TWI598291B - Hexagonal boron nitride powder, a method for producing the same, a resin composition and a resin sheet - Google Patents

Hexagonal boron nitride powder, a method for producing the same, a resin composition and a resin sheet Download PDF

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TWI598291B
TWI598291B TW104133868A TW104133868A TWI598291B TW I598291 B TWI598291 B TW I598291B TW 104133868 A TW104133868 A TW 104133868A TW 104133868 A TW104133868 A TW 104133868A TW I598291 B TWI598291 B TW I598291B
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Yuki Otsuka
Masaru Fukasawa
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Showa Denko Kk
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/06Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/064Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with boron
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/38Boron-containing compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L101/00Compositions of unspecified macromolecular compounds

Description

六方晶氮化硼粉末、其製造方法、樹脂組成物及樹脂薄片 Hexagonal boron nitride powder, a method for producing the same, a resin composition, and a resin sheet

本發明,係有關於六方晶氮化硼(以下,亦稱為「hBN」。)粉末及使用該hBN粉末的樹脂薄片,特別是含有以hBN的一次粒子所構成之聚集體,及有關高純度之hBN粉末、該hBN粉末的製造方法、使用該hBN粉末的樹脂組成物及樹脂薄片。 The present invention relates to a hexagonal crystal boron nitride (hereinafter also referred to as "hBN") powder and a resin sheet using the same, particularly an aggregate composed of primary particles of hBN, and high purity. The hBN powder, the method for producing the hBN powder, the resin composition using the hBN powder, and the resin sheet.

hBN粒子,具有與石墨類似的層狀構造,而由於hBN粉末在熱傳導性、電絕緣性、化學安定性、固體潤滑性、耐熱衝擊性等特性上優異,目前已使用作為利用此些特性之絕緣散熱材料、固體潤滑/脫模劑、hBN燒結體製造用材料等方面。 hBN particles have a layered structure similar to graphite, and since hBN powder is excellent in thermal conductivity, electrical insulation, chemical stability, solid lubricity, thermal shock resistance, etc., it has been used as insulation using these characteristics. Heat-dissipating material, solid lubricating/release agent, material for manufacturing hBN sintered body, etc.

先前,hBN粉末,一般上係以硼酸及硼砂等硼化合物與三聚氰胺及尿素等氮化合物混合,再於氨氣下或非氧化性氣體下以較低溫燒成製造為結晶性低的粗製hBN粉末,其次,再以該製得之粗製hBN在非氧化性氣體下以高溫燒成使結晶成長而獲得(專利文獻1~3)。 Previously, the hBN powder was generally mixed with a boron compound such as boric acid and borax, and a nitrogen compound such as melamine or urea, and then calcined at a lower temperature under ammonia gas or a non-oxidizing gas to produce a crude hBN powder having low crystallinity. Then, the obtained crude hBN is obtained by firing at a high temperature under a non-oxidizing gas to grow crystals (Patent Documents 1 to 3).

以此類hBN粉末作為填充物使其含有於環氧樹脂及矽橡膠等樹脂材料的薄片及膠帶、潤滑脂等,係使用作為如可高效除去由電子零件所產生之熱所用之具有電絕緣性的熱傳導性薄片及熱傳導性潤滑脂等之熱傳導性零件材料。為更提高此類熱傳導性薄片等熱傳導性零件材料的熱傳導性,進行將hBN粉末的填充率提高之試驗。然而,由於一般hBN為鱗片狀粒子形狀而一次粒子的長度與厚度之比例高,在填充率提高時粒子易向一定方向整列,因此使所得之樹脂及橡膠成形品的特性易產生異向性。一旦產生此種異向性,即會使熱傳導性薄片等熱傳導性零件材料的熱傳導性、電絕緣性、耐熱衝擊性等特性變差。 A sheet, a tape, a grease, or the like which is contained in a resin material such as an epoxy resin or a ruthenium rubber as a filler, and is used as an electrical insulation for efficiently removing heat generated by an electronic component. Thermal conductive sheet materials such as heat conductive sheets and heat conductive greases. In order to further improve the thermal conductivity of a thermally conductive component material such as such a thermally conductive sheet, a test for increasing the filling rate of the hBN powder is performed. However, since hBN is generally a scaly particle shape, the ratio of the length of the primary particles to the thickness is high, and when the filling rate is increased, the particles are easily aligned in a certain direction. Therefore, the properties of the obtained resin and the rubber molded article are likely to be anisotropic. When such anisotropy occurs, characteristics such as thermal conductivity, electrical insulating properties, and thermal shock resistance of a thermally conductive component material such as a thermally conductive sheet are deteriorated.

因此,近年來,在抑制熱傳導性薄片中之異向性及提高hBN粉末的填充性之目的方面,係使用以含聚集hBN的一次粒子之二次粒子(聚集體)的hBN粉末,混合在樹脂中的方法(專利文獻4、5)。 Therefore, in recent years, in order to suppress the anisotropy in the thermally conductive sheet and to improve the filling property of the hBN powder, hBN powder containing secondary particles (aggregates) of primary particles containing aggregated hBN is used, and mixed in the resin. Method (Patent Documents 4 and 5).

惟,若聚集體的強度不充足的話,會使聚集體在與樹脂複合的過程中易於崩解,因此在熱傳導性薄片中異向性會產生、在熱傳導性薄片中hBN粉末的填充率會降低,而有熱傳導性及電絕緣性減低的問題。 However, if the strength of the aggregate is insufficient, the aggregate tends to disintegrate during the process of compounding with the resin, so that the anisotropy is generated in the heat conductive sheet, and the filling rate of the hBN powder is lowered in the heat conductive sheet. There is a problem of reduced thermal conductivity and electrical insulation.

同時,在增加hBN粉末的填充性及電絕緣性的目的方面,亦試驗以碳化硼在氮氣中,經過1800℃以上的條件之氮化處理後,再混合三氧化二硼及/或其前驅物,經由燒成去除碳成分而製得hBN粉末(專利文獻6、7)。 At the same time, in order to increase the filling and electrical insulating properties of the hBN powder, it is also tested to use boron carbide in nitrogen under nitriding conditions of 1800 ° C or higher, followed by mixing of boron trioxide and/or its precursor. The carbon component is removed by firing to obtain hBN powder (Patent Documents 6 and 7).

然而,由於碳化硼的氮化硼化反應速度非常慢,因此在單以碳化硼與氮反應的方法中,會有需要的時間長,使製造成本增加的問題。而且,在此種製造方法中,又有去除餘留的碳成分非常困難,因此餘留黑色異物的問題。同時,亦有由於餘留黑色異物所致之絕緣破壞電壓的降低、及使熱傳導性薄片外觀變差的問題。因此,期待能有可減低黑色異物數的熱傳導性薄片。 However, since the boron nitride reaction rate of boron carbide is very slow, in the method of reacting boron carbide with nitrogen alone, there is a problem that it takes a long time to increase the manufacturing cost. Moreover, in such a manufacturing method, it is very difficult to remove the remaining carbon component, so that there is a problem of remaining black foreign matter. At the same time, there is a problem in that the dielectric breakdown voltage due to the remaining black foreign matter is lowered and the appearance of the thermally conductive sheet is deteriorated. Therefore, it is expected that a thermally conductive sheet capable of reducing the number of black foreign matter can be obtained.

[先前技術文獻] [Previous Technical Literature] 專利文獻 Patent literature

專利文獻1:日本特開昭61-286207號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 61-286207

專利文獻2:日本特許第3461651號說明書 Patent Document 2: Japanese Patent No. 3461651

專利文獻3:日本特公平5-85482號公報 Patent Document 3: Japanese Patent Publication No. 5-85482

專利文獻4:日本特開2011-098882號公報 Patent Document 4: JP-A-2011-098882

專利文獻5:日本特開2005-343728號公報 Patent Document 5: Japanese Laid-Open Patent Publication No. 2005-343728

專利文獻6:日本特許第4750220號說明書 Patent Document 6: Japanese Patent No. 4750220

專利文獻7:日本特許第5081488號說明書 Patent Document 7: Japanese Patent No. 5081488

本發明之課題,係在於提供含有以hBN的一次粒子所構成之聚集體(以下,亦可單稱為「聚集體」。)的高純度hBN粉末,其係在以該hBN粉末製造樹脂組成物及樹脂薄片時,可表現較先前為高之熱傳導性及高電絕 緣性的hBN粉末、該hBN粉末的製造方法、及含該hBN粉末的樹脂組成物及樹脂薄片。 An object of the present invention is to provide a high-purity hBN powder containing an aggregate composed of primary particles of hBN (hereinafter, simply referred to as "aggregate"), which is a resin composition produced from the hBN powder. And resin sheets, which can exhibit higher thermal conductivity and higher power than before. The hBN powder of the edge, the method for producing the hBN powder, and the resin composition and the resin sheet containing the hBN powder.

本發明人等,經過刻意檢討之結果,發現該含有以hBN的一次粒子所構成之聚集體的hBN粉末,具有特定之微晶直徑及粒徑,且聚集體的強度在特定之範圍內,在hBN粉末的粒徑分布曲線中,在特定範圍內含有1個極大(最大)波峰,著眼於該hBN粉末分散在水中而獲得之分散液進行1分鐘超音波處理時之該極大(最大)波峰的減少率,可調整聚集體的強度。 The inventors of the present invention have found that the hBN powder containing aggregates composed of primary particles of hBN has a specific crystallite diameter and particle diameter, and the strength of the aggregate is within a specific range. In the particle size distribution curve of the hBN powder, one maximum (maximum) peak is contained in a specific range, and the maximum (maximum) peak when the dispersion obtained by dispersing the hBN powder in water is subjected to ultrasonic treatment for 1 minute is focused. Reduce the rate and adjust the strength of the aggregate.

本發明係依據上述所知而完成。 The present invention has been completed in light of the above teachings.

亦即,本發明係在提供以下之[1]~[9]項。 That is, the present invention provides the following items [1] to [9].

[1]一種六方晶氮化硼粉末,其係包含六方晶氮化硼一次粒子的聚集體且孔徑106μm篩下的粉末含有率為80質量%以上之六方晶氮化硼粉末,其中50%體積累積粒徑D50為10~20μm、微晶直徑為260~1000Å,且,於分級為45~106μm粒徑之前述六方晶氮化硼粉末之粒徑分布曲線中,於粒徑45~150μm範圍內具有1個最大波峰,對將分級為45~106μm粒徑之前述六方晶氮化硼粉末分散於水中而獲得之分散液進行1分鐘超音波處理時之以下述式(1)所計算出最大波峰的波峰減少率為40~90%。 [1] A hexagonal boron nitride powder comprising an aggregate of hexagonal boron nitride primary particles and a powder having a pore diameter of 106 μm and having a powder content of 80% by mass or more of hexagonal boron nitride powder, of which 50% by volume The cumulative particle diameter D 50 is 10-20 μm, the crystallite diameter is 260-1000 Å, and the particle size distribution curve of the hexagonal boron nitride powder having a particle size of 45-106 μm is in the range of 45-150 μm. There is one maximum peak in the inside, and the dispersion obtained by dispersing the above-mentioned hexagonal boron nitride powder having a particle size of 45 to 106 μm in water for 1 minute is subjected to ultrasonic treatment for 1 minute, and the maximum is calculated by the following formula (1). The peak reduction rate of the peak is 40 to 90%.

波峰減少率=[(處理前之最大波峰高(a))-(處理後之最大波峰高(b))]/(處理前之最大波峰高(a)) (1) Peak reduction rate = [(maximum peak height before treatment (a)) - (maximum peak height after treatment (b))] / (maximum peak height before treatment (a)) (1)

[2]如上述[1]項之六方晶氮化硼粉末,其中孔徑45μm篩下的粉末含有率為45質量%以下。 [2] The hexagonal boron nitride powder according to the above [1], wherein the powder content in the sieve having a pore size of 45 μm is 45% by mass or less.

[3]如上述[1]或[2]項之六方晶氮化硼粉末,其中BET比表面積為1.5~10m2/g。 [3] The hexagonal boron nitride powder according to the above [1] or [2], wherein the BET specific surface area is 1.5 to 10 m 2 /g.

[4]如上述[1]~[3]中任一項之六方晶氮化硼粉末,其中體積密度為0.3g/cm3以上。 [4] The hexagonal boron nitride powder according to any one of [1] to [3] above, wherein the bulk density is 0.3 g/cm 3 or more.

[5]一種樹脂組成物,係含有10~90體積%的如上述[1]~[4]中任一項之六方晶氮化硼粉末。 [5] A resin composition containing 10 to 90% by volume of the hexagonal boron nitride powder according to any one of [1] to [4] above.

[6]一種樹脂薄片,係由如上述[5]項之樹脂組成物或其硬化物所構成。 [6] A resin sheet comprising the resin composition of the above item [5] or a cured product thereof.

[7]一種如上述[1]~[4]中任一項之六方晶氮化硼粉末之製造方法,其係具有將包含氮化硼20~90質量%及氧化硼10~80質量%之粗製六方晶氮化硼粉末100質量份、以碳換算3~15質量份之碳源與0.01~1質量份之鈣化合物進行混合,且成形之後,於包含氮氣之環境下進行燒成之燒成步驟。 [7] The method for producing a hexagonal boron nitride powder according to any one of the above [1] to [4], which comprises 20 to 90% by mass of boron nitride and 10 to 80% by mass of boron oxide. 100 parts by mass of the crude hexagonal boron nitride powder, a carbon source of 3 to 15 parts by mass in terms of carbon, and 0.01 to 1 part by mass of a calcium compound are mixed, and after firing, firing is performed in an atmosphere containing nitrogen. step.

[8]如上述[7]項之六方晶氮化硼粉末之製造方法,其中前述碳源,為選自石墨及碳化硼中之1種或2種。 [8] The method for producing a hexagonal boron nitride powder according to the above [7], wherein the carbon source is one or two selected from the group consisting of graphite and boron carbide.

[9]如上述[7]或[8]項之六方晶氮化硼粉末之製造方法,其中進而具有於前述燒成步驟後,使用孔徑106μm之篩及孔徑45μm之篩,分級為45~106μm之六方晶氮化硼粉末[hBN粉末(A)]與45μm篩下之六方晶氮化硼粉末[hBN粉末(B)]後,將hBN粉末(A)與hBN粉末(B)混合,成為相對於hBN粉末(A)及(B)的合計量之hBN粉末(A)的比率為40 ~90質量%之混合步驟。 [9] The method for producing a hexagonal boron nitride powder according to the above [7] or [8], further comprising: after the baking step, using a sieve having a pore size of 106 μm and a sieve having a pore diameter of 45 μm, and classifying the particles to 45 to 106 μm. After the hexagonal boron nitride powder [hBN powder (A)] and the hexagonal boron nitride powder [hBN powder (B)] under a 45 μm sieve, the hBN powder (A) and the hBN powder (B) are mixed to become a relative The ratio of the hBN powder (A) to the total amount of the hBN powders (A) and (B) is 40. ~90% by mass of the mixing step.

本發明中,可提供含有以hBN的一次粒子所構成之聚集體的高純度hBN粉末,其係在以該hBN粉末製造樹脂組成物及樹脂薄片時,可表現較先前為高之熱傳導性及高電絕緣性的hBN粉末、該hBN粉末的製造方法、及含該hBN粉末的樹脂組成物及樹脂薄片。 In the present invention, a high-purity hBN powder containing an aggregate composed of primary particles of hBN can be provided, which can exhibit higher thermal conductivity and higher than the previous one when the resin composition and the resin sheet are produced from the hBN powder. An electrically insulating hBN powder, a method for producing the hBN powder, and a resin composition containing the hBN powder and a resin sheet.

[第1圖]係本發明中之hBN的一次粒子之聚集體的示意圖。 [Fig. 1] is a schematic view showing an aggregate of primary particles of hBN in the present invention.

[第2圖]係在實施例1中所獲得之hBN的一次粒子之聚集體的SEM照相。 [Fig. 2] SEM photographing of aggregates of primary particles of hBN obtained in Example 1.

[第3圖]係在實施例1中所獲得之hBN的一次粒子之聚集體的SEM照相。 [Fig. 3] SEM photographing of aggregates of primary particles of hBN obtained in Example 1.

[第4圖]係在比較例1中所獲得之hBN的一次粒子之聚集體的SEM照相。 [Fig. 4] SEM photographing of aggregates of primary particles of hBN obtained in Comparative Example 1.

[第5圖]係在比較例1中所獲得之hBN的一次粒子之聚集體的SEM照相。 [Fig. 5] SEM photographing of aggregates of primary particles of hBN obtained in Comparative Example 1.

[第6圖]係含有本發明之六方晶氮化硼粉末的樹脂薄片的示意圖。 [Fig. 6] A schematic view of a resin sheet containing the hexagonal boron nitride powder of the present invention.

[第7圖]係實施例1及3在超音波處理前後的粒徑分 布曲線圖。 [Fig. 7] The particle size distribution of Examples 1 and 3 before and after ultrasonic treatment Cloth graph.

[發明之實施形態] [Embodiment of the Invention] [六方晶氮化硼粉末] [hexagonal boron nitride powder]

本發明之六方晶氮化硼粉末,係包含六方晶氮化硼一次粒子的聚集體且孔徑106μm篩下的粉末含有率為80質量%以上之六方晶氮化硼粉末,其中50%體積累積粒徑D50為10~20μm、微晶直徑為260~1000Å,且,於分級為45~106μm粒徑之前述六方晶氮化硼粉末之粒徑分布曲線中,於粒徑45~150μm範圍內具有1個最大波峰,對將分級為45~106μm粒徑之前述六方晶氮化硼粉末分散於水中而獲得之分散液進行1分鐘超音波處理時之以前述式(1)所計算出最大波峰的波峰減少率為40~90%。 The hexagonal boron nitride powder of the present invention is a hexagonal boron nitride powder containing an aggregate of hexagonal boron nitride primary particles and having a powder content of 80 μm or more in a pore size of 106 μm, wherein 50% by volume of the cumulative particles The diameter D 50 is 10-20 μm, the crystallite diameter is 260-1000 Å, and the particle size distribution curve of the hexagonal boron nitride powder having a particle size of 45-106 μm is in the range of 45-150 μm. One of the largest peaks, and the maximum peak is calculated by the above formula (1) when the dispersion obtained by dispersing the above-mentioned hexagonal boron nitride powder having a particle size of 45 to 106 μm in water for 1 minute is subjected to ultrasonic treatment for 1 minute. The peak reduction rate is 40 to 90%.

