TWI601901B - A prismatic valve heater, and a prismatic valve with the heater - Google Patents

Description

a heater for a prismatic valve, and a cylindrical valve having the heater Field of invention

The present invention relates to a valve for a body having a prismatic column, a heater mounted to a side of the body, and a prismatic valve having the heater.

Background of the invention

Heretofore, there is a valve as described below: in the body of the quadrangular prism valve, a thin heater having flexibility is attached to three sides of the four sides except for one surface on which the gas flow path is formed (for example) Refer to Patent Document 1). In the valve described in Patent Document 1, the heater is mounted. The heat-insulating member of the glyph (groove) is attached to the heat-insulating member. The mounting plate of the glyph. Further, the mounting plate is fixed to the body of the valve by eight screws.

According to the above configuration, since the heater can be closely attached to the body of the valve, the heat generated by the heater can be efficiently transmitted to the body of the valve. Also, by making the mounting board " The shape of the zigzag can reduce the number of screws used compared to the configuration in which the rectangular mounting plates are attached to the respective side faces of the main body.

Prior technical literature Patent literature

Patent Document 1 Japanese Patent No. 5048717

Summary of invention

However, in the valve described in Patent Document 1, although the number of screws to be used can be reduced, it is necessary to separately attach the heater, the heat insulating member, and the mounting plate to the body of the valve, and it is necessary to install a large number of screws. Procedures. In addition, since a plurality of screws are used in the mounting of the mounting plate, there is a loss of the screw.

The present invention has been made in view of the above circumstances, and its main object is to provide a heater for a prismatic valve which can ensure the adhesion of a heater to a body of a prismatic valve and can be easily mounted, and has the same Corner cylinder valve for the heater.

In order to solve the above problems, the present invention employs the following means.

The first means is a heater for a prismatic valve, which is a valve that is formed on a side surface of the body with respect to a valve having a prismatic body and a flow path formed by a predetermined one of the side faces of the body. A heater having a strip shape having a length covering a full side surface of the side surface of the main body except for the predetermined one surface; and a plate member attached to each of the heater portions and the respective sides of the main body Corresponding positions; strip-shaped winding portions respectively mounted at predetermined positions of both end portions of the plate-like member in the width direction of the heater portion, and on the side of the body In a state in which the heater portion is wound around the plate-like member, the surface of the plate-shaped member may be wound around the side surface of the main body by one or more times, and the engaging portion may be provided in each of the aforementioned The winding portion is engaged to fix the winding portion that is wound one or more times around the side surface of the main body from the outer side of the plate-shaped member.

According to the above configuration, the valve has a body having a columnar shape, and a predetermined flow path is formed on one side of the side surface of the body. The heater is provided with a strip-shaped heater portion having a length covering the entire side of the side surface of the body except for a predetermined one surface, so that the heater can be mounted on the side of the body by heating The device portion heats the side surface other than the predetermined one side.

Here, in the heater portion, a plate-like member is attached to each of the positions corresponding to the respective side faces of the valve body. Further, a strip-shaped winding portion is attached to each of the predetermined portions of the both end portions of the plate-like member in the width direction of the heater portion (the direction perpendicular to the longitudinal direction). In the state in which the winding portion is wound around the side surface of the valve body with the plate member as the outer side, the winding portion can be wound one or more times around the side of the main body from the outer side of the plate member. Therefore, the respective plate-shaped members are hooped from the outside by the winding portion, whereby the heater portion can be pressed against the respective side faces of the main body through the respective plate-like members. Further, since the winding portion hoops both end portions of the plate-like member in the width direction of the heater portion, it is possible to suppress the force of pressing the heater portion against the respective side faces of the main body.

Further, an engagement portion is provided in each of the winding portions, and the engagement portion can be engaged to fix the winding portion wound one or more times around the side surface of the body from the outer side of the plate member. Therefore, by engaging the engaging portions, each of the hooks can be hooped from the outside. The winding portion of the plate member is fixed. As a result, the adhesion of the heater portion to the body of the angular cylindrical valve can be ensured, and the heater can be easily mounted.

In the second aspect, the plate-shaped member is composed of a heat insulating member.

According to the above configuration, since the plate-shaped member is constituted by the heat insulating member, the heat insulating member that suppresses the heat transfer from the heater portion to the outside can be used as a plate shape that presses the heater portion against the side surface of the valve body. member. As a result, the number of components of the heater can be reduced.

When the strip-shaped heater portion is wound around the side surface of the corner columnar body in the valve, a gap is easily formed between the side surface and the heater portion in the corner portion of the body.

