to the pulse output signal of the RF pulse power source 21, and determine whether the RF pulse power source 21 currently outputs the RF power based on the predetermined rule and the current value of the flag bit. The signal is sent to the impedance matcher 20. The flag bit is used to indicate whether the radio frequency pulse power source 21 currently outputs the radio frequency power signal; the predetermined rule of the flag bit unit refers to whether the radio frequency pulse power source 21 currently outputs the correspondence between the value of the radio frequency power signal and the flag bit. Relationship; the value of the flag bit refers to whether the flag bit is high level "1" or low level "0". In this way, the predetermined rule of the flag bit It can be: when the flag bit is high level "1", it indicates that the RF power source currently outputs the RF power signal, and the flag bit is low level "0", indicating that the RF pulse power source does not currently output the RF power signal; or When the flag bit is low level “0”, it indicates that the RF power supply currently outputs the RF power signal. When the flag bit is “1”, it indicates that the RF power supply does not currently output the RF power signal.

The impedance matching unit 20 is configured to match the output impedance and the load impedance of the RF pulse power source 21 from the current matching position when the RF power source 21 currently outputs the RF power signal, and record the matched matching position as the current matching position. Then, the pulse detecting unit 22 continues to collect the pulse output signal of the RF pulse power source 21; and when the RF power source 21 does not currently output the RF power signal, the current matching position is kept unchanged.

Specifically, the impedance matcher 20 in the present embodiment may include an impedance detecting unit 201, a control unit 202, and an executing unit 203. The impedance detecting unit 201 is configured to detect parameters required for the matching control algorithm and send them to the control unit 202. The parameters required for the matching control algorithm include the modulus and phase of the load impedance of the RF pulse power source 21, and the like. parameter. The control unit 202 is configured to perform a matching control algorithm according to the parameter from the impedance detecting unit 201 when receiving the determination result that the radio frequency pulse power source 21 from the pulse detecting unit 22 currently outputs the radio frequency power signal, to send to the executing unit 203. The instruction for matching the position is adjusted; and the control unit 202 is configured to perform matching control according to the parameter from the impedance detecting unit 201 when receiving the determination result that the radio frequency pulse power source 21 from the pulse detecting unit 22 does not currently output the radio frequency power signal The algorithm, but directly sends an instruction to the execution unit 203 that does not adjust the matching position. The executing unit 203 is configured to: when receiving the instruction for adjusting the matching position sent by the control unit 202, match the output impedance and the load impedance of the radio frequency pulse power source 21 from the current matching position; when the unadjusted matching from the control unit 202 is received When the position is commanded, the current matching position will remain unchanged.

In this embodiment, the execution unit 203 may include a motor 2032 and a variable impedance element 2031 electrically connected thereto. In this case, when the RF power supply 21 currently outputs the RF power signal, the control unit 202 sends an instruction to adjust the matching position to the motor, and the motor 2032 adjusts the resistance of the variable impedance element 2031 according to the instruction to The matching position starts to match the output impedance and the load impedance of the RF pulse power source 21, wherein the instruction for adjusting the matching position includes an electrical signal about a parameter such as a rotational speed, a number of turns, or an angle of a rotating shaft of the motor, and the current matching position means The impedance adjustment end of the variable impedance element 2031 is currently located; and when the RF power source 21 does not currently output the RF power signal, the control unit 202 does not need to perform a matching control algorithm, but directly sends the unadjusted matching position to the motor 2032. Instructed, at this time, the motor 2032 does not rotate according to the command, so that the variable impedance element 2031 maintains the current matching position unchanged, that is, the impedance value of the variable impedance element 2031 remains unchanged, so that the current state of the RF pulse power source 21 The load impedance value remains the same.

It should be noted that, in practical applications, the pulse detecting unit 22 and the impedance detecting unit 201 may be integrated into one body or separated from each other.