本發明中,可得到含有以hBN的一次粒子所構成之聚集體的高純度hBN粉末,其係在以該hBN粉末製造樹脂組成物及樹脂薄片時可表現較先前為高之熱傳導性及高電絕緣性的hBN粉末。獲得該效果的理由並不明瞭,但應該為以下之情形。 In the present invention, a high-purity hBN powder containing an aggregate composed of primary particles of hBN can be obtained, which can exhibit higher thermal conductivity and higher electric power than when the resin composition and the resin sheet are produced from the hBN powder. Insulating hBN powder. The reason for obtaining this effect is not clear, but it should be the following.

由於本發明之hBN粉末,係含有以hBN的一次粒子所構成之聚集體的hBN粉末,而具有特定的微晶直徑及粒徑,且hBN粉末以特定之條件所測定的聚集體之強度係在特定之範圍內,因此推測在以該hBN粉末製造樹脂 組成物及樹脂薄片時,可使該聚集體不致過度崩解而可維持顆粒形狀,而且,又由於該聚集體的強度在適當之範圍,與樹脂成分性質相近,因此可表現高熱傳導性及高電絕緣性。惟,此係所推定之情形,本發明並不限定為此種機制。 Since the hBN powder of the present invention contains an aggregate of hBN powder composed of primary particles of hBN, and has a specific crystallite diameter and particle diameter, and the strength of the aggregate measured by the hBN powder under specific conditions is Within the specific range, it is speculated that the resin is produced from the hBN powder. In the composition and the resin sheet, the aggregate can be maintained in a particle shape without excessive disintegration, and since the strength of the aggregate is in an appropriate range and is similar to the resin component, high thermal conductivity and high performance can be exhibited. Electrical insulation. However, the present invention is not limited to such a mechanism as the case is presumed.

<一次粒子> <primary particle>

本發明之hBN粉末的一次粒子粒徑,由提高熱傳導性的觀點言之,以平均20μm以下為佳,1~15μm更佳,5~13μm再更佳,8~12μm又更佳,8.5~10.5μm又再更佳。含有由一次粒子粒徑為5μm以上之大的一次粒子所構成之聚集體的hBN粉末,在以該hBN粉末製造樹脂組成物時,與樹脂成分性質相近,可獲得良好之熱傳導性及高電絕緣性。 The primary particle diameter of the hBN powder of the present invention is preferably from 20 μm or less, more preferably from 1 to 15 μm, more preferably from 5 to 13 μm, more preferably from 8 to 12 μm, and from 8.5 to 10.5, from the viewpoint of improving thermal conductivity. Μm is even better. The hBN powder containing an aggregate composed of primary particles having a primary particle diameter of 5 μm or more, when the resin composition is produced from the hBN powder, has a property similar to that of the resin component, and can obtain good thermal conductivity and high electrical insulation. Sex.

再者,一次粒子粒徑,係一次粒子之長徑的數值平均值,為可以實施例中所載的方法測定者。 Further, the primary particle diameter is a numerical average value of the major diameter of the primary particles, which can be measured by the method described in the examples.

本發明之hBN粉末中所含的一次粒子,可為鱗片狀。其中,「鱗片狀」,意指相對於一次粒子的厚度之一次粒子的長徑之比率(長徑/厚度)為5~20之形狀。在此種一次粒子為鱗片狀之情形,由於可成為聚集體,因此即使提高樹脂組成物及樹脂薄片內之hBN粉末的填充率亦可防止或抑制一次粒子向一定的方向配向。 The primary particles contained in the hBN powder of the present invention may be in the form of scales. Here, the "scaly shape" means a shape in which the ratio of the major axis (long diameter/thickness) of the primary particles to the thickness of the primary particles is 5 to 20. In the case where the primary particles are in the form of scales, since the aggregates can be aggregated, even if the filling ratio of the hBN powder in the resin composition and the resin sheet is increased, it is possible to prevent or suppress the primary particles from being aligned in a certain direction.

本發明之hBN粉末的一次粒子之長徑與厚度之比率(長徑/厚度),由提高熱傳導性之觀點言之,以5~20為 佳,10~20更佳,13~20再更佳,15~18又更佳,15.5~16又再更佳。 The ratio of the major axis to the thickness (long diameter/thickness) of the primary particles of the hBN powder of the present invention is from the viewpoint of improving thermal conductivity, and is 5 to 20 Good, 10~20 is better, 13~20 is better, 15~18 is better, and 15.5~16 is better.

又,本說明書中,「一次粒子之長徑」,意指一次粒子之長徑的數值平均值;「一次粒子之厚度」意指一次粒子之厚度的數值平均值。同時,在hBN的一次粒子為鱗片狀粒子時,「長徑」意指鱗片狀粒子平面方向的最大徑。一次粒子的長徑與厚度的比率(長徑/厚度)可以實施例中所載的方法測定。 In the present specification, the "longitudinal diameter of primary particles" means the numerical average of the major diameters of primary particles; "the thickness of primary particles" means the numerical average of the thickness of primary particles. Meanwhile, when the primary particles of hBN are scaly particles, "long diameter" means the largest diameter in the plane direction of the scaly particles. The ratio of the major diameter to the thickness of the primary particles (long diameter/thickness) can be determined by the method contained in the examples.

本發明之hBN粉末,於分級為45~106μm粒徑之該hBN粉末的粒徑分布曲線中,於粒徑45~150μm範圍內具有1個最大波峰,對將分級為45~106μm粒徑之前述hBN粉末分散於水中而獲得之分散液進行1分鐘超音波處理時之以下述式(1)所計算出最大波峰的波峰減少率(以下,亦可稱為「波峰減少率」。)為40~90%。 The hBN powder of the present invention has a maximum peak in a particle size distribution range of 45 to 150 μm in a particle size distribution curve of the hBN powder having a particle size of 45 to 106 μm, and is classified as a particle size of 45 to 106 μm. When the dispersion obtained by dispersing the hBN powder in water for 1 minute of ultrasonic treatment, the peak reduction rate of the maximum peak calculated by the following formula (1) (hereinafter, also referred to as "peak reduction rate") is 40~. 90%.

波峰減少率=[(處理前之最大波峰高(a))-(處理後之最大波峰高(b))]/(處理前之最大波峰高(a)) (1) Peak reduction rate = [(maximum peak height before treatment (a)) - (maximum peak height after treatment (b))] / (maximum peak height before treatment (a)) (1)

前述粒徑分布曲線,係以雷射光繞射散射法之粒度分布儀所測定,其減少率越低亦即hBN粉末的崩解強度越高。由調整崩解強度在適當範圍,在有機基體中填充hBN粉末以製造樹脂組成物及樹脂薄片時或在使用該樹脂薄片時可防止或抑制聚集體崩解,同時,與樹脂成分性質相近,因此可表現高熱傳導性及高電絕緣性。由此觀點言之,hBN粉末的波峰減少率,以42~85%為佳,45~70%更佳,50~60%再更佳,50~55%又更佳。 The particle size distribution curve is determined by a particle size distribution analyzer of a laser light diffraction scattering method, and the lower the reduction rate, that is, the higher the disintegration strength of the hBN powder. When the hBN powder is filled in the organic matrix to adjust the disintegration strength to produce the resin composition and the resin sheet, or when the resin sheet is used, the disintegration of the aggregate can be prevented or suppressed, and at the same time, the resin composition is similar in nature. It can exhibit high thermal conductivity and high electrical insulation. From this point of view, the peak reduction rate of hBN powder is preferably 42-85%, 45~70% is better, 50~60% is better, and 50~55% is better.

又,hBN粉末的波峰減少率,係可以實施例中所載之方法測定者。 Further, the peak reduction ratio of the hBN powder can be measured by the method described in the examples.

<hBN粉末> <hBN powder>

本發明之hBN粉末,由熱傳導性及電絕緣性的觀點言之,以使用減壓抽氣型篩分機(噴氣篩)所求得之孔徑106μm篩下的粉末含有率為80質量%以上,85質量%以上為佳,87質量%以上又更佳,88質量%以上再更佳,90質量%以上又再更佳。 The hBN powder of the present invention has a powder content of 80% by mass or more in a pore size of 106 μm obtained by using a vacuum evacuation type sieving machine (jet screen) from the viewpoint of thermal conductivity and electrical insulation. More than or equal to the mass%, more preferably 87% by mass or more, more preferably 88% by mass or more, and even more preferably 90% by mass or more.

而且,本發明之hBN粉末,由提高熱傳導性及電絕緣性的觀點言之,以使用減壓抽氣型篩分機(噴氣篩)所求得之孔徑106μm篩上的粉末含有率為15質量%以下為佳,13質量%以下更佳,12質量%以下又更佳,10質量%以下再更佳。 Further, the hBN powder of the present invention has a powder content of 15% by mass on a sieve having a pore size of 106 μm obtained by using a vacuum suction type sifter (jet screen) from the viewpoint of improving thermal conductivity and electrical insulation. The following is preferable, preferably 13% by mass or less, more preferably 12% by mass or less, and even more preferably 10% by mass or less.

同時,本發明之hBN粉末,由提高熱傳導性的觀點言之,使用減壓抽氣型篩分機(噴氣篩)所求得之孔徑45μm篩下的粉末含有率,以45質量%以下為佳,40質量%以下更佳,30質量%以下又更佳,25質量%以下再更佳。並且,由提高電絕緣性的觀點言之,孔徑45μm篩下的粉末含有率,以5質量%以上為佳,10質量%以上更佳,15質量%以上又更佳,20質量%以上再更佳。再者,由提高熱傳導性及電絕緣性的觀點言之,孔徑45μm篩下的粉末含有率,以5~45質量%為佳,10~45質量%更佳,15~45質量%又更佳,20~45質量%再更佳,30~40 質量%又再更佳。 In the meantime, the hBN powder of the present invention has a powder content of 45 μm or less in a pore size of 45 μm obtained by a vacuum evacuation type sieving machine (jet screen) from the viewpoint of improving heat conductivity. 40% by mass or less is more preferable, 30% by mass or less is more preferable, and 25% by mass or less is more preferable. Further, from the viewpoint of improving electrical insulation, the powder content of the sieve having a pore size of 45 μm is preferably 5% by mass or more, more preferably 10% by mass or more, even more preferably 15% by mass or more, and more preferably 20% by mass or more. good. Further, from the viewpoint of improving thermal conductivity and electrical insulation, the powder content in a sieve having a pore diameter of 45 μm is preferably 5 to 45% by mass, more preferably 10 to 45% by mass, and even more preferably 15 to 45% by mass. 20~45% by mass, even better, 30~40 The quality % is even better.

又,孔徑106μm篩下及篩上的粉末含有率,以及孔徑45μm篩下的粉末含有率,可以實施例中所載之方法測定。 Further, the powder content of the sieve having a pore size of 106 μm and the sieve, and the powder content of the sieve having a pore size of 45 μm were measured by the method described in the examples.

本發明之hBN粉末的BET比表面積,由提高聚集體的崩解強度之觀點及提高電絕緣性的觀點言之,以1.5~10m2/g為佳,2~10m2/g更佳,2.5~8m2/g再更佳,3~7m2/g又更佳,3~6m2/g再又更佳,3~5m2/g又再更佳。在BET比表面積在10m2/g以下時,可使hBN粉末中所含的聚集體之比表面積減小,亦可使製造樹脂組成物及樹脂薄片時混入聚集體內部的樹脂成分之量減少。因此,可相對地增加存在於聚集體間的樹脂成分量,而提高相對於聚集體的樹脂成分之分散性,而使hBN粉末與樹脂成分性質相接近。 The BET specific surface area of the hBN powder of the present invention is preferably from 1.5 to 10 m 2 /g, more preferably from 2 to 10 m 2 /g, from the viewpoint of improving the disintegration strength of the aggregate and improving electrical insulation. ~8m 2 /g is even better, 3~7m 2 /g is better, 3~6m 2 /g is better, and 3~5m 2 /g is better. When the BET specific surface area is 10 m 2 /g or less, the specific surface area of the aggregate contained in the hBN powder can be made small, and the amount of the resin component mixed into the aggregate when the resin composition and the resin sheet are produced can be reduced. Therefore, the amount of the resin component existing between the aggregates can be relatively increased, and the dispersibility of the resin component with respect to the aggregate can be increased, and the hBN powder can be made close to the resin component.

又,該BET比表面積,為可以實施例中所載的方法測定者。 Further, the BET specific surface area is measured by the method described in the examples.

本發明之hBN粉末的50%體積累積粒徑(D50),由提高聚集體的崩解強度、及提高樹脂組成物及樹脂薄片內之填充性的觀點言之,可為10~20μm,而以10.5~18μm為佳,11~15μm更佳,11.5~14μm再更佳,12~13.5μm又更佳,12.2~13μm再又更佳。 The 50% volume cumulative particle diameter (D 50 ) of the hBN powder of the present invention can be 10 to 20 μm from the viewpoint of improving the disintegration strength of the aggregate and improving the filling property in the resin composition and the resin sheet. It is preferably 10.5~18μm, 11~15μm is better, 11.5~14μm is better, 12~13.5μm is better, and 12.2~13μm is better.

又,hBN粉末的50%體積累積粒徑(D50),為可以實施例中所載的方法測定者。 Further, the 50% volume cumulative particle diameter (D 50 ) of the hBN powder was measured by the method described in the examples.

本發明之hBN粉末的體積密度,由提高聚集 體的崩解強度之觀點言之,以0.3g/cm3以上為佳,0.35g/cm3以上更佳,0.4g/cm3以上再更佳,0.5g/cm3以上又更佳,0.6g/cm3以上再又更佳。 The bulk density of the hBN powder of the present invention is preferably 0.3 g/cm 3 or more, more preferably 0.35 g/cm 3 or more, and even more preferably 0.4 g/cm 3 or more, from the viewpoint of improving the disintegration strength of the aggregate. More preferably, it is 0.5 g/cm 3 or more, and more preferably 0.6 g/cm 3 or more.

又,hBN粉末的體積密度,為可以實施例中所載的方法測定者。 Further, the bulk density of the hBN powder is determined by the method described in the examples.

本發明之hBN粉末的微晶直徑,由提高熱傳導性及電絕緣性的觀點言之,可為260~1000Å,280~750Å更佳,300~500Å再更佳,320~400Å又更佳,330~380Å再又更佳,340~360A又再更佳。 The crystallite diameter of the hBN powder of the present invention is 260 to 1000 Å, preferably 280 to 750 Å, more preferably 300 to 500 Å, and more preferably 320 to 400 Å, from the viewpoint of improving thermal conductivity and electrical insulation. ~380Å is even better, and 340~360A is even better.

又,該微晶直徑,係可以實施例中所載之方法測定者。 Further, the crystallite diameter can be measured by the method described in the examples.

本發明之hBN粉末,含有上述聚集體,故聚集體可維持為顆粒形狀,因此即使提高樹脂組成物及樹脂薄片內hBN粉末之填充率亦可防止或抑制一次粒子向一定方向配向,而以該hBN粉末所製得的樹脂組成物及樹脂薄片,熱傳導性及電絕緣性優異。 Since the hBN powder of the present invention contains the aggregate, the aggregate can be maintained in a particle shape. Therefore, even if the filling ratio of the hBN powder in the resin composition and the resin sheet is increased, the primary particles can be prevented or inhibited from being aligned in a certain direction. The resin composition and the resin sheet obtained from the hBN powder are excellent in thermal conductivity and electrical insulation.

本發明之hBN粉末的純度,亦即,本發明之hBN粉末中的hBN之純度,由提高熱傳導性及電絕緣性的觀點言之,以96質量%以上為佳,98質量%以上更佳,99質量%以上再更佳,99.5質量%以上又更佳,99.8質量%以上再又更佳。又,該hBN粉末的純度,係可以實施例中所載之方法測定者。 The purity of the hBN powder of the present invention, that is, the purity of hBN in the hBN powder of the present invention is preferably 96% by mass or more, and more preferably 98% by mass or more, from the viewpoint of improving thermal conductivity and electrical insulating properties. More preferably, 99% by mass or more, more preferably 99.5% by mass or more, and even more preferably 99.8% by mass or more. Further, the purity of the hBN powder can be measured by the method described in the examples.

本發明之hBN粉末中的氧化硼量(以下,亦稱為「B2O3量」。),由提高熱傳導性、電絕緣性及生產優 勢的觀點言之,以0.001~0.12質量%為佳,0.005~0.11質量%更佳,0.0075~0.10質量%再更佳,0.01~0.05質量%又更佳,0.015~0.03質量%再又更佳。 The amount of boron oxide (hereinafter also referred to as "B 2 O 3 amount") in the hBN powder of the present invention is preferably from 0.001 to 0.12% by mass from the viewpoint of improving thermal conductivity, electrical insulation, and production advantage. , 0.005 to 0.11% by mass is more preferable, 0.0075 to 0.10% by mass is more preferably, 0.01 to 0.05% by mass is more preferably, and 0.015 to 0.03% by mass is more preferable.

又,該B2O3量,係可以實施例中所載之方法測定者。 Further, the amount of B 2 O 3 can be measured by the method described in the examples.

本發明之hBN粉末中的氧化鈣(CaO)之含量,由提高熱傳導性及電絕緣性的觀點言之,以0.5質量%以下為佳,0.2質量%以下更佳,0.1質量%以下再更佳,0.05質量%以下又更佳,0.03質量%以下再又更佳,0.02質量%以下又再更佳。又,該hBN粉末中的CaO之含量,係可以實施例中所載之方法測定者。 The content of calcium oxide (CaO) in the hBN powder of the present invention is preferably 0.5% by mass or less, more preferably 0.2% by mass or less, even more preferably 0.1% by mass or less, from the viewpoint of improving thermal conductivity and electrical insulating properties. It is more preferably 0.05% by mass or less, more preferably 0.03% by mass or less, and still more preferably 0.02% by mass or less. Further, the content of CaO in the hBN powder can be measured by the method described in the examples.

本發明之hBN粉末中的碳之含量,由提高熱傳導性及電絕緣性的觀點言之,以0.5質量%以下為佳,0.2質量%以下更佳,0.1質量%以下再更佳,0.05質量%以下又更佳,0.04質量%以下再又更佳,0.03質量%以下又再更佳,0.02質量%以下又更佳。又,該hBN粉末中的碳之含量,可以實施例中所載之方法測定。 The content of carbon in the hBN powder of the present invention is preferably 0.5% by mass or less, more preferably 0.2% by mass or less, even more preferably 0.1% by mass or less, and 0.05% by mass, from the viewpoint of improving thermal conductivity and electrical insulating properties. Further preferably, it is more preferably 0.04% by mass or less, more preferably 0.03% by mass or less, and even more preferably 0.02% by mass or less. Further, the content of carbon in the hBN powder can be measured by the method described in the examples.