In this regard, the third means adopts a configuration in which an aperture extending in the width direction of the heater portion is formed at an angular position corresponding to a corner portion of the main body in the heater portion. Therefore, it is possible to simulate the corner portion of the main body by the hole formed in the heater portion, thereby suppressing the occurrence of a gap between the side surface and the heater portion at the corner portion of the main body. Therefore, the adhesion of the heater portion to the body of the angular cylindrical valve can be improved.

In the fourth aspect, the heater portion has a heating wire extending in a line shape, and the heating wire passes through a portion where the hole is not formed in the angular position of the heater portion in a longitudinal direction of the heater portion.

According to the above configuration, since the heater portion has the electric heating wire extending in a line shape, the heater body can be uniformly heated by the heater portion by disposing the heating wire in the entire heater portion. Here, when the angular position corresponding to the corner portion of the body in the heater portion is formed, the heating is formed. When the hole of the device portion extends in the width direction, there is a possibility that the hot wire cannot be pulled between the portions corresponding to the respective side faces of the body.

In this regard, according to the above configuration, the heating wire is a portion where the hole is not formed in the angular position of the heater portion in the longitudinal direction of the heater portion. Therefore, in the heater portion, even when a hole is formed at the angular position, the heat line can be pulled between the portions corresponding to the respective side faces of the body. As a result, the heating wire can be disposed in the entirety of the heater unit.

In the fifth aspect, the cover member sandwiches the plate-like member together with the heater portion, and the cover member is formed adjacent to each other at positions corresponding to the plate-like members adjacent to each other. The aforementioned plate-like members are spaced apart by a long and bendable curved portion.

According to the above configuration, since the heater has the cover member sandwiching the plate member together with the heater portion, the plate member or the heater portion can be protected by the cover member. Here, in a state in which the heater portion is wound around the side surface of the valve body with the plate member as the outer side, the cover member is located on the outer peripheral side of the plate member. Therefore, at the corner of the body of the valve, the cover member must be lengthened in accordance with the thickness of the plate member.

In this regard, according to the above configuration, the cover member has a curved portion which is formed to be longer and more bendable than the interval between the plate-like members adjacent to each other at positions corresponding to the plate-like members adjacent to each other. Therefore, the length of the position of the cover corresponding to the corner portion of the body of the valve can be adjusted by the curved portion, and the occurrence of insufficient length of the cover can be suppressed.

In the sixth aspect, the winding portion is integrally formed with the cover.

According to the above configuration, since the winding portion and the cover are integrally formed, the winding portion and the cover member can be simultaneously formed from the same material. Further, it is not necessary to overlap the winding portion and the cover member to be fixed to each other. As a result, the manufacture of the winding portion and the cover can be facilitated.

In the seventh aspect, the engaging portion has a first engaging member, a portion that is attached to the winding portion and extends from the cover to be located beside the cover, and a second engaging member that is attached to the roll. The winding portion is wound one or more times around the side surface of the main body from the outer side of the plate-like member to a position corresponding to the first engaging member.

According to the above configuration, in the winding portion, the first engaging member is attached to the portion which is extended from the cover and is located beside the cover. In the winding portion, the second engaging member is attached to a position corresponding to the first engaging member about one side or more around the side of the main body from the outer side of the plate member. Therefore, in the configuration in which the first engagement portion and the second engagement portion can be engaged, the length of the winding portion can be minimized.

In the eighth aspect, the engaging portion is a fastener, and the first sheet and the second sheet are attached to the opposite surfaces of the winding portion.

According to the above configuration, the first sheet and the second sheet of the fastener are attached to the opposite surfaces of the winding portion. Further, by the fastening member, the winding portion that is wound one or more times around the side of the main body of the plate member can be fixed. Here, since the engagement position (engagement amount) of the first sheet and the second sheet can be adjusted in the fastener, the force by which the plate-shaped member is caught by the winding portion can be adjusted. Therefore, by adjusting the first sheet of the fastener and the second The position of the sheet is adjusted to adjust the heat transferred from the heater portion to the body of the valve.

The ninth means is characterized in that the valve is provided with a heater having any one of the first to eighth means, and has a body of a prismatic shape, and a predetermined one of the side faces of the body is formed with a fluid flow path. And the heater is mounted on the side of the body.

According to the above configuration, the angular column valve to which the heater is attached can achieve the same operational effects as those of the first to eighth means.

Specifically, in the tenth means, the angular column valve may be configured by a vacuum valve or the like that opens and closes the gas exhaust passage.

