TWI607211B - Image generation device, defect inspection device, and defect inspection method - Google Patents

Image generation device, defect inspection device, and defect inspection method Download PDF

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TWI607211B
TWI607211B TW103101492A TW103101492A TWI607211B TW I607211 B TWI607211 B TW I607211B TW 103101492 A TW103101492 A TW 103101492A TW 103101492 A TW103101492 A TW 103101492A TW I607211 B TWI607211 B TW I607211B
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TW201435332A (en
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尾崎麻耶
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住友化學股份有限公司
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
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    • G01N21/8903Optical details; Scanning details using a multiple detector array
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
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    • G06T2207/30124Fabrics; Textile; Paper

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Description

圖像產生裝置、缺陷檢查裝置及缺陷檢查方法 Image generating device, defect inspection device, and defect inspection method

本發明係關於一種產生用以檢查偏光膜或相位差膜等片狀成形體之缺陷之圖像資料之圖像產生裝置、具備該圖像產生裝置之缺陷檢查裝置、及缺陷檢查方法。 The present invention relates to an image generating apparatus that generates image data for inspecting a defect of a sheet-like molded body such as a polarizing film or a retardation film, a defect inspecting apparatus including the image generating apparatus, and a defect inspecting method.

先前,缺陷檢查裝置係使用被稱為線感測器之一維相機檢查偏光膜或相位差膜等片狀成形體之缺陷。缺陷檢查裝置係於利用螢光管等線狀光源將片狀成形體照明之狀態下,一面利用線感測器對片狀成形體表面沿著片狀成形體之長度方向自長度方向之一端掃描至另一端,一面獲取複數個一維圖像資料(靜態圖像資料)。繼而,藉由將複數個一維圖像資料按照獲取時間順序密鋪而產生二維圖像資料,並根據該二維圖像資料檢查片狀成形體之缺陷。 Previously, the defect inspection device examined defects of a sheet-shaped formed body such as a polarizing film or a retardation film using a one-dimensional camera called a line sensor. In the state in which the sheet-shaped molded body is illuminated by a linear light source such as a fluorescent tube, the surface of the sheet-shaped molded body is scanned from one end of the longitudinal direction along the longitudinal direction of the sheet-shaped formed body by a line sensor. To the other end, one or more pieces of one-dimensional image data (still image data) are acquired. Then, two-dimensional image data is generated by closely framing a plurality of one-dimensional image data in order of acquisition time, and the defects of the sheet-shaped formed body are inspected based on the two-dimensional image data.

藉由線感測器所獲取之一維圖像資料中通常包含線狀光源影像。於線狀光源與線感測器配置於片狀成形體之一面側之情形時,線狀光源影像係自線狀光源出射並經片狀成形體單向反射而到達至線感測器之光之影像。又,於片狀成形體配置於線狀光源與線感測器之間之情形時,線狀光源影像係自線狀光源出射並透過片狀成形體而到達至線感測器之光之影像。於缺陷檢查裝置中,在片狀成形體之寬度較寬之情形時,以可檢查片狀成形體之寬度方向整個區域之方式將複數台線感測器排列於寬度方向而使用。 One-dimensional image data acquired by the line sensor usually includes a linear light source image. When the linear light source and the line sensor are disposed on one side of the sheet-shaped molded body, the linear light source image is emitted from the linear light source and is unidirectionally reflected by the sheet-shaped formed body to reach the light of the line sensor. Image. Further, when the sheet-like molded body is disposed between the linear light source and the line sensor, the linear light source image is emitted from the linear light source and transmitted through the sheet-shaped molded body to reach the light of the line sensor. . In the case of the defect inspection apparatus, when the width of the sheet-like formed body is wide, the plurality of line sensors are arranged in the width direction so that the entire area in the width direction of the sheet-shaped formed body can be inspected.

該先前之缺陷檢查裝置中,由於根據藉由將複數個一維圖像資 料密鋪而產生之二維圖像資料來檢查片狀成形體之缺陷,故而構成二維圖像資料之各一維圖像資料中之檢查對象像素與線狀光源影像之位置關係成為1種確定之位置關係。存在缺陷僅於檢查對象像素(注目像素)與線狀光源影像之位置關係處於特定之位置關係之情形時才會顯現於一維圖像資料上的情況。例如,作為缺陷之1種之氣泡多數情況下僅於位於線狀光源影像之周緣或附近之情形時才會顯現於一維圖像資料上。如此,缺陷有時因其位置而未被檢測出。因此,使用由利用線感測器而獲取到之複數個一維圖像資料構成之二維圖像資料來檢查片狀成形體之缺陷的上述先前之缺陷檢查裝置僅具有有限之缺陷檢測能力。 In the prior defect inspection device, due to the use of a plurality of one-dimensional images The two-dimensional image data generated by the close-packing is used to inspect the defects of the sheet-shaped molded body, so that the positional relationship between the inspection target pixel and the linear light source image in each of the one-dimensional image data constituting the two-dimensional image data becomes one Determine the positional relationship. The defect exists only when the positional relationship between the inspection target pixel (the target pixel) and the linear light source image is in a specific positional relationship, and appears on the one-dimensional image data. For example, a bubble which is a defect is often present on a one-dimensional image data only when it is located at or near the periphery of the image of the linear light source. As such, defects are sometimes not detected due to their location. Therefore, the above-described defect inspection apparatus for inspecting the defects of the sheet-shaped formed body using the two-dimensional image data composed of the plurality of one-dimensional image data acquired by the line sensor has only limited defect detecting capability.

作為解決如上所述之問題點之缺陷檢查裝置,於日本專利特開2007-218629號公報(專利文獻1)及日本專利特開2010-122192號公報(專利文獻2)中揭示有一種裝置,該裝置利用螢光管等線狀光源將片狀成形體照明,一面於特定之搬送方向連續地搬送片狀成形體,一面使用被稱為區域感測器之二維相機獲取二維圖像資料(動畫資料),並根據該二維圖像資料檢查片狀成形體之缺陷。 As a defect inspecting device which solves the above-mentioned problem, a device is disclosed in Japanese Patent Laid-Open Publication No. 2007-218629 (Patent Document 1) and Japanese Patent Laid-Open No. 2010-122192 (Patent Document 2). The device illuminates the sheet-shaped molded body with a linear light source such as a fluorescent tube, and continuously conveys the sheet-shaped molded body in a specific transport direction, and acquires two-dimensional image data using a two-dimensional camera called a region sensor ( The animation data), and the defects of the sheet-shaped formed body are inspected based on the two-dimensional image data.

根據專利文獻1、2所揭示之缺陷檢查裝置,由於可根據檢查對象像素與線狀光源影像之位置關係不同之複數張二維圖像資料來判定是否存在缺陷,故而與使用線感測器之先前之缺陷檢查裝置相比,可更確實地檢測出缺陷。因此,專利文獻1、2所揭示之使用區域感測器之缺陷檢查裝置與使用線感測器之先前之缺陷檢查裝置相比,缺陷檢測能力提高。 According to the defect inspection apparatus disclosed in Patent Documents 1 and 2, since it is possible to determine whether or not there is a defect based on a plurality of pieces of two-dimensional image data having different positional relationships between the inspection target pixel and the linear light source image, the previous use of the line sensor is used. The defect can be detected more reliably than the defect inspection device. Therefore, the defect inspection device using the area sensor disclosed in Patent Documents 1 and 2 has an improved defect detection capability as compared with the previous defect inspection device using the line sensor.

專利文獻1、2所揭示之使用區域感測器之缺陷檢查裝置必須處理資訊量較多之二維圖像資料。於缺陷檢查裝置中,以自區域感測器輸出之二維圖像資料為對象,於藉由個人電腦(PC,Personal Computer)而實現之圖像解析部中對缺陷位置等進行解析,但由於二維圖像資料之資訊量較多,故而有利用圖像解析部之二維圖像資料之解析處理時間變長之傾向。 The defect inspection device using the area sensor disclosed in Patent Documents 1 and 2 must process two-dimensional image data having a large amount of information. In the defect inspection device, the two-dimensional image data output from the area sensor is used for the personal computer (PC, Personal) In the image analysis unit realized by Computer, the defect position and the like are analyzed. However, since the amount of information of the two-dimensional image data is large, the analysis processing time of the two-dimensional image data by the image analysis unit becomes long. tendency.

於缺陷檢查裝置中,根據利用圖像解析部之二維圖像資料之解析處理速度控制片狀成形體之搬送速度。若資訊量較多之二維圖像資料之利用圖像解析部之解析處理速度變慢,則必須使片狀成形體之搬送速度降低,而導致檢查效率降低。 In the defect inspection device, the conveyance speed of the sheet-shaped formed body is controlled based on the analysis processing speed of the two-dimensional image data by the image analysis unit. When the analysis processing speed of the image analysis unit using the two-dimensional image data having a large amount of information is slow, the conveyance speed of the sheet-shaped formed body must be lowered, and the inspection efficiency is lowered.

本發明之目的在於提供一種圖像產生裝置、具備該圖像產生裝置之缺陷檢查裝置、及缺陷檢查方法,該圖像產生裝置產生用以檢查片狀成形體之缺陷之圖像資料,且在維持較高之缺陷檢測能力之前提下可謀求利用圖像解析部之圖像處理之高速化,從而可提高檢查效率。 An object of the present invention is to provide an image generating apparatus, a defect inspecting apparatus including the image generating apparatus, and a defect inspecting method, the image generating apparatus generating image data for inspecting defects of the sheet-shaped formed body, and Before the high defect detection capability is maintained, the image processing by the image analysis unit can be speeded up, and the inspection efficiency can be improved.

本發明提供一種圖像產生裝置,其產生用以檢查片狀成形體之缺陷之圖像資料,且包括:搬送部,其將片狀成形體沿該片狀成形體之長度方向搬送;光照射部,其包含沿片狀成形體之與長度方向垂直之寬度方向呈直線狀延伸之光源,並藉由該光源對片狀成形體照射光;拍攝部,其對由上述搬送部搬送中之片狀成形體進行拍攝動作,產生表示二維圖像之二維圖像資料;特徵值計算部,其藉由1種或複數種演算法處理,基於各像素之亮度值而算出構成上述二維圖像資料之各像素之特徵值;處理圖像資料產生部,其將構成上述二維圖像資料之各像素區分為上述特徵值為預先規定之閾值以上之缺陷像素、及上述特徵值未達上述閾值之剩餘像素,並產生處理圖像資料,該處理圖像資料包含針對上述缺陷像素而儲存有表示與上述特徵值對應之灰階值之灰階資訊的灰階資訊儲存位元串,且包含針對上述剩餘像素而儲存有表示零 之灰階值之灰階資訊的灰階資訊儲存位元串;缺陷資訊獲取部,其根據上述處理圖像資料,對每一像素獲取關於片狀成形體中之缺陷之缺陷資訊,並產生儲存有上述所獲取之缺陷資訊之缺陷資訊儲存位元串;及解析用圖像資料產生部,其對每一像素產生解析用圖像資料,該解析用圖像資料包含對上述處理圖像資料之上述灰階資訊儲存位元串附加上述缺陷資訊儲存位元串所獲得之解析用位元串。 The present invention provides an image generating apparatus that generates image data for inspecting a defect of a sheet-shaped formed body, and includes: a conveying portion that conveys the sheet-shaped formed body along a length direction of the sheet-shaped formed body; a portion including a light source extending linearly in a width direction perpendicular to the longitudinal direction of the sheet-shaped formed body, and the sheet-shaped molded body is irradiated with light by the light source; and the imaging unit is configured to transport the sheet conveyed by the transport unit The shaped body performs an imaging operation to generate two-dimensional image data representing a two-dimensional image; the feature value calculating unit processes one or more kinds of algorithms, and calculates the two-dimensional map based on the luminance values of the respective pixels. a processed image data generating unit that divides each pixel constituting the two-dimensional image data into a defective pixel whose feature value is equal to or greater than a predetermined threshold value, and the feature value does not reach the above a remaining pixel of the threshold, and generating processed image data, the processed image data comprising, for the defective pixel, storing grayscale information indicating a grayscale value corresponding to the feature value The grayscale information stores a bit string and includes a representation zero for the remaining pixels a gray scale information storage bit string of the gray scale information of the gray scale value; the defect information acquisition unit obtains defect information about the defect in the sheet shaped body for each pixel according to the processed image data, and generates the storage a defect information storage bit string having the defect information obtained as described above; and an analysis image data generating unit that generates analysis image data for each pixel, the analysis image data including the processed image data The grayscale information storage bit string is added to the parsing bit string obtained by the defect information storage bit string.

又,於本發明之圖像產生裝置中,上述缺陷資訊可包含表示片狀成形體中之缺陷之種類之缺陷種類資訊。 Further, in the image generating apparatus of the present invention, the defect information may include defect type information indicating a type of a defect in the sheet-shaped formed body.

又,於本發明之圖像產生裝置中,較佳為,上述特徵值計算部藉由複數種演算法處理而算出上述特徵值,且上述缺陷資訊獲取部係基於每一像素之上述灰階資訊儲存位元串之灰階資訊是否為與藉由上述複數種演算法處理中之任一種演算法處理而算出之特徵值對應之灰階資訊,而獲取包含上述缺陷種類資訊之上述缺陷資訊。 Further, in the image generating apparatus of the present invention, preferably, the feature value calculating unit calculates the feature value by a plurality of types of algorithm processing, and the defect information acquiring unit is based on the gray scale information of each pixel. The grayscale information of the stored bit string is the grayscale information corresponding to the feature value calculated by the processing of any one of the plurality of algorithm processes, and the defect information including the defect type information is obtained.

又,本發明係一種缺陷檢查裝置,其包括:上述圖像產生裝置;及圖像解析裝置,其使用儲存於構成由上述圖像產生裝置之解析用圖像資料產生部所產生之解析用圖像資料的解析用位元串之資訊,進行預先規定之圖像解析,藉此檢測片狀成形體之缺陷。 Moreover, the present invention provides a defect inspection apparatus including: the image generation device; and an image analysis device using an analysis map generated by the analysis image data generation unit constituting the image generation device. The image analysis is performed using the information of the bit string, and predetermined image analysis is performed to detect defects of the sheet-shaped formed body.