<表面處理> <surface treatment>

本發明之hBN粉末,在分散於樹脂成分中以製造樹脂組成物及樹脂薄片時,為了增加相對於樹脂成分的分散性、提高加工性等目的,視其需要,亦可使用各種偶合劑等實施表面處理。 When the resin composition and the resin sheet are produced by dispersing in the resin component, the hBN powder of the present invention may be used in various dispersing agents, for the purpose of increasing the dispersibility with respect to the resin component and improving the workability. Surface treatment.

(偶合劑) (coupling agent)

偶合劑方面之例,可舉如:矽烷系、鈦酸鹽系、鋁系等,其中由效果之點言之,以矽烷系偶合劑較佳。矽烷系偶合劑方面,特別以使用:γ-胺基丙基三甲氧基矽烷、γ-胺基丙基三乙氧基矽烷、γ-(2-胺基乙基)胺基丙基三甲氧基矽烷、γ-(2-胺基乙基)胺基丙基三乙氧基矽烷、γ-苯胺基丙基三甲氧基矽烷、γ-苯胺基丙基三乙氧基矽烷、N-β-(N-乙烯基苯甲基胺基乙基)-γ-胺基丙基三甲氧基矽烷及N-β-(N-乙烯基苯甲基胺基乙基)-γ-胺基丙基三乙氧基矽烷等胺基矽烷化合物為佳。 Examples of the coupling agent include a decane system, a titanate system, and an aluminum system. Among them, a decane coupling agent is preferred from the viewpoint of the effect. In the case of decane coupling agents, in particular: γ-aminopropyltrimethoxydecane, γ-aminopropyltriethoxydecane, γ-(2-aminoethyl)aminopropyltrimethoxy Decane, γ-(2-aminoethyl)aminopropyltriethoxydecane, γ-anilinopropyltrimethoxydecane, γ-anilinopropyltriethoxydecane, N-β-( N-vinylbenzylaminoethyl)-γ-aminopropyltrimethoxydecane and N-β-(N-vinylbenzylaminoethyl)-γ-aminopropyltriethyl An aminodecane compound such as oxydecane is preferred.

[六方晶氮化硼粉末之製造方法] [Manufacturing method of hexagonal crystal boron nitride powder]

本發明之六方晶氮化硼粉末(hBN粉末),以具有將包含氮化硼20~90質量%及氧化硼10~80質量%的粗製六方晶氮化硼粉末100質量份、以碳換算3~15質量份之碳源與0.01~1質量份之鈣化合物混合且成形之後於包含氮氣的環境下燒成之燒成步驟之製造六方晶氮化硼粉末的方法製得為佳。 The hexagonal boron nitride powder (hBN powder) of the present invention has 100 parts by mass of a crude hexagonal boron nitride powder containing 20 to 90% by mass of boron nitride and 10 to 80% by mass of boron oxide in terms of carbon. A method of producing a hexagonal boron nitride powder by mixing a carbon source of 15 parts by mass with 0.01 to 1 part by mass of a calcium compound and forming it in a firing step in a nitrogen-containing atmosphere is preferably carried out.

而且,本發明之hBN粉末,以在上述燒成步驟後,再實施粉碎及分級之至少1種以製得hBN粉末為佳,實施粉碎及分級之雙方以製得hBN粉末更佳。 Further, in the hBN powder of the present invention, it is preferable to further prepare the hBN powder by performing at least one of pulverization and classification after the calcination step, and it is more preferable to obtain both of the pulverization and the classification to obtain the hBN powder.

接著首先,說明該製造方法中所使用的原料,即對粗製六方晶氮化硼粉末及碳源加以說明,其次,再對混合、成形、燒成、粉碎及分級的各步驟加以說明。 Next, the raw materials used in the production method, that is, the raw hexagonal boron nitride powder and the carbon source will be described, and then, the steps of mixing, forming, baking, pulverizing, and classifying will be described.

(粗製六方晶氮化硼粉末) (crude hexagonal boron nitride powder)

上述製造方法中所使用之粗製六方晶氮化硼粉末(粗製hBN粉末),含有氮化硼20~90質量%及氧化硼10~80質量%。該含多量之氧化硼的粗製hBN粉末,可依後述容易地製造。而且,在上述之製造方法中,由於該類粗製hBN粉末,並未實施燒成等高純度化處理而直接作為原料使用,因此使生產效率高。 The crude hexagonal boron nitride powder (crude hBN powder) used in the above production method contains 20 to 90% by mass of boron nitride and 10 to 80% by mass of boron oxide. The crude hBN powder containing a large amount of boron oxide can be easily produced as described later. Further, in the above-described production method, since the crude hBN powder is not directly subjected to high-purification treatment such as baking and is directly used as a raw material, the production efficiency is high.

又,粗製hBN粉末中之氧化硼的含量,可以實施例中所載之方法測定。同時,粗製hBN粉末中氮化硼的含量之測定,可以自全質量減去氧化硼的含量來進行。氧化硼的含量之計算法已記載於實施例中。 Further, the content of boron oxide in the crude hBN powder can be measured by the method described in the examples. Meanwhile, the determination of the content of boron nitride in the crude hBN powder can be carried out by subtracting the content of boron oxide from the total mass. The calculation method of the content of boron oxide has been described in the examples.

在氮化硼的含量在20質量%以上時,可使用該粗製hBN粉末為原料高效率地製造hBN粉末。在氮化硼的含量在90質量%以下時,可高效率地製造原料的粗製hBN粉末。因此由該觀點言之,粗製hBN粉末中之氮化硼的含量,以45質量%以上為佳,50質量%以上更佳,55質量%以上再更佳,60質量%以上又更佳;而且,以85質量%以下為佳,80質量%以下更佳,75質量%以下再更佳,70質量%以下又更佳;同時,以45~85質量%為佳,50~80質量%更佳,55~75質量%再更佳,60~70質量%又更佳。 When the content of boron nitride is 20% by mass or more, the hBN powder can be efficiently produced using the crude hBN powder as a raw material. When the content of boron nitride is 90% by mass or less, the crude hBN powder of the raw material can be efficiently produced. Therefore, from this viewpoint, the content of boron nitride in the crude hBN powder is preferably 45 mass% or more, more preferably 50 mass% or more, more preferably 55 mass% or more, and still more preferably 60 mass% or more; It is preferably 85 mass% or less, more preferably 80 mass% or less, more preferably 75 mass% or less, and more preferably 70 mass% or less; and 45 to 85 mass%, preferably 50 to 80 mass%. 55~75% by mass is better, and 60~70% by mass is better.

又,在氧化硼的含量為10質量%以上時,可高效率 地製造原料的粗製hBN粉末。在氧化硼的含量在80質量%以下時,可使用該粗製hBN粉末為原料高效率地製造hBN粉末。因此由該觀點言之,粗製hBN粉末中之氧化硼的含量,以15質量%以上為佳,20質量%以上更佳,25質量%以上再更佳,30質量%以上又更佳;而且,以55質量%以下為佳,50質量%以下更佳,45質量%以下再更佳,40質量%以下又更佳;同時,以15~55質量%為佳,20~50質量%更佳,25~45質量%再更佳,30~40質量%又更佳。 Moreover, when the content of boron oxide is 10% by mass or more, high efficiency is achieved. The crude hBN powder of the raw material was produced. When the content of boron oxide is 80% by mass or less, the hBN powder can be efficiently produced using the crude hBN powder as a raw material. Therefore, from the viewpoint of the above, the content of boron oxide in the crude hBN powder is preferably 15% by mass or more, more preferably 20% by mass or more, more preferably 25% by mass or more, and still more preferably 30% by mass or more; moreover, It is preferably 55 mass% or less, more preferably 50 mass% or less, more preferably 45 mass% or less, more preferably 40 mass% or less, and preferably 15 to 55 mass%, more preferably 20 to 50 mass%. 25~45% by mass is better, and 30~40% by mass is better.

再者,在粗製hBN粉末中,氮化硼及氧化硼的合計之含量,以90質量%以上為佳,95質量%以上更佳,99質量%以上再更佳,100質量%以上又更佳。 Further, in the crude hBN powder, the total content of boron nitride and boron oxide is preferably 90% by mass or more, more preferably 95% by mass or more, more preferably 99% by mass or more, and still more preferably 100% by mass or more. .

粗製hBN粉末,在不抑阻本發明之效果的範圍內,亦可再含其他的成分,在粗製hBN粉末中,其他成分之含量,以10質量%以下為佳,5質量%以下更佳,1質量%以下再更佳,不含其他成分又更佳。 The crude hBN powder may further contain other components within the range of not inhibiting the effects of the present invention. In the crude hBN powder, the content of the other components is preferably 10% by mass or less, more preferably 5% by mass or less. 1% by mass or less is more preferable, and other ingredients are not preferred.

<粗製六方晶氮化硼粉末的製造方法> <Method for Producing Crude Hexagonal Boron Nitride Powder>

前述粗製hBN粉末,可適當地以含氧及硼之化合物以及含胺基之化合物混合,在成形後,再經過加熱、粉碎,即可製得。 The crude hBN powder may be suitably mixed with a compound containing oxygen and boron and an amine group-containing compound, and after heating, pulverized, it can be obtained.

因此首先,對該製造方法中所使用的原料,即含氧及硼之化合物以及含胺基之化合物加以說明,其次,再對混合、成形、加熱及粉碎的各步驟加以說明。 Therefore, first, the raw materials used in the production method, that is, the compound containing oxygen and boron, and the compound containing an amine group will be described. Next, each step of mixing, molding, heating, and pulverization will be described.

(含氧及硼之化合物) (compounds containing oxygen and boron)

含氧及硼之化合物方面,可舉如:正硼酸(H3BO3)、偏硼酸(HBO2)、四硼酸(H2B4O7)、去水硼酸(B2O3)等,通式(B2O3)‧(H2O)X[其中,X=0~3]所示之化合物的一種或二種以上。其中正硼酸容易取得且與三聚氰胺等含胺基之化合物的混合性亦優良而較佳。 Examples of the compound containing oxygen and boron include orthoboric acid (H 3 BO 3 ), metaboric acid (HBO 2 ), tetraboric acid (H 2 B 4 O 7 ), and dehydroboric acid (B 2 O 3 ). One or two or more compounds of the formula (B 2 O 3 )‧(H 2 O) X [wherein, X = 0 to 3]. Among them, orthoboric acid is easily obtained and is excellent in miscibility with an amine group-containing compound such as melamine.

含氧及硼之化合物的純度,以90質量%以上為佳,95質量%以上更佳,99質量%以上再更佳,100質量%以上又更佳。 The purity of the compound containing oxygen and boron is preferably 90% by mass or more, more preferably 95% by mass or more, still more preferably 99% by mass or more, and still more preferably 100% by mass or more.

(含胺基之化合物) (amine-containing compound)

含胺基之化合物方面之例,可舉如:胺基三嗪化合物、胍化合物、尿素等。胺基三嗪化合物方面之例,可舉如:三聚氰胺、三聚氰二胺、苯并三聚氰二胺、及該些之縮合物之蜜白胺、蜜勒胺、三聚二氰亞胺等。 Examples of the amine group-containing compound include an aminotriazine compound, an anthraquinone compound, and urea. Examples of the aminotriazine compound include melamine, melamine, benzocyanamide, and melamines, melem, and melamine of these condensates. Wait.

此類化合物中,又以三聚氰胺、胍等之類,在胺基及胺基以外之部位各含有氮原子的化合物較佳。 Among such compounds, a compound containing a nitrogen atom at a site other than the amine group and the amine group, such as melamine, hydrazine or the like, is preferred.

含胺基之化合物的純度,以90質量%以上為佳,95質量%以上更佳,99質量%以上再更佳,100質量%以上又更佳。 The purity of the amine group-containing compound is preferably 90% by mass or more, more preferably 95% by mass or more, still more preferably 99% by mass or more, and still more preferably 100% by mass or more.

(混合) (mixing)

首先,係將上述含氧及硼之化合物與含胺基之化合物 混合。 First, the above oxygen-containing and boron-containing compounds and amine-containing compounds are mixing.

其混合方法並無特別之限定,可以濕式混合及乾式混合之任意者為之,但以濕式混合較佳。以濕式混合進行,可先形成前驅物。例如,在以硼酸或去水硼酸與三聚氰胺混合者再加入水時,可製得如C3N3(NH2‧H3BO3)3之分子式所示之前驅物。濕式混合,可使用Henschel混合機、球磨機、帶混合機等一般之混合機操作。 The mixing method is not particularly limited, and any of wet mixing and dry mixing may be employed, but wet mixing is preferred. In the wet mixing, the precursor can be formed first. For example, when water is further added with boric acid or dehydrated boric acid mixed with melamine, a precursor such as a molecular formula of C 3 N 3 (NH 2 ‧H 3 BO 3 ) 3 can be obtained. Wet mixing can be carried out using a Henschel mixer, a ball mill, a general mixer with a mixer, and the like.

含氧及硼之化合物與含胺基之化合物的調配比率,係含氧及硼之化合物中的硼原子(B)與含胺基之化合物中的氮原子(N)之原子比(B/N),以1/3~2/1之比率較佳。在B/N原子比為1/3以上時,由於可防止或抑制餘留在水存在下無法形成前驅物的含胺基之化合物,因此可防止或抑制燒成中碳化之氮化硼成為黑色或褐色化。同時,至B/N原子比為2/1以下,硼原子越多越可製得結晶性高之hBN。 The ratio of the compound containing oxygen and boron to the compound containing an amine group is the atomic ratio of the boron atom (B) in the compound containing oxygen and boron to the nitrogen atom (N) in the compound containing an amine group (B/N) ), preferably in a ratio of 1/3 to 2/1. When the atomic ratio of B/N is 1/3 or more, since the amine group-containing compound which cannot form a precursor in the presence of water can be prevented or suppressed, it is possible to prevent or suppress the carbonization of boron nitride in the firing to become black. Or brown. Meanwhile, the atomic ratio to B/N is 2/1 or less, and the more boron atoms, the higher the crystallinity of hBN.

在含胺基之化合物係使用三聚氰胺時,三聚氰胺之調配量相對於含氧及硼之化合物100質量份,由上述觀點言之,以30~65質量份為佳,35~60質量份更佳,40~55質量份再更佳,45~50質量份又更佳。 When melamine is used as the amine group-containing compound, the amount of melamine is preferably 100 to 65 parts by mass, and more preferably 35 to 60 parts by mass, based on 100 parts by mass of the compound containing oxygen and boron. 40 to 55 parts by mass is better, and 45 to 50 parts by mass is better.

(成形) (forming)

其次,較佳可將上述混合所製得之含前驅物的混合物成形。 Secondly, it is preferred to form the precursor-containing mixture obtained by the above mixing.

將含該前驅物之混合物成形為成形體,可增加混合物 的體積密度,而可在一定容量之加熱裝置中裝填大量的混合物,因此可提高生產性。而且,經由成形增加體積密度可提高熱傳導性,因此可急速地昇溫,並同時均一地加熱混合物。並且,由混合物加熱分解所產生之氣體,亦可容易地由成形體彼此之間的空隙釋放,因此可防止混合物噴起及飛散。同時,成形亦可使體積密度提高,而使去水硼酸長時間餘留在高溫下,因此可促進hBN的結晶成長。該成形,以操作為可使所獲得之成形體密度為0.6~0.8g/cm3左右為佳。 Forming the mixture containing the precursor into a shaped body increases the bulk density of the mixture, and a large amount of the mixture can be charged in a heating device of a certain capacity, thereby improving productivity. Moreover, the thermal conductivity can be improved by increasing the bulk density by molding, so that the temperature can be rapidly increased while uniformly heating the mixture. Further, the gas generated by the decomposition and decomposition of the mixture can be easily released from the gap between the molded bodies, so that the mixture can be prevented from being sprayed and scattered. At the same time, the forming can also increase the bulk density, and the dehydrated boric acid remains at a high temperature for a long time, thereby promoting the crystal growth of hBN. This molding is preferably carried out so that the obtained molded body density is preferably about 0.6 to 0.8 g/cm 3 .

(加熱) (heating)

其次,可將上述成形所獲得之成形體加熱。經由該加熱,可使成形體中含氧及硼之化合物與含胺基之氮化合物反應,生成hBN。 Next, the formed body obtained by the above molding can be heated. By this heating, a compound containing oxygen and boron in the molded body can be reacted with an amine compound-containing nitrogen compound to form hBN.

加熱時之氣體,係氨氣或非氧化性氣體。非氧化性氣體方面,以氮氣氣體、或氬氣等惰性氣體較佳。其中,氨氣氣體更佳。 The gas when heated is ammonia or a non-oxidizing gas. As the non-oxidizing gas, an inert gas such as nitrogen gas or argon gas is preferred. Among them, ammonia gas is better.

加熱溫度,由提高反應性及粉碎之容易性的觀點言之,以800~1400℃為佳,900~1350℃更佳,1000~1300℃再更佳,1050~1200℃又更佳。 The heating temperature is preferably from 800 to 1400 ° C, more preferably from 900 to 1,350 ° C, more preferably from 1,000 to 1,300 ° C, and more preferably from 1,050 to 1,200 ° C, from the viewpoint of improving reactivity and ease of pulverization.

(粉碎) (crush)

其次,將加熱所獲得之生成物,經過粉碎,即可製得粗製hBN粉末。 Next, the obtained product obtained by heating is pulverized to obtain a crude hBN powder.

粉碎的方法並無特別之限定,可採用顎式粉碎、粗輥粉碎等。 The method of pulverization is not particularly limited, and smashing, coarse pulverization, or the like can be employed.

<六方晶氮化硼粉末的製造方法> <Method for Producing Hexagonal Boron Nitride Powder>

本發明之六方晶氮化硼粉末(hBN粉末)的製造方法,係相對於前述的粗製hBN粉末100質量份,以碳換算3~15質量份的後述之碳源與0.01~1質量份的後述之鈣(Ca)化合物混合。 The method for producing the hexagonal boron nitride powder (hBN powder) of the present invention is a carbon source and a 0.01 to 1 part by mass of 3 to 15 parts by mass in terms of carbon, based on 100 parts by mass of the above-mentioned crude hBN powder. The calcium (Ca) compound is mixed.

在碳源為碳換算3質量份以上時,可促進一次粒子的粒子成長,並同時促進氧化硼的氮化而提高聚集體之結晶性,因此可提高聚集體的崩解強度。在碳源為碳換算15質量份以下時,可防止未反應之碳成分以異物即黑色異物餘留,而提高白色度及電絕緣性。 When the carbon source is 3 parts by mass or more in terms of carbon, the growth of the particles of the primary particles can be promoted, and the nitridation of the boron oxide can be promoted to improve the crystallinity of the aggregate, so that the disintegration strength of the aggregate can be improved. When the carbon source is 15 parts by mass or less in terms of carbon, it is possible to prevent the unreacted carbon component from remaining as a foreign matter, that is, a black foreign matter, thereby improving whiteness and electrical insulation.