10‧‧‧ four-corner cylindrical valve (valve)

11‧‧‧Ontology

11a‧‧‧ side (one side scheduled)

11b‧‧‧ side

11c‧‧‧ side

11d‧‧‧ side

11e‧‧‧ below

11f‧‧‧above

13‧‧‧1st flow path (flow path)

15‧‧‧2nd flow path (flow path)

17‧‧‧Valve mechanism

19‧‧‧Actuator

20‧‧‧heater

21‧‧‧Hotware Department

22‧‧‧Electric heating line

23‧‧‧Wire

24‧‧‧Insulating components

24b‧‧‧Area

24c‧‧‧Area

24d‧‧‧Area

25‧‧‧ thermocouple

27‧‧‧Temperature fuse

31b‧‧‧Insulation member (plate member)

31c‧‧‧Insulation members (plate members)

31d‧‧‧Insulation member (plate member)

41‧‧‧Winding Department

45‧‧‧Winding Department

51‧‧‧Adhesive parts (engagement members)

51a‧‧‧1st sheet (1st engaging member)

51b‧‧‧Second sheet (2nd engaging member)

55‧‧‧Gear fasteners (engagement members)

55a‧‧‧1st sheet (1st engaging member)

55b‧‧‧Second sheet (2nd engaging member)

61‧‧‧ Covers

61a‧‧‧Bend section

141‧‧‧Winding Department

142‧‧‧ hole

143‧‧ ‧ gap

C‧‧‧ angular position

G‧‧‧ interval

H‧‧‧ hole

Figure 1 is a front elevational view showing the front side of a quadrangular cylindrical valve.

Figure 2 is a side elevational view showing the side of a quadrangular cylindrical valve.

Fig. 3 is a front elevational view showing a state in which a heater has been attached to the above-described square cylindrical valve.

Fig. 4 is a side view showing a state in which a heater has been attached to the above-described square cylindrical valve.

Fig. 5 is a plan view showing a state in which a heater has been attached to the above-described square cylindrical valve.

Fig. 6 is a front elevational view showing the inner surface of the heater.

Fig. 7 is a bottom view showing the lower surface of the above heater.

Fig. 8 is a front elevational view showing a modified example of the winding portion.

Fig. 9 is a front elevational view showing another modification of the winding portion.

Form for implementing the invention

Hereinafter, an embodiment will be described with reference to the drawings. In the semiconductor manufacturing apparatus or the like, the present embodiment is a heater that is attached to a vacuum valve that opens and closes an exhaust passage of a gas.

First, an outline of a vacuum valve to which a heater is attached will be described. Here, a four-corner cylindrical valve having a quadrangular columnar body is used as a vacuum valve. As shown in FIGS. 1 and 2, the square cylindrical valve 10 (corner cylindrical valve) is provided with a main body 11, a valve mechanism 17, and an actuator 19.

The body 11 is formed of aluminum or stainless steel or the like and has a quadrangular prism shape. Among the four side faces 11a, 11b, 11c, and 11d of the main body 11, a first flow path 13 as a gas flow path is formed on the side surface 11a (predetermined one surface). Further, a second flow path 15 as a gas flow path is formed on the lower surface 11e (lower bottom surface) of the main body 11. The flow paths 13 and 15 are formed at the center of the side surface 11a and the lower surface 11e, respectively. The flow paths 13 and 15 are formed in a cylindrical shape and extend in a direction perpendicular to the side surface 11a and the lower surface 11e, respectively. Further, a vacuum pump or the like is connected to the first flow path 13 or the second flow path 15. Further, the flow paths 13 and 15 are not limited to a cylindrical shape, and may be tubular shapes of other shapes such as a quadrangular cylindrical shape.

Inside the body 11, a valve mechanism 17 having a valve body or the like is disposed. The above-described actuator 19 is attached to the upper surface 11f of the body 11. The actuator 19 is controlled by a working fluid. The valve mechanism 17 is driven by the actuator 19 to move and block the first flow path 13 and the second flow path 15 by moving the valve body. Further, the actuator 19 may be provided with an electric motor or the like and controlled by the supplied electric power.

Next, an outline of a state in which the heater 20 has been attached to the square cylindrical valve 10 will be described with reference to Figs. Figures 3~5 show the heaters 20 is a front view, a side view, and a top view of the state in which the square cylindrical valve 10 is attached.