又,本發明係一種缺陷檢查方法,其用以檢查片狀成形體之缺陷,且包括:搬送步驟,其將片狀成形體沿該片狀成形體之長度方向搬送;光照射步驟,其藉由沿片狀成形體之與長度方向垂直之寬度方向呈直線狀延伸之光源,對所搬送之上述片狀成形體照射光;拍攝步驟,其對搬送中之上述片狀成形體進行拍攝動作而產生 表示二維圖像之二維圖像資料;特徵值計算步驟,其藉由1種或複數種演算法處理,將構成上述二維圖像資料之各像素之特徵值基於各像素之亮度值而算出;處理圖像資料產生步驟,其將構成上述二維圖像資料之各像素區分為上述特徵值為預先規定之閾值以上之缺陷像素、及上述特徵值未達上述閾值之剩餘像素,並產生處理圖像資料,該處理圖像資料包含針對上述缺陷像素而儲存有表示與上述特徵值對應之灰階值之灰階資訊的灰階資訊儲存位元串,且包含針對上述剩餘像素而儲存有表示零之灰階值之灰階資訊的灰階資訊儲存位元串;缺陷資訊獲取步驟,其根據上述處理圖像資料,對每一像素獲取關於片狀成形體中之缺陷之缺陷資訊,並產生儲存有上述所獲取之缺陷資訊之缺陷資訊儲存位元串;解析用圖像資料產生步驟,其對每一像素產生解析用圖像資料,該解析用圖像資料包含對上述處理圖像資料之上述灰階資訊儲存位元串附加上述缺陷資訊儲存位元串所獲得之解析用位元串;及圖像解析步驟,其使用儲存於構成上述解析用圖像資料之上述解析用位元串之資訊,進行預先規定之圖像解析,藉此,檢測片狀成形體之缺陷。 Moreover, the present invention is a defect inspection method for inspecting a defect of a sheet-shaped formed body, and includes: a conveying step of conveying the sheet-shaped formed body along a length direction of the sheet-shaped formed body; and a light irradiation step a light source that linearly extends in a width direction perpendicular to the longitudinal direction of the sheet-shaped molded body, irradiates the sheet-shaped molded body to be conveyed with light, and an imaging step of performing an image capturing operation on the sheet-shaped formed body during conveyance. produce a two-dimensional image data representing a two-dimensional image; the eigenvalue calculation step is performed by one or more kinds of algorithms, and the feature values of the pixels constituting the two-dimensional image data are based on the brightness values of the pixels Calculating a processed image data generating step of dividing each pixel constituting the two-dimensional image data into a defective pixel having the feature value equal to or greater than a predetermined threshold value, and remaining pixels having the feature value not reaching the threshold value, and generating Processing the image data, the processed image data includes a grayscale information storage bit string storing grayscale information indicating a grayscale value corresponding to the feature value for the defective pixel, and storing the remaining pixel for the remaining pixel a gray scale information storage bit string representing gray scale information of a gray scale value of zero; a defect information acquisition step of acquiring defect information about a defect in the sheet shaped body for each pixel according to the processed image data described above, and Generating a defect information storage bit string storing the defect information acquired as described above; and analyzing the image data generating step, which generates an image for analysis for each pixel Data, the parsing image data includes a parsing bit string obtained by adding the defect information storage bit string to the grayscale information storage bit string of the processed image data; and an image parsing step, which is stored and used The information of the analysis bit string constituting the analysis image data is subjected to predetermined image analysis, thereby detecting defects of the sheet-shaped molded body.

根據本發明,圖像產生裝置係產生用以檢查片狀成形體之缺陷之圖像資料之裝置,且包括搬送部、光照射部、拍攝部、特徵值計算部、處理圖像資料產生部、缺陷資訊獲取部、及解析用圖像資料產生部。於圖像產生裝置中,拍攝部係對一面由光照射部照射光一面由搬送部搬送之片狀成形體進行拍攝動作,而產生表示二維圖像之二維圖像資料。特徵值計算部係利用預先規定之演算法對上述二維圖像資料進行處理,藉此,算出構成二維圖像資料之各像素之基於亮度值之特徵值。 According to the present invention, an image generating apparatus generates an apparatus for inspecting image data of a defect of a sheet-shaped formed body, and includes a conveying unit, a light irradiation unit, an imaging unit, a feature value calculation unit, and a processed image data generation unit, The defect information acquisition unit and the analysis image data generation unit. In the image generating apparatus, the imaging unit performs an imaging operation on the sheet-shaped molded body conveyed by the transport unit while irradiating light by the light-irradiating portion, and generates two-dimensional image data representing the two-dimensional image. The feature value calculation unit processes the two-dimensional image data by a predetermined algorithm, thereby calculating a feature value based on the luminance value of each pixel constituting the two-dimensional image data.

處理圖像資料產生部係將構成上述二維圖像資料之各像素區分為上述特徵值為預先規定之閾值以上之缺陷像素、及上述特徵值未達上述閾值之剩餘像素,並產生處理圖像資料,該處理圖像資料包含針對上述缺陷像素而儲存有表示與上述特徵值對應之灰階值之灰階資訊的灰階資訊儲存位元串,且包含針對上述剩餘像素而儲存有表示零之灰階值之灰階資訊的灰階資訊儲存位元串。缺陷資訊獲取部係根據上述處理圖像資料,對每一像素獲取關於片狀成形體中之缺陷之資訊即缺陷資訊,並產生儲存有上述所獲取之缺陷資訊之缺陷資訊儲存位元串。 The processed image data generating unit divides each pixel constituting the two-dimensional image data into a defective pixel whose feature value is equal to or greater than a predetermined threshold value, and a remaining pixel whose feature value does not reach the threshold value, and generates a processed image. And the processed image data includes a grayscale information storage bit string storing grayscale information indicating a grayscale value corresponding to the feature value for the defective pixel, and storing the zero indicating for the remaining pixels Gray scale information storage bit string of gray scale information of gray scale value. The defect information acquisition unit acquires information on defects in the sheet-shaped formed body, that is, defect information, for each pixel, based on the processed image data, and generates a defect information storage bit string storing the acquired defect information.

解析用圖像資料產生部係對每一像素產生解析用圖像資料,該解析用圖像資料包含以對上述處理圖像資料之上述灰階資訊儲存位元串附加缺陷資訊獲取部所產生之上述缺陷資訊儲存位元串之方式獲得之解析用位元串。 The analysis image data generation unit generates analysis image data for each pixel, and the analysis image data includes a defect information acquisition unit that is added to the grayscale information storage bit string of the processed image data. The above-mentioned defect information is stored in a bit string manner to obtain a parsing bit string.

於如此般構成之本發明之圖像產生裝置中,根據由拍攝部所產生之片狀成形體之二維圖像資料,產生用以檢查片狀成形體之缺陷之圖像資料即解析用圖像資料,因此,與例如根據利用線感測器所獲得之複數個一維圖像資料而產生用以檢查缺陷之圖像資料之情形相比,可維持較高之缺陷檢測能力。 In the image generating apparatus of the present invention configured as described above, the image data for inspecting the defect of the sheet-shaped formed body, that is, the analysis map, is generated based on the two-dimensional image data of the sheet-shaped molded body produced by the image forming unit. Like the data, it is possible to maintain a high defect detection capability as compared with a case where image data for checking defects is generated based on, for example, a plurality of one-dimensional image data obtained by using a line sensor.

進而,於本發明之圖像產生裝置中,自拍攝部輸出之資訊量較多之二維圖像資料轉換為利用灰階資訊儲存位元串構成各像素之處理圖像資料,進而轉換為利用對灰階資訊儲存位元串附加缺陷資訊儲存位元串所得之解析用位元串構成各像素之解析用圖像資料。圖像產生裝置係產生以此方式自二維圖像資料轉換來之利用解析用位元串構成各像素之解析用圖像資料作為用以檢查片狀成形體之缺陷之圖像資料,因此,藉由使用該解析用圖像資料進行圖像解析,可謀求圖像解析之高速化,而可提高缺陷檢查之效率。 Further, in the image generating apparatus of the present invention, the two-dimensional image data having a large amount of information output from the image capturing unit is converted into processed image data constituting each pixel by using the grayscale information storage bit string, and further converted into utilization. The parsing bit string obtained by adding the defect information storage bit string to the gray scale information storage bit string constitutes parsing image data for each pixel. The image generating apparatus generates image data for analysis which constitutes each pixel by the analysis bit string converted from the two-dimensional image data in this manner, and is used as image data for inspecting defects of the sheet-shaped formed body. By performing image analysis using the analysis image data, it is possible to speed up image analysis and improve the efficiency of defect inspection.

又,根據本發明,缺陷資訊獲取部根據處理圖像資料獲取之缺陷資訊可包含表示片狀成形體中之缺陷之種類之缺陷種類資訊。藉此,圖像產生裝置可根據缺陷種類資訊而獲取與片狀成形體中之缺陷之種類相關之資訊。 Moreover, according to the present invention, the defect information acquired by the defect information acquiring unit based on the processed image data may include defect type information indicating the type of the defect in the sheet-shaped formed body. Thereby, the image generating apparatus can acquire information related to the kind of the defect in the sheet-shaped formed body based on the defect type information.

又,根據本發明,特徵值計算部係藉由複數種演算法處理而算出特徵值。而且,缺陷資訊獲取部可根據每一像素之灰階資訊儲存位元串之灰階資訊是否為與藉由複數種演算法處理中之任一種演算法處理而算出之特徵值對應之灰階資訊,而獲取包含缺陷種類資訊之缺陷資訊。 Further, according to the present invention, the feature value calculation unit calculates the feature value by processing by a plurality of algorithms. Moreover, the defect information acquisition unit may store, according to the grayscale information of each pixel, whether the grayscale information of the bit string is grayscale information corresponding to the feature value calculated by processing any one of the plurality of algorithm processes. And obtain defect information containing information on the type of defect.

又,根據本發明,缺陷檢查裝置包括上述本發明之圖像產生裝置、及圖像解析裝置。圖像解析裝置係使用儲存於構成由圖像產生裝置之解析用圖像資料產生部所產生之解析用圖像資料的解析用位元串之資訊,進行預先規定之圖像解析,藉此,檢測片狀成形體之缺陷。藉此,可謀求利用圖像解析裝置之圖像解析之高速化,而可提高缺陷檢查之效率。 Moreover, according to the present invention, the defect inspection device includes the image generation device and the image analysis device of the present invention described above. The image analysis device performs predetermined image analysis using the information of the analysis bit string stored in the analysis image data generated by the analysis image data generating unit of the image generation device. The defects of the sheet-like formed body were examined. As a result, it is possible to increase the speed of image analysis by the image analysis device, and it is possible to improve the efficiency of defect inspection.

又,根據本發明,缺陷檢查方法包括搬送步驟、光照射步驟、拍攝步驟、特徵值計算步驟、處理圖像資料產生步驟、缺陷資訊獲取步驟、解析用圖像資料產生步驟、及圖像解析步驟。缺陷檢查方法中,於拍攝步驟中對一面由光照射一面由搬送部搬送之片狀成形體進行拍攝動作,而產生表示二維圖像之二維圖像資料。於特徵值計算步驟中,利用預先規定之演算法對上述二維圖像資料進行處理,藉此,算出構成二維圖像資料之各像素之基於亮度值之特徵值。 Moreover, according to the present invention, the defect inspection method includes a transfer step, a light irradiation step, a photographing step, a feature value calculation step, a processed image data generation step, a defect information acquisition step, an analysis image data generation step, and an image analysis step. . In the defect inspection method, in the imaging step, the sheet-shaped molded body conveyed by the transport unit while being irradiated with light is subjected to an image capturing operation, and two-dimensional image data representing the two-dimensional image is generated. In the feature value calculation step, the two-dimensional image data is processed by a predetermined algorithm to calculate a feature value based on the luminance value of each pixel constituting the two-dimensional image data.

於處理圖像資料產生步驟中,將構成上述二維圖像資料之各像素區分為上述特徵值為預先規定之閾值以上之缺陷像素、及上述特徵值未達上述閾值之剩餘像素,並產生處理圖像資料,該處理圖像資料包含針對缺陷像素而儲存有表示與上述特徵值對應之灰階值之灰階資 訊的灰階資訊儲存位元串,且包含針對剩餘像素而儲存有表示零之灰階值之灰階資訊的灰階資訊儲存位元串。於缺陷資訊獲取步驟中,根據上述處理圖像資料對每一像素獲取關於片狀成形體中之缺陷之資訊即缺陷資訊,並產生儲存有上述所獲取之缺陷資訊之缺陷資訊儲存位元串。 In the processing image data generating step, each pixel constituting the two-dimensional image data is divided into a defective pixel whose feature value is equal to or greater than a predetermined threshold value, and a remaining pixel whose feature value does not reach the threshold value, and is generated and processed. Image data, the processed image data includes a grayscale resource stored for the defective pixel and representing a grayscale value corresponding to the feature value The grayscale information storage bit string of the message includes a grayscale information storage bit string storing grayscale information indicating the grayscale value of zero for the remaining pixels. In the defect information obtaining step, the defect information about the defect in the sheet-shaped formed body is acquired for each pixel according to the processed image data, and the defect information storage bit string storing the obtained defect information is generated.

於解析用圖像產生步驟中,對每一像素產生解析用圖像資料,該解析用圖像資料包含以對上述處理圖像資料之上述灰階資訊儲存位元串附加上述缺陷資訊儲存位元串之方式獲得之解析用位元串。繼而,於圖像解析步驟中,使用儲存於構成上述解析用圖像資料之解析用位元串之資訊進行預先規定之圖像解析,藉此,檢測片狀成形體之缺陷。 In the image forming step of parsing, image data for parsing is generated for each pixel, and the image data for parsing includes adding the defect information storage bit to the grayscale information storage bit string of the processed image data. The parsing bit string obtained by the string method. Then, in the image analysis step, the predetermined image analysis is performed using the information stored in the analysis bit string constituting the analysis image data, thereby detecting the defect of the sheet-shaped molded body.

於如此般構成之本發明之缺陷檢查方法中,根據拍攝步驟中所產生之片狀成形體之二維圖像資料進行片狀成形體之缺陷檢測,因此,與例如根據利用線感測器所獲得之複數個一維圖像資料進行缺陷檢測之情形相比,可維持較高之缺陷檢測能力。 In the defect inspection method of the present invention configured as described above, the defect detection of the sheet-shaped formed body is performed based on the two-dimensional image data of the sheet-like formed body generated in the image capturing step, and thus, for example, according to the use of the line sensor Compared with the case where a plurality of one-dimensional image data are obtained for defect detection, a high defect detection capability can be maintained.

進而,於本發明之缺陷檢查方法中,將拍攝步驟中所產生之資訊量較多之二維圖像資料轉換為利用灰階資訊儲存位元串構成各像素之處理圖像資料,進而轉換為利用對灰階資訊儲存位元串附加缺陷資訊儲存位元串所得之解析用位元串構成各像素之解析用圖像資料。由於根據以此方式自二維圖像資料轉換來之利用解析用位元串構成各像素之解析用圖像資料,於圖像解析步驟中進行圖像解析而檢測片狀成形體之缺陷,故而可謀求圖像解析步驟中之圖像解析之高速化,而可提高檢查效率。 Further, in the defect inspection method of the present invention, the two-dimensional image data having a large amount of information generated in the photographing step is converted into processed image data constituting each pixel by using the gray scale information storage bit string, and further converted into The parsing bit string obtained by adding the defect information storage bit string to the gray scale information storage bit string constitutes parsing image data for each pixel. According to the analysis image data for each pixel formed by the analysis bit string converted from the two-dimensional image data in this way, image analysis is performed in the image analysis step to detect the defect of the sheet-shaped molded body, and thus the defect is detected. The image analysis speed in the image analysis step can be increased, and the inspection efficiency can be improved.