由該觀點言之,相對於粗製hBN粉末100質量份,碳源的調配量,以碳換算,可為3~15質量份,4~14質量份更佳,5~13質量份再更佳,6~12質量份又更佳,8~10質量份再又更佳。 From this point of view, the amount of the carbon source can be 3 to 15 parts by mass, more preferably 4 to 14 parts by mass, and more preferably 5 to 13 parts by mass, based on 100 parts by mass of the crude hBN powder. 6~12 parts by mass is better, and 8~10 parts by mass is better.

而且,在Ca化合物為1質量份以下時,可在保持高純度之下,促進一次粒子的粒子成長,因此可提高結晶性。 In addition, when the amount of the Ca compound is 1 part by mass or less, the growth of the particles of the primary particles can be promoted while maintaining high purity, so that the crystallinity can be improved.

由該觀點言之,相對於粗製hBN粉末100質量份,Ca化合物的調配量,可為0.01~1質量份,0.05~0.8質量份更佳,0.1~0.6質量份再更佳,0.2~0.5質量份又更佳,0.3~0.45質量份再又更佳。 From this point of view, the compounding amount of the Ca compound may be 0.01 to 1 part by mass, more preferably 0.05 to 0.8 part by mass, more preferably 0.1 to 0.6 part by mass, and more preferably 0.2 to 0.5 mass, based on 100 parts by mass of the crude hBN powder. The portion is even better, and the 0.3 to 0.45 parts by mass is even better.

(碳源) (carbon source)

本發明之六方晶氮化硼粉末(hBN粉末)的製造方法中所使用之碳源,係碳或含碳化合物。本發明中所使用的碳源方面,在石墨之外,可舉如:碳黑、碳化硼、糖類、三聚氰胺、酚樹脂等,而以選自石墨及碳化硼之1種或2種較佳。而且,碳源,由熱傳導性的觀點言之,以併用石墨及碳化硼較佳;由電絕緣性的觀點言之,以石墨較佳。 The carbon source used in the method for producing a hexagonal boron nitride powder (hBN powder) of the present invention is carbon or a carbon-containing compound. The carbon source used in the present invention may be, in addition to graphite, carbon black, boron carbide, saccharide, melamine, phenol resin or the like, and one or two selected from the group consisting of graphite and boron carbide. Further, the carbon source is preferably a combination of graphite and boron carbide from the viewpoint of thermal conductivity, and graphite is preferred from the viewpoint of electrical insulation.

碳源中的碳之含量,以90質量%以上為佳,95質量%以上更佳,99質量%以上再更佳,100質量%以上又更佳。 The content of carbon in the carbon source is preferably 90% by mass or more, more preferably 95% by mass or more, still more preferably 99% by mass or more, and still more preferably 100% by mass or more.

(碳化硼) (boron carbide)

本發明之hBN粉末的製造方法中,碳源,由熱傳導性的觀點言之,以含碳化硼(以下,亦稱為「B4C」。)較佳。相對於粗製hBN粉末100質量份,碳源的碳化硼之調配量,碳換算以0.01~14.8質量份為佳,0.01~12質量份更佳,0.01~10質量份再更佳,0.05~8質量份又更佳,0.1~6質量份再又更佳,0.5~5質量份又再更佳,1~3質量份又更佳。 In the method for producing the hBN powder of the present invention, the carbon source is preferably made of boron carbide (hereinafter also referred to as "B 4 C") from the viewpoint of thermal conductivity. With respect to 100 parts by mass of the crude hBN powder, the amount of boron carbide of the carbon source is preferably 0.01 to 14.8 parts by mass, more preferably 0.01 to 12 parts by mass, more preferably 0.01 to 10 parts by mass, and 0.05 to 8 parts by mass. The portion is even better, 0.1 to 6 parts by mass is better, 0.5 to 5 parts by mass is better, and 1 to 3 parts by mass is better.

如此,可促進hBN一次粒子向厚度方向之粒子成長,亦有助於高結晶化,因此可控制hBN粒子的配向,利於高熱傳導率化。而且,由於以碳化硼結晶內的碳作為起點進行氮化硼的生成,因此認為可製造出維持為碳化硼 粒子之形態的hBN粉末,而較在碳源方面單使用石墨時由石墨表面上所生成之結晶核經由溶解沉澱所成長之hBN粉末,可使hBN一次粒子的厚度更厚。因此,在有機基體中填充hBN粉末以製造樹脂組成物及樹脂薄片時或在使用該樹脂薄片時可維持為顆粒形狀,防止或抑制崩解。 In this way, the growth of the particles of the hBN primary particles in the thickness direction can be promoted, and the crystallization can be promoted. Therefore, the alignment of the hBN particles can be controlled, which contributes to high thermal conductivity. Further, since boron is generated by using carbon in the boron carbide crystal as a starting point, it is considered that the boron carbide can be produced and maintained. The hBN powder in the form of particles, and the hBN powder grown by dissolution precipitation from the crystal nucleus formed on the graphite surface when graphite is used alone, can make the thickness of the hBN primary particles thicker. Therefore, when the organic matrix is filled with the hBN powder to produce the resin composition and the resin sheet or when the resin sheet is used, it can be maintained in a particle shape to prevent or suppress disintegration.

又,在碳源方面併用石墨及碳化硼,較單使用碳化硼時,可縮短燒成時間,且,減少起因於碳化硼的黑色異物數目。 Further, when graphite and boron carbide are used in combination with the carbon source, when the boron carbide is used alone, the firing time can be shortened, and the number of black foreign matter caused by the boron carbide can be reduced.

碳化硼中之碳化硼的含量,以90質量%以上為佳,95質量%以上更佳,99質量%以上再更佳,100質量%以上又更佳。 The content of boron carbide in the boron carbide is preferably 90% by mass or more, more preferably 95% by mass or more, still more preferably 99% by mass or more, and still more preferably 100% by mass or more.

同時,在併用石墨及碳化硼時(碳化硼/碳源)的質量比,以碳換算為0.003~0.99為佳,0.015~0.8更佳,0.02~0.6再更佳,0.085~0.4又更佳,0.15~0.3再又更佳。 At the same time, when the graphite and boron carbide are used together (boron carbide/carbon source), the mass ratio is preferably 0.003 to 0.99 in terms of carbon, preferably 0.015 to 0.8, more preferably 0.02 to 0.6, and even more preferably 0.085 to 0.4. 0.15~0.3 is even better.

(Ca化合物) (Ca compound)

本發明之hBN粉末的製造方法中所使用之鈣化合物(以下,亦稱為「Ca化合物」。)方面,在碳酸鈣之外,可舉如:氧化鈣、氟化鈣、氯化鈣,而以碳酸鈣較佳。 In the calcium compound (hereinafter also referred to as "Ca compound") used in the method for producing the hBN powder of the present invention, in addition to calcium carbonate, calcium oxide, calcium fluoride, and calcium chloride may be mentioned. Calcium carbonate is preferred.

Ca化合物中之碳酸鈣的含量,以90質量%以上為佳,95質量%以上更佳,99質量%以上再更佳,100質量%以上又更佳。 The content of the calcium carbonate in the Ca compound is preferably 90% by mass or more, more preferably 95% by mass or more, still more preferably 99% by mass or more, and still more preferably 100% by mass or more.

(混合) (mixing)

混合的方法並無特別之限定,濕式混合及乾式混合之任意者均可,而以濕式混合較佳。濕式混合,可使用Henschel混合機、球磨機、帶混合機等一般之混合機操作。 The method of mixing is not particularly limited, and any of wet mixing and dry mixing may be used, and wet mixing is preferred. Wet mixing can be carried out using a Henschel mixer, a ball mill, a general mixer with a mixer, and the like.

而且,在混合時,亦可添加黏結劑後再混合。該黏結劑方面,並無特別之限定,可舉如:聚乙烯醇(PVA)、纖維素、聚二氟亞乙烯(PVDF)等樹脂,而以使用聚乙烯醇較佳。 Moreover, when mixing, a binder may be added and then mixed. The binder is not particularly limited, and examples thereof include resins such as polyvinyl alcohol (PVA), cellulose, and polyvinylidene fluoride (PVDF), and polyvinyl alcohol is preferably used.

黏結劑,以使用以此類樹脂溶於水中之黏結劑水溶液較佳。該黏結劑水溶液中之樹脂的含量,以1~10質量%為佳,1~5質量%更佳,1~4質量%又更佳。相對於粗製hBN粉末100質量份,混合的黏結劑水溶液,以1~20質量份為佳,5~15質量份更佳,8~12質量份再更佳。 The binder is preferably an aqueous solution of a binder in which such a resin is dissolved in water. The content of the resin in the aqueous solution of the binder is preferably from 1 to 10% by mass, more preferably from 1 to 5% by mass, even more preferably from 1 to 4% by mass. The mixed aqueous solution of the binder is preferably 1 to 20 parts by mass, more preferably 5 to 15 parts by mass, even more preferably 8 to 12 parts by mass, based on 100 parts by mass of the crude hBN powder.

又,在如此而添加黏結劑混合時,亦換算黏結劑為上述之碳源。 Further, when the binder is added in this manner, the binder is also converted into the above carbon source.

(成形) (forming)

其次,再將上述混合所製得之混合物成形為適當之形狀。 Next, the mixture obtained by the above mixing is further shaped into an appropriate shape.

該成形,由hBN一次粒子聚集所形成的聚集體之強度之提高、生產性、處理容易度、反應性的觀點言之,以操作使成形後之密度,為0.5g/cm3以上為佳,0.8g/cm3以上更佳,1g/cm3以上再更佳,而且,以2g/cm3以下為 佳,1.8g/cm3以下更佳,1.5g/cm3以下再更佳。 In the molding, the strength of the aggregate formed by the aggregation of the primary particles of hBN, the productivity, the easiness of handling, and the reactivity are considered to be 0.5 g/cm 3 or more. It is more preferably 0.8 g/cm 3 or more, more preferably 1 g/cm 3 or more, more preferably 2 g/cm 3 or less, still more preferably 1.8 g/cm 3 or less, and still more preferably 1.5 g/cm 3 or less.

(燒成) (burning)

本發明之hBN粉末的製造方法,亦包含將上述成形所獲得之成形體燒成的燒成步驟。將粗製hBN粉末加壓成形為成形體後再加以燒成,可使成形體中在粗製hBN粉末中所含之氧化硼與碳源中所含之碳反應,而生成壓縮崩解強度高的六方晶氮化硼(hBN)聚集體,獲得本發明之hBN粉末。再者,在不加以成形而進行燒成時,則難以充分地製造高崩解強度的hBN聚集體。 The method for producing the hBN powder of the present invention also includes a baking step of firing the formed body obtained by the above molding. The crude hBN powder is press-formed into a molded body and then fired, whereby the boron oxide contained in the crude hBN powder in the molded body is reacted with carbon contained in the carbon source to form a hexagonal compound having high compressive and disintegrating strength. A boron nitride (hBN) aggregate is obtained to obtain the hBN powder of the present invention. Further, when firing is performed without being formed, it is difficult to sufficiently produce a hBN aggregate having high disintegration strength.

燒成時的氣體,為含氮氣之氣體。含氮氣之氣體中,氮氣之濃度,以60體積%以上為佳,80體積%以上更佳,90體積%以上再更佳,99體積%以上又更佳。而以氧氣少之情形較佳。 The gas at the time of firing is a gas containing nitrogen. In the nitrogen-containing gas, the concentration of nitrogen gas is preferably 60% by volume or more, more preferably 80% by volume or more, more preferably 90% by volume or more, and still more preferably 99% by volume or more. It is better to use less oxygen.

燒成的溫度,以1000~2200℃為佳。在燒成溫度為1000℃以上時可充分進行還原氮化反應。而且在2200℃以下則可防止hBN發生分解。因此由該觀點言之,燒成溫度,以1500~2200℃為佳,1600~2200℃更佳,1700~2200℃再更佳,1730~2190℃又更佳。 The firing temperature is preferably from 1000 to 2200 °C. When the firing temperature is 1000 ° C or higher, the reduction nitridation reaction can be sufficiently performed. Moreover, below 2200 ° C, the decomposition of hBN can be prevented. Therefore, from this point of view, the firing temperature is preferably 1500 to 2200 ° C, more preferably 1600 to 2200 ° C, more preferably 1700 to 2200 ° C, and more preferably 1730 to 2190 ° C.

燒成的時間,以1~20小時為佳。在燒成時間為1小時以上時可進行充分的還原氮化反應,而可防止未反應之碳成分餘留為黑色物。而在20小時以下時,則可降低燒成之成本。由該觀點言之,以1~15小時為佳,5~10小時更佳,6~9小時再更佳,6~7小時又更佳。 The firing time is preferably 1 to 20 hours. When the firing time is 1 hour or longer, a sufficient reduction nitridation reaction can be performed, and the unreacted carbon component can be prevented from remaining as a black substance. When it is less than 20 hours, the cost of firing can be reduced. From this point of view, it is better to use 1 to 15 hours, 5 to 10 hours is better, 6 to 9 hours is better, and 6 to 7 hours is better.

又,燒成前亦可進行乾燥。乾燥的溫度,以150~400℃為佳,200~400℃更佳;乾燥的時間,以6~8小時為佳。 Moreover, it can also be dried before baking. The drying temperature is preferably 150 to 400 ° C, more preferably 200 to 400 ° C; and the drying time is preferably 6 to 8 hours.

(粉碎) (crush)

其次,經過燒成所獲得之生成物,以再加以粉碎為佳。 Next, it is preferred that the product obtained by firing is further pulverized.

粉碎的方法並無特別之限定,可採用顎式粉碎、粗輥粉碎等。 The method of pulverization is not particularly limited, and smashing, coarse pulverization, or the like can be employed.

(分級) (grading)

其次,在上述燒成步驟之後,以將經過粉碎所獲得之粉碎物,再加以分級為佳。 Next, after the above-described baking step, it is preferred to further classify the pulverized material obtained by the pulverization.

分級的方法並無特別之限定,可以振動篩裝置、氣流分級、水篩、離心分離等加以分級。其中,以經由振動篩裝置分級較佳。使用振動篩裝置時,可使用乾式振動篩裝置[晃榮產業公司製造,商品名「佐藤式振動篩分機」],再使用孔徑106μm之篩網以分級時間60分鐘之條件加以分級為佳。 The method of classification is not particularly limited, and it can be classified by a vibrating sieve device, a gas flow classification, a water sieve, a centrifugal separation, or the like. Among them, it is preferred to classify via a vibrating screen device. When the vibrating screen device is used, a dry vibrating screen device [manufactured by Akira Sangyo Co., Ltd., trade name "Sato Vibrating Screening Machine") can be used, and it is preferably classified by using a sieve having a pore size of 106 μm in a classification time of 60 minutes.

(hBN粉末的混合) (mixing of hBN powder)

而且,本發明之hBN粉末的製造方法,由提高熱傳導性及電絕緣性的觀點言之,以再包含將上述中所獲得之六方晶氮化硼粉末使用孔徑106μm之篩、孔徑45μm之篩 及振動篩裝置,分級為45~106μm之hBN粉末(以下,亦稱為「hBN粉末(A)」。)與45μm篩下之hBN粉末(以下,亦稱為「hBN粉末(B)」。)之後,將hBN粉末(A)與hBN粉末(B),混合為相對於hBN粉末(A)及(B)的合計量之hBN粉末(A)的比率(以下,亦稱為顆粒率(質量%)=[(A)/[(A)+(B)]]。)為40~90質量%之混合步驟較佳。 Further, the method for producing the hBN powder of the present invention has a viewpoint of improving thermal conductivity and electrical insulating properties, and further comprises using a sieve having a pore size of 106 μm and a sieve having a pore diameter of 45 μm as the hexagonal boron nitride powder obtained in the above. And a vibrating screen device, hBN powder of 45 to 106 μm (hereinafter also referred to as "hBN powder (A)") and hBN powder under 45 μm sieve (hereinafter also referred to as "hBN powder (B)"). Thereafter, the hBN powder (A) and the hBN powder (B) are mixed as a ratio of the hBN powder (A) to the total amount of the hBN powders (A) and (B) (hereinafter, also referred to as the particle ratio (% by mass) ) = [(A) / [(A) + (B)]].) A mixing step of 40 to 90% by mass is preferred.

混合的方法,並無特別之限定,濕式混合及乾式混合之任意者均可,而以乾式混合較佳。乾式混合,可使用Henschel混合機、球磨機、帶混合機、及V型混合機等一般之混合機操作,而由均一地混合hBN粉末的觀點言之以V型混合機較佳。混合的時間,以20~90分鐘為佳,50~70分鐘更佳。 The method of mixing is not particularly limited, and any of wet mixing and dry mixing may be used, and dry mixing is preferred. The dry mixing can be carried out using a general mixer such as a Henschel mixer, a ball mill, a mixer, and a V-type mixer, and a V-type mixer is preferable from the viewpoint of uniformly mixing the hBN powder. The mixing time is preferably 20 to 90 minutes, and 50 to 70 minutes is better.

hBN粉末(A)以減壓抽氣型篩分機(噴氣篩)所獲得之孔徑106μm篩上的粉末,含有率以5~20質量%為佳,10~18質量%更佳,14~17質量%再更佳。同時,hBN粉末(B)以減壓抽氣型篩分機(噴氣篩)所獲得之孔徑45μm篩上的粉末,含有率以1~20質量%為佳,1~10質量%更佳,4~8質量%再更佳,5~7質量%又更佳,又,孔徑106μm篩上的粉末之含有率及孔徑45μm篩上的粉末之含有率,可以實施例中所載的方法測定。 hBN powder (A) powder with a pore size of 106 μm obtained by a vacuum suction type sieving machine (jet screen), the content of which is preferably 5 to 20% by mass, more preferably 10 to 18% by mass, and 14 to 17 mass. % is even better. At the same time, the hBN powder (B) is a powder having a pore size of 45 μm obtained by a vacuum suction type sieving machine (jet screen), and the content is preferably 1 to 20% by mass, more preferably 1 to 10% by mass, 4~ Further, 8 mass% is more preferable, and 5 to 7 mass% is more preferable. Further, the content of the powder on the sieve having a pore size of 106 μm and the content of the powder on the sieve having a pore diameter of 45 μm can be measured by the method described in the examples.