As shown in the figures, the heater 20 is attached to the side faces 11a-11d of the body 11 of the quadrangular cylindrical valve 10. The heater 20 includes a belt-shaped heater portion 21, plate-shaped heat insulating members 31b, 31c, and 31d, strip-shaped winding portions 41 and 45, and fastening members 51 and 55. The heater portion 21 has a length that can cover the side faces 11b to 11d (all but one of the predetermined one faces) of the side faces 11a to 11d of the body 11. The heat insulating members 31b, 31c, and 31d (plate-shaped members) are respectively attached to the heater portions 21 at positions corresponding to the respective side faces 11b, 11c, and 11d of the body 11. The winding portions 41 and 45 are respectively attached to predetermined portions of both end portions of the heat insulating member 31d in the width direction of the heater portion 21.

The heater portion 21 is wound around the side faces 11b to 11d of the main body 11 with the heat insulating members 31b to 31d being outside. The winding portions 41 and 45 are wound one or more rounds around the side faces 11a to 11d of the main body 11 from the outside of the heat insulating members 31b to 31d. Further, the winding portion 41 is fixed by the fastening member 51 (engagement portion) attached to both ends of the winding portion 41 in the longitudinal direction. Moreover, the winding portion 45 is fixed by the fastening member 55 (engagement portion) attached to both ends of the winding portion 45 in the longitudinal direction.

Next, the heater 20 will be described in detail with reference to Figs. 6 is a front view showing the inner surface of the heater 20, and FIG. 7 is a bottom view showing the lower surface of the heater 20.

As described above, the heater 20 includes the heater portion 21, the heat insulating members 31b, 31c, and 31d, the winding portions 41 and 45, and the fastening members 51 and 55. Further, the heater 20 is further provided with a thermocouple 25, a temperature fuse 27, and a cover 61.

The heater unit 21 has a heating wire 22, a wire 23, and an insulating member 24. The insulating member 24 is formed of a material excellent in insulation properties and heat resistance such as ruthenium rubber, and is formed into a rectangular film shape (band shape). The insulating member 24 has regions 24b, 24c, and 24d corresponding to the respective side faces 11b, 11c, and 11d of the body 11 of the quadrangular cylindrical valve 10, respectively. That is, each of the regions 24b, 24c, and 24d is formed in a shape equal to each of the side faces 11b, 11c, and 11d of the body 11.

The heating wire 22 is sandwiched by a pair of insulating members 24 and fixed to the insulating member 24. That is, the heating wire 22 is insulated by the insulating member 24. The heating wire 22 is formed of an alloy or a metal such as a nichrome wire and extends in a curved shape (linear shape). The heating wires 22 are snaked in the respective regions 24b, 24c, and 24d of the insulating member 24, and are disposed so as to be substantially evenly distributed over the entire insulating member 24. Wires 23 are connected to both ends of the heating wire 22. Further, the heating wire 22 is energized by the wire 23 to generate heat.

In the above configuration, when the strip-shaped heater portion 21 is wound around the side faces 11a to 11d of the body 11 in the quadrangular cylindrical valve 10, it is easy to generate the side surface and the heater portion 21 in the corner portion of the body 11. gap. Therefore, in the insulating member 24 (heater portion 21), the hole position C corresponding to the corner portion of the body 11 is formed with a hole H extending in the width direction of the insulating member 24, respectively. The hole H is formed in a rectangular shape and extends to the vicinity of both end portions in the width direction of the insulating member 24. That is, the both end portions of the insulating member 24 in which the holes H are not formed in the angular position C are connected.

Here, since the hole H is formed in the insulating member 24, there is a concern that the heating wire 22 cannot pass between the respective regions 24b, 24c, and 24d corresponding to the respective side faces 11b, 11c, and 11d of the body 11. About this point, the heating line 22 is a longitudinal direction of the insulating member 24, and both end portions of the hole H are not formed in the angular position C of the insulating member 24. Therefore, in the insulating member 24, the heating wire 22 can be passed between the respective regions 24b, 24c, and 24d corresponding to the respective side faces 11b, 11c, and 11d of the body 11.

The heat insulating members 31b, 31c, and 31d are formed of a heat insulating material such as a foamed material of ruthenium rubber. The heat insulating members 31b, 31c, 31d are formed in a shape corresponding to the respective side faces 11b, 11c, 11d in the body 11 of the quadrangular cylindrical valve 10, that is, corresponding to the respective regions 24b, 24c, 24d of the insulating member 24. The shape is formed into a plate shape. The heat insulating members 31b, 31c, and 31d are formed thicker than the insulating member 24, and have rigidity required as a plate-like member that presses the heater portion 21. Specifically, the heat insulating members 31b, 31c, and 31d have a thickness of about 5 times (about 5 times) with respect to the thickness of the heater portion 21 (the heating wire 22 and the insulating member 24) of about 2 mm, and are about 10 mm. The heat insulating members 31b, 31c, and 31d are attached to the outer surfaces of the heater portion 21 at positions corresponding to the respective regions 24b, 24c, and 24d of the insulating member 24.