1‧‧‧圖像產生裝置 1‧‧‧Image generating device

2‧‧‧片狀成形體 2‧‧‧Sheet shaped body

3‧‧‧搬送裝置 3‧‧‧Transporting device

4‧‧‧照明裝置 4‧‧‧Lighting device

5‧‧‧拍攝裝置 5‧‧‧Photographing device

6‧‧‧圖像處理裝置 6‧‧‧Image processing device

7‧‧‧圖像解析裝置 7‧‧‧Image analysis device

61‧‧‧處理圖像產生部 61‧‧‧Processing Image Generation Department

62‧‧‧解析用圖像產生部 62‧‧‧Image generation unit for analysis

71‧‧‧解析用圖像輸入部 71‧‧‧Image input unit for analysis

72‧‧‧圖像解析部 72‧‧‧Image Analysis Department

73‧‧‧控制部 73‧‧‧Control Department

74‧‧‧顯示部 74‧‧‧Display Department

100‧‧‧缺陷檢查裝置 100‧‧‧ Defect inspection device

a‧‧‧資料點 A‧‧‧data point

A‧‧‧二維圖像 A‧‧‧ two-dimensional image

A1‧‧‧照明影像 A1‧‧‧ illumination image

A3‧‧‧上限邊緣 A3‧‧‧ upper limit edge

A4‧‧‧下限邊緣 A4‧‧‧ lower edge

A21‧‧‧第1缺陷像素群 A21‧‧‧1st defective pixel group

A22‧‧‧第2缺陷像素群 A22‧‧‧2nd defective pixel group

b‧‧‧資料點 B‧‧‧data points

B‧‧‧二維圖像 B‧‧‧2D image

B1‧‧‧照明影像 B1‧‧‧Lighting images

B21‧‧‧第1缺陷像素群 B21‧‧‧1st defective pixel group

B22‧‧‧第2缺陷像素群 B22‧‧‧2nd defective pixel group

c‧‧‧資料點 C‧‧‧data points

C‧‧‧二維圖像 C‧‧‧2D image

C1‧‧‧照明影像 C1‧‧‧ illumination image

C21‧‧‧第1缺陷像素群 C21‧‧‧1st defective pixel group

C22‧‧‧第2缺陷像素群 C22‧‧‧2nd defective pixel group

C31‧‧‧核心 C31‧‧‧ core

d‧‧‧資料點 D‧‧‧data points

D‧‧‧二維圖像 D‧‧‧ two-dimensional image

D1‧‧‧照明影像 D1‧‧‧ illumination image

D3‧‧‧邊緣 D3‧‧‧ edge

D21‧‧‧第1缺陷像素群 D21‧‧‧1st defective pixel group

D22‧‧‧第2缺陷像素群 D22‧‧‧2nd defective pixel group

E‧‧‧處理圖像 E‧‧‧Processing images

E21‧‧‧第1缺陷像素群 E21‧‧‧1st defective pixel group

E22‧‧‧剩餘像素群 E22‧‧‧ Remaining pixel group

f‧‧‧預測資料點 F‧‧‧ forecast data points

F‧‧‧處理圖像 F‧‧‧Processing images

F21‧‧‧第2缺陷像素群 F21‧‧‧2nd defective pixel group

F22‧‧‧剩餘像素群 F22‧‧‧ Remaining pixel group

G‧‧‧處理圖像 G‧‧‧Processing images

G21‧‧‧第1缺陷像素群 G21‧‧‧1st defective pixel group

G22‧‧‧第2缺陷像素群 G22‧‧‧2nd defective pixel group

G23‧‧‧剩餘像素群 G23‧‧‧ Remaining pixel group

G31‧‧‧灰階資訊儲存位元串 G31‧‧‧ Grayscale information storage bit string

G32‧‧‧灰階資訊儲存位元串 G32‧‧‧ Grayscale information storage bit string

G33‧‧‧灰階資訊儲存位元串 G33‧‧‧ Grayscale information storage bit string

H‧‧‧解析用圖像 H‧‧‧Image for analysis

H21‧‧‧第1缺陷像素群 H21‧‧‧1st defective pixel group

H22‧‧‧第2缺陷像素群 H22‧‧‧2nd defective pixel group

H23‧‧‧剩餘像素群 H23‧‧‧Remaining pixel group

H31‧‧‧解析用位元串 H31‧‧‧ parsing bit string

H32‧‧‧解析用位元串 H32‧‧‧ parsing bit string

H33‧‧‧解析用位元串 H33‧‧‧ parsing bit string

H311‧‧‧灰階資訊儲存位元串 H311‧‧‧ Grayscale information storage bit string

H312‧‧‧缺陷資訊儲存位元串 H312‧‧‧ Defect information storage bit string

H321‧‧‧灰階資訊儲存位元串 H321‧‧‧ Grayscale information storage bit string

H322‧‧‧缺陷資訊儲存位元串 H322‧‧‧ Defect information storage bit string

H331‧‧‧灰階資訊儲存位元串 H331‧‧‧ Grayscale information storage bit string

H332‧‧‧缺陷資訊儲存位元串 H332‧‧‧ Defect information storage bit string

L‧‧‧直線 L‧‧‧ Straight line

P1‧‧‧邊緣分佈 P1‧‧‧ edge distribution

P2‧‧‧微分分佈 P2‧‧‧ differential distribution

P3‧‧‧亮度分佈 P3‧‧‧Brightness distribution

P4‧‧‧亮度值差分佈 P4‧‧‧Brightness value difference distribution

P5‧‧‧平滑化分佈 P5‧‧‧ Smoothing distribution

P6‧‧‧邊緣分佈 P6‧‧‧ edge distribution

P7‧‧‧邊緣分佈 P7‧‧‧ edge distribution

P11‧‧‧峰值 P11‧‧‧ peak

P21‧‧‧峰值 P21‧‧‧ peak

P22‧‧‧特徵值 P22‧‧‧ eigenvalue

P31‧‧‧谷部分 P31‧‧‧ Valley section

P41‧‧‧峰值 P41‧‧‧ peak

P42‧‧‧特徵值 P42‧‧‧ eigenvalue

P51‧‧‧峰值 P51‧‧‧ peak

P52‧‧‧特徵值 P52‧‧‧ eigenvalue

P61‧‧‧點 P61‧‧ points

P62‧‧‧點 P62‧‧‧ points

P63‧‧‧區域 P63‧‧‧ area

P71‧‧‧點 P71‧‧ points

P72‧‧‧點 P72‧‧ points

P73‧‧‧假想直線 P73‧‧‧ imaginary straight line

P74‧‧‧弧 P74‧‧‧Arc

P711‧‧‧切線 P711‧‧‧ tangent

P721‧‧‧切線 P721‧‧‧ tangent

R‧‧‧曲率半徑 R‧‧‧ radius of curvature

X‧‧‧方向 X‧‧‧ direction

Y‧‧‧方向 Y‧‧‧ direction

Z‧‧‧搬送方向 Z‧‧‧Transfer direction

α1‧‧‧角度 11‧‧‧ angle

α2‧‧‧角度 22‧‧‧ angle

α3‧‧‧角度 33‧‧‧ angle

圖1係表示本發明之一實施形態之缺陷檢查方法之步驟的步驟圖。 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing the steps of a defect inspection method according to an embodiment of the present invention.

圖2係表示本發明之一實施形態之缺陷檢查裝置100之構成的模式圖。 Fig. 2 is a schematic view showing the configuration of a defect inspection apparatus 100 according to an embodiment of the present invention.

圖3係表示缺陷檢查裝置100之構成之方塊圖。 FIG. 3 is a block diagram showing the configuration of the defect inspection apparatus 100.

圖4A係用以說明作為缺陷檢測演算法之一例之邊緣分佈法之圖,且係表示與由拍攝裝置5所產生之二維圖像資料對應之二維圖像A之一例之圖。 4A is a view for explaining an edge distribution method as an example of a defect detection algorithm, and is a view showing an example of a two-dimensional image A corresponding to two-dimensional image data generated by the imaging device 5.

圖4B係表示由處理圖像產生部61所作成之邊緣分佈P1之一例之圖。 FIG. 4B is a view showing an example of the edge distribution P1 formed by the processed image generating unit 61.

圖4C係表示由處理圖像產生部61所作成之微分分佈P2之一例之圖。 4C is a view showing an example of the differential distribution P2 made by the processed image generating unit 61.

圖5A係用以說明作為缺陷檢測演算法之其他例之峰值法之圖,且係表示與由拍攝裝置5所產生之二維圖像資料對應之二維圖像B之一例之圖。 5A is a view for explaining a peak method as another example of the defect detection algorithm, and is a view showing an example of a two-dimensional image B corresponding to the two-dimensional image data generated by the imaging device 5.

圖5B係表示由處理圖像產生部61所作成之亮度分佈P3之一例之圖。 FIG. 5B is a view showing an example of the luminance distribution P3 created by the processed image generating unit 61.

圖5C係用以對由處理圖像產生部61執行之自資料點之一端朝向另一端移動之質點的假定順序進行說明之圖。 Fig. 5C is a diagram for explaining a hypothetical sequence of the mass points which are executed by the processed image generating unit 61 from one end of the data point toward the other end.

圖5D係表示由處理圖像產生部61所作成之亮度值差分佈P4之一例之圖。 FIG. 5D is a view showing an example of the luminance value difference distribution P4 made by the processed image generating unit 61.

圖6A係用以對作為缺陷檢測演算法之其他例之平滑化法進行說明之圖,且係表示與由拍攝裝置5所產生之二維圖像資料對應之二維圖像C之一例之圖。 6A is a view for explaining a smoothing method as another example of the defect detecting algorithm, and is a view showing an example of a two-dimensional image C corresponding to the two-dimensional image data generated by the imaging device 5. .

圖6B係表示由處理圖像產生部61所產生之平滑化分佈P5之一例之圖。 FIG. 6B is a view showing an example of the smoothing distribution P5 generated by the processed image generating unit 61.

圖7A係用以對作為缺陷檢測演算法之其他例之第2邊緣分佈法進行說明之圖,且係表示與由拍攝裝置5所產生之二維圖像資料對應之 二維圖像D之一例之圖。 7A is a diagram for explaining a second edge distribution method as another example of the defect detection algorithm, and corresponds to a two-dimensional image data generated by the imaging device 5. A diagram of an example of a two-dimensional image D.

圖7B係表示由處理圖像產生部61所作成之邊緣分佈P6之一例之圖。 Fig. 7B is a view showing an example of the edge distribution P6 formed by the processed image generating unit 61.

圖7C係表示由處理圖像產生部61所作成之邊緣分佈P7之一例之圖。 Fig. 7C is a view showing an example of the edge distribution P7 formed by the processed image generating unit 61.

圖8A係表示圖像處理裝置6所產生之處理圖像之一例之圖,且係表示利用第1缺陷檢測演算法進行處理而產生之處理圖像E之一例之圖。 FIG. 8A is a view showing an example of a processed image generated by the image processing device 6, and is a view showing an example of the processed image E generated by the first defect detecting algorithm.

圖8B係表示圖像處理裝置6所產生之處理圖像之一例之圖,且係表示利用第2缺陷檢測演算法進行處理而產生之處理圖像F之一例之圖。 8B is a view showing an example of a processed image generated by the image processing device 6, and is a view showing an example of the processed image F generated by the second defect detecting algorithm.

圖8C係表示處理圖像產生部61將處理圖像E與處理圖像F合成而產生之處理圖像G之一例之圖。 FIG. 8C is a view showing an example of the processed image G generated by the processed image generating unit 61 combining the processed image E and the processed image F.

圖9A係表示圖像處理裝置6所產生之解析用圖像之一例之圖,且係表示藉由對構成由處理圖像產生部61所產生之處理圖像G之各像素之灰階資訊儲存位元串附加缺陷資訊儲存位元串而獲得之解析用圖像H之一例的圖。 FIG. 9A is a view showing an example of an image for analysis generated by the image processing device 6, and shows grayscale information storage by each pixel constituting the processed image G generated by the processed image generating portion 61. A diagram of an example of the analysis image H obtained by adding a defect information to the bit string.

圖9B係表示構成解析用圖像H中之像素之解析用位元串H31、H32及H33之一例的圖。 FIG. 9B is a view showing an example of the analysis bit strings H31, H32, and H33 constituting the pixels in the analysis image H.

圖1係表示本發明之一實施形態之缺陷檢查方法之步驟之步驟圖。本實施形態之缺陷檢查方法包括圖1所示之搬送步驟s1、光照射步驟s2、拍攝步驟s3、特徵值計算步驟s4、處理圖像資料產生步驟s5、缺陷資訊獲取步驟s6、解析用圖像資料產生步驟s7、及圖像解析步驟s8。 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing the steps of a defect inspection method according to an embodiment of the present invention. The defect inspection method of the present embodiment includes the transport step s1, the light irradiation step s2, the photographing step s3, the feature value calculating step s4, the processed image data generating step s5, the defect information acquiring step s6, and the parsing image shown in Fig. 1. The data generation step s7 and the image analysis step s8.

圖2係表示本發明之一實施形態之缺陷檢查裝置100之構成之模 式圖。圖3係表示缺陷檢查裝置100之構成之方塊圖。本實施形態之缺陷檢查裝置100係檢測熱塑性樹脂等之片狀成形體2之缺陷之裝置,且包含本發明之圖像產生裝置1、及圖像解析裝置7。缺陷檢查裝置100之圖像產生裝置1包含搬送裝置3、照明裝置4、拍攝裝置5、及圖像處理裝置6。缺陷檢查裝置100實現本發明之缺陷檢查方法。搬送裝置3執行搬送步驟s1,照明裝置4執行光照射步驟s2,拍攝裝置5執行拍攝步驟s3,圖像處理裝置6執行特徵值計算步驟s4、處理圖像資料產生步驟s5、缺陷資訊獲取步驟s6及解析用圖像資料產生步驟s7,圖像解析裝置7執行圖像解析步驟s8。 Figure 2 is a view showing the configuration of the defect inspection apparatus 100 according to an embodiment of the present invention. Figure. FIG. 3 is a block diagram showing the configuration of the defect inspection apparatus 100. The defect inspection device 100 of the present embodiment is a device for detecting a defect of the sheet-like molded body 2 such as a thermoplastic resin, and includes the image generating device 1 and the image analyzing device 7 of the present invention. The image generation device 1 of the defect inspection device 100 includes a transfer device 3, an illumination device 4, an imaging device 5, and an image processing device 6. The defect inspection device 100 implements the defect inspection method of the present invention. The transport device 3 performs the transport step s1, the illumination device 4 performs the light irradiation step s2, the photographing device 5 performs the photographing step s3, and the image processing device 6 performs the feature value calculation step s4, the processed image data generation step s5, and the defect information acquisition step s6. And the analysis image data generation step s7, the image analysis device 7 performs an image analysis step s8.

缺陷檢查裝置100係藉由搬送裝置3將以一定寬度於長度方向連續之片狀成形體2沿固定方向(與片狀成形體2之與寬度方向正交之上述長度方向為同一方向)移送,並於該移送過程中藉由拍攝裝置5拍攝由照明裝置4予以照明之片材面而產生表示二維圖像之二維圖像資料,圖像處理裝置6根據上述二維圖像資料而產生解析用圖像資料,圖像解析裝置7根據自圖像處理裝置6輸出之解析用圖像資料進行缺陷檢測。 In the defect inspection apparatus 100, the sheet-like molded body 2 continuous in the longitudinal direction with a constant width is transferred in the fixed direction (the same direction as the longitudinal direction orthogonal to the width direction of the sheet-shaped molded body 2) by the conveyance device 3, And the two-dimensional image data representing the two-dimensional image is generated by the photographing device 5 capturing the sheet surface illuminated by the illumination device 4 during the transfer, and the image processing device 6 generates the image according to the two-dimensional image data. The image data for analysis is used, and the image analysis device 7 performs defect detection based on the analysis image data output from the image processing device 6.

作為被檢查體之片狀成形體2係藉由如下步驟而成形:實施使自擠出機擠出之熱塑性樹脂通過輥之間隙而將表面平滑化或者賦予凹凸形狀等處理,並一面於搬送輥上冷卻一面利用捲取輥捲取。可應用於本實施形態之片狀成形體2之熱塑性樹脂例如為甲基丙烯酸樹脂、甲基丙烯酸甲酯-苯乙烯共聚物(MS(methyl methacrylate styrene copolymer)樹脂)、聚乙烯(PE,polyethylene)、聚丙烯(PP,polypropylene)等聚烯烴、聚碳酸酯(PC,polycarbonate)、聚氯乙烯(PVC,polyvinyl chloride)、聚苯乙烯(PS,polystyrene)、聚乙烯醇(PVA,polyvinyl alcohol)、三醋酸纖維素樹脂(TAC,Triacetyl Cellulose)等。片狀成形體2係利用該等熱塑性樹脂之單層片材、積層 片材等而成形。 The sheet-like molded body 2 as the object to be inspected is formed by subjecting a thermoplastic resin extruded from an extruder to a surface of a roll to smooth the surface or impart a treatment such as a concavo-convex shape, and to carry it on the conveying roller. The upper cooling side is taken up by a take-up roll. The thermoplastic resin which can be applied to the sheet-like formed body 2 of the present embodiment is, for example, a methacrylic resin, a methyl methacrylate styrene copolymer (MS), or a polyethylene (PE). Polypropylene (PP, polypropylene) and other polyolefins, polycarbonate (PC), polyvinyl chloride (PVC), polystyrene (PS, polystyrene), polyvinyl alcohol (PVA, polyvinyl alcohol), Triacetyl cellulose resin (TAC, Triacetyl Cellulose) and the like. The sheet-shaped formed body 2 is a single-layer sheet or laminated layer using the thermoplastic resins Formed by sheet or the like.