顆粒率,由提高熱傳導性及電絕緣性的觀點言之,以40~90質量%為佳,50~85質量%更佳,55~80質量%再更佳,60~70質量%又更佳。 The particle ratio is preferably from 40 to 90% by mass, more preferably from 50 to 85% by mass, more preferably from 55 to 80% by mass, more preferably from 60 to 70% by mass, from the viewpoint of improving thermal conductivity and electrical insulation. .

[樹脂組成物] [Resin composition]

本發明之樹脂組成物,係含1~90體積%的前述六方晶氮化硼粉末(hBN粉末)。本發明樹脂組成物中的hBN粉末之含量,由樹脂組成物及該樹脂組成物成形所形成之樹脂薄片的熱傳導性及樹脂薄片的成形性之觀點言之,以10~90體積%為佳,20~80體積%更佳,30~70體積%再更佳,35~65體積%又更佳,40~60體積%再又更佳。 The resin composition of the present invention contains 1 to 90% by volume of the above-mentioned hexagonal boron nitride powder (hBN powder). The content of the hBN powder in the resin composition of the present invention is preferably from 10 to 90% by volume from the viewpoint of the thermal conductivity of the resin composition and the resin sheet formed by molding the resin composition, and the formability of the resin sheet. 20 to 80% by volume is more preferable, 30 to 70% by volume is more preferable, 35 to 65% by volume is more preferable, and 40 to 60% by volume is more preferable.

使用前述之hBN粉末,以製造樹脂組成物時,與樹脂成分性質相近,因此可使該樹脂組成物低黏度化及獲得優良之電絕緣性。 When the above-mentioned hBN powder is used to produce a resin composition, it is similar in properties to the resin component, so that the resin composition can be made low in viscosity and excellent in electrical insulation properties.

本發明中,hBN粉末之體積基準之含量(體積%),可以hBN粉末的比重及所使用之有機基體的各種樹脂的比重求出。 In the present invention, the volume-based content (% by volume) of the hBN powder can be determined from the specific gravity of the hBN powder and the specific gravity of various resins of the organic matrix to be used.

(有機基體) (organic matrix)

本發明之樹脂組成物,含有有機基體之樹脂。 The resin composition of the present invention contains a resin of an organic matrix.

本發明中所使用之樹脂方面,以含有選自:熱硬化性樹脂、熱塑性樹脂、各種橡膠、熱塑性合成橡膠、油脂等的一種以上之樹脂為佳。 The resin used in the present invention is preferably one or more resins selected from the group consisting of thermosetting resins, thermoplastic resins, various rubbers, thermoplastic elastomers, and fats and oils.

熱硬化性樹脂方面之例,可舉如:環氧樹脂、矽氧烷樹脂、酚樹脂、尿素樹脂、不飽和聚酯樹脂、三聚氰胺樹脂、聚醯亞胺樹脂、聚苯并噁唑樹脂、脲烷樹脂等。 Examples of the thermosetting resin include an epoxy resin, a decyl alkane resin, a phenol resin, a urea resin, an unsaturated polyester resin, a melamine resin, a polyimide resin, a polybenzoxazole resin, and a urea. Alkane resin and the like.

熱塑性樹脂方面之例,可舉如:聚乙烯、聚丙烯、乙烯-乙酸乙烯酯共聚物等聚烯烴樹脂;聚乙烯對苯二甲酸 酯、聚丁烯對苯二甲酸酯、液晶聚酯等聚酯樹脂;聚氯乙烯樹脂、丙烯酸樹脂、聚硫化苯樹脂、聚亞苯醚樹脂、聚醯胺樹脂、聚醯胺醯亞胺樹脂、及聚碳酸酯樹脂等。 Examples of the thermoplastic resin include polyolefin resins such as polyethylene, polypropylene, and ethylene-vinyl acetate copolymer; and polyethylene terephthalic acid; Polyester resin such as ester, polybutylene terephthalate, liquid crystal polyester; polyvinyl chloride resin, acrylic resin, polysulfurized benzene resin, polyphenylene ether resin, polyamide resin, polyamidimide Resin, polycarbonate resin, etc.

各種橡膠之例,可舉如:天然橡膠、聚異戊二烯橡膠、苯乙烯-丁二烯共聚物橡膠、聚丁二烯橡膠、乙烯-丙烯共聚物、乙烯-丙烯-二烯共聚物、丁二烯-丙烯腈共聚物、異丁烯-異戊二烯共聚物、氯丁二烯橡膠、矽氧烷橡膠、含氟橡膠、氯-碸化聚乙烯、聚胺酯橡膠等。此類橡膠,又以經過交聯後使用為佳。 Examples of various rubbers include natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, polybutadiene rubber, ethylene-propylene copolymer, ethylene-propylene-diene copolymer, Butadiene-acrylonitrile copolymer, isobutylene-isoprene copolymer, chloroprene rubber, decane rubber, fluorine rubber, chlorine-deuterated polyethylene, polyurethane rubber, and the like. Such rubbers are preferably used after cross-linking.

熱塑性合成橡膠方面之例,可舉如:烯烴系熱塑性合成橡膠、苯乙烯系熱塑性合成橡膠、氯乙烯系熱塑性合成橡膠、胺酯系熱塑性合成橡膠、酯系熱塑性合成橡膠等。 Examples of the thermoplastic elastomer include an olefin-based thermoplastic elastomer, a styrene-based thermoplastic elastomer, a vinyl chloride-based thermoplastic elastomer, an amine-ester thermoplastic elastomer, and an ester-based thermoplastic elastomer.

油脂成分方面之例,可舉如:聚矽氧烷油等潤滑脂類。 Examples of the oil and fat component include greases such as polyoxyalkylene oil.

此類有機基體,可以一種單獨使用,亦可以二種以上組合使用。 These organic substrates may be used alone or in combination of two or more.

本發明之樹脂組成物,以因應使用該樹脂組成物所獲得之熱傳導性零件材料的用途及以該樹脂組成物成形所形成之樹脂薄片等的熱傳導性零件材料之機械性強度、耐熱性、耐久性、柔軟性、撓性等所要求的特性,再含有選自以往以來使用為樹脂薄片的有機基體之各種:熱硬化性樹脂、熱塑性樹脂、各種橡膠及熱塑性合成橡膠等之中之一種以上的樹脂為佳。此類有機基體,可以一種單獨使用,亦可以二種以上組合使用,本發明中,又特別以 使用硬化性環氧樹脂、硬化性矽氧烷樹脂較佳。 The resin composition of the present invention has mechanical strength, heat resistance, and durability of a heat conductive material such as a heat conductive material obtained by using the resin composition and a resin sheet formed by molding the resin composition. The properties required for properties such as properties, flexibility, flexibility, and the like include one or more selected from the group consisting of organic resins conventionally used as resin sheets, thermosetting resins, thermoplastic resins, various rubbers, and thermoplastic elastomers. Resin is preferred. Such organic substrates may be used alone or in combination of two or more. In the present invention, It is preferred to use a curable epoxy resin or a curable siloxane resin.

該樹脂組成物中的有機基體之含量,由以該樹脂組成物成形所形成之樹脂薄片的成形性之觀點言之,以10~90體積%為佳,20~80體積%更佳,30~70體積%再更佳,35~65體積%又更佳,40~60體積%再又更佳。 The content of the organic matrix in the resin composition is preferably from 10 to 90% by volume, more preferably from 20 to 80% by volume, from the viewpoint of moldability of the resin sheet formed by molding the resin composition, 30~ 70% by volume is even better, 35 to 65 vol% is better, and 40 to 60 vol% is even better.

本發明中,有機基體的體積基準之含量(體積%),可由hBN粉末的比重及使用為有機基體的各種樹脂之比重求得。 In the present invention, the volume-based content (% by volume) of the organic matrix can be determined from the specific gravity of the hBN powder and the specific gravity of various resins using the organic matrix.

(硬化性環氧樹脂) (curable epoxy resin)

本發明之樹脂組成物,在使用為有機基體的硬化性環氧樹脂方面,由hBN粉末混合物對有機基體之分散性的觀點言之,以常溫下為液狀之環氧樹脂、及常溫下為固體狀之軟化點低之環氧樹脂較佳。 The resin composition of the present invention is based on the viewpoint of dispersibility of the organic matrix by the hBN powder mixture in terms of the use of the curable epoxy resin which is an organic matrix, and is an epoxy resin which is liquid at normal temperature and at room temperature. An epoxy resin having a low softening point in a solid state is preferred.

該環氧樹脂方面,只要為一分子中含有2個以上之環氧基的化合物即可,並無特別之限定,可自以往以來使用為環氧樹脂的一般已知之化合物中適當選擇任意者使用。該類環氧樹脂方面之例,可舉如:雙酚A型環氧樹脂、雙酚F型環氧樹脂、聚羧酸之環氧丙基醚、以環己烷衍生物環氧化所獲得之環氧樹脂等。此等物品可以一種單獨使用,亦可以二種以上組合使用。前述環氧樹脂中,由耐熱性、及作業性等的觀點言之,以雙酚A型環氧樹脂、雙酚F型環氧樹脂、以環己烷衍生物環氧化所獲得之環氧樹脂較佳。 The epoxy resin is not particularly limited as long as it is a compound containing two or more epoxy groups in one molecule, and any one of conventionally known compounds which are conventionally used as an epoxy resin can be appropriately selected and used. . Examples of such epoxy resins include bisphenol A type epoxy resin, bisphenol F type epoxy resin, polycarboxylate epoxidized propyl ether, and epoxidation of a cyclohexane derivative. Epoxy resin, etc. These items may be used alone or in combination of two or more. In the epoxy resin, an epoxy resin obtained by epoxidizing a bisphenol A type epoxy resin, a bisphenol F type epoxy resin, or a cyclohexane derivative is used from the viewpoints of heat resistance and workability. Preferably.

(環氧樹脂用硬化劑) (hardener for epoxy resin)

在使硬化性環氧樹脂硬化上,通常係使用環氧樹脂用硬化劑。該環氧樹脂用硬化劑方面,並無特別之限定,可自以往以來使用為環氧樹脂的硬化劑之物品中,適當地選擇任意者使用,可例舉如胺系、酚系、酸酐系等。胺系硬化劑方面之例,以如:雙氰胺(dicyandiamide)、及間苯二胺、4,4’-二胺基二苯基甲烷、4,4’-二胺基二苯基碸、間苯二甲胺等芳族二胺等為佳;酚系硬化劑方面之例,以如:酚酚醛清漆樹脂、甲酚酚醛清漆樹脂、雙酚A型酚醛清漆樹脂、三嗪改質酚酚醛清漆樹脂等為佳。又,酸酐系硬化劑方面之例,可舉如:甲基六氫苯二甲酸酐等脂環式酸酐,苯二甲酸酐等芳族酸酐,脂肪族二鹽基酸酐等脂肪族酸酐,氯橋酸酐等鹵素系酸酐等。 In curing the curable epoxy resin, a curing agent for an epoxy resin is usually used. The epoxy resin hardener is not particularly limited, and may be any one selected from the group consisting of hardeners for epoxy resins, and examples thereof include an amine system, a phenol system, and an acid anhydride system. Wait. Examples of the amine-based hardener are, for example, dicyandiamide, and m-phenylenediamine, 4,4'-diaminodiphenylmethane, 4,4'-diaminodiphenylanthracene, An aromatic diamine such as m-xylylenediamine or the like is preferred; examples of the phenolic hardener are, for example, a phenol novolak resin, a cresol novolak resin, a bisphenol A novolak resin, a triazine modified phenol novolac A varnish resin or the like is preferred. Further, examples of the acid anhydride-based curing agent include an alicyclic acid anhydride such as methyl hexahydrophthalic anhydride, an aromatic acid anhydride such as phthalic anhydride, an aliphatic acid anhydride such as an aliphatic dibasic acid anhydride, and a chlorine bridge. A halogen acid anhydride such as an acid anhydride.

此類硬化劑,可以一種單獨使用,亦可以二種以上組合使用。此類環氧樹脂用硬化劑的使用量,由硬化性及硬化樹脂性質之平衡等點言之,相對於前述硬化性環氧樹脂的當量比,通常可為0.5~1.5當量比左右,而以在0.7~1.3當量比之範圍選擇為佳。 These hardeners may be used alone or in combination of two or more. The amount of the curing agent for the epoxy resin is determined by the balance between the curability and the properties of the cured resin, and the equivalent ratio of the curable epoxy resin is usually about 0.5 to 1.5 equivalents. It is preferred to select a range of 0.7 to 1.3 equivalent ratio.

(環氧樹脂用硬化促進劑) (hardening accelerator for epoxy resin)

本發明之樹脂組成物中,可與環氧樹脂用硬化劑同時,視需要併用環氧樹脂用硬化促進劑。 In the resin composition of the present invention, a curing accelerator for an epoxy resin may be used in combination with a curing agent for an epoxy resin, if necessary.

該環氧樹脂用硬化促進劑方面,並無特別之限定,可 自以往以來使用為環氧樹脂的硬化促進劑者之中,適當地選擇任意者使用,其例可舉如:2-乙基-4-甲基咪唑、1-苯甲基-2-甲基咪唑、2-甲基咪唑、2-乙基咪唑、2-異丙基咪唑、2-苯基咪唑、2-苯基-4-甲基咪唑等咪唑化合物,2,4,6-三(二甲基胺基甲基)酚、三氟化硼胺錯合物、三苯基膦等。此類硬化促進劑,可以一種單獨使用,亦可以二種以上組合使用。此類環氧樹脂用硬化促進劑的使用量,由硬化促進性及硬化樹脂性質的平衡等點言之,相對於前述硬化性的環氧樹脂100質量份,通常可為0.1~10質量份左右,而以在0.4~5質量份之範圍選擇為佳。 The hardening accelerator for the epoxy resin is not particularly limited, and Among the hardening accelerators which have been conventionally used as epoxy resins, any one of them is appropriately selected, and examples thereof include 2-ethyl-4-methylimidazole and 1-benzyl-2-methyl group. Imidazole compounds such as imidazole, 2-methylimidazole, 2-ethylimidazole, 2-isopropylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, 2,4,6-tri (two Methylaminomethyl)phenol, boron trifluoride amine complex, triphenylphosphine, and the like. These hardening accelerators may be used alone or in combination of two or more. The amount of use of the curing accelerator for the epoxy resin is preferably from 0.1 to 10 parts by mass based on 100 parts by mass of the curable epoxy resin, in terms of the balance between the curing accelerator property and the cured resin property. It is preferred to select in the range of 0.4 to 5 parts by mass.

(硬化性矽氧烷樹脂) (curable rhodium oxide resin)

硬化性矽氧烷樹脂方面,可使用加成反應型矽氧烷樹脂與矽氧烷系交聯劑的混合物。加成反應型矽氧烷樹脂方面之例,可舉如選自分子中含有烯基為官能基之聚有機矽氧烷之至少一種。上述分子中含有烯基為官能基的聚有機矽氧烷方面,以如:官能基為乙烯基之聚二甲基矽氧烷、官能基為己烯基之聚二甲基矽氧烷及該些之混合物等較佳。 As the curable oxime resin, a mixture of an addition reaction type decane resin and a decane-based crosslinking agent can be used. Examples of the addition reaction type siloxane oxide include at least one selected from the group consisting of polyorganosiloxanes having an alkenyl group as a functional group in the molecule. The polyorganosiloxane having an alkenyl group as a functional group in the above molecule, such as a polydimethylsiloxane having a functional group of a vinyl group, a polydimethylsiloxane having a functional group of a hexenyl group, and the like Mixtures and the like are preferred.

矽氧烷系交聯劑方面,可為如一分子中至少含2個鍵結矽原子的氫原子之聚有機矽氧烷,具體上,可舉如:二甲基氫矽氧基末端封閉的二甲基矽氧烷-甲基氫矽氧烷共聚物、三甲基矽氧基末端封閉的二甲基矽氧烷-甲基氫矽氧烷共聚物、三甲基矽氧烷基末端封閉的聚(甲 基氫矽氧烷)、聚(氫倍半矽氧烷)等。 The oxoxane-based crosslinking agent may be a polyorganooxy oxane having at least two hydrogen atoms bonded to a ruthenium atom in a molecule, and specifically, a dimethylhydroquinone-terminated terminal is exemplified. a methyl methoxy alkane-methylhydroquinoxane copolymer, a trimethyl decyloxy terminated dimethyl methoxy oxane-methylhydroquinoxane copolymer, a trimethyl decyloxyalkyl end-blocked Poly Alkyl hydroquinone), poly(hydroperoxypropane), and the like.

又,硬化催化劑方面,通常可使用鉑系化合物。該鉑系化合物方面之例,可舉如:微粒狀鉑、吸著在碳粉末載體上之微粒狀鉑、氯化鉑酸、醇改質氯化鉑酸、氯化鉑酸之烯烴錯合物、鈀、銠催化劑等。 Further, in terms of curing the catalyst, a platinum-based compound can be usually used. Examples of the platinum compound include, for example, particulate platinum, particulate platinum adsorbed on a carbon powder carrier, chloroplatinic acid, alcohol-modified platinum chloride acid, and chloroplatinic acid olefins. Materials, palladium, rhodium catalysts, and the like.

本發明之樹脂組成物,在可獲得本發明效果之範圍下,亦可再含有其他成分。該種成分方面,可例舉如:氮化鋁、氮化矽、纖維狀氮化硼等氮化物粒子,氧化鋁、纖維狀氧化鋁、氧化鋅、氧化鎂、氧化鋇、氧化鈦等電絕緣性金屬氧化物、鑽石、富勒烯等電絕緣性碳成分,可塑劑、黏著劑、補強劑、著色劑、耐熱性提高劑、黏度調整劑、分散安定劑、及溶劑。 The resin composition of the present invention may further contain other components within the range in which the effects of the present invention can be obtained. Examples of such a component include nitride particles such as aluminum nitride, tantalum nitride, and fibrous boron nitride, and electrical insulation such as alumina, fibrous alumina, zinc oxide, magnesium oxide, cerium oxide, and titanium oxide. Electrically insulating carbon components such as metal oxides, diamonds, and fullerenes, plasticizers, adhesives, reinforcing agents, colorants, heat resistance improvers, viscosity modifiers, dispersion stabilizers, and solvents.

同時,含有本發明之六方晶氮化硼粉末的樹脂組成物中,在無損其效果之下,在上述氮化物粒子及電絕緣性金屬氧化物中所舉之例以外,亦可添加:氫氧化鋁、氫氧化鎂等無機填料,改善無機填料與基體樹脂的界面接著強度之矽烷偶合劑等表面處理劑,還原劑等。 Meanwhile, in the resin composition containing the hexagonal boron nitride powder of the present invention, in addition to the effects of the nitride particles and the electrically insulating metal oxide, it may be added: An inorganic filler such as aluminum or magnesium hydroxide, a surface treatment agent such as a decane coupling agent which improves the interface strength between the inorganic filler and the matrix resin, a reducing agent, and the like.