A cover 61 is attached to the surface of the heat insulating members 31b, 31c, and 31d opposite to the heater portion 21. That is, the heat insulating members 31b, 31c, and 31d are sandwiched by the heater portion 21 and the cover member 61. The cover member 61 is formed in a shape corresponding to the above-described insulating member 24, and is formed in a rectangular film shape (band shape). However, in the cover member 61, a hole corresponding to the above-described hole H is not formed.

Here, in the square cylindrical valve 10, the side faces 11a to 11d of the main body 11 are wound with the heater portions 21 outside the heat insulating members 31b to 31d, and in the above state, the cover member 61 is located at the heat insulating member 31b. The outer peripheral side of ~31d (see Figs. 3 and 5). Therefore, at the angular position C of the insulating member 24 (the corner of the body 11), The cover member 61 must be lengthened in accordance with the thickness of the heat insulating members 31b to 31d.

In this regard, the cover member 61 has a curved portion 61a at a position corresponding to the position between the heat insulating members 31b, 31c, 31d adjacent to each other, that is, the position opposite to the angular position C of the insulating member 24. In the cover member 61, the portions other than the curved portion 61a are fixed to the heat insulating members 31b, 31c, 31d, and the curved portion 61a is not fixed to the heat insulating members 31b, 31c, 31d. The curved portion 61a is formed longer than the interval g between the heat insulating members 31b, 31c, 31d adjacent to each other, and can be bent in accordance with the angle formed by the adjacent heat insulating members 31b, 31c, 31d.

The cover member 61 is integrally formed with the above-described winding portions 41, 45. The cover member 61 and the winding portions 41 and 45 are formed in series by a woven fabric (cloth). The winding portions 41 and 45 extend from both ends in the longitudinal direction of the cover member 61 at both end portions in the width direction of the cover member 61 (heater portion 21). Specifically, the winding portions 41 and 45 are attached to the two corner portions of the heat insulating member 31d. The winding portions 41 and 45 have a length in which five sides of the main body 11 are provided, the interval g2 is divided, and the thicknesses of the heat insulating members 31b and 31d are totaled, that is, from the outside of the heat insulating members 31b to 31d. The side 11a to 11d1 of the 11 side overlaps the side 11a approximately once. The interval between the winding portion 41 and the winding portion 45 is slightly equal to the outer diameter of the first flow path 13 of the body 11.

As described above, the fastening members 51 and 55 are attached to both end portions in the longitudinal direction of the winding portions 41 and 45, respectively. The fastener 51 has a first sheet 51a and a second sheet 51b, and the fastener 55 has a first sheet 55a and a second sheet 55b. In the winding portions 41 and 45, the first sheets 51a and 55a are attached to the portions (one end portions) which are extended from the cover 61 and are located beside the cover 61 (first Engagement member). Further, in the winding portions 41 and 45, the second sheets 51b and 55b (second engaging members) are attached to the portions (the other end portions) farthest from the cover 61. In other words, the second sheets 51b and 55b are attached to the outer sides of the heat insulating members 31b to 31d, and the winding portions 41 and 45 are wound around the side surface of the main body 11 one or more times, respectively, and the first sheets 51a and 55a, respectively. Overlapping locations.

The first sheets 51a and 55a are attached to the opposite sides of the heat insulating members 31b to 31d with respect to the winding portions 41 and 45 (cover 61). On the other hand, the second sheets 51b and 55b are attached to the same surfaces as the heat insulating members 31b to 31d with respect to the winding portions 41 and 45 (cover 61). In other words, the first sheets 51a and 55a and the second sheets 51b and 55b are attached to the mutually opposite surfaces of the winding portions 41 and 45, respectively.

The thermocouple 25 is mounted to the region 24d of the insulating member 24. The thermocouple 25 is connected to a control device (not shown), and outputs a signal corresponding to the temperature of the detected position to the control device. The control device feedbacks the temperature of the heater 20 to the target temperature based on the signal input by the thermocouple 25. Further, a temperature fuse 27 is attached to the region 24c of the insulating member 24. When the temperature of the detecting position of the temperature fuse 27 is higher than the predetermined temperature, the current to the heating wire 22 is blocked.