又,作為於片狀成形體2產生之缺陷之例,可列舉成形時產生之氣泡、魚眼、異物、輪胎痕、凹痕、刮痕等點狀之缺陷(點缺陷)、因折痕等而產生之所謂之裂點(knick)、因厚度差異而產生之所謂之原片條紋等線狀之缺陷(線缺陷)。 Further, examples of the defects generated in the sheet-like molded body 2 include dot-shaped defects (point defects) such as bubbles, fish eyes, foreign matter, tire marks, dents, and scratches generated during molding, and creases and the like. The so-called knick, a linear defect such as a so-called original stripe which is caused by a difference in thickness (line defect).

搬送裝置3具有作為搬送部之功能,將片狀成形體2沿固定方向(搬送方向Z)搬送。搬送裝置3例如包括將片狀成形體2沿搬送方向Z搬送之送出輥及接收輥,並利用旋轉編碼器等計測搬送距離。於本實施形態中,搬送速度係於搬送方向Z設定為2~30m/min左右。 The conveying device 3 has a function as a conveying unit, and conveys the sheet-shaped formed body 2 in the fixing direction (transporting direction Z). The conveying device 3 includes, for example, a feeding roller and a receiving roller that convey the sheet-shaped formed body 2 in the conveying direction Z, and measures the conveying distance by a rotary encoder or the like. In the present embodiment, the conveying speed is set to about 2 to 30 m/min in the conveying direction Z.

照明裝置4具有作為光照射部之功能,呈線狀照明與搬送方向Z正交之片狀成形體2之寬度方向。照明裝置4係以由拍攝裝置5所拍攝之圖像中包含線狀之反射影像之方式配置。具體而言,照明裝置4係於以片狀成形體2為基準與拍攝裝置5為同一側,以面向片狀成形體2之表面且距片狀成形體2之表面上之照明區域、即拍攝裝置5所拍攝之拍攝區域之距離成為例如200mm之方式配置。 The illuminating device 4 has a function as a light-irradiating portion, and has a line-like illumination in the width direction of the sheet-like molded body 2 orthogonal to the transport direction Z. The illuminating device 4 is disposed such that the image captured by the imaging device 5 includes a linear reflected image. Specifically, the illuminating device 4 is formed on the same side as the imaging device 5 with respect to the sheet-like molded body 2, and faces the surface of the sheet-like molded body 2 and is separated from the illumination region on the surface of the sheet-like molded body 2, that is, photographed. The distance between the imaging regions captured by the device 5 is set to, for example, 200 mm.

作為照明裝置4之光源,只要為LED(Light Emitting Diode,發光二極體)、金屬鹵素燈、鹵素傳送燈、螢光燈等照射不會對片狀成形體2之組成及性質造成影響之光者,則無特別限定。再者,照明裝置4亦可隔著片狀成形體2而配置於與拍攝裝置5為相反側。於此情形時,由拍攝裝置5拍攝到之圖像中包含透過片狀成形體2之透射影像。 As a light source of the illumination device 4, light that does not affect the composition and properties of the sheet-like formed body 2 is irradiated with an LED (Light Emitting Diode), a metal halide lamp, a halogen transmission lamp, a fluorescent lamp, or the like. However, there is no particular limitation. Further, the illumination device 4 may be disposed on the opposite side of the imaging device 5 via the sheet-like molded body 2. In this case, the image captured by the imaging device 5 includes the transmitted image transmitted through the sheet-like formed body 2.

缺陷檢查裝置100包括具有作為拍攝部之功能之複數個拍攝裝置5,各拍攝裝置5係於與搬送方向Z正交之方向(片狀成形體2之寬度方向)等間隔地排列。又,拍攝裝置5係以自拍攝裝置5朝向片狀成形體2之拍攝區域之中心之方向與搬送方向Z形成銳角之方式配置。拍攝裝置5係複數次拍攝片狀成形體2之包含因照明裝置4而產生之反射影像或透射影像(以下,總稱為「照明影像」)之二維圖像而產生複數個二 維圖像資料。 The defect inspection apparatus 100 includes a plurality of imaging devices 5 having a function as an imaging unit, and each imaging device 5 is arranged at equal intervals in a direction orthogonal to the transport direction Z (the width direction of the sheet-shaped molded body 2). Further, the imaging device 5 is disposed such that the direction from the imaging device 5 toward the center of the imaging region of the sheet-like molded body 2 forms an acute angle with the transport direction Z. The imaging device 5 generates a plurality of two-dimensional images including the reflected image or the transmitted image (hereinafter collectively referred to as "illuminated image") generated by the illumination device 4 in a plurality of times. Dimensional image data.

拍攝裝置5包含拍攝二維圖像之CCD(Charge Coupled Device,電荷耦合元件)或CMOS(Complementary Metal-Oxide Semiconductor,互補金氧半導體)之區域感測器。如圖2所示,拍攝裝置5係以拍攝片狀成形體2之與搬送方向Z正交之寬度方向之整個區域的方式配置。藉由如此般拍攝片狀成形體2之寬度方向之整個區域,並搬送於搬送方向Z連續之片狀成形體2,可有效率地檢查片狀成形體2之整個區域之缺陷。 The imaging device 5 includes a CCD (Charge Coupled Device) or a CMOS (Complementary Metal-Oxide Semiconductor) area sensor that captures a two-dimensional image. As shown in FIG. 2, the imaging device 5 is disposed so as to capture the entire region of the sheet-like molded body 2 in the width direction orthogonal to the transport direction Z. By photographing the entire region in the width direction of the sheet-like molded body 2 in this manner and transporting the sheet-like molded body 2 continuous in the transport direction Z, the defects of the entire region of the sheet-like molded body 2 can be efficiently inspected.

拍攝裝置5之拍攝間隔(圖框率(frame rate))可為固定,亦可藉由使用者操作拍攝裝置5本身而進行變更。又,拍攝裝置5之拍攝間隔亦可為作為數位靜態相機之連續攝影之時間間隔的幾分之一秒等,但為提高檢查之效率化,較佳為較短之時間間隔、例如作為一般之動畫資料之圖框率之1/30秒等。 The photographing interval (frame rate) of the photographing device 5 may be fixed or may be changed by the user operating the photographing device 5 itself. Further, the photographing interval of the photographing device 5 may be a fraction of a second as a time interval of continuous photographing of the digital still camera, but in order to improve the efficiency of the inspection, it is preferably a short time interval, for example, as a general The frame rate of the animation data is 1/30 second, etc.

拍攝裝置5所拍攝之二維圖像之搬送方向Z之長度較佳為在拍攝裝置5取入二維圖像後至取入下一個二維圖像之前之時間內將片狀成形體2搬送之搬送距離之至少2倍以上。即,較佳為對片狀成形體2之同一部位拍攝2次以上。如此般,使二維圖像之搬送方向Z之長度大於拍攝裝置5取入二維圖像後至取入下一個二維圖像之前之時間內的片狀成形體2之搬送距離,而使片狀成形體2之同一部分之拍攝次數增加,藉此,可高精度地檢查缺陷。 The length of the transport direction Z of the two-dimensional image captured by the imaging device 5 is preferably such that the sheet-shaped formed body 2 is transported after the photographing device 5 takes in the two-dimensional image and before the next two-dimensional image is taken in. The transport distance is at least 2 times or more. That is, it is preferable to photograph the same portion of the sheet-like formed body 2 twice or more. In this manner, the length of the transport direction Z of the two-dimensional image is larger than the transport distance of the sheet-like molded body 2 in the time before the image pickup device 5 takes in the two-dimensional image and takes the next two-dimensional image. The number of times of photographing of the same portion of the sheet-like formed body 2 is increased, whereby the defect can be inspected with high precision.

圖像處理裝置6包括:處理圖像產生部61,其具有作為特徵值計算部、處理圖像資料產生部及缺陷資訊獲取部之功能;及解析用圖像產生部62,其具有作為解析用圖像資料產生部之功能。圖像處理裝置6係對應於複數個拍攝裝置5之各者而設置。處理圖像產生部61可藉由FPGA(Field-programmable gate array,場可程式化閘陣列)或GPGPU(General-purpose computing on graphics processing units,通用 圖形處理單元)等圖像處理板或拍攝裝置5內部之硬體而實現。 The image processing device 6 includes a processed image generating unit 61 having functions as a feature value calculating unit, a processed image data generating unit, and a defect information acquiring unit, and an analysis image generating unit 62 having analysis information. The function of the image data generation section. The image processing device 6 is provided corresponding to each of the plurality of imaging devices 5. The processed image generating unit 61 can be implemented by an FPGA (Field-programmable gate array) or a GPGPU (General-purpose computing on graphics processing units). The graphics processing unit or the like is implemented by an image processing board or a hardware inside the imaging device 5.

處理圖像產生部61係利用預先規定之演算法(以下,稱為「缺陷檢測演算法」)對自拍攝裝置5輸出之二維圖像資料進行處理,藉此,算出構成上述二維圖像資料之各像素之基於亮度值之特徵值。進而,處理圖像產生部61係將上述二維圖像資料中上述特徵值為預先規定之閾值以上之像素辨識為缺陷像素,並產生灰階資訊儲存位元串,該灰階資訊儲存位元串中,針對缺陷像素而儲存有表示與上述特徵值對應之灰階值之灰階資訊,針對缺陷像素以外之剩餘像素(上述特徵值未達上述閾值之像素)而儲存有表示零之灰階值之灰階資訊。對各個像素產生之灰階資訊儲存位元串分別包含複數個位元。繼而,處理圖像產生部61輸出各個像素由上述灰階資訊儲存位元串構成之處理圖像資料。進而,處理圖像產生部61根據所產生之處理圖像資料,對每一像素獲取關於片狀成形體2中之缺陷之資訊即缺陷資訊,並產生儲存有上述所獲取之缺陷資訊之缺陷資訊儲存位元串。對各個像素產生之缺陷資訊儲存位元串通常分別包含複數個位元。 The processed image generating unit 61 processes the two-dimensional image data output from the imaging device 5 by using a predetermined algorithm (hereinafter referred to as "defect detection algorithm"), thereby calculating the two-dimensional image. The characteristic value of each pixel of the data based on the luminance value. Further, the processed image generating unit 61 identifies the pixel having the feature value equal to or greater than a predetermined threshold value as a defective pixel in the two-dimensional image data, and generates a grayscale information storage bit string, the grayscale information storage bit In the string, gray scale information indicating a gray scale value corresponding to the feature value is stored for the defective pixel, and a gray scale indicating zero is stored for the remaining pixels other than the defective pixel (the pixel whose feature value does not reach the threshold value) Grayscale information of the value. The gray scale information storage bit string generated for each pixel respectively contains a plurality of bits. Then, the processed image generating unit 61 outputs processed image data each of which is composed of the above-described grayscale information storage bit string. Further, the processed image generating unit 61 acquires information on the defect in the sheet-shaped formed body 2, that is, defect information, for each pixel, based on the processed image data generated, and generates defect information storing the acquired defect information. Store the bit string. The defect information storage bit string generated for each pixel typically contains a plurality of bits, respectively.

對處理圖像產生部61中所使用之缺陷檢測演算法,一面參照圖4A~4C、圖5A~5D、圖6A及6B、以及圖7A~7C一面進行說明。 The defect detection algorithm used in the processed image generating unit 61 will be described with reference to FIGS. 4A to 4C, FIGS. 5A to 5D, FIGS. 6A and 6B, and FIGS. 7A to 7C.

圖4A~4C係用以對作為缺陷檢測演算法之一例之邊緣分佈法進行說明之圖。圖4A表示與由拍攝裝置5所產生之二維圖像資料對應之二維圖像A之一例,且圖像之上側為搬送方向Z下游側,圖像之下側為搬送方向Z上游側。於二維圖像A中,將與片狀成形體2之寬度方向平行之方向設為X方向,將與片狀成形體2之長度方向(與搬送方向Z平行之方向)平行之方向設為Y方向。於圖4A中,於二維圖像A之Y方向上位於中央且沿X方向延伸之帶狀之明區域為照明影像A1,存在於照明影像A1之內部之暗區域為第1缺陷像素群A21,存在於照明影像A1附近之明區域為第2缺陷像素群A22。 4A to 4C are diagrams for explaining an edge distribution method as an example of a defect detection algorithm. 4A shows an example of a two-dimensional image A corresponding to the two-dimensional image data generated by the imaging device 5, and the upper side of the image is the downstream side of the transport direction Z, and the lower side of the image is the upstream side of the transport direction Z. In the two-dimensional image A, the direction parallel to the width direction of the sheet-like molded body 2 is set to the X direction, and the direction parallel to the longitudinal direction of the sheet-shaped molded body 2 (the direction parallel to the conveyance direction Z) is set to Y direction. In FIG. 4A, the band-shaped bright region which is located at the center in the Y direction of the two-dimensional image A and extends in the X direction is the illumination image A1, and the dark region existing inside the illumination image A1 is the first defective pixel group A21. The bright region existing in the vicinity of the illumination image A1 is the second defective pixel group A22.

於使用利用邊緣分佈法之缺陷檢測演算法之情形時,處理圖像產生部61首先將二維圖像A分割成沿著Y方向之逐行之像素行之資料。其次,處理圖像產生部61對各像素行之資料進行自Y方向一端(圖4A中之二維圖像A之上端)朝向另一端(圖4A中之二維圖像A之下端)探查邊緣之邊緣判定處理。 When the defect detection algorithm using the edge distribution method is used, the processed image generating portion 61 first divides the two-dimensional image A into data of progressive pixel rows along the Y direction. Next, the processed image generating portion 61 traces the data of each pixel row from one end in the Y direction (the upper end of the two-dimensional image A in Fig. 4A) toward the other end (the lower end of the two-dimensional image A in Fig. 4A). Edge determination processing.

具體而言,處理圖像產生部61係針對各像素行之資料,將自Y方向一端側起第2個像素設為注目像素,並判定注目像素之亮度值是否較相對於注目像素於一端側鄰接之鄰接像素之亮度值大特定之閾值以上。於判定注目像素之亮度值較鄰接像素之亮度值大特定之閾值以上之情形時,處理圖像產生部61判定鄰接像素為上限邊緣A3。於除此以外之情形時,處理圖像產生部61一面使注目像素朝向Y方向另一端以1像素為單位偏移,一面重複進行邊緣判定處理直至判定注目像素之亮度值較鄰接像素之亮度值大特定之閾值以上為止。 Specifically, the processed image generating unit 61 sets the second pixel from the one end side in the Y direction as the target pixel for each pixel row, and determines whether the brightness value of the target pixel is on the one end side with respect to the target pixel. The luminance values of adjacent pixels adjacent to each other are greater than a certain threshold. When it is determined that the luminance value of the pixel of interest is larger than the luminance value of the adjacent pixel by a certain threshold or more, the processed image generation unit 61 determines that the adjacent pixel is the upper limit edge A3. In other cases, the processed image generating unit 61 repeats the edge determination process while shifting the pixel of interest toward the other end in the Y direction by one pixel until the brightness value of the pixel of interest is determined to be higher than the brightness value of the adjacent pixel. The maximum specific threshold is above.