Figure 7 is a flow chart showing the operation of impedance matching of the RF pulse power supply using the impedance matching system shown in Figure 6. As shown in FIG. 7, the working process of impedance matching of the RF pulse power source 21 specifically includes the following steps:

S10, the impedance detecting unit 201 determines whether the radio frequency pulse power source 21 is turned on, and if so, proceeds to S20; if not, returns to the preset matching position by the executing unit 203.

S20, the pulse detecting unit 22 collects the pulse output signal of the RF pulse power source 21, and determines whether the RF pulse power source 21 currently outputs the RF power signal according to the pulse output signal, and if so, the determination result is generated to the control unit 202, and proceeds to step S30; If not, the judgment result is transmitted to the control unit 202, and the flow proceeds to step S40.

S30, the impedance detecting unit 201 detects the parameters required for the matching control algorithm and sends them to the control unit 202; the control unit 202 performs a matching control algorithm to send an instruction to the motor 2032 to adjust the matching position.

S40. The motor 2032 adjusts the resistance of the variable impedance element 2031 according to the instruction to match the output impedance and the load impedance of the RF pulse power source 21 from the current matching position.

S50, the control unit 202 does not perform the matching control algorithm, but directly sends an instruction to the motor 2032 that does not adjust the matching position.

S60, the motor 2032 is stationary according to the instruction, so that the variable impedance element 2031 maintains the current matching position.

In summary, the impedance matching system provided by the present invention includes a pulse detecting unit and an impedance matching unit, and the pulse detecting unit determines whether the RF pulse power source currently outputs an RF power signal according to the collected pulse output signal; the impedance matching device is in the RF pulse. When the power supply currently outputs the RF power signal, the output impedance and the load impedance of the RF pulse power supply are matched from the current matching position, and the matched matching position is recorded as the current matching position; and the impedance matching device is not currently outputted in the RF pulse power supply. When the RF power signal is used, the current matching position is kept unchanged. In this way, compared with the prior art, the impedance matching system provided by the present invention can improve the rate of impedance matching, and thus avoid the occurrence of low matching rate, compared with the case where the matching is started from the preset matching position each time the RF power signal is outputted. Impedance matching is not possible during the entire process.

It is to be understood that the above embodiments are merely exemplary embodiments employed to explain the principles of the invention, but the invention is not limited thereto. Various modifications and improvements can be made by those skilled in the art without departing from the spirit and scope of the invention. These modifications and improvements are also considered to be within the scope of the invention.

S0, S1, S2, S3‧‧‧ steps

Claims (10)