本發明之樹脂組成物,可使用於:熱傳導性薄片、熱傳導性膠體、熱傳導性潤滑脂、熱傳導性接著劑、相位變更薄片等之熱傳導性零件材料中。其結果,可高效地將來自於MPU及功率電晶體(power transistor)、變壓器等發熱性電子零件的熱傳導至散熱片及散熱風扇等散熱零件。 The resin composition of the present invention can be used for a thermally conductive material such as a thermally conductive sheet, a thermally conductive colloid, a thermally conductive grease, a thermally conductive adhesive, or a phase change sheet. As a result, heat from heat-generating electronic components such as MPUs, power transistors, and transformers can be efficiently conducted to heat-dissipating components such as heat sinks and cooling fans.

上述熱傳導性零件材料中,以使用在作為熱傳導性薄 片之樹脂薄片中為佳。使用前述樹脂組成物在樹脂薄片中,由提高熱傳導性及電絕緣性的觀點言之,特別可發揮其效果。 Among the above thermally conductive part materials, used as a thin thermal conductivity It is preferred that the sheet is in a resin sheet. The resin composition described above is particularly effective in improving the thermal conductivity and electrical insulating properties of the resin sheet.

[樹脂薄片] [resin sheet]

本發明之樹脂薄片,係由前述樹脂組成物或其硬化物所形成,即以前述樹脂組成物成形為薄片所形成。而在前述樹脂組成物為硬化性時,可在成形為薄片後,再予以硬化。 The resin sheet of the present invention is formed of the above-described resin composition or a cured product thereof, that is, formed by forming the resin composition into a sheet. On the other hand, when the resin composition is curable, it can be cured after being formed into a sheet.

本發明之樹脂薄片,可使用前述樹脂組成物,再如下操作製作。 The resin sheet of the present invention can be produced by the following resin composition.

首先,將本發明之hBN粉末,分散於適當之溶劑中,調製為濃度50~80質量%左右之hBN粉末懸浮液。 First, the hBN powder of the present invention is dispersed in a suitable solvent to prepare a hBN powder suspension having a concentration of about 50 to 80% by mass.

其次,再於該懸浮液中,將有機基體,以在該hBN粉末及該有機基體的總量中含該hBN粉末10~90體積%的比例之方式添加。之後以作hBN粉末的比重及使用為有機基體之樹脂的比重使成為所欲之體積%之方式,設定hBN粉末及樹脂的重量,各別秤取後加以混合,調製成樹脂組成物。 Next, in the suspension, the organic substrate is added in such a ratio that the hBN powder and the organic substrate contain 10 to 90% by volume of the hBN powder. Then, the weight of the hBN powder and the resin are set so as to have a specific gravity of the hBN powder and the specific gravity of the resin used as the organic matrix, and the weights of the hBN powder and the resin are separately weighed and mixed to prepare a resin composition.

又,樹脂組成物的調製方法方面可如下調製。 Further, the method of preparing the resin composition can be prepared as follows.

首先,將樹脂,視需要再混合硬化劑及溶劑調製成有機基體。 First, the resin is further mixed with a curing agent and a solvent to prepare an organic substrate.

其次,於該有機基體中將前述hBN粉末,以在該hBN粉末及該有機基體的總量中含該hBN粉末10~90體 積%的比例之方式添加。之後以依hBN粉末的比重及使用為有機基體之樹脂的比重使成為所欲之體積%之方式,設定hBN粉末及樹脂的重量,各別秤取後加以混合,調製成樹脂組成物。 Next, the hBN powder is contained in the organic matrix to contain the hBN powder 10 to 90 in the total amount of the hBN powder and the organic matrix. The percentage of the product is added in a way. Then, the weight of the hBN powder and the resin are set so as to be a desired volume by the specific gravity of the hBN powder and the specific gravity of the resin used as the organic matrix, and the respective components are weighed and mixed to prepare a resin composition.

有機基體之主成分方面,在使用硬化性環氧樹脂時,有機基體係該硬化性環氧樹脂、環氧樹脂用硬化劑、及視需要所使用之環氧樹脂用硬化促進劑之混合物。 In the case of using a curable epoxy resin as a main component of the organic substrate, a mixture of the curable epoxy resin, the epoxy resin hardener, and the epoxy resin hardening accelerator to be used as needed.

又,有機基體之主成分方面,在使用硬化性矽氧烷樹脂時,有機基體係加成反應型矽氧烷樹脂、矽氧烷系交聯劑、及硬化催化劑之混合物。 Further, in the case of using a curable siloxane oxide resin as a main component of the organic substrate, a mixture of a reaction-type siloxane oxide, a siloxane-based crosslinking agent, and a curing catalyst is added to the organic system.

樹脂組成物,可以一般之塗布機等,塗布在含脫模層之樹脂薄膜等脫模性薄膜等之基材上,並在前述樹脂組成物含溶劑時以遠紅外線輻射烘箱、熱風送風等使溶劑乾燥,予以薄片化。 The resin composition can be applied to a substrate such as a release film such as a resin film containing a release layer by a general coating machine or the like, and a solvent such as a far-infrared radiation oven or a hot air supply can be used when the resin composition contains a solvent. Dry and exfoliate.

脫模層方面,可使用三聚氰胺樹脂等。同時,樹脂薄膜方面,可使用聚乙烯對苯二甲酸酯等聚酯樹脂等。 As the release layer, a melamine resin or the like can be used. Meanwhile, as the resin film, a polyester resin such as polyethylene terephthalate or the like can be used.

在樹脂組成物中之有機基體,並非硬化性環氧樹脂、及硬化性矽氧烷樹脂之類的硬化性有機基體時,可直接以前述薄片化的樹脂薄片為本發明之樹脂薄片。 When the organic substrate in the resin composition is not a curable organic substrate such as a curable epoxy resin or a curable siloxane oxide resin, the resin sheet which is directly flaky may be the resin sheet of the present invention.

此外,在有機基體係硬化性有機基體時,則可以前述中所獲得之在基材上形成的樹脂薄片,視其需要由該基材未塗布樹脂組成物面側隔該基材予以加壓,之後再加熱處理硬化,即可獲得本發明之樹脂薄片。加壓條件,以15~20MPa為佳,17~19MPa更佳。加熱條件, 亦以80~200℃為佳,100~150℃更佳。又,脫模性薄膜等基材,通常,最終係再剝離、或去除。 Further, in the case of the organic-based system curable organic substrate, the resin sheet formed on the substrate obtained as described above may be pressurized by the substrate from the uncoated resin composition side as needed. Thereafter, the resin sheet of the present invention can be obtained by heat treatment and hardening. The pressurization condition is preferably 15 to 20 MPa, and more preferably 17 to 19 MPa. Heating conditions, It is also preferably 80~200°C, and 100~150°C is better. Further, the substrate such as the release film is usually finally peeled off or removed.

如此操作所製得的本發明之樹脂薄片的膜厚,由成形性之觀點、使用該樹脂薄片的電子零件等之薄型化之觀點言之,以在50~150μm的範圍為佳,在70~140μm的範圍更佳,在100~130μm的範圍再更佳。 The film thickness of the resin sheet of the present invention obtained in this manner is preferably 50 to 150 μm in the range of 50 to 150 μm from the viewpoint of moldability and the thickness of the electronic component using the resin sheet. The range of 140 μm is better, and the range of 100 to 130 μm is even better.

又,本發明之樹脂薄片,厚度方向的熱傳導率以3W/m‧K以上為佳,7W/m‧K以上更佳,9W/m‧K以上再更佳,10W/m‧K以上又更佳,14W/m‧K以上再又更佳,18W/m‧K以上又再更佳。 Further, the resin sheet of the present invention preferably has a thermal conductivity in the thickness direction of 3 W/m‧K or more, more preferably 7 W/m ‧ or more, more preferably 9 W/m ‧ K or more, and more preferably 10 W/m ‧ K or more Good, 14W/m‧K and above is even better, and 18W/m‧K is even better.

本發明之樹脂薄片,由電絕緣性之觀點言之,以比重率為90~100%為佳,95~100%更佳,98~100%再更佳,100%又更佳。 The resin sheet of the present invention preferably has a specific gravity of 90 to 100%, more preferably 95 to 100%, more preferably 98 to 100%, and more preferably 100%, from the viewpoint of electrical insulation.

本發明之樹脂薄片,在其單面或雙面及薄片內,在提高作業性及補強的目的下以再以薄片狀、纖維狀、網狀之零件材料積層、埋設後使用較佳。 The resin sheet of the present invention is preferably used in a sheet-like, fibrous or mesh-like component material on one side or both sides and in a sheet for further improvement in workability and reinforcement.

如此操作所製得的樹脂薄片,可由脫膜性薄膜上剝下,或者,以脫膜性薄膜為保護膜之狀態,成為可提供使用為樹脂薄片之製品的形態。 The resin sheet obtained in this manner can be peeled off from the release film or the release film can be used as a protective film to provide a product which is used as a resin sheet.

再者,本發明之樹脂薄片,亦可為進而設置黏著性層在樹脂薄片的上方面或下方面的構造,如此,可更增加製品使用時之便利性。 Further, the resin sheet of the present invention may have a structure in which the adhesive layer is further provided on the upper side or the lower side of the resin sheet, so that the convenience in use of the product can be further increased.

本發明之樹脂薄片,可使用為傳導由如MPU及功率電晶體、變壓器等發熱性電子零件的熱至散熱片及 散熱風扇等散熱零件,而可夾在發熱性電子零件與散熱零件間使用。如此,可使發熱性電子零件與散熱零件間傳熱良好,因此顯著減少發熱性電子零件的不當作動。 The resin sheet of the present invention can be used to conduct heat to heat sinks of heat generating electronic parts such as MPUs and power transistors, transformers, and the like. A heat dissipating component such as a cooling fan can be used between a heat-generating electronic component and a heat-dissipating component. In this way, heat transfer between the heat-generating electronic component and the heat-dissipating component is improved, so that the non-action of the heat-generating electronic component is remarkably reduced.

[實施例] [Examples]

以下,再舉實施例及比較例更具體地說明本發明,惟本發明並不受此些例之任何限定。 Hereinafter, the present invention will be specifically described by way of Examples and Comparative Examples, but the present invention is not limited to these examples.

[實施例1] [Example 1] (1)粗製hBN粉末的製作 (1) Production of crude hBN powder

首先加入硼酸4g、三聚氰胺2g及水1g並攪拌混合,然後加入模具內經過加壓,製得密度為0.7g/cm3的成形體。然後將該成形體在乾燥機中以300℃加熱100分鐘乾燥之後者在NH3氣體下以1100℃預加熱120分鐘。再粉碎該獲得之預加熱物(粗製hBN)即可製得粗製hBN粉末(氧化硼含量為35質量%)。 First, 4 g of boric acid, 2 g of melamine, and 1 g of water were added, stirred and mixed, and then pressurized in a mold to obtain a molded body having a density of 0.7 g/cm 3 . The formed body was then dried in a dryer at 300 ° C for 100 minutes and then preheated at 1100 ° C for 120 minutes under NH 3 gas. The obtained preheated material (crude hBN) was further pulverized to obtain a crude hBN powder (boron oxide content of 35 mass%).

(2)hBN粉末之製作 (2) Production of hBN powder

之後相對於上述粗製hBN粉末100質量份,加入昭和電工公司製造之人造石墨微粉「UF-G30」10質量份為碳源、Ca化合物之碳酸鈣0.4質量份及PVA水溶液(濃度2.5質量%)10質量份,可製得相對於粗製hBN粉末100質量份碳源的碳換算含量為10質量份、Ca化合物的含量為0.4質量份之混合物。然後將該混合物以混合機攪拌混 合後,加入模具內,並經過加壓,製得密度為1.2g/cm3的成形體。再將該成形體在乾燥機中經過300℃加熱6小時乾燥獲得乾燥物。之後將該乾燥物,在高頻電爐中,以氮氣、1750℃~2200℃下、合計6小時燒成即可製得hBN燒成物。 Then, 10 parts by mass of the artificial graphite fine powder "UF-G30" manufactured by Showa Denko Co., Ltd. is used as a carbon source, 0.4 parts by mass of Ca compound calcium carbonate, and a PVA aqueous solution (concentration: 2.5% by mass) 10 based on 100 parts by mass of the above crude hBN powder. A mixture of 10 parts by mass of carbon in terms of carbon source of 100 parts by mass of the carbon source of the crude hBN powder and 0.4 parts by mass of the content of the Ca compound can be obtained. Then, the mixture was stirred and mixed by a mixer, and then introduced into a mold and pressurized to obtain a molded body having a density of 1.2 g/cm 3 . The formed body was further dried in a dryer at 300 ° C for 6 hours to obtain a dried product. Thereafter, the dried product was fired in a high-frequency electric furnace under nitrogen at 1750 ° C to 2200 ° C for 6 hours to obtain a hBN fired product.

然後將所獲得之hBN燒成物以顎式粉碎機及柱式粉碎機粉碎後,使用乾式振動篩裝置[晃榮產業公司製造,商品名「佐藤式振動篩分機」],在篩分時間60分鐘之條件下以孔徑106μm之篩網及孔徑45μm之篩網,分級為45~106μm的hBN粉末(A)及45μm篩下的hBN粉末(B)。之後對如上製得之45~106μm的hBN粉末(A)及45μm篩下的hBN粉末(B),以後述之減壓抽氣型篩分機(噴氣篩[Alpine公司製造,機種名稱「A200LS」])測定粉末含有率,45~106μm的hBN粉末(A)之孔徑106μm篩上的粉末含有率為15質量%,45μm篩下的hBN粉末(B)之孔徑45μm篩上的粉末含有率為9質量%。將45~106μm的hBN粉末(A)及45μm篩下的hBN粉末(B)以為表1所示之顆粒率地混合,即可製得實施例1中之hBN粉末。 Then, the obtained hBN fired product is pulverized by a jaw mill and a column pulverizer, and then a dry vibrating screen apparatus [manufactured by Akira Sangyo Co., Ltd., trade name "Sato-type vibrating sieving machine"] is used, and the sifting time is 60. Under a minute condition, a sieve having a pore size of 106 μm and a sieve having a pore size of 45 μm were classified into hBN powder (A) of 45 to 106 μm and hBN powder (B) of 45 μm sieve. Then, the hBN powder (A) of 45 to 106 μm and the hBN powder (B) of 45 μm sieve prepared as described above, and a vacuum evacuation type sieving machine (air-jet sieve [manufactured by Alpine, model name "A200LS"] to be described later] The powder content is determined, the powder content of the hBN powder of 45 to 106 μm (A) and the powder content of the sieve of 106 μm of the sieve are 15% by mass, and the powder content of the hBN powder (B) of 45 μm sieve is 45 μm. %. The hBN powder (A) of 45 to 106 μm and the hBN powder (B) of 45 μm sieve were mixed at a particle ratio shown in Table 1, and the hBN powder of Example 1 was obtained.

又,顆粒率係以下述之式,表示hBN粉末(A)相對於45~106μm的hBN粉末(A)及45μm篩下的hBN粉末(B)之合計量的比率。 Further, the particle ratio is a ratio of the total amount of the hBN powder (A) to the hBN powder (A) of 45 to 106 μm and the hBN powder (B) of the 45 μm sieve by the following formula.

顆粒率(質量%)=[(A)/[(A)+(B)]] Particle ratio (% by mass) = [(A) / [(A) + (B)]]

如上述操作所製得之實施例1中之hBN粉末,進而以後述之減壓抽氣型篩分機(噴氣篩[Alpine公司製造,機 種名稱「A200LS」]),篩分為孔徑106μm篩上下後,hBN粉末的孔徑106μm篩上的粉末含有率為6質量%,孔徑106μm篩下的粉末含有率為94質量%。同時,以前述之減壓抽氣型篩分機,篩分為孔徑45μm篩上下時,孔徑45μm篩下的粉末含有率為39質量%。 The hBN powder of Example 1 obtained as described above, and the vacuum evacuation type sieving machine (jet screen [Alpine Company, machine" described later) The name "A200LS"]), after the sieve was divided into a sieve having a pore size of 106 μm, the powder content of the hBN powder having a pore size of 106 μm was 6% by mass, and the powder content of the sieve having a pore size of 106 μm was 94% by mass. At the same time, the powder content of the sieve having a pore diameter of 45 μm was 39% by mass in the above-mentioned vacuum evacuation type sieving sieve when sieved into a sieve having a pore size of 45 μm.

之後以SEM觀察該hBN粉末,如第2圖所示證實含有一次粒子向隨機方向之hBN聚集體。又,第1圖,係存在在第2圖中之hBN聚集體的示意圖。 Thereafter, the hBN powder was observed by SEM, and as shown in Fig. 2, it was confirmed that the primary particles contained hBN aggregates in a random direction. Further, Fig. 1 is a schematic view showing the aggregate of hBNs present in Fig. 2.

(3)樹脂組成物的調製 (3) Modification of resin composition

有機基體方面,係使用液狀硬化性環氧樹脂[日本環氧樹脂公司製造,商品名「jER828」,雙酚A型,環氧當量184~194g/eq]100質量份與硬化劑之咪唑[四國化成工業公司製造,商品名「2E4MZ-CN」]5質量份之併用物。 For the organic substrate, a liquid curable epoxy resin (manufactured by Nippon Epoxy Resin Co., Ltd., trade name "jER828", bisphenol A type, epoxy equivalent 184 to 194 g/eq], 100 parts by mass of an imidazole with a hardener [ 5 parts by mass of the product manufactured by Shikoku Chemicals Co., Ltd., trade name "2E4MZ-CN".

首先,相對於前述之有機基體100質量份,添加前述之hBN粉末使該hBN粉末及該有機基體的總量中hBN粉末之含量為60體積%,然後以倉敷紡績公司製造之MAZERUSTAR攪拌混合,調製成樹脂組成物。 First, the hBN powder was added to the total amount of the hBN powder and the organic matrix in an amount of 60% by volume based on 100 parts by mass of the organic substrate, and then stirred and mixed with MAZERUSTAR manufactured by Kurabo Industries. A resin composition.

又,前述hBN粉末的體積基準之含量(體積%),可由hBN粉末之比重(2.27)及使用為有機基體之液狀硬化性環氧樹脂的比重(1.17)求出。 Further, the volume-based content (% by volume) of the hBN powder can be determined from the specific gravity of the hBN powder (2.27) and the specific gravity (1.17) of the liquid curable epoxy resin used as the organic matrix.