於檢測出上限邊緣A3後,處理圖像產生部61一面使注目像素朝向Y方向另一端以1像素為單位偏移,一面判定注目像素之亮度值是否較鄰接像素之亮度值小特定之閾值以上。於判定注目像素之亮度值較鄰接像素之亮度值小特定之閾值以上之情形時,處理圖像產生部61判定鄰接像素為下限邊緣A4。於除此以外之情形時,處理圖像產生部61一面使注目像素朝向Y方向另一端以1像素為單位偏移,一面重複進行邊緣判定處理直至判定注目像素之亮度值較鄰接像素之亮度值小特定之閾值以上為止。 After detecting the upper limit edge A3, the processed image generating unit 61 determines whether the luminance value of the pixel of interest is smaller than the luminance value of the adjacent pixel by a specific threshold or more by shifting the pixel of interest toward the other end in the Y direction by one pixel. . When it is determined that the luminance value of the pixel of interest is smaller than the threshold value of the adjacent pixel by a specific threshold or more, the processed image generation unit 61 determines that the adjacent pixel is the lower limit edge A4. In other cases, the processed image generating unit 61 repeats the edge determination process while shifting the pixel of interest toward the other end in the Y direction by one pixel until the brightness value of the pixel of interest is determined to be higher than the brightness value of the adjacent pixel. Small specific thresholds or more.

於圖4A中,以「○」示出藉由利用處理圖像產生部61之邊緣判定處理而檢測出之上限邊緣A3之例,且以「●」示出下限邊緣A4之例。根據圖4A可知,於二維圖像A中,於存在缺陷之第1缺陷像素群A21及第2缺陷像素群A22中,上限邊緣A3與下限邊緣A4於Y方向上之座標值(Y座標值)之差極端地小於缺陷像素以外之剩餘像素中之Y座標 值之差。又,於二維圖像A中之第2缺陷像素群A22中,上限邊緣A3之Y座標值明顯不同於缺陷像素以外之剩餘像素中之Y座標值。 In the example of FIG. 4A, the upper limit edge A3 detected by the edge determination processing of the processed image generating unit 61 is shown by "○", and the lower limit edge A4 is shown by "●". 4A, in the two-dimensional image A, the coordinate value (Y coordinate value) of the upper limit edge A3 and the lower limit edge A4 in the Y direction in the first defective pixel group A21 and the second defective pixel group A22 in which the defect exists The difference is extremely smaller than the Y coordinate in the remaining pixels except the defective pixel The difference between the values. Further, in the second defective pixel group A22 in the two-dimensional image A, the Y coordinate value of the upper limit edge A3 is significantly different from the Y coordinate value of the remaining pixels other than the defective pixel.

利用此種特徵,處理圖像產生部61作成圖4B所示之邊緣分佈P1。於圖4B所示之邊緣分佈P1中,與二維圖像A中之第2缺陷像素群A22對應地,出現與上限邊緣A3之Y座標值對應之峰值P11。再者,處理圖像產生部61亦可構成為根據上限邊緣A3與下限邊緣A4之Y座標值之差而作成邊緣分佈。於此情形時,於由處理圖像產生部61所作成之邊緣分佈中,與二維圖像A中之第1缺陷像素群A21及第2缺陷像素群A22對應地,出現上限邊緣A3與下限邊緣A4之Y座標值之差較小之峰值。 With such a feature, the processed image generating portion 61 creates the edge distribution P1 shown in Fig. 4B. In the edge distribution P1 shown in FIG. 4B, a peak P11 corresponding to the Y coordinate value of the upper limit edge A3 appears corresponding to the second defective pixel group A22 in the two-dimensional image A. Furthermore, the processed image generating unit 61 may be configured to form an edge distribution based on the difference between the Y coordinate values of the upper limit edge A3 and the lower limit edge A4. In this case, in the edge distribution by the processed image generating unit 61, the upper limit edge A3 and the lower limit appear corresponding to the first defective pixel group A21 and the second defective pixel group A22 in the two-dimensional image A. The difference between the Y coordinate values of the edge A4 is small.

進而,處理圖像產生部61對邊緣分佈P1進行微分處理而作成圖4C所示之微分分佈P2。於圖4C所示之微分分佈P2中,與邊緣分佈P1中之峰值P11對應地,即,與二維圖像A中之第2缺陷像素群A22對應地,出現具有預先規定之閾值以上(微分值較大)之特徵值P22的峰值P21。 Further, the processed image generating unit 61 differentiates the edge distribution P1 to form a differential distribution P2 shown in FIG. 4C. In the differential distribution P2 shown in FIG. 4C, corresponding to the peak value P11 in the edge distribution P1, that is, corresponding to the second defective pixel group A22 in the two-dimensional image A, a predetermined threshold or more appears (differential The value of the larger value is the peak value P21 of the feature value P22.

處理圖像產生部61根據微分分佈P2,提取與具有預先規定之閾值以上之特徵值P22之峰值P21對應的二維圖像A中之像素作為缺陷像素。於圖4C所示之微分分佈P2之例中,處理圖像產生部61提取第2缺陷像素群A22作為缺陷像素。 The processed image generating unit 61 extracts a pixel in the two-dimensional image A corresponding to the peak value P21 of the feature value P22 having a predetermined threshold value or more as a defective pixel based on the differential distribution P2. In the example of the differential distribution P2 shown in FIG. 4C, the processed image generating unit 61 extracts the second defective pixel group A22 as a defective pixel.

圖5A~5D係用以對作為缺陷檢測演算法之其他例之峰值法進行說明的圖。圖5A表示與由拍攝裝置5所產生之二維圖像資料對應之二維圖像B之一例,且圖像之上側為搬送方向Z下游側,圖像之下側為搬送方向Z上游側。於二維圖像B中,將與片狀成形體2之寬度方向平行之方向設為X方向,將與片狀成形體2之長度方向(與搬送方向Z平行之方向)平行之方向設為Y方向。於圖5(a)中,於二維圖像B之Y方向上位於中央且沿X方向延伸之帶狀之明區域為照明影像B1,存在於照 明影像B1之內部之暗區域為第1缺陷像素群B21,存在於照明影像B1附近之明區域為第2缺陷像素群B22。 5A to 5D are diagrams for explaining a peak method as another example of the defect detection algorithm. FIG. 5A shows an example of a two-dimensional image B corresponding to the two-dimensional image data generated by the imaging device 5, and the upper side of the image is the downstream side of the transport direction Z, and the lower side of the image is the upstream side of the transport direction Z. In the two-dimensional image B, the direction parallel to the width direction of the sheet-like molded body 2 is set to the X direction, and the direction parallel to the longitudinal direction of the sheet-shaped molded body 2 (the direction parallel to the conveyance direction Z) is set to Y direction. In FIG. 5( a ), the band-shaped bright region located at the center in the Y direction of the two-dimensional image B and extending in the X direction is the illumination image B1 and exists in the photo. The dark area inside the bright image B1 is the first defective pixel group B21, and the bright area existing in the vicinity of the illumination image B1 is the second defective pixel group B22.

於使用利用峰值法之缺陷檢測演算法之情形時,處理圖像產生部61首先將二維圖像B分割成沿著Y方向之逐行之像素行之資料。其次,處理圖像產生部61係作成對各像素行之資料將二維圖像B之沿著與Y方向平行之一直線L上之位置上之亮度值之資料以點之形式連續地描繪並連接其等而成的曲線作為圖5B所示之亮度分佈P3。 When the defect detection algorithm using the peak method is used, the processed image generating portion 61 first divides the two-dimensional image B into data of progressive pixel rows along the Y direction. Next, the processed image generating unit 61 is configured to continuously draw and connect the data of the luminance values at the position on the straight line L parallel to the Y direction of the two-dimensional image B for each pixel row. The curve formed by this is the luminance distribution P3 shown in FIG. 5B.

於二維圖像B中不存在缺陷像素之情形時,亮度分佈P3呈現未出現谷部分之單峰之分佈,於存在缺陷像素之情形時,如圖5B所示,呈現出現了谷部分P31之雙峰之分佈。 In the case where there is no defective pixel in the two-dimensional image B, the luminance distribution P3 exhibits a distribution of a single peak where no valley portion occurs, and in the case where the defective pixel exists, as shown in FIG. 5B, the double of the valley portion P31 appears. The distribution of peaks.

繼而,處理圖像產生部61係對各像素行之亮度分佈P3以鄰接之資料點間之移動時間不管資料點間之距離而成為固定之方式假定自亮度分佈P3之X方向之一端朝向另一端移動之質點。此處,上述質點設為如圖5C所示自資料點c朝與其鄰接之資料點b、自資料點b朝與其鄰接之資料點a、自資料點a朝與其鄰接之資料點d移動。又,資料點d設為與注目像素對應之資料點。 Then, the processed image generating unit 61 assumes that the moving time between adjacent data points is fixed regardless of the distance between the data points, regardless of the distance between the data points, from one end of the X direction of the brightness distribution P3 toward the other end. The point of movement. Here, the mass point is moved from the data point c toward the data point b adjacent thereto from the data point c, toward the data point a adjacent thereto from the data point b, and from the data point a toward the data point d adjacent thereto. Further, the data point d is set as the data point corresponding to the pixel of interest.

處理圖像產生部61求出質點於即將通過資料點d之前通過之資料點a、b、c處之質點之速度向量及加速度向量。即,處理圖像產生部61係根據質點於即將通過資料點d之前通過之2個資料點a及資料點b之座標與上述移動時間而求出資料點b至資料點a之區間內之質點之速度向量。又,處理圖像產生部61根據質點於即將通過資料點a之前通過之2個資料點b及資料點c之座標與上述移動時間而求出資料點c至資料點b之區間內之質點之速度向量。進而,處理圖像產生部61根據資料點b至資料點a之區間內之質點之速度向量、及資料點c至資料點b之區間內之質點之速度向量而求出資料點c至資料點a之區間內之質點之加速度向量。繼而,處理圖像產生部61根據資料點b至資料點a之區間內 之質點之速度向量、及資料點c至資料點a之區間內之質點之加速度向量而預測資料點d之座標(預測資料點f)。 The processed image generating unit 61 obtains the velocity vector and the acceleration vector of the mass point at the data points a, b, and c passing through the material point d immediately before passing through the data point d. In other words, the processed image generating unit 61 obtains the dot in the interval from the data point b to the data point a based on the coordinates of the two data points a and the data point b that are passed before the data point d and the moving time. Speed vector. Further, the processed image generating unit 61 obtains the mass point in the interval from the data point c to the data point b based on the coordinates of the two data points b and the data points c which are passed before the data point a and the moving time. Speed vector. Further, the processed image generating unit 61 obtains the data point c to the data point based on the velocity vector of the mass point in the interval from the data point b to the data point a and the velocity vector of the mass point in the interval from the data point c to the data point b. The acceleration vector of the particle in the interval of a. Then, the processed image generating unit 61 is within the interval from the data point b to the data point a The velocity vector of the mass point and the acceleration vector of the mass point in the interval from the data point c to the data point a predict the coordinates of the data point d (predicted data point f).

處理圖像產生部61求出以上述方式預測出之資料點d之預測資料點f之亮度值與資料點d之實際(實測)之亮度值的差,並作成圖5D所示之亮度值差分佈P4。於圖5D所示之亮度值差分佈P4中,與圖5B所示之亮度分佈P3中之谷部分P31對應地,即,與二維圖像B中之第1缺陷像素群B21對應地,出現具有預先規定之閾值以上(亮度值差較大)之特徵值P42之峰值P41。 The processed image generating unit 61 obtains the difference between the luminance value of the predicted data point f of the data point d predicted in the above manner and the actual (actually measured) luminance value of the data point d, and creates the luminance value difference shown in FIG. 5D. Distribution P4. In the luminance value difference distribution P4 shown in FIG. 5D, corresponding to the valley portion P31 in the luminance distribution P3 shown in FIG. 5B, that is, corresponding to the first defective pixel group B21 in the two-dimensional image B, appears The peak value P41 of the characteristic value P42 having a predetermined threshold value or more (the luminance value difference is large).

處理圖像產生部61根據亮度值差分佈P4,提取與具有預先規定之閾值以上之特徵值P42之峰值P41對應的二維圖像B中之像素作為缺陷像素。於圖5D所示之亮度值差分佈P4之例中,處理圖像產生部61提取第1缺陷像素群B21作為缺陷像素。 The processed image generating unit 61 extracts a pixel in the two-dimensional image B corresponding to the peak value P41 of the feature value P42 having a predetermined threshold value or more as a defective pixel based on the luminance value difference distribution P4. In the example of the luminance value difference distribution P4 shown in FIG. 5D, the processed image generating unit 61 extracts the first defective pixel group B21 as a defective pixel.

圖6A及6B係用以對作為缺陷檢測演算法之其他例之平滑化法進行說明之圖。圖6A表示與由拍攝裝置5所產生之二維圖像資料對應之二維圖像C之一例,且圖像之上側為搬送方向Z下游側,圖像之下側為搬送方向Z上游側。於二維圖像C中,將與片狀成形體2之寬度方向平行之方向設為X方向,將與片狀成形體2之長度方向(與搬送方向Z平行之方向)平行之方向設為Y方向。於圖6A中,於二維圖像C之Y方向上位於中央且沿X方向延伸之帶狀之明區域為照明影像C1,存在於照明影像C1之內部之暗區域為第1缺陷像素群C21,存在於照明影像C1附近之明區域為第2缺陷像素群C22。 6A and 6B are diagrams for explaining a smoothing method as another example of the defect detection algorithm. FIG. 6A shows an example of a two-dimensional image C corresponding to the two-dimensional image data generated by the imaging device 5, and the upper side of the image is on the downstream side in the transport direction Z, and the lower side of the image is on the upstream side in the transport direction Z. In the two-dimensional image C, the direction parallel to the width direction of the sheet-like molded body 2 is set to the X direction, and the direction parallel to the longitudinal direction of the sheet-shaped molded body 2 (the direction parallel to the conveyance direction Z) is set to Y direction. In FIG. 6A, the strip-shaped bright region located in the center of the two-dimensional image C in the Y direction and extending in the X direction is the illumination image C1, and the dark region existing inside the illumination image C1 is the first defective pixel group C21. The bright region existing in the vicinity of the illumination image C1 is the second defective pixel group C22.

於使用利用平滑化法之缺陷檢測演算法之情形時,處理圖像產生部61首先將二維圖像C分割成沿著Y方向之逐行之像素行之資料。其次,處理圖像產生部61作成於X方向及Y方向為數個像素(例如,於X方向為5個像素且於Y方向為1個像素)之核心C31。 When the defect detection algorithm using the smoothing method is used, the processed image generating portion 61 first divides the two-dimensional image C into data of progressive pixel rows along the Y direction. Next, the processed image generating unit 61 is formed as a core C31 having a plurality of pixels (for example, five pixels in the X direction and one pixel in the Y direction) in the X direction and the Y direction.

繼而,處理圖像產生部61係作成對各像素行之資料將二維圖像C 之沿著與Y方向平行之一直線L上之位置上之核心C31內之中央像素之亮度值和核心C31內之所有像素之亮度值之平均值之差的資料以點之形式連續地描繪並連接其等而成的曲線作為圖6B所示之平滑化分佈P5。於圖6B所示之平滑化分佈P5中,與二維圖像C中之第1缺陷像素群C21對應地,出現具有預先規定之閾值以上(亮度值差較大)之特徵值P52之峰值P51。 Then, the processed image generating unit 61 is configured to create a two-dimensional image C for each pixel row. The data of the difference between the luminance value of the central pixel in the core C31 at the position on the straight line L parallel to the Y direction and the average value of the luminance values of all the pixels in the core C31 is continuously drawn and connected in the form of dots. The curve formed by this is the smoothing distribution P5 shown in Fig. 6B. In the smoothing distribution P5 shown in FIG. 6B, a peak P51 having a feature value P52 having a predetermined threshold or more (a large difference in luminance value) appears in correspondence with the first defective pixel group C21 in the two-dimensional image C. .