Next, the procedure of attaching the heater 20 to the quadrangular cylindrical valve 10 will be described.

The user presses the regions 24b, 24c, and 24d of the insulating member 24 in the heater 20 to the side faces 11b, 11c, and 11d of the body 11, respectively. At this time, since the angular position C corresponding to the corner portion of the body 11 in the insulating member 24 is formed with a hole H extending in the width direction of the insulating member 24, respectively. The tip of the corner of the body 11 can be pointed to the hole H. Therefore, the insulating member 24 can be easily bent, and the occurrence of a gap with the insulating member 24 on the side of the body 11 can be suppressed. Further, the cover member 61 has a curved portion 61a at a position corresponding to the heat insulating members 31b, 31c, 31d adjacent to each other. Therefore, the length of the cover member 61 located on the outer peripheral side of the heat insulating members 31b to 31d can be suppressed, and the corner portion of the body 11 is insufficient. Further, the cover member 61 has the curved portion 61a, whereby the heat insulating members 31b to 31d can be made thick, and therefore, the amount of heat generation of the heater portion 21 can be increased.

Next, the winding portion 41 is wound around the side faces 11a to 11d of the main body 11 from the outer sides of the heat insulating members 31b to 31d and the cover 61 in this order. Then, the winding portion 41 is wound up to the front surface of the side surface 11a of the main body 11, and the second sheet 51b is engaged with the first sheet 51a of the fastener 51 on the front side of the side surface 11a. At this time, by adjusting the engagement position of the first sheet 51a and the second sheet 51b, the force by which the heat insulating members 31b to 31d are caught by the winding portion 41 is adjusted.

Similarly, the winding portion 45 is sequentially wound around the side faces 11a to 11d of the main body 11 from the heat insulating members 31b to 31d and the outside of the cover member 61. At this time, the first flow path 13 of the body 11 is located between the winding portion 41 and the winding portion 45. That is, the first flow path 13 of the main body 11 can be avoided, and the winding portions 41 and 45 can be wound around the side surface of the main body 11. Then, by adjusting the position at which the second sheet 55b is engaged with the first sheet 55a of the fastener 55, the force of the heat insulating members 31b to 31d by the winding portion 45 is adjusted.

The present embodiment, which has been described in detail above, has the following advantages.

‧ In the heater unit 21, a heat insulating structure is attached to each of the side surfaces 11b, 11c, and 11d of the main body 11 of the square cylindrical valve 10 Parts 31b, 31c, 31d. Further, strip-shaped winding portions 41 and 45 are attached to predetermined portions of both end portions of the heat insulating member 31d in the width direction of the heater portion 21. The heater portion 21 is wound around the side surface of the main body 11 of the square cylindrical valve 10 with the heat insulating members 31b, 31c, and 31d as the outer side. In the above state, the winding portions 41 and 45 can be separated from the heat insulating member 31b. The outer sides of 31c and 31d are wound one or more times around the side of the body 11. Therefore, the heat insulating members 31b, 31c, and 31d are hooped from the outside by the winding portions 41 and 45, whereby the heater portion 21 can be pressed against the body 11 by the heat insulating members 31b, 31c, and 31d. Each side surface 11b, 11c, 11d. Further, since the winding portions 41 and 45 hold the both end portions of the heat insulating members 31b, 31c, and 31d in the width direction of the heater portion 21, it is possible to suppress the heater portion 21 from being pressed against the respective side faces 11b of the body 11. The forces of 11c and 11d are biased off.

‧ The fastening members 51 and 55 are attached to the respective winding portions 41 and 45, and are engaged to be fixed so as to be wound around the side of the main body 11 from the outer side of the heat insulating members 31b, 31c, and 31d. Winding portions 41, 45. Therefore, by engaging the fastening members 51 and 55, the winding portions 41 and 45 that sandwich the respective heat insulating members 31b, 31c, and 31d from the outside can be fixed. As a result, the adhesion of the heater portion 21 to the body 11 of the quadrangular cylindrical valve 10 can be ensured, and the mounting of the heater 20 can be easily performed.

‧ The heat insulating members 31b, 31c, and 31d that transmit heat to the outside of the heater portion 21 can be used to press the heater portion 21 against the side faces 11b, 11c, and 11d of the main body 11 of the square cylindrical valve 10 member. As a result, the number of components of the heater 20 can be reduced.