An impedance matching method for matching an output impedance of a radio frequency pulse power source with a load impedance, comprising the steps of: S1, collecting a pulse output signal of the radio frequency pulse power source, and determining the radio frequency according to the pulse output signal Whether the pulse power source currently outputs the RF power signal, if yes, step S2 is performed; otherwise, step S3 is performed; S2, the output impedance and the load impedance of the RF pulse power source are matched from the current matching position, and the matched matching position is matched. Recorded as the current matching position, and then proceeds to step S1; S3, keeping the current matching position unchanged; repeating the above steps S1 to S3 until the end of the process. The impedance matching method according to claim 1, wherein the step S2 includes the following sub-steps: S21, detecting a parameter required for the matching control algorithm; S22, performing a matching control algorithm according to the parameter to obtain an adjusted matching position. And instructing, according to the instruction, matching the output impedance and the load impedance of the RF pulse power source from the current matching position; S23, recording the matched matching position as the current matching position, and proceeding to step S1. The impedance matching method of claim 1, wherein before step S1, step S0 is further included: detecting whether the radio frequency pulse power is turned on, and if yes, proceeding to step S1; if not, returning to the preset matching position. The impedance matching method of claim 1, wherein the step S1 comprises the following sub-steps: S11, obtaining a current value of the flag bit according to the pulse output signal of the RF pulse power source, The flag bit is used to indicate whether the RF power signal currently outputs the RF power signal; S12, determining whether the RF power source currently outputs the RF power signal based on the predetermined rule and the current value of the flag bit; wherein The predetermined rule of the flag bit refers to whether the RF power source currently outputs a correspondence between the RF power signal and the value of the flag bit. The impedance matching method of claim 4, wherein the predetermined rule of the flag bit is: when the flag bit is high level, the RF power source currently outputs the RF power signal, and the flag bit is low. It indicates that the RF power supply does not currently output the RF power signal; or, when the flag bit is low, it indicates that the RF power supply currently outputs the RF power signal, and when the flag bit is high, the RF power supply does not currently output the RF power signal. . An impedance matching system comprising an impedance matching device for matching an output impedance and a load impedance of a radio frequency pulse power supply, characterized by further comprising a pulse detecting unit, wherein the pulse detecting unit and the radio frequency pulse power source and the impedance matching device The electrical connection is configured to collect a pulse output signal of the RF pulse power source, and determine, according to the pulse output signal, whether the RF power source currently outputs an RF power signal, and output the determination result to the impedance matcher; and the impedance matcher is The method is configured to: when the RF power supply currently outputs the RF power signal, match the output impedance and the load impedance of the RF pulse power source from the current matching position, and record the matched matching position as the current matching position, and then indicate the The pulse detecting unit continues to collect the pulse output signal of the RF pulse power source; and when the RF pulse power source does not currently output the RF power signal, the current matching position is maintained. The impedance matching system of claim 6, wherein the pulse detecting unit is configured to obtain a current value of the flag bit according to the pulse output signal of the radio frequency pulse power source; and based on a predetermined rule sum of the flag bit The current value is used to determine whether the RF power source currently outputs a RF power signal; wherein the flag bit is used to indicate whether the RF power source currently outputs an RF power signal; the predetermined rule of the flag bit refers to the current RF power source Whether to output a correspondence between the RF power signal and the value of the flag bit. The impedance matching system of claim 7, wherein the predetermined rule of the flag bit is: when the flag bit is high, the RF power source currently outputs the RF power signal, and the flag bit is low. It indicates that the RF power supply does not currently output the RF power signal; or, when the flag bit is low, it indicates that the RF power supply currently outputs the RF power signal, and when the flag bit is high, the RF power supply does not currently output the RF power signal. . The impedance matching system of claim 8, wherein the impedance matching unit comprises an impedance detecting unit, a control unit, and an execution unit, wherein the impedance detecting unit is configured to detect a parameter required for the matching control algorithm, and It is sent to the control unit; the control unit is electrically connected to the pulse detecting unit, the impedance detecting unit and the executing unit, and is configured to: upon receiving the signal from the pulse detecting unit, the RF power source currently outputs the RF And determining a result of the power signal, performing a matching control algorithm according to the parameter from the impedance detecting unit, and transmitting an instruction for adjusting the matching position to the executing unit; and receiving the current power of the RF pulse from the pulse detecting unit When the judgment result of the radio frequency power signal is not output, an instruction for not adjusting the matching position is sent to the execution unit; The execution unit is configured to match the output impedance and the load impedance of the RF pulse power source from the current matching position when receiving the instruction for adjusting the matching position from the control unit, and record the matched matching position as the current match. Position; and maintaining the current matching position unchanged upon receiving an instruction from the control unit that does not adjust the matching position. The impedance matching system of claim 9, wherein the execution unit comprises a motor and a variable impedance element, and the motor is electrically connected to the control unit and the variable impedance element, respectively, and is configured to: Receiving an instruction from the control unit to adjust the matching position, adjusting the variable impedance element to match the output impedance and the load impedance of the RF pulse power source from the current matching position, and matching the matched matching position Recorded as the current matching position; and when receiving an instruction from the control unit that does not adjust the matching position, the variable impedance element is not adjusted, but the current matching position is maintained.