處理圖像產生部61根據平滑化分佈P5,提取與具有預先規定之閾值以上之特徵值P52之峰值P51對應的二維圖像C中之像素作為缺陷像素。於圖6B所示之平滑化分佈P5之例中,處理圖像產生部61提取第1缺陷像素群C21作為缺陷像素。 The processed image generating unit 61 extracts, as a defective pixel, a pixel in the two-dimensional image C corresponding to the peak value P51 of the feature value P52 having a predetermined threshold value or more, based on the smoothing distribution P5. In the example of the smoothing distribution P5 shown in FIG. 6B, the processed image generating unit 61 extracts the first defective pixel group C21 as a defective pixel.

圖7A~7C係用以對作為缺陷檢測演算法之其他例之第2邊緣分佈法進行說明的圖。圖7A表示與由拍攝裝置5所產生之二維圖像資料對應之二維圖像D之一例,且圖像之上側為搬送方向Z下游側,圖像之下側為搬送方向Z上游側。於二維圖像D中,將與片狀成形體2之寬度方向平行之方向設為X方向,將與片狀成形體2之長度方向(與搬送方向Z平行之方向)平行之方向設為Y方向。於圖7A中,於二維圖像D之Y方向上位於中央且沿X方向延伸之帶狀之明區域為照明影像D1,存在於照明影像D1之內部之暗區域為第1缺陷像素群D21,存在於照明影像D1附近之明區域為第2缺陷像素群D22。 7A to 7C are diagrams for explaining a second edge distribution method as another example of the defect detection algorithm. FIG. 7A shows an example of a two-dimensional image D corresponding to the two-dimensional image data generated by the imaging device 5, and the upper side of the image is the downstream side of the transport direction Z, and the lower side of the image is the upstream side of the transport direction Z. In the two-dimensional image D, the direction parallel to the width direction of the sheet-like molded body 2 is set to the X direction, and the direction parallel to the longitudinal direction of the sheet-shaped molded body 2 (the direction parallel to the conveyance direction Z) is set to Y direction. In FIG. 7A, a bright region in the center of the two-dimensional image D in the Y direction and extending in the X direction is an illumination image D1, and a dark region existing inside the illumination image D1 is a first defective pixel group D21. The bright region existing in the vicinity of the illumination image D1 is the second defective pixel group D22.

於使用利用第2邊緣分佈法之缺陷檢測演算法之情形時,處理圖像產生部61首先將二維圖像D分割成沿著Y方向之逐行之像素行之資料。其次,處理圖像產生部61係對各像素行之資料進行自Y方向一端(圖7A中之二維圖像D之上端)朝向另一端(圖7A中之二維圖像D之下端)探查邊緣之邊緣判定處理。 When the defect detection algorithm using the second edge distribution method is used, the processed image generation unit 61 first divides the two-dimensional image D into data of progressive pixel rows along the Y direction. Next, the processed image generating unit 61 detects the data of each pixel row from one end in the Y direction (the upper end of the two-dimensional image D in Fig. 7A) toward the other end (the lower end of the two-dimensional image D in Fig. 7A). Edge edge determination processing.

具體而言,處理圖像產生部61係針對各像素行之資料,將自Y方向一端側起第2個像素設為注目像素,並判定注目像素之亮度值是否 較相對於注目像素於一端側鄰接之鄰接像素之亮度值大特定之閾值以上。於判定注目像素之亮度值較鄰接像素之亮度值大特定之閾值以上之情形時,處理圖像產生部61判定鄰接像素為邊緣D3。於除此以外之情形時,處理圖像產生部61一面使注目像素朝向Y方向另一端以1像素為單位偏移,一面重複進行邊緣判定處理直至判定注目像素之亮度值較鄰接像素之亮度值大特定之閾值以上。 Specifically, the processed image generating unit 61 sets the second pixel from the one end side in the Y direction as the target pixel for each pixel row, and determines whether or not the luminance value of the pixel of interest is The luminance value of the adjacent pixel adjacent to the one end side with respect to the pixel of interest is larger than a threshold value. When it is determined that the luminance value of the pixel of interest is larger than the luminance value of the adjacent pixel by a certain threshold or more, the processed image generation unit 61 determines that the adjacent pixel is the edge D3. In other cases, the processed image generating unit 61 repeats the edge determination process while shifting the pixel of interest toward the other end in the Y direction by one pixel until the brightness value of the pixel of interest is determined to be higher than the brightness value of the adjacent pixel. Above a certain threshold.

於圖7A中,以「○」示出藉由利用處理圖像產生部61之邊緣判定處理而檢測出之邊緣D3之例。根據圖7A可知,於二維圖像D之明區域與暗區域之邊界部分,於存在缺陷之第2缺陷像素群D22中,邊緣D3之於Y方向上之座標值(Y座標值)極端地變化。 In FIG. 7A, an example in which the edge D3 detected by the edge determination processing by the processed image generating unit 61 is detected is indicated by "○". 7A, in the boundary portion between the bright region and the dark region of the two-dimensional image D, in the second defective pixel group D22 in which the defect exists, the coordinate value (Y coordinate value) of the edge D3 in the Y direction is extremely extreme. Variety.

作為利用此種特徵之提取二維圖像D中之缺陷像素之方法,有2種。於圖7B所示之第1種方法中,處理圖像產生部61作成與二維圖像D中之邊緣D3對應之邊緣分佈P6。再者,於圖7B中,放大表示與二維圖像D之第2缺陷像素群D22附近之邊緣D3對應之邊緣分佈P6。於圖7B所示之邊緣分佈P6中,與二維圖像D中之第2缺陷像素群D22對應地,Y座標值極端地變化。 There are two methods for extracting defective pixels in the two-dimensional image D by using such a feature. In the first method shown in FIG. 7B, the processed image generating portion 61 creates an edge distribution P6 corresponding to the edge D3 in the two-dimensional image D. Further, in FIG. 7B, the edge distribution P6 corresponding to the edge D3 in the vicinity of the second defective pixel group D22 of the two-dimensional image D is enlarged. In the edge distribution P6 shown in FIG. 7B, the Y coordinate value extremely changes in correspondence with the second defective pixel group D22 in the two-dimensional image D.

處理圖像產生部61係選擇作為所作成之邊緣分佈P6上之任意兩點之點P61及點P62,並算出由將點P61與點P62連結之直線與邊緣分佈P6之曲線所包圍之區域P63之面積作為特徵值。處理圖像產生部61根據邊緣分佈P6,提取與具有預先規定之閾值以上之特徵值(區域P63之面積)之分佈部分對應的二維圖像D中之像素作為缺陷像素。 The processed image generating unit 61 selects a point P61 and a point P62 which are arbitrary two points on the edge distribution P6 that has been created, and calculates a region P63 surrounded by a curve connecting the line connecting the point P61 and the point P62 with the edge distribution P6. The area is taken as the eigenvalue. The processed image generating unit 61 extracts, as a defective pixel, a pixel in the two-dimensional image D corresponding to the distribution portion having the feature value (area of the region P63) having a predetermined threshold value or more based on the edge distribution P6.

於圖7C所示之第2種方法中,處理圖像產生部61作成與二維圖像D中之邊緣D3對應之邊緣分佈P7。再者,於圖7C中,放大表示與二維圖像D之第2缺陷像素群D22附近之邊緣D3對應之邊緣分佈P7。於圖7C所示之邊緣分佈P7中,與二維圖像D中之第2缺陷像素群D22對應地,Y座標值極端地變化。 In the second method shown in FIG. 7C, the processed image generating unit 61 creates an edge distribution P7 corresponding to the edge D3 of the two-dimensional image D. In addition, in FIG. 7C, the edge distribution P7 corresponding to the edge D3 in the vicinity of the second defective pixel group D22 of the two-dimensional image D is enlarged. In the edge distribution P7 shown in FIG. 7C, the Y coordinate value extremely changes in correspondence with the second defective pixel group D22 in the two-dimensional image D.

處理圖像產生部61係選擇作為所作成之邊緣分佈P7上之任意兩點之點P71及點P72,並作成點P71處之邊緣分佈P7之切線P711、及點P72處之邊緣分佈P7之切線P721。其次,處理圖像產生部61算出與X軸平行之假想直線P73與切線P711所成之角度α1、及假想直線P73與切線P721所成之角度α2,並求出作為上述所算出之角度α1與角度α2之差的角度α3。繼而,處理圖像產生部61使用邊緣分佈P7中之點P71與點P72之間之弧P74的長度與角度α3,算出對於邊緣分佈P7中之點P71與點P72之間之弧P74的曲率半徑R作為特徵值。處理圖像產生部61根據邊緣分佈P7,提取與具有預先規定之閾值範圍內之特徵值(曲率半徑R)之分佈部分對應的二維圖像D中之像素作為缺陷像素。 The processed image generating unit 61 selects the point P71 and the point P72 which are any two points on the edge distribution P7 which is formed, and creates a tangent to the tangent P711 of the edge distribution P7 at the point P71 and the edge distribution P7 at the point P72. P721. Next, the processed image generating unit 61 calculates an angle α1 between the virtual straight line P73 parallel to the X-axis and the tangent line P711, and an angle α2 between the virtual straight line P73 and the tangent line P721, and obtains the calculated angle α1 as the above. The angle α3 of the difference of the angle α2. Then, the processed image generating portion 61 calculates the radius of curvature of the arc P74 between the point P71 and the point P72 in the edge distribution P7 using the length of the arc P74 between the point P71 and the point P72 in the edge distribution P7 and the angle α3. R is used as the eigenvalue. The processed image generating unit 61 extracts pixels in the two-dimensional image D corresponding to the distribution portion having the feature value (curvature radius R) within the predetermined threshold range as the defective pixel based on the edge distribution P7.

作為於片狀成形體2產生之缺陷,如上所述,可列舉氣泡、魚眼、異物、輪胎痕、凹痕、刮痕等點缺陷、因折痕等而產生之所謂之裂點(knick)、因厚度差異而產生之所謂之原片條紋等線缺陷。 As the defects generated in the sheet-like molded body 2, as described above, point defects such as bubbles, fish eyes, foreign matter, tire marks, dents, and scratches, and so-called knicks due to creases and the like are exemplified. A line defect such as a so-called original stripe which is caused by a difference in thickness.

可提取之缺陷之種類根據利用處理圖像產生部61產生處理圖像時所使用之缺陷檢測演算法之種類而有所不同。作為缺陷檢測演算法之一例之上述邊緣分佈法,能夠以較高之提取能力提取異物或輪胎痕、刮痕等缺陷。上述峰值法能夠以較高之提取能力提取異物、凹痕、刮痕等缺陷。上述平滑化法能夠以較高之提取能力提取氣泡、魚眼、凹痕等缺陷。上述第2邊緣分佈法能夠以較高之提取能力提取原片條紋或裂點等缺陷。 The type of the defect that can be extracted differs depending on the type of the defect detection algorithm used when the processed image generation unit 61 generates the processed image. As the edge distribution method which is an example of the defect detection algorithm, it is possible to extract defects such as foreign matter, tire marks, scratches, and the like with a high extraction ability. The above peak method can extract defects such as foreign matter, dents, scratches and the like with a high extraction ability. The above smoothing method can extract defects such as bubbles, fish eyes, and dents with a high extraction ability. The second edge distribution method described above can extract defects such as stripe or cracks of the original sheet with a high extraction capability.

利用如上所述之由缺陷檢測演算法之種類所導致之缺陷提取能力之差異,處理圖像產生部61藉由使用複數種缺陷檢測演算法之處理而算出特徵值。繼而,使用上述所算出之特徵值而提取二維圖像中之缺陷像素,藉此,可區分拍攝裝置5所產生之二維圖像中之缺陷區域之缺陷種類。 The processed image generating unit 61 calculates the feature value by using the processing of the plurality of defect detecting algorithms by using the difference in the defect extracting ability caused by the type of the defect detecting algorithm as described above. Then, the defective pixel in the two-dimensional image is extracted using the above-described calculated feature value, whereby the defect type of the defective region in the two-dimensional image generated by the imaging device 5 can be distinguished.

圖8A~8C係表示圖像處理裝置6所產生之處理圖像之一例之圖。 於本實施形態中,圖像處理裝置6之處理圖像產生部61係於利用上述缺陷檢測演算法對自拍攝裝置5輸出之二維圖像資料進行處理並提取缺陷像素後,產生如圖8A~8C所示之處理圖像。於圖8A~8C所示之例中,處理圖像產生部61係使用作為種類不同之2種缺陷檢測演算法之第1缺陷檢測演算法及第2缺陷檢測演算法,提取二維圖像中之缺陷像素,而產生處理圖像。此處,第1缺陷檢測演算法對拍攝裝置5所產生之二維圖像中之第1缺陷像素群具有較高之提取能力,但對第2缺陷像素群不具有提取能力。又,第2缺陷檢測演算法對拍攝裝置5所產生之二維圖像中之第2缺陷像素群具有較高之提取能力,但對第1缺陷像素群不具有提取能力。 8A to 8C are views showing an example of a processed image generated by the image processing device 6. In the present embodiment, the processed image generating unit 61 of the image processing device 6 processes the two-dimensional image data output from the imaging device 5 by the defect detecting algorithm, and extracts defective pixels, and then generates a defect as shown in FIG. 8A. The processed image shown in ~8C. In the example shown in FIGS. 8A to 8C, the processed image generating unit 61 extracts a two-dimensional image using the first defect detecting algorithm and the second defect detecting algorithm which are two kinds of defect detecting algorithms of different types. The defective pixel produces a processed image. Here, the first defect detection algorithm has a high extraction ability for the first defective pixel group in the two-dimensional image generated by the imaging device 5, but does not have the extraction capability for the second defective pixel group. Further, the second defect detection algorithm has a high extraction ability for the second defective pixel group in the two-dimensional image generated by the imaging device 5, but does not have the extraction capability for the first defective pixel group.

處理圖像產生部61係於利用第1缺陷檢測演算法及第2缺陷檢測演算法並列地處理自拍攝裝置5輸出之二維圖像資料,並提取特徵值為預先規定之閾值以上(於使用第2邊緣分佈法作為缺陷檢測演算法之情形時,「特徵值在預先規定之閾值範圍內」)之像素作為缺陷像素後,產生如圖8A所示之處理圖像E、及如圖8B所示之處理圖像F。 The processed image generating unit 61 processes the two-dimensional image data output from the imaging device 5 in parallel by the first defect detecting algorithm and the second defect detecting algorithm, and extracts the feature value to a predetermined threshold or more (for use). When the second edge distribution method is used as the defect detection algorithm, the pixel of the "feature value is within a predetermined threshold range" is used as the defective pixel, and the processed image E as shown in FIG. 8A is generated, and as shown in FIG. 8B. The image F is processed as shown.

圖8A所示之處理圖像E係利用第1缺陷檢測演算法進行處理而產生之處理圖像,且由如下灰階資訊儲存位元串構成,即,針對可藉由第1缺陷檢測演算法之處理而提取之第1缺陷像素群E21儲存有表示與特徵值對應之灰階值之灰階資訊,且針對除第1缺陷像素群E21以外之剩餘像素群E22儲存有表示零之灰階值之灰階資訊。此處,構成與由處理圖像產生部61所產生之處理圖像E對應之處理圖像資料的各像素之灰階資訊儲存位元串係位元數為「8」之位元串,且於8個各位元儲存「0」或「1」而可表示256灰階。例如,對灰階資訊儲存位元串儲存有「00000000」之像素之灰階值為「0(零)」,對灰階資訊儲存位元串儲存有「11111111」之像素之灰階值為「255」。 The processed image E shown in FIG. 8A is a processed image generated by processing by the first defect detecting algorithm, and is composed of the following grayscale information storage bit string, that is, the first defect detecting algorithm can be used The first defective pixel group E21 extracted by the processing stores grayscale information indicating a grayscale value corresponding to the feature value, and stores a grayscale value indicating zero for the remaining pixel group E22 other than the first defective pixel group E21. Grayscale information. Here, the gray-scale information storage bit string number of each pixel constituting the processed image data corresponding to the processed image E generated by the processed image generating unit 61 is a bit string of "8", and It can store 256 gray scales by storing "0" or "1" in 8 yuan. For example, the grayscale value of the pixel in which the "00000000" pixel is stored in the grayscale information storage bit string is "0 (zero)", and the grayscale value of the pixel in which the "11111111" pixel is stored in the grayscale information storage bit string is " 255".