‧ at the corner of the body 11 in the insulating member 24 (heater portion 21) Corresponding angular positions C are formed with holes H extending in the width direction of the insulating member 24. Therefore, the corner portion of the body 11 can be modeled by the hole H formed in the insulating member 24, and it is possible to suppress the occurrence of a gap between the side surface and the insulating member 24 in the corner portion of the body 11. Therefore, the adhesion of the insulating member 24 to the body 11 of the quadrangular cylindrical valve 10 can be improved.

The heating wire 22 passes through the insulating member 24 in the longitudinal direction of the heater portion 21 at a portion where the hole H is not formed at the angular position C. Therefore, in the insulating member 24, even in the case where the hole H is formed at the angular position C, the heat wire 22 can be pulled between the portions corresponding to the respective side faces 11b, 11c, 11d of the body 11. As a result, the heating wire 22 can be disposed in the entire heater unit 21. Further, in the portion where the heat insulating members 31b, 31c, and 31d are not provided, since the heating wires 22 are not passed except for the both end portions in the width direction, it is possible to suppress the portions where the heat insulating members 31b, 31c, and 31d are not heated. As a result, it is possible to suppress the user from being burned and the like.

The cover member 61 has a bend which is formed to be longer than the interval g between the heat insulating members 31b, 31c, 31d adjacent to each other at a position corresponding to the heat insulating members 31b, 31c, 31d adjacent to each other. Part 61a. Therefore, the length of the position of the cover member 61 corresponding to the corner portion of the body 11 of the quadrangular cylindrical valve 10 can be adjusted by the curved portion 61a, and the occurrence of insufficient length of the cover member 61 can be suppressed.

‧ Since the winding portions 41, 45 and the cover member 61 are integrally formed, the winding portions 41, 45 and the cover member 61 can be simultaneously formed from the same material. Further, it is not necessary to overlap the winding portions 41, 45 and the cover member 61 to be fixed to each other. As a result, the manufacture of the winding portions 41, 45 and the cover 61 can be facilitated.

‧ In the winding portions 41 and 45, the first sheets 51a and 55a are attached to the portions extending from the cover 61 and located beside the cover 61, respectively. In the winding portions 41 and 45, the outer side of the heat insulating members 31b, 31c, and 31d is wound around the side surface of the main body 11 one turn or more, and the first engaging member is attached to the first position. 2 sheets 51b, 55b. Therefore, in the configuration in which the first sheets 51a and 55a and the second sheets 51b and 55b can be engaged with each other, the lengths of the wound portions 41 and 45 can be minimized.

‧ Since the engagement positions (engagement amounts) between the first sheets 51a and 55a and the second sheets 51b and 55b can be adjusted in the fasteners 51 and 55, the winding portions 41 and 45 can be adjusted. The force of the heat insulating members 31b, 31c, 31d is caught. Therefore, by adjusting the engagement position between the first sheets 51a, 55a of the fasteners 51, 55 and the second sheets 51b, 55b, the body 11 that is transferred from the heater portion 21 to the square cylindrical valve 10 can be adjusted. The heat.

‧ Since the heater 20 does not use a screw or the like, it is possible to suppress the loss of parts.

The above embodiment can also be modified as follows. The same components as those in the above-described embodiments are denoted by the same reference numerals and will not be described.

‧ At the angular position C of the insulating member 24, the hole H of the insulating member 24 may be divided into a plurality. Also, the hole H may be omitted.

‧ The heating wire 22 can also be divided into multiple numbers. Further, instead of the heating wire 22, an electric heating member formed of a semiconductor material or the like and having a surface heat may be used.

‧ In the fastening member 51, a plurality of first sheets 51a may be provided, Or a plurality of second sheets 51b. According to this configuration, the engagement position of the first sheet 51a and the second sheet 51b can be adjusted more flexibly. Further, at this time, the length of the winding portion 41 may be set to be longer. The same applies to the fastener 55 and the winding portion 45.

In the above embodiment, the winding portions 41 and 45 are attached to the end portion of the heat insulating member 31d (opposing portion of the region 24d), but the winding portions 41 and 45 may be attached to the winding portion 41 and 45 as shown in Fig. 8 . Heat insulating member 31c (opposing portion of region 24c). At this time, the lengths of the winding portions 41 and 45 are also the same as those of the above-described embodiment, and by engaging the fastening members 51 and 55, the heat insulating members 31b, 31c, and 31d can be caught by the winding portions 41 and 45. . Further, the winding portions 41 and 45 may be attached to the heat insulating member 31b (opposing portion of the region 24b).