(4)樹脂薄片的製作 (4) Production of resin sheets

係在裁切為橫10.5cm、縱13cm之脫模薄膜上,使用模具以硬化膜厚為500μm以下之方式成形之後,連同模具夾於脫模薄膜間,隔脫模薄膜,在120℃、18MPa的條件下壓著10分鐘,使樹脂組成物硬化,製作成樹脂薄片。 After being cut into a release film having a width of 10.5 cm and a length of 13 cm, and using a mold to form a cured film having a thickness of 500 μm or less, the mold is sandwiched between the release films, and the release film is separated at 120 ° C and 18 MPa. The resin composition was cured by pressing for 10 minutes under conditions, and a resin sheet was produced.

[實施例2] [Embodiment 2]

在實施例1之(2)中,除相對於上述粗製hBN粉末100質量份加入調配量為5質量份的人造石墨微粉以外如實施例1同樣操作,製作hBN粉末、樹脂組成物及樹脂薄片。 In (2) of the first embodiment, the hBN powder, the resin composition, and the resin sheet were produced in the same manner as in Example 1 except that the artificial graphite fine powder having a blending amount of 5 parts by mass was added to 100 parts by mass of the above-mentioned crude hBN powder.

[實施例3] [Example 3]

在實施例1之(2)中,除以上述顆粒率為80質量%之方式混合45~106μm的hBN粉末(A)及45μm篩下的hBN粉末(B)以外如實施例1同樣操作,製作hBN粉末、樹脂組成物及樹脂薄片。 In (2) of Example 1, the same procedure as in Example 1 was carried out except that the above-mentioned particle ratio was 80% by mass, and the hBN powder (A) of 45 to 106 μm and the hBN powder (B) of 45 μm sieve were mixed. hBN powder, resin composition and resin sheet.

[實施例4] [Example 4]

在實施例1之(2)中,除相對於上述粗製hBN粉末100質量份加入調配量為5質量份的人造石墨微粉、及以顆粒率為80質量%之方式混合45~106μm的hBN粉末(A)及45μm篩下的hBN粉末(B)以外如實施例1同樣操作,製作hBN粉末、樹脂組成物及樹脂薄片。 In (2) of the first embodiment, the artificial graphite fine powder having a blending amount of 5 parts by mass is added to 100 parts by mass of the above-mentioned crude hBN powder, and the hBN powder of 45 to 106 μm is mixed at a particle ratio of 80% by mass ( A) The hBN powder, the resin composition, and the resin sheet were produced in the same manner as in Example 1 except that the hBN powder (B) under a 45 μm sieve was used.

[實施例5] [Example 5]

在實施例1之(2)中,除相對於上述粗製hBN粉末100質量份加入調配量為8質量份(碳換算8質量份)的人造石墨微粉,且添加碳化硼(理研金剛砂公司製造)10質量份(碳換算2.2質量份),並相對於粗製hBN粉末100質量份以碳換算含量為10.2質量份混合碳源,再以顆粒率為80質量%之方式混合45~106μm的hBN粉末(A)及45μm篩下的hBN粉末(B)以外如實施例1同樣操作,製作hBN粉末、樹脂組成物及樹脂薄片。 In the (2) of the first embodiment, the artificial graphite fine powder having a blending amount of 8 parts by mass (8 parts by mass in terms of carbon) was added to 100 parts by mass of the above-mentioned crude hBN powder, and boron carbide (manufactured by Riken Emery Co., Ltd.) was added. In a mass fraction (2.2 parts by mass in terms of carbon), a mixed carbon source is contained in an amount of 10.2 parts by mass based on 100 parts by mass of the crude hBN powder, and then mixed with 45 to 106 μm of hBN powder at a particle ratio of 80% by mass (A) In the same manner as in Example 1 except that the hBN powder (B) under a 45 μm sieve was used, a hBN powder, a resin composition, and a resin sheet were produced.

[比較例1] [Comparative Example 1]

在實施例1之(2)中,除不添加相對於上述粗製hBN粉末100質量份之Ca化合物(碳酸鈣),而且,以顆粒率為60質量%之方式混合45~106μm的hBN粉末(A)及45μm篩下的hBN粉末(B)以外,如實施例1同樣操作,製作hBN粉末、樹脂組成物及樹脂薄片。 In the (2) of the first embodiment, the Ca compound (calcium carbonate) is added in an amount of 100 parts by mass based on the above-mentioned crude hBN powder, and the bBN powder of 45 to 106 μm is mixed in such a manner that the particle ratio is 60% by mass (A) In the same manner as in Example 1, except that the hBN powder (B) under a 45 μm sieve was used, a hBN powder, a resin composition, and a resin sheet were produced.

[比較例2] [Comparative Example 2]

係以商品A使用前述乾式振動篩裝置及以孔徑106μm篩網及孔徑45μm篩網,以篩分時間60分鐘之條件,分級為45~106μm之hBN粉末(A)及45μm篩下的hBN粉末(B)。之後除以顆粒率為60質量%之方式混合該45~106μm之hBN粉末(A)(孔徑106μm篩上之粉末含有率為2質 量%)及45μm篩下的hBN粉末(B)(孔徑45μm篩上之粉末含有率為4質量%)以外如實施例1同樣操作,製作hBN粉末、樹脂組成物及樹脂薄片。 Using the above-mentioned dry vibrating screen apparatus and the hBN powder (A) of 45-106 μm and the hBN powder of 45 μm sieve by using a sieve having a pore size of 106 μm and a sieve having a pore size of 45 μm for 60 minutes. B). Thereafter, the 45-106 μm hBN powder (A) was mixed in such a manner that the particle ratio was 60% by mass (the powder content on the sieve having a pore size of 106 μm was 2 The hBN powder, the resin composition, and the resin sheet were produced in the same manner as in Example 1 except that the hBN powder (B) in a 45 μm sieve (the powder content on the sieve having a pore size of 45 μm was 4% by mass).

[比較例3] [Comparative Example 3]

在實施例1之(2)中,除不添加相對於上述粗製hBN粉末100質量份之Ca化合物(碳酸鈣),而且,以顆粒率為80質量%之方式混合45~106μm的hBN粉末(A)及45μm篩下的hBN粉末(B)以外,如實施例1同樣操作,製作hBN粉末、樹脂組成物及樹脂薄片。 In (2) of Example 1, except that 100 parts by mass of the Ca compound (calcium carbonate) with respect to the above-mentioned crude hBN powder was not added, and 45 to 106 μm of hBN powder was mixed at a particle ratio of 80% by mass (A) In the same manner as in Example 1, except that the hBN powder (B) under a 45 μm sieve was used, a hBN powder, a resin composition, and a resin sheet were produced.

[比較例4] [Comparative Example 4]

除將比較例2中所使用之商品A之45~106μm的hBN粉末(A)(孔徑106μm篩上之粉末含有率為2質量%)及45μm篩下的hBN粉末(B)(孔徑45μm篩上之粉末含有率為4質量%)以顆粒率為80質量%之方式混合以外如實施例1同樣操作,製作hBN粉末、樹脂組成物及樹脂薄片。 In addition to the commercial product A used in Comparative Example 2, the 45-106 μm hBN powder (A) (the powder content on the 106 μm sieve is 2% by mass) and the 45 μm sieve hBN powder (B) (pore size 45 μm on the sieve) The powder content was 4% by mass. The mixture was mixed in the same manner as in Example 1 except that the pellet ratio was 80% by mass. The hBN powder, the resin composition and the resin sheet were produced.

[比較例5] [Comparative Example 5]

在實施例1之(2)中,除將相對於上述粗製hBN粉末100質量份的石墨微粉及Ca化合物(碳酸鈣)變更為碳化硼(理研金剛砂公司製造)30質量份(碳換算6.6質量份),且以顆粒率為80質量%之方式混合45~106μm的hBN粉末 (A)及45μm篩下的hBN粉末(B)以外如實施例1同樣操作,製作hBN粉末、樹脂組成物及樹脂薄片。 In (2) of the first embodiment, in addition to 100 parts by mass of the graphite fine powder and the Ca compound (calcium carbonate) with respect to the crude hBN powder, 30 parts by mass of boron carbide (manufactured by Riken Emery Co., Ltd.) was changed (6.6 parts by mass in terms of carbon). And mixing 45-106 μm of hBN powder in a manner of a particle ratio of 80% by mass The hBN powder, the resin composition, and the resin sheet were produced in the same manner as in Example 1 except that the (H) and the hBN powder (B) under a 45 μm sieve were used.

[評量] [rating]

之後再對所獲得之粗製hBN粉末、hBN粉末、樹脂組成物及樹脂薄片,進行以下之評量。 Thereafter, the obtained crude hBN powder, hBN powder, resin composition, and resin sheet were subjected to the following evaluation.

(粗製hBN粉末中,氧化硼之含量) (content of boron oxide in crude hBN powder)

在粗製hBN粉末方面,該粉末可認為由表面的氧化硼(以下,亦稱為「B2O3」。)及內部的B-O-N鍵結構造所構成。且構成粗製hBN的B-O-N鍵結構造內部之氧,在以粗製hBN粉末製造hBN粉末時之燒成步驟中可由高溫熱處理而進行反應,使表面緩緩滲出B2O3。因此,與以粗製hBN粉末製造hBN粉末時之碳源之碳反應的B2O3在粗製hBN粉末中之含量,可以表面的B2O3量與內部之氧的B2O3換算量之總量求得。 In terms of the crude hBN powder, the powder is considered to be composed of boron oxide (hereinafter also referred to as "B 2 O 3 ") on the surface and an internal BON bond structure. Further, the BON bond structure constituting the crude hBN is used to form the internal oxygen, and in the firing step in the case of producing the hBN powder from the crude hBN powder, the reaction can be carried out by high-temperature heat treatment to gradually exude B 2 O 3 from the surface. Accordingly, the content of B and C when the reaction of the carbon source to the crude powder of hBN powder production hBN 2 O 3 in the crude powder of hBN, the surface may be B 2 O 3 and the amount of oxygen inside the B 2 O 3 in terms of the amount of The total amount is obtained.

表面的B2O3量,可以酸處理使粗製hBN粉末表面的B2O3溶出,再測定以酸處理所溶解的B2O3量,內部之氧的B2O3換算量,可以處理後之餘渣進行氧分析,測定餘渣中的氧量,即可獲得B2O3換算量。 2 O 3 amount B surface may be acid treatment B crude hBN powder surface 2 O 3 eluted, and then determining the amount of the acid treatment dissolved B 2 O 3, oxygen inside the B 2 O 3 in terms of quantity, can be processed The remaining residue is subjected to oxygen analysis, and the amount of oxygen in the residual slag is measured to obtain a B 2 O 3 equivalent amount.

具體地,係如下之情形。其中粗製hBN粉末係先以0.1N稀硫酸溶液進行酸處理。 Specifically, the following is the case. The crude hBN powder was first acid treated with a 0.1 N dilute sulfuric acid solution.

以該酸處理之粗製hBN粉末中BN水解所產生之氨量係以分光光度計[日立製作所公司製造,機種名稱「U- 1100」]測定,再以該氨量,計算出由BN水解所產生之B元素的量。又,酸處理後酸溶液中所存在的B元素之總量(來自於BN水解的B元素之量與來自於B2O3溶解的B元素之量的總量)係以ICP分析裝置[SII Nano Technology Inc.公司製造,機種名稱「SPS3500」]測定。之後以該酸處理後酸溶液中所存在的B元素之總量與上述氨量所換算之來自於BN水解的B元素之量,即可計算出由酸處理所溶解之B2O3量。 The amount of ammonia produced by hydrolysis of BN in the crude hBN powder treated with the acid was measured by a spectrophotometer [manufactured by Hitachi, Ltd., model name "U-1100"), and the amount of ammonia was used to calculate the hydrolysis by BN. The amount of B element. Further, the total amount of the B element present in the acid solution after the acid treatment (the total amount of the B element derived from the BN hydrolysis and the amount of the B element derived from the B 2 O 3 dissolution) is determined by an ICP analyzer [SII]. Manufactured by Nano Technology Inc., model name "SPS3500"]. Then, the amount of B 2 O 3 dissolved by the acid treatment can be calculated from the total amount of the B element present in the acid solution after the acid treatment and the amount of the B element derived from the BN hydrolysis in terms of the amount of the ammonia.

再者,餘渣中的氧量係以氧測定裝置「LECO日本合同公司製造,機種名稱「TC-600」測定,並由該測定值,計算出B2O3換算量。 In addition, the amount of oxygen in the residual slag is measured by an oxygen measuring device "LECO Japan Contract Company, model name "TC-600", and the amount of B 2 O 3 is calculated from the measured value.

以如此操作所求出,由酸處理所溶解之B2O3量及B2O3換算量之總量、與供應酸處理的粗製hBN粉末之總量,即可計算出粗製hBN粉末中氧化硼的含量(B2O3含量)。 Obtained in such operation, in terms of the total amount of the dissolved by the acid treatment and the amount of B 2 O 3 B 2 O 3, the total amount of the crude powder of hBN supply acid treatment, can be calculated in the crude oxidation hBN powder Boron content (B 2 O 3 content).

(hBN粉末的一次粒子粒徑) (primary particle size of hBN powder)

然後以實施例及比較例中所獲得的hBN粉末攝製SEM照像,再對選自SEM照像內的任意之100個hBN一次粒子,測定長徑之長度,以長徑的數值平均值為hBN粉末的一次粒子粒徑。 Then, the SEM photographs were taken with the hBN powders obtained in the examples and the comparative examples, and then the length of the long diameter was measured for any 100 hBN primary particles selected from the SEM photographs, and the numerical average of the long diameters was hBN. Primary particle size of the powder.

(hBN粉末的一次粒子之比率(長徑/厚度)) (The ratio of primary particles of hBN powder (long diameter / thickness))

係以實施例及比較例中所獲得的hBN粉末攝製SEM 照像,再對選自SEM照像內的任意之100個hBN一次粒子,測定長徑及厚度,以長徑的數值平均值與厚度的數值平均值,計算出一次粒子的長徑與厚度之比率(長徑/厚度)。 Filming SEM with hBN powder obtained in the examples and comparative examples Photographing, measuring the long diameter and thickness of any 100 hBN primary particles selected from the SEM image, and calculating the long diameter and thickness of the primary particle by the numerical average of the long diameter and the numerical average of the thickness. Ratio (long diameter / thickness).

(BET比表面積) (BET specific surface area)

係對實施例及比較例中所獲得的hBN粉末,以全自動BET比表面積測定裝置[YUASA Ionics公司製造,機種名稱「MULTISORB 16」],測定比表面積。 The hBN powder obtained in the examples and the comparative examples was measured for a specific surface area by a fully automatic BET specific surface area measuring device [manufactured by YUASA Ionics Co., Ltd., model name "MULTISORB 16").

(hBN粉末的50%體積累積粒徑(D50)) (50% volume cumulative particle size (D 50 ) of hBN powder)

係以粒度分布儀[日機裝公司製造,機種名稱「Microtrac MT3300EXII」]測定hBN粉末體積基準的50%體積累積粒徑(D50)。 The 50% volume cumulative particle diameter (D 50 ) of the hBN powder volume basis was measured by a particle size distribution analyzer [manufactured by Nikkiso Co., Ltd., model name "Microtrac MT3300EXII").

粒度分布測定係使用實施例及比較例中所獲得之hBN粉末0.06g在純水50g中經過超音波處理3分鐘所調製之分散液操作。超音波處理係以功率150W、振盪頻率19.5kHz的條件使用超音波處理裝置[日本精機製作所公司製造,機種名稱「超音波均質機US-150V」]操作。 The particle size distribution measurement was carried out by using 0.06 g of hBN powder obtained in Examples and Comparative Examples, and a dispersion prepared by ultrasonic treatment for 3 minutes in 50 g of pure water. The ultrasonic processing was performed using an ultrasonic processing device [manufactured by Nippon Seiki Co., Ltd., model name "Ultrasonic homogenizer US-150V") under the conditions of a power of 150 W and an oscillation frequency of 19.5 kHz.

(孔徑106μm篩下及孔徑106μm篩上的hBN粉末含有率) (HBN powder content on a sieve having a pore size of 106 μm and a sieve having a pore size of 106 μm)

先準備直徑20cm、高4.5cm的孔徑106μm之篩網,放上實施例及比較例中所獲得之hBN粉末10g,並裝置於減壓抽氣型篩分機[Alpine公司製造,機種名稱「噴氣篩 A200LS」]上。之後由篩網下方處以壓差1kPa吸取粉末,以篩分時間360秒,進行篩分。然後測定餘留在篩網下方及篩網上方的hBN粉末之重量,並計算出孔徑106μm篩下的hBN粉末含有率(孔徑106μm篩下粉末含有率)及孔徑106μm篩上的hBN粉末含有率(孔徑106μm篩上粉末含有率)。 First, a sieve having a diameter of 20 cm and a diameter of 4.5 cm and a diameter of 106 μm was prepared, and 10 g of the hBN powder obtained in the examples and the comparative examples was placed, and placed in a vacuum-extracting type sieving machine [manufactured by Alpine Co., Ltd., model name "jet screen" A200LS"]. Thereafter, the powder was taken up by a pressure difference of 1 kPa from the lower portion of the screen, and sieved for 360 seconds for screening. Then, the weight of the hBN powder remaining under the screen and on the screen was measured, and the hBN powder content (the pore diameter of the pore size of 106 μm) and the hBN powder content of the sieve having a pore size of 106 μm were calculated. The pore diameter of the sieve was 106 μm.

又,實施例及比較例中所獲得之hBN燒成物在粉碎後,使用孔徑106μm的前述乾式振動篩裝置,以篩分時間60分鐘之條件進行分級後,hBN粉末可全部通過孔徑106μm的篩網。 Further, after the hBN fired product obtained in the examples and the comparative examples was pulverized, the dry vibrating screen apparatus having a pore size of 106 μm was used, and after classification by a sieving time of 60 minutes, the hBN powder was all passed through a sieve having a pore size of 106 μm. network.

(孔徑45μm篩下的hBN粉末含有率) (hBN powder content under a 45 μm pore size sieve)

先準備直徑20cm、高4.5cm的孔徑45μm之篩網,放上實施例及比較例中所獲得之hBN粉末10g,並裝置於減壓抽氣型篩分機[Alpine公司製造,機種名稱「噴氣篩A200LS」]上。之後由篩網下方處以壓差1kPa吸取粉末,以篩分時間180秒,進行篩分。然後測定餘留在篩網下方及篩網上方的hBN粉末之重量,並計算出孔徑45μm篩下的hBN粉末含有率(孔徑45μm篩下粉末含有率)。 First, a sieve having a diameter of 20 cm and a diameter of 4.5 cm and a diameter of 45 μm was prepared, and 10 g of the hBN powder obtained in the examples and the comparative examples was placed, and placed in a vacuum-extracting type sieving machine [manufactured by Alpine Co., Ltd., the model name "jet screen" A200LS"]. Thereafter, the powder was taken up by a pressure difference of 1 kPa from the lower portion of the screen, and sieved for 180 seconds to carry out sieving. Then, the weight of the hBN powder remaining under the sieve and on the sieve was measured, and the hBN powder content (the pore diameter of 45 μm under the sieve) of the sieve having a pore size of 45 μm was calculated.