又,圖8B所示之處理圖像F係利用第2缺陷檢測演算法進行處理 而產生之處理圖像,且由如下灰階資訊儲存位元串構成,即,針對可藉由第2缺陷檢測演算法之處理而提取之第2缺陷像素群F21儲存有表示與特徵值對應之灰階值之灰階資訊,且針對除第2缺陷像素群F21以外之剩餘像素群F22儲存有表示零之灰階值之灰階資訊。此處,構成與由處理圖像產生部61所產生之處理圖像F對應之處理圖像資料的各像素之灰階資訊儲存位元串係位元數為「8」之位元串,且於8個各位元儲存「0」或「1」而可表示256灰階。例如,對灰階資訊儲存位元串儲存有「00000000」之像素之灰階值為「0(零)」,對灰階資訊儲存位元串儲存有「11111111」之像素之灰階值為「255」。 Moreover, the processed image F shown in FIG. 8B is processed by the second defect detection algorithm. And the generated processed image is composed of a grayscale information storage bit string, that is, the second defective pixel group F21 extracted by the processing of the second defect detection algorithm stores the representation corresponding to the feature value. The gray scale information of the gray scale value, and the gray scale information indicating the gray scale value of zero is stored for the remaining pixel group F22 except the second defective pixel group F21. Here, the gray scale information storage bit string number of each pixel constituting the processed image data corresponding to the processed image F generated by the processed image generating unit 61 is a bit string of "8", and It can store 256 gray scales by storing "0" or "1" in 8 yuan. For example, the grayscale value of the pixel in which the "00000000" pixel is stored in the grayscale information storage bit string is "0 (zero)", and the grayscale value of the pixel in which the "11111111" pixel is stored in the grayscale information storage bit string is " 255".

處理圖像產生部61係將利用第1缺陷檢測演算法進行處理而產生之處理圖像E與利用第2缺陷檢測演算法進行處理而產生之處理圖像F合成,而產生如圖8C所示之處理圖像G。圖8C所示之處理圖像G係由基於處理圖像E之第1缺陷像素群G21、基於處理圖像F之第2缺陷像素群G22、與除第1缺陷像素群G21及第2缺陷像素群G22以外之剩餘像素群G23構成。 The processed image generating unit 61 combines the processed image E generated by the processing by the first defect detecting algorithm with the processed image F generated by the second defect detecting algorithm, and is generated as shown in FIG. 8C. Process image G. The processed image G shown in FIG. 8C is composed of the first defective pixel group G21 based on the processed image E, the second defective pixel group G22 based on the processed image F, and the first defective pixel group G21 and the second defective pixel. The remaining pixel group G23 other than the group G22 is configured.

於圖8C所示之例中,於由處理圖像產生部61所產生之處理圖像G中,於位於第1缺陷像素群G21之中央之像素之灰階資訊儲存位元串G31儲存有表示灰階值為「255」之「11111111」,於位於第2缺陷像素群G22之中央之像素之灰階資訊儲存位元串G32儲存有表示灰階值為「128」之「01111111」,且於剩餘像素群G23之各像素之灰階資訊儲存位元串G33儲存有表示灰階值為「0(零)」之「00000000」。 In the example shown in FIG. 8C, in the processed image G generated by the processed image generating unit 61, the grayscale information storage bit string G31 of the pixel located at the center of the first defective pixel group G21 is stored with a representation. "11111111" having a grayscale value of "255", and "01111111" indicating a grayscale value of "128" is stored in the grayscale information storage bit string G32 of the pixel located at the center of the second defective pixel group G22. The grayscale information storage bit string G33 of each pixel of the remaining pixel group G23 stores "00000000" indicating that the grayscale value is "0 (zero)".

於本實施形態中,處理圖像產生部61根據與圖8C所示之處理圖像G對應之處理圖像資料,獲取關於片狀成形體2中之缺陷之資訊即缺陷資訊。處理圖像產生部61獲取缺陷資訊時所使用之處理圖像G係將利用缺陷檢測能力不同之複數種(2種)缺陷檢測演算法進行處理而產生之處理圖像E與處理圖像F合成所產生者,因此,可使表示片狀 成形體2中之缺陷之種類之缺陷種類資訊包含於處理圖像產生部61根據與處理圖像G對應之處理圖像資料而獲取之缺陷資訊中。具體而言,處理圖像產生部61可根據儲存於構成處理圖像G之灰階資訊儲存位元串之灰階資訊是否為與藉由利用複數種缺陷檢測演算法中之任一種缺陷檢測演算法進行處理而算出之特徵值對應之灰階資訊,而獲取包含缺陷種類資訊之缺陷資訊。 In the present embodiment, the processed image generating unit 61 acquires defect information on the defect in the sheet-like formed body 2, that is, the defect information, based on the processed image data corresponding to the processed image G shown in FIG. 8C. The processed image G used by the processed image generating unit 61 to acquire the defect information is processed by processing the processed image E and the processed image F by processing a plurality of (two types) defect detecting algorithms having different defect detecting capabilities. Produced, therefore, can represent a sheet The defect type information of the type of the defect in the molded body 2 is included in the defect information acquired by the processed image generating unit 61 based on the processed image data corresponding to the processed image G. Specifically, the processed image generating unit 61 can detect whether the grayscale information stored in the grayscale information storage bit string constituting the processed image G is detected by using any of the plurality of defect detecting algorithms. The method performs the processing to calculate the gray scale information corresponding to the feature value, and obtains the defect information including the defect type information.

與自處理圖像產生部61輸出之處理圖像G對應之處理圖像資料係輸入至解析用圖像產生部62。圖9A及9B係表示圖像處理裝置6所產生之解析用圖像之一例之圖。 The processed image data corresponding to the processed image G output from the processed image generating unit 61 is input to the analysis image generating unit 62. 9A and 9B are views showing an example of an analysis image generated by the image processing device 6.

圖像處理裝置6之解析用圖像產生部62係對構成由處理圖像產生部61所產生之處理圖像G之第1缺陷像素群G21、第2缺陷像素群G22及剩餘像素群G23之各灰階資訊儲存位元串附加儲存有上述缺陷資訊之缺陷資訊儲存位元串,而產生如圖9A所示之解析用圖像H。解析用圖像H係由對上述灰階資訊儲存位元串附加上述缺陷資訊儲存位元串而成之解析用位元串構成。解析用圖像產生部62輸出與所產生之解析用圖像H對應之解析用圖像資料。 The analysis image generation unit 62 of the image processing device 6 pairs the first defective pixel group G21, the second defective pixel group G22, and the remaining pixel group G23 that constitute the processed image G generated by the processed image generating unit 61. Each gray scale information storage bit string is additionally attached with the defect information storage bit string storing the defect information, and an analysis image H as shown in FIG. 9A is generated. The analysis image H is composed of a parsing bit string obtained by adding the defect information storage bit string to the grayscale information storage bit string. The analysis image generation unit 62 outputs analysis image data corresponding to the generated analysis image H.

圖9A所示之解析用圖像H係由如下像素構成之圖像,即,自X方向一端(圖9A中之解析用圖像H之左端)朝向另一端(圖9A中之解析用圖像H之右端)按照0、1、2、…、W-2、W-1之順序定位之排列於X方向之W個像素、自Y方向一端(圖9A中之解析用圖像H之上端)朝向另一端(圖9A中之解析用圖像H之下端)按照0、1、2、…、H-2、H-1之順序定位之排列於Y方向之H個像素。 The analysis image H shown in FIG. 9A is an image composed of pixels from one end in the X direction (the left end of the analysis image H in FIG. 9A) toward the other end (the image for analysis in FIG. 9A). The right end of H is arranged in the order of 0, 1, 2, ..., W-2, and W-1, and W pixels arranged in the X direction and one end in the Y direction (the upper end of the analysis image H in Fig. 9A) To the other end (the lower end of the analysis image H in Fig. 9A), H pixels arranged in the Y direction are positioned in the order of 0, 1, 2, ..., H-2, and H-1.

於圖9A中,解析用圖像H具有自X方向一端起之位置(X座標值)為「8」且自Y方向一端起之位置(Y座標值)為「6」之像素成為最大亮度值的第1缺陷像素群H21、自X方向一端起之位置(X座標值)為「W-5」且自Y方向一端起之位置(Y座標值)為「3」之像素成為最大亮度值 的第2缺陷像素群H22、及除第1缺陷像素群H21及第2缺陷像素群H22以外之剩餘像素群H23。 In FIG. 9A, the analysis image H has a position from the one end in the X direction (the X coordinate value) is "8", and the pixel from the one end in the Y direction (the Y coordinate value) is "6" becomes the maximum brightness value. The first defective pixel group H21, the position from the one end in the X direction (the X coordinate value) is "W-5", and the pixel from the one end in the Y direction (the Y coordinate value) is "3" becomes the maximum brightness value. The second defective pixel group H22 and the remaining pixel group H23 other than the first defective pixel group H21 and the second defective pixel group H22.

於解析用圖像H中,第1缺陷像素群H21係與處理圖像產生部61所產生之處理圖像G中之第1缺陷像素群G21對應之像素群,第2缺陷像素群H22係與處理圖像產生部61所產生之處理圖像G中之第2缺陷像素群G22對應之像素群,剩餘像素群H23係與處理圖像產生部61所產生之處理圖像G中之剩餘像素群G23對應之像素群。 In the analysis image H, the first defective pixel group H21 is a pixel group corresponding to the first defective pixel group G21 in the processed image G generated by the processed image generating unit 61, and the second defective pixel group H22 is associated with The pixel group corresponding to the second defective pixel group G22 in the processed image G generated by the image generating unit 61 is processed, and the remaining pixel group H23 is the remaining pixel group in the processed image G generated by the processed image generating unit 61. The pixel group corresponding to G23.

如圖9B所示,於解析用圖像H中,第1缺陷像素群H21之各像素係由解析用位元串H31構成,該解析用位元串H31係對與處理圖像G之第1缺陷像素群G21之灰階資訊儲存位元串G31對應之灰階資訊儲存位元串H311附加儲存有缺陷資訊之缺陷資訊儲存位元串H312而成的位元串。解析用位元串H31之缺陷資訊儲存位元串H312係例如位元數為「2」之位元串,且於2個各位元儲存「0」或「1」而可表示缺陷種類資訊作為缺陷資訊。在圖9B所示之例中,於位於第1缺陷像素群H21之中央之像素之解析用位元串H31中,於灰階資訊儲存位元串H311儲存有表示灰階值為「255」之「11111111」,於缺陷資訊儲存位元串H312儲存有「01」,該「01」表示儲存於灰階資訊儲存位元串H311之灰階資訊為與藉由利用第1缺陷檢測演算法及第2缺陷檢測演算法中之第1缺陷檢測演算法之處理而算出之特徵值對應之灰階資訊。 As shown in FIG. 9B, in the analysis image H, each pixel of the first defective pixel group H21 is composed of the analysis bit string H31, and the analysis bit string H31 is the first pair of the processed image G. The gray-scale information storage bit string H311 corresponding to the gray-scale information storage bit string G31 of the defective pixel group G21 is additionally added with the defect information storage bit string H312 of the defect information. The defect information storage bit string H312 of the analysis bit string H31 is, for example, a bit string having a bit number of "2", and stores "0" or "1" in two bits to indicate defect type information as a defect. News. In the example shown in FIG. 9B, in the analysis bit string H31 of the pixel located at the center of the first defective pixel group H21, the grayscale information storage bit string H311 stores a grayscale value of "255". "11111111" stores "01" in the defect information storage bit string H312. The "01" indicates that the grayscale information stored in the grayscale information storage bit string H311 is used by using the first defect detection algorithm and the first 2 Gray-scale information corresponding to the feature value calculated by the processing of the first defect detection algorithm in the defect detection algorithm.

又,於解析用圖像H中,第2缺陷像素群H22之各像素係如圖9B所示,由解析用位元串H32構成,該解析用位元串H32係對與處理圖像G之第2缺陷像素群G22之灰階資訊儲存位元串G32對應之灰階資訊儲存位元串H321附加儲存有缺陷資訊之缺陷資訊儲存位元串H322而成的位元串。解析用位元串H32之缺陷資訊儲存位元串H322係例如位元數為「2」之位元串,且於2個各位元儲存「0」或「1」而可表示缺陷種類資訊作為缺陷資訊。在圖9B所示之例中,於位於第2缺陷像素 群H22之中央之像素之解析用位元串H32中,於灰階資訊儲存位元串H321儲存有表示灰階值為「128」之「01111111」,於缺陷資訊儲存位元串H322儲存有「10」,該「10」表示儲存於灰階資訊儲存位元串H321之灰階資訊為與藉由利用第1缺陷檢測演算法及第2缺陷檢測演算法中之第2缺陷檢測演算法之處理而算出之特徵值對應之灰階資訊。 Further, in the analysis image H, each pixel of the second defective pixel group H22 is composed of an analysis bit string H32 as shown in FIG. 9B, and the analysis bit string H32 is paired with the processed image G. The gray-scale information storage bit string H321 corresponding to the gray-scale information storage bit string G32 of the second defective pixel group G22 is added with a bit string formed by the defect information storage bit string H322 storing the defect information. The defect information storage bit string H322 of the analysis bit string H32 is, for example, a bit string having the number of bits of "2", and stores "0" or "1" in two bits to indicate defect type information as a defect. News. In the example shown in FIG. 9B, the second defective pixel is located In the analysis bit string H32 of the pixel of the group H22, "01111111" indicating that the grayscale value is "128" is stored in the grayscale information storage bit string H321, and the defect information storage bit string H322 is stored. 10", the "10" indicates that the grayscale information stored in the grayscale information storage bit string H321 is processed by using the second defect detection algorithm in the first defect detection algorithm and the second defect detection algorithm. And the calculated grayscale information corresponding to the feature value.

又,於解析用圖像H中,剩餘像素群H23之各像素係如圖9B所示,由解析用位元串H33構成,該解析用位元串H33係對與處理圖像G之剩餘像素群G23之灰階資訊儲存位元串G33對應之灰階資訊儲存位元串H331附加儲存有缺陷資訊之缺陷資訊儲存位元串H332而成的位元串。解析用位元串H33之缺陷資訊儲存位元串H332係例如位元數為「2」之位元串,且於2個各位元儲存「0」或「1」而可表示缺陷種類資訊作為缺陷資訊。在圖9B所示之例中,於剩餘像素群H23之各像素之解析用位元串H33中,於灰階資訊儲存位元串H331儲存有表示灰階值為「0(零)」之「00000000」,於缺陷資訊儲存位元串H332儲存有「00」,該「00」表示儲存於灰階資訊儲存位元串H331之灰階資訊於第1缺陷檢測演算法及第2缺陷檢測演算法中之任一缺陷檢測演算法中均未算出預先規定之閾值以上之特徵值而「並非缺陷」。 Further, in the analysis image H, each pixel of the remaining pixel group H23 is composed of an analysis bit string H33 as shown in FIG. 9B, and the analysis bit string H33 is paired with the remaining pixels of the processed image G. The gray-scale information storage bit string H331 corresponding to the gray-scale information storage bit string G33 of the group G23 is additionally added with the defect information storage bit string H332 of the defect information. The defect information storage bit string H332 of the analysis bit string H33 is, for example, a bit string having the number of bits of "2", and stores "0" or "1" in two bits to indicate defect type information as a defect. News. In the example shown in FIG. 9B, in the analysis bit string H33 of each pixel of the remaining pixel group H23, the grayscale information storage bit string H331 stores the grayscale value "0 (zero)". "00000000", stored in the defect information storage bit string H332 with "00", the "00" indicating the grayscale information stored in the grayscale information storage bit string H331 in the first defect detection algorithm and the second defect detection algorithm In any of the defect detection algorithms, the feature value of the predetermined threshold or more is not calculated and is "not defective."