‧ In the above embodiment, the winding portions 41 and 45 are integrally formed with the cover 61. However, the winding portions 41 and 45 and the cover 61 may be formed separately and attached to the heat insulating members 31b and 31c, respectively. 31d. Further, the cover member 61 may be omitted, and only the winding portions 41 and 45 may be attached to the heat insulating members 31b to 31d.

In the above embodiment, the winding portion 41 and the winding portion 45 are separately formed. However, as shown in Fig. 9, the winding portion 141 may be employed in the first flow path 13 of the main body 11. The corresponding portion forms the hole 142 and the notch 143, and then the other portions are connected. According to this configuration, since the area of the heat insulating members 31b to 31d is enlarged by the winding portion 141, the heater portion 21 can be more uniformly pressed against the main body 11.

In the above embodiment, the cover member 61 has a curved portion 61a longer than the interval g between the heat insulating members 31b, 31c, and 31d adjacent to each other. However, the length of the curved portion 61a can also be made Equal to the gap g, the curved portion 61a is formed by a stretchable material. At this time, by extending the curved portion 61a at a position corresponding to the corner portion of the body 11 of the quadrangular cylindrical valve 10 in the cover member 61, the problem of insufficient length of the cover member 61 can be suppressed.

In the above embodiment, the fastening members 51 and 55 are used as the engaging portions for fixing the winding portions 41 and 45 to be engaged, but a button or a hook may be employed.

In the above embodiment, the heat insulating members 31b to 31d are used as the plate-like members that press the heater portion 21, but the heat insulating member and the plate-like member may be separate members. At this time, the plate-shaped member can be formed by a material other than the heat insulating material, such as stainless steel or aluminum. Moreover, when the plate-shaped member is formed of a heat-resistant material, one of the heat insulating member and the plate-shaped member may be the inner side (the heater portion 21 side).

‧Not limited to the quadrangular cylindrical valve 10, the heater 20 can also be applied to other angular cylindrical valves. In this case, the number of the heat insulating members 31b to 31c (plate-like members) or the lengths of the wound portions 41, 45, and 141 may be adjusted.

10‧‧‧ four-corner cylindrical valve (valve)

11‧‧‧Ontology

11a‧‧‧ side (one side scheduled)

11f‧‧‧above

13‧‧‧1st flow path (flow path)

15‧‧‧2nd flow path (flow path)

17‧‧‧Valve mechanism

19‧‧‧Actuator

20‧‧‧heater

21‧‧‧Hotware Department

31b‧‧‧Insulation member (plate member)

31d‧‧‧Insulation member (plate member)

41‧‧‧Winding Department

45‧‧‧Winding Department

51‧‧‧Adhesive parts (engagement members)

55‧‧‧Gear fasteners (engagement members)

Claims (7)

A heater for a prismatic valve is a valve having a body having a prismatic shape and having a fluid flow path formed on a predetermined one of sides of the body, and a heater mounted on a side of the body, characterized by: The strip-shaped heater portion has a length that covers the entire side surface of the side surface of the body except for the predetermined one surface; the plate-shaped members are respectively mounted in the heater portion corresponding to the respective sides of the body a belt-shaped winding portion is attached to a predetermined portion of both end portions of the plate-like member in the width direction of the heater portion, and the side surface of the body is wound around the plate-shaped member In the state of the heater portion, one or more windings may be wound around the side surface of the main body from the outer side of the plate-shaped member; and the engaging portions may be provided in the respective winding portions to be engaged to fix the plate from the front plate The outer side of the member is wound around the side surface of the main body by one or more winding portions. A heater for a cylindrical valve of claim 1, wherein said plate-like member is composed of a heat insulating member. In the heater of the angular cylindrical valve of claim 1, a hole extending in the width direction of the heater portion is formed at an angular position of the heater portion corresponding to a corner portion of the main body. The heater of the angular cylindrical valve of claim 3, wherein the heater portion has a heating wire extending in a line shape, Further, the heating wire passes through a portion where the hole is not formed in the angular position of the heater portion toward the longitudinal direction of the heater portion. The heater of the angular cylindrical valve of claim 1, having a cover member sandwiching the aforementioned plate-like member with the heater portion, and the cover member having a position corresponding to the position between the plate-like members adjacent to each other The curved portions which are long and bendable are spaced apart from each other by the adjacent plate-like members adjacent to each other. A heater for a cylindrical valve of claim 5, wherein said winding portion is integrally formed with said cover member. The heater of the angular cylindrical valve of claim 1, wherein the engaging portion is a fastener, and the first sheet and the second sheet are respectively attached to mutually opposite surfaces of the winding portion.