(hBN粉末的體積密度) (volume density of hBN powder)

係在300mL定量量筒中置入實施例及比較例中所獲得之hBN粉末100g,再以振盪機振盪3分鐘後之hBN粉末的振盪體積密度測定體積密度。 100 g of the hBN powder obtained in the examples and the comparative examples was placed in a 300 mL quantitative cylinder, and the bulk density was measured by the oscillation bulk density of the hBN powder after shaking for 3 minutes with a shaker.

(hBN粉末的成形體及粗製hBN粉末的成形體之密度) (The density of the formed body of the hBN powder and the formed body of the crude hBN powder)

係測定成形體的質量及體積,以該些值,計算出成形體之密度。 The mass and volume of the molded body were measured, and the density of the molded body was calculated at these values.

(波峰減少率) (peak reduction rate)

本發明中,波峰減少率的測定係使用雷射光繞射散射法之粒度分布儀[日機裝公司製造,機種名稱「Microtrac MT3300EXII」]操作。 In the present invention, the measurement of the peak reduction rate is performed by a particle size distribution analyzer manufactured by a laser diffraction scattering method [manufactured by Nikkiso Co., Ltd., model name "Microtrac MT3300EXII"].

將實施例及比較例的hBN燒成物粉碎後,再將孔徑106μm及孔徑45μm的篩網2段重疊來使用,以前述乾式振動篩裝置(篩分時間60分鐘)所分級而含45~106μm粒徑之hBN粉末0.06g分散於水50g之中調製成分散液。然後以該分散液在功率150W、振盪頻率19.5kHz的條件下經過超音波處理1分鐘後出現在45~150μm之間的最大波峰與在超音波處理前出現在45~150μm之間的最大波峰比較。第7圖,為實施例1及3的粒徑分布曲線圖。該圖中,係所計算出之波峰減少率[=[(處理前之最大波峰高(a))-(處理後之最大波峰高(b))]/(處理前之最大波峰高(a))]。該波峰減少率越低亦即崩解強度越高。又,本發明中超音波處理,係使用超音波處理裝置[日本精機製作所公司製造,機種名稱「超音波均質機US-150V」]操作。 After the hBN fired products of the examples and the comparative examples were pulverized, a sieve having a pore diameter of 106 μm and a pore diameter of 45 μm was superposed and used in two stages, and the dry vibrating screen apparatus (screening time of 60 minutes) was classified and contained 45 to 106 μm. 0.06 g of the particle size hBN powder was dispersed in 50 g of water to prepare a dispersion. Then, the maximum peak between 45 and 150 μm after ultrasonic treatment for 1 minute at the power of 150 W and the oscillation frequency of 19.5 kHz is compared with the maximum peak between 45 and 150 μm before the ultrasonic treatment. . Fig. 7 is a graph showing the particle size distribution of Examples 1 and 3. In the figure, the peak reduction rate calculated is [=[(maximum peak height (a) before processing) - (maximum peak height after processing (b))] / (maximum peak height before processing (a) )]. The lower the peak reduction rate, that is, the higher the disintegration strength. Further, in the present invention, the ultrasonic processing is performed using an ultrasonic processing device [manufactured by Nippon Seiki Co., Ltd., model name "ultrasonic homogenizer US-150V").

再者,比較例2及4中,取代上述hBN燒成物係使用商品A。 Further, in Comparative Examples 2 and 4, the product A was used instead of the hBN fired product.

(hBN粉末的微晶直徑) (crystallite diameter of hBN powder)

係以X射線繞射測定,計算出實施例及比較例中所獲得之hBN粉末的微晶直徑。X射線繞射測定裝置方面,係使用以PANalytical公司製造,機種名稱「X’Pert PRO」,且使用銅靶材並使用Cu-Kα1射線。 The crystallite diameter of the hBN powder obtained in the examples and the comparative examples was calculated by X-ray diffraction measurement. For the X-ray diffraction measuring apparatus, a model name "X'Pert PRO" manufactured by PANalytical Co., Ltd. was used, and a copper target was used and Cu-Kα1 ray was used.

(hBN粉末的氧化硼(B2O3)含量、CaO含量) (Boron oxide (B 2 O 3 ) content, CaO content of hBN powder)

先將實施例及比較例中所獲得之hBN粉末以0.1N稀硫酸溶液酸處理。經過該酸處理,至少可使hBN粉末中之BN部分水解產生氨並同時使BN的B元素溶於酸溶液中,而且,至少可使hBN粉末中之氧化硼(B2O3)部分溶於酸溶液中。 The hBN powder obtained in the examples and the comparative examples was first acid-treated with a 0.1 N diluted sulfuric acid solution. After the acid treatment, at least part of the BN in the hBN powder can be hydrolyzed to produce ammonia while the B element of the BN is dissolved in the acid solution, and at least the boron oxide (B 2 O 3 ) in the hBN powder can be partially dissolved. In an acid solution.

酸處理後酸溶液中所存在的B元素之總量(來自於BN水解之B元素量與來自於B2O3溶解之B元素量的總量)再以ICP分析裝置[SII Nano Technology Inc.公司製造,機種名稱「SPS3500」]測定。然後以該酸處理後酸溶液中所存在的B元素之總量,計算出酸處理所溶解之B2O3量。 The total amount of B element present in the acid solution after acid treatment (the amount of B element derived from BN hydrolysis and the total amount of B element dissolved from B 2 O 3 ) is then used as an ICP analyzer [SII Nano Technology Inc. The company manufactures the model name "SPS3500"]. Then, the amount of B 2 O 3 dissolved in the acid treatment was calculated from the total amount of the B element present in the acid solution after the acid treatment.

上述酸處理後酸溶液中所存在的Ca元素可以上述ICP分析裝置測定,再以Ca元素量計算出CaO含量。 The Ca element present in the acid solution after the above acid treatment can be measured by the above-described ICP analyzer, and the CaO content can be calculated from the amount of Ca element.

(hBN粉末中之碳的含量) (content of carbon in hBN powder)

係以碳分析裝置[LECO日本合同公司製造,機種名稱「CS230」],測定實施例及比較例中所獲得之hBN粉末 中之碳的含量(碳含量)。 The hBN powder obtained in the examples and the comparative examples was measured by a carbon analyzer (manufactured by LECO Japan Contract Co., Ltd., model name "CS230"). The content of carbon (carbon content).

(hBN粉末的純度) (purity of hBN powder)

係以如上述操作所測定的hBN粉末中之B2O3量、CaO含量及碳含量的總量為不純物量,求出hBN粉末的純度。 The total amount of B 2 O 3 , CaO content, and carbon content in the hBN powder measured as described above was the amount of impurities, and the purity of the hBN powder was determined.

(黑色異物數) (black foreign object number)

係在50cc螺旋蓋管中稱取實施例及比較例中所獲得之hBN粉末1g,並在其中加入甲醇約40cc均勻攪拌後,在經過3小時以上之階段掃描並攝影螺旋蓋管底部,再測定該影像中黑色物存在之數目(黑色異物數)。再者,該黑色物,認為係未反應之碳成分。 1 g of the hBN powder obtained in the examples and the comparative examples was weighed in a 50 cc screw cap tube, and after adding about 40 cc of methanol to the mixture, the mixture was stirred for 3 hours or more, and the bottom of the spiral cap tube was photographed and then measured. The number of black objects in the image (the number of black foreign objects). Further, the black matter is considered to be an unreacted carbon component.

(樹脂薄片的熱傳導率) (thermal conductivity of resin sheet)

係對實施例及比較例中所獲得之樹脂薄片,以NETZSCH公司製造,機種名稱「LFA447 NanoFlash」測定熱擴散率,再以其乘以各樹脂薄片的比熱及密度之理論值所計算出的值,作為樹脂薄片厚度方向之熱傳導率。 The resin sheets obtained in the examples and the comparative examples were measured by the NETZSCH company, and the model name "LFA447 NanoFlash" was used to measure the thermal diffusivity, and then multiplied by the theoretical value of the specific heat and density of each resin sheet. As the thermal conductivity of the thickness direction of the resin sheet.

再者,各實施例或比較例的樹脂薄片之密度之理論值,係以氮化硼的理論密度為2.27g/cm3、樹脂成分的理論密度為1.17g/cm3計算。 Further, the theoretical values of the densities of the resin sheets of the respective examples or comparative examples were calculated by the theoretical density of boron nitride being 2.27 g/cm 3 and the theoretical density of the resin component being 1.17 g/cm 3 .

(樹脂薄片的比重率) (specific gravity ratio of resin sheet)

實施例及比較例中所獲得之樹脂薄片的比重率,係以使用Sartorius Mechanitronics日本公司製造之電子天秤(機種名稱「CP224S」)及比重/密度測定套組(機種名稱「YDK01/YDK01-OD/YDK01LP」)而以阿基米德法所測定的各實施例或比較例的樹脂薄片之比重,除以各實施例或比較例的樹脂薄片之理論比重,以100倍[(各實施例或比較例的樹脂薄片所測定之比重/各實施例或比較例的樹脂薄片之理論比重)×100]計算出。 The specific gravity ratio of the resin sheet obtained in the examples and the comparative examples was measured using an electronic scale (model name "CP224S") manufactured by Sartorius Mechanitronics Japan Co., Ltd. and a specific gravity/density measuring kit (model name "YDK01/YDK01-OD/ YDK01LP") and the specific gravity of the resin sheet of each of the examples or the comparative examples measured by the Archimedes method is divided by the theoretical specific gravity of the resin sheets of the respective examples or comparative examples by 100 times [(Examples or comparisons) The specific gravity measured by the resin sheet of the example/the theoretical specific gravity of the resin sheet of each of the examples or the comparative examples) × 100] was calculated.

再者,各實施例或比較例的樹脂薄片之理論比重的計算中,係以氮化硼的理論密度為2.27g/cm3、樹脂成分的理論密度為1.17g/cm3計算。 Further, in the calculation of the theoretical specific gravity of the resin sheet of each of the examples or the comparative examples, the theoretical density of boron nitride was 2.27 g/cm 3 and the theoretical density of the resin component was 1.17 g/cm 3 .

(絕緣破壞電壓) (insulation breakdown voltage)

係對實施例及比較例中所獲得的樹脂薄片,使用菊水電子工業公司製造之耐電壓/絕緣電阻測定裝置(機種名稱「TOS9201」),以1kV/sec之電壓上昇速度測定絕緣破壞電壓。 For the resin sheets obtained in the examples and the comparative examples, the withstand voltage/insulation resistance measuring device (model name "TOS9201") manufactured by Kikusui Electronics Co., Ltd. was used, and the dielectric breakdown voltage was measured at a voltage increase rate of 1 kV/sec.

以上之實施例及比較例的hBN粉末之製作條件如表1,評量結果如表2所示。 The production conditions of the hBN powders of the above examples and comparative examples are shown in Table 1, and the evaluation results are shown in Table 2.

再者,表1中之碳源及Ca化合物,係表示在製作hBN粉末時,相對於以粗製hBN粉末、碳源及Ca化合物混合所獲得之混合物中粗製hBN粉末100質量份之含量。同時,表1中之hBN粉末(A)及(B),各表示45~106μm的hBN粉末(A)及45μm篩下的hBN粉末(B)。 In addition, the carbon source and the Ca compound in Table 1 represent the content of 100 parts by mass of the crude hBN powder in the mixture obtained by mixing the crude hBN powder, the carbon source and the Ca compound in the preparation of the hBN powder. Meanwhile, the hBN powders (A) and (B) in Table 1 each represent a hBN powder (A) of 45 to 106 μm and a hBN powder (B) of a sieve of 45 μm.

[表2] [Table 2]

如表2所示,實施例1~5的樹脂薄片,與比較例1~5的樹脂薄片比較,可知熱傳導率高,且耐電壓特性亦優異,可同時滿足高熱傳導性及高電絕緣性。此情形,可認為該係由於本發明之hBN粉末,在攪拌混合時hBN粉末的一次粒子之聚集體未過度破壞,可維持如第6圖之示意圖所示的顆粒形狀,因此使該聚集體具有適當的強度,而與樹脂成分性質相近。而且,本發明之hBN粉末,碳含量低而純度高亦認為有助於優良電絕緣性的發現。並且,亦可知實施例1及2的hBN粉末,由於45μm篩下粉末之含有率在特定的範圍而適度地含有粒徑小的 hBN粉末,因此在維持良好的熱傳導性之下,電絕緣性亦佳。 As shown in Table 2, the resin sheets of Examples 1 to 5 were found to have high thermal conductivity and excellent withstand voltage characteristics as compared with the resin sheets of Comparative Examples 1 to 5, and were able to satisfy both high thermal conductivity and high electrical insulating properties. In this case, it is considered that the aggregate of primary particles of the hBN powder is not excessively broken due to the hBN powder of the present invention, and the particle shape as shown in the schematic diagram of Fig. 6 can be maintained, thereby making the aggregate have Appropriate strength, similar to the nature of the resin composition. Further, the hBN powder of the present invention is considered to have a low carbon content and a high purity, and is considered to contribute to the discovery of excellent electrical insulation properties. Further, it is also known that the hBN powders of Examples 1 and 2 suitably contain a small particle diameter because the content of the powder under the 45 μm sieve is in a specific range. hBN powder, therefore, electrical insulation is also good under the maintenance of good thermal conductivity.

Claims (9)

一種六方晶氮化硼粉末,其係包含六方晶氮化硼一次粒子的聚集體且孔徑106μm篩下的粉末含有率為80質量%以上之六方晶氮化硼粉末,其中50%體積累積粒徑D50為10~20μm、微晶直徑為260~1000Å,且,於分級為45~106μm粒徑之前述六方晶氮化硼粉末之粒徑分布曲線中,於粒徑45~150μm範圍內具有1個最大波峰,對將分級為45~106μm粒徑之前述六方晶氮化硼粉末分散於水中而獲得之分散液進行1分鐘超音波處理後,以下述式(1)所計算出最大波峰的波峰減少率為40~90%,波峰減少率=[(處理前之最大波峰高(a))-(處理後之最大波峰高(b))]/(處理前之最大波峰高(a)) (1)。 A hexagonal boron nitride powder comprising an aggregate of hexagonal boron nitride primary particles and a hexagonal crystal boron nitride powder having a powder content of 80% by mass or more in a pore size of 106 μm, wherein 50% by volume cumulative particle diameter The D 50 is 10-20 μm, the crystallite diameter is 260-1000 Å, and the particle size distribution curve of the hexagonal boron nitride powder having a particle size of 45-106 μm is 1 in the range of 45-150 μm. The maximum peak, the peak obtained by dispersing the above-mentioned hexagonal boron nitride powder having a particle size of 45 to 106 μm in water and dispersing it in water for 1 minute, and calculating the peak of the largest peak by the following formula (1) The reduction rate is 40 to 90%, and the peak reduction rate = [(maximum peak height before treatment (a)) - (maximum peak height after treatment (b))] / (maximum peak height before treatment (a)) ( 1). 如請求項1之六方晶氮化硼粉末,其中孔徑45μm篩下的粉末含有率為45質量%以下。 The hexagonal boron nitride powder of claim 1, wherein the powder content under a sieve having a pore size of 45 μm is 45% by mass or less. 如請求項1或2之六方晶氮化硼粉末,其中BET比表面積為1.5~10m2/g。 The hexagonal boron nitride powder according to claim 1 or 2, wherein the BET specific surface area is from 1.5 to 10 m 2 /g. 如請求項1或2之六方晶氮化硼粉末,其中體積密度為0.3g/cm3以上。 The hexagonal boron nitride powder according to claim 1 or 2, wherein the bulk density is 0.3 g/cm 3 or more. 一種樹脂組成物,係含有10~90體積%的如請求項1~4中任一項之六方晶氮化硼粉末。 A resin composition containing 10 to 90% by volume of the hexagonal boron nitride powder according to any one of claims 1 to 4. 一種樹脂薄片,係由如請求項5之樹脂組成物或其硬化物所構成。 A resin sheet comprising the resin composition of claim 5 or a cured product thereof. 一種如請求項1~4中任一項之六方晶氮化硼粉末之製造方法,其係具有將包含氮化硼20~90質量%及氧 化硼10~80質量%之粗製六方晶氮化硼粉末100質量份、以碳換算3~15質量份之碳源與0.01~1質量份之鈣化合物進行混合且成形之後於包含氮氣之環境下進行燒成之燒成步驟。 A method for producing a hexagonal boron nitride powder according to any one of claims 1 to 4, which comprises containing 20 to 90% by mass of boron nitride and oxygen 100 parts by mass of a crude hexagonal boron nitride powder having a boron content of 10 to 80% by mass, a carbon source of 3 to 15 parts by mass in terms of carbon, and a calcium compound of 0.01 to 1 part by mass are mixed and formed in an atmosphere containing nitrogen. The firing step of firing is performed. 如請求項7之六方晶氮化硼粉末之製造方法,其中前述碳源為選自石墨及碳化硼中之1種或2種。 The method for producing a hexagonal boron nitride powder according to claim 7, wherein the carbon source is one or two selected from the group consisting of graphite and boron carbide. 如請求項7或8之六方晶氮化硼粉末之製造方法,其中進而具有於前述燒成步驟後使用孔徑106μm之篩及孔徑45μm之篩,分級為45~106μm之六方晶氮化硼粉末[hBN粉末(A)]與45μm篩下之六方晶氮化硼粉末[hBN粉末(B)]後,將hBN粉末(A)與hBN粉末(B)混合成為相對於hBN粉末(A)及(B)的合計量之hBN粉末(A)的比率為40~90質量%之混合步驟。 The method for producing a hexagonal boron nitride powder according to claim 7 or 8, further comprising a sieve having a pore size of 106 μm and a sieve having a pore size of 45 μm after the calcination step, and a hexagonal boron nitride powder having a classification of 45 to 106 μm [ After the hBN powder (A)] and the hexagonal boron nitride powder [hBN powder (B)] under a 45 μm sieve, the hBN powder (A) and the hBN powder (B) are mixed to form the hBN powder (A) and (B). The mixing ratio of the total amount of the hBN powder (A) is 40 to 90% by mass.
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