於以上說明中,示出了構成解析用圖像H之解析用位元串H31、H32、H33中之缺陷資訊儲存位元串H312、H322、H332中儲存有缺陷種類資訊作為缺陷資訊之例,但並不限定於此種構成。 In the above description, the defect information storage bit string H312, H322, and H332 in the analysis bit strings H31, H32, and H33 constituting the analysis image H are stored with the defect type information as the defect information. However, it is not limited to such a configuration.

作為儲存於缺陷資訊儲存位元串之缺陷資訊之除缺陷種類資訊以外之例,可列舉片狀成形體2中之缺陷之位置資訊等。例如,於儲存缺陷之位置資訊作為缺陷資訊之情形時,只要於缺陷資訊儲存位元串H312、H322、H332儲存各個像素之X、Y座標值即可。 Examples of the defect information stored in the defect information storage bit string other than the defect type information include position information of the defect in the sheet-shaped molded body 2 and the like. For example, when the location information of the defect is stored as the defect information, the X and Y coordinate values of the respective pixels may be stored in the defect information storage bit string H312, H322, and H332.

與自解析用圖像產生部62輸出之解析用圖像H對應之解析用圖像 資料係輸入至圖像解析裝置7。 Analysis image corresponding to the analysis image H output from the analysis image generating unit 62 The data is input to the image analysis device 7.

返回至圖2繼續說明。配備於本實施形態之缺陷檢查裝置100之圖像解析裝置7使用儲存於構成自圖像產生裝置1中之圖像處理裝置6之解析用圖像產生部62輸出之解析用圖像資料的解析用位元串H31、H32、H33之各位元之資訊,進行預先規定之圖像解析,藉此,檢測片狀成形體2之缺陷。圖像解析裝置7包括解析用圖像輸入部71、圖像解析部72、控制部73、及顯示部74。解析用圖像輸入部71輸入自圖像處理裝置6之解析用圖像產生部62輸出之解析用圖像資料。 Returning to Figure 2, the description continues. The image analysis device 7 provided in the defect inspection device 100 of the present embodiment analyzes the analysis image data output from the analysis image generation unit 62 of the image processing device 6 configured from the image generation device 1 The predetermined image analysis is performed using the information of the bit elements of the bit strings H31, H32, and H33, thereby detecting the defects of the sheet-like molded body 2. The image analysis device 7 includes an analysis image input unit 71, an image analysis unit 72, a control unit 73, and a display unit 74. The analysis image input unit 71 inputs the analysis image data output from the analysis image generation unit 62 of the image processing device 6.

圖像解析部72係對自解析用圖像輸入部71輸入之解析用圖像資料中的儲存於解析用位元串H31、H32、H33之各位元之資訊進行解析,產生與缺陷相關之缺陷位置資訊、缺陷亮度資訊、及缺陷種類資訊等,並將該等資訊輸出至控制部73。 The image analysis unit 72 analyzes the information stored in the analysis bit strings H31, H32, and H33 in the analysis image data input from the analysis image input unit 71 to generate a defect related to the defect. The position information, the defect brightness information, the defect type information, and the like are output to the control unit 73.

例如,圖像解析部72將解析用圖像H中之缺陷像素之座標轉換為片狀成形體2上之位置,產生表示片狀成形體2中之缺陷之位置之缺陷位置資訊,並將該產生之缺陷位置資訊輸出至控制部73。 For example, the image analysis unit 72 converts the coordinates of the defective pixels in the analysis image H into positions on the sheet-like formed body 2, and generates defect position information indicating the position of the defect in the sheet-like formed body 2, and The generated defect position information is output to the control unit 73.

又,圖像解析部72係將解析用圖像H中之缺陷之灰階資訊之分佈轉換為片狀成形體2上之缺陷之亮度分佈,產生表示片狀成形體2中之缺陷之亮度分佈之缺陷亮度資訊,並將該產生之缺陷亮度資訊輸出至控制部73。 Further, the image analysis unit 72 converts the distribution of the gray scale information of the defect in the analysis image H into the luminance distribution of the defect on the sheet-like formed body 2, and generates a luminance distribution indicating the defect in the sheet-like formed body 2. The defect brightness information is output to the control unit 73.

又,圖像解析部72將解析用圖像H中之每種缺陷之分佈轉換為片狀成形體2上之每種缺陷之分佈,產生表示片狀成形體2中之每種缺陷之分佈之缺陷種類資訊,並將該產生之缺陷種類資訊輸出至控制部73。 Further, the image analyzing unit 72 converts the distribution of each defect in the analysis image H into the distribution of each defect on the sheet-like formed body 2, and produces a distribution indicating each of the defects in the sheet-like formed body 2. The defect type information is output to the control unit 73.

控制部73根據自圖像解析部72輸出之與缺陷相關之資訊而作成表示片狀成形體2中之缺陷資訊之缺陷圖,並且總括地控制解析用圖像輸入部71、圖像解析部72及顯示部74。由控制部73所作成之缺陷圖 係顯示於顯示部74。 The control unit 73 creates a defect map indicating the defect information in the sheet-like molded body 2 based on the information related to the defect output from the image analysis unit 72, and collectively controls the analysis image input unit 71 and the image analysis unit 72. And a display unit 74. Defect map made by the control unit 73 It is displayed on the display unit 74.

[產業上之可利用性] [Industrial availability]

於如上述般構成之本實施形態之缺陷檢查裝置100中,由於根據由拍攝裝置5拍攝到之片狀成形體2之二維圖像資料而進行片狀成形體2之缺陷檢測,故而與例如根據利用線感測器所獲得之一維圖像資料進行缺陷檢測之情形相比,可維持較高之缺陷檢測能力。 In the defect inspection apparatus 100 of the present embodiment configured as described above, the defect detection of the sheet-like molded body 2 is performed based on the two-dimensional image data of the sheet-like molded body 2 imaged by the imaging device 5, and thus, for example, A higher defect detection capability can be maintained as compared with the case of performing defect detection using one-dimensional image data obtained by the line sensor.

進而,於本實施形態之缺陷檢查裝置100中,將自拍攝裝置5輸出之資訊量較多之二維圖像資料轉換為利用灰階資訊儲存位元串構成各像素之處理圖像資料,進而轉換為利用對灰階資訊儲存位元串附加缺陷資訊儲存位元串而成之解析用位元串構成各像素之解析用圖像資料。由於圖像解析裝置7根據以此方式自二維圖像資料轉換來之利用解析用位元串構成各像素之解析用圖像資料進行圖像解析而檢測片狀成形體2之缺陷,故而可謀求利用圖像解析裝置7之圖像解析之高速化,而可提高檢查效率。 Further, in the defect inspection apparatus 100 of the present embodiment, the two-dimensional image data having a large amount of information output from the image pickup device 5 is converted into processed image data constituting each pixel by the gray scale information storage bit string, and further The image data for parsing of each pixel is converted into a parsing bit string formed by adding a defect information storage bit string to the grayscale information storage bit string. The image analysis device 7 detects the defect of the sheet-shaped molded body 2 by performing image analysis using the analysis image data of each pixel by the analysis bit string converted from the two-dimensional image data in this manner, and thus can detect the defect of the sheet-shaped molded body 2 The image analysis device 7 is required to increase the speed of image analysis, and the inspection efficiency can be improved.

Claims (5)

一種圖像產生裝置,其產生用以檢查片狀成形體之缺陷之圖像資料,且包括:搬送部,其將片狀成形體沿該片狀成形體之長度方向搬送;光照射部,其包含沿片狀成形體之與長度方向垂直之寬度方向呈直線狀延伸之光源,並藉由該光源對片狀成形體照射光;拍攝部,其對由上述搬送部搬送中之片狀成形體進行拍攝動作,而產生表示二維圖像之二維圖像資料;特徵值計算部,其藉由1種或複數種演算法處理,基於各像素之亮度值而算出構成上述二維圖像資料之各像素之特徵值;處理圖像資料產生部,其將構成上述二維圖像資料之各像素區分為上述特徵值為預先規定之閾值以上之缺陷像素、及上述特徵值未達上述閾值之剩餘像素,並產生處理圖像資料,該處理圖像資料包含針對上述缺陷像素而儲存有表示與上述特徵值對應之灰階值之灰階資訊的灰階資訊儲存位元串,且包含針對上述剩餘像素而儲存有表示零之灰階值之灰階資訊的灰階資訊儲存位元串;缺陷資訊獲取部,其根據上述處理圖像資料,對每一像素獲取關於片狀成形體中之缺陷之缺陷資訊,並產生儲存有上述所獲取之缺陷資訊之缺陷資訊儲存位元串;及解析用圖像資料產生部,其對每一像素產生解析用圖像資料,該解析用圖像資料包含對上述處理圖像資料之上述灰階資訊儲存位元串附加上述缺陷資訊儲存位元串所獲得之解析用位元串。 An image generating device that generates image data for inspecting a defect of a sheet-shaped formed body, and includes: a conveying portion that conveys the sheet-shaped formed body along a longitudinal direction of the sheet-shaped formed body; and a light-irradiating portion a light source that linearly extends in a width direction perpendicular to the longitudinal direction of the sheet-like formed body, and the sheet-shaped molded body is irradiated with light by the light source, and the image forming unit faces the sheet-shaped formed body conveyed by the transport unit. Performing a photographing operation to generate two-dimensional image data representing a two-dimensional image; the feature value calculating unit is configured to calculate the two-dimensional image data based on the luminance values of the pixels by one or a plurality of algorithms a feature value of each pixel; a processed image data generating unit that divides each pixel constituting the two-dimensional image data into a defective pixel whose feature value is equal to or greater than a predetermined threshold value, and the feature value does not reach the threshold value Remaining pixels, and generating processed image data, the processed image data comprising grayscale information storing grayscale information indicating grayscale values corresponding to the feature values for the defective pixels And storing a bit string, and storing a grayscale information storage bit string storing grayscale information indicating a grayscale value of zero for the remaining pixels; and a defect information acquiring unit, for each pixel according to the processed image data Obtaining defect information about a defect in the sheet-shaped formed body, and generating a defect information storage bit string storing the defect information obtained as described above; and an image data generating unit for analyzing, which generates an image for analysis for each pixel And the analysis image data includes a parsing bit string obtained by adding the defect information storage bit string to the grayscale information storage bit string of the processed image data. 如請求項1之圖像產生裝置,其中 上述缺陷資訊包含表示片狀成形體中之缺陷之種類之缺陷種類資訊。 An image generating apparatus according to claim 1, wherein The defect information includes defect type information indicating the kind of the defect in the sheet-shaped formed body. 如請求項2之圖像產生裝置,其中上述特徵值計算部係藉由複數種演算法處理而算出上述特徵值,上述缺陷資訊獲取部根據每一像素之上述灰階資訊儲存位元串之灰階資訊是否為與藉由上述複數種演算法處理中之任一種演算法處理而算出之特徵值對應之灰階資訊,而獲取包含上述缺陷種類資訊之上述缺陷資訊。 The image generating device of claim 2, wherein the feature value calculating unit calculates the feature value by processing a plurality of algorithms, and the defect information acquiring unit stores the bit string according to the gray level information of each pixel. Whether the order information is the gray level information corresponding to the feature value calculated by the processing of any one of the above plurality of algorithm processes, and obtaining the defect information including the defect type information. 一種缺陷檢查裝置,其包括:如請求項1至3中任一項之圖像產生裝置;及圖像解析裝置,其使用儲存於構成由上述圖像產生裝置之解析用圖像資料產生部所產生之解析用圖像資料的解析用位元串之資訊,進行預先規定之圖像解析,藉此檢測片狀成形體之缺陷。 A defect inspection device comprising: the image generation device according to any one of claims 1 to 3; and an image analysis device stored in the image data generation unit configured by the image generation device The information of the analysis target image data is analyzed by using the information of the bit string, and predetermined image analysis is performed to detect the defect of the sheet-shaped molded body. 一種缺陷檢查方法,其用以檢查片狀成形體之缺陷,且包括如下步驟:搬送步驟,其將片狀成形體沿該片狀成形體之長度方向搬送;光照射步驟,其藉由沿片狀成形體之與長度方向垂直之寬度方向呈直線狀延伸之光源,對所搬送之上述片狀成形體照射光;拍攝步驟,其對搬送中之上述片狀成形體進行拍攝動作而產生表示二維圖像之二維圖像資料;特徵值計算步驟,其藉由1種或複數種演算法處理,基於各像素之亮度值而算出構成上述二維圖像資料之各像素之特徵值; 處理圖像資料產生步驟,其將構成上述二維圖像資料之各像素區分為上述特徵值為預先規定之閾值以上之缺陷像素、及上述特徵值未達上述閾值之剩餘像素,並產生處理圖像資料,該處理圖像資料包含針對上述缺陷像素而儲存有表示與上述特徵值對應之灰階值之灰階資訊的灰階資訊儲存位元串,且包含針對上述剩餘像素而儲存有表示零之灰階值之灰階資訊的灰階資訊儲存位元串;缺陷資訊獲取步驟,其根據上述處理圖像資料,對每一像素獲取關於片狀成形體中之缺陷之缺陷資訊,並產生儲存有上述所獲取之缺陷資訊之缺陷資訊儲存位元串;解析用圖像資料產生步驟,其對每一像素產生解析用圖像資料,該解析用圖像資料包含對上述處理圖像資料之上述灰階資訊儲存位元串附加上述缺陷資訊儲存位元串所獲得之解析用位元串;及圖像解析步驟,其使用儲存於構成上述解析用圖像資料之上述解析用位元串之資訊,進行預先規定之圖像解析,藉此檢測片狀成形體之缺陷。 A defect inspection method for inspecting a defect of a sheet-shaped formed body, comprising the steps of: carrying a step of conveying a sheet-shaped formed body along a length direction of the sheet-shaped formed body; and a step of irradiating light by means of a sheet a light source extending linearly in a width direction perpendicular to the longitudinal direction, and irradiating the sheet-shaped molded body to be conveyed with light; and an imaging step of causing the sheet-shaped molded body during conveyance to perform an image capturing operation a two-dimensional image data of a dimensional image; a feature value calculation step of processing, by one or more kinds of algorithms, calculating a feature value of each pixel constituting the two-dimensional image data based on a luminance value of each pixel; a processing image data generating step of dividing each pixel constituting the two-dimensional image data into a defective pixel having the feature value equal to or greater than a predetermined threshold value, and remaining pixels having the feature value not reaching the threshold value, and generating a processing map The image data includes a grayscale information storage bit string storing grayscale information indicating a grayscale value corresponding to the feature value for the defective pixel, and storing the representation zero for the remaining pixels Gray scale information storage bit string of gray scale information of gray scale value; defect information obtaining step, which acquires defect information about defects in the sheet shaped body for each pixel according to the processed image data, and generates and stores a defect information storage bit string having the defect information obtained above; a parsing image data generating step of generating parsing image data for each pixel, wherein the parsing image data includes the above-mentioned processed image data a grayscale information storage bit string to which the parsing bit string obtained by adding the defect information storage bit string is added; and an image parsing step, which enables Configuration is stored in the analyzing the image data by the analyzing only the information bits string, the predetermined image analysis, thereby detecting defects in the sheet-like molded into the